WO2022267473A1 - High-power density, long-life and high-frequency pulse ac power supply - Google Patents

High-power density, long-life and high-frequency pulse ac power supply Download PDF

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Publication number
WO2022267473A1
WO2022267473A1 PCT/CN2022/074169 CN2022074169W WO2022267473A1 WO 2022267473 A1 WO2022267473 A1 WO 2022267473A1 CN 2022074169 W CN2022074169 W CN 2022074169W WO 2022267473 A1 WO2022267473 A1 WO 2022267473A1
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WIPO (PCT)
Prior art keywords
unit
life
power
power supply
bus voltage
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PCT/CN2022/074169
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French (fr)
Chinese (zh)
Inventor
常华梅
时贞平
金珊珊
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江苏容正医药科技有限公司
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Priority to DE112022003244.8T priority Critical patent/DE112022003244T5/en
Publication of WO2022267473A1 publication Critical patent/WO2022267473A1/en

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/32—Means for protecting converters other than automatic disconnection
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M5/00—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases
    • H02M5/40—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc
    • H02M5/42—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters
    • H02M5/44—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac
    • H02M5/453—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M5/458—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/165—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values
    • G01R19/16533—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values characterised by the application
    • G01R19/16538—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values characterised by the application in AC or DC supplies
    • G01R19/16547—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values characterised by the application in AC or DC supplies voltage or current in AC supplies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/40—Testing power supplies
    • G01R31/42—AC power supplies
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/02—Conversion of ac power input into dc power output without possibility of reversal
    • H02M7/04—Conversion of ac power input into dc power output without possibility of reversal by static converters
    • H02M7/06—Conversion of ac power input into dc power output without possibility of reversal by static converters using discharge tubes without control electrode or semiconductor devices without control electrode
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/02—Conversion of ac power input into dc power output without possibility of reversal
    • H02M7/04—Conversion of ac power input into dc power output without possibility of reversal by static converters
    • H02M7/12—Conversion of ac power input into dc power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/21—Conversion of ac power input into dc power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/217—Conversion of ac power input into dc power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
    • H02M7/219—Conversion of ac power input into dc power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only in a bridge configuration
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
    • H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
    • H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • H02M7/5387—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
    • H02M7/53871—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration with automatic control of output voltage or current
    • H02M7/53873—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration with automatic control of output voltage or current with digital control

Definitions

  • the invention relates to the technical field of power supplies, in particular to a high-power-density-long-life high-frequency pulse AC power supply.
  • High-frequency pulsed AC power supply is a type of power supply widely used in low-temperature plasma sources. It mainly outputs pulsed energy to drive different types of low-temperature plasma electrodes to generate plasma active particles, thereby ensuring the safety, stability and reliability of low-temperature plasma source devices. applied in different fields.
  • the integration and miniaturization of the current low-temperature plasma source device is the inevitable trend of its application development, and most of the volume and weight of the plasma source device are concentrated in the drive and excitation power supply unit, so how to optimize the drive and excitation power supply, especially the application
  • the most widely used high-frequency pulsed AC power supply, realizing high power density and long life of high-frequency pulsed AC power supply is the key core issue for realizing the integration and miniaturization of plasma source devices.
  • the electrolytic capacitor is one of the capacitors. Its metal foil is the positive electrode (usually aluminum or ⁇ ). At present, it is more commonly used or on the market. It is an aluminum electrolytic capacitor. Composed of conductive materials, electrolytes and other materials. Electrolytic capacitor is an important component of high-frequency AC power supply. It is also the link with the largest volume and the weakest life in the power supply. Its operating status directly affects the safety and reliability of high-frequency AC power supply.
  • the electrolytic capacitor When the high-frequency AC power supply is in use, the electrolytic capacitor withstands high-frequency voltage for a long time, and the life loss is very fast. Therefore, in order to observe the service life of the power supply in time, it is necessary to monitor the use of the electrolytic capacitor.
