WO2023100734A1 - Système de formation d'images, procédé de formation d'images et programme - Google Patents

Système de formation d'images, procédé de formation d'images et programme Download PDF

Info

Publication number
WO2023100734A1
WO2023100734A1 PCT/JP2022/043318 JP2022043318W WO2023100734A1 WO 2023100734 A1 WO2023100734 A1 WO 2023100734A1 JP 2022043318 W JP2022043318 W JP 2022043318W WO 2023100734 A1 WO2023100734 A1 WO 2023100734A1
Authority
WO
WIPO (PCT)
Prior art keywords
illumination
light
image
dimensional
illumination pattern
Prior art date
Application number
PCT/JP2022/043318
Other languages
English (en)
Japanese (ja)
Inventor
祥一 田尾
誉之 岡野
Original Assignee
コニカミノルタ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by コニカミノルタ株式会社 filed Critical コニカミノルタ株式会社
Publication of WO2023100734A1 publication Critical patent/WO2023100734A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T1/00—General purpose image data processing
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/50—Image enhancement or restoration using two or more images, e.g. averaging or subtraction
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/56—Cameras or camera modules comprising electronic image sensors; Control thereof provided with illuminating means

Definitions

  • the present invention relates to an image forming system, an image forming method, and a program.
  • a single-element detector such as a photodiode or a PMT (photomultiplier tube) may be used in visual inspection of an object.
  • a technique called SPI single pixel imaging
  • the object is irradiated with different illumination patterns multiple times, the scattered light intensity at that time is acquired with a single-element detector, and the primary measurement is performed based on the signal intensity of the detector for the illumination pattern It is a technique of reconstructing a 1D or 2D image.
  • the object of the present invention is to achieve the one-dimensional or two-dimensional image acquisition of a moving object or the one-dimensional or two-dimensional image acquisition of a moving object with a single-element detector. That is.
  • the image forming system of the present invention includes: an illumination projection unit that irradiates light of a plurality of illumination patterns onto an object to be measured that moves at a substantially constant speed; a detection unit that detects the light intensity of light reflected from the measurement object by the light of the illumination pattern; an illumination control unit that sequentially switches the illumination pattern from among the plurality of illumination patterns and irradiates light from the illumination projection unit; a generation unit that generates a reconstructed image that is two-dimensionally reconstructed from the illumination pattern and the light intensity of the reflected light corresponding to the illumination pattern; Prepare.
  • the image forming system of the present invention includes: an illumination projection unit that irradiates a measurement object with light of a plurality of illumination patterns and that moves at a substantially constant speed; a detection unit that detects the light intensity of light reflected from the measurement object by the light of the illumination pattern; an illumination control unit that sequentially switches the illumination pattern from among the plurality of illumination patterns and irradiates light from the illumination projection unit; a generation unit that generates a reconstructed image that is two-dimensionally reconstructed from the illumination pattern and the light intensity of the reflected light corresponding to the illumination pattern; Prepare.
  • the image forming method of the present invention is Light of a plurality of illumination patterns is sequentially switched to irradiate an object to be measured moving at a substantially constant speed, detecting the light intensity of the light reflected from the measurement object by the light of the illumination pattern; A reconstructed image that is two-dimensionally reconstructed from the illumination pattern and the light intensity of the reflected light corresponding to the illumination pattern is generated.
  • the image forming method of the present invention is Moving at a substantially constant speed, sequentially switching the light of a plurality of illumination patterns, irradiating the object to be measured, detecting the light intensity of the light reflected from the measurement object by the light of the illumination pattern; A reconstructed image that is two-dimensionally reconstructed from the illumination pattern and the light intensity of the reflected light corresponding to the illumination pattern is generated.
  • the program of the present invention is an illumination projection unit that irradiates light of a plurality of illumination patterns onto an object to be measured that moves at a substantially constant speed; and a detection unit that detects the light intensity of light reflected from the object to be measured by the light of the illumination pattern.
  • a computer of an image forming system comprising an illumination control unit that sequentially switches the illumination pattern from among the plurality of illumination patterns and irradiates light from the illumination projection unit; a generation unit that generates a reconstructed image that is two-dimensionally reconstructed from the illumination pattern and the light intensity of the reflected light corresponding to the illumination pattern; function as
  • the program of the present invention is an illumination projection unit that irradiates a measurement object with light of a plurality of illumination patterns and that moves at a substantially constant speed; and a detection unit that detects the light intensity of light reflected from the measurement object by the light of the illumination pattern.
  • a computer of an image forming system comprising an illumination control unit that sequentially switches the illumination pattern from among the plurality of illumination patterns and irradiates light from the illumination projection unit; a generation unit that generates a reconstructed image that is two-dimensionally reconstructed from the illumination pattern and the light intensity of the reflected light corresponding to the illumination pattern; function as
