WO2023188946A1 - 光学レンズ - Google Patents

光学レンズ Download PDF

Info

Publication number
WO2023188946A1
WO2023188946A1 PCT/JP2023/005438 JP2023005438W WO2023188946A1 WO 2023188946 A1 WO2023188946 A1 WO 2023188946A1 JP 2023005438 W JP2023005438 W JP 2023005438W WO 2023188946 A1 WO2023188946 A1 WO 2023188946A1
Authority
WO
WIPO (PCT)
Prior art keywords
optical lens
lens according
light
fine structures
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2023/005438
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
圭吾 増田
英治 武田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Intellectual Property Management Co Ltd
Original Assignee
Panasonic Intellectual Property Management Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Intellectual Property Management Co Ltd filed Critical Panasonic Intellectual Property Management Co Ltd
Priority to CN202380024939.9A priority Critical patent/CN118805101A/zh
Priority to JP2024511402A priority patent/JPWO2023188946A1/ja
Priority to EP23778976.3A priority patent/EP4502664A4/en
Publication of WO2023188946A1 publication Critical patent/WO2023188946A1/ja
Priority to US18/882,814 priority patent/US20250004170A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/118—Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements

Definitions

  • the present disclosure relates to optical lenses.
  • a metasurface is a surface with a metamaterial structure that achieves optical functions that do not exist in nature.
  • a metalens can achieve the same optical function as a conventional combination of multiple optical lenses with a single thin plate-like structure. Therefore, the metalens can contribute to reducing the size and weight of devices including lenses, such as cameras, LiDAR sensors, projectors, and AR (Augmented Reality) displays. Examples of metalens and devices using metalens are disclosed in, for example, Patent Documents 1 and 2.
  • Patent Document 1 discloses a metalens that includes a substrate and a plurality of nanostructures arranged on the substrate.
  • each of the plurality of nanostructures provides an optical phase shift that varies depending on its position, and the optical phase shift of each nanostructure defines the phase profile of the metalens.
  • the optical phase shift of each nanostructure depends on the position of the nanostructure and the size or orientation of the nanostructure.
  • Nanofins and nanopillars are exemplified as examples of nanostructures.
  • Patent Document 1 describes that a desired phase shift can be achieved by adjusting the angle of arrangement of each nanofin or adjusting the size of each nanopillar.
  • Patent Document 2 discloses a miniaturized lens assembly including a metalens and an electronic device including the same.
  • the metalens disclosed in Patent Document 2 includes a nanostructure array and is configured to form the same phase delay profile for at least two different wavelengths included in incident light.
  • the width of each of the plurality of internal pillars included in the nanostructure array is appropriately determined according to the required amount of phase retardation.
  • Conventional metalens generally have a structure that takes only normal incidence into consideration, and there was a problem with light collection performance for obliquely incident light.
  • the present disclosure provides an optical lens that can improve the focusing performance of obliquely incident light.
  • An optical lens is used for light in a predetermined target wavelength range, and includes a substrate and a plurality of lenses arranged on the surface of the substrate at intervals shorter than the shortest wavelength ⁇ in the target wavelength range. and a fine structure.
  • the refractive index of the medium surrounding the optical lens is n
  • the maximum angle of view of the optical lens is ⁇ i
  • the interval P between the fine structures is: P ⁇ /2(nsin ⁇ f +nsin ⁇ i )
  • ⁇ f is the aperture half angle with respect to the numerical aperture NA.
  • the general or specific aspects of the present disclosure may be implemented in a system, apparatus, method, integrated circuit, computer program or recording medium such as a computer readable recording disk, and the system, apparatus, method, integrated circuit, It may be realized by any combination of a computer program and a recording medium.
  • the computer-readable recording medium may include a non-volatile recording medium such as a CD-ROM (Compact Disc-Read Only Memory).
  • a device may be composed of one or more devices. When the device is composed of two or more devices, the two or more devices may be arranged within one device, or may be arranged separately into two or more separate devices.
  • the term "device" may refer not only to one device, but also to a system of multiple devices.
  • FIG. 1 is a perspective view schematically showing an example of a metalens.
  • FIG. 2 is a perspective view schematically showing an example of the structure of one unit cell.
  • FIG. 3 is a diagram schematically showing the function of a metalens.
  • FIG. 4 is a diagram for explaining conditions regarding the spacing between unit cells for producing a metalens having desired performance against vertically incident light.
