WO2023203996A1 - Microphone et dispositif de microphone - Google Patents

Microphone et dispositif de microphone Download PDF

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Publication number
WO2023203996A1
WO2023203996A1 PCT/JP2023/013665 JP2023013665W WO2023203996A1 WO 2023203996 A1 WO2023203996 A1 WO 2023203996A1 JP 2023013665 W JP2023013665 W JP 2023013665W WO 2023203996 A1 WO2023203996 A1 WO 2023203996A1
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WO
WIPO (PCT)
Prior art keywords
case
microphone
magnet
vibrating body
soft material
Prior art date
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PCT/JP2023/013665
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English (en)
Japanese (ja)
Inventor
成高 鈴木
和洋 小川
Original Assignee
国立大学法人東北大学
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Application filed by 国立大学法人東北大学 filed Critical 国立大学法人東北大学
Publication of WO2023203996A1 publication Critical patent/WO2023203996A1/fr

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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00

Definitions

  • the present invention relates to a microphone and a microphone device in which a microphone unit is arranged on a base plate.
  • acoustic components such as speakers and microphones are known to have a waterproof and pressure-resistant structure.
  • acoustic components such as speakers and microphones are known to have a waterproof and pressure-resistant structure.
  • a flexible sheet for example, by making the space inside the casing airtight using a flexible sheet to make it waterproof, and by equalizing the pressure applied to the front and back sides of the diaphragm, there is no possibility that the diaphragm will be deformed or damaged.
  • Patent Document 1 A technique for suppressing this is known (Patent Document 1).
  • the present invention was devised in view of the above-mentioned problems, and an object of the present invention is to provide a compact microphone structure that has waterproof and pressure-resistant performance and maintains vibration characteristics in various environments.
  • a vibration characteristic holding mechanism that maintains the vibration characteristics of the vibrating body by a structure that protects the vibrating body in a manner that allows the vibrating body to vibrate.
  • FIG. 1 is a vertical cross-sectional perspective view showing the configuration of a microphone according to a first embodiment.
  • FIG. 7 is a vertical cross-sectional perspective view showing the configuration of a microphone according to a first modification of the first embodiment.
  • FIG. 7 is a vertical cross-sectional perspective view showing the configuration of a second modified example microphone of the first embodiment.
  • FIG. 7 is a vertical cross-sectional perspective view showing the configuration of a microphone according to a second embodiment.
  • FIG. 7 is a vertical cross-sectional perspective view showing the configuration of a microphone according to a modification of the second embodiment.
  • FIG. 7 is a vertical cross-sectional perspective view showing the configuration of a microphone according to a third embodiment.
  • FIG. 1 is a vertical cross-sectional perspective view showing the configuration of a microphone according to a first embodiment.
  • FIG. 7 is a vertical cross-sectional perspective view showing the configuration of a microphone according to a first modification of the first embodiment.
  • FIG. 7 is a vertical cross-section
  • FIG. 7 is a vertical cross-sectional perspective view showing the configuration of a microphone according to a modified example of the third embodiment.
  • FIG. 7 is a left perspective view showing the configuration of a microphone according to a fourth embodiment. It is a right perspective view which shows the structure of the microphone of 4th Embodiment.
  • FIG. 9 is a sectional view taken along the line AA in FIG. 9 and a partially enlarged view thereof.
  • FIG. 9 is a sectional view taken along the line BB in FIG. 9;
  • FIG. 7 is a perspective view showing a state in which a microphone according to a fourth embodiment is attached to a separate device.
  • 13 is a sectional view taken along the line CC in FIG. 12.
  • FIG. 7 is a perspective view showing the external configuration of a microphone according to a fifth embodiment.
  • 15 is a sectional view taken along the line DD in FIG. 14.
  • FIG. FIG. 16 is an enlarged exploded view of the structure supporting the vibrating membrane of FIG. 15; It is a figure showing the state where the microphone of a 5th embodiment is attached to a separate device.
  • a microphone as an embodiment will be described with reference to the drawings.
  • the embodiments shown below are merely illustrative, and there is no intention to exclude the application of various modifications and techniques not specified in the embodiments below.
  • the configuration of this embodiment can be modified and implemented in various ways without departing from the spirit thereof. Further, they can be selected or combined as necessary.
  • the microphone according to this embodiment is an electronic device that converts audio (sound waves) into electrical signals.
  • the microphone according to the present embodiment can be used in various devices having a voice recognition function, such as small wireless terminals such as smartphones, information processing devices (computers), various objects equipped with computers, such as electronic devices, machines such as vehicles, etc. It is applied to devices including guns, and moving objects such as vehicles and aircraft that have microphones installed on the outside exposed to wind and rain.
  • FIG. 1 is a vertical cross-sectional perspective view showing the configuration of a microphone 100 according to the first embodiment.
  • Microphone 100 includes a vibrating body 10, a magnet 20, and a magnetic sensor 30.
  • the vibrating body 10 holds the magnet 20 so that it can vibrate.
  • An example of the vibrating body 10 is a soft material 11, such as gel or rubber.
  • the vibrating body 10 of this embodiment has the magnet 20 laminated on the top surface.
  • the vibrating body 10 vibrates in the same direction as the vibration direction of the magnet 20 in conjunction with the vibration of the magnet 20.
  • the shape of the vibrating body 10 is a cylinder.
  • the magnet 20 is in direct or indirect contact with the vibrating body 10 and can be vibrated by sound waves.
  • a portion of the magnet 20 may be in contact with the external space (outside air) so as to be able to receive sound waves, and the other portion may be in contact with the vibrating body 10.
  • the magnet 20 receives sound waves at the portion that contacts the external space, and vibrates in a direction substantially perpendicular to the direction in which the portion that contacts the external space extends.
  • the magnet 20 of this embodiment has a disk shape, and its lower surface is in direct or indirect contact with the vibrating body 10, and its upper surface is in contact with the external space, so it vibrates up and down depending on the size of the sound wave. .
  • a portion of the magnet 20 and a portion of the vibrating body 10 are in direct or indirect contact with each other.