  • a single-element detector can acquire a one-dimensional or two-dimensional image of a moving object or acquire a one-dimensional or two-dimensional image of an object while moving.
  • FIG. 1 is a schematic diagram showing a schematic configuration of an image forming system according to a first embodiment
  • FIG. 2 is a block diagram showing the functional configuration of the image forming system of the first embodiment
  • FIG. It is an example of a one-dimensional structure illumination projection part. It is an example of a one-dimensional illumination pattern.
  • 4 is a flowchart of image forming processing; It is a figure which shows the relationship between a scanning period and detection time.
  • FIG. 2 is a schematic diagram showing a schematic configuration of an image forming system according to a second embodiment
  • FIG. It is an example of an illumination projection part of a two-dimensional structure. It is an example of a two-dimensional illumination pattern.
  • FIG. 11 is a schematic diagram showing a schematic configuration of an image forming system according to a third embodiment
  • FIG. 11 is a schematic diagram showing a schematic configuration of an image forming system according to a fourth embodiment
  • FIG. 11 is a schematic diagram showing a schematic configuration of an image forming system according to another embodiment
  • FIG. 11 is a schematic diagram showing a schematic configuration of an image forming system according to another embodiment
  • FIG. 11 is a schematic diagram showing a schematic configuration of an image forming system according to another embodiment
  • FIG. 11 is a schematic diagram showing a schematic configuration of an image forming system according to another embodiment
  • FIG. 10 is a diagram showing the relationship between scan cycle and detection time in a conventional image forming system
  • FIG. 10 is a diagram showing the relationship between scan cycle and detection time in a conventional image forming system
  • FIG. 1 is a schematic diagram showing a schematic configuration of an image forming system 100 of the first embodiment. Then, the image forming system 100 is mainly used to output information about the appearance of the object, which is a non-luminous object.
  • FIG. 1 is an example of observing a measuring object H having a glossy surface such as a metal electric saw blade.
  • FIG. 2 is a block diagram showing the functional configuration of the image forming system 100 of this embodiment.
  • the electric saw blade which is the object H to be measured, is placed on a pedestal portion 18 that moves at a substantially constant speed.
  • the image forming system 100 includes a control section 11, an illumination projection section 12, a detection section 13, a storage section 14, a display section 15, an operation section 16, a communication section 17, and the like.
  • the illumination projection unit 12 having a one-dimensional structure sequentially changes the one-dimensional illumination pattern P at regular intervals (scanning period s), and irradiates the measuring object H moving at a substantially constant speed. Then, the detector 13 detects reflected light from the object H to be measured, and sends a time-varying received light signal S to the controller 11 . Based on the sequentially changed one-dimensional illumination pattern P and the one-dimensional light reception signal S corresponding to each one-dimensional illumination pattern P, the control unit 11 uses the SPI technique to scan a constant period (scan period s), a one-dimensionally reconstructed reconstructed image (first image) is generated, and a two-dimensional second image is generated by arranging the first images.
  • the control unit 11 includes a CPU (Central Processing Unit), a RAM (Random Access Memory), and the like.
  • the control unit 11 is connected to each unit (the illumination projection unit 12, the detection unit 13, the storage unit 14, the display unit 15, the operation unit 16, and the communication unit 17) of the image forming system 100, and controls the operation of each unit.
  • the control unit 11 cooperates with the programs stored in the storage unit 14 to execute various processes including image forming processing, which will be described later.
  • the control unit 11 controls the illumination pattern P of the illumination projection unit 12 as an illumination control unit. Also, the control unit 11 controls the scan period s and the detection time t.
  • the scan cycle s is the time for the image forming system 100 to one-dimensionally read (scan) the measurement object H for each fixed distance d (movement distance d) in which the measurement object H is moved. In other words, it is the time for the measuring object H to move by the constant distance d.
  • each illumination pattern P irradiation area of the measurement object H may be read (scanned).
  • the detection time t is the time during which all the illumination patterns P are sequentially irradiated and the detection unit 13 detects the reflected light. The relationship between the scan period s and the detection time t will be described later in detail.
  • control unit 11 acquires the light intensity (light receiving signal S) corresponding to the illumination pattern P from the detecting unit 13, and from the illumination pattern P and the light intensity (light receiving signal S), every constant cycle (scan cycle s) , to generate a first image reconstructed in one dimension. Further, the control unit 11 generates a new second image based on a plurality of first images generated at regular intervals (scanning cycle s).
  • the illumination projection unit 12 is, for example, a projection projector with a one-dimensional structure using a DMD (Digital Mirror Device). Note that the illumination projection unit 12 may be various projectors, and is not limited to a projection projector using a DMD. As shown in FIG. 3, the illumination projection unit 12 sequentially changes the one-dimensional illumination pattern P shown in FIG. The resolution of the one-dimensional illumination pattern P irradiated by the illumination projection unit 12 affects the resolution of the reconstructed image, and the number of irradiated one-dimensional illumination patterns P also affects the resolution of the reconstructed image. do. Although the DMD has a frame rate of 60 Hz or 120 Hz, the two-dimensional illumination pattern P per unit time can be increased by the following technique.
