WO2023233615A1 - 計測システム、加工システム、計測方法及び加工方法 - Google Patents

計測システム、加工システム、計測方法及び加工方法 Download PDF

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Publication number
WO2023233615A1
WO2023233615A1 PCT/JP2022/022463 JP2022022463W WO2023233615A1 WO 2023233615 A1 WO2023233615 A1 WO 2023233615A1 JP 2022022463 W JP2022022463 W JP 2022022463W WO 2023233615 A1 WO2023233615 A1 WO 2023233615A1
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WO
WIPO (PCT)
Prior art keywords
measurement
processing
center point
tool center
coordinate system
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2022/022463
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English (en)
French (fr)
Japanese (ja)
Inventor
隆志 中村
祥太郎 増田
智樹 宮川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
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Nikon Corp
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Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to US18/870,795 priority Critical patent/US20250347511A1/en
Priority to JP2024524100A priority patent/JPWO2023233615A1/ja
Priority to CN202280098332.0A priority patent/CN119585087A/zh
Priority to EP22944896.4A priority patent/EP4534258A4/en
Priority to KR1020247042406A priority patent/KR20250019067A/ko
Priority to PCT/JP2022/022463 priority patent/WO2023233615A1/ja
Priority to TW112120706A priority patent/TWI878912B/zh
Publication of WO2023233615A1 publication Critical patent/WO2023233615A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1679—Program controls characterised by the tasks executed
    • B25J9/1692—Calibration of manipulator
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0019—End effectors other than grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B25J19/021—Optical sensing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1656—Program controls characterised by programming, planning systems for manipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1694—Program controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
    • B25J9/1697—Vision controlled systems
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form
    • G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37097—Marker on workpiece to detect reference position
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37113—Psd position sensitive detector, light spot on surface gives x, y position
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37193—Multicoordinate measuring system, machine, cmm
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37457—On machine, on workpiece
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/39—Robotics, robotics to robotics hand
    • G05B2219/39024—Calibration of manipulator
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/39—Robotics, robotics to robotics hand
    • G05B2219/39026—Calibration of manipulator while tool is mounted
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/39—Robotics, robotics to robotics hand
    • G05B2219/39033—Laser tracking of end effector, measure orientation of rotatable mirror
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/50—Machine tool, machine tool null till machine tool work handling
    • G05B2219/50132—Jig, fixture

Definitions

  • the present invention relates to the technical field of measurement systems, processing systems, measurement methods, and processing methods.
  • the first member is attached to at least one of a workpiece and a jig that holds the workpiece, and the first member is attached to a movable part of a processing device capable of processing the workpiece.
  • a measuring device capable of irradiating a second member with measurement light, the measuring device capable of measuring the positions of each of the first member and the second member in a measurement coordinate system that is a coordinate system related to the measuring device;
  • a measurement system comprising: a measurement control device that controls a measurement device; Based on first position information indicating the position of the first member in the processing apparatus and second position information indicating the position of the first member in a processing coordinate system that is a coordinate system related to the processing apparatus, the measurement device a calculation unit that converts a position of the second member in the measurement coordinate system, which is measured based on the measurement light irradiated onto the second member, into a position of the second member in the processing coordinate system; and a transmitter capable of transmitting third position information indicating a position of the second member in
  • the first member is attached to at least one of a workpiece and a jig that holds the workpiece, and the first member is attached to a movable part of a processing device capable of processing the workpiece.
  • a measuring device capable of irradiating a second member with measurement light, the measuring device capable of measuring the positions of each of the first member and the second member in a measurement coordinate system that is a coordinate system related to the measuring device;
  • a measurement system comprising: a measurement control device that controls a measurement device; the measurement control device includes an input device; The measurement coordinate system is based on the position of the first member in the measurement coordinate system and the position of the first member in a processing coordinate system that is a coordinate system related to the processing device inputted via the input device.
  • a first calculation unit that calculates first conversion information for converting a position in the machining coordinate system to a position in the machining coordinate system
  • a first transmitter capable of transmitting data to a machining control device controlling under a machining coordinate system
  • a measurement system is provided that controls measurement of the second member by the measurement device based on seventh position information indicating a measurement position in the measurement coordinate system for measuring the second member.
  • the measurement system provided by the first aspect the processing device capable of processing the processing object, and the processing control that controls movement of the processing device under the processing coordinate system.
  • a processing system, the processing control device controlling the processing device under the processing coordinate system based on the position of the second member in the processing coordinate system indicated by the third position information. is provided.
  • the measurement system provided by the second aspect, the processing device capable of processing the processing object, and a processing control device that controls movement of the processing device under the processing coordinate system. and, the processing control device is configured to convert a measurement position in the processing coordinate system for measuring the second member into a measurement position in the measurement coordinate system based on the first conversion information.
  • a processing system is provided that includes a calculation unit and a second transmission unit that transmits seventh position information indicating the converted measurement position in the measurement coordinate system to the measurement control device.
  • a measuring device capable of measuring the first measuring member and the second measuring member attached to the processing device, and a measurement control device that controls the measuring device.
  • the measurement control device determines the position of the second measurement member measured by the measurement device based on the position of the first measurement member measured by the measurement device.
  • a measurement system is provided that includes a calculation unit that performs the conversion, and a transmission unit that can transmit position information indicating the converted position of the second measurement member to a processing control device that controls the processing device. .
  • a measurement device capable of measuring the first measurement member and the second measurement member attached to the processing device, and a measurement control device that controls the measurement device.
  • the measurement control device determines the position of the second measurement member measured by the measurement device based on the position of the first measurement member measured by the measurement device.
  • a measurement system is provided that includes a calculation unit that calculates conversion information for conversion, and a transmission unit that can transmit the conversion information to a processing control device that controls the processing device.
  • FIG. 1 is a perspective view showing an overview of the system.
  • FIG. 1 is a block diagram showing the configuration of the system.
  • FIG. 2 is a block diagram showing the configuration of a measurement control device.
  • FIG. 2 is a block diagram showing the configuration of a processing control device. It is a figure showing the tip part of a robot arm. It is a flowchart which shows an example of operation of the arithmetic device of a measurement control device.
  • FIG. 3 is a diagram showing an example of the positional relationship between a measuring device and a stereo camera. It is a figure which shows the 1st modification of the reflector module attached to a robot arm.
  • FIG. 3 is a diagram illustrating an example of the arrangement of multiple antennas.
  • FIG. 3 is a diagram showing an example of a method for measuring the position of a tool center point. It is a figure which shows another example of the measuring method of the position of a tool center point. It is a figure which shows another example of the measuring method of the position of a tool center point. It is a figure which shows another example of the measuring method of the position of a tool center point. It is a figure which shows another example of the measuring method of the position of a tool center point. It is a figure which shows another example of the measuring method of the position of a tool center point. It is a flowchart which shows another example of operation of the arithmetic device of a measurement control device. It is a perspective view showing an outline of a modification of a system. FIG.
  • FIG. 3 is a block diagram showing the configuration of a modified example of the system. It is a flowchart which shows another example of operation of the arithmetic device of a measurement control device.
  • FIG. 3 is a diagram for explaining the concept of integration threshold processing.
  • FIG. 3 is a diagram for explaining the order of measurement of reflectors.
  • FIG. 3 is a diagram for explaining the irradiation timing of measurement light.
  • FIG. 3 is a diagram illustrating an example of a measurement light irradiation method.
  • FIG. 3 is a diagram for explaining the concept of stationary determination. It is a figure which shows another example of the irradiation method of measurement light.
  • Embodiments of a measurement system, a processing system, a measurement method, and a processing method will be described. In the embodiment shown below, an example will be described in which a measurement system, a processing system, a measurement method, and a processing method are applied to the system 1.
  • a system 1 according to the embodiment will be described with reference to FIGS. 1 to 25. Note that the system 1 may also be referred to as a processing system.
  • the system 1 includes a measurement control device 10, a measurement device 21, a processing control device 30, and a robot 41.
  • the robot 41 may also be referred to as a processing device.
  • the measurement control device 10 controls the measurement device 21.
  • the processing control device 30 controls the robot 41.
  • the measurement control device 10 and the processing control device 30 can communicate with each other. Note that the measurement control device 10 and the measurement device 21 may constitute the measurement system 2.
  • the measurement control device 10 includes a calculation device 11, a storage device 12, a communication device 13, an input device 14, and an output device 15.
  • the arithmetic device 11, the storage device 12, the communication device 13, the input device 14, and the output device 15 may be connected via a data bus 16.
  • the processing control device 30 includes a calculation device 31, a storage device 32, a communication device 33, an input device 34, and an output device 35.
  • the arithmetic device 31, the storage device 32, the communication device 33, the input device 34, and the output device 35 may be connected via a data bus 36.
  • the arithmetic units 11 and 31 are, for example, a CPU (Central Processing Unit), a GPU (Graphical Processing Unit), and an FPGA (Field Programmable Gate Array). ).
  • a CPU Central Processing Unit
  • GPU Graphics Processing Unit
  • FPGA Field Programmable Gate Array
  • the storage devices 12 and 32 may include, for example, at least one of a RAM (Random Access Memory), a ROM (Read Only Memory), a hard disk device, a magneto-optical disk device, an SSD (Solid State Drive), and a hard disk array. That is, storage devices 12 and 32 may include non-transitory storage media.
  • the communication device 13 is capable of communicating with each of the measurement device 21 and the processing control device 30.
  • the communication device 13 may be able to communicate with another device different from the measurement device 21 and the processing control device 30 via a network not shown.
  • the communication device 33 is capable of communicating with the robot 41 and the measurement control device 10.
  • the communication device 33 may be able to communicate with other devices other than the robot 41 and the measurement control device 10 via a network not shown. Note that the network may be wired or wireless.
  • the input devices 14 and 34 may include, for example, at least one of a keyboard, a mouse, and a touch panel.
  • the input devices 14 and 34 may include a recording medium reading device capable of reading information recorded on a removable recording medium such as a USB (Universal Serial Bus) memory.
  • a USB Universal Serial Bus
  • the communication device 13 serves as an input device. It may work.
  • the processing control device 30 via the communication device 33 in other words, when the processing control device 30 acquires information via the communication device 33
  • the communication device 33 functions as an input device. It's fine.
  • the output devices 15 and 35 may include, for example, at least one of a display, a speaker, and a printer.
  • the output devices 15 and 35 may be capable of outputting information to a removable storage medium such as a USB memory, for example. Note that when information is output from the measurement control device 10 via the communication device 13, the communication device 13 may function as an output device. When information is output from the processing control device 30 via the communication device 33, the communication device 33 may function as an output device.
  • the robot 41 processes a workpiece W (see FIG. 1) held by a jig 90.
  • the processing control device 30 controls the robot 41 based on the measurement results obtained by the measurement device 21 from the measurement control device 10.
  • the processing control device 30 controls the robot 41 so that, for example, an end effector attached to the tip of a robot arm 410 of the robot 41 moves to a target position.
  • the processing control device 30 controls the robot 41, so that the robot 41 processes the workpiece W.
  • the control of the robot 41 may be control of the movement mode of the robot 41 (the movement mode of the movable parts of the robot 41).
  • the jig 90 may be referred to as a holder, a mounting member, a fixing member, or a clamp.
  • the measurement system 2 including the measurement device 21 and the processing control device 30 that controls the robot 41 each use their own coordinate systems. Specifically, the measurement system 2 uses a measurement coordinate system that is a coordinate system related to the measuring device 21, while the processing control device 30 uses a robot coordinate system that is a coordinate system related to the robot 41. That is, the measurement control device 10 controls the measurement device 21 under the measurement coordinate system. The processing control device 30 controls the movement of the robot 41 under the robot coordinate system.
  • the processing control device 30 may control the movement of the robot 41 under the measurement coordinate system.
  • the robot coordinate system may be a common coordinate system for the multiple robots, or a robot coordinate system may be set for each robot. (In this case, one robot coordinate system may be set for one robot, and another robot coordinate system may be set for another robot.)