  • the magnet 20 is attached to the vibrating body 10 with no gas layer on the side opposite to the side receiving the sound waves (driven side, outer surface).
  • the microphone 100 has a layer without gas (a non-gas layer, a non-gas layer, a non-gas region, a non-gas region, a non-gas region, a non-gas region, a non-gas region) on the side opposite to the side of the magnet 20 that receives sound waves. There is a portion where the magnet 20 and the vibrating body 10 contact each other.
  • the vibrating body 10 vibrates in conjunction with the magnet 20, but at the same time, the magnet 20 also vibrates in conjunction with the vibrating body 10, so that the vibration is amplified.
  • the magnet 20 is, for example, a neodymium magnet.
  • the magnet 20 and the vibrating body 10 are, for example, insert molded, they come into direct contact.
  • the magnet 20 and the vibrating body 10 are brought into indirect contact by coating (fixing) the powdered magnet 20 on a part or the entire surface of the vibrating body 10 that contacts the external space using an adhesive or the like. do.
  • the powdered magnet 20 may be fixed to the vibrating body 10 in a disk shape. By using the powdered magnet 20, the inertial force of the magnet 20 can be reduced. In this case as well, the magnet 20 is attached to the vibrating body 10 with no gas layer on the side opposite to the side receiving the sound waves (outer surface).
  • the magnetic sensor 30 is provided at a location away from the outside of the microphone 100, detects magnetic force fluctuations due to vibrations of the magnet 20, and outputs the magnetic force fluctuations as an electrical signal.
  • the magnetic sensor 30 is, for example, a Hall IC or an NVC diamond sensor.
  • the magnetic sensor 30 is separated from the outside of the microphone 100 by laminating the soft material 11 on the magnetic sensor 30 .
  • the magnetic sensor 30 is embedded in the lower part of the soft material 11 . Thereby, the magnetic sensor 30 is liquid-tightly isolated from the outside of the microphone 100 while maintaining a predetermined pressure-resistant state, and has waterproof and pressure-resistant performance.
  • the pressure resistance is assumed to be about 10 atm, but the present invention can be implemented at a pressure resistance depending on the application of the device in which the microphone 100 is installed. In reality, a waterproof performance higher than daily life waterproofing (for example, about 3 atmospheres) is required.
  • the magnet 20 faces the magnetic sensor 30 with the vibrating body 10 in between.
  • the magnet 20 is arranged in a direction in which the magnetic sensor 30 can detect variations in magnetic force.
  • the magnetic sensor 30 is preferably arranged in the direction in which the magnet 20 vibrates (the direction of magnetic flux).
  • the magnetic sensor 30 since the magnet 20 vibrates up and down, the magnetic sensor 30 is arranged on the opposite side of the surface where the magnet 20 contacts the external space, and detects the vibration of the magnet 20 directly or through the vibration of the vibrating body 10. Receive.
  • the microphone 100 is not affected by this kind of influence. Specifically, since no pressure is applied to the vibration direction of the magnet 20 and the vibrating body 10, displacement of the magnet 20 due to the internal pressure of the microphone 100 itself can be prevented, and the vibration of the magnet 20 and the vibrating body 10 is restricted. Therefore, interference with the detection of magnetic force fluctuations by the magnetic sensor 30 can be suppressed. Therefore, high quality acoustic performance can be obtained.
  • mechanism 68 the same structure in the following embodiments is also referred to as a vibration characteristic holding mechanism 68.
  • the basic structure consisting of the vibrating body 10, the magnet 20, and the magnetic sensor 30 that constitutes the microphone 100 may be referred to as a microphone unit 100.
  • the microphone unit is arranged on the upper surface of the base plate 50.
  • the base plate 50 is a rigid member for supporting the microphone unit.
  • a structure in which a microphone unit 100 is arranged on a base plate 50 is referred to as a microphone device 101.
  • the magnetic sensor 30 is electrically connected to an electronic device board (not shown) at the bottom of the base plate 50 by soldering or the like (electrical connection 40).
  • the electrical connection 40 is embedded in the base plate 50. Thereby, the electrical connection 40 is separated from the outside of the microphone 100 in a liquid-tight manner, so that it has waterproof and pressure-resistant performance.
  • FIG. 2 is a vertical cross-sectional perspective view showing the configuration of a microphone 100 according to a first modification of the first embodiment.
  • the first modification differs from the microphone 100 of the first embodiment in that it includes a diaphragm 12. The differences will be mainly explained below.
  • the same reference numerals as those used in the first embodiment are the same or substantially similar.
  • a diaphragm 12 is further laminated on the magnet 20.
  • the diaphragm 12 assists the magnet 20 in operating with sound pressure.
  • the diaphragm 12 is arranged so as to be in contact with the upper side of the magnet 20, that is, the part of the magnet 20 that contacts the external space, and receives sound waves.
  • the diaphragm 12 may be placed below the magnet 20, that is, between the magnet 20 and the vibrating body 10.
  • the diaphragm 12 is preferably a flat plate that is larger than the magnet 20 in order to easily receive the sound waves. Thereby, sound waves can be collected with higher sensitivity than the magnet 20 alone.
  • the diaphragm 12 comes into contact with the external space, it is preferably made of a material that is not only rigid enough to receive sound waves with good sensitivity, but also able to withstand pressure from the outside.
  • the diaphragm 12 is made of lightweight metal such as aluminum or magnesium, or resin.
  • the magnet 20 is attached to the vibrating body 10 with no gas layer on the side opposite to the side receiving the sound waves (outer surface).
  • FIG. 3 is a vertical cross-sectional perspective view showing the configuration of a microphone 100 according to a second modification of the first embodiment.
  • the second modification differs from the microphone 100 of the first embodiment in that the soft material 11 encloses a liquid.
  • the differences will be mainly explained below.
  • the same reference numerals as those used in the first embodiment are the same or substantially similar.
  • the soft material 11 further encloses the liquid 13.
  • the soft material 11 has a space of an appropriate shape and size therein, and a liquid 13 is sealed therein.
  • the liquid 13 is used to adjust the vibration sensitivity of the soft material 11.
  • the liquid 13 is sealed with a soft material 11 so as not to come into contact with the magnetic sensor 30.
