WO2023214606A1 - Simulateur de plasma offrant une édition limitée - Google Patents

Simulateur de plasma offrant une édition limitée Download PDF

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Publication number
WO2023214606A1
WO2023214606A1 PCT/KR2022/006824 KR2022006824W WO2023214606A1 WO 2023214606 A1 WO2023214606 A1 WO 2023214606A1 KR 2022006824 W KR2022006824 W KR 2022006824W WO 2023214606 A1 WO2023214606 A1 WO 2023214606A1
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Prior art keywords
type data
data
plasma simulation
plasma
item
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PCT/KR2022/006824
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English (en)
Korean (ko)
Inventor
권득철
정상영
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한국핵융합에너지연구원
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Publication of WO2023214606A1 publication Critical patent/WO2023214606A1/fr

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F21/00—Security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
    • G06F21/10—Protecting distributed programs or content, e.g. vending or licensing of copyrighted material ; Digital rights management [DRM]
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F21/00—Security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
    • G06F21/30—Authentication, i.e. establishing the identity or authorisation of security principals
    • G06F21/31—User authentication
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F21/00—Security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
    • G06F21/60—Protecting data
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F21/00—Security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
    • G06F21/60—Protecting data
    • G06F21/602—Providing cryptographic facilities or services
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00—Computer-aided design [CAD]
    • G06F30/10—Geometric CAD
    • G06F30/12—Geometric CAD characterised by design entry means specially adapted for CAD, e.g. graphical user interfaces [GUI] specially adapted for CAD
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00—Computer-aided design [CAD]
    • G06F30/20—Design optimisation, verification or simulation
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F9/00—Arrangements for program control, e.g. control units
    • G06F9/06—Arrangements for program control, e.g. control units using stored programs, i.e. using an internal store of processing equipment to receive or retain programs
    • G06F9/44—Arrangements for executing specific programs
    • G06F9/451—Execution arrangements for user interfaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes

Definitions

  • the present invention relates to a method and system for providing plasma simulation.
  • Semiconductor manufacturing processes use plasma processing in various manufacturing steps to create semiconductor devices such as microprocessors, memory chips, or other integrated circuits.
  • This plasma process is performed by plasma equipment, and for example, equipment for depositing a material film on a wafer or etching a material film formed on a wafer is used.
  • the present invention provides a method and system for providing plasma simulation that improves the accuracy of plasma simulation by preventing input errors in plasma simulation.
  • the present invention provides a plasma simulation providing method and system that enhances the security of important data used in plasma simulation and performs the development of a plasma simulator more efficiently.
  • the method and system for providing plasma simulation according to the present invention provides a plasma simulation program that provides limited editing according to the account logged in to the plasma simulation program or the license installed.
  • the plasma simulation providing method of the present invention includes providing a page of the plasma simulation program on a display of an electronic device in which the plasma simulation program is driven, and on the page, a first type used for plasma simulation. Providing a reaction list consisting of items corresponding to data and second type data, and performing the plasma simulation using data corresponding to at least one of the items included in the reaction scheme list. , providing results of the plasma simulation on the page.
  • the distinction between the first type data and the second type data may be made based on preset security conditions set for each of the first type data and the second type data.
  • the display method of the first item corresponding to the first type data and the display method of the second item corresponding to the second type data are in each of the first type data and the second type data. It may be determined based on the preset security conditions.
  • the first type data is encrypted based on the preset security conditions so that the contents of the first type data are not exposed on the reactive list, and in the first item, the first type data is encrypted so that the contents of the first type data are not exposed.
  • Guide information indicating that type 1 data is encrypted may be included.
  • the second type data is data whose encryption is restricted so that the contents of the second type data are exposed on the reactive list, and the second item may include the contents of the second type data.
  • the plasma simulation method of the present invention when the first item corresponding to the first type data is selected from the electronic device, displays information related to the contents of the first type data corresponding to the first item on the page. Information can be provided.
