WO2023210855A1 - Procédé de simulation utilisant une extraction de texte - Google Patents

Procédé de simulation utilisant une extraction de texte Download PDF

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Publication number
WO2023210855A1
WO2023210855A1 PCT/KR2022/006828 KR2022006828W WO2023210855A1 WO 2023210855 A1 WO2023210855 A1 WO 2023210855A1 KR 2022006828 W KR2022006828 W KR 2022006828W WO 2023210855 A1 WO2023210855 A1 WO 2023210855A1
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Prior art keywords
simulation
plasma
document
file format
electronic file
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PCT/KR2022/006828
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English (en)
Korean (ko)
Inventor
권득철
정상영
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한국핵융합에너지연구원
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Publication of WO2023210855A1 publication Critical patent/WO2023210855A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32926—Software, data control or modelling
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F16/00—Information retrieval; Database structures therefor; File system structures therefor
    • G06F16/50—Information retrieval; Database structures therefor; File system structures therefor of still image data
    • G06F16/58—Retrieval characterised by using metadata, e.g. metadata not derived from the content or metadata generated manually
    • G06F16/583—Retrieval characterised by using metadata, e.g. metadata not derived from the content or metadata generated manually using metadata automatically derived from the content
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F16/00—Information retrieval; Database structures therefor; File system structures therefor
    • G06F16/50—Information retrieval; Database structures therefor; File system structures therefor of still image data
    • G06F16/58—Retrieval characterised by using metadata, e.g. metadata not derived from the content or metadata generated manually
    • G06F16/583—Retrieval characterised by using metadata, e.g. metadata not derived from the content or metadata generated manually using metadata automatically derived from the content
    • G06F16/5846—Retrieval characterised by using metadata, e.g. metadata not derived from the content or metadata generated manually using metadata automatically derived from the content using extracted text
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/08—Learning methods
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V30/00—Character recognition; Recognising digital ink; Document-oriented image-based pattern recognition
    • G06V30/10—Character recognition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes

Definitions

  • the present invention relates to a plasma simulation method and system.
  • Semiconductor manufacturing processes use plasma processing in various manufacturing steps to create semiconductor devices such as microprocessors, memory chips, or other integrated circuits.
  • This plasma process is performed by plasma equipment, and for example, equipment for depositing a material film on a wafer or etching a material film formed on a wafer is used.
  • the present invention provides a plasma simulation method and system that improves the accuracy of plasma simulation by preventing input errors in plasma simulation due to manual input.
  • the present invention provides a plasma simulation method and system that performs the development of a plasma simulator more efficiently by reducing the effort and cost of identifying information related to the plasma process from research data.
  • the plasma simulation method and system using text extraction simulates the plasma process using text information related to the plasma process automatically extracted from research data through a document recognition technique. Perform.
  • the plasma simulation method of the present invention includes the steps of receiving a document in an electronic file format containing information related to a plasma process through an electronic device related to plasma simulation, and using a character recognition technique to obtain a document in the electronic file format. extracting at least some of the information related to the plasma process included in text information, selecting at least one simulation factor data that affects the results of the plasma simulation using the extracted text information, and generating and performing the plasma simulation using parameter data from the simulated simulation.
  • the extracting the text information includes generating structured data by tokenizing text data included in the document in the electronic file format into first units; And, generating standardized data by tokenizing the information related to the plasma process into a second unit different from the first unit.
  • the first unit may include at least one of a word unit and a sentence unit
  • the second unit may include at least one of a chemical formula unit and a chemical reaction unit.
  • At least one of the extracted text information is selected as the simulation factor data using deep learning-based natural language processing technology (NLP).
  • NLP deep learning-based natural language processing technology
  • At least one of a chemical equation, gas species included in the chemical equation, a reaction coefficient of the chemical equation, and density data of the species may be extracted from the electronic document and selected as factor data for the simulation.
  • the extracted chemical equation may be matched with information related to reaction coefficients included in the document in the electronic file format and stored as a database. If the extracted chemical equation is a reaction involving electrons, the loss energy of the electrons can be extracted from the document in the electronic file format. If the electron loss energy is not extracted from the document in the electronic file format, the electron loss energy can be received from the user and stored.
  • the plasma simulation method of the present invention may include the step of checking for errors in the chemical equation included in the electronic document using the extracted text information. If you designate a block in a specific range in the electronic document, you can check for errors in the chemical equation within the designated block.
  • the step of performing the plasma simulation includes providing factor data of the generated simulation to at least one of the plasma simulation and related electronic devices, and receiving an input signal for selecting at least one of the provided factor data of the simulation. may include.
  • the simulation system includes a storage unit, a communication unit, and a control unit, wherein the communication unit is connected to at least one of an electronic device or an external server related to plasma simulation, and the control unit processes the plasma through the communication unit.
  • the communication unit is connected to at least one of an electronic device or an external server related to plasma simulation, and the control unit processes the plasma through the communication unit.
  • Receiving a document in an electronic file format containing information related to the document extracting at least some of the information related to the plasma process included in the document in the electronic file format as text information using a character recognition technique, and extracting the extracted text Information is used to select at least one simulation factor data that affects the results of the plasma simulation, and the plasma simulation is performed using the generated simulation factor data.