  • the measurement coordinate system It is necessary to convert between the robot coordinate system and the robot coordinate system.
  • the robot coordinate system may be, for example, an orthogonal coordinate system composed of an x-axis, a y-axis, and a z-axis that are perpendicular to each other.
  • the measurement coordinate system may be, for example, an orthogonal coordinate system composed of an x-axis, a y-axis, and a z-axis that are orthogonal to each other.
  • the robot coordinate system may be referred to as a machining coordinate system.
  • the measuring device 21 measures the position of the workpiece W or the robot 41, for example.
  • the workpiece W may be a relatively large structure such as the fuselage of an aircraft, for example.
  • the measuring device 21 that measures the workpiece W, which is a relatively large structure may be, for example, a three-dimensional measuring device that can measure a relatively wide space.
  • An example of such a measuring device 21 is a laser tracker.
  • a laser tracker irradiates a reflector (also called a probe) that is in contact with a measurement target with laser light, and the laser light reflected from the reflector returns to the light source to determine the three-dimensional position of the measurement target.
  • the laser light may also be referred to as measurement light.
  • a reflector r11 is attached to the jig 90, and reflectors r12 and r13 are attached to the workpiece W (see FIG. 1).
  • Reflectors r11, r12 and r13 may be referred to as first members. That is, the first member may include reflectors r11, r12, and r13 that can reflect measurement light. Note that while no reflector is attached to the workpiece W, at least three reflectors may be attached to the jig 90.
  • a reflector module r2 including reflectors r21, r22, and r23 is attached to the robot arm 410 of the robot 41 (see FIG. 5). Reflectors r21, r22 and r23 may be referred to as second members. Robot arm 410 may be referred to as a movable part.
  • the measuring device 21 can irradiate each of the reflectors r11, r12, and r13 with measurement light, which may be a laser beam, for example.
  • the measuring device 21 can measure the positions of each of the reflectors r11, r12, and r13 in the measurement coordinate system based on the measurement light irradiated to each of the reflectors r11, r12, and r13.
  • the measuring device 21 can irradiate measurement light onto the reflectors r21, r22, and r23.
  • the measuring device 21 can measure the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system based on the measurement light irradiated to each of the reflectors r21, r22, and r23.
  • measuring the position of the workpiece W is not limited to directly measuring the position of a specific point on the workpiece W, but also measuring the position of a reflector attached to the workpiece W, It may also include indirect position measurement such as measuring the position of a reflector attached to the jig 90 that holds the.
  • measuring the position of the robot 41 is not limited to directly measuring the position of a specific point on the robot 41, but also indirectly measuring the position of a reflector attached to the robot 41. It may also include position measurement.
  • the measuring device 21 holds the workpiece W, which may be called a processing target, and the workpiece W.
  • the first member attached to at least one of the jigs 90 and the second member attached to the robot arm 410 of the robot 41 capable of processing the workpiece W can be irradiated with measurement light, and It can be said that the positions of each of the first member and the second member can be measured.
  • the positions of the reflector r11 attached to the jig 90 and the reflectors r12 and r13 attached to the workpiece W are often managed by the user of the system 1. Therefore, the positions of each of the reflectors r11, r12, and r13 are often known in the robot coordinate system.
  • each of the reflectors r11, r12, and r13 do not need to be known.
  • a reflector may be used to define features such as surfaces, lines, points, etc., and a coordinate system may be constructed using the defined features. Specifically, three reflectors are arranged on a first surface, three reflectors are arranged on a second surface that intersects with the first surface, and three reflectors are arranged on a second surface that intersects with the first surface and the second surface.
  • a coordinate system may be constructed by placing three reflectors on the third surface and defining each surface using the three reflectors placed on each surface.
  • a coordinate system may be constructed by a combination of a surface defined using three reflectors and a line defined using two reflectors different from the three reflectors.
  • a coordinate system may be constructed by a combination of a surface defined using three reflectors and a point defined using one reflector different from the three reflectors.
  • a coordinate system may be constructed by a combination of a surface defined using three reflectors, a line defined using two reflectors, and a point defined using one reflector.
  • reflectors r11, r12, and r13 function as members for defining a reference position.
  • reflectors r11, r12, and r13 may be referred to as reference reflectors.
  • the reflector r11 may be attached to the jig 90 at a position indicating the reference. Note that the position of the reflector r11 may be a position indicating the reference of the jig 90.
  • the reflectors r12 and r13 may be attached to a position (for example, a master hole) indicating a reference position of the workpiece W, which may be referred to as a processing target. Note that the positions where the reflectors r12 and r13 are attached may be used as a reference for the position of the workpiece W.
  • the measuring device 21 can irradiate measurement light onto each of the reflectors r11, r12, and r13.
  • the measuring device 21 measures the position of the reflector r11 in the measurement coordinate system based on the measurement light irradiated to the reflector r11.
  • the measuring device 21 measures the position of the reflector r12 in the measurement coordinate system based on the measurement light irradiated onto the reflector r12.
  • the measuring device 21 measures the position of the reflector r13 in the measurement coordinate system based on the measurement light irradiated onto the reflector r13.
  • the calculation device 11 of the measurement control device 10 acquires first position information indicating the positions of each of the reflectors r11, r12, and r13 in the measurement coordinate system from the measurement device 21.
  • the calculation device 11 acquires second position information indicating the positions of each of the reflectors r11, r12, and r13 in the robot coordinate system, which is input via the input device 14, for example.
  • the positions of the reflectors r11, r12, and r13 in the robot coordinate system may be automatically input to the measurement control device 10 (that is, they do not need to be input via the input device 14).
  • the arithmetic device 11 may acquire the second information, for example, by selecting the positions of the reflectors r11, r12, and r13 in the robot coordinate system input to the processing control device 30.
  • the calculation device 11 calculates a first transformation matrix for transforming the position in the measurement coordinate system and the position in the robot coordinate system.
  • the first transformation matrix may include, for example, a rotation matrix that performs rotational transformation of a position and a translation matrix that moves the position in parallel.
  • the first transformation matrix may be transmitted to the processing control device 30 by the communication device 13. That is, the communication device 13, which may be referred to as a first transmitter, may transmit the first transformation matrix to the processing control device. Note that various existing methods can be applied to how to obtain the first transformation matrix, so detailed explanation thereof will be omitted. Note that obtaining the first transformation matrix may also be referred to as calculating the first transformation matrix.
  • the first transformation matrix may be referred to as first transformation information.
  • the measuring device 21 can irradiate measurement light onto each of the reflectors r21, r22, and r23.
  • the measuring device 21 measures the position of the reflector r21 in the measurement coordinate system based on the measurement light irradiated to the reflector r21.
  • the measuring device 21 measures the position of the reflector r22 in the measurement coordinate system based on the measurement light irradiated to the reflector r22.
  • the measuring device 21 measures the position of the reflector r23 in the measurement coordinate system based on the measurement light irradiated onto the reflector r23.
  • the arithmetic device 11 uses the first transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the measurement coordinate system to the positions of the reflectors r21, r22, and r23 in the robot coordinate system.
  • the first transformation matrix includes a rotation matrix R and a translation matrix t
  • the position of the reflector r21 in the measurement coordinate system is (x r21 , y r21 , z r21 ).
  • the calculation device 11 may calculate the position of the reflector r21 in the robot coordinate system from the formula "R(x r21 , y r21 , z r21 )+t".
  • the calculation device 11 acquires second position information input via the input device 14 and indicating the positions of each of the reflectors r11, r12, and r13 in the robot coordinate system (step S101).
  • the measuring device 21 measures the positions of each of the reflectors r11, r12, and r13 in the measurement coordinate system based on the measurement light irradiated to each of the reflectors r11, r12, and r13 (step S102 ).
  • the calculation device 11 of the measurement control device 10 acquires first position information indicating the positions of each of the reflectors r11, r12, and r13 in the measurement coordinate system.
  • the calculation device 11 obtains a first transformation matrix for transforming the position in the measurement coordinate system and the position in the robot coordinate system (step S103).
  • the individual robot coordinate system can be used to change the position of each of the reflectors r21, r22, and r23 attached to the robot 41 while changing the posture of the robot 41, for example. This may be achieved by measuring. That is, an individual robot coordinate system may be realized by changing the posture of the robot and measuring the positions of each of the reflectors r21, r22, and r23 at, for example, three locations.
  • the size of a reflector such as reflector r11 is, for example, about several centimeters. That is, the size of the reflector is significantly smaller than, for example, the size of the workpiece W. For this reason, for example, if the measuring device 21 measures the position of the reflector while scanning the space to be measured with measurement light, the time required to measure the position of the reflector may become relatively long. Therefore, at least one of the following methods (3-1) and (3-2) may be used to shorten the time required to measure the position of the reflector.
  • the measurement system 2 may include, for example, a stereo camera 22 in addition to the measurement device 21.
  • the stereo camera 22 may be placed near the measuring device 21, as shown in FIG. 7, for example.
  • the measuring device 21 and the stereo camera 22 may be included in the same housing.
  • the positional relationship between the measuring device 21 and the stereo camera 22 is known.
  • the positional relationship between the measuring device 21 and the stereo camera 22 remains unchanged. Note that the positional relationship between the measuring device 21 and the stereo camera 22 does not need to be known. Further, the positional relationship between the measuring device 21 and the stereo camera 22 does not need to be constant.
  • a light emitter such as an LED (Light Emitting Diode) may be placed near each of the reflectors r11, r12, and r13.
  • the robot arm 410 is attached with a reflector module r2a as shown in FIG. It's fine.
  • the brightness value of the pixel corresponding to the light emitter is higher than the brightness value of other pixels. Therefore, if the light emitter is placed near the reflector as described above, the position of the light emitter can be relatively easily identified from the image captured by the stereo camera 21.
  • An example of a method for specifying the position of the light emitter will be described later (see “(7) Method for specifying the position of the light emitter from an image").
  • the measurement control device 10 converts the position of the light emitter specified from the image captured by the stereo camera 22 (that is, the position in the coordinate system related to the stereo camera 22) into the position in the measurement coordinate system related to the measurement device 21. (In other words, the coordinate systems can be integrated).
  • a rotation matrix and a translation matrix may be used, similar to the transformation between the position in the measurement coordinate system and the position in the robot coordinate system (see "(2-2) Coordinate transformation") described above.
  • the measurement control device 10 may estimate the position of the reflector as a measurement target of the measurement device 21 in the measurement coordinate system based on the position of the light emitter in the measurement coordinate system.
  • the accuracy of the position of the light emitter specified from the image captured by the stereo camera 22 changes depending on the pixel size of the stereo camera 22, the distance between the stereo camera 22 and the light emitter, and the like. That is, the accuracy of the position of the light emitter changes depending on the pixel size of the image sensor of the stereo camera 22 and the size of the image of the light emitter on the image sensor of the stereo camera 22. In the space to be measured by the measuring device 21, the accuracy of the position of the light emitting body specified from the image captured by the stereo camera 22 is lower than the accuracy according to the measuring device 21. In other words, specifying the position of the light emitter from the image captured by the stereo camera 22 is equivalent to specifying the position of the reflector near the light emitter, considering its accuracy.
  • the position of each of the reflectors r11, r12, and r13 may be specified in consideration of the positional relationship.
  • the measurement control device 10 may identify, for example, the position of a light emitter placed near the reflector r11 from the image captured by the stereo camera 22.
  • the measurement control device 10 may estimate the position of the reflector r11 based on the identified position of the light emitter.
  • the measurement control device 10 may control the measurement device 21 to measure the reflector r11 based on the estimated position of the reflector r11.
  • the measuring device 21 can narrow down the range to which measurement light should be irradiated, for example, to measure the position of the reflector r11. Therefore, the time required for the measuring device 21 to measure the position of the reflector r11 can be shortened.
  • reflectors r12 and r13 The same applies to reflectors r12 and r13.