  • the user account logged in to the plasma simulation program or the stored license is checked, and the user account or license is selected as the first type. It is determined whether there is permission to access the contents of the data, and based on the determination result, at least one of the contents of the first type data and information related to the contents of the first type data may be provided on the electronic device. .
  • each of the first type data and the second type data has a first edit condition with limited editing or a second edit condition with editable content depending on whether the first type data and the second type data can be edited. It can be done to have.
  • the editing area included in the area can be activated.
  • the at least one item corresponding to data used to perform the plasma simulation may be provided on the page along with the plasma simulation results.
  • the at least one item corresponding to the data used to perform the plasma simulation may be displayed differently based on the preset security condition set for the data corresponding to each of the at least one item.
  • the results of the plasma simulation performed using data corresponding to the at least one item are provided on the page, and the results of the plasma simulation include the at least one item. It may include a figure representing a response based on data corresponding to one item.
  • information about specific data corresponding to a response related to the point among data corresponding to the at least one item is provided, and information about the specific data may vary depending on the preset security conditions set for the specific data.
  • the simulation system includes a storage unit, a communication unit, and a control unit, wherein the communication unit is connected to at least one of an electronic device related to plasma simulation or an external server, and an electronic device on which the plasma simulation program runs. and a control unit that provides a page of the plasma simulation program on the page, wherein the control unit displays a reaction list consisting of items corresponding to first type data and second type data used in the plasma simulation, respectively, on the page. is provided, the plasma simulation is performed using data corresponding to at least one of the items included in the reaction formula list, and the results of the plasma simulation are provided on the page.
  • the program according to the present invention includes providing a page of the plasma simulation program on a display of an electronic device in which the plasma simulation program is driven, and on the page, first type data used for plasma simulation and a first type of data to be used for plasma simulation.
  • the present invention can prevent errors in user input through a plasma simulator that provides limited editing. Additionally, the accuracy of plasma simulation can be improved by separately managing data that can be edited by the user and data that cannot be edited.
  • the present invention since the present invention encrypts data according to the security conditions for data used in plasma simulation, it can have the effect of maintaining security for key data that affects plasma simulation results.
  • the present invention provides data used in plasma simulation calculations together with the plasma simulation results, allowing users to analyze the plasma simulation results more quickly and accurately.
  • FIG. 1 is a block diagram to illustrate a plasma simulation system that provides limited editing.
  • FIG. 2 is a flowchart of a plasma simulation method providing limited editing performed in the plasma simulation system of FIG. 1.
  • Figure 3 is a conceptual diagram for explaining data used in plasma simulation provided in the present invention.
  • Figure 4 is a conceptual diagram for explaining the pages of the plasma simulation program provided in the present invention.
  • Figures 5 and 6 are conceptual diagrams for explaining a method of providing items corresponding to the first type of data provided in the present invention.
  • Figures 7, 8, and 9 are conceptual diagrams for explaining a method of providing items corresponding to second type data.
  • FIGS. 10A and 10B are conceptual diagrams illustrating a method of providing plasma simulation results provided by the present invention.
  • the present invention relates to a plasma simulation method and system that provides limited editing, whereby data required for simulation can be selectively edited by determining whether to display data items depending on the type of data utilized in plasma simulation.
  • the purpose is to provide a plasma simulation method and system.
  • plasma is a form of matter known as the fourth state of matter, and can refer to a state that is heated by a strong electric field or heat source and divided into particles such as electrons, neutral particles, and ions beyond the gaseous state.
  • the degree of charge separation is quite high, but the overall number of negative and positive charges is the same, so it can be neutral.
  • the plasma is used in the manufacturing process of semiconductor devices, which are core components of advanced digital devices such as smartphones, for example, in etching and deposition technologies, and may refer to low-temperature plasma with a plasma current of less than several amperes.
  • simulation may mean a simulation that simply performs an experiment that is difficult to actually execute, and in particular, it may be a computer simulation that is numerically analyzed using a computer and a mathematical model.
