WO2023051809A1 - 防掉落装置及空中运输车 - Google Patents

防掉落装置及空中运输车 Download PDF

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Publication number
WO2023051809A1
WO2023051809A1 PCT/CN2022/123435 CN2022123435W WO2023051809A1 WO 2023051809 A1 WO2023051809 A1 WO 2023051809A1 CN 2022123435 W CN2022123435 W CN 2022123435W WO 2023051809 A1 WO2023051809 A1 WO 2023051809A1
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WIPO (PCT)
Prior art keywords
connecting arm
seat
slider
linkage mechanism
drop device
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PCT/CN2022/123435
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English (en)
French (fr)
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WO2023051809A8 (zh
Inventor
杜宝宝
缪峰
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弥费实业（上海）股份有限公司
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Publication of WO2023051809A1 publication Critical patent/WO2023051809A1/zh
Publication of WO2023051809A8 publication Critical patent/WO2023051809A8/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying

Definitions

  • the present application belongs to the field of automatic control technology, more precisely relates to semiconductor manufacturing technology, and in particular to an anti-drop device and an air transport vehicle.
  • aerial transport vehicle also called a crane
  • wafers are fragile and valuable items that need to be transported by air in the factory building, so it is necessary to set them in the aerial transport vehicle Anti-drop device.
  • the anti-drop device of the air transport vehicle involved in the related technology uses a stepper motor with a reducer and a customized cam to realize the extension or contraction transmission in its telescopic drive structure, so the mechanism is large in size, complex in structure and heavy, and the cam is customized
  • the processing of customized parts is difficult, the consistency is low, the fault tolerance rate of the rack is low, the installation and debugging are difficult, and it is not conducive to the long-term stable operation of the equipment.
  • the present application provides a technical solution to solve the above technical problems.
  • the application provides an anti-drop device, which is applied to an air transport vehicle, including: a mounting plate, a motor, a first support seat, a second support seat, a ball screw, a slider connecting seat and a quadrilateral linkage mechanism, the quadrilateral linkage
  • the mechanism includes a quadrilateral linkage structure composed of a first connecting arm, a second connecting arm, a third connecting arm and a fourth connecting arm; the motor, the first supporting base and the second supporting base are installed on the mounting On the board, the ball screw is supported between the first support seat and the second support seat after passing through the slider connecting seat, and the second connecting arm and the second connecting arm oppositely arranged in the quadrilateral linkage mechanism
  • Each of the four connecting arms is installed on the mounting plate through a corresponding bearing seat, the first end of the slider connecting seat is connected to the first connecting arm, and the output shaft of the motor is connected to one end of the ball screw.
  • the motor drives the ball screw
  • the ball screw drives the slider connecting seat to move
  • the slider connecting seat drives the first connecting arm to move, so that the quadrilateral linkage mechanism is extended or
  • the shrinkage is used to prevent the target object from falling when the aerial vehicle transports the target object.
  • FIG. 1 is a schematic diagram of a front perspective structure of a fall prevention device provided by the present application
  • FIG. 2 is a schematic diagram of a rear stereoscopic structure of a fall prevention device provided by the present application
  • Fig. 3 is a schematic top view of a fall prevention device provided by the present application when it is contracted;
  • Fig. 4 is a schematic top view of a fall prevention device provided by the present application when it is extended;
  • Fig. 5 is a schematic top view of a fall prevention device provided by the present application when the clamping block is extended;
  • Fig. 6 is a three-dimensional schematic diagram of a fall prevention device provided by the present application when clamping an object to be clamped;
  • FIG. 7 is a schematic front view of a fall prevention device provided in the present application when clamping an object to be clamped.
  • Automated transport in automated manufacturing plants can be implemented using automated small transport vehicles.
  • Small transport vehicles shuttle between each station to transport materials in a timely and effective manner, which not only improves the transport efficiency, ensures timely and punctual processing operations, but also reduces personnel circulation, especially in the clean workshops of semiconductor manufacturing plants, automated small transport
  • the role of vehicles is particularly important.
  • aerial transport vehicles In the production workshop or factory building of precision devices such as wafers, aerial transport vehicles (cranes) are often used to carry out wafer box handling operations. Wafers are fragile and valuable items. If they fall during high-altitude transportation, it will cause major economic losses. Therefore, in order to prevent valuable raw materials or components such as wafers from falling from the sky, the aerial transport vehicle is equipped with a drop prevention device.
  • the anti-drop device of the air transport vehicle involved in the related technology usually uses a stepper motor with a reducer and a customized cam to transmit power to realize the extension or contraction movement of the anti-drop device.
  • a stepper motor with a reducer and a customized cam to transmit power to realize the extension or contraction movement of the anti-drop device.
  • the volume is large, the structure is complex and heavy, and the anti-drop device using stepping motor and reducer is installed on the aerial transport vehicle, which not only requires a larger space on the upper floor of the factory building, but also the cam of the anti-drop device is a custom-made part.
  • the processing is difficult, the consistency is low, the fault tolerance rate of the frame is low, the installation and debugging are difficult, and it is not conducive to the long-term stable operation of the equipment.
  • the inventor of the present application redesigned the telescopic device.
  • the telescopic device performs stretching or contraction movement under the cooperation of the ball screw and the motor.
  • the anti-drop device using the newly designed telescopic device has a simple structure, a smaller volume, and standardized parts High degree.
  • the anti-drop device may include: a quadrilateral linkage mechanism, wherein each side is a connecting arm, and the connecting arms are connected in pairs and can be rotated relative to each other, so that the distance between the opposite sides can be changed to realize the quadrilateral linkage mechanism Can be extended or contracted; motor and ball screw, wherein the ball screw is installed on the fixed bracket of the anti-drop device, the motor is connected to the ball screw, and when the motor is started, the ball screw is driven to rotate around its central axis; the slider Connecting seat, a part of the connecting seat of the slider is connected to a connecting arm of the quadrilateral linkage mechanism, the ball screw passes through the connecting seat of the slider, when the ball screw is driven by the motor to rotate, the connecting seat of the slider moves along the ball screw , so as to drive the connecting arm of the quadrilateral linkage mechanism to perform stretching or contraction movement, so as to prevent the target object from falling when the aerial transport vehicle transports the target object.
