WO2023124033A1 - 一种料盒的辅助定位机构 - Google Patents

一种料盒的辅助定位机构 Download PDF

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Publication number
WO2023124033A1
WO2023124033A1 PCT/CN2022/107328 CN2022107328W WO2023124033A1 WO 2023124033 A1 WO2023124033 A1 WO 2023124033A1 CN 2022107328 W CN2022107328 W CN 2022107328W WO 2023124033 A1 WO2023124033 A1 WO 2023124033A1
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Prior art keywords
eccentric column
column
positioning mechanism
auxiliary positioning
eccentric
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PCT/CN2022/107328
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English (en)
French (fr)
Inventor
陆姜鹏
肖治祥
朱涛
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苏州精濑光电有限公司
武汉精测电子集团股份有限公司
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Publication of WO2023124033A1 publication Critical patent/WO2023124033A1/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Definitions

  • the invention belongs to the technical field of automatic manufacturing, and in particular relates to an auxiliary positioning mechanism for a material box.
  • the material box is usually used as a temporary storage unit.
  • the wafers are placed in the material box by layers through the crystal protection ring, and the side of the material box 10 A cylinder 101 is provided to prevent the wafer from falling off.
  • the manipulator 20 is provided with two groups of clamping protrusions 21. When the manipulator 20 is used to take out the wafer in the material box 10, the right clamping protrusion 21 is lifted from above the wafer.
  • the placed wafer is generally manually moved, and the wafer is pushed from the side of the column 101 to the left, so that the wafer is in contact with the positioning block on the left side of the magazine 10 on the left, so as to be in contact with the column.
  • a certain gap is kept between the bodies 101, which is convenient for the manipulator 20 to take and unload materials smoothly, but there are risks such as personnel misoperation during the operation, which is not only unstable, but also affects the efficiency.
  • the purpose of the present invention is to: provide an auxiliary positioning mechanism for a magazine that can automatically maintain a gap between the wafer and the cylinder during the placement of the magazine, so as to ensure that the manipulator is aligned with the wafer. effective pick-and-place.
  • An auxiliary positioning mechanism for a material box comprising a drive assembly and an eccentric column on the material box, the material box includes a top plate and a bottom plate, and the two ends of the eccentric column are respectively movably connected to the top plate and the bottom plate;
  • the drive assembly is used for Driving the eccentric column to rotate makes a gap for the manipulator to grab the product between the product in the magazine and the eccentric column. Due to the eccentric structure of the column, the center of rotation does not coincide with the center of the section of the column, and it rotates under the action of the driving component to make the side of the surface close to the center of rotation move towards the product in the material box, thereby creating a gap between the product and the product.
  • the driving assembly can be linear motion or rotary motion.
  • the drive assembly includes a driver, a pusher and a return spring.
  • the drive drives the pusher to move.
  • the pusher contacts the eccentric column and pushes the eccentric column to rotate.
  • the magazine is placed
  • the pusher is against the eccentric column, so that a gap is maintained between the eccentric column and the product in the magazine, and the return spring is connected to the pusher or the eccentric column for Automatic reset of the pusher or the eccentric column when the magazine is taken out.
  • the driving part is a cylinder
  • the pusher is floatingly connected to the hook through a guide post
  • the hook is connected to the piston rod of the air cylinder
  • the return spring is a compression spring, which is set on the guide post .
  • the cylinder drives the claws to drive the pusher to move linearly.
  • the pusher is pressed against the eccentric column under the action of the compression spring to push the eccentric column to rotate.
  • the rotation is in place, it is offset against the eccentric column to prevent its movement.
  • the cylinder reversely moves, and the pushing block is still against the eccentric column under the action of the compression spring, forcing the eccentric column to rotate in reverse.
  • the driving part is a cylinder
  • the pusher is fixedly connected to the hook
  • the hook is connected to the piston rod of the cylinder
  • the return spring is a torsion spring
  • the torsion spring is set on the eccentric column At one end, the eccentric column is reset under the action of the torsion spring.
  • a limit block is arranged on the top plate, and one end of the torsion spring is connected to the top plate by abutting against the limit block, which facilitates the installation of the torsion spring.
