WO2023045827A1 - 电学结构、电子烟开关及电子烟 - Google Patents

电学结构、电子烟开关及电子烟 Download PDF

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Publication number
WO2023045827A1
WO2023045827A1 PCT/CN2022/119082 CN2022119082W WO2023045827A1 WO 2023045827 A1 WO2023045827 A1 WO 2023045827A1 CN 2022119082 W CN2022119082 W CN 2022119082W WO 2023045827 A1 WO2023045827 A1 WO 2023045827A1
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WIPO (PCT)
Prior art keywords
electrical structure
back plate
diaphragm
electronic cigarette
hole
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PCT/CN2022/119082
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English (en)
French (fr)
Inventor
王云龙
郑威
郭茂香
陈小康
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通用微(深圳)科技有限公司
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Publication of WO2023045827A1 publication Critical patent/WO2023045827A1/zh

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    • A—HUMAN NECESSITIES
    • A24—TOBACCO; CIGARS; CIGARETTES; SIMULATED SMOKING DEVICES; SMOKERS' REQUISITES
    • A24F—SMOKERS' REQUISITES; MATCH BOXES; SIMULATED SMOKING DEVICES
    • A24F40/00—Electrically operated smoking devices; Component parts thereof; Manufacture thereof; Maintenance or testing thereof; Charging means specially adapted therefor
    • A24F40/40—Constructional details, e.g. connection of cartridges and battery parts
    • A—HUMAN NECESSITIES
    • A24—TOBACCO; CIGARS; CIGARETTES; SIMULATED SMOKING DEVICES; SMOKERS' REQUISITES
    • A24F—SMOKERS' REQUISITES; MATCH BOXES; SIMULATED SMOKING DEVICES
    • A24F40/00—Electrically operated smoking devices; Component parts thereof; Manufacture thereof; Maintenance or testing thereof; Charging means specially adapted therefor
    • A24F40/50—Control or monitoring

Definitions

  • the concept of the present invention relates to the technical field of electronic cigarettes, specifically, the concept of the present invention relates to an electrical structure, an electronic cigarette switch and an electronic cigarette.
  • E-cigarettes are electronic products that mimic cigarettes and have the same look, smoke, taste and feel as cigarettes.
  • electronic cigarettes mainly include a pipe for holding nicotine solution, an atomizer and a battery.
  • the atomizer is powered by batteries and can convert the liquid nicotine in the pipe into a mist, so that the user has a smoking-like feeling when smoking.
  • the concept of the present invention aims at the shortcomings of the existing methods, and proposes an electrical structure, an electronic cigarette switch and an electronic cigarette to solve the technical problems in the prior art that the electronic cigarette is not intelligent enough and the user experience is poor.
  • an electrical structure which includes: a substrate with a back cavity passing through both sides of itself, and one end of the back cavity is used to communicate with the smoking channel of the electronic cigarette; a back plate located on the substrate One side of the back plate, and cover the other end of the back cavity; the back plate has a back pole hole passing through both sides of itself; the diaphragm, located on the side of the back plate away from the substrate, includes the foundation pile part connected in sequence, the first deformation part and the second deformed part; the angle between the first deformed part and the back plate is an acute angle; wherein, the back plate, the first deformed part and the second deformed part form an air gap.
  • the angle between the first deformation portion and the back plate is not less than 10° and not greater than 75°.
  • the minimum distance between the second deformation portion and the back plate is not less than 1.5 microns and not greater than 5 microns.
  • At least one of the first deforming portion and the second deforming portion has a pressure relief hole passing through both sides thereof.
  • the pressure relief hole of the second deformation part is located at the periphery and/or the middle of the second deformation part.
  • the vibrating membrane also includes an anti-adhesive post; one end of the anti-adhesive post is connected to the side of the second deformed portion close to the back plate; the other end of the anti-adhesive post is used to abut against the back plate to prevent the second The deformation part is in contact with the back plate.
  • the anti-stick posts have an axial dimension not less than 0.2 micron and not greater than 1 micron.
  • the anti-adhesive pillars are distributed radially at the center of the second deformed part, distributed around the center of the second deformed part, or distributed in a warp and weft array at the second deformed part.
  • the back plate includes a first insulating layer, a first conductive layer and a second insulating layer stacked; the first insulating layer, the first conductive layer and the second insulating layer respectively have a first air hole, a second The air hole and the third air hole; the first air hole, the second air hole and the third air hole are correspondingly connected in sequence to form the back electrode hole penetrating through both sides of the back electrode plate.
  • the substrate includes a stacked silicon-based layer and an insulating substrate layer; the silicon-based layer and the insulating substrate layer respectively have a first through hole and a second through hole, and the first through hole and the second through hole communicate with each other correspondingly to form a substrate.
  • the back plate is located on the side of the insulating substrate layer away from the silicon base layer.
  • an electronic cigarette switch which includes: the electrical structure provided in the first aspect above.
  • the electronic cigarette switch also includes a circuit board, a control chip and a shield; one side of the circuit board is connected to the other side of the substrate in the electrical structure; the circuit board has an air outlet connected to the back cavity of the substrate; the control The chip is also connected to one side of the circuit board, and is electrically connected to the back plate and the diaphragm in the electrical structure; the shielding cover is closed on one side of the circuit board to form a chamber for containing the control chip and the electrical structure; the shielding The cover has an air inlet communicating with the external environment of the electronic cigarette.
  • an electronic cigarette which includes: the electrical structure provided in the above first aspect; or, the electronic cigarette switch provided in the above second aspect.
  • Beneficial technical effects brought by the technical solution provided by the embodiment of the concept of the present invention include: the electrical structure can send a signal of opening or closing in real time according to the smoking action made by the user, which is conducive to realizing the intelligent operation of the electronic cigarette and effectively improving the user experience.
  • a capacitive structure with variable capacitance can be formed between the back plate and the diaphragm in the electrical structure; the first deformation part and the second deformation part of the back plate and the diaphragm form an air gap, and the air gap Provides a deformable space for the diaphragm; the back cavity of the substrate and the back pole hole of the back plate allow the negative pressure generated by the user to suck the action to act on the diaphragm, the first deformation part of the diaphragm and the second The second deformation part deforms towards the back plate in real time under the action of negative pressure, thereby changing the capacitance value between the diaphragm and the back plate.
  • the capacitance change value at this time can be used as an important basis for the control chip to judge whether the electronic cigarette needs to be turned on .
  • the negative pressure acting on the diaphragm is released, and the first deformation part and the second deformation part of the diaphragm will return to their original positions under the action of their own resilience, reversely changing the diaphragm and the back plate
  • the capacitance value at this time can be used as an important basis for the control chip to judge whether the electronic cigarette needs to be turned off.
  • the first deformed part of the diaphragm forms an acute angle with the back plate, so that the first deformed part can lift the second deformed part away from the back plate, increasing the size of the second deformed part
  • the distance between the diaphragm and the back plate increases the deformable range of the diaphragm, thereby increasing the range of capacitance change, which is conducive to reducing the recognition accuracy requirements of the control chip for the output signal of the electrical structure and reducing the probability of misjudgment.
  • the first deformation part of the diaphragm forms an acute angle with the back plate.
