WO2023032412A1 - ペロブスカイト型セラミックス成形体及びその製造方法 - Google Patents

ペロブスカイト型セラミックス成形体及びその製造方法 Download PDF

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WO2023032412A1
WO2023032412A1 PCT/JP2022/024122 JP2022024122W WO2023032412A1 WO 2023032412 A1 WO2023032412 A1 WO 2023032412A1 JP 2022024122 W JP2022024122 W JP 2022024122W WO 2023032412 A1 WO2023032412 A1 WO 2023032412A1
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perovskite
compact
type ceramic
precursor
gel
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French (fr)
Japanese (ja)
Inventor
祐貴 山口
寛之 島田
勝裕 野村
ウソク 申
安伸 水谷
裕史 鷲見
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National Institute of Advanced Industrial Science and Technology AIST
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National Institute of Advanced Industrial Science and Technology AIST
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Priority to JP2023545104A priority Critical patent/JP7526531B2/ja
Priority to CN202280058264.5A priority patent/CN117881642B/zh
Priority to EP22864000.9A priority patent/EP4397641A4/en
Priority to US18/684,957 priority patent/US20240425384A1/en
Publication of WO2023032412A1 publication Critical patent/WO2023032412A1/ja
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Definitions

  • the present invention relates to a dense perovskite ceramic compact, a method for producing the same, and a precursor raw material for producing the perovskite ceramic compact used for producing the same.
  • Perovskite-type composite oxides such as barium titanate, barium zirconate, strontium zirconate, and barium calcium titanate zirconate are known as piezoelectric materials, dielectric materials, etc. suitable for electrical equipment, electronic products, and the like. It is said that the members provided in these products are preferably made of high-density sintered bodies in order to fully exhibit their performance.
  • Such a sintered body sintered molded body
  • Non-Patent Document 1 the surfaces of barium zirconate particles are coated with zirconia gel, and then the resulting composite particles are press-molded to form a molded body having a predetermined shape.
  • a method for producing barium zirconate sintered compacts is disclosed by immersion in a saturated aqueous solution of barium hydroxide at 75°C.
  • An object of the present invention is to provide a method for producing a dense perovskite ceramic compact having a relative density of 60% or more. Another object of the present invention is to provide a raw material for a pre-formed article for producing a perovskite-type ceramic formed article, which is suitable for producing such a formed article. Furthermore, another object of the present invention is to provide a perovskite-type ceramic molded body that is dense and suitable for electrolytes of solid oxide fuel cells and the like.
  • the relative density of the perovskite ceramics is the ratio of the actually measured density to the theoretical density (6.117 g/cm 3 for barium zirconate) obtained by X-ray diffraction measurement and Rietveld analysis.
  • the relative density of the oxide hydrogel is the ratio of the actually measured density to the apparent density of the oxide hydrogel particles measured by the Archimedes method (3.869 g/cm 3 for zirconia gel). Further, the measured density (hereinafter also simply referred to as "density”) is the bulk density measured by the sizing method.
  • Non-Patent Document 1 Rather than using the composite particles (barium zirconate particles coated with zirconia gel on the surface of barium zirconate particles) described in Non-Patent Document 1, the present inventors chose only zirconia gel, that is, Ti, Zr and Hf. It has been found that a dense perovskite-type ceramic compact having a high relative density can be obtained by using gel particles containing at least one kind of oxide.
  • a method for producing a compact made of perovskite-type ceramics containing an alkaline earth metal element, at least one element selected from Ti, Zr and Hf, and oxygen A contact reaction step of contacting a precursor compact containing a gel containing at least one oxide selected from Ti, Zr and Hf, and a liquid containing a hydroxide of the alkaline earth metal element.
  • a method for producing a perovskite-type ceramic molded body characterized by: (2) The method for producing a perovskite-type ceramic molded body according to (1) above, wherein the gel is amorphous.
  • crystals (perovskite-type ceramic crystals) made of desired perovskite-type oxides (perovskite-type ceramic crystals) can be obtained without subjecting the contact reaction step to high-temperature conditions of, for example, 1000° C. or higher, that is, without requiring a large amount of thermal energy. ) at a high density (relative density of 60% or more) can be produced efficiently and economically. In a preferred embodiment, the relative density can be 80% or more.