  • the driver is installed on the acupuncture point seat, the material box is placed on the acupuncture point seat, and the hook is used to push and clamp the material box to the acupuncture point seat to determine the position.
  • the pushing member can push the eccentric column to rotate.
  • the drive assembly includes a pin, a connecting rod and a torsion spring.
  • the pin is movably inserted longitudinally on the bottom plate, and a bump is provided on the top to prevent the pin from falling off under its own weight.
  • the connecting rod is slidably arranged on the bottom plate On the upper surface, one end of the connecting rod is in contact with the pin, and the other end is in contact with the eccentric column.
  • the torsion spring is sleeved on one end of the eccentric column.
  • the two contact surfaces between the bolt and the connecting rod are opposite inclined surfaces along the longitudinal direction, the contact surface between the connecting rod and the eccentric column is provided with an arc surface, and the corresponding position of the eccentric column is set as an inclined surface .
  • the transfer of motion is smooth and steady throughout.
  • a guide block is arranged on the bottom plate, and a sliding groove for accommodating the connecting rod is arranged on the guiding block, and the connecting rod moves along the sliding groove.
  • the eccentric column includes a middle column and connecting columns on both ends of the middle column, the center of the connecting column deviates from the center of the middle column, and the connecting column is installed on the top plate and the bottom plate.
  • the connecting column and the middle column can be integrated or assembled.
  • the present invention has the beneficial effect: by installing the eccentric column on the material box, the drive assembly is used to rotate the eccentric column during the placement of the material box, even if the initial placement position of the product is in contact with the eccentric column, Under the action of rotation, it can maintain a gap with the eccentric column, which is convenient for the manipulator to pick and place materials, and the eccentric column will automatically reset after the material box is taken out.
  • the driving assembly of the present invention has the advantages of simple structure, flexible movement, high stability, reasonable use of driving power or gravity for placing material boxes, and cost saving.
  • Fig. 1 is the structural representation of material box, manipulator and acupuncture point seat in the prior art
  • Fig. 2 is the front view of the auxiliary positioning mechanism of the magazine in the first embodiment of the present invention
  • Fig. 3 is a sectional view along the A-A direction in Fig. 2;
  • Fig. 4 is the enlarged view of place B in Fig. 3;
  • Fig. 5 is the front view of the auxiliary positioning mechanism of the magazine in the second embodiment of the present invention.
  • Fig. 6 is the sectional view along C-C direction in Fig. 5;
  • Fig. 7 is a sectional view along the D-D direction in Fig. 5;
  • Fig. 8 is a schematic structural view of the auxiliary positioning mechanism of the magazine in the third embodiment of the present invention.
  • Figure 9 is an enlarged view at E in Figure 8.
  • Fig. 10 is a partial front view of the auxiliary positioning mechanism of the magazine in Fig. 8 .
  • the wafer 100 is placed in the material box 10 in layers, the material box 10 is placed on the acupuncture point seat 30, and the manipulator 20 passes through the clamping protrusions 21 on both sides from the two sides.
  • the end clamps the wafer 100 for pick-and-place.
  • the wafer 100 may be tangent to the column 101 with no gap between them.
  • the auxiliary positioning mechanism of the material box includes a drive assembly and an eccentric column 11 on the material box 10.
  • the material box 10 includes a top plate 12 and a bottom plate 13, and the two ends of the eccentric column 11 are respectively movably connected to the top plate 12. And the bottom plate 13; the drive assembly is used to drive the eccentric column 11 to rotate so that there is a gap between the product in the magazine 10 and the eccentric column 11 for the manipulator 20 to grab the product.
  • the eccentric column 11 includes a central column and connecting columns on both ends of the central column, the center of the connecting column deviates from the center of the central column, and the connecting column is mounted on the top plate 12 and the bottom plate 13 through bearings , wherein the connecting column and the middle column can be integrated or assembled.
  • the drive assembly includes a driver 41, a pusher 42 and a return spring 43, the driver 41 drives the pusher 42 to move, the pusher 42 contacts the eccentric column 11, and pushes the eccentric column 11 to rotate , when the magazine 10 is placed at a certain position on the acupoint seat 30 , the pusher 42 is opposed to the eccentric column 11 to keep a gap between the eccentric column 11 and the product in the magazine 10 .