  • the mathematical model may be, for example, a fluid model that interprets plasma as a flowing fluid, a particle model that treats plasma as particles, etc.
  • the plasma simulation of the present invention is to virtually measure, for example, the temperature of species occurring inside the plasma equipment through calculation.
  • the internal situation of the plasma equipment or the progress of the plasma process can be determined by looking at the results of the calculation. It can be a concept that includes interpreting, etc.
  • software or programs that can perform such simulations can be defined as simulators. Through the simulator, the present invention can perform virtual experiments on plasma processes or equipment and provide the results to users as various visual data.
  • the plasma simulation system may include not only providing calculation results to the user using a simulator, but also controlling plasma equipment using the calculation results of the simulator, or providing various information necessary for controlling the plasma equipment.
  • FIG. 1 is a block diagram illustrating a plasma simulation system providing limited editing according to the present invention.
  • the plasma simulation system 100 includes at least one of a communication unit 110, a storage unit 120, and a control unit 130.
  • the plasma simulation system 100 according to the present invention is not limited to the components described above, and may further include components that perform the same or similar roles as the functions described in the present specification.
  • the communication unit 110 is configured to communicate with at least one electronic device 200 or an external server 140, and can support various communication methods depending on the communication standard of the communication target.
  • Wi-Fi Wireless Fidelity
  • Wi-Fi Wireless Fidelity
  • DLNA Digital Living Network Alliance
  • WiBro Wireless Broadband
  • WiMAX Worldwide Interoperability for Microwave Access
  • HSDPA High Speed Downlink Packet Access
  • HSUPA High Speed Uplink Packet Access
  • LTE Long Term Evolution
  • LTE-A Long Term Evolution Advanced
  • 5G Fifth Generation Mobile Telecommunication
  • BluetoothTM At least one of RFID (Radio Frequency Identification), Infrared Data Association (IrDA), UWB (Ultra-Wideband), ZigBee, NFC (Near Field Communication), Wi-Fi Direct, and Wireless USB (Wireless Universal Serial Bus) technologies.
  • RFID Radio Frequency Identification
  • IrDA Infrared Data Association
  • UWB Ultra-Wideband
  • ZigBee Ultra-Wideband
  • ZigBee Ultra-Wideband
  • NFC Near Field Communication
  • Wi-Fi Direct Wireless USB (Wireless Universal Serial Bus) technologies.
  • the storage unit 120 can be configured to store various information related to the present invention.
  • the storage unit 120 may be configured to store first type data and second type data used in plasma simulation.
  • the first type data and the second type data used in plasma simulation may include at least one of initial values of plasma simulation, parameters, calculation conditions, gas species, chemical reaction formula, and chemical equation.
  • the storage unit 120 may be provided in the plasma simulation system 100 itself. Alternatively, at least a portion of the storage unit 120 may refer to an external server 140, for example, at least one of a cloud server (or cloud storage) and a database (DB).
  • a cloud server or cloud storage
  • DB database
  • the storage unit 120 is sufficient as a space for storing information necessary for plasma simulation according to the present invention, and there are no restrictions on physical space. Accordingly, hereinafter, the storage unit 120, the cloud server, and the database will not be separately distinguished, and all will be referred to as the storage unit 120.
  • “security conditions” that distinguish between first type data and second type data used in plasma simulation may be stored by matching specific data.
  • security conditions are conditions related to encryption of specific data and limitation of exposure of data contents, for example, encrypting first type data so that the contents of first type data are not exposed, or encrypting second type data It can be understood as at least one condition that limits encryption of the second type data so that the contents of are exposed.
  • editing conditions may be matched to and stored in specific data depending on whether specific data used in plasma simulation can be edited.
  • the “editing conditions” may be matched to and stored in specific data based on the security conditions matched to the specific data. For example, based on the security conditions matched to and stored in specific data, at least one of a first editing condition that restricts editing of specific data and a second editing condition that allows editing of specific data may be matched to and stored in the specific data. .
