WO2023199658A1 - Multilayer substrate - Google Patents

Abstract

According to the present invention, the centers of a plurality of first columnar conductors, the centers of a plurality of second columnar conductors, the centers of a plurality of third columnar conductors, and the centers of a plurality of fourth columnar conductors are arranged side by side at a prescribed pitch in first to fourth rows extending in the X-axis direction. The second row is positioned more in the Y-axis negative direction than the first row. The fourth row is positioned more in the Y-axis negative direction than the third row. When viewed in the Z-axis direction, a plurality of first X-axis positions indicating positions, on the X-axis, of the centers of the plurality of first columnar conductors, and a plurality of second X-axis positions indicating positions, on the X-axis, of the centers of the plurality of second columnar conductors, are alternately arranged side by side in the X-axis direction. When viewed in the Z-axis direction, a plurality of third X-axis positions indicating positions, on the X-axis, of the centers of the plurality of second columnar conductors, and a plurality of fourth X-axis positions indicating positions, on the X-axis, of the centers of the plurality of fourth columnar conductors, are alternately arranged side by side in the X-axis direction.

Description

multilayer board

The present invention relates to a multilayer substrate including a signal conductor layer.

As an invention related to a conventional multilayer board, for example, a transmission line described in Patent Document 1 is known. This transmission line includes a signal line, two ground conductors, and a plurality of GND vias. The signal line extends in the front-rear direction. The signal line is located between two ground conductors in the vertical direction. A plurality of GND vias electrically connects two ground conductors. Some of the GND vias among the plurality of GND vias are lined up in the front-rear direction on the left of the signal line. Further, the remaining GND vias among the plurality of GND vias are arranged in the front-rear direction on the right side of the signal line.

Japanese Patent Application Publication No. 2010-28306

By the way, in the transmission line described in Patent Document 1, it is desired to suppress noise from being radiated to the outside of the transmission line and from entering the inside of the transmission line (hereinafter referred to as improving shielding performance). I have a request.

Therefore, an object of the present invention is to provide a multilayer board that can improve shielding performance.

A multilayer substrate according to one embodiment of the present invention includes:
A laminate having a structure in which a plurality of insulator layers are stacked in the Z-axis direction;
a first signal conductor layer provided on the laminate and having a linear shape when viewed in the Z-axis direction;
a first ground conductor layer located in the negative direction of the Z-axis from the first signal conductor layer and overlapping with the first signal conductor layer when viewed in the Z-axis direction;
Penetrating in the Z-axis direction the insulator layer located in the negative direction of the Z-axis from the first signal conductor layer, and located in the positive direction of the Z-axis from the first ground conductor layer. A plurality of first columnar conductors, a plurality of second columnar conductors, a plurality of third columnar conductors, and a plurality of fourth columnar conductors,
It is equipped with
The direction in which the first signal conductor layer extends is defined as the X-axis direction,
A direction perpendicular to the X-axis direction and the Z-axis direction is defined as the Y-axis direction,
The plurality of first columnar conductors, the plurality of second columnar conductors, the plurality of third columnar conductors, and the plurality of fourth columnar conductors are electrically connected to the first ground conductor layer,
When viewed in the Z-axis direction, the centers of the plurality of first columnar conductors are located in the positive direction of the Y-axis from the first signal conductor layer, and are arranged at a predetermined pitch in a first row extending in the X-axis direction. They are lined up,
When viewed in the Z-axis direction, the centers of the plurality of second columnar conductors are located in the positive direction of the Y-axis relative to the first signal conductor layer, and are located in the predetermined second row extending in the X-axis direction. lined up on the pitch,
When viewed in the Z-axis direction, the centers of the plurality of third columnar conductors are located in the negative direction of the Y-axis from the first signal conductor layer, and are arranged in the predetermined third row extending in the X-axis direction. lined up on the pitch,
When viewed in the Z-axis direction, the centers of the plurality of fourth columnar conductors are located in the negative direction of the Y-axis from the first signal conductor layer, and are located in the fourth row extending in the X-axis direction. lined up on the pitch,
The second column is located in the negative direction of the Y axis from the first column,
The fourth column is located in the negative direction of the Y axis from the third column,
When viewed in the Z-axis direction, a plurality of first X-axis positions indicating the positions of the centers of the plurality of first columnar conductors on the X-axis, and a plurality of first X-axis positions indicating the positions of the centers of the plurality of second columnar conductors on the X-axis. The second X-axis positions are arranged alternately in the X-axis direction,
A plurality of third X-axis positions indicating the positions of the centers of the plurality of third columnar conductors on the X-axis and a third X-axis position indicating the positions of the centers of the plurality of fourth columnar conductors on the X-axis when viewed in the Z-axis direction. The 4X-axis positions are arranged alternately in the X-axis direction,
The distance from the third X-axis position to the first X-axis position closest to the third X-axis position among the plurality of first X-axis positions is the distance from the third X-axis position to the first X-axis position among the plurality of second X-axis positions. shorter than the distance to the second X-axis position closest to the third X-axis position,
The distance from the fourth X-axis position to the second X-axis position closest to the fourth X-axis position among the plurality of second X-axis positions is the distance from the fourth X-axis position to the second X-axis position among the plurality of first X-axis positions. It is shorter than the distance to the first X-axis position closest to the fourth X-axis position.

According to the multilayer substrate according to the present invention, it is possible to improve shielding performance.

FIG. 1 is an exploded perspective view of the multilayer substrate 10. FIG. 2 is a top view of the insulator layer 16c of the multilayer substrate 10. FIG. 3 is a cross-sectional view of the multilayer substrate 10. FIG. 4 is a front view of the multilayer substrate 10 in use. FIG. 5 is a top view of the insulator layer 16c of the multilayer substrate 10a. FIG. 6 is a top view of the insulator layer 16c of the multilayer substrate 10b. FIG. 7 is a top view of the insulator layer 16c of the multilayer substrate 10c. FIG. 8 is a top view of the insulator layer 16c of the multilayer substrate 10d. FIG. 9 is a top view of the insulator layer 16c of the multilayer substrate 10e. FIG. 10 is a top view of the insulator layer 16c of the multilayer substrate 10f. FIG. 11 is a top view of the insulator layer 16c of the multilayer substrate 10g. FIG. 12 is an exploded view of the multilayer substrate 10h. FIG. 13 is a cross-sectional view of the multilayer substrate 10h. FIG. 14 is an exploded perspective view of the multilayer substrate 10i.

(Embodiment)
[Structure of multilayer board]
The structure of a multilayer substrate 10 according to an embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is an exploded perspective view of the multilayer substrate 10. FIG. 2 is a top view of the insulator layer 16c of the multilayer substrate 10. FIG. 3 is a cross-sectional view of the multilayer substrate 10. In FIG. 3, a cross section perpendicular to the left-right direction is shown. FIG. 4 is a front view of the multilayer substrate 10 in use. Note that in FIGS. 1 and 2, only representative columnar conductors v11 to v14 among the plurality of columnar conductors v11 to v14 are given reference numerals.

In this specification, direction is defined as follows. The stacking direction of the stacked body 12 of the multilayer substrate 10 is defined as the vertical direction. Further, the up-down direction coincides with the Z-axis direction. The upward direction is the positive direction of the Z axis. The downward direction is the negative direction of the Z axis. Further, the direction in which the signal conductor layer 20 of the multilayer substrate 10 extends is defined as the left-right direction. The left-right direction coincides with the X-axis direction. The left-right direction is perpendicular to the up-down direction. Further, a direction perpendicular to the up-down direction and the left-right direction is defined as the front-back direction. The front-back direction coincides with the Y-axis direction. Note that the upper and lower directions in the vertical direction may be interchanged, the left and right directions in the horizontal direction may be interchanged, and the front and rear directions in the longitudinal direction may be interchanged.

First, the structure of the multilayer substrate 10 will be described with reference to FIG. 1. Multilayer substrate 10 transmits high frequency signals. The multilayer substrate 10 is used to electrically connect two circuits in electronic devices such as smartphones. As shown in FIG. 1, the multilayer board 10 includes a laminate 12, protective layers 18a, 18b, a signal conductor layer 20, ground conductor layers 22, 24, 28, 30, 32, 34, signal terminals 26a, 26b, and columnar conductors. It includes v1, v2 and a plurality of columnar conductors v11 to v14.

The laminate 12 has a plate shape. Therefore, the laminate 12 has an upper main surface and a lower main surface. The upper main surface and the lower main surface of the laminate 12 have a rectangular shape with long sides extending in the left-right direction. Therefore, the length of the laminate 12 in the left-right direction is longer than the length of the laminate 12 in the front-rear direction. The laminate 12 has flexibility.

As shown in FIG. 1, the laminate 12 has a structure in which insulator layers 16a to 16d are stacked in the vertical direction (Z-axis direction). The insulator layers 16a to 16d are arranged in this order from top to bottom. Each of the insulator layers 16a to 16d has an upper main surface and a lower main surface. The material of the insulator layers 16a to 16d is thermoplastic resin. The thermoplastic resin is, for example, a liquid crystal polymer.

A high frequency signal is transmitted to the signal conductor layer 20. The signal conductor layer 20 (first signal conductor layer) is provided in the laminate 12. In this embodiment, the signal conductor layer 20 is located on the upper main surface of the insulator layer 16c. The signal conductor layer 20 has a linear shape extending in the left-right direction when viewed in the up-down direction (Z-axis direction). In this embodiment, the signal conductor layer 20 has a linear shape.

