WO2023206939A1 - Electronic structure and manufacturing method therefor - Google Patents

Electronic structure and manufacturing method therefor Download PDF

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WO2023206939A1
WO2023206939A1 PCT/CN2022/120138 CN2022120138W WO2023206939A1 WO 2023206939 A1 WO2023206939 A1 WO 2023206939A1 CN 2022120138 W CN2022120138 W CN 2022120138W WO 2023206939 A1 WO2023206939 A1 WO 2023206939A1
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conductive layer
conductive
low
electronic structure
resin
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PCT/CN2022/120138
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French (fr)
Chinese (zh)
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吕文峰
鲁强
王莉
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北京梦之墨科技有限公司
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Publication of WO2023206939A1 publication Critical patent/WO2023206939A1/en

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/20Conductive material dispersed in non-conductive organic material
    • H01B1/22Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/0026Apparatus for manufacturing conducting or semi-conducting layers, e.g. deposition of metal
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • H05K1/092Dispersed materials, e.g. conductive pastes or inks
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/11Printed elements for providing electric connections to or between printed circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/4007Surface contacts, e.g. bumps

Definitions

  • the present application belongs to the field of electronic manufacturing technology, and in particular relates to an electronic structure and a manufacturing method thereof.
  • one purpose of this application is to propose a method of manufacturing an electronic structure to solve the problem in the prior art that low-temperature conductive silver paste cannot meet the user requirements of high adhesion and solderability at the same time.
  • the conductive particles are selected from one or more of gold, silver, copper, aluminum, zinc, nickel, and silver-coated copper.
  • the embodiment of the present application discloses a method of manufacturing an electronic structure.
  • Figure 1 is a flow chart of the method of producing an electronic structure in the embodiment of the present application
  • Figure 2 is a diagram of the implementation of the present application.
  • a schematic diagram of the manufacturing process of the electronic structure in the example
  • Figure 3 is a structure example 1 of the electronic structure in the embodiment of the present application
  • the manufacturing method of the electronic structure includes:
  • Step S14 Perform thermosetting treatment on the first conductive layer 20 and the second conductive layer 30 at the same time to obtain an electronic structure 40 in which the first conductive layer and the second conductive layer are cross-linked and integrated;
  • the size of the conductive particles in this embodiment may range from 2 ⁇ m to 10 ⁇ m.
  • the resin carrier in this embodiment can be one or more of polyester resin, polyurethane resin, epoxy resin, acrylic resin, phenolic resin, alkyd resin, silicone resin, chlorine-acetyl resin, and polyimide resin. .
  • the adhesion of the low-temperature conductive paste to the substrate mainly depends on the type of resin.
  • the low-temperature conductive paste can use epoxy resin as the resin carrier. , which can greatly improve the adhesion of low-temperature conductive paste on the glass substrate.
  • the mass fraction of the conductive particles of the second low-temperature conductive slurry in the embodiment of the present application needs to be no less than 75%.
  • the mass fraction of the resin carrier In order to ensure that the second low-temperature conductive slurry has In order to ensure the printability of the second conductive layer, the mass fraction of the resin carrier must be no less than 7%, thus ensuring the printability and solderability of the second conductive layer.
  • the conductive particles in this embodiment can be metal conductive particles, which are not limited to gold, silver, copper, aluminum, zinc, nickel, silver-coated copper, gallium, indium, tin, bismuth, gallium-based alloys, indium-based alloys, and bismuth-based alloys. , tin-based alloy and other metal conductive particles.
  • the first low-temperature conductive paste in the embodiment of the present application uses an epoxy resin system
  • the second low-temperature conductive paste uses a polyester resin system, so that the electronic structure formed by the combination of the two has good performance on the glass substrate. Excellent adhesion, temperature resistance, electrical conductivity and tin application properties.
  • soldering the component to the electronic structure specifically includes: printing solder paste at the position of the pad electrode, and using reflow soldering to realize the connection between the component and the pad electrode. welding.
  • Step S21 provide a glass substrate
  • transparent substrates can also be used as the glass substrate in this embodiment to meet the production requirements of film screens and soft film screens.

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Conductive Materials (AREA)

Abstract

The present application relates to the technical field of electronic manufacturing. Disclosed are an electronic structure and a manufacturing method therefor. The manufacturing method for an electronic structure comprises: providing a substrate; using a first low-temperature conductive slurry to form a first conductive layer on the substrate, and performing surface drying treatment on the first conductive layer; using a second low-temperature conductive slurry to form on the first conductive layer a second conductive layer which at least covers a target area, and thus obtaining a pad electrode; and performing thermosetting treatment on the first conductive layer and the second conductive layer at the same time, so as to obtain an electronic structure in which the first conductive layer and the second conductive layer are cross-linked and fused into a whole. In the present application, a first conductive layer in direct contact with a substrate is formed by using a first low-temperature conductive slurry having low-conductivity particles and high resin, and a pad electrode is formed on the first conductive layer by using a second low-temperature conductive slurry having high-conductivity particles and low resin. In addition, the first conductive layer and the second conductive layer are subjected to thermosetting at the same time, such that the high-adhesion and weldability effects of an electronic structure are achieved.

Description

一种电子结构及其制作方法An electronic structure and its production method
本申请要求于2022年04月29日提交中国专利局,申请号为2022104740565,申请名称为“一种电子结构及其制作方法”的中国专利申请的优先权,其全部内容通过引用结合在本申请中。This application claims priority to the Chinese patent application submitted to the China Patent Office on April 29, 2022, with the application number 2022104740565 and the application title "An electronic structure and its production method", the entire content of which is incorporated into this application by reference. middle.
技术领域Technical field
本申请属于电子制造技术领域,尤其涉及一种电子结构及其制作方法。The present application belongs to the field of electronic manufacturing technology, and in particular relates to an electronic structure and a manufacturing method thereof.
