WO2023093253A1 - 光纤导入装置及光纤导入方法 - Google Patents

光纤导入装置及光纤导入方法 Download PDF

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Publication number
WO2023093253A1
WO2023093253A1 PCT/CN2022/120570 CN2022120570W WO2023093253A1 WO 2023093253 A1 WO2023093253 A1 WO 2023093253A1 CN 2022120570 W CN2022120570 W CN 2022120570W WO 2023093253 A1 WO2023093253 A1 WO 2023093253A1
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optical fiber
glue
annular boss
vacuum
glue filling
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PCT/CN2022/120570
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English (en)
French (fr)
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王妍智
孙国华
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北京华卓精科科技股份有限公司
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Publication of WO2023093253A1 publication Critical patent/WO2023093253A1/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements

Definitions

  • the present application relates to the technical field of vacuum chambers, in particular to an optical fiber introduction device and an optical fiber introduction method for a vacuum chamber.
  • the propagation of extreme ultraviolet light in common EUV lithography machines requires a very high degree of vacuum in the workpiece table chamber. Considering the effects of outgassing and air tightness, part of the optical path needs to be transmitted through optical fibers inside and outside the chamber.
  • One of the ways to realize the conduction of the optical fiber inside and outside the cavity is to use an integrated optical fiber to seal when passing through the wall of the vacuum cavity; the existing optical fiber introduction device, due to its low airtightness, will cause the cavity of the workpiece table to leak and affect the use .
  • the technical problem to be solved in this application is to provide an optical fiber introducing device and an optical fiber introducing method with higher airtightness when introducing an optical fiber into a vacuum cavity.
  • the optical fiber introduction device of the present application includes a blocking piece, a glue filling seat, a vacuum potting adhesive layer, and a sealing adhesive layer.
  • the tank body, the glue filling seat is a hollow body surrounded by side walls, the center of the glue filling seat forms a central hole, and the inner wall of the glue filling seat is provided with a first annular boss and a second annular boss , the width of the first annular boss is greater than the width of the second annular boss, the edge of the first annular boss near the central hole is provided with a second groove, the second The groove body is configured to pass through the optical fiber, the blocking piece is placed on the first annular boss, the blocking piece is connected with the first annular boss, the first groove body and the The second grooves are in one-to-one correspondence, the first groove and the second groove corresponding to each other form a fixed groove configured to accommodate a bare wire of the optical fiber, and the vacuum potting adhesive layer covers the On the blocking sheet, the sealing adhesive layer covers the vacuum potting adhesive layer.
  • both the first groove body and the second groove body are semicircular.
  • At least two flat-head screw countersunk holes are opened on the blocking piece, corresponding connecting holes are opened on the first annular boss, and at least two countersunk screws pass through the corresponding corresponding connecting holes respectively.
  • the flat-head screw counterbore and the connection hole connect the blocking piece and the first annular boss to each other.
  • annular sealing groove is formed on the side of the first annular boss facing away from the second annular boss, and a sealing ring is arranged in the annular sealing groove.
  • an exhaust structure is provided on the side of the glue filling seat corresponding to the annular sealing groove, and the exhaust structure is a plurality of holes provided on the side wall of the glue filling seat. Each of the grooves is in communication with the annular sealing groove.
  • the optical fiber introduction device of the present application further includes a mounting seat, the mounting seat is configured to connect the glue filling seat to the wall of the vacuum chamber, and the mounting seat is connected to the glue filling seat.
  • the present application adopts the above-mentioned method for introducing an optical fiber with the optical fiber introduction device, including:
  • the part where the optical fiber is located in the vacuum chamber is the first section, and the part where the optical fiber is located at the potting position is the second section.
  • the plastic protective layer outside the first section is removed, and the plastic protective layer and the plastic protective layer outside the second section are removed.
