WO2022267473A1 - Alimentation électrique ca à densité à énergie élevée, à longue durée de vie et à impulsion haute-fréquence - Google Patents

Alimentation électrique ca à densité à énergie élevée, à longue durée de vie et à impulsion haute-fréquence Download PDF

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WO2022267473A1
WO2022267473A1 PCT/CN2022/074169 CN2022074169W WO2022267473A1 WO 2022267473 A1 WO2022267473 A1 WO 2022267473A1 CN 2022074169 W CN2022074169 W CN 2022074169W WO 2022267473 A1 WO2022267473 A1 WO 2022267473A1
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unit
life
power
power supply
bus voltage
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PCT/CN2022/074169
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English (en)
Chinese (zh)
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常华梅
时贞平
金珊珊
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江苏容正医药科技有限公司
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Priority to DE112022003244.8T priority Critical patent/DE112022003244T5/de
Publication of WO2022267473A1 publication Critical patent/WO2022267473A1/fr

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/32—Means for protecting converters other than automatic disconnection
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M5/00—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases
    • H02M5/40—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc
    • H02M5/42—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters
    • H02M5/44—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac
    • H02M5/453—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M5/458—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/165—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values
    • G01R19/16533—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values characterised by the application
    • G01R19/16538—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values characterised by the application in AC or DC supplies
    • G01R19/16547—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values characterised by the application in AC or DC supplies voltage or current in AC supplies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/40—Testing power supplies
    • G01R31/42—AC power supplies
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/02—Conversion of ac power input into dc power output without possibility of reversal
    • H02M7/04—Conversion of ac power input into dc power output without possibility of reversal by static converters
    • H02M7/06—Conversion of ac power input into dc power output without possibility of reversal by static converters using discharge tubes without control electrode or semiconductor devices without control electrode
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/02—Conversion of ac power input into dc power output without possibility of reversal
    • H02M7/04—Conversion of ac power input into dc power output without possibility of reversal by static converters
    • H02M7/12—Conversion of ac power input into dc power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/21—Conversion of ac power input into dc power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/217—Conversion of ac power input into dc power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
    • H02M7/219—Conversion of ac power input into dc power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only in a bridge configuration
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
    • H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
    • H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • H02M7/5387—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
    • H02M7/53871—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration with automatic control of output voltage or current
    • H02M7/53873—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration with automatic control of output voltage or current with digital control

Definitions

  • the invention relates to the technical field of power supplies, in particular to a high-power-density-long-life high-frequency pulse AC power supply.
  • High-frequency pulsed AC power supply is a type of power supply widely used in low-temperature plasma sources. It mainly outputs pulsed energy to drive different types of low-temperature plasma electrodes to generate plasma active particles, thereby ensuring the safety, stability and reliability of low-temperature plasma source devices. applied in different fields.
  • the integration and miniaturization of the current low-temperature plasma source device is the inevitable trend of its application development, and most of the volume and weight of the plasma source device are concentrated in the drive and excitation power supply unit, so how to optimize the drive and excitation power supply, especially the application
  • the most widely used high-frequency pulsed AC power supply, realizing high power density and long life of high-frequency pulsed AC power supply is the key core issue for realizing the integration and miniaturization of plasma source devices.
  • the electrolytic capacitor is one of the capacitors. Its metal foil is the positive electrode (usually aluminum or ⁇ ). At present, it is more commonly used or on the market. It is an aluminum electrolytic capacitor. Composed of conductive materials, electrolytes and other materials. Electrolytic capacitor is an important component of high-frequency AC power supply. It is also the link with the largest volume and the weakest life in the power supply. Its operating status directly affects the safety and reliability of high-frequency AC power supply.
  • the electrolytic capacitor When the high-frequency AC power supply is in use, the electrolytic capacitor withstands high-frequency voltage for a long time, and the life loss is very fast. Therefore, in order to observe the service life of the power supply in time, it is necessary to monitor the use of the electrolytic capacitor.
  • the methods for monitoring the running state of electrolytic capacitors are mainly divided into two categories: offline monitoring and online monitoring.
