CN119585087A - 测量系统、加工系统、测量方法和加工方法 - Google Patents

测量系统、加工系统、测量方法和加工方法 Download PDF

Info

Publication number
CN119585087A
CN119585087A CN202280098332.0A CN202280098332A CN119585087A CN 119585087 A CN119585087 A CN 119585087A CN 202280098332 A CN202280098332 A CN 202280098332A CN 119585087 A CN119585087 A CN 119585087A
Authority
CN
China
Prior art keywords
measurement
measuring
center point
processing
tool center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280098332.0A
Other languages
English (en)
Chinese (zh)
Inventor
中村隆志
增田祥太郎
宫川智树
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of CN119585087A publication Critical patent/CN119585087A/zh
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1679—Program controls characterised by the tasks executed
    • B25J9/1692—Calibration of manipulator
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0019—End effectors other than grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B25J19/021—Optical sensing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1656—Program controls characterised by programming, planning systems for manipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1694—Program controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
    • B25J9/1697—Vision controlled systems
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form
    • G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37097—Marker on workpiece to detect reference position
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37113—Psd position sensitive detector, light spot on surface gives x, y position
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37193—Multicoordinate measuring system, machine, cmm
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37457—On machine, on workpiece
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/39—Robotics, robotics to robotics hand
    • G05B2219/39024—Calibration of manipulator
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/39—Robotics, robotics to robotics hand
    • G05B2219/39026—Calibration of manipulator while tool is mounted
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/39—Robotics, robotics to robotics hand
    • G05B2219/39033—Laser tracking of end effector, measure orientation of rotatable mirror
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/50—Machine tool, machine tool null till machine tool work handling
    • G05B2219/50132—Jig, fixture

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
CN202280098332.0A 2022-06-02 2022-06-02 测量系统、加工系统、测量方法和加工方法 Pending CN119585087A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/022463 WO2023233615A1 (ja) 2022-06-02 2022-06-02 計測システム、加工システム、計測方法及び加工方法

Publications (1)

Publication Number Publication Date
CN119585087A true CN119585087A (zh) 2025-03-07

Family

ID=89026173

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280098332.0A Pending CN119585087A (zh) 2022-06-02 2022-06-02 测量系统、加工系统、测量方法和加工方法

Country Status (7)

Country Link
US (1) US20250347511A1 (https=)
EP (1) EP4534258A4 (https=)
JP (1) JPWO2023233615A1 (https=)
KR (1) KR20250019067A (https=)
CN (1) CN119585087A (https=)
TW (1) TWI878912B (https=)
WO (1) WO2023233615A1 (https=)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8705301D0 (en) 1987-03-06 1987-04-08 Renishaw Plc Calibration of machines
KR100345150B1 (ko) * 2000-09-29 2002-07-24 현대자동차주식회사 레이저 측정기를 이용한 로봇 위치 보정 방법
EP2878920A1 (en) * 2013-11-28 2015-06-03 Hexagon Technology Center GmbH Calibration of a coordinate measuring machine using a calibration laser head at the tool centre point
US9964398B2 (en) * 2015-05-06 2018-05-08 Faro Technologies, Inc. Three-dimensional measuring device removably coupled to robotic arm on motorized mobile platform
CN108527360B (zh) * 2018-02-07 2021-11-19 唐山英莱科技有限公司 一种位置标定系统及方法
EP3584533A1 (en) * 2018-06-19 2019-12-25 Apodius GmbH Coordinate measurement system
US11073373B2 (en) * 2018-08-22 2021-07-27 Government Of The United States Of America, As Represented By The Secretary Of Commerce Non-contact coordinate measuring machine using a noncontact metrology probe
JP2020085596A (ja) * 2018-11-21 2020-06-04 三菱重工業株式会社 位置測定システム及び位置測定方法
CN210850270U (zh) * 2019-07-24 2020-06-26 中国地质大学（武汉） 基于四目立体视觉的机械臂标定系统
CN111791231B (zh) * 2020-06-02 2021-09-03 同济大学 一种机器人标定系统及二维平面、三维空间运动标定方法
CA3189581A1 (en) * 2020-07-29 2022-02-03 Nikon Corporation Processing system

Also Published As

Publication number Publication date
TW202348955A (zh) 2023-12-16
TWI878912B (zh) 2025-04-01
US20250347511A1 (en) 2025-11-13
EP4534258A1 (en) 2025-04-09
WO2023233615A1 (ja) 2023-12-07
KR20250019067A (ko) 2025-02-07
EP4534258A4 (en) 2026-04-22
JPWO2023233615A1 (https=) 2023-12-07

Similar Documents

Publication Publication Date Title
US10108829B2 (en) Human-centric robot with noncontact measurement device
CN102735166B (zh) 三维扫描仪和机器人系统
WO2019012770A1 (ja) 撮像装置及びモニタリング装置
US7526121B2 (en) Three-dimensional visual sensor
US20200070370A1 (en) Three-Dimensional Measuring Apparatus, Robot, And Robot System
US20120099798A1 (en) Information processing apparatus, information processing method, and program
US20150015898A1 (en) Laser line probe having improved high dynamic range
JP2011251384A (ja) 移載装置
US11679460B2 (en) Three-dimensional measurement device
CN110640749A (zh) 机器人控制装置以及机器人系统
US20250214249A1 (en) Control apparatus, control system, robot system, control method, and computer program
JP2026027500A (ja) 位置測定装置、システム、及び位置測定方法
CN119585087A (zh) 测量系统、加工系统、测量方法和加工方法
CN119486845A (zh) 测量系统、加工系统、测量方法和加工方法
CN114935747B (zh) 一种激光雷达的标定方法、装置、设备及存储介质
US20220026538A1 (en) Distance Measuring Device And Robot
CN110440686B (zh) 三维形状测量系统以及测量时间设定方法
JP2010048629A (ja) ３次元形状測定装置および３次元形状測定方法
US20250326125A1 (en) Control apparatus, control system, robot system, control method, and computer program
CN117836588A (zh) 位置测定装置、位置测定系统以及测定装置
JP6631225B2 (ja) 三次元形状測定装置
CN120187566A (zh) 位置测量系统及位置测量方法
JP2020146823A (ja) ロボットの部品ピッキングシステム
JP2023037715A (ja) ピッキング装置およびピッキング方法
JP2018163172A (ja) 計測装置

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination