WO2023127197A1 - 振動装置及び撮像装置 - Google Patents

振動装置及び撮像装置 Download PDF

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Publication number
WO2023127197A1
WO2023127197A1 PCT/JP2022/031856 JP2022031856W WO2023127197A1 WO 2023127197 A1 WO2023127197 A1 WO 2023127197A1 JP 2022031856 W JP2022031856 W JP 2022031856W WO 2023127197 A1 WO2023127197 A1 WO 2023127197A1
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WO
WIPO (PCT)
Prior art keywords
internal
vibrating body
connecting portion
external
vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2022/031856
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
貴英 中土井
仁志 坂口
宣孝 岸
友基 石井
怜依 東田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to DE112022005226.0T priority Critical patent/DE112022005226T5/de
Priority to CN202280085707.XA priority patent/CN118647930A/zh
Priority to JP2023570650A priority patent/JP7816380B2/ja
Publication of WO2023127197A1 publication Critical patent/WO2023127197A1/ja
Priority to US18/670,769 priority patent/US12477199B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0651—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element of circular shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B15/00—Special procedures for taking photographs; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B17/00—Details of cameras or camera bodies; Accessories therefor
    • G03B17/02—Bodies
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B17/00—Details of cameras or camera bodies; Accessories therefor
    • G03B17/02—Bodies
    • G03B17/08—Waterproof bodies or housings
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B30/00—Camera modules comprising integrated lens units and imaging units, specially adapted for being embedded in other devices, e.g. mobile phones or vehicles
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50—Constructional details
    • H04N23/52—Elements optimising image sensor operation, e.g. for electromagnetic interference [EMI] protection or temperature control by heat transfer or cooling elements
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50—Constructional details
    • H04N23/54—Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50—Constructional details
    • H04N23/55—Optical parts specially adapted for electronic image sensors; Mounting thereof
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/57—Mechanical or electrical details of cameras or camera modules specially adapted for being embedded in other devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B2205/00—Adjustment of optical system relative to image or object surface other than for focusing
    • G03B2205/0053—Driving means for the movement of one or more optical element
    • G03B2205/0061—Driving means for the movement of one or more optical element using piezoelectric actuators

Definitions

  • the present invention relates to a vibrating device and an imaging device, and more particularly to a vibrating device using a piezoelectric element.
  • Patent Literature 1 discloses a vibrating device that includes a vibrating portion that is connected to an end portion of a translucent body and causes the translucent body to generate bending vibration.
  • the vibration of the vibrating portion is controlled to generate a predetermined vibration with respect to the translucent body, thereby miniaturizing and removing adhering liquid droplets or the like.
  • one end of the housing is connected to the thin portion that amplifies vibration, and the other end is connected to the base plate that supports the imaging section. Therefore, depending on the vibration frequency of the vibrating portion, the vibration of the thin portion may be transmitted to the base plate through the housing, vibrating the entire vibrating device, and may even vibrate the imaging portion.
  • the present invention provides a vibrating device and an imaging device that reduce transmission of the vibration of the internal vibrating body to the outside.
  • a vibrating device includes an internal vibrating body that amplifies vibration, a piezoelectric element connected to one end of the internal vibrating body, a translucent body connected to the other end of the internal vibrating body, and an internal vibrating body.
  • An external vibrator having a first connecting portion connected to the other end of the body and a second connecting portion extending from the first connecting portion to the outside of the translucent body and attenuating vibration.
  • An imaging device includes a vibrating device and an imaging element.
  • the vibration device includes an internal vibrating body for amplifying vibration, a piezoelectric element connected to one end of the internal vibrating body, a lens connected to the other end of the internal vibrating body, and a lens connected to the other end of the internal vibrating body.
  • an external vibrating body having a first connecting portion and a second connecting portion extending from the first connecting portion to the outside of the translucent body and attenuating vibration; a lens module arranged on the optical axis of the lens; Prepare.
  • the imaging device is arranged on the optical axis of the lens and lens module.
  • FIG. 1 is an external perspective view showing a vibrating device according to an embodiment
  • 2 is an exploded perspective view of the vibration device of FIG. 1
  • a cross-sectional view of the vibrating device in FIG. 1 as viewed from arrow IV 1 is a cross-sectional view showing an imaging device provided with a vibrating device according to an embodiment
  • Diagram showing simulation results of displacement distribution in vibration device Diagram showing simulation results of stress distribution in vibration device Sectional drawing which shows the vibration apparatus concerning the modification of embodiment The perspective view which shows the 1st modification of the vibration apparatus of FIG. Cross-sectional view along line X-X in FIG. Sectional drawing which shows the 2nd modification of the vibration apparatus of FIG. Sectional drawing which shows the 3rd modification of the vibration apparatus of FIG. 1.
  • the 1st perspective view which shows the 4th modification of the vibration apparatus of FIG. 2nd perspective view which shows the 4th modification of the vibration apparatus of FIG. 1 The perspective view which shows the 5th modification of the vibration apparatus of FIG. Sectional view along line XVI-XVI in Fig. 15
  • the perspective view which shows the pressing member of the vibration apparatus of FIG. The perspective view which shows the 6th modification of the vibration apparatus of FIG. Sectional view along line XIX-XIX in FIG. Sectional drawing which shows the 7th modification of the vibration apparatus of FIG. Sectional drawing which shows the 8th modification of the vibration apparatus of FIG. Sectional drawing which shows the 9th modification of the vibration apparatus of FIG.
  • Graph showing the relationship between the dimension in the first direction of the second member of the vibrating device of FIG. 22 and the stress value applied to the portion where the second connecting portion and the fixing portion are joined
  • Sectional drawing which shows the 10th modification of the vibration apparatus of FIG. Sectional drawing which shows the 11th modification of the vibration apparatus of FIG.
  • a vibrating device comprises: an internal vibrating body for amplifying vibration; a piezoelectric element connected to one end of the internal vibrating body; a translucent body connected to the other end of the internal vibrating body; An external vibrator having a first connecting portion connected to the other end of the body and a second connecting portion extending from the first connecting portion to the outside of the translucent body and attenuating vibration.
  • a vibration device is the vibration device according to the first aspect, wherein the second connecting portion extends in a direction perpendicular to a direction in which light is transmitted through the translucent body. Thereby, it is possible to reduce the influence of the vibration of the second connecting portion on the vibration of the translucent body.
  • a vibration device is the vibration device according to the second aspect, wherein the second connecting portion extends annularly.
  • a vibration device is the vibration device according to any one of the first to third aspects, wherein the second connecting portion is far from the piezoelectric element of the first connecting portion in the first direction. It is located closer to the piezoelectric element than the edge.