  • the DMD is capable of projecting the bits of an image in sequence.
  • one pixel of an image consists of 8 bits each of RGB, totaling 24 bits.
  • an image in which one pixel is expressed by one bit cannot express gradation, and only a so-called black-and-white image can be projected.
  • an image expressed as a so-called black-and-white image such as Hadamard illumination, as an illumination pattern, it is possible to project an image 24 times the frame rate in a unit time.
  • the detection unit 13 measures the light intensity (light receiving signal S) of reflected light from the measuring object H with respect to the light of each illumination pattern P that is sequentially irradiated.
  • the detection unit 13 includes, for example, a two-dimensional sensor such as a CCD (Charge-Coupled Device), a one-dimensional sensor such as a line CCD, an array of photodiodes (photodetectors), a single photodiode (photodetector), and the like. Available.
  • the storage unit 14 is composed of a nonvolatile semiconductor memory, a hard disk, or the like, and includes a program executed by the control unit 11, data necessary for executing the program, an illumination pattern P, a light reception signal S of the detection unit 13, various generated Images, shooting history, etc. are stored. Note that the illumination pattern P is created by the control unit 11 . Moreover, the illumination pattern P may be stored in the storage unit 14 in advance.
  • the display unit 15 displays the operation screen, the operation status of the image forming system 100, etc. on the display according to the display control of the control unit 11.
  • FIG. 15 displays the operation screen, the operation status of the image forming system 100, etc. on the display according to the display control of the control unit 11.
  • the operation unit 16 includes a group of keys used for input operations such as processing start and a touch panel integrated with the display of the display unit 15 , and generates operation signals according to these operations and outputs them to the control unit 11 . do.
  • the communication unit 17 has a communication interface and communicates with external devices on the network.
  • control unit 11 causes the illumination projection unit 12 to irradiate the measurement object H with one illumination pattern P in a certain scan cycle s (step S11).
  • control unit 11 acquires the received light signal S, which is the received light from the measurement object H, from the detection unit 13 (step S12).
  • control unit 11 determines whether all the illumination patterns P have been emitted by the illumination projection unit 12 (step S13). If all the illumination patterns P have been emitted by the illumination projection unit 12 (step S13; YES), proceed to step S14. , the control unit 11 causes the illumination projection unit 12 to irradiate the next illumination pattern P, in step S11.
  • the control unit 11 reconstructs a one-dimensional image (first image) from the one-dimensional illumination pattern P and the received light signal S in a certain scan period s (step S14). Specifically, during the detection time t in a certain scan cycle s, the measurement object H is assumed to be substantially stationary, and the control unit 11 controls all the primary A one-dimensional image (first image) is reconstructed from the original illumination pattern P and the received light signal S corresponding to each illumination pattern P using SPI. That is, a one-dimensional image (first image) of the illumination pattern P irradiation area of the measurement object H is reconstructed.
  • control unit 11 generates a two-dimensional second image using the first image in each scan period s (step S15). Specifically, the control unit 11 generates a two-dimensional second image by arranging the first images in each scan period s in order of the scan period s.
  • control unit 11 displays the second image on the display unit 15 (step S16).
  • control unit 11 determines whether the inspection is finished based on the instruction from the operation unit 16 (step S17). If the inspection is completed (step S17; YES), the image forming process is completed. If the inspection is not completed (step S17; NO), the process proceeds to step S18. Note that the control unit 11 may automatically determine the end of the inspection. For example, if there is an abnormality in the measurement object H on the second image, the control unit 11 automatically determines and ends the inspection.
  • step S18 determines whether or not the scanning cycle s has passed since the timing when the illumination projection unit 12 was caused to irradiate the measurement object H with the first illumination pattern P in step S11 (step S18). If the scan period s has elapsed (step S18; YES), the process proceeds to step S11 to sequentially irradiate all the illumination patterns P again. If the scan period s has not elapsed (step S18; NO), the process proceeds to step S18. That is, step S18 is repeated until the scan cycle s elapses.
  • FIG. The detection time t is the time during which all the illumination patterns P are sequentially irradiated and the detection unit 13 detects the reflected light.
  • Step S13; YES indicates the time.
  • the scan period s is the time for the image forming system 100 to one-dimensionally read the measurement object H for each illumination pattern P irradiation area of the measurement object H. It indicates the time from the start of the loop (step S11) to the end (step S18; YES).
  • FIG. 18 is a diagram showing the relationship between the scan period s and the detection time t in the case where a conventional line sensor camera or standard SPI is applied one-dimensionally.
  • the illumination pattern is repeated in order as 1, 2, 3 . . . N, 1, 2, 3 . In order to keep switching, the scan period and the detection time t had to be substantially matched.