  • the equivalent series resistance value and the capacitance value of the electrolytic capacitor are usually monitored. It is usually used to observe the voltage value of the electrolytic capacitor in the discharge state, and estimate the equivalent series resistance value and capacitance value through the voltage value, and compare it with the set value, and finally judge whether the life span is reached; or through the power of the electrolytic capacitor Output, ambient temperature, experiment time and other related parameters, measure the capacitance change value to calculate the capacitor life.
  • the current method of monitoring the life status of electrolytic capacitors is mainly to calculate the C and ESR values of electrolytic capacitors through input current, output voltage ripple and power output. This is also the current mainstream method for monitoring the life status of electrolytic capacitors.
  • the output voltage ripple is measured through a multi-level voltage circuit to calculate the value of C and ESR, and the circuit design is very complicated; there are also patents CN106126876A and patent CN106126876B, researchers use double Fourier series To solve the electrolytic capacitor current ripple at different frequencies is very complicated and not generalizable.
  • the design is complicated, the cost is high, the power supply is bulky, and the power density is low.
  • the rated working condition of the electrolytic capacitor inside the high-frequency and high-voltage pulsed AC power supply used in the field of low-temperature plasma discharge is in the form of outputting high pulse current power, and the life loss of the electrolytic capacitor is faster, which in turn makes the life loss of the high-frequency pulsed AC power faster.
  • the purpose of the present invention is to provide a high power density-long life high-frequency pulsed AC power supply to achieve high power density and long life of the high-frequency pulsed AC power supply.
  • the present invention provides the following scheme:
  • a high-power-density-long-life high-frequency pulse AC power supply includes: a high-frequency pulse AC power supply body, a replaceable plug-in base, a power distribution switch, and a life detection unit;
  • the electrolytic capacitor array unit in the high-frequency pulse AC power supply body is arranged in a replaceable plug-in base;
  • the power distribution switch is arranged between the electrolytic capacitor array unit and the inverter circuit unit in the high-frequency pulse AC power supply body, Both the output end and the control end of the power distribution switch are connected to the life detection unit;
  • the life detection unit is used to detect the DC bus voltage output by the power distribution switch, and compare the DC bus voltage with the lower limit threshold of life, and when the DC bus voltage is less than the lower limit threshold of life, output a switch off command;
  • the power distribution switch is used to turn off the switch according to the switch off command.
  • the life detection unit includes: a DC bus voltage detection unit and a hysteresis comparison action unit;
  • the input end of the DC bus voltage detection unit is connected to the output end of the power distribution switch, and the output end of the DC bus voltage detection unit is connected to the input end of the hysteresis comparison action unit;
  • the DC bus voltage detection unit is used to detect Distributing the DC bus voltage output by the power switch, and transmitting the DC bus voltage to the hysteresis comparison action unit;
  • the output end of the hysteresis comparison action unit is connected to the control end of the power distribution switch, and the hysteresis comparison action unit is used to compare the DC bus voltage with the lower limit threshold of life, when the DC bus voltage is less than the lower limit of life When the threshold is reached, the output switch turns off the command;
  • the life detection unit is also used to compare the DC bus voltage with the upper limit threshold of the hysteresis loop width, and when the DC bus voltage is greater than the upper limit threshold of the hysteresis loop width, output a switch opening instruction, and control the configuration according to the switch opening instruction. Electric switch is on.
  • the life detection unit further includes: a capacitance aging replacement indication unit;
  • the control terminal of the capacitor aging replacement indicator unit is connected to the output terminal of the hysteresis comparison action unit, and the hysteresis comparison action unit is used to control the capacitor aging replacement indicator unit to light up according to the switch off instruction.
  • the invention discloses the following technical effects:
  • the present invention provides a high-power-density-long-life high-frequency pulsed AC power supply.
  • the electrolytic capacitor array unit is designed as a pluggable and replaceable modular unit, and there is no need to expand the electrolytic power supply twice in order to ensure a certain working life of the high-voltage pulsed power supply.