  • a quadrilateral linkage mechanism wherein each side
  • the anti-drop device may include: a mounting plate 3, a motor 4, a ball screw 5, and a support seat 7 (for example, the left support seat is marked as the first support seat, and the right support seat is marked as is the second supporting seat), slider connecting seat 8 and quadrilateral linkage mechanism, and the quadrilateral linkage mechanism includes a quadrilateral formed by the first connecting arm 15, the second connecting arm 16, the third connecting arm 17 and the fourth connecting arm 18. linkage structure.
  • the motor 4, the first support seat and the second support seat are installed on the mounting plate 3, and the ball screw 5 passes through the slider connection seat 8 and is supported between the first support seat and the second support seat.
  • the second connecting arm 16 and the fourth connecting arm 18 oppositely arranged in the linkage mechanism are installed on the mounting plate 3 by the corresponding bearing seat 13 respectively, and the first end of the slider connecting seat 8 (as shown in the bottom surface of the slider connecting seat in Fig. 1 ) is connected with the first connecting arm 15, and the output shaft of the motor 4 is connected with one end of the ball screw 5.
  • the motor 4 drives the ball screw 5
  • the ball screw 5 drives the slider connecting seat 8 to move
  • the slider connecting seat 8 drives the first connecting arm 15 to move
  • the first The connecting arm 15 drives the second connecting arm 16 , the third connecting arm 17 and the fourth connecting arm 18 to move, so that the quadrilateral linkage mechanism expands or contracts.
  • the second connecting arm 16 and the fourth connecting arm 18 are two connecting arms oppositely arranged in the quadrilateral linkage structure, that is, the second connecting arm 16 and the fourth connecting arm 18 are located on opposite sides of the quadrilateral structure.
  • the first connecting arm 15 and the third connecting arm 17 are also at opposite sides of the quadrilateral structure, since the second connecting arm 16 and the fourth connecting arm 18 can rotate around the bearing seat 13 respectively, when the slider connecting seat 8 drives
  • the first connecting arm 15 moves, the distance between the two sets of opposite sides of the quadrilateral structure will change, so that the quadrilateral linkage mechanism will expand or contract.
  • contracting it will take up less space and will not affect the normal grasping and clamping of the aerial transport vehicle. It can hold the target object, and can be stretched under the target object when stretching, which can protect the target object from falling from the air and prevent the fall from affecting production safety.
  • the motor is controlled to run and stop, so that the slider connecting seat 8 stays at the end of the ball screw 5 close to the motor 4, and the quadrilateral linkage structure is in an unfolded state, as shown in Figures 2 and 4.
  • the motor is controlled to run and stop, so that the slider connecting seat 8 stays at the end of the ball screw 5 away from the motor 4, and the quadrilateral linkage structure is in a retracted state, as shown in FIGS. 1 and 3 .
  • the anti-drop device can be used to cooperate with the aerial transport vehicle: for example, when the gripper on the aerial transport vehicle is not implementing the gripping object, the motor 4 drives the ball screw 5 so that the quadrilateral linkage structure is in the Contracted state; when the jaws on the aerial transport vehicle grab the object to be clamped, the motor 4 drives the ball screw 5 to make the quadrilateral linkage structure in an extended state; the extended state of the quadrilateral linkage structure forms an "anti-drop arm" ", when the clamped object falls accidentally, support the clamped object to prevent it from falling, and play a protective role.
  • the motor can preferably be a DC motor.
  • the anti-drop device provided by this application can be applied to aerial transport vehicles.
  • a single motor passes through the ball screw and the slider connecting seat to drive the quadrilateral linkage mechanism to expand or contract. When it falls, it plays the role of receiving protection.
  • the quadrilateral linkage mechanism shrinks, it provides a space for loading (for example: grabbing wafer boxes) for the air transport vehicle to meet the needs of material loading and transportation operations.
  • the anti-drop device has a simple structure, and the structural components (such as ball screw, connecting arm, slider connecting seat, and bearing seat) are easy to standardize, which is convenient for component selection and procurement, and the driving structure is simplified, light in weight and small in size, which is beneficial to equipment.
  • the installation and debugging can improve the fault tolerance rate of the rack and the long-term working stability of the equipment.
  • the anti-drop device can also include a slide rail 6, wherein the slide rail 6 is installed on the mounting plate 3, and the second end of the slider connecting seat 8 (as shown in the back of the slider connecting seat in Figure 1) is connected to the The slide rail 6 is slidably connected, so that the second end of the slider connecting seat 8 is limited to move on the slide rail 6 .
  • the second end of the slider connecting seat 8 can be fixedly connected to the connecting seat of the slide rail 6 .
  • the effect of stabilizing the slider connecting seat 8 is played, so that the movement process of the slider connecting seat 8 along the ball screw 5 is more stable, and better driving
  • the quadrilateral linkage mechanism expands or contracts, improving the fault tolerance rate of the rack and the long-term working stability of the equipment.
  • a groove is provided inside the first end of the slider connecting seat 8 , and the roller bearing 9 is installed in the groove; the roller bearing 9 is connected with the first connecting arm 15 .
  • the roller bearings include spherical roller bearings, thrust spherical roller bearings, tapered and cylindrical roller bearings, and the like.
  • a groove is provided inside the first end of the slider connecting seat 8 to provide an installation space for the roller bearing to facilitate the formation of a compact structure; the types and models of the roller bearing are abundant and have the characteristics of high rotation accuracy.
  • the roller bearing is connected to the first connecting arm of the quadrilateral linkage structure, which can better match the movement of the quadrilateral linkage structure.
  • the anti-drop device further includes a detection board 10 , a first sensor 11 and a second sensor 12 , and the detection board 10 is installed on the slider connecting seat 8 ;
  • the first sensor 11 and the detection board 10 work together to detect whether the quadrilateral linkage mechanism is stretched to the first predetermined position; the second sensor 12 cooperates with the detection board 10 to detect whether the quadrilateral linkage mechanism shrinks to the second predetermined location.