  • step S14 to step S17 is performed in parallel with steps S11 to S13 and step S18. In other words, even if the processes of reconstruction of the first image in step S14, generation of the second image in step S15, display of the second image in step S16, and determination of inspection end in step S17 have not been completed for a long time. If, in step S11, the scan cycle s has elapsed since the timing at which the first illumination pattern P was irradiated, it is determined in step S18 that the scan cycle s has elapsed (step S18; YES), and the process proceeds to step S11.
  • FIG. 7 is a schematic diagram showing a schematic configuration of the image forming system 100 of the second embodiment.
  • FIG. 7 is a schematic diagram showing a schematic configuration of the image forming system 100 of the second embodiment.
  • the illumination projection unit 22 having a two-dimensional structure sequentially changes the one-dimensional illumination pattern P at regular intervals (scanning period s), and irradiates the measuring object H moving at a substantially constant speed. Then, the detector 13 detects reflected light from the object H to be measured, and sends a time-varying received light signal S to the controller 11 . Then, based on the sequentially changed one-dimensional illumination pattern P and the one-dimensional light receiving signal S corresponding to each illumination pattern P, the control unit 11 uses SPI technology to perform scanning at regular intervals (scan intervals s). First, a one-dimensional reconstructed image (first image) is generated, and a two-dimensional second image is generated by arranging the first images.
  • first image a one-dimensional reconstructed image
  • second image is generated by arranging the first images.
  • the illumination projection unit 22 is, for example, a two-dimensional structure projection projector using a DMD (Digital Mirror Device). As shown in FIG. 8, the illumination projection unit 22, for example, projects the two-dimensional illumination pattern P shown in FIG. -1]; the one-dimensional illumination pattern P) is sequentially changed, and the object H to be measured is illuminated.
  • DMD Digital Mirror Device
  • All illumination patterns P are assumed to be stored in the storage unit 14 . Further, in FIG. 10, all illumination patterns P refer to the one-dimensional illumination pattern P for all rows of the two-dimensional illumination pattern P, and one illumination pattern P refers to the one-dimensional illumination pattern P for each row. .
  • steps S21 to S23 are the same as steps S11 to S13 in FIG.
  • the control unit 11 determines whether or not the illumination projection unit 22 has caused the illumination projection unit 22 to irradiate all the illumination patterns P onto the same portion of the measurement object H (step S24). Specifically, for example, when all the illumination patterns P are successively illuminated several times in the two-dimensional illumination pattern P, the part at the distance d from the front end in the moving direction of the measurement object H is not illuminated by all illumination. Since the pattern P is irradiated, the one-dimensional image (first image) can be reconstructed in step S25.
  • step S24 When the control unit 11 determines that the illumination projection unit 22 has caused the illumination projection unit 22 to irradiate all the illumination patterns P onto the same location of the measurement object H (step S24; YES), the process proceeds to step S25, and a one-dimensional image (first image ) is reconstructed. On the other hand, if the control unit 11 does not determine that irradiation has been performed (step S24; NO), the process proceeds to step S28.
  • FIG. 11 shows a one-dimensional illumination pattern P sequentially irradiated onto the measurement object H in each scan period s by the illumination projection unit 22 .
  • the arrow shown on the left side of the measurement target H indicates the direction in which the measurement target H moves.
  • the moving direction of the measuring object H coincides with the moving direction of the row of the one-dimensional illumination pattern P in the two-dimensional illumination pattern P.
  • FIG. the movement direction of the columns of the one-dimensional illumination pattern P in the two-dimensional illumination pattern P is opposite.
  • all the illumination patterns P are sequentially irradiated (the number of columns ⁇ 1) times of the two-dimensional illumination pattern P, and the last primary of the illumination pattern P in the immediately following scan period s
  • all the illumination pattern P is illuminated for the portion of the distance d from the front end in the moving direction of the measurement object H, and in the case of FIG. (the number of rows ⁇ 1) times of the pattern P, all the illumination patterns P are successively illuminated, and immediately after that the one-dimensional illumination pattern P is illuminated, the distance d from the front end of the measurement object H in the moving direction. All the illumination patterns P are applied to the part, and the reconstruction of the first image can be started in step S25.
  • the reconstruction of the image in step S25 is performed using the following equation (1).
  • the two-dimensional illumination pattern P has M rows and N columns
  • the two-dimensional second image (measurement object H) is an image represented by M rows and q columns.
  • the first image for each row of the two-dimensional second image (object H to be measured) is represented by T[n], T[n+1], T[n+2] . . . T[n+q ⁇ 1].
  • T[j] in the scan period s(i, 1 to N) is illuminated with P[i ⁇ 1] and the light amount of I_i_j is detected by the detection unit 13 .
  • the area of T[j] is illuminated with P[i ⁇ 1] at the scan period s(i)
  • the amount of light of I_i_j is measured
  • the amount of light of P[i ⁇ 1 ] is illuminated
  • the amount of light I'_i_j is measured
  • the reconstruction of the image in step S25 is performed using equation (2) below.
  • E_i(I_i_j) is the average value of I_i_j for i.
  • E_i(P[i-1]) is an M-row ⁇ 1-column matrix obtained by averaging P[i-1] for i.