  • the length of each of the second sections is less than the thickness of the glue filling, and the thickness of the glue filling is the distance from the upper surface of the blocking piece to the top surface of the glue filling seat after the baffle is placed in the glue filling seat,
  • each of the optical fibers into a second groove body on the glue filling seat, place the blocking plate on the first annular boss, so that the first groove body and the second groove body correspond to each other one by one.
  • the first groove body and the second groove body form a fixed groove, the second section of each optical fiber is respectively accommodated in one of the fixed grooves, and the blocking piece is connected to the glue seat connect;
  • the vacuum glue fills the space between the optical fiber and the blocking sheet, and the space between the optical fiber and the glue filling seat, and the vacuum glue covers all the surface of the baffle;
  • a vacuum glue layer is formed, and a sealing adhesive is poured outside the vacuum glue layer, and the sealing adhesive does not exceed the surface of the glue filling seat.
  • the optical fiber introduction method of the present application further includes: installing a sealing ring in the sealing groove after the sealing adhesive is cured.
  • the optical fiber introduction method of the present application further includes: after installing the sealing ring, connecting the glue potting seat to the mounting seat.
  • the optical fiber introduction device of the present application has at least the following beneficial effects:
  • the optical fiber introduction device of this application because the fixed groove formed by the first groove body and the second groove body is configured to accommodate a bare optical fiber wire, it can ensure good contact between the optical fiber and the potting glue when pouring glue, and realize a gap-free seal. When it is introduced into the vacuum chamber, the vacuum airtightness of the vacuum chamber is guaranteed. At the same time, since there are multiple first grooves on the baffle and multiple second grooves on the glue base, it can seal multiple optical fibers at the same time. Integrated The height is higher, and there is a center hole on the glue base, which is easy to install and is not limited by the size of the optical fiber connector.
  • optical fiber introduction device of the present application will be further described below in conjunction with the accompanying drawings.
  • Fig. 1 is the schematic diagram of the explosive structure of the optical fiber introduction device of the present application
  • Fig. 2 is the schematic diagram of the structure of the optical fiber introduction device of the present application after assembly
  • Fig. 3 is the schematic structural view of the baffle in the optical fiber introduction device of the present application.
  • Fig. 4 is a schematic structural view of the glue filling seat in the optical fiber introduction device of the present application.
  • Fig. 5 is a structural schematic diagram of another direction of the glue filling seat in the optical fiber introduction device of the present application.
  • Fig. 6 is a schematic diagram of the installation structure of the blocking piece and the glue filling seat in the optical fiber introduction device of the present application.
  • an optical fiber introduction device includes a blocking plate 1, a glue filling seat 2, a vacuum potting glue layer, and a sealing and bonding glue layer 8 , the glue filling seat 2 and the baffle 1 are both processed by metal materials with a low outgassing amount, the baffle 1 is in the shape of a sheet, and the edge of the baffle 1 is provided with a plurality of first grooves 11 configured to pass through the optical fiber 4 , the glue filling seat 2 is a hollow body surrounded by side walls, a central hole 21 is formed in the center of the glue filling seat 2, and the inner wall of the glue filling seat 2 is provided with a first annular boss 24 and a second annular boss 27, The width of the first annular boss 24 is greater than the width of the second annular boss 27, and the edge of the first annular boss 24 close to the center hole 21 is provided with a plurality of second grooves 22, and the second
  • the first groove body 11 and the second groove body 22 corresponding to each other form a fixed groove configured to accommodate a bare wire of an optical fiber 4.
  • the optical fiber 4 usually includes a plastic protective layer 42, a metal layer 41 and a central layer from the outside to the inside.
  • Layer 41 is a calcium metal layer or other metal material layer.
  • the bare wire of the optical fiber 4 refers to the central layer after peeling off the plastic protective layer 42 and the metal layer 41.
  • the vacuum potting adhesive layer covers the blocking piece 1, and the sealing adhesive layer 8 covers On the vacuum potting adhesive layer.