  • the liquid 13 is, for example, water/alcohol, and preferably has a viscosity of 0.5 to 50 mPa ⁇ s.
  • the liquid 13 is appropriately selected depending on the type of the soft material 11 with which it comes into contact.
  • the amount of liquid 13 is determined as appropriate depending on the vibration sensitivity.
  • the magnet 20 shown in FIG. 3 may further include a diaphragm 12. In this case as well, the magnet 20 is attached to the vibrating body 10 with no gas layer on the side opposite to the side receiving the sound waves (outer surface).
  • FIG. 4 is a vertical cross-sectional perspective view showing the configuration of the microphone 100 according to the second embodiment.
  • the second embodiment is different from the microphone 100 of the first embodiment (including modified examples) in that it includes a case 60 that encloses a soft material 11.
  • the differences will be mainly explained below.
  • the same reference numerals as those used in the first embodiment (including modified examples) are the same or substantially similar.
  • the microphone 100 of the second embodiment further includes a case 60 that encloses the soft material 11.
  • the case 60 protects the entire microphone unit and restricts the operation of the magnet 20 when sound pressure is applied in a direction that is effective for the magnetic sensor 30. This stabilizes the vibration direction of the magnet 20.
  • the case 60 is a rigid body, such as plastic or metal.
  • the case 60 has a cylindrical shape, encloses the soft material 11, and the side surface of the soft material 11 is in contact with the inner surface of the case 60.
  • Case 60 has a height greater than or equal to the height of soft material 11 in the loading direction of soft material 11 and magnet 20 .
  • the soft material 11 and the case 60 are at the same height.
  • the magnet 20 is attached to the vibrating body 10 with no gas layer on the side opposite to the side receiving the sound waves (outer surface).
  • FIG. 5 is a vertical cross-sectional perspective view showing the configuration of a microphone 100 according to a modification of the second embodiment. This modification differs from the microphone 100 of the second embodiment in the height of the case.
  • the case 60r of the modified microphone 100 has a height greater than the height of the soft material 11 in the loading direction of the soft material 11 and the magnet 20.
  • the case 60r encloses the vibrating body 10 and increases the amplitude of the sound wave inside a portion extending above the magnet 20. Therefore, the case 60r of this modification may be referred to as a case 60r with a resonance tube.
  • the shape of the resonance tube-equipped case 60r of this modification is a cylindrical shape in which the side surface containing the soft material 11 extends upward.
  • FIG. 5 shows an example including the diaphragm 12 and the liquid 13, it is not necessary to provide both or one of the diaphragm 12 and the liquid 13. In this case as well, the magnet 20 is attached to the vibrating body 10 with no gas layer on the side opposite to the side receiving the sound waves (outer surface).
  • FIG. 6 is a vertical cross-sectional perspective view showing the configuration of the microphone 100 according to the third embodiment.
  • the third embodiment is characterized in that, in contrast to the microphone 100 of the first embodiment (including modified examples), an NVC diamond sensor is particularly used as the magnetic sensor.
  • an NVC diamond sensor is particularly used as the magnetic sensor.
  • the microphone 100 of the third embodiment includes a case 60 in addition to a soft material 11 and a magnet 20 that is in contact with the soft material 11 and can vibrate by sound waves.
  • the magnetic sensor 30 of this embodiment includes an NVC diamond sensor 31, a green LED light emitting section 32, and a light receiving section 33.
  • the basic structure consisting of these three parts 31, 32, 33 may be called an NVC diamond sensor unit.
  • the case 60 has the soft material 11 laminated on its upper surface and contains the magnetic sensor 30 therein. Thereby, the magnetic sensor 30 is liquid-tightly isolated from the outside of the microphone while maintaining a predetermined pressure-resistant state, and waterproof and pressure-resistant performance is maintained.
  • Case 60 is a rigid body.
  • a magnet 20 is laminated on the upper surface of the soft material 11. Magnet 20 faces NVC diamond sensor 31 with soft material 11 in between.
  • the NVC diamond sensor 31 of this embodiment is installed upright in the same direction as the direction in which the magnet 20 vibrates. In this embodiment, the proportion of the soft material 11 in the entire microphone 100 is small. The size of the soft material 11 is selected depending on the required sensitivity of the NVC diamond sensor 31.
  • the NVC diamond sensor unit which is the magnetic sensor 30, is connected to the side of the case 60 that faces the upper surface on which the soft material 11 is laminated.
  • the NVC diamond unit also includes an NVC diamond sensor 31 , a green LED light emitting section 32 that inputs light to the NVC diamond sensor 31 , and a light receiving section 33 that can detect light emission from the NVC diamond sensor 31 .
  • the NVC diamond sensor 31 is arranged between the green LED light emitting section 32 and the light receiving section 33.
  • NVC of the NVC diamond sensor 31 is an abbreviation for Nitrogen Vacancy Center.
  • NVC is a defect in which carbon (C) adjacent to the structure in the diamond crystal lattice is replaced with nitrogen (N) and vacancy (V), respectively.
  • NVC exhibits a magnetic property called spin when it captures electrons and becomes negatively charged.
  • Diamond has a wide band gap due to its strong bonds, and has the property of not releasing captured electrons even when high energy of several hundred degrees Celsius or more is applied to it. This helps stabilize the spin, and normally cooling is required to maintain the quantum state, but NVC can maintain the quantum state even at room temperature.
  • NVC In NVC, captured electrons easily react to slight variations in the electrical, magnetic, and optical properties of their surroundings. In addition to its atomic-like functionality, NVC has photoluminescent properties that absorb and emit colored photons. Irradiation with light or microwaves changes the state of the center, and the spin of the electrons changes accordingly. NVC emits different amounts of red light depending on the state of its electrons. Such light contains quantum information about magnetic and electric fields, and can be used in a variety of sensing applications that handle minute information, such as biosensing, neural imaging, object detection, and position sensing (GPS).
  • GPS position sensing
  • the NVC diamond sensor 31 of this embodiment has an I-shape, diamond particles are arranged in recesses on both sides, and magnetism is detected in the entire recess. The number of diamond particles is adjusted depending on the required sensitivity.