  • the dense perovskite-type ceramic compact can be used as dielectrics for ceramic capacitors, electrolytes for solid oxide fuel cells, electrolytes for gas sensors, electrodes or electrolytes for all-solid-state batteries, photocatalyst electrodes, and the like. It can be used suitably.
  • FIG. 1 is a schematic diagram showing an example of the crystal structure of a perovskite-type ceramic compact of the present invention
  • FIG. FIG. 3 is a schematic diagram showing another example of the crystal structure of the perovskite-type ceramic molded body of the present invention
  • 4 is a graph showing the particle size distribution of raw material particles X1 used in [Example].
  • 4 is a graph showing the particle size distribution of raw material particles X2 used in [Example].
  • 1 is an SEM image of a precursor molded body P1 used in Experimental Example 1.
  • FIG. 1 is an SEM image of a perovskite-type ceramic compact Q1 obtained in Experimental Example 1.
  • FIG. 7 is an enlarged image of FIG.
  • FIG. 6 1 is a high-magnification FE-SEM image of a perovskite-type ceramic compact Q1 obtained in Experimental Example 1.
  • FIG. 9 is an enlarged image of FIG. 8; 1 is a crystal orientation map of a perovskite-type ceramic compact Q1 obtained in Experimental Example 1.
  • FIG. 4 is a graph showing relative densities of perovskite-type ceramic compacts Q1 to Q8 obtained in Experimental Examples 1 to 8.
  • FIG. 10 is an SEM image of a perovskite-type ceramic compact Q8 obtained in Experimental Example 8.
  • FIG. 10 is an SEM image of a precursor molded body P2 used in Experimental Example 9.
  • FIG. 10 is an SEM image of a perovskite-type ceramic molded body R1 obtained in Experimental Example 9.
  • FIG. 9 is an enlarged image of FIG. 8; 1 is a crystal orientation map of a perovskite-type ceramic compact Q1 obtained in Experimental Example 1.
  • FIG. 4 is a graph showing relative densities
  • FIG. 10 is an SEM image of a precursor molded body P10 used in Experimental Example 12.
  • FIG. 10 is an SEM image of a perovskite-type ceramic compact S1 obtained in Experimental Example 12.
  • FIG. 17 is an enlarged image of FIG. 16;
  • 3 is an X-ray diffraction pattern of perovskite-type ceramics obtained in Experimental Example 13.
  • FIG. 10 is an SEM image of a precursor molded body P10 used in Experimental Example 12.
  • FIG. 10 is an SEM image of a perovskite-type ceramic compact S1 obtained in Experimental Example 12.
  • FIG. 17 is an enlarged image of FIG. 16;
  • 3 is an X-ray diffraction pattern of perovskite-type ceramics obtained in Experimental Example 13.
  • the perovskite-type ceramics has the general formula M 1 M 2 O 3 (wherein M 1 is an alkaline earth metal element and M2 is at least one element selected from Ti, Zr and Hf).
  • the alkaline earth metal elements M1 are preferably Ca, Sr and Ba.
  • the method for producing a perovskite-type ceramic molded article of the present invention comprises: a precursor molded article containing solely a gel containing at least one oxide selected from Ti, Zr and Hf; A contact reaction step of contacting a liquid containing an oxide is provided, and if necessary, a post-treatment step (described later) can be provided.
  • the precursor molding used in the contact reaction step is an article containing the above gel alone.
  • Containing a gel alone does not mean “consisting only of a gel” that does not contain other components. is used, such a composite is excluded because it may not result in having a configuration that "includes the gel alone”. Therefore, the preformed article according to the present invention is an article that essentially contains the gel and may contain other components.
  • the precursor compact of a preferred embodiment is a raw material containing a granulated gel (hereinafter referred to as "gel particles” or “gel particles”) (precursor raw material, hereinafter referred to as "precursor raw material”) is press-molded.
  • the gel is preferably amorphous from the viewpoint of formability of a compact densified by perovskite-type ceramic crystals. Moreover, it is usually represented by the general formula M 2 O 2 ⁇ nH 2 O (n is a positive number).
  • the shape of the gel particles is not particularly limited, and may be, for example, spherical (including substantially spherical), ellipsoidal, linear, plate-like, or the like.