The ground conductor layer 22 is provided on the laminate 12, as shown in FIG. The ground conductor layer 22 (fifth ground conductor layer) is located above the signal conductor layer 20 (first signal conductor layer) (in the positive direction of the Z-axis), and when viewed in the vertical direction (Z-axis direction), It overlaps with the conductor layer 20 (first signal conductor layer). In this embodiment, the ground conductor layer 22 is located on the upper main surface of the insulator layer 16a. Furthermore, the ground conductor layer 22 covers substantially the entire upper main surface of the insulator layer 16a. A ground potential is connected to the ground conductor layer 22 .

The ground conductor layer 24 is provided on the laminate 12, as shown in FIG. The ground conductor layer 24 (first ground conductor layer) is located below the signal conductor layer 20 (first signal conductor layer) (in the negative direction of the Z-axis), and when viewed in the vertical direction (Z-axis direction), It overlaps with the conductor layer 20 (first signal conductor layer). In this embodiment, the ground conductor layer 24 is located on the lower main surface of the insulator layer 16d. Further, the ground conductor layer 24 covers substantially the entire lower main surface of the insulator layer 16d. A ground potential is connected to the ground conductor layer 24. The signal conductor layer 20, ground conductor layer 22, and ground conductor layer 24 as described above have a strip line structure.

The ground conductor layers 28 and 30 are provided on the laminate 12, as shown in FIG. The ground conductor layers 28 and 30 are located on the upper main surface of the insulator layer 16b. The ground conductor layer 28 is located before the signal conductor layer 20. The ground conductor layer 30 is located after the signal conductor layer 20. The ground conductor layers 28 and 30 have a linear shape extending in the left-right direction.

The ground conductor layers 32 and 34 are provided on the laminate 12, as shown in FIG. The ground conductor layers 32 and 34 are located on the upper main surface of the insulator layer 16c. Therefore, the vertical positions of the ground conductor layers 32 and 34 are the same as the vertical positions of the signal conductor layer 20. The ground conductor layer 32 is located before the signal conductor layer 20. The ground conductor layer 34 is located after the signal conductor layer 20. The ground conductor layers 32 and 34 have a linear shape extending in the left-right direction.

The signal terminal 26a is provided at the left end of the laminate 12. More specifically, the signal terminal 26a is located on the upper main surface of the insulator layer 16a. The signal terminal 26a overlaps the left end portion of the signal conductor layer 20 when viewed in the vertical direction. The signal terminal 26a has a rectangular shape when viewed in the vertical direction. The signal terminal 26a is an external terminal to which a high frequency signal is input/output. The signal terminal 26a is not in contact with the ground conductor layer 22.

The columnar conductor v1 electrically connects the signal terminal 26a and the left end portion of the signal conductor layer 20. More specifically, the columnar conductor v1 vertically penetrates the insulator layers 16a and 16b. The upper end of the columnar conductor v1 is in contact with the signal terminal 26a. The lower end of the columnar conductor v1 is in contact with the left end of the signal conductor layer 20. The structures of the signal terminal 26b and the columnar conductor v2 are bilaterally symmetrical to the structures of the signal terminal 26a and the columnar conductor v1, so a description thereof will be omitted.

When viewed in the vertical direction (Z-axis direction), the centers of the plurality of columnar conductors v11 are located in front of the signal conductor layer 20 (in the positive direction of the Y-axis), as shown in FIG. The centers of the plurality of columnar conductors v11 are arranged at a predetermined pitch P0 in a first row L1 extending in the left-right direction (X-axis direction). The plurality of columnar conductors v11 have a structure in which four columnar conductors that vertically penetrate the insulator layers 16a to 16d are connected in the vertical direction. Thereby, the plurality of columnar conductors v11 electrically connect the ground conductor layer 22, the ground conductor layer 24, the ground conductor layer 28, and the ground conductor layer 32.

Here, each of the plurality of columnar conductors v11 includes a columnar conductor v11c. The plurality of columnar conductors v11c (first columnar conductors) penetrate in the vertical direction (Z-axis direction) through the insulator layer 16c located below the signal conductor layer 20 (first signal conductor layer) (in the negative direction of the Z-axis). are doing. Thereby, the plurality of columnar conductors v11c (first columnar conductors) are located above the ground conductor layer 24 (first ground conductor layer) (in the positive direction of the Z-axis). When viewed in the vertical direction (Z-axis direction), the centers of the plurality of columnar conductors v11c (first columnar conductors) are located in front of the signal conductor layer 20 (first signal conductor layer) (in the positive direction of the Y-axis), Further, they are arranged at a predetermined pitch P0 in a first row L1 extending in the left-right direction (X-axis direction).

As mentioned above, the plurality of columnar conductors v11c (first columnar conductors) are a part of the plurality of columnar conductors v11, so the ground conductor layer 22 (first ground conductor layer) and the ground conductor layer 24 (fifth ground conductor layer) ) is electrically connected to the Further, the upper ends (ends in the positive direction of the Z axis) of the plurality of columnar conductors v11c (first columnar conductors) are in contact with the ground conductor layer 32 (second ground conductor layer). Therefore, the plurality of columnar conductors v11c are electrically connected to the ground conductor layer 32.

As seen in the vertical direction (Z-axis direction), the centers of the plurality of columnar conductors v12 are located in front of the signal conductor layer 20 (in the positive direction of the Y-axis), as shown in FIG. The centers of the plurality of columnar conductors v12 are arranged at a predetermined pitch P0 in a second row L2 extending in the left-right direction (X-axis direction). The second row L2 is located after the first row L1 (in the negative direction of the Y-axis). As shown in FIG. 3, the plurality of columnar conductors v12 have a structure in which four columnar conductors vertically vertically penetrate through the insulating layers 16a to 16d. Thereby, the plurality of columnar conductors v12 electrically connect the ground conductor layer 22 and the ground conductor layer 24.

Here, each of the plurality of columnar conductors v12 includes a columnar conductor v12c. The plurality of columnar conductors v12c (second columnar conductors) penetrate in the vertical direction (Z-axis direction) through the insulator layer 16c located below the signal conductor layer 20 (first signal conductor layer) (in the negative direction of the Z-axis). are doing. Thereby, the plurality of columnar conductors v12c (first columnar conductors) are located above the ground conductor layer 24 (first ground conductor layer) (in the positive direction of the Z-axis). When viewed in the vertical direction (Z-axis direction), the centers of the plurality of columnar conductors v12c (second columnar conductors) are located before the signal conductor layer 20 (first signal conductor layer) (in the positive direction of the Y-axis), Moreover, they are arranged at a predetermined pitch P0 in a second row L2 extending in the left-right direction (X-axis direction).

As mentioned above, the plurality of columnar conductors v12c (second columnar conductors) are a part of the plurality of columnar conductors v12, so the ground conductor layer 22 (fifth ground conductor layer) and the ground conductor layer 24 (first ground conductor layer) ) is electrically connected to. Further, the upper ends (ends in the positive direction of the Z axis) of the plurality of columnar conductors v12c (second columnar conductors) are in contact with the ground conductor layer 32 (second ground conductor layer). Therefore, the plurality of columnar conductors v12c are electrically connected to the ground conductor layer 32.

In addition, as shown in FIG. 2, a plurality of first X-axis positions indicate the positions of the centers of the plurality of columnar conductors v11c (first columnar conductors) in the left-right direction (X-axis) when viewed in the vertical direction (Z-axis direction). p1 and a plurality of second X-axis positions p2 indicating the positions of the centers of the plurality of columnar conductors v12c (second columnar conductors) in the left-right direction (X-axis direction) are arranged alternately in the left-right direction (X-axis direction). In this embodiment, the plurality of first X-axis positions p1 and the plurality of second X-axis positions p2 are arranged alternately in the left-right direction (X-axis direction) at a pitch that is half the predetermined pitch P0.

Also, the columnar conductor v12c (second columnar conductor) closest to the columnar conductor v11c (first columnar conductor) among the plurality of columnar conductors v12c (second columnar conductors) from the center of the columnar conductor v11c (first columnar conductor) The distance l1 to the center is longer than the distance d11 in the left-right direction (Y-axis direction) between the first row L1 and the second row L2. From the center of the columnar conductor v11c (first columnar conductor) to the center of the columnar conductor v12c (second columnar conductor) closest to the columnar conductor v11c (first columnar conductor) among the plurality of columnar conductors v12c (second columnar conductors) The distance l1 is longer than the diameter r1 of the columnar conductor v11c (first columnar conductor) and the diameter r2 of the columnar conductor v12c (second columnar conductor). In this embodiment, the diameter r2 is equal to the diameter r1.

As seen in the vertical direction (Z-axis direction), the centers of the plurality of columnar conductors v13 are located behind the signal conductor layer 20 (in the negative direction of the Y-axis), as shown in FIG. The centers of the plurality of columnar conductors v13 are arranged at a predetermined pitch P0 in a third row L3 extending in the left-right direction (X-axis direction). As shown in FIG. 3, the plurality of columnar conductors v13 have a structure in which four columnar conductors that vertically penetrate the insulator layers 16a to 16d are connected in the vertical direction. Thereby, the plurality of columnar conductors v13 electrically connect the ground conductor layer 22, the ground conductor layer 24, the ground conductor layer 30, and the ground conductor layer 34.

Here, each of the plurality of columnar conductors v13 includes a columnar conductor v13c. The plurality of columnar conductors v13c (third columnar conductors) penetrate in the vertical direction (Z-axis direction) through the insulator layer 16c located below the signal conductor layer 20 (first signal conductor layer) (in the negative direction of the Z-axis). are doing. Thereby, the plurality of columnar conductors v13c (third columnar conductors) are located above the ground conductor layer 24 (first ground conductor layer) (in the positive direction of the Z-axis). When viewed in the vertical direction (Z-axis direction), the centers of the plurality of columnar conductors v13c (third columnar conductors) are located after the signal conductor layer 20 (first signal conductor layer) (in the negative direction of the Y-axis), Further, they are arranged at a predetermined pitch P0 in a third row L3 extending in the left-right direction (X-axis direction).