  • a vibrating device is the vibrating device according to any one of the first to fourth aspects, wherein the external vibrating body has a fixed portion connected to the second connecting portion, and the second connecting portion , smaller than the thickness of the fixed part. Thereby, absorption of vibration in the second connecting portion can be further improved.
  • a vibrating device is the vibrating device according to any one of the first to fifth aspects, wherein the first connecting portion has a protruding portion protruding toward the translucent body, and the first connecting portion protrudes The translucent body is sandwiched between the part and the other end of the internal vibrating body. Mechanical fixation can ensure that the translucent body is prevented from falling off.
  • a vibration device is the vibration device according to any one of the first to fifth aspects, a holding member that sandwiches the translucent body together with the other end of the internal vibrating body in the first direction; the first connecting portion is connected to the translucent body via the holding member; a gap is provided between the first connecting portion and the other end of the internal vibrating body in a radial direction with respect to the optical axis extending along the first direction of the translucent body,
  • the holding member is A body extending in the circumferential direction of the optical axis of the translucent body, facing the other end of the internal vibrating body in the first direction, and having the translucent body positioned between the other end of the internal vibrating body Department and are provided in the main body, are spaced apart in a circumferential direction with respect to the optical axis, extend from the main body along the first direction toward the other end of the internal vibrator, and are positioned in the gap.
  • first leg and a second leg to provided at an end of the first leg farther from the main body in the first direction, extends radially inward with respect to the optical axis, and is between the translucent body and the main body in the first direction; a first protrusion on which the other end of the internal vibrator is located;
  • the first connection portion is provided at an end of the second leg portion far from the body portion in the first direction, extends outward in the radial direction, and is positioned between the body portion and the body portion in the first direction. and a second protrusion. Mechanical fixation can ensure that the translucent body is prevented from falling off.
  • a vibrating device is the vibrating device according to any one of the first to fifth aspects, a cap body covering the first connecting portion in a direction intersecting the first direction; provided at an end of the cap body farther from the piezoelectric element in the first direction, protrudes toward the translucent body along a direction crossing the first direction, and extends from the internal vibrating body in the first direction; and a projecting portion facing the other end, A cap is provided that sandwiches the transparent body between the projecting portion and the other end of the internal vibrating body to connect the first connecting portion to the transparent body. Mechanical fixation can reduce the load on the translucent body while ensuring that the translucent body is prevented from falling off.
  • a vibrating device is the vibrating device according to any one of the first to fifth aspects, a cap body positioned between the translucent body and the first connecting portion in a direction intersecting the first direction and extending along the first direction; provided at an end of the cap body farther from the piezoelectric element in the first direction, protrudes toward the translucent body along a direction crossing the first direction, and extends from the internal vibrating body in the first direction; a cap including a projecting portion facing the other end; a gap is provided between the translucent body and the first connecting portion in a direction intersecting the first direction, and the cap body is positioned in the gap; The cap sandwiches the translucent body between the projecting portion and the other end of the internal vibrator to connect the first connecting portion to the translucent body. Mechanical fixation can reduce the load on the translucent body while ensuring that the translucent body is prevented from falling off.
  • a vibrating device is the vibrating device according to any one of the first to ninth aspects, and has a fitting portion connected to the first connecting portion of the external vibrating body on the other end side of the internal vibrating body.
  • the fitting portion of the internal vibrator and the first connection portion of the external vibrator are fixed by tightening with a screw structure. The amount of torque on the screw can control the tightening strength and stabilize the vibration performance.
  • a vibrating device is the vibrating device according to any one of the first to ninth aspects, wherein the internal vibrating body is provided at the other end in the first direction, and a first connection of the external vibrating body including a mating portion that connects to the portion; the fitting portion has a protrusion extending outward from the translucent body along a direction intersecting the first direction from the other end of the internal vibrator in the first direction; The first connecting portion has a second recessed portion that accommodates the projection portion so as to be fittable, The fitting portion of the internal vibrating body and the first connecting portion of the external vibrating body are fixed by fitting the protrusion and the second recess. Thereby, the cost for fixing the internal vibrator and the external vibrator can be reduced.
  • a vibrating device is the vibrating device according to any one of the first to ninth aspects, comprising an intermediate body for fixing the internal vibrating body and the external vibrating body,
  • the internal vibrator includes a fitting portion provided at the other end in the first direction and connected to a first connection portion of the external vibrator, A gap in which the intermediate body is fitted is provided between the first connecting portion and the fitting portion in a direction intersecting the first direction,
  • the fitting portion of the internal vibrating body and the first connecting portion of the external vibrating body are fixed by fitting into the gap of the intermediate body.
  • a vibrating device is the vibrating device according to any one of the first to ninth aspects, wherein the internal vibrating body is provided at the other end in the first direction, and a first connection of the external vibrating body including a mating portion that connects to the portion; one of the internal vibrating body and the external vibrating body is rotatable relative to the other of the internal vibrating body and the external vibrating body about a rotation axis extending along the first direction; A plurality of grooves extending in a circumferential direction with respect to the rotating shaft are provided in either one of the first connecting portion and the fitting portion, The other of the first connecting portion and the fitting portion is provided with a plurality of claw portions each extending in a radial direction with respect to the rotating shaft and accommodated in each of the plurality of groove portions so as to be fitted therein, The fitting portion of the internal vibrating body and the first connecting portion of the external vibrating body are fixed by fitting the plurality of grooves and the plurality of claws.
  • a vibrating device is the vibrating device according to the fifth aspect, wherein the translucent body is a lens, and further includes a lens module arranged on the optical axis of the lens. Thereby, the vibrating device 1 can be used as an imaging optical system.
  • a vibrating device is the vibrating device according to the fourteenth aspect, wherein the lens module is connected to the fixing portion of the external vibrating body.
  • a vibrating device is the vibrating device according to any one of the first to fifteenth aspects, wherein the internal vibrating body has a cylindrical shape and the external vibrating body has a hollow quadrangular prism shape.
  • a vibrating device is the vibrating device according to any one of the first to sixteenth aspects, wherein the Young's modulus of the material of the internal vibrator is larger than the Young's modulus of the material of the external vibrator. Desired vibration performance can be obtained by making the Young's modulus different between the internal vibrator and the external vibrator.
  • a vibrating device is the vibrating device according to any one of the first to seventeenth aspects, wherein the external vibrating body has a fixing portion connected to the second connecting portion, and the second connecting portion of the external vibrating body
  • the Young's modulus of the connecting portion is greater than that of the fixed portion of the external vibrator. This favors the vibration confinement of the fixed portion of the external vibrating body.