  • the inclined first deformation part is more likely to be deformed, which can improve the sensitivity of the diaphragm;
  • materials with higher strength can be used to improve the rigidity of the diaphragm itself, thereby improving the resilience of the diaphragm after compression and deformation, and reducing the probability of failure; on the other hand, It can reduce the stress on the diaphragm during the deformation process, slow down the stress fatigue of the diaphragm, prevent the structural fracture of the diaphragm, and prolong the service life of the diaphragm.
  • FIG. 1 is a schematic structural view of an electrical structure according to an embodiment of the present invention.
  • FIG. 2 is another structural schematic diagram of an electrical structure according to an embodiment of the present invention.
  • FIG. 3 is another structural schematic diagram of an electrical structure according to an embodiment of the present invention.
  • FIG. 4 is another structural schematic diagram of an electrical structure according to an embodiment of the present invention.
  • FIG. 5 is a structural schematic diagram of anti-sticking columns distributed on the second deformation part in the first manner in the electrical structure according to an embodiment of the present invention
  • FIG. 6 is a structural schematic diagram of anti-adhesive pillars distributed on the second deformation part in a second manner in the electrical structure according to an embodiment of the inventive concept;
  • FIG. 7 is a structural schematic diagram of anti-stick columns distributed on the second deformation part in a third manner in the electrical structure according to an embodiment of the inventive concept
  • FIG. 8 is a schematic structural diagram of a back plate in an electrical structure according to an embodiment of the present invention.
  • FIG. 9 is a schematic structural view of a substrate in an electrical structure according to an embodiment of the present invention.
  • FIG. 10 is a schematic structural diagram of an electrical switch according to an embodiment of the present inventive concept.
  • the inventor of the present invention has conducted research and found that when a user smokes a cigarette, a negative pressure will be applied to the cigarette. If the negative pressure can be used as the opening signal of the electronic cigarette, the intelligent operation of the electronic cigarette can be realized, and the electronic cigarette can also be effectively improved. The similarity to smoking cigarettes effectively improves the user experience.
  • ECM Electrode Capacitance Microphone, electret capacitor microphone
  • the electrical structure, the electronic cigarette switch and the electronic cigarette provided by the concept of the present invention aim to solve the above technical problems in the prior art.
  • the embodiment of the present invention concept provides an electrical structure 100 as shown in the structural schematic diagram of FIG.
  • the base plate 110 has a back cavity 110a passing through both sides thereof, and one end of the back cavity 110a is used to communicate with the smoking channel of the electronic cigarette.
  • the back plate 120 is located on one side of the substrate 110 and covers the other end of the back cavity 110a.
  • the back electrode plate 120 has a back electrode hole 120 a passing through two sides of the back electrode plate 120 .
  • the diaphragm 130 is located on the side of the back plate 120 away from the substrate 110 , and includes a pile portion 131 , a first deformation portion 132 and a second deformation portion 133 connected in sequence.
  • the included angle between the first deformation portion 132 and the back plate 120 is an acute angle.
  • the back plate 120 , the first deformed portion 132 and the second deformed portion 133 surround and form an air gap 100 a.
  • a capacitance structure with variable capacitance can be formed between the back plate 120 and the diaphragm 130 in the electrical structure 100 .
  • the back plate 120 surrounds the first deformation portion 132 and the second deformation portion 133 of the diaphragm 130 to form an air gap 100a, and the air gap 100a provides a deformable space for the diaphragm 130 .
  • the back cavity 110a of the substrate 110 and the back pole hole 120a of the back pole plate 120 enable the negative pressure generated by the user to suck on food to act on the diaphragm 130, the first deformation part 132 and the second deformation part 133 of the diaphragm 130 Under the action of negative pressure, the deformation towards the back plate 120 occurs in real time, thereby changing the capacitance value between the diaphragm 130 and the back plate 120.
  • the capacitance change value at this time can be used as an important factor for the control chip 220 to judge whether the electronic cigarette needs to be turned on. in accordance with.
  • the negative pressure acting on the diaphragm 130 is released, and the first deformation part 132 and the second deformation part 133 of the diaphragm 130 will return to their original positions under the action of their own resilience, reversely changing the vibration.
  • the capacitance value between the film 130 and the back plate 120 and the capacitance change value at this time can be used as an important basis for the control chip 220 to judge whether the electronic cigarette needs to be turned off.
  • the first deformed portion 132 of the diaphragm 130 forms an acute angle with the back plate 120 , so that the first deformed portion 132 can lift the second deformed portion 133 away from the back plate 120 , increase the distance between the second deformation portion 133 and the back plate 120, increase the deformable range of the diaphragm 130, and further increase the range of capacitance change, which is beneficial to reduce the recognition of the output signal of the electrical structure 100 by the control chip 220 accuracy requirements and reduce the probability of misjudgment.
  • an acute angle is formed between the first deformation portion 132 of the diaphragm 130 and the back plate 120 .
  • the inclined first deformation portion 132 is more likely to be deformed, which can improve the sensitivity of the diaphragm 130 .
  • materials with higher strength can be used to improve the rigidity of the diaphragm 130 itself, thereby improving the resilience of the diaphragm 130 after compression and deformation, and reducing the probability of failure.
  • the stress suffered by the diaphragm 130 during the deformation process can be reduced, the stress fatigue of the diaphragm 130 can be slowed down, the structural fracture of the diaphragm 130 can be prevented, and the service life of the diaphragm 130 can be prolonged.
  • the included angle between the first deformation portion 132 and the back plate 120 is not less than 10° and not greater than 75°.
  • the angle between the first deformed part 132 of the vibrating membrane 130 and the back plate 120 is between 10° and 75°.
  • a material with higher strength is used to improve the vibration.
  • the inventors of the present invention consider that the distance between the second deformation portion 133 of the diaphragm 130 and the back plate 120 will affect the performance of capacitance formed between the diaphragm 130 and the back plate 120 .
  • the concept of the present invention provides the following possible implementation for the electrical structure 100:
  • the minimum distance between the second deformation portion 133 and the back plate 120 is not less than 1.5 microns and not more than 5 microns.
  • non-working state refers to the state when the user does not smoke the electronic cigarette and the electrical structure 100 is not subjected to real and effective negative pressure.
  • the minimum distance between the second deformation part 133 and the back plate 120 is between 1.5 and 5 microns, which can provide sufficient deformable space for the diaphragm 130 on the one hand, and ensure The capacity of the capacitor formed between the diaphragm 130 and the back plate 120 .
  • the vibrating membrane 130 may be deformed under a small environmental pressure fluctuation, which may easily lead to false responses.
  • the diaphragm 130 is usually a complete thin-film structure, and the diaphragm 130 that is too sensitive cannot distinguish the effectiveness of the received pressure fluctuations, and the diaphragm 130 will also be excited by slowly changing invalid air pressure fluctuations to generate invalid sensing signals. That is, a false response occurs, resulting in lower perceptual accuracy.
  • the inventive concept provides possible implementations for the electrical structure 100 as described below.
  • the vibrating membrane 130 has pressure relief holes passing through both sides of the vibrating membrane 130 .
  • the pressure relief hole opened on the diaphragm 130 can release slowly changing or low-intensity pressure fluctuations, realize pressure balance in the space on both sides of the diaphragm 130, reduce or even avoid the electrical structure 100 being slowly changed.
  • the pressure fluctuation is excited to generate an invalid sensing signal, thereby improving the recognition accuracy of the electrical structure 100 for the user's puffing action, and improving the noise reduction performance of the electrical structure 100 .