As mentioned above, the plurality of columnar conductors v13c (third columnar conductor) are a part of the plurality of columnar conductors v13, so the ground conductor layer 22 (first ground conductor layer) and the ground conductor layer 24 (fifth ground conductor layer) ) is electrically connected to the Further, the upper ends (ends in the positive direction of the Z axis) of the plurality of columnar conductors v13c (third columnar conductors) are in contact with the ground conductor layer 34. Therefore, the plurality of columnar conductors v13c are electrically connected to the ground conductor layer 34.

As seen in the vertical direction (Z-axis direction), the centers of the plurality of columnar conductors v14 are located behind the signal conductor layer 20 (in the negative direction of the Y-axis), as shown in FIG. The centers of the plurality of columnar conductors v14 are arranged at a predetermined pitch P0 in a fourth row L4 extending in the left-right direction (X-axis direction). The fourth row L4 is located after the third row L3 (in the negative direction of the Y-axis). The distance d2 in the left-right direction (Y-axis direction) between the second row L2 and the fourth row L4 is equal to the distance d1 in the left-right direction (Y-axis direction) between the first row L1 and the third row L3. Furthermore, the distance L13 in the left-right direction (Y-axis direction) between the signal conductor layer 20 (first signal conductor layer) and the third row L3 is equal to the distance L13 between the signal conductor layer 20 (first signal conductor layer) and the second row L2. It is equal to the distance L12 in the left-right direction (Y-axis direction). The distance L14 in the left-right direction (Y-axis direction) between the signal conductor layer 20 (first signal conductor layer) and the fourth row L4 is the distance L14 in the left-right direction (Y-axis direction) between the signal conductor layer 20 (first signal conductor layer) and the first row L1. It is equal to the distance L11 (in the Y-axis direction). As shown in FIG. 3, the plurality of columnar conductors v14 have a structure in which four columnar conductors vertically vertically penetrate through the insulator layers 16a to 16d. Thereby, the plurality of columnar conductors v14 electrically connect the ground conductor layer 22 and the ground conductor layer 24.

Here, each of the plurality of columnar conductors v14 includes a columnar conductor v14c. The plurality of columnar conductors v14c (fourth columnar conductors) penetrate in the vertical direction (Z-axis direction) through the insulator layer 16c located below the signal conductor layer 20 (first signal conductor layer) (in the negative direction of the Z-axis). are doing. Thereby, the plurality of columnar conductors v14c (fourth columnar conductor) are located above the ground conductor layer 24 (first ground conductor layer) (in the positive direction of the Z-axis). When viewed in the vertical direction (Z-axis direction), the centers of the plurality of columnar conductors v14c (fourth columnar conductor) are located after the signal conductor layer 20 (first signal conductor layer) (in the negative direction of the Y-axis), Further, they are arranged at a predetermined pitch P0 in a fourth row L4 extending in the left-right direction (X-axis direction).

As mentioned above, the plurality of columnar conductors v14c (fourth columnar conductor) are a part of the plurality of columnar conductors v14, so the ground conductor layer 22 (fifth ground conductor layer) and the ground conductor layer 24 (first ground conductor layer) ) is electrically connected to the Further, the upper ends (ends in the positive direction of the Z axis) of the plurality of columnar conductors v14c (fourth columnar conductors) are in contact with the ground conductor layer 34. Therefore, the plurality of columnar conductors v14c are electrically connected to the ground conductor layer 34.

In addition, as shown in FIG. 2, a plurality of third X-axis positions indicate the positions of the centers of the plurality of columnar conductors v13c (third columnar conductors) in the left-right direction (X-axis) when viewed in the vertical direction (Z-axis direction). p3 and a plurality of fourth X-axis positions p4 indicating the positions of the centers of the plurality of columnar conductors v14c (fourth columnar conductors) in the left-right direction (X-axis) are arranged alternately in the X-axis direction. In this embodiment, the plurality of third X-axis positions p3 and the plurality of fourth X-axis positions p4 are alternately arranged in the X-axis direction at a pitch that is half the predetermined pitch P0.

Furthermore, the plurality of columnar conductors v13c (third columnar conductors) overlap with the plurality of columnar conductors v11c (first columnar conductors) when viewed in the front-back direction (Y-axis direction). That is, the third X-axis position p3 matches the first X-axis position p1. The columnar conductor v14c (fourth columnar conductor) overlaps with the columnar conductor v12c (second columnar conductor) when viewed in the front-rear direction (Y-axis direction). That is, the fourth X-axis position p4 coincides with the second X-axis position p2.

Also, the columnar conductor v14c (fourth columnar conductor) closest to the columnar conductor v13c (third columnar conductor) among the plurality of columnar conductors v14c (fourth columnar conductor) from the center of the columnar conductor v13c (third columnar conductor). The distance l2 to the center is longer than the distance d12 in the left-right direction (Y-axis direction) between the third row L3 and the fourth row L4. From the center of columnar conductor v13c (third columnar conductor) to the center of columnar conductor v14c (fourth columnar conductor) closest to columnar conductor v13c (third columnar conductor) among the plurality of columnar conductors v14c (fourth columnar conductor) The distance l2 is longer than the diameter r3 of the columnar conductor v13c (third columnar conductor) and the diameter r4 of the columnar conductor v14c (fourth columnar conductor). In this embodiment, the diameter r4 is equal to the diameter r3.

The ground conductor layers 22, 24, 28, 30, 32, 34 and signal terminals 26a, 26b as described above are formed by etching metal foil provided on the upper or lower main surface of the insulator layers 16a to 16d, for example. It is formed by applying The metal foil is, for example, copper foil.

Further, the columnar conductors v1, v2, v11 to v14 are, for example, via hole conductors. The via hole conductor is manufactured by forming through holes in the insulator layers 16a to 16d, filling the through holes with conductive paste, and sintering the conductive paste. The material of the columnar conductors v1, v2, v11 to v14 is a mixture of resin and metal.

The protective layer 18a covers the upper main surface of the laminate 12. Thereby, the protective layer 18a protects the ground conductor layer 22. However, the protective layer 18a is provided with openings h1 to h6. The opening h1 overlaps the signal terminal 26a when viewed in the vertical direction. Thereby, the signal terminal 26a is exposed to the outside from the multilayer substrate 10. The opening h2 is located in front of the opening h1. A portion of the ground conductor layer 22 is exposed to the outside from the multilayer substrate 10 through the opening h2. The opening h3 is located after the opening h1. A portion of the ground conductor layer 22 is exposed to the outside from the multilayer substrate 10 via the opening h3. Thereby, a portion of the ground conductor layer 22 functions as a ground terminal. Note that the structure of the openings h4 to h6 is symmetrical to the structure of the openings h1 to h3, so a description thereof will be omitted.

The protective layer 18b covers the lower main surface of the laminate 12. Thereby, the protective layer 18b protects the ground conductor layer 24. The protective layers 18a and 18b are, for example, resist layers.

The multilayer substrate 10 as described above has flexibility. Therefore, as shown in FIG. 4, the multilayer substrate 10 can be bent. Specifically, the multilayer substrate 10 has a first section A1, a second section A2, and a third section A3. The first section A1, the second section A2, and the third section A3 are arranged in this order from left to right when the multilayer substrate 10 is not bent. The second section A2 is bent downward with respect to the first section A1. On the other hand, the first section A1 and the third section A3 are not bent. However, the first section A1 and the third section A3 may be slightly bent. In this case, the radius of curvature of the first section A1 and the radius of curvature of the third section A3 are larger than the radius of curvature of the second section A2. Note that the multilayer substrate 10 may be bent due to elastic deformation, may be bent due to plastic deformation, or may be bent due to elastic deformation and plastic deformation.

[effect]
According to the multilayer substrate 10, it is possible to improve shielding performance. More specifically, as a method for improving the shielding performance of the transmission line described in Patent Document 1, for example, shortening the pitch of the plurality of GND vias in the front-rear direction can be mentioned. In this case, problems arise in that the insulator layer peels off and that it becomes more difficult to manufacture the transmission line.

Therefore, in the multilayer substrate 10, the plurality of columnar conductors v11c and the plurality of columnar conductors v12c are arranged in a zigzag pattern. Specifically, when viewed in the vertical direction, the centers of the plurality of columnar conductors v11c are lined up in the first row L1 at a predetermined pitch P0. When viewed in the vertical direction, the centers of the plurality of columnar conductors v12c are lined up in the second row L2 at a predetermined pitch P0. The second row L2 is located after the first row L1. Furthermore, when viewed in the vertical direction, a plurality of first X-axis positions p1 indicating the positions in the left-right direction of the centers of the plurality of columnar conductors v11c, and a plurality of second X-axis positions indicating the positions in the left-right direction of the centers of the plurality of columnar conductors v12c. p2 are arranged alternately in the left and right direction. By arranging the plurality of columnar conductors v11c and the plurality of columnar conductors v12c in a zigzag pattern, the columnar conductors v11c and columnar conductors v12c in the left-right direction can be arranged without shortening the distance l1 from the center of the columnar conductor v11c to the center of the columnar conductor v12c. You can shorten the distance between As a result, it becomes difficult for noise to pass between the columnar conductor v11c and the columnar conductor v12c. Therefore, according to the multilayer substrate 10, it is possible to improve shielding performance. Furthermore, since it is not necessary to shorten the distance l1 from the center of the columnar conductor v11c to the center of the columnar conductor v12c, it is possible to suppress the occurrence of peeling in the insulator layers 16a to 16d, and also to reduce the difficulty in manufacturing the multilayer substrate 10. It is difficult to become sexually active.

