WO2023206879A1 - 激光头及其激光加工系统 - Google Patents

激光头及其激光加工系统 Download PDF

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Publication number
WO2023206879A1
WO2023206879A1 PCT/CN2022/114772 CN2022114772W WO2023206879A1 WO 2023206879 A1 WO2023206879 A1 WO 2023206879A1 CN 2022114772 W CN2022114772 W CN 2022114772W WO 2023206879 A1 WO2023206879 A1 WO 2023206879A1
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WO
WIPO (PCT)
Prior art keywords
homogenization
collimation
mirror
laser
housing
Prior art date
Application number
PCT/CN2022/114772
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English (en)
French (fr)
Inventor
苑凌峰
王伟
邵华江
Original Assignee
上海嘉强自动化技术有限公司
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Application filed by 上海嘉强自动化技术有限公司 filed Critical 上海嘉强自动化技术有限公司
Publication of WO2023206879A1 publication Critical patent/WO2023206879A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment

Definitions

  • the utility model relates to the technical field of laser processing, in particular to a laser head and a laser processing system thereof.
  • Laser processing technology covers a variety of laser processing techniques such as laser cutting, welding, quenching, drilling, micro-machining, etc., and utilizes the basic characteristics of the interaction between laser and matter. Due to the advantages of non-contact between laser beam and processing materials, processing speed and quality, laser processing technology is an irreplaceable high-tech.
  • the present invention provides a laser head and its laser processing system.
  • the laser head In addition to meeting the user's requirements for uniformity of material heating, the laser head also has a wider range of use scenarios. Adaptability and high usage compatibility.
  • the utility model discloses a laser head.
  • the laser head includes an optical fiber interface device, a collimation component, a homogenization component, a focusing component, a beam combining component and an infrared temperature measurement device.
  • the optical fiber interface device is used to connect with a laser to Provide a laser light source; the optical fiber interface device, the collimation component, the homogenization component, the beam combining component and the focusing component are arranged in a straight line and sequentially to form a laser transmission optical path; the collimation component includes a collimating mirror
  • the homogenization component includes a first homogenization mirror, the distance between the collimation lens group, the first homogenization mirror and the optical fiber interface device is variable; the infrared temperature measurement device is located on the laser On the side of the transmission light path, the focusing component, the beam combining component and the infrared temperature measurement device sequentially form a temperature measurement infrared transmission light path.
  • the collimation assembly further includes a collimation lens base, a collimation housing and a rotation adjustment member.
  • the collimation lens base is used to install the collimation lens group; the collimation housing It has a hollow cylindrical shape, the collimating mirror base is arranged in the collimating housing and can move along its axial direction, and a first limiting member is provided in the collimating housing, and the first limiting member limits the
  • the collimating lens base rotates in the collimating housing; the rotating adjusting member is provided in the collimating housing, and its position in the axial direction of the collimating housing is fixed, and the rotating adjusting member can
  • the axis of the collimation housing is used as the axis of rotation to rotate.
  • An axial end of the collimation lens holder is provided with a threaded section, and the rotation adjustment member is threadedly connected to the threaded section.
  • the radial outer wall of the collimating lens holder is provided with a guide groove extending along its length direction
  • the first limiting member is a limiting block provided on the inner wall of the collimating housing, The limiting block is restricted from moving in the guide groove.
  • the collimation assembly further includes a collimation protection lens assembly, the collimation protection lens assembly is located between the collimation lens group and the optical fiber interface device, the collimation protection lens assembly Detachably connected to the collimating lens group.
  • the homogenization assembly further includes a homogenization mirror holder and a drive motor.
  • the homogenization mirror holder is used to install the first homogenization mirror.
  • the drive motor has a direction parallel to the laser transmission direction. The movable end of the optical path movement is connected to the homogenizing lens holder.
  • the homogenization assembly further includes a homogenization housing and a limit sensor.
  • the limit sensor and the homogenization mirror base are arranged in the homogenization housing.
  • the limit sensor is In order to detect the movement limit position of the homogenizing mirror holder in the homogenizing housing, the limit sensor is electrically connected to the driving motor.
  • the homogenization component further includes a second homogenization mirror, the second homogenization mirror is disposed on a side of the first homogenization mirror away from the optical fiber interface device, and the second homogenization mirror The position of the homogenizing mirror relative to the optical fiber interface device is fixed.
  • the homogenization component further includes a homogenization shell, and an annular boss is provided in the homogenization shell for the laser transmission optical path to pass through, and the annular boss connects the homogenization
  • the housing is divided into a first cavity and a second cavity.
  • the first homogenizing mirror is located in the first cavity.
  • a spacer ring and a lens pressure plate are also provided in the second cavity. The spacer ring will One of the second homogenizing mirrors is pressed against the annular boss, and the lens pressure plate presses the other second homogenizing mirror against the spacer ring.
  • the utility model also discloses a laser processing system, which includes any of the aforementioned laser heads, lasers and control modules.
  • the control modules are respectively connected to the infrared temperature measurement of the laser and the laser head.
  • the device is electrically connected.
  • the laser head of the present utility model achieves the technical effect of taking into account both the uniformity of the light spot and the adjustable function of the light spot size by arranging the position-adjustable collimation component and the homogenization component.
  • the laser head of the present utility model also The temperature of the heating area can be detected in real time, which greatly expands the applicable scope of the laser head of the present invention.
  • Figure 1 is a schematic structural diagram of the laser head of the present utility model in some embodiments.
  • Figure 2 is a schematic structural diagram of the collimation component of the laser head of the present utility model in some embodiments
  • Figure 3 is a schematic structural diagram of the homogenization component of the laser head of the present utility model in some embodiments
  • 1 is the optical fiber interface device
  • 2 is the collimation component
  • 3 is the homogenization component
  • 4 is the beam combining component
  • 5 is the infrared temperature measurement device
  • 51 is the flat reflector
  • 6 is the focusing component
  • 7 is the air knife protection device.