  • FIG. 5A is a diagram for explaining the light-gathering performance of a conventional metalens.
  • FIG. 5B is a diagram for explaining the light-gathering performance of a conventional metalens.
  • FIG. 6 is a diagram for explaining conditions regarding the interval between unit cells for producing a metalens having desired performance against obliquely incident light.
  • FIG. 1 is a perspective view schematically showing an example of a metalens.
  • FIG. 2 is a perspective view schematically showing an example of the structure of one unit cell.
  • FIG. 3 is a diagram schematically showing the function of a metalens
  • FIG. 7A is a diagram showing an example of an ideal phase profile.
  • FIG. 7B is a diagram showing a phase profile wrapped in a phase range of ⁇ to ⁇ .
  • FIG. 7C is a diagram illustrating an example of sampling to achieve an ideal phase profile.
  • FIG. 8 is a diagram showing an example of the relationship between the number of samplings N and diffraction efficiency.
  • FIG. 9 is a diagram schematically showing an example of a metalens.
  • FIG. 10 is a schematic cross-sectional view showing an example of a metalens including a light modulation layer.
  • FIG. 11 is a diagram showing an example of a metalens in which the light modulation layer includes a plurality of other fine structures.
  • FIG. 12A is a diagram illustrating an example of the light-gathering performance of a metalens according to the prior art.
  • FIG. 12B is a diagram illustrating an example of light gathering performance of a metalens according to an embodiment of the present disclosure.
  • FIG. 12C is a diagram illustrating an example of light gathering performance of a metalens according to another embodiment of the present disclosure.
  • the term "light” is used not only for visible light (with a wavelength of about 400 nm to about 700 nm) but also for non-visible light.
  • Invisible light means electromagnetic waves included in the wavelength range of ultraviolet rays (wavelengths of about 10 nm to about 400 nm), infrared rays (wavelengths of about 700 nm to about 1 mm), or radio waves (wavelengths of about 1 mm to about 1 m).
  • the optical lens in the present disclosure can be used not only for visible light but also for non-visible light such as ultraviolet rays, infrared rays, or radio waves.
  • the optical lens is also referred to as a "metalens".
  • a metalens is an optical element that has a plurality of fine structures on its surface that are smaller than the wavelength of incident light, and achieves a lens function by phase shift caused by these fine structures.
  • FIG. 1 is a perspective view schematically showing an example of a metalens.
  • the metalens 100 shown in FIG. 1 includes a substrate 110 and a plurality of microstructures 120 provided on the surface of the substrate 110.
  • Each of the microstructures 120 in this example is a columnar body (also referred to as a "pillar") having a shape similar to a cylinder.
  • a unit element including one microstructure 120 in the metalens 100 is referred to as a "unit cell.”
  • the metalens 100 is an aggregate of a plurality of unit cells.
  • FIG. 2 is a perspective view schematically showing an example of the structure of one unit cell.
  • One unit cell includes a part of the substrate 110 and one microstructure 120 protruding from the part of the substrate 110. Each unit cell causes a phase shift in the incident light according to the structure of the microstructure 120.
  • FIG. 3 is a diagram schematically showing the functions of the metalens 100.
  • arrows indicate examples of light rays.
  • the metalens 100 in this example has the function of condensing incident light like a conventional convex lens.
  • incident light that enters from the substrate side of the metalens 100 undergoes different phase changes depending on the position by the array of microstructures 120, and is focused.
  • the shape, width, height, orientation, etc. of each microstructure 120 are appropriately determined in order to achieve desired light condensing characteristics.
  • the structure of each fine structure 120 can be appropriately determined, for example, based on data indicating the phase profile to be realized and the results of electromagnetic field simulation.
  • Each of the fine structures 120 has a size (for example, width and height) of a subwavelength shorter than the wavelength of light incident on the metalens 100, and may be arranged at intervals or periods of a subwavelength.
  • the “gap” between the microstructures 120 is the distance between the centers of two adjacent microstructures 120 when viewed in a direction perpendicular to the surface of the substrate 110.
  • the fine structures 120 may be arranged periodically or non-periodically.
  • the metalens 100 can be designed to achieve desired optical characteristics for light in a predetermined target wavelength range.