In the multilayer substrate 10, the plurality of columnar conductors v13c and the plurality of columnar conductors v14c are arranged in a zigzag pattern, similar to the plurality of columnar conductors v11c and the plurality of columnar conductors v12c. Thereby, according to the multilayer substrate 10, it is possible to improve shielding performance. Furthermore, it is possible to suppress the occurrence of peeling in the insulating layers 16a to 16d, and the difficulty in manufacturing the multilayer substrate 10 is less likely to increase.

In the multilayer substrate 10, deviation of the characteristic impedance generated in the signal conductor layer 20 from a predetermined characteristic impedance is suppressed. More specifically, the columnar conductor v11c is located in front of the columnar conductor v12c. The columnar conductor v13c is located in front of the columnar conductor v14c. The columnar conductor v13c overlaps the columnar conductor v11c when viewed in the left-right direction. The columnar conductor v14c overlaps with the columnar conductor v12c when viewed in the left-right direction. Therefore, the distance between the columnar conductor v11c and the columnar conductor v13c and the distance between the columnar conductor v12c and the columnar conductor v14c become close values. As a result, the sum of the capacitance that occurs between the signal conductor layer 20 and the columnar conductor v11c, the capacitance that occurs between the signal conductor layer 20 and the columnar conductor v13c, and the capacitance that occurs between the signal conductor layer 20 and the columnar conductor v12c. The sum of the capacitance generated between the signal conductor layer 20 and the columnar conductor v14c becomes close to the total value. As a result, the characteristic impedance generated in the signal conductor layer 20 in the section where the columnar conductors v11c and v13c are provided is close to the characteristic impedance generated in the signal conductor layer 20 in the section where the columnar conductors v12c and v14c are provided. It will take a value. Therefore, in the multilayer substrate 10, deviation of the characteristic impedance generated in the signal conductor layer 20 from a predetermined characteristic impedance (for example, 50Ω) is suppressed.

In particular, in the multilayer substrate 10, the distance d2 in the left-right direction between the second row L2 and the fourth row L4 is equal to the distance d1 in the left-right direction between the first row L1 and the third row L3. The sum of the capacitance generated between the signal conductor layer 20 and the columnar conductor v11c, the capacitance generated between the signal conductor layer 20 and the columnar conductor v13c, and the capacitance generated between the signal conductor layer 20 and the columnar conductor v12c. The sum of the capacitance and the capacitance generated between the signal conductor layer 20 and the columnar conductor v14c becomes closer to each other. As a result, the characteristic impedance generated in the signal conductor layer 20 in the section where the columnar conductors v11c and v13c are provided and the characteristic impedance generated in the signal conductor layer 20 in the section where the columnar conductors v12c and v14c are provided are further increased. The values will be close to each other. Therefore, in the multilayer substrate 10, deviation of the characteristic impedance generated in the signal conductor layer 20 from a predetermined characteristic impedance is effectively suppressed.

In the multilayer substrate 10, the distance L13 in the left-right direction (Y-axis direction) between the signal conductor layer 20 (first signal conductor layer) and the third row L3 is the distance L13 between the signal conductor layer 20 (first signal conductor layer) and the second row L3. It is equal to the distance L12 in the left-right direction (Y-axis direction) from L2. The distance L14 in the left-right direction (Y-axis direction) between the signal conductor layer 20 (first signal conductor layer) and the fourth row L4 is the distance L14 in the left-right direction (Y-axis direction) between the signal conductor layer 20 (first signal conductor layer) and the first row L1. It is equal to the distance L11 (in the Y-axis direction). As a result, the sum of the capacitance generated between the signal conductor layer 20 and the columnar conductor v11c, the capacitance generated between the signal conductor layer 20 and the columnar conductor v13c, and the capacitance generated between the signal conductor layer 20 and the columnar conductor v12c. The sum of the capacitance generated between the signal conductor layer 20 and the columnar conductor v14c becomes equal. As a result, the characteristic impedance generated in the signal conductor layer 20 in the section where the columnar conductors v11c and v13c are provided is equal to the characteristic impedance generated in the signal conductor layer 20 in the section where the columnar conductors v12c and v14c are provided. Become. Therefore, in the multilayer substrate 10, deviation of the characteristic impedance generated in the signal conductor layer 20 from a predetermined characteristic impedance is suppressed.

In the multilayer substrate 10, the signal conductor layer 20 has a linear shape. As a result, the length of the signal conductor layer 20 is shortened, so that the DC resistance value of the signal conductor layer 20 is reduced.

(First modification)
A multilayer substrate 10a according to a first modification will be described below with reference to the drawings. FIG. 5 is a top view of the insulator layer 16c of the multilayer substrate 10a.

The multilayer substrate 10a differs from the multilayer substrate 10 in that the signal conductor layer 20 is meandering. The meandering period is a predetermined pitch P0. Thereby, the distance L111 from the signal conductor layer 20 to the columnar conductor v11c becomes equal to the distance L113 from the signal conductor layer 20 to the columnar conductor v13c. The distance L112 from the signal conductor layer 20 to the columnar conductor v12c is equal to the distance L114 from the signal conductor layer 20 to the columnar conductor v14c. As a result, the sum of the capacitance generated between the signal conductor layer 20 and the columnar conductor v11c, the capacitance generated between the signal conductor layer 20 and the columnar conductor v13c, and the capacitance generated between the signal conductor layer 20 and the columnar conductor v12c. The sum of the capacitance generated between the signal conductor layer 20 and the columnar conductor v14c becomes equal. As a result, the characteristic impedance generated in the signal conductor layer 20 in the section where the columnar conductors v11c and v13c are provided is equal to the characteristic impedance generated in the signal conductor layer 20 in the section where the columnar conductors v12c and v14c are provided. Become. Therefore, in the multilayer substrate 10a, deviation of the characteristic impedance generated in the signal conductor layer 20 from a predetermined characteristic impedance is suppressed. Note that the other structure of the multilayer substrate 10a is the same as that of the multilayer substrate 10, so a description thereof will be omitted.

(Second modification)
A multilayer substrate 10b according to a second modification will be described below with reference to the drawings. FIG. 6 is a top view of the insulator layer 16c of the multilayer substrate 10b.

In the multilayer board 10b, the plurality of columnar conductors v13c do not overlap with the plurality of columnar conductors v11c when seen in the front-rear direction, and the columnar conductors v14c do not overlap with the columnar conductors v11c when seen in the left-right direction. It differs from the multilayer substrate 10 in that it does not overlap with v12c. That is, the third X-axis position p3 does not match the first X-axis position p1. The fourth X-axis position p4 does not match the second X-axis position p2.

However, the third X-axis position p3 must not deviate significantly from the first X-axis position p1 in the left-right direction. Therefore, the distance D1 from the third X-axis position p3 to the first X-axis position p1 closest to the third X-axis position p3 among the plurality of first X-axis positions p1 is the distance D1 from the third X-axis position p3 to the plurality of second X-axis positions p2. It is shorter than the distance D2 from the third X-axis position p3 to the second X-axis position p2 which is closest to the third X-axis position p3. In this embodiment, the distance D1 from the third X-axis position p3 to the first X-axis position p1 closest to the third X-axis position p3 among the plurality of first X-axis positions p1 is 1/4 or less of the predetermined pitch P0. . Furthermore, the distance D1 from the third X-axis position p3 to the first X-axis position p1 closest to the third X-axis position p3 among the plurality of first X-axis positions p1 is the distance D1 from the columnar conductor v13c (third columnar conductor) to the plurality of columnar conductors It is less than half of the distance D11 in the X-axis direction to the columnar conductor v14c (fourth columnar conductor) closest to the columnar conductor v13c (third columnar conductor) among the conductors v14c (fourth columnar conductor).

Similarly, the fourth X-axis position p4 must not deviate significantly from the second X-axis position p2 in the left-right direction. Therefore, the distance D3 from the fourth X-axis position p4 to the second X-axis position p2 closest to the fourth X-axis position p4 among the plurality of second X-axis positions p2 is the distance D3 from the fourth X-axis position p4 to the plurality of first X-axis positions p1. It is shorter than the distance D4 to the first X-axis position p1 which is closest to the fourth X-axis position p4. In this embodiment, the distance D3 from the fourth X-axis position p4 to the second X-axis position p2 closest to the fourth X-axis position p4 among the plurality of second X-axis positions p2 is 1/4 or less of the predetermined pitch P0. . Furthermore, the distance D3 from the fourth X-axis position p4 to the second X-axis position p2 closest to the fourth X-axis position p4 among the plurality of second X-axis positions p2 is the distance D3 from the columnar conductor v13c (third columnar conductor) to the second It is less than half of the distance D11 in the left-right direction (X-axis direction) to the columnar conductor v14c (fourth columnar conductor) closest to the columnar conductor v13c (third columnar conductor) among the conductors v14c (fourth columnar conductor).

According to the multilayer substrate 10b, the amount of deviation of the third X-axis position p3 from the first X-axis position p1 is limited. As a result, the characteristic impedance generated in the signal conductor layer 20 in the section where the columnar conductors v11c and v13c are provided is close to the characteristic impedance generated in the signal conductor layer 20 in the section where the columnar conductors v12c and v14c are provided. It will take a value. Therefore, in the multilayer substrate 10b, deviation of the characteristic impedance generated in the signal conductor layer 20 from a predetermined characteristic impedance is suppressed. The other structure of the multilayer substrate 10b is the same as that of the multilayer substrate 10.

(Third modification)
A multilayer substrate 10c according to a third modification will be described below with reference to the drawings. FIG. 7 is a top view of the insulator layer 16c of the multilayer substrate 10c.