  • the optical fiber introduction device of this application because the fixed groove formed by the first groove body 11 and the second groove body 22 is configured to accommodate a bare fiber 4, it can ensure good contact between the optical fiber 4 and the potting glue when pouring glue, and realize a gap-free seal , when the optical fiber 4 is introduced into the vacuum chamber, the vacuum airtightness of the vacuum chamber is guaranteed.
  • the blocking plate 1 is provided with a plurality of first grooves 11, the glue filling seat 2 is provided with a plurality of second grooves 22 , so multiple optical fibers can be sealed at the same time, and the integration degree is higher.
  • the center hole 21 is provided on the glue potting seat 2, which is convenient for installation and is not limited by the size of the optical fiber connector.
  • the first groove body 11 and the second groove body 22 are semicircular, and the shape and size of the fixed grooves formed by the first groove body 11 and the second groove body 22 corresponding to each other are the same as The shape and size of the cross section of the bare wire of the optical fiber 4 are suitable.
  • two or more countersunk holes 12 for flat head screws are provided on the blocking plate 1
  • corresponding connecting holes are provided on the first annular boss 24, and two or more countersunk screws pass through the countersunk holes 12 of the countersunk screws.
  • the head hole 12 and the connecting hole connect the blocking piece 1 and the first annular boss 24 to each other.
  • Other connection methods can also be used for the blocking piece 1 and the glue filling seat 2 .
  • annular sealing groove 25 is defined on a side of the first annular boss 24 facing away from the second annular boss 27 , and a sealing ring 3 is disposed in the annular sealing groove 25 .
  • the blocking piece 1 is a rounded rectangle
  • the second annular boss 27 is in the shape of a rounded rectangular ring.
  • the blocking piece 1 The short side and the rounded part of the second annular boss 27 are in contact with each other, and the edge of the second annular boss 27 near the central hole 21 is rounded.
  • an exhaust structure 26 is provided on the side surface of the glue filling seat 2 corresponding to the annular sealing groove 25, and the exhaust structure 26 is a plurality of grooves provided on the side wall of the glue filling seat 2, and each groove The grooves are all in communication with the annular sealing groove 25 .
  • the cross section of the annular sealing groove 25 is rectangular
  • the cross section of the sealing ring 3 is circular
  • the exhaust structure 26 is arranged at the opposite corner of the glue filling seat 2, and the depth of the exhaust structure 26 is smaller than that of the annular sealing groove. 25 in depth.
  • the sealing ring 3 When the glue filling seat 2 is connected to the installation seat 6, due to the setting of the exhaust structure 26, the sealing ring 3 is squeezed and deformed, and the gas between the sealing ring 3 and the annular sealing groove 25 is released through the exhaust structure 26, and the sealing The ring 3 is fully deformed to ensure the sealing effect, and the gap of the annular sealing groove 25 will not continuously release gas during vacuuming, so as to ensure the vacuum degree of the vacuum chamber. Since the cross section of the annular sealing groove 25 is rectangular and the cross section of the sealing ring 3 is circular, the circular cross section of the sealing ring 3 is deformed when it is pressed, and there is a tendency to fill the four corners of the rectangular cross section of the annular sealing groove 25. The structure 26 is arranged at the opposite corners of the glue filling seat 2, which can timely and thoroughly discharge the air in the compressed space at the four corners, and can fully and evenly deform the sealing ring 3 to ensure the sealing effect.
  • a mounting seat 6 is also included, the mounting seat 6 is configured to connect the glue potting seat 2 to the wall of the vacuum chamber, and the mounting seat 6 is connected to the glue potting seat 2 .
  • different types of flanges can be selected for the mounting seat 6 according to actual needs.
  • the glue filling seat 2 is provided with a threaded blind hole 23, and the glue filling seat 2 is installed on the flange through the screw 5, and then the whole The fiber guide device is installed on the wall of the vacuum chamber.
  • a method for introducing an optical fiber according to the present application comprising the steps of:
  • Part of the optical fiber 4 is located outside the vacuum chamber, part is located in the vacuum chamber, and part is located in the potting position.
