WO2023214606A1

WO2023214606A1 - Plasma simulator providing limited editing

Info

Publication number: WO2023214606A1
Application number: PCT/KR2022/006824
Authority: WO
Inventors: 권득철; 정상영
Original assignee: 한국핵융합에너지연구원
Priority date: 2022-05-04
Filing date: 2022-05-12
Publication date: 2023-11-09
Also published as: KR20230155818A

Abstract

The present invention provides a method and system for providing plasma simulation, which limit the exposure of the content of data used for plasma simulation, on the basis of a security condition for the data used for plasma simulation, and limit an editing function for the data used for plasma simulation, on the basis of an editing condition for the data used for plasma simulation.

Description

Plasma simulator with limited editing

The present invention relates to a method and system for providing plasma simulation.

Semiconductor manufacturing processes use plasma processing in various manufacturing steps to create semiconductor devices such as microprocessors, memory chips, or other integrated circuits. This plasma process is performed by plasma equipment, and for example, equipment for depositing a material film on a wafer or etching a material film formed on a wafer is used.

Calculating the internal state of the plasma equipment and explaining the physical phenomena of the process using a plasma simulator to analyze the characteristics of the plasma equipment or process is a very important task in saving time and costs.

Accordingly, much research and development for numerical analysis of plasma simulators is actively underway, and researchers and developers generally provide chemical formulas and calculation conditions required for new plasma simulations as a database of plasma simulators from the results of such research and development.

In addition, there are some chemical formulas or calculation conditions that cause problems such as lowering the accuracy of plasma simulation when an input error occurs and taking a lot of time.

The present invention provides a method and system for providing plasma simulation that improves the accuracy of plasma simulation by preventing input errors in plasma simulation.

Furthermore, the present invention provides a plasma simulation providing method and system that enhances the security of important data used in plasma simulation and performs the development of a plasma simulator more efficiently.

In order to solve the problems discussed above, the method and system for providing plasma simulation according to the present invention provides a plasma simulation program that provides limited editing according to the account logged in to the plasma simulation program or the license installed.

More specifically, the plasma simulation providing method of the present invention includes providing a page of the plasma simulation program on a display of an electronic device in which the plasma simulation program is driven, and on the page, a first type used for plasma simulation. Providing a reaction list consisting of items corresponding to data and second type data, and performing the plasma simulation using data corresponding to at least one of the items included in the reaction scheme list. , providing results of the plasma simulation on the page.

The distinction between the first type data and the second type data may be made based on preset security conditions set for each of the first type data and the second type data.

Furthermore, among the items, the display method of the first item corresponding to the first type data and the display method of the second item corresponding to the second type data are in each of the first type data and the second type data. It may be determined based on the preset security conditions.

The first type data is encrypted based on the preset security conditions so that the contents of the first type data are not exposed on the reactive list, and in the first item, the first type data is encrypted so that the contents of the first type data are not exposed. Guide information indicating that type 1 data is encrypted may be included.

Meanwhile, the second type data is data whose encryption is restricted so that the contents of the second type data are exposed on the reactive list, and the second item may include the contents of the second type data.

The plasma simulation method of the present invention, when the first item corresponding to the first type data is selected from the electronic device, displays information related to the contents of the first type data corresponding to the first item on the page. Information can be provided.

In addition, when the first item corresponding to the first type data is selected from the electronic device, the user account logged in to the plasma simulation program or the stored license is checked, and the user account or license is selected as the first type. It is determined whether there is permission to access the contents of the data, and based on the determination result, at least one of the contents of the first type data and information related to the contents of the first type data may be provided on the electronic device. .

Meanwhile, each of the first type data and the second type data has a first edit condition with limited editing or a second edit condition with editable content depending on whether the first type data and the second type data can be edited. It can be done to have.

Furthermore, when a specific item corresponding to data having the second editing condition among the first type data and the second type data is selected, at least one of the pages is enabled to edit the data corresponding to the specific item. The editing area included in the area can be activated.

In the step of providing the results of the plasma simulation according to the present invention, the at least one item corresponding to data used to perform the plasma simulation may be provided on the page along with the plasma simulation results.

In addition, the at least one item corresponding to the data used to perform the plasma simulation may be displayed differently based on the preset security condition set for the data corresponding to each of the at least one item.

In addition, in the step of providing the results of the plasma simulation, the results of the plasma simulation performed using data corresponding to the at least one item are provided on the page, and the results of the plasma simulation include the at least one item. It may include a figure representing a response based on data corresponding to one item.

Furthermore, when a point of the figure is selected from the electronic device, information about specific data corresponding to a response related to the point among data corresponding to the at least one item is provided, and information about the specific data may vary depending on the preset security conditions set for the specific data.