  • 201 is the collimation protection lens
  • 202 is the collimation lens group
  • 203 is the diaphragm
  • 204 is the diaphragm housing
  • 205 is the collimation protection lens holder
  • 206 is the collimation protection lens holder housing
  • 207 is the collimation shell body
  • 208 is the collimating mirror holder
  • 209 is the first limiter
  • 210 is the axial plug seal
  • 211 is the lubricating piece
  • 212 is the rotation adjustment piece
  • 213 is the end plug seal
  • 214 is the base
  • 215 is the inlet Nozzle
  • 2021 is a biconvex lens
  • 2022 is a negative meniscus lens
  • 301 is the first homogenizing mirror
  • 302 is the annular boss
  • 303 is the second homogenizing mirror
  • 304 is the spacer
  • 305 is the lens pressure plate
  • 306 It is the homogenization shell
  • 307 is the motor mounting plate
  • 308 is
  • first and second are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of indicated technical features. Therefore, features defined as “first” and “second” may explicitly or implicitly include at least one of these features.
  • “plurality” means at least two, such as two, three, etc., unless otherwise clearly and specifically limited.
  • connection In this utility model, unless otherwise expressly stipulated and limited, the terms “installation”, “connection”, “connection”, “fixing” and other terms should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection. Connection, or integration; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediary; it can be an internal connection between two elements or an interaction between two elements, unless otherwise clear limits. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
  • the first feature "on” or “below” the second feature may be that the first and second features are in direct contact, or the first and second features are in direct contact through an intermediate medium. indirect contact.
  • the terms “above”, “above” and “above” the first feature is above the second feature may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is higher in level than the second feature.
  • "Below”, “below” and “beneath” the first feature to the second feature may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature has a smaller horizontal height than the second feature.
  • Figure 1 shows a schematic structural diagram of a laser head in an embodiment of the present invention.
  • An embodiment of the present invention provides a laser head, including an optical fiber interface device 1, a collimation component 2, and a homogenization component 3. , focusing component 6, beam combining component 4 and infrared temperature measurement device 5, fiber optic interface device 1 is connected to an external laser through an optical fiber to introduce laser, fiber optic interface device 1, collimation component 2, homogenization component 3, beam combining component 4 and the focusing components 6 are arranged in sequence in a straight line to form a laser transmission optical path.
  • Figure 2 shows a schematic structural diagram of the collimation component 2.
  • the collimation component 2 includes a collimating lens group 202.
  • Figure 3 shows a schematic structural diagram of the homogenization component 3.
  • the homogenization component 3 includes a first homogenization mirror 301. , wherein the distance between the collimating lens group 202 and the optical fiber interface device 1 and the distance between the first homogenizing mirror 301 and the optical fiber interface device 1 are variable; the infrared temperature measurement device 5 is located on the side of the laser transmission optical path in the extension direction, focusing Component 6, the beam combining component and the infrared temperature measurement device sequentially form a temperature measurement infrared transmission light path.
  • the laser beam emitted by the laser enters from the fiber interface device 1 through the optical fiber to form a point light source.
  • the laser emitted by the point light source is collimated by the collimation component 2, and the divergence angle of the laser in each direction is compressed to Minimum, turning the original circular Gaussian light into a rectangular, parallel laser beam.
  • the direction of the laser beam determines the laser transmission optical path of the laser head of the present invention. Since the distance between the collimating lens group 202 in the collimating assembly 2 and the optical fiber interface device 1 is adjustable, the laser head of the present invention can change the collimating position of the collimating lens group 202 and the light focus position, meeting the requirements Laser processing of various materials in different ways.
  • the laser beam then passes through the homogenizing component 3. Under the action of the homogenizing component 3, the uniformity of the spot formed by the laser beam will be greatly improved. Since the distance between the first homogenizing mirror 301 in the homogenizing assembly 3 and the optical fiber interface device 1 can be adjusted, this allows the laser head of the present invention to adjust the distance between the first homogenizing mirror 301 and the optical fiber interface device 1. By changing the size of the light spot, the laser head of the present invention has a higher degree of freedom in use and a wider application range.
  • the laser beam After passing through the homogenizing component 3, the laser beam passes through the beam combining component 4 and the focusing component 6 to achieve optical path focusing, and is finally focused at a certain position into a rectangular light spot for laser processing.
  • the laser head of the present invention is also equipped with an infrared temperature measuring device 5 on the side of the laser transmission optical path.
  • the focusing component 6, the beam combining component 4, and the infrared temperature measuring device 5 sequentially form a temperature measuring infrared transmission optical path.
  • the infrared rays emitted from the part to be measured pass through the focusing component 6 and are deflected and reflected under the action of the combining component 4, thereby entering the infrared temperature measurement device 5 to measure the temperature of the part to be measured.
  • the laser head of the present invention can detect the temperature of the heating area, so that the user can clearly know the specific temperature of the processing area, so that the temperature of the heating area can be adjusted in real time according to needs, thereby obtaining better laser processing quality.
  • the laser head of the present invention achieves both the uniformity of the light spot and the size of the light spot that cannot be achieved by the laser head in the prior art by arranging a collimation component and a homogenization component with adjustable positions.
  • the laser head of the present invention can also detect the temperature of the heating area in real time, which greatly expands the applicable scope of the laser head of the present invention.
  • the collimating assembly 2 of the laser head of the present invention also includes a collimating lens holder 208 , collimation housing 207 and rotation adjustment member 212, and the collimation lens base 208 is used to install the collimation lens group 202.
  • the collimation housing 207 is in the shape of a hollow cylinder.
  • the collimation mirror base 208 is provided in the collimation housing 207 and can move along its axial direction.
  • the collimation housing 207 is provided with a first limiter 209.
  • the first limiter The member 209 restricts the rotation of the collimating lens base 208 within the collimating housing 207 .