  • the part outside the cavity is the third section, remove the plastic protective layer 42 outside each first section, remove the plastic protective layer 42 and metal layer 41 outside each second section, and keep the plastic protective layer 42 and metal layer 41 in the third section,
  • the length of each second section is less than the glue filling thickness, which is the distance from the upper surface of the stop piece 1 to the top surface of the glue filling seat 2 after the blocking piece 1 is placed in the glue filling seat 2;
  • each optical fiber 4 into a second groove body 22 on the glue filling seat 2, place the stopper 1 on the first annular boss 24, make the first groove body 11 and the second groove body 22 one by one
  • the first groove body 11 and the second groove body 22 corresponding to each other form a fixed groove
  • the second section of each optical fiber 4 is respectively accommodated in a fixed groove
  • the blocking piece 1 is connected with the glue filling seat 2;
  • the vacuum glue fills the space between optical fiber 4 and block 1, and the space between optical fiber 4 and glue filling seat 2, and the vacuum glue covers the surface of block 1;
  • This application is a method for introducing optical fiber. Since the optical fiber 4 is processed in sections, it can meet the different use requirements inside and outside the vacuum chamber. For the part outside the cavity, the outermost plastic protective layer is kept to ensure the strength and cleanliness. The potting position is stripped to the bare wire, so that the optical fiber and the potting compound are in good contact, and the seal without gaps is realized to ensure the vacuum of the vacuum chamber. Air tightness requirements.