  • the first sensor 11, the second sensor 12 and the detection plate 10 realize the following cooperative actions: as shown in FIG. ), the first predetermined position includes the positions where the four connecting arms of the quadrilateral linkage mechanism are located when the distance between the first connecting arm 15 and the third connecting arm 17 is the largest. Within the sensing range of the sensor 11, the first sensor 11 sends out a sensing signal to indicate that the quadrilateral linkage mechanism is stretched to a first predetermined position. As shown in FIG. 3 , when the quadrilateral linkage mechanism shrinks to a second predetermined position (such as the predetermined position when the contraction is completed), the second predetermined position includes the distance between the first connecting arm 15 and the third connecting arm 17 being the shortest.
  • a second predetermined position such as the predetermined position when the contraction is completed
  • the detection plate 10 is located in the sensing range of the second sensor 12, and the second sensor 12 sends a sensing signal to indicate that the quadrilateral linkage mechanism shrinks to the second Book a spot.
  • the detection board 10 can be disposed on the first connecting arm 15 . Since the first end of the slider connecting seat 8 is connected to the first connecting arm 15, when the slider connecting seat 8 moves, the first connecting arm 15 will also move accordingly, that is to say, the slider connecting seat 8 is connected to the first connecting arm 15. The arms 15 move synchronously. Therefore, setting the detection board 10 on the first connecting arm 15 can also indicate whether the quadrilateral linkage mechanism has reached the first or second predetermined position.
  • the first sensor 11 may include sensors for detection such as magnetoelectric sensors, photoelectric sensors, and the like.
  • the second sensor 12 may include sensors for detection such as a magnetoelectric sensor, a photoelectric sensor, and the like.
  • the first sensor 11 is installed on the first support base, and the second sensor 12 is installed on the second support base.
  • the first sensor 11 is installed on the side of the first support base opposite to the installation plate 3
  • the second sensor 12 is installed on the side of the second support base opposite to the installation plate 3 . side.
  • the first sensor 11 is installed above the first support base, and the second sensor 12 is installed above the second support base.
  • the first sensor 11 may include a first light-emitting component and a first light-receiving component, and the first light-emitting component and the first light-receiving component are arranged oppositely so as to pass The shielding of the detection board 10 outputs a sensing signal.
  • the second sensor 12 may include a second light-emitting component and a second light-receiving component, and the second light-emitting component and the second light-receiving component are arranged opposite to each other so as to output through the occlusion of the detection board 10 sensing signal.
  • the detection board 10 is a strip-shaped detection board.
  • the first sensor 11 When one end of the strip-shaped detection plate is located between the first light-emitting component and the first light-receiving component, the first sensor 11 outputs a first signal, and the first signal is used to characterize the The quadrilateral linkage extends to a first predetermined position.
  • the second sensor 12 When the other end of the strip-shaped detection plate is located between the second light-emitting component and the second light-receiving component, the second sensor 12 outputs a second signal, which is used to characterize The quadrilateral linkage retracts to a second predetermined position.
  • the first light-emitting component and the first light-receiving component, and the second light-emitting component and the second The light receiving component can realize the following cooperative actions: as shown in Figure 3, when the quadrilateral linkage mechanism shrinks to the second predetermined position, that is, when the quadrilateral linkage structure is in the retracted state, the right end of the strip-shaped detection plate is located at the second light emitting component Between the second light-receiving component and the second sensor 12 is triggered to send out a second signal to indicate that the quadrilateral linkage mechanism is retracted to a second predetermined position.
  • the left end of the strip-shaped detection plate is located between the first light-emitting component and the first light-receiving component, triggering The first sensor 11 sends out a first signal to indicate that the quadrilateral linkage mechanism is extended to a first predetermined position.
  • the anti-drop device further includes a fifth connecting arm 19, a sixth connecting arm 20 and a clamping block 21; the first end of the fifth connecting arm 19 is connected to the first
  • the connecting arm 15 is rotatably connected
  • the second end of the fifth connecting arm 19 is rotatably connected to the sixth connecting arm 20
  • the first end of the sixth connecting arm 20 is rotatably connected to the corresponding bearing seat 13
  • the clamping block 21 is connected to the sixth connecting arm 20.
  • the second end of the arm 20 is rotationally connected; wherein, the first connecting arm 15, the fifth connecting arm 19 and the sixth connecting arm 20 form a triangle linkage mechanism to follow the synchronous expansion or contraction of the quadrilateral linkage mechanism, and when the triangle linkage mechanism When the linkage mechanism is in an extended state, the clamping block 21 is used to clamp the object to be clamped, which can reduce the shaking of the object to be clamped.
  • connection structure can realize the following linkage effect: as shown in Figure 2 and Figure 4, when the first connecting arm 15 drives the quadrilateral linkage mechanism to move to the extended state, the first connecting arm 15 drives the fifth connecting arm 19 to On the opposite side of the mounting plate 3 (as shown in Figure 4, the fifth connecting arm 19 moves upwards), the fifth connecting arm 19 drives the sixth connecting arm 20 and also moves to the opposite side of the mounting plate 3, due to the movement of the sixth connecting arm 20
  • the first end is fixed on the bearing seat 13 and is rotatably connected with the corresponding bearing seat 13 .
  • the clamping block 21 connected to the second end of the sixth connecting arm 20 moves to the opposite side of the mounting plate 3, so that the clamping block 21 approaches and compresses the side of the aerial transport vehicle.
  • the clamped object has a clamping effect and prevents the clamped object from shaking;
  • the first connecting arm 15 drives the quadrilateral linkage mechanism to move to the retracted state
  • the first connecting arm 15 drives the fifth connecting arm 19 to move to the same side of the mounting plate 3 (as shown in Figure 3, the first The fifth connecting arm 19 moves downward)
  • the fifth connecting arm 19 drives the sixth connecting arm 20 to also move to the same side of the mounting plate 3, because the first end of the sixth connecting arm 20 is fixed on the bearing seat 13, and corresponds to The bearing seat 13 is rotationally connected, therefore, under the pulling of the fifth connecting arm 19, the second end of the sixth connecting arm 20 and the clamping block 21 are recovered to the same side of the mounting plate 3, so that the air transport vehicle grabs the clamped
  • the holder provides space.
  • the anti-drop device can prevent the object from being clamped from shaking on the basis of preventing the object from being clamped accidentally.