  • the target wavelength range is, for example, a wavelength range defined in specifications. If the lower limit of the target wavelength range is, for example, 1 ⁇ m, the size and interval of the fine structures 120 may be set to values shorter than 1 ⁇ m. Such fine structures with a nanoscale size smaller than 1 ⁇ m are sometimes called "submicron structures" or “nanostructures.” When the target wavelength range is an infrared wavelength range, the size and interval of the microstructures 120 may be larger than 1 ⁇ m.
  • the number of microstructures 120 provided on the surface of the metalens 100 is determined to be an appropriate number depending on the lens characteristics to be achieved.
  • the number of microstructures 120 is, for example, in the range of 100 to 10,000, and may be less than 100 or more than 10,000 depending on the case.
  • Patent Document 1 As a conventional metalens design method, for example, there is a method disclosed in Patent Document 1.
  • a plurality of nanostructures for example, nanofins or nanopillars
  • U of the unit cell i.e., the spacing between nanostructures
  • NA the numerical aperture of the metalens.
  • FIG. 4 is a diagram for explaining a conventional method of determining the interval (or period) of unit cells necessary to create a metalens with a certain numerical aperture.
  • the upper diagram (a) in FIG. 4 shows that light incident on the metalens 100 parallel to the optical axis follows a course on the surface on which the microstructure 120 is formed (hereinafter sometimes referred to as "lens surface"). This diagram schematically shows how the changes are made.
  • the lower diagram (b) in FIG. 4 is a schematic enlarged view of the area surrounded by the broken line circle in the upper diagram (a).
  • the metalens 100 In the example of FIG. 4, light is incident on the metalens 100 with a refractive index n s from a medium (eg, air) with a refractive index n in parallel to the optical axis.
  • ⁇ f is the aperture half angle with respect to the numerical aperture NA.
  • the fine structure 120 is formed so as to give the incident light a wave number component (that is, a spatial frequency component) of K 0 below at maximum.
  • the minimum sampling interval required to provide the maximum spatial frequency component K 0 in a unit cell is determined based on the sampling theorem.
  • the sampling theorem is a theorem that states that the original signal can be restored by sampling at a frequency that is more than twice the maximum frequency included in the continuous signal. According to the sampling theorem, the interval P is determined so as to satisfy the following inequality (2).
  • the interval P between the fine structures 120 is determined to satisfy the following inequality.
  • the angle of incidence of the incident light is assumed to be 0°, and the wave number component of obliquely incident light is not taken into account. Since the above sampling theorem may not be satisfied for obliquely incident light, the ideal phase cannot be uniquely reproduced, and the light collection performance as designed cannot be obtained.
  • FIGS. 5A and 5B are diagrams illustrating the light-gathering performance of the metalens 100 in which the microstructures 120 are arranged with a period P that satisfies equation (3).
  • FIG. 5A schematically shows how light that perpendicularly enters the metalens 100 is focused and enters the imaging surface of the image sensor 200.
  • FIG. 5B schematically shows how light that enters the metalens 100 perpendicularly and obliquely enters the imaging surface of the image sensor 200.
  • the metalens 100 has high focusing performance for vertically incident light. However, as shown by the broken line ellipse in FIG.
  • the obliquely incident light is not focused on one point, and forms a blurred image on the imaging surface of the image sensor 200. This is because the period of the fine structure 120 is determined by considering only the phase distribution for condensing vertically incident light. For obliquely incident light, since the sampling theorem is not satisfied, the ideal phase cannot be reproduced and the light collection performance deteriorates.
  • Optical lenses according to exemplary embodiments of the present disclosure are used for light in a predetermined target wavelength range.
  • the optical lens includes a substrate and a plurality of fine structures provided on the surface of the substrate.
  • the plurality of fine structures are arranged at intervals shorter than the shortest wavelength in the target wavelength range.
  • the target wavelength range is the wavelength range of light in which the optical lens is expected to be used, and can be determined based on the specifications of the optical lens or the specifications of the equipment in which the optical lens is mounted.
  • the target wavelength range may include, for example, at least a portion of the wavelength range of visible light (about 400 nm to about 700 nm).
  • the target wavelength range may include at least a portion of the ultraviolet wavelength range (wavelength from about 10 nm to about 400 nm).
  • the target wavelength range may include at least a portion of the infrared wavelength range (about 700 nm to about 1 mm).
  • the target wavelength range may include at least a part of the radio wave wavelength range (wavelength from about 1 mm to about 1 m).