  • a method for introducing an optical fiber in the present application further includes the following step: installing the sealing ring 3 in the sealing groove 25 after the sealing adhesive is cured.
  • a method for introducing an optical fiber in the present application further includes the following steps: after installing the sealing ring 3 , connecting the potting base 2 to the mounting base 6 .

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Light Guides In General And Applications Therefor (AREA)

Abstract

一种配置成真空腔室的光纤（4）导入装置及光纤（4）导入方法，涉及真空腔室技术领域。提供一种在将光纤（4）导入真空腔内时气密性更高的光纤（4）导入装置及光纤（4）导入方法，其中光纤（4）导入装置包括挡片（1）、灌胶座（2）、真空灌封胶层、密封粘接胶层（8），挡片（1）边缘开设有第一槽体（11），灌胶座（2）内壁设置有第一环状凸台（24）、第二环状凸台（27），第一环状凸台（24）的靠近中心孔（21）的边缘开设有第二槽体（22），挡片（1）放置于第一环状凸台（24）上，挡片（1）与第一环状凸台（24）相互连接，相互对应的第一槽体（11）、第二槽体（22）形成配置成容纳一根光纤（4）的裸线的固定槽，真空灌封胶层覆盖于挡片（1）上，密封粘接胶层（8）覆盖于真空灌封胶层上。

Description

光纤导入装置及光纤导入方法
相关申请的交叉引用
本申请要求享有于2021年11月24日提交的中国专利申请CN 202111403064.2的优先权，上述申请的全部内容通过引用并入本文中。
技术领域
本申请涉及真空腔室技术领域，特别是涉及一种用于真空腔室的光纤导入装置及光纤导入方法。
背景技术
目前，常见的EUV光刻机的极紫外光的传播要求工件台腔室具有极高的真空度，综合考虑释气、气密性等影响，部分光路需要在腔室内外通过光纤进行传输。腔内外的光纤实现导通的方法之一是采用一体式光纤，在通过真空腔壁时进行密封；现有的光纤导入装置，由于气密性不高，会导致工件台腔室泄露，影响使用。
申请内容
本申请要解决的技术问题是提供一种在将光纤导入真空腔内时气密性更高的光纤导入装置及光纤导入方法。
为了解决上述技术问题，本申请提供了如下技术方案：
本申请光纤导入装置，包括挡片、灌胶座、真空灌封胶层、密封粘接胶层，所述挡片为薄片状，所述挡片边缘开设有配置成供光纤穿过的第一槽体，所述灌胶座为由侧壁围成的中空体，所述灌胶座的中心形成中心孔，所述灌胶座内壁设置有第一环状凸台、第二环状凸台，所述第一环状凸台的宽度大于所述第二环状凸台的宽度，所述第一环状凸台的靠近所述中心孔的边缘开设有第二槽体，所述第二槽体配置成供光纤穿过，所述挡片放置于所述第一环状凸台上，所述挡片与所述第一环状凸台相互连接，所述第一槽体与所述第二槽体一一对应，相互对应的所述第一槽体、所述第二槽体形成配置成容纳一根所述光纤的裸线的固定槽，所述真空灌封胶层覆盖于所述挡片上，所述密封粘接胶层覆盖于所述真空灌封胶层上。
本申请光纤导入装置，其中所述第一槽体、所述第二槽体均为半圆形。
本申请光纤导入装置，其中所述挡片上开设有至少两个平头螺钉沉头孔，所述第一环状凸台上开设有相应的连接孔，至少两个沉头螺钉分别穿过相应的所述平头螺钉沉头孔、所述连接孔将所述挡片及所述第一环状凸台相互连接。
本申请光纤导入装置，其中所述第一环状凸台的背离所述第二环状凸台的一侧开设有环状密封槽，所述环状密封槽内设置有密封圈。
本申请光纤导入装置，其中所述挡片与所述台阶槽之间留有间隙，所述第二环状凸台靠近所述中心孔的边缘设置有倒圆。