  • the methods for monitoring the running state of electrolytic capacitors are mainly divided into two categories: offline monitoring and online monitoring.
  • the equivalent series resistance value and the capacitance value of the electrolytic capacitor are usually monitored. It is usually used to observe the voltage value of the electrolytic capacitor in the discharge state, and estimate the equivalent series resistance value and capacitance value through the voltage value, and compare it with the set value, and finally judge whether the life span is reached; or through the power of the electrolytic capacitor Output, ambient temperature, experiment time and other related parameters, measure the capacitance change value to calculate the capacitor life.
  • the current method of monitoring the life status of electrolytic capacitors is mainly to calculate the C and ESR values of electrolytic capacitors through input current, output voltage ripple and power output. This is also the current mainstream method for monitoring the life status of electrolytic capacitors.
  • the output voltage ripple is measured through a multi-level voltage circuit to calculate the value of C and ESR, and the circuit design is very complicated; there are also patents CN106126876A and patent CN106126876B, researchers use double Fourier series To solve the electrolytic capacitor current ripple at different frequencies is very complicated and not generalizable.
  • the design is complicated, the cost is high, the power supply is bulky, and the power density is low.
  • the rated working condition of the electrolytic capacitor inside the high-frequency and high-voltage pulsed AC power supply used in the field of low-temperature plasma discharge is in the form of outputting high pulse current power, and the life loss of the electrolytic capacitor is faster, which in turn makes the life loss of the high-frequency pulsed AC power faster.
  • the purpose of the present invention is to provide a high power density-long life high-frequency pulsed AC power supply to achieve high power density and long life of the high-frequency pulsed AC power supply.
  • the present invention provides the following scheme:
  • a high-power-density-long-life high-frequency pulse AC power supply includes: a high-frequency pulse AC power supply body, a replaceable plug-in base, a power distribution switch, and a life detection unit;
  • the electrolytic capacitor array unit in the high-frequency pulse AC power supply body is arranged in a replaceable plug-in base;
  • the power distribution switch is arranged between the electrolytic capacitor array unit and the inverter circuit unit in the high-frequency pulse AC power supply body, Both the output end and the control end of the power distribution switch are connected to the life detection unit;
  • the life detection unit is used to detect the DC bus voltage output by the power distribution switch, and compare the DC bus voltage with the lower limit threshold of life, and when the DC bus voltage is less than the lower limit threshold of life, output a switch off command;
  • the power distribution switch is used to turn off the switch according to the switch off command.
  • the life detection unit includes: a DC bus voltage detection unit and a hysteresis comparison action unit;
  • the input end of the DC bus voltage detection unit is connected to the output end of the power distribution switch, and the output end of the DC bus voltage detection unit is connected to the input end of the hysteresis comparison action unit;
  • the DC bus voltage detection unit is used to detect Distributing the DC bus voltage output by the power switch, and transmitting the DC bus voltage to the hysteresis comparison action unit;
  • the output end of the hysteresis comparison action unit is connected to the control end of the power distribution switch, and the hysteresis comparison action unit is used to compare the DC bus voltage with the lower limit threshold of life, when the DC bus voltage is less than the lower limit of life When the threshold is reached, the output switch turns off the command;
  • the life detection unit is also used to compare the DC bus voltage with the upper limit threshold of the hysteresis loop width, and when the DC bus voltage is greater than the upper limit threshold of the hysteresis loop width, output a switch opening instruction, and control the configuration according to the switch opening instruction. Electric switch is on.
  • the life detection unit further includes: a capacitance aging replacement indication unit;
  • the control terminal of the capacitor aging replacement indicator unit is connected to the output terminal of the hysteresis comparison action unit, and the hysteresis comparison action unit is used to control the capacitor aging replacement indicator unit to light up according to the switch off instruction.
  • the invention discloses the following technical effects:
  • the present invention provides a high-power-density-long-life high-frequency pulsed AC power supply.
  • the electrolytic capacitor array unit is designed as a pluggable and replaceable modular unit, and there is no need to expand the electrolytic power supply twice in order to ensure a certain working life of the high-voltage pulsed power supply.