  • the clamping block 21 approaches and clamps the clamped object from the side of the clamped object, the structure of the equipment is simple, and the selection and purchase of components are convenient.
  • the clamping block 21 includes a preset first target surface, and the first target surface is used for clamping the object to be clamped.
  • the end surface contacted by the object to be clamped is, as shown in the figure, the middle end surface of the clamping block 21 (marked as the first target surface 21 b in FIG. 5 ).
  • the first target surface may be in a rectangular, square or other planar shape to increase the contact area with the object to be clamped.
  • the surface of the first target surface may be coated with a coating or pasted with patches to adjust the frictional force of the first target surface.
  • the clamping block 21 further includes a second target surface 21a and a third target surface 21c, and the second target surface 21a and the third target surface 21c are arranged on two sides of the first target surface 21b. side, so that the second target surface 21a or the third target surface 21c is used to contact the clamped object during the extension process of the triangle linkage mechanism, and then transitions to use the first target surface 21b to contact the clamped object.
  • the second target surface 21a or the third target surface 21c on the clamping block 21 first approaches the clamped object, because the second target surface 21a, the third target surface The surfaces 21c are respectively adjacent to the first target surface 21b, and form an obtuse angle structure.
  • the clamping block 21 is under the opposite thrust of the triangle linkage mechanism and the object to be clamped.
  • the obtuse angle position sends deflection, so that the first target surface 21b contacts with the clamped object to form a stable clamping contact surface.
  • the embodiments of this specification also provide an aerial transport vehicle, the aerial transport vehicle includes the anti-fall device described in any one of the preceding embodiments, and the anti-fall device is arranged on the aerial transport vehicle.
  • the inner side of the transport vehicle so that under the drive of the motor 4, the quadrilateral linkage mechanism extends below the aerial transport vehicle or shrinks on the inner side of the aerial transport vehicle.
  • the quadrilateral linkage mechanism of the anti-drop device 2 extends below the air transport vehicle , such as under the clamped object 1, once the clamped object falls, the quadrilateral linkage mechanism will stably accept the clamped object, effectively avoiding the clamped object from falling.
  • the triangular linkage mechanism of the anti-drop device can also protect the clamped object from shaking, which can reduce the magnitude of shaking and improve production safety.
