WO2023279662A1 - Laser rotary cutting system and rotary cutting method - Google Patents

Laser rotary cutting system and rotary cutting method Download PDF

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Publication number
WO2023279662A1
WO2023279662A1 PCT/CN2021/137754 CN2021137754W WO2023279662A1 WO 2023279662 A1 WO2023279662 A1 WO 2023279662A1 CN 2021137754 W CN2021137754 W CN 2021137754W WO 2023279662 A1 WO2023279662 A1 WO 2023279662A1
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WIPO (PCT)
Prior art keywords
mirror
wedge
angle adjustment
laser
rotary cutting
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PCT/CN2021/137754
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French (fr)
Chinese (zh)
Inventor
钱代数
上官剑锋
曾超峰
刘志峰
赵朋
赵瑞晓
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广东原点智能技术有限公司
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Publication of WO2023279662A1 publication Critical patent/WO2023279662A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • B23K26/382Removing material by boring or cutting by boring
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046Automatically focusing the laser beam
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment

Definitions

  • the invention relates to the field of laser processing, in particular to a laser rotary cutting system and a rotary cutting method.
  • the laser drilling can be divided into a galvanometer scanning drilling system, a three-wedge rotary scanning drilling system, and a Dove prism rotary scanning drilling system.
  • the galvanometer scanning drilling system is the most mature drilling system, with a large processing range and simple control.
  • the three optical wedge rotary scanning drilling system needs to ensure the synchronous rotation of the three optical wedges, and also needs to accurately control the relative angle between the optical wedges. If the control accuracy is not good, it will affect the roundness and taper of the hole, which will affect the motor.
  • the precision of the rotation control is extremely high, and the algorithm for controlling the radius and taper of the hole is very complicated, for example, the publication of the Chinese patent application publication number CN103056519A.
  • the technical problem to be solved by the present invention is to solve at least one of the above-mentioned problems.
  • a rotary cutting system including a laser, a wedge mirror group, a focusing mirror, and an angle adjustment mirror;
  • the wedge mirror group is arranged downstream of the optical path transmission of the laser, and the wedge mirror group is used to make the beam perform a translational movement;
  • the focusing mirror is arranged downstream of the optical path transmission of the focusing mirror, and the focusing mirror is used to focus the light beam;
  • the angle adjustment mirror is arranged in the optical path between the wedge mirror group and the laser, or arranged in the In the optical path between the focusing mirror and the wedge mirror group; the angle adjustment mirror is used to adjust the flight angle of the light after passing through the angle adjustment mirror, and the angle adjustment mirror and the wedge mirror group rotate synchronously.
  • the angle adjustment mirror is a reflection mirror or a beam splitter.
  • the angle adjustment mirror is arranged between the wedge mirror group and the laser, and a quarter-wave plate is arranged between the angle adjustment mirror and the wedge mirror group, so A PBS beam-splitting prism is arranged between the quarter-wave plate and the wedge mirror group, the laser is arranged upstream of the PBS beam-splitting prism, and the optical path transmission is followed by the laser, the PBS beam-splitting prism, and the quarter-wave plate , Angle adjustment mirror, quarter wave plate, PBS beam splitting prism, wedge mirror group, focusing mirror.
  • the PBS dichroic prism includes two PBS triangular prisms, the cross section of the PBS triangular prisms is a right triangle, and the two PBS triangular prisms are spliced into a cuboid.
  • the angle adjustment mirror is arranged between the focus mirror and the wedge mirror group, the angle adjustment mirror is a beam splitter, and the beam splitter is used to reflect a part of the light to the focus mirror, The remaining light passes through the beam splitter, and a detector is arranged beside the beam splitter, and the detector is used to detect the position and angle of the light passing through the beam splitter.
  • the wedge mirror group includes the same two wedge mirrors, the two wedge mirrors are arranged symmetrically to each other, and the two wedge mirrors rotate synchronously with the angle adjustment mirror.
  • the distance between the two wedge mirrors is adjustable.
  • the laser is a pulsed laser.
  • the present invention also provides a rotary cutting method using the above rotary cutting system.
  • Step 1 determine the processing cone angle and drilling radius of the rotary cutting hole, so that the focusing mirror is facing the position of the hole;
  • step 2 adjust the wedge shape respectively.
  • the mirror group and the angle adjustment mirror make the wedge mirror group and the angle adjustment mirror rotate synchronously, the angle adjustment mirror is a reflective mirror, and the wedge mirror group includes two mutually symmetrical wedge mirrors; step 3, turn on the laser.
  • the hole radius is R
  • the f is the focal length of the focusing mirror
  • the ⁇ 1 is the exit angle after the light beam is reflected by the mirror
  • Described w is the angle of inclination of reflecting mirror
  • Described machining taper angle is ⁇
  • arctan[(L1tan ⁇ 1+L2tan ⁇ 2+L3tan ⁇ 1+R)/f]
  • L1 is the distance between the nearest wedge mirrors of reflecting mirror Distance
  • L2 is the distance between the two wedge mirrors, the distance between the wedge mirror and the focus mirror
  • R is the hole radius
  • f is the focal length of the focus mirror
  • the angle between the wedge mirror exit light and the optical axis is ⁇ 2
  • the ⁇ 2 arcsin[n2 sin[ ⁇ -arcsin[sin( ⁇ + ⁇ 1)/n2]]]]]]
  • n2 is the refr
  • the beneficial effect of the present invention is that the rotary cutting system of the present invention is different from the traditional technology in which multiple optical wedges are used to drive the laser to rotate, and the rotary cutting system of the present invention can drive the laser to rotate by rotating the angle adjustment mirror, effectively reducing The weight and volume of the rotating object are reduced, making the laser rotation speed faster and the processing accuracy higher.
  • the rotary cutting method in the present invention applies the above rotary cutting system, which is easy to operate, simple in structure, and convenient for users to adjust parameters.
  • Fig. 1 is the schematic diagram that the angle adjustment mirror among the present invention is arranged in the optical path between described wedge mirror group and described laser;
  • Fig. 2 is the schematic diagram of the optical path in which the angle adjustment mirror is arranged between the focusing mirror and the wedge mirror in the present invention
  • Fig. 3 is a schematic diagram of an embodiment of the present invention using both reflective mirrors and beam splitters.
  • the line segment connecting the laser 1 represents the laser light.
  • a kind of rotary cutting system comprises laser 1, wedge-shaped mirror group, focusing mirror 4, angle adjustment mirror; Described wedge-shaped mirror group is arranged on the optical path transmission downstream of described laser 1, and described wedge-shaped mirror group uses To make the beam move in translation; the focusing mirror 4 is arranged downstream of the optical path transmission of the focusing mirror, and the focusing mirror 4 is used to focus the beam; the angle adjustment mirror is arranged between the wedge mirror group and the In the optical path between the lasers 1; the angle adjustment mirror is used to adjust the flight angle of light passing through the angle adjustment mirror, and the angle adjustment mirror and the wedge mirror group rotate synchronously.
  • the laser light generated by the laser device 1 passes through the angle adjustment mirror, the wedge mirror group, and the focusing mirror 4 in turn.
  • the user can adjust the angle adjustment mirror to adjust the angle at which the laser beam is emitted from the angle adjustment mirror, and then adjust the laser beam.
  • the diameter of the hole the user can also adjust the wedge-shaped mirror group to translate the path of the laser flight, which is very convenient to adjust.
  • the angle adjustment mirror and the wedge-shaped mirror group can be set as coaxial transmission, and the synchronization rate can be obtained. Guaranteed, the laser line can be rotated 360° to realize the function of rotary cutting.
  • the user in order to adjust the exit angle of the light from the angle adjustment mirror, the user can tilt the angle adjustment mirror, and further, the scanning radius of the light beam on the processing surface can be changed.
  • the high-speed rotation of the angle adjustment mirror and the wedge mirror group can realize the high-speed scanning of the beam on the processing surface.
  • the angle adjustment mirror is a reflecting mirror 5 or a beam splitter 6 .
  • the angle adjustment mirror is the reflection mirror 5 .
  • the reflector 5 is light, and its angle of incidence and angle of reflection are relatively easy to adjust.