  • the shape of the gel particles contained in the precursor raw material and the precursor compact does not need to be uniform in all the particles, and may be one type or two or more types among the above-described shapes.
  • the size of the gel particles is not particularly limited, and the maximum length is preferably 100 ⁇ m, more preferably 1 ⁇ m, because a high-density precursor compact can be obtained. However, the minimum length is preferably 1 nm, more preferably 30 nm.
  • the volume average particle size measured by laser diffraction is preferably 0.01 to 10 ⁇ m, more preferably 0.05 to 1 ⁇ m.
  • the precursor raw material may be composed of gel particles, or may be composed of gel particles and other components.
  • the other component is preferably an inorganic compound that is not denatured by liquids containing hydroxides of alkaline earth metal elements.
  • it can be an oxide, a sulfide, a carbide, a nitride, an alkali-resistant metal, etc., preferably an oxide, more preferably a perovskite-type ceramic, and particularly preferably a perovskite-type ceramic to be produced.
  • Other components may be either crystalline or amorphous.
  • the shape and size of the other components are preferably the above-mentioned shape and size in the gel particles.
  • the lower limit of the content of the gel particles is preferably 30% by mass, more preferably 50% by mass, with the total mass of the precursor raw material being 100% by mass. is.
  • the powder compact is produced by press molding, it is preferably performed at 10°C or higher and lower than 150°C in order to suppress gel denaturation.
  • Press molding can be carried out by appropriately selecting a method that brings about densification according to the shape of the precursor molded body. In the present invention, for example, a method of performing uniaxial molding and cold isostatic pressing (CIP) in this order can be applied.
  • CIP cold isostatic pressing
  • the relative density of the powder compact is preferably 45 to 75%, more preferably 60 to 75%.
  • a liquid containing a hydroxide of an alkaline earth metal element is used.
  • the hydroxide includes calcium hydroxide, strontium hydroxide, barium hydroxide and the like.
  • the hydroxide contained in the liquid may be of only one type, or may be of two or more types. Examples of the medium contained in the liquid include water, alcohol containing water, and the like.
  • the liquid may contain other components such as an organic compound within a range that does not impede the reaction between the gel that constitutes the precursor molding and the hydroxide.
  • the liquid is preferably a saturated aqueous solution of an alkaline earth metal hydroxide.
  • the contact method in the contact reaction step is appropriately selected depending on the shape and size of the precursor compact, and is not particularly limited.
  • Examples of the contact method include a method of immersing the preform in the liquid, a method of spraying the liquid onto the preform, and a method of applying the liquid to the preform.
  • the method of immersing the precursor compact in the above liquid is preferable because a compact containing perovskite-type ceramic crystals at a high density can be efficiently obtained.
  • the reaction between the hydroxide contained in the liquid and the gel is allowed to proceed smoothly without dissolving the precursor compact, that is, without dissolving the gel contained in the precursor compact. In order to proceed to be.
  • the contact time between the liquid and the precursor compact is appropriately selected depending on the shape and size of the precursor compact, but is usually 12 hours or longer, preferably 50 hours or longer.
  • the method for producing a perovskite-type ceramic molded body of the present invention can include a post-treatment step after the contact reaction step, if necessary.
  • the post-treatment process includes a washing process for removing the excess liquid adhering to the perovskite-type ceramic molded body during the contact reaction process, a retouching process for shaping the product into a predetermined shape and size, a heat treatment process, and the like. is mentioned.
  • a method of spraying water, an acetic acid aqueous solution, etc. onto the liquid-attached perovskite-type ceramic molded body, or immersing the perovskite-type ceramic molded body in water, an acetic acid aqueous solution, etc., and then drying is applied. can do.
  • a method of spraying water, an acetic acid aqueous solution, etc. onto the liquid-attached perovskite-type ceramic molded body, or immersing the perovskite-type ceramic molded body in water, an acetic acid aqueous solution, etc., and then drying is applied. can do.
  • drying the perovskite-type ceramic molded body it can be dried at a temperature of preferably 20 to 200° C., more preferably 70 to 150° C. under normal pressure conditions or reduced pressure conditions.
  • the heat treatment step can be a step of heating at, for example, 500° C. to 1500° C. in an air atmosphere in order to grow particles inside the perovskite ceramic compact.