Meanwhile, the simulation system according to the present invention includes a storage unit, a communication unit, and a control unit, wherein the communication unit is connected to at least one of an electronic device related to plasma simulation or an external server, and an electronic device on which the plasma simulation program runs. and a control unit that provides a page of the plasma simulation program on the page, wherein the control unit displays a reaction list consisting of items corresponding to first type data and second type data used in the plasma simulation, respectively, on the page. is provided, the plasma simulation is performed using data corresponding to at least one of the items included in the reaction formula list, and the results of the plasma simulation are provided on the page.

Furthermore, the program according to the present invention includes providing a page of the plasma simulation program on a display of an electronic device in which the plasma simulation program is driven, and on the page, first type data used for plasma simulation and a first type of data to be used for plasma simulation. Providing a reaction list consisting of items corresponding to two types of data, and performing the plasma simulation using data corresponding to at least one of the items included in the reaction scheme list; On the page, instructions for performing steps of providing results of the plasma simulation are included.

As discussed above, the present invention can prevent errors in user input through a plasma simulator that provides limited editing. Additionally, the accuracy of plasma simulation can be improved by separately managing data that can be edited by the user and data that cannot be edited.

In addition, since the present invention encrypts data according to the security conditions for data used in plasma simulation, it can have the effect of maintaining security for key data that affects plasma simulation results.

Additionally, the present invention provides data used in plasma simulation calculations together with the plasma simulation results, allowing users to analyze the plasma simulation results more quickly and accurately.

1 is a block diagram to illustrate a plasma simulation system that provides limited editing.

FIG. 2 is a flowchart of a plasma simulation method providing limited editing performed in the plasma simulation system of FIG. 1.

Figure 3 is a conceptual diagram for explaining data used in plasma simulation provided in the present invention.

Figure 4 is a conceptual diagram for explaining the pages of the plasma simulation program provided in the present invention.

Figures 5 and 6 are conceptual diagrams for explaining a method of providing items corresponding to the first type of data provided in the present invention.

Figures 7, 8, and 9 are conceptual diagrams for explaining a method of providing items corresponding to second type data.

FIGS. 10A and 10B are conceptual diagrams illustrating a method of providing plasma simulation results provided by the present invention.

Hereinafter, embodiments disclosed in the present specification will be described in detail with reference to the accompanying drawings. However, identical or similar components will be assigned the same reference numbers regardless of drawing symbols, and duplicate descriptions thereof will be omitted. The suffixes “module” and “part” for components used in the following description are given or used interchangeably only for the ease of preparing the specification, and do not have distinct meanings or roles in themselves. Additionally, in describing the embodiments disclosed in this specification, if it is determined that detailed descriptions of related known technologies may obscure the gist of the embodiments disclosed in this specification, the detailed descriptions will be omitted. In addition, the attached drawings are only for easy understanding of the embodiments disclosed in this specification, and the technical idea disclosed in this specification is not limited by the attached drawings, and all changes included in the spirit and technical scope of the present invention are not limited. , should be understood to include equivalents or substitutes.

Terms containing ordinal numbers, such as first, second, etc., may be used to describe various components, but the components are not limited by the terms. The above terms are used only for the purpose of distinguishing one component from another.

When a component is said to be "connected" or "connected" to another component, it is understood that it may be directly connected to or connected to the other component, but that other components may exist in between. It should be. On the other hand, when it is mentioned that a component is “directly connected” or “directly connected” to another component, it should be understood that there are no other components in between.

Singular expressions include plural expressions unless the context clearly dictates otherwise.

In this application, terms such as “comprise” or “have” are intended to designate the presence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, but are not intended to indicate the presence of one or more other features. It should be understood that this does not exclude in advance the possibility of the existence or addition of elements, numbers, steps, operations, components, parts, or combinations thereof.

The present invention relates to a plasma simulation method and system that provides limited editing, whereby data required for simulation can be selectively edited by determining whether to display data items depending on the type of data utilized in plasma simulation. The purpose is to provide a plasma simulation method and system.

Here, plasma is a form of matter known as the fourth state of matter, and can refer to a state that is heated by a strong electric field or heat source and divided into particles such as electrons, neutral particles, and ions beyond the gaseous state. In addition, in the above plasma, the degree of charge separation is quite high, but the overall number of negative and positive charges is the same, so it can be neutral. In addition, the plasma is used in the manufacturing process of semiconductor devices, which are core components of advanced digital devices such as smartphones, for example, in etching and deposition technologies, and may refer to low-temperature plasma with a plasma current of less than several amperes.

