TWI878912B - 測量系統和加工系統 - Google Patents

測量系統和加工系統 Download PDF

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Publication number
TWI878912B
TWI878912B TW112120706A TW112120706A TWI878912B TW I878912 B TWI878912 B TW I878912B TW 112120706 A TW112120706 A TW 112120706A TW 112120706 A TW112120706 A TW 112120706A TW I878912 B TWI878912 B TW I878912B
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TW
Taiwan
Prior art keywords
measurement
component
measuring
processing
center point
Prior art date
Application number
TW112120706A
Other languages
English (en)
Chinese (zh)
Other versions
TW202348955A (zh
Inventor
中村隆志
増田祥太郎
宮川智樹
Original Assignee
日商尼康股份有限公司
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Publication date
Application filed by 日商尼康股份有限公司 filed Critical 日商尼康股份有限公司
Publication of TW202348955A publication Critical patent/TW202348955A/zh
Application granted granted Critical
Publication of TWI878912B publication Critical patent/TWI878912B/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1679—Program controls characterised by the tasks executed
    • B25J9/1692—Calibration of manipulator
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0019—End effectors other than grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B25J19/021—Optical sensing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1656—Program controls characterised by programming, planning systems for manipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1694—Program controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
    • B25J9/1697—Vision controlled systems
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form
    • G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37097—Marker on workpiece to detect reference position
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37113—Psd position sensitive detector, light spot on surface gives x, y position
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37193—Multicoordinate measuring system, machine, cmm
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37457—On machine, on workpiece
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/39—Robotics, robotics to robotics hand
    • G05B2219/39024—Calibration of manipulator
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/39—Robotics, robotics to robotics hand
    • G05B2219/39026—Calibration of manipulator while tool is mounted
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/39—Robotics, robotics to robotics hand
    • G05B2219/39033—Laser tracking of end effector, measure orientation of rotatable mirror
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/50—Machine tool, machine tool null till machine tool work handling
    • G05B2219/50132—Jig, fixture

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
TW112120706A 2022-06-02 2023-06-02 測量系統和加工系統 TWI878912B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
WOPCT/JP2022/022463 2022-06-02
PCT/JP2022/022463 WO2023233615A1 (ja) 2022-06-02 2022-06-02 計測システム、加工システム、計測方法及び加工方法

Publications (2)

Publication Number Publication Date
TW202348955A TW202348955A (zh) 2023-12-16
TWI878912B true TWI878912B (zh) 2025-04-01

Family

ID=89026173

Family Applications (1)

Application Number Title Priority Date Filing Date
TW112120706A TWI878912B (zh) 2022-06-02 2023-06-02 測量系統和加工系統

Country Status (7)

Country Link
US (1) US20250347511A1 (https=)
EP (1) EP4534258A4 (https=)
JP (1) JPWO2023233615A1 (https=)
KR (1) KR20250019067A (https=)
CN (1) CN119585087A (https=)
TW (1) TWI878912B (https=)
WO (1) WO2023233615A1 (https=)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5007006A (en) * 1987-03-06 1991-04-09 Renishaw Plc Method of and apparatus for calibration of machines
US10030972B2 (en) * 2013-11-28 2018-07-24 Hexagon Technology Center Gmbh Calibration of a coordinate measuring machine using a calibration laser head at the tool centre point
CN108527360A (zh) * 2018-02-07 2018-09-14 唐山英莱科技有限公司 一种位置标定系统及方法
EP3584533A1 (en) * 2018-06-19 2019-12-25 Apodius GmbH Coordinate measurement system
US10598479B2 (en) * 2015-05-06 2020-03-24 Faro Technologies, Inc. Three-dimensional measuring device removably coupled to robotic arm on motorized mobile platform
US11073373B2 (en) * 2018-08-22 2021-07-27 Government Of The United States Of America, As Represented By The Secretary Of Commerce Non-contact coordinate measuring machine using a noncontact metrology probe
US20210333092A1 (en) * 2018-11-21 2021-10-28 Mitsubishi Heavy Industries, Ltd. Position measurement system and position measurement method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100345150B1 (ko) * 2000-09-29 2002-07-24 현대자동차주식회사 레이저 측정기를 이용한 로봇 위치 보정 방법
CN210850270U (zh) * 2019-07-24 2020-06-26 中国地质大学（武汉） 基于四目立体视觉的机械臂标定系统
CN111791231B (zh) * 2020-06-02 2021-09-03 同济大学 一种机器人标定系统及二维平面、三维空间运动标定方法
CA3189581A1 (en) * 2020-07-29 2022-02-03 Nikon Corporation Processing system

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5007006A (en) * 1987-03-06 1991-04-09 Renishaw Plc Method of and apparatus for calibration of machines
US10030972B2 (en) * 2013-11-28 2018-07-24 Hexagon Technology Center Gmbh Calibration of a coordinate measuring machine using a calibration laser head at the tool centre point
US10598479B2 (en) * 2015-05-06 2020-03-24 Faro Technologies, Inc. Three-dimensional measuring device removably coupled to robotic arm on motorized mobile platform
CN108527360A (zh) * 2018-02-07 2018-09-14 唐山英莱科技有限公司 一种位置标定系统及方法
EP3584533A1 (en) * 2018-06-19 2019-12-25 Apodius GmbH Coordinate measurement system
US11073373B2 (en) * 2018-08-22 2021-07-27 Government Of The United States Of America, As Represented By The Secretary Of Commerce Non-contact coordinate measuring machine using a noncontact metrology probe
US20210333092A1 (en) * 2018-11-21 2021-10-28 Mitsubishi Heavy Industries, Ltd. Position measurement system and position measurement method

Also Published As

Publication number Publication date
TW202348955A (zh) 2023-12-16
US20250347511A1 (en) 2025-11-13
EP4534258A1 (en) 2025-04-09
WO2023233615A1 (ja) 2023-12-07
KR20250019067A (ko) 2025-02-07
CN119585087A (zh) 2025-03-07
EP4534258A4 (en) 2026-04-22
JPWO2023233615A1 (https=) 2023-12-07

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