  • the capacity margin of the capacitor array unit reduces the configuration margin of the electrolytic capacitor array unit and improves the power density of the drive power supply; and the DC bus voltage output by the power distribution switch is detected by the life detection unit, and the DC bus voltage and the lower limit of the life Thresholds are compared, when the DC bus voltage is less than the lower limit threshold of life, the power distribution switch is controlled to be turned off, and the user is reminded to replace the electrolytic capacitor array unit, thereby prolonging the service life of the entire power supply.
  • Fig. 1 is a structural diagram of a high power density-long life high-frequency pulse AC power supply provided by the present invention
  • Fig. 2 is the basic circuit diagram of a kind of high power density-long life high-frequency pulse AC power supply provided by the present invention
  • Fig. 3 is the waveform diagram in the high-frequency pulse AC power supply when the capacitive load provided by the present invention is 50pF;
  • Fig. 3 (a) is the PWM drive signal waveform diagram,
  • Fig. 3 (b) is the output pulse voltage waveform diagram,
  • Fig. 3 (c ) is the output pulse current waveform diagram, and
  • Fig. 3(d) is the current waveform diagram of the primary side of the high-voltage transformer;
  • Fig. 4 is the overall trend waveform in the high-frequency pulse AC power supply when the capacitive load provided by the present invention is 50pF;
  • Fig. 4 (a) is the voltage waveform trend diagram of the DC bus side filter electrolytic capacitor, and
  • Fig. 4 (b) is the DC bus The current waveform trend diagram of the side filter electrolytic capacitor,
  • Fig. 4 (c) is the pulse current waveform trend diagram output by the high-frequency pulse AC power supply;
  • Fig. 5 is the oscillogram after the steady state amplification in the high-frequency pulse AC power supply when the capacitive load provided by the present invention is 50pF;
  • Fig. 5 (a) is the voltage waveform diagram after the amplified steady state of the DC bus side filter electrolytic capacitor, and
  • Fig. 5 ( b) is the amplified current waveform diagram of the filter electrolytic capacitor on the DC bus side, and
  • Fig. 5 (c) is the amplified pulse current waveform diagram of the high-frequency pulsed AC power output in a steady state;
  • Fig. 6 is the simulation waveform diagram of the aging heat consumption problem of the DC bus filter electrolytic capacitor array unit provided by the present invention
  • Fig. 6 (a) is the simulation waveform diagram of the DC bus voltage
  • Fig. 6 (b) is the power loss curve diagram of the capacitor array ESR
  • Figure 6(c) is a simulation waveform diagram of the capacitor array current
  • Fig. 7 is a steady-state detailed waveform diagram of the DC bus filter electrolytic capacitor array unit aging heat consumption problem provided by the present invention
  • Fig. 7 (a) is a detailed waveform diagram of the DC bus voltage steady state
  • Fig. 7 (b) is a parasitic resistance ESR of 1
  • Figure 7(c) is the power loss curve of the capacitor array ESR when the parasitic resistance ESR is 10 milliohms
  • Figure 7(d) is the capacitance when the parasitic resistance ESR is 100 milliohms
  • Fig. 7 (e) is the detailed waveform diagram of the current steady state of the capacitor array;
  • Fig. 8 is a parallel structure diagram of a traditional DC bus filter capacitor array
  • Figure 9 is the overall trend waveform of the heat consumption simulation of the traditional capacitor array parallel scheme
  • Figure 9(a) is the overall trend waveform of the DC bus voltage heat consumption simulation
  • Figure 9(b) is the overall simulation of the power loss and heat consumption of the capacitor array ESR
  • the trend graph Fig. 9 (c) is the overall trend waveform of the capacitor array current heat consumption simulation
  • Figure 10 is the steady-state detailed waveform diagram of the thermal consumption simulation of the traditional capacitor array parallel scheme;
  • Figure 10(a) is the steady-state detailed waveform diagram of the DC bus voltage heat consumption simulation;
  • Figure 10(b) is the capacitor array ESR of the 1path capacitor branch
  • Figure 10(c) is the steady-state detail curve of the power loss and heat consumption simulation of the capacitor array ESR of the 2path capacitor branch
  • Figure 10(d) is the capacitance of the 3path capacitor branch
  • Fig. 10 (e) is the steady-state detailed waveform diagram of the capacitor array current heat consumption simulation;
  • Fig. 11 is the time-varying analog circuit diagram of aging resistance of DC bus filter electrolytic capacitor provided by the present invention.
