WO2023284749A1

WO2023284749A1 - Side-feeding monocrystal furnace

Info

Publication number: WO2023284749A1
Application number: PCT/CN2022/105269
Authority: WO
Inventors: 朱永刚; 周锐; 李侨; 董林; 赵群力; 曹杰; 史少强; 马晓康
Original assignee: 隆基绿能科技股份有限公司
Priority date: 2021-07-15
Filing date: 2022-07-12
Publication date: 2023-01-19
Also published as: CN115613122A; EP4372128A1; US20240287703A1

Abstract

A side-feeding monocrystal furnace, the monocrystal furnace comprising: a furnace body, a feeding apparatus, and a thermal insulation layer, a sealing member, a crucible and a lifting apparatus that are provided within the furnace body. The thermal insulation layer is located between the crucible and the furnace body, a first through-hole being provided on a side portion of the furnace body, and a second through-hole being provided in a position opposite to the first through-hole on the thermal insulation layer; the lifting apparatus is connected to the sealing member and is used to drive the sealing member to switch between a rising state and a falling state; in the rising state, the sealing member rises, and the feeding apparatus can pass through the first through-hole and the second through-hole to be opposite to an opening of the crucible; and in the falling state, the sealing member falls, and the sealing member can seal the second through-hole. The monocrystal furnace can improve the service life of a thermal field, reduce heat energy loss in non-feeding conditions, stabilize the temperature field and airflow balance within the furnace body, and improve the crystal pulling efficiency and quality of monocrystalline silicon.

Description

A side feeding single crystal furnace

This application claims the priority of a Chinese patent application with application number 202110800642.X and titled "A Single Crystal Furnace with Lateral Feeding" filed with the China Patent Office on July 15, 2021, the entire contents of which are hereby incorporated by reference In this application.

technical field

The present application relates to the technical field of single crystal manufacturing equipment, in particular to a side feeding single crystal furnace.

Background technique

With the development of the photovoltaic industry, the competition in the domestic crystalline silicon industry is also intensifying. At present, in order to reduce the cost of single crystal manufacturing, the industry has begun to develop side-feeding single crystal furnaces, that is, feeding from the side of the single crystal furnace, to improve the loss of heat energy caused by feeding, and to reduce the impact of the original high-altitude drop feeding on heat. effect on field life. In practical applications, the feeding device is usually installed on the side of the single crystal furnace, that is, it is necessary to open a through hole in the side of the furnace cylinder of the single crystal furnace and the thermal field insulation layer, so that the feeding device can enter the furnace cylinder through the through hole. feed.

However, opening a through hole on the side of the furnace cylinder and the insulation layer will easily lead to serious heat leakage at the position of the through hole, increasing the power consumption of the single crystal furnace; moreover, it will easily break the temperature field and air flow balance in the single crystal furnace, Reduce the crystal pulling efficiency and quality of single crystal silicon.

Contents of the invention

In view of the above problems, the embodiments of the present application are proposed to provide a side-feed single crystal furnace that overcomes the above problems or at least partially solves the above problems.

In order to solve the above problems, the embodiment of the present application discloses a single crystal furnace with side feeding. device, the insulation layer is located between the crucible and the furnace body, wherein,

A first through hole is opened on the side of the furnace body, and a second through hole is opened at a position opposite to the first through hole in the thermal insulation layer;

The lifting device is connected with the sealing member, and is used to drive the sealing member to switch between a raised state and a lowered state. In the raised state, the sealing member rises, and the feeding device can pass through the sealing member. The first through hole and the second through hole are opposite to the opening of the crucible. In the descending state, the sealing member descends, and the sealing member can seal the second through hole.

Optionally, the single crystal furnace further includes a protection cylinder, and the protection cylinder is embedded in the second through hole;

The protective cylinder is provided with a third through hole, and the third through hole is used for passing through the feeding device.

Optionally, the single crystal furnace includes a flexible hanging piece, one end of the hanging piece is connected to the lifting device, and the other end of the hanging piece is used to hang the sealing element.

Optionally, a counterweight is further provided in the single crystal furnace, and the counterweight is installed at the end where the sealing member is connected to the pendant.

