WO2023195067A1 - ガス分析計 - Google Patents
ガス分析計 Download PDFInfo
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- WO2023195067A1 WO2023195067A1 PCT/JP2022/017085 JP2022017085W WO2023195067A1 WO 2023195067 A1 WO2023195067 A1 WO 2023195067A1 JP 2022017085 W JP2022017085 W JP 2022017085W WO 2023195067 A1 WO2023195067 A1 WO 2023195067A1
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- light
- width
- mirror
- collimated light
- concave portion
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- 238000012545 processing Methods 0.000 claims abstract description 14
- 238000010521 absorption reaction Methods 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims abstract description 5
- 230000008569 process Effects 0.000 claims abstract description 4
- 230000003287 optical effect Effects 0.000 claims description 32
- 238000001228 spectrum Methods 0.000 claims description 28
- 230000005855 radiation Effects 0.000 claims description 25
- 238000000295 emission spectrum Methods 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 115
- 238000010586 diagram Methods 0.000 description 37
- 238000005259 measurement Methods 0.000 description 19
- 230000008859 change Effects 0.000 description 15
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- 238000012937 correction Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 238000000862 absorption spectrum Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000001658 differential optical absorption spectrophotometry Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 238000004847 absorption spectroscopy Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003546 flue gas Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical class S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 description 1
- 229910052815 sulfur oxide Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000000870 ultraviolet spectroscopy Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N21/031—Multipass arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/85—Investigating moving fluids or granular solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/85—Investigating moving fluids or granular solids
- G01N2021/8557—Special shaping of flow, e.g. using a by-pass line, jet flow, curtain flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/33—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
Definitions
- the present invention relates to a gas analyzer.
- Patent Document 1 Japanese Patent Application Publication No. 2001-188043
- Patent Document 1 Quantitative Spectroscopy Radiative Transfer Vol. 56, No. 2, pp. 187-208, 1996, Johan Mellqvist and Arne Rosen "DOAS FOR FLUE GAS MONITORING - I. TEMPERATURE EFFECTS IN THE UV/VISIBLE ABSORPTION SPECTRA OF NO, N02, SO2 AND NH3”
- the gas analyzer can measure gas concentration with high accuracy.
- a first aspect of the present invention provides a gas analyzer that measures the concentration of a component to be measured contained in a sample gas.
- the gas analyzer may include a light source unit that emits light including an absorption wavelength of the component to be measured.
- the gas analyzer may include a collimating section that converts the light into collimated light.
- the gas analyzer may include a cell in which one or more reflecting mirrors that reflect the light are housed in a space sealed with the sample gas.
- the gas analyzer may include a light receiving element that acquires the radiation spectrum of the light that has passed through the cell.
- the gas analyzer may include a processing section that processes the light reception signal of the light receiving element and measures the concentration of the component to be measured.
- the one or more reflective mirrors may include a first reflective mirror on which the collimated light is first reflected.
- the first reflecting mirror may include a concave portion that reflects the collimated light.
- the width of the concave portion may be smaller than the width of the collimated light.
- the entire width of the first reflecting mirror may be smaller than the width of the collimated light.
- the width of the concave surface portion may be 80% or less of the width of the collimated light.
- the width of the concave surface portion may be 50% or more of the width of the collimated light.
- the one or more reflecting mirrors may include a second reflecting mirror arranged after the first reflecting mirror.
- the second reflecting mirror may include a concave portion that reflects the collimated light.
- the width of the concave portion of the second reflecting mirror may be smaller than the width of the collimated light.
- the width of the concave portion of the first reflecting mirror and the width of the concave portion of the second reflecting mirror may be the same.
- the width of the concave portion of the second reflecting mirror may be larger than the width of the concave portion of the first reflecting mirror.
- the one or more reflective mirrors may include a folding reflective mirror that reflects the collimated light irradiated from the second reflective mirror onto the second reflective mirror.
- the folding reflection mirror may include a concave portion that reflects the collimated light.
- the width of the concave portion of the folding reflection mirror may be smaller than the width of the collimated light.
- the one or more reflective mirrors reflect the collimated light irradiated from the first reflective mirror onto the second reflective mirror, and reflect the collimated light irradiated from the second reflective mirror to the first reflective mirror.
- the central reflection mirror may include a concave portion that reflects the collimated light.
- the width of the concave surface portion may be larger than the width of the collimated light.
- the gas analyzer includes a notch filter that is disposed on any one of the optical paths from the light source section to the light receiving element and has a limiting band that reduces the intensity at one of the peaks of the radiation spectrum of the light emitted from the light source section. may be provided.
- FIG. 2 is a diagram showing an example of a gas analyzer 200.
- FIG. FIG. 1 is a diagram showing an example of the configuration of a gas analyzer 100 according to a first embodiment.
- 3 is a diagram showing an example of a radiation spectrum of light 106 emitted from a light source unit 120.
- FIG. FIG. 3 is a diagram showing the relationship between the intensity of light 106 at a predetermined wavelength and measurement error.
- 5 is a diagram showing an example of transmission characteristics of a notch filter 110.
- FIG. 5 is a diagram showing an example of a radiation spectrum of light 106 incident on a light receiving element 126 when a notch filter 110 is used.
- FIG. It is a figure which shows the other example of a structure of the gas analyzer 100.
- FIG. 5 is a diagram illustrating an example of adjusting the wavelength of a limited band of a notch filter 110.
- FIG. FIG. 3 is a diagram showing a reflection mirror at a stage subsequent to the notch filter 110. 3 is a diagram of a reflective surface 150 of a reflective mirror at a stage subsequent to the notch filter 110, viewed from the traveling direction of the light 106.
- FIG. It is a figure which shows the other example of a structure of the gas analyzer 100. It is a figure explaining gas analyzer 100 concerning a 2nd example.
- FIG. 3 is a diagram showing the concave surface portion 151 of the first reflecting mirror 114-1 and the spot 192 of the collimated light 106 at the position of the concave surface portion 151, viewed from the traveling direction of the collimated light 106.
- FIG. 3 is a diagram of the concave surface portion 151 of the second reflecting mirror 114-2 as viewed from the traveling direction of the collimated light 106.