  • the wavelength range of interest may include at least a portion of the infrared wavelength range from 2.5 ⁇ m to 25 ⁇ m.
  • the wavelength range from 2.5 ⁇ m to 25 ⁇ m can be suitably used for sensing devices that utilize infrared rays, such as LiDAR sensors or infrared cameras.
  • the term "wavelength" in this disclosure means a wavelength in free space unless otherwise specified.
  • the substrate and each microstructure may be made of a material that is transparent to light in the target wavelength range.
  • “having translucency” means having a property of transmitting incident light with a transmittance higher than 50%.
  • the substrate 110 and each microstructure 120 may be made of a material that transmits light in the target wavelength range with a transmittance of 80% or more.
  • the “distance” between microstructures means the distance between the centers of two adjacent microstructures when viewed from a direction perpendicular to the surface of the substrate (or lens surface).
  • the shortest wavelength in the target wavelength range is, for example, 2.5 ⁇ m
  • the distance between the centers of any two adjacent fine structures among the plurality of fine structures is shorter than 2.5 ⁇ m. Note that since the width of the fine structures is smaller than the interval between the fine structures, the width of the fine structures is also shorter than the shortest wavelength in the target wavelength range.
  • FIG. 6 is a diagram for explaining a method for determining the interval (or period) P of unit cells necessary to create the optical lens (i.e., metalens) according to the present embodiment.
  • the upper diagram (a) in FIG. 6 schematically shows how light that obliquely enters the metalens 100 changes its course on the lens surface on which the microstructure 120 is formed.
  • the lower diagram (b) in FIG. 6 is a schematic enlarged view of the area surrounded by the broken line circle in the upper diagram (a).
  • light with a wave number k i enters the metalens 100 with a refractive index n s at an incident angle ⁇ i from a medium (for example, air) with a refractive index n .
  • the metalens 100 can be used in combination with an image sensor, for example in an imaging device. Metalens 100 may also be used in telescopes, microscopes, or scanning optics.
  • the incident angle ⁇ i be the maximum half-field angle of the metalens 100 (ie, the maximum incident angle of light that can be used in a device including the metalens 100).
  • the maximum incident angle of light here may be, for example, the maximum viewing angle of a device such as an imaging device, a telescope, or a microscope that includes the metalens 100, or the maximum scanning angle of a scanning optical device that includes the metalens 100. Note that the metalens 100 is not limited to these uses.
  • the plurality of fine structures 120 are formed so as to give the following wave number components (ie, spatial frequency components) of K 1 at maximum to the incident light.
  • the minimum sampling interval P required to provide the maximum spatial frequency component K1 in a unit cell is determined from the sampling theorem so as to satisfy the following inequality (6).
  • the interval P between the fine structures 120 is determined so as to satisfy the following inequality (7).
  • each fine structure 120 By determining the position of each fine structure 120 so as to satisfy this inequality, the sampling theorem can be satisfied even for obliquely incident light, making it easier to reproduce the ideal phase. As a result, reduction in aberrations and reduction in light collection efficiency can be prevented.
  • FIG. 7A shows an example of an ideal phase profile.
  • the horizontal axis represents the coordinate r with the origin at the center of the metalens 100, and the vertical axis represents the phase ⁇ .
  • FIG. 7B shows a phase profile wrapped in a phase range of ⁇ to ⁇ .
  • FIG. 7C shows an example of sampling to achieve an ideal phase profile.
  • the black dots in FIG. 7C indicate examples of the positions of the microstructures 120 (ie, sampling points).
  • an appropriate number of fine structures 120 are arranged for each of a plurality of sections wrapped between - ⁇ and ⁇ . From the sampling theorem, two or more fine structures 120 are arranged in one continuous section from ⁇ to ⁇ .
  • the steepness of the phase differs near the center and near the edges of the lens.
  • the rate of change in the phase ⁇ relative to the change in position r is greater near the edges than near the center.
  • the interval P2 between the fine structures 120 near the ends may be smaller than the interval P1 between the fine structures 120 near the center.
  • the reproducibility of the phase profile improves as the number of microstructures 120 included in one continuous section from - ⁇ to ⁇ , that is, the number of samples, increases. For example, by arranging three or more or four or more fine structures 120 in each section, the reproducibility of the phase profile can be further improved.
  • Equation (6) is extended to the following equation (8).
  • the interval P between the fine structures 120 is determined so as to satisfy the following equation (9).