  • a vibrating device is the vibrating device according to any one of the first to seventeenth aspects,
  • the external vibrating body has a fixed portion connected to the second connection portion,
  • the density of the second connecting portion of the external vibrating body is smaller than the density of the fixing portion of the external vibrating body.
  • a vibrating device is the vibrating device according to the eighteenth or nineteenth aspect
  • the second connection part is a first member positioned farther from the piezoelectric element than the fixing portion in the first direction and extending from the first connecting portion along a direction intersecting the first direction; a second member extending toward the piezoelectric element along the first direction from an end far from the first connecting portion in a direction crossing the first direction of the first member;
  • the fixed part is a joint portion provided at an end near the first member in the first direction and extending along a direction intersecting the first direction to join the second member;
  • the dimension of the second member in the first direction is greater than or equal to the dimension of the first member in the first direction.
  • a vibrating device is the vibrating device according to the eighteenth or nineteenth aspect
  • the second connection part is a first member positioned farther from the piezoelectric element than the fixing portion in the first direction and extending from the first connecting portion along a direction intersecting the first direction; a second member extending toward the piezoelectric element along the first direction from an end far from the first connecting portion in a direction crossing the first direction of the first member;
  • the fixed part is A joint portion provided at an end far from the internal vibrating body in a direction intersecting the first direction and extending along the first direction to which the second member is joined is included.
  • a vibrating device is the vibrating device according to any one of the first to twenty-first aspects,
  • the external vibrating body has a fixed portion connected to the second connection portion,
  • the translucent body has an optical axis extending along the first direction, The distance from the optical axis in the radial direction to the optical axis to the radially inner end of at least a part of the fixing portion is from the optical axis in the radial direction to the radially outer end of the internal vibrator. less than the distance of As a result, the volume of the fixed portion can be increased, so that the vibration stability of the fixed portion of the external vibrator can be further enhanced.
  • a vibrating device is the vibrating device according to any one of the first to twenty-second aspects, wherein the internal vibrating body has a tubular body portion and a thin-walled portion, and the thin-walled portion is a tubular body. Thinner than the part. By including the thin portion in the internal vibrating body, it is possible to further reduce performance deterioration due to adhesion of water droplets.
  • the imaging device of the twenty-fourth aspect of the present invention includes a vibrating device and an imaging element.
  • the vibration device includes an internal vibrating body for amplifying vibration, a piezoelectric element connected to one end of the internal vibrating body, a lens connected to the other end of the internal vibrating body, and a lens connected to the other end of the internal vibrating body.
  • an external vibrating body having a first connecting portion and a second connecting portion extending from the first connecting portion to the outside of the translucent body and attenuating vibration; a lens module arranged on the optical axis of the lens; Prepare.
  • the imaging device is arranged on the optical axis of the lens and lens module.
  • the vibration of the lens is absorbed by the second connecting portion, so it is possible to prevent an image blurred due to the vibration of the lens.
  • An imaging device is the imaging device according to the twenty-fourth aspect, wherein the position of the bottom surface of the external vibrator in the optical axis direction is between the bottom surface of the piezoelectric element and the imaging surface of the imaging element.
  • Cameras that are used outdoors such as in-vehicle cameras, surveillance cameras, and cameras mounted on drones, have exposed lenses or covers that are made of glass or transparent plastic to cover the lenses. is provided. If foreign matter such as water droplets adheres to the lens or cover, the foreign matter may be reflected in the image captured by the camera, obstructing the field of view of the camera and making it impossible to obtain a clear image.
  • FIG. 1 is an external perspective view of a vibration device 1 according to an embodiment.
  • FIG. 2 is an exploded perspective view of the vibration device 1.
  • the Z-axis (an example of the first direction) is an example of the optical axis direction of the lens 5 and the lens module 15, and the X-axis (an example of the direction crossing the first direction) is an example of the radial direction of the lens 5. .
  • the vibrating device 1 includes an external vibrating body 3, a lens 5, an internal vibrating body 7, a piezoelectric element 9, a power supply conductor 11, a first retaining ring 13, a lens module 15, a lens barrel 17, and a second retaining ring 19. .
  • the vibrating device 1 transmits the vibration of the piezoelectric element 9 arranged in contact with the internal vibrating body 7 to the lens 5 via the internal vibrating body 7 to vibrate the lens 5 , thereby removing water droplets, mud, etc. adhering to the lens 5 . It is a device that removes foreign matter from
  • FIG. 3 is a cross-sectional view of the vibration device 1.
  • FIG. 4 is a partially enlarged view of the vibration device 1.
  • the internal vibrator 7 amplifies the vibration from the piezoelectric element 9 to vibrate the lens 5 .
  • the internal vibrator 7 has, for example, a cylindrical shape, and can be made of a metal material, ceramics, or the like. Metal materials include, for example, stainless steel, aluminum, iron, titanium, and duralumin.
  • a surface treatment such as an oxidation treatment or an alumite treatment. If the surface of the internal vibrating body 7 is, for example, black by surface treatment, deterioration of optical performance due to irregular reflection of light can be further prevented.
  • the internal vibrator 7 is a tubular member having a tubular body portion 21 , a thin portion 23 , a mounting portion 25 and a fitting portion 27 .
  • a piezoelectric element 9 is attached to the cylindrical body portion 21 on one end side of the internal vibrating body 7 and is vibrated by the piezoelectric element 9 .
  • the thin portion 23 connects the cylindrical body portion 21 and the mounting portion 25 . Since the thin portion 23 is thinner than the cylindrical body portion 21, it can act as a spring and expand the vibration. Therefore, the thin portion 23 serves to amplify the vibration when transmitting the vibration generated in the cylindrical body portion 21 to the lens 5 . If the Young's modulus of the material of the internal vibrating body 7 is large, loss during expansion of vibration can be reduced.
  • a mounting portion 25 is formed on the other end side of the thin portion 23 in the internal vibrating body 7 .
  • the mounting portion 25 is formed flat, and the outer peripheral portion of the lens 5 is mounted on the mounting portion 25 .
  • the lens 5 may be fixed to the mounting portion 25 using an adhesive or the like.
  • the mounting portion 25 has a shape projecting inward from the thin portion 23 .
  • a fitting portion 27 is formed radially outward of the mounting portion 25 on the other end side of the internal vibrating body 7 .
  • the fitting portion 27 has a screw structure and is connected to the external vibrator 3 which will be described later.
  • the external vibrating body 3 can prevent the vibration of the internal vibrating body 7 from escaping to members other than the lens 5 and efficiently transmit the vibration to the lens 5 . Further, the external vibrating body 3 is provided so as to cover the entire internal vibrating body 7 so as to protect the internal vibrating body 7 and the lens module 15 from the outside.