  • the rotation adjustment member 212 is provided in the collimation housing 207 and has a fixed position in the axial direction. An axial end of the collimation mirror base 208 is provided with a threaded section. The rotation adjustment member 212 is screwed with the threaded section and is rotated and adjusted. The position of element 212 in the threaded section can be changed.
  • the collimation lens holder 208 since the axial position of the rotation adjustment member 212 is fixed and the collimation lens holder 208 cannot rotate within the collimation housing 207, when the rotation adjustment member 212 rotates, the collimation lens holder will The axial position of 208 relative to the rotating adjustment member 212 changes, which in turn causes the distance between the collimating lens group 202 installed on the collimating lens base 208 and the optical fiber interface device 1 to change, thereby achieving a change from the collimating lens group 202 to the optical fiber interface device. 1 distance adjustable effect.
  • the distance of the collimating lens group 202 relative to the optical fiber interface device 1 is directly related to the angle of rotation of the rotation adjustment member 212, thereby achieving the distance of the collimating lens group 202 relative to the optical fiber interface device 1. Precise distance control.
  • the laser head in this embodiment achieves precise control of the distance of the collimating lens group 202 relative to the optical fiber interface device 1 through a purely mechanical structure, and the operation is simple and clear, and is easy to implement.
  • the present invention does not strictly limit the specific technical solution of how the first limiting member 209 limits the rotation of the collimating lens holder 208 in the collimating housing 207 .
  • the radial outer wall of the collimating lens base 208 is provided with a guide groove extending along its length direction, and the first limiting member 209 is provided on the collimating housing.
  • 207 is a limiting block on the inner wall, and the limiting block is restricted from moving in the guide groove.
  • the limiting block may be a screw that penetrates the radial direction of the collimating housing 207, and the screw extends into the guide groove, so that the collimating lens base 208 can only move along the radial direction of the collimating housing 207. Axial movement.
  • the collimation assembly 2 also includes a collimation protective mirror assembly, which includes a collimation protective mirror base 205 and a collimation protective mirror 201 installed thereon,
  • the collimation protection lens assembly is located between the collimation lens group 202 and the optical fiber interface device 1, and the collimation protection lens assembly is detachably connected to the collimation lens group 202.
  • a collimation protection lens holder housing 206 is provided at one end of the collimation housing 207 close to the optical fiber interface device 1, and the collimation protection lens holder 205 can be embedded in the The collimation protection lens holder housing 206 forms a pluggable movable connection, so that the collimation protection lens assembly can be quickly replaced.
  • the collimation assembly 2 is also provided with a dust cover outside the collimation protection lens holder 205. Only when the dust cover is opened can the collimation protection lens holder 205 be removed from the collimation protection lens holder housing 206. Plug in or unplug.
  • the collimation assembly 2 also includes an aperture 203, an aperture housing 204, an axial plug seal 210, a lubricating sheet 211, an end face plug seal 213, a base 214, a cooling inlet
  • the nozzle 215, the spring washer and the threaded pressure ring, the aperture housing 204 is close to the side of the collimation protection lens holder housing 206 close to the optical fiber interface device 1, and there is an aperture 203 connected by screws inside the aperture housing 204.
  • the diaphragm 203 has a water cooling channel and a sealing ring.
  • the diaphragm housing 204 is equipped with a cooling water inlet 215.
  • the collimating lens group 202 is set in the collimating lens seat 208 and is close to the bottom of the collimating protective lens 201.
  • the collimator lens holder 208 has guide grooves that can move up and down in conjunction with the screws fixed on the collimator lens housing 207. , there is a PC window on the collimator housing 207 to check the position of adjusting the collimation.
  • the end face plug seal 213 is installed on the base 214.
  • the collimating lens group 202 is a collimated combination of a biconvex lens 2021 and a negative meniscus lens 2022, and is fixed with a spring washer and a threaded retaining ring. , the collimating lens group 202 can be manually adjusted up and down along the Z-axis by rotating the adjusting member 212 in the collimating lens holder 208.
  • FIG. 3 shows a schematic structural diagram of the homogenization component 3 of the laser head of the present invention.
  • the homogenization component 3 includes a homogenization mirror base 309 and a drive motor 308.
  • the homogenization mirror base 309 is used to install the first homogenization mirror 301.
  • the driving motor 308 has a movable end that moves parallel to the laser transmission optical path, and the movable end is connected to the homogenizing mirror base 309. Through the movement of the movable end, the distance between the first homogenizing mirror 301 and the optical fiber interface device 1 can be changed.
  • the movable end is a ball screw. The screw in the ball screw is connected to the output end of the drive motor 308 through a coupling.
  • the screw is parallel to the laser transmission optical path.
  • the ball screw The nut in the bar is connected to the homogenizing mirror holder 309. Through the rotation of the screw, the nut is driven to move in the length direction of the screw, thereby driving the distance between the homogenizing mirror holder 309 and the first homogenizing mirror 301 thereon and the optical fiber interface device 1 .
  • the homogenization component 3 also includes a homogenization housing 306 and a limit sensor 310.
  • the limit sensor 310 and the homogenization lens holder 309 are arranged in the homogenization housing 306.
  • the limit sensor 310 is used to detect uniformity.
  • the mirror base 309 is at the movement limit position in the homogenization housing 306, and the limit sensor 310 is electrically connected to the drive motor.
  • Such an arrangement can avoid operational errors when the driving motor 308 drives the homogenization mirror holder 309 to move and interfere with the homogenization housing 306: when the limit sensor 310 detects that the homogenization mirror holder 309 moves to its limit within the homogenization housing 306 When the position is reached, the limit sensor 310 generates a signal to the driving motor 308 to cause the driving motor 308 to stop moving.
  • the homogenization component 3 also includes a second homogenization mirror 303.
  • the second homogenization mirror 303 is disposed on the side of the first homogenization mirror 301 away from the optical fiber interface device 1.