  • the measurement control device 10 may identify, for example, the position of the light emitting body 81 included in the reflector module r2a from the image captured by the stereo camera 22.
  • the measurement control device 10 may estimate the positions of each of the reflectors r21, r22, and r23 included in the reflector module r2a based on the identified position of the light emitter 81. Then, the measurement control device 10 may control the measurement device 21 to measure each of the reflectors r21, r22, and r23 based on the estimated positions of each of the reflectors r21, r22, and r23.
  • the measuring device 21 can narrow down the range to which measurement light is to be irradiated in order to measure the positions of each of the reflectors r21, r22, and r23, for example. Therefore, the time required for the measuring device 21 to measure the position of each of the reflectors r21, r22, and r23 can be shortened.
  • the light emitting body may be arranged only in the vicinity of each of the reflectors r11, r12, and r13.
  • the measurement control device 10 may specify the position of the light emitter from the image captured by the stereo camera 22 only when the measurement device 21 measures the position of each of the reflectors r11, r12, and r13.
  • the light emitter may be placed only on the robot arm 410.
  • the measurement control device 10 specifies the position of the light emitter 81 from the image captured by the stereo camera 22 only when the measurement device 21 measures the position of each of the reflectors r21, r22, and r23 included in the reflector module r2a. You may do so.
  • the measurement system 2 is an imaging system capable of imaging at least one of the first member and the second member.
  • the stereo camera 22, which may be called a device may be provided.
  • the measurement system 2 includes a measurement device 21, which may be referred to as a first measurement device, and a second measurement device, which can measure at least one of the first member and the second member with a coarser precision than the measurement device 21.
  • the stereo camera 22 may be provided with a stereo camera 22 that may be
  • the measurement control device 10 may control the measurement by the measurement device 21 regarding at least one of the first member and the second member based on the measurement result by the stereo camera 22.
  • the measurement system 2 may include antennas ANT1, ANT2, and ANT3 capable of wireless communication.
  • the antennas ANT1, ANT2, and ANT3 may be respectively arranged around the workpiece W, as shown in FIG. 9, for example.
  • the measuring device 21 can convert the positions in the coordinate system related to the antennas ANT1, ANT2, and ANT3 to the positions in the measurement coordinate system related to the measuring device 21 (in other words, (for example, coordinate systems can be integrated).
  • the positional relationship between the measuring device 21 and each of the antennas ANT1, ANT2, and ANT3 does not need to be known. Further, the positional relationship between the measuring device 21 and each of the antennas ANT1, ANT2, and ANT3 does not have to be constant.
  • a ranging antenna capable of wireless communication may be placed near each of the reflectors r11, r12, and r13.
  • the robot arm 410 is equipped with a reflector module r2b as shown in FIG. It's okay to stay.
  • the antennas ANT1, ANT2, and ANT3 transmit radio waves.
  • Antenna ANT1 is capable of transmitting two or more radio waves each having a different frequency.
  • the ranging antenna 82 can receive two or more radio waves transmitted from the antenna ANT1.
  • the distance between the antenna ANT1 and the ranging antenna 82 is estimated from the difference in phase between two or more radio waves received by the ranging antenna 82. This is because the two or more radio waves emitted from the antenna ANT1 have different frequencies, so the phase difference between the two or more radio waves changes depending on the distance between the antenna ANT1 and the ranging antenna 82.
  • the distance from antenna ANT2 to ranging antenna 82 and the distance from antenna ANT3 to ranging antenna 82 are estimated.
  • a sphere centered on the antenna ANT1 and having a radius equal to the distance from the antenna ANT1 to the ranging antenna 82 a sphere centered on the antenna ANT2 and having a radius equal to the distance from the antenna ANT2 to the ranging antenna 82, and a sphere centered on the antenna ANT3.
  • the position of the distance-measuring antenna 82 can be specified by finding the intersection with a sphere whose radius is the distance from the antenna ANT3 to the distance-measuring antenna 82.
  • the error in distance measured using wireless communication is, for example, about 10 centimeters.
  • the accuracy of the position of the ranging antenna 82 is lower than the accuracy of the measuring device 21.
  • specifying the position of a ranging antenna (for example, ranging antenna 82) using wireless communication is equivalent to specifying the position of a reflector near the ranging antenna, considering its accuracy.
  • the measurement control device 10 may convert the position of the ranging antenna 82 measured using, for example, wireless communication into the position of the ranging antenna 82 in the measurement coordinate system.
  • the measurement control device 10 may estimate the positions of each of the reflectors r21, r22, and r23 included in the reflector module r2b, for example, based on the position of the ranging antenna 82 in the measurement coordinate system.
  • the measurement control device 10 may control the measurement device 21 to measure each of the reflectors r21, r22, and r23 based on the estimated positions of each of the reflectors r21, r22, and r23.
  • the measurement device 21 can narrow down the range to which measurement light should be irradiated in order to measure the positions of each of the reflectors r21, r22, and r23 (i.e., the scanning range of measurement light to find the reflectors). . Therefore, the time required for the measuring device 21 to measure the position of each of the reflectors r21, r22, and r23 can be shortened.
  • the measurement control device 10 may estimate the position of the reflector r11 based on the position of a ranging antenna placed near the reflector r11, which is specified by a similar method.
  • the measurement control device 10 may control the measurement device 21 to measure the reflector r11 based on the estimated position of the reflector r11.
  • the measurement device 21 can narrow down the range to which the measurement light is applied in order to measure the position of the reflector r11, for example (that is, the scanning range of the measurement light to find the reflector r11). Therefore, the time required for the measuring device 21 to measure the position of the reflector r11 can be shortened.
  • reflectors r12 and r13 The same applies to reflectors r12 and r13.
  • the ranging antenna may be placed only near each of the reflectors r11, r12, and r13.
  • the measurement control device 10 determines the distance to the ranging antenna from the distance to the ranging antenna specified by each of the antennas ANT1, ANT2, and ANT3 only when the measuring device 21 measures the position of each of the reflectors r11, r12, and r13. You can specify the location.
  • the ranging antenna may be placed only on the robot arm 410.
  • the measurement control device 10 is configured to move up to the ranging antenna 82 specified by each of the antennas ANT1, ANT2, and ANT3 only when the measurement device 21 measures the position of each of the reflectors r21, r22, and r23 included in the reflector module r2b.
  • the position of the ranging antenna 82 may be specified from the distance.
  • the measurement system 2 includes a measuring device 21, which may be called a first measuring device, and a first measuring device.
  • a measuring device 21 which may be called a first measuring device
  • the antennas ANT1, ANT2, and ANT3 which may be referred to as second measuring devices, which can measure at least one of the member and the second member with a coarser precision than the measuring device 21, may be provided.
  • the measurement control device 10 may control the measurement of the measurement device 21 regarding at least one of the first member and the second member based on the measurement results by the antennas ANT1, ANT2, and ANT3.
  • TCP Tool Center point
  • the TCP roughly specifies the position of the part of the end effector (in other words, tool) attached to the tip of the robot arm 410 that acts on the workpiece.
  • the TCP is a reference portion when the processing control device 30 controls the robot 41. For this reason, the tool center point may be referred to as a reference site.
  • the TCP changes depending on the use of the end effector. That is, if the end effector is changed, the TCP related to the robot arm 410 is also changed. For example, in the case of a rod-shaped end effector EE1 as shown in FIG. 5, the TCP may be located at the tip of the end effector EE1. If the end effector is, for example, a suction hand having a plurality of suction pads, the TCP may be located at one of the plurality of suction pads, or may be located between the plurality of suction pads.
  • the TCP may be located at one of the plurality of fingers or claws, or may be located at one of the plurality of fingers or claws, or may be located at one of the plurality of fingers or claws. Alternatively, it may be located in the middle of the claw portion.
  • the robot 41 may be referred to as a pickup device. Note that the end effector attached to the robot arm 410 is not limited to these.
  • the position of the reflector module r2 attached to the robot arm 410 is different from the position of the TCP.
  • the TCP corresponds to a part that acts on the object to be processed, it is difficult to attach a measuring member such as a reflector to the TCP.
  • the reflector module r2 is attached to a predetermined position on the robot arm 410, where the positional relationship between the reflector module r2 and the TCP does not change. That is, each of the reflectors r21, r22, and r23 included in the reflector module r2 is at a predetermined position in the robot arm 410 with respect to the TCP, which may be referred to as a reference part. Therefore, by using the positional relationship between each of the reflectors r21, r22, and r23 and the TCP, the position of the TCP can be specified by measuring the position of each of the reflectors r21, r22, and r23 with the measuring device 21.
  • a jig 91 has a hole H into which a rod-shaped end effector EE1 is inserted.
  • a sensor 23 for measuring the end effector EE1 is arranged at the bottom of the hole H.
  • the jig 91 is fixed so that its position does not change. It is assumed that the position of the sensor 23, in other words, the position of the bottom surface of the hole H of the jig 91 is known. In this case, when the tip of the end effector EE1 contacts the sensor 23 (in other words, when the sensor 23 measures the tip of the end effector EE1), the position of the TCP of the end effector EE1 is identified as the position of the sensor 23. be done.
  • the position of the TCP of the end effector EE1 thus identified may be input to the measurement control device 10 via the input device 14. At this time, the position of the TCP may be the position of the TCP in the robot coordinate system.
  • the sensor 23 is not limited to the bottom surface of the hole H, but may be placed on the side surface of the hole H, for example. Sensor 23 may be referred to as a third measuring device.
  • a hole H into which a rod-shaped end effector EE1 is inserted is formed in the jig 91a.
  • a sensor 23 for measuring the end effector EE1 is arranged at the bottom of the hole H.
  • a reflector module r3 including reflectors r31, r32, and r33 is attached to the jig 91a.
  • the jig 91a may be moved so that the end effector EE1 is inserted into the hole H (that is, the position of the jig 91a may be changed). It is assumed that the positional relationship between the sensor 23 and each of the reflectors r31, r32, and r33 is known.
  • the reflector module r3 or the reflectors r31, r32, and r33 may be referred to as a reference member.
  • the measuring device 21 touches each of the reflectors r31, r32, and r33. Irradiates measurement light.
  • the measuring device 21 measures the position of each of the reflectors r31, r32, and r33 in the measurement coordinate system based on the measurement light irradiated to each of the reflectors r31, r32, and r33.
  • the measurement control device 10 specifies the position of the TCP of the end effector EE1 based on the position of each of the reflectors r31, r32, and r33 in the measurement coordinate system and the positional relationship between the sensor 23 and each of the reflectors r31, r32, and r33. do.
  • the position of the TCP may be the position of the TCP in the measurement coordinate system.
  • a jig 92 is equipped with a sensor 24 that measures an object using a light cutting method.
  • the sensor 24 is configured to be able to emit the light L1.
  • the jig 92 is fixed so that its position does not change. For example, it is assumed that the position in the robot coordinate system corresponding to the reference point of the sensor 24 is known. In this case, the position of the TCP of the end effector EE1 measured by the sensor 24 is adjusted to the position in the robot coordinate system based on the relationship between the reference point related to the sensor 24 and the position in the robot coordinate system corresponding to the reference point. May be converted.
  • the TCP position of the end effector EE1 measured in this manner may be input to the measurement control device 10 via the input device 14. At this time, the position of the TCP may be the position of the TCP in the robot coordinate system. Note that the sensor 24 may be referred to as a third measuring device.
  • the sensor 24 is attached to the jig 92a.
  • a reflector module r4 including reflectors r41, r42, and r43 is attached to the jig 92a.
  • the jig 92a may be moved so that the sensor 24 approaches the end effector EE1. It is assumed that the positional relationship between the reference point related to the sensor 24 and each of the reflectors r41, r42, and r43 is known. Note that the reflector module r4 or the reflectors r41, r42, and r43 may be referred to as a reference member.
  • the measuring device 21 irradiates each of the reflectors r41, r42, and r43 with measurement light.