Optionally, a first inclined plane structure is provided at the position where the thermal insulation layer is opposite to the sealing member, and a second inclined plane structure is provided at the position where the sealing member is opposite to the thermal insulation layer;

When the lifting device drives the sealing member to switch to the descending state, the first inclined-plane structure and the second inclined-plane structure are attached.

Optionally, the first slope structure includes: a first sub-slope structure and a second sub-slope structure, and the second through hole is disposed between the first sub-slope structure and the second sub-slope structure;

When the lifting device drives the sealing member to switch to the descending state, both the first sub-slope structure and the second sub-slope structure are in contact with the second slope structure.

Optionally, the first included angle between the first slope structure and the axis of the thermal insulation layer is 5-15°, and the second angle between the second slope structure and the axis of the thermal insulation layer It is 75-85°.

Optionally, the feeding device further includes a feeding valve connected to the first through hole and the feeding device respectively;

The feeding valve is opened, and the feeding device can pass through the first through hole and the second through hole to be opposite to the opening of the crucible.

Optionally, the feeding device includes a feeding mechanism and a telescopic tube, the charging mechanism is connected to the telescopic tube, and the telescopic tube is connected to the feeding valve;

The telescopic tube includes a compressed state and an expanded state. When the telescopic tube is switched to the compressed state, the feeding mechanism can be driven to pass through the first through hole, the second through hole and the crucible. The opening is opposite.

Optionally, the lifting device includes: a driving mechanism and a lifting mechanism, the driving mechanism is arranged in the furnace body, the driving mechanism is connected to the lifting mechanism, and the lifting mechanism is connected to the sealing member;

The driving mechanism is used to drive the lifting mechanism to rise or fall, and the rising or falling of the lifting mechanism drives the sealing member to switch between the rising state and the falling state.

Optionally, the single crystal furnace further includes a heat exchange mechanism, the heat exchange mechanism is arranged above the crucible, the lifting device is connected to the heat exchange mechanism, and the heat exchange mechanism is connected to the sealing member connect;

The lifting device is used to drive the heat exchange mechanism to ascend or descend, and the ascending or descending of the heat exchanging mechanism drives the sealing member to switch between the ascending state and the descending state.

The embodiment of the present application includes the following advantages:

In the embodiment of the present application, the lifting device can drive the sealing member to switch to the rising state, so that the charging device can pass through the first through hole on the side of the furnace body and the second through hole on the insulation layer and the The openings of the crucibles are opposite to each other, so that the side feeding of the single crystal furnace can be realized, which can improve the influence of the high-altitude drop feeding on the life of the thermal field. Moreover, the lifting device can also drive the sealing member to switch to the descending state, so that the sealing member can block and protect the second through hole on the heat preservation layer, improve the life of the thermal field, and reduce the temperature loss in the non-feeding condition. Heat energy loss, stabilize the temperature field and air flow balance in the furnace body of the single crystal furnace, reduce the probability of disconnection and polycrystalline growth, and improve the crystal pulling efficiency and quality of single crystal silicon.

Description of drawings

Fig. 1 is the structural representation of a kind of single crystal furnace of the present application;

Fig. 2 is the structural representation of another kind of single crystal furnace of the present application;

Fig. 3 is a schematic structural view of another single crystal furnace of the present application;

Fig. 4 is a schematic structural diagram of another single crystal furnace of the present application.

Reference signs:

1-furnace body, 11-first through hole, 2-feeding device, 21-feeding valve, 22-feeding mechanism, 23-telescopic tube, 3-insulation layer, 31 first slope structure, 311-first sub-slope structure , 312-second sub-slope structure, 32-second through hole, 41-seal, 411-second slope structure, 42-counterweight, 5-crucible, 6-lifting device, 7-protective cylinder, 71- The third through hole, 81-the pendant, 82-the rigid connecting plate, 9-the heat exchange mechanism.

specific embodiment

In order to make the above objects, features and advantages of the present application more obvious and comprehensible, the present application will be further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

One of the core ideas of the embodiments of the present application is to provide a side-feed single crystal furnace.