  • the capacity margin of the capacitor array unit reduces the configuration margin of the electrolytic capacitor array unit and improves the power density of the drive power supply; and the DC bus voltage output by the power distribution switch is detected by the life detection unit, and the DC bus voltage and the lower limit of the life Thresholds are compared, when the DC bus voltage is less than the lower limit threshold of life, the power distribution switch is controlled to be turned off, and the user is reminded to replace the electrolytic capacitor array unit, thereby prolonging the service life of the entire power supply.
  • Fig. 1 is a structural diagram of a high power density-long life high-frequency pulse AC power supply provided by the present invention
  • Fig. 2 is the basic circuit diagram of a kind of high power density-long life high-frequency pulse AC power supply provided by the present invention
  • Fig. 3 is the waveform diagram in the high-frequency pulse AC power supply when the capacitive load provided by the present invention is 50pF;
  • Fig. 3 (a) is the PWM drive signal waveform diagram,
  • Fig. 3 (b) is the output pulse voltage waveform diagram,
  • Fig. 3 (c ) is the output pulse current waveform diagram, and
  • Fig. 3(d) is the current waveform diagram of the primary side of the high-voltage transformer;
  • Fig. 4 is the overall trend waveform in the high-frequency pulse AC power supply when the capacitive load provided by the present invention is 50pF;
  • Fig. 4 (a) is the voltage waveform trend diagram of the DC bus side filter electrolytic capacitor, and
  • Fig. 4 (b) is the DC bus The current waveform trend diagram of the side filter electrolytic capacitor,
  • Fig. 4 (c) is the pulse current waveform trend diagram output by the high-frequency pulse AC power supply;
  • Fig. 5 is the oscillogram after the steady state amplification in the high-frequency pulse AC power supply when the capacitive load provided by the present invention is 50pF;
  • Fig. 5 (a) is the voltage waveform diagram after the amplified steady state of the DC bus side filter electrolytic capacitor, and
  • Fig. 5 ( b) is the amplified current waveform diagram of the filter electrolytic capacitor on the DC bus side, and
  • Fig. 5 (c) is the amplified pulse current waveform diagram of the high-frequency pulsed AC power output in a steady state;
  • Fig. 6 is the simulation waveform diagram of the aging heat consumption problem of the DC bus filter electrolytic capacitor array unit provided by the present invention
  • Fig. 6 (a) is the simulation waveform diagram of the DC bus voltage
  • Fig. 6 (b) is the power loss curve diagram of the capacitor array ESR
  • Figure 6(c) is a simulation waveform diagram of the capacitor array current
  • Fig. 7 is a steady-state detailed waveform diagram of the DC bus filter electrolytic capacitor array unit aging heat consumption problem provided by the present invention
  • Fig. 7 (a) is a detailed waveform diagram of the DC bus voltage steady state
  • Fig. 7 (b) is a parasitic resistance ESR of 1
  • Figure 7(c) is the power loss curve of the capacitor array ESR when the parasitic resistance ESR is 10 milliohms
  • Figure 7(d) is the capacitance when the parasitic resistance ESR is 100 milliohms
  • Fig. 7 (e) is the detailed waveform diagram of the current steady state of the capacitor array;
  • Fig. 8 is a parallel structure diagram of a traditional DC bus filter capacitor array
  • Figure 9 is the overall trend waveform of the heat consumption simulation of the traditional capacitor array parallel scheme
  • Figure 9(a) is the overall trend waveform of the DC bus voltage heat consumption simulation
  • Figure 9(b) is the overall simulation of the power loss and heat consumption of the capacitor array ESR
  • the trend graph Fig. 9 (c) is the overall trend waveform of the capacitor array current heat consumption simulation
  • Figure 10 is the steady-state detailed waveform diagram of the thermal consumption simulation of the traditional capacitor array parallel scheme;
  • Figure 10(a) is the steady-state detailed waveform diagram of the DC bus voltage heat consumption simulation;
  • Figure 10(b) is the capacitor array ESR of the 1path capacitor branch
  • Figure 10(c) is the steady-state detail curve of the power loss and heat consumption simulation of the capacitor array ESR of the 2path capacitor branch
  • Figure 10(d) is the capacitance of the 3path capacitor branch
  • Fig. 10 (e) is the steady-state detailed waveform diagram of the capacitor array current heat consumption simulation;
  • Fig. 11 is the time-varying analog circuit diagram of aging resistance of DC bus filter electrolytic capacitor provided by the present invention.