  • steps S26 to S29 are the same as steps S15 to S18 in FIG.
  • FIG. 12 is a schematic diagram showing the schematic configuration of the image forming system 100 of the third embodiment.
  • FIG. 12 shows the schematic configuration of the image forming system 100 of the third embodiment.
  • the illumination projection unit 32 having a two-dimensional structure sequentially changes the two-dimensional illumination pattern P at each constant cycle (scan cycle s), and irradiates the measurement object H moving at a substantially constant speed.
  • a plurality of detectors 33 detect reflected light from the object H to be measured, and send a time-varying received light signal S to the controller 11 .
  • the control unit 11 based on the sequentially changed two-dimensional illumination pattern P and the one-dimensional light reception signal S corresponding to each column (four columns in the third embodiment) of the two-dimensional illumination pattern P, the control unit 11 Using the SPI technique, a reconstructed image (first image) that is one-dimensionally reconstructed for each row of the two-dimensional illumination pattern P is generated for each constant cycle (scan cycle s), and the first image is A two-dimensional second image is generated by arranging them.
  • the illumination projection unit 32 is, for example, a two-dimensional structure projection projector using a DMD (Digital Mirror Device). As shown in FIG. 12, the illumination projection unit 32, for example, in the two-dimensional illumination pattern P shown in FIG. [12] ⁇ , ⁇ P[1], P[5], P[9], P[13] ⁇ ... ⁇ P[N-13], P[N-9], P[N-5] , P[N ⁇ 1] ⁇ ; two-dimensional illumination pattern P), and illuminates the object H to be measured.
  • DMD Digital Mirror Device
  • a plurality of detectors 33 are required (at least four detectors in the third embodiment) to detect time-varying one-dimensional light reception signals S corresponding to each row (four rows in the third embodiment) of the two-dimensional illumination pattern P. required).
  • the rows of the two-dimensional illumination pattern P to be irradiated are spaced apart, or It is good to provide partitions.
  • the illumination projection unit 22 sequentially irradiates each row of the two-dimensional illumination pattern P in the second embodiment. In the form, irradiation is sequentially performed every four rows).
  • FIG. 13 is a schematic diagram showing a schematic configuration of the image forming system 100 of the fourth embodiment.
  • modes different from the first to third embodiments will be described.
  • the illumination projection unit 42 having a two-dimensional structure irradiates a two-dimensional illumination pattern P onto the measuring object H moving at a substantially constant speed at each constant cycle (scan cycle s).
  • a plurality of detectors 43 detect reflected light from the object H to be measured, and send light reception signals S to the controller 11 .
  • the control unit 11 Based on the two-dimensional illumination pattern P and the one-dimensional light receiving signal S corresponding to each row (all rows in the fourth embodiment) of the two-dimensional illumination pattern P, the control unit 11 uses the SPI technology to Then, a reconstructed image (first image) that is one-dimensionally reconstructed for each row of the two-dimensional illumination pattern P is generated for each fixed period (scan period s), and the first images are arranged. Generate a second image of the dimension.
  • the illumination projection unit 42 is, for example, a two-dimensional structure projection projector using a DMD (Digital Mirror Device). As shown in FIG. 13, the illumination projection unit 42, for example, projects the two-dimensional illumination pattern P shown in FIG. -1]; a two-dimensional illumination pattern P) is applied to the object H to be measured.
  • DMD Digital Mirror Device
  • the detector 43 detects the one-dimensional light reception signal S corresponding to each row (all rows in the fourth embodiment) of the two-dimensional illumination pattern P, so there are as many as the number of rows of the two-dimensional illumination pattern P.
  • the illumination projection unit 42 instead of the illumination projection unit 22 sequentially irradiating each row of the two-dimensional illumination pattern P in the second embodiment, the illumination projection unit 42 That is, the two-dimensional illumination pattern P is all arranged to be illuminated at once.
  • the image forming system 100 does not move with respect to the measurement object H moving at a substantially constant speed.
  • a configuration in which the measuring object H does not move with respect to the projection unit) may also be used.
  • the one-dimensional illumination pattern P is sequentially changed at each constant cycle (scan cycle s) by the one-dimensional illumination projection unit 52 that moves at a substantially constant speed. and irradiates the object H to be measured. Note that the flow of image forming processing is the same as in FIG. In the image forming system 100 shown in FIG.
  • an illumination projection unit 62 having a two-dimensional structure that moves at a substantially constant speed sequentially changes a one-dimensional illumination pattern P at each constant cycle (scan cycle s) to Irradiate H.
  • the flow of image forming processing is the same as in FIG.
  • the two-dimensional illumination pattern P (a plurality of rows; for example, four rows) is generated by the illumination projection unit 72 having a two-dimensional structure that moves at a substantially constant speed at each constant cycle (scanning cycle s). are sequentially changed, and the object H to be measured is irradiated.
  • the flow of the image forming process is the same as in FIG. In the image forming system 100 shown in FIG.
  • an illumination projection unit 82 having a two-dimensional structure that moves at a substantially constant speed projects a two-dimensional illumination pattern P (all columns) to the measurement object at regular intervals (scan intervals s). Irradiate object H.