  • the anti-drop device when the aerial transport vehicle (not shown in the figure) is not grabbing the clamped object (such as a wafer box), the anti-drop device can be retracted back to the inside of the vehicle body (not shown here), occupying a space Small and does not interfere with the grabbing operation of the aerial transport vehicle.

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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Abstract

本申请提供一种防掉落装置及空中运输车，应用于自动控制技术领域，其中防掉落装置包括安装板（3）、电机（4）、第一支撑座、第二支撑座、滚珠丝杆（5）、滑块连接座（8）和四边形联动机构，四边形联动机构包括由第一连接臂（15）、第二连接臂（16）、第三连接臂（17）和第四连接臂（18）构成的四边形联动结构，电机（4）、第一支撑座、第二支撑座安装于安装板（3）上，相对设置的第二连接臂（16）和第四连接臂（18）各自通过对应轴承座（13）安装于安装板（3）上，滚珠丝杆（5）穿过滑块连接座（8）后支承于第一支撑座和第二支撑座之间，滑块连接座（8）与第一连接臂（15）连接，电机（4）的输出轴与滚珠丝杆（5）连接。

Description

防掉落装置及空中运输车
本申请基于申请号为“202111163791.6”、申请日为2021年09月30日的中国专利申请提出，并要求该中国专利申请的优先权，该中国专利申请的全部内容在此以引入方式并入本申请。
技术领域
本申请属于自动控制技术领域，更确切的说涉及半导体制造技术，尤其涉及一种防掉落装置及空中运输车。
背景技术
在半导体制造工厂中，常常需要使用空中运输车(也称天车)来搬运晶圆盒，而晶圆属于易碎的贵重物品，且需要在厂房内空中运输，因而需要在空中运输车中设置防掉落装置。
相关技术涉及的空中运输车的防掉落装置，其伸缩驱动结构采用的是步进电机搭配减速机和定制凸轮实现伸展或者收缩传动，因而机构体积大、结构复杂且笨重，还有凸轮为定制件，定制件加工难度大、一致性低，机架容错率低，安装及调试难度大，也不利于设备长期稳定工作。
基于此，本申请提供了解决以上技术问题的技术方案。
发明概述
本申请提供一种防掉落装置，应用于空中运输车，包括：安装板、电机、第一支撑座、第二支撑座、滚珠丝杆、滑块连接座和四边形联动机构，所述四边形联动机构包括由第一连接臂、第二连接臂、第三连接臂和第四连接臂构成的四边形联动结构；所述电机、所述第一支撑座和所述第二支撑座安装于所述安装板上，所述滚珠丝杆穿过所述滑块连接座后支承于所述第一支撑座和所述第二支撑座之间，所述四边形联动机构中相对设置的第二连接臂和第四连接臂各自通过对应轴承座安装于所述安装板上，所述滑块连接座的第一端与所述第 一连接臂连接，所述电机的输出轴与所述滚珠丝杆的一端连接；其中，所述电机驱动所述滚珠丝杆，所述滚珠丝杆带动所述滑块连接座移动，所述滑块连接座带动所述第一连接臂移动，使得所述四边形联动机构伸展或收缩，以用于所述空中运输车搬运目标物时防止所述目标物掉落。
附图说明
下面将以明确易懂的方式，结合附图说明优选实施方式，对上述特性、技术特征、优点及其实现方式予以进一步说明。
图1为本申请提供的一种防掉落装置的前侧立体结构示意图；
图2为本申请提供的一种防掉落装置的后侧立体结构示意图；
图3为本申请提供的一种防掉落装置收缩时的俯视示意图；
图4为本申请提供的一种防掉落装置伸展时的俯视示意图；
图5为本申请提供的一种防掉落装置在夹紧块伸展时的俯视示意图；
图6为本申请提供的一种防掉落装置在夹持被夹持物时的立体示意图；
图7为本申请提供的一种防掉落装置在夹持被夹持物时的正视示意图。
本发明的实施方式
为了更清楚地说明本申请实施例或现有技术中的技术方案，下面将对照附图说明本申请的具体实施方式。显而易见地，下面描述中的附图仅仅是本申请的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图，并获得其他的实施方式。
基于本申请，所属领域的技术人员应了解，本文中所描述的一个方面可与任何其它方面独立地实施，且可以各种方式组合这些方面中的两者或两者以上。举例来说，可使用本文中所阐述的任何数目和方面来实施设备及/或实践方法。另外，可使用除了本文中所阐述的方面中的一或多者之外的其它结构及/或功能性实施此设备及/或实践此方法。
还需要说明的是，以下实施例中所提供的图示仅以示意方式说明本申请的基本构想，图式中仅显示与本申请中有关的组件而非按照实际实施时的组件数目、形状及尺寸绘制，其实际实施时各组件的型态、数量及比例可为一种随意 的改变，且其组件布局型态也可能更为复杂。
另外，本说明书的描述中，需要理解的是，本说明书的示例实施例中所描述的“上”、“下”、“内”、“外”等方位词，“第一”、“第二”、“第三”、等数量词，是以附图所示的角度来进行描述的，不应理解为对本说明书的示例实施例的限定，也不应理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。
在自动化制造厂房中进行自动化运输，可以使用自动化小型运输车辆来实施。小型运输车辆穿梭于各个工位之间，及时有效的运送物料，不仅提高了运送效率，保证加工作业及时准点，而且可以减少人员流通，特别是在半导体制造工厂中的洁净车间内，自动化小型运输车辆的作用尤为重要。
在如生产晶圆等精密器件的生产车间或厂房中，经常使用空中运输车(天车)执行晶圆盒搬运作业。晶圆属于易碎的贵重物品，如果在高空搬运的过程中发生坠落，将造成重大的经济损失。因此为了防止晶圆等贵重原料或部件从空中掉落，空中运输车安装有防掉落装置。
在生产和使用过程中，相关技术涉及的空中运输车的防掉落装置通常采用步进电机搭配减速机和定制凸轮传送动力，以实现防掉落装置的伸展或者收缩运动，这样的设计，机构体积大、结构复杂且笨重，而且使用步进电机、减速机的防掉落装置安装在空中运输车上，不仅需要更大厂房上层空间，而且，防掉落装置的凸轮为定制件，定制件加工难度大、一致性低，机架容错率低，安装及调试难度大，也不利于设备长期稳定工作。
本申请发明人对伸缩装置进行重新设计，该伸缩装置在滚珠丝杆和电机配合下进行伸展或者收缩运运动，使用新设计的伸缩装置的防掉落装置结构简单，体积更小，零部件标准化程度高。
该防掉落装置可包括：一个四边形联动机构，其中，每一边为一个连接臂，连接臂两两相接，并可以相对转动，以使得对边之间的距离可以发生变化，实现四边形联动机构可伸展或收缩；电机和滚珠丝杆，其中，滚珠丝杆安装在防掉落装置的固定支架上，电机连接滚珠丝杆，当电机启动时，驱动滚珠丝杆绕其中心轴转动；滑块连接座，滑块连接座的一部分连接在四边形联动机构的一 个连接臂上，滚珠丝杆穿过滑块连接座，当滚珠丝杆被电机驱动发生转动时，滑块连接座沿滚珠丝杆移动，从而带动四边形联动机构的连接臂进行伸展或者收缩运运动，以用于空中运输车搬运目标物时防止目标物掉落。