  • Security conditions may be matched to specific data and stored based on information input from a system administrator (not shown) according to the present invention.
  • a system administrator can match security conditions to specific data based on the content of the specific data.
  • a system administrator may match security conditions to specific data to keep the specific data private from all user accounts using the plasma simulation program.
  • “security conditions” and “editing conditions” may be matched and stored in the storage unit 120 for each data used in plasma simulation.
  • the storage unit 120 may store usage rights information associated with user account information subscribed to the plasma simulation program according to the present invention.
  • usage rights information may include user account, type of usage rights held, type of usage rights used, security level, etc.
  • the information used in connection with the user account information is not limited to the content described above in this specification.
  • control unit 130 may control the overall operation of the plasma simulation system 100 related to the present invention.
  • the control unit 130 can provide or process signals, data, information, functions, etc. that are input or output through the components discussed above.
  • control unit 130 can transmit and receive information necessary for plasma simulation according to the present invention stored in the storage unit 120 or the external server 140 through the communication unit 110.
  • control unit 130 checks the user account logged into the plasma simulation program, determines whether there is permission to access the contents of specific data according to the security level matched to the account, and provides the contents of the specific data. You can.
  • control unit 130 checks the license for the plasma simulation program, determines whether there is permission to access the contents of specific data according to the security level matched to the license, and determines whether the contents of the specific data are can be provided.
  • the license may be stored in the storage unit 120 or installed on a separate server.
  • control unit 130 may provide a limited editing function according to editing conditions set for the specific data.
  • the type of electronic device 200 is not limited and includes mobile phones, smart phones, laptop computers, laptop computers, and slate PCs ( It can be a slate PC, tablet PC, ultrabook, desktop computer, digital broadcasting terminal, personal digital assistants (PDA), portable multimedia player (PMP), etc.
  • the electronic device 200 may be used interchangeably with a user terminal, user terminal, etc.
  • the plasma simulation system 100 may be provided as a web browser-based service or may be implemented as an application or software. At this time, an application or software according to the plasma simulation system 100 may be installed in the electronic device 200.
  • the communication unit 110, storage unit 120, and control unit 130 of the plasma simulation system 100 can perform plasma simulation by utilizing the hardware configuration of the electronic device 200. there is.
  • the communication unit 110 uses the configuration of the communication module (e.g., mobile communication module, short-range communication module, wireless Internet module, location information module, broadcast reception module, etc.) provided in the communication unit of the electronic device 200. , can communicate with at least one external server 140.
  • the communication module e.g., mobile communication module, short-range communication module, wireless Internet module, location information module, broadcast reception module, etc.
  • the communication unit 110 may receive data used for at least one plasma simulation stored in the external server 140.
  • the storage unit 120 may be configured to store various information related to the present invention using a memory provided in (or inserted into) the electronic device 200 or an external server 140.
  • control unit 130 may utilize at least one of the CPU and the cloud server provided in the electronic device 200 to perform control of each component and overall control related to the present invention.
  • control unit 130 may have control authority over at least one of the components of the electronic device 200 in order to perform the present invention. Additionally, the control unit 130 can control the display unit of the electronic device 200 to provide a page of a plasma simulation program with limited exposure and editing of data provided by the present invention on the display unit. At this time, the control unit 130 may indirectly control the display unit by directly controlling the display unit or transmitting a control command to the control unit of the electronic device 200 that controls the display unit.
  • FIG. 2 is a flowchart of a plasma simulation method providing limited editing performed in the plasma simulation system of FIG. 1, and FIG. 4 is a conceptual diagram illustrating a page of a plasma simulation program.
  • control unit 130 can provide a page of the plasma simulation program on the display of the electronic device 200 on which the plasma simulation program is driven. (S210).
  • the page may be a user interface, and mainly exemplifies a graphical user interface (GUI).