  • FIG. 8 is a diagram showing an example of the relationship between the number of samplings N and diffraction efficiency.
  • Practical diffraction efficiency is, for example, 80% or more. From FIG. 8, if N ⁇ 4, the diffraction efficiency becomes 80% or more. Therefore, N may be set to an integer of 4 or more, for example.
  • the interval P(r) between the fine structures 120 satisfies the following equation (10).
  • each fine structure 120 By arranging each fine structure 120 so as to satisfy formula (10), it is possible to further suppress a decrease in light collection performance.
  • a lower limit may be set for the interval P between the fine structures 120.
  • the interval P between the fine structures 120 is determined so as to satisfy the following equation (11).
  • each microstructure 120 By arranging each microstructure 120 so as to satisfy formula (11), problems such as a decrease in processing accuracy, a decrease in durability, or an increase in process variations during manufacturing can be effectively suppressed.
  • the interval P between the fine structures 120 may be determined so as to satisfy both equations (10) and (11). According to such a configuration, it is possible to achieve both improvement in light collection performance for obliquely incident light and manufacturing advantages.
  • FIG. 9 is a diagram schematically showing an example of the metalens 100.
  • the substrate 110 and the plurality of microstructures 120 are made of the same material.
  • the substrate 110 and each microstructure 120 are made of a material whose main component is silicon with a (100) crystal plane orientation. Note that the crystal plane orientation of silicon may be (110) or (111). Also, a material different from silicon may be used.
  • the thickness of the substrate 110 of the metalens 100 is 500 ⁇ m.
  • the shape of the substrate 110 is square, as shown in FIG. 1, and its size is 8 mm x 8 mm.
  • a plurality of microstructures 120 are arranged within a circular area with a diameter of 8 mm on the surface of the substrate 110.
  • FIG. 9 schematically represents a cross section of a certain portion of the metalens 100.
  • Each of the microstructures 120 shown in FIG. 9 is a cylindrical pillar.
  • the target wavelength is 10.6 ⁇ m.
  • the width D of each fine structure 120 is determined within the range of 1 ⁇ m to 3 ⁇ m depending on the target value of the phase at that position.
  • the height of each microstructure 120 is 7 ⁇ m.
  • the maximum angle of view of the metalens 100 is ⁇ 30° (that is, the maximum half angle of view is 30°).
  • the fine structures 120 are two-dimensionally arranged as shown in FIG.
  • the fine structures 120 are periodically arranged from the center toward the ends at intervals that satisfy the above equation (7). Note that these numerical values are just examples, and can be adjusted as appropriate depending on the use or purpose of the metalens 100.
  • Metalens 100 can be manufactured using common semiconductor manufacturing techniques such as lithography, for example.
  • the metalens 100 can be produced by the following method. First, as the substrate 110, a silicon substrate whose main surface has a (100) crystal plane orientation is prepared. Next, a positive resist is applied to the main surface of the silicon substrate by a method such as a spin coating method. Subsequently, desired locations are irradiated with light or electron beams, and then development processing is performed. As a result, the resist at the portions irradiated with light or electron beams is removed.
  • This silicon substrate is etched using a reactive ion etching technique using an etching gas such as SF 6 gas.
  • the main surface of the silicon substrate where the resist has been removed is etched. Thereafter, the resist remaining on the main surface of the silicon substrate is removed by a wet process using a resist stripper or the like or a dry process using O2 ashing or the like. Through these steps, the metalens 100 including the substrate 110 and each fine structure 120 can be manufactured.
  • each fine structure 120 is a convex body having a cylindrical shape, but each fine structure 120 may have a shape other than a cylinder.
  • each fine structure 120 may be a columnar body having the shape of an elliptical cylinder or a polygonal cylinder other than a cylinder.
  • each fine structure 120 may be a cone having an elliptical cone (including a cone) or a polygonal pyramid shape.
  • each fine structure 120 is not limited to a convex body, but may be a concave body.
  • the convex or concave bodies constituting the microstructure 120 may have any structure, such as a columnar body having the shape of an elliptical cylinder or a polygonal cylinder, or a cone body having the shape of an elliptical cone or a polygonal pyramid.
  • the substrate 110 and each of the plurality of microstructures 120 are made of the same material, but they may be made of different materials.
  • the difference between the refractive index of the substrate 110 and the refractive index of each of the plurality of microstructures 120 is For example, it may be 10% or less, 5% or less, or 3% or less of the minimum refractive index among the refractive index of 110 and the refractive index of each of the plurality of microstructures.
