WO2023089200A2 - Appareil de revêtement en ligne pour la fabrication de pièces d'une cellule à semi-conducteurs - Google Patents

Appareil de revêtement en ligne pour la fabrication de pièces d'une cellule à semi-conducteurs Download PDF

Info

Publication number
WO2023089200A2
WO2023089200A2 PCT/EP2022/082836 EP2022082836W WO2023089200A2 WO 2023089200 A2 WO2023089200 A2 WO 2023089200A2 EP 2022082836 W EP2022082836 W EP 2022082836W WO 2023089200 A2 WO2023089200 A2 WO 2023089200A2
Authority
WO
WIPO (PCT)
Prior art keywords
unit
solid
coating
coating apparatus
chamber
Prior art date
Application number
PCT/EP2022/082836
Other languages
English (en)
Other versions
WO2023089200A3 (fr
Inventor
Helmut Rudigier
Siva Phani Kumar YALAMANCHILI
Johann Karner
Florian GRIESINGER
Dominik Erwin WIDMER
Original Assignee
Oerlikon Surface Solutions Ag, Pfäffikon
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Surface Solutions Ag, Pfäffikon filed Critical Oerlikon Surface Solutions Ag, Pfäffikon
Publication of WO2023089200A2 publication Critical patent/WO2023089200A2/fr
Publication of WO2023089200A3 publication Critical patent/WO2023089200A3/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0402—Methods of deposition of the material
    • H01M4/0421—Methods of deposition of the material involving vapour deposition
    • H01M4/0423—Physical vapour deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/04—Construction or manufacture in general
    • H01M10/0404—Machines for assembling batteries
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/052—Li-accumulators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/056—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes
    • H01M10/0561—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes the electrolyte being constituted of inorganic materials only
    • H01M10/0562—Solid materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0402—Methods of deposition of the material
    • H01M4/0421—Methods of deposition of the material involving vapour deposition
    • H01M4/0423—Physical vapour deposition
    • H01M4/0426—Sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/134—Electrodes based on metals, Si or alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/139—Processes of manufacture
    • H01M4/1395—Processes of manufacture of electrodes based on metals, Si or alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/36—Selection of substances as active materials, active masses, active liquids
    • H01M4/362—Composites
    • H01M4/366—Composites as layered products
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/36—Selection of substances as active materials, active masses, active liquids
    • H01M4/38—Selection of substances as active materials, active masses, active liquids of elements or alloys
    • H01M4/381—Alkaline or alkaline earth metals elements
    • H01M4/382—Lithium
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries

Definitions

  • Non-conductive lithiophilic layers such as amorphous carbon (a-C), may also be provided, which can be deposited, for example, using a scalable HiPIMS process (S3PTM sputter process) or a plasma-activated chemical vapour deposition process (PA-CVD process).
  • the carrier unit may be returned to the loading unit via the return chamber after reaching the unloading unit.
  • a carrier unit may be transported within a circular process through a loading unit, a first, second and third coating unit and an unloading unit and from there back to the loading unit.
  • Figure 8a a representation of the two-dimensional distribution of the relative layer thickness of a deposited anode layer on a substrate
  • the carrier unit 10 comprises a rectangular frame 16 and a plurality of movable spindles 18 arranged within the frame 16 for receiving the parts T of the solid-state cells 1 , wherein the plurality of spindles 18 arranged within the frame 16 are mounted rotatably about a longitudinal axis LA within the frame 16.
  • the carrier unit 10 comprises a positioning unit 22 in the form of a positioning rail for positioning the movable spindles 18, in particular, for the simultaneous uniform positioning of the plurality of movable spindles 18 arranged within the frame 16.
  • the carrier unit 10 comprises a toothed belt drive 24, comprising a first and a second toothed belt drive unit 24a, 24b arranged at the ends within the carrier unit 10 for moving the carrier unit 10.
  • the carrier unit 10 comprises a rotatable spindle 18, carrying a substrate 3, whereby the spindle 18 can be rotated in both 1-fold and 2-fold rotation.
  • a source 26 for evaporation is thereby placed below the spindle 18.
  • the spindle rotates 2-fold continuously.
  • the spindle 18 rotates only once, but rotates each substrate 3 180° in the horizontal rotation to deposit the coating on both sides of the substrates 3, as shown.
  • the substrate 3 can be stationary or moved by the in-line coating apparatus 2.
  • the coating apparatus 2 can be equipped with any PVD/PE CVD sources such as sputter, arc or evaporation sources or similar.
  • Figure 7a shows a step of inserting the carrier unit 10 into a loading unit 12 according to the invention.
  • Figure 7b shows an evaporation chamber 4a of a first coating untit 4 for applying an anode layer 40 to a carrier unit 10.
  • Figure 8a shows a representation of the two-dimensional distribution of the relative layer thickness of a deposited anode layer 40 on a substrate 3.
  • Figure 9a shows a representation of a rectangular target for use in a DC sputtering process within a second coating unit 6.
  • the method comprises the steps of applying 100 an anode layer 40 onto a carrier unit 10 within a first coating unit 4, applying 200 a plurality of lithiophilic layers 42 on the anode layer 40 within a second coating unit 6 and applying 300 an electrolyte layer 44 on the plurality of lithiophilic layers 42 within a third coating unit 8, wherein the carrier unit 10 is transferred from the first coating unit 4 to the second coating unit 6 to the third coating unit 8 during the manufacture of the parts 1 ' of solid state cells 1.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Composite Materials (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Battery Electrode And Active Subsutance (AREA)
  • Coating Apparatus (AREA)
  • Secondary Cells (AREA)