The multilayer board 10c has a diameter r1 of the columnar conductor v11c (first columnar conductor) larger than a diameter r2 of the columnar conductor v12c (second columnar conductor), and a diameter r4 of the columnar conductor v14c (fourth columnar conductor). , is different from the multilayer substrate 10 in that the diameter r3 of the columnar conductor v13c (third columnar conductor) is larger than that of the columnar conductor v13c (third columnar conductor). That is, among the columnar conductors v11c and v12c, the columnar conductor v11c located far from the signal conductor layer 20 has a larger diameter. Among the columnar conductors v13c and v14c, the columnar conductor v14c located far from the signal conductor layer 20 has a larger diameter. Thereby, shielding performance can be improved while suppressing an increase in capacitance generated between the signal conductor layer 20 and the columnar conductors v11c to v14c. The other structure of the multilayer substrate 10c is the same as that of the multilayer substrate 10, so a description thereof will be omitted.

(Fourth modification)
A multilayer substrate 10d according to a fourth modification will be described below with reference to the drawings. FIG. 8 is a top view of the insulator layer 16c of the multilayer substrate 10d.

The multilayer board 10d has the following points: when viewed in the front-rear direction (Y-axis direction), a portion of the columnar conductor v12c (second columnar conductor) overlaps a portion of the columnar conductor v11c (first columnar conductor); This differs from the multilayer substrate 10 in that a portion of the columnar conductor v14c (fourth columnar conductor) overlaps a portion of the columnar conductor v13c (third columnar conductor) when viewed in the Y-axis direction. Thereby, in the multilayer substrate 10d, shielding performance can be improved. Note that the other structure of the multilayer substrate 10d is the same as that of the multilayer substrate 10, so a description thereof will be omitted.

(Fifth modification)
A multilayer substrate 10e according to a fifth modification will be described below with reference to the drawings. FIG. 9 is a top view of the insulator layer 16c of the multilayer substrate 10e.

The multilayer substrate 10e differs from the multilayer substrate 10 in the shapes of the ground conductor layers 32 and 34. More specifically, the distance D111 in the front-rear direction (Y-axis direction) between the ground conductor layer 32 (second ground conductor layer) and the signal conductor layer 20 (first signal conductor layer) at the first X-axis position p1 is It is longer than the distance D112 in the front-rear direction (Y-axis direction) between the ground conductor layer 32 (second ground conductor layer) and the signal conductor layer 20 (first signal conductor layer) at the axial position p2. Further, the distance D114 in the front-rear direction between the ground conductor layer 34 and the signal conductor layer 20 at the fourth X-axis position p4 is longer than the distance D113 in the front-rear direction between the ground conductor layer 34 and the signal conductor layer 20 at the third X-axis position p3. . Thereby, the capacitance generated between the signal conductor layer 20 and the ground conductor layers 32 and 34 can be reduced. Note that the other structure of the multilayer substrate 10e is the same as that of the multilayer substrate 10, so a description thereof will be omitted. Further, the ground conductor layers 28 and 30 may also have the same shape as the ground conductor layers 32 and 34.

(Sixth variation)
A multilayer substrate 10f according to a sixth modification will be described below with reference to the drawings. FIG. 10 is a top view of the insulator layer 16c of the multilayer substrate 10f.

The multilayer board 10f is a multilayer board in that it includes a plurality of ground conductor layers 32a, a plurality of ground conductor layers 32b, a plurality of ground conductor layers 34a, and a plurality of ground conductor layers 34b instead of the ground conductor layers 32 and 34. It is different from 10. The plurality of ground conductor layers 32a (third ground conductor layer) are in contact with each of the upper ends (ends in the positive direction of the Z axis) of the plurality of columnar conductors v11c (first columnar conductors). The plurality of ground conductor layers 32a are not in contact with each other. The plurality of ground conductor layers 32b (fourth ground conductor layer) are in contact with each of the upper ends (ends in the positive direction of the Z axis) of the plurality of columnar conductors v12c (second columnar conductors). The plurality of ground conductor layers 32b are not in contact with each other.

Further, the plurality of ground conductor layers 34a are in contact with each of the upper ends of the plurality of columnar conductors v13c. The plurality of ground conductor layers 34a are not in contact with each other. The plurality of ground conductor layers 34b are in contact with each of the upper ends of the plurality of columnar conductors v14c. The plurality of ground conductor layers 34b are not in contact with each other. The areas of the ground conductor layers 32a, 32b, 34a, and 34b are smaller than the areas of the ground conductor layers 32 and 24. Therefore, according to the multilayer substrate 10f, the capacitance generated between the signal conductor layer 20 and the ground conductor layers 32a, 32b, 34a, and 34b can be reduced. Note that the other structure of the multilayer substrate 10f is the same as that of the multilayer substrate 10, so the description thereof will be omitted. Further, the multilayer substrate 10f may include ground conductor layers 28a, 28b, 30a, 30b having the same shape as the ground conductor layers 32a, 32b, 34a, 34b.

(Seventh modification)
A multilayer substrate 10g according to a seventh modification will be described below with reference to the drawings. FIG. 11 is a top view of the insulator layer 16c of the multilayer substrate 10g.

The multilayer board 10g differs from the multilayer board 10 in that it further includes a signal conductor layer 21, columnar conductors v15, v16, and a ground conductor layer 36. The signal conductor layer 21 (second signal conductor layer) is provided in the laminate 12. The signal conductor layer 21 (second signal conductor layer) is located after the third row L3 and the fourth row L4 (in the negative direction of the Y-axis), and when viewed from the vertical direction (Z-axis direction), It has a linear shape parallel to the signal conductor layer 20 (first signal conductor layer). The ground conductor layer 24 (first ground conductor layer, not shown in FIG. 11) overlaps the signal conductor layer 21 (second signal conductor layer) when viewed in the vertical direction (Z-axis direction).

When viewed in the vertical direction (Z-axis direction), the centers of the plurality of columnar conductors v15 are located behind the signal conductor layer 21. The centers of the plurality of columnar conductors v15 are arranged at a predetermined pitch P0 in a fifth row L5 extending in the left-right direction. The plurality of columnar conductors v15 have a structure in which four columnar conductors that vertically penetrate the insulating layers 15a to 15d are connected in the vertical direction. Thereby, the plurality of columnar conductors v15 electrically connect the ground conductor layer 22, the ground conductor layer 24, and the ground conductor layer 36.

The ground conductor layer 36 is provided on the laminate 12. The ground conductor layer 36 is located on the upper main surface of the insulator layer 16c. The ground conductor layer 36 is located after the signal conductor layer 21. The ground conductor layer 36 has a linear shape extending in the left-right direction.

Here, each of the plurality of columnar conductors v15 includes a columnar conductor v15c. The plurality of columnar conductors v15c (fifth columnar conductors) penetrate in the vertical direction (Z-axis direction) through the insulator layer 16c located below the signal conductor layer 21 (second signal conductor layer) (in the negative direction of the Z-axis). are doing. Thereby, the plurality of columnar conductors v15c (fifth columnar conductor) are located above the ground conductor layer 24 (first ground conductor layer) (in the positive direction of the Z-axis). When viewed in the vertical direction (Z-axis direction), the center of the plurality of columnar conductors v15c (fifth columnar conductor) is located after the signal conductor layer 21 (second signal conductor layer) (in the negative direction of the Y-axis), Further, they are arranged at a predetermined pitch P0 in a fifth row L5 extending in the left-right direction (X-axis direction).

As mentioned above, the plurality of columnar conductors v15c (fifth columnar conductors) are a part of the plurality of columnar conductors v15, so the ground conductor layer 22 (first ground conductor layer) and the ground conductor layer 24 (fifth ground conductor layer) ) is electrically connected to the Further, the upper ends (ends in the positive direction of the Z axis) of the plurality of columnar conductors v15c (fifth columnar conductors) are in contact with the ground conductor layer 36. Therefore, the plurality of columnar conductors v15c are electrically connected to the ground conductor layer 36.

When viewed in the vertical direction (Z-axis direction), the centers of the plurality of columnar conductors v16 are located behind the signal conductor layer 21 (in the negative direction of the Y-axis). The centers of the plurality of columnar conductors v16 are arranged at a predetermined pitch P0 in a sixth row L6 extending in the left-right direction (X-axis direction). The sixth row L6 is located after the fifth row L5 (in the negative direction of the Y-axis). The plurality of columnar conductors v16 have a structure in which four columnar conductors vertically vertically penetrate through the insulator layers 16a to 16d. Thereby, the plurality of columnar conductors v16 electrically connect the ground conductor layer 22 and the ground conductor layer 24.

Here, each of the plurality of columnar conductors v16 includes a columnar conductor v16c. The plurality of columnar conductors v16c (sixth columnar conductor) penetrate in the vertical direction (Z-axis direction) through the insulator layer 16c located below the signal conductor layer 21 (second signal conductor layer) (in the negative direction of the Z-axis). are doing. Thereby, the plurality of columnar conductors v16c (sixth columnar conductor) are located above the ground conductor layer 24 (first ground conductor layer) (in the positive direction of the Z-axis). When viewed in the vertical direction (Z-axis direction), the centers of the plurality of columnar conductors v16c (sixth columnar conductor) are located after the signal conductor layer 21 (second signal conductor layer) (in the negative direction of the Y-axis), Further, they are arranged at a predetermined pitch P0 in a sixth row L6 extending in the left-right direction (X-axis direction).