  • the perovskite-type ceramic molded body obtained by the method for producing the perovskite-type ceramic molded body of the present invention is made of barium titanate, barium zirconate, strontium zirconate, barium calcium titanate zirconate, strontium titanate, strontium hafnate, and the like. It is a dense compact containing high-density perovskite-type oxide crystals and containing no by-product carbonates of alkaline earth metals. As described above, a precursor raw material composed of gel particles or a precursor raw material composed of gel particles and other components can be used. In either case, the resulting compact is dense. .
  • the relative density, which is the ratio of the measured density to the theoretical density, of the molded article obtained by the method for producing a perovskite-type ceramic molded article of the present invention is preferably 60% or more, more preferably 70% or more, and particularly preferably It can be 80% or more.
  • FIG. 1 is a schematic diagram showing the crystal structure of a perovskite-type ceramic molded body obtained using a precursor precursor material consisting of gel particles.
  • FIG. 2 shows a precursor composed of gel particles and other components.
  • FIG. 2 is a schematic diagram showing the crystal structure of a perovskite-type ceramic molded body obtained using a precursor molded body as a raw material.
  • a plurality of crystals contained in one domain can be oriented in the same direction, as schematically indicated by arrows in FIGS.
  • the crystal size is preferably 1-200 nm, more preferably 10-100 nm.
  • the perovskite-type ceramic compact of the present invention has a crystal structure including a portion in which a plurality of domains 2 are connected, as shown in FIGS. 1 and 2. can do. Electrons generated by irradiating the compact with an electron beam are inelastically scattered, diffracted on the crystal lattice plane, and emitted as reflected electrons having a diffraction pattern called an EBSD pattern. By doing so, the crystal orientation can be obtained. By scanning the electron beam and mapping the EBSD pattern to obtain, for example, an inverse pole figure crystal orientation map, the orientations of crystals 1 and domains 2 consisting of their aggregates can be identified. It is believed that the perovskite-type ceramic compact of the present invention having such a structure reduces variation in ion conduction and polarization direction, and improves various functions described later.
  • the perovskite-type ceramic molded body of the present invention is obtained by the above-described production method of the present invention, which does not require a step of raising the temperature to 1500° C. or higher during production by general sintering, that is, does not require a large amount of thermal energy. Furthermore, since it is possible to form a compact having a high relative density, it is suitable as a constituent material for dielectric elements, ion-conducting elements, electrically-conducting elements, piezoelectric elements, ferroelectric elements, ferromagnetic elements, photocatalysts, and the like.
  • the solidified gel was evaluated by X-ray diffraction measurement, it was found to be amorphous because no diffraction peaks derived from crystals were observed.
  • the solidified gel was then pre-ground using a pestle and mortar. Then, the pre-pulverized material and ethanol were mixed at a mass ratio of 10:90, and zirconia balls (5 mm in diameter) having the same volume as the mixed liquid and the mixed liquid were enclosed in a polyethylene container. After that, the container was rotated at 150 rpm for 10 hours to pulverize the solidified gel and recover a mixed liquid containing pulverized material (precursor raw material, hereinafter referred to as "raw material particles X1").
  • a zirconia ball (diameter 0.5 mm) having the same volume as the mixed liquid and the mixed liquid were enclosed in a zirconia pot. Then, using a planetary ball mill, pulverization was performed at 450 rpm for 3 hours, and a mixed liquid containing pulverized particles was recovered. After that, a zirconia ball (0.1 mm in diameter) having the same volume as the mixed liquid and the mixed liquid were enclosed in a zirconia pot. Then, using a planetary ball mill, it was pulverized at 450 rpm for 3 hours to obtain a mixed liquid containing pulverized particles (precursor raw material, hereinafter referred to as "raw material particles X2").
  • Ethanol is removed from each liquid mixture containing the raw material particles X1 and X2, and these particles are washed, collected, dried at 150° C., and measured with a laser diffraction/scattering particle size distribution measuring device “LA-960V2” manufactured by HORIBA, Ltd. ” (model name) was used to measure the particle size distribution (see FIGS. 3 and 4).
  • the average particle diameter d50 was 2.182 ⁇ m for the raw material particles X1 and 0.083 ⁇ m for the raw material particles X2.