Abstract

L'invention divulgue un appareil de revêtement en ligne (2) pour la fabrication de pièces (1') d'une cellule à semi-conducteurs (1) destinée à être utilisée dans une batterie à semi-conducteurs, comprenant une première unité de revêtement (4) pour appliquer une couche d'anode (40) à une unité de support (10), une deuxième unité de revêtement (6) pour appliquer une pluralité de couches lithiophiles (42) sur la couche d'anode (40), une troisième unité de revêtement (8) pour appliquer une couche d'électrolyte (44) à la pluralité de couches lithiophiles (42) et une unité de support (10) pour recevoir les pièces (1') de la cellule à semi-conducteurs (1), l'unité de support (10) pouvant être transférée de la première unité de revêtement (4) par l'intermédiaire de la deuxième unité de revêtement (6) dans la troisième unité de revêtement (8).
PCT/EP2022/082836 2021-11-22 2022-11-22 Appareil de revêtement en ligne pour la fabrication de pièces d'une cellule à semi-conducteurs WO2023089200A2 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102021005775 2021-11-22
DE102021005775.9 2021-11-22
DE102021006234 2021-12-17
DE102021006234.5 2021-12-17

Publications (2)

Publication Number Publication Date
WO2023089200A2 true WO2023089200A2 (fr) 2023-05-25
WO2023089200A3 WO2023089200A3 (fr) 2023-06-29

Family

ID=84487738

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2022/082836 WO2023089200A2 (fr) 2021-11-22 2022-11-22 Appareil de revêtement en ligne pour la fabrication de pièces d'une cellule à semi-conducteurs

Country Status (1)

Country Link
WO (1) WO2023089200A2 (fr)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10004786C2 (de) * 1999-09-14 2002-11-07 Ardenne Anlagentech Gmbh Vakuumbeschichtungsanlage
DE102010002839B4 (de) * 2010-03-12 2014-09-11 Von Ardenne Anlagentechnik Gmbh Beschichtungsanlage und Verfahren zur Beschichtung von Halbleiterscheiben in Beschichtungsanlagen
KR102458714B1 (ko) * 2017-09-21 2022-10-26 어플라이드 머티어리얼스, 인코포레이티드 리튬 애노드 디바이스 적층체 제조
US11631840B2 (en) * 2019-04-26 2023-04-18 Applied Materials, Inc. Surface protection of lithium metal anode

Also Published As

Publication number Publication date
WO2023089200A3 (fr) 2023-06-29

Similar Documents

Publication Publication Date Title
US11196045B2 (en) Plasma pretreatment on current collectors for thin film lithium metallization
US8753724B2 (en) Plasma deposition on a partially formed battery through a mesh screen
JP6513221B2 (ja) 方法及びコーティング設備
EP2122006B1 (fr) Procédés et appareils de formation de revêtements semblables à du diamant
JP2017503323A (ja) リチウム金属上の固体電解質およびバリアならびにその方法
WO2010098891A2 (fr) Compositions d'électrode et procédés
EP2905355B1 (fr) Dispositif de revêtement en ligne et procédé de revêtement en ligne
GB2588939A (en) Sputter deposition apparatus and method
JP2022512978A (ja) 膜及び製造プロセス
US20120107606A1 (en) Article made of aluminum or aluminum alloy and method for manufacturing
GB2318127A (en) Deposition of lithium/lithium nitride on moving web
WO2023089200A2 (fr) Appareil de revêtement en ligne pour la fabrication de pièces d'une cellule à semi-conducteurs
CN105449168A (zh) 具有界面修饰层的金属基固态薄膜锂电池正极的制备方法
CN112779512A (zh) 一种基于互联气相沉积技术制备复合电极粉末的方法
KR20190065233A (ko) 증착 장치, 가요성 기판을 코팅하는 방법, 및 코팅을 갖는 가요성 기판
US8940140B2 (en) Thin film application device and method for coating small aperture vacuum vessels
JP3735462B2 (ja) 金属酸化物光学薄膜の形成方法および成膜装置
JP2016186106A (ja) 蒸着フィルムの製造方法
JP2021513004A (ja) 堆積装置、フレキシブル基板をコーティングする方法、及びコーティングを有するフレキシブル基板
US8709659B2 (en) Electrode composition with enhanced performance characteristics
JPH042795A (ja) 金属多孔体の連続製造方法
CN117832508A (zh) 集流体
US4089990A (en) Battery plate and method of making
US9240584B1 (en) Phase change material source for physical vapor deposition
CN117673365A (zh) 集流体