  • GUI graphical user interface
  • the control unit 130 displays a plasma signal including data used for plasma simulation on the display of the electronic device 200 on which the plasma simulation program is run. You can control the output of the page (or “screen”, 400) of the simulation program.
  • the plasma simulation program page 400 provided by the present invention may include a plurality of areas containing items corresponding to data used in plasma simulation.
  • the plasma simulation program page 400 includes i) an area (e.g., Data, 410) containing a reaction list consisting of items corresponding to data used in plasma simulation. , ii) an area (e.g., Properties, 420) including an item corresponding to data used in plasma simulation and an editing area of data corresponding to the item.
  • an area e.g., Data, 410
  • an area e.g., Properties, 420
  • the pages of the plasma simulation program listed above are only examples, and the page according to the present invention may include various areas that include necessary information or perform functions related to plasma simulation.
  • data used in plasma simulation according to the present invention may include at least one of the initial value of plasma simulation, the chemical equation used for plasma simulation calculation, and the conditions of plasma simulation.
  • control unit 130 may provide a reaction list composed of items corresponding to the first type data and the second type data used in plasma simulation, respectively, on the page of the plasma simulation program (S220).
  • the control unit 130 may distinguish the first type data and the second type data based on preset security conditions set for each of the first type data and the second type data.
  • control unit 130 determines the display method of the first item corresponding to the first type data and the second type data based on the preset security conditions set for each of the first type data and the second type data.
  • the display method of the corresponding second item can be determined.
  • the control unit 130 displays first type data used in plasma simulation in one area (e.g., Data, 410) of the page 400 of the plasma simulation program.
  • a reactive list 411 consisting of at least one of the corresponding first item (e.g., “DB” 412) and the second item (e.g., “C2F4+E”413) corresponding to the second type data is output. You can control it.
  • control unit 130 encrypts the first type data based on preset security conditions so that the contents of the first type data are not exposed on the reactive list 411, and the first item 412 contains To prevent the contents of the first type data from being exposed, guide information (eg, “Confidential DB”) indicating that the first type data is encrypted may be included.
  • guide information eg, “Confidential DB”
  • control unit 130 limits the encryption of the second type data so that the contents of the second type data are exposed on the reactive list 411, and the second item 413 includes the contents of the second type data. can do.
  • control unit 130 may control the response list composed of items corresponding to the first type data and the second type data to be output differently depending on the user account logged in to the plasma simulation program.
  • the logged in user account may be replaced with a license associated with the plasma simulation program.
  • the control unit 130 controls the reaction list composed of items corresponding to the first type data and the second type data to be output differently according to the license. You can. However, for convenience of explanation, the present invention will be described below based on user accounts.
  • data matched to security condition 1 ( 310) can be classified as first type data, and data 320 and 330 matching security condition 2 and security condition 3, respectively, can be classified as second type data.
  • reaction list 411 composed of items respectively corresponding to the first type data and the second type data according to the present invention may be provided differently depending on the account logged in to the plasma simulation program.
  • the control unit 130 selects the first item on the page 400 of the plasma simulation program.
  • Information related to the contents of the first type data corresponding to may be provided.
  • the control unit 130 receives a reaction list ( When the first item (e.g., 510) corresponding to the first type data is selected among the items included in 411), information related to the contents of the first type data is displayed on the page 400 of the plasma simulation program. It can be controlled to output (520).
  • a reaction list When the first item (e.g., 510) corresponding to the first type data is selected among the items included in 411), information related to the contents of the first type data is displayed on the page 400 of the plasma simulation program. It can be controlled to output (520).
  • the information 520 related to the contents of the first type data includes guide information (e.g., “private data”) indicating that the first type data has been encrypted so that the contents of the first type data are not exposed, and the first Information about the content of the type data (for example, “reaction formula used in the plasma etching process”) may be included.