  • the measuring device 21 measures the position of each of the reflectors r41, r42, and r43 in the measurement coordinate system based on the measurement light irradiated to each of the reflectors r41, r42, and r43.
  • the measurement control device 10 determines the positional relationship between the reference point related to the sensor 24 and each of the reflectors r41, r42 and r43, the position of the TCP of the end effector EE1 measured by the sensor 24, and the reflectors r41, r42 and r42 in the measurement coordinate system.
  • the position of the TCP of the end effector EE1 is specified based on the position of each r43.
  • the position of the TCP may be the position of the TCP in the measurement coordinate system.
  • a non-contact sensor such as a stereo camera or a laser scanner may be used for TCP measurement.
  • an end effector EE2 which is, for example, an optical sensor, is attached to the tip of the robot arm 410.
  • a tool ball TB is attached to the jig 93.
  • a reflector module r5 including reflectors r51, r52, and r53 is attached to the jig 93.
  • the position of the jig 93 (in other words, the position of the tool ball TB) can be changed. It is assumed that the positional relationship between the center of the tool ball TB and each of the reflectors r51, r52, and r53 is known. Note that the positional relationship between the center of the tool ball TB and each of the reflectors r51, r52, and r53 may not be known.
  • the measuring device 21 irradiates each of the reflectors r51, r52, and r53 with measurement light.
  • the measuring device 21 measures the position of each of the reflectors r51, r52, and r53 in the measurement coordinate system based on the measurement light irradiated to each of the reflectors r51, r52, and r53.
  • the measurement control device 10 compares the positions of the reflectors r51, r52, and r53 in the measurement coordinate system with the center of the tool ball TB measured by the sensor serving as the end effector EE2.
  • Such an operation is performed multiple times (for example, three or more times) while changing the relative positional relationship between the end effector EE2 and the jig 93 (ie, the tool ball TB).
  • the position of the TCP of the end effector EE2 is specified.
  • the position of the TCP may be the position of the TCP in the measurement coordinate system.
  • a corner cube may be used instead of the tool ball TB.
  • each of reflectors r21, r22, and r23 included in reflector module r2 attached to robot arm 410 is irradiated with measurement light.
  • the measuring device 21 measures the position of each of the reflectors r21, r22, and r23 in the measurement coordinate system based on the measurement light irradiated to each of the reflectors r21, r22, and r23.
  • the positions of the reflectors r21, r22, and r23 and the position of the TCP are specified (measured) while the position and posture of the robot arm 410 remain unchanged.
  • the position and attitude of the robot arm 410 at this time will be appropriately referred to as “reference position and reference attitude” hereinafter.
  • (x rb1 , y rb1 , z rb1 ), (x rb2 , y rb2 , z rb2 ), (x rb3 , y rb3 , z rb3 ) and (x t , y t , z t ) are robot coordinates Let it be a position in the system. Note that in order to convert the positions of the reflectors r21, r22, and r23 in the measurement coordinate system measured by the measuring device 21 to the positions of the reflectors r21, r22, and r23 in the robot coordinate system, a first transformation matrix (“( 2) Coordinate system transformation) may be used.
  • the calculation device 11 of the measurement control device 10 calculates a posture corresponding to the reference posture of the robot arm 410 based on the positions of each of the reflectors r21, r22, and r23.
  • the calculated posture may be expressed as (W, P, R), for example.
  • W is the angle around the x-axis of the robot coordinate system
  • P is the angle around the y-axis of the robot coordinate system
  • R is the angle around the z-axis of the robot coordinate system. It's fine.
  • W is the amount of rotation of the robot arm 410 about the x-axis of the robot coordinate system
  • P is the amount of rotation of the robot arm 410 about the y-axis of the robot coordinate system
  • R is the amount of rotation of the robot arm 410 about the x-axis of the robot coordinate system.
  • This is the amount of rotation of the robot arm 410 around the z-axis in the coordinate system. That is, the amount of rotation around each of the x-axis, y-axis, and z-axis is referred to as "posture" in this embodiment.
  • the attitude of a vector (so-called tool axis vector) extending along the direction in which the end effector EE1 extends is regarded as the attitude of the TCP.
  • the attitude of the vector and the attitude of the robot arm 410 can be considered to be the same. Therefore, the calculation device 11 sets the position and orientation of the TCP to, for example, (x t , y t , z t , W, P, R) when the position and orientation of the robot arm 410 are the reference position and the reference orientation. .
  • the arithmetic device 11 stores in the storage device 12 the position and orientation of the TCP when the position and orientation of the robot arm 410 are the reference position and the reference orientation, and the positions of each of the reflectors r21, r22, and r23, in association with each other. do.
  • (x rb3 , y rb3 , z rb3 ) are stored in the storage device 12 while being linked to each other.
  • the calculation device 11 converts the positions of the reflectors r21, r22, and r23 and the position and orientation of the TCP based on the positions and orientations of the TCPs linked to each other and the positions of the reflectors r21, r22, and r23.
  • Find a second transformation matrix for The second transformation matrix includes, for example, a matrix for determining the position of the TCP based on the positions of each of the reflectors r21, r22, and r23, and a matrix for determining the attitude of the TCP based on the positions of each of the reflectors r21, r22, and r23.
  • the second transformation matrix may be transmitted to the processing control device 30 by the communication device 13. Note that various existing methods can be applied to how to obtain the second transformation matrix, so detailed explanation thereof will be omitted. Note that obtaining the second transformation matrix may also be referred to as calculating the second transformation matrix.
  • the second transformation matrix may be referred to as second transformation information.
  • the second transformation matrix may be obtained from the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system and the position of the TCP in the measurement coordinate system.
  • the arithmetic unit 11 uses the first transformation matrix to calculate the position of the TCP in the robot coordinate system. It may be converted to the position of the TCP in the measurement coordinate system.
  • the second transformation matrix may be obtained, for example, as follows. First, when the position and orientation of the robot arm 410 are at the reference position and the reference orientation, the positions of the reflectors r21, r22, and r23 are measured, and the reflectors r21, r22, and r23 are defined based on the measured positions. Find the posture of the surface being treated. Next, the processing control device 30 controls the robot 41 so that the position and orientation of the TCP become a predetermined position and orientation. As a result, the position and posture of robot arm 410 change.
  • the positions of each of the reflectors r21, r22, and r23 are measured, and the attitude of the surface defined by the reflectors r21, r22, and r23 is determined based on the measured positions.
  • the predetermined position and orientation of the TCP are determined by the processing control device 30 (that is, they are known).
  • the second transformation matrix may be statistically determined based on the results of repeating the above-mentioned operation multiple times.
  • the position and orientation of the robot arm 410 are the reference position and orientation, so it can be said that the TCP is located at a predetermined position.
  • the positions of each of the reflectors r21, r22, and r23 used to obtain the second transformation matrix are measured while the TCP of the end effector EE1 is being measured.
  • the reflectors r21, r22, and r23 are the second members
  • the computing device 11, which may be called a computing unit is configured such that the measuring device 21 irradiates the second member with the TCP of the robot 41 positioned at a predetermined position. It can be said that the second transformation matrix for converting the position of the second member and the position of the TCP is obtained based on the fourth position information indicating the position of the second member measured based on the measurement light.
  • the arithmetic device 11 which may be called a calculation section, is configured such that the measuring device 21 is irradiated onto the second member while the TCP of the robot 41 is located at the predetermined position.
  • the position of the second member and the position of the TCP based on fourth position information indicating the position of the second member measured based on the measurement light and fifth position information indicating the position of the TCP corresponding to the predetermined position. It can be said that the second transformation matrix for transforming .
  • the measurement system 2 includes a measurement device 21, which may be called a first measurement device, and a third measurement device, which can measure the position of the TCP of the robot 41.
  • the sensor 23 or 24 may be provided.
  • the calculation device 11, which may be called a calculation section is configured to measure the position of the TCP by the measurement device 21 based on the measurement light irradiated onto the second member while the sensor 23 or 24 is measuring the position of the TCP.
  • a second conversion matrix for converting the position of the second member and the position of the TCP may be determined based on the position of the second member and the position of the TCP measured by the sensor 23 or 24.
  • the jig for measuring the position of the TCP of the end effector EE1 is movable, and a reflector is attached to the jig (for example, in FIG. jig 91a (see jig 91a in FIG. 14, jig 92a in FIG. 14), the position of the reflector attached to the jig may move depending on the position of the end effector EE1 (that is, the position of the robot arm 410).
  • the positional relationship between the reflector attached to the jig and the reflectors r21, r22, and r23 (in other words, the second member) attached to the robot arm 410 is It can be said that this is a predetermined relationship.
  • the measuring device 21 measures the position of the reference member by irradiating measurement light onto the reference member that moves according to the position of the robot arm 410. , it may be possible to measure the position of the TCP of the robot 41 that moves together with the robot arm 410.
  • the calculation device 11 which may be referred to as a calculation section, measures the irradiation by the measurement device 21 on each of the reference member and the second member while the positional relationship between the reference member and the second member is in a predetermined relationship.
  • a second transformation matrix for converting the position of the second member and the position of the TCP may be determined based on the position of the TCP and the position of the second member measured based on light.
  • the arithmetic device 11 acquires the TCP position of the robot 41 when the robot arm 410 is in the standard position and standard posture. At this time, the calculation device 11 calculates the posture of the robot arm 410 corresponding to the reference posture based on the positions of the reflectors r21, r22, and r23. The calculation device 11 acquires the position and orientation of the TCP by setting the calculated orientation as the orientation of the TCP (step S201).
  • the measuring device 21 calculates the measurement coordinates based on the measurement light irradiated to each of the reflectors r21, r22, and r23 when the robot arm 410 of the robot 41 is in the reference position and reference posture.
  • the positions of each of reflectors r21, r22, and r23 in the system are measured (step S202).
  • the calculation device 11 of the measurement control device 10 acquires fourth position information indicating the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system.
  • the computing device 11 converts the positions of the reflectors r21, r22, and r23 and the position and orientation of the TCP based on the fourth position information and the position and orientation of the TCP acquired in the process of step S201.
  • a second transformation matrix is obtained for (step S203).
  • the measurement system 2 including the measurement control device 10 and the measurement device 21 and the processing control device 30 can be linked.
  • the measurement results obtained by the measuring device 21 can be used for controlling the robot 41 by the processing control device 30.
  • the positions of the reflectors r21, r22, and r23 in the measurement coordinate system measured by the measurement device 21 are changed using the first transformation matrix and the 2 transformation matrix can be used to transform to the position of the TCP in the robot coordinate system.
  • the position of the TCP in this robot coordinate system is used when the processing control device 30 controls the robot 41.
  • the communication device 13 of the measurement control device 10 transmits, for example, the position and orientation of the TCP in the robot coordinate system and the reflectors r21, r22, and r23 in the robot coordinate system when the robot arm 410 is in the reference position and orientation.
  • the positions may be linked to each other and transmitted to the processing control device 30.
  • the processing control device 30 mutually compares the position and posture of the TCP in the robot coordinate system and the positions of the reflectors r21, r22, and r23 in the robot coordinate system. It may be stored in the storage device 32 in a linked manner.
  • the processing control device 30 controls the robot 41 so that the position and orientation of the robot arm 410 become the reference position and the reference orientation.
  • the position set by the processing control device 30 as the target position may differ from the actual position of the TCP. Therefore, the processing control device 30 determines whether the position set as the target position is the actual position of the TCP based on, for example, the position and orientation of the TCP in the robot coordinate system when the robot arm 410 is in the reference position and orientation.
  • the origin of the robot coordinate system may be calibrated to match the position. Specifically, at least one of rotational transformation and parallel translation of the origin of the robot coordinate system may be performed.
  • the attitude of the TCP when the attitude of the robot arm 410 is the reference attitude may be calculated based on the positions of each of the reflectors r21, r22, and r23, as described above. Therefore, the processing control device 30 calibrates the origin of the robot coordinate system based on the position and orientation of the TCP in the robot coordinate system. In other words, the origin of the robot coordinate system is calibrated.