  • Fig. 12 is the variable resistor model PWR model diagram provided by the present invention.
  • Fig. 13 is a bus voltage waveform diagram in the saber simulation environment provided by the present invention.
  • the purpose of the present invention is to provide a high power density-long life high-frequency pulsed AC power supply to achieve high power density and long life of the high-frequency pulsed AC power supply.
  • a high-power-density-long-life high-frequency pulsed AC power supply as shown in Figure 1, the power supply includes: a high-frequency pulsed AC power supply body, a replaceable plug-in base, a power distribution switch and a life detection unit.
  • the electrolytic capacitor array unit in the high-frequency pulse AC power supply body is arranged in a replaceable plug-in base.
  • the power distribution switch is arranged between the electrolytic capacitor array unit and the inverter circuit unit in the high-frequency pulse AC power supply body, and the output terminal and the control terminal of the power distribution switch are connected to the life detection unit.
  • the life detection unit is used to detect the DC bus voltage output by the power distribution switch, and compare the DC bus voltage with the lower life threshold. When the DC bus voltage is less than the lower life threshold, output the switch off command.
  • the power distribution switch is used to turn off the switch according to the switch off command.
  • the electrolytic capacitor array unit and the replaceable plug-in base form a replaceable plug-in electrolytic capacitor array unit.
  • This unit filters the pulsating DC voltage after the rectification of the previous stage into a stable DC bus voltage.
  • the peak value should be as small as possible, and generally the capacitor lineup value of the unit is relatively large.
  • the second function of the unit is to provide instantaneous pulse current, that is, pulse power, for the subsequent high-frequency pulse voltage. Due to the limitation of large capacitance and volume, the unit is composed of large-capacity electrolytic capacitors.
  • the life detection unit includes: a DC bus voltage detection unit and a hysteresis comparison action unit.
  • the input end of the DC bus voltage detection unit is connected to the output end of the power distribution switch, and the output end of the DC bus voltage detection unit is connected to the input end of the hysteresis comparison action unit.
  • the DC bus voltage detection unit is used to detect the DC bus voltage output by the power distribution switch, and transmit the DC bus voltage to the hysteresis comparison action unit.
  • the output end of the hysteresis comparison action unit is connected to the control end of the power distribution switch.
  • the hysteresis comparison action unit is used to compare the DC bus voltage with the lower limit threshold of life. When the DC bus voltage is less than the lower limit threshold of life, the output switch turns off .
  • the life detection unit is also used to compare the DC bus voltage with the upper limit threshold of the hysteresis loop width, and when the DC bus voltage is greater than the upper limit threshold of the hysteresis loop width, output a switch opening instruction, and control the power distribution switch to open according to the switch opening instruction.
  • the life detection unit also includes: a capacitance aging replacement indication unit.
  • the control terminal of the capacitor aging replacement indicator unit is connected to the output terminal of the hysteresis comparison action unit, and the hysteresis comparison action unit is used to control the capacitor aging replacement indicator unit to light up according to the switch off instruction.
  • Capacitor aging replacement indication unit includes: LED indicator circuit. After receiving the logic signal, the small light is on, which is used to remind the user that the service life of the electrolytic capacitor unit of the current pulse power supply has expired, please replace the electrolytic capacitor array unit accessories.
  • the power distribution switch is a power switching transistor or a controllable relay. This unit is the protection switch unit of the whole machine. Its main function is that when the power supply fails abnormally or detects the set cut-off logic function condition, the power distribution switch will change from the on state to the cut-off state, and cut off the DC input power, so that after cut-off Level pulse power output.
  • the DC bus voltage detection unit is a resistor divider network or a voltage transformer.