背景技术Background technique
导电浆料作为新兴的电子电路增材制造原料,常用于通过印刷等方式形成用户所需的电子结构,相比于传统铜箔、铝箔蚀刻技术而言,印刷导电浆料工艺具有低成本、无污染、快速、大批量的制造优势。As an emerging additive manufacturing raw material for electronic circuits, conductive paste is often used to form the electronic structures required by users through printing and other methods. Compared with traditional copper foil and aluminum foil etching technologies, the printed conductive paste process is low-cost and cost-effective. Pollution-free, fast, high-volume manufacturing advantages.
以烧结固化温度区分,导电浆料一般分为高温导电浆料和低温导电浆料,高温导电浆料中主要是利用其中的玻璃粉作为导电颗粒的粘合剂,烧结温度一般需要达到上千度,即使采用市面上昂贵的低熔点玻璃粉,其烧结温度也至少需要达到500℃以上,能耗高、设备及配套成本高且通用性差,无法满足耐温性较差的基材使用。According to the sintering and curing temperature, conductive pastes are generally divided into high-temperature conductive pastes and low-temperature conductive pastes. In high-temperature conductive pastes, the glass powder is mainly used as a binder for conductive particles. The sintering temperature generally needs to reach thousands of degrees. , even if expensive low-melting point glass powder on the market is used, its sintering temperature needs to be at least 500°C, which requires high energy consumption, high equipment and supporting costs, and poor versatility, which cannot meet the needs of substrates with poor temperature resistance.
低温导电浆料中主要是利用树脂作为导电颗粒的粘合剂,固化温度一般只需要在100℃~300℃之间,低能耗、设备及配套成本低、可满足绝大多数基材的使用。常规的低温导电浆料例如低温导电银浆,其主要是由银粉、树脂(又称粘合剂)、溶剂和助剂经过机械混合而形成的粘稠状共混物,在其成型固化的过程中,其溶剂和助剂会逐渐挥发,从而形成由银粉和树脂成膜物构成的导电迹线。Low-temperature conductive paste mainly uses resin as a binder for conductive particles. The curing temperature generally only needs to be between 100°C and 300°C. It has low energy consumption, low equipment and supporting costs, and can meet the use of most substrates. Conventional low-temperature conductive paste, such as low-temperature conductive silver paste, is mainly a viscous blend formed by mechanical mixing of silver powder, resin (also known as binder), solvent and additives. During the molding and solidification process, In the process, its solvents and additives will gradually evaporate, forming conductive traces composed of silver powder and resin film-forming materials.
目前,现有的低温导电银浆难以兼容高附着和可焊接的用户需求,尤其是在玻璃基材上成型时,附着力较差,易剥落。At present, the existing low-temperature conductive silver paste is difficult to meet the user requirements for high adhesion and weldability. Especially when molded on glass substrates, the adhesion is poor and it is easy to peel off.
申请内容Application content
有鉴于此,本申请的一个目的是提出一种电子结构的制作方法,以解决现有技术中低温导电银浆无法同时满足高附着和可焊接的用户需求的问题。In view of this, one purpose of this application is to propose a method of manufacturing an electronic structure to solve the problem in the prior art that low-temperature conductive silver paste cannot meet the user requirements of high adhesion and solderability at the same time.
在一些说明性实施例中,所述电子结构的制作方法,包括:提供一基材;提供一至少包含有树脂载体与导电颗粒的第一低温导电浆料,利用所述第一低温导电浆料在所述基材之上形成第一导电层,并对所述第一导电层进行表干处理;其中,所述第一导电层上至少具有一目标区域用以形成焊盘电极;提供一至少包含有树脂载体与导电 颗粒的第二低温导电浆料,利用所述第二低温导电浆料在所述第一导电层之上形成至少覆盖所述目标区域的第二导电层,获得所述焊盘电极;同时对所述第一导电层和所述第二导电层进行热固处理,得到由所述第一导电层与所述第二导电层交联融合一体的电子结构;其中,所述第一低温导电浆料中的树脂载体的质量分数高于所述第二低温导电浆料中的树脂载体的质量分数,所述第一低温导电浆料中的导电颗粒的质量分数低于所述第二低温导电浆料中的导电颗粒的质量分数。In some illustrative embodiments, the manufacturing method of the electronic structure includes: providing a substrate; providing a first low-temperature conductive slurry that at least contains a resin carrier and conductive particles, and using the first low-temperature conductive slurry Form a first conductive layer on the base material, and perform surface drying treatment on the first conductive layer; wherein, the first conductive layer has at least one target area for forming a pad electrode; and provide at least one A second low-temperature conductive slurry containing a resin carrier and conductive particles is used to form a second conductive layer on the first conductive layer that at least covers the target area to obtain the welding Disk electrode; perform thermosetting treatment on the first conductive layer and the second conductive layer at the same time to obtain an electronic structure in which the first conductive layer and the second conductive layer are cross-linked and fused together; wherein, the The mass fraction of the resin carrier in the first low-temperature conductive slurry is higher than the mass fraction of the resin carrier in the second low-temperature conductive slurry, and the mass fraction of the conductive particles in the first low-temperature conductive slurry is lower than the mass fraction of the resin carrier in the first low-temperature conductive slurry. The mass fraction of conductive particles in the second low-temperature conductive slurry.
在一些可选地实施例中,按质量分数计,所述第一低温导电浆料,包括:导电颗粒55%~65%、树脂载体13%~18%、助剂0%~0.5%,其余为溶剂。In some optional embodiments, in terms of mass fraction, the first low-temperature conductive slurry includes: 55% to 65% of conductive particles, 13% to 18% of resin carrier, 0% to 0.5% of additives, and the rest as solvent.
在一些可选地实施例中,按质量分数计,所述第二低温导电浆料,包括:导电颗粒75%~85%、树脂载体7%~10%、助剂0%~0.5%,其余为溶剂。In some optional embodiments, in terms of mass fraction, the second low-temperature conductive slurry includes: 75% to 85% of conductive particles, 7% to 10% of resin carrier, 0% to 0.5% of additives, and the rest as solvent.