The physical behavior or chemical phenomena of the plasma can be analyzed through simulation. Here, simulation may mean a simulation that simply performs an experiment that is difficult to actually execute, and in particular, it may be a computer simulation that is numerically analyzed using a computer and a mathematical model. The mathematical model may be, for example, a fluid model that interprets plasma as a flowing fluid, a particle model that treats plasma as particles, etc.

The plasma simulation of the present invention is to virtually measure, for example, the temperature of species occurring inside the plasma equipment through calculation. The internal situation of the plasma equipment or the progress of the plasma process can be determined by looking at the results of the calculation. It can be a concept that includes interpreting, etc. Furthermore, software or programs that can perform such simulations can be defined as simulators. Through the simulator, the present invention can perform virtual experiments on plasma processes or equipment and provide the results to users as various visual data.

Here, “simulator” can be understood as a term included as part of the control process provided by the plasma simulation system 100 according to the present invention. The plasma simulation system may include not only providing calculation results to the user using a simulator, but also controlling plasma equipment using the calculation results of the simulator, or providing various information necessary for controlling the plasma equipment.

Hereinafter, the present invention will be described in detail with the accompanying drawings. 1 is a block diagram illustrating a plasma simulation system providing limited editing according to the present invention.

As shown in FIG. 1, the plasma simulation system 100 according to the present invention includes at least one of a communication unit 110, a storage unit 120, and a control unit 130. At this time, the plasma simulation system 100 according to the present invention is not limited to the components described above, and may further include components that perform the same or similar roles as the functions described in the present specification.

Meanwhile, the communication unit 110 is configured to communicate with at least one electronic device 200 or an external server 140, and can support various communication methods depending on the communication standard of the communication target.

For example, the Ministry of Communications supports WLAN (Wireless LAN), Wi-Fi (WirelessFidelity), Wi-Fi (Wireless Fidelity) Direct, DLNA (Digital Living Network Alliance), WiBro (Wireless Broadband), and WiMAX (World Interoperability for Microwave Access). , HSDPA (High Speed Downlink Packet Access), HSUPA (High Speed Uplink Packet Access), LTE (Long Term Evolution), LTE-A (Long Term Evolution Advanced), 5G (5th Generation Mobile Telecommunication), Bluetooth™, At least one of RFID (Radio Frequency Identification), Infrared Data Association (IrDA), UWB (Ultra-Wideband), ZigBee, NFC (Near Field Communication), Wi-Fi Direct, and Wireless USB (Wireless Universal Serial Bus) technologies. Can be used to communicate with the electronic device 200 or the external server 140.

Next, the storage unit 120 can be configured to store various information related to the present invention. The storage unit 120 may be configured to store first type data and second type data used in plasma simulation. The first type data and the second type data used in plasma simulation may include at least one of initial values of plasma simulation, parameters, calculation conditions, gas species, chemical reaction formula, and chemical equation.

In the present invention, the storage unit 120 may be provided in the plasma simulation system 100 itself. Alternatively, at least a portion of the storage unit 120 may refer to an external server 140, for example, at least one of a cloud server (or cloud storage) and a database (DB).

In other words, it can be understood that the storage unit 120 is sufficient as a space for storing information necessary for plasma simulation according to the present invention, and there are no restrictions on physical space. Accordingly, hereinafter, the storage unit 120, the cloud server, and the database will not be separately distinguished, and all will be referred to as the storage unit 120.

In the storage unit 120, according to the present invention, “security conditions” that distinguish between first type data and second type data used in plasma simulation may be stored by matching specific data.

Here, “security conditions” are conditions related to encryption of specific data and limitation of exposure of data contents, for example, encrypting first type data so that the contents of first type data are not exposed, or encrypting second type data It can be understood as at least one condition that limits encryption of the second type data so that the contents of are exposed.

Additionally, in the storage unit 120, according to the present invention, “editing conditions” may be matched to and stored in specific data depending on whether specific data used in plasma simulation can be edited.

At this time, the “editing conditions” may be matched to and stored in specific data based on the security conditions matched to the specific data. For example, based on the security conditions matched to and stored in specific data, at least one of a first editing condition that restricts editing of specific data and a second editing condition that allows editing of specific data may be matched to and stored in the specific data. .

Security conditions may be matched to specific data and stored based on information input from a system administrator (not shown) according to the present invention.

A system administrator can match security conditions to specific data based on the content of the specific data.

As an example, a system administrator may match security conditions to specific data to keep the specific data private from all user accounts using the plasma simulation program.

For example, as shown in FIG. 3, “security conditions” and “editing conditions” may be matched and stored in the storage unit 120 for each data used in plasma simulation.