As mentioned above, the plurality of columnar conductors v16c (sixth columnar conductor) are a part of the plurality of columnar conductors v16, so the ground conductor layer 22 (fifth ground conductor layer) and the ground conductor layer 24 (first ground conductor layer) ) is electrically connected to the Further, the upper ends (ends in the positive direction of the Z axis) of the plurality of columnar conductors v16c (sixth columnar conductors) are in contact with the ground conductor layer 36. Therefore, the plurality of columnar conductors v16c are electrically connected to the ground conductor layer 36.

Further, when viewed in the vertical direction (Z-axis direction), there are a plurality of fifth X-axis positions p5 indicating the positions of the centers of the plurality of columnar conductors v15c (fifth columnar conductors) in the left-right direction (X-axis) and a plurality of columnar conductors v16c. A plurality of sixth X-axis positions p6 indicating the position of the center of the (sixth columnar conductor) in the left-right direction (X-axis) are arranged alternately in the X-axis direction. In this embodiment, the plurality of fifth X-axis positions p5 and the plurality of sixth X-axis positions p6 are alternately arranged in the X-axis direction at a pitch that is half the predetermined pitch P0.

Furthermore, the plurality of columnar conductors v15c (fifth columnar conductor) overlap with the plurality of columnar conductors v13c (third columnar conductor) when viewed in the front-back direction (Y-axis direction). That is, the fifth X-axis position p5 coincides with the third X-axis position p3. The columnar conductor v16c (sixth columnar conductor) overlaps with the columnar conductor v14c (fourth columnar conductor) when viewed in the left-right direction (Y-axis direction). That is, the sixth X-axis position p6 coincides with the fourth X-axis position p4.

Note that the fifth X-axis position p5 does not have to match the third X-axis position p3. However, the fifth X-axis position p5 must not deviate significantly from the third X-axis position p3 in the left-right direction. Therefore, the distance from the fifth X-axis position p5 to the third X-axis position p3 closest to the fifth X-axis position p5 among the plurality of third X-axis positions p3 is the distance from the fifth X-axis position p5 to the plurality of fourth X-axis positions p4. It is shorter than the distance from the fifth X-axis position p5 to the fourth X-axis position p4 closest to the fifth X-axis position p5.

Furthermore, the sixth X-axis position p6 does not have to match the fourth X-axis position p4. However, the sixth X-axis position p6 must not deviate significantly from the fourth X-axis position p4 in the left-right direction. Therefore, the distance from the sixth X-axis position p6 to the fourth X-axis position p4 closest to the sixth X-axis position p6 among the plurality of fourth X-axis positions p4 is the distance from the sixth X-axis position p6 to the plurality of third X-axis positions p3. It is shorter than the distance from the sixth X-axis position p6 to the third X-axis position p3 closest to the sixth X-axis position p6. The other structure of the multilayer substrate 10g is the same as that of the multilayer substrate 10, so a description thereof will be omitted.

(Eighth modification)
A multilayer substrate 10h according to an eighth modification will be described below with reference to the drawings. FIG. 12 is an exploded view of the multilayer substrate 10h. However, in FIG. 12, the protective layers 18a and 18b are omitted. FIG. 13 is a cross-sectional view of the multilayer substrate 10h.

The multilayer substrate 10h differs from the multilayer substrate 10 in the structure of the columnar conductors v11 to v14. The columnar conductors v11 to v14 have a zigzag shape when viewed in the left-right direction.

Each of the plurality of columnar conductors v11 includes columnar conductors v11a to v11d. Each of the columnar conductors v11a to v11d vertically penetrates the insulator layers 16a to 16d. The plurality of columnar conductors v11a, the plurality of columnar conductors v11c, and the plurality of columnar conductors v11d are arranged in the first row L1 at a predetermined pitch P0. The plurality of columnar conductors v11b are arranged in the second row L2 at a predetermined pitch P0. Each of the plurality of columnar conductors v11a, the plurality of columnar conductors v11b, the plurality of columnar conductors v11c, and the plurality of columnar conductors v11d are located at the first X-axis position p1.

Each of the plurality of columnar conductors v12 includes columnar conductors v12a to v12d. Each of the columnar conductors v12a to v12d vertically penetrates the insulator layers 16a to 16d. The plurality of columnar conductors v12a, the plurality of columnar conductors v12c, and the plurality of columnar conductors v12d are arranged in the second row L2 at a predetermined pitch P0. The plurality of columnar conductors v12b are arranged in the first row L1 at a predetermined pitch P0. Each of the plurality of columnar conductors v12a, the plurality of columnar conductors v12b, the plurality of columnar conductors v12c, and the plurality of columnar conductors v12d are located at the second X-axis position p2.

Each of the plurality of columnar conductors v13 includes columnar conductors v13a to v13d. Each of the columnar conductors v13a to v13d vertically penetrates the insulator layers 16a to 16d. The plurality of columnar conductors v13a, the plurality of columnar conductors v13c, and the plurality of columnar conductors v13d are arranged in the third row L3 at a predetermined pitch P0. The plurality of columnar conductors v13b are arranged in a fourth row L4 at a predetermined pitch P0. Each of the plurality of columnar conductors v13a, the plurality of columnar conductors v13b, the plurality of columnar conductors v13c, and the plurality of columnar conductors v13d are located at the third X-axis position p3.

Each of the plurality of columnar conductors v14 includes columnar conductors v14a to v14d. Each of the columnar conductors v14a to v14d vertically penetrates the insulator layers 16a to 16d. The plurality of columnar conductors v14a, the plurality of columnar conductors v14c, and the plurality of columnar conductors v14d are arranged in the fourth row L4 at a predetermined pitch P0. The plurality of columnar conductors v14b are arranged in the third row L3 at a predetermined pitch P0. Each of the plurality of columnar conductors v14a, the plurality of columnar conductors v14b, the plurality of columnar conductors v14c, and the plurality of columnar conductors v14d are located at the fourth X-axis position p4. The other structure of the multilayer substrate 10h is the same as that of the multilayer substrate 10, so the description thereof will be omitted.

(9th modification)
A multilayer substrate 10i according to a ninth modification will be described below with reference to the drawings. FIG. 14 is an exploded perspective view of the multilayer substrate 10i.

The multilayer board 10i differs from the multilayer board 10 in that it does not include a ground conductor layer 22. In the multilayer substrate 10i, the signal conductor layer 20 and the ground conductor layer 24 have a microstrip line structure. The other structure of the multilayer substrate 10i is the same as that of the multilayer substrate 10, so the description thereof will be omitted.

(Other embodiments)
The multilayer substrate according to the present invention is not limited to the multilayer substrates 10, 10a to 10i, and can be modified within the scope of the gist thereof. Note that the structures of the multilayer substrates 10, 10a to 10i may be arbitrarily combined.

Note that the protective layers 18a and 18b are not essential components. Further, either the protective layer 18a or the protective layer 18b may be provided.

Note that the ground conductor layers 28, 30, 32, and 34 are not essential components.

Note that the distance d12 in the front-rear direction between the second row L2 and the fourth row L4 does not have to be equal to the distance d11 in the front-rear direction between the first row L1 and the third row L3.

Note that the diameter r1 of the columnar conductor v11c may be smaller than the diameter r2 of the columnar conductor v12c. The diameter r4 of the columnar conductor v14c may be smaller than the diameter r3 of the columnar conductor v13c.

The present invention has the following structure.

(1)
A laminate having a structure in which a plurality of insulator layers are stacked in the Z-axis direction;
a first signal conductor layer provided on the laminate and having a linear shape when viewed in the Z-axis direction;
a first ground conductor layer located in the negative direction of the Z-axis from the first signal conductor layer and overlapping with the first signal conductor layer when viewed in the Z-axis direction;
Penetrating in the Z-axis direction the insulator layer located in the negative direction of the Z-axis from the first signal conductor layer, and located in the positive direction of the Z-axis from the first ground conductor layer. A plurality of first columnar conductors, a plurality of second columnar conductors, a plurality of third columnar conductors, and a plurality of fourth columnar conductors,
It is equipped with
The direction in which the first signal conductor layer extends is defined as the X-axis direction,
A direction perpendicular to the X-axis direction and the Z-axis direction is defined as the Y-axis direction,
The plurality of first columnar conductors, the plurality of second columnar conductors, the plurality of third columnar conductors, and the plurality of fourth columnar conductors are electrically connected to the first ground conductor layer,
When viewed in the Z-axis direction, the centers of the plurality of first columnar conductors are located in the positive direction of the Y-axis from the first signal conductor layer, and are arranged at a predetermined pitch in a first row extending in the X-axis direction. They are lined up,
When viewed in the Z-axis direction, the centers of the plurality of second columnar conductors are located in the positive direction of the Y-axis relative to the first signal conductor layer, and are located in the predetermined second row extending in the X-axis direction. lined up on the pitch,
When viewed in the Z-axis direction, the centers of the plurality of third columnar conductors are located in the negative direction of the Y-axis from the first signal conductor layer, and are arranged in the predetermined third row extending in the X-axis direction. lined up on the pitch,
When viewed in the Z-axis direction, the centers of the plurality of fourth columnar conductors are located in the negative direction of the Y-axis from the first signal conductor layer, and are located in the fourth row extending in the X-axis direction. lined up on the pitch,
The second column is located in the negative direction of the Y axis from the first column,
The fourth column is located in the negative direction of the Y axis from the third column,
When viewed in the Z-axis direction, a plurality of first X-axis positions indicating the positions of the centers of the plurality of first columnar conductors on the X-axis, and a plurality of first X-axis positions indicating the positions of the centers of the plurality of second columnar conductors on the X-axis. The second X-axis positions are arranged alternately in the X-axis direction,
A plurality of third X-axis positions indicating the positions of the centers of the plurality of third columnar conductors on the X-axis and a third X-axis position indicating the positions of the centers of the plurality of fourth columnar conductors on the X-axis when viewed in the Z-axis direction. The 4X-axis positions are arranged alternately in the X-axis direction,
The distance from the third X-axis position to the first X-axis position closest to the third X-axis position among the plurality of first X-axis positions is the distance from the third X-axis position to the first X-axis position among the plurality of second X-axis positions. shorter than the distance to the second X-axis position closest to the third X-axis position,
The distance from the fourth X-axis position to the second X-axis position closest to the fourth X-axis position among the plurality of second X-axis positions is the distance from the fourth X-axis position to the second X-axis position among the plurality of first X-axis positions. shorter than the distance to the first X-axis position closest to the fourth X-axis position;
Multilayer board.