- FIG. 3 is a diagram showing a concave portion 151 of the central reflecting mirror 112 and a spot 192 of the collimated light 106 at the position of the concave portion 151 as viewed from the direction in which the collimated light 106 travels.
- FIG. 7 is a diagram illustrating another example of the shape of the concave portion 151 of the central reflecting mirror 112.
- FIG. 3 is a diagram of a concave surface portion 151 of a folding reflection mirror 115 viewed from the direction in which collimated light 106 travels.
- FIG. 3 is a diagram illustrating an operation test of the gas analyzer 100. It is a figure which shows the measured value of the amount of light received by the light receiving element 126 in a reference example.
- FIG. 7 is a diagram showing measured values of the amount of light received by the light receiving element 126 in the second example. It is a figure showing gas analyzer 100 concerning a 3rd example.
- FIG. 1 is a diagram showing an example of a gas analyzer 200.
- the gas analyzer 200 measures the concentration of the target component contained in the target gas passing through the flue 10 .
- the gas to be measured is, for example, exhaust gas from an engine, but is not limited thereto.
- the components to be measured include, but are not limited to, sulfur oxides (SO x ), nitrogen oxides (NO x ), ammonia (NH 3 ), and the like.
- the gas analyzer 200 includes a gas intake pipe 11, a gas exhaust pipe 12, and a gas analyzer 100.
- the gas analyzer 200 may further include at least one of a gas filter 14 , a preheater 15 , a preheating temperature controller 16 , and a pump 17 .
- the gas intake pipe 11 and the gas exhaust pipe 12 are connected to the flue 10.
- the gas suction pipe 11 introduces sample gas 30, which is part of the gas to be measured flowing into the flue 10, into the gas analyzer 100.
- the gas analyzer 100 measures the concentration of the gas to be measured contained in the sample gas 30.
- the gas discharge pipe 12 discharges the sample gas 30 processed by the gas analyzer 100 to the flue 10 .
- the gas suction pipe 11 may be connected to a gas filter 14 that removes dust from the sample gas 30.
- the gas suction pipe 11 may be connected to a preheater 15 that preheats the sample gas 30.
- the temperature of the preheater 15 may be adjusted by a preheating temperature regulator 16.
- the gas exhaust pipe 12 may be connected to a pump 17 . Pump 17 sucks sample gas 30 from gas analyzer 100 and discharges sample gas 30 into flue 10 .
- the gas analyzer 100 measures the concentration of the component to be measured contained in the introduced sample gas 30.
- the gas analyzer 100 measures the concentration of the component to be measured by differential absorption spectrophotometry (DOAS) as disclosed in Non-Patent Document 1, for example.
- DOAS differential absorption spectrophotometry
- the gas component absorbs light with a specific absorption wavelength depending on the type of gas. The degree to which light is absorbed varies depending on the concentration of gas components.
- differential absorption spectrometry light containing a wavelength component corresponding to the component to be measured is passed through the sample gas 30, and the intensity of the wavelength component before and after passing is compared, thereby determining the component to be measured contained in the sample gas 30. Measure concentration.
- the gas analyzer 100 includes a cell 113, a light source section 120, a light receiving element 126, and a processing section 127.
- the gas analyzer 100 may further include at least one of a heater 118, a temperature adjustment section 119, and a spectrometer 122.
- the light source section 120 emits the light 106.
- the light source unit 120 emits light 106 including the absorption wavelength of the component to be measured.
- the light source unit 120 is, for example, a flash lamp whose light emission time can be controlled to be extremely short.
- the light source unit 120 may be a Xe flash lamp. By using a Xe flash lamp as the light source section 120, the light 106 can be stably emitted. It is preferable that the light source section 120 of this example emits light at a constant light emission period.
- the light 106 is light in the ultraviolet (wavelength range: 200 nm to 400 nm) region.
- the cell 113 seals the sample gas 30.
- the sample gas 30 may be introduced into the cell 113 via the gas suction pipe 11. Further, after the analysis is completed, the sample gas 30 may be discharged from the cell 113 via the gas discharge pipe 12.
- the light 106 from the light source section 120 is incident on the cell 113.
- the light 106 passes through the sample gas 30 inside the cell 113 and is emitted to the outside of the cell 113.
- Cell 113 may be a multiple reflection cell. In this case, the light 106 incident on the cell 113 is repeatedly reflected inside the cell 113 and is emitted to the outside of the cell 113.
- a heater 118 may be provided in the cell 113 to maintain the temperature of the sample gas 30 at a predetermined temperature.
- Cell 113 may be in contact with heater 118.
- the temperature of the heater 118 may be controlled by a temperature controller 119.
- the light receiving element 126 acquires the radiation spectrum of the light 106 that has passed through the cell 113.
- the light receiving element 126 measures the intensity of the light 106 separated by the spectrometer 122.
- Spectrometer 122 may split light 106 into multiple wavelength bands within a predetermined wavelength range.
- the predetermined wavelength range is, for example, a wavelength range of 200 nm or more and 500 nm or less. The wavelength range is not limited to this.
- the light receiving element 126 obtains the radiation spectrum of the light 106 by obtaining the intensity of the light 106 for each wavelength band.
- the light receiving element 126 acquires the intensity of the light 106 for each wavelength band.
- the light receiving element 126 is, for example, a CMOS (complementary metal oxide semiconductor) line sensor.
- the radiation spectrum of the light 106 acquired by the light receiving element 126 is transmitted to the processing unit 127 as a light reception signal.
- the processing unit 127 processes the light reception signal of the light receiving element 126.
- the processing unit 127 may convert the received light signal into a digital signal and perform digital arithmetic processing on the signal.
- the processing unit 127 measures the concentration of the measurement target component contained in the sample gas 30 based on the light reception signal of the light reception element 126.
- the processing unit 127 acquires the change in the intensity of the light 106 at the absorption wavelength of the component to be measured (that is, the change in the intensity of the light 106 that has passed through the cell 113 with respect to the intensity of the light 106 emitted by the light source unit 120). , the concentration of the component to be measured may be measured.
- the processing unit 127 is connected to the light receiving element 126 by wire via the communication line 149, but the connection may be made wirelessly.