本申请光纤导入装置，其中所述灌胶座的与所述环状密封槽相对应的一侧面上设置有排气结构，所述排气结构为开设于所述灌胶座侧壁上的多个凹槽，各所述凹槽均与所述环状密封槽连通。
本申请光纤导入装置，其中还包括安装座，所述安装座配置成将所述灌胶座连接于真空腔壁上，所述安装座与所述灌胶座相连接。
本申请采用上述光纤导入装置导入光纤的方法，包括：
光纤位于真空腔内的部分为第一段，光纤位于灌封位置的部分为第二段，去除各所述第一段外的塑料保护层，去除各所述第二段外的塑料保护层及金属层，各所述第二段的长度小于灌胶厚度，灌胶厚度为所述挡片放入所述灌胶座内后，所述挡片上表面到所述灌胶座顶面的距离，
将各所述光纤分别套入灌胶座上的一个第二槽体内，将挡片放置于第一环状凸台上，使第一槽体与所述第二槽体一一对应，相互对应的所述第一槽体、所述第二槽体形成固定槽，各所述光纤的所述第二段分别容纳于一个所述固定槽内，将所述挡片与所述灌胶座相连接；
在所述挡片表面灌注真空胶，所述真空胶充满所述光纤与所述挡片之间的空间，及所述光纤与所述灌胶座之间的空间，并且所述真空胶覆盖所述挡片表面；
所述真空胶固化后形成真空胶层，在所述真空胶层外灌注密封粘接胶，所述密封粘接胶不超过所述灌胶座表面。
本申请光纤导入的方法，其中还包括：所述密封粘接胶固化后，在密封槽内安装密封圈。
本申请光纤导入的方法，其中还包括：安装所述密封圈后，将所述灌胶座连接于安装座上。
与现有技术相比，本申请光纤导入装置至少具有以下有益效果：
本申请光纤导入装置，由于第一槽体、第二槽体形成的固定槽配置成容纳一根光纤裸线，灌胶时能够保证光纤与灌封胶良好接触，实现无间隙密封，在将光纤导入真空腔内时保证真 空腔的真空气密性，同时，由于挡片上开设有多个第一槽体，灌胶座上开设有多个第二槽体，因此能够同时密封多根光纤，集成度更高，灌胶座上设置有中心孔，便于安装，不受光纤接头的大小型式的限制。
下面结合附图对本申请光纤导入装置作进一步说明。
附图说明
图1为本申请光纤导入装置的爆炸结构示意图；
图2为本申请光纤导入装置装配后的结构示意图；
图3为本申请光纤导入装置中挡片的结构示意图；
图4为本申请光纤导入装置中灌胶座的结构示意图；
图5为本申请光纤导入装置中灌胶座另一方向的结构示意图；
图6为本申请光纤导入装置中挡片与灌胶座的安装结构示意图。
具体实施方式
如图1、图2、图3、图4、图5所示，本申请实施例一种光纤导入装置，包括挡片1、灌胶座2、真空灌封胶层、密封粘接胶层8，灌胶座2及挡片1均采用释气量较低的金属材料加工而成，挡片1为薄片状，挡片1边缘开设有多个配置成供光纤4穿过的第一槽体11，灌胶座2为由侧壁围成的中空体，在灌胶座2的中心形成中心孔21，灌胶座2内壁设置有第一环状凸台24、第二环状凸台27，第一环状凸台24的宽度大于第二环状凸台27的宽度，第一环状凸台24的靠近中心孔21的边缘开设有多个第二槽体22，第二槽体22配置成供光纤4穿过，挡片1放置于第一环状凸台24上，挡片1与第一环状凸台24相互连接，第一槽体11与第二槽体22一一对应，相互对应的第一槽体11、第二槽体22形成配置成容纳一根光纤4裸线的固定槽，光纤4通常包括由外至内的塑料保护层42、金属层41及中心层，金属层41为金属钙层或其他金属材料层，光纤4裸线指剥离塑料保护层42、金属层41后的中心层，真空灌封胶层覆盖于挡片1上，密封粘接胶层8覆盖于真空灌封胶层上。本申请光纤导入装置，由于第一槽体11、第二槽体22形成的固定槽配置成容纳一根光纤4裸线，灌胶时能够保证光纤4与灌封胶良好接触，实现无间隙密封，在将光纤4导入真空腔内时保证真空腔的真空气密性，同时，由于挡片1上开设有多个第一槽体11，灌胶座2上开设有多个第二槽体22，因此能够同时密封多根光纤，集成度更高，灌胶座2上设置有中心孔21，便于安装，不受光纤接头的大小型式的限制。
可选地，如图6所示，第一槽体11、第二槽体22均为半圆形，相互对应的第一槽体11、第二槽体22形成的固定槽的形状、大小与光纤4的裸线的横截面的形状大小相适应。