  • the diameter of the reflector 5 is 15 mm, and the rotation speed of the reflector 5 and the wedge mirror group is 1000 to 48000 r/min.
  • the angle adjustment mirror is a reflection mirror 5, and the angle adjustment mirror is arranged between the wedge mirror group and the laser 1, and a quarter is arranged between the angle adjustment mirror and the wedge mirror group.
  • a wave plate, a PBS beamsplitter prism 3 is arranged between the quarter wave plate and the wedge mirror group, the laser 1 is arranged upstream of the PBS beamsplitter prism 3, and the optical path transmission is successively laser 1, PBS beam splitting prism 3, quarter wave plate, angle adjustment mirror, quarter wave plate, PBS beam splitting prism 3, wedge mirror group, focusing mirror 4.
  • the PBS beam splitter is adopted, so that the laser beam can be vertically incident on the angle adjustment mirror, so that the size of the selected angle adjustment mirror can be smaller, and then the quality and volume are smaller, and it is easier to achieve high-speed rotation.
  • the angle between the laser incident on the angle adjustment mirror and the angle adjustment mirror is generally about 30° to 60°, so the area of the angle adjustment mirror is relatively larger, but this implementation For example, there is no need to use PBS beamsplitter prism and quarter wave plate, which reduces the loss of laser energy and saves equipment.
  • the quarter-wave plate When in use, the quarter-wave plate can rotate the linearly polarized light. After the incident linearly polarized light passes through the quarter-wave plate, the phase difference between the outgoing light and the incident light produces a delay of ⁇ /2, one cycle is 2 ⁇ . After the laser passes through the quarter-wave plate twice, its phase is retarded by ⁇ , so that the laser can finally completely pass through the PBS polarization beam splitter.
  • the PBS polarization beam splitter can totally reflect the linearly polarized laser light emitted by the laser 1 onto the angle adjustment mirror.
  • the angle adjustment mirror in this embodiment is preferably a reflection mirror 5, and the laser light passes through a quarter wave after being reflected by the reflection mirror 5. sheet, and finally completely pass through the PBS polarizing beam splitter to reach the wedge mirror group, so that the energy of the laser light generated by the laser 1 can be relatively completely preserved.
  • the PBS dichroic prism 3 and the quarter-wave plate it is also possible to direct the laser light to the reflector 5 through the laser 1 .
  • the normal of the reflector 5 is not collinear with the axis of rotation of the reflector.
  • the PBS polarization beam splitter and the quarter-wave plate are placed outside the angle adjustment mirror, which greatly reduces the weight of the driving components when the angle adjustment mirror moves, and improves the accuracy more effectively.
  • the PBS dichroic prism 3 includes two PBS triangular prisms.
  • the cross section of the PBS triangular prisms is a right triangle, and the two PBS triangular prisms are spliced into a cuboid.
  • the structure is simple and the setting is convenient.
  • the PBS dichroic prism 3 is a polarization dichroic prism, and its length, width and height are 10*10*10mm ⁇ 20*20*20mm.
  • the PBS dichroic prism 3 is made of quartz or ordinary glass.
  • the rotary cutting system includes a laser 1, a wedge mirror group, a focusing mirror, and an angle adjustment mirror; the wedge mirror group is arranged on the optical path of the laser 1 Downstream, the wedge mirror group is used to make the beam move in translation; the focusing mirror 4 is arranged on the optical path transmission downstream of the focusing mirror, and the focusing mirror 4 is used to focus the beam; the angle adjustment mirror is arranged on the In the optical path between the focusing mirror 4 and the wedge mirror group; the angle adjustment mirror is used to adjust the flight angle of the light after passing through the angle adjustment mirror, and the angle adjustment mirror and the wedge mirror group rotate synchronously.
  • the angle adjustment mirror is arranged between the focusing mirror 4 and the wedge mirror 2, and there is a difference in position between the angle adjustment mirror and the above-mentioned embodiment where the angle adjustment mirror is arranged between the wedge mirror group and the laser 1, but both Both can adjust the tilt angle of the mirror by adjusting the angle, so as to adjust the radius of the rotary cutting hole.
  • the angle adjustment mirror and the wedge mirror group are respectively driven by different motors, but preferably, the two motors rotate synchronously.
  • the angle adjustment mirror is a reflecting mirror 5 or a beam splitter 6, preferably, the beam splitter 6 is used in this embodiment.
  • the angle adjustment mirror is arranged between the focusing mirror 4 and the wedge mirror group, the angle adjustment mirror is a beam splitter 6, and the beam splitter 6 is used to reflect a part of the light to the focusing mirror 4, and the remaining The light passes through the beam splitter 6, and a detector 7 is arranged beside the beam splitter 6, and the detector 7 is used to detect the position and angle of the laser beam passing through the beam splitter 6.
  • the angle adjustment mirror adopts the beam splitter 6, so that the user can install the detector 7 from the back of the light-facing surface of the beam splitter 6, and the detector 7 can detect the position and posture of the incident laser beam into the beam splitter 6, thereby judging the light Whether the position of the rotary cutting machine is accurate, and then the accuracy of the rotary cutting can be judged by the result obtained by the detector 7.
  • the user can form negative feedback through the setting of the detector 7, and adjust the position and posture of the angle adjustment mirror and the wedge mirror group accordingly through the result of the feedback, which can effectively improve the processing accuracy of the laser rotary cutting.
  • the angle adjustment mirror is arranged between the focusing mirror 4 and the wedge mirror 2, and is also arranged between the wedge mirror group and the laser mirror , in this case, the angle adjustment mirror between the wedge mirror group and the laser mirror adopts a reflector 5, which rotates synchronously with the wedge mirror group, and the reflector 5 is used to adjust the exit angle of the laser light emitted from the laser 1 , so that the radius of the rotary cutting hole can be adjusted, the angle adjustment mirror between the focusing mirror 4 and the wedge mirror 2 is a beam splitter 6, and the beam splitter 6 is a lens, and the beam splitter 6 is used for the wedge mirror group The outgoing beam is partially reflected, and the remaining part passes through the beam splitter 6.
  • the beam splitter 6 can transmit 1%-10% of light, that is, 1%-10% of the laser light passes through the beam splitter 6, and the rest of the laser light is reflected to the focusing mirror.
  • the user can install a detector 7 on the backlight of the beam splitter 6, and the detector 7 is used to detect the pose of the light incident on the beam splitter 6, so as to ensure that the position of the laser transmission movement before the beam splitter 6 is accurate.
  • the user can also monitor the laser in real time through the detector 7, so as to form negative feedback in time and ensure the processing accuracy.
  • the focusing mirror 4 is made of quartz material or optical glass material, and optionally, its focal length is between 50 mm and 100 mm. In actual use, the longer the focal length of the focusing mirror 4 is, the larger the scanning radius of the laser beam on the processing surface is, and vice versa.
  • the laser 1 is a pulsed laser 1, the pulse width generated by it can be nanoseconds, picoseconds or femtoseconds, and its wavelength can be between 300nm and 1100nm, preferably between 355nm and 1064nm. More preferably, the laser 1 generates a linearly polarized infrared laser with a wavelength of 1064nm, a pulse width of 300-350fs, and a diameter of 2-6mm.
  • the wedge mirror group includes the same two wedge mirrors 2, and the two wedge mirrors 2 are arranged symmetrically to each other, and the two wedge mirrors 2 and the The angle adjustment mirror rotates synchronously.
  • the specifications and parameters of the two wedge mirrors 2 are the same, and the two wedge mirrors 2 are placed in opposite directions.
  • the wedge mirror 2 downstream of the optical path is used to correct the change of the incident light angle by the wedge mirror 2 upstream of the optical path, so that the wedge mirror 2 downstream of the optical path emits light
  • the angle of is the same as the angle of light reflected by reflector 5.
  • the wedge mirror 2 is made of quartz material or optical glass material.
  • its outer diameter is 10mm to 30mm, its thickness is 3mm to 8mm, and its wedge angle is 6° to 12°. The user can adjust it according to the actual situation.
  • the specifications of the wedge mirror 2 are selected.
  • the distance between the two wedge mirrors 2 is adjustable.
  • the taper of the circular hole can be changed by changing the relative distance between the two wedge mirrors 2 .