在一些可选地实施例中,在所述得到由所述第一导电层与所述第二导电层交联融合一体的电子结构之后,还包括:提供一元件;将所述元件焊接在所述焊接电极上。In some optional embodiments, after obtaining the electronic structure cross-linked and integrated by the first conductive layer and the second conductive layer, the method further includes: providing a component; and soldering the component to the on the welding electrode.
在一些可选地实施例中,所述将所述元件焊接在所述电子结构之上,具体包括:在所述焊盘电极位置处印刷锡膏,并利用回流焊实现所述元件与所述焊盘电极之间的焊接。In some optional embodiments, soldering the component to the electronic structure specifically includes: printing solder paste at the position of the pad electrode, and using reflow soldering to realize the connection between the component and the electronic structure. Welding between pad electrodes.
在一些可选地实施例中,所述基材选用PET、PI、PTFE、PC、ABS、LCP、PU、TPU、FR4、纸材、木材、玻璃、石材、织物中的一种或多种复合基材。In some optional embodiments, the base material is selected from one or more composites of PET, PI, PTFE, PC, ABS, LCP, PU, TPU, FR4, paper, wood, glass, stone, and fabric. base material.
在一些可选地实施例中,所述导电颗粒选用金、银、铜、铝、锌、镍、银包铜中的一种或多种。In some optional embodiments, the conductive particles are selected from one or more of gold, silver, copper, aluminum, zinc, nickel, and silver-coated copper.
在一些可选地实施例中,所述树脂载体选用聚酯树脂、聚氨酯树脂、环氧树脂、丙烯酸树脂、酚醛树脂、醇酸树脂、有机硅树脂、氯醋树脂、聚酰亚胺树脂中的一种或多种。In some optional embodiments, the resin carrier is selected from polyester resin, polyurethane resin, epoxy resin, acrylic resin, phenolic resin, alkyd resin, silicone resin, chlorine-vinyl resin, and polyimide resin. one or more.
在一些可选地实施例中,所述第二导电层与所述第一导电层的图案一致,且完全覆盖所述第一导电层。In some optional embodiments, the second conductive layer is consistent with the pattern of the first conductive layer and completely covers the first conductive layer.
本申请的另一个目的在于提出一种电子结构,以解决现有技术中的技术问题。Another object of the present application is to propose an electronic structure to solve the technical problems in the prior art.
在一些说明性实施例中,所述电子结构利用上述任一项所述的电子结构的制作方法获得。In some illustrative embodiments, the electronic structure is obtained using any one of the methods for fabricating an electronic structure described above.
与现有技术相比,本申请具有如下优势:Compared with the existing technology, this application has the following advantages:
本申请实施例中利用低导电颗粒高树脂的第一低温导电浆料形成与基材直接接触的第一导电层,从而保证第一导电层在基材之上的附着力,利用高导电颗粒低树脂的第二低温导电浆料在第一导电层之上形成焊盘电极,实现焊盘电极的上锡性能,从而 满足可焊接需求;另外,第一导电层表干后形成第二导电层,对两者同时热固化,使两者由于交联反应构成一体结构,保证第二导电层在第一导电层上的结合强度,并一体实现高附着和可焊接的效果。In the embodiments of the present application, a first low-temperature conductive slurry with low conductive particles and high resin is used to form a first conductive layer that is in direct contact with the base material, thereby ensuring the adhesion of the first conductive layer on the base material. The second low-temperature conductive slurry of the resin forms a pad electrode on the first conductive layer to achieve the tinning performance of the pad electrode, thereby meeting the solderability requirements; in addition, the second conductive layer is formed after the first conductive layer dries. The two are thermally cured at the same time, so that the two form an integrated structure due to the cross-linking reaction, ensuring the bonding strength of the second conductive layer on the first conductive layer, and achieving high adhesion and weldability effects as a whole.
附图说明Description of the drawings
图1是本申请实施例中的电子结构的制作方法的流程图;Figure 1 is a flow chart of a manufacturing method of an electronic structure in an embodiment of the present application;
图2是本申请实施例中电子结构的制作工艺示意图;Figure 2 is a schematic diagram of the manufacturing process of the electronic structure in the embodiment of the present application;
图3是本申请实施例中电子结构的结构示例一;Figure 3 is a structural example 1 of the electronic structure in the embodiment of the present application;
图4是本申请实施例中的透明显示屏的制作方法的流程图。Figure 4 is a flow chart of a method for manufacturing a transparent display screen in an embodiment of the present application.
具体实施方式Detailed ways
现将详细地参照本公开的各种实施例,在附图中示出了所述实施例的示例。当结合这些实施例进行描述时,应当理解的是,所述实施例并不旨将本公开限制于这些实施例。相反,本公开旨在覆盖可以包括在所附权利要求书所定义的本公开的精神和范围内的替代形式、修改形式和等效物。此外,在本公开的以下具体实施方式中,阐述了许多具体细节以便提供对本公开的透彻理解。然而,应当理解的是,在没有这些特定细节的情况下也可以实践本公开。在其他实例中,没有对已知的方法、程序、部件和电路进行详细描述以免不必要模糊本公开的方面。Reference will now be made in detail to various embodiments of the present disclosure, examples of which are illustrated in the accompanying drawings. When described in conjunction with these embodiments, it should be understood that the embodiments are not intended to limit the disclosure to these embodiments. On the contrary, the disclosure is intended to cover alternatives, modifications and equivalents, which may be included within the spirit and scope of the disclosure as defined by the appended claims. Additionally, in the following detailed description of the disclosure, numerous specific details are set forth in order to provide a thorough understanding of the disclosure. However, it is understood that the present disclosure may be practiced without these specific details. In other instances, well-known methods, procedures, components and circuits have not been described in detail so as not to unnecessarily obscure aspects of the present disclosure.