  • the driving part 41 is installed on the acupuncture point seat 30, drives the claw 421 connected on the driving part 41 to push and clamp the magazine 10 to the acupuncture point seat 30 to determine the position.
  • the driving member 41 is an air cylinder, and the claw 421 is connected to the piston rod of the air cylinder.
  • the driving member 41 can also be other linear motion mechanism or linear motion converted from rotary motion, such as rack and pinion.
  • the pusher 42 is floatingly connected to the hook 421 through the guide column 422
  • the return spring 43 is connected to the pusher 42 .
  • the return spring 43 is a compression spring, which is set on the guide column 422 and is used for automatic reset of the eccentric column 11 when the magazine 10 is taken out.
  • the material box 10 is placed on the acupoint seat 30, and the hook 421 is pushed to a fixed position on the acupoint seat 30 by means of the cylinder. Since the pusher 42 is floatingly connected to the hook 421 through the guide post 422, the pusher 42 follows the hook. The claws 421 move together. During the movement, the return spring 43 ensures that the pusher 42 is always in contact with the eccentric column 11, pushing the eccentric column 11 to rotate around the center of the connecting column, and the middle column moves away from the product. Originally, the product is tangent to the eccentric column 11, and a gap is generated due to the movement of the eccentric column 11, which is convenient for the manipulator 20 to grab the product. When the magazine 10 is taken out, the claw 421 moves in reverse, driving the eccentric column 11 to return to the initial position. The profile of the contact surface between the pusher 42 and the eccentric column 11 is determined by the displacement of the eccentric column 11 .
  • FIG. 5-7 are views of the auxiliary positioning mechanism of the magazine in this embodiment.
  • the difference between the second embodiment and the first embodiment is that, as shown in FIG. Joint movement under the action of part 41;
  • return spring 43 is torsion spring, and described torsion spring is sleeved on one end of eccentric column 11, is the top in this embodiment, and one end of described torsion spring is connected to eccentric column 11 ends The other end is connected to the top plate 12 for the reset of the eccentric column 11.
  • accommodating holes may be provided on the shaft center of the eccentric column 11 and the top plate 12, and the two ends of the torsion spring are respectively placed in the accommodating holes.
  • a limit block 121 is provided on the top plate 12, and one end of the torsion spring abuts against the limit block 121. In the natural state of the torsion spring, the end of the eccentric column 11 away from the rotating shaft is close to the material box. Products within 10.
  • the material box 10 is placed on the acupuncture point seat 30, and the hook 421 is pushed to a fixed position on the acupuncture point seat 30 by means of the cylinder. Since the pusher 42 is fixedly connected to the hook 421, the pusher 42 moves together with the hook 421 , during the movement, the pusher 42 pushes the eccentric column 11 to rotate around the center of the connecting column, and the middle column moves away from the product. And produce gap, be convenient to manipulator 20 grabbing product. When the cartridge 10 is taken out, the claw 421 moves in reverse, and the eccentric column 11 returns to the initial position under the action of the torsion spring. The profile of the contact surface between the pusher 42 and the eccentric column 11 is determined by the displacement of the eccentric column 11 .
  • the auxiliary positioning mechanism of the material box in this embodiment includes a drive assembly and an eccentric column 11 on the material box 10.
  • the material box 10 includes a top plate 12 and a bottom plate 13, and the two ends of the eccentric column 11 are respectively movably connected to the top plate. 12 and bottom plate 13.
  • the driving assembly is used to drive the eccentric column 11 to rotate so that there is a gap between the product in the magazine 10 and the eccentric column 11 for the manipulator 20 to grab the product.
  • the eccentric column 11 includes a middle cylinder and connecting columns on both ends of the middle cylinder, the center of the connecting column deviates from the center of the middle cylinder, and the connecting column is installed on the top plate 12 and the top plate 12 through bearings. On the bottom plate 13, the connecting column and the central column can be integrated or assembled.
  • the driving assembly includes a pin 51, a connecting rod 52 and a torsion spring 53.