  • the output terminal of the hysteresis comparison action unit is connected with the control terminal of the LED indicator circuit, and the LED indicator circuit is used for lighting according to the switch off instruction.
  • the high-frequency pulse AC power supply body includes: a rectification unit, an electrolytic capacitor array unit, an inverter circuit unit, a high-voltage transformer unit and a drive circuit unit.
  • the input end of the rectification unit is connected to the mains, and the output end of the rectification unit is connected to the input end of the electrolytic capacitor array unit.
  • the rectification unit is used to rectify the 220v mains into a pulsating DC bus voltage, and transmit the pulsating DC bus voltage to Electrolytic capacitor array unit.
  • the output end of the electrolytic capacitor array unit is connected to the input end of the inverter circuit unit through the power distribution switch.
  • the electrolytic capacitor array unit is used to filter the pulsating DC bus voltage into a stable DC bus voltage, and pass the stable DC bus voltage through the distribution switch.
  • the electric switch is transmitted to the inverter circuit unit.
  • the output end of the inverter circuit unit is connected to the input end of the high voltage transformer unit, and the inverter circuit unit is used to invert the stable DC bus voltage into an AC square wave voltage, and transmit the AC square wave voltage to the high voltage transformer unit.
  • the output end of the high-voltage transformer unit is connected to the plasma electrode load, and the high-voltage transformer unit is used to convert the AC square wave voltage into a pulse voltage, and uses the pulse voltage to supply power to the plasma electrode load.
  • the drive circuit unit is connected with the inverter circuit unit, and the drive circuit unit is used to generate a square wave drive signal, and drive the inverter circuit unit to be switched off according to the square wave drive signal.
  • the rectification unit includes 4 rectification diodes, or 4 synchronous switching MOS transistors.
  • the inverter circuit unit includes: 4 switch MOS transistors and 4 regulator tubes.
  • a voltage regulator tube is arranged between the gate and the source of each switch MOS transistor.
  • the drive circuit unit is an inverter bridge circuit control chip or a digital controller.
  • the present invention reduces the configuration margin of the filter capacitor, and does not need to double the capacity margin of the DC bus filter capacitor array (electrolytic capacitor) in order to ensure a certain working life of the high-voltage pulse power supply, resulting in the overall volume of the high-voltage pulse power supply
  • the solution proposed by the present invention solves the problem of the working time and life of the high-voltage pulse power supply, which can remove the extra electrolytic capacitor margin, greatly reduce the volume of the driving power supply, increase the power density of the driving power supply, and realize low-temperature plasma
  • the DC bus filter electrolytic capacitors are designed as pluggable and replaceable modular units.
  • the hysteresis comparison action unit shuts off the DC power input
  • the power distribution switch at the end, and display the capacitor aging replacement indication signal, informing the user to replace the electrolytic capacitor array module unit, so as to realize the function of extending the service life of the entire power supply.
  • FIG. 2 A schematic diagram of the basic simulation circuit structure of power conversion corresponding to a high-power-density-long-life high-frequency pulsed AC power supply is shown in Figure 2, and the corresponding detailed explanation is as follows:
  • the AC rectification simulation circuit uses the AC source v_sin to simulate the 50Hz AC mains voltage, and sends it to the bridge diode to rectify the current.
  • the diode in the simulation circuit is composed of a power ideal diode; amplitude indicates the amplitude, and frequency indicates the frequency.
  • the electrolytic capacitor array unit circuit is equivalent to the actual electrolytic capacitor array unit by a single capacitor and a series resistance model.
  • the aging process of the capacitor is mainly reflected in the decrease of the capacitance value and the increase of the equivalent resistance value.
  • the process of capacitor aging is simulated by changing the values of these two parameters.
  • the model symbol is the current probe of the test branch current in the saber simulation environment.
  • the output signal Iin corresponding to the two current probes is the total current of the power input, and Icap is the total current of the capacitor array branch.
  • the capacitor symbol is the electrolytic capacitor array.