  • the green LED light emitting part 32 and the light receiving part 33 each have a convex part formed on the side surface facing the NVC diamond sensor 31, which can fit into a concave part of the NVC diamond sensor 31. By forming the three parts 31, 32, and 33 into such a shape, it is possible to achieve good detection and to realize a compact microphone 100.
  • the green light emitted from the green LED light emitting unit 32 passes through the NVC diamond sensor, it changes to red due to the change in the magnetic strength of the magnet 20 detected by the recessed part of the NVC diamond sensor 31.
  • the brightness of the red light changes according to changes in the magnetic strength of the magnet 20.
  • the intensity of the light output from the NVC diamond sensor 31 is detected by a light receiving section (photodiode) 33.
  • the NVC diamond sensor 31, the green LED light emitting section 32, and the light receiving section 33 are each electrically connected to an electronic device board (not shown) at the bottom of the base plate 50 (electrical connection 40).
  • the space in which the magnet 20 and the NVC diamond sensor 31 are arranged is separated by the case 60, that is, there is no gas layer between the magnet 20 and the case 60.
  • the characteristics of the vibrating body 10 are affected by the expansion and contraction of the gas due to changes in the environment of the external space, and this effect is absorbed by the magnet 20 and the NVC diamond sensor. 31, but the microphone 100 according to this embodiment is not affected by this kind of influence.
  • no pressure is applied to the vibration direction of the magnet 20 and the vibrating body 10, so that displacement of the magnet 20 due to internal pressure can be prevented, and the vibration of the magnet 20 and the soft material 11 is not restricted. Interference with the detection of magnetic force fluctuations by the sensor 31 can be suppressed. Therefore, high quality acoustic performance can be obtained.
  • FIG. 7 is a vertical cross-sectional perspective view showing the configuration of a microphone 100 according to a modification of the third embodiment. In FIG. 7, this modification differs from the microphone 100 of the third embodiment in the position of the soft material 11 laminated on the case 60.
  • the case 60 has a soft material 11 laminated on its side surface and encloses the magnetic sensor 30.
  • the magnetic sensor 30 is liquid-tightly isolated from the outside of the microphone while maintaining a predetermined pressure-resistant state, and waterproof and pressure-resistant performance is maintained.
  • Case 60 is a rigid body.
  • a magnet 20 is laminated on the upper surface of the soft material 11.
  • the magnet 20 faces the side surface of the NVC diamond sensor 31 with the soft material 11 in between.
  • the NVC diamond sensor 31 of this embodiment is installed vertically to the direction in which the magnet 20 vibrates.
  • the NVC diamond sensor unit which is the magnetic sensor 30, is connected to the side of the case 60 that is perpendicular to the side surface on which the soft material 11 is laminated.
  • the NVC diamond sensor 31 can detect slight fluctuations in the surrounding electrical, magnetic, and optical characteristics, so it can detect vibrations of the magnet 20 even if it is in a position perpendicular to the magnet 20. can be detected.
  • the fourth embodiment will be described with reference to FIGS. 8 to 13.
  • the fourth embodiment is different from the microphones of the first to third embodiments (including modified examples) in that the structure of the case and the positions of the magnet and the magnetic sensor are different. Below, the description will focus on the feature points. In the description of the fourth embodiment, the same reference numerals as those used in the first to third embodiments (including modifications) are the same or substantially similar.
  • FIG. 8 is a left perspective view showing the configuration of the microphone 100 of the fourth embodiment.
  • FIG. 9 is a right perspective view showing the configuration of the microphone 100 of the fourth embodiment.
  • the microphone 100 further includes a first case 61 and a second case 62.
  • the first case 61 and the second case 62 are provided with holes that communicate with the external space.
  • the first case 61 and the second case 62 have the same shape, and the first case 61 is provided with three small circular holes, and the second case 62 is provided with three small circular holes. And one circular hole larger than the small circles is provided in the middle of these small circles.
  • the positions of the small circular holes in the cases 61 and 62 coincide with each other.
  • the first case 61 and the second case 62 each have a recess of the same size formed on one side, and the positions of the recesses match (see FIG. 10).
  • the case of the microphone 100 is formed by making the concave portions face each other and tightly fitting the outer circumferences of the surfaces of the first case 61 and the second case 62 on which the concave portions are provided over the entire circumference.
  • the microphone unit is arranged on the upper surface of the base plate 50.
  • the lower portions of the first case 61 and the second case 62 are surrounded by a waterproof seal member 63.
  • the seal member 63 will be described later.
  • the magnetic sensor 30 is attached to either the first case 61 or the second case 62, and is subjected to waterproof and pressure-resistant treatment 64, thereby maintaining a predetermined pressure-resistant state and being liquid-tight with the outside of the microphone 100.
  • the magnetic sensor 30 may be placed in the direction in which the magnet 20 vibrates (the magnetic flux direction), and the position where the magnetic sensor 30 is attached may be outside or inside the cases 61 and 62. In this embodiment, the magnetic sensor 30 is attached to the outside of the first case 61.
  • the magnetic sensor 30 When the magnetic sensor 30 is installed inside the cases 61 and 62 (internal space), the magnetic sensor 30 may be installed on the side where the part receiving the sound waves of the magnet 20 exists, with the vibrating membrane 14 in between. , may be installed on the side where the relevant part does not exist (see FIG. 10).
  • the sensor part and the amplifier part of the magnetic sensor 30 are molded with resin and have a waterproof structure
  • the waterproof pressure-resistant treatment 64 is applied to the electrical connection 40 and the electrical connection of the magnetic sensor 30. It is applied to the parts related to the connection 40. If the sensor section and the amplifier section of the magnetic sensor 30 do not have a waterproof structure, the entire magnetic sensor 30 may be provided with this.
  • the waterproof and pressure-resistant treatment 64 there is a method of sealing and waterproofing, for example, by insert molding an elastic material such as resin, rubber, or elastomer.
  • the waterproof and pressure-resistant treatment 64 be performed to the extent that the same level of strength as the cases 61 and 62 can be obtained.
  • the magnetic sensor 30 may be covered with a rigid body.