  • the pin 51 is inserted longitudinally on the bottom plate 13, and a bump 511 is provided on the top to prevent the pin 51 from falling off under its own weight.
  • the connecting rod 52 is slidably arranged on the upper surface of the bottom plate 13. One end of the connecting rod 52 is in contact with the latch 51, and the other end is in contact with the eccentric column 11.
  • the torsion spring 53 is sleeved on the lower end of the eccentric column 11. One end is connected to the end of the eccentric column 11 , and the other end is connected to the top plate 12 .
  • the torsion spring 53 can also be installed on the lower end of the eccentric column 11.
  • the two contact surfaces of the bolt 51 and the connecting rod 52 are opposite inclined surfaces along the longitudinal direction, the contact surface of the connecting rod 52 and the eccentric column 11 is provided with an arc surface, and the corresponding position of the eccentric column 11 is provided as an inclined surface.
  • the bottom plate 13 is provided with a guide block 131 , and the guide block 131 is provided with a sliding groove for accommodating the connecting rod 52 , and the connecting rod 52 moves along the sliding groove.
  • elements such as slide rails can also be used as guides.
  • the acupoint seat 30 or other planes push the latch 51 to move upward, so that the connecting rod 52 is eccentric along the chute.
  • the column 11 moves in the direction, thereby pushing the eccentric column 11 to rotate around the center of the connecting column, and the middle column moves away from the product. Even if the original product is tangent to the eccentric column 11, there is a gap due to the movement of the eccentric column 11 , to facilitate the manipulator 20 to grab the product.
  • the latch 51 resets under the action of its own weight, and the eccentric column 11 reversely rotates under the effect of the torsion spring 53. Reset under pressure.