  • Fig. 12 is the variable resistor model PWR model diagram provided by the present invention.
  • Fig. 13 is a bus voltage waveform diagram in the saber simulation environment provided by the present invention.
  • the purpose of the present invention is to provide a high power density-long life high-frequency pulsed AC power supply to achieve high power density and long life of the high-frequency pulsed AC power supply.
  • a high-power-density-long-life high-frequency pulsed AC power supply as shown in Figure 1, the power supply includes: a high-frequency pulsed AC power supply body, a replaceable plug-in base, a power distribution switch and a life detection unit.
  • the electrolytic capacitor array unit in the high-frequency pulse AC power supply body is arranged in a replaceable plug-in base.
  • the power distribution switch is arranged between the electrolytic capacitor array unit and the inverter circuit unit in the high-frequency pulse AC power supply body, and the output terminal and the control terminal of the power distribution switch are connected to the life detection unit.
  • the life detection unit is used to detect the DC bus voltage output by the power distribution switch, and compare the DC bus voltage with the lower life threshold. When the DC bus voltage is less than the lower life threshold, output the switch off command.
  • the power distribution switch is used to turn off the switch according to the switch off command.
  • the electrolytic capacitor array unit and the replaceable plug-in base form a replaceable plug-in electrolytic capacitor array unit.
  • This unit filters the pulsating DC voltage after the rectification of the previous stage into a stable DC bus voltage.
  • the peak value should be as small as possible, and generally the capacitor lineup value of the unit is relatively large.
  • the second function of the unit is to provide instantaneous pulse current, that is, pulse power, for the subsequent high-frequency pulse voltage. Due to the limitation of large capacitance and volume, the unit is composed of large-capacity electrolytic capacitors.
  • the life detection unit includes: a DC bus voltage detection unit and a hysteresis comparison action unit.
  • the input end of the DC bus voltage detection unit is connected to the output end of the power distribution switch, and the output end of the DC bus voltage detection unit is connected to the input end of the hysteresis comparison action unit.
  • the DC bus voltage detection unit is used to detect the DC bus voltage output by the power distribution switch, and transmit the DC bus voltage to the hysteresis comparison action unit.
  • the output end of the hysteresis comparison action unit is connected to the control end of the power distribution switch.
  • the hysteresis comparison action unit is used to compare the DC bus voltage with the lower limit threshold of life. When the DC bus voltage is less than the lower limit threshold of life, the output switch turns off .
  • the life detection unit is also used to compare the DC bus voltage with the upper limit threshold of the hysteresis loop width, and when the DC bus voltage is greater than the upper limit threshold of the hysteresis loop width, output a switch opening instruction, and control the power distribution switch to open according to the switch opening instruction.
  • the life detection unit also includes: a capacitance aging replacement indication unit.
  • the control terminal of the capacitor aging replacement indicator unit is connected to the output terminal of the hysteresis comparison action unit, and the hysteresis comparison action unit is used to control the capacitor aging replacement indicator unit to light up according to the switch off instruction.
  • Capacitor aging replacement indication unit includes: LED indicator circuit. After receiving the logic signal, the small light is on, which is used to remind the user that the service life of the electrolytic capacitor unit of the current pulse power supply has expired, please replace the electrolytic capacitor array unit accessories.
  • the power distribution switch is a power switching transistor or a controllable relay. This unit is the protection switch unit of the whole machine. Its main function is that when the power supply fails abnormally or detects the set cut-off logic function condition, the power distribution switch will change from the on state to the cut-off state, and cut off the DC input power, so that after cut-off Level pulse power output.