  • the relative positions between the reflector 5, the quarter-wave plate, the PBS polarization beam splitter and the relatively upstream wedge mirror 2 are fixed, and the user can install them in a movable On the platform, it can be translated left and right along the optical axis direction, and the relative position between the wedge mirror 2 of the upstream optical path and the wedge mirror 2 of the downstream optical path is changed by moving the platform, so that the beam is shifted along the optical axis direction to realize the taper of the hole Change.
  • the laser 1 is a pulsed laser 1, and in addition, a beam expander mirror may be provided at the output end of the laser.
  • the present invention also provides a rotary cutting method using the rotary cutting system in any of the above embodiments, step 1, determine the processing cone angle and drilling radius of the rotary cutting hole, and make the focusing mirror 4 facing the position of the hole ; Step 2, adjust the wedge mirror group and the angle adjustment mirror respectively, so that the wedge mirror group and the angle adjustment mirror rotate synchronously; Step 3, turn on the laser 1 .
  • the angle adjustment mirror is a reflecting mirror 5
  • the wedge mirror group includes two wedge mirrors 2 that are symmetrical to each other.
  • the method can use the above-mentioned rotary cutting system, and the above-mentioned rotary cutting system has been described in words, and those skilled in the art should be able to understand it in conjunction with the accompanying drawings, so the description of the rotary cutting system will not be repeated here.
  • the hole radius is R
  • the f is the focal length of the focusing mirror 4
  • the ⁇ 1 is the exit angle after the light beam is reflected by the mirror
  • the user can adjust the exit angle of the reflector 55, the above-mentioned L1, and the above-mentioned L2 according to the parameters of the hole to be processed.
  • the user can also change the focus lens 4 Thereby, the focal length of the focusing mirror 4 is adjusted, and the size of the wedge angle is adjusted by changing different wedge mirrors 2, which is very convenient for light adjustment.
  • the invention has a large processing aperture and a taper range and high processing accuracy, and can realize aperture processing with a diameter of 0.01mm-5mm, and can realize tapered hole processing of ⁇ 7°.
  • the principle is to use the outer side of the light focused by the focusing lens 4 to rotate and cut the inner wall of the hole along the depth direction of the hole, thereby forming a zero-taper hole.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

A laser rotary cutting system, comprising a laser device (1), a wedge lens group, a focusing lens (4) and an angle adjustment lens, wherein the wedge lens group is arranged downstream of the light path transmission of the laser device to achieve the translational motion of a light beam; the focusing lens is arranged downstream of the light path transmission of the focusing lens to focus the light beam; the angle adjustment lens is arranged on a light path between the wedge lens group and the laser device, or on a light path between the focusing lens and the wedge lens group; and the angle adjustment lens is used to adjust the flight angle of the light passing through the angle adjustment lens, and the angle adjustment lens and the wedge lens group rotate synchronously. The present invention further relates to a rotary cutting method using the rotary cutting system. The laser rotary cutting system has a simple structure, and is convenient to adjust.

Description

一种激光旋切系统及旋切方法A kind of laser rotary cutting system and rotary cutting method 技术领域technical field
本发明涉及激光加工领域,特别是一种激光旋切系统及旋切方法。The invention relates to the field of laser processing, in particular to a laser rotary cutting system and a rotary cutting method.
背景技术Background technique
激光打孔装置内部使用的光学器件及工作原理的不同可将激光打孔分为振镜扫描式打孔系统、三光楔旋转扫描打孔系统、道威棱镜旋转扫描打孔系统。Depending on the optical devices and working principles used inside the laser drilling device, the laser drilling can be divided into a galvanometer scanning drilling system, a three-wedge rotary scanning drilling system, and a Dove prism rotary scanning drilling system.
其中,振镜扫描打孔系统为最成熟的打孔系统,加工范围大,控制简单。但是由于机械分辨率的限制使得振镜扫描系统很难对直径小于0.2mm的微孔进行精密加工。Among them, the galvanometer scanning drilling system is the most mature drilling system, with a large processing range and simple control. However, due to the limitation of mechanical resolution, it is difficult for the galvanometer scanning system to precisely process micro-holes with a diameter less than 0.2mm.
三光楔旋转扫描打孔系统需要保证三个光楔的同步旋转,同时也需要准确控制光楔之间的相对角度,如果控制精度不好这将影响打孔的圆度和锥度,这对电机的旋转控制精度要求极高,同时控制打孔的半径和锥度的算法十分复杂,例如中国专利申请公开号为CN103056519A的公开文本。The three optical wedge rotary scanning drilling system needs to ensure the synchronous rotation of the three optical wedges, and also needs to accurately control the relative angle between the optical wedges. If the control accuracy is not good, it will affect the roundness and taper of the hole, which will affect the motor. The precision of the rotation control is extremely high, and the algorithm for controlling the radius and taper of the hole is very complicated, for example, the publication of the Chinese patent application publication number CN103056519A.
道威棱镜的制造和安装误差会对打孔的圆度和锥度产生较大的影响,因此需要使用复杂的补偿光学系统来补偿系统的制造和安装误差。这不仅大大增加了系统的体积和重量,还增加了系统的制造难度和生产成本。例如美国专利公开号为US7842901B2的公开文本。The manufacturing and installation errors of the Dove prism will have a great impact on the roundness and taper of the hole, so a complex compensation optical system is required to compensate the manufacturing and installation errors of the system. This not only greatly increases the volume and weight of the system, but also increases the manufacturing difficulty and production cost of the system. For example, the US Patent Publication No. is US7842901B2.
发明内容Contents of the invention
本发明要解决的技术问题是:解决上述所提出的至少一个问题。The technical problem to be solved by the present invention is to solve at least one of the above-mentioned problems.
本发明解决其技术问题的解决方案是:The solution that the present invention solves its technical problem is:
一种旋切系统,包括激光器、楔形镜组、聚焦镜、角度调整镜;所述楔形镜组设置于所述激光器的光路传输下游,所述楔形镜组用于使光束进行平移运动;所述聚焦镜设置于所述聚焦镜的光路传输下游,所述聚焦镜用于对光束进行聚焦;所述角度调整镜设置在所述楔形镜组和所述激光器之间的光路中,或设置在所述聚焦镜和楔形镜组之间的光路中;所述角度调整镜用于调整经过角度调整镜后的光线飞行角度,所述角度调整镜和所述楔形镜组同步转动。A rotary cutting system, including a laser, a wedge mirror group, a focusing mirror, and an angle adjustment mirror; the wedge mirror group is arranged downstream of the optical path transmission of the laser, and the wedge mirror group is used to make the beam perform a translational movement; the The focusing mirror is arranged downstream of the optical path transmission of the focusing mirror, and the focusing mirror is used to focus the light beam; the angle adjustment mirror is arranged in the optical path between the wedge mirror group and the laser, or arranged in the In the optical path between the focusing mirror and the wedge mirror group; the angle adjustment mirror is used to adjust the flight angle of the light after passing through the angle adjustment mirror, and the angle adjustment mirror and the wedge mirror group rotate synchronously.
作为上述技术方案的进一步改进,所述角度调整镜为反射镜或分光镜。As a further improvement of the above technical solution, the angle adjustment mirror is a reflection mirror or a beam splitter.
作为上述技术方案的进一步改进,所述角度调整镜设置在所述楔形镜组和所述激光器之间,所述角度调整镜和所述楔形镜组之间设有四分之一波片,所述四分之一波片和所述楔形镜组之间设有PBS分光棱镜,所述激光器设置于所述PBS分光棱镜的上游,光路传输依次为激光器、PBS分光棱镜、四分之一波片、角度调整镜、四分之一波片、PBS分光棱镜、楔形镜组、聚焦镜。As a further improvement of the above technical solution, the angle adjustment mirror is arranged between the wedge mirror group and the laser, and a quarter-wave plate is arranged between the angle adjustment mirror and the wedge mirror group, so A PBS beam-splitting prism is arranged between the quarter-wave plate and the wedge mirror group, the laser is arranged upstream of the PBS beam-splitting prism, and the optical path transmission is followed by the laser, the PBS beam-splitting prism, and the quarter-wave plate , Angle adjustment mirror, quarter wave plate, PBS beam splitting prism, wedge mirror group, focusing mirror.