  • FIG. 10 is a sectional view taken along the line AA in FIG. 9 and a partially enlarged view thereof.
  • a vibrating body 10 that directly or indirectly contacts a magnet 20 that receives sound waves taken in through the holes is arranged in the internal spaces of the cases 61 and 62.
  • An example of the vibrating body 10 is a diaphragm 12, which in the example shown in FIG. 10 is laminated under the magnet 20 (inside the cases 61 and 62).
  • the diaphragm 12 is connected to cases 61 and 62 via a diaphragm 14.
  • the vibrating body 10 of this embodiment is the diaphragm 12 sandwiched between the first case 61 and the second case 62, inside the first case 61 and the second case 62. Further, the side of the diaphragm 12 facing the first case 61 communicates with the outside of the first case through a hole provided in the first case 61, and the side facing the second case 62 of the diaphragm 12 communicates with the outside of the first case through a hole provided in the first case 61. The opposing side communicates with the outside of the second case 62 via a hole provided in the second case.
  • the vibrating membrane 14 is sandwiched between the first case 61 and the second case 62, and is contained in the internal space formed by the first case 61 and the second case 62. This is the structure that will be used. Thereby, the vibration of the vibrating membrane 14 is allowed while being protected by the first case 61 and the second case 62.
  • the vibrating membrane 14 freely deforms and receives sound waves. Since the ends of the vibrating membrane 14 are held between the cases 61 and 62, the internal space formed by the first case 61 and the second case 62 is divided into two spaces by the vibrating membrane 14. Since the vibrating membrane 14 is connected to the external space through the hole, it is preferably made of a material that can withstand external pressure, such as PVC film. Since the vibrating membrane 14 is arranged parallel to the cases 61 and 62, the magnet 20 receives the sound waves input through the holes and vibrates in a direction substantially perpendicular to the direction in which the cases 61 and 62 are installed.
  • a part of the inner wall of the internal space constituted by the first case 61 and the second case 62 is a smooth curved shape.
  • the internal space has a disk shape, and its cross section and longitudinal section are elliptical.
  • the magnet 20 and the magnetic sensor 30 are separated by the case 61, and since the case 61 is provided with a hole, a gas layer exists.
  • the holes provided in the cases 61, 62 cause the internal space of the cases 61, 62 to be reduced to the external space.
  • the expanded gas in the inner space flows out to the outer space through the hole.
  • the backup structure 65 supports the entire vibrating membrane 14, so that the vibrating membrane 14 will not be damaged. The influence on the connected diaphragm 12 and magnet 20 can be reduced.
  • the backup structure 65 and the damage prevention structure including the backup structure 65 are also referred to as the vibration characteristic retention mechanism 68 in order to maintain the normal vibration characteristics of the vibrating body 10.
  • FIG. 11 is a sectional view taken along the line BB in FIG. 9.
  • the magnetic sensor 30 placed outside the first case 61 detects magnetic force fluctuations of the magnet 20 in the internal space.
  • the electrical connection 40 of the magnetic sensor 30 extends from inside the main body of the magnetic sensor 30 to the bottom of the first case 61 and is connected to an electronics board (not shown) at the bottom of the base plate 50.
  • the magnet 20, the diaphragm 12, and the diaphragm 14 can receive sound waves even when water flows in through the holes and comes into contact with water, and the performance after water removal does not deteriorate.
  • FIG. 12 is a perspective view showing a state in which the microphone 100 of the fourth embodiment is attached to a separate device. As shown in FIG. 12, the microphone 100 is connected to a casing (attachment destination casing) 70 to be incorporated. Although the object into which the microphone 100 is installed is not limited to a specific device, this embodiment will be described using an electronic device as an example.
  • FIG. 13 is a sectional view taken along the line CC in FIG. 12.
  • the sealing member 63 of the microphone 100 is in contact with the casing 70 to which it is attached. That is, the microphone 100 is fitted into the attachment destination housing 70 at the seal member 63.
  • the seal member 63 prevents water from entering the space where the electrical connection 40 of the magnetic sensor 30 is arranged. Damage to the connection 40 can be prevented.
  • the electrical connection 40 of this embodiment is not subjected to waterproof and pressure-resistant treatment 64, it may be subjected to waterproof and pressure-resistant treatment 64 in order to further improve safety.
  • the fifth embodiment will be described with reference to FIGS. 14 to 17.
  • the fifth embodiment is different from the microphones of the first to fourth embodiments (including modified examples) in that the shape of the case, the backup structure, and the manufacturing process are different. Below, the description will focus on the feature points.
  • the same reference numerals as those used in the first to fourth embodiments (including modifications) are the same or substantially similar.
  • FIG. 14 is a perspective view showing the external configuration of the microphone 100 of the fifth embodiment.
  • the microphone 100 has a case 60'.
  • a hole communicating with the external space is provided on the upper surface of the case 60'.
  • two circular holes are provided on the upper surface of the case 60', and a sealing member 63' is installed along the circumference of each hole.
  • the sealing member 63' is a member that comes into close contact with the mounting casing 70 when the microphone 100 (microphone device 101) is mounted on a separate device (see FIG. 17).
  • the case 60' is arranged to cover the upper surface of the base plate 50, and a space is formed between the case 60' and the base plate 50.
  • FIG. 15 is a sectional view taken along the line DD in FIG. 14. As shown in FIG. 15, on the upper surface of the base plate 50, a mechanism (vibration characteristic holding mechanism) 68 for supporting the vibrating body 10, a magnetic sensor 30, and an IC 41 are arranged.
  • FIG. 16 is an enlarged exploded view of the vibration characteristic holding mechanism 68 of FIG. 15.
  • the vibration characteristic holding mechanism 68 includes a vibrating body 10 , a pair of support members 66 that support the vibrating body 10 , and a pedestal 67 that supports the vibrating body 10 and the pair of support members 66 .
  • the pair of support members 66 includes an upper support member 66a and a lower support member 66b. Recesses of the same size are formed on one side of the upper support member 66a and the lower support member 66b, and the positions of the recesses match. The recess is a portion that faces the magnet 20' when the vibrating membrane 14 is held, and is provided with a hole that communicates with the internal space and external space of the case 60'. In this embodiment, the pair of support members 66 have the same shape and are provided with the same number of holes of the same size.