  • the measurement device 21 can measure the position and orientation of the robot arm 410 in a state different from the above-mentioned reference position and reference orientation.
  • the positions of each of the reflectors r21, r22, and r23 can be converted to the position and orientation of the TCP.
  • the second transformation matrix is the position and orientation of the TCP, for example (x t , y t , z t , W, P, R), and the reflector r21 , r22 and r23, for example, (x rb1 , y rb1 , z rb1 ), (x rb2 , y rb2 , z rb2 ) and (x rb3 , y rb3 , z rb3 ).
  • TCP position the position and orientation of the TCP
  • the rotation amount W around the x-axis of the robot coordinate system may be translated as the position in the rotational direction around the x-axis of the robot coordinate system.
  • the amount of rotation P around the y-axis of the robot coordinate system may be expressed as a position in the rotational direction of the robot coordinate system around the y-axis.
  • the amount of rotation R about the z-axis of the robot coordinate system may be expressed as a position in the rotational direction of the robot coordinate system about the z-axis.
  • the position and orientation of the TCP are the position in the x-axis direction of the robot coordinate system, the position in the y-axis direction of the robot coordinate system, the position in the z-axis direction of the robot coordinate system, and the position in the rotation direction around the x-axis of the robot coordinate system. It can be said to be expressed by a position, a position in the rotational direction around the y-axis of the robot coordinate system, and a position in the rotational direction around the z-axis of the robot coordinate system.
  • the TCP can move along each of the x-axis, y-axis, and z-axis in three-dimensional space, and can also rotate around the x-, y-, and z-axes. can.
  • TCP can be said to have six degrees of freedom of movement (so-called 6DoF: Six Degrees of Freedom).
  • the calculation of the position of the TCP may be performed in the calculation device 11 of the measurement control device 10 or in the calculation device 31 of the processing control device 30. Note that the calculation of the TCP position may be performed in a shared manner by the calculation devices 11 and 31. Furthermore, considering the transformation between the position in the measurement coordinate system and the position in the robot coordinate system, the following four methods can be cited.
  • the calculation device 11 of the measurement control device 10 uses the first transformation matrix to calculate the positions of the reflectors r21, r22, and r23 in the measurement coordinate system measured by the measurement device 21, and the positions of the reflectors r21, r22, and r23 in the robot coordinate system. It may be converted to the respective positions of r22 and r23.
  • the arithmetic device 11 may further use the second transformation matrix to transform the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system to the position of the TCP in the robot coordinate system.
  • the calculation device 11 of the measurement control device 10 uses the first transformation matrix to calculate the positions of the reflectors r21, r22, and r23 in the measurement coordinate system measured by the measurement device 21, and the positions of the reflectors r21, r22, and r23 in the robot coordinate system. It may be converted to the respective positions of r22 and r23.
  • the communication device 13 of the measurement control device 10 may transmit position information indicating the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system and the second transformation matrix to the processing control device 30.
  • the calculation device 31 of the processing control device 30 may use the second transformation matrix to convert the positions of the reflectors r21, r22, and r23 in the robot coordinate system to the positions of the TCPs in the robot coordinate system.
  • the calculation device 11 of the measurement control device 10 uses the second transformation matrix to convert the positions of the reflectors r21, r22, and r23 in the measurement coordinate system measured by the measurement device 21 to the position of the TCP in the measurement coordinate system. You can convert it to
  • the communication device 13 of the measurement control device 10 may transmit position information indicating the position of the TCP in the measurement coordinate system and the first transformation matrix to the processing control device 30.
  • the calculation device 31 of the processing control device 30 may convert the position of the TCP in the measurement coordinate system to the position of the TCP in the robot coordinate system using the first transformation matrix.
  • the communication device 13 of the measurement control device 10 transmits position information indicating the positions of the reflectors r21, r22, and r23 in the measurement coordinate system measured by the measurement device 21, first conversion information, and second conversion information. may be transmitted to the processing control device 30.
  • the calculation device 31 of the processing control device 30 uses the first transformation matrix to convert the positions of the reflectors r21, r22, and r23 in the measurement coordinate system to the positions of the reflectors r21, r22, and r23 in the robot coordinate system. good.
  • the arithmetic device 31 may further use the second transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the robot coordinate system to the positions of the TCPs in the robot coordinate system.
  • the measurement device 21 When conversion to the robot coordinate system and to the TCP position are performed in the measurement control device 10
  • the measurement device 21 is in a state where the position and orientation of the robot arm 410 are different from the reference position and reference orientation.
  • the measurement light may be applied to each of the reflectors r21, r22, and r23.
  • the measuring device 21 may measure the position of each of the reflectors r21, r22, and r23 in the measurement coordinate system based on the measurement light irradiated to each of the reflectors r21, r22, and r23.
  • the calculation device 11 of the measurement control device 10 uses the first transformation matrix to convert the positions of the reflectors r21, r22, and r23 in the measurement coordinate system to the positions of the reflectors r21, r22, and r23 in the robot coordinate system. good.
  • the arithmetic device 11 may further use the second transformation matrix to transform the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system to the position of the TCP in the robot coordinate system.
  • the arithmetic device 11 may use the second transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the measurement coordinate system to the position and orientation of the TCP in the measurement coordinate system.
  • the arithmetic device 11 may further use the first transformation matrix to transform the position of the TCP in the measurement coordinate system to the position of the TCP in the robot coordinate system.
  • the communication device 13 which may be referred to as a transmitter, may transmit position information indicating the position of the TCP in the robot coordinate system to the processing control device 30.
  • the processing control device 30 may control the movement of the robot arm 410 of the robot 41 to move the TCP based on the position of the TCP in the robot coordinate system indicated by the position information.
  • the first transformation matrix includes first position information indicating the positions of each of reflectors r11, r12, and r13 in the measurement coordinate system, and reflector r11 in the robot coordinate system. , r12, and r13. Therefore, "using the first transformation matrix” can be rephrased as “based on the first position information and the second position information.” "A state in which the position and orientation of the robot arm 410 are different from the reference position and reference orientation" can be rephrased as "a state in which the TCP is located at a position different from a predetermined position.”
  • a state in which the position and orientation of the robot arm 410 are different from the reference position and reference orientation corresponds to a state in which the sensor 23 or 24 does not measure the position of the TCP, for example in FIGS. 11 and 13.
  • a state in which the position and orientation of the robot arm 410 are different from the reference position and reference orientation means "the third measuring device is not measuring the position of the TCP". It can also be translated as "a state of no existence”.
  • the second transformation matrix is, for example, in FIGS. 11 and 13, when the sensor 23 or 24 is measuring the position of the TCP, the reflector r21, It may be determined based on the position of each of the reflectors r21, r22, and r23 measured by the measuring device 21 based on the measurement light irradiated to r22 and r23, and the position of the TCP measured by the sensor 23 or 24.
  • the measuring device 21 It can be rephrased as "based on the position of the second member measured based on the measurement light irradiated to the member and the position of the TCP measured by the third measuring device".
  • a state in which the position and orientation of the robot arm 410 are different from the reference position and reference orientation is, for example, the position of the reflectors r31, r32, and r33 attached to the jig 91a shown in FIG. 12 and the reflectors r21, r22, and r23. This corresponds to a state where the relationship is different from the predetermined relationship.
  • the reflectors r31, r32, and r33 as reference members and rephrase the reflectors r21, r22, and r23 as second members
  • "a state in which the position and orientation of the robot arm 410 are different from the reference position and reference orientation” is as follows. This can be paraphrased as "a state in which the positional relationship between the reference member and the second member is different from a predetermined relationship.”
  • the second transformation matrix is, for example, the reflectors r31, r32, and r33 attached to the jig 91a shown in FIG. 12, and the reflectors r21, r22, and r23.
  • the position of the TCP measured by the measuring device 21 based on the measurement light irradiated to the reflectors r31, r32, and r33 and the measurement light irradiated to the reflectors r21, r22, and r23 in a state where the positional relationship is a predetermined relationship.
  • the position of each of the reflectors r21, r22, and r23 measured by the measuring device 21 based on .
  • the measuring device 21 may irradiate measurement light onto each of the reflectors r21, r22, and r23 in different states.
  • the measuring device 21 may measure the position of each of the reflectors r21, r22, and r23 in the measurement coordinate system based on the measurement light irradiated to each of the reflectors r21, r22, and r23.
  • the calculation device 11 of the measurement control device 10 uses the first transformation matrix to convert the positions of the reflectors r21, r22, and r23 in the measurement coordinate system to the positions of the reflectors r21, r22, and r23 in the robot coordinate system. good.
  • the communication device 13, which may be referred to as a transmitter, may transmit the second transformation matrix and third position information indicating the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system to the processing control device 30.
  • the calculation device 31 of the processing control device 30 uses the second transformation matrix to convert the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system indicated by the third position information to the position of the TCP in the robot coordinate system. It's fine.
  • the processing control device 30 may control the movement of the robot arm 410 of the robot 41 based on the converted position of the TCP to move the position of the TCP.
  • the measuring device 21 may irradiate measurement light onto each of the reflectors r21, r22, and r23 in different states.
  • the measuring device 21 may measure the position of each of the reflectors r21, r22, and r23 in the measurement coordinate system based on the measurement light irradiated to each of the reflectors r21, r22, and r23.
  • the calculation device 11 of the measurement control device 10 may use the second transformation matrix to convert the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system to the position of the TCP in the measurement coordinate system.
  • the communication device 13, which may be referred to as a first transmitter, may transmit the first transformation matrix and ninth position information indicating the position of the TCP in the measurement coordinate system to the processing control device 30.
  • the calculation device 31 of the processing control device 30 may convert the position of the TCP in the measurement coordinate system indicated by the ninth position information to the position of the TCP in the robot coordinate system using the first transformation matrix.
  • the processing control device 30 may control the movement of the robot arm 410 of the robot 41 to move the position of the TCP based on the position of the TCP in the transformed robot coordinate system. That is, the processing control device 30 may control the movement of the robot arm 410 based on the ninth position information to move the position of the TCP.
  • the measurement device 21 When conversion to the robot coordinate system and conversion to the TCP position are performed in the processing control device 30 When the position and orientation of the robot arm 410 are different from the reference position and reference orientation, the measurement device 21 , the measurement light may be applied to each of the reflectors r21, r22, and r23. The measuring device 21 may measure the position of each of the reflectors r21, r22, and r23 in the measurement coordinate system based on the measurement light irradiated to each of the reflectors r21, r22, and r23.
  • the communication device 13 which may be referred to as a first transmitter, processes and controls the first transformation matrix, the second transformation matrix, and eighth position information indicating the positions of the reflectors r21, r22, and r23 in the measurement coordinate system.
  • the information may be transmitted to the device 30.
  • the calculation device 31 of the processing control device 30 uses the first transformation matrix to convert the positions of the reflectors r21, r22, and r23 in the measurement coordinate system indicated by the eighth position information into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. It may be converted to each position.
  • the arithmetic device 31 may further use the second transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the robot coordinate system to the positions of the TCPs in the robot coordinate system.
  • the calculation device 31 uses the second transformation matrix to convert the positions of the reflectors r21, r22, and r23 in the measurement coordinate system indicated by the eighth position information into the position and orientation of the TCP in the measurement coordinate system. good.
  • the calculation device 31 may further use the first transformation matrix to transform the position of the TCP in the measurement coordinate system to the position of the TCP in the robot coordinate system.
  • the processing control device 30 may control the movement of the robot arm 410 of the robot 41 to move the position of the TCP based on the position of the TCP in the transformed robot coordinate system.
  • the reflectors r21, r22, and r23 are the second members, and the processing control device 30 converts the position of the second member indicated by the eighth position information into the TCP position based on the second transformation matrix. Then, based on the converted position of the TCP, the movement of the robot arm 410 may be controlled to move the position of the TCP (or the robot 41 may be controlled to move the position of the TCP). , it can be said.