作为上述技术方案的进一步改进,所述PBS分光棱镜包括两个PBS三棱镜,所述PBS三棱镜的横截面为直角三角形,两个所述PBS三棱镜拼接成一个长方体。As a further improvement of the above technical solution, the PBS dichroic prism includes two PBS triangular prisms, the cross section of the PBS triangular prisms is a right triangle, and the two PBS triangular prisms are spliced into a cuboid.
作为上述技术方案的进一步改进,所述角度调整镜设置在所述聚焦镜和楔形镜组之间,所述角度调整镜为分光镜,所述分光镜用于把一部分的光反射到聚焦镜,余下的光穿过所述分光镜,所述分光镜的旁侧设有检测器,所述检测器用于检测穿过所述分光镜的光的位置和角度。As a further improvement of the above technical solution, the angle adjustment mirror is arranged between the focus mirror and the wedge mirror group, the angle adjustment mirror is a beam splitter, and the beam splitter is used to reflect a part of the light to the focus mirror, The remaining light passes through the beam splitter, and a detector is arranged beside the beam splitter, and the detector is used to detect the position and angle of the light passing through the beam splitter.
作为上述技术方案的进一步改进,所述楔形镜组包括相同的两个楔形镜,两个楔形镜互为中心对称设置,两个所述楔形镜与所述角度调整镜同步转动。As a further improvement of the above technical solution, the wedge mirror group includes the same two wedge mirrors, the two wedge mirrors are arranged symmetrically to each other, and the two wedge mirrors rotate synchronously with the angle adjustment mirror.
作为上述技术方案的进一步改进,两个所述楔形镜之间的距离可调。As a further improvement of the above technical solution, the distance between the two wedge mirrors is adjustable.
作为上述技术方案的进一步改进,所述激光器为脉冲激光器。As a further improvement of the above technical solution, the laser is a pulsed laser.
本发明还提供了一种应用上述旋切系统的旋切方法,步骤1,确定旋切打孔的加工锥角、打孔半径,使聚焦镜正朝向打孔的位置;步骤2,分别调整楔形镜组和角度调整镜,使楔形镜组和角度调整镜同步转动,所述角度调整镜为反射镜,所述楔形镜组包括两个互为中心对称的楔形镜;步骤3,打开激光器。The present invention also provides a rotary cutting method using the above rotary cutting system. Step 1, determine the processing cone angle and drilling radius of the rotary cutting hole, so that the focusing mirror is facing the position of the hole; step 2, adjust the wedge shape respectively. The mirror group and the angle adjustment mirror make the wedge mirror group and the angle adjustment mirror rotate synchronously, the angle adjustment mirror is a reflective mirror, and the wedge mirror group includes two mutually symmetrical wedge mirrors; step 3, turn on the laser.
作为上述技术方案的进一步改进,所述打孔半径为R,所述R=f*tanβ1=f*tan2w,所述f为聚焦镜的焦距,所述β1为反射镜反射光束后的出射角,所述w为反射镜的倾斜角度;所述加工锥角为θ,所述θ=arctan[(L1tanβ1+L2tanβ2+L3tanβ1+R)/f],其中L1为反射镜距离最近的楔形镜之间的距离,L2为两个楔形镜之间的距离,楔形镜与聚焦镜之间的距离,R为打孔半径,f为聚焦镜的焦距;楔形镜出射光线与光轴之间的夹角为β2,所述β2=arcsin[n2 sin[α-arcsin[sin(α+β1)/n2]]],其中n2为楔形镜的折射率,α为楔形镜的楔角。As a further improvement of the above-mentioned technical solution, the hole radius is R, the R=f*tanβ1=f*tan2w, the f is the focal length of the focusing mirror, and the β1 is the exit angle after the light beam is reflected by the mirror, Described w is the angle of inclination of reflecting mirror; Described machining taper angle is θ, and described θ=arctan[(L1tanβ1+L2tanβ2+L3tanβ1+R)/f], wherein L1 is the distance between the nearest wedge mirrors of reflecting mirror Distance, L2 is the distance between the two wedge mirrors, the distance between the wedge mirror and the focus mirror, R is the hole radius, f is the focal length of the focus mirror; the angle between the wedge mirror exit light and the optical axis is β2 , the β2=arcsin[n2 sin[α-arcsin[sin(α+β1)/n2]]], wherein n2 is the refractive index of the wedge mirror, and α is the wedge angle of the wedge mirror.
本发明的有益效果是,本发明中的旋切系统区别于传统技术中采用多个光楔带 动激光旋转,本发明的旋切系统通过角度调整镜的转动从而实现带动激光进行旋转,有效地降低了转动的物体的重量和体积,使激光旋转速度更快、加工精度更高。The beneficial effect of the present invention is that the rotary cutting system of the present invention is different from the traditional technology in which multiple optical wedges are used to drive the laser to rotate, and the rotary cutting system of the present invention can drive the laser to rotate by rotating the angle adjustment mirror, effectively reducing The weight and volume of the rotating object are reduced, making the laser rotation speed faster and the processing accuracy higher.
本发明中的旋切方法应用了上述旋切系统,其操作简便、结构简单,方便使用者进行参数调节。The rotary cutting method in the present invention applies the above rotary cutting system, which is easy to operate, simple in structure, and convenient for users to adjust parameters.
附图说明Description of drawings
为了更清楚地说明本发明实施例中的技术方案,下面将对实施例描述中所需要使用的附图作简单说明。显然,所描述的附图只是本发明的一部分实施例,而不是全部实施例,本领域的技术人员在不付出创造性劳动的前提下,还可以根据这些附图获得其他设计方案和附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly describe the drawings that need to be used in the description of the embodiments. Apparently, the described drawings are only some embodiments of the present invention, not all embodiments, and those skilled in the art can obtain other designs and drawings based on these drawings without creative work.
图1是本发明中的角度调整镜设置在所述楔形镜组和所述激光器之间的光路中的示意图;Fig. 1 is the schematic diagram that the angle adjustment mirror among the present invention is arranged in the optical path between described wedge mirror group and described laser;
图2是本发明中的角度调整镜设置于聚焦镜和楔形镜之间的光路的示意图;Fig. 2 is the schematic diagram of the optical path in which the angle adjustment mirror is arranged between the focusing mirror and the wedge mirror in the present invention;
图3是本发明中同时采用反射镜和分光镜的实施方式的示意图。Fig. 3 is a schematic diagram of an embodiment of the present invention using both reflective mirrors and beam splitters.
附图中:1-激光器,2-楔形镜,3-PBS分光棱镜,4-聚焦镜,5-反射镜,6-分光镜,7-检测器。In the accompanying drawings: 1-laser, 2-wedge mirror, 3-PBS beam splitting prism, 4-focusing mirror, 5-reflecting mirror, 6-beam splitting mirror, 7-detector.
具体实施方式detailed description
以下将结合实施例和附图对本发明的构思、具体结构及产生的技术效果进行清楚、完整地描述,以充分地理解本发明的目的、特征和效果。显然,所描述的实施例只是本发明的一部分实施例,而不是全部实施例,基于本发明的实施例,本领域的技术人员在不付出创造性劳动的前提下所获得的其他实施例,均属于本发明保护的范围。另外,文中所提到的所有联接/连接关系,并非单指构件直接相接,而是指可根据具体实施情况,通过添加或减少联接辅件,来组成更优的联接结构。本发明创造中的各个技术特征,在不互相矛盾冲突的前提下可以交互组合。The idea, specific structure and technical effects of the present invention will be clearly and completely described below in conjunction with the embodiments and accompanying drawings, so as to fully understand the purpose, features and effects of the present invention. Apparently, the described embodiments are only some of the embodiments of the present invention, rather than all of them. Based on the embodiments of the present invention, other embodiments obtained by those skilled in the art without creative efforts belong to The protection scope of the present invention. In addition, all the connection/connection relationships mentioned in this article do not refer to the direct connection of components, but mean that a better connection structure can be formed by adding or reducing connection accessories according to specific implementation conditions. The various technical features in the invention can be combined interactively on the premise of not contradicting each other.