可选地，挡片1上开设有两个或多个平头螺钉沉头孔12，第一环状凸台24上开设有相应的连接孔，两个或多个沉头螺钉穿过平头螺钉沉头孔12、连接孔将挡片1及第一环状凸台24相互连接。挡片1与灌胶座2还可采用其他连接方式。
可选地，第一环状凸台24的背离第二环状凸台27的一侧开设有环状密封槽25，环状密封槽25内设置有密封圈3。本申请光纤导入装置的灌胶座2与安装座连接时，由于密封圈的设置，能够进一步保证真空腔的真空气密性，同时密封圈能够多次拆装，方便维修或更换。
可选地，挡片1为圆角矩形，第二环状凸台27呈圆角矩形环状，挡片1与第二环状凸台27的长边之间留有间隙241，挡片1与第二环状凸台27的短边及圆角部分相互接触，第二环状凸台27靠近中心孔21的边缘设置有倒圆。由于间隙241及倒圆的设置，方便灌胶时胶水流动，增加粘结面积，保证胶水填充率，并且挡片1与第二环状凸台27的短边及圆角部分相互接触可以实现精确定位，在长边上留有间隙可以进一步使灌胶充分流入间隙封住光纤线材与密封槽的装配位置。
可选地，灌胶座2的与环状密封槽25相对应的一侧面上设置有排气结构26，排气结构26为开设于灌胶座2侧壁上的多个凹槽，各凹槽均与环状密封槽25连通。具体地，环状密封槽25的横截面为矩形，密封圈3的横截面为圆形，排气结构26设置于灌胶座2的对角处，排气结构26的深度小于环状密封槽25的深度。当灌胶座2连接至安装座6时，由于排气结构26的设置，密封圈3受挤压变形，密封圈3与环状密封槽25之间的气体经排气结构26释放出，密封圈3充分变形，保证密封效果，在抽真空时环状密封槽25的间隙处不会持续释放气体，保证真空腔的真空度。由于环状密封槽25的横截面为矩形，密封圈3的横截面为圆形，密封圈3受压时圆形截面发生变形，有填充环状密封槽25的矩形截面四角的趋势，排气结构26设置于灌胶座2的对角处，能够及时、彻底地排出四角被压缩空间内的空气，可以使密封圈3充分均匀变形，保证密封效果。
可选地，还包括安装座6，安装座6配置成将灌胶座2连接于真空腔壁上，安装座6与灌胶座2相连接。具体的，安装座6可根据实际需求选用不同型号的法兰，灌胶座2上开设有螺纹盲孔23，通过螺钉5将灌胶座2安装于法兰上，然后再通过法兰将整个光纤导入装置安装于真空腔壁上。
本申请一种导入光纤的方法，包括下述步骤：
光纤4部分位于真空腔外、部分位于真空腔内、部分位于灌封位置，光纤4位于真空腔内的部分为第一段，光纤4位于灌封位置的部分为第二段，光纤4位于真空腔外的部分为第 三段，去除各第一段外的塑料保护层42，去除各第二段外的塑料保护层42及金属层41，第三段保留塑料保护层42、金属层41，各第二段的长度小于灌胶厚度，灌胶厚度为挡片1放入灌胶座2内后，挡片1上表面到灌胶座2顶面的距离；
将各光纤4分别套入灌胶座2上的一个第二槽体22内，将挡片1放置于第一环状凸台24上，使第一槽体11与第二槽体22一一对应，相互对应的第一槽体11、第二槽体22形成固定槽，各光纤4的第二段分别容纳于一个固定槽内，将挡片1与灌胶座2相连接；
在挡片1表面灌注真空胶，真空胶充满光纤4与挡片1之间的空间，及光纤4与灌胶座2之间的空间，并且真空胶覆盖挡片1表面；真空胶采用真空释气较小的粘接剂，例如Lord320，但其固化后强度较低，受力后容易撕裂。
真空胶固化后形成真空胶层，在真空胶层外灌注密封粘接胶，密封粘接胶不超过灌胶座2表面。密封粘接胶无需考虑真空释气性能，采用固化后强度较高、可以受力的粘接剂。
本申请一种导入光纤的方法，由于将光纤4分段处理，能够满足真空腔内外不同的使用需求，位于真空腔内的部分只保留释气率较低的金属层，降低释气量，位于真空腔外的部分，保留最外层的塑料保护层，保证强度和清洁度，灌封位置处剥至裸线，使光纤与灌封胶良好的接触，实现无间隙的密封，保证真空腔的真空气密性要求。
可选地，本申请一种导入光纤的方法还包括下述步骤：密封粘接胶固化后，在密封槽25内安装密封圈3。
可选地，本申请一种导入光纤的方法还包括下述步骤：安装密封圈3后，将灌胶座2连接于安装座6上。
以上所述的实施例仅仅是对本申请的优选实施方式进行描述，并非对本申请的范围进行限定，在不脱离本申请设计精神的前提下，本领域普通技术人员对本申请的技术方案作出的各种变形和改进，均应落入本申请权利要求书确定的保护范围内。