  • the vibrating membrane 14 is supported from above and below by the upper support member 66a and the lower support member 66b, with the recesses of the upper support member 66a and the lower support member 66b facing each other. Since the pair of support members 66 are fabricated, for example, by liquid erosion, it is desirable to use a material with a certain level of strength.
  • an example of the vibrating body 10 is the vibrating membrane 14.
  • a magnet 20' is attached to the vibrating membrane 14.
  • the vibrating membrane 14 has a magnet 20' magnetized to a magnetic material formed in the central portion thereof.
  • the magnet 20' is provided on the side of the vibrating membrane 14 facing the external space, but may also be provided on the side of the case 60' facing the internal space.
  • the magnet 20' of the vibrating membrane 14 is positioned within the space formed by the recesses of the pair of support members 66.
  • the upper and lower surfaces of both ends of the vibrating membrane 14 are held between surfaces other than the recesses of the upper support member 66a and the lower support member 66b.
  • the side of the vibrating membrane 14 facing the upper support member 66a communicates with the internal space and the external space of the case 60' through a hole provided in the upper support member 66a, and faces the lower support member 66b of the vibrating membrane 14.
  • the side communicates with the internal space and external space of the case 60' through a hole provided in the lower support member 66b.
  • the vibrating membrane 14 and the magnet 20' which have received sound waves through the holes of the pair of support members 66, freely vibrate while being supported by the pair of support members 66.
  • a vibrating membrane 14 with a magnet 20' is disposed in a space formed between a pair of supporting members 66, and is sandwiched between upper and lower sides by the pair of supporting members 66. . Thereby, the vibration of the vibrating membrane 14 is allowed while being protected by the upper support member 66a and the lower support member 66b.
  • the pedestal 67 is composed of a pair of left and right pillars, and supports the backup structure 65' at its lower part.
  • the pedestal 67 is, for example, a silicon substrate (silicon structure).
  • the backup structure 65' and the vibration characteristic holding mechanism 68 including the backup structure 65' maintain the normal vibration characteristics of the vibrating body 10.
  • the vibration characteristic holding mechanism 68 is manufactured by, for example, MEMS (Micro Electro Mechanical Systems) processing. With this manufacturing method, the size of the vibration characteristic holding mechanism 68 can be reduced, so the overall size of the microphone 100 (microphone device 101) can be reduced, and as a result, costs can be reduced. In this embodiment, the size of the microphone device 101 shown in FIG. 15 is approximately 4 mm in length, 2 mm in width, and 1.5 mm in height.
  • the vibration characteristic holding mechanism 68 is assembled on the base plate 50 together with the magnetic sensor 30 and the IC 41 by soldering or the like.
  • the magnetic sensor 30 is arranged between two columns of the pedestal 67.
  • the magnetic sensor 30 and the IC 41 are coupled by an electrical connection 40 pre-wired within the base plate 50 and can exchange electrical signals.
  • the electrical connection 40 is embedded in the base plate 50 and is separated from the outside of the microphone 100 in a liquid-tight manner, so that it has waterproof and pressure-resistant performance.
  • a waterproof coating is applied to the components mounted on the base plate 50 to prevent electrical short circuits between the components when submerged in water.
  • the waterproof coating may be a water-repellent coating as long as it satisfies the function.
  • the components placed on the base plate 50 are enclosed in the internal space formed by the base plate 50 and the case 60' and are protected from the outside.
  • the case 60' is provided with two communication holes 63', one of which is placed directly above the vibrating membrane 14 and functions as a sound hole for transmitting sound waves to the vibrating membrane 14.
  • the other hole is set as a drainage hole in case of flooding, and its size is determined by the required drainage capacity.
  • the number of holes is arbitrary, and if the sound hole is integrated with the water drain hole, the number of holes may be one or more.
  • the upper support member 66a of the backup structure 65' also functions as a protective structure for the vibrating membrane 14 against sharp objects inserted through the sound hole.
  • FIG. 17 is a diagram showing a state in which the microphone 100 (microphone device 101) of this embodiment is attached to a separate device.
  • the microphone device 101 is installed on a base plate 71 including an electrical connection structure (not shown) to which it is assembled (attached), and the case 60' is connected to the housing 70 to which it is attached.
  • the mounting casing 70 is provided with holes corresponding to the sound hole and water drain hole of the microphone 100, and the sealing member 63' is in close contact with the circumference of the hole of the mounting casing 70, thereby sealing the microphone 100.
  • the device 101 can be reliably connected to the installation casing 70.
  • the microphone 100 includes a vibrating body 10, a magnet 20 that can vibrate in conjunction with the vibrating body using sound waves, and a magnetic sensor 30 that outputs magnetic force fluctuations due to the vibration of the magnet 20 as an electric signal.
  • the structure in which the magnet 20 vibrates with sound waves and the magnetic sensor 30 detects magnetic force fluctuations due to the vibration of the magnet 20 is new.
  • the microphone 100 has a vibration characteristic retention mechanism that includes a non-gas layer or has a structure that protects the vibrator 10 in a manner that allows the vibrator 10 to vibrate. As a result, waterproof and pressure-resistant performance can be maintained, so that the vibrating body 10 will not be damaged even if the environment changes, and therefore high acoustic performance can be achieved.
  • the vibrating body 10 is made of a soft material 11, and the magnet 20 is laminated on the upper surface, and the magnetic sensor 30 is separated from the outside of the microphone 100 by laminating the soft material 11 on the magnetic sensor 30. Ru.
  • the soft material 11 allows magnetic force fluctuations caused by the vibrations of the magnet 20 to be reliably transmitted to the magnetic sensor 30, and the soft material 11 makes the magnetic sensor 30 waterproof and pressure resistant, allowing the microphone to be used safely even in environments with water. be able to. Further, since the microphone 100 has a small number of parts, it can be configured compactly. In addition, since there is no gas layer between the magnet 20 and the magnetic sensor 30, the vibration characteristic retention mechanism also has negative effects (damage, deterioration, etc.), and the normal vibration characteristics of the vibrating body 10 are maintained.