本发明中,图1、图2和图3中,连接激光器1的线段代表激光光线。In the present invention, in FIG. 1 , FIG. 2 and FIG. 3 , the line segment connecting the laser 1 represents the laser light.
如图1所示,一种旋切系统,包括激光器1、楔形镜组、聚焦镜4、角度调整镜;所述楔形镜组设置于所述激光器1的光路传输下游,所述楔形镜组用于使光束进行平移运动;所述聚焦镜4设置于所述聚焦镜的光路传输下游,所述聚焦镜4用于对 光束进行聚焦;所述角度调整镜设置在所述楔形镜组和所述激光器1之间的光路中;所述角度调整镜用于调整经过角度调整镜后的光线飞行角度,所述角度调整镜和所述楔形镜组同步转动。As shown in Figure 1, a kind of rotary cutting system comprises laser 1, wedge-shaped mirror group, focusing mirror 4, angle adjustment mirror; Described wedge-shaped mirror group is arranged on the optical path transmission downstream of described laser 1, and described wedge-shaped mirror group uses To make the beam move in translation; the focusing mirror 4 is arranged downstream of the optical path transmission of the focusing mirror, and the focusing mirror 4 is used to focus the beam; the angle adjustment mirror is arranged between the wedge mirror group and the In the optical path between the lasers 1; the angle adjustment mirror is used to adjust the flight angle of light passing through the angle adjustment mirror, and the angle adjustment mirror and the wedge mirror group rotate synchronously.
本实施例中,激光器1所产生的激光依次经过角度调整镜、楔形镜组、聚焦镜4,使用者可通过调整该角度调整镜,从而调整激光从角度调整镜后射出的角度,进而调整激光打孔的直径大小,使用者还可通过调整楔形镜组从而对激光飞行的路径进行平移,其调节十分方便,同时,该角度调整镜与楔形镜组可设为同轴传动,同步率能够得到保证,使得激光线可360°地转动,实现旋切的功能。In this embodiment, the laser light generated by the laser device 1 passes through the angle adjustment mirror, the wedge mirror group, and the focusing mirror 4 in turn. The user can adjust the angle adjustment mirror to adjust the angle at which the laser beam is emitted from the angle adjustment mirror, and then adjust the laser beam. The diameter of the hole, the user can also adjust the wedge-shaped mirror group to translate the path of the laser flight, which is very convenient to adjust. At the same time, the angle adjustment mirror and the wedge-shaped mirror group can be set as coaxial transmission, and the synchronization rate can be obtained. Guaranteed, the laser line can be rotated 360° to realize the function of rotary cutting.
使用时,为了调整光线从角度调整镜的出射角,使用者可对角度调整镜进行倾斜,进而,可实现改变光束在加工面上的扫描半径。角度调整镜和楔形镜组同步地告诉旋转可实现光束在加工面上的高速扫描。During use, in order to adjust the exit angle of the light from the angle adjustment mirror, the user can tilt the angle adjustment mirror, and further, the scanning radius of the light beam on the processing surface can be changed. The high-speed rotation of the angle adjustment mirror and the wedge mirror group can realize the high-speed scanning of the beam on the processing surface.
可选的,该角度调整镜为反射镜5或者分光镜6。而优选的,本实施例中,该角度调整镜为反射镜5。反射镜5轻便,而且其入射角与反射角调节较为容易。Optionally, the angle adjustment mirror is a reflecting mirror 5 or a beam splitter 6 . Preferably, in this embodiment, the angle adjustment mirror is the reflection mirror 5 . The reflector 5 is light, and its angle of incidence and angle of reflection are relatively easy to adjust.
优选的,反射镜5的直径为15mm,此外,反射镜5与楔形镜组旋转的速度在1000至48000r/min。Preferably, the diameter of the reflector 5 is 15 mm, and the rotation speed of the reflector 5 and the wedge mirror group is 1000 to 48000 r/min.
进一步的,所述角度调整镜为反射镜5,所述角度调整镜设置在所述楔形镜组和所述激光器1之间,所述角度调整镜和所述楔形镜组之间设有四分之一波片,所述四分之一波片和所述楔形镜组之间设有PBS分光棱镜3,所述激光器1设置于所述PBS分光棱镜3的上游,光路传输依次为激光器1、PBS分光棱镜3、四分之一波片、角度调整镜、四分之一波片、PBS分光棱镜3、楔形镜组、聚焦镜4。Further, the angle adjustment mirror is a reflection mirror 5, and the angle adjustment mirror is arranged between the wedge mirror group and the laser 1, and a quarter is arranged between the angle adjustment mirror and the wedge mirror group. A wave plate, a PBS beamsplitter prism 3 is arranged between the quarter wave plate and the wedge mirror group, the laser 1 is arranged upstream of the PBS beamsplitter prism 3, and the optical path transmission is successively laser 1, PBS beam splitting prism 3, quarter wave plate, angle adjustment mirror, quarter wave plate, PBS beam splitting prism 3, wedge mirror group, focusing mirror 4.
采用PBS分光棱镜,从而激光束可以垂直地入射到角度调整镜上,从而所选用的角度调整镜的尺寸可以更小,进而质量、体积更小,更容易实现高速旋转。The PBS beam splitter is adopted, so that the laser beam can be vertically incident on the angle adjustment mirror, so that the size of the selected angle adjustment mirror can be smaller, and then the quality and volume are smaller, and it is easier to achieve high-speed rotation.
若不采用PBS分光棱镜的情况下,入射到角度调整镜上的激光与角度调整镜之间的夹角一般在30°至60°左右,因而需要角度调整镜的面积相对更大,但是该实施例不需要采用PBS分光棱镜和四分之一波片,减少了激光能量的损耗,节省了器材。If the PBS dichroic prism is not used, the angle between the laser incident on the angle adjustment mirror and the angle adjustment mirror is generally about 30° to 60°, so the area of the angle adjustment mirror is relatively larger, but this implementation For example, there is no need to use PBS beamsplitter prism and quarter wave plate, which reduces the loss of laser energy and saves equipment.
使用时,四分之一波片可以对线偏振光进行旋转,入射的线偏振光经过四分之一波片后,出射光与入射光之间相位差产生了π/2的延迟,一个周期为2π。激光经过两次四分之一波片后其相位发生了π的延迟,从而使得激光最后可以完全透过PBS偏振分光棱镜。PBS偏振分光棱镜可以将由激光器1发出的线偏振激光全反射到角度 调整镜上,本实施例中的角度调整镜优选为反射镜5,激光经过反射镜5的反射后穿过四分之一波片,最后完全透过PBS偏振分光棱镜到达楔形镜组,从而使得激光器1所产生的激光的能量能够较为完整地保留。When in use, the quarter-wave plate can rotate the linearly polarized light. After the incident linearly polarized light passes through the quarter-wave plate, the phase difference between the outgoing light and the incident light produces a delay of π/2, one cycle is 2π. After the laser passes through the quarter-wave plate twice, its phase is retarded by π, so that the laser can finally completely pass through the PBS polarization beam splitter. The PBS polarization beam splitter can totally reflect the linearly polarized laser light emitted by the laser 1 onto the angle adjustment mirror. The angle adjustment mirror in this embodiment is preferably a reflection mirror 5, and the laser light passes through a quarter wave after being reflected by the reflection mirror 5. sheet, and finally completely pass through the PBS polarizing beam splitter to reach the wedge mirror group, so that the energy of the laser light generated by the laser 1 can be relatively completely preserved.
当然,在实际使用中,还可以不采用PBS分光棱镜3和四分之一波片,通过激光器1直接把激光射向反射镜5也可以。在本实施例中,旋切时,反射镜5的法线与反射镜旋转的轴线不共线。Of course, in actual use, instead of using the PBS dichroic prism 3 and the quarter-wave plate, it is also possible to direct the laser light to the reflector 5 through the laser 1 . In this embodiment, during rotary cutting, the normal of the reflector 5 is not collinear with the axis of rotation of the reflector.
此外,PBS偏振分光棱镜、四分之一波片外置于角度调整镜,很大程度上减轻了角度调整镜的运动时驱动组件所要带动的重量,更有效地提高精度。In addition, the PBS polarization beam splitter and the quarter-wave plate are placed outside the angle adjustment mirror, which greatly reduces the weight of the driving components when the angle adjustment mirror moves, and improves the accuracy more effectively.