  • guide information e.g., “private data”
  • the first Information about the content of the type data for example, “reaction formula used in the plasma etching process”
  • information related to the content of the first type data may vary depending on the account logged in to the plasma simulation program.
  • control unit 130 when the first item corresponding to the first type of data is selected from the electronic device 200 in which the plasma simulation program is driven, the control unit 130
  • At least one of the contents of the first type data and information related to the contents of the first type data may be provided on the page 400 of the plasma simulation program.
  • control unit 130 may determine that the user account logged in to the plasma simulation program has access to the contents of the first type data, based on the security level stored by matching the user account logged in to the plasma simulation program. You can.
  • control unit 130 may provide guide information for releasing the security of the first type data on the page 400 of the plasma simulation program.
  • the first item corresponding to the first type data among the items included in the reaction list 411 (e.g. , 610) is selected,
  • the control unit 130 on the page 400 of the plasma simulation program, provides a first message containing guide information (for example, “when security is released, a response can be provided”) that can release the security of the first type data. It can be controlled to output information 630 related to the contents of the type data.
  • guide information for example, “when security is released, a response can be provided”
  • the information 630 related to the contents of the first type data includes guide information (e.g., “private data”) indicating that the first type data has been encrypted so that the contents of the first type data are not exposed, and the first Information about the content of the type data (for example, “reaction formula used in the plasma etching process”) may be included.
  • guide information e.g., “private data”
  • the first Information about the content of the type data for example, “reaction formula used in the plasma etching process”
  • the information 520 and 630 related to the contents of the first type data according to the present specification are not limited to the above-described contents.
  • a function icon for example, 620 for releasing the security of the first type data is displayed in the plasma. It can be controlled to be output on the page 400 of the simulation program.
  • control unit 130 creates a security release function icon 620 corresponding to the first type data and a first type corresponding to the first type data on the reactive list 411. It can be output together with item 1 (610).
  • the control unit 130 in the account logged in to the plasma simulation program, selects the selected A security release procedure for first type data may be performed.
  • the control unit 130 receives the password of the account included in the plasma simulation program from the electronic device 200 on which the plasma simulation program is run, and the received password is included in the plasma simulation program. This may include determining whether it matches the account's password.
  • control unit 130 may provide the contents of the first type data on the page 400 of the plasma simulation program according to the result of the security release procedure.
  • the security release procedure for first type data listed above is only an example, the security release procedure for first type data according to the present invention includes various methods for confirming the contents of data used in a plasma simulation program. can do.
  • each of the first type data and the second type data stored in the storage unit 120 is subject to a first edit condition in which editing is limited or editing is limited, depending on whether the first type data and the second type data are editable. It is made to have a possible second editing condition.
  • the control unit 130 displays a page of the plasma simulation program.
  • guide information indicating that data corresponding to the selected item cannot be edited may be provided.
  • the control unit 130 receives data having the first editing condition among the items constituting the reaction list 411 from the electronic device 200 in which the plasma simulation program is driven.
  • a corresponding specific item e.g., 710
  • guide information that the specific item cannot be modified e.g., “no modification possible, 720” is output on page 400 of the plasma simulation program. You can control it.
  • the control unit 130 selects the specific item.
  • the editing area included in at least one area of the page 400 of the plasma simulation program may be controlled to be activated.
  • the second edit condition among the items constituting the reaction list 411 is selected from a specific item (e.g., when 810 is selected, the control unit 130 displays an editing area activation icon 820 associated with the selected specific item 810 and guide information indicating that data corresponding to the specific item can be edited (e.g., “ Modifiable”, 830) can be controlled to be output on the page 400 of the plasma simulation program.
  • a specific item e.g.
  • guide information indicating that data corresponding to the specific item can be edited e.g., “ Modifiable”, 830
  • the control unit 130 When the edit area activation icon 820 associated with a specific item 810 is selected from the electronic device 200 in which the plasma simulation program is run, the control unit 130 performs plasma simulation on the edit area of the data corresponding to the specific item. It can be provided on page 400 of the program.