  • the pressure relief hole may be opened in the first deformation portion 132 of the diaphragm 130 , or may be opened in the second deformation portion 133 .
  • the first deformation portion 132 has first pressure relief holes 132a passing through both sides of the first deformation portion 132 .
  • the second deformation part 133 has a second pressure relief hole 133 a passing through both sides of the second deformation part 133 .
  • the second pressure relief hole 133 a is located at the periphery of the second deformation portion 133 . That is, the second pressure relief hole 133 a may be located where the second deformation portion 133 is close to the first deformation portion 132 .
  • the second pressure relief hole 133a is located in the middle of the second deformation portion 133 .
  • the first deformation part 132 has a first pressure relief hole 132a penetrating through its two sides
  • the second deformation part 133 has a second pressure relief hole 133a penetrating through its two sides.
  • At least one of the first pressure relief hole 132a and the second pressure relief hole 133a has a pore size of not less than 2 microns and not more than 10 microns, so that slow-changing or low-intensity pressure fluctuations can be released. , and does not affect the diaphragm 130 to perceive effective pressure fluctuations generated by the user's puffing action.
  • the total number of pressure relief holes is inversely proportional to the diameter of the holes, which is also to control the amplitude of the release pressure fluctuations, so as to ensure that the diaphragm 130 can sense the effective pressure fluctuations generated by the user's puffing action.
  • the electrical structure 100 is usually in a certain smoky environment, and it will inevitably come into contact with dirt such as tar and dust. These dirt will easily reduce the sensitivity of the electrical structure 100, especially the high viscosity of tar, which is likely to cause the vibration of the diaphragm. Adhesion occurs between the 130 and the back plate 120 , so that the vibrating membrane 130 cannot rebound normally after the user's suction negative pressure is released, resulting in the failure of the electrical structure 100 . To this end, the present inventive concept provides a possible implementation for the electrical structure 100 as described below.
  • the diaphragm 130 further includes an anti-sticking post 134 .
  • One end of the anti-stick post 134 is connected to a side of the second deformation portion 133 close to the back plate 120 .
  • the other end of the anti-stick column 134 is used to abut against the back plate 120 to prevent the second deformation portion 133 from contacting the back plate 120 .
  • the anti-adhesion column 134 on the vibrating membrane 130 is a microstructure with a small radial dimension, which can effectively reduce the contact area with the back plate 120 and effectively reduce the probability of adhesion with the back plate 120. Furthermore, it prevents failure due to adhesion between the vibrating membrane 130 and the back plate 120 , which is beneficial to prolonging the service life of the electrical structure 100 .
  • the anti-stick pillar 134 can be integrally formed with the vibrating membrane 130 by using a semiconductor film-forming process. Specifically, a sacrificial layer is prepared on the back plate 120 , and then the surface of the sacrificial layer is etched to form a blind hole adapted to the shape of the target anti-adhesive post 134 . Afterwards, a vibrating film 130 layer of material is deposited on the sacrificial layer to form the vibrating film 130 and the anti-sticking post 134 , and finally the sacrificial layer is removed.
  • a semiconductor film-forming process Specifically, a sacrificial layer is prepared on the back plate 120 , and then the surface of the sacrificial layer is etched to form a blind hole adapted to the shape of the target anti-adhesive post 134 . Afterwards, a vibrating film 130 layer of material is deposited on the sacrificial layer to form the vibrating film 130 and the anti-sticking post 134
  • the anti-adhesive pillars 134 are distributed radially from the center of the second deformation portion 133 .
  • the anti-adhesive columns 134 are distributed around the center of the second deformation portion 133 .
  • the anti-adhesive pillars 134 are distributed in a warp and weft array on the second deformation portion 133 .
  • the projection of the anti-stick pole 134 on the plane where the substrate 110 is located is the same as the back pole on the back pole plate 120.
  • the projections of the holes 120a on the plane of the substrate 110 do not overlap, so as to prevent the anti-adhesion post 134 from being stuck in the back pole hole 120a, which will affect the effect of anti-adhesion.
  • the anti-stick column 134 also has a certain limit function, that is, to limit the minimum distance between the second deformation part 133 of the diaphragm 130 and the back plate 120, and the diaphragm 130
  • the distance from the back plate 120 is related to the capacitance value between the diaphragm 130 and the back plate 120 .
  • the present inventive concept provides a possible implementation for the electrical structure 100 as described below.
  • the axial dimension of the anti-adhesive post 134 is not less than 0.2 micron and not greater than 1 micron.
  • the axial dimension of the anti-sticking column 134 is between 0.2 and 1 micron, which can limit the minimum distance between the second deformation part 133 of the diaphragm 130 and the back plate 120, so as to provide a certain accumulation of tar. space, which is beneficial to prolong the service life of the electrical structure 100, and can also ensure that the capacitance change value between the diaphragm 130 and the back plate 120 has a sufficient variation range, which is beneficial to reduce the recognition of the output signal of the electrical structure 100 by the control chip 220 accuracy requirements and reduce the probability of misjudgment.
  • the back plate 120 needs to cooperate with the diaphragm 130 to generate the acoustic-electric conversion signal.
  • the present inventive concept provides a possible implementation as described below for the back plate 120 of the electrical structure 100 .
  • the back plate 120 includes a first insulating layer 121 , a first conductive layer 122 and a second insulating layer 123 which are stacked.
  • the first insulating layer 121 , the first conductive layer 122 and the second insulating layer 123 respectively have a first air hole 121 a , a second air hole 122 a and a third air hole 123 a.
  • the first air hole 121 a , the second air hole 122 a and the third air hole 123 a are connected in sequence correspondingly to form the back electrode hole 120 a passing through both sides of the back electrode plate 120 .
  • the first conductive layer 122 is included between the first insulating layer 121 and the second insulating layer 123, so that the back electrode plate 120 forms a sandwich structure, which is beneficial to reduce the possible interference of the back electrode plate 120 and improve electrical conductivity. Sensing accuracy of structure 100 .
  • the back pole hole 120a on the back pole plate 120 can facilitate the elimination of the sacrificial layer during the preparation process of the electrical structure 100 , and the air gap 100a between the diaphragm 130 and the back pole plate 120 can be formed after the sacrificial layer is removed.
  • both the first insulating layer 121 and the second insulating layer 123 are made of silicon nitride material (structural material, which has higher stress-bearing performance).
  • the substrate 110 is the basis of the back plate 120 and the diaphragm 130 , and needs to have certain support and insulation properties.
  • the present inventive concept provides a possible implementation for the electrical structure 100 as described below.
  • the substrate 110 of the embodiment of the inventive concept includes a stacked silicon-based layer 111 and an insulating substrate layer 112 .
  • the silicon base layer 111 and the insulating substrate layer 112 have a first through hole 111a and a second through hole 112a respectively, and the first through hole 111a and the second through hole 112a communicate with each other to form a back cavity 110a penetrating through both sides of the substrate 110 .
  • the back plate 120 is located on a side of the insulating substrate layer 112 away from the silicon base layer 111 .
  • the silicon-based layer 111 serves as the main structural layer of the substrate 110 , providing a preparation basis for the preparation process of the entire electrical structure 100 , and also providing support for other film structures of the formed electrical structure 100 .
  • the insulating substrate layer 112 can insulate the silicon base layer 111 from the back plate 120 , reducing the risk of leakage or interference of the back plate 120 .
  • the insulating substrate layer 112 may be made of silicon oxide material.