  • the program according to the present invention includes the steps of receiving a document in an electronic file format containing information related to a plasma process through an electronic device related to plasma simulation, and including the document in the electronic file format using a character recognition technique. Extracting at least some of the information related to the plasma process as text information, selecting at least one simulation factor data that affects the results of the plasma simulation using the extracted text information, and generating the It includes instructions for performing the step of performing the plasma simulation using the parameter data of the simulated simulation.
  • the present invention automatically extracts information necessary for simulation from documents in electronic file format through a document recognition technique, thereby enabling easier updating of the simulator.
  • the present invention extracts text information related to the plasma process from a document in an electronic file format through a text recognition technique and provides this to the user, allowing the user to select various conditions for simulation more quickly and accurately.
  • the present invention automatically extracts text information related to the plasma process contained in documents in electronic file format through a text recognition technique, research data related to many plasma simulators can be more easily applied to plasma simulation. .
  • the plasma simulation method and system according to the present invention can utilize the most up-to-date research data for plasma simulation calculations in a timely manner. Through this, the present invention can have the effect of improving the efficiency of plasma simulation calculations.
  • Figure 1 is a block diagram for explaining a plasma simulation system using text extraction.
  • FIG. 2 is a flowchart of a plasma simulation method using text extraction performed in the plasma simulation system of FIG. 1.
  • FIGS. 3A to 3B, 4, and 5 are conceptual diagrams for explaining text information related to the plasma process provided in the present invention.
  • Figure 6 is a conceptual diagram for explaining simulation parameter data provided in the present invention.
  • FIG. 7 is a conceptual diagram illustrating a graphical user interface (GUI) of a plasma simulator using text extraction according to the present invention.
  • GUI graphical user interface
  • FIGS. 8, 9A to 9B, 10A to 10B, and 11 are conceptual diagrams for explaining a method of selecting simulation parameter data according to the present invention.
  • the present invention relates to a simulation method and system using text extraction, and provides a plasma simulation method and system that extracts text information related to the plasma process from a document in an electronic file format and utilizes it for information needed for plasma simulation. will be.
  • plasma is a form of matter known as the fourth state of matter, and can refer to a state that is heated by a strong electric field or heat source and divided into particles such as electrons, neutral particles, and ions beyond the gaseous state.
  • the degree of charge separation is quite high, but the overall number of negative and positive charges is the same, so it can be neutral.
  • the plasma is used in the manufacturing process of semiconductor devices, which are core components of advanced digital devices such as smartphones, for example, in etching and deposition technologies, and may refer to low-temperature plasma with a plasma current of less than several amperes.
  • simulation may mean a simulation that simply performs an experiment that is difficult to actually execute, and in particular, it may be a computer simulation that is numerically analyzed using a computer and a mathematical model.
  • the mathematical model may be, for example, a fluid model that interprets plasma as a flowing fluid, a particle model that treats plasma as particles, etc.
  • the plasma simulation of the present invention is to virtually measure, for example, the temperature of species occurring inside the plasma equipment through calculation.
  • the internal situation of the plasma equipment or the progress of the plasma process can be determined by looking at the results of the calculation. It can be a concept that includes interpreting, etc.
  • software or programs that can perform such simulations can be defined as simulators. Through the simulator, the present invention can perform virtual experiments on plasma processes or equipment and provide the results to users as various visual data.
  • the plasma simulation system may include not only providing calculation results to the user using a simulator, but also controlling plasma equipment using the calculation results of the simulator, or providing various information necessary for controlling the plasma equipment.
  • FIG. 1 is a block diagram for explaining a plasma simulation system using text extraction according to the present invention.
  • the plasma simulation system 100 includes at least one of a communication unit 110, a storage unit 120, and a control unit 130.
  • the plasma simulation system 100 according to the present invention is not limited to the components described above, and may further include components that perform the same or similar roles as the functions described in the present specification.
  • the communication unit 110 is configured to communicate with at least one electronic device or an external server 140, and can support various communication methods depending on the communication standard of the communication target.
  • Wi-Fi Wireless Fidelity
  • Wi-Fi Wireless Fidelity
  • DLNA Digital Living Network Alliance
  • WiBro Wireless Broadband
  • WiMAX Worldwide Interoperability for Microwave Access
  • HSDPA High Speed Downlink Packet Access
  • HSUPA High Speed Uplink Packet Access
  • LTE Long Term Evolution
  • LTE-A Long Term Evolution Advanced
  • 5G Fifth Generation Mobile Telecommunication
  • BluetoothTM At least one of RFID (Radio Frequency Identification), Infrared Data Association (IrDA), UWB (Ultra-Wideband), ZigBee, NFC (Near Field Communication), Wi-Fi Direct, and Wireless USB (Wireless Universal Serial Bus) technologies. It can be achieved to communicate with an electronic device or an external server 140.
  • the storage unit 120 can be configured to store various information related to the present invention.
  • the storage unit 120 may be configured to store information (or data) related to the plasma process.
  • Information related to the plasma process may include at least one of initial values of plasma simulation, parameters, calculation conditions, gas species, chemical formula, chemical reaction formula, and equation.
  • the storage unit 120 may be provided in the plasma simulation system 100 itself.