(2)
The distance from the third X-axis position to the first X-axis position closest to the third X-axis position among the plurality of first X-axis positions is 1/4 or less of the predetermined pitch,
The distance from the fourth X-axis position to the second X-axis position closest to the fourth X-axis position among the plurality of second X-axis positions is 1/4 or less of the predetermined pitch,
The multilayer substrate according to (1).

(3)
The distance from the third X-axis position to the first X-axis position closest to the third X-axis position among the plurality of first X-axis positions is the distance from the third columnar conductor to the first X-axis position among the plurality of fourth columnar conductors. less than half the distance in the X-axis direction to the fourth columnar conductor closest to the third columnar conductor,
The distance from the fourth X-axis position to the second X-axis position closest to the fourth X-axis position among the plurality of second X-axis positions is the distance from the third columnar conductor to the second X-axis position among the plurality of fourth columnar conductors. less than half the distance in the X-axis direction from the third columnar conductor to the fourth columnar conductor closest to the third columnar conductor;
The multilayer substrate according to (1).

(4)
The third columnar conductor overlaps the first columnar conductor when viewed in the Y-axis direction,
The fourth columnar conductor overlaps the second columnar conductor when viewed in the Y-axis direction.
The multilayer substrate according to (1).

(5)
The distance between the second row and the fourth row in the Y-axis direction is equal to the distance between the first row and the third row in the Y-axis direction.
The multilayer substrate according to any one of (1) to (4).

(6)
The distance from the center of the first columnar conductor to the center of the second columnar conductor closest to the first columnar conductor among the plurality of second columnar conductors is the distance between the first column and the second column. longer than the distance in the Y-axis direction,
The distance from the center of the third columnar conductor to the center of the fourth columnar conductor closest to the third columnar conductor among the plurality of fourth columnar conductors is the distance between the third column and the fourth column. longer than the distance in the Y-axis direction,
The multilayer substrate according to any one of (1) to (5).

(7)
The distance from the center of the first columnar conductor to the center of the second columnar conductor closest to the first columnar conductor among the plurality of second columnar conductors is determined by the diameter of the first columnar conductor and the second columnar conductor. longer than the diameter of the conductor,
The distance from the center of the third columnar conductor to the center of the fourth columnar conductor closest to the third columnar conductor among the plurality of fourth columnar conductors is determined by the diameter of the third columnar conductor and the fourth columnar conductor. longer than the diameter of the conductor,
The multilayer substrate according to any one of (1) to (6).

(8)
The diameter of the first columnar conductor is larger than the diameter of the second columnar conductor,
The diameter of the fourth columnar conductor is larger than the diameter of the third columnar conductor.
The multilayer substrate according to any one of (1) to (7).

(9)
When viewed in the Y-axis direction, a portion of the second columnar conductor overlaps a portion of the first columnar conductor,
When viewed in the Y-axis direction, a portion of the fourth columnar conductor overlaps a portion of the third columnar conductor,
The multilayer substrate according to any one of (1) to (8).

(10)
The multilayer substrate includes:
The second ground conductor layer,
Furthermore, we are equipped with
The ends of the plurality of first columnar conductors in the positive direction of the Z axis and the ends of the plurality of second columnar conductors in the positive direction of the Z axis are in contact with the second ground conductor layer,
The multilayer substrate according to any one of (1) to (9).

(11)
The distance in the Y-axis direction between the second ground conductor layer and the first signal conductor layer at the first X-axis position is the distance between the second ground conductor layer and the first signal conductor layer at the second X-axis position. longer than the distance in the Y-axis direction,
The multilayer substrate according to (10).

(12)
The multilayer substrate includes:
a plurality of third ground conductor layers in contact with each of the ends of the plurality of first columnar conductors in the positive direction of the Z axis;
a plurality of fourth ground conductor layers in contact with each of the ends of the plurality of second columnar conductors in the positive direction of the Z axis;
Furthermore, we have
The multilayer substrate according to any one of (1) to (11).

(13)
The multilayer substrate includes:
a fifth ground conductor layer that is located in the positive direction of the Z-axis from the first signal conductor layer and overlaps with the first signal conductor layer when viewed in the Z-axis direction;
Furthermore, we are equipped with
The plurality of first columnar conductors, the plurality of second columnar conductors, the plurality of third columnar conductors, and the plurality of fourth columnar conductors are electrically connected to the fifth ground conductor layer,
The multilayer substrate according to any one of (1) to (12).

(14)
The distance between the first signal conductor layer and the third column in the Y-axis direction is equal to the distance between the first signal conductor layer and the second column in the Y-axis direction,
The distance between the first signal conductor layer and the fourth row in the Y-axis direction is equal to the distance between the first signal conductor layer and the first row in the Y-axis direction.
The multilayer substrate according to any one of (1) to (13).

(15)
the first signal conductor layer has a linear shape;
The multilayer substrate according to (14).

(16)
The multilayer substrate includes:
The first signal conductor layer is provided in the laminate, is located in the negative direction of the Y-axis from the third row and the fourth row, and is similar to the first signal conductor layer when viewed from the Z-axis direction. a second signal conductor layer having a parallel linear shape;
Penetrating in the Z-axis direction the insulator layer located in the negative direction of the Z-axis from the second signal conductor layer, and located in the positive direction of the Z-axis from the first ground conductor layer. a plurality of fifth columnar conductors and a plurality of sixth columnar conductors,
Furthermore, it is equipped with
The first ground conductor layer overlaps the second signal conductor layer when viewed in the Z-axis direction,
The plurality of fifth columnar conductors and the plurality of sixth columnar conductors are electrically connected to the first ground conductor layer,
When viewed in the Z-axis direction, the centers of the plurality of fifth columnar conductors are located in the negative direction of the Y-axis from the second signal conductor layer, and are located in the predetermined fifth column extending in the X-axis direction. lined up on the pitch,
When viewed in the Z-axis direction, the centers of the plurality of sixth columnar conductors are located in the negative direction of the Y-axis from the second signal conductor layer, and are located in the predetermined sixth column extending in the X-axis direction. lined up on the pitch,
The sixth column is located in the negative direction of the Y axis from the fifth column,
When viewed in the Z-axis direction, a plurality of fifth X-axis positions indicating the positions of the centers of the plurality of fifth columnar conductors on the X-axis and a plurality of positions indicating the positions of the centers of the plurality of sixth columnar conductors on the X-axis. The sixth X-axis positions are arranged alternately in the X-axis direction,
The distance from the fifth X-axis position to the third X-axis position closest to the fifth X-axis position among the plurality of third X-axis positions is the distance from the fifth X-axis position to the third X-axis position among the plurality of fourth X-axis positions. shorter than the distance to the fourth X-axis position closest to the fifth X-axis position,
The distance from the sixth X-axis position to the fourth X-axis position closest to the sixth X-axis position among the plurality of fourth X-axis positions is the distance from the sixth X-axis position to the fourth X-axis position among the plurality of third X-axis positions. shorter than the distance to the third X-axis position closest to the sixth X-axis position;
The multilayer substrate according to any one of (1) to (15).

(17)
The plurality of first X-axis positions and the plurality of second X-axis positions are alternately arranged in the X-axis direction at a pitch that is half the predetermined pitch.
The multilayer substrate according to any one of (1) to (16).

10, 10a to 10i: Multilayer substrate 12: Laminated bodies 16a to 16d: Insulator layers 18a, 18b: Protective layers 20, 21: Signal conductor layers 22, 24, 28, 28a, 28b, 30, 30a, 30b, 32, 32a, 32b, 34, 34a, 34b, 36: Ground conductor layer 26a, 26b: Signal terminal A1: First section A2: Second section A3: Third section L1: First column L2: Second column L3: Third Row L4: Fourth row L5: Fifth row L6: Sixth row p1: First X-axis position p2: Second X-axis position p3: Third X-axis position p4: Fourth X-axis position p5: Fifth X-axis position p6: Sixth X Axis positions v1, v2, v11 to v16, v11a to v11d, v12a to v12d, v13a to v13d, v14a to v14d, v15c, v16c: columnar conductor

Claims (17)