需要说明的是,在不冲突的情况下本申请实施例中的各技术特征均可以相互结合。It should be noted that the technical features in the embodiments of the present application can be combined with each other as long as there is no conflict.
本申请实施例中公开了一种电子结构的制作方法,具体地,如图1-3所示,图1是本申请实施例中的电子结构的制作方法的流程图;图2是本申请实施例中电子结构的制作工艺示意图;图3是本申请实施例中电子结构的结构示例一;该电子结构的制作方法,包括:The embodiment of the present application discloses a method of manufacturing an electronic structure. Specifically, as shown in Figures 1-3, Figure 1 is a flow chart of the method of producing an electronic structure in the embodiment of the present application; Figure 2 is a diagram of the implementation of the present application. A schematic diagram of the manufacturing process of the electronic structure in the example; Figure 3 is a structure example 1 of the electronic structure in the embodiment of the present application; the manufacturing method of the electronic structure includes:
步骤S11、提供一基材10;Step S11, provide a substrate 10;
步骤S12、提供一至少包含有树脂载体与导电颗粒的第一低温导电浆料,利用所述第一低温导电浆料在所述基材之上形成第一导电层20,并对所述第一导电层20进行表干处理;Step S12: Provide a first low-temperature conductive slurry that at least contains a resin carrier and conductive particles, use the first low-temperature conductive slurry to form a first conductive layer 20 on the base material, and apply the first conductive layer 20 to the base material. The conductive layer 20 is surface dried;
其中,所述第一导电层20上至少具有一目标区域用以形成焊盘电极;Wherein, the first conductive layer 20 has at least one target area for forming a pad electrode;
步骤S13、提供一至少包含有树脂载体与导电颗粒的第二低温导电浆料,利用所述第二低温导电浆料在所述第一导电层20之上形成至少覆盖所述目标区域的第二导电层30,获得所述焊盘电极;Step S13: Provide a second low-temperature conductive slurry that at least contains a resin carrier and conductive particles, and use the second low-temperature conductive slurry to form a second layer on the first conductive layer 20 that at least covers the target area. Conductive layer 30 to obtain the pad electrode;
步骤S14、同时对所述第一导电层20和所述第二导电层30进行热固处理,得到由所述第一导电层与所述第二导电层交联融合一体的电子结构40;Step S14: Perform thermosetting treatment on the first conductive layer 20 and the second conductive layer 30 at the same time to obtain an electronic structure 40 in which the first conductive layer and the second conductive layer are cross-linked and integrated;
其中,所述第一低温导电浆料中的树脂载体的质量分数高于所述第二低温导电浆料中的树脂载体的质量分数,所述第一低温导电浆料中的导电颗粒的质量分数低于所述第二低温导电浆料中的导电颗粒的质量分数。Wherein, the mass fraction of the resin carrier in the first low-temperature conductive slurry is higher than the mass fraction of the resin carrier in the second low-temperature conductive slurry, and the mass fraction of the conductive particles in the first low-temperature conductive slurry is Lower than the mass fraction of conductive particles in the second low-temperature conductive slurry.
本申请实施例中利用低导电颗粒高树脂的第一低温导电浆料形成与基材直接接触的第一导电层,从而保证第一导电层在基材之上的附着力,利用高导电颗粒低树脂的第二低温导电浆料在第一导电层之上形成焊盘电极,实现焊盘电极的上锡性能,从而满足可焊接需求;另外,第一导电层表干后形成第二导电层,对两者同时热固化,使两者由于交联反应构成一体结构,保证第二导电层在第一导电层上的结合强度,并一体实现高附着和可焊接的效果。In the embodiments of the present application, a first low-temperature conductive slurry with low conductive particles and high resin is used to form a first conductive layer that is in direct contact with the base material, thereby ensuring the adhesion of the first conductive layer on the base material. The second low-temperature conductive slurry of the resin forms a pad electrode on the first conductive layer to achieve the tinning performance of the pad electrode, thereby meeting the solderability requirements; in addition, the second conductive layer is formed after the first conductive layer dries. The two are thermally cured at the same time, so that the two form an integrated structure due to the cross-linking reaction, ensuring the bonding strength of the second conductive layer on the first conductive layer, and achieving high adhesion and weldability effects as a whole.
本申请实施例中的基材选用PI、PTFE、PC、LCP、FR4、木材、玻璃、石材、织物中的一种或多种复合基材。The base material in the embodiment of this application is selected from one or more composite base materials among PI, PTFE, PC, LCP, FR4, wood, glass, stone, and fabric.
本申请实施例中的第一低温导电浆料和第二低温导电浆料至少由树脂载体和导电颗粒构成,在一些实施例中,还可以包含:溶剂和/或助剂等。另一方面,本申请实施例中的第一低温导电浆料和第二低温导电浆料作为低温导电浆料,是指其主要依赖于树脂载体作为粘接剂使用,而非高温环境中使用的玻璃粉,而当玻璃粉的作用并非作为粘接剂使用的情况下(即未达到玻璃粉熔融温度)的情况时,低温导电浆料中亦可包含有玻璃粉。The first low-temperature conductive slurry and the second low-temperature conductive slurry in the embodiments of the present application are at least composed of a resin carrier and conductive particles. In some embodiments, they may also include solvents and/or additives. On the other hand, the first low-temperature conductive slurry and the second low-temperature conductive slurry in the embodiments of the present application are low-temperature conductive slurries, which mainly rely on resin carriers as adhesives, rather than being used in high-temperature environments. Glass powder, and when the role of the glass powder is not used as an adhesive (that is, the melting temperature of the glass powder has not been reached), the low-temperature conductive slurry may also contain glass powder.