  • the substrate 110 and each of the plurality of microstructures 120 are made of, for example, silicon, germanium, chalcogenide, chalcohalide, zinc sulfide, zinc selenide, a fluoride compound, thallium halide, sodium chloride, potassium chloride, potassium bromide, or iodide. It may be made of a material whose main component is at least one selected from the group consisting of cesium and plastic (polyethylene, etc.). Here, the term "main component" refers to the component that is present in the largest proportion in terms of mole percent in the material. When the substrate 110 and each microstructure 120 are made of the materials described above, the transmittance of infrared rays from 2.5 ⁇ m to 25 ⁇ m can be increased, for example.
  • an AR (Anti-Reflection) functional film may be additionally formed.
  • the metalens 100 may be provided with various light modulation layers having a light modulation function in addition to the AR function film.
  • FIG. 10 is a schematic cross-sectional view showing an example of a metalens 100 including a light modulation layer 130.
  • the metalens 100 in this example includes a light modulation layer 130 having a light modulation function on the surface of the substrate 110 opposite to the surface on which the microstructure 120 is provided.
  • the light modulation layer 130 may have an antireflection function for incident light, or may have other functions.
  • the light modulation layer 130 may have the function of a high-pass filter, a low-pass filter, or a band-pass filter that transmits only light in the target wavelength range.
  • the light modulation layer 130 may be a polarizing filter having a function of transmitting only a specific polarized light of the incident light.
  • the light modulation layer 130 may be a filter having a function of attenuating or amplifying the transmitted intensity of incident light in a specific wavelength range.
  • the light modulation layer 130 may be an ND (Neutral Density) filter.
  • the light modulation layer 130 may have a function of refracting incident light at a specific angle.
  • the light modulation layer 130 may be composed of a single layer or multiple layers depending on the desired light modulation function. Further, the light modulation layer 130 can be created using a film forming method such as a vacuum evaporation method or a sputtering method.
  • FIG. 11 is a diagram showing an example of a metalens 100 in which the light modulation layer 130 includes a plurality of other fine structures 140 different from the fine structure 120.
  • one surface of substrate 110 is provided with an array of microstructures 120 and the opposite surface of substrate 110 is provided with another array of microstructures 140.
  • Each of the other microstructures 140 may be a convex body or a concave body.
  • the convex or concave body may be, for example, a cone having the shape of an elliptical cone or a polygonal pyramid, or a columnar body having the shape of an elliptic cylinder or a polygonal prism.
  • microstructures 140 may be different from the shape, size, and arrangement of microstructures 120.
  • Other microstructures 140 can be fabricated using the same method as the fabrication process of each microstructure 120 described in the above embodiments.
  • FIG. 12A is a diagram illustrating an example of the light-gathering performance of a metalens 100A according to the prior art.
  • the period of the fine structure is determined so as to satisfy the above formula (3), but does not satisfy the above formula (7). Since the sampling theorem is not satisfied for obliquely incident light, the obliquely incident light is not focused on one point, and a blurred image is formed.
  • FIG. 12B is a diagram illustrating an example of the light-gathering performance of the metalens 100B according to the embodiment of the present disclosure.
  • the period of the fine structure is determined so as to satisfy the above equation (7). Since the sampling theorem is satisfied not only for vertically incident light but also for obliquely incident light, obliquely incident light is also focused at one point. This makes it possible to satisfy the desired condensing performance even for obliquely incident light.
  • FIG. 12C is a diagram illustrating an example of light gathering performance of a metalens 100C according to another embodiment of the present disclosure.
  • arrays of microstructures are provided on both sides of the substrate.
  • optical lens of the present disclosure is widely applicable to devices that utilize lenses, such as cameras, LiDAR sensors, projectors, AR displays, telescopes, microscopes, or scanning optical devices.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Lenses (AREA)
PCT/JP2023/005438 2022-03-31 2023-02-16 光学レンズ Ceased WO2023188946A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN202380024939.9A CN118805101A (zh) 2022-03-31 2023-02-16 光学透镜
JP2024511402A JPWO2023188946A1 (https=) 2022-03-31 2023-02-16
EP23778976.3A EP4502664A4 (en) 2022-03-31 2023-02-16 OPTICAL LENS
US18/882,814 US20250004170A1 (en) 2022-03-31 2024-09-12 Optical lens