  • the second homogenization mirror 303 is opposite to the optical fiber interface device 1.
  • the position of the optical fiber interface device 1 is fixed.
  • the uniformity of the laser spot can be further improved. It can be understood that the laser head of the present invention does not limit the number of the second homogenizing mirror 303.
  • there are two second homogenizing mirrors 303 and the two second homogenizing mirrors 303 are spaced apart along the laser transmission optical path.
  • the homogenization assembly 3 includes a first homogenization mirror 301, a second homogenization mirror 303, a spacer 304, a lens pressure plate 305, a homogenization housing 306, and a motor.
  • the mirror 301 is fixed on the homogenizing mirror base 309.
  • the homogenization shell 306 is provided with an annular boss 302 for the laser transmission optical path to pass through.
  • the annular boss 302 divides the homogenization shell 306 into a first cavity and a second cavity separated up and down.
  • the first homogenization mirror 301 is located in the first cavity
  • the second homogenizing mirror 303 is located in the second cavity.
  • the second cavity is also provided with a spacer ring 304 and a lens pressure plate 305.
  • the spacer ring 304 compresses one of the second homogenizing mirrors 303 on the annular boss 302, and the lens pressure plate 305 compresses the other second homogenization mirror 303.
  • the homogenizing mirror base 309 is connected to the movable end of the driving motor 308.
  • the driving motor 308 is connected to the motor mounting plate 307 through screws.
  • the motor mounting plate 307 is connected to the homogenizing housing 306 through screws.
  • the water outlet 311 is connected to the homogenizing housing. 3, forming a water cooling loop with the cooling water inlet 215 of the collimation assembly 2 in the previous embodiment.
  • the beam combiner assembly 4 includes an infrared temperature measuring beam combiner 401, a beam combiner protective mirror 402, and a beam combiner housing, which is connected to a uniform Below the casing, the infrared temperature measuring beam combiner 401 is fixed with equal height screws and springs in the beam combiner casing, and the beam combiner protective mirror 402 is pressed elastically on the right side of the infrared temperature measuring beam combiner 401.
  • the circle is fixed.
  • a flat reflector 51 is also provided between the beam combining assembly 4 and the infrared temperature measuring device 5.
  • the flat reflecting mirror 51 is placed on the right side of the beam combining protective mirror 402 and below the infrared temperature measuring device 5 with a flat mirror pressing plate. It is fixed with a wave spring, and the angle of the flat reflector 51 is also adjustable. Since the length direction dimension of the infrared temperature measurement device 5 is much larger than its width direction dimension, by adding a flat reflector 51, the direction of the infrared temperature measurement light path can be changed, so that when the infrared temperature measurement device 5 is connected to the beam combiner assembly, the infrared measurement The length direction of the heating device 5 is roughly parallel to the laser transmission optical path, so that the entire laser head has a regular appearance and is easy to install and use.