  • control unit 130 can control the edit area 900 of data corresponding to a specific item to be output in the form of a pop-up on the page 400 of the plasma simulation program.
  • the first to second areas 910 and 920 may be arranged side by side along one direction.
  • the first area 910 may be placed on top of the second area 920.
  • the configuration of the data editing area 900 corresponding to this specific item is only an example and can be changed in various ways.
  • the first area 910 may include the contents of data corresponding to a specific item so that the contents of the data corresponding to the specific item can be modified.
  • the first area 920 may include function icons 921 and 922 provided in the data editing area 900 corresponding to a specific item.
  • the control unit 130 corresponds to a specific item according to the present invention.
  • the contents of the data included in the first area of the edit area 900 may be stored in the storage unit 120 as the contents of data corresponding to a specific item.
  • control unit 130 selects the data corresponding to the specific item. You can end the editing process.
  • the method of providing the editing area 900 of data corresponding to a specific item according to the present invention is not limited to the details described herein, and is not limited to the divided area of the page 400 of the plasma simulation program, a new page, It can be provided in various forms, including configurations.
  • the items of the first type data are encrypted so that the contents of the first type data are not exposed, so even if the editing condition matched to the first type data is the second editing condition, the control unit 130 Editing of type 1 data can be restricted.
  • control unit 130 may perform plasma simulation using data corresponding to at least one item among the items included in the reaction list 411 (S230).
  • control unit 130 may provide the results of the plasma simulation on the page 400 (S240).
  • control unit 130 controls one area (e.g., Result, 1000) can be controlled to output the results of the plasma simulation.
  • one area e.g., Result, 1000
  • One area (e.g., Result, 1000) of the page 400 of the plasma simulation program is i) an area containing at least one item corresponding to the data used to perform the plasma simulation (e.g., Input Data Table , 1010), ii) an area containing the results of plasma simulation (e.g., Output, 1020).
  • control unit 130 displays the data corresponding to the data used to perform the plasma simulation along with the plasma simulation results in an area (e.g., Input Data Table, 1010) of the page 400 of the plasma simulation program. It can be controlled to output at least one item.
  • an area e.g., Input Data Table, 1010
  • control unit 130 may cause at least one item corresponding to data used to perform plasma simulation to be displayed differently based on a preset security condition set for the data corresponding to each of the at least one item.
  • the control unit 130 selects an item 1011 containing the contents of the data used to perform the plasma simulation, based on preset security conditions set for the data used to perform the plasma simulation. ) and at least one item 1012 including guide information (e.g., Confidential DB) indicating that the data is encrypted so that the contents of the data used to perform the plasma simulation are not exposed, the page of the plasma simulation program ( 400) can be controlled to be output on one area (e.g., Input Data Table, 1010).
  • guide information e.g., Confidential DB
  • control unit 130 controls one area (e.g., Input Data Table, 1010) of the page 400 of the plasma simulation program on the area (e.g., Output, 1020) containing the results of the plasma simulation. It can be controlled to output the results of a plasma simulation performed using data corresponding to at least one item included in .
  • area e.g., Input Data Table, 1010
  • Output 1020
  • results of the plasma simulation may include a figure representing a reaction based on data corresponding to at least one item.
  • control unit 130 stores data corresponding to at least one item on an area containing the results of plasma simulation (e.g., Output 1020). Based on this, a figure representing the response (for example, a two-dimensional graph, 1021) can be controlled to be output.
  • a figure representing the response for example, a two-dimensional graph, 1021
  • control unit 130 selects at least one item.
  • Information about specific data corresponding to a reaction related to a point among the data corresponding to can be provided.
  • information about specific data may vary depending on preset security conditions set for the specific data.
  • control unit 130 configures specific data corresponding to a reaction related to a point of the figure 1021 as a second type based on preset security conditions set for the specific data.