  • an embodiment of the inventive concept provides an electronic cigarette switch 200, which includes any one of the electrical structures 100 provided in the foregoing embodiments.
  • the electronic cigarette switch 200 adopts the electrical structure 100 provided by the above-mentioned embodiments, its principle and technical effect can be found in the above-mentioned embodiments, and will not be repeated here.
  • the electronic cigarette switch 200 further includes a circuit board 210 , a control chip 220 and a shielding case 230 .
  • the circuit board 210 is connected to the other side of the substrate 110 in the electrical structure 100 .
  • the circuit board 210 has an air outlet 210 a communicating with the back chamber 110 a of the substrate 110 .
  • the control chip 220 is also connected to one side of the circuit board 210 , and is electrically connected to the back plate 120 and the diaphragm 130 in the electrical structure 100 respectively.
  • the shield 230 covers one side of the circuit board 210 to form a chamber for accommodating the control chip 220 and the electrical structure 100 .
  • the shielding cover 230 has an air inlet 230a communicating with the external environment of the electronic cigarette.
  • the circuit board 210 provides an installation site for the control chip 220 and the electrical structure 100 on the one hand, and realizes the electrical connection between the control chip 220 and the electrical structure 100 on the other hand, and provides a connection between the control chip 220 and the electronic cigarette. other components to achieve electrical connection.
  • the control chip 220 can judge whether the electronic cigarette needs to be turned on according to the capacitance change signal triggered by the electrical structure 100 due to the user's smoking action, and then realize the self-adaptive opening of the electronic cigarette; and the control chip 220 can according to the electrical structure 100 because the user stops smoking.
  • the capacitance reverse change signal triggered by the action can judge whether the electronic cigarette needs to be turned off, and then realize the self-adaptive stop of the electronic cigarette.
  • the shielding cover 230 can prevent the control chip 220 or the electrical structure 100 from being impacted by the outside world, that is, provide physical protection to the control chip 220 and the electrical structure 100 in the chamber; signal interference, that is, to provide electrical protection for the control chip 220 and the electrical structure 100 in the chamber.
  • an embodiment of the inventive concept provides an electronic cigarette, which includes: any electrical structure 100 provided in the foregoing embodiments; or, any electronic cigarette provided in the foregoing embodiments Switch 200.
  • a capacitive structure with variable capacitance can be formed between the back plate 120 and the diaphragm 130 in the electrical structure 100 .
  • the back plate 120 surrounds the first deformation portion 132 and the second deformation portion 133 of the diaphragm 130 to form an air gap 100a, and the air gap 100a provides a deformable space for the diaphragm 130 .
  • the back cavity 110a of the substrate 110 and the back pole hole 120a of the back plate 120 enable the negative pressure generated by the user to suck in water to act on the diaphragm 130, the first deformation part 132 and the second deformation part 132 of the diaphragm 130
  • the deformation part 133 deforms towards the back plate 120 in real time under the action of negative pressure, and then changes the capacitance value between the diaphragm 130 and the back plate 120.
  • the capacitance change value at this time can be used as the control chip 220 to judge whether the electronic cigarette needs An important basis for opening.
  • the negative pressure acting on the diaphragm 130 is released, and the first deformation part 132 and the second deformation part 133 of the diaphragm 130 will return to their original positions under the action of their own resilience, reversely changing the vibration.
  • the capacitance value between the film 130 and the back plate 120 and the capacitance change value at this time can be used as an important basis for the control chip 220 to judge whether the electronic cigarette needs to be turned off.
  • the first deformed part 132 of the diaphragm 130 forms an acute angle with the back plate 120, so that the first deformed part 132 can lift the second deformed part 133 away from the back pole plate 120, increase the distance between the second deformation portion 133 and the back plate 120, increase the deformable range of the diaphragm 130, and then increase the range of capacitance change, which is beneficial to reduce the output signal of the control chip 220 to the electrical structure 100 Recognition accuracy requirements, reducing the probability of misjudgment.
  • the first deformation part 132 of the diaphragm 130 forms an acute angle with the back plate 120.
  • the inclined first deformation part 132 is more likely to be deformed, which can Improve the sensitivity of the diaphragm 130;
  • a material with higher strength can be used, which is beneficial to improve the rigidity of the diaphragm 130 itself, thereby improving the response of the diaphragm 130 after deformation under pressure.
  • Elasticity reduces the probability of failure; on the other hand, it can reduce the stress on the diaphragm 130 during the deformation process, slow down the stress fatigue of the diaphragm 130, prevent the structural fracture of the diaphragm 130, and prolong the service life of the diaphragm 130.
  • the angle between the first deformed part 132 of the diaphragm 130 and the back plate 120 is between 10° and 75°.
  • using a material with higher strength is beneficial to improve the vibration of the diaphragm 130 itself. rigidity.
  • the minimum distance between the second deformation part 133 and the back plate 120 is between 1.5 and 5 microns. On the one hand, it can provide sufficient deformable space for the diaphragm 130, and on the other hand, it can ensure that the diaphragm 130 and the The capacity of the capacitor formed between the back plates 120 .
  • the pressure relief hole opened on the diaphragm 130 can release slowly changing or low-intensity pressure fluctuations, realize the pressure balance of the space on both sides of the diaphragm 130, reduce or even prevent the electrical structure 100 from being excited by slowly changing pressure fluctuations. An invalid sensing signal is generated, thereby improving the recognition accuracy of the electrical structure 100 for the user's puffing action, and improving the noise reduction performance of the electrical structure 100 .
  • At least one of the first pressure relief hole 132a and the second pressure relief hole 133a the diameter of which is not less than 3 microns and not greater than 6 microns, so that slow-changing or low-intensity pressure fluctuations can be released without affecting the diaphragm 130 Perceive effective pressure fluctuations generated by the user's puffing action.
  • the anti-adhesion column 134 on the diaphragm 130 belongs to the microstructure, and the radial size is small, which can effectively reduce the contact area with the back plate 120, effectively reduce the probability of adhesion with the back plate 120, and prevent the diaphragm from The adhesion between 130 and the back plate 120 leads to failure, which is beneficial to prolong the service life of the electrical structure 100 .
  • the axial dimension of the anti-stick column 134 is between 0.2 and 1 micron, which can limit the minimum distance between the second deformation part 133 of the diaphragm 130 and the back plate 120, so as to provide a certain space for tar accumulation, which is beneficial to Prolong the service life of the electrical structure 100, and also ensure that the capacitance change value between the diaphragm 130 and the back plate 120 has a sufficient range of change, which is conducive to reducing the recognition accuracy requirements of the control chip 220 for the output signal of the electrical structure 100, reducing probability of misjudgment.
  • first and second are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as “first” and “second” may explicitly or implicitly include one or more of these features. In the description of the inventive concept, unless otherwise specified, "plurality" means two or more.
  • connection should be understood in a broad sense, for example, it can be a fixed connection or a flexible connection. Disassembled connection, or integral connection; it can be directly connected, or indirectly connected through an intermediary, and it can be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the concept of the present invention in specific situations.