  • the focusing assembly 6 includes a focusing housing, a focusing lens 601 and a focusing protective lens 602; the focusing lens 601 is fixed with an elastic pressing ring in the focusing housing, and the focusing lens 601 is fixed with an elastic ring.
  • the focusing protective mirror 603 is disposed on the side of the focusing mirror 601 away from the optical fiber interface device 1 .
  • the laser head of the present invention also includes an air knife protection device 7 , and the air knife protection device 7 is disposed on the left side of the focusing protective mirror 603 .
  • the air knife protection device 7 is mainly composed of: an air inlet interface, an air flow cavity, and a slag baffle.
  • the air inlet interface is connected to the air flow cavity with screws.
  • the slag baffle is close to the air flow.
  • the left side of the cavity is connected with screws.
  • a laser processing system which includes any of the aforementioned laser heads, lasers, and control modules.
  • the control modules are respectively connected to the laser and the infrared temperature measurement device of the laser head. Electrical connection.
  • the infrared temperature measuring device 5 detects that the temperature of the heating area does not meet the preset temperature range, it sends a signal to the control module.
  • the control module receives the signal and issues an instruction to increase or decrease the power of the laser, thereby increasing the temperature of the heating area. Increase or decrease.
  • the laser processing system of the present invention can realize closed-loop control of the surface temperature of the heated material, and can control the power of the laser according to the heating temperature required by the material, thereby making the temperature of the heating area constant, thereby obtaining better processing quality.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

一种激光头，激光头包括光纤接口装置（1）、准直组件（2）、匀化组件（3）、聚焦组件（6）、合束组件（4）以及红外测温装置（5），光纤接口装置（1）用于与激光器连接以提供激光光源；光纤接口装置（1）、准直组件（2）、匀化组件（3）、合束组件（4）以及聚焦组件（6）呈直线依次布置组成激光传输光路；准直组件（2）包括准直镜组（202），匀化组件（3）包括第一匀化镜（301），准直镜组（202）、第一匀化镜（301）至光纤接口装置（1）的距离可变；红外测温装置（5）设于激光传输光路的侧面，聚焦组件（6）、合束组件（4）以及红外测温装置（5）依次组成测温红外线传输光路。

Description

激光头及其激光加工系统 技术领域
本实用新型涉及激光加工技术领域，特别是涉及一种激光头及其激光加工系统。
背景技术
激光加工技术涵盖了激光切割、焊接、淬火、打孔、微加工等多种激光加工工艺，利用了激光与物质相互作用的基本特性。由于激光束与加工材料的非接触性、加工速度与质量等优势，奠定了激光加工技术是一种无可替代的高新技术。
然而，随着激光材料加热在工业领域起的应用逐渐增多，用户对材料加热均匀性产品操作性要求也不断增高，这就导致目前市面上的激光头无法满足用户的全部需求。市面上常见使用的反射式积分镜矩形光斑激光头两个方向能量不一致，只能达到一个方向成平顶分布另一方向成高斯分布，反射式积分镜矩形光斑能量均匀性不足会造成对材料的加热不均匀，影响加工质量。除此以外，反射式积分镜矩形光斑尺寸大小不可变，必须需要更换镜片才能实现光斑大小的变化，操作繁琐且不带测温功能。
实用新型内容
基于此，针对现有技术中存在的问题，本实用新型提供了一种激光头及其激光加工系统，该激光头在满足用户对于材料加热均匀性的要求之外，还具有更加广泛的使用场景适应性和较高的使用兼容度。