  • the workpiece W which may be referred to as a processing target, may be processed by a plurality of robots.
  • the system 1a shown in FIGS. 17 and 18 includes a measurement control device 10, a measurement device 21, a processing control device 30, and robots 41, 42, and 43.
  • a processing control device 30 controls robots 41, 42, and 43.
  • a reflector module r2 including reflectors r21, r22, and r23 shown in FIG. 5 is attached to the robot arm 410 of the robot 41. However, in FIG. 17, illustration of the reflector module r2 is omitted. Similarly, a reflector module including three reflectors is attached to the robot arm 420 of the robot 42. A reflector module including three reflectors is attached to the robot arm 430 of the robot 43.
  • the measuring device 21 can irradiate measurement light onto each of the reflectors r21, r22, and r23 included in the reflector module r2 attached to the robot arm 410.
  • the measuring device 21 measures the position of each of the reflectors r21, r22, and r23 in the measurement coordinate system based on the measurement light irradiated to each of the reflectors r21, r22, and r23.
  • the calculation device 11 of the measurement control device 10 uses the first transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the measurement coordinate system to the positions of the reflectors r21, r22, and r23 in the robot coordinate system.
  • the measuring device 21 can irradiate measurement light onto each of the three reflectors included in the reflector module attached to the robot arm 420.
  • the measuring device 21 measures the position of each of the three reflectors in the measurement coordinate system based on the measurement light irradiated onto each of the three reflectors.
  • the arithmetic device 11 uses the first transformation matrix to transform the positions of the three reflectors attached to the robot arm 420 in the measurement coordinate system to the positions of the three reflectors in the robot coordinate system.
  • the measuring device 21 can irradiate measurement light onto each of the three reflectors included in the reflector module attached to the robot arm 430.
  • the measuring device 21 measures the position of each of the three reflectors in the measurement coordinate system based on the measurement light irradiated onto each of the three reflectors.
  • the arithmetic device 11 uses the first transformation matrix to transform the positions of the three reflectors attached to the robot arm 430 in the measurement coordinate system to the positions of the three reflectors in the robot coordinate system.
  • the three reflectors may be referred to as the second member.
  • the calculation device 11 which may be called a calculation unit, is capable of calculating the position in the robot coordinate system of each of the plurality of second members attached to the robots 41, 42, and 43, which can process the workpiece W, respectively.
  • the first transformation matrix may be shared to calculate the position in the robot coordinate system of each of the plurality of second members attached to the robots 41, 42, and 43, respectively.
  • Images captured by the stereo camera 22 often contain noise. If the image contains noise, there is a risk that the position of the light emitter may be misrecognized due to the noise. Therefore, erroneous recognition can be suppressed by performing the process shown in the flowchart of FIG. 19, for example, and removing noise. Note that the process described below is an example, and the process is not limited thereto.
  • the calculation device 11 of the measurement control device 10 acquires an image captured by the stereo camera 22 (that is, an image captured by each of the two cameras included in the stereo camera 22) (step S301).
  • the computing device 11 generates a parallax image based on the image acquired in the process of step S301 (step S302). Note that various existing methods can be applied to the method of generating parallax images, so detailed explanation thereof will be omitted.
  • the computing device 11 performs median filter processing on the parallax image generated in the process of step S302 (step S303).
  • the arithmetic device 11 further performs integration threshold (IT) processing on the image that has been subjected to the median filter processing (step S304).
  • Integration threshold processing is processing that integrates or averages the values of each pixel (for example, luminance value) in the parallax image in the time direction, and removes the pixel values below a predetermined value (for example, sets them to 0). "To integrate or average the values of each pixel in the temporal direction” means to integrate or average the values of each pixel over a plurality of temporally continuous parallax images. Note that the predetermined value may be referred to as a threshold value.
  • Pixels whose values are relatively large due to noise are random (ie, different from image to image).
  • the value of the pixel corresponding to noise becomes relatively small. Therefore, noise can be removed by removing pixel values that are less than or equal to a predetermined value.
  • the integration threshold processing will be explained with reference to FIG. 20.
  • a description will be given using a frame image of 5 ⁇ 5 pixels.
  • numerical values such as "0" and "255" indicate the luminance value of the pixel.
  • the luminance value of each pixel constituting frame (n), which is the nth image, and the luminance value of each pixel constituting frame (n+1), which is the n+1th image following frame (n), are calculated.
  • a new image is generated by adding (integrating) the brightness values (see FIG. 20(b)).
  • the arithmetic average of the luminance value of each pixel constituting the (n) frame and the luminance value of each pixel constituting the (n+1) frame is calculated.
  • a threshold value is determined by multiplying the maximum brightness value (here, "499") in the generated new image by a predetermined ratio (for example, 50%). Then, in the generated new image, the brightness values of pixels whose brightness values are equal to or less than the threshold value are set to "0" (see FIG. 20(c)).
  • Adding (integrating) the brightness value of each pixel that makes up the image in FIG. A new image may be generated. That is, the integration threshold processing may be performed using a plurality of temporally continuous images.
  • the calculation device 11 detects the position of the light emitter from the parallax image subjected to the integration threshold processing in the process of step S304 (step S305).
  • the calculation device 11 uses the image obtained in the process of step S301 (i.e., by the stereo camera 22). Processing related to noise removal may be performed on the captured image).
  • one of the two cameras included in the stereo camera 22 may be provided with a bandpass filter.
  • the bandpass filter is configured such that the transmittance of the wavelength band of light emitted from the light emitter 81 (see FIG. 8), such as an LED, is relatively high, and the transmittance of the other wavelength bands is relatively low. It's fine.
  • the brightness value of the portion where the light emitting body 81 is reflected is relatively high, while the brightness value of the other portions is relatively low. Become. Therefore, the position of the light emitter 81 can be estimated relatively easily by referring to the image captured by the one camera.
  • the approximate position of the light emitter 81 in the image captured by the other camera of the two cameras included in the stereo camera 22 is determined. may be specified.
  • the position of the light emitter 81 may be identified, for example, by searching for a characteristic portion of the light emitter 81 from an image captured by the other camera. According to this method, for example, the time required to search for a characteristic portion of the light emitter 81 can be shortened, and erroneous recognition can be suppressed.
  • the robot arm 410 when the robot arm 410 is moving, for example, the first point in time when the position of the reflector r21 is measured and the second point in time when the position of the reflector r22 is measured are different. There is a possibility that the position and orientation of robot arm 410 at the second time point are different.
  • the movement of the robot arm 410 may be temporarily stopped in order to measure the positions of each of the reflectors r21, r22, and r23.
  • the scanning speed of the measurement light is sufficiently higher than the movement speed of the robot arm 410, the measurement error can be ignored.
  • the movement of the robot arm 410 does not need to be temporarily stopped in order to measure the positions of each of the reflectors r21, r22, and r23.
  • the moving speed of the robot arm 410 may be reduced when measuring the positions of the reflectors r21, r22, and r23.
  • the robot 41 is controlled by the processing control device 30. Therefore, when the robot 41 operates, the measurement control device 10 controls the measurement of the reflectors r21, r22, and r23 by the measurement device 21 in accordance with the signal output from the processing control device 30.
  • the arithmetic device 31 of the processing control device 30 may, for example, determine the position and orientation of the TCP when measuring the reflectors r21, r22, and r23 included in the reflector module r2 attached to the robot arm 410. After that, the calculation device 31 generates a measurement start signal for causing the measurement device 21 to start measurement.
  • the communication device 33 may transmit a measurement start signal to the measurement control device 10.
  • the measurement start signal may include information for the measurement control device 10 to control the measurement device 21.
  • the measurement start signal includes position information indicating the position and orientation of the TCP when measuring the reflectors r21, r22, and r23 (hereinafter appropriately referred to as "TCP position at the time of measurement"). It's good that it is. Specifically, position information indicating the position of the TCP at the time of measurement in the robot coordinate system determined by the calculation device 31 of the processing control device 30 may be included.
  • the arithmetic unit 11 of the measurement control device 10 uses the first transformation matrix to calculate the position of the TCP at the time of measurement in the robot coordinate system indicated by the position information included in the measurement start signal. It may be converted to the current TCP position.
  • the arithmetic device 11 may further use the second transformation matrix to transform the position of the TCP during measurement in the measurement coordinate system to the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system.
  • the computing device 11 may use the second transformation matrix to transform the position of the TCP during measurement in the robot coordinate system to the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system.
  • the arithmetic device 11 may further use the first transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the robot coordinate system to the positions of the reflectors r21, r22, and r23 in the measurement coordinate system.
  • the measurement control device 10 may control the measurement of the reflectors r21, r22, and r23 by the measuring device 21 based on the positions of the reflectors r21, r22, and r23 in the measurement coordinate system.
  • the measurement start signal may include position information indicating the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system.
  • the calculation device 31 of the processing control device 30 may determine the position of the TCP at the time of measurement in the robot coordinate system.
  • the arithmetic device 31 may use the second transformation matrix to transform the position of the TCP during measurement in the robot coordinate system to the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system.
  • the communication device 33 may transmit to the measurement control device 10 a measurement start signal that includes position information indicating the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system.
  • the calculation device 11 of the measurement control device 10 uses the first transformation matrix to calculate the positions of the reflectors r21, r22, and r23 in the robot coordinate system indicated by the position information included in the measurement start signal. , r22 and r23.
  • the measurement control device 10 may control the measurement of the reflectors r21, r22, and r23 by the measurement device 21 based on the positions of the reflectors r21, r22, and r23 in the measurement coordinate system.
  • the measurement start signal may include a position signal indicating the position of the TCP at the time of measurement in the measurement coordinate system.
  • the calculation device 31 of the processing control device 30 may determine the position of the TCP at the time of measurement in the robot coordinate system.
  • the calculation device 31 may use the first transformation matrix to convert the position of the TCP at the time of measurement in the robot coordinate system to the position of the TCP at the time of measurement in the measurement coordinate system.
  • the communication device 33 may transmit a measurement start signal including position information indicating the position of the TCP at the time of measurement in the measurement coordinate system to the measurement control device 10.
  • the calculation device 11 of the measurement control device 10 uses the second transformation matrix to calculate the position of the TCP at the time of measurement in the measurement coordinate system indicated by the position information included in the measurement start signal, and converts the position of the TCP at the time of measurement into reflectors r21, r22 and r23 may be converted to each position.
  • the measurement control device 10 may control the measurement of the reflectors r21, r22, and r23 by the measurement device 21 based on the positions of the reflectors r21, r22, and r23 in the measurement coordinate system.
  • the measurement start signal may include position information indicating the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system.
  • the calculation device 31 of the processing control device 30 may determine the position of the TCP at the time of measurement in the robot coordinate system.
  • the calculation device 31 may use the first transformation matrix to convert the position of the TCP at the time of measurement in the robot coordinate system to the position of the TCP at the time of measurement in the measurement coordinate system.
  • the arithmetic device 31 may further use the second transformation matrix to transform the position of the TCP during measurement in the measurement coordinate system to the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system.
  • the computing device 31 may use the second transformation matrix to transform the position of the TCP at the time of measurement in the robot coordinate system to the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system.
  • the calculation device 31 may further use the first conversion information to convert the positions of the reflectors r21, r22, and r23 in the robot coordinate system to the positions of the reflectors r21, r22, and r23 in the measurement coordinate system.
  • the communication device 33 may transmit to the measurement control device 10 a measurement start signal that includes position information indicating the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system.
  • the measurement control device 10 controls the measurement of the reflectors r21, r22, and r23 by the measurement device 21 based on the positions of the reflectors r21, r22, and r23 in the measurement coordinate system indicated by the position information included in the measurement start signal. good.
  • the measurement start signal may include a first measurement start signal that includes position information and a second measurement start signal that instructs the measurement control device 10 to perform measurement.
  • the communication device 33 of the processing control device 30 may first transmit a first measurement start signal to the measurement control device 10.