  • information 1022 about the specific data including the contents of the specific data can be controlled to be output on the area containing the results of the plasma simulation (eg, Output 1020).
  • control unit 130 divides specific data corresponding to a reaction related to a point of the figure 1021 into first type data based on preset security conditions set for the specific data. If so, information 1023 about specific data including guide information (e.g., Confidential DB) indicating that the data has been encrypted so that the contents are not exposed, is stored in the area containing the results of the plasma simulation (e.g., Output , 1020).
  • guide information e.g., Confidential DB
  • one area (e.g., Result, 1000) of the page 400 of the plasma simulation program listed above is only an example, and one area (e.g., Result, 1000) of the page 400 is a plasma simulation program. It may include various areas that perform functions or contain necessary information related to the results of.
  • computer-readable media includes all types of recording devices that store data that can be read by a computer system.
  • Examples of computer-readable media include HDD (Hard Disk Drive), SSD (Solid State Disk), SDD (Silicon Disk Drive), ROM, RAM, CD-ROM, magnetic tape, floppy disk, optical data storage device, etc. There is.
  • the computer-readable medium may be a server or cloud storage that includes storage and can be accessed by electronic devices through communication.
  • the computer can download the program according to the present invention from a server or cloud storage through wired or wireless communication.
  • the computer described above is an electronic device equipped with a processor, that is, a CPU (Central Processing Unit), and there is no particular limitation on its type.
  • a processor that is, a CPU (Central Processing Unit)
  • CPU Central Processing Unit

Abstract

La présente invention concerne un procédé et un système destinés à assurer une simulation de plasma, qui limitent l'exposition du contenu de données utilisées pour la simulation de plasma, sur la base d'une condition de sécurité pour les données utilisées pour la simulation de plasma, et limitent une fonction d'édition pour les données utilisées pour la simulation de plasma, sur la base d'une condition d'édition pour les données utilisées pour la simulation de plasma.
PCT/KR2022/006824 2022-05-04 2022-05-12 Simulateur de plasma offrant une édition limitée WO2023214606A1 (fr)

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KR10-2022-0055505 2022-05-04
KR1020220055505A KR20230155818A (ko) 2022-05-04 2022-05-04 제한된 편집을 제공하는 플라즈마 시뮬레이터

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WO2023214606A1 true WO2023214606A1 (fr) 2023-11-09

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050019231A (ko) * 2003-08-18 2005-03-03 김헌창 플라즈마 공정 챔버의 최적화 진단시스템 및 진단방법
KR20070120102A (ko) * 2005-02-25 2007-12-21 램 리써치 코포레이션 클러스터 툴을 위한 보안된 범용 구성 소프트웨어
JP2011022690A (ja) * 2009-07-14 2011-02-03 Renesas Electronics Corp シミュレーションモデル生成装置
KR20210025461A (ko) * 2019-08-27 2021-03-09 삼성전자주식회사 반도체 제조 공정 가이드 방법 및 이를 포함하는 전자 장치
KR20210131026A (ko) * 2020-04-23 2021-11-02 한국핵융합에너지연구원 플라즈마 시뮬레이션 서비스 제공 시스템 및 방법

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050019231A (ko) * 2003-08-18 2005-03-03 김헌창 플라즈마 공정 챔버의 최적화 진단시스템 및 진단방법
KR20070120102A (ko) * 2005-02-25 2007-12-21 램 리써치 코포레이션 클러스터 툴을 위한 보안된 범용 구성 소프트웨어
JP2011022690A (ja) * 2009-07-14 2011-02-03 Renesas Electronics Corp シミュレーションモデル生成装置
KR20210025461A (ko) * 2019-08-27 2021-03-09 삼성전자주식회사 반도체 제조 공정 가이드 방법 및 이를 포함하는 전자 장치
KR20210131026A (ko) * 2020-04-23 2021-11-02 한국핵융합에너지연구원 플라즈마 시뮬레이션 서비스 제공 시스템 및 방법

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