本实用新型公开了一种激光头，所述激光头包括光纤接口装置、准直组件、匀化组件、聚焦组件、合束组件以及红外测温装置，所述光纤接口装置用于与激光器连接以提供激光光源；所述光纤接口装置、所述准直组件、所述匀化组件、所述合束组件以及所述聚焦组件呈直线依次布置组成激光传输光路；所述准直组件包括准直镜组，所述匀化组件包括第一匀化镜，所述准直镜组、所述第一匀化镜至所述光纤接口装置的距离可变；所述红外测温装置设于所述激光传输光路的侧面，所述聚焦组件、所述合束组件以及所述红外测温装置依次组成测温红外线传输光路。
在其中一个实施例中，所述准直组件还包括准直镜座、准直壳体和旋转调节件，所述准直镜座用于安装所述准直镜组；所述准直壳体为中空筒状，所述准直镜座设置在所述准直壳体内且能够沿其轴向运动，所述准直壳体内设置有第一限位件，所述第一限位件限制所述准直镜座在所述准直壳体内旋转；所述旋转调节件设置在所述准直壳体内，并且其在所述准直壳体轴向上的位置固定，所述旋转调节件能够以所述准直壳体的轴线为旋转轴发生旋转，所述准直镜座的轴向一端设有螺纹段，所述旋转调节件与所述螺纹段螺纹连接。
在其中一个实施例中，所述准直镜座的径向外壁上设置有沿其长度方向延伸的导向槽，所述第一限位件为设置在准直壳体内壁上的限位块，所述限位块被限制在所述导向槽内运动。
在其中一个实施例中，所述准直组件还包括准直保护镜组件，所述准直保护镜组件位于所述准直镜组与所述光纤接口装置之间，所述准直保护镜组件与所述准直镜组可拆卸连接。
在其中一个实施例中，所述匀化组件还包括匀化镜座和驱动电机，所述匀化镜座用于安装所述第一匀化镜，所述驱动电机具有平行于所述激光传输光路 运动的活动端，所述活动端与所述匀化镜座连接。
在其中一个实施例中，所述匀化组件还包括匀化壳体和限位传感器，所述限位传感器、所述匀化镜座设置在所述匀化壳体内，所述限位传感器用于检测所述匀化镜座在所述匀化壳体内的运动极限位置，所述限位传感器与所述驱动电机电性连接。
在其中一个实施例中，所述匀化组件还包括第二匀化镜，所述第二匀化镜设置于所述第一匀化镜远离所述光纤接口装置的一侧，所述第二匀化镜相对所述光纤接口装置的位置固定。
在其中一个实施例中，所述第二匀化镜为两个，两个所述第二匀化镜沿所述激光传输光路间隔布置。
在其中一个实施例中，所述匀化组件还包括匀化壳体，所述匀化壳体内设有为所述激光传输光路穿过的环形凸台，所述环形凸台将所述匀化壳体分为第一腔体和第二腔体，所述第一匀化镜设于所述第一腔体内，所述第二腔体内还设有隔圈和镜片压板，所述隔圈将其中一个所述第二匀化镜压紧在所述环形凸台上，所述镜片压板将另一个所述第二匀化镜压紧在所述隔圈上。
本实用新型另一方面还公开了一种激光加工系统，包括前述任一所述的激光头、激光器以及控制模块，所述控制模块分别与所述激光器、所述激光头的所述红外测温装置电性连接。
有益效果
本实用新型的所述激光头通过设置位置可调的准直组件以及匀化组件，实现了同时兼顾光斑均匀性以及光斑大小可调功能的技术效果，与此同时，本实用新型的激光头还能够对加热区域温度进行实时检测，大大扩大了本实用新型的激光头的适用范围。
附图说明
图1为部分实施例中本实用新型的所述激光头的结构示意图；
图2为部分实施例中本实用新型的所述激光头的准直组件的结构示意图；
图3为部分实施例中本实用新型的所述激光头的匀化组件的结构示意图；
其中，1为光纤接口装置，2为准直组件，3为匀化组件，4为合束组件，5为红外测温装置，51为平反射镜，6为聚焦组件，7为气刀保护装置，201为准直保护镜，202为准直镜组，203为光阑，204为光阑壳体，205为准直保护镜座，206为准直保护镜座壳体，207为准直壳体，208为准直镜座，209为第一限位件，210为轴向泛塞封，211为润滑片，212为旋转调节件，213为端面泛塞封，214为底座，215为进水口，2021为双凸型镜片，2022为负弯月型镜片，301为第一匀化镜，302为环形凸台，303为第二匀化镜，304为隔圈，305为镜片压板，306为匀化壳体，307为电机安装板，308为驱动电机，309为匀化镜座，310为限位传感器，311为出水口，401为红外测温合束镜，402为合束保护镜，601为聚焦镜，602为聚焦保护镜。
具体实施方式
为使本实用新型的上述目的、特征和优点能够更加明显易懂，下面结合附图对本实用新型的具体实施方式做详细的说明。在下面的描述中阐述了很多具体细节以便于充分理解本实用新型。但是本实用新型能够以很多不同于在此描述的其它方式来实施，本领域技术人员可以在不违背本实用新型内涵的情况下做类似改进，因此本实用新型不受下面公开的具体实施例的限制。
在本实用新型的描述中，需要理解的是，术语“中心”、“纵向”、“横 向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”、“顺时针”、“逆时针”、“轴向”、“径向”、“周向”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本实用新型和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本实用新型的限制。
此外，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。在本实用新型的描述中，“多个”的含义是至少两个，例如两个，三个等，除非另有明确具体的限定。
在本实用新型中，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或成一体；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通或两个元件的相互作用关系，除非另有明确的限定。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本实用新型中的具体含义。
在本实用新型中，除非另有明确的规定和限定，第一特征在第二特征“上”或“下”可以是第一和第二特征直接接触，或第一和第二特征通过中间媒介间接接触。而且，第一特征在第二特征“之上”、“上方”和“上面”可是第一特征在第二特征正上方或斜上方，或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”可以是第一特征在第二特征正下方或斜下方，或仅仅表示第一特征水平高度小于第二特征。
需要说明的是，当元件被称为“固定于”或“设置于”另一个元件，它可以直接在另一个元件上或者也可以存在居中的元件。当一个元件被认为是“连接”另一个元件，它可以是直接连接到另一个元件或者可能同时存在居中元件。本文所使用的术语“垂直的”、“水平的”、“上”、“下”、“左”、“右”以及类似的表述只是为了说明的目的，并不表示是唯一的实施方式。
参阅图1，图1示出了本实用新型一实施例中的激光头的结构示意图，本实用新型一实施例提供了的激光头，包括光纤接口装置1、准直组件2、匀化组件3、聚焦组件6、合束组件4以及红外测温装置5，光纤接口装置1通过光纤与外部的激光器连接以引入激光，光纤接口装置1、准直组件2、匀化组件3、合束组件4以及聚焦组件6呈直线依次布置组成激光传输光路。如图2所示为准直组件2的结构示意图，准直组件2包括准直镜组202，如图3所示为匀化组件3的结构示意图，匀化组件3包括第一匀化镜301，其中，准直镜组202至光纤接口装置1的距离、第一匀化镜301至光纤接口装置1的距离可变；红外测温装置5设于所述激光传输光路延伸方向的侧面，聚焦组件6、合束组件以及红外测温装置依次组成测温红外线传输光路。