  • at least a portion of the storage unit 120 may refer to an external server 140, for example, at least one of a cloud server (or cloud storage) and a database (DB). That is, the storage unit 120
  • DB database
  • the storage unit 120 It can be understood that any space where the information required for plasma simulation according to the present invention is stored is sufficient, and there are no restrictions on physical space. Therefore, hereinafter, the storage unit 120, cloud server, and database are separately divided. Instead, it is expressed as a storage unit 120.
  • control unit 130 may control the overall operation of the plasma simulation system 100 related to the present invention.
  • the control unit 130 can provide or process signals, data, information, functions, etc. that are input or output through the components described above.
  • control unit 130 can extract text information related to the plasma process from a document in an electronic file format received from an electronic device related to plasma simulation and select information necessary for plasma simulation.
  • the electronic file format may include at least one of an image file format or a portable document format (PDF) file format.
  • PDF portable document format
  • the electronic file format according to the present invention is not limited to the above-described electronic file format, and other formats of electronic files are also possible.
  • electronic devices related to plasma simulation include at least one of laptops, desktops, smart phones, mobile phones, tablet PCs, KOISKs, digital broadcasting terminals, PDAs (Personal Digital Assistants), and PMPs (Portable Multimedia Players). may include.
  • the plasma simulation system 100 may be provided as a web browser-based service or may be implemented as an application or software.
  • an application or software according to the plasma simulation system 100 may be installed in an electronic device.
  • the communication unit 110, storage unit 120, and control unit 130 of the plasma simulation system 100 can perform plasma simulation by utilizing the hardware configuration of the electronic device.
  • the communication unit 110 uses the configuration of a communication module (e.g., a mobile communication module, a short-range communication module, a wireless Internet module, a location information module, a broadcast reception module, etc.) provided in the communication unit of the electronic device, and uses at least one It is possible to communicate with the external server 140.
  • a communication module e.g., a mobile communication module, a short-range communication module, a wireless Internet module, a location information module, a broadcast reception module, etc.
  • the communication unit 110 may receive information about at least one document stored in the external server 140.
  • the storage unit 120 may be configured to store information related to the plasma simulation according to the present invention using a memory provided in (or inserted into) an electronic device or an external server 140.
  • the control unit 130 can perform control of each component and overall control related to the present invention by utilizing at least one of the CPU and the cloud server provided in the electronic device. Furthermore, the control unit 130 may have control authority over at least one component of the electronic device in order to perform the present invention. Furthermore, the control unit 130 can control the display unit of the electronic device to provide text information related to the plasma process extracted from the document provided in the present invention on the display unit. At this time, the control unit 130 may indirectly control the display unit by directly controlling the display unit or transmitting a control command to a control unit of an electronic device that controls the display unit.
  • FIG. 2 is a flowchart of a plasma simulation method using text extraction performed in the plasma simulation system of FIG. 1, and FIGS. 3A, 3B, 4, and 5 are diagrams for explaining text information related to the plasma process provided in the present invention. These are conceptual diagrams, and FIG. 6 is a conceptual diagram for explaining simulation parameter data provided in the present invention. Furthermore, Figure 7 is a conceptual diagram for explaining a graphical user interface (GUI) of a plasma simulator using text extraction according to the present invention, and Figures 8, 9a to 9b, 10a to 10b, and 11 are used in the present invention. These are conceptual diagrams to explain how to select simulation parameter data.
  • GUI graphical user interface
  • a process of receiving a document in an electronic file format containing information related to the plasma process can be performed through an electronic device related to plasma simulation ( S210).
  • receiving a document in an electronic file format may mean transmitting a document in an electronic file format from an electronic device related to plasma simulation and receiving it in the plasma simulation system 100 according to the present invention.
  • the control unit 130 may receive a document in an electronic file format through the communication unit 110.
  • the electronic device may include a scanner, scan printed research materials into documents in electronic file format through the scanner, and receive the scanned electronic files in a plasma simulator.
  • the plasma simulator is equipped with an electronic file upload function, so it is possible for a document in the electronic file format to be directly uploaded to the simulator.
  • the electronic file format may include at least one of a PDF file format and an image file format.
  • the electronic file format according to the present invention is only an example and can be changed in various ways.
  • information related to the plasma process included in the document in electronic file format may include chemical formulas used in plasma simulation calculations.
  • information related to the plasma process according to the present invention may include at least one of the initial value of the plasma simulation, the chemical equation used in the plasma simulation calculation, the reaction coefficient, and the conditions of the plasma simulation.
  • control unit 130 may perform a process of extracting at least some of the information related to the plasma process included in the document in an electronic file format as text information using a character recognition technique (S220).
  • the character recognition technique may include OCR (Optical character recognition) technology.
  • OCR technology is the process of acquiring images of characters written by a person or printed by a machine using an image scanner and converting them into characters that can be read by a machine.
  • PDF Parser is a command-line program that parses PDF documents and provides the ability to extract raw data from PDF documents, such as compressed images.
  • 3A and 3B illustrate an example of a process in which the control unit 130 extracts some of the information related to the plasma process included in a document in an electronic file format using a character recognition technique according to the present invention.
  • control unit 130 may extract some of the information related to plasma included in a document in an electronic file format as text information using a character recognition technique.
  • control unit 130 uses the information related to the plasma process stored in the storage unit 120 or the external server 140 to convert some of the information related to the plasma process into character information in a document in an electronic file format using a character recognition technique. It can be extracted with
  • control unit 130 may use a character recognition technique to extract some of the information related to the plasma process included in the document in an electronic file format as character information in chemical formula units or chemical reaction formula units.