  • the DC bus voltage detection unit is a resistor divider network or a voltage transformer.
  • the output terminal of the hysteresis comparison action unit is connected with the control terminal of the LED indicator circuit, and the LED indicator circuit is used for lighting according to the switch off instruction.
  • the high-frequency pulse AC power supply body includes: a rectification unit, an electrolytic capacitor array unit, an inverter circuit unit, a high-voltage transformer unit and a drive circuit unit.
  • the input end of the rectification unit is connected to the mains, and the output end of the rectification unit is connected to the input end of the electrolytic capacitor array unit.
  • the rectification unit is used to rectify the 220v mains into a pulsating DC bus voltage, and transmit the pulsating DC bus voltage to Electrolytic capacitor array unit.
  • the output end of the electrolytic capacitor array unit is connected to the input end of the inverter circuit unit through the power distribution switch.
  • the electrolytic capacitor array unit is used to filter the pulsating DC bus voltage into a stable DC bus voltage, and pass the stable DC bus voltage through the distribution switch.
  • the electric switch is transmitted to the inverter circuit unit.
  • the output end of the inverter circuit unit is connected to the input end of the high voltage transformer unit, and the inverter circuit unit is used to invert the stable DC bus voltage into an AC square wave voltage, and transmit the AC square wave voltage to the high voltage transformer unit.
  • the output end of the high-voltage transformer unit is connected to the plasma electrode load, and the high-voltage transformer unit is used to convert the AC square wave voltage into a pulse voltage, and uses the pulse voltage to supply power to the plasma electrode load.
  • the drive circuit unit is connected with the inverter circuit unit, and the drive circuit unit is used to generate a square wave drive signal, and drive the inverter circuit unit to be switched off according to the square wave drive signal.
  • the rectification unit includes 4 rectification diodes, or 4 synchronous switching MOS transistors.
  • the inverter circuit unit includes: 4 switch MOS transistors and 4 regulator tubes.
  • a voltage regulator tube is arranged between the gate and the source of each switch MOS transistor.
  • the drive circuit unit is an inverter bridge circuit control chip or a digital controller.
  • the present invention reduces the configuration margin of the filter capacitor, and does not need to double the capacity margin of the DC bus filter capacitor array (electrolytic capacitor) in order to ensure a certain working life of the high-voltage pulse power supply, resulting in the overall volume of the high-voltage pulse power supply
  • the solution proposed by the present invention solves the problem of the working time and life of the high-voltage pulse power supply, which can remove the extra electrolytic capacitor margin, greatly reduce the volume of the driving power supply, increase the power density of the driving power supply, and realize low-temperature plasma
  • the DC bus filter electrolytic capacitors are designed as pluggable and replaceable modular units.
  • the hysteresis comparison action unit shuts off the DC power input
  • the power distribution switch at the end, and display the capacitor aging replacement indication signal, informing the user to replace the electrolytic capacitor array module unit, so as to realize the function of extending the service life of the entire power supply.
  • FIG. 2 A schematic diagram of the basic simulation circuit structure of power conversion corresponding to a high-power-density-long-life high-frequency pulsed AC power supply is shown in Figure 2, and the corresponding detailed explanation is as follows:
  • the AC rectification simulation circuit uses the AC source v_sin to simulate the 50Hz AC mains voltage, and sends it to the bridge diode to rectify the current.
  • the diode in the simulation circuit is composed of a power ideal diode; amplitude indicates the amplitude, and frequency indicates the frequency.
  • the electrolytic capacitor array unit circuit is equivalent to the actual electrolytic capacitor array unit by a single capacitor and a series resistance model.
  • the aging process of the capacitor is mainly reflected in the decrease of the capacitance value and the increase of the equivalent resistance value.
  • the process of capacitor aging is simulated by changing the values of these two parameters.
  • the model symbol is the current probe of the test branch current in the saber simulation environment.