  • Raw material particles Y1 Yuki Yamaguchi, J. Ceram. The powder obtained by pulverization and zirconium oxychloride manufactured by Fujifilm Wako Pure Chemical Industries, Ltd. are put in ion-exchanged water and stirred to prepare an aqueous solution containing barium zirconate particles, and then ammonia water is added to this aqueous solution.
  • the oxide hydrogel-coated composite particles composed of ZrO 2 ⁇ nH 2 O obtained by dropping and reacting at room temperature were used as raw material particles Y1.
  • the average particle size d50 was 6.921 ⁇ m.
  • Experimental example 1 0.5 g of raw material particles X2 (hydrous oxide gel particles) are subjected to uniaxial pressure molding (20 kN) and cold isostatic press molding (300 MPa) to obtain a precursor compact (hereinafter referred to as "precursor compact P1" ).
  • This precursor molded body P1 had a density of 2.717 g/cm 3 and a relative density of 71.38%.
  • the precursor molded body P1 is placed in a container so as to be immersed in 20 g of a saturated aqueous solution of barium hydroxide octahydrate, and allowed to stand at 100° C. for 100 hours under sealed conditions. After washing with an aqueous solution and drying at 150° C.
  • molded body Q1 a perovskite-type ceramic molded body composed of dense barium zirconate crystals was obtained.
  • the compact Q1 had a density of 5.138 g/cm 3 and a relative density of 84.00% (see Table 1).
  • FIG. 5 When the fracture surface of the precursor molded body P1 was observed with a scanning electron microscope, the image in FIG. 5 was obtained. According to FIG. 5, it can be seen that the inside of the precursor P1 is densely aggregated with fine particles and has a smooth structure. Further, when the fracture surface of the obtained compact Q1 was observed with a scanning electron microscope, the images shown in FIGS. 6 and 7 were obtained. It can be seen from FIG. 6 that there are no coarse particles or pores. FIG. 7 is an enlarged image of FIG. 6. According to FIG. 7, it can be seen that a dense molded body composed of fine crystals was obtained.
  • FIG. 9 which is an enlarged view of FIG. 8, it can be seen that crystal grains with a size of 10 to 100 nm aggregate to form domains with a size of 0.5 to 10 ⁇ m. Also, it can be seen that adjacent domains are connected to each other and have a tertiary hierarchical structure.
  • the fracture surface of the compact Q1 was polished to prepare a sample for EBSD measurement, and the structure was observed using a thermal field emission scanning electron microscope "JSM-6500F" (model name) manufactured by JEOL Ltd.
  • FIG. 10 Zircon A crystal orientation mapping measurement of barium oxide was performed, and FIG. 10 was obtained.
  • crystal grains with a size of 10-100 nm observed in FIGS. 8 and 9 are agglomerated, and the crystal enclosures within the formed domains with a size of 0.5-10 ⁇ m all point in the same direction. Therefore, it can be seen that crystal grains with a size of 10 to 100 nm in the domain are oriented and aggregated.
  • Experimental examples 2-4 Same as Experimental Example 1 except that the reaction time (immersion time of the preform P1 in the saturated aqueous solution of barium hydroxide octahydrate) was changed to 12 hours, 50 hours and 200 hours, respectively, instead of 100 hours. were carried out to obtain perovskite-type ceramic compacts (hereinafter referred to as “compacts Q2 to Q4”). Then, the relative densities of these compacts Q2 to Q4 were calculated (see Table 1).
  • Experimental examples 5-8 The same operation as in Experimental Example 1 was performed except that the reaction temperature was changed from 100° C. to 150° C. and the reaction times were changed to 12 hours, 70 hours, 100 hours and 200 hours, respectively.
  • formed bodies Q5 to Q8 were obtained.
  • the relative densities of these compacts Q5 to Q8 were calculated (see Table 1 and FIG. 11).
  • FIG. 12 When the surface of the obtained compact Q8 was observed with an electron microscope, the image shown in FIG. 12 was obtained. According to FIG. 12, it can be seen that the compact is a dense compact made of fine crystals.