  • the first and second embodiments above are preferably applicable to the case where the hook 421 is provided in the acupoint seat 30
  • the third embodiment is preferably applicable to the case where there are no other driving parts during the placement of the cartridge 10 .

Abstract

本发明公开了一种料盒的辅助定位机构，可应用于板类或盘类产品尤其是晶圆产品的贮存取放作业中；该料盒的辅助定位机构包括驱动组件和料盒上的偏心立柱，所述料盒包括顶板和底板，所述偏心立柱两端分别活动连接所述顶板和底板；所述驱动组件用于驱动所述偏心立柱旋转使得所述料盒内产品与偏心立柱之间留有用于机械手抓取产品的间隙。本发明的料盒的辅助定位机构结构简单，运动灵活，稳定性高，合理利用放置料盒的驱动动力或重力，节约成本，通过在料盒上安装偏心立柱，利用驱动组件在料盒放置过程中使偏心立柱旋转，与料盒内产品保持间隙，在料盒取出后偏心立柱自动复位。

Description

一种料盒的辅助定位机构 技术领域
本发明属于自动化制造技术领域，尤其涉及一种料盒的辅助定位机构。
背景技术
在产品生产过程中例如半导体晶圆的制造检测过程中，通常使用料盒作为临时贮存单元，如图1所示，晶圆通过护晶环按层摆放在料盒内，料盒10侧边设有柱体101用于防止晶圆脱落，机械手20上设有左右两组夹料凸柱21，利用机械手20取出料盒10内的晶圆时，右侧夹料凸柱21从晶圆上方到达晶圆右侧，再下降至晶圆侧边，之后机械手20左侧的夹料凸柱21在气缸的作用下向右移动，使晶圆左右侧均卡入夹料凸柱21内，这就要求柱体101与晶圆初始放置位置之间留有一定的间隙，否则左侧夹料凸柱21向右移动，使晶圆向右运动以卡入右侧夹料凸柱21时，晶圆与柱体101干涉无法右移，导致机械手20取放晶圆失败。
目前，一般通过人工手动对放置后的晶圆进行移动，由柱体101一侧向左侧推动晶圆，使晶圆在左侧与料盒10左侧的靠位块相接触，从而与柱体101之间保持一定的间隙，便于机械手20顺利取放料，但在作业中存在人员误操作等风险，既不稳定，也影响效率。
因此，有必要提供一种在料盒放置过程中能够使晶圆与柱体之间自动保持间隙的辅助定位机构。
发明内容
鉴于以上所述现有技术的不足，本发明的目的在于：提供一种在料盒放置过程中能够使晶圆与柱体之间自动保持间隙的料盒的辅助定位机构，保证机械手对 晶圆的有效取放。
为实现上述发明目的，本发明提供以下技术方案：
一种料盒的辅助定位机构，包括驱动组件和料盒上的偏心立柱，所述料盒包括顶板和底板，所述偏心立柱两端分别活动连接所述顶板和底板；所述驱动组件用于驱动所述偏心立柱旋转使得所述料盒内产品与所述偏心立柱之间留有用于机械手抓取产品的间隙。由于立柱为偏心结构，旋转中心与立柱断面中心不重合，在驱动组件作用下旋转，使表面靠近旋转中心一侧朝向料盒内产品方向移动，即可与产品之间产生间隙。所述驱动组件可以是直线运动，也可以是旋转运动。
所述驱动组件包括驱动件、推动件和复位弹簧，所述驱动件驱动所述推动件运动，所述推动件与所述偏心立柱相触，推动所述偏心立柱旋转，当所述料盒放置至确定位置时，所述推动件与所述偏心立柱相抵，使所述偏心立柱与所述料盒内产品保持间隙，所述复位弹簧连接于所述推动件或所述偏心立柱上，用于所述料盒取出时所述推动件或所述偏心立柱的自动复位。
所述驱动件为气缸，所述推动件通过导向柱浮动连接于勾爪上，所述勾爪连接于所述气缸的活塞杆上，所述复位弹簧为压缩弹簧，套装于所述导向柱上。工作时，所述气缸驱动勾爪从而驱动推动件直线运动，推动件在压缩弹簧的作用下与偏心立柱相抵，推动偏心立柱旋转，当旋转到位后，与偏心立柱相抵，防止其活动，在料盒取出过程中，气缸反向运动，推动块在压缩弹簧作用下依然与所述偏心立柱相抵，迫使偏心立柱反向旋转。
所述驱动件为气缸，所述推动件固定连接于勾爪上，所述勾爪连接于所述气缸的活塞杆上，所述复位弹簧为扭簧，所述扭簧套装于所述偏心立柱一端，所述偏心立柱在所述扭簧作用下复位。