  • the output signal Iin corresponding to the two current probes is the total current of the power input, and Icap is the total current of the capacitor array branch.
  • the capacitor symbol is the electrolytic capacitor array.
  • the corresponding capacitance simulation environment is set to 4.7 millifarads (4.7m); the inductance value of the inductance symbol is 0.1 microhenry (0.1 ⁇ H); The symbol represents the voltage probe of the test branch voltage in the saber simulation environment.
  • the high-frequency inverter simulation circuit is realized by four ideal switching transistors idealmos, and a 15V regulator tube is added between the gate and source of each MOS switching transistor to protect the gate-source of the MOSFET The voltage will not exceed the limit and burn out.
  • the power switching transistor in the "power distribution switch" unit in the architecture block diagram in Figure 1 is reflected in the wiring position in Figure 2, between the power output positive line of the electrolytic capacitor array unit and the power input positive line of the high-frequency inverter unit During the interval, the power input of the high-frequency inverter unit is controlled on and off.
  • the high-voltage transformer unit is composed of a DC-DC ideal transformer.
  • the transformation ratio of the primary side and the secondary side is set to 10:500, and the output pulse voltage is Upluse.
  • the high-voltage side of the secondary side of the transformer is directly connected to the capacitive load.
  • the plasma electrode load is equivalent to a capacitance model.
  • the driving signal unit simulation circuit uses an ideal model device to realize 2 complementary PWM signal waveforms, in which the PWM_A and PWM_D signals are the same, generating a 50kHz, 10us pulse width square wave driving signal, and the PWM_B and PWM_C signals are the same, generating the same signal as PWM_A Complementary signals are respectively sent to the vcvs model with isolation function to drive the on-off of the bridge switching transistor of the high-frequency inverter circuit.
  • the schematic simulation circuit model in Figure 2 in the driving signal unit circuit The symbol is the basic NAND gate, which processes logic signal functions.
  • vp and vm are the positive line input terminal and negative line input terminal of the voltage-controlled voltage source vcvs model, and the corresponding k is the scaling factor of the input voltage by vcvs, such as k:1 Indicates that the input voltage is multiplied by 1 for output, and k:3 indicates that the input voltage is multiplied by 3, amplified by 3 times and then output.
  • the present invention designs the DC bus filter electrolytic capacitor array unit as a pluggable and replaceable type, and adds a DC bus voltage detection unit, hysteresis comparison action unit, power distribution switch unit and capacitor aging Replace indicating unit.
  • the DC bus voltage detection unit detects the DC bus voltage signal.
  • the hysteresis comparison action unit gives two types of control signals, one of which controls the power distribution switch to turn off, Cut off the power input; the second control signal is sent to the capacitor aging replacement indicator unit, which is used to remind the user that the bus filter electrolytic capacitor array unit has reached the life limit, and capacitor accessories need to be replaced.
  • the solution proposed by the invention can greatly reduce the number margin of the bus filter capacitor, and will not affect the final pulse power output.
  • On the premise of ensuring the life of the power supply it can well solve the problem of integration of the low-temperature plasma source device , which helps to realize the miniaturization functional requirements of the low-temperature plasma source.
  • FIG. 3-5 shows the high-frequency pulse AC power supply with a 50pF capacitive load, and the output +/-10kV pulse voltage waveform U pluse , I pluse is the output pulse current waveform, I pluse pri is the current waveform of the primary side of the high-voltage transformer;
  • Figure 4 is the voltage U cap and current I cap waveforms of the filter electrolytic capacitor on the DC bus side;
  • Figure 5 is the amplified steady-state waveform of Figure 4.
  • the abscissa in Fig. 3-5 is time t, and the unit is second (s).
  • the simulation results set the parasitic resistance ESR of the electrolytic capacitor to 1 milliohm, which reflects the initial life of the electrolytic capacitor. It can be mainly observed that the rated working condition of the bus filter electrolytic capacitor array unit inside the high-frequency pulse AC power supply is based on a very high pulse The peak current power form is more likely to accelerate the aging of the electrolytic capacitor array.