  • the step of extracting text information may include generating structured data by tokenizing text data included in the document in the electronic file format into first units. Additionally, the step of extracting the text information (S220) may include generating standardized data by tokenizing the information related to the plasma process into a second unit different from the first unit.
  • the first unit may include at least one of a word unit and a sentence unit
  • the second unit may include at least one of a chemical formula unit and a chemical reaction unit.
  • chemical formulas such as SF6 and C2F6 may be tokenized in chemical formula units, and words such as ions, active species, and neutral species may be tokenized in word units.
  • words such as ions, active species, and neutral species may be tokenized in word units.
  • FIG. 3B various chemical equations may be described in the document, and in this case, the described chemical equations may be tokenized.
  • Table 1 Chemical equations such as these can be tokenized into chemical equation units.
  • reactants and products can be extracted and stored separately.
  • Reactants are on the left based on the chemical equation, and products can be defined by the chemical formula on the right.
  • the chemical equation can be stored separately by the chemical formula (species) and number involved.
  • control unit 130 may generate text information extracted from a document in an electronic file format as standardized data and store it in the storage unit 120.
  • control unit 130 may store text information extracted from a document in an electronic file format in the storage unit 120 by selectively reflecting various items based on the document.
  • FIG. 4 illustrates an example of a method in which the control unit 130 stores text information extracted from a document in an electronic file format in the storage unit 120.
  • the control unit 130 may classify and store text information extracted from a document in an electronic file format into text information of chemical formulas related to the plasma process, chemical reaction equations, initial values of plasma simulation, and condition units of plasma simulation.
  • text information related to the plasma process described with FIG. 4 is only an example and can be changed in various ways.
  • the control unit 130 receives the text information extracted from the document in the electronic file format from the control unit 130.
  • the file name of the document in electronic file format can be matched with the plasma process information and stored in the storage unit 120.
  • the control unit 130 receives the text information extracted from the document in the electronic file format as an electronic
  • the file name of the file format document can be matched with the plasma process information and stored in the storage unit 120.
  • the control unit 130 sets the text information extracted from the document in the electronic file format to the electronic file format received from the control unit 130.
  • the document's file name, plasma process information, and information can be stored in the storage unit 120.
  • the control unit 130 receives the text information extracted from the document in electronic file format from the control unit 130.
  • the file name and plasma process information of a document in an electronic file format can be matched and stored in the storage unit 120.
  • control unit 130 may match text information extracted from a document in an electronic file format and store it in the storage unit 120.
  • the control unit 130 adds the text information extracted from the document in an electronic file format to the text information related to the chemical equation.
  • Text information related to the response coefficient can be matched and stored in the storage unit 120.
  • reaction coefficients A, B, and C related to the chemical equation may exist in the document.
  • the reaction coefficient follows the Arrhenius form, and in this case, the values of A, B, and C are presented.
  • the control unit can extract the values of the reaction coefficients A, B, and C from the document.
  • the chemical equation and reaction coefficient can be matched to each other and created into a database as shown in Table 2.
  • At least one of the text information extracted from the document in electronic file format is text information related to a chemical reaction formula (e.g., ), the control unit 130 adds character information related to the reaction coefficient A (e.g., 3.06e-02) or a reaction coefficient among character information extracted from a document in an electronic file format to the character information related to the chemical reaction formula.
  • At least one of text information related to B (eg, -1.3) or text information related to the response coefficient C (eg, 184820.0) may be matched and stored in the storage unit 120.
  • the reaction coefficient may be provided in the document in the form of a function for electron temperature, and in this case, the control unit may extract the function and calculate the reaction coefficient. That is, when the reaction coefficient is expressed as an arbitrary electron temperature, the control unit 130 can extract and store the entire equation for the electron temperature in the storage unit 120.
  • the control unit 130 can distinguish between a case in which the value of the reaction coefficient is extracted and stored and a case in which the entire equation is extracted and stored, and can inform the user about the storage criteria.
  • the control unit 130 controls the response containing the electron.
  • the text information related to the loss energy of the electrons among the text information extracted from the document in an electronic file format can be matched to the text information related to and stored in the storage unit 120.
  • information related to the loss energy can be extracted from the document.
  • the control unit 130 may control the plasma simulation system 100 to receive it from the electronic device related to plasma simulation. there is.
  • control unit 130 can determine the relationship between text information extracted from a document in an electronic file format, match related text information among the text information extracted from a document in an electronic file format, and store it in the storage unit 120. there is. At this time, if there is no text information to match among the text information extracted from the document in the electronic file format, the plasma simulation system 100 can be controlled so that it can be received from an electronic device related to plasma simulation. To this end, when there is no text information, information indicating that input is required can be output using a display, etc., and input corresponding to the text information can be induced from the user.
  • information such as chemical equations can be extracted from documents and information that can be read by a simulator can be constructed as a database. At this time, the extracted information can be written into a file that is input to the simulator. In addition to the extracted information, additional information may be created by extracting information from literature referenced in the document, and other information may also be stored in the file.