所述PBS分光棱镜3包括两个PBS三棱镜,所述PBS三棱镜的横截面为直角三角形,两个所述PBS三棱镜拼接成一个长方体。该结构简单、设置方便。优选的,PBS分光棱镜3为偏振分光棱镜,其长宽高为10*10*10mm~20*20*20mm。可选的,该PBS分光棱镜3由石英或者普通玻璃材质制成。The PBS dichroic prism 3 includes two PBS triangular prisms. The cross section of the PBS triangular prisms is a right triangle, and the two PBS triangular prisms are spliced into a cuboid. The structure is simple and the setting is convenient. Preferably, the PBS dichroic prism 3 is a polarization dichroic prism, and its length, width and height are 10*10*10mm˜20*20*20mm. Optionally, the PBS dichroic prism 3 is made of quartz or ordinary glass.
如图2所示,作为可选的另外的一种实施方式,该旋切系统包括激光器1、楔形镜组、聚焦镜、角度调整镜;所述楔形镜组设置于所述激光器1的光路传输下游,所述楔形镜组用于使光束进行平移运动;所述聚焦镜4设置于所述聚焦镜的光路传输下游,所述聚焦镜4用于对光束进行聚焦;角度调整镜设置在所述聚焦镜4和楔形镜组之间的光路中;所述角度调整镜用于调整经过角度调整镜后的光线飞行角度,所述角度调整镜和所述楔形镜组同步转动。As shown in Figure 2, as an alternative embodiment, the rotary cutting system includes a laser 1, a wedge mirror group, a focusing mirror, and an angle adjustment mirror; the wedge mirror group is arranged on the optical path of the laser 1 Downstream, the wedge mirror group is used to make the beam move in translation; the focusing mirror 4 is arranged on the optical path transmission downstream of the focusing mirror, and the focusing mirror 4 is used to focus the beam; the angle adjustment mirror is arranged on the In the optical path between the focusing mirror 4 and the wedge mirror group; the angle adjustment mirror is used to adjust the flight angle of the light after passing through the angle adjustment mirror, and the angle adjustment mirror and the wedge mirror group rotate synchronously.
在本实施方式中,将角度调整镜设置于聚焦镜4和楔形镜2之间,与上述的实施例把角度调整镜设置在楔形镜组和激光器1之间存在位置上的差异,但两者都可以通过调整角度调整镜的倾斜角度,从而调整旋切打孔的半径。In this embodiment, the angle adjustment mirror is arranged between the focusing mirror 4 and the wedge mirror 2, and there is a difference in position between the angle adjustment mirror and the above-mentioned embodiment where the angle adjustment mirror is arranged between the wedge mirror group and the laser 1, but both Both can adjust the tilt angle of the mirror by adjusting the angle, so as to adjust the radius of the rotary cutting hole.
本实施方式中,优选的,角度调整镜与楔形镜组分别由不同的电机驱动,但优选的,这两台电机同步转动。In this embodiment, preferably, the angle adjustment mirror and the wedge mirror group are respectively driven by different motors, but preferably, the two motors rotate synchronously.
可选的,所述角度调整镜为反射镜5或分光镜6,优选的,在本实施例中采用分光镜6。Optionally, the angle adjustment mirror is a reflecting mirror 5 or a beam splitter 6, preferably, the beam splitter 6 is used in this embodiment.
进一步的,所述角度调整镜设置在所述聚焦镜4和楔形镜组之间,所述角度调整镜为分光镜6,所述分光镜6用于把一部分的光反射到聚焦镜4,余下的光穿过所述分光镜6,所述分光镜6的旁侧设有检测器7,所述检测器7用于检测穿过分光镜6的激光的位置和角度。在本实施方式中,该角度调整镜采用分光镜6,从而使用者 可从分光镜6迎光面的背面设置检测器7,通过检测器7检测激光入射分光镜6的位姿,从而判断光线的位置是否准确,进而通过该检测器7得到的结果而判断旋切的精度。使用者可通过该检测器7的设置形成负反馈,通过该反馈的结果而相应地调整角度调整镜、楔形镜组的位姿,可有效地提高激光旋切的加工精度。Further, the angle adjustment mirror is arranged between the focusing mirror 4 and the wedge mirror group, the angle adjustment mirror is a beam splitter 6, and the beam splitter 6 is used to reflect a part of the light to the focusing mirror 4, and the remaining The light passes through the beam splitter 6, and a detector 7 is arranged beside the beam splitter 6, and the detector 7 is used to detect the position and angle of the laser beam passing through the beam splitter 6. In this embodiment, the angle adjustment mirror adopts the beam splitter 6, so that the user can install the detector 7 from the back of the light-facing surface of the beam splitter 6, and the detector 7 can detect the position and posture of the incident laser beam into the beam splitter 6, thereby judging the light Whether the position of the rotary cutting machine is accurate, and then the accuracy of the rotary cutting can be judged by the result obtained by the detector 7. The user can form negative feedback through the setting of the detector 7, and adjust the position and posture of the angle adjustment mirror and the wedge mirror group accordingly through the result of the feedback, which can effectively improve the processing accuracy of the laser rotary cutting.
更进一步的,如图3所示,本领域的技术人员还可以采用如下实施方式,该角度调整镜既设置于聚焦镜4和楔形镜2之间,还设置于楔形镜组和激光镜之间,在此情况下,楔形镜组和激光镜之间的角度调整镜采用反射镜5,该反射镜5与楔形镜组同步转动,该反射镜5用于调整从激光器1发出的激光的出射角,使得可对旋切打孔的半径进行调整,在聚焦镜4和楔形镜2之间的角度调整镜为分光镜6,该分光镜6为一透镜,该分光镜6用于对楔形镜组中出射的光束进行部分反射,余下部分穿过分光镜6。Furthermore, as shown in Figure 3, those skilled in the art can also adopt the following implementation mode, the angle adjustment mirror is arranged between the focusing mirror 4 and the wedge mirror 2, and is also arranged between the wedge mirror group and the laser mirror , in this case, the angle adjustment mirror between the wedge mirror group and the laser mirror adopts a reflector 5, which rotates synchronously with the wedge mirror group, and the reflector 5 is used to adjust the exit angle of the laser light emitted from the laser 1 , so that the radius of the rotary cutting hole can be adjusted, the angle adjustment mirror between the focusing mirror 4 and the wedge mirror 2 is a beam splitter 6, and the beam splitter 6 is a lens, and the beam splitter 6 is used for the wedge mirror group The outgoing beam is partially reflected, and the remaining part passes through the beam splitter 6.
可选的,分光镜6可以透光1%-10%,即,使得1%-10%的激光穿过分光镜6,余下的激光反射到聚焦镜上。Optionally, the beam splitter 6 can transmit 1%-10% of light, that is, 1%-10% of the laser light passes through the beam splitter 6, and the rest of the laser light is reflected to the focusing mirror.
使用者可在分光镜6的背光测设置检测器7,该检测器7用于对入射到分光镜6的光线进行位姿检测,确保分光镜6之前的激光传输运动的位置准确。使用者还可通过检测器7对激光进行实时的监控,从而及时形成负反馈,保证加工精度。The user can install a detector 7 on the backlight of the beam splitter 6, and the detector 7 is used to detect the pose of the light incident on the beam splitter 6, so as to ensure that the position of the laser transmission movement before the beam splitter 6 is accurate. The user can also monitor the laser in real time through the detector 7, so as to form negative feedback in time and ensure the processing accuracy.
在一些实施例中,聚焦镜4由石英材质或光学玻璃材质制成,可选的,其焦距在50mm至100mm之间。在实际使用中,聚焦镜4的焦距越长,激光在加工面的扫描半径则越大,反之则越小。In some embodiments, the focusing mirror 4 is made of quartz material or optical glass material, and optionally, its focal length is between 50 mm and 100 mm. In actual use, the longer the focal length of the focusing mirror 4 is, the larger the scanning radius of the laser beam on the processing surface is, and vice versa.