- FIG. 2 is a diagram showing an example of the configuration of the gas analyzer 100 according to the first embodiment.
- the heater 118 and the temperature adjustment section 119 are omitted.
- the gas analyzer 100 of this example further includes a collimating lens 142.
- the collimating lens 142 converts the light 106 emitted by the light source section 120 into collimated light.
- the collimated light is light that is closer to parallel light than the light 106 emitted from the light source section 120.
- the collimated light does not need to be completely parallel light.
- the collimating lens 142 condenses the light 106 and emits collimated light in which the spread of the light 106 is suppressed.
- the cell 113 seals the sample gas 30.
- the cell 113 is provided with an entrance window 140 and an exit window 141. Although the entrance window 140 and the exit window 141 are provided on the same surface of the cell 113 in FIG. 2, the entrance window 140 and the exit window 141 may be provided on different surfaces.
- the light 106 passes through the entrance window 140 and enters the inside of the cell 113 .
- the light 106 that has passed through the sample gas 30 inside the cell 113 passes through the exit window 141 and is emitted to the outside of the cell 113 .
- one or more reflective mirrors that reflect the light 106 are housed in a space sealed with the sample gas 30.
- the reflecting mirror is arranged so that the light 106 introduced into the cell 113 is reflected multiple times inside the cell 113.
- reflective mirrors are arranged near both ends of the cell 113 in the longitudinal direction.
- the light 106 reciprocates inside the cell 113 along the longitudinal direction of the cell 113.
- a first reflective mirror 114-1, a second reflective mirror 114-2, and a central reflective mirror 112 are provided inside the cell 113.
- the first reflection mirror 114-1 is a reflection mirror that the light 106 that has passed through the entrance window 140 reaches first.
- the second reflection mirror 114-2 is the reflection mirror on which the light 106 passing through the exit window 141 is finally reflected.
- the central reflecting mirror 112 further reflects the light 106 reflected by the first reflecting mirror 114-1. Further, the central reflection mirror 112 reflects any of the incident light beams 106 toward the second reflection mirror 114-2.
- the central reflecting mirror 112 reflects the light 106 that has entered from the first reflecting mirror 114-1 toward the second reflecting mirror 114-2.
- the light 106 reflected by the second reflecting mirror 114-2 exits from the exit window 141 to the outside of the cell 113.
- the central reflecting mirror 112, the first reflecting mirror 114-1, and the second reflecting mirror 114-2 are arranged so that their reflecting surfaces 150 face each other. Light 106 is reflected at each reflective surface 150.
- the central reflection mirror 112 is arranged at the end of the cell 113 in the longitudinal direction on the side where the entrance window 140 and the exit window 141 are provided.
- the first reflecting mirror 114-1 and the second reflecting mirror 114-2 are arranged at the end of the cell 113 in the longitudinal direction on the opposite side from the central reflecting mirror 112.
- two reflecting mirrors 114 are arranged at positions facing the central reflecting mirror 112, but in other examples, more reflecting mirrors 114 may be arranged at positions facing the central reflecting mirror 112. good.
- the number of times that the light 106 travels back and forth inside the cell 113 can be increased, and the distance that the light 106 passes through the sample gas 30 can be further increased.
- the plurality of reflection mirrors 114 facing the central reflection mirror 112 may be an integral reflection mirror. In this case, among the reflecting mirrors, the area where the light passing through the entrance window 140 reaches first is the first reflecting mirror 114-1, and the area where the light passing through the exit window 141 is last reflected is the second reflecting mirror 114-1. This is the reflecting mirror 114-2.
- the gas analyzer 100 of this example includes a notch filter 110.
- the notch filter 110 is disposed on any of the optical paths through which the light 106 passes from the light source section 120 to the light receiving element 126.
- the notch filter 110 has a limiting band that reduces the intensity at any peak in the radiation spectrum of the light 106 emitted by the light source section 120.
- the notch filter 110 has a structure in which, for example, a plurality of dielectric films having different refractive indexes are laminated along the traveling direction of the light 106.
- FIG. 3 is a diagram showing an example of the radiation spectrum of the light 106 emitted by the light source section 120.
- the horizontal axis shows the wavelength
- the vertical axis shows the intensity of the light 106.
- the emission spectrum of light 106 has multiple peaks.
- a peak is a portion of the radiation spectrum shown in FIG. 3 where the intensity shows a local maximum value.
- the radiation spectrum in FIG. 3 has a peak 300 near a wavelength of 230 nm.
- the peak 300 may be the peak with the highest intensity among the plurality of peaks in the radiation spectrum.
- the radiation spectrum of this example shows an intensity of 0.20 or more at peak 300.
- the intensity of the light 106 is 0.05 or less.
- peak 300 has an intensity four times or more greater than region 302.
- the light receiving element 126 has a measurement range (dynamic range). When the dynamic range of the light receiving element 126 is set to match the peak 300, the intensity of the light 106 can be measured only in a part of the dynamic range in the wavelength band of the region 302. Therefore, in a wavelength region where the intensity of the radiation spectrum of the light 106 is low, the ratio of the signal component to the noise component such as thermal noise or stray light in the light receiving element 126 becomes small, and measurement accuracy decreases.
- FIG. 4 is a diagram showing the relationship between the intensity of the light 106 at a predetermined wavelength and the measurement error.
- the horizontal axis indicates the measured value of the intensity of the light 106 at the light receiving element 126.
- the light receiving element 126 in this example is a CMOS line sensor.
- the dynamic range of the light receiving element 126 in this example is about 100 dB. When the dynamic range in the light receiving element 126 is quantized into digital values, it is 0 to 65535 (96.4 dB).
- the dynamic range is set so that the intensity of the light 106 at the peak 300 is near the upper limit of the range of measured values.
- the measurement error As shown in FIG. 4, as the intensity of the light 106 increases, the measurement error decreases. In the example of FIG. 4, if the signal strength is about 20,000, the measurement error is sufficiently small. In a wavelength band where the intensity of the light 106 is low, such as the region 302 in FIG. 3, the measured value at the light receiving element 126 will be 16383.75 (65535 ⁇ 4) or less. Therefore, the measurement error in region 302 increases. In other words, if there is a difference in the intensity of the light 106 at a plurality of wavelengths, the dynamic range of the light receiving element 126 at any wavelength becomes small, and the measurement accuracy at that wavelength deteriorates. Therefore, when measuring the intensity of the light 106 at a plurality of wavelengths, it is preferable to minimize the difference in the intensity of the light 106 at each measurement wavelength.