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022-058052 2022-03-31
JP2022058052 2022-03-31

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US18/882,814 Continuation US20250004170A1 (en) 2022-03-31 2024-09-12 Optical lens

Publications (1)

Publication Number Publication Date
WO2023188946A1 true WO2023188946A1 (ja) 2023-10-05

Family

ID=88201060

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2023/005438 Ceased WO2023188946A1 (ja) 2022-03-31 2023-02-16 光学レンズ

Country Status (5)

Country Link
US (1) US20250004170A1 (https=)
EP (1) EP4502664A4 (https=)
JP (1) JPWO2023188946A1 (https=)
CN (1) CN118805101A (https=)
WO (1) WO2023188946A1 (https=)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019516128A (ja) 2016-04-05 2019-06-13 プレジデント・アンド・フェロウズ・オブ・ハーバード・カレッジ サブ波長解像度イメージング用のメタレンズ
WO2021025759A1 (en) * 2019-08-08 2021-02-11 Massachusetts Institute Of Technology Ultra-wide field-of-view flat optics
JP2021056370A (ja) * 2019-09-30 2021-04-08 セイコーエプソン株式会社 位相変調素子および表示装置
JP2021071727A (ja) 2019-10-30 2021-05-06 三星電子株式会社Ｓａｍｓｕｎｇ Ｅｌｅｃｔｒｏｎｉｃｓ Ｃｏ．，Ｌｔｄ． メタレンズ、レンズアセンブリー及びそれを含む電子装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11835680B2 (en) * 2017-05-04 2023-12-05 President And Fellows Of Harvard College Meta-lens doublet for aberration correction
CN110376665B (zh) * 2019-07-31 2021-08-06 深圳迈塔兰斯科技有限公司 一种超透镜及具有其的光学系统