以下结合各附图，说明本申请各实施例提供的技术方案。
如图1-图5所示，防掉落装置可包括：安装板3、电机4、滚珠丝杆5、支撑座7(如将左侧支撑座记为第一支撑座、右侧支撑座记为第二支撑座)、滑块连接座8和四边形联动机构，所述四边形联动机构包括由第一连接臂15、第二连接臂16、第三连接臂17和第四连接臂18构成的四边形联动结构。
其中，电机4、第一支撑座和第二支撑座安装于安装板3上，滚珠丝杆5穿过滑块连接座8后支承于第一支撑座和第二支撑座之间，所述四边形联动机构中相对设置的第二连接臂16和第四连接臂18各自通过对应轴承座13安装于安装板3上，滑块连接座8的第一端(如图1中滑块连接座的底面)与第一连接臂15连接，电机4的输出轴与滚珠丝杆5的一端连接。
这时，当电机4工作时，实现如下的机械运动：电机4驱动滚珠丝杆5，滚珠丝杆5带动滑块连接座8移动，滑块连接座8带动第一连接臂15移动，第一连接臂15带动第二连接臂16、第三连接臂17和第四连接臂18运动，使得所述四边形联动机构伸展或收缩。
需要说明的是，第二连接臂16和第四连接臂18是所述四边形联动结构中相对设置的两个连接臂，即第二连接臂16和第四连接臂18处于四边形结构的对边位置，同时，第一连接臂15和第三连接臂17也处于四边形结构的对边位置，由于第二连接臂16和第四连接臂18分别可以绕轴承座13转动，当滑块连接座8带动第一连接臂15移动时，四边形结构的两组对边之间的距离会发生改变，从而使得所述四边形联动机构伸展或收缩，收缩时占用空间小，不影响空中运输车正常抓取及夹持目标物，以及伸展时可伸展于目标物下方，可保护目标物不从空中掉落，避免掉落影响生产安全。
需要说明的是，通过控制电机的运转和停止，以控制滑块连接座8沿滚珠丝杆5的移动距离，进而控制四边形联动结构的伸展或收缩幅度。
例如，控制电机运转和停止，使得滑块连接座8停留在滚珠丝杆5靠近电 机4的一端，所述四边形联动结构处于展开状态，如图2和图4所示。
例如，控制电机运转和停止，使得滑块连接座8停留在滚珠丝杆5远离电机4的一端，所述四边形联动结构处于收缩状态，如图1和图3所示。
还需要说明的是，防掉落装置可用于与空中运输车配合工作：比如当空中运输车上的夹爪在没有实施抓取被夹持物时，电机4驱动滚珠丝杆5使四边形联动结构处于收缩状态；当空中运输车上的夹爪实施抓取到被夹持物时，电机4驱动滚珠丝杆5使四边形联动结构处于伸展状态；所述四边形联动结构的伸展状态形成一个“防掉落手臂”，当被夹持物意外掉落时，支承被夹持物，防止其掉落，起到保护作用。
需要说明的是，可以根据与滚珠丝杆的匹配可靠性和便利性，选择合适的电机种类，比如电机可优选为直流电机。
本申请提供的防掉落装置，可以应用于空中运输车，使用单个电机经过滚珠丝杆和滑块连接座，驱动四边形联动机构伸展或收缩，当四边形联动机构展开时，可以在高空物料意外掉落时起到承接保护作用，当四边形联动机构收缩时，为空中运输车提供装载(例如：抓取晶圆盒)的空间，满足物料装载运输作业的需求。该防掉落装置结构简单，结构部件(例如滚珠丝杆、连接臂、滑块连接座、轴承座)易于标准化，方便部件选型、采购，驱动结构简化，重量轻，体积小，有利于设备的安装和调试，提高机架容错率和设备长期工作稳定性。
在一些实施方式中，防掉落装置还可包括滑轨6，其中滑轨6安装于安装板3上，滑块连接座8的第二端(如图1中滑块连接座的背面)与滑轨6滑动连接，以使滑块连接座8的第二端限定在滑轨6上移动。
一些实施中，滑块连接座8的第二端可固定连接于滑轨6的连接座上。
通过设置滑轨6滑动连接滑块连接座8的第二端，起到了稳定滑块连接座8的作用，使得滑块连接座8沿滚珠丝杆5的运动过程更加的稳固，更好地驱动四边形联动机构伸展或收缩，提高机架容错率和设备长期工作稳定性。
在一些实施方式中，滑块连接座8的第一端下方内部设置有凹槽，所述凹槽安装有滚子轴承9；滚子轴承9与第一连接臂15连接。
在一些实施方式中，滚子轴承包括调心滚子轴承、推力调心滚子轴承、圆锥滚子和圆柱滚子轴承等。
通过滑块连接座8的第一端下方内部设置凹槽，为滚子轴承提供了安装空间，以利于形成紧凑的结构；滚子轴承的种类和型号丰富，并且具有旋转精度高的特点，通过滚子轴承连接四边形联动结构的第一连接臂，可以更好的匹配四边形联动结构的运动。
在一些实施方式中，如图1所示，防掉落装置还包括检测板10、第一传感器11和第二传感器12，检测板10安装于滑块连接座8上；
其中，第一传感器11和检测板10配合工作，用于检测所述四边形联动机构是否伸展到第一预定位置；第二传感器12和检测板10配合工作，用于检测所述四边形联动机构是否收缩到第二预定位置。
在一些实施方式中，第一传感器11、第二传感器12和检测板10，实现如下的配合动作：如图4所示，当四边形联动机构伸展到第一预定位置(比如展开完成时的预定位置)时，所述第一预定位置包括第一连接臂15和第三连接臂17之间距离为最大时，四边形联动机构的四根连接臂所处的位置，此时，检测板10位于第一传感器11的传感范围内，第一传感器11发出传感信号，以表征四边形联动机构伸张至第一预定位置。如图3所示，当四边形联动机构收缩到第二预定位置(比如收缩完成时的预定位置)时，所述第二预定位置包括第一连接臂15和第三连接臂17之间距离为最小时，四边形联动机构的四根连接臂所处的位置，此时，检测板10位于第二传感器12的传感范围内，第二传感器12发出传感信号，以表征四边形联动机构收缩至第二预定位置。
在一些实施方式中，可以在第一连接臂15上设置检测板10。由于滑块连接座8的第一端与第一连接臂15连接，当滑块连接座8移动时，第一连接臂15也会跟随移动，也就是说，滑块连接座8与第一连接臂15是同步移动的。因此，在第一连接臂15上设置检测板10，也可以表征四边形联动机构是否到达第一或第二预定位置。
在一些实施方式中，第一传感器11可包括磁电式传感器、光电式传感器等用于检测的传感器。当然，第二传感器12可以包括磁电式传感器、光电式 传感器等用于检测的传感器。
在一些实施方式中，第一传感器11安装于第一支撑座上，第二传感器12安装于第二支撑座上。
在一些实施方式中，如图1所示，第一传感器11安装于第一支撑座上与安装板3相对的一侧，第二传感器12安装于述第二支撑座上与安装板3相对的一侧。
在一些实施方式中，第一传感器11安装于第一支撑座的上方，第二传感器12安装于述第二支撑座的上方。
在一些实施方式中，如图1所示，第一传感器11可包括第一光发射组件和第一光接收组件，所述第一光发射组件和所述第一光接收组件相对设置，以便通过检测板10的遮挡输出传感信号。
在一些实施方式中，第二传感器12可包括第二光发射组件和第二光接收组件，所述第二光发射组件和所述第二光接收组件相对设置，以便通过检测板10的遮挡输出传感信号。