- the gas analyzer 100 of this example includes a notch filter 110 that reduces the intensity of the wavelength band that includes any peak 300 of the light 106. This reduces the intensity difference in the radiation spectrum of the light 106 and reduces measurement errors at multiple wavelengths.
- FIG. 5 is a diagram showing an example of the transmission characteristics of the notch filter 110.
- the horizontal axis in FIG. 5 indicates the wavelength of the light 106 incident on the notch filter 110.
- the vertical axis indicates the ratio of the intensity of light 106 exiting from notch filter 110 to the intensity of light 106 incident on notch filter 110.
- the notch filter 110 has a limited band RB in which the transmittance has a minimum value.
- the restricted band RB is, for example, a band in which the transmittance is 70% or less.
- the minimum value of the transmittance in the restricted band RB may be 20% or more, 30% or more, or 40% or more.
- the wavelength of peak 300 is included in the restricted band RB. Thereby, the intensity of the peak 300 can be lowered, and the intensity difference in the radiation spectrum of the light 106 can be reduced.
- the center wavelength of the restricted band RB may be in the range of 220 nm to 240 nm.
- the width of the restricted band RB may be 10 nm or more, or may be 20 nm or more.
- the width of the restricted band RB may be 40 nm or less, or may be 30 nm or less.
- FIG. 6 is a diagram showing an example of the radiation spectrum of the light 106 incident on the light receiving element 126 when the notch filter 110 is used.
- the horizontal axis shows the wavelength
- the vertical axis shows the intensity of the light 106.
- the intensity near the wavelength of 230 nm is weakened.
- the notch filter 110 may be placed in the optical path inside the cell 113.
- the notch filter 110 may be placed in the optical path between the entrance window 140 and the first reflective mirror 114-1.
- FIG. 7 is a diagram showing another configuration example of the gas analyzer 100.
- the gas analyzer 100 of this example differs from the examples shown in FIGS. 2 to 6 in the position where the notch filter 110 is provided.
- Other structures are similar to any of the embodiments described in FIGS. 2 to 6.
- the notch filter 110 of this example is arranged in the optical path between the light source section 120 and the entrance window 140 of the cell 113. Notch filter 110 may be placed between an optical member such as collimating lens 142 and entrance window 140. By providing the notch filter 110 outside the cell 113, the angle of incidence of the light 106 on the notch filter 110 can be easily adjusted.
- FIG. 8 is a diagram showing another configuration example of the gas analyzer 100.
- the gas analyzer 100 of this example differs from the examples shown in FIGS. 2 to 6 in the position where the notch filter 110 is provided.
- Other structures are similar to any of the embodiments described in FIGS. 2 to 6.
- the notch filter 110 of this example is arranged in the optical path between the second reflection mirror 114-2 and the light receiving element 126.
- the notch filter 110 may be disposed inside the cell 113 between the second reflection mirror 114-2 and the exit window 141, as shown in FIG.
- the notch filter 110 may be placed in the optical path between the exit window 141 and the light receiving element 126.
- the notch filter 110 may be placed in the optical path between the exit window 141 and the spectrometer 122.
- the angle of the reflecting mirror downstream of the notch filter 110 may be adjusted accordingly. According to this example, since there is no reflecting mirror in the optical path behind the notch filter 110, there is no need to adjust the angle of the reflecting mirror.
- FIG. 9 is a diagram showing an example of adjusting the wavelength of the limited band of the notch filter 110.
- the gas analyzer 100 of this example includes an adjustment section 190 that adjusts the wavelength of the restricted band of the notch filter 110.
- the notch filter 110 of this example is a filter in which a plurality of dielectric films having different refractive indexes are laminated.
- the limited band of the notch filter 110 can be adjusted by adjusting the incident angle ⁇ 1 of the light 106 with respect to the notch filter 110.
- the adjustment unit 190 may adjust the incident angle ⁇ 1 by rotating the notch filter 110.
- the adjustment unit 190 may adjust the incident angle ⁇ 1 based on the radiation spectrum of the light 106 emitted by the light source unit 120.
- the adjustment unit 190 may detect the maximum peak 300 in the radiation spectrum and adjust the incident angle ⁇ 1 so that the peak 300 is included in the restricted band of the notch filter 110.
- the adjustment unit 190 may detect the maximum peak 300 in the radiation spectrum of the light 106 within the wavelength band to be measured by the gas analyzer 100.
- the radiation spectrum of the light 106 may be measured by the light receiving element 126, or the spectrum data may be provided by a user or the like.
- the light 106 is made incident on the cell 113 while the cell 113 is in a vacuum state or a gas that does not have an absorption spectrum within the measurement band of the gas analyzer 100 is introduced into the cell 113 .
- the light receiving element 126 may measure the radiation spectrum of the light 106 emitted from the cell 113 in this state.
- the output angle ⁇ 2 of the light 106 from the notch filter 110 can be changed.
- the emission angle ⁇ 2 of the light 106 changes, the optical path downstream of the notch filter 110 changes.
- the processing unit 127 may correct the intensity of the light reception signal when the adjustment unit 190 adjusts the incident angle ⁇ 1.
- the processing unit 127 may be preset with correction data that associates the amount of adjustment of the incident angle ⁇ 1 with the amount of correction of the intensity of the received light signal.
- the correction data may be generated from actual measurement data of how the received light intensity at the light receiving element 126 changes when the incident angle ⁇ 1 is sequentially changed.
- FIG. 10 is a diagram illustrating a reflection mirror at a stage subsequent to the notch filter 110.
- the first reflecting mirror 114-1 is shown.
- the light 106 that has passed through the notch filter 110 first reaches the first reflection mirror 114-1.
- the adjustment unit 190 of this example adjusts the angle of the reflective surface 150 of at least one reflective mirror subsequent to the notch filter 110 when adjusting the incident angle ⁇ 1 (see FIG. 9) of the light 106 with respect to the notch filter 110.