  • the microphone 100 further includes a diaphragm 12 laminated on the magnet 20. Thereby, sound waves can be detected with higher sensitivity.
  • the soft material 11 encloses the liquid 13. Thereby, the sensitivity of the vibrating body 10 can be adjusted.
  • the microphone 100 further includes a case 60r that has a height larger than the height of the soft material 11 in the loading direction of the soft material 11 and the magnet 20, and encloses the soft material 11.
  • the amplitude of the sound waves can be increased inside the portion extending above the magnet 20, so that weakly vibrating sound waves can be reliably detected.
  • the vibrating body 10 is a soft material 11, and the microphone 100 further includes a case 60 in which the soft material 11 is laminated on the upper surface, and a case 60 is separated from the outside of the microphone 100 by enclosing a magnetic sensor 30.
  • 30 is connected to the side facing the upper surface of the case 60, and includes an NVC diamond sensor 31, a green LED light emitting section 32 that inputs light to the NVC diamond sensor 31, and a light receiving section 33 that can detect light emission from the NVC diamond sensor 31. including.
  • the vibration characteristic holding mechanism does not have an adverse effect on the magnet 20, the vibrating body 10, and the NVC diamond sensor 31 due to expansion and contraction of the gas in the internal space. , the normal vibration characteristics of the vibrating body 10 are maintained.
  • the vibrating body 10 is a soft material 11, and the microphone 100 further includes a case in which the soft material is laminated on the side surface and the magnetic sensor is enclosed in the case to separate the microphone 100 from the outside, is connected to a side perpendicular to the side surface of the case, and includes an NVC diamond sensor, a green LED light emitting section that inputs light to the NVC diamond sensor, and a light receiving section capable of detecting light emission from the NVC diamond sensor. .
  • the vibration characteristic holding mechanism does not have an adverse effect on the magnet 20, the vibrating body 10, and the NVC diamond sensor 31 due to expansion and contraction of the gas in the internal space. , the normal vibration characteristics of the vibrating body 10 are maintained.
  • the microphone 100 further includes a first case 61 and a second case 62, and the vibrating body 10 is arranged inside the first case 61 and the second case 62.
  • the diaphragm 12 is sandwiched between a diaphragm 61 and a second case 62, and the magnetic sensor 30 is attached to either the first case 61 or the second case and is subjected to waterproof and pressure-resistant treatment 64.
  • the microphone 100 is separated from the outside.
  • the diaphragm 12 is protected by the cases 61 and 62 to prevent damage, and the magnetic sensor 30 is subjected to waterproof and pressure-resistant treatment 64, so the microphone can be used safely even in environments with water.
  • the vibration characteristic retention mechanism allows the vibrating body 10 to vibrate while being protected by the first case 61 and the second case 62 due to the backup structure 65.
  • the magnet 20, the vibrating body 10, and the magnetic sensor 30 are not adversely affected by the pressure from the external space and the normal vibration characteristics of the vibrating body 10 are maintained.
  • the side of the diaphragm 12 facing the first case 61 communicates with the outside of the first case 61 through the hole provided in the first case 61, and
  • the side facing 62 communicates with the outside of second case 62 through a hole provided in second case 62 .
  • the inner wall of the boundary portion between the first case 61 and the second case 62 in the internal space formed by the first case 61 and the second case 62 has a curved shape.
  • the vibration characteristic holding mechanism includes a pair of support members 66 that support the vibrating membrane 14 with the magnet 20 attached, and a backup structure 65 in which the vibrating membrane 14 is disposed in a space formed between the pair of support members 66. ′.
  • the vibrating body 10 consisting of the vibrating membrane 14 and the support member 66 have a MEMS structure. Thereby, the microphone 100 can be made significantly more compact, and costs can also be reduced.
  • a communication hole is formed in the portion of the support member 66 that faces the magnet 20. Thereby, sound waves can be transmitted to the vibrating membrane 14 and the magnet 20 disposed on the pair of support members 66.
  • the magnet 20 is in direct or indirect contact with the vibrating body 10. Thereby, the magnet 20 and the vibrating body 10 can vibrate as a unit.
  • the magnetic sensor 30 is provided at a location away from the outside of the microphone 100, detects magnetic force fluctuations due to vibrations of the magnet 20, and outputs the magnetic force fluctuations as an electrical signal. Thereby, the magnetic sensor 30 is protected from the outside of the microphone 100, so the performance of the magnetic sensor 30 does not deteriorate.
  • the microphone device 101 includes a base plate 1 and a microphone unit disposed on the base plate, and the microphone unit has the configuration described in (1) to (14) above. Thereby, the microphone unit 100 can be stably installed at any location.
  • the microphone according to all embodiments has waterproof and pressure-resistant performance, maintains vibration characteristics in various environments, and has a compact structure, so it can be installed in a variety of different devices.
  • the components of the microphone 100 can take various shapes.
  • the shape of the magnet 20 is shown as a disk, and in the figure, the vibrating body 10 is shown as a cylinder or a prism, but the shape is not limited to these shapes.
  • the case 60 has various shapes such as a cylinder, a square, and an ellipse, but is not limited to these shapes.
  • the vibrating body 10 and the magnet 20 may have different shapes.
  • the thickness of the soft material 11 can be changed as appropriate.
  • the shape of the resonance tube-equipped case 60r may be a shape that widens upward or a shape that narrows toward the top.
  • the shapes of the parts 31, 32, and 33 of the NVC diamond sensor unit are also not limited to the above.
  • the shapes of the first case 61 and the second case 62 and the size and number of holes provided therein can be arbitrarily selected.
  • the magnetic sensor 30 is not limited to Hall IC and NVC diamond sensors, and other sensors capable of detecting changes in magnetic force may be used.
  • the mounting position of the magnetic sensor 30 is not limited to the above example as long as the magnetic force fluctuation of the magnet 20 can be received.
  • any position inside the vibrating body 10 in the third embodiment, any position inside the case 60, and in the fourth embodiment, the inside of the first case 61 or the second case 62. It may be attached to.