  • the file input to the simulator is created by extracting the chemical reaction equation, and although this is not necessarily required for simulation calculations, it is necessary for classifying the reaction equation. In actual calculations, calculations are made using the information indicated on reactants and products, but if only these reactants and products are indicated, it is not easy to intuitively distinguish which reactions were considered. This problem can be resolved by extracting the chemical equations together and writing them into a file. It can be solved.
  • control unit 130 may transmit and receive data with the external server 140 through the communication unit 110 in order to determine the relationship between text information extracted from documents in electronic file format.
  • the external server 140 may be equipped with an artificial intelligence model that has learned information related to plasma simulation and provide an artificial intelligence service that derives information such as the correlation using the artificial intelligence model.
  • the control unit 130 may transmit text information extracted from a document in an electronic file format to the external server 140 through the communication unit 110.
  • control unit 130 transmits text information extracted from a document in an electronic file format to the external server 140 described above through the communication unit 110, and the external server 140 transmits the text information in the transmitted electronic file format.
  • the control unit 130 By learning the text information extracted from the document, related text information among the text information extracted from the document in an electronic file format can be matched and transmitted to the control unit 130 through the communication unit 110 of the plasma simulation system 100.
  • the step of extracting the text information (S220) can be performed in the external server 140.
  • control unit 130 transmits and receives data with the external server 140 through the communication unit 110 in order to extract some of the information related to the plasma process as text information from a document in an electronic file format using a character recognition technique. can do.
  • the external server 140 may provide an artificial intelligence service using a machine learning-based character recognition technique.
  • control unit 130 transmits a document in an electronic file format to the external server 140 described above through the communication unit 110, and the external server 140 performs a plasma process from the received document in the electronic file format.
  • Some of the information related to can be extracted as text information and transmitted to the control unit 130 through the communication unit 110 of the plasma simulation system 100.
  • the external server 140 determines the relationship between the text information extracted from the document in the electronic file format, and matches the related text information among the text information extracted from the document in the electronic file format to form the plasma simulation system 100. It can be transmitted to the control unit 130 through the communication unit 110.
  • control unit 130 outputs information about the process of extracting at least some of the information related to the plasma process as text information from a document in an electronic file format on the screen provided by the plasma simulation system 100 according to the present invention. You can.
  • control unit 130 displays a guidance text (e.g., “We are extracting text information related to the plasma process”) and the progress of the process of extracting text information related to the plasma process from a document in electronic file format can be output.
  • a guidance text e.g., “We are extracting text information related to the plasma process”
  • control unit 130 extracts text information related to the plasma process from a document in an electronic file format
  • the present invention uses the extracted text information to generate at least one simulation factor data that affects the results of plasma simulation.
  • the process of selecting may proceed (S230).
  • the simulation factor data that affects the plasma simulation results may include chemical formulas related to the plasma process, chemical reaction formulas, basic masses of species used in the chemical formulas, charge amounts, etc.
  • the simulation factor data is a selection of some of the text information in chemical formula units extracted from the document received by the control unit 130, and the control unit 130 uses the text information related to the plasma process stored in the storage unit 120 to provide simulation factor data. can be selected.
  • NLP deep learning-based natural language processing
  • control unit 130 may transmit and receive data with the external server 140 through the communication unit 110 in order to select simulation parameter data.
  • the external server 140 can provide artificial intelligence services with deep learning-based natural language processing technology.
  • natural language processing technology is one of the major fields of artificial intelligence that studies and implements human language phenomena to be described using machines such as computers.
  • control unit 130 transmits text information related to the plasma process extracted from the document to the external server 140 described above through the communication unit 110, and the external server 140 transmits the received text information related to the plasma process. At least one of the information may be selected as simulation factor data that affects the results of the plasma simulation and transmitted to the control unit 130 through the communication unit 110 of the plasma simulation system 100.
  • control unit 130 uses deep learning-based natural language processing technology provided by the external server 140 to simulate at least one of the character information in chemical formula units extracted from a document in an electronic file format to affect the plasma simulation results. It can be selected using factor data.
  • control unit 130 may select at least some of the text information related to the plasma process extracted from a document in an electronic file format as at least one simulation factor data that affects the results of plasma simulation and store it in the storage unit 120. there is.
  • control unit 130 selects at least some of the text information related to the plasma process extracted from a document in an electronic file format as at least one simulation factor data that affects the results of plasma simulation. It can be stored in the storage unit 120.
  • control unit 130 can match the type of document received, plasma process information, chemical formula, chemical reaction formula, initial value, and conditions and store them as simulation parameter data.
  • simulation parameter data At least one of a chemical equation, gas species included in the chemical equation, a reaction coefficient of the chemical equation, and density data of the species may be extracted from the electronic document and selected as factor data for the simulation.
  • the configuration of simulation parameter data described with FIG. 6 is only an example and may be changed in various ways.
  • control unit 130 displays a screen provided by the plasma simulation system 100 according to the present invention to provide information about the process of selecting at least one simulation factor data that affects the results of plasma simulation using the extracted character information. It can be printed to .
  • control unit 130 displays a guidance text (e.g., “Plasma simulation parameter data is being selected.”) and the progress of the process of selecting simulation parameter data can be output.
  • a guidance text e.g., “Plasma simulation parameter data is being selected.”
  • the step of performing the plasma simulation includes providing factor data of the generated simulation to at least one of the plasma simulation and related electronic devices, and selecting at least one of the provided factor data of the simulation. It may include receiving an input signal.