Referring to FIG. 1 , it shows a schematic structural view of a single crystal furnace of the present application. As shown in FIG. 1 , the present application provides a single crystal furnace with side feeding, and the single crystal furnace may specifically include: a furnace body 1. The feeding device 2 and the insulation layer 3, the seal 41, the crucible 5 and the lifting device 6 arranged in the furnace body 1, the insulation layer 3 can be located between the crucible 5 and the furnace body 1, wherein the side of the furnace body 1 A first through hole 11 can be provided, and a second through hole 32 can be provided at the position where the insulation layer 3 is opposite to the first through hole 11; Switch between the descending state. In the rising state, the sealing member 41 rises, and the feeding device 2 can pass through the first through hole 11 and the second through hole 32 to be opposite to the opening of the crucible 5. In the descending state, the sealing member 41 descends. The seal 41 may seal the second through hole 32 .

In the embodiment of the present application, the lifting device 6 can drive the sealing member 41 to switch to the rising state, so that the charging device 2 can pass through the first through hole 11 on the side of the furnace body 1 and the second through hole 32 on the insulation layer 3 and The openings of the crucible 5 face each other to realize lateral feeding of the single crystal furnace, which can improve the influence of falling feeding from high altitude on the service life of the thermal field. Moreover, the lifting device 6 can also be switched to the descending state, and the sealing member 41 can be lowered, so that the sealing member 41 can block and protect the second through hole 32 on the insulation layer 3, improve the life of the thermal field, and reduce the heat energy in the non-feeding situation. Loss, stabilize the temperature field and air flow balance in the furnace body 1 of the single crystal furnace, reduce the probability of disconnection and polycrystalline growth, and improve the crystal pulling efficiency and quality of single crystal silicon.

Specifically, the first through hole 11 is arranged on the side of the furnace body 1, and the charging device 2 is also arranged on the side of the furnace body 1, so that the charging device 2 can feed into the crucible 5 from the side of the furnace body 1, which can reduce the The loss of heat energy caused during the process of stopping feeding; it can also avoid the impact of high-altitude falling feeding on the life of the thermal field; and the feeding device 2 is set on the side of the furnace body 1, which can break the restriction on the weight of feeding, save feeding time and reduce feeding Number of workers.

In practical application, compared with the single crystal furnace in the prior art that does not have the sealing member 41 to block the second through hole 32 of the insulation layer 3, the power consumption of the single crystal furnace in the embodiment of the present application can be reduced by more than 60%.

As shown in Figure 1, the lifting device 6 drives the sealing member 41 to switch to the rising state, the sealing member 41 rises, the second through hole 32 is opened, and the feeding device 2 can pass through the first through hole 11 and the second through hole 32, and to Add raw materials in the crucible 5 . As shown in Figure 2, after feeding is completed, the lifting device 6 can drive the sealing member 41 to switch to the descending state, and the sealing member 41 can be closely attached to the insulation layer 3 to block the second through hole 32.

The single crystal furnace in the embodiment of the present application is a device that melts polycrystalline material with a heater and grows a single crystal by Czochralski method in an environment of inert gas (mainly nitrogen and helium). The furnace body 1 in the embodiment of the present application is the equipment body of the single crystal furnace, which is used for installing and connecting the insulation layer 3 , the sealing member 41 , the crucible 5 , the lifting device 6 and the feeding device 2 .

The feeding device 2 in the embodiment of the present application is a device for storing raw materials and putting the raw materials into the crucible 5 .

The crucible 5 in the embodiment of the present application is an important part of a chemical instrument. It is a container that can melt and refine metal liquid and solid-liquid heating and reaction, and is the basis for ensuring the smooth progress of chemical reactions. Specifically, in the embodiment of the present application, the crucible 5 is a container for melting raw materials to grow single crystal silicon.

The insulation layer 3 in the embodiment of the present application may be an insulation interlayer used between the furnace body 1 and the heater in the single crystal furnace. The heater can be used to heat the raw material in the crucible 5 . The insulation layer 3 can be located between the crucible 5 and the furnace body 1 to prevent heat loss and stabilize the growth environment of single crystal silicon. Specifically, the insulation layer 3 can be a material with many advantages such as high heat preservation rate, windproof, rainproof, anti-aging, flame retardant, strong water resistance, dustproof, moistureproof, acid and alkali resistance, easy retractable, long service life, etc. insulation felt.