所述顶板上设有限位块，所述扭簧一端通过靠接在所述限位块上连接所述顶板，方便扭簧的安装。
所述驱动件安装于穴位座上，所述料盒放置于所述穴位座上，所述勾爪用于将所述料盒推动装夹至所述穴位座上确定位置，此时在勾爪推动料盒至确定位置过程中，所述推动件即可推动所述偏心立柱旋转。
所述驱动组件包括插销、连杆和扭簧，所述插销纵向活动穿插于所述底板上，顶部设有防止所述插销在自重下脱落的凸块，所述连杆滑动设于所述底板上表面，所述连杆一端与所述插销相触，另一端与所述偏心立柱相触，所述扭簧套设于所述偏心立柱一端当放置所述料盒时，所述插销向上运动，推动所述连杆直线运动从而推动所述偏心立柱旋转，当取出所述料盒时，所述偏心立柱在所述扭簧作用下复位，推动所述连杆滑动复位。在工作过程中，所述插销的向上运动由料盒放置过程中底部平台的顶起作用实现，取出料盒时，所述插销在自重作用下复位。
所述插销与所述连杆的两接触面为沿纵向方向上的相正对的斜面，所述连杆与所述偏心立柱的接触面设有弧面，所述偏心立柱对应位置设为斜面。整个过程中运动的传递平缓稳定。
所述底板上设有导向块，所述导向块上设有容纳所述连杆的滑槽，所述连杆沿所述滑槽运动。
所述偏心立柱包括中部柱体和所述中部柱体两端面上的连接柱，所述连接柱的中心与所述中部柱体的中心相偏离，所述连接柱通过轴承安装于所述顶板和底板上。其中连接柱与中部柱体可以是一体的，也可以是组装的。
与现有技术相比，本发明的有益效果：通过将在料盒上安装偏心立柱，利用驱动组件在料盒放置过程中使偏心立柱旋转，即使产品的初始放置位置与偏心立 柱相接触，也可在旋转作用下与偏心立柱保持间隙，便于机械手进行取放料，在料盒取出后偏心立柱自动复位。本发明的驱动组件结构简单，运动灵活，稳定性高，合理利用放置料盒的驱动动力或重力，节约成本。
附图说明
为了更清楚地说明本发明具体实施例中的技术方案，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，下面描述的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1为现有技术中料盒、机械手和穴位座的结构示意图；
图2为本发明实施例一中料盒的辅助定位机构的主视图；
图3为图2中沿A-A方向的剖视图；
图4为图3中B处的放大图；
图5为本发明实施例二中料盒的辅助定位机构的主视图；
图6为图5中沿C-C方向的剖视图；
图7为图5中沿D-D方向的剖视图；
图8为本发明实施例三中的料盒的辅助定位机构的结构示意图；
图9为图8中E处的放大图；
图10为图8中的料盒的辅助定位机构的部分主视图。
附图标记：10-料盒，100-晶圆，101-柱体，11-偏心立柱，12-顶板，121-限位块，13-底板，131-导向块，20-机械手，21-夹料凸柱，30-穴位座，41-驱动件，42-推动件，421-勾爪，422-导向柱，43-复位弹簧，51-插销，511-凸块，52-连杆，53-扭簧。
具体实施方式
下面将对本发明具体实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅是本发明的一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
实施例一：
以盘状产品晶圆为例，如图1所示，晶圆100按层放置于料盒10内，料盒10放置于穴位座30上，机械手20通过两侧的夹料凸柱21从两端夹持晶圆100进行取放。在料盒10的转运过程中，晶圆100可能与柱体101相切，两者之间没有空隙。
结合图2-图4所示，料盒的辅助定位机构包括驱动组件和料盒10上的偏心立柱11，料盒10包括顶板12和底板13，偏心立柱11两端分别活动连接所述顶板12和底板13；所述驱动组件用于驱动偏心立柱11旋转使得料盒10内产品与偏心立柱11之间留有用于机械手20抓取产品的间隙。偏心立柱11包括中部柱体和所述中部柱体两端面上的连接柱，所述连接柱的中心与所述中部柱体的中心相偏离，所述连接柱通过轴承安装于顶板12和底板13上，其中连接柱与中部柱体可以是一体的，也可以是组装的。