优选地,本申请实施例中的第一低温导电浆料为了满足第一导电层具有良好的导电性,其导电颗粒的质量分数需不低于55%,而为了提升第一低温导电浆料的附着力,其树脂载体的质量分数需不低于13%,从而同时保证了第一导电层的导电性和附着力。Preferably, in order to ensure that the first conductive layer has good conductivity, the mass fraction of the conductive particles of the first low-temperature conductive slurry in the embodiment of the present application needs to be no less than 55%, and in order to improve the first low-temperature conductive slurry For adhesion, the mass fraction of the resin carrier must be no less than 13%, thereby ensuring both the conductivity and adhesion of the first conductive layer.
本领域技术人员应该理解,在不考虑或对第一导电层的导电性能要求较低的情况下,第一低温导电浆料中的导电颗粒的质量分数可适当降低。Those skilled in the art will understand that the mass fraction of the conductive particles in the first low-temperature conductive slurry can be appropriately reduced without considering or having low requirements on the conductive performance of the first conductive layer.
进一步的,本申请实施例中提出了一种低温导电浆料,适用于作为本申请实施例中的第一低温导电浆料使用,按质量分数计,该低温导电浆料,包括:导电颗粒55%~65%、树脂载体13%~18%、助剂0%~0.5%,其余为溶剂。Further, the embodiments of this application propose a low-temperature conductive slurry, which is suitable for use as the first low-temperature conductive slurry in the embodiments of this application. In terms of mass fraction, the low-temperature conductive slurry includes: conductive particles 55 % ~ 65%, resin carrier 13% ~ 18%, additives 0% ~ 0.5%, and the rest is solvent.
该实施例中的导电颗粒可选用金属导电颗粒,不限于金、银、铜、铝、锌、镍、银包铜、镓、铟、锡、铋、镓基合金、铟基合金、铋基合金、锡基合金等金属导电颗粒中的一种或多种。The conductive particles in this embodiment can be metal conductive particles, which are not limited to gold, silver, copper, aluminum, zinc, nickel, silver-coated copper, gallium, indium, tin, bismuth, gallium-based alloys, indium-based alloys, and bismuth-based alloys. , tin-based alloy and other metal conductive particles.
优选地,本申请实施例中的导电颗粒可选用金粉、银粉、银包铜粉,相比与铜、铝、锌、镍、镓、铟、锡、铋、镓基合金、铟基合金、铋基合金、锡基合金而言,这些导电颗粒在微米尺寸结构下,性质较为稳定,不易形成氧化物,导电性良好;其中,导电颗粒可以选用球状、棒状、片状、枝杈状中的一种或几种。Preferably, the conductive particles in the embodiments of the present application can be gold powder, silver powder, and silver-coated copper powder. Compared with copper, aluminum, zinc, nickel, gallium, indium, tin, bismuth, gallium-based alloys, indium-based alloys, and bismuth-based alloys, For base alloys and tin-based alloys, these conductive particles have relatively stable properties under the micron size structure, are not easy to form oxides, and have good conductivity; among them, the conductive particles can be selected from spherical, rod-shaped, flake-shaped, and branch-shaped. Or several.
优选地,该低温导电浆料中的导电颗粒可选用片状结构。该实施例中的导电颗粒中选用片状结构,片状结构的导电颗粒具有更为广泛的搭接面积,因此该导电颗粒的导电浆料的导电性能更佳,且在相同导电能力下,导电颗粒的需求量更低,因此在保证导电性能的前提下,可以混入更多的树脂载体,进而提升导电浆料的附着力。Preferably, the conductive particles in the low-temperature conductive slurry may have a sheet structure. The conductive particles in this embodiment use a flake structure. The conductive particles with a flake structure have a wider overlapping area, so the conductive slurry of the conductive particles has better conductivity, and under the same conductivity, the conductivity is The demand for particles is lower, so more resin carriers can be mixed in while ensuring conductive properties, thereby improving the adhesion of the conductive slurry.
该实施例中的导电颗粒的尺寸范围可在2μm~10μm。The size of the conductive particles in this embodiment may range from 2 μm to 10 μm.
该实施例中的树脂载体可选用聚酯树脂、聚氨酯树脂、环氧树脂、丙烯酸树脂、酚醛树脂、醇酸树脂、有机硅树脂、氯醋树脂、聚酰亚胺树脂中的一种或多种。其中,申请人发现低温导电浆料对于基材的附着力,主要取决于树脂的类型,在基材选用玻璃基材的情况下,优选地,该低温导电浆料可选用环氧树脂作为树脂载体,可极大的提升低温导电浆料在玻璃基材之上的附着力。The resin carrier in this embodiment can be one or more of polyester resin, polyurethane resin, epoxy resin, acrylic resin, phenolic resin, alkyd resin, silicone resin, chlorine-acetyl resin, and polyimide resin. . Among them, the applicant found that the adhesion of the low-temperature conductive paste to the substrate mainly depends on the type of resin. When the substrate is a glass substrate, preferably, the low-temperature conductive paste can use epoxy resin as the resin carrier. , which can greatly improve the adhesion of low-temperature conductive paste on the glass substrate.
该实施例中的助剂与溶剂为本领域的常规选型,在此不再赘述。The auxiliaries and solvents in this embodiment are conventional selections in the art and will not be described again.
具体地,该低温导电浆料中的导电颗粒的质量分数可以是55%、56%、57%、58%、59%、60%、61%、62%、63%、64%或65%。该低温导电浆料中的树脂载体的质量分数可以是13%、14%、15%、16%、17%或18%。该低温导电浆料中的助剂的质量分数可以是0、0.1%、0.2%、0.3%、0.4%或0.5%。Specifically, the mass fraction of conductive particles in the low-temperature conductive slurry may be 55%, 56%, 57%, 58%, 59%, 60%, 61%, 62%, 63%, 64% or 65%. The mass fraction of the resin carrier in the low-temperature conductive slurry may be 13%, 14%, 15%, 16%, 17% or 18%. The mass fraction of the additive in the low-temperature conductive slurry can be 0, 0.1%, 0.2%, 0.3%, 0.4% or 0.5%.