The sealing member 41 in the embodiment of the present application can be used to seal the thermal insulation layer 3 to further improve the thermal insulation effect of the thermal insulation layer 3 .

Specifically, both the thermal insulation layer 3 and the sealing member 41 can be heat insulating material pieces. In practical applications, both the heat insulating layer 3 and the sealing member 41 are made of heat insulating material, which can reduce heat loss and increase the crystal pulling speed of single crystal silicon.

Specifically, the materials of the insulation layer 3 and the sealing member 41 may be graphite soft felt, solidified carbon felt, etc., which are not specifically limited in this embodiment of the present application.

The lifting device 6 in the embodiment of the present application can drive the sealing member 41 to rise or fall. Specifically, the lifting device 6 may include a driving motor, and the driving motor may provide a motive force. The drive motor can be connected with the seal 41 to directly drive the seal 41 to rise or fall.

In practical application, a heat shielding device is also provided in the furnace body 1, and the heat shielding device may be a structural component in the single crystal furnace for passing water through the interlayer satisfying the process. The heat shielding device may include a water pipe, and the water pipe may include a water inlet pipe and a water outlet pipe, and the hardness of the water inlet pipe and the water outlet pipe is relatively high. The lifting device 6 can be connected with the water pipe, and drives the heat shielding device to rise or fall, and the heat shielding device can be a heat exchanger or a heat shield.

Specifically, the sealing member 41 can also be connected to a water pipe, so that the driving motor can also drive the sealing member 41 to rise or fall through the water pipe, which is not specifically limited in this embodiment of the present application.

Specifically, the structures of the first through hole 11 and the second through hole 32 may be circular, quadrilateral, pentagonal or hexagonal, etc., which are not specifically limited in this embodiment of the present application.

In some embodiments of the present application, the single crystal furnace can also include a protective cylinder 7, which can be embedded in the second through hole 32; the protective cylinder 7 can be provided with a third through hole 71, and the third through hole 71 can be Used for threading the feeding device 2.

In the embodiment of the present application, the protective cylinder 7 is embedded in the second through hole 32, and is provided with a third through hole 71, so that the feeding device 2 can pass through the first through hole 11 and the third through hole 71 to the crucible in sequence. 5 to feed. In practical application, the airflow can scour the third through hole 71, so that the protective cylinder 7 can protect the insulation layer 3, alleviate the pulverization phenomenon caused by the airflow scour to the insulation layer 3, and improve the service life of the insulation layer 3.

Specifically, before charging into the crucible 5, the furnace body 1 can be evacuated with an inert gas, and the inert gas with pressure can enter the furnace body 1 from the first through hole 11, and the third through hole of the protective cylinder 7 The holes 71 are scoured by high-temperature air flow. During the single crystal silicon pulling process, the inert gas can also drive volatiles out of the furnace body 1 , and the inert gas can also flush the third through hole 71 of the protective cylinder 7 with a high-temperature air flow. In the embodiment of the present application, the protection tube 7 is embedded in the second through hole 32 of the insulation layer 3, which can protect the insulation layer 3 and prevent it from being scoured by the high-temperature air flow, thereby preventing the insulation layer 3 from being washed by the second through hole 32. Pulverization occurs at the through hole 32, which improves the service life of the insulation layer 3.

In practical application, the protective tube 7 can better protect the heat insulating layer 3. Compared with the heat insulating layer 3 without the second through hole 32, the heat insulating layer 3 in the embodiment of the present application has no second through hole 32 compared with the prior art. The insulating layer 3 of the through hole 32 can have a substantially equal service life.

Specifically, the material of the protective cylinder 7 includes at least one of graphite and carbon-carbon composite materials. In practical applications, the material of the protective cylinder 7 is graphite or carbon-carbon composite material, which can improve the protective effect of the protective cylinder 7 on the insulation layer 3 and further increase the service life of the insulation layer 3 .

Specifically, the outer side of the protective tube 7 can be connected to the second through hole 32 of the thermal insulation layer 3 , and the outer structure of the protective tube 7 is adapted to the structure of the second through hole 32 . For example, the structure of the second through hole 32 is circular, and the outer structure of the protective tube 7 is also circular; the structure of the second through hole 32 is pentagonal, and the outer structure of the protective tube 7 is also pentagonal.