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Abstract

一种电学结构（100）、电子烟开关（200）及电子烟。电学结构（100）包括：基板（110），具有贯通自身两侧的背腔（110a），背腔（110a）的一端用于与电子烟的吸烟道连通；背极板（120），位于基板（110）的一侧，并覆盖背腔（110a）的另一端；背极板（120）具有贯通自身两侧的背极孔（120a）；振膜（130），位于背极板（120）的远离基板（110）的一侧，包括依次连接的基桩部（131）、第一变形部（132）和第二变形部（133）；第一变形部（131）与背极板（120）之间的夹角为锐角；其中，背极板（120）、第一变形部（132）和第二变形部（133）围合形成气隙（100a）。

Description

电学结构、电子烟开关及电子烟 技术领域
本发明构思涉及电子烟技术领域，具体而言，本发明构思涉及一种电学结构、电子烟开关及电子烟。
背景技术
电子烟是一种模仿卷烟的电子产品，有着与卷烟一样的外观、烟雾、味道和感觉。
一般电子烟主要包括盛放尼古丁溶液的烟管、雾化器和电池。雾化器由电池供电，能够把烟管内的液态尼古丁转变成雾气，从而让用户在吸食时有一种类似吸烟的感觉。
但是，现有的电子烟通常采用手动开关控制雾化器工作，不够智能、用户体验感差。
发明内容
本发明构思针对现有方式的缺点，提出一种电学结构、电子烟开关及电子烟，用以解决现有技术存在电子烟不够智能、用户体验感差的技术问题。
根据本发明构思第一个方面，提供了一种电学结构，其包括：基板，具有贯通自身两侧的背腔，背腔的一端用于与电子烟的吸烟道连通；背极板，位于基板的一侧，并覆盖背腔的另一端；背极板具有贯通自身两侧的背极孔；振膜，位于背极板的远离基板的一侧，包括依次连接的基桩部、第一变形部和第二变形部；第一变形部与背极板之间的夹角为锐角；其中，背极板、第一变形部和第二变形部围合形成气隙。
在一个实施例中，第一变形部与背极板之间的夹角不小于10°且不大 于75°。
在一个实施例中，在非工作状态下，第二变形部与背极板之间的最小距离不小于1.5微米且不大于5微米。
在一个实施例中，第一变形部和第二变形部中的至少一者具有贯通自身两侧的释压孔。
在一个实施例中，第二变形部的释压孔位于第二变形部的周缘和/或中部。
在一个实施例中，振膜还包括防粘柱；防粘柱的一端与第二变形部靠近背极板的一侧连接；防粘柱的另一端用于抵靠背极板，以阻止第二变形部与背极板相接触。
在一个实施例中，防粘柱的轴向尺寸不小于0.2微米且不大于1微米。
在一个实施例中，防粘柱以第二变形部的中心呈放射状分布、以第二变形部的中心呈环绕分布或在第二变形部呈经纬阵列分布。
在一个实施例中，背极板包括层叠设置的第一绝缘层、第一导电层和第二绝缘层；第一绝缘层、第一导电层和第二绝缘层分别具有第一气孔、第二气孔和第三气孔；第一气孔、第二气孔和第三气孔依次对应连通，形成背极板的贯通自身两侧的背极孔。
在一个实施例中，基板包括层叠的硅基层和绝缘衬底层；硅基层和绝缘衬底层分别具有第一通孔和第二通孔，第一通孔和第二通孔对应连通，形成基板的贯通自身两侧的背腔；背极板位于绝缘衬底层的远离硅基层的一侧。
根据本发明构思的第二个方面，提供了一种电子烟开关，其包括：如上述第一个方面提供的电学结构。
在一个实施例中，电子烟开关还包括电路板，控制芯片和屏蔽罩；电路板的一侧与电学结构中基板的另一侧连接；电路板具有与基板的背腔连通的出气孔；控制芯片也与电路板的一侧连接，并分别与电学结构中的背极板和振膜电连接；屏蔽罩罩合于电路板的一侧，以形成容纳控制芯片和电学结构的腔室；屏蔽罩具有与电子烟的外部环境连通的进气孔。
根据本发明构思的第三个方面，提供了一种电子烟，其包括：如上述第一个方面提供的电学结构；或，如上述第二个方面提供的电子烟开关。
本发明构思实施例提供的技术方案带来的有益技术效果包括：电学结构能够根据用户做出的吸食动作实时发出开启或关闭的信号，利于实现电子烟的智能化运行，有效提高用户体验感。
具体地，电学结构中的背极板与振膜之间能够形成电容值可变的电容结构；背极板与振膜的第一变形部、第二变形部围合形成气隙，该气隙为振膜提供了可变形的空间；基板的背腔、以及背极板的背极孔，使得用户做出吸食动作所产生的负压能够作用到振膜，振膜的第一变形部和第二变形部在负压作用下实时发生向背极板靠近的形变，进而改变振膜与背极板之间的电容值，此时的电容变化值可以作为控制芯片判断电子烟是否需要开启的重要依据。当用户的吸食动作结束后，作用于振膜的负压解除，振膜的第一变形部和第二变形部会在自身的回弹力作用下恢复至初始位置，反向改变振膜与背极板之间的电容值，此时的电容变化值可以作为控制芯片判断电子烟是否需要关闭的重要依据。
相比于平面的振膜结构而言，振膜的第一变形部与背极板之间呈锐角，使得第一变形部可以将第二变形部抬离背极板，增大第二变形部与背极板之间的距离，增大振膜的可变形幅度，进而增大电容变化幅度，这样有利于降低控制芯片对电学结构输出信号的识别精度要求、降低误判概率。
相比于垂直的振膜支撑结构而言，振膜的第一变形部与背极板之间呈锐角，一方面，倾斜的第一变形部更容易发生形变，可提高振膜的灵敏度；另一方面，可以在振膜实现相同灵敏度的前提下，采用强度更高的材料，利于提高振膜本身的刚性，进而提高振膜受压形变后的回弹性，降低失效的概率；再一方面，能够减小振膜在形变过程中所受的应力，减缓振膜的应力疲劳，防止振膜发生结构断裂，延长振膜的使用寿命。
本发明构思附加的方面和优点将在下面的描述中部分给出，这些将从下面的描述中变得明显，或通过本发明构思的实践了解到。
附图说明
本发明构思上述的和/或附加的方面和优点从下面结合附图对实施例的描述中将变得明显和容易理解，其中：
图1为根据本发明构思实施例的电学结构的结构示意图；
图2为根据本发明构思实施例的电学结构的另一结构示意图；
图3为根据本发明构思实施例的电学结构的又一结构示意图；
图4为根据本发明构思实施例的电学结构的另一结构示意图；
图5为根据本发明构思实施例的电学结构中的防粘柱以第一种方式分布在第二变形部上的结构示意图；
图6为根据本发明构思实施例的电学结构中的防粘柱以第二种方式分布在第二变形部上的结构示意图；
图7为根据本发明构思实施例的电学结构中的防粘柱以第三种方式分布在第二变形部上的结构示意图；
图8为根据本发明构思实施例的电学结构中的背极板的结构示意图；
图9为根据本发明构思实施例的电学结构中的基板的结构示意图；
图10为根据本发明构思实施例的电学开关的结构示意图。
具体实施方式
下面详细描述本发明构思，本发明构思的实施例的示例在附图中示出，其中自始至终相同或类似的标号表示相同或类似的部件或具有相同或类似功能的部件。此外，如果已知技术的详细描述对于示出的本发明构思的特征是不必要的，则将其省略。下面通过参考附图描述的实施例是示例性的，仅用于解释本发明构思，而不能解释为对本发明构思的限制。
本技术领域技术人员可以理解，除非另外定义，这里使用的所有术语(包括技术术语和科学术语)，具有与本发明构思所属领域中的普通技术人员的一般理解相同的意义。还应该理解的是，诸如通用字典中定义的那些术语，应该被理解为具有与现有技术的上下文中的意义一致的意义，并且除非像这里一样被特定定义，否则不会用理想化或过于正式的含义来解释。