  • the external vibrator 3 is made of a metal material such as stainless steel, aluminum, iron, titanium, duralumin, or resin.
  • the external vibrator 3 has, for example, a hollow quadrangular prism shape.
  • the external vibrating body 3 has a first connection portion 31, a second connection portion 33, and a fixing portion 35.
  • a threaded structure 31a is formed at one end of the first connecting portion 31, and the first connecting portion 31 of the external vibrating body 3 and the fitting portion 27 of the internal vibrating body 7 are fixed by tightening with the threaded structure.
  • the first connecting portion 31 has a protruding portion 31b protruding toward the lens 5 on the other end side.
  • the lens 5 is sandwiched between the protruding portion 31b of the first connecting portion 31 and the mounting portion 25 on the other end side of the internal vibrator 7 .
  • the lens 5 is sandwiched between both the external side and the internal side, it is possible to prevent the lens 5 from coming off the vibrating device 1 even if the lens 5 vibrates.
  • the second connecting portion 33 has a role of absorbing vibration generated in the lens 5 and not transmitting the vibration to the fixed portion 35 connected to the second connecting portion 33 .
  • the second connection portion 33 extends annularly in a direction perpendicular to the optical axis direction of the lens 5, for example.
  • the thickness of the second connecting portion 33 is smaller than the thickness of the fixing portion 35, and is, for example, 0.2 mm or more and 1.0 mm or less.
  • the thickness of the second connecting portion 33 is 0.2 times or more and 1.5 times or less that of the thin portion 23 . Since the second connecting portion 33 has such a small thickness, it has a leaf spring-like property.
  • the fixed part 35 is connected to members such as a case for housing an imaging device and the lens module 15, for example, and has a node that suppresses vibration to 1/100 or less of the amount of displacement of the lens 5, and does not propagate vibration to these members. have a role.
  • the outer shape of the fixing portion 35 is quadrangular. With this shape, the volume of the fixing portion 35 can be increased without increasing the size of the imaging device. For example, a 25 mm ⁇ 25 mm cube has a larger volume than a cylindrical shape with a diameter of 25 mm. Therefore, the quadrangle makes more effective use of the volume of the four corners, making it possible to increase the volume of the fixing portion 35 without increasing the size of the imaging device.
  • the external vibrating body 3 has a dent such as a groove, foreign matter such as water droplets and mud may accumulate there, and the accumulated foreign matter may deteriorate the vibration performance.
  • the corners of the external vibrator 3 are chamfered with a radius of R2.5 or more, for example. This has the effect of reducing metal fatigue due to ultrasonic vibration. Further, by chamfering the corners of the external vibrating body 3, even if the lens 5 has a wide angle of view of 180 degrees or more, the corners of the external vibrating body 3 are less likely to be captured in the captured image. be able to.
  • the performance required for the materials of the external vibrating body 3 and the internal vibrating body 7 is different.
  • the Young's modulus of the second connecting portion 33 is lower than that of the fixed portion 35.
  • the lens 5 cooperates with the lens module 15 to form an optical imaging plane, and is arranged on the outermost layer of the optical system Ps composed of the lens 5 and the lens module 15 .
  • the lens 5 is made of glass, has a convex upper surface, and is coated with a water-repellent coating and an antireflection film (AR coating).
  • AR coating antireflection film
  • the surface of the lens 5 on the optical imaging plane side is composed of a flat portion 5a and a concave shape 5b.
  • the piezoelectric element 9 has a piezoelectric body and electrodes.
  • the piezoelectric element 9 is connected to the tubular body portion 21 of the internal vibrating body 7 with an adhesive.
  • the piezoelectric material include barium titanate (BaTiO 3 ), lead zirconate titanate (PZT: PbTiO 3 PbZrO 3 ), lead titanate (PbTiO 3 ), lead metaniobate (PbNb 2 O 6 ), Appropriate piezoelectric ceramics such as bismuth titanate ( Bi4Ti3O12 ) and (K, Na) NbO3 , or appropriate piezoelectric single crystals such as LiTaO3 and LiNbO3 .
  • the electrodes may be Ni electrodes, for example.
  • the electrode may be an electrode made of a metal thin film such as Ag or Au, which is formed by a sputtering method.
  • the electrodes can be formed by plating or vapor deposition in addition to the sputtering method.
  • the piezoelectric element 9 that generates vibration is formed in a ring shape when viewed from the axial direction (Z direction) of the internal vibrating body 7, but is not limited to this. may be any shape as long as it can vibrate the .
  • the piezoelectric element 9 is controlled by, for example, a control unit.
  • the control unit has, for example, a drive circuit for applying a drive signal to generate vibrations.
  • the drive circuit is connected to the piezoelectric element 9 via, for example, a power supply conductor 11 .
  • a feed conductor 11 is connected to the piezoelectric element 9 by means of an adhesive in order to apply an electric potential to the piezoelectric element 9 .
  • Flexible printed circuits (FPC) are used for the power supply conductor 11, and wiring is formed with copper foil on a polyimide substrate.
  • the drive circuit is composed of a printed circuit board on which mounted components are mounted, and has the function of generating an AC potential with an appropriate frequency and applying the potential to the piezoelectric body through the power supply conductor 11.
  • the piezoelectric element 9 vibrates the internal vibrator 7 in the thickness direction (Z direction) of the vibration device 1 based on the drive signal from the drive circuit.
  • the internal vibrator 7 vibrates in the thickness direction (Z direction).
  • the lens 5 is vibrated by vibrating the internal vibrating body 7 to remove foreign matter such as water droplets adhering to the lens 5 .
  • the lens module 15 is composed of a plurality of lenses and supported by the lens barrel 17. By combining the lens 5 and the lens module 15, it has an optical performance capable of forming an image as an imaging device.
  • the lens barrel 17 has a flange, and this flange is connected to the fixed portion 35 of the external vibrator 3. Since the lens 5 and the lens module 15 are not in contact with each other, the vibration of the lens 5 is also transmitted to the lens module 15, preventing deterioration in vibration performance.
  • the first and second retaining rings 13, 19 adjust the position of the lens module 15 along the optical axis.
  • the outer circumferences of the first and second retaining rings 13 and 19 are threaded. It is mated to the structure. Therefore, the position of the lens barrel 17 can be finely adjusted along the optical axis by adjusting the tightening amounts of the first and second retaining rings 13 and 19 .
  • the first and second retaining rings 13, 19 are one example of how the lens module 15 is secured.
  • An adhesive is applied between the internal vibrating body 7, the lens 5, and the external vibrating body 3, and between the internal vibrating body 7, the piezoelectric element 9, and the power supply conductor 11.