Meanwhile, the storage unit 120 may store usage rights information associated with user account information subscribed to the plasma simulation program according to the present invention. Specifically, usage rights information may include user account, type of usage rights held, type of usage rights used, security level, etc. However, the information used in connection with the user account information is not limited to the content described above in this specification.

In the present invention, based on the security level matched to the user account, it is possible to determine restrictions on exposure of the contents of specific data and restrictions on editing of specific data to users using a plasma simulation program.

Next, the control unit 130 may control the overall operation of the plasma simulation system 100 related to the present invention. The control unit 130 can provide or process signals, data, information, functions, etc. that are input or output through the components discussed above.

According to the present invention, the control unit 130 can transmit and receive information necessary for plasma simulation according to the present invention stored in the storage unit 120 or the external server 140 through the communication unit 110.

Furthermore, the control unit 130 checks the user account logged into the plasma simulation program, determines whether there is permission to access the contents of specific data according to the security level matched to the account, and provides the contents of the specific data. You can. As another example, the control unit 130 checks the license for the plasma simulation program, determines whether there is permission to access the contents of specific data according to the security level matched to the license, and determines whether the contents of the specific data are can be provided. In this case, the license may be stored in the storage unit 120 or installed on a separate server.

Additionally, when specific data is selected from the electronic device 200 on which the plasma simulation program is running, the control unit 130 may provide a limited editing function according to editing conditions set for the specific data.

Meanwhile, as shown in FIG. 1, the type of electronic device 200 is not limited and includes mobile phones, smart phones, laptop computers, laptop computers, and slate PCs ( It can be a slate PC, tablet PC, ultrabook, desktop computer, digital broadcasting terminal, personal digital assistants (PDA), portable multimedia player (PMP), etc. In the present invention, the electronic device 200 may be used interchangeably with a user terminal, user terminal, etc.

In this case, the plasma simulation system 100 according to the present invention may be provided as a web browser-based service or may be implemented as an application or software. At this time, an application or software according to the plasma simulation system 100 may be installed in the electronic device 200.

For example, the communication unit 110, storage unit 120, and control unit 130 of the plasma simulation system 100 according to the present invention can perform plasma simulation by utilizing the hardware configuration of the electronic device 200. there is.

At this time, the communication unit 110 uses the configuration of the communication module (e.g., mobile communication module, short-range communication module, wireless Internet module, location information module, broadcast reception module, etc.) provided in the communication unit of the electronic device 200. , can communicate with at least one external server 140.

At this time, the communication unit 110 may receive data used for at least one plasma simulation stored in the external server 140.

Furthermore, the storage unit 120 may be configured to store various information related to the present invention using a memory provided in (or inserted into) the electronic device 200 or an external server 140.

Meanwhile, the control unit 130 may utilize at least one of the CPU and the cloud server provided in the electronic device 200 to perform control of each component and overall control related to the present invention.

Furthermore, the control unit 130 may have control authority over at least one of the components of the electronic device 200 in order to perform the present invention. Additionally, the control unit 130 can control the display unit of the electronic device 200 to provide a page of a plasma simulation program with limited exposure and editing of data provided by the present invention on the display unit. At this time, the control unit 130 may indirectly control the display unit by directly controlling the display unit or transmitting a control command to the control unit of the electronic device 200 that controls the display unit.

Below, we will look in more detail at the method of providing plasma simulation that provides limited editing along with the attached drawings.

FIG. 2 is a flowchart of a plasma simulation method providing limited editing performed in the plasma simulation system of FIG. 1, and FIG. 4 is a conceptual diagram illustrating a page of a plasma simulation program.

As shown in FIG. 2, according to the plasma simulation method according to the present invention, the control unit 130 can provide a page of the plasma simulation program on the display of the electronic device 200 on which the plasma simulation program is driven. (S210).

In this example, the page may be a user interface, and mainly exemplifies a graphical user interface (GUI).

For example, as shown in FIG. 4, for a plasma simulation program, the control unit 130 displays a plasma signal including data used for plasma simulation on the display of the electronic device 200 on which the plasma simulation program is run. You can control the output of the page (or “screen”, 400) of the simulation program.

Additionally, the plasma simulation program page 400 provided by the present invention may include a plurality of areas containing items corresponding to data used in plasma simulation.

For example, as shown in FIG. 4, the plasma simulation program page 400 includes i) an area (e.g., Data, 410) containing a reaction list consisting of items corresponding to data used in plasma simulation. , ii) an area (e.g., Properties, 420) including an item corresponding to data used in plasma simulation and an editing area of data corresponding to the item.