本技术领域技术人员可以理解，除非特意声明，这里使用的单数形式“一”、“一个”、“所述”和“该”也可包括复数形式。应该进一步理解的是，本发明构思的说明书中使用的措辞“包括”是指存在所述特征、整数、步骤、操作、元件和/或组件，但是并不排除存在或添加一个或多个其他特征、整数、步骤、操作、元件、组件和/或它们的组。应该理解，当我们称元件被“连接”或“耦接”到另一元件时，它可以直接连接或耦接到其他元件，或者也可以存在中间元件。此外，这里使用的“连接”或“耦接”可以包括无线连接或无线耦接。这里使用的措辞“和/或”包括一个或更多个相关联的列出项的全部或任一单元和全部组合。
本发明构思的发明人进行研究发现，用户吸食卷烟时会对卷烟施加负压，若能利用该负压作为电子烟的开启信号，则可以实现电子烟的智能化运行，也能有效提高电子烟与卷烟的吸食相似度，即有效提高用户体验感。
利用ECM(Electret Capacitance Microphone，驻极体电容器麦克风)式开关来感知前述负压，是可行的方式。但是现有的ECM存在电容变化值较低，对负压变化过于敏感，容易误触发，一致性不足，防污能力差，生产、使用成本高，难以有效提高用户体验感。
本发明构思提供的电学结构、电子烟开关及电子烟旨在解决现有技术的如上技术问题。
下面以具体的实施例对本发明构思的技术方案以及本发明构思的技术方案如何解决上述技术问题进行详细说明。
本发明构思实施例提供了如图1的结构示意图所示的电学结构100，该电学结构100包括基板110、背极板120和振膜130。
基板110具有贯通自身两侧的背腔110a，背腔110a的一端用于与电子烟的吸烟道连通。
背极板120位于基板110的一侧，并覆盖背腔110a的另一端。背极板120具有贯通自身两侧的背极孔120a。
振膜130位于背极板120远离基板110的一侧，包括依次连接的基桩部131、第一变形部132和第二变形部133。第一变形部132与背极板120之间的夹角为锐角。
背极板120、第一变形部132和第二变形部133围合形成气隙100a。
在本实施例中，电学结构100中的背极板120与振膜130之间能够形成电容值可变的电容结构。
背极板120与振膜130的第一变形部132、第二变形部133围合形成气隙100a，该气隙100a为振膜130提供了可变形的空间。
基板110的背腔110a以及背极板120的背极孔120a，使得用户做出吸食动作所产生的负压能够作用到振膜130，振膜130的第一变形部132和第二变形部133在负压作用下实时发生向背极板120靠近的形变，进而改变振膜130与背极板120之间的电容值，此时的电容变化值可以作为控制芯片220判断电子烟是否需要开启的重要依据。
当用户的吸食动作结束后，作用于振膜130的负压解除，振膜130的第一变形部132和第二变形部133会在自身的回弹力作用下恢复至初始位置，反向改变振膜130与背极板120之间的电容值，此时的电容变化值可以作为控制芯片220判断电子烟是否需要关闭的重要依据。
相比于平面的振膜130结构而言，振膜130的第一变形部132与背极板120之间呈锐角，使得第一变形部132可以将第二变形部133抬离背极板120，增大第二变形部133与背极板120之间的距离，增大振膜130的可变形幅度，进而增大电容变化幅度，这样有利于降低控制芯片220对电学结构100输出信号的识别精度要求、降低误判概率。
相比于垂直的振膜130支撑结构而言，振膜130的第一变形部132与背极板120之间呈锐角。一方面，倾斜的第一变形部132更容易发生形变，可提高振膜130的灵敏度。另一方面，可以在振膜130实现相同灵敏度的前提下，采用强度更高的材料，利于提高振膜130本身的刚性，进而提高振膜130受压形变后的回弹性，降低失效的概率。再一方面，能够减小振膜130在形变过程中所受的应力，减缓振膜130的应力疲劳，防止振膜130发生结构断裂，延长振膜130的使用寿命。
在一些可能的实施方式中，第一变形部132与背极板120之间的夹角不小于10°且不大于75°。
在本实施例中，振膜130的第一变形部132与背极板120呈10°～75°之间的夹角，能够实现相同灵敏度的前提下，采用强度更高的材料，利于提高振膜130本身的刚性。
本发明构思的发明人考虑到，振膜130的第二变形部133与背极板120之间的距离会对振膜130与背极板120之间形成的电容性能产生影响。为此，本发明构思为电学结构100提供如下一种可能的实现方式：
本发明构思实施例的电学结构100在非工作状态下，第二变形部133与背极板120之间的最小距离不小于1.5微米且不大于5微米。
需要说明的是，非工作状态是指用户未对电子烟做出吸食动作，电学结构100未受到真实有效的负压作用时的状态。
在本实施例中，第二变形部133与背极板120之间的最小距离采用1.5～5微米之间的尺寸，一方面可以为振膜130提供充足的可变形空间，另一方面能够保证振膜130与背极板120之间形成的电容的容量。
在电学结构100具备较高的敏感度的情况下，振膜130可能会在较小的环境压力波动下就发生变形，这容易导致误反应。但是，振膜130通常为完整的薄膜结构，过于敏感的振膜130无法区分所受到的压力波动的有效性，振膜130也会被缓慢变化的无效气压波动所激发，生成无效的感知信号，即发生了误反应，导致感知准确性较低。为此，本发明构思为电学结构100提供如下描述的可能的实现方式。
本发明构思实施例的电学结构100中，振膜130具有贯通自身两侧的释压孔。
在本实施例中，振膜130上开设的释压孔，可以释放缓慢变化或强度较低的压力波动，实现振膜130两侧空间的压力均衡，减少、甚至避免电学结构100被缓慢变化的压力波动激发而生成无效的感知信号，进而提高电学结构100对用户吸食动作的识别精度，提高电学结构100的降噪性能。
具体地，释压孔可以开设于振膜130的第一变形部132，也可以开设于第二变形部133。
在一些可能的实施方式中，如图4所示，第一变形部132具有贯通自 身两侧的第一释压孔132a。
在一些可能的实施方式中，如图2或图3所示，第二变形部133具有贯通自身两侧的第二释压孔133a。
在一个示例中，如图2所示，第二释压孔133a位于第二变形部133的周缘。即，可以第二释压孔133a可以位于第二变形部133靠近第一变形部132的地方。
在另一个示例中，如图3所示，第二释压孔133a位于第二变形部133的中部。
在一些可能的实施方式中，第一变形部132具有贯通自身两侧的第一释压孔132a，并且第二变形部133具有贯通自身两侧的第二释压孔133a。
在一些可能的实施方式中，第一释压孔132a和第二释压孔133a中的至少一种，孔径不小于2微米且不大于10微米，这样可以释放缓慢变化或强度较低的压力波动，并且不影响振膜130感知用户吸食动作产生的有效压力波动。
需要说明的是，释压孔的总数量与孔径成反比，也是为了控制释放压力波动的幅度，以保证振膜130能够感知用户吸食动作产生的有效压力波动。
电学结构100通常处于一定的烟雾环境中，不可避免地会接触到焦油、粉尘等污物，这些污物容易降低电学结构100的灵敏度，尤其是焦油具有较高的粘黏性，容易造成振膜130与背极板120之间发生粘连，以至于振膜130在用户的吸食负压解除后无法正常回弹，导致电学结构100失效。为此，本发明构思为电学结构100提供如下描述的一种可能的实现方式。
如图2-图4所示，本发明构思实施例的电学结构100中，振膜130还包括防粘柱134。