在一些实施方式中，检测板10为长条状检测板。当所述长条状检测板的一端位于所述第一光发射组件和所述第一光接收组件之间时，所述第一传感器11输出第一信号，所述第一信号用于表征所述四边形联动机构伸展到第一预定位置。当所述长条状检测板的另一端位于所述第二光发射组件和所述第二光接收组件之间时，所述第二传感器12输出第二信号，所述第二信号用于表征所述四边形联动机构收缩到第二预定位置。
在一些实施方式中，通过所述长条状检测板(即检测板10)，所述第一光发射组件和所述第一光接收组件，以及所述第二光发射组件和所述第二光接收组件，可实现如下配合动作：如图3所示，当四边形联动机构收缩到第二预定位置时，即四边形联动结构处于收缩状态时，长条状检测板的右端位于第二光发射组件和第二光接收组件之间，触发第二传感器12发出第二信号，以表征所述四边形联动机构收缩到第二预定位置。如图4所示，当四边形联动机构伸展到第一预定位置时，即四边形联动结构处于展开状态时，长条状检测板的左端位于第一光发射组件和第一光接收组件之间，触发第一传感器11发出第一 信号，以表征所述四边形联动机构伸展到第一预定位置。
在一些实施方式中，如图1-图4所示，防掉落装置还包括第五连接臂19、第六连接臂20和夹紧块21；第五连接臂19的第一端与第一连接臂15转动连接，第五连接臂19的第二端与第六连接臂20转动连接，第六连接臂20的第一端与对应的轴承座13转动连接，夹紧块21与第六连接臂20的第二端转动连接；其中，第一连接臂15、第五连接臂19和第六连接臂20构成三角形联动机构，以跟随所述四边形联动机构同步伸展或收缩，以及当所述三角形联动机构处于伸展状态时，夹紧块21用于夹持被夹持物，可降低被夹持物的晃动。
上述连接结构，可实现如下的联动效果：如图2和图4所示，当第一连接臂15驱动所述四边形联动机构向伸展状态运动时，第一连接臂15驱动第五连接臂19向安装板3的对侧运动(如图4中，第五连接臂19向上运动)，第五连接臂19驱动第六连接臂20也向安装板3的对侧运动，由于第六连接臂20的第一端固定在轴承座13上，并与对应的轴承座13转动连接。因此，在第五连接臂19的推动下，连接在第六连接臂20的第二端的夹紧块21向安装板3的对侧运动，从而使得夹紧块21靠近并压紧空中运输车的被夹持物，起到夹紧效果，防止被夹持物晃动；
如图3所示，当第一连接臂15驱动所述四边形联动机构向收缩状态运动时，第一连接臂15驱动第五连接臂19向安装板3的同侧运动(如图3中，第五连接臂19向下运动)，第五连接臂19驱动第六连接臂20也向安装板3的同侧运动，由于第六连接臂20的第一端固定在轴承座13上，并与对应的轴承座13转动连接，因此，在第五连接臂19的拉动下，第六连接臂20的第二端以及夹紧块21回收至安装版3的同侧，为空中运输车抓取被夹持物提供空间。
通过第五连接臂19、第六连接臂20和夹紧块21，以及相应的连接设置，防掉落装置在防止被夹持物意外掉落的基础上，还能起到防止被夹持物晃动的作用，而且，通过三角形联动机构，夹紧块21从被夹持物的侧面靠近并夹持被夹持物，设备的构造简单，部件选型、采购方便。
在一些实施方式中，如图2、图4、图5所示，夹紧块21包括预设面状的第一目标面，所述第一目标面为用于夹持住被夹持物时与所述被夹持物接触的 端面，如图中夹紧块21的中部端面(如图5标识为第一目标面21b)。
在一些实施方式中，第一目标面可以为长方形、正方形等平面形状，以增加与被夹持物的接触面积。
需要说明的是，第一目标面的表面可以涂覆涂层或粘贴贴片，以调整第一目标面的摩擦力。
在一些实施方式中，如图5所示，夹紧块21还包括第二目标面21a和第三目标面21c，第二目标面21a和第三目标面21c设置于第一目标面21b的两侧，以使所述三角形联动机构伸展过程中使用第二目标面21a或者第三目标面21c与被夹持物先接触，再过渡到使用第一目标面21b与所述被夹持物接触。
在一些实施方式中，当所述三角形联动机构执行伸展动作时，夹紧块21上的第二目标面21a或第三目标面21c首先靠近被夹持物，由于第二目标面21a、第三目标面21c分别与第一目标面21b相邻，且构成钝角结构，在所述三角形联动机构持续靠近被夹持物时，夹紧块21在三角形联动机构和被夹持物的相向的推力作用下，在钝角位置发送偏转，使得第一目标面21b与被夹持物的接触，形成稳定的夹持接触面。
基于同样的申请构思，本说明书的实施例还提供一种空中运输车，该空中运输车包括前面任意一项实施例中所述的防掉落装置，所述防掉落装置设置于所述空中运输车的内侧，以在电机4的驱动下，所述四边形联动机构伸展于所述空中运输车的下方或收缩于所述空中运输车的内侧。
如图6-图7所示，空中运输车(图中未示出)抓取被夹持物(如晶圆盒)后，防掉落装置2的四边形联动机构伸展于所述空中运输车的下方，如在被夹持物1的下方，一旦被夹持物发生掉落，四边形联动机构将稳定地承接该被夹持物，有效地避免了被夹持物的掉落。
在一些实施方式中，防掉落装置的三角形联动机构还可以对被夹持物进行晃动保护，可降低晃动的幅度，提高生产安全性。
在一些实施方式中，空中运输车(图中未示出)未抓取被夹持物(如晶圆盒)时，防掉落装置可收缩回车体内侧(这里未进行图示)，占用空间小，不影响空中运输车进行抓取操作。
应当说明的是，上述实施例均可根据需要自由组合。以上所述仅是本申请的优选实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本申请原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也应视为本申请的保护范围。

Claims (10)

  1. 一种防掉落装置，其特征在于，应用于空中运输车，包括：安装板(3)、电机(4)、第一支撑座、第二支撑座、滚珠丝杆(5)、滑块连接座(8)和四边形联动机构，所述四边形联动机构包括由第一连接臂(15)、第二连接臂(16)、第三连接臂(17)和第四连接臂(18)构成的四边形联动结构；
    所述电机(4)、所述第一支撑座和所述第二支撑座安装于所述安装板(3)上，所述滚珠丝杆(5)穿过所述滑块连接座(8)后支承于所述第一支撑座和所述第二支撑座之间，所述四边形联动机构中相对设置的第二连接臂(16)和第四连接臂(18)各自通过对应轴承座(13)安装于所述安装板(3)上，所述滑块连接座(8)的第一端与所述第一连接臂(15)连接，所述电机(4)的输出轴与所述滚珠丝杆(5)的一端连接；
    其中，所述电机(4)驱动所述滚珠丝杆(5)，所述滚珠丝杆(5)带动所述滑块连接座(8)移动，所述滑块连接座(8)带动所述第一连接臂(15)移动，使得所述四边形联动机构伸展或收缩，以用于所述空中运输车搬运目标物时防止所述目标物掉落。
  2. 根据权利要求1所述的防掉落装置，其特征在于，所述防掉落装置还包括滑轨(6)，所述滑轨(6)安装于所述安装板(3)上，所述滑块连接座(8)的第二端与所述滑轨(6)滑动连接，以使所述滑块连接座(8)的第二端限定在所述滑轨(6)上移动。
  3. 根据权利要求1所述的防掉落装置，其特征在于，所述滑块连接座(8)的第一端下方内部设置有凹槽，所述凹槽安装有滚子轴承(9)；