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019516128A (ja) 2016-04-05 2019-06-13 プレジデント・アンド・フェロウズ・オブ・ハーバード・カレッジ サブ波長解像度イメージング用のメタレンズ
WO2021025759A1 (en) * 2019-08-08 2021-02-11 Massachusetts Institute Of Technology Ultra-wide field-of-view flat optics
JP2021056370A (ja) * 2019-09-30 2021-04-08 セイコーエプソン株式会社 位相変調素子および表示装置
JP2021071727A (ja) 2019-10-30 2021-05-06 三星電子株式会社Ｓａｍｓｕｎｇ Ｅｌｅｃｔｒｏｎｉｃｓ Ｃｏ．，Ｌｔｄ． メタレンズ、レンズアセンブリー及びそれを含む電子装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP4502664A4

Also Published As

Publication number Publication date
CN118805101A (zh) 2024-10-18
EP4502664A1 (en) 2025-02-05
EP4502664A4 (en) 2025-07-30
US20250004170A1 (en) 2025-01-02
JPWO2023188946A1 (https=) 2023-10-05

Similar Documents

Publication Publication Date Title
JP6356557B2 (ja) レンズおよびその製造方法
US9140602B2 (en) Nanophotonic light-field sensor
WO2023188947A1 (ja) 光学レンズ、光学システム、および撮像装置
CN110609386B (zh) 基于超透镜的小f数大景深镜头的设计方法及应用
US8878122B2 (en) Two dimensional solid-state image pickup device with a light condensing element including protrusions separated by recesses
CN216901317U (zh) 基于超透镜的人造仿生复眼
CN104749665B (zh) 基于介质材料的平面透镜单元、平面透镜及制备方法
KR102771610B1 (ko) 회전형 가변 초점 평면 렌즈
WO2019196077A1 (zh) 一种低折射率全介质平面透镜的制作方法
Hou et al. Design and fabrication of monolithically integrated metalens for higher effective fill factor in long-wave infrared detectors
KR20080112973A (ko) 어레이형 수광 소자 및 집광 방법
JP2025143488A (ja) 受光素子
WO2023185915A1 (zh) 偏振成像传感器及电子设备
CN110412761A (zh) 一种基于超表面材料的多档静态变焦透镜
CN118376320A (zh) 一种基于超构透镜的光谱偏振成像器件及实现方法
CN103353626A (zh) 三维光栅抗反射结构和元器件
WO2023188771A1 (ja) 光学レンズ
JP2016218436A (ja) 回折光学素子、光学系、および、光学機器
US20260016620A1 (en) Optical lens and method for fabricating the same
WO2023188946A1 (ja) 光学レンズ
WO2024215347A2 (en) Nanooptics with high refractive index apertures
US20250341657A1 (en) Optical lens
WO2024239233A1 (zh) 透镜组件及其制备方法、透镜模组、电子设备
JP2024155353A (ja) 撮像用光学レンズおよび撮像装置
WO2025158986A1 (ja) 光学素子

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 23778976

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 202380024939.9

Country of ref document: CN

ENP Entry into the national phase

Ref document number: 2024511402

Country of ref document: JP

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 2023778976

Country of ref document: EP

ENP Entry into the national phase

Ref document number: 2023778976

Country of ref document: EP

Effective date: 20241031

NENP Non-entry into the national phase

Ref country code: DE