  • FIG. 6-7 shows the simulation waveforms when the value of the electrolytic capacitor lineup remains unchanged and the ESR increases to 1 milliohm, 10 milliohm, and 100 milliohm respectively, where U cap is the DC bus voltage, and P cap is the loss of the ESR of the capacitor array Power, I cap is the capacitor array current.
  • the parameter changes caused by the aging of electrolytic capacitors are the gradual decrease in capacitance and the gradual increase in parasitic resistance, and it is known that the decrease in capacitance will lead to an increase in the peak-to-peak value of DC bus voltage fluctuations.
  • the electrolytic capacitor detection method proposed by the present invention is based on the influence degree of the increase of ESR on the peak-to-peak value of the DC bus voltage fluctuation.
  • the principle simulation schematic diagram is shown in Figure 11.
  • the equivalent parasitic resistance R cap_esr gradually changes online to 0.001 ohms, 0.01 ohms, 0.05 ohms, and 0.1 ohms.
  • the variable resistance model PWR model is used in the saber simulation environment, as shown in Figure 12.
  • the corresponding bus voltage waveform is shown in Figure 13, and the parasitic resistance of the capacitor life threshold is set to 0.05 ohms.
  • the present invention proposes that the DC bus voltage can be simply sampled, and the hysteresis voltage thresholds U th_H and U th_L (220V and 203V) corresponding to the set aging parasitic resistance resistance R cap_esr (0.05 ohms) can be used as judgment electrolytic
  • the standard for reaching the life threshold of the capacitor array has a theoretical basis and can be applied in engineering practice.
  • the present invention Compared with the traditional high-frequency pulsed AC power supply, the present invention has smaller volume and higher power density, and can realize the integration and miniaturization of the low-temperature plasma source device;
  • the DC bus filter electrolytic capacitor array which is the weak link in the life of the present invention, is designed to be pluggable and replaceable, so the overall service life of the whole machine is increased and the reliability is higher;
  • the present invention adds a simple link to constantly monitor the DC bus voltage in the circuit structure, and designs a hysteresis loop comparison action unit to realize the constant monitoring and indication function of the capacitor life;
  • the present invention has a simpler electrolytic capacitor life monitoring method.
  • studying the aging characteristics of DC bus filter capacitors that is, the characteristics of capacitor capacitance reduction and aging resistance increase directly bring bus voltage Significant changes in the peak-to-peak value of fluctuations, it is proposed to directly reflect the aging life threshold parameters by directly setting the bus voltage fluctuation hysteresis loop width value, and realize the real-time monitoring function of life, which is more conducive to the application of practical engineering applications.

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Abstract

The invention relates to a high-power density, long-life and high-frequency pulse AC power supply. The power supply comprises a high-frequency pulse alternating-current power supply body, a replaceable plug-in base, a power distribution switch and a life detection unit. An electrolytic capacitor array unit is designed as a pluggable replaceable module unit, thus the capacity margin of the electrolytic capacitor array unit does not need to be multiplied to ensure a certain service life of a high-voltage pulse power supply, the configuration margin of the electrolytic capacitor array unit is reduced, and the power density of a driving power supply is improved. A DC bus voltage outputted by the power distribution switch is detected by means of the life detection unit, and is compared with a service life lower limit threshold, and when the DC bus voltage is less than the life lower limit threshold, the power distribution switch is controlled to be turned off to prompt a user to replace the electrolytic capacitor array unit, thereby prolonging the service life of the whole power supply.

Description

一种高功率密度-长寿命高频脉冲交流电源A High Power Density-Long Life High Frequency Pulse AC Power Supply
本申请要求于2021年06月25日提交中国专利局、申请号为202110711240.2、发明名称为“一种高功率密度-长寿命高频脉冲交流电源”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。This application claims the priority of the Chinese patent application submitted to the China Patent Office on June 25, 2021, with the application number 202110711240.2, and the title of the invention is "A High-Power Density-Long-Life High-Frequency Pulse AC Power Supply", the entire content of which is passed References are incorporated in this application.