Specifically, the structure of the third through hole 71 may be circular, quadrangular, pentagonal, or hexagonal, etc., which is not specifically limited in this embodiment of the present application.

Optionally, the single crystal furnace may include a flexible hanging piece 81 , one end of the hanging piece 81 may be connected to the lifting device 6 , and the other end of the hanging piece 81 may be used to hang the seal 41 .

Specifically, the flexible feature refers to the feature that an object can deform arbitrarily under the action of force, and can maintain the deformation when the force disappears. It can also be interpreted as flexibility, or a characteristic of an object relative to rigidity. Flexibility refers to a physical property that an object deforms after being subjected to a force, and the object itself cannot return to its original shape after the force is lost. After a rigid object is stressed, its shape can be regarded as unchanged from a macroscopic point of view.

In the embodiment of the present application, the pendant 81 with flexible features is used to suspend the seal 41. In the lowered state, the seal 41 can be attached to the insulation layer 3 by its own gravity, thereby realizing the second through hole 32 of the insulation layer 3. The sealing can improve the sealing effect.

Specifically, the pendant 81 has a flexible feature, and is mainly guided freely by the structure of the suspended object and its own gravity. Specifically, the pendant 81 can be bent at will, and the movement track of the lifting sealing member 41 can also be changed arbitrarily. When the pendant 81 is lowered to the limit position, the pendant 81 may not apply any force to the sealing member 41 . The pendant 81 may include structures such as soft ropes and chains, which are not specifically limited in this embodiment of the present application.

Specifically, the pendant 81 can also be used with a rigid connection plate 82 , as shown in FIG. 1 , one end of the rigid connection plate 82 can be connected to a water pipe, and the pendant 81 can be connected to the other end of the rigid connection plate 82 .

As shown in Figure 1, the lifting device 6 drives the sealing member 41 to switch to the rising state, the sealing member 41 rises, the second through hole 32 is opened, and the feeding device 2 can pass through the first through hole 11 and the second through hole 32, and to Add raw materials in the crucible 5 . As shown in Figure 2, after the feeding is completed, the lifting device 6 can be switched to the descending state. The sealing member 41 is closely tangent to the insulation layer 3 under the action of gravity, and slides downward. When the sealing member 41 drops to the lower limit, the lifting device 6 can continue to descend, the pendant 81 can be in a relaxed state, and the sealing member 41 can be in close contact with the insulation layer 3 to achieve the purpose of blocking the second through hole 32 .

Optionally, a counterweight 42 may also be provided in the single crystal furnace, and the counterweight 42 may be installed at the end where the sealing member 41 is connected to the hanging member 81 .

In the embodiment of the present application, installing a counterweight 42 at the end where the seal 41 is connected to the pendant 81 can increase the weight of the seal 41 and further improve the sealing effect of the seal 41 on the second through hole 32 of the insulation layer 3 .

Specifically, the counterweight 42 is a weight that can increase the self-weight of the sealing member 41 and maintain balance. The counterweight 42 may include ordinary sand-type counterweight iron or extra-heavy iron, which can be set according to actual needs, which is not specifically limited in this embodiment of the present application.

In some other embodiments of the present application, the position where the insulation layer 3 is opposite to the sealing member 41 can be provided with a first inclined plane structure 31, and the position where the sealing member 41 is opposite to the insulating layer 3 can be provided with a second inclined plane structure 411; When the device 6 drives the sealing member 41 to switch to the descending state, the first slope structure 31 and the second slope structure 411 can be bonded together.

In the embodiment of the present application, the position where the insulation layer 3 is opposite to the sealing member 41 is the first inclined plane structure 31, and the position where the sealing member 41 is opposite to the insulating layer 3 is the second inclined plane structure 411. In this way, the sealing member 41 depends on its own gravity and When the insulation layer 3 is bonded, the tightness of bonding is better, and the sealing effect of the sealing member 41 on the second through hole 32 of the insulation layer 3 can be further improved.