  • the detection unit 73 and the detection unit 83 detect the one-dimensional light receiving signal S corresponding to each row of the two-dimensional illumination pattern P. Similar to the form, a plurality of them are necessary, and they need to move in the same direction and at the same speed as the illumination projection unit 72 and the illumination projection unit 82 that move at substantially the same speed. Also in the case of FIGS. 14 and 15, the detection unit 13 may be moved.
  • the image forming system 100 includes the illumination projection unit 12 that irradiates the measurement object moving at a substantially constant speed with light of a plurality of illumination patterns, and the light reflected from the measurement object by the light of the illumination pattern.
  • a detection unit 13 that detects light intensity
  • an illumination control unit control unit 11
  • a generation unit control unit 11
  • a generation unit control unit 11 that generates a two-dimensionally reconstructed image from the light intensity of the reflected light, so that a single-element detector can detect a moving object in one dimension or Acquiring a two-dimensional image can be realized.
  • the direction of movement of the object to be measured is defined as rows, and the direction orthogonal to the direction of movement is defined as columns.
  • the unit (control unit 11) causes the illumination projection unit 12 to sequentially irradiate light of a plurality of one-dimensional illumination patterns, and the generation unit (control unit 11) generates a first image, which is a one-dimensional reconstructed image in the column direction. Since one image is generated and the second image, which is a two-dimensional reconstructed image, is generated based on the first image, the number of illumination patterns P in each scan period s can be reduced.
  • the illumination pattern consists of N ⁇ N pixels
  • a squared pattern of N or a squared pattern of 2 ⁇ N is required.
  • an N pattern or a 2N pattern is sufficient when irradiating a one-dimensional illumination pattern.
  • the moving direction of the object to be measured is defined as rows, and the direction orthogonal to the moving direction is defined as columns.
  • the unit 11) causes the illumination projection unit 22 to sequentially irradiate light of a two-dimensional illumination pattern for each column, and the generation unit (control unit 11) generates a first image that is a one-dimensional reconstructed image in the column direction. is generated, and the second image, which is a two-dimensional reconstructed image, is generated based on the first image, so the number of illumination patterns P in each scan cycle s can be reduced.
  • the moving direction of the object to be measured is the row
  • the direction orthogonal to the moving direction is the column
  • the illumination projection unit (illumination projection unit 32 or illumination projection unit 42) has a two-dimensional structure
  • the illumination control unit causes the illumination projection unit (illumination projection unit 32 or illumination projection unit 42) to sequentially irradiate light of a two-dimensional illumination pattern for each of a plurality of columns
  • the detection unit (detection unit 33 or The detection unit 43) has a number equal to or greater than the number of the irradiated plural rows, and detects the light intensity of the reflected light corresponding to each light of the rows of the illumination pattern.
  • the signals are acquired at once, further reducing the number of illumination patterns P in each scan period s. Specifically, when the number of rows of two-dimensional illumination patterns to be sequentially irradiated is k rows, the number of illumination patterns P in each scan cycle s is 1/k times the number of illumination patterns P compared to the case of irradiating a one-dimensional illumination pattern. can be reduced to
  • the image forming system 100 includes an illumination projection unit 52 that irradiates the object to be measured with light of a plurality of illumination patterns and that moves at a substantially constant speed, and the light intensity of the light reflected from the object to be measured by the light of the illumination pattern.
  • a detection unit 13 for detection an illumination control unit (control unit 11) that sequentially switches an illumination pattern from among a plurality of illumination patterns and irradiates light from an illumination projection unit 12, an illumination pattern and reflected light corresponding to the illumination pattern and a generation unit (control unit 11) that generates a reconstructed image that is two-dimensionally reconstructed from the light intensity of the single-element detector. It is possible to achieve the acquisition of
  • the direction of movement of the illumination projection unit 52 is defined as rows, and the direction perpendicular to the direction of movement is defined as columns.
  • the control unit causes the illumination projection unit 52 to sequentially irradiate light of a plurality of one-dimensional illumination patterns, and the generation unit (control unit 11) generates a one-dimensional reconstructed image in the column direction. Since the first image is generated and the second image, which is a two-dimensional reconstructed image, is generated based on the first image, the number of illumination patterns P in each scan cycle s can be reduced.
  • the direction of movement of the illumination projection unit 62 is defined as rows, and the direction perpendicular to the direction of movement is defined as columns.
  • the control unit 11) causes the illumination projection unit 62 to sequentially irradiate light of a two-dimensional illumination pattern for each row, and the generation unit (control unit 11) directs the first image, which is a one-dimensional reconstructed image in the column direction.
  • the number of illumination patterns P in each scan period s can be reduced because the images are generated and based on the first images, the second images, which are two-dimensional reconstructed images, are generated.
  • the moving direction of the illumination projection unit is defined as a row
  • the direction orthogonal to the movement direction is defined as a column