  • the corresponding capacitance simulation environment is set to 4.7 millifarads (4.7m); the inductance value of the inductance symbol is 0.1 microhenry (0.1 ⁇ H); The symbol represents the voltage probe of the test branch voltage in the saber simulation environment.
  • the high-frequency inverter simulation circuit is realized by four ideal switching transistors idealmos, and a 15V regulator tube is added between the gate and source of each MOS switching transistor to protect the gate-source of the MOSFET The voltage will not exceed the limit and burn out.
  • the power switching transistor in the "power distribution switch" unit in the architecture block diagram in Figure 1 is reflected in the wiring position in Figure 2, between the power output positive line of the electrolytic capacitor array unit and the power input positive line of the high-frequency inverter unit During the interval, the power input of the high-frequency inverter unit is controlled on and off.
  • the high-voltage transformer unit is composed of a DC-DC ideal transformer.
  • the transformation ratio of the primary side and the secondary side is set to 10:500, and the output pulse voltage is Upluse.
  • the high-voltage side of the secondary side of the transformer is directly connected to the capacitive load.
  • the plasma electrode load is equivalent to a capacitance model.
  • the driving signal unit simulation circuit uses an ideal model device to realize 2 complementary PWM signal waveforms, in which the PWM_A and PWM_D signals are the same, generating a 50kHz, 10us pulse width square wave driving signal, and the PWM_B and PWM_C signals are the same, generating the same signal as PWM_A Complementary signals are respectively sent to the vcvs model with isolation function to drive the on-off of the bridge switching transistor of the high-frequency inverter circuit.
  • the schematic simulation circuit model in Figure 2 in the driving signal unit circuit The symbol is the basic NAND gate, which processes logic signal functions.
  • vp and vm are the positive line input terminal and negative line input terminal of the voltage-controlled voltage source vcvs model, and the corresponding k is the scaling factor of the input voltage by vcvs, such as k:1 Indicates that the input voltage is multiplied by 1 for output, and k:3 indicates that the input voltage is multiplied by 3, amplified by 3 times and then output.
  • the present invention designs the DC bus filter electrolytic capacitor array unit as a pluggable and replaceable type, and adds a DC bus voltage detection unit, hysteresis comparison action unit, power distribution switch unit and capacitor aging Replace indicating unit.
  • the DC bus voltage detection unit detects the DC bus voltage signal.
  • the hysteresis comparison action unit gives two types of control signals, one of which controls the power distribution switch to turn off, Cut off the power input; the second control signal is sent to the capacitor aging replacement indicator unit, which is used to remind the user that the bus filter electrolytic capacitor array unit has reached the life limit, and capacitor accessories need to be replaced.
  • the solution proposed by the invention can greatly reduce the number margin of the bus filter capacitor, and will not affect the final pulse power output.
  • On the premise of ensuring the life of the power supply it can well solve the problem of integration of the low-temperature plasma source device , which helps to realize the miniaturization functional requirements of the low-temperature plasma source.
  • FIG. 3-5 shows the high-frequency pulse AC power supply with a 50pF capacitive load, and the output +/-10kV pulse voltage waveform U pluse , I pluse is the output pulse current waveform, I pluse pri is the current waveform of the primary side of the high-voltage transformer;
  • Figure 4 is the voltage U cap and current I cap waveforms of the filter electrolytic capacitor on the DC bus side;
  • Figure 5 is the amplified steady-state waveform of Figure 4.
  • the abscissa in Fig. 3-5 is time t, and the unit is second (s).
  • the simulation results set the parasitic resistance ESR of the electrolytic capacitor to 1 milliohm, which reflects the initial life of the electrolytic capacitor. It can be mainly observed that the rated working condition of the bus filter electrolytic capacitor array unit inside the high-frequency pulse AC power supply is based on a very high pulse The peak current power form is more likely to accelerate the aging of the electrolytic capacitor array.
  • FIG. 6-7 shows the simulation waveforms when the value of the electrolytic capacitor lineup remains unchanged and the ESR increases to 1 milliohm, 10 milliohm, and 100 milliohm respectively, where U cap is the DC bus voltage, and P cap is the loss of the ESR of the capacitor array Power, I cap is the capacitor array current.