- the reflective surface 150 in this example is a concave surface
- the reflective surface 150 may be a flat surface and may include both a concave surface and a flat surface.
- the adjustment unit 190 adjusts the angle ⁇ 3 of the reflective surface 150 of the reflective mirror located after the notch filter 110 so as to offset the change in the optical axis of the light 106 due to the change in the output angle ⁇ 2.
- the angle ⁇ 3 is the angle of the reflective surface 150 with respect to the predetermined reference plane 189.
- the reference plane 189 is, for example, a plane perpendicular to the longitudinal direction of the cell 113. This can prevent the optical axis of the light 106 from shifting and, for example, preventing the light 106 from hitting the reflective surface 150 of the reflective mirror at the rear stage.
- the adjustment unit 190 may adjust the angle ⁇ 3 of the reflective surface 150 of the first reflective mirror 114-1 immediately after the notch filter 110. If the shift in the optical axis of the light 106 cannot be offset by adjusting the angle of the first reflecting mirror 114-1 alone, the adjusting section 190 may further adjust the angles of the reflecting surfaces 150 of the other reflecting mirrors. If the shift in the optical axis of the light 106 can be canceled out simply by adjusting the angle of the first reflecting mirror 114-1, the adjusting section 190 does not need to adjust the angles of the reflecting surfaces 150 of the other reflecting mirrors.
- FIG. 11 is a view of the reflective surface 150 of the reflective mirror after the notch filter 110, viewed from the traveling direction of the light 106.
- the reflective surface 150 of the first reflective mirror 114-1 is shown.
- the incident angle ⁇ 1 in the notch filter 110 is adjusted, the optical axis of the light 106 emitted from the notch filter 110 changes. Therefore, on the reflective surface 150 of the reflective mirror 114, the position of the spot 192 irradiated with the light 106 moves in the first direction in accordance with the change in the incident angle ⁇ 1 and the output angle ⁇ 2 of the notch filter 110.
- a change range is set in which the incident angle ⁇ 1 in the notch filter 110 can be changed.
- the incident angle ⁇ 1 with respect to the notch filter 110 is set to the minimum value within the change range, the light 106 is irradiated, for example, at the position of the spot 192-1.
- the incident angle ⁇ 1 with respect to the notch filter 110 is set to the maximum value within the change range, the light 106 is irradiated to the spot position 192-2, for example.
- the reflective mirror 114-1 preferably has a reflective surface 150 of a size that includes the spots 192-1 and 192-2 when the incident angle ⁇ 1 with respect to the notch filter 110 is changed from the minimum value to the maximum value.
- the reflecting mirror 114-1 has been described in FIG. 11, the same may apply to all reflecting mirrors downstream of the notch filter 110.
- the reflective surface 150 of each reflective mirror may be circular or may have another shape.
- the length of the reflective surface 150 in the first direction may be greater than the length in the second direction orthogonal to the first direction.
- the gas analyzer 100 may include a combination of two or more of the configuration described in FIG. 9, the configuration illustrated in FIG. 10, and the configuration illustrated in FIG. 11.
- FIG. 12 is a diagram showing another configuration example of the gas analyzer 100.
- the gas analyzer 100 of this example differs from the examples shown in FIGS. 2 to 11 in that a plurality of notch filters 110 are provided.
- Other structures are similar to any of the embodiments described in FIGS. 2 to 11.
- the notch filter 110 of this example is provided at a plurality of different positions on the optical path.
- a plurality of notch filters 110 may be provided inside the cell 113, a plurality of notch filters 110 may be provided outside the cell 113, and a notch filter 110 may be provided both inside and outside the cell 113. .
- the notch filter 110 is provided between the entrance window 140 and the first reflection mirror 114-1 and between the exit window 141 and the second reflection mirror 114-2.
- the pass characteristics of each notch filter 110 may be the same or different.
- the adjustment unit 190 may adjust the characteristics of each notch filter 110, or may adjust only the characteristics of any one of the notch filters 110.
- FIG. 13 is a diagram illustrating a gas analyzer 100 according to the second embodiment.
- configurations other than the cell 113 are omitted.
- the configuration other than the cell 113 may be the same as any of the embodiments described in FIGS. 2 to 12.
- the cell 113 in FIG. 13 is a folded cell in which the entrance window 140 and the exit window 141 are common windows, but the cell 113 has the same configuration as the embodiments described in FIGS. 2 to 12. Good too.
- the cell 113 in the embodiments described in FIGS. 2 to 12 may also be a folded cell shown in FIG. 13.
- a first reflecting mirror 114-1, a second reflecting mirror 114-2, a central reflecting mirror 112, and a folding reflecting mirror 115 are provided inside the cell 113.
- Each reflective mirror has a concave portion 151 on its reflective surface.
- the folding reflection mirror 115 is arranged at the end on the same side as the central reflection mirror 112 in the longitudinal direction of the cell 113.
- the folding reflection mirror 115 is arranged on the opposite side of the entrance window 140 with respect to the central reflection mirror 112.
- the first reflecting mirror 114-1 is a reflecting mirror that the light 106 that has passed through the entrance window 140 reaches first.
- the first reflective mirror 114-1 reflects the light 106 from the entrance window 140 toward the central reflective mirror 112.
- the central reflecting mirror 112 reflects the light 106 from the first reflecting mirror 114-1 toward the second reflecting mirror 114-2.
- the second reflection mirror 114-2 is arranged facing the return reflection mirror 115, reflects the light 106 from the central reflection mirror 112 toward the return reflection mirror 115, and centrally reflects the light 106 from the return reflection mirror 115. It is reflected toward mirror 112.
- the central reflecting mirror 112 reflects the light 106 from the second reflecting mirror 114-2 toward the first reflecting mirror 114-1.
- the first reflecting mirror 114-1 reflects the light 106 from the central reflecting mirror 112 toward the exit window 141. According to this example, the number of reflections of the light 106 can be easily increased without increasing the size of the cell 113.
- two reflecting mirrors 114 are arranged at positions facing the central reflecting mirror 112, but in other examples, more reflecting mirrors 114 may be arranged at positions facing the central reflecting mirror 112. good.