  • the illumination projection unit (illumination projection unit 72 or illumination projection unit 72) is defined as a column.
  • unit 82) irradiates light of a two-dimensional illumination pattern
  • the illumination control unit causes the illumination projection unit (illumination projection unit 72 or illumination projection unit 82) to emit light of the two-dimensional illumination pattern.
  • the detector detector 73 or detector 83
  • the generation unit (control unit 11) generates a first image that is a one-dimensional reconstructed image in the column direction for each column, and generates a second image that is a two-dimensional reconstructed image based on the first image. Therefore, in one irradiation, the received light signals for each of the plurality of columns are acquired at once, and the number of illumination patterns P in each scan cycle s can be further reduced.
  • the illumination control unit (control unit 11) separately controls the detection time in the detection unit 13 and the period at which the image forming system 100 reads the measurement object
  • the moving speed of the measurement object H is adjusted to can be arbitrarily slow. That is, by arbitrarily slowing down the moving speed of the measuring object H, it is possible to further reduce the number of illumination patterns P irradiated per unit time.
  • the detection unit 13 is a photodiode, it is inexpensive.
  • the illumination projection unit 12 includes a DMD, and the illumination control unit (control unit 11) associates the bit-by-bit RGB image with the clock frequency of the DMD, and converts the bit-by-bit RGB image to Since it is projected by the illumination projection unit 12 as an independent pattern, it is possible to increase the number of two-dimensional illumination patterns per unit time.
  • the image forming method includes sequentially switching light of a plurality of illumination patterns to irradiate an object to be measured which moves at a substantially constant speed, and detecting the light intensity of light reflected from the object to be measured by the light of the illumination pattern. , a two-dimensionally reconstructed image is generated from the illumination pattern and the light intensity of the reflected light corresponding to the illumination pattern. It becomes possible to realize to acquire a dimensional or two dimensional image.
  • the image forming method moves at a substantially constant speed, sequentially switches the light of a plurality of illumination patterns, irradiates the measurement object, and detects the light intensity of the light reflected from the measurement object by the light of the illumination pattern. Then, a reconstructed image that is two-dimensionally reconstructed from the illumination pattern and the light intensity of the reflected light corresponding to the illumination pattern is generated. It becomes possible to realize to acquire a dimensional or two dimensional image.
  • the program includes an illumination projection unit 12 that irradiates light of a plurality of illumination patterns onto an object to be measured that moves at a substantially constant speed, and a detection that detects the light intensity of light reflected from the object to be measured by the light of the illumination pattern.
  • an illumination control unit (control unit 11) that causes the computer of the image forming system 100 to sequentially switch illumination patterns from among a plurality of illumination patterns and irradiate light from the illumination projection unit 12;
  • a single-element detector detects a moving object. It is possible to obtain a one-dimensional or two-dimensional image of the .
  • the program also includes an illumination projection unit 12 that irradiates a measurement object with light of a plurality of illumination patterns and that moves at a substantially constant speed, and a detection that detects the light intensity of light reflected from the measurement object by the light of the illumination pattern.
  • an illumination control unit (control unit 11) that causes the computer of the image forming system 100 to sequentially switch illumination patterns from among a plurality of illumination patterns and irradiate light from the illumination projection unit 12;
  • a single-element detector detects the object while moving. Acquiring one-dimensional or two-dimensional images can be realized.
  • the pedestal portion 18 of the object be made of a member that does not easily reflect the light of the projection projector.
  • light other than the illumination projection unit 12, for example, from indoor lighting is also reflected by the object and becomes a factor that lowers the S/N ratio of the analysis device. can be created.
  • each detection unit 13 emits a one-dimensional illumination pattern that constitutes a different two-dimensional illumination pattern P, and detects reflected light.
  • the number of illumination is several times that of the second embodiment (“the number of different two-dimensional illumination patterns P”), so that the quality of the first image can be improved.
  • the N detectors may be N single detectors such as photodiodes, and a combination of a line sensor and a cylindrical lens may be used. Multiple DMD projector and single detector combinations may be provided.
  • an example using a hard disk, a semiconductor non-volatile memory, or the like is disclosed as a computer-readable medium for the program according to the present invention, but the present invention is not limited to this example.
  • portable recording media such as CD-ROMs can be applied.
  • a carrier wave is also applied as a medium for providing program data according to the present invention via a communication line.
  • the present disclosure can be used for image forming systems, image forming methods, and programs.
  • control unit 12 illumination projection unit 13 detection unit 14 storage unit 15 display unit 16 operation unit 17 communication unit 22 illumination projection unit 32 illumination projection unit 33 detection unit 42 illumination projection unit 43 detection unit 52 illumination projection unit 62 illumination Projector 72 Illumination Projector 73 Detector 82 Illuminator Projector 83 Detector