Specifically, the shapes of the first slope structure 31 and the second slope structure 411 are matched. For example, the first slope structure 31 includes a plurality of protrusions, and the second slope structure 411 is provided with a plurality of grooves at positions opposite to the protrusions; the first slope structure 31 includes a plurality of grooves, and the second slope structure 411 and the A plurality of protrusions are provided at positions opposite to the protrusions; the first slope structure 31 is a planar structure, and the second slope structure 411 may also be a planar structure. The specific arrangement manner of the first slope structure 31 and the second slope structure 411 can be set according to actual needs, which is not specifically limited in this embodiment of the present application.

Specifically, the first slope structure 31 can be an integral structure, and the second through hole 32 can be a through hole opened on the first slope structure 31; or, the first slope structure 31 can be composed of multiple split structures. As a structural component, the second through hole 32 may be disposed between multiple split structures, which is not specifically limited in this embodiment of the present application.

Optionally, the first slope structure 31 may include: a first sub-slope structure 311 and a second sub-slope structure 312, and the second through hole 32 may be provided between the first sub-slope structure 311 and the second sub-slope structure 312; When the lifting device 6 drives the sealing member 41 to switch to the descending state, both the first sub-slope structure 311 and the second sub-slope structure 312 can be attached to the second slope structure.

In the embodiment of the present application, when the lifting device 6 drives the sealing member 41 to switch to the descending state, both the first sub-slope structure 311 and the second sub-slope structure 312 are attached to the second slope structure, because the second through hole 32 is disposed between the first sub-slope structure 311 and the second sub-slope structure 312, so that the sealing member 41 can seal the second through hole 32 to reduce heat loss.

Optionally, the first included angle between the first slope structure 31 and the axis of the thermal insulation layer 3 may be 5° to 15°, and the second angle between the second slope structure 411 and the axis of the thermal insulation layer 3 may be 75°. ~85°.

In the embodiment of the present application, the first included angle is 5-15°, and the second included angle may be 75-85°, so that the bonding effect between the sealing member 41 and the insulation layer 3 is better.

Specifically, the first included angle can be 4°, 5°, 10°, 15°, 20°, etc., and the second included angle can be 70°, 75°, 80°, 85°, 90°, etc., specifically according to The actual requirements are set, and this embodiment of the present application does not specifically limit it.

Specifically, when the first included angle is 0° and the second included angle is 90°, the first inclined plane structure 31 and the second inclined plane structure 32 are arranged in parallel, so that the sealing member 41 can face the second side of the side blocking insulation layer 3 directly. Through hole 32 . In this case, a pendant 81 can be used to connect the lifting device and the seal 41 respectively, so that the pendant 81 can drive the seal 41 to rise or fall; a hard pendant can also be used to connect the lifting device and the seal 41 respectively, so that the hard pendant can drive The seal 41 is raised or lowered.

In practical application, the first included angle is 5° to 15°, the second included angle is 75° to 85°, and the pendant 81 is used to hang the seal 41 . Holes 32 and the use of rigid pendants to connect the seal 41 can reduce consumption by about 20%.

Optionally, the feeding device 2 can also include a feeding valve 21, which can be connected to the first through hole 11 and the feeding device 2 respectively; when the feeding valve 21 is opened, the feeding device 2 can pass through the first through hole 11 and the second feeding device. The through hole 32 is opposite to the opening of the crucible 5 .

In the embodiment of the present application, the feeding valve 21 is connected to the first through hole 11 and the feeding device 2 respectively. When feeding is required, the feeding valve 21 can be opened, and the feeding device 2 can pass through the first through hole 11 and the second through hole. The hole 32 is opposite to the opening of the crucible 5, and feeds into the crucible 5; when no feeding is required, the feeding valve 21 can be closed, effectively isolating the feeding device 2 and the furnace body 1.

Specifically, the feeding valve 21 may be an electric control valve or a manual valve, which is not specifically limited in this embodiment of the present application. As shown in Figure 1, a manual valve is shown.

Optionally, the feeding device 2 can include a feeding mechanism 22 and a telescopic tube 23, the charging mechanism 22 can be connected with the telescopic tube 23, and the telescopic tube 23 can be connected with the feeding valve 21; the telescopic tube 23 can include a compressed state and an expanded state, and the telescopic tube 23 is switched to the compressed state, it can drive the feeding mechanism 22 to pass through the first through hole 11 and the second through hole 32 to face the opening of the crucible 5 .