优选地,本申请实施例中的第二低温导电浆料为了满足第二导电层具有良好的上锡性能,其导电颗粒的质量分数需不低于75%,而为了保证第二低温导电浆料的可印刷性,其树脂载体的质量分数需不低于7%,从而同时保证了第二导电层的可印刷和可焊接性能。Preferably, in order to ensure that the second conductive layer has good tin application performance, the mass fraction of the conductive particles of the second low-temperature conductive slurry in the embodiment of the present application needs to be no less than 75%. In order to ensure that the second low-temperature conductive slurry has In order to ensure the printability of the second conductive layer, the mass fraction of the resin carrier must be no less than 7%, thus ensuring the printability and solderability of the second conductive layer.
进一步的,本申请实施例中提出了一种低温导电浆料,适用于作为本申请实施例中的第二低温导电浆料使用,按质量分数计,该低温导电浆料,包括:导电颗粒75%~85%、树脂载体7%~10%、助剂0%~0.5%,其余为溶剂。Furthermore, the embodiments of this application propose a low-temperature conductive slurry, which is suitable for use as the second low-temperature conductive slurry in the embodiments of this application. In terms of mass fraction, the low-temperature conductive slurry includes: conductive particles 75 % ~ 85%, resin carrier 7% ~ 10%, additives 0% ~ 0.5%, and the rest is solvent.
该实施例中的导电颗粒可选用金属导电颗粒,不限于金、银、铜、铝、锌、镍、银包铜、镓、铟、锡、铋、镓基合金、铟基合金、铋基合金、锡基合金等金属导电颗粒中的一种或多种。The conductive particles in this embodiment can be metal conductive particles, which are not limited to gold, silver, copper, aluminum, zinc, nickel, silver-coated copper, gallium, indium, tin, bismuth, gallium-based alloys, indium-based alloys, and bismuth-based alloys. , tin-based alloy and other metal conductive particles.
优选地,本申请实施例中的导电颗粒可选用金粉、银粉、银包铜粉,相比与铜、铝、锌、镍、镓、铟、锡、铋、镓基合金、铟基合金、铋基合金、锡基合金而言,这 些导电颗粒在微米尺寸结构下,性质较为稳定,不易形成氧化物,导电性良好;其中,导电颗粒可以选用球状、棒状、片状、枝杈状中的一种或几种。Preferably, the conductive particles in the embodiments of the present application can be gold powder, silver powder, and silver-coated copper powder. Compared with copper, aluminum, zinc, nickel, gallium, indium, tin, bismuth, gallium-based alloys, indium-based alloys, and bismuth-based alloys, For base alloys and tin-based alloys, these conductive particles have relatively stable properties under the micron size structure, are not easy to form oxides, and have good conductivity; among them, the conductive particles can be selected from spherical, rod-shaped, flake-shaped, and branch-shaped. Or several.
优选地,该低温导电浆料中的导电颗粒可选用球状结构。该实施例中的导电颗粒中选用球状结构,球状结构的导电颗粒具有更大的比表面积,因此该导电颗粒的导电浆料的拥有更多的和锡反应的面积,更易形成合金;Preferably, the conductive particles in the low-temperature conductive slurry may have a spherical structure. The conductive particles in this embodiment adopt a spherical structure. The conductive particles with a spherical structure have a larger specific surface area, so the conductive slurry of the conductive particles has more area to react with tin, making it easier to form an alloy;
另外,粒径越小,导电颗粒的熔点更低,可进一步提升与锡的反应。具体地,导电颗粒的尺寸范围不大于2μm,但过小尺寸对于导电颗粒的制造成本越高,因此导电颗粒选用尺寸范围在0.5μm~2μm的情况下,对于成本与上锡性能的性价比更高。In addition, the smaller the particle size, the lower the melting point of the conductive particles, which can further enhance the reaction with tin. Specifically, the size range of conductive particles is no more than 2 μm, but if the size is too small, the manufacturing cost of conductive particles will be higher. Therefore, when the size range of conductive particles is selected from 0.5 μm to 2 μm, the cost and tin application performance will be more cost-effective. .
该实施例中的树脂载体可选用聚酯树脂、聚氨酯树脂、环氧树脂、丙烯酸树脂、酚醛树脂、醇酸树脂、有机硅树脂、氯醋树脂、聚酰亚胺树脂中的一种或多种。优选地,该实施例中的树脂载体可选用聚酯树脂,兼顾耐热性能和导电性能。The resin carrier in this embodiment can be one or more of polyester resin, polyurethane resin, epoxy resin, acrylic resin, phenolic resin, alkyd resin, silicone resin, chlorine-acetyl resin, and polyimide resin. . Preferably, polyester resin can be used as the resin carrier in this embodiment, taking into account both heat resistance and electrical conductivity.
该实施例中的助剂与溶剂为本领域的常规选型,在此不再赘述。The auxiliaries and solvents in this embodiment are conventional selections in the art and will not be described again.
具体地,该低温导电浆料中的导电颗粒的质量分数可以是75%、76%、77%、78%、79%、80%、81%、82%、83%、84%或85%。该低温导电浆料中的树脂载体的质量分数可以是7%、8%、9%或10%。该低温导电浆料中的助剂的质量分数可以是0、0.1%、0.2%、0.3%、0.4%或0.5%。Specifically, the mass fraction of conductive particles in the low-temperature conductive slurry may be 75%, 76%, 77%, 78%, 79%, 80%, 81%, 82%, 83%, 84% or 85%. The mass fraction of the resin carrier in the low-temperature conductive slurry may be 7%, 8%, 9% or 10%. The mass fraction of the additive in the low-temperature conductive slurry can be 0, 0.1%, 0.2%, 0.3%, 0.4% or 0.5%.