Meanwhile, the pages of the plasma simulation program listed above are only examples, and the page according to the present invention may include various areas that include necessary information or perform functions related to plasma simulation.

Furthermore, data used in plasma simulation according to the present invention may include at least one of the initial value of plasma simulation, the chemical equation used for plasma simulation calculation, and the conditions of plasma simulation.

However, information related to the plasma process according to the present specification is not limited to the above-described content.

Next, the control unit 130 may provide a reaction list composed of items corresponding to the first type data and the second type data used in plasma simulation, respectively, on the page of the plasma simulation program (S220).

The control unit 130 may distinguish the first type data and the second type data based on preset security conditions set for each of the first type data and the second type data.

Furthermore, the control unit 130 determines the display method of the first item corresponding to the first type data and the second type data based on the preset security conditions set for each of the first type data and the second type data. The display method of the corresponding second item can be determined.

For example, as shown in FIG. 4, the control unit 130 displays first type data used in plasma simulation in one area (e.g., Data, 410) of the page 400 of the plasma simulation program. A reactive list 411 consisting of at least one of the corresponding first item (e.g., “DB” 412) and the second item (e.g., “C2F4+E”413) corresponding to the second type data is output. You can control it.

More specifically, the control unit 130 encrypts the first type data based on preset security conditions so that the contents of the first type data are not exposed on the reactive list 411, and the first item 412 contains To prevent the contents of the first type data from being exposed, guide information (eg, “Confidential DB”) indicating that the first type data is encrypted may be included.

In addition, the control unit 130 limits the encryption of the second type data so that the contents of the second type data are exposed on the reactive list 411, and the second item 413 includes the contents of the second type data. can do.

Furthermore, the control unit 130 may control the response list composed of items corresponding to the first type data and the second type data to be output differently depending on the user account logged in to the plasma simulation program. In this case, the logged in user account may be replaced with a license associated with the plasma simulation program. In particular, when using the plasma simulation program offline, the control unit 130 controls the reaction list composed of items corresponding to the first type data and the second type data to be output differently according to the license. You can. However, for convenience of explanation, the present invention will be described below based on user accounts.

For example, like the data used in the plasma simulation shown in FIG. 3, data 310 matched to security condition 1, data 320 matched to security condition 2, and data 330 matched to security condition 3. If there is, the following example is possible.

When the control unit 130 determines that the user account logged in to the plasma simulation program has access to the contents of the

data

320 and 330 matched to security condition 2 and security condition 3, respectively, data matched to security condition 1 ( 310) can be classified as first type data, and

data

320 and 330 matching security condition 2 and security condition 3, respectively, can be classified as second type data.

As such, the reaction list 411 composed of items respectively corresponding to the first type data and the second type data according to the present invention may be provided differently depending on the account logged in to the plasma simulation program.

Meanwhile, when the first item corresponding to the first type of data is selected from the electronic device 200 on which the plasma simulation program is driven, the control unit 130 selects the first item on the page 400 of the plasma simulation program. Information related to the contents of the first type data corresponding to may be provided.

For example, as shown in FIG. 5, which is a conceptual diagram for explaining a method of providing items corresponding to first type data, the control unit 130 receives a reaction list ( When the first item (e.g., 510) corresponding to the first type data is selected among the items included in 411), information related to the contents of the first type data is displayed on the page 400 of the plasma simulation program. It can be controlled to output (520).

Here, the information 520 related to the contents of the first type data includes guide information (e.g., “private data”) indicating that the first type data has been encrypted so that the contents of the first type data are not exposed, and the first Information about the content of the type data (for example, “reaction formula used in the plasma etching process”) may be included.

Furthermore, information related to the content of the first type data may vary depending on the account logged in to the plasma simulation program.

More specifically, when the first item corresponding to the first type of data is selected from the electronic device 200 in which the plasma simulation program is driven, the control unit 130

Check the user account logged in to the plasma simulation program and determine whether the user account has permission to access the contents of the first type data,

Based on the determination result, at least one of the contents of the first type data and information related to the contents of the first type data may be provided on the page 400 of the plasma simulation program.

As an example, the control unit 130 may determine that the user account logged in to the plasma simulation program has access to the contents of the first type data, based on the security level stored by matching the user account logged in to the plasma simulation program. You can.

At this time, the control unit 130 may provide guide information for releasing the security of the first type data on the page 400 of the plasma simulation program.

For example, as shown in FIG. 6, from the electronic device 200 in which the plasma simulation program is run, the first item corresponding to the first type data among the items included in the reaction list 411 (e.g. , 610) is selected,

The control unit 130, on the page 400 of the plasma simulation program, provides a first message containing guide information (for example, “when security is released, a response can be provided”) that can release the security of the first type data. It can be controlled to output information 630 related to the contents of the type data.