可选的,该激光器1为脉冲激光器1,其产生的脉宽可以是纳秒、皮秒或飞秒,其波长可以是300nm至1100nm,优选为355nm至1064nm之间。更优选的,所述的激光器1产生波长为1064nm、脉宽为300-350fs、直径为2-6mm的线偏振红外激光。Optionally, the laser 1 is a pulsed laser 1, the pulse width generated by it can be nanoseconds, picoseconds or femtoseconds, and its wavelength can be between 300nm and 1100nm, preferably between 355nm and 1064nm. More preferably, the laser 1 generates a linearly polarized infrared laser with a wavelength of 1064nm, a pulse width of 300-350fs, and a diameter of 2-6mm.
在一些实施例中,可以是上述任意的实施方式中,所述楔形镜组包括相同的两个楔形镜2,两个楔形镜2互为中心对称设置,两个所述楔形镜2与所述角度调整镜同步转动。两个楔形镜2的规格参数相同,两个楔形镜2放置方向相反,光路下游的楔形镜2用于矫正光路上游的楔形镜2对入射光线角度的改变,使得光路下游的楔形镜2出射光线的角度与反射镜5反射的光线角度相同。In some embodiments, it can be any of the above implementations, the wedge mirror group includes the same two wedge mirrors 2, and the two wedge mirrors 2 are arranged symmetrically to each other, and the two wedge mirrors 2 and the The angle adjustment mirror rotates synchronously. The specifications and parameters of the two wedge mirrors 2 are the same, and the two wedge mirrors 2 are placed in opposite directions. The wedge mirror 2 downstream of the optical path is used to correct the change of the incident light angle by the wedge mirror 2 upstream of the optical path, so that the wedge mirror 2 downstream of the optical path emits light The angle of is the same as the angle of light reflected by reflector 5.
优选的,楔形镜2采用石英材质或光学玻璃材质,可选的,其外径为10mm至30mm,其厚度为3mm至8mm,其楔角为6°至12°,使用者可根据实际情况对楔形 镜2的规格进行选用。Preferably, the wedge mirror 2 is made of quartz material or optical glass material. Optionally, its outer diameter is 10mm to 30mm, its thickness is 3mm to 8mm, and its wedge angle is 6° to 12°. The user can adjust it according to the actual situation. The specifications of the wedge mirror 2 are selected.
在一些实施例中,两个所述楔形镜2之间的距离可调。通过改变两个楔形镜2之间的相对距离从而实现圆孔锥度的改变。In some embodiments, the distance between the two wedge mirrors 2 is adjustable. The taper of the circular hole can be changed by changing the relative distance between the two wedge mirrors 2 .
在一些实施中,所述反射镜5、四分之一波片、PBS偏振分光棱镜和相对上游的楔形镜2之间的相对位置是固定不变的,使用者可把它们安装在一块可移动平台上,可以沿光轴方向进行左右平移,通过移动平台改变上游光路的楔形镜2与下游光路的楔形镜2之间的相对位置,使得光束沿光轴方向产生偏移从而实现打孔锥度的改变。In some implementations, the relative positions between the reflector 5, the quarter-wave plate, the PBS polarization beam splitter and the relatively upstream wedge mirror 2 are fixed, and the user can install them in a movable On the platform, it can be translated left and right along the optical axis direction, and the relative position between the wedge mirror 2 of the upstream optical path and the wedge mirror 2 of the downstream optical path is changed by moving the platform, so that the beam is shifted along the optical axis direction to realize the taper of the hole Change.
在一些实施例中,所述激光器1为脉冲激光器1,此外,该激光器的输出端还可设置扩束镜。In some embodiments, the laser 1 is a pulsed laser 1, and in addition, a beam expander mirror may be provided at the output end of the laser.
本发明还提供了一种应用上述任一实施例中的旋切系统的旋切方法,步骤1,确定旋切打孔的加工锥角、打孔半径,使聚焦镜4正朝向打孔的位置;步骤2,分别调整楔形镜组和角度调整镜,使楔形镜组和角度调整镜同步转动;步骤3,打开激光器1。The present invention also provides a rotary cutting method using the rotary cutting system in any of the above embodiments, step 1, determine the processing cone angle and drilling radius of the rotary cutting hole, and make the focusing mirror 4 facing the position of the hole ; Step 2, adjust the wedge mirror group and the angle adjustment mirror respectively, so that the wedge mirror group and the angle adjustment mirror rotate synchronously; Step 3, turn on the laser 1 .
可选的,所述角度调整镜为反射镜5,所述楔形镜组包括两个互为中心对称的楔形镜2。Optionally, the angle adjustment mirror is a reflecting mirror 5, and the wedge mirror group includes two wedge mirrors 2 that are symmetrical to each other.
该方法可采用上述的旋切系统,而上述的旋切系统已经进行文字描述,本领域的技术人员结合附图应当能够理解,故此处不再针对旋切系统展开描述。The method can use the above-mentioned rotary cutting system, and the above-mentioned rotary cutting system has been described in words, and those skilled in the art should be able to understand it in conjunction with the accompanying drawings, so the description of the rotary cutting system will not be repeated here.
进一步的,所述打孔半径为R,所述R=f*tanβ1=f*tan2w,所述f为聚焦镜4的焦距,所述β1为反射镜反射光束后的出射角,所述w为反射镜5的倾斜角度;所述加工锥角为θ,所述θ=arctan[(L1tanβ1+L2tanβ2+L3tanβ1+R)/f],其中L1为反射镜5距离最近的楔形镜2之间的距离,L2为两个楔形镜2之间的距离,楔形镜2与聚焦镜4之间的距离,R为打孔半径,f为聚焦镜4的焦距;楔形镜2出射光线与光轴之间的夹角为β2,所述β2=arcsin[n2 sin[α-arcsin[sin(α+β1)/n2]]],其中n2为楔形镜2的折射率,α为楔形镜2的楔角。Further, the hole radius is R, the R=f*tanβ1=f*tan2w, the f is the focal length of the focusing mirror 4, the β1 is the exit angle after the light beam is reflected by the mirror, and the w is The angle of inclination of reflector 5; Described machining taper angle is θ, described θ=arctan[(L1tanβ1+L2tanβ2+L3tanβ1+R)/f], wherein L1 is the distance between reflector 5 and the nearest wedge mirror 2 , L2 is the distance between the two wedge mirrors 2, the distance between the wedge mirror 2 and the focusing mirror 4, R is the hole radius, f is the focal length of the focusing mirror 4; Angle is β2, described β2=arcsin[n2 sin[α-arcsin[sin(α+β1)/n2]]], wherein n2 is the refractive index of wedge mirror 2, and α is the wedge angle of wedge mirror 2.
通过该方法,使用者可根据需要加工孔的参数对反射镜55的出射角、上述的L1、上述的L2进行调整,此外,对于不同孔的规格,使用者还可以通过更换不同的聚焦镜4从而调整聚焦镜4的焦距,通过更换不同的楔形镜2来调整其楔角的大小,对于光线的调整十分方便。Through this method, the user can adjust the exit angle of the reflector 55, the above-mentioned L1, and the above-mentioned L2 according to the parameters of the hole to be processed. In addition, for different hole specifications, the user can also change the focus lens 4 Thereby, the focal length of the focusing mirror 4 is adjusted, and the size of the wedge angle is adjusted by changing different wedge mirrors 2, which is very convenient for light adjustment.
经过实验验证,在实际使用中,本发明的加工孔径和打孔锥度范围大加工精度高,可实现直径0.01mm-5mm的孔径加工,可实现±7°的锥孔加工。例如是实现零锥度孔的加工,其原理为利用聚焦镜4聚焦的光线的外侧沿着孔的深度方向旋转切割孔的内壁,从而形成零锥度的孔。It has been verified by experiments that in actual use, the invention has a large processing aperture and a taper range and high processing accuracy, and can realize aperture processing with a diameter of 0.01mm-5mm, and can realize tapered hole processing of ±7°. For example, to realize the processing of zero-taper holes, the principle is to use the outer side of the light focused by the focusing lens 4 to rotate and cut the inner wall of the hole along the depth direction of the hole, thereby forming a zero-taper hole.