  • the material of the adhesive is hard material such as epoxy resin. Vibration loss can be reduced by using an adhesive with a high Young's modulus.
  • the optical imaging plane 37 is a plane on which the lens 5 and the lens module 15 form an image.
  • an imaging device 51 can be configured by arranging an imaging element 41 such as a CMOS image sensor at this position.
  • FIG. 5 is a cross-sectional view showing an imaging device 51 including the vibrating device 1. As shown in FIG. The position of the bottom surface of the external vibrator 3 in the optical axis direction is located between the bottom surface of the piezoelectric element 9 and the imaging surface of the imaging element 41 .
  • the imaging plane of the imaging element 41 is the same as the optical imaging plane 37 .
  • the vibrating device 1 can facilitate assembly of the imaging device 51 by arranging the imaging device 41 outside the vibrating device 1 .
  • the imaging device 41 is connected to, for example, a substrate 43 or the like.
  • the imaging element 41 can capture an image of an object to be imaged outside the vibration device 1 through the lens module 15 and the lens 5 of the vibration device 1 .
  • the vibration device 1 is fixed to the substrate 43 via a case 45, for example.
  • an adhesive is filled between the lens 5 and the internal vibrating body 7 and between the lens 5 and the external vibrating body 3, and the external vibrating device is applied before the adhesive hardens.
  • the body 3 is tightened, and then the adhesive is cured.
  • the adhesive is also filled in the threaded portions of the external vibrating body 3 and the internal vibrating body 7, and has a role of preventing loosening of the screws. Therefore, if the adhesive is a conductive adhesive, the electrical continuity between the external vibrating body 3 and the internal vibrating body 7 can be stabilized.
  • FIG. 6 Simulation results of the displacement amount distribution and the stress distribution in the vibration device 1 will be described with reference to FIGS. 6 and 7.
  • FIG. 6 For the simulation, Femtet (registered trademark) manufactured by Murata Software Co., Ltd. was used to perform piezoelectric analysis (resonance analysis).
  • the calculation conditions for the simulation are as follows.
  • the material of the lens 5 corresponds to lead glass with a density of 4.65 g/cm 3 and a Young's modulus of 125 GPa.
  • the diameter of lens 5 is 14.4 mm.
  • the material of the internal vibrator 7 corresponds to SUS420J2 with a density of 7.75 g/cm 3 and a Young's modulus of 200 GPa.
  • the piezoelectric element 9 has a density of 7.83 g/cm 3 , and a voltage of 60 Vp-p is applied to the upper and lower surfaces of the piezoelectric element 9 (the surface in contact with the internal vibrator 7 and the surface on the opposite side). .
  • the piezoelectric element has an outer diameter of 18 mm, an inner diameter of 12 mm, and a thickness of 1 mm.
  • FIG. 6 shows simulation results of the displacement amount distribution in the vibration device 1 of the embodiment.
  • the darker the color the greater the amount of displacement.
  • the entire fixing portion 35 of the external vibrator 3 serves as a node, and no vibration leakage occurs.
  • the amount of displacement of the second connection portion 33 of the external vibrator 3 decreases to zero as the distance from the first connection portion 31 to the fixed portion 35 approaches.
  • the magnitude of the amplitude at the fixed portion 35 is 1/100 or less of the amplitude at the lens 5 even at the maximum amplitude. From this, it can be seen that the vibration of the internal vibrator 7 is suppressed from being transmitted to the fixed portion 35 via the first and second connection portions 31 and 33 . Therefore, no vibration is propagated to the lens module 15 or the case of the imaging device via the external vibrator 3 . Also, foreign matter such as water droplets or mud adhering to the lens 5 can be efficiently removed.
  • FIG. 7 shows simulation results of stress distribution in the vibration device 1 of the embodiment.
  • the darker the color the greater the stress.
  • the internal vibrating body 7 has a portion where the stress is large, the stress of the external vibrating body 3 is small. Therefore, although the structure is such that the external vibrator 3 is exposed, corrosion fatigue is less likely to occur.
  • the vibrating device 1 of this embodiment includes an internal vibrating body 7 that amplifies vibration, a piezoelectric element 9 connected to one end of the internal vibrating body 7, and a lens 5 connected to the other end of the internal vibrating body 7. Prepare.
  • the vibrating device 1 further includes a first connecting portion 31 connected to the other end side of the internal vibrating body 7, and a second connecting portion 33 extending from the first connecting portion 31 to the outside of the lens 5 and damping vibration. and an external vibrating body 3 having .
  • the second connecting portion 33 attenuates the vibration from the lens 5 and the internal vibrating body 7, it is possible to reduce the transmission of the vibration to the entire external vibrating body 3. can also reduce the transmission of vibration. As a result, escape of vibration from the lens 5 can be suppressed, so the lens 5 can be efficiently vibrated.
  • the present invention is not limited to the above embodiments, and can be modified as follows.
  • the second connection portion 33 and the fixing portion 35 of the external vibrator 3 are made of the same material, but the material is not limited to this. As shown in FIG. 8, different materials may be used for the second connecting portion 33 and the fixing portion 35 .
  • the second connection portion 33 of the external vibrating body 3 may be made of a material whose Young's modulus is higher than that of the fixed portion 35 , thereby further enhancing the vibration absorption of the second connection portion 33 .
  • the vibration stability of the fixed portion 35 may be further improved by using a material having a density lower than that of the fixed portion 35 for the second connection portion 33 of the external vibrator 3 .
  • the first connection portion 31 of the external vibrating body 3 is connected to both the lens 5 and the internal vibrating body 7, but it is not limited to this.
  • the first connection portion 31 may be connected to the lens 5 without being connected to the internal vibrator 7 .
  • the lens 5 is exposed from the vibrating device 1, but the present invention is not limited to this.
  • the lens 5 may be arranged inside the vibrating device 1 and, for example, a cover made of glass may be used as a translucent body and connected to the first connecting portion 31 and the internal vibrating body 7 .
  • the second connecting portion 33 may extend in a direction perpendicular to the direction in which light passes through the cover.
  • the imaging element is arranged outside the vibrating device 1, but the present invention is not limited to this.
  • the vibrating device 1 may be used as an imaging device by accommodating an imaging device inside.
  • the fitting portion 27 of the internal vibrating body 7 and the first connecting portion 31 of the external vibrating body 3 may be fixed by a fitting structure other than a screw structure, not limited to the screw structure.
  • Fitting structures other than screw structures include, for example, a fitting structure that utilizes the physical properties of materials, a sandwiching structure that uses intermediates such as resin and thin metal plates, a fitting structure that uses a plurality of protrusions and a plurality of recesses, and a snap structure. Fitting structures using fit are included.