1. A laminate having a structure in which a plurality of insulator layers are stacked in the Z-axis direction;
   a first signal conductor layer provided on the laminate and having a linear shape when viewed in the Z-axis direction;
   a first ground conductor layer located in the negative direction of the Z-axis from the first signal conductor layer and overlapping with the first signal conductor layer when viewed in the Z-axis direction;
   Penetrating in the Z-axis direction the insulator layer located in the negative direction of the Z-axis from the first signal conductor layer, and located in the positive direction of the Z-axis from the first ground conductor layer. A plurality of first columnar conductors, a plurality of second columnar conductors, a plurality of third columnar conductors, and a plurality of fourth columnar conductors,
   It is equipped with
   The direction in which the first signal conductor layer extends is defined as the X-axis direction,
   A direction perpendicular to the X-axis direction and the Z-axis direction is defined as the Y-axis direction,
   The plurality of first columnar conductors, the plurality of second columnar conductors, the plurality of third columnar conductors, and the plurality of fourth columnar conductors are electrically connected to the first ground conductor layer,
   When viewed in the Z-axis direction, the centers of the plurality of first columnar conductors are located in the positive direction of the Y-axis from the first signal conductor layer, and are arranged at a predetermined pitch in a first row extending in the X-axis direction. They are lined up,
   When viewed in the Z-axis direction, the centers of the plurality of second columnar conductors are located in the positive direction of the Y-axis relative to the first signal conductor layer, and are located in the predetermined second row extending in the X-axis direction. lined up on the pitch,
   When viewed in the Z-axis direction, the centers of the plurality of third columnar conductors are located in the negative direction of the Y-axis from the first signal conductor layer, and are arranged in the predetermined third row extending in the X-axis direction. lined up on the pitch,
   When viewed in the Z-axis direction, the centers of the plurality of fourth columnar conductors are located in the negative direction of the Y-axis from the first signal conductor layer, and are located in the fourth row extending in the X-axis direction. lined up on the pitch,
   The second column is located in the negative direction of the Y axis from the first column,
   The fourth column is located in the negative direction of the Y axis from the third column,
   When viewed in the Z-axis direction, a plurality of first X-axis positions indicating the positions of the centers of the plurality of first columnar conductors on the X-axis, and a plurality of first X-axis positions indicating the positions of the centers of the plurality of second columnar conductors on the X-axis. The second X-axis positions are arranged alternately in the X-axis direction,
   A plurality of third X-axis positions indicating the positions of the centers of the plurality of third columnar conductors on the X-axis and a third X-axis position indicating the positions of the centers of the plurality of fourth columnar conductors on the X-axis when viewed in the Z-axis direction. The 4X-axis positions are arranged alternately in the X-axis direction,
   The distance from the third X-axis position to the first X-axis position closest to the third X-axis position among the plurality of first X-axis positions is the distance from the third X-axis position to the first X-axis position among the plurality of second X-axis positions. shorter than the distance to the second X-axis position closest to the third X-axis position,
   The distance from the fourth X-axis position to the second X-axis position closest to the fourth X-axis position among the plurality of second X-axis positions is the distance from the fourth X-axis position to the second X-axis position among the plurality of first X-axis positions. shorter than the distance to the first X-axis position closest to the fourth X-axis position;
   Multilayer board.
2. The distance from the third X-axis position to the first X-axis position closest to the third X-axis position among the plurality of first X-axis positions is 1/4 or less of the predetermined pitch,
   The distance from the fourth X-axis position to the second X-axis position closest to the fourth X-axis position among the plurality of second X-axis positions is 1/4 or less of the predetermined pitch,
   The multilayer substrate according to claim 1.
3. The distance from the third X-axis position to the first X-axis position closest to the third X-axis position among the plurality of first X-axis positions is the distance from the third columnar conductor to the first X-axis position among the plurality of fourth columnar conductors. less than half the distance in the X-axis direction to the fourth columnar conductor closest to the third columnar conductor,
   The distance from the fourth X-axis position to the second X-axis position closest to the fourth X-axis position among the plurality of second X-axis positions is the distance from the third columnar conductor to the second X-axis position among the plurality of fourth columnar conductors. less than half the distance in the X-axis direction from the third columnar conductor to the fourth columnar conductor closest to the third columnar conductor;
   The multilayer substrate according to claim 1.
4. The third columnar conductor overlaps the first columnar conductor when viewed in the Y-axis direction,
   The fourth columnar conductor overlaps the second columnar conductor when viewed in the Y-axis direction.
   The multilayer substrate according to claim 1.
5. The distance between the second row and the fourth row in the Y-axis direction is equal to the distance between the first row and the third row in the Y-axis direction.
   The multilayer substrate according to any one of claims 1 to 4.
6. The distance from the center of the first columnar conductor to the center of the second columnar conductor closest to the first columnar conductor among the plurality of second columnar conductors is the distance between the first column and the second column. longer than the distance in the Y-axis direction,
   The distance from the center of the third columnar conductor to the center of the fourth columnar conductor closest to the third columnar conductor among the plurality of fourth columnar conductors is the distance between the third column and the fourth column. longer than the distance in the Y-axis direction,
   The multilayer substrate according to any one of claims 1 to 5.
7. The distance from the center of the first columnar conductor to the center of the second columnar conductor closest to the first columnar conductor among the plurality of second columnar conductors is determined by the diameter of the first columnar conductor and the second columnar conductor. longer than the diameter of the conductor,
   The distance from the center of the third columnar conductor to the center of the fourth columnar conductor closest to the third columnar conductor among the plurality of fourth columnar conductors is determined by the diameter of the third columnar conductor and the fourth columnar conductor. longer than the diameter of the conductor,
   The multilayer substrate according to any one of claims 1 to 6.
8. The diameter of the first columnar conductor is larger than the diameter of the second columnar conductor,
   The diameter of the fourth columnar conductor is larger than the diameter of the third columnar conductor.
   The multilayer substrate according to any one of claims 1 to 7.
9. When viewed in the Y-axis direction, a portion of the second columnar conductor overlaps a portion of the first columnar conductor,
   When viewed in the Y-axis direction, a portion of the fourth columnar conductor overlaps a portion of the third columnar conductor,
   The multilayer substrate according to any one of claims 1 to 8.
10. The multilayer substrate includes:
    The second ground conductor layer,
    Furthermore, we are equipped with
    The ends of the plurality of first columnar conductors in the positive direction of the Z axis and the ends of the plurality of second columnar conductors in the positive direction of the Z axis are in contact with the second ground conductor layer,
    The multilayer substrate according to any one of claims 1 to 9.
11. The distance in the Y-axis direction between the second ground conductor layer and the first signal conductor layer at the first X-axis position is the distance between the second ground conductor layer and the first signal conductor layer at the second X-axis position. longer than the distance in the Y-axis direction,
    The multilayer substrate according to claim 10.
12. The multilayer substrate includes:
    a plurality of third ground conductor layers in contact with each of the ends of the plurality of first columnar conductors in the positive direction of the Z axis;
    a plurality of fourth ground conductor layers in contact with each of the ends of the plurality of second columnar conductors in the positive direction of the Z axis;
    Furthermore, we have
    The multilayer substrate according to any one of claims 1 to 11.
13. The multilayer substrate includes:
    a fifth ground conductor layer that is located in the positive direction of the Z-axis from the first signal conductor layer and overlaps with the first signal conductor layer when viewed in the Z-axis direction;
    Furthermore, we are equipped with
    The plurality of first columnar conductors, the plurality of second columnar conductors, the plurality of third columnar conductors, and the plurality of fourth columnar conductors are electrically connected to the fifth ground conductor layer,
    The multilayer substrate according to any one of claims 1 to 12.
14. The distance between the first signal conductor layer and the third column in the Y-axis direction is equal to the distance between the first signal conductor layer and the second column in the Y-axis direction,
    The distance between the first signal conductor layer and the fourth row in the Y-axis direction is equal to the distance between the first signal conductor layer and the first row in the Y-axis direction.
    The multilayer substrate according to any one of claims 1 to 13.
15. the first signal conductor layer has a linear shape;
    The multilayer substrate according to claim 14.
16. The multilayer substrate includes:
    The first signal conductor layer is provided in the laminate, is located in the negative direction of the Y-axis from the third row and the fourth row, and is similar to the first signal conductor layer when viewed from the Z-axis direction. a second signal conductor layer having a parallel linear shape;
    Penetrating in the Z-axis direction the insulator layer located in the negative direction of the Z-axis from the second signal conductor layer, and located in the positive direction of the Z-axis from the first ground conductor layer. a plurality of fifth columnar conductors and a plurality of sixth columnar conductors,
    Furthermore, it is equipped with
    The first ground conductor layer overlaps the second signal conductor layer when viewed in the Z-axis direction,
    The plurality of fifth columnar conductors and the plurality of sixth columnar conductors are electrically connected to the first ground conductor layer,
    When viewed in the Z-axis direction, the centers of the plurality of fifth columnar conductors are located in the negative direction of the Y-axis from the second signal conductor layer, and are located in the predetermined fifth column extending in the X-axis direction. lined up on the pitch,
    When viewed in the Z-axis direction, the centers of the plurality of sixth columnar conductors are located in the negative direction of the Y-axis from the second signal conductor layer, and are located in the predetermined sixth column extending in the X-axis direction. lined up on the pitch,
    The sixth column is located in the negative direction of the Y axis from the fifth column,
    When viewed in the Z-axis direction, a plurality of fifth X-axis positions indicating the positions of the centers of the plurality of fifth columnar conductors on the X-axis and a plurality of positions indicating the positions of the centers of the plurality of sixth columnar conductors on the X-axis. The sixth X-axis positions are arranged alternately in the X-axis direction,
    The distance from the fifth X-axis position to the third X-axis position closest to the fifth X-axis position among the plurality of third X-axis positions is the distance from the fifth X-axis position to the third X-axis position among the plurality of fourth X-axis positions. shorter than the distance to the fourth X-axis position closest to the fifth X-axis position,
    The distance from the sixth X-axis position to the fourth X-axis position closest to the sixth X-axis position among the plurality of fourth X-axis positions is the distance from the sixth X-axis position to the fourth X-axis position among the plurality of third X-axis positions. shorter than the distance to the third X-axis position closest to the sixth X-axis position;
    The multilayer substrate according to any one of claims 1 to 15.
17. The plurality of first X-axis positions and the plurality of second X-axis positions are alternately arranged in the X-axis direction at a pitch that is half the predetermined pitch.
    The multilayer substrate according to any one of claims 1 to 16.

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