Claims (10)

  1. 一种光纤导入装置，其特征在于，包括挡片(1)、灌胶座(2)、真空灌封胶层、密封粘接胶层(8)，所述挡片(1)为薄片状，所述挡片(1)边缘开设有配置成供光纤(4)穿过的第一槽体(11)，所述灌胶座(2)为由侧壁围成的中空体，所述灌胶座(2)的中心形成中心孔(21)，所述灌胶座(2)内壁设置有第一环状凸台(24)、第二环状凸台(27)，所述第一环状凸台(24)的宽度大于所述第二环状凸台(27)的宽度，所述第一环状凸台(24)的靠近所述中心孔(21)的边缘开设有第二槽体(22)，所述第二槽体(22)配置成供光纤(4)穿过，所述挡片(1)放置于所述第一环状凸台(24)上，所述挡片(1)与所述第一环状凸台(24)相互连接，所述第一槽体(11)与所述第二槽体(22)一一对应，相互对应的所述第一槽体(11)、所述第二槽体(22)形成配置成容纳一根所述光纤(4)的裸线的固定槽，所述真空灌封胶层覆盖于所述挡片(1)上，所述密封粘接胶层(8)覆盖于所述真空灌封胶层上。
  2. 根据权利要求1所述的光纤导入装置，其特征在于，所述第一槽体(11)、所述第二槽体(22)均为半圆形。
  3. 根据权利要求2所述的光纤导入装置，其特征在于，所述挡片(1)上开设有至少两个平头螺钉沉头孔(12)，所述第一环状凸台(24)上开设有相应的连接孔，至少两个沉头螺钉分别穿过相对应的所述平头螺钉沉头孔(12)、所述连接孔将所述挡片(1)与所述第一环状凸台(24)相互连接。
  4. 根据权利要求1-3任一所述的光纤导入装置，其特征在于，所述第一环状凸台(24)的背离所述第二环状凸台(27)的一侧开设有环状密封槽(25)，所述环状密封槽(25)内设置有密封圈(3)。
  5. 根据权利要求1-4任一所述的光纤导入装置，其特征在于，所述挡片(1)与所述第二环状凸台(27)的长边之间留有间隙(241)，所述第二环状凸台(27)靠近所述中心孔(21)的边缘设置有倒圆。
  6. 根据权利要求4所述的光纤导入装置，其特征在于，所述灌胶座(2)的与所述环状密封槽(25)相对应的一侧面上设置有排气结构(26)，所述排气结构(26)为开设于所述灌胶座(2)侧壁上的多个凹槽，各所述凹槽均与所述环状密封槽(25)连通。
  7. 根据权利要求1-6任一所述的光纤导入装置，其特征在于，还包括安装座(6)，所述安装座(6)配置成将所述灌胶座(2)连接于真空腔壁上，所述安装座(6)与所述灌胶座(2)相连接。
  8. 采用上述权利要求1-7所述的光纤导入装置导入光纤的方法，其特征在于，包括：
    光纤(4)位于真空腔内的部分为第一段，所述光纤(4)位于灌封位置的部分为第二段，去除各所述第一段外的塑料保护层(42)，去除各所述第二段外的塑料保护层(42)及金属层(41)，各所述第二段的长度小于灌胶厚度，灌胶厚度为所述挡片(1)放入所述灌胶座(2)内后，所述挡片(1)上表面到所述灌胶座(2)顶面的距离，
    将各所述光纤(4)分别套入所述灌胶座(2)上的一个第二槽体(22)内，将所述挡片(1)放置于第一环状凸台(24)上，使所述第一槽体(11)与所述第二槽体(22)一一对应，相互对应的所述第一槽体(11)、所述第二槽体(22)形成固定槽，各所述光纤(4)的所述第二段分别容纳于一个所述固定槽内，将所述挡片(1)与所述灌胶座(2)相连接；
    在所述挡片(1)表面灌注真空胶，所述真空胶充满所述光纤(4)与所述挡片(1)之间的空间及所述光纤(4)与所述灌胶座(2)之间的空间，并且所述真空胶覆盖所述挡片(1)表面；
    所述真空胶固化后形成真空胶层，在所述真空胶层外灌注密封粘接胶，所述密封粘接胶不超过所述灌胶座(2)表面。
  9. 根据权利要求8所述的导入光纤的方法，其特征在于，还包括：所述密封粘接胶固化后，在密封槽(25)内安装密封圈(3)。
  10. 根据权利要求9所述的导入光纤的方法，其特征在于，还包括：安装所述密封圈(3)后，将所述灌胶座(2)连接于安装座(6)上。
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