  • FIGS. 9 to 21 An example of the vibrating device 1 having a fitting structure other than a screw structure is shown in FIGS. 9 to 21.
  • FIG. 9 to 21 the lens module 15 may be omitted.
  • the vibrating device 1 includes a substantially cylindrical external vibrating body 3 and a substantially disk-shaped lens 5 (an example of a translucent body). As shown in FIG. 10, the radially outer end of the lens 5 is provided with a protrusion 501 extending radially outward.
  • the fitting portion 27 has a projecting portion 271 provided at the other end of the internal vibrator 7 in the first direction (eg, Z direction).
  • the protrusion 271 extends outward from the lens 5 from the other end of the internal vibrator 7 in the first direction Z along a direction intersecting the first direction Z (for example, the X direction).
  • the first connecting portion 31 extends from the end of the second connecting portion 33 near the internal vibrator 7 in the direction X intersecting the first direction Z in the first direction Z and in the direction away from the piezoelectric element 9 . extends along.
  • the first connecting portion 31 has a second concave portion 311 that accommodates the projection portion 271 in a fittable manner.
  • the first connecting portion 31 includes a plate-like portion 312, two projecting portions 31b, and a curved portion 313.
  • the plate-like portion 312 extends along the first direction Z and constitutes the bottom surface of the second concave portion 311 .
  • the projecting portions 31 b extend from both ends of the plate-like portion 312 in the first direction Z in a direction crossing the first direction Z and in a direction approaching the lens 5 .
  • the curved portion 313 connects the tip of the projecting portion 31b near the second connection portion 33 and the end of the second connection portion 33 near the internal vibrator 7 in the direction intersecting the first direction Z.
  • the second recessed portion 311 has a substantially rectangular cross-sectional shape and is configured to receive the projecting portion 271 of the fitting portion 27 and the projecting portion 501 of the lens 5 so as to be fittable at the same time.
  • the protrusion 271 of the fitting portion 27 and the protrusion 501 of the lens 5 are accommodated and fitted in the second concave portion 311 while being sandwiched and held between the two protrusions 31b. Thereby, the fitting portion 27 of the internal vibrating body 7 and the first connecting portion 31 of the external vibrating body 3 are fixed.
  • the internal vibrating body 7 is, for example, a cylindrical body having a first portion 71 in contact with the lens 5, a second portion 72 to which the piezoelectric element 9 is attached, the first portion 71 and the second portion. 72 and a third portion 73 having a substantially S-shaped cross section.
  • the first portion 71 has a cylindrical shape extending in the axial direction of the cylindrical body (that is, the first direction Z).
  • the first portion 71 extends in the radial direction of the cylindrical body and constitutes the fitting portion 27 .
  • the second portion 72 is a portion that vibrates together with the vibration of the piezoelectric element 9 and has a greater plate thickness than the first portion 71 and the third portion 73 .
  • the vibration of the piezoelectric element 9 can be efficiently transmitted to the lens 5 easily. It supports the third portion 73 and the first portion 71 and transmits the vibration of the second portion 72 to the first portion 71 .
  • the first portion 71, the second portion 72 and the third portion 73 may be formed integrally or separately.
  • the second connecting portion 33 is located closer to the piezoelectric element 9 in the first direction Z than the end 316 of the first connecting portion 31 farther from the piezoelectric element 9 .
  • the vibrating device 1 of FIG. 11 differs from the vibrating device 1 of FIGS. 9 and 10 in the following points.
  • the bottom surface of the second concave portion 311 and the tip of the projection portion 271 facing the bottom surface are inclined so as to move away from the lens 5 in the direction intersecting the first direction Z as they move away from the piezoelectric element 9 in the first direction Z.
  • the protrusion 271 and the second recess 311 are fitted and fixed by the elasticity of the material of the first connection portion 31 and the internal vibrator 7 .
  • the 1st connection part 31 contains the plate-shaped part 312 and the one protrusion part 31b.
  • the end of the plate-like portion 312 near the second connection portion 33 in the first direction Z is connected to the second connection portion 33, and the end far from the second connection portion 33 in the first direction Z of the plate-like portion 312 protrudes 31b. is provided.
  • an elastic body such as rubber or an adhesive layer is provided in a portion 100 surrounded by the lens 5, the first connecting portion 31 of the external vibrating body 3, and the first portion 71 of the internal vibrating body 7. there is Thereby, the load on the lens 5 is reduced.
  • the vibrating device 1 of FIG. 12 includes an intermediate body 60 for fixing the internal vibrating body 7 and the external vibrating body 3 .
  • the cost for fixing the internal vibrator 7 and the external vibrator 3 can be reduced.
  • the fitting of the internal vibrating body 7 and the external vibrating body 3 deforms the intermediate body 60, and the radial pressure exerted by the internal vibrating body 7 and the external vibrating body 3 on each other is higher than in the state without the intermediate body 60.
  • Chemical fixation can also be achieved by forming a thin plate between the internal vibrator 7 and the external vibrator 3 using a material that acts as a resin adhesive.
  • the intermediate body 60 is made of a thin plate made of resin or metal, and is configured to have a smaller hardness or Young's modulus than the internal vibrating body 7 and the external vibrating body 3 .
  • the lower limit value of the Young's modulus of the intermediate body 60 is 0.01 GPa
  • the upper limit value of the Young's modulus of the intermediate body 60 is a value smaller than the Young's moduli of the internal vibrator 7 and the external vibrator 3 .
  • the upper limit value of the Young's modulus of the intermediate body 60 must be smaller than the Young's moduli of both the internal vibrating bodies 7 and the external vibrating bodies 3 because the intermediate body 60 needs to be deformed.
  • the lower limit of the Young's modulus of the intermediate body 60 was defined within a range that does not affect the vibration performance.
  • a protrusion 501 extending radially outward is provided at the radially outer end of the lens 5 .
  • the internal vibrator 7 is provided at the other end of the first direction Z, and has a fitting portion 27 facing the first connection portion 31 of the external vibrator 3 in the direction intersecting the first direction Z. contains.
  • a gap 61 is provided between the plate-like portion 312 of the first connection portion 31 and the fitting portion 27 in the direction intersecting the first direction Z. As shown in FIG. The gap 61 is configured so that the intermediate body 60 can be fitted therein.
  • the fitting portion 27 of the internal vibrating body 7 and the first connecting portion 31 of the external vibrating body 3 are fixed by being fitted into the gap 61 of the intermediate body 60 .
  • each of the internal vibrating body 7 and the external vibrating body 3 has a substantially cylindrical shape.
  • the first connecting portion 31 of the external vibrator 3 is provided with a plurality of grooves 314 extending in the circumferential direction with respect to the rotation axis L.