In the embodiment of the present application, when the telescopic tube 23 is switched to the compressed state, the telescopic tube 23 can drive the feeding mechanism 22 to pass through the first through hole 11 and the second through hole 32 to be opposite to the opening of the crucible 5, so that the feeding mechanism 22 The raw materials can be introduced into the crucible 5, making feeding more convenient and fast.

Specifically, the telescopic tube 23 may be a corrugated tube, or the telescopic tube 23 may also be a sleeve formed by socketing a plurality of tubes, which may be set according to actual needs, which is not specifically limited in this embodiment of the present application.

Specifically, as shown in Figure 4, the telescopic tube 23 is switched from the expanded state to the compressed state, and the feeding mechanism 22 can pass through the feeding valve 21, the first through hole 11 and the third through hole 71 from the original position in sequence, and deliver the raw material to the crucible 5. As shown in FIG. 2 , after the feeding is completed, the telescopic tube 23 is gradually expanded, and when the feeding device 2 withdraws from the second through hole 32 , the sealing member 41 can descend immediately to seal the second through hole 32 . As shown in FIG. 3 , the telescopic tube 23 is switched from the telescopic state to the unfolded state, the feeding mechanism 22 can return to the original position, and the feeding valve 21 can be closed.

In some optional embodiments of the present application, the lifting device 6 may include: a driving mechanism and a lifting mechanism, the driving mechanism may be arranged in the furnace body 1, the driving mechanism may be connected with the lifting mechanism, and the lifting mechanism may be connected with the sealing member 41; The driving mechanism can be used to drive the lifting mechanism to rise or fall, and the rising or falling of the lifting mechanism can drive the sealing member 41 to switch between the rising state and the falling state.

In the embodiment of the present application, by providing a special driving mechanism and a lifting mechanism, the sealing member 41 can be switched between the raised state and the lowered state, and the convenience of use of the sealing member 41 can be improved.

Specifically, the lifting device 6 may be disposed close to the sealing member 41 , as shown in FIG. 1 , the lifting device 6 may also be disposed above the sealing member 41 , which is not specifically limited in this embodiment of the present application.

In still some optional embodiments of the present application, as shown in FIG. 2 , the single crystal furnace may include a heat exchange mechanism 9, which may be arranged above the crucible 5, and the lifting device 6 is connected to the heat exchange mechanism 9, The heat exchange mechanism 9 is connected to the seal 41; the lifting device 6 is used to drive the heat exchange mechanism 9 to rise or fall, and the rise or fall of the heat exchange mechanism 9 drives the seal 41 to switch between the rising state and the falling state.

In the implementation of this application, the lifting device 6 can drive the heat exchange mechanism 9 to rise or fall, and the rise or fall of the heat exchange mechanism 9 can drive the seal 41 to switch between the rising state and the falling state, so that the heat exchange mechanism 9 and the sealing The pieces 41 can share one lifting device 6, which can save the layout space and cost of the single crystal furnace.

Specifically, the heat exchange device 9 may be a heat shielding device.

The side-feed single crystal furnace provided in the embodiment of the present application at least includes the following advantages:

It should be noted that the embodiment of the present application is not limited by the described sequence of actions, because some steps may be performed in another order or simultaneously according to the embodiment of the present application. Secondly, those skilled in the art should also know that the embodiments described in the specification belong to preferred embodiments, and the actions involved are not necessarily required by the embodiments of the present application.

Each embodiment in this specification is described in a progressive manner, each embodiment focuses on the difference from other embodiments, and the same and similar parts of each embodiment can be referred to each other.

While the preferred embodiments of the embodiments of the present application have been described, additional changes and modifications can be made to these embodiments by those skilled in the art once the basic inventive concept is understood. Therefore, the appended claims are intended to be interpreted to cover the preferred embodiment and all changes and modifications that fall within the scope of the embodiments of the application.

Finally, it should also be noted that in this text, relational terms such as first and second etc. are only used to distinguish one entity or operation from another, and do not necessarily require or imply that these entities or operations, any such actual relationship or order exists. Furthermore, the term "comprises", "comprises" or any other variation thereof is intended to cover a non-exclusive inclusion such that a process, method, article, or terminal equipment comprising a set of elements includes not only those elements, but also includes elements not expressly listed. other elements identified, or also include elements inherent in such a process, method, article, or end-equipment. Without further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of additional identical elements in the process, method, article or terminal device comprising said element.