  • the parameter changes caused by the aging of electrolytic capacitors are the gradual decrease in capacitance and the gradual increase in parasitic resistance, and it is known that the decrease in capacitance will lead to an increase in the peak-to-peak value of DC bus voltage fluctuations.
  • the electrolytic capacitor detection method proposed by the present invention is based on the influence degree of the increase of ESR on the peak-to-peak value of the DC bus voltage fluctuation.
  • the principle simulation schematic diagram is shown in Figure 11.
  • the equivalent parasitic resistance R cap_esr gradually changes online to 0.001 ohms, 0.01 ohms, 0.05 ohms, and 0.1 ohms.
  • the variable resistance model PWR model is used in the saber simulation environment, as shown in Figure 12.
  • the corresponding bus voltage waveform is shown in Figure 13, and the parasitic resistance of the capacitor life threshold is set to 0.05 ohms.
  • the present invention proposes that the DC bus voltage can be simply sampled, and the hysteresis voltage thresholds U th_H and U th_L (220V and 203V) corresponding to the set aging parasitic resistance resistance R cap_esr (0.05 ohms) can be used as judgment electrolytic
  • the standard for reaching the life threshold of the capacitor array has a theoretical basis and can be applied in engineering practice.
  • the present invention Compared with the traditional high-frequency pulsed AC power supply, the present invention has smaller volume and higher power density, and can realize the integration and miniaturization of the low-temperature plasma source device;
  • the DC bus filter electrolytic capacitor array which is the weak link in the life of the present invention, is designed to be pluggable and replaceable, so the overall service life of the whole machine is increased and the reliability is higher;
  • the present invention adds a simple link to constantly monitor the DC bus voltage in the circuit structure, and designs a hysteresis loop comparison action unit to realize the constant monitoring and indication function of the capacitor life;
  • the present invention has a simpler electrolytic capacitor life monitoring method.
  • studying the aging characteristics of DC bus filter capacitors that is, the characteristics of capacitor capacitance reduction and aging resistance increase directly bring bus voltage Significant changes in the peak-to-peak value of fluctuations, it is proposed to directly reflect the aging life threshold parameters by directly setting the bus voltage fluctuation hysteresis loop width value, and realize the real-time monitoring function of life, which is more conducive to the application of practical engineering applications.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Power Conversion In General (AREA)
  • Inverter Devices (AREA)

Abstract

L'invention se rapporte à une alimentation électrique CA à densité à énergie élevée, à longue durée de vie et à impulsion haute-fréquence. L'alimentation électrique comprend un corps d'alimentation électrique à courant alternatif à impulsion haute-fréquence, une base enfichable remplaçable, un commutateur de distribution d'énergie et une unité de détection de durée de vie. Une unité de réseau de condensateurs électrolytiques est conçue en tant qu'unité modulaire remplaçable enfichable, ainsi, la marge de capacité de l'unité de réseau de condensateurs électrolytiques n'a pas besoin d'être multipliée pour garantir une certaine durée de vie d'une alimentation électrique à impulsion haute-tension, la marge de configuration de l'unité de réseau de condensateurs électrolytiques est réduite, et la densité d'énergie d'une alimentation électrique d'entraînement est améliorée. Une tension de bus CC délivrée par le commutateur de distribution d'énergie est détectée au moyen de l'unité de détection de durée de vie, et est comparée à un seuil de limite inférieure de durée de vie, et lorsque la tension de bus CC est inférieure au seuil de limite inférieure de durée de vie, le commutateur de distribution d'énergie est commandé pour être désactivé afin d'inviter un utilisateur à remplacer l'unité de réseau de condensateurs électrolytiques, ce qui permet de prolonger la durée de vie de la totalité de l'alimentation électrique.
PCT/CN2022/074169 2021-06-25 2022-01-27 Alimentation électrique ca à densité à énergie élevée, à longue durée de vie et à impulsion haute-fréquence WO2022267473A1 (fr)

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