  • the shapes and positions of the holes on the cases 60, 60', 61, 62 and the seal members 63, 63' may be determined as appropriate depending on the housing 70 to which the microphone 100 (microphone device 101) is attached.
  • a vibrating body a magnet capable of vibrating in conjunction with the vibrating body by sound waves; a magnetic sensor that outputs magnetic force fluctuations due to vibrations of the magnet as an electrical signal; a vibration characteristic retention mechanism that retains the vibration characteristics of the vibrating body by a structure that includes a non-gas layer or protects the vibrating body in a manner that allows the vibrating body to vibrate; equipped with a microphone.
  • the vibrating body is made of a soft material, and the magnet is laminated on the upper surface,
  • the magnetic sensor is separated from the outside of the microphone by laminating the soft material on the magnetic sensor,
  • the vibration characteristic holding mechanism has a structure in which the magnet includes the non-gas layer on the side opposite to the side receiving the sound wave.
  • Appendix 5 further comprising a case that has a height greater than the height of the soft material in the loading direction of the soft material and the magnet, and that encloses the soft material;
  • the vibrating body is made of a soft material, further comprising a case in which the soft material is laminated on an upper surface and the magnetic sensor is enclosed therein to separate the microphone from the outside;
  • the vibration characteristic holding mechanism has a structure in which the non-gas layer is provided on a side opposite to a side where the magnet receives sound waves,
  • the magnetic sensor is connected to a side of the case facing the upper surface, and includes an NVC diamond sensor, a green LED light emitting section that inputs light to the NVC diamond sensor, and a light receiving section that can detect light emission from the NVC diamond sensor. including The microphone described in Appendix 1.
  • the vibrating body is made of a soft material, further comprising a case in which the soft material is laminated on a side surface and the magnetic sensor is enclosed in the case to separate the microphone from the outside;
  • the vibration characteristic retention mechanism is a structure that maintains normal vibration characteristics of the vibrating body due to the presence of the non-gas layer,
  • the magnetic sensor is connected to a side of the case perpendicular to the side surface, and includes an NVC diamond sensor, a green LED light emitting section that inputs light to the NVC diamond sensor, and a light receiving section that can detect light emission from the NVC diamond sensor. including The microphone described in Appendix 1.
  • the vibrating body is a diaphragm sandwiched between the first case and the second case inside the first case and the second case
  • the magnetic sensor is attached to either the first case or the second case, and is separated from the outside of the microphone by being subjected to waterproof and pressure-resistant treatment
  • the vibration characteristic holding mechanism includes the backup structure that encloses the vibrating body in an internal space formed by the first case and the second case.
  • a side of the diaphragm facing the first case communicates with the outside of the first case via a hole provided in the first case
  • a side of the diaphragm facing the second case communicates with the outside of the second case through a hole provided in the second case.
  • an inner wall portion of a boundary portion between the first case and the second case in the internal space is configured with a curved surface shape;
  • the vibrating body comprises a vibrating membrane;
  • the magnet is attached to the vibrating membrane and configured to be able to vibrate by sound waves, and
  • the vibration characteristic holding mechanism includes a pair of support members that support the vibration membrane with the magnet, and the backup structure that arranges the vibration membrane in a space formed between the pair of support members,
  • the vibrating body made of the vibrating membrane and the supporting member have a MEMS (Micro Electro Mechanical Systems) structure.
  • Appendix 12 A communication hole is formed in a portion of the support member facing the magnet; The microphone described in Appendix 11.
  • microphone unit 101 microphone device 10 vibrating body 11 soft material 12 diaphragm 13 liquid 14 diaphragm 20 magnet 30 magnetic sensor 31 NVC diamond sensor 32 green LED light emitting section 33 light receiving section 40 electrical connection 41 IC 50
  • Base plate 60 60' Case 60r Case with resonance tube 61 First case 62 Second case 63, 63' Seal member 64 Waterproof and pressure-resistant treatment 65, 65' Backup structure 66 Pair of support members 66a Upper support member 66b Lower support Member 67 Pair of pedestals 68 Vibration characteristic retention mechanism 70 Mounting casing

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Details Of Audible-Bandwidth Transducers (AREA)
  • Audible-Bandwidth Dynamoelectric Transducers Other Than Pickups (AREA)

Abstract

Ce microphone (100) comprend : un corps vibrant (10) ; un aimant (20) capable de vibrer conjointement avec le corps vibrant en raison d'une onde sonore ; un capteur magnétique (30) pour délivrer sous forme de signal électrique, un changement de force magnétique en raison de la vibration de l'aimant ; et un mécanisme de retenue de caractéristique de vibration (68) pour maintenir la caractéristique de vibration du corps vibrant à l'aide d'une structure qui est pourvue d'une couche non gazeuse ou qui protège le corps vibrant de telle sorte que le corps vibrant est capable de vibrer.
PCT/JP2023/013665 2022-04-19 2023-03-31 Microphone et dispositif de microphone WO2023203996A1 (fr)

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PCT/JP2022/018228 WO2023203654A1 (fr) 2022-04-19 2022-04-19 Microphone
JPPCT/JP2022/018228 2022-04-19

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PCT/JP2023/013665 WO2023203996A1 (fr) 2022-04-19 2023-03-31 Microphone et dispositif de microphone

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52138916A (en) * 1976-05-17 1977-11-19 Ichikoh Industries Ltd Microphone applying hall element
JPS5915399A (ja) * 1982-07-16 1984-01-26 Canon Inc 振動検出装置
JP2002055683A (ja) * 2000-08-08 2002-02-20 Foster Electric Co Ltd 電磁型音響変換器

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003274487A (ja) * 2002-03-15 2003-09-26 Teruhiro Makino 電気音響変換器
JP5367534B2 (ja) * 2009-10-27 2013-12-11 ホシデン株式会社 電磁型電気音響変換器

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52138916A (en) * 1976-05-17 1977-11-19 Ichikoh Industries Ltd Microphone applying hall element
JPS5915399A (ja) * 1982-07-16 1984-01-26 Canon Inc 振動検出装置
JP2002055683A (ja) * 2000-08-08 2002-02-20 Foster Electric Co Ltd 電磁型音響変換器

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