In addition, the information 630 related to the contents of the first type data includes guide information (e.g., “private data”) indicating that the first type data has been encrypted so that the contents of the first type data are not exposed, and the first Information about the content of the type data (for example, “reaction formula used in the plasma etching process”) may be included.

However, the

information

520 and 630 related to the contents of the first type data according to the present specification are not limited to the above-described contents.

Meanwhile, when the control unit 130 determines that the account logged in to the plasma simulation program has permission to access the first type data, a function icon (for example, 620) for releasing the security of the first type data is displayed in the plasma. It can be controlled to be output on the page 400 of the simulation program.

For example, as shown in FIG. 6, the control unit 130 creates a security release function icon 620 corresponding to the first type data and a first type corresponding to the first type data on the reactive list 411. It can be output together with item 1 (610).

Furthermore, when the security release function icon 620 corresponding to the first type of data is selected from the electronic device 200 on which the plasma simulation program is running, the control unit 130, in the account logged in to the plasma simulation program, selects the selected A security release procedure for first type data may be performed.

As an example, in the security release procedure, the control unit 130 receives the password of the account included in the plasma simulation program from the electronic device 200 on which the plasma simulation program is run, and the received password is included in the plasma simulation program. This may include determining whether it matches the account's password.

Furthermore, the control unit 130 may provide the contents of the first type data on the page 400 of the plasma simulation program according to the result of the security release procedure.

Meanwhile, while the security release procedure for first type data listed above is only an example, the security release procedure for first type data according to the present invention includes various methods for confirming the contents of data used in a plasma simulation program. can do.

According to the present invention, each of the first type data and the second type data stored in the storage unit 120 is subject to a first edit condition in which editing is limited or editing is limited, depending on whether the first type data and the second type data are editable. It is made to have a possible second editing condition.

When an item corresponding to data having a first editing condition among the first type data and the second type data is selected from the electronic device 200 in which the plasma simulation program is driven, the control unit 130 displays a page of the plasma simulation program. At 400, guide information indicating that data corresponding to the selected item cannot be edited may be provided.

For example, as shown in FIG. 7, the control unit 130 receives data having the first editing condition among the items constituting the reaction list 411 from the electronic device 200 in which the plasma simulation program is driven. When a corresponding specific item (e.g., 710) is selected, guide information that the specific item cannot be modified (e.g., “no modification possible, 720) is output on page 400 of the plasma simulation program. You can control it.

On the other hand, when a specific item corresponding to data having a second editing condition among the first type data and the second type data is selected from the electronic device 200 in which the plasma simulation program is driven, the control unit 130 selects the specific item. To enable editing of data corresponding to , the editing area included in at least one area of the page 400 of the plasma simulation program may be controlled to be activated.

For example, as shown in FIG. 8, from the electronic device 200 in which the plasma simulation program is driven, the second edit condition among the items constituting the reaction list 411 is selected from a specific item (e.g. For example, when 810 is selected, the control unit 130 displays an editing area activation icon 820 associated with the selected specific item 810 and guide information indicating that data corresponding to the specific item can be edited (e.g., “ Modifiable”, 830) can be controlled to be output on the page 400 of the plasma simulation program.

When the edit area activation icon 820 associated with a specific item 810 is selected from the electronic device 200 in which the plasma simulation program is run, the control unit 130 performs plasma simulation on the edit area of the data corresponding to the specific item. It can be provided on page 400 of the program.

For example, as shown in FIG. 9, the control unit 130 can control the edit area 900 of data corresponding to a specific item to be output in the form of a pop-up on the page 400 of the plasma simulation program.

In the data editing area 900 corresponding to a specific item, the first to

second areas

910 and 920 may be arranged side by side along one direction.

For example, the first area 910 may be placed on top of the second area 920. The configuration of the data editing area 900 corresponding to this specific item is only an example and can be changed in various ways.

First, as shown in FIG. 9, the first area 910 may include the contents of data corresponding to a specific item so that the contents of the data corresponding to the specific item can be modified.

Next, as shown in FIG. 9 , the first area 920 may include

function icons

921 and 922 provided in the data editing area 900 corresponding to a specific item.

When at least one of the

function icons

921 and 922 included in the second area 920 (e.g., “OK”, 922) is selected, the control unit 130 corresponds to a specific item according to the present invention. The contents of the data included in the first area of the edit area 900 may be stored in the storage unit 120 as the contents of data corresponding to a specific item.

Meanwhile, when at least one of the

function icons

921 and 922 included in the second area 920 (for example, “Cancel”, 921) is selected, the control unit 130 selects the data corresponding to the specific item. You can end the editing process.