  • the fitting portion 27 is provided with a plurality of claw portions 272 that extend in the radial direction with respect to the rotation axis L and are accommodated in the plurality of groove portions 314 so as to be fitted therein.
  • the external vibrating body 3 has four grooves 314 (only two are shown in FIG. 13) that are equally spaced in the circumferential direction, and the internal vibrating body 7 corresponds to the four grooves 314. It has four claws 272 .
  • Each groove portion 314 has an opening facing the internal vibrator 7 in the radial direction and is closed at one end in the circumferential direction to restrict movement of the accommodated claw portion 272 in the circumferential direction.
  • Each claw portion 272 protrudes in a direction away from the rotation axis L along the radial direction while extending in the circumferential direction from the radial tip of the projecting portion 271 .
  • a plurality of claws may be provided on the first connecting portion 31 of the external vibrating body 3 and a plurality of grooves may be provided on the fitting portion 27 of the internal vibrating body 7 .
  • a plurality of grooves can be provided not only in the first connecting portion 31 but also in the fitting portion 27
  • a plurality of claw portions can be provided not only in the fitting portion 27 but also in the first connecting portion 31 .
  • each claw protrudes, for example, from the plate-like portion 312 of the first connection portion 31 in a direction approaching the rotation axis L along the radial direction while extending in the circumferential direction.
  • Each groove has an opening facing the external vibrating body 3 in the radial direction and is closed at one end in the circumferential direction to restrict movement of the accommodated claw in the circumferential direction.
  • each groove 314 is filled with an adhesive
  • the claw 272 corresponding to each groove 314 may be fitted. Thereby, the internal vibrating body 7 and the external vibrating body 3 can be fixed more firmly.
  • the vibrating device 1 of FIGS. 15 to 17 includes a holding member 80 that sandwiches the lens 5 together with the other end of the internal vibrating body 7 in the first direction Z. Mechanical fixation can ensure that the lens 5 is prevented from falling off.
  • a first connection portion 31 of the external vibrator 3 is connected to the lens 5 via a pressing member 80 .
  • each of the external vibrator 3 and the lens 5 has a substantially cylindrical shape.
  • a projection 501 extending radially outward is provided at the radially outer end of the lens 5 .
  • a gap is formed between the first connecting portion 31 and the other end of the internal vibrating body 7 in the radial direction (for example, X direction) with respect to the optical axis of the lens 5. 801 is provided.
  • the pressing member 80 includes a body portion 81, a first leg portion 82 and a second leg portion 83, and a first projection portion 84 and a second projection portion 85.
  • the body part 81 has, as an example, a substantially annular shape extending in the circumferential direction with respect to the optical axis of the lens 5 .
  • the body portion 81 faces the first portion 71 which is the other end of the internal vibrating body 7 in the first direction Z, and the lens 5 is positioned between the first portion 71 of the internal vibrating body 7 and the body portion 81 .
  • a protrusion 501 is located.
  • the first leg portion 82 and the second leg portion 83 are provided on the main body portion 81 and are spaced apart in the circumferential direction. As shown in FIG. 16, each of the first leg portion 82 and the second leg portion 83 extends from the main body portion 81 along the first direction Z toward the other end of the internal vibrating body 7 and is positioned in the gap 801. are doing.
  • the pressing member 80 has four first legs 82 and four second legs 83 alternately arranged in the circumferential direction. Each of the first leg portions 82 and each of the second leg portions 83 is positioned radially in the middle of the body portion 81 .
  • the first projection 84 is provided at the end of the first leg 82 farther from the main body 81 in the first direction Z and extends radially inward.
  • the lens 5 and the first portion 71 of the internal vibrating body 7 are positioned between the first protrusion 84 and the body portion 81 .
  • the first protrusion 84 has a shape that tapers toward the inner side in the radial direction.
  • a portion of the first projecting portion 84 facing the main body portion 81 in the first direction Z is in contact with the first portion 71 of the internal vibrator 7 .
  • the second projecting portion 85 is provided at the end of the second leg portion 83 farther from the body portion 81 in the first direction Z and extends radially outward.
  • the first connection portion 31 is positioned between the second projection portion 85 and the main body portion 81 in the first direction Z.
  • the second protrusion 85 has a shape that tapers toward the outside in the radial direction. A portion of the second projecting portion 85 facing the main body portion 81 in the first direction Z is in contact with the first connecting portion 31 of the external vibrator 3 .
  • the vibrating device 1 shown in FIGS. 15 to 17 is assembled, for example, as follows.
  • ⁇ A unit is formed by attaching the pressing member 80 to the external vibrator 3 .
  • the pressing member 80 may have all the constituent parts integrally formed, or may have some or all of the constituent parts separately formed.
  • the body portion 81 is not limited to a substantially annular shape, and may be, for example, a polygonal annular shape.
  • the main body portion 81 may be formed by, for example, heat crimping.
  • the radial lengths of the first protrusion 84 and the second protrusion 85 may be the same or different.
  • a portion 110 (shown in FIG. 16) surrounded by the lens 5, the internal vibrator 7 and the pressing member 80 may be provided with an elastic material such as rubber or an adhesive layer. Thereby, the load on the lens 5 is reduced.
  • the vibrating device 1 of FIGS. 18 and 19 includes a cap 90. Mechanical fixation can reduce the load on the lens 5 while ensuring that the lens 5 is prevented from falling off.
  • each of the external vibrator 3 and the lens 5 has a substantially cylindrical shape.
  • a projection 501 extending radially outward is provided at the radially outer end of the lens 5 .
  • the cap 90 includes a cap body 91 and a projecting portion 92, and is made of resin or metal, for example.
  • the cap main body 91 covers the first connecting portion 31 in a direction intersecting the first direction Z (for example, the X direction). In the present embodiment, the cap main body 91 extends along the first direction Z, is positioned radially outside the first connecting portion 31 , and is in contact with the first connecting portion 31 .
  • the projecting portion 92 is provided at the end of the cap body 91 far from the piezoelectric element 9 in the first direction Z.
  • the protruding portion 92 protrudes toward the lens 5 along a direction intersecting the first direction Z, and faces the first portion 71, which is the other end of the internal vibrator 7, in the first direction Z.
  • a protrusion 501 of the lens 5 is positioned between the protrusion 92 and the first portion 71 of the internal vibrator 7 . 18 and 19, the projection 92 and the first portion 71 of the internal vibrator 7 sandwich the lens 5 to connect the first connection portion 31 to the lens 5 .
  • a portion 120 (shown in FIG. 196) surrounded by the lens 5, the external vibrating body 3, the internal vibrating body 7 and the cap 90 may be provided with an elastic body such as rubber or an adhesive layer. Thereby, the load on the lens 5 is reduced.