- the distance between the two opposing reflecting mirrors is approximately equal to the radius of curvature of the concave portion 151 of the reflecting mirror.
- the distance is 90% or more and 110% or less of the radius of curvature.
- the radius of curvature of the concave surface portion 151 of each reflecting mirror may also be approximately equal.
- the ratio of the maximum value to the minimum value of the radius of curvature of each reflecting mirror may be 100% or more and 120% or less.
- the intensity of the light 106 received by the light receiving element 126 may vary.
- the curvature of the reflecting mirror changes due to temperature fluctuations
- the inclination of the concave portion 151 of the reflecting mirror with respect to the optical axis changes.
- the change in inclination near the center of the concave surface portion 151 is small, the change in inclination with respect to the optical axis becomes relatively large at the end of the reflective surface 150 that is far from the optical axis. Therefore, when a temperature change occurs, whether or not a component of the light 106 far from the optical axis reaches the light receiving element 126 may change, and the amount of light received at the light receiving element 126 may change.
- the gas analyzer 100 of this example includes a collimating section 143.
- the collimating section 143 is arranged between the light source section 120 and the cell 113.
- the collimating section 143 converts the light 106 emitted by the light source section 120 into collimated light, and the collimated light enters the entrance window 140 .
- the collimating section 143 in this example uses a parabolic mirror. This makes it possible to generate collimated light with less influence of aberrations.
- the collimating section 143 may be a lens shown in FIG. 2 or the like.
- the width of the concave portion 151 of the first reflecting mirror 114-1, which the collimated light 106 entering from the entrance window 140 reaches first, is smaller than the width of the collimated light 106.
- the concave surface portion 151 is a concave portion of the reflective surface of the first reflective mirror 114-1. In other words, the concave portion 151 does not include a flat portion.
- the entire reflective surface of the first reflective mirror 114-1 may be the concave surface portion 151.
- FIG. 14 is a diagram of the concave surface portion 151 of the first reflecting mirror 114-1 and the spot 192 of the collimated light 106, viewed from the direction in which the collimated light 106 travels.
- a spot 192 in FIG. 14 indicates a spot at the position of the concave surface portion 151.
- the position of the concave portion 151 in the traveling direction of the collimated light 106 is the position of the center portion 193 of the concave portion 151 .
- the spot 192 is a range where the collimated light 106 is irradiated onto a plane at the position.
- the spot 192 may be a spot of the collimated light 106 immediately after the collimating section 143 emits the collimated light 106, or may be a spot of the collimated light 106 at the position of the entrance window 140.
- the spot 192 may be in a range where the light intensity in a plane perpendicular to the traveling direction of the collimated light 106 is equal to or more than half of the maximum value P1 (0.5 ⁇ P1). In other words, in the light intensity distribution on the plane, the region of full width at half maximum may be regarded as the spot 192 of the collimated light 106.
- the width of the concave portion 151 is R1, and the width of the spot 192 of the collimated light 106 is R0.
- the width may be a width in a plane parallel to the minute surface in the central portion 193 of the concave surface portion 151.
- the width may be a width in a plane perpendicular to the traveling direction of the collimated light 106.
- the concave portion 151 is circular, the width of the concave portion 151 is the diameter of the circle.
- the width of the concave surface portion 151 refers to the maximum width of the concave surface portion 151 on the surface.
- the width of the concave surface portion 151 is the length of the diagonal line of the square.
- the method for measuring the width of the spot 192 is also the same as that for measuring the width of the concave portion 151.
- the width R1 of the concave surface portion 151 is smaller than the width R0 of the spot 192 of the collimated light 106.
- components of the collimated light 106 that are away from the center portion 193 of the concave surface portion 151 are not reflected by the concave surface portion 151 . Therefore, even if the inclination of the concave portion 151 changes due to temperature fluctuations, the collimated light 106 at a position away from the central portion 193 does not affect the measured value at the light receiving element 126. Therefore, errors due to temperature fluctuations can be suppressed.
- the distribution of light intensity in a plane perpendicular to the traveling direction of the collimated light 106 can be flattened. Therefore, even if the position of the optical axis of the collimated light 106 deviates from the center part 193 of the concave part 151, fluctuations in the amount of light irradiated to the entire concave part 151 can be suppressed, and the gas concentration can be accurately controlled. Can be measured. Moreover, since each reflecting mirror has the concave surface portion 151, it becomes easier to maintain the parallelism of the reflected light on the reflecting mirror.
- the width R1 may be 20 mm or less, or 10 mm or less.
- the width R1 of the concave surface portion 151 may be 80% or less of the width R0 of the spot 192 of the collimated light 106. This makes it easier to reduce measurement errors due to temperature fluctuations.
- the width R1 may be 75% or less of the width R0, or may be 70% or less. However, if the width R1 is made too small, the amount of light reaching the light receiving element 126 will be small, resulting in a decrease in the SN ratio.
- Width R1 may be 50% or more of width R2.
- the width R1 may be 55% or more, or 60% or more of the width R2.
- the entire width of the reflective surface of the first reflective mirror 114-1 may be smaller than the width R0 of the collimated light 106.
- the entire width of the reflective surface may be smaller than the width R0 of the collimated light 106.
- the entire reflective surface may be the concave surface portion 151.
- the width of the entire reflective surface is the width R1 of the concave surface portion 151.
- FIG. 15 is a diagram of the concave surface portion 151 of the second reflecting mirror 114-2 viewed from the direction of travel of the collimated light 106.
- the same spot 192 as in FIG. 14 is shown in an overlapping manner.
- the width of the concave portion 151 of the second reflective mirror 114-2 is assumed to be R2.
- the width R1 of the concave surface portion 151 may be smaller than the width R0 of the spot 192 of the collimated light 106.
- Width R2 may be the same as width R1.
- the width R2 By making the width R2 smaller than the width R0, even if the width of the collimated light 106 expands after being reflected by the first reflective mirror 114-1, the width of the collimated light 106 can be changed again at the second reflective mirror 114-2. can be molded. Thereby, error components due to temperature fluctuations can be further suppressed, and the gas concentration can be measured with higher accuracy.