本实用新型的所述激光头在使用时，激光器发出的激光光束通过光纤从光纤接口装置1进入形成点光源，点光源发出的激光经过准直组件2准直，激光各方向的发散角压缩至最小，使原有圆形的高斯光变成矩形的、平行的激光光束。该激光光束的方向即确定了本实用新型的所述激光头的激光传输光路。由于准直组件2中的准直镜组202至光纤接口装置1的距离可调，这就使得本实用新型的激光头可以改变准直镜组202的准直位置及可改变出光焦点位置，满足各种材料不同方式的激光加工。
激光光束随后通过匀化组件3，在匀化组件3的作用下，激光光束形成的光 斑的均匀性将大幅提高。由于匀化组件3中的第一匀化镜301至光纤接口装置1的距离可以被调节，这就使得本实用新型的激光头通过调整第一匀化镜301至光纤接口装置1的距离，可以改变光斑的尺寸大小，从而使得本实用新型的激光头的使用自由度更高，适用范围更广。
激光光束在通过匀化组件3后依次通过合束组件4、聚焦组件6实现光路聚焦，最终在一定的位置聚焦为用于激光加工的矩形光斑。
本实用新型的激光头在所述激光传输光路的侧面还设置有红外测温装置5，聚焦组件6、合束组件4、红外测温装置5依次组成测温红外线传输光路。具体来说，待测温部位发出的红外线经过聚焦组件6后在合束组件4的作用下发生偏转反射，从而进入红外测温装置5实现对于待测温部位的测温。如此，本实用新型的激光头可以对加热区域温度进行检测，使得用户可以清楚地知晓加工区域的具体温度情况，以便根据需求对加热区域温度进行实时调整，从而获得更优异的激光加工质量。
通过上述分析容易看出，本实用新型的所述激光头通过设置位置可调的准直组件以及匀化组件，实现了现有技术中的激光头不能实现的同时兼顾光斑均匀性以及光斑大小可调功能的技术效果，与此同时，本实用新型的激光头还能够对加热区域温度进行实时检测，大大扩大了本实用新型的激光头的适用范围。
为了实现前述的准直镜组202至光纤接口装置1距离可调的效果，在部分实施例中，如图2所示，本实用新型的激光头的准直组件2还包括准直镜座208、准直壳体207和旋转调节件212，准直镜座208用于安装准直镜组202。准直壳体207为中空筒状，准直镜座208设置在准直壳体207内且能够沿其轴向运动，准直壳体207内设置有第一限位件209，第一限位件209限制准直镜座208在准直壳体207内旋转。旋转调节件212设置在准直壳体207内且在轴向上具有固 定位置，准直镜座208的轴向一端设有螺纹段，旋转调节件212与所述螺纹段相螺接并且旋转调节件212在所述螺纹段中的位置可改变。在该实施例中，由于旋转调节件212的轴向位置固定，并且准直镜座208不能在准直壳体207内旋转，这就使得旋转调节件212发生旋转时，会导致准直镜座208相对旋转调节件212的轴向位置发生变化，进而导致安装在准直镜座208上的准直镜组202与光纤接口装置1的距离发生改变，从而实现准直镜组202至光纤接口装置1距离可调的效果。由于螺纹段的螺距和螺纹角度固定，因此准直镜组202相对于光纤接口装置1的距离，与旋转调节件212旋转的角度直接相关，从而实现准直镜组202相对于光纤接口装置1的距离精确控制。本实施例中的激光头，通过纯机械结构实现了准直镜组202相对于光纤接口装置1的距离精确控制，操作简单明了，容易实施。
可以理解的，对于第一限位件209如何限制准直镜座208在准直壳体207发生旋转的具体技术方案，本实用新型在此不做严格限定。作为某些可以具体实施的实施例，如图2所述，准直镜座208的径向外壁上设置有沿其长度方向延伸的导向槽，第一限位件209为设置在准直壳体207内壁上的限位块，所述限位块被限制在所述导向槽内运动。所述限位块在部分实施例中可以为贯穿准直壳体207的径向的螺钉，所述螺钉伸入所述导向槽中，使得准直镜座208仅能沿准直壳体207的轴向运动。
在部分实施例中，如图2所示，准直组件2还包括准直保护镜组件，所述准直保护镜组件包括准直保护镜座205和安装于其上的准直保护镜201，所述准直保护镜组件位于准直镜组202与光纤接口装置1之间，所述准直保护镜组件与准直镜组202可拆卸连接。作为某些具体可实施的实例，在前述实施例的基础上，准直壳体207靠近光纤接口装置1的一端设置有准直保护镜座壳体206， 准直保护镜座205能够嵌入所述准直保护镜座壳体206形成可插拔的活动连接，从而可以对准直保护镜组件进行快速更换。在部分实施例中，准直组件2在准直保护镜座205的外部还设置有防尘盖，打开防尘盖，才可以将准直保护镜座205从准直保护镜座壳体206上插入或拔出。
如图2所示，在部分实施例中，准直组件2还包括光阑203、光阑壳体204、轴向泛塞封210、润滑片211、端面泛塞封213、底座214、冷却进水口215、弹垫以及螺纹压圈，光阑壳体204紧靠在准直保护镜座壳体206靠近光纤接口装置1的一侧，光阑壳体204内部有靠螺钉连接的光阑203，光阑203上有水冷流道和密封用的密封圈，光阑壳体204上装有冷却进水口215，准直镜组202设置在准直镜座208内并靠近准直保护镜片201的下方，准直镜座208表面正前方有激光打标刻度且上下两端装有轴向泛塞封201，准直镜座208上有导向槽配合固定在准直镜壳体207上的螺钉可上下移动，准直镜壳体207上有PC视窗可查看调节准直的位置，准直镜座208下端有螺牙配合旋转调节件212旋转调节，旋转调节件212的正上方为润滑片211正下方为端面泛塞封213，端面泛塞封213装在底座214上，准直镜组202是由双凸型镜片2021和负弯月型镜片2022准直组合而成，用弹垫和螺纹压圈固定，准直镜组202在准直镜座208内通过旋转调节件212沿Z轴可上下手动调节。
如图3所示为本实用新型的激光头的匀化组件3的结构示意图，匀化组件3包括匀化镜座309和驱动电机308，匀化镜座309用于安装第一匀化镜301，驱动电机308具有平行于所述激光传输光路运动的活动端，所述活动端与匀化镜座309连接。通过该活动端的运动，可以改变第一匀化镜301与光纤接口装置1的距离。作为某些具体可实施的实施例，所述活动端为滚珠丝杠，滚珠丝杠中的螺杆与驱动电机308的输出端通过联轴器相连，所述螺杆平行于述激光传输 光路，滚珠丝杠中的螺母与匀化镜座309连接。通过螺杆的转动，驱使螺母在螺杆的长度方向上移动，从而带动匀化镜座309及其上第一匀化镜301与光纤接口装置1的距离。
在部分实施例中，匀化组件3还包括匀化壳体306和限位传感器310，限位传感器310、匀化镜座309设置在匀化壳体306内，限位传感器310用于检测匀化镜座309在匀化壳体306内的运动极限位置，限位传感器310与驱动电机电性连接。如此设置，可以避免操作失误驱动电机308带动匀化镜座309运动与匀化壳体306发生干涉：当限位传感器310检测到匀化镜座309运动至其在匀化壳体306内的极限位置时，限位传感器310向驱动电机308发生信号，使驱动电机308停止运动。
在部分实施例中，匀化组件3还包括第二匀化镜303，第二匀化镜303设置于第一匀化镜301远离光纤接口装置1的一侧，第二匀化镜303相对所述光纤接口装置1的位置固定。通过增设位置固定的第二匀化镜303，可以进一步提高激光光斑的均匀性。可以理解的，本实用新型的激光头对于第二匀化镜303的数量并不加以限制。在部分实施例中，第二匀化镜303为两个，两个第二匀化镜303沿所述激光传输光路间隔布置。