防粘柱134的一端与第二变形部133靠近背极板120的一侧连接。
防粘柱134的另一端用于抵靠背极板120，以阻止第二变形部133与背极板120相接触。
在本实施例中，振膜130上的防粘柱134属于微结构，径向尺寸小，可以有效减少与背极板120之间的接触面积，有效降低与背极板120发生粘连的概率，进而防止振膜130与背极板120之间发生粘连而失效，有利于延长电学结构100的使用寿命。
在一个示例中，防粘柱134可以采用半导体的成膜工艺，与振膜130一体化成型制备。具体地，在背极板120上制备牺牲层，然后对牺牲层表面蚀刻形成与目标防粘柱134的形状相适应的盲孔。之后，在牺牲层上再沉积振膜130层材料形成振膜130及防粘柱134，最后去掉牺牲层。
在一个示例中，如图5所示，防粘柱134以第二变形部133的中心呈放射状分布。
在一个示例中，如图6所示，防粘柱134以第二变形部133的中心呈环绕分布。
在一个示例中，如图7所示，防粘柱134在第二变形部133呈经纬阵列分布。
需要说明的是，当防粘柱134的径向尺寸接近或小于背极板120上背极孔120a的孔径时，防粘柱134在基板110所在平面的投影与背极板120上的背极孔120a在基板110所在平面的投影不重叠，以避免防粘柱134卡入背极孔120a内，影响防粘连的效果。
防粘柱134除了前文详细讲解的防粘连的作用外，还具备一定的限位功能，即，限制振膜130的第二变形部133与背极板120之间的最小距离，而振膜130与背极板120之间的距离与振膜130与背极板120之间的电容值相关联。为此，本发明构思为电学结构100提供如下描述的一种可能的实现方式。
本发明构思实施例的振膜130中，防粘柱134的轴向尺寸不小于0.2微米且不大于1微米。
在本实施例中，防粘柱134的轴向尺寸采用0.2～1微米之间，可以限制振膜130的第二变形部133与背极板120之间的最小距离，以提供一定的焦油累积空间，有利于延长电学结构100的使用寿命，并且也能保证振 膜130与背极板120之间的电容变化值具有足够的变化幅度，有利于降低控制芯片220对电学结构100输出信号的识别精度要求、降低误判概率。
背极板120需要与振膜130配合，以产生声电转化信号。为此，本发明构思为电学结构100的背极板120提供如下描述的一种可能的实现方式。
如图8所示，本发明构思实施例的背极板120包括层叠设置的第一绝缘层121、第一导电层122和第二绝缘层123。
第一绝缘层121、第一导电层122和第二绝缘层123分别具有第一气孔121a、第二气孔122a和第三气孔123a。
第一气孔121a、第二气孔122a和第三气孔123a依次对应连通，形成背极板120的贯通自身两侧的背极孔120a。
在本实施例中，第一绝缘层121和第二绝缘层123之间包括了第一导电层122，使得背极板120形成三明治结构，有利于减少背极板120可能受到的干扰，提高电学结构100的感应精度。
背极板120上的背极孔120a，可以在电学结构100的制备过程中便于消除牺牲层，牺牲层被除去后可形成振膜130与背极板120之间的气隙100a。
在一些可能的实施方式中，第一绝缘层121和第二绝缘层123均采用氮化硅材料(结构材料，承受应力的性能更高)。
在前述各实施例提供的电学结构100中，基板110是背极板120以及振膜130的基础，需要具备一定的支撑性和绝缘性。为此，本发明构思为电学结构100提供如下描述的一种可能的实现方式。
如图9所示，本发明构思实施例的基板110包括层叠的硅基层111和绝缘衬底层112。
硅基层111和绝缘衬底层112分别具有第一通孔111a和第二通孔112a，第一通孔111a和第二通孔112a对应连通，形成基板110的贯通自身两侧的背腔110a。
背极板120位于绝缘衬底层112远离硅基层111的一侧。
在本实施例中，硅基层111作为基板110的主要结构层，为整个电学结构100的制备工艺的提供制备基础，也可以为成型的电学结构100的其他膜层结构提供支撑。
绝缘衬底层112可以使得硅基层111与背极板120之间绝缘，降低背极板120漏电或受干扰的风险。
在一些可能的实施方式中，绝缘衬底层112可以采用氧化硅材料。
基于同一发明构思，本发明构思实施例提供了一种电子烟开关200，该电子烟开关200包括如上述前述实施例提供的任一种电学结构100。
在本实施例中，由于电子烟开关200采用了前述各实施例提供的电学结构100，其原理和技术效果请参阅前述各实施例，在此不再赘述。
在一些可能的实施方式中，如图10所示，电子烟开关200还包括电路板210、控制芯片220和屏蔽罩230。
电路板210的一侧与电学结构100中基板110的另一侧连接。电路板210具有与基板110的背腔110a连通的出气孔210a。
控制芯片220也与电路板210的一侧连接，并分别与电学结构100中的背极板120和振膜130电连接。
屏蔽罩230罩合于电路板210的一侧，以形成容纳控制芯片220和电学结构100的腔室。屏蔽罩230具有与电子烟的外部环境连通的进气孔230a。
在本实施例中，电路板210一方面为控制芯片220以及电学结构100提供了安装场地，另一方面为控制芯片220与电学结构100之间实现了电连接，以及为控制芯片220与电子烟的其他元器件实现电连接。
控制芯片220可以根据电学结构100因用户的吸食动作而触发的电容变化信号，判断电子烟是否需要开启，进而实现电子烟的自适应开启；并且，控制芯片220可以根据电学结构100因用户停止吸食动作而触发的电容反向变化信号，判断电子烟是否需要关闭，进而实现电子烟的自适应停止。
屏蔽罩230，一方面可以避免控制芯片220或电学结构100受到外界 的撞击，即对腔室内的控制芯片220以及电学结构100提供物理保护；另一方面可以避免控制芯片220或电学结构100受到外界的信号干扰，即对腔室内的控制芯片220以及电学结构100提供电学保护。
基于同一发明构思，本发明构思实施例提供了一种电子烟，该电子烟包括：如上述前述实施例提供的任一种电学结构100；或，如上述前述实施例提供的任一种电子烟开关200。
在本实施例中，由于电子烟采用了前述各实施例提供的电学结构100、或前述各实施例提供的电子烟开关200，其原理和技术效果请参阅前述各实施例，在此不再赘述。
应用本发明构思实施例，至少能够实现如下有益效果：
1、电学结构100中的背极板120与振膜130之间能够形成电容值可变的电容结构。背极板120与振膜130的第一变形部132、第二变形部133围合形成气隙100a，该气隙100a为振膜130提供了可变形的空间。
2、基板110的背腔110a、以及背极板120的背极孔120a，使得用户做出吸食动作所产生的负压能够作用到振膜130，振膜130的第一变形部132和第二变形部133在负压作用下实时发生向背极板120靠近的形变，进而改变振膜130与背极板120之间的电容值，此时的电容变化值可以作为控制芯片220判断电子烟是否需要开启的重要依据。当用户的吸食动作结束后，作用于振膜130的负压解除，振膜130的第一变形部132和第二变形部133会在自身的回弹力作用下恢复至初始位置，反向改变振膜130与背极板120之间的电容值，此时的电容变化值可以作为控制芯片220判断电子烟是否需要关闭的重要依据。