  • a precursor molded body (hereinafter referred to as "precursor molded body P2") was produced in the same manner as in Experimental Example 1 except that raw material particles X1 (oxide hydrous gel particles) were used instead of raw material particles X2, Then, in the same manner as in Experimental Example 1, immersion in a saturated aqueous solution of barium hydroxide octahydrate followed by washing and drying resulted in a perovskite-type ceramic compact (hereinafter referred to as " A compact R1”) was obtained.
  • the precursor P2 had a density of 2.646 g/cm 3 and a relative density of 69.50%.
  • the density of the obtained compact R1 was 4.285 g/cm 3 and the relative density was 70.05%.
  • FIG. 13 When the fracture surface of the precursor molded body P2 was observed with an electron microscope, the image in FIG. 13 was obtained. As can be seen from FIG. 13, large particles and fine particles are mixed inside the precursor P2, and these particles are closely aggregated to have a smooth structure. Further, when the fracture surface of the obtained molding R1 was observed with an electron microscope, the image of FIG. 14 was obtained. According to FIG. 14, it can be seen that the molded body is a dense compact made of fine crystals.
  • experimental example 10 52.6% by mass of raw material particles X1 and 47.4% by mass of barium zirconate particles (powder particles obtained by pulverizing compact R1 and performing heat treatment at 1300 ° C. for 10 hours in an air atmosphere, average A precursor molded body (hereinafter referred to as "precursor molded body P3") was produced by performing the same operation as in Experimental Example 1, except that a mixture having a particle diameter d 50 of 0.969 ⁇ m was used, and then in the same manner.
  • molded body R2 a perovskite-type ceramic molded body composed of dense barium zirconate crystals.
  • the relative density of the precursor molded body P3 was 61.25%.
  • the relative density of the obtained compact R2 was 73.80%.
  • Experimental example 11 82.0% by mass of raw material particles X1 and 18.0% by mass of barium zirconate particles (powder particles obtained by pulverizing compact R1 and performing heat treatment at 1300 ° C. for 10 hours in an air atmosphere, average A precursor molded article (hereinafter referred to as "precursor molded article P4") was produced in the same manner as in Experimental Example 1, except that a mixture with a particle diameter d 50 of 0.969 ⁇ m was used, and then in the same manner.
  • molded body R3 a perovskite-type ceramic molded body composed of dense barium zirconate crystals.
  • the relative density of the precursor molded body P4 was 61.39%.
  • the density of the obtained compact R3 was 4.569 g/cm 3 and the relative density was 74.69%.
  • Experimental example 12 (comparative example) A precursor molded body (hereinafter referred to as "precursor molded body P10") was produced in the same manner as in Experimental Example 1 except that raw material particles Y1 (composite particles) were used instead of raw material particles X2.
  • raw material particles Y1 composite particles
  • molded body S1 perovskite-type ceramic molded body
  • the precursor P10 had a density of 2.579 g/cm 3 and a relative density of 53.26%.
  • the density of the obtained compact S1 was 3.291 g/cm 3 and the relative density was 53.80%.
  • FIG. 15 When the fractured surface of the precursor P10 was observed with an electron microscope, the image in FIG. 15 was obtained. As can be seen from FIG. 15, it is composed of a rough structure. Further, when the surface of the obtained compact S1 was observed with an electron microscope, the images shown in FIGS. 16 and 17 were obtained. As can be seen from FIG. 16, it was not obtained as a dense material, but had a fragile structure. FIG. 17 is an enlarged image of FIG. 16. According to FIG. 17, it can be seen that a molded article having many pores was obtained.
  • Experimental example 13 represented by the general formula M 2 O 2 ⁇ nH 2 O (wherein M 2 is at least one element selected from Ti and Hf, and n is a positive number), specifically TiO
  • M 2 is at least one element selected from Ti and Hf, and n is a positive number
  • FIG. 18 shows X-ray diffraction patterns of various perovskite-type ceramic compacts obtained. As can be seen from FIG. 18, strontium titanate, barium titanate, strontium hafnate, and barium hafnate were obtained as well as barium zirconate.
  • the perovskite-type ceramic molded body of the present invention is dense, it can be used as dielectrics for ceramic capacitors, electrolytes for solid oxide fuel cells, electrolytes for gas sensors, electrodes or electrolytes for all-solid-state batteries, photocatalyst electrodes, and the like. can do.

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