作为某些具体可实现的实施例，如图3所示，匀化组件3包括第一匀化镜301、第二匀化镜303、隔圈304、镜片压板305、匀化壳体306、电机安装板307、驱动电机308、匀化镜座309、限位传感器310、出水口311；所述第一匀化镜301在靠近准直镜组202下方且可上下可自动调节，第一匀化镜301固定在匀化镜座309上。匀化壳体306内设有为激光传输光路穿过的环形凸台302，环形凸台302将匀化壳体306分为上下分开的第一腔体和第二腔体，第一匀化镜301设于第一腔体内，第二匀化镜303设于第二腔体内。第二腔体内还设有隔圈304 和镜片压板305，隔圈304将其中一个第二匀化镜303压紧在环形凸台上302，镜片压板305将另一个第二匀化镜303压紧在隔圈304上。匀化镜座309与驱动电机308的活动端相连，驱动电机308通过螺钉连接到电机安装板307上，电机安装板307通过螺钉连接到匀化壳体306，出水口311连接在匀化壳体3上，与前述实施例中的准直组件2的冷却进水口215形成水冷回路。
作为某些具体可实现的实施例，如图1所示，合束组件4包括红外测温合束镜401和合束保护镜402以及合束镜壳体，所述合束镜壳体连接在匀化壳体的下方，红外测温合束镜401在所述合束镜壳体内用等高螺钉和弹簧固定，所述合束保护镜402在红外测温合束镜401的右侧用弹性压圈固定。合束组件4与红外测温装置5之间还设置有平反射镜51，具体的，所述平反射镜51在合束保护镜402的右侧及红外测温装置5的下方用平反镜压板和波形弹簧固定，平反射镜51的角度还可调节。由于红外测温装置5的长度方向尺寸远大于其宽度方向尺寸，通过增设平反射镜51，可以改变红外测温光路的方向，使红外测温装置5在与合束镜组件连接时，红外测温装置5的长度方向与激光传输光路大致平行，从而使得整个激光头的外形较为规整，便于安装使用。
作为某些具体可实现的实施例，如图1所示，聚焦组件6包括聚焦壳体、聚焦镜601和聚焦保护镜602；所述聚焦镜601在聚焦壳体内用弹性压圈固定，所述聚焦保护镜603设置在聚焦镜601远离光纤接口装置1的一侧。在部分实施例中，本实用新型的激光头还包括气刀保护装置7，所述气刀保护装置7设置在聚焦保护镜603的左侧。所述气刀保护装置7主要由：进气接口、气流腔体、挡渣板组合而成，所述进气接口与所述气流腔体用螺钉相连接，所述挡渣板靠近所述气流腔体左侧用螺钉相连接。
本实用新型另外一方面公开了一种激光加工系统，包括前述任一所述的激 光头、激光器以及控制模块，所述控制模块分别与所述激光器、所述激光头的所述红外测温装置电性连接。当红外测温装置5检测到加热区域温度不满足预设的温度范围时，其向控制模块发送信号，控制模块接收所述信号向激光器发出提高功率或者降低功率的指令，从而使得加热区域的温度升高或者降低。本实用新型的激光加工系统可以实现对加热材料表面温度的闭环控制，能够以材料所需的加热温度来控制激光器的功率，从而使加热区域的温度恒定，以此来获得更加优异的加工质量。
以上所述实施例的各技术特征可以进行任意的组合，为使描述简洁，未对上述实施例中的各个技术特征所有可能的组合都进行描述，然而，只要这些技术特征的组合不存在矛盾，都应当认为是本说明书记载的范围。
以上所述实施例仅表达了本实用新型的几种实施方式，其描述较为具体和详细，但并不能因此而理解为对实用新型专利范围的限制。应当指出的是，对于本领域的普通技术人员来说，在不脱离本实用新型构思的前提下，还可以做出若干变形和改进，这些都属于本实用新型的保护范围。因此，本实用新型专利的保护范围应以所附权利要求为准。

Claims (10)

  1. 一种激光头，其特征在于，所述激光头包括光纤接口装置、准直组件、匀化组件、聚焦组件、合束组件以及红外测温装置，
    所述光纤接口装置用于与激光器连接以提供激光光源；
    所述光纤接口装置、所述准直组件、所述匀化组件、所述合束组件以及所述聚焦组件呈直线依次布置组成激光传输光路；
    所述准直组件包括准直镜组，所述匀化组件包括第一匀化镜，所述准直镜组、所述第一匀化镜至所述光纤接口装置的距离可变；
    所述红外测温装置设于所述激光传输光路的侧面，所述聚焦组件、所述合束组件以及所述红外测温装置依次组成测温红外线传输光路。
  2. 根据权利要求1所述的激光头，其特征在于，所述准直组件还包括准直镜座、准直壳体和旋转调节件，
    所述准直镜座用于安装所述准直镜组；
    所述准直壳体为中空筒状，所述准直镜座设置在所述准直壳体内且能够沿其轴向运动，所述准直壳体内设置有第一限位件，所述第一限位件限制所述准直镜座在所述准直壳体内旋转；
    所述旋转调节件设置在所述准直壳体内，并且其在所述准直壳体轴向上的位置固定，所述旋转调节件能够以所述准直壳体的轴线为旋转轴发生旋转，所述准直镜座的轴向一端设有螺纹段，所述旋转调节件与所述螺纹段螺纹连接。
  3. 根据权利要求2所述的激光头，其特征在于，所述准直镜座的径向外壁上设置有沿其长度方向延伸的导向槽，所述第一限位件为设置在准直壳体内壁上的限位块，所述限位块被限制在所述导向槽内运动。
  4. 根据权利要求1所述的激光头，其特征在于，所述准直组件还包括准直保护镜组件，所述准直保护镜组件位于所述准直镜组与所述光纤接口装置之间， 所述准直保护镜组件与所述准直镜组可拆卸连接。
  5. 根据权利要求1所述的激光头，其特征在于，所述匀化组件还包括匀化镜座和驱动电机，所述匀化镜座用于安装所述第一匀化镜，所述驱动电机具有平行于所述激光传输光路运动的活动端，所述活动端与所述匀化镜座连接。
  6. 根据权利要求5所述的激光头，其特征在于，所述匀化组件还包括匀化壳体和限位传感器，所述限位传感器、所述匀化镜座设置在所述匀化壳体内，所述限位传感器用于检测所述匀化镜座在所述匀化壳体内的运动极限位置，所述限位传感器与所述驱动电机电性连接。
  7. 根据权利要求1所述的激光头，其特征在于，所述匀化组件还包括第二匀化镜，所述第二匀化镜设置于所述第一匀化镜远离所述光纤接口装置的一侧，所述第二匀化镜相对所述光纤接口装置的位置固定。
  8. 根据权利要求7所述的激光头，其特征在于，所述第二匀化镜为两个，两个所述第二匀化镜沿所述激光传输光路间隔布置。
  9. 根据权利要求8所述的激光头，其特征在于，所述匀化组件还包括匀化壳体，所述匀化壳体内设有为所述激光传输光路穿过的环形凸台，所述环形凸台将所述匀化壳体分为第一腔体和第二腔体，所述第一匀化镜设于所述第一腔体内，所述第二腔体内还设有隔圈和镜片压板，所述隔圈将其中一个所述第二匀化镜压紧在所述环形凸台上，所述镜片压板将另一个所述第二匀化镜压紧在所述隔圈上。
  10. 一种激光加工系统，其特征在于，包括权利要求1-9任一所述的激光头、激光器以及控制模块，所述控制模块分别与所述激光器、所述激光头的所述红外测温装置电性连接。
PCT/CN2022/114772 2022-04-26 2022-08-25 激光头及其激光加工系统 WO2023206879A1 (zh)

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