优选地,该低温导电浆料中的导电颗粒的质量分数可在80%~85%,进而进一步提升该低温导电浆料的上锡性能。该实施例中导电颗粒的质量分数可在80%~85%的导电浆料在上锡过程中,导电颗粒与锡膏之间拥有足够的接触面积,锡膏不易从导电颗粒上脱离。Preferably, the mass fraction of conductive particles in the low-temperature conductive slurry can be 80% to 85%, thereby further improving the tin application performance of the low-temperature conductive slurry. In this embodiment, the mass fraction of the conductive particles can be 80% to 85%. During the tin application process, there is sufficient contact area between the conductive particles and the solder paste, and the solder paste is not easily separated from the conductive particles.
优选地,本申请实施例中的第一低温导电浆料选用环氧树脂体系,而第二低温导电浆料选用聚酯树脂体系,从而使二者结合形成的电子结构在玻璃基材上具有良好的附着力、耐温性能、导电性能和上锡性能。Preferably, the first low-temperature conductive paste in the embodiment of the present application uses an epoxy resin system, and the second low-temperature conductive paste uses a polyester resin system, so that the electronic structure formed by the combination of the two has good performance on the glass substrate. Excellent adhesion, temperature resistance, electrical conductivity and tin application properties.
可选地,在所述得到由所述第一导电层与所述第二导电层交联融合一体的电子结构之后,还包括:提供一元件;将所述元件焊接在所述焊接电极上。该实施例中的元件不限于芯片、LED、二极管、三极管、电阻、电容、电感、导线等元器件。Optionally, after obtaining the electronic structure cross-linked and integrated by the first conductive layer and the second conductive layer, the method further includes: providing a component; and welding the component to the welding electrode. The components in this embodiment are not limited to chips, LEDs, diodes, transistors, resistors, capacitors, inductors, wires and other components.
优选地,所述将所述元件焊接在所述电子结构之上,具体包括:在所述焊盘电极位置处印刷锡膏,并利用回流焊实现所述元件与所述焊盘电极之间的焊接。Preferably, soldering the component to the electronic structure specifically includes: printing solder paste at the position of the pad electrode, and using reflow soldering to realize the connection between the component and the pad electrode. welding.
可选地,本申请实施例中的所述第二导电层与所述第一导电层的图案一致,且完全覆盖所述第一导电层。该实施例中的第二导电层不仅构成焊接电极,实现了对第一导电层整体导电性和整体可焊接性的加强。Optionally, the second conductive layer in the embodiment of the present application has the same pattern as the first conductive layer and completely covers the first conductive layer. The second conductive layer in this embodiment not only constitutes a welding electrode, but also enhances the overall conductivity and overall weldability of the first conductive layer.
本申请实施例中还公开了一种电子结构,可通过上述任一项所述的电子结构的制作方法获得。该电子结构可以应用于电子电路如PCB、FPC、智能穿戴、透明显示等领域。The embodiments of the present application also disclose an electronic structure, which can be obtained by any of the above-mentioned electronic structure manufacturing methods. This electronic structure can be used in electronic circuits such as PCB, FPC, smart wear, transparent display and other fields.
本申请实施例中公开了一种透明显示屏的制作方法,包括:The embodiment of the present application discloses a method for making a transparent display screen, which includes:
步骤S21、提供一玻璃基材;Step S21, provide a glass substrate;
步骤S22、利用第一低温导电浆料在玻璃基材之上印刷第一导电层;Step S22: Use the first low-temperature conductive paste to print the first conductive layer on the glass substrate;
步骤S23、对所述第一导电层进行表干处理;Step S23: Perform surface drying treatment on the first conductive layer;
步骤S24、利用第二低温导电浆料在第一导电层之上印刷第二导电层;Step S24: Use the second low-temperature conductive paste to print the second conductive layer on the first conductive layer;
步骤S25、同时对第一导电层和第二导电层进行热固处理,得到由第一导电层与第二导电层交联融合一体的电子结构;Step S25: Perform thermosetting treatment on the first conductive layer and the second conductive layer at the same time to obtain an electronic structure in which the first conductive layer and the second conductive layer are cross-linked and integrated;
步骤S26、在获得的电子结构的焊盘电极上印刷锡膏;Step S26: Print solder paste on the pad electrode of the obtained electronic structure;
步骤S27、贴装LED灯珠,并进行回流焊焊接处理,得到透明显示屏。Step S27: Mount the LED lamp beads and perform reflow soldering to obtain a transparent display screen.
该透明显示屏具体包括:玻璃基材、由先后印制形成的第一导电层和第二导电层交联形成的一体结构的电子结构、以及贴装焊接在电子结构之上的LED灯珠。The transparent display screen specifically includes: a glass substrate, an electronic structure of an integrated structure formed by cross-linking of a first conductive layer and a second conductive layer printed and formed in succession, and LED lamp beads mounted and welded on the electronic structure.
除此之外,该实施例中的玻璃基材亦可选用其它透明基材,以满足贴膜屏、软膜屏的制作需求。In addition, other transparent substrates can also be used as the glass substrate in this embodiment to meet the production requirements of film screens and soft film screens.
最后应说明的是:以上各实施例仅用以说明本申请的技术方案,而非对其限制;尽管参照前述各实施例对本申请进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分或者全部技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本申请各实施例技术方案的范围。Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present application, but not to limit it; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: The technical solutions described in the foregoing embodiments can still be modified, or some or all of the technical features can be equivalently replaced; and these modifications or substitutions do not deviate from the essence of the corresponding technical solutions from the technical solutions of the embodiments of the present application. scope.