  • control unit 130 can perform plasma simulation using the simulator parameter data selected according to the present invention.
  • control unit 130 selects at least one of the function icons 741, 742, and 743 (e.g., “Cancel”, 743) provided on the detail page 740 from an electronic device related to plasma simulation.
  • the control unit 130 may end the process of performing plasma simulation using the selected simulation parameter data.
  • control unit 130 selects at least one of the function icons 741, 742, and 743 (e.g., “direct selection”, 741) provided on the detail page 740 from the electronic device related to plasma simulation.
  • the control unit 130 may provide a function that allows the user to directly select simulation parameter data from a document in an electronic file format.
  • control unit 130 provides a selection page area that provides a function for the user to directly select simulation factor data from character information extracted from a document in an electronic file format according to the present invention. (800) can be output.
  • first to fourth areas 810, 820, 830, and 840 may be arranged side by side along one direction.
  • the first area 810 is placed on the top of the second area 820
  • the second area 820 is placed on the top of the third area 830
  • the third area 830 is placed on the top of the third area 830. It can be placed at the top of area 4 840.
  • the configuration of the selection page area 800 is only an example and can be changed in various ways.
  • the plurality of tabs 821, 822, 823, and 824 included in the second area 820 and the third area may be related (or connected) to each other.
  • first area 810 to the fourth area 840 will be described together with FIG. 8 .
  • configuration of the first area 810 to the fourth area 840 described with FIG. 8 is only an example and can be changed in various ways within the scope of performing the same function.
  • a guide text for the function provided in the selection page area 800 may be displayed in the first area 810. there is.
  • a plurality of tabs 821, 822, and 823 are provided according to the classification of character information extracted from a document in an electronic file format that can be provided in the selection page area 800. , 824) may be displayed.
  • the classification of the extracted character information stored in the storage unit 120 may be matched to each of the plurality of tabs 821, 822, 823, and 824.
  • a default value (or default value) may be set in one of the plurality of tabs 821, 822, 823, and 824.
  • the control unit 130 When outputting the selection page area 800, the control unit 130 displays character information 400 stored in the storage unit 120 corresponding to a specific tab set as default (e.g., the first tab “Chemical Formula”, 821). can be output to the third area 830.
  • a specific tab set as default e.g., the first tab “Chemical Formula”, 821.
  • a tab (e.g., a second tab “Chemical equation”, 822) different from the specific tab set as default (the first tab, 821) is stored in the storage unit 120.
  • Stored text information 410 may be included.
  • a tab (e.g., third tab “initial value”, 823) that is different from the specific tab (first tab, 821) set as default is stored in the storage unit 120.
  • Stored text information 420 may be included.
  • character information stored in the storage unit 120 corresponding to a tab e.g., fourth tab “Condition”, 824) different from a specific tab set as default (first tab, 821) (430) may be included.
  • the control unit 130 operates an electronic device related to plasma simulation in a state where the third area 830 contains the text information 400 stored in the storage unit 120 corresponding to the first tab 821.
  • the second tab 822 is selected among the plurality of tabs 821, 822, 823, and 824 output to the second area 820, the tab stored in the storage unit 120 corresponds to the selected second tab 822.
  • Text information 410 can be output to the third area 830.
  • the control unit 130 receives a second signal from an electronic device related to plasma simulation.
  • the third tab 823 is selected among the plurality of tabs 821, 822, 823, and 824 output to the area 820, character information stored in the storage unit 120 corresponding to the selected third tab 823 ( 420) can be output to the third area 830.
  • the control unit 130 outputs text information 420 stored in correspondence to the third tab 822 in the third area 830 from an electronic device related to plasma simulation to the second area 820.
  • the fourth tab 824 among the plurality of tabs 821, 822, 823, and 824 is selected, the character information 430 stored in the storage unit 120 corresponding to the selected fourth tab 824 is stored in the third area. It can be printed at (830).
  • the third area 830 may be related to one of the plurality of tabs 821, 822, 823, and 824 included in the second area 820.
  • the text information included in the third area 830 can be output as a checklist from which multiple selections are possible.
  • simulation factor data 600 selected by the control unit 130 exists among the text information included in the third area 830, the text information included in the simulation factor data is selected and the simulation factor data 600 is selected. Character information not included in the argument data can be output as an unselected check list.
  • control unit 130 displays text information related to the selected plasma process. You can print it as you choose.
  • control unit 130 displays the selected character information as not selected. Can be printed.
  • the fourth area 840 may include function icons 841, 842, and 843 provided in the selection page area 800.
  • the control unit 130 selects a page area (selection page area) according to the present invention.
  • Plasma simulation can be performed using the simulator parameter data selected in 800).
  • control unit 130 may store simulation parameter data used to perform plasma simulation in the storage unit 120 .
  • the control unit 130 You can complete the process of performing plasma simulation using manually selected simulation parameter data.
  • control unit 130 can provide a function to check documents in electronic file format.
  • the control unit 130 can output a document view page area 900 that provides a document in an electronic file format received according to the present invention and character information extracted from the document.
  • the first to fourth areas 910, 920, 930, and 940 may be arranged in the document viewing page area 900 regardless of direction.