以上对本发明的较佳实施方式进行了具体说明,但本发明创造并不限于所述实施例,熟悉本领域的技术人员在不违背本发明精神的前提下还可作出种种的等同变型或替换,这些等同的变型或替换均包含在本申请权利要求所限定的范围内。The preferred embodiments of the present invention have been described in detail above, but the invention is not limited to the described embodiments, and those skilled in the art can also make various equivalent modifications or replacements without violating the spirit of the present invention. These equivalent modifications or replacements are all within the scope defined by the claims of the present application.

Claims (10)

  1. 一种旋切系统,包括激光器(1),其特征在于,还包括:A kind of rotary cutting system, comprises laser (1), is characterized in that, also comprises:
    楔形镜组,所述楔形镜组设置于所述激光器(1)的光路传输下游,所述楔形镜组用于使光束进行平移运动;A wedge-shaped mirror group, the wedge-shaped mirror group is arranged downstream of the optical path transmission of the laser (1), and the wedge-shaped mirror group is used to make the beam perform a translational movement;
    聚焦镜(4),所述聚焦镜(4)设置于所述聚焦镜的光路传输下游,所述聚焦镜(4)用于对光束进行聚焦;A focusing mirror (4), the focusing mirror (4) is arranged downstream of the optical path transmission of the focusing mirror, and the focusing mirror (4) is used to focus the light beam;
    角度调整镜,所述角度调整镜设置在所述楔形镜组和所述激光器(1)之间的光路中,或设置在所述聚焦镜(4)和楔形镜组之间的光路中;所述角度调整镜用于调整经过角度调整镜后的光线飞行角度,所述角度调整镜和所述楔形镜组同步转动。An angle adjustment mirror, the angle adjustment mirror is arranged in the optical path between the wedge mirror group and the laser (1), or in the optical path between the focusing mirror (4) and the wedge mirror group; The angle adjustment mirror is used to adjust the flight angle of light passing through the angle adjustment mirror, and the angle adjustment mirror and the wedge mirror group rotate synchronously.
  2. 根据权利要求1所述的旋切系统,其特征在于,所述角度调整镜为反射镜(5)或分光镜(6)。The rotary cutting system according to claim 1, characterized in that the angle adjustment mirror is a reflection mirror (5) or a beam splitter (6).
  3. 根据权利要求1所述的旋切系统,其特征在于,所述角度调整镜为反射镜(5),所述角度调整镜设置在所述楔形镜组和所述激光器(1)之间,所述角度调整镜和所述楔形镜组之间设有四分之一波片,所述四分之一波片和所述楔形镜组之间设有PBS分光棱镜(3),所述激光器(1)设置于所述PBS分光棱镜(3)的上游,光路传输依次为激光器(1)、PBS分光棱镜(3)、四分之一波片、角度调整镜、四分之一波片、PBS分光棱镜(3)、楔形镜组、聚焦镜(4)。The rotary cutting system according to claim 1, wherein the angle adjustment mirror is a reflection mirror (5), and the angle adjustment mirror is arranged between the wedge mirror group and the laser (1), so A quarter-wave plate is provided between the angle adjustment mirror and the wedge mirror group, a PBS beamsplitter prism (3) is provided between the quarter-wave plate and the wedge mirror group, and the laser ( 1) It is arranged upstream of the PBS beam-splitting prism (3), and the optical path transmission is a laser (1), a PBS beam-splitting prism (3), a quarter-wave plate, an angle adjustment mirror, a quarter-wave plate, and a PBS Dichroic prism (3), wedge mirror group, focusing mirror (4).
  4. 根据权利要求3所述的旋切系统,其特征在于,所述PBS分光棱镜(3)包括两个PBS三棱镜,所述PBS三棱镜的横截面为直角三角形,两个所述PBS三棱镜拼接成一个长方体。The rotary cutting system according to claim 3, wherein the PBS dichroic prism (3) comprises two PBS triangular prisms, the cross section of the PBS triangular prism is a right triangle, and the two PBS triangular prisms are spliced into a cuboid .
  5. 根据权利要求1所述的旋切系统,其特征在于,所述角度调整镜设置在所述聚焦镜(4)和楔形镜组之间,所述角度调整镜为分光镜(6),所述分光镜(6)用于把一部分的光反射到聚焦镜(4),所述分光镜(6)的旁侧设有检测器(7),所述检测器(7)用于检测穿过分光镜(6)的光的位置和角度。The rotary cutting system according to claim 1, wherein the angle adjustment mirror is arranged between the focusing mirror (4) and the wedge mirror group, the angle adjustment mirror is a beam splitter (6), the The beam splitter (6) is used to reflect a part of the light to the focusing mirror (4), and the side of the beam splitter (6) is provided with a detector (7), and the detector (7) is used to detect the The position and angle of the light of the mirror (6).
  6. 根据权利要求1所述的旋切系统,其特征在于,所述楔形镜组包括相同的两个楔形镜(2),两个楔形镜(2)互为中心对称设置,两个所述楔形镜(2)与所述角度调整镜同步转动。The rotary cutting system according to claim 1, characterized in that, the wedge mirror group comprises two identical wedge mirrors (2), the two wedge mirrors (2) are arranged symmetrically to each other, and the two wedge mirrors (2) Rotate synchronously with the angle adjustment mirror.
  7. 根据权利要求6所述的旋切系统,其特征在于,两个所述楔形镜(2)之间的距离可调。The rotary cutting system according to claim 6, characterized in that the distance between the two wedge mirrors (2) is adjustable.
  8. 根据权利要求1所述的旋切系统,其特征在于,所述激光器(1)为脉冲激光器(1)。The rotary cutting system according to claim 1, characterized in that the laser (1) is a pulsed laser (1).
  9. 一种应用如权利要求1所述的旋切系统的旋切方法,其特征在于,步骤1,确定旋切打孔的加工锥角、打孔半径,使聚焦镜(4)正朝向打孔的位置;步骤2,分别调整楔形镜组和角度调整镜,使楔形镜组和角度调整镜同步转动,所述角度调整镜为反射镜(5),所述楔形镜组包括两个互为中心对称的楔形镜(2);步骤3,打开激光器(1)。A rotary cutting method using the rotary cutting system according to claim 1, characterized in that, step 1, determining the processing cone angle and drilling radius of the rotary cutting drilling, so that the focusing mirror (4) is facing the hole of the drilling position; step 2, adjust the wedge-shaped mirror group and the angle adjustment mirror respectively, so that the wedge-shaped mirror group and the angle adjustment mirror rotate synchronously, and the angle adjustment mirror is a reflecting mirror (5), and the wedge-shaped mirror group includes two mutually symmetrical wedge mirror (2); step 3, turn on the laser (1).
  10. 根据权利要求9所述的旋切方法,其特征在于,所述打孔半径为R,所述R=f*tanβ1=f*tan2w,所述f为聚焦镜的焦距,所述β1为反射镜反射光束后的出射角,所述e为反射镜的倾斜角度;所述加工锥角为θ,所述θ=arctan[(L1tanβ1+L2tanβ2+L3tanβ1+R)/f],其中L1为反射镜距离最近的楔形镜之间的距离,L2为两个楔形镜之间的距离,楔形镜与聚焦镜之间的距离,R为打孔半径,f为聚焦镜的焦距;楔形镜出射光线与光轴之间的夹角为β2,所述β2=arcsin[n2 sin[α-arcsin[sin(α+β1)/n2]]],其中n2为楔形镜的折射率,α为楔形镜的楔角。The rotary cutting method according to claim 9, wherein the hole radius is R, the R=f*tanβ1=f*tan2w, the f is the focal length of the focusing mirror, and the β1 is a mirror The exit angle after the reflected light beam, the e is the inclination angle of the reflector; the processing cone angle is θ, the θ=arctan[(L1tanβ1+L2tanβ2+L3tanβ1+R)/f], where L1 is the reflector distance The distance between the nearest wedge mirrors, L2 is the distance between two wedge mirrors, the distance between the wedge mirror and the focusing mirror, R is the hole radius, f is the focal length of the focusing mirror; The included angle between is β2, described β2=arcsin[n2 sin[α-arcsin[sin(α+β1)/n2]]], wherein n2 is the refractive index of wedge mirror, and α is the wedge angle of wedge mirror.
PCT/CN2021/137754 2021-07-07 2021-12-14 Laser rotary cutting system and rotary cutting method WO2023279662A1 (en)

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