  • the processing control device 30 may control the robot 41 so that the robot arm 410 moves to a predetermined position indicated by the position information included in the first measurement start signal.
  • the communication device 33 of the processing control device 30, which has received the signal indicating that the movement of the robot arm 410 to the predetermined position has been completed from the robot 41, may transmit a second measurement start signal to the measurement control device 10.
  • measurement of the positions of the reflectors r21, r22, and r23 may be started.
  • the measurement control device 10 may estimate the position of each of the reflectors r21, r22, and r23 at the time of measurement based on the position information included in the first measurement start signal. Then, the measurement control device 10 may change the emission direction of the measurement light of the measurement device 21 in advance so that the measurement light is irradiated to the estimated position. Alternatively, the measurement control device 10 may change the emission direction of the measurement light of the measurement device 21 in advance so that the measurement light is irradiated to the position indicated by the position information included in the first measurement start signal. After that, the measurement control device 10 may be in a standby state until it receives the second measurement start signal.
  • the measuring device 21 stands by in a state where it can measure the positions of each of the reflectors r21, r22, and r23.
  • the measurement control device 10 may start measuring the positions of the reflectors r21, r22, and r23.
  • the position of the TCP at the time of measurement in the measurement coordinate system indicated by the position information included in the measurement start signal is " It can be rephrased as "the measurement position in the measurement coordinate system for measuring the second member transformed based on the first transformation matrix in the processing control device”.
  • the positions of the reflectors r21, r22, and r23 in the measurement coordinate system indicated by the position information included in the measurement start signal are determined by "the positions of the reflectors r21, r22, and r23 in the measurement coordinate system indicated by the position information included in the measurement start signal”. It can be rephrased as "the measurement position in the measurement coordinate system for measuring the converted second member".
  • the computing device 31 converts the position of the TCP at the time of measurement in the robot coordinate system to the position of the TCP at the time of measurement in the measurement coordinate system" using the first transformation matrix.
  • the calculation device 31 transforms the measurement position in the robot coordinate system into the measurement position in the measurement coordinate system in order to measure the reflectors r21, r22, and r23 based on the first transformation matrix.”
  • the computing device 31 uses the first conversion information to calculate the positions of the reflectors r21, r22, and r23 in the measurement coordinate system by using the first conversion information. Converting the measurement positions in the robot coordinate system to the measurement positions in the measurement coordinate system in order for the calculation device 31 to measure the reflectors r21, r22, and r23 based on the first conversion matrix. It can be rephrased as “convert to”.
  • the communication device 33 of the processing control device 30 may transmit a measurement start signal to the measurement control device 10.
  • the communication device 13 of the measurement control device 10 may receive the measurement start signal from the processing control device 30. That is, the measurement control device 10 may include the communication device 13, which may be referred to as a receiving section, that receives a measurement start signal from the processing control device 30 for causing the measurement device 21 to start measurement.
  • the calculation device 11 of the measurement control device 10 converts the position indicated by the position information included in the measurement start signal into the position of each of the reflectors r21, r22, and r23 in the measurement coordinate system. Converting to a position may also be referred to as estimating the position of each of reflectors r21, r22 and r23. For this reason, the arithmetic device 11 may be referred to as an estimator.
  • the measurement control device 10 controls the measurement of the reflectors r21, r22, and r23 by the measurement device 21 based on the positions of the reflectors r21, r22, and r23 in the measurement coordinate system indicated by the position information included in the measurement start signal. Measurement may be controlled.
  • “controlling the measurement of the reflectors r21, r22, and r23 by the measuring device 21” may include changing the direction of the measurement light (ie, the emission direction).
  • the measurement control device 10 controls the measurement light so that the measurement light emitted from the measurement device 21 irradiates the positions of the reflectors r21, r22, and r23 estimated by the arithmetic device 11, which may be called an estimator.
  • the measuring device 21 may include a tracking device (not shown) that can track the position of each of the reflectors r21, r22, and r23 that move as the robot 41 moves.
  • the measurement control device 10 may change the direction of the measurement light by transmitting a signal indicating the position of each of the reflectors r21, r22, and r23 in the measurement coordinate system to the tracking device.
  • the arithmetic device 31 of the processing control device 30 may determine the timing at which the measuring device 21 starts measuring each of the reflectors r21, r22, and r23.
  • the arithmetic device 31 may generate timing information (in other words, a timing signal) indicating the determined timing.
  • the communication device 33 of the processing control device 30 may transmit timing information to the measurement control device 10 in addition to the measurement start signal.
  • the communication device 13 of the measurement control device 10 may receive timing information. That is, the communication device 13, which may be referred to as a receiving section, may receive timing information indicating the timing to start measurement. Note that the timing signal may correspond to the above-mentioned "second measurement start signal".
  • dotted circles indicate the positions of each of reflectors r21, r22, and r23 (that is, the positions where reflectors r21, r22, and r23 are measured).
  • P21 indicates the position of reflector r21
  • P22 indicates the position of reflector r22
  • P23 indicates the position of reflector r23. Note that the positions P21, P22, and P23 may correspond, for example, to the positions of the reflectors r21, r22, and r23, respectively, in the measurement coordinate system indicated by the position information included in the measurement start signal.
  • a solid arrow extending from the measurement device 21 indicates the current emission direction d0 of the measurement light.
  • the measuring device 21 first measures the reflector r21 shown in FIG. 21, for example, the difference ⁇ between the current emission direction d0 of the measurement light and the target emission direction d1 is relatively large. In this case, the time required from when the measurement control device 10 starts controlling the measurement device 21 until measurement of the reflector r21 actually starts is relatively long.
  • the measuring device 21 first measures the reflector r22 shown in FIG. 21, for example, the difference ⁇ between the current emission direction d0 of the measurement light and the target emission direction d2 is relatively small. In this case, the time required from when the measurement control device 30 starts controlling the measurement device 21 until the measurement of the reflector r22 actually starts is relatively short.
  • the measurement control device 10 for example, based on the position of each of the reflectors r21, r22, and r23 in the measurement coordinate system based on the position information included in the measurement start signal, and the current emission direction d0 of the measurement light of the measurement device 21,
  • the measurement order of the reflectors r21, r22, and r23 may be determined so that the amount of change in the emission direction of the measurement light is suppressed. In this way, the time required for the measuring device 21 to measure the reflectors r21, r22, and r23 can be shortened.
  • the measurement control device 10 may determine the measurement order so that the reflector r22 is measured first, the reflector r23 is measured next, and the reflector r21 is measured last.
  • the positions of the reflectors r21, r22, and r23 in the measurement coordinate system based on the position information included in the measurement start signal means “the positions of the reflectors r21, r22, and r23 in the measurement coordinate system indicated by the position information"
  • the reflectors r21, r22 and This is a concept that includes the position of each of r23.
  • the emission direction of the measurement light L2 of the measuring device 21 is set to reflector r21, r22, and r23. It is desirable that the injection direction is changed in advance so as to be in the direction of the position r22 or r23. For example, after receiving the measurement start signal, the measurement control device 10 moves the reflectors r21, r22, and r23 to the positions where the reflectors r21, r22, and r23 are measured by the measuring device 21 (for example, position P21 in FIG.
  • the emission direction of the measurement light L2 may be changed so that the measurement light L2 is irradiated toward the position where the reflectors r21, r22, and r23 are measured by the measurement device 21. .
  • the measurement control device 10 After receiving the timing information and before the reflectors r21, r22, and r23 are located at the positions where the reflectors r21, r22, and r23 are measured by the measuring device 21, the measurement control device 10 The emission direction of the measurement light L2 may be changed so that the measurement light L2 is irradiated from the measurement device 21 toward the position where the reflectors r21, r22, and r23 are measured.
  • the measuring device 21 moves the reflectors r21, r22, or r23 toward the position where the measuring device 21 measures the reflectors r21, r22, and r23.
  • the measurement light L2 is emitted, there is a possibility that a reflector different from the reflector to be measured is irradiated with the measurement light L2.
  • the reflector module r2 attached to the robot arm 410 moves along the trajectory shown by the broken arrow in FIG. 22. It is assumed that the emission direction of the measurement light L2 of the measurement device 21 is the direction of the position P22 where the reflector r22 is measured. In this case, reflector r23 passes near position P22 before reflector r22 is located at position P22. If the measurement light L2 is emitted from the measurement device 21 before the reflector r22 is located at the position P22, there is a possibility that the measurement light L2 will be irradiated onto the reflector r23.
  • the measurement result based on the measurement light L2 irradiated to the reflector r23 may be output from the measurement device 21 as the measurement result related to the reflector r22.
  • the measurement device 21 may output the measurement result related to the reflector r22.
  • the measurement start signal may include information indicating a waiting time, for example.
  • the standby time may be, for example, the time from when the measurement control device 10 receives the measurement start signal until the measurement device 21 starts emitting the measurement light L2.
  • the waiting time is, for example, the time required to control the robot arm 410 in order to realize the position and orientation of the TCP when measuring the reflectors r21, r22, and r23, which are determined by the calculation device 31 of the acceleration control device 30. may be set based on.
  • the processing control device 30 transmits timing information to the measurement control device 10 in addition to the measurement start signal
  • the measurement start signal does not need to include information indicating the waiting time, for example.
  • the timing information may indicate the time at which the measuring device 21 should start measuring.
  • the time indicated by the timing information is based on the position and orientation of the TCP determined by, for example, the arithmetic unit 31 (i.e., the position of the TCP when measuring the reflectors r21, r22, and r23) by controlling the robot arm 410. and posture) may be set based on the time at which the posture is realized.
  • the timing information may indicate the waiting time as the timing at which the measuring device 21 starts measurement.
  • the measurement light L2 is emitted from the measurement device 21 before the reflector to be measured by the measurement device 21 is located at the position where the reflector is measured. As a result, it is possible to suppress the occurrence of erroneous recognition of the reflector.
  • the light receiving sensor of the measuring device 21 may be turned off or the light receiving sensor may be turned off based on the output from the light receiving sensor until the timing when the measurement device 21 should start measurement. The measured value may not be calculated. Also in this case, the occurrence of misrecognition of the reflector can be suppressed.
  • the estimated measurement positions of each of reflectors r21, r22, and r23 may differ from the actual positions of each of reflectors r21, r22, and r23 at the time of measurement.
  • the measuring device 21 emits the measurement light L2 toward the position of the reflector to be measured among the estimated measurement positions of each of the reflectors r21, r22, and r23, the measurement light L2 is directed toward the reflector to be measured. is not irradiated. In other words, the position of the reflector to be measured cannot be measured.
  • the measurement device 21 sets the measurement light L2 so that the trajectory of the measurement light L2 becomes, for example, a spiral trajectory centered on the position of the reflector to be measured among the estimated measurement positions of each of the reflectors r21, r22, and r23.
  • L2 may also be ejected.
  • the trajectory of the measurement light L2 is not limited to a spiral trajectory, but may be a trajectory such as a raster scan trajectory, for example.
  • the measurement device 21 can perform the measurement.
  • the target reflector can be irradiated with the measurement light L2. That is, the measuring device 21 can measure the position of the reflector to be measured.
  • the measuring device 21 first measures the position of reflector r22, then measures the position of reflector r23, and finally measures the position of reflector r21.
  • the calculation device 11 of the measurement control device 10 calculates the estimated reflector r22 after the measuring device 21 measures the position of the reflector r22 and before the measuring device 21 measures the position of the reflector r23.
  • the measured position may be compared with the actual position of the reflector r22 measured by the measuring device 21.
  • the calculation device 11 may correct the estimated measurement positions of each of the reflectors r23 and r21 based on the comparison result.
  • the arithmetic device 11 which may be referred to as an estimator, performs a measurement based on the estimated position of the reflector of the measurement target and the measurement light L2 irradiated to the reflector of the measurement target by the measurement device 21. Based on the position of one reflector of the object, the position of another reflector of the measurement object may be corrected.