如图2和图4所示，所述驱动组件包括驱动件41、推动件42和复位弹簧43，驱动件41驱动推动件42运动，推动件42与偏心立柱11相触，推动偏心立柱11旋转，当料盒10放置至穴位座30上的确定位置时，推动件42与偏心立柱11相抵，使偏心立柱11与料盒10内产品保持间隙。驱动件41安装于穴位座30上，驱动连接在驱动件41上的勾爪421将料盒10推动装夹至穴位座30上确定 位置。在本实施例中，驱动件41为气缸，勾爪421连接于所述气缸的活塞杆上。在其他实施例中，驱动件41也可以为其他直线运动机构或旋转运动转换的直线运动，例如齿轮齿条等。推动件42通过导向柱422浮动连接于勾爪421上，复位弹簧43连接于推动件42上。具体的，复位弹簧43为压缩弹簧，套装于导向柱422上，用于料盒10取出时偏心立柱11的自动复位。
工作原理：
料盒10放置于穴位座30上，依靠所述气缸驱动勾爪421推动至穴位座30上的固定位置，由于推动件42通过导向柱422浮动连接于勾爪421上，所以推动件42随勾爪421一起运动，在运动过程中，复位弹簧43保证推动件42始终与偏心立柱11相触，推动偏心立柱11以所述连接柱的中心为圆心旋转，中部柱体向远离产品方向移动，即使原本产品与偏心立柱11相切，也由于偏心立柱11的移动而产生间隙，便于机械手20抓取产品。在将料盒10取出时，勾爪421反向运动，驱动偏心立柱11回到初始位置。其中推动件42与偏心立柱11接触面的轮廓由偏心立柱11的移动位移确定。
实施例二：
图5-图7为本实施例中料盒的辅助定位机构的视图，实施例二与实施例一相区别的是，如图6所示，推动件42固定连接于勾爪421上，在驱动件41的作用下共同运动；如图7所示，复位弹簧43为扭簧，所述扭簧套装于偏心立柱11一端，在本实施例中为顶端，所述扭簧一端连接偏心立柱11端部，另一端连接顶板12，用于偏心立柱11的复位。具体的，可以在偏心立柱11的轴心和顶板12上设置容纳孔，将所述扭簧两端分别放置于容纳孔中。在本实施例中，在顶板12上设有限位块121，所述扭簧一端靠接在限位块121上，在所述扭簧自然 状态下，偏心立柱11远离旋转轴的一端靠近料盒10内产品。
工作原理：
料盒10放置于穴位座30上，依靠所述气缸驱动勾爪421推动至穴位座30上的固定位置，由于推动件42固定连接于勾爪421上，所以推动件42随勾爪421一起运动，在运动过程中，推动件42推动偏心立柱11以所述连接柱的中心为圆心旋转，中部柱体向远离产品方向移动，即使原本产品与偏心立柱11相切，也由于偏心立柱11的移动而产生间隙，便于机械手20抓取产品。在将料盒10取出时，勾爪421反向运动，偏心立柱11在所述扭簧作用下回到初始位置。其中推动件42与偏心立柱11接触面的轮廓由偏心立柱11的移动位移确定。
实施例三：
结合图8-图10所示，本实施的料盒的辅助定位机构包括驱动组件和料盒10上的偏心立柱11，料盒10包括顶板12和底板13，偏心立柱11两端分别活动连接顶板12和底板13。驱动组件用于驱动偏心立柱11旋转使得料盒10内产品与偏心立柱11之间留有用于机械手20抓取产品的间隙。偏心立柱11包括中部柱体和所述中部柱体两端面上的连接柱，所述连接柱的中心与所述中部柱体的中心相偏离，所述连接柱通过轴承安装于所述顶板12和底板13上，其中连接柱与中部柱体可以是一体的，也可以是组装的。
如图9和图10所示，所述驱动组件包括插销51、连杆52和扭簧53，插销51纵向活动穿插于底板13上，顶部设有防止插销51在自重下脱落的凸块511。连杆52滑动设于底板13上表面，连杆52一端与插销51相触，另一端与偏心立柱11相触，在本实施例中，扭簧53套设于偏心立柱11下端，扭簧53一端连接偏心立柱11端部，另一端连接顶板12。在另外的实施例中，扭簧53也可以安 装于偏心立柱11下端。当放置料盒10时，插销51向上运动，推动连杆52直线运动从而推动偏心立柱11旋转，当取出料盒10时，偏心立柱11在扭簧53作用下复位，推动连杆52滑动复位。
插销51与连杆52的两接触面为沿纵向方向上的相正对的斜面，连杆52与偏心立柱11的接触面设有弧面，偏心立柱11对应位置设为斜面。在本实施例中，底板13上设有导向块131，导向块131上设有容纳连杆52的滑槽，连杆52沿所述滑槽运动。在另外的实施例中，也可以利用滑轨等元件作为导向。
工作原理：
当要将料盒10放置于穴位座30或其他平面上时，在料盒10向下放置过程中，穴位座30或其他平面推动插销51向上运动，使得连杆52沿所述滑槽向偏心立柱11方向移动，从而推动偏心立柱11以所述连接柱的中心为圆心旋转，中部柱体向远离产品方向移动，即使原本产品与偏心立柱11相切，也由于偏心立柱11的移动而产生间隙，便于机械手20抓取产品。在将料盒10取出时，插销51在自重作用下复位，偏心立柱11在扭簧53作用下反向旋转，由于连杆52不再受到插销51的挤压，所以会在偏心立柱11的挤压作用下复位。