However, the method of providing the editing area 900 of data corresponding to a specific item according to the present invention is not limited to the details described herein, and is not limited to the divided area of the page 400 of the plasma simulation program, a new page, It can be provided in various forms, including configurations.

In addition, according to the present invention, the items of the first type data are encrypted so that the contents of the first type data are not exposed, so even if the editing condition matched to the first type data is the second editing condition, the control unit 130 Editing of type 1 data can be restricted.

Furthermore, the control unit 130 may perform plasma simulation using data corresponding to at least one item among the items included in the reaction list 411 (S230).

Next, the control unit 130 may provide the results of the plasma simulation on the page 400 (S240).

For example, as shown in FIGS. 10A and 10B, which are conceptual diagrams for explaining a method of providing plasma simulation results, the control unit 130 controls one area (e.g., Result, 1000) can be controlled to output the results of the plasma simulation.

One area (e.g., Result, 1000) of the page 400 of the plasma simulation program is i) an area containing at least one item corresponding to the data used to perform the plasma simulation (e.g., Input Data Table , 1010), ii) an area containing the results of plasma simulation (e.g., Output, 1020).

More specifically, the control unit 130 displays the data corresponding to the data used to perform the plasma simulation along with the plasma simulation results in an area (e.g., Input Data Table, 1010) of the page 400 of the plasma simulation program. It can be controlled to output at least one item.

Furthermore, the control unit 130 may cause at least one item corresponding to data used to perform plasma simulation to be displayed differently based on a preset security condition set for the data corresponding to each of the at least one item.

For example, as shown in FIG. 10A, the control unit 130 selects an item 1011 containing the contents of the data used to perform the plasma simulation, based on preset security conditions set for the data used to perform the plasma simulation. ) and at least one item 1012 including guide information (e.g., Confidential DB) indicating that the data is encrypted so that the contents of the data used to perform the plasma simulation are not exposed, the page of the plasma simulation program ( 400) can be controlled to be output on one area (e.g., Input Data Table, 1010).

Additionally, the control unit 130 controls one area (e.g., Input Data Table, 1010) of the page 400 of the plasma simulation program on the area (e.g., Output, 1020) containing the results of the plasma simulation. It can be controlled to output the results of a plasma simulation performed using data corresponding to at least one item included in .

Furthermore, the results of the plasma simulation may include a figure representing a reaction based on data corresponding to at least one item.

For example, as shown in FIGS. 10A and 10B, the control unit 130 stores data corresponding to at least one item on an area containing the results of plasma simulation (e.g., Output 1020). Based on this, a figure representing the response (for example, a two-dimensional graph, 1021) can be controlled to be output.

Furthermore, when a point of the figure 1021 representing a reaction is selected based on data corresponding to at least one item from the electronic device 200 in which the plasma simulation program is driven, the control unit 130 selects at least one item. Information about specific data corresponding to a reaction related to a point among the data corresponding to can be provided.

Here, information about specific data may vary depending on preset security conditions set for the specific data.

For example, as shown in FIG. 10A, the control unit 130 configures specific data corresponding to a reaction related to a point of the figure 1021 as a second type based on preset security conditions set for the specific data. When classified as data, information 1022 about the specific data including the contents of the specific data can be controlled to be output on the area containing the results of the plasma simulation (eg, Output 1020).

In addition, as shown in FIG. 10b, the control unit 130 divides specific data corresponding to a reaction related to a point of the figure 1021 into first type data based on preset security conditions set for the specific data. If so, information 1023 about specific data including guide information (e.g., Confidential DB) indicating that the data has been encrypted so that the contents are not exposed, is stored in the area containing the results of the plasma simulation (e.g., Output , 1020).

Meanwhile, one area (e.g., Result, 1000) of the page 400 of the plasma simulation program listed above is only an example, and one area (e.g., Result, 1000) of the page 400 is a plasma simulation program. It may include various areas that perform functions or contain necessary information related to the results of.

Meanwhile, computer-readable media includes all types of recording devices that store data that can be read by a computer system. Examples of computer-readable media include HDD (Hard Disk Drive), SSD (Solid State Disk), SDD (Silicon Disk Drive), ROM, RAM, CD-ROM, magnetic tape, floppy disk, optical data storage device, etc. There is.

Furthermore, the computer-readable medium may be a server or cloud storage that includes storage and can be accessed by electronic devices through communication. In this case, the computer can download the program according to the present invention from a server or cloud storage through wired or wireless communication.

Furthermore, in the present invention, the computer described above is an electronic device equipped with a processor, that is, a CPU (Central Processing Unit), and there is no particular limitation on its type.