Landscapes

  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention concerne un système de formation d'images, un procédé de formation d'images et un programme permettant de réaliser, à l'aide d'un détecteur à élément unique, l'acquisition d'une image unidimensionnelle ou bidimensionnelle d'un objet cible en mouvement, ou l'acquisition d'une image unidimensionnelle ou bidimensionnelle d'un objet cible en mouvement. Un système de formation d'images (100) comprend une unité de projection d'éclairage (12) pour émettre de la lumière avec une pluralité de motifs d'éclairage sur un objet cible de mesure se déplaçant à une vitesse sensiblement constante ; une unité de détection (13) pour détecter une intensité lumineuse de la lumière réfléchie par l'objet cible de mesure résultant de la lumière avec le motif d'éclairage ; une unité de commande d'éclairage (unité de commande 11) pour provoquer l'émission de lumière à partir de l'unité de projection d'éclairage (12) en commutant le motif d'éclairage successivement entre la pluralité de motifs d'éclairage ; et une unité de génération (unité de commande 11) pour générer une image reconstruite, reconstruite en deux dimensions à partir du motif d'éclairage et de l'intensité lumineuse de la lumière réfléchie correspondant au motif d'éclairage.
PCT/JP2022/043318 2021-11-30 2022-11-24 Système de formation d'images, procédé de formation d'images et programme WO2023100734A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-193870 2021-11-30
JP2021193870 2021-11-30

Publications (1)

Publication Number Publication Date
WO2023100734A1 true WO2023100734A1 (fr) 2023-06-08

Family

ID=86612148

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2022/043318 WO2023100734A1 (fr) 2021-11-30 2022-11-24 Système de formation d'images, procédé de formation d'images et programme

Country Status (1)

Country Link
WO (1) WO2023100734A1 (fr)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012147804A1 (fr) * 2011-04-25 2012-11-01 浜松ホトニクス株式会社 Dispositif d'imagerie
JP2021177186A (ja) * 2013-07-16 2021-11-11 株式会社キーエンス 三次元画像処理装置及び三次元画像処理方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012147804A1 (fr) * 2011-04-25 2012-11-01 浜松ホトニクス株式会社 Dispositif d'imagerie
JP2021177186A (ja) * 2013-07-16 2021-11-11 株式会社キーエンス 三次元画像処理装置及び三次元画像処理方法

Similar Documents

Publication Publication Date Title
US7551272B2 (en) Method and an apparatus for simultaneous 2D and 3D optical inspection and acquisition of optical inspection data of an object
US5668887A (en) Coating density analyzer and method using non-synchronous TDI camera
US8077306B2 (en) Defect inspection apparatus
US20040169900A1 (en) Scanning device calibration system and method
JP2010276607A (ja) ３次元形状測定装置および測定方法
JP2007527548A5 (fr)
JP6648869B2 (ja) 形状検査装置及び形状検査方法
RU99111503A (ru) Контроль тары, использующий единый растровый матричный датчик и попеременно стробируемые источники света
CN111551556B (zh) 一种缺陷检测装置及缺陷检测方法
JP5068731B2 (ja) 表面疵検査装置、表面疵検査方法及びプログラム
JP2018072314A (ja) ２次元空間分解能およびスペクトル分解能を有する画像を取得する方法および装置
JPH095058A (ja) 規則的パターンの欠陥検査装置
WO2023100734A1 (fr) Système de formation d'images, procédé de formation d'images et programme
US20130265415A1 (en) Terahertz imaging device, and method of eliminating interference patterns from terahertz image
JPH09210653A (ja) 面方向検出装置
JPH08101909A (ja) カラースキャナの走査方法
US8542439B2 (en) Method and device for scanning-microscopy imaging of a specimen
JP2003227754A (ja) 赤外画像装置における多素子検出器からのデータ取得方法
US20190349569A1 (en) High-sensitivity low-power camera system for 3d structured light application
JP2010256358A (ja) 物体を光学スキャンする方法及びその装置
US10587771B2 (en) Scanner and scanner data generating method
JP6175819B2 (ja) 画像検査装置及び画像検査方法
JP2005274325A (ja) 金属帯の光学式欠陥検査方法
JP2020056767A (ja) 光透過測定装置
JP3599239B2 (ja) 変位センサ

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 22901167

Country of ref document: EP

Kind code of ref document: A1