A side-feeding single crystal furnace provided by this application has been introduced in detail above. In this paper, specific examples are used to illustrate the principle and implementation of this application. The description of the above examples is only used to help understand this application. The method of application and its core idea; at the same time, for those of ordinary skill in the art, according to the idea of this application, there will be changes in the specific implementation and scope of application. In summary, the content of this specification should not be understood For the limitation of this application.

Claims

A single crystal furnace with side feeding, wherein the single crystal furnace includes: a furnace body, a feeding device, and an insulation layer, a seal, a crucible and a lifting device arranged in the furnace body, and the insulation layer is located on the Between the crucible and the furnace body, wherein,

A first through hole is opened on the side of the furnace body, and a second through hole is opened at a position opposite to the first through hole in the thermal insulation layer;

The lifting device is connected with the sealing member, and is used to drive the sealing member to switch between a raised state and a lowered state. In the raised state, the sealing member rises, and the feeding device can pass through the sealing member. The first through hole and the second through hole are opposite to the opening of the crucible. In the descending state, the sealing member descends, and the sealing member can seal the second through hole.
The single crystal furnace according to claim 1, wherein the single crystal furnace further comprises a protection tube, and the protection tube is embedded in the second through hole;

The protective cylinder is provided with a third through hole, and the third through hole is used for passing through the feeding device.
The single crystal furnace according to claim 1, wherein the single crystal furnace includes a hanging piece with flexible features, one end of the hanging piece is connected with the lifting device, and the other end of the hanging piece is used to hang the sealing member .
The single crystal furnace according to claim 3, wherein a counterweight is further provided in the single crystal furnace, and the counterweight is installed at the end where the sealing member is connected to the pendant.
The single crystal furnace according to claim 1, wherein a first slope structure is provided at the position where the insulation layer is opposite to the sealing member, and a second slope structure is provided at a position where the sealing member is opposite to the heat preservation layer ;

When the lifting device drives the sealing member to switch to the descending state, the first inclined-plane structure and the second inclined-plane structure are attached.
The single crystal furnace according to claim 5, wherein the first slope structure comprises: a first sub-slope structure and a second sub-slope structure, and the second through hole is provided on the first sub-slope structure and the second through-hole between the second sub-slope structures;

When the lifting device drives the sealing member to switch to the descending state, both the first sub-slope structure and the second sub-slope structure are in contact with the second slope structure.
The single crystal furnace according to claim 5, wherein, the first included angle between the first slope structure and the axis of the insulation layer is 5-15°, and the second slope structure and the insulation layer The second included angle between the axes is 75-85°.
The single crystal furnace according to claim 1, wherein the charging device further comprises a charging valve, and the charging valve is respectively connected to the first through hole and the charging device;

The feeding valve is opened, and the feeding device can pass through the first through hole and the second through hole to be opposite to the opening of the crucible.
The single crystal furnace according to claim 8, wherein the feeding device comprises a feeding mechanism and a telescopic tube, the charging mechanism is connected to the telescopic tube, and the telescopic tube is connected to the feeding valve;

The telescopic tube includes a compressed state and an expanded state. When the telescopic tube is switched to the compressed state, the feeding mechanism can be driven to pass through the first through hole, the second through hole and the crucible. The opening is opposite.
The single crystal furnace according to claim 1, wherein the lifting device comprises: a driving mechanism and a lifting mechanism, the driving mechanism is arranged in the furnace body, the driving mechanism is connected to the lifting mechanism, and the lifting mechanism a mechanism is connected to the seal;

The driving mechanism is used to drive the lifting mechanism to rise or fall, and the rising or falling of the lifting mechanism drives the sealing member to switch between the rising state and the falling state.
The single crystal furnace according to claim 1, wherein the single crystal furnace further comprises a heat exchange mechanism, the heat exchange mechanism is arranged above the crucible, the lifting device is connected with the heat exchange mechanism, the The heat exchange mechanism is connected with the sealing member;

The lifting device is used to drive the heat exchange mechanism to ascend or descend, and the ascending or descending of the heat exchanging mechanism drives the sealing member to switch between the ascending state and the descending state.