Claims (10)

  1. 一种电子结构的制作方法,其特征在于,包括:A method for making an electronic structure, which is characterized by including:
    提供一基材;Provide a base material;
    提供一至少包含有树脂载体与导电颗粒的第一低温导电浆料,利用所述第一低温导电浆料在所述基材之上形成第一导电层,并对所述第一导电层进行表干处理;其中,所述第一导电层上至少具有一目标区域用以形成焊盘电极;Provide a first low-temperature conductive slurry that at least contains a resin carrier and conductive particles, use the first low-temperature conductive slurry to form a first conductive layer on the substrate, and surface the first conductive layer. Dry processing; wherein, the first conductive layer has at least one target area for forming a pad electrode;
    提供一至少包含有树脂载体与导电颗粒的第二低温导电浆料,利用所述第二低温导电浆料在所述第一导电层之上形成至少覆盖所述目标区域的第二导电层,获得所述焊盘电极;Provide a second low-temperature conductive slurry that at least contains a resin carrier and conductive particles, and use the second low-temperature conductive slurry to form a second conductive layer on the first conductive layer that at least covers the target area, to obtain The pad electrode;
    同时对所述第一导电层和所述第二导电层进行热固处理,得到由所述第一导电层与所述第二导电层交联融合一体的电子结构;Simultaneously perform thermosetting treatment on the first conductive layer and the second conductive layer to obtain an electronic structure in which the first conductive layer and the second conductive layer are cross-linked and integrated;
    其中,所述第一低温导电浆料中的树脂载体的质量分数高于所述第二低温导电浆料中的树脂载体的质量分数,所述第一低温导电浆料中的导电颗粒的质量分数低于所述第二低温导电浆料中的导电颗粒的质量分数。Wherein, the mass fraction of the resin carrier in the first low-temperature conductive slurry is higher than the mass fraction of the resin carrier in the second low-temperature conductive slurry, and the mass fraction of the conductive particles in the first low-temperature conductive slurry is Lower than the mass fraction of conductive particles in the second low-temperature conductive slurry.
  2. 根据权利要求1所述的电子结构的制作方法,其特征在于,按质量分数计,所述第一低温导电浆料,包括:导电颗粒55%~65%、树脂载体13%~18%、助剂0%~0.5%,其余为溶剂。The method of making an electronic structure according to claim 1, characterized in that, in terms of mass fraction, the first low-temperature conductive slurry includes: 55% to 65% of conductive particles, 13% to 18% of resin carrier, and auxiliary materials. Agent 0% ~ 0.5%, the rest is solvent.
  3. 根据权利要求1所述的电子结构的制作方法,其特征在于,按质量分数计,所述第二低温导电浆料,包括:导电颗粒75%~85%、树脂载体7%~10%、助剂0%~0.5%,其余为溶剂。The manufacturing method of an electronic structure according to claim 1, characterized in that, in terms of mass fraction, the second low-temperature conductive slurry includes: 75% to 85% of conductive particles, 7% to 10% of resin carrier, and auxiliary materials. Agent 0% ~ 0.5%, the rest is solvent.
  4. 根据权利要求1所述的电子结构的制作方法,其特征在于,在所述得到由所述第一导电层与所述第二导电层交联融合一体的电子结构之后,还包括:The manufacturing method of an electronic structure according to claim 1, characterized in that, after obtaining the electronic structure cross-linked and integrated by the first conductive layer and the second conductive layer, it further includes:
    提供一元件;provide a component;
    将所述元件焊接在所述焊接电极上。The element is welded to the welding electrode.
  5. 根据权利要求4所述的电子结构的制作方法,其特征在于,所述将所述元件焊接在所述电子结构之上,具体包括:The method of manufacturing an electronic structure according to claim 4, wherein said soldering the component to the electronic structure specifically includes:
    在所述焊盘电极位置处印刷锡膏,并利用回流焊实现所述元件与所述焊盘电极之间的焊接。Solder paste is printed at the position of the pad electrode, and reflow soldering is used to achieve soldering between the component and the pad electrode.
  6. 根据权利要求1所述的电子结构的制作方法,其特征在于,所述基材选用PI、PTFE、PC、LCP、FR4、木材、玻璃、石材、织物中的一种或多种复合基材。The method of manufacturing an electronic structure according to claim 1, wherein the substrate is selected from one or more composite substrates selected from the group consisting of PI, PTFE, PC, LCP, FR4, wood, glass, stone and fabric.
  7. 根据权利要求1所述的电子结构的制作方法,其特征在于,所述导电颗粒选用金、银、铜、铝、锌、镍、银包铜、镓、铟、锡、铋、镓基合金、铟基合金、铋基合金、锡基合金中的一种或多种。The method of making an electronic structure according to claim 1, wherein the conductive particles are selected from gold, silver, copper, aluminum, zinc, nickel, silver-coated copper, gallium, indium, tin, bismuth, and gallium-based alloys. One or more of indium-based alloy, bismuth-based alloy, and tin-based alloy.
  8. 根据权利要求1所述的电子结构的制作方法,其特征在于,所述树脂载体选用聚酯树脂、聚氨酯树脂、环氧树脂、丙烯酸树脂、酚醛树脂、醇酸树脂、有机硅树脂、氯醋树脂、聚酰亚胺树脂中的一种或多种。The manufacturing method of an electronic structure according to claim 1, characterized in that the resin carrier is selected from polyester resin, polyurethane resin, epoxy resin, acrylic resin, phenolic resin, alkyd resin, silicone resin, chlorine-acetic resin , one or more polyimide resins.
  9. 根据权利要求1所述的电子结构的制作方法,其特征在于,所述第二导电层与所述第一导电层的图案一致,且完全覆盖所述第一导电层。The method of manufacturing an electronic structure according to claim 1, wherein the second conductive layer has the same pattern as the first conductive layer and completely covers the first conductive layer.
  10. 一种电子结构,其特征在于,如权利要求1-9中任一项所述的电子结构的制作方法获得。An electronic structure, characterized in that it is obtained by the manufacturing method of the electronic structure according to any one of claims 1-9.
PCT/CN2022/120138 2022-04-29 2022-09-21 Electronic structure and manufacturing method therefor WO2023206939A1 (en)

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