  • the configuration of the selection page area 900 is only an example and can be changed in various ways.
  • the first area 910 contains guidance text for functions provided in the document view page area 900 (e.g., “Please select the content to enter in the simulation”). can be printed.
  • a document 922 in an electronic file format that can be provided in the document view page area 900 can be output in the second area 920.
  • control unit 130 may display (for example, a box 925) the character information extracted from the document in an electronic file format.
  • control unit 130 may output text information selected as simulation factor data among text information extracted from a document in an electronic file format with a different display.
  • control unit 130 converts a document 922 in an electronic file format into character information selected as simulation factor data among the text information extracted from the document in an electronic file format (e.g., 923 , 924) may be output to be displayed differently from character information (e.g., 925) related to other plasma processes.
  • displaying differently may include displaying boxes with different colors.
  • the method of displaying character information selected as simulation parameter data explained with FIG. 9A is only an example and can be changed in various ways.
  • the second area 920 may include a function icon (eg, “Edit”, 921) that can modify character information extracted from a document in an electronic file format.
  • a function icon eg, “Edit”, 921
  • control unit 130 When the function icon 921 included in the second area 920 is selected from an electronic device related to plasma simulation, the control unit 130 provides a function to edit text information related to the plasma process extracted from a document in an electronic file format. can be provided.
  • the plasma simulation method of the present invention may include the step of checking for errors in the chemical equation included in the electronic document using the extracted text information. For example, if a specific range of blocks is designated in the electronic document, the chemical equation can be checked for errors within the designated blocks.
  • Designation of such blocks may be provided by a function that can edit text information as in this example, but the present invention is not limited to this, and such blocks can be designated anywhere during the process of uploading or after uploading an electronic file. do.
  • the document 922 in an electronic file format included in the second area 920 may include a plurality of pages, and the first page of the plurality of pages may be set as the default value (or default value). You can.
  • control unit 130 When outputting the document view page area 900, the control unit 130 outputs character information included in the first page (e.g., 922) of a document in an electronic file format set as default to the third area 930. can do.
  • text information related to the plasma process included in a page different from the first page 922 of the electronic file format document set as the default may be output to the third area 930.
  • text information related to the plasma process included in the third area 930 can be output as a checklist from which multiple selections are possible.
  • simulation factor data 600 selected by the control unit 130 exists among the text information included in the third area 930, the text information included in the simulation factor data is selected and the simulation factor data 600 is selected. Character information not included in the argument data can be output as an unselected check list.
  • control unit 130 selects character information displayed as not selected from a check list that allows a plurality of selections included in the third area 950 from electronic devices related to plasma simulation. Once done, the selected character information 953 can be output to the checklist.
  • the fourth area 940 may include function icons 941 and 942 provided in the document view page area 900.
  • the control unit 130 When at least one of the function icons 941 and 942 included in the fourth area 940 (e.g., “Previous”, 941) is selected, the control unit 130 operates through the document view. The process of selecting simulation parameter data from text information related to the plasma process extracted from a document in electronic file format can be completed.
  • the control unit 130 When at least one of the function icons 941 and 942 included in the fourth area 940 (e.g., “Apply”, 942) is selected, the control unit 130 operates as shown in FIG. 8.
  • the selection page area 800 can be output.
  • control unit 130 may output the simulator factor data selected in the document view page area 900 to be included in the third area 800 of the selection page area 800 according to the present invention.
  • control unit 130 may provide a document stored in the storage unit 120 in an electronic file format.
  • the control unit 130 stores the document.
  • a document loading page area 1000 that can provide documents in electronic file format stored in the unit 120 can be output.
  • guidance text for functions provided in the document loading page area 1000 may be displayed in the first area 1010. .
  • documents in electronic file format provided by the document loading page area 1000 can be output in the second area 1020.
  • control unit 130 may output documents stored in the storage unit 120 in electronic file format to the second area 1020.
  • control unit 130 selects the selected electronic file. Documentation in the format may be used to provide selected simulation parameter data in a document in the appropriate electronic file format.
  • control unit 130 selects the simulation factor data selection page area 1030, as shown in FIG. 10B. can be output.
  • first to third areas 1040, 1050, and 1060 may be arranged side by side along one direction.
  • the first area 1040 may be placed on top of the second area 1050, and the second area 1050 may be placed on top of the third area 1060.
  • the configuration of the simulation factor data selection page area 1030 is only an example and can be changed in various ways.
  • guidance text may be output in the first area 1040
  • simulation parameter data may be output in the second area 1050.
  • the control unit 130 stores simulation factor data corresponding to a document (“Document 1”, 1021) in an electronic file format selected from the electronic devices related to plasma simulation stored in the storage unit 120 in a checklist ( 1051).
  • control unit 130 may output the selected simulation factor data as selected.
  • the second area 1050 may include a function icon (eg, “Add”, 1052) for selecting simulation factor data different from the simulation factor data stored in the storage unit 130.
  • a function icon eg, “Add”, 1052
  • the control unit 130 selects information related to the plasma process included in the document (“Document 1”, 1021) in the selected electronic file format.
  • a function to select at least some of the data as simulation parameter data may be provided.
  • This function can be performed in the same manner as the process described with FIGS. 8 and 9A to 9B.
  • the third area 1060 may include function icons 1061 and 1062 provided in the simulation factor data selection page area 1030.