    所述滑块连接座(8)的第一端与所述第一连接臂(15)连接包括：所述滑块连接座(8)的第一端通过所述滚子轴承(9)与所述第一连接臂(15)连接。
  4. 根据权利要求1所述的防掉落装置，其特征在于，所述防掉落装置(10)还包括第一传感器(11)、第二传感器(12)和检测板(10)，所述检测板(10)安装于所述滑块连接座(8)上；
    其中，所述第一传感器(11)和所述检测板(10)配合工作，用于检测 所述四边形联动机构是否伸展到第一预定位置；所述第二传感器(12)和所述检测板(10)配合工作，用于检测所述四边形联动机构是否收缩到第二预定位置。
  5. 根据权利要求4所述的防掉落装置，其特征在于，所述第一传感器(11)安装于所述第一支撑座上，所述第二传感器(12)安装于所述第二支撑座上。
  6. 根据权利要求4所述的防掉落装置，其特征在于，所述第一传感器(11)包括第一光发射组件和第一光接收组件，所述第一光发射组件和所述第一光接收组件相对设置；
    所述第二传感器(12)包括第二光发射组件和第二光接收组件，所述第二光发射组件和所述第二光接收组件相对设置；
    所述检测板(10)为长条状检测板；
    当所述长条状检测板的一端位于所述第一光发射组件和所述第一光接收组件之间时，所述第一传感器(11)输出第一信号，所述第一信号用于表征所述四边形联动机构伸展到第一预定位置；
    所述长条状检测板的另一端位于所述第二光发射组件和所述第二光接收组件之间时，所述第二传感器(12)输出第二信号，所述第二信号用于表征所述四边形联动机构收缩到第二预定位置。
  7. 根据权利要求1所述的防掉落装置，其特征在于，所述防掉落装置还包括第五连接臂(19)、第六连接臂(20)和夹紧块(21)；
    所述第五连接臂(19)的第一端与所述第一连接臂(15)转动连接，所述第五连接臂(19)的第二端与所述第六连接臂(20)转动连接，所述第六连接臂(20)的第一端与对应的所述轴承座(13)转动连接，所述夹紧块(21)与所述第六连接臂(20)的第二端转动连接；
    其中，所述第一连接臂(15)、所述第五连接臂(19)和所述第六连接臂(20)构成三角形联动机构，以跟随所述四边形联动机构同步伸展或收缩，以及当所述三角形联动机构处于伸展状态时，所述夹紧块(21)用于夹持被夹持物。
  8. 根据权利要求7所述的防掉落装置，其特征在于，所述夹紧块(21) 包括预设面状的第一目标面(21b)，所述第一目标面(21b)为用于夹持住被夹持物时与所述被夹持物接触的端面。
  9. 根据权利要求8所述的防掉落装置，其特征在于，所述夹紧块(21)还包括第二目标面(21a)和第三目标面(21c)，所述第二目标面(21a)和所述第三目标面(21c)设置于所述第一目标面(21b)的两侧，以使所述三角形联动机构伸展过程中使用所述第二目标面(21a)或者所述第三目标面(21c)与所述被夹持物先接触，再过渡到使用所述第一目标面(21b)与所述被夹持物接触。
  10. 一种空中运输车，其特征在于，包括如权利要求1-9中任意一项所述的防掉落装置，其中所述防掉落装置设置于所述空中运输车的内侧，以在所述电机(4)的驱动下，所述四边形联动机构伸展于所述空中运输车的下方或收缩于所述空中运输车的内侧。
PCT/CN2022/123435 2021-09-30 2022-09-30 防掉落装置及空中运输车 WO2023051809A1 (zh)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080100852A1 (en) * 2006-10-26 2008-05-01 Tokyo Electron Limited Detecting apparatus and detecting method
CN207752988U (zh) * 2017-09-11 2018-08-21 深圳市旭控科技有限公司 硅片自动上下料装置及硅片自动输送制造设备
CN109292447A (zh) * 2018-09-30 2019-02-01 深圳格兰达智能装备股份有限公司 料盘抓取机械手
US20200223455A1 (en) * 2017-02-06 2020-07-16 Murata Machinery, Ltd. Overhead conveyance vehicle
CN111908114A (zh) * 2020-08-18 2020-11-10 上海大族富创得科技有限公司 一种搬运晶圆盒货架的转运设备
CN213293966U (zh) * 2020-08-18 2021-05-28 上海大族富创得科技有限公司 一种用于转移晶圆盒货架的搬运设备
CN113808981A (zh) * 2021-09-30 2021-12-17 弥费实业(上海)有限公司 防掉落装置及空中运输车

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5169065B2 (ja) * 2007-08-09 2013-03-27 村田機械株式会社 押さえ機構及び搬送装置
JP5668340B2 (ja) * 2010-07-02 2015-02-12 村田機械株式会社 天井搬送車
CN112975910A (zh) * 2021-03-03 2021-06-18 无锡邑文电子科技有限公司 一种去胶机用晶圆传送手臂

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080100852A1 (en) * 2006-10-26 2008-05-01 Tokyo Electron Limited Detecting apparatus and detecting method
US20200223455A1 (en) * 2017-02-06 2020-07-16 Murata Machinery, Ltd. Overhead conveyance vehicle
CN207752988U (zh) * 2017-09-11 2018-08-21 深圳市旭控科技有限公司 硅片自动上下料装置及硅片自动输送制造设备
CN109292447A (zh) * 2018-09-30 2019-02-01 深圳格兰达智能装备股份有限公司 料盘抓取机械手
CN111908114A (zh) * 2020-08-18 2020-11-10 上海大族富创得科技有限公司 一种搬运晶圆盒货架的转运设备
CN213293966U (zh) * 2020-08-18 2021-05-28 上海大族富创得科技有限公司 一种用于转移晶圆盒货架的搬运设备
CN113808981A (zh) * 2021-09-30 2021-12-17 弥费实业(上海)有限公司 防掉落装置及空中运输车

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