3、相比于平面的振膜130结构而言，振膜130的第一变形部132与背极板120之间呈锐角，使得第一变形部132可以将第二变形部133抬离背极板120，增大第二变形部133与背极板120之间的距离，增大振膜130的可变形幅度，进而增大电容变化幅度，这样有利于降低控制芯片220对电学结构100输出信号的识别精度要求、降低误判概率。
4、相比于垂直的振膜130支撑结构而言，振膜130的第一变形部132 与背极板120之间呈锐角，一方面，倾斜的第一变形部132更容易发生形变，可提高振膜130的灵敏度；另一方面，可以在振膜130实现相同灵敏度的前提下，采用强度更高的材料，利于提高振膜130本身的刚性，进而提高振膜130受压形变后的回弹性，降低失效的概率；再一方面，能够减小振膜130在形变过程中所受的应力，减缓振膜130的应力疲劳，防止振膜130发生结构断裂，延长振膜130的使用寿命。
5、振膜130的第一变形部132与背极板120呈10°～75°之间的夹角，能够实现相同灵敏度的前提下，采用强度更高的材料，利于提高振膜130本身的刚性。
6、第二变形部133与背极板120之间的最小距离采用1.5～5微米之间的尺寸，一方面可以为振膜130提供充足的可变形空间，另一方面能够保证振膜130与背极板120之间形成的电容的容量。
7、振膜130上开设的释压孔，可以释放缓慢变化或强度较低的压力波动，实现振膜130两侧空间的压力均衡，减少、甚至避免电学结构100被缓慢变化的压力波动激发而生成无效的感知信号，进而提高电学结构100对用户吸食动作的识别精度，提高电学结构100的降噪性能。
8、第一释压孔132a和第二释压孔133a中的至少一种，孔径不小于3微米且不大于6微米，这样可以释放缓慢变化或强度较低的压力波动，并且不影响振膜130感知用户吸食动作产生的有效压力波动。
9、振膜130上的防粘柱134属于微结构，径向尺寸小，可以有效减少与背极板120之间的接触面积，有效降低与背极板120发生粘连的概率，进而防止振膜130与背极板120之间发生粘连而失效，有利于延长电学结构100的使用寿命。
10、防粘柱134的轴向尺寸采用0.2～1微米之间，可以限制振膜130的第二变形部133与背极板120之间的最小距离，以提供一定的焦油累积空间，有利于延长电学结构100的使用寿命，并且也能保证振膜130与背极板120之间的电容变化值具有足够的变化幅度，有利于降低控制芯片220对电学结构100输出信号的识别精度要求、降低误判概率。
本技术领域技术人员可以理解，本发明构思中的术语“中心”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明构思和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明构思的限制。
术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本发明构思的描述中，除非另有说明，“多个”的含义是两个或两个以上。
在本发明构思的描述中，需要说明的是，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通。对于本领域的普通技术人员而言，可以具体情况理解上述术语在本发明构思中的具体含义。
在本说明书的描述中，具体特征、结构、材料或者特点可以在任何的一个或多个实施例或示例中以合适的方式结合。
以上所述仅是本发明构思的部分实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本发明构思原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也应视为本发明构思的保护范围。

Claims (13)

  1. 一种电学结构，包括：
    基板，具有贯通自身两侧的背腔，所述背腔的一端用于与电子烟的吸烟道连通；
    背极板，位于所述基板的一侧，并覆盖所述背腔的另一端；所述背极板具有贯通自身两侧的背极孔；
    振膜，位于所述背极板的远离所述基板的一侧，包括依次连接的基桩部、第一变形部和第二变形部；所述第一变形部与所述背极板之间的夹角为锐角；
    其中，所述背极板、所述第一变形部和所述第二变形部围合形成气隙。
  2. 根据权利要求1所述的电学结构，其中，所述第一变形部与所述背极板之间的夹角不小于10°且不大于75°。
  3. 根据权利要求1或2所述的电学结构，其中，在非工作状态下，所述第二变形部与所述背极板之间的最小距离不小于1.5微米且不大于5微米。
  4. 根据权利要求1所述的电学结构，其中，所述第一变形部和所述第二变形部中的至少一者具有贯通自身两侧的释压孔。
  5. 根据权利要求4所述的电学结构，其中，所述第二变形部的所述释压孔位于所述第二变形部的周缘和/或中部。
  6. 根据权利要求1所述的电学结构，其中，所述振膜还包括防粘柱；
    所述防粘柱的一端与所述第二变形部的靠近所述背极板的一侧连接；
    所述防粘柱的另一端用于抵靠所述背极板，以阻止所述第二变形部与 所述背极板相接触。
  7. 根据权利要求6所述的电学结构，其中，所述防粘柱的轴向尺寸不小于0.2微米且不大于1微米。
  8. 根据权利要求6或7所述的电学结构，其中，所述防粘柱以所述第二变形部的中心呈放射状分布、以所述第二变形部的中心呈环绕分布或在所述第二变形部呈经纬阵列分布。
  9. 根据权利要求1所述的电学结构，其中，所述背极板包括层叠设置的第一绝缘层、第一导电层和第二绝缘层；
    所述第一绝缘层、所述第一导电层和所述第二绝缘层分别具有第一气孔、第二气孔和第三气孔；
    所述第一气孔、所述第二气孔和所述第三气孔依次对应连通，形成所述背极板的贯通自身两侧的背极孔。
  10. 根据权利要求1所述的电学结构，其中，所述基板包括层叠的硅基层和绝缘衬底层；
    所述硅基层和所述绝缘衬底层分别具有第一通孔和第二通孔，所述第一通孔和所述第二通孔对应连通，形成所述基板的贯通自身两侧的背腔；
    所述背极板位于所述绝缘衬底层的远离所述硅基层的一侧。
  11. 一种电子烟开关，包括如上述权利要求1-10中任一项所述的电学结构。
  12. 根据权利要求11所述的电子烟开关，其中，所述电子烟开关还包括电路板，控制芯片和屏蔽罩；
    所述电路板的一侧与所述电学结构中基板的另一侧连接；所述电路板 具有与所述基板的背腔连通的出气孔；
    所述控制芯片也与所述电路板的一侧连接，并分别与所述电学结构中的背极板和振膜电连接；
    所述屏蔽罩罩合于所述电路板的一侧，以形成容纳所述控制芯片和所述电学结构的腔室；所述屏蔽罩具有与电子烟的外部环境连通的进气孔。
  13. 一种电子烟，包括：如上述权利要求1-10中任一项所述的电学结构；或，如上述权利要求11-12中任一项所述的电子烟开关。
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CN213754953U (zh) * 2020-09-28 2021-07-20 苏州敏芯微电子技术股份有限公司 微机电结构、电子烟开关以及电子烟
CN216019107U (zh) * 2021-09-22 2022-03-15 通用微(深圳)科技有限公司 电学结构、电子烟开关及电子烟

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