Meanwhile, the embodiments of the present invention disclosed in the specification and drawings are merely provided as specific examples to easily explain the technical content of the present invention and to facilitate understanding of the present invention, and are not intended to limit the scope of the present invention. Therefore, the scope of the present invention should be construed as including all changes or modified forms derived based on the technical idea of the present invention in addition to the embodiments disclosed herein.

Claims

providing a page of the plasma simulation program on a display of an electronic device running the plasma simulation program;

providing, on the page, a reactive list composed of items corresponding to first type data and second type data used in plasma simulation;

performing the plasma simulation using data corresponding to at least one of the items included in the reaction formula list; and

providing results of the plasma simulation on the page,

The distinction between the first type data and the second type data is made based on preset security conditions set for each of the first type data and the second type data,

Among the items, the display method of the first item corresponding to the first type data and the display method of the second item corresponding to the second type data are the methods set for each of the first type data and the second type data. A method for providing plasma simulation, characterized in that it is determined based on preset security conditions.
According to claim 1,

The first type data is encrypted based on the preset security conditions so that the contents of the first type data are not exposed on the reactive list,

The first item includes guide information indicating that the first type data is encrypted so that the first type data content is not exposed.
According to clause 2,

The second type data is data whose encryption is restricted so that the contents of the second type data are exposed on the reactive list,

A plasma simulation providing method, characterized in that the second item includes contents of the second type data.
According to clause 2,

When the first item corresponding to the first type of data is selected from the electronic device,

A plasma simulation providing method, characterized in that providing information related to the contents of the first type data corresponding to the first item on the page.
According to clause 2,

When the first item corresponding to the first type of data is selected from the electronic device,

Check the user account or saved license logged into the plasma simulation program,

Determine whether the user account or license has permission to access the contents of the first type of data,

Based on the determination result, at least one of the contents of the first type data and information related to the contents of the first type data is provided on the page.
According to claim 1,

Each of the first type data and the second type data is configured to have a first edit condition with limited editing or a second edit condition with possible editing, depending on whether the first type data and the second type data are editable. under,

When a specific item corresponding to data having the second editing condition is selected among the first type data and the second type data,

A plasma simulation providing method, characterized in that an editing area included in at least one area of the page is activated to enable editing of data corresponding to the specific item.
According to claim 1,

In the step of providing the results of the plasma simulation,

On the page, the at least one item corresponding to data used to perform the plasma simulation is provided along with the plasma simulation result,

Plasma simulation, wherein the at least one item corresponding to the data used to perform the plasma simulation is displayed differently based on the preset security condition set for the data corresponding to each of the at least one item. method.
According to claim 1,

In the step of providing the results of the plasma simulation,

On the page, results of the plasma simulation performed using data corresponding to the at least one item are provided,

The result of the plasma simulation includes a figure representing a reaction based on data corresponding to the at least one item,

When a point of the figure is selected from the electronic device, information on specific data corresponding to a response related to the point among data corresponding to the at least one item is provided,

A plasma simulation method, characterized in that the information about the specific data varies depending on the preset security conditions set for the specific data.
storage unit;

A communication unit connected to at least one of an external server or an electronic device running a plasma simulation program;

A control unit that provides a page of the plasma simulation program on an electronic device running the plasma simulation program,

The control unit,

On the page, a reaction list consisting of items corresponding to first type data and second type data used in the plasma simulation is provided,

Performing the plasma simulation using data corresponding to at least one of the items included in the reaction formula list,

On the page, the results of the plasma simulation are provided,

The distinction between the first type data and the second type data is made based on preset security conditions set for each of the first type data and the second type data,

Among the items, the display method of the first item corresponding to the first type data and the display method of the second item corresponding to the second type data are the methods set for each of the first type data and the second type data. A plasma simulation system characterized in that it is determined based on preset security conditions.
A program that is executed by one or more processes in an electronic device and stored on a computer-readable recording medium,

The above program is,

providing a page of the plasma simulation program on a display of an electronic device running the plasma simulation program;

providing, on the page, a reactive list composed of items corresponding to first type data and second type data used in plasma simulation;

performing the plasma simulation using data corresponding to at least one of the items included in the reaction formula list; and

On the page, configured to include instructions for performing steps of providing results of the plasma simulation,

The distinction between the first type data and the second type data is made based on preset security conditions set for each of the first type data and the second type data,

Among the items, the display method of the first item corresponding to the first type data and the display method of the second item corresponding to the second type data are the methods set for each of the first type data and the second type data. A program stored in a computer-readable recording medium that is determined based on preset security conditions.