  • the function icons 1061 and 1062 may include, for example, a selection icon (e.g., “OK”, 1061) for performing a plasma simulation using the simulation parameter data selected in the second area 1050 according to the present invention. ) and a selection icon that terminates the process of selecting simulation parameter data (e.g., “cancel”, 1062).
  • control unit 130 may provide simulation parameter data stored in the storage unit 120, as shown in FIG. 11.
  • the control unit 130 selects the storage unit ( A simulation factor data loading page area 1100 that can provide simulation factor data stored in 120) can be output.
  • first to third areas 1110, 1120, and 1130 may be arranged side by side along one direction.
  • the first area 1110 may be placed on top of the second area 1120, and the second area 1120 may be placed on the top of the third area 1130.
  • the configuration of the simulation factor data loading page area 1100 is only an example and can be changed in various ways.
  • simulation factor data loading page area 1100 For example, in the first area 1110, information about functions provided in the simulation factor data loading page area 1100 is displayed, and in the second area 1120, the simulation factor data loading page area 1100 is displayed. Simulation parameter data that can be provided can be output.
  • the control unit 130 may output the simulation factor data stored in the storage unit 120 as a checklist to the second area 1120.
  • control unit 130 may output the simulation factor data selected in the check list as being selected.
  • the third area 1130 may include function icons 1131 and 1132 provided in the simulation factor data loading page area 1100.
  • the function icons may be icons of the same function as the function icons described with reference to FIG. 10B, and the description thereof will be replaced with the above-described content.
  • the plasma simulation method and system extracts text information related to the plasma process from a document in an electronic file format, selects at least some of the extracted text information as simulation factor data, and performs plasma simulation.
  • an environment that facilitates the performance of plasma simulation can be provided.
  • the plasma simulation method and system according to the present invention extracts and provides text information related to the plasma process from a document in an electronic file format, thereby reducing the user's trouble finding information related to the plasma process in the document, You can avoid making input errors by not directly entering the information required for plasma simulation calculations.
  • computer-readable media includes all types of recording devices that store data that can be read by a computer system.
  • Examples of computer-readable media include HDD (Hard Disk Drive), SSD (Solid State Disk), SDD (Silicon Disk Drive), ROM, RAM, CD-ROM, magnetic tape, floppy disk, optical data storage device, etc. There is.
  • the computer-readable medium may be a server or cloud storage that includes storage and can be accessed by electronic devices through communication.
  • the computer can download the program according to the present invention from a server or cloud storage through wired or wireless communication.
  • the computer described above is an electronic device equipped with a processor, that is, a CPU (Central Processing Unit), and there is no particular limitation on its type.
  • a processor that is, a CPU (Central Processing Unit)
  • CPU Central Processing Unit

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Abstract

La présente invention concerne un procédé et un système de simulation de plasma, le procédé extrayant des informations de texte relatives à un processus de plasma à partir d'un document au format électronique, sélectionnant au moins une partie des informations de texte extraites en tant que données de facteur de simulation et simulant un plasma.
PCT/KR2022/006828 2022-04-29 2022-05-12 Procédé de simulation utilisant une extraction de texte WO2023210855A1 (fr)

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KR10-2022-0053501 2022-04-29
KR1020220053501A KR20230153730A (ko) 2022-04-29 2022-04-29 텍스트 추출을 이용한 시뮬레이션 방법

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Citations (5)

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Publication number Priority date Publication date Assignee Title
KR20050019231A (ko) * 2003-08-18 2005-03-03 김헌창 플라즈마 공정 챔버의 최적화 진단시스템 및 진단방법
JP2018063597A (ja) * 2016-10-13 2018-04-19 株式会社東芝 文字認識装置、文字認識方法、文字認識プログラム、および帳票
KR20190128717A (ko) * 2017-03-27 2019-11-18 지멘스 악티엔게젤샤프트 설계 툴들로부터의 데이터 및 디지털 트윈 그래프로부터의 지식을 사용하는 자동화된 생성적 설계 합성을 위한 시스템
KR20210131026A (ko) * 2020-04-23 2021-11-02 한국핵융합에너지연구원 플라즈마 시뮬레이션 서비스 제공 시스템 및 방법
JP2022025013A (ja) * 2020-07-28 2022-02-09 富士通株式会社 研究論文に関連付けられたマルチモーダルオンラインリソースの抽出

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050019231A (ko) * 2003-08-18 2005-03-03 김헌창 플라즈마 공정 챔버의 최적화 진단시스템 및 진단방법
JP2018063597A (ja) * 2016-10-13 2018-04-19 株式会社東芝 文字認識装置、文字認識方法、文字認識プログラム、および帳票
KR20190128717A (ko) * 2017-03-27 2019-11-18 지멘스 악티엔게젤샤프트 설계 툴들로부터의 데이터 및 디지털 트윈 그래프로부터의 지식을 사용하는 자동화된 생성적 설계 합성을 위한 시스템
KR20210131026A (ko) * 2020-04-23 2021-11-02 한국핵융합에너지연구원 플라즈마 시뮬레이션 서비스 제공 시스템 및 방법
JP2022025013A (ja) * 2020-07-28 2022-02-09 富士通株式会社 研究論文に関連付けられたマルチモーダルオンラインリソースの抽出

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