  • the vibrating device 1 of FIG. 20 differs from the vibrating device 1 of FIGS. 18 and 19 in the following points.
  • the cap main body 91 is located in the gap 901 between the lens 5 and the first connecting portion 31 in the direction intersecting the first direction Z (for example, the X direction).
  • the cap 90 includes a second projection 93 extending from the cap body 91 in the opposite direction to the projection 92;
  • a projecting portion 315 may be provided on the first connecting portion 31 as shown in FIG.
  • the projecting portion 315 is provided at the end of the first connecting portion 31 far from the second connecting portion 33 in the first direction Z, and protrudes from the first connecting portion 31 toward the lens 5 along a direction intersecting the first direction Z. extended.
  • the projecting portion 315 faces the first portion 71 of the internal vibrator 7 in the first direction Z, and sandwiches the cap body 91 in the first direction Z together with the first portion 71 .
  • the second connecting portion 33 and the fixing portion 35 of the external vibrator 3 are not limited to being made of the same material, and may be made of different materials. An example of this case is shown in FIG. In the vibrating device 1 of FIG. 22 , the second connecting portion 33 includes the first member 331 and the second member 332 , and the fixing portion 35 includes the joining portion 351 .
  • the first member 331 is located farther from the piezoelectric element 9 than the fixing portion 35 in the first direction Z, and extends from the first connecting portion 31 along a direction (eg, X direction) intersecting the first direction Z.
  • the second member 332 extends along the first direction Z toward the piezoelectric element 9 from the end of the first member 331 farther from the first connecting portion 31 in the direction intersecting the first direction Z.
  • the joint portion 351 is provided at an end of the fixed portion 35 near the first member 331 in the first direction Z, extends along a direction intersecting the first direction Z, and is joined to the second member 332 .
  • the dimension W1 in the first direction Z of the second member 332 is larger than the dimension W2 in the first direction Z of the first member 331 .
  • the joint portion 351 is configured by a surface extending in a direction intersecting the first direction Z.
  • the second member 332 has a substantially L-shaped cross section and is composed of a portion 333 extending from the first member 331 along the first direction Z and a portion 334 extending along the joint portion 351 .
  • the portion 333 extending along the first direction Z may be parallel to the first direction Z or may intersect the first direction Z.
  • the relationship between the dimension W1 of the second member 332 in the first direction Z and the stress value applied to the portion where the second connection portion 33 and the fixed portion 35 are joined was calculated by simulation.
  • Femtet registered trademark
  • the calculation conditions for the simulation are as follows.
  • Second connection part 33 made of a material equivalent to aluminum with a density of 2698.9 kg/m3 and a Young's modulus of 68.5 GPa.
  • Fixed portion 35 made of a material equivalent to SUS420J2 with a density of 7750 kg/m3 and a Young's modulus of 200 GPa.
  • the vibration device 1 of FIG. 22 may be configured as shown in FIG.
  • the vibrating device 1 of FIG. 24 differs from the vibrating device 1 of FIG. 22 in the following points.
  • the lens module 15 is omitted.
  • the second member 332 of the second connection portion 33 extends to a position farther from the first member 331 than the piezoelectric element 9 in the first direction Z.
  • the joint portion 351 of the fixed portion 35 is provided at an end far from the internal vibrating body 7 in a direction intersecting the first direction Z (for example, the X direction), and extends along the first direction Z to form the second member 332. Join.
  • the joint portion 351 is not exposed to the outside, so the joint reliability of the second connection portion 33 and the fixing portion 35 is improved.
  • the second member 332 is joined to the entire surface of the joint portion 351, but the second member 332 may be joined to a part of the joint portion 351. As shown in FIG.
  • the fixing portion 35 of the external vibrator 3 may be configured as shown in FIG. 25, for example.
  • the distance L1 from the optical axis OA in the radial direction to the optical axis OA to the radially inner end of at least a part of the fixed portion 35 is the distance from the optical axis OA in the radial direction to the internal vibrator 7. It is smaller than the distance L2 to the radially outer end.
  • the volume of the fixing portion 35 can be increased, so that the vibration stability of the fixing portion 35 can be further enhanced.
  • the smaller the distance L1 the smaller the inner diameter of the tubular shape of the fixed portion 35, making it more difficult to deform. Since the inner diameter of the cylindrical shape works by the fourth power from the moment of inertia of area, it is more effective in confining vibration than simply increasing the volume in the vertical direction.

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DE112022005226.0T DE112022005226T5 (de) 2021-12-28 2022-08-24 Vibrationsvorrichtung und bilderzeugungsvorrichtung
CN202280085707.XA CN118647930A (zh) 2021-12-28 2022-08-24 振动装置和摄像装置
JP2023570650A JP7816380B2 (ja) 2021-12-28 2022-08-24 振動装置及び撮像装置
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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025032897A1 (ja) * 2023-08-07 2025-02-13 株式会社村田製作所 振動装置、および撮像装置
WO2025047603A1 (ja) * 2023-08-31 2025-03-06 マクセル株式会社 レンズユニット、カメラモジュール、撮像システムおよび移動体
WO2025052705A1 (ja) * 2023-09-06 2025-03-13 株式会社村田製作所 振動装置
WO2025088832A1 (ja) * 2023-10-26 2025-05-01 株式会社村田製作所 振動装置および内部振動体
WO2025150230A1 (ja) * 2024-01-12 2025-07-17 株式会社村田製作所 撮像装置
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JP2026022979A (ja) * 2024-07-31 2026-02-13 パナソニックオートモーティブシステムズ株式会社 車載用カメラ
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WO2025032897A1 (ja) * 2023-08-07 2025-02-13 株式会社村田製作所 振動装置、および撮像装置
WO2025047603A1 (ja) * 2023-08-31 2025-03-06 マクセル株式会社 レンズユニット、カメラモジュール、撮像システムおよび移動体
WO2025052705A1 (ja) * 2023-09-06 2025-03-13 株式会社村田製作所 振動装置
WO2025088832A1 (ja) * 2023-10-26 2025-05-01 株式会社村田製作所 振動装置および内部振動体
WO2025150230A1 (ja) * 2024-01-12 2025-07-17 株式会社村田製作所 撮像装置
WO2025203772A1 (ja) * 2024-03-28 2025-10-02 株式会社村田製作所 センサ装置
JP2026022979A (ja) * 2024-07-31 2026-02-13 パナソニックオートモーティブシステムズ株式会社 車載用カメラ
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WO2026069811A1 (ja) * 2024-09-25 2026-04-02 株式会社村田製作所 振動装置、および撮像装置

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