- the width R2 may be 20 mm or less, or 10 mm or less.
- the width R2 may be smaller than the width R1.
- the widths of all reflective mirrors other than the first reflective mirror 114-1 may be greater than the width R1 of the first reflective mirror 114-1.
- the width R2 may be larger than the width R1. Width R2 may be larger than width R0.
- the width of the collimated light 106 is shaped to R1. Therefore, when the width R2 of the second reflective mirror 114-2 is made the same as the width R1 of the first reflective mirror 114-1, the optical axis of the collimated light 106 is located at the center of the second reflective mirror 114-2. 193, a part of the collimated light 106 comes off the second reflection mirror 114-2 and is no longer reflected by the second reflection mirror 114-2. Therefore, the amount of light reaching the light receiving element 126 may become too small.
- the second reflective mirror 114-2 may be a reflective mirror immediately in front of the exit window 141, as in the structure shown in FIG. By shaping the diameter of the collimated light 106 to be small in the first reflecting mirror 114-1, measurement errors can be efficiently reduced. Furthermore, by making the second reflecting mirror 114-2 relatively large, it becomes easier to ensure the amount of light that reaches the light receiving element 126.
- FIG. 16 is a diagram of the concave surface portion 151 of the central reflection mirror 112 and the spot 192 of the collimated light 106 at the position of the concave surface portion 151 of the central reflection mirror 112, viewed from the traveling direction of the collimated light 106.
- the width of the concave portion 151 of the central reflecting mirror 112 is assumed to be R3.
- the collimated light 106 reaching the central reflection mirror 112 is shaped into a width R1 by the first reflection mirror 114-1. Width R3 may be greater than width R1.
- the central reflecting mirror 112 receives the collimated light 106 (spot 192-3) from the first reflecting mirror 114-1 and the collimated light 106 (spot 192-3) from the second reflecting mirror 114. 192-4) is incident. Spot 192-3 and spot 192-4 may be placed at different locations on concave portion 151.
- the central reflective mirror 112 has a width R3 larger than the width R1 so that it can reflect both the collimated light 106 from the first reflective mirror 114-1 and the collimated light 106 from the second reflective mirror 114. You may do so.
- Width R3 may be larger than width R0.
- the width R3 may be greater than 20 mm, and may be greater than or equal to 30 mm.
- FIG. 17 is a diagram showing another example of the shape of the concave portion 151 of the central reflecting mirror 112.
- the central reflection mirror 112 is circular.
- the central reflecting mirror 112 in this example is non-circular.
- the width in the direction in which the spots 192-3 and 192-4 are lined up is R3, and the width in the direction perpendicular to the direction is W3.
- Width W3 may be smaller than width R3.
- the width W3 may be larger or smaller than the width R1.
- the central reflection mirror 112 can reflect both the collimated light 106 from the first reflection mirror 114-1 and the collimated light 106 from the second reflection mirror 114.
- FIG. 18 is a diagram of the concave surface portion 151 of the folding reflection mirror 115 viewed from the traveling direction of the collimated light 106.
- the width of the concave portion 151 of the folding reflection mirror 115 is assumed to be R4.
- the width R4 of the concave surface portion 151 may be smaller than the width R0 of the spot 192 of the collimated light 106.
- Width R4 may be the same as width R1.
- Width R4 may be the same as width R2.
- the width R4 By making the width R4 smaller than the width R0, even if the width of the collimated light 106 widens after being reflected by the second reflection mirror 114-2, the width of the collimated light 106 can be shaped again at the folding reflection mirror 115. Thereby, error components due to temperature fluctuations can be further suppressed, and the gas concentration can be measured with higher accuracy.
- the width R4 may be smaller than the width R2. By gradually reducing the width of the reflecting mirror, even if the optical axis of the collimated light 106 is shifted from the center portion 193 of the reflecting mirror, it becomes easier to irradiate the entire reflecting mirror with the collimated light 106. Therefore, measurement errors due to optical axis deviation can be suppressed.
- Width R4 may be larger than width R1.
- Width R4 may be larger than width R2.
- the width R4 may be 20 mm or less, or may be 10 mm or less.
- FIG. 19 is a diagram illustrating an operation test of the gas analyzer 100.
- the measured value of the amount of light received by the light receiving element 126 at a specific wavelength was detected when the temperature of the gas analyzer 100 was changed.
- FIG. 19 is an example of a temperature change pattern of the gas analyzer 100.
- FIG. 20 is a diagram showing measured values of the amount of light received by the light receiving element 126 in the reference example.
- the widths of the concave portions 151 of all reflective mirrors are equal to or larger than the width of the collimated light 106.
- the measured value of the light-receiving element 126 fluctuates greatly as the temperature fluctuates.
- FIG. 21 is a diagram showing measured values of the amount of light received by the light receiving element 126 in the second example.
- the width R1 of the concave portion 151 of the first reflecting mirror 114-1 is smaller than the width R0 of the collimated light. In this example, fluctuations in measured values due to temperature fluctuations can be suppressed.
- FIG. 22 is a diagram showing a gas analyzer 100 according to the third example.
- the gas analyzer 100 of this example has the notch filter 110 of any of the embodiments described in the first embodiment shown in FIGS. It has a configuration added to the gas analyzer 100 of the embodiment.
- the gas analyzer 100 of this example may further include the adjustment section 190 described in FIG. 9 or 10.
- the gas analyzer 100 of this example may have each of the functions described in FIGS. 2 to 12.
- the gas analyzer 100 of this example may have a configuration that combines the configuration of the first embodiment and the configuration of the second embodiment as appropriate.