  • the measurement control device 10 controls the emission direction of the measurement light of the measurement device 21 based on the corrected measurement positions of the reflectors r23 and r21 when the positions of the reflectors r23 and r21 are measured, the reflector The time required to measure the positions of r23 and r21 can be shortened.
  • the measuring device 21 may measure the position of one of the reflectors r21, r22, and r23 to be measured multiple times.
  • the arithmetic unit 11 of the measurement control device 10 determines whether variations in a plurality of positions indicated by the plurality of measurement results for one reflector to be measured within a predetermined period (for example, several hundred milliseconds to several seconds) are within a predetermined range. (For example, within the range of the broken line circle shown in FIG. 24), it may be determined that the robot arm 410 is stationary. In this way, it is possible to suppress a decrease in the accuracy of the position measured by the measuring device 21 due to the vibration of the robot arm 410.
  • the predetermined range may be set based on, for example, an allowable error in position measurement by the measuring device 21, in other words, the measurement accuracy required for position measurement by the measuring device 21.
  • the measurement control device 10 performs the measurement of the measurement device 21 based on the estimated measurement positions of the reflectors r21, r22, and r23, for example, as shown in FIG.
  • the measuring device 21 may be controlled so that the trajectory of the light L2 becomes a spiral trajectory in a range including reflectors r21, r22, and r23.
  • the positions of the reflectors r21, r22, and r23 in the measurement coordinate system measured by the measurement device 21 are determined by the calculation device 11 of the measurement control device 10 in the robot coordinate system. It may be converted into the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system, or may be converted into the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system by the arithmetic unit 11 of the processing control device 30.
  • the end effector attached to the robot 41 may be an end effector for purposes other than processing.
  • Examples of end effectors for uses other than processing include a pick-up hand (specifically, a suction hand, a gripping hand, etc.), a CMM (Coordinate Measuring Machine), and the like.
  • the CMM may be one that performs non-contact measurements, such as a scanning laser probe type or an optical type.
  • the robot 41 when a CMM is attached to a robot 41 as an end effector and a workpiece W (see FIG. 1) is measured by the CMM, the robot 41 may be referred to as a processing device, and the workpiece W may be referred to as a processing target. Good too.
  • the storage device 12 of the measurement control device 10 may store one or more programs for realizing the functions of the measurement control device 10.
  • the functions of the arithmetic device 11 described above may be realized by the arithmetic device 11 executing at least one program out of one or more programs stored in the storage device 12 .
  • the storage device 32 of the processing control device 30 may store one or more programs for realizing the functions of the processing control device 30.
  • the functions of the arithmetic device 31 described above may be realized by the arithmetic device 31 executing at least one program among one or more programs stored in the storage device 32.
  • Reflectors r11, r12, and r13, and, for example, reflectors r31, r32, and r33 are rephrased as “first measurement members,” and reflectors r21, r22, and r23 are rephrased as “second measurement members.” .
  • the first transformation matrix for transforming the position in the measurement coordinate system and the position in the robot coordinate system is, for example, the measurement coordinate system measured by the measurement device 21. It may be determined based on the positions of each of the reflectors r11, r12, and r13 (i.e., the position of the first measurement member). Furthermore, as explained in “(4) Tool center point”, the second transformation matrix for transforming the positions of each of the reflectors r21, r22, and r23 and the position of the TCP is, for example, applied to the jig 91a shown in FIG.
  • the first transformation matrix and the second transformation matrix are based on the position of the first measurement member.
  • the calculation device 11 of the measurement control device 10 uses the first transformation matrix based on the position of the first measurement member to calculate the reflector r21 in the measurement coordinate system.
  • r22 and r23 i.e., the position of the second measuring member
  • the calculation device 11 also calculates the positions of the reflectors r21, r22, and r23 in the measurement coordinate system (i.e., the position of the second measurement member) using the second transformation matrix based on the position of the first measurement member. may be converted into the position of the TCP in the measurement coordinate system.
  • the calculation device 11 which may be called a calculation unit, converts the position of the second measurement member measured by the measurement device 21 based on the position of the first measurement member measured by the measurement device 21. good.
  • the communication device 13 which may be referred to as a transmitter, may transmit position information indicating the converted position of the second measurement member to the processing control device 30.
  • the calculation device 11 which may be called a calculation unit, converts the position of the second measurement member measured by the measurement device 21 based on the position of the first measurement member measured by the measurement device 21. You may calculate conversion information to do so.
  • the communication device 13, which may be called a transmitter, may transmit the calculated conversion information to the processing control device 30.
  • the measurement device 21 measures, for example, the reflector r11 attached to the jig 90, the measurement result is output from the measurement device 21 to the measurement control device 10.
  • the measurement device 21 measures the reflectors r21, r22, and r23 attached to the robot arm 410 of the robot 41, the measurement results are output from the measurement device 21 to the measurement control device 10.
  • the measurement device 21 receives measurement light generated from the first member by irradiating the measurement light onto the first member attached to the jig 90 that holds the object to be processed, Outputting first member position information indicating the position of the first member; and irradiating measurement light onto the second member attached to the robot arm 410 of the robot 41 capable of processing the processing target by the measuring device 21.
  • the method may include receiving measurement light generated from the second member and outputting second member position information indicating the position of the second member.
  • the reflector r11 was rephrased as a first member
  • the reflectors r21, r22, and r23 were rephrased as a second member.
  • the first member position information i.e., the position of reflector r11
  • the second member position information i.e., the positions of reflectors r21, r22, and r23
  • control the movement of the robot arm 410 of the robot 41 It may be used for controlling.
  • a measurement method according to a measurement system 2 including a measurement device 21 and a stereo camera 22 includes a stereo camera 22, which may be called an imaging device, capturing images of a first member and a second member, and an output from the stereo camera 22.
  • the irradiation direction of the measurement light irradiated from the measurement device 21 to the first member is controlled, and the irradiation direction of the measurement light irradiated from the measurement device 21 to the second member is controlled based on the output from the stereo camera 22.
  • the irradiation direction may be controlled.
  • the positional relationship between the TCP and reflectors such as reflectors r21, r22, and r23 does not need to be determined by calculation.
  • the positional relationship between the TCP and the reflector may be input by the user of the system 1, for example. That is, the positional relationship between the TCP and the reflector may be memorized in the measurement system 2 and/or the system 1, which may also be referred to as a processing system.
  • a measuring device that is capable of measuring the positions of each of the first member and the second member in a measurement coordinate system that is a coordinate system related to the measuring device, and a measurement control device that controls the measuring device.
  • a measurement method in a measurement system comprising: The measurement control device provides first position information indicating the position of the first member in the measurement coordinate system, which is measured by the measurement device based on the measurement light irradiated to the first member, and the processing device.
  • the measurement control device transmits third position information indicating the position of the second member in the converted processing coordinate system to a processing control device that controls the processing device; Measurement methods including.
  • a processing device capable of processing a processing object, a first member attached to at least one of the processing object and a jig for holding the processing object, and a second member attached to a movable part of the processing device.
  • a measuring device capable of irradiating measurement light to a target, the measuring device capable of measuring the positions of each of the first member and the second member in a measurement coordinate system that is a coordinate system related to the measuring device;
  • a processing method in a processing system comprising: a measurement control device that controls; a processing control device that controls movement of the processing device under a processing coordinate system; The measurement control device provides first position information indicating the position of the first member in the measurement coordinate system, which is measured by the measurement device based on the measurement light irradiated to the first member, and the processing device.
  • the processing control device controls the processing device under the processing coordinate system based on the position of the second member in the processing coordinate system indicated by the third position information; Processing methods including.
  • a measuring device that is capable of measuring the positions of each of the first member and the second member in a measurement coordinate system that is a coordinate system related to the measuring device, and a measurement control device that controls the measuring device.
  • a measurement method in a measurement system comprising: The measurement control device determines the position of the first member in the measurement coordinate system measured by the measurement device based on the measurement light irradiated to the first member, and the position of the first member via the input device of the measurement control device.
  • the measurement control device transmits the first conversion information to a processing control device that controls movement of the processing device under a processing coordinate system that is a coordinate system related to the processing device;
  • the measurement control device in the processing control device, is based on seventh position information indicating a measurement position in the measurement coordinate system for measuring the second member, which has been converted based on the first conversion information, controlling measurement of the second member by the measuring device; Measurement methods including.
  • a processing device capable of processing a processing object, a first member attached to at least one of the processing object and a jig for holding the processing object, and a second member attached to a movable part of the processing device.
  • a measuring device capable of irradiating measurement light to a target, the measuring device capable of measuring the positions of each of the first member and the second member in a measurement coordinate system that is a coordinate system related to the measuring device;
  • a processing method in a processing system comprising: a measurement control device that controls; a processing control device that controls movement of the processing device under a processing coordinate system that is a coordinate system related to the processing device; The measurement control device inputs the position of the first member in the measurement coordinate system measured by the measurement device based on the measurement light irradiated to the first member, and the position of the first member through the input device of the measurement control device.
  • the processing control device converts a measurement position in the processing coordinate system for measuring the second member into a measurement position in the measurement coordinate system based on the first conversion information; the processing control device transmitting seventh position information indicating the measurement position in the converted measurement coordinate system to the measurement control device; The measurement control device controls measurement of the second member by the measurement device based on the measurement position in the measurement coordinate system indicated by the seventh position information; Processing methods including.
  • a measurement method in a measurement system comprising a measurement device that can measure a first measurement member and a second measurement member attached to a processing device, and a measurement control device that controls the measurement device.
  • the measurement control device converts the position of the second measurement member measured by the measurement device based on the position of the first measurement member measured by the measurement device;
  • the measurement control device transmits position information indicating the converted position of the second measurement member to a processing control device that controls the processing device; Measurement methods including.
  • a measurement method in a measurement system comprising a measurement device that can measure a first measurement member and a second measurement member attached to a processing device, and a measurement control device that controls the measurement device.
  • the measurement control device generates conversion information for converting the position of the second measurement member measured by the measurement device based on the position of the first measurement member measured by the measurement device. calculating and The measurement control device transmits the conversion information to a processing control device that controls the processing device; Measurement methods including.
  • a measuring device receives measurement light generated from the first member by irradiating the measurement light onto a first member attached to a jig that holds a processing object, and a first member that indicates the position of the first member. Outputting member position information, The measurement device receives measurement light generated from the second member by irradiating the measurement light onto a second member attached to a movable part of the processing device capable of processing the processing target, and measures the measurement light on the second member. outputting second member position information indicating the position of; including; The first member position information and the second member position information output from the measuring device are used to control movement of the movable part of the processing device.
  • the measurement method includes: an imaging device imaging the first member and the second member; An irradiation direction of measurement light irradiated from the measurement device to the first member is controlled based on an output from the imaging device; An irradiation direction of measurement light irradiated from the measurement device to the second member is controlled based on an output from the imaging device; The measurement method described in Appendix 7 including.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Length Measuring Devices By Optical Means (AREA)
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PCT/JP2022/022463 2022-06-02 2022-06-02 計測システム、加工システム、計測方法及び加工方法 Ceased WO2023233615A1 (ja)

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US18/870,795 US20250347511A1 (en) 2022-06-02 2022-06-02 Measurement system, processing system, measurement method, and processing method
JP2024524100A JPWO2023233615A1 (https=) 2022-06-02 2022-06-02
CN202280098332.0A CN119585087A (zh) 2022-06-02 2022-06-02 测量系统、加工系统、测量方法和加工方法
EP22944896.4A EP4534258A4 (en) 2022-06-02 2022-06-02 MEASURING SYSTEM, PROCESSING SYSTEM, MEASURING METHOD AND PROCESSING METHOD
KR1020247042406A KR20250019067A (ko) 2022-06-02 2022-06-02 계측 시스템, 가공 시스템, 계측 방법 및 가공 방법
PCT/JP2022/022463 WO2023233615A1 (ja) 2022-06-02 2022-06-02 計測システム、加工システム、計測方法及び加工方法
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EP4534258A4 (en) 2026-04-22
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