上述实施例一和实施例二优选适用于穴位座30内设有勾爪421的情况下，实施例三优选适用于料盒10放置过程中无其他驱动件的情况。
以上对本发明所提供的料盒的辅助定位机构进行了详细介绍，本文中应用了具体个例对本发明的结构及工作原理进行了阐述，以上实施例的说明只是用于帮助理解本发明的方法及核心思想。应当指出，对于本技术领域的普通技术人员来说，在不脱离本发明原理的前提下，还可以对本发明进行若干改进和修饰，这些改进和修饰也落入本发明权利要求保护的范围内。

Claims (10)

  1. 一种料盒的辅助定位机构，其特征在于，包括驱动组件和料盒(10)上的偏心立柱(11)，所述料盒(10)包括顶板(12)和底板(13)，所述偏心立柱(11)两端分别活动连接所述顶板(12)和底板(13)；所述驱动组件用于驱动所述偏心立柱(11)旋转使得所述料盒(10)内产品与偏心立柱之间留有用于机械手抓取产品的间隙。
  2. 根据权利要求1所述的料盒的辅助定位机构，其特征在于，所述驱动组件包括驱动件(41)、推动件(42)和复位弹簧(43)，所述驱动件(41)驱动所述推动件(42)运动，所述推动件(42)与所述偏心立柱(11)相触，推动所述偏心立柱(11)旋转，当所述料盒(10)放置至确定位置时，所述推动件(42)与所述偏心立柱(11)相抵，使所述偏心立柱(11)与所述料盒(10)内产品保持间隙，所述复位弹簧(43)连接于所述推动件(42)或所述偏心立柱(11)上，用于所述料盒(10)取出时所述推动件(42)或所述偏心立柱(11)的自动复位。
  3. 根据权利要求2所述的料盒的辅助定位机构，其特征在于，所述驱动件(41)为气缸，所述推动件(42)通过导向柱(422)浮动连接于勾爪(421)上，所述勾爪(421)连接于所述气缸的活塞杆上，所述复位弹簧(43)为压缩弹簧，套装于所述导向柱(422)上。
  4. 根据权利要求2所述的料盒的辅助定位机构，其特征在于，所述驱动件(41)为气缸，所述推动件(42)固定连接于勾爪(421)上，所述勾爪(421)连接于所述气缸的活塞杆上，所述复位弹簧(43)为扭簧，所述扭簧套装于所述偏心立柱(11)一端，用于所述偏心立柱(11)的复位。
  5. 根据权利要求4所述的料盒的辅助定位机构，其特征在于，所述顶板(12) 上设有限位块(121)，所述扭簧一端通过靠接在所述限位块(121)上连接所述顶板(12)。
  6. 根据权利要求3-5任一项所述的料盒的辅助定位机构，其特征在于，所述驱动件(41)安装于穴位座(30)上，所述料盒(10)放置于所述穴位座(30)上，所述勾爪(421)用于将所述料盒(10)推动装夹至所述穴位座(30)上确定位置。
  7. 根据权利要求1所述的料盒的辅助定位机构，其特征在于，所述驱动组件包括插销(51)、连杆(52)和扭簧(53)，所述插销(51)纵向活动穿插于所述底板(13)上，顶部设有防止所述插销(51)在自重下脱落的凸块(511)，所述连杆(52)滑动设于所述底板(13)上表面，所述连杆(52)一端与所述插销(51)相触，另一端与所述偏心立柱(11)相触，所述扭簧(53)套设于所述偏心立柱(11)一端；当放置所述料盒(10)时，所述插销(51)向上运动，推动所述连杆(52)直线运动从而推动所述偏心立柱(11)旋转，当取出所述料盒(10)时，所述偏心立柱(11)在所述扭簧(53)作用下复位，推动所述连杆(52)滑动复位。
  8. 根据权利要求7所述的料盒的辅助定位机构，其特征在于，所述插销(51)与所述连杆(52)的两接触面为沿纵向方向上的相正对的斜面，所述连杆(52)与所述偏心立柱(11)的接触面设有弧面，所述偏心立柱(11)对应位置设为斜面。
  9. 根据权利要求7或8所述的料盒的辅助定位机构，其特征在于，所述底板(13)上设有导向块(131)，所述导向块(131)上设有容纳所述连杆(52)的滑槽，所述连杆(52)沿所述滑槽运动。
  10. 根据权利要求1所述的料盒的辅助定位机构，其特征在于，所述偏心立柱(11)包括中部柱体和所述中部柱体两端面上的连接柱，所述连接柱的中心与所述中部柱体的中心相偏离，所述连接柱通过轴承安装于所述顶板(12)和底板(13)上。
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