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Abstract
Description
特許文献1 特開2001-188043号公報
非特許文献1 Quantitative Spectroscopy Radiative Transfer Vol. 56, No. 2, pp. 187-208, 1996、Johan Mellqvist and Arne Rosen「DOAS FOR FLUE GAS MONITORING - I. TEMPERATURE EFFECTS IN THE U.V./VISIBLE ABSORPTION SPECTRA OF NO, N02, SO2 AND NH3」
Claims (10)
- サンプルガスに含まれる測定対象成分の濃度を測定するガス分析計であって、
前記測定対象成分の吸収波長を含む光を出射する光源部と、
前記光をコリメート光に変換するコリメート部と、
前記光を反射させる1つ以上の反射ミラーを前記サンプルガスを封止した空間に収容したセルと、
前記セルを通過した前記光の放射スペクトルを取得する受光素子と、
前記受光素子の受光信号を処理し、前記測定対象成分の濃度を測定する処理部と
を備え、
前記1つ以上の前記反射ミラーは、前記コリメート光が最初に反射する第1の反射ミラーを含み、
前記第1の反射ミラーは、前記コリメート光を反射する凹面部を含み、
前記凹面部の幅が、前記コリメート光の幅よりも小さい
ガス分析計。 - 前記第1の反射ミラーの全体の幅が、前記コリメート光の幅よりも小さい
請求項1に記載のガス分析計。 - 前記凹面部の幅が、前記コリメート光の幅の80%以下である
請求項1に記載のガス分析計。 - 前記凹面部の幅が、前記コリメート光の幅の50%以上である
請求項3に記載のガス分析計。 - 前記1つ以上の前記反射ミラーは、前記第1の反射ミラーよりも後段に配置された第2の反射ミラーを含み、
前記第2の反射ミラーは、前記コリメート光を反射する凹面部を含み、
前記第2の反射ミラーの前記凹面部の幅が、前記コリメート光の幅よりも小さい
請求項1から4のいずれか一項に記載のガス分析計。 - 前記第1の反射ミラーの前記凹面部の幅と、前記第2の反射ミラーの前記凹面部の幅とが同一である
請求項5に記載のガス分析計。 - 前記第2の反射ミラーの前記凹面部の幅は、前記第1の反射ミラーの前記凹面部の幅よりも大きい
請求項5に記載のガス分析計。 - 前記1つ以上の反射ミラーは、第2の反射ミラーから照射された前記コリメート光を、前記第2の反射ミラーに反射する折り返し反射ミラーを含み、
前記折り返し反射ミラーは、前記コリメート光を反射する凹面部を含み、
前記折り返し反射ミラーの前記凹面部の幅が、前記コリメート光の幅よりも小さい
請求項1から4のいずれか一項に記載のガス分析計。 - 前記1つ以上の反射ミラーは、前記第1の反射ミラーから照射された前記コリメート光を前記第2の反射ミラーに反射し、前記第2の反射ミラーから照射された前記コリメート光を前記第1の反射ミラーに反射する中央反射ミラーを含み、
前記中央反射ミラーは、前記コリメート光を反射する凹面部を含み、
前記凹面部の幅が、前記コリメート光の幅よりも大きい
請求項8に記載のガス分析計。 - 前記光源部から前記受光素子までの光経路のいずれかに配置され、前記光源部が出射する前記光の放射スペクトルのいずれかのピークにおける強度を減少させる制限帯域を有するノッチフィルタを更に備える
請求項1から4のいずれか一項に記載のガス分析計。
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CN202280030569.5A CN117255938A (zh) | 2022-04-05 | 2022-04-05 | 气体分析仪 |
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Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001188043A (ja) | 1999-12-28 | 2001-07-10 | Ishikawajima Harima Heavy Ind Co Ltd | 煙道中のso3ガスの濃度算出方法 |
JP2009534659A (ja) * | 2006-04-19 | 2009-09-24 | スペクトラセンサーズ, インコーポレイテッド | 炭化水素中の水蒸気の測定 |
JP2010020262A (ja) * | 2008-07-11 | 2010-01-28 | Li-Cor Inc | 誘電体ミラーにおいて光ビームの経路を形成するプロセス |
WO2010098115A1 (ja) * | 2009-02-26 | 2010-09-02 | パナソニック株式会社 | 波長変換レーザ光源及び画像表示装置 |
JP2015137910A (ja) * | 2014-01-22 | 2015-07-30 | 株式会社島津製作所 | 挿入型ガス濃度測定装置 |
JP2019007885A (ja) * | 2017-06-27 | 2019-01-17 | 株式会社島津製作所 | 反射鏡、多重反射セル、ガス濃度モニタ及び反射鏡の製造方法 |
JP2022043847A (ja) * | 2020-09-04 | 2022-03-16 | 富士電機株式会社 | ガス分析計 |
-
2022
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- 2022-04-05 EP EP22936467.4A patent/EP4317945A4/en active Pending
- 2022-04-05 JP JP2023566000A patent/JPWO2023195067A1/ja active Pending
- 2022-04-05 CN CN202280030569.5A patent/CN117255938A/zh active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001188043A (ja) | 1999-12-28 | 2001-07-10 | Ishikawajima Harima Heavy Ind Co Ltd | 煙道中のso3ガスの濃度算出方法 |
JP2009534659A (ja) * | 2006-04-19 | 2009-09-24 | スペクトラセンサーズ, インコーポレイテッド | 炭化水素中の水蒸気の測定 |
JP2010020262A (ja) * | 2008-07-11 | 2010-01-28 | Li-Cor Inc | 誘電体ミラーにおいて光ビームの経路を形成するプロセス |
WO2010098115A1 (ja) * | 2009-02-26 | 2010-09-02 | パナソニック株式会社 | 波長変換レーザ光源及び画像表示装置 |
JP2015137910A (ja) * | 2014-01-22 | 2015-07-30 | 株式会社島津製作所 | 挿入型ガス濃度測定装置 |
JP2019007885A (ja) * | 2017-06-27 | 2019-01-17 | 株式会社島津製作所 | 反射鏡、多重反射セル、ガス濃度モニタ及び反射鏡の製造方法 |
JP2022043847A (ja) * | 2020-09-04 | 2022-03-16 | 富士電機株式会社 | ガス分析計 |
Non-Patent Citations (1)
Title |
---|
JOHAN MELLQVISTARNE ROSEN: "DOAS FOR FLUE GAS MONITORING - I. TEMPERATURE EFFECTS IN THE U.V./VISIBLE ABSORPTION SPECTRA OF NO, N02, SO2, AND NH3", QUANTITATIVE SPECTROSCOPY RADIATIVE TRANSFER, vol. 56, no. 2, 1996, pages 187 - 208 |
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CN117255938A (zh) | 2023-12-19 |
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