技术领域technical field
本发明涉及电源技术领域，特别是涉及一种高功率密度-长寿命高频脉冲交流电源。The invention relates to the technical field of power supplies, in particular to a high-power-density-long-life high-frequency pulse AC power supply.
背景技术Background technique
高频脉冲交流电源是一种广泛应用于低温等离子体源的电源类型，主要输出脉冲式能量驱动不同类型的低温等离子体电极产生等离子体活性粒子，从而保证低温等离子体源装置安全、稳定、可靠地应用于不同领域。而当前低温等离子体源装置集成化、小型化是其应用发展的必然趋势，而等离子体源装置绝大部分的体积和重量均集中在驱动激励电源单元，故如何优化驱动激励电源，特别是应用最为广泛的高频脉冲交流电源，实现高频脉冲交流电源的高功率密度和长寿命是实现等离子体源装置集成化、小型化的关键核心问题。而电解电容是电容的其中一种，它的金属箔为正极(一般用铝或铛)，目前比较常用或市面上比较常见的为铝电解电容，与正极紧贴金属的氧化膜为电解质，阴极由导电材料、电解质和其他材料共同组成。电解电容是高频交流电源的重要组成部件，也是电源内部的体积最大，寿命最为薄弱的环节，其运行状态直接影响了高频交流电源的安全性与可靠性。High-frequency pulsed AC power supply is a type of power supply widely used in low-temperature plasma sources. It mainly outputs pulsed energy to drive different types of low-temperature plasma electrodes to generate plasma active particles, thereby ensuring the safety, stability and reliability of low-temperature plasma source devices. applied in different fields. However, the integration and miniaturization of the current low-temperature plasma source device is the inevitable trend of its application development, and most of the volume and weight of the plasma source device are concentrated in the drive and excitation power supply unit, so how to optimize the drive and excitation power supply, especially the application The most widely used high-frequency pulsed AC power supply, realizing high power density and long life of high-frequency pulsed AC power supply is the key core issue for realizing the integration and miniaturization of plasma source devices. The electrolytic capacitor is one of the capacitors. Its metal foil is the positive electrode (usually aluminum or 铛). At present, it is more commonly used or on the market. It is an aluminum electrolytic capacitor. Composed of conductive materials, electrolytes and other materials. Electrolytic capacitor is an important component of high-frequency AC power supply. It is also the link with the largest volume and the weakest life in the power supply. Its operating status directly affects the safety and reliability of high-frequency AC power supply.
高频交流电源在使用时，电解电容长期承受较高频率的电压，寿命损耗非常快，所以为了及时观测到电源的使用寿命，需要对电解电容使用状况有一个监测。目前监测电解电容运行状态的方法主要分为2类：离线式监测和在线式监测。现有的方案有：(1)添加功率因数校正转换器，基于电容纹波电压的分析来监测电解电容的状态；(2)加入隔离的电流放大器在循环中的特定时间收集两个电容器的电压值，以计算ESR(Equivalent Series Resistance，等效串联电阻)和C的值；(3)提出一种基于步进激励的DC-DC转换器的输出级电容器的在线损耗检测方法。When the high-frequency AC power supply is in use, the electrolytic capacitor withstands high-frequency voltage for a long time, and the life loss is very fast. Therefore, in order to observe the service life of the power supply in time, it is necessary to monitor the use of the electrolytic capacitor. At present, the methods for monitoring the running state of electrolytic capacitors are mainly divided into two categories: offline monitoring and online monitoring. Existing solutions are: (1) adding a power factor correction converter to monitor the state of the electrolytic capacitor based on the analysis of the capacitor ripple voltage; (2) adding an isolated current amplifier to collect the voltage of the two capacitors at a specific time in the cycle Value to calculate the value of ESR (Equivalent Series Resistance, equivalent series resistance) and C; (3) An online loss detection method for the output stage capacitor of a DC-DC converter based on step excitation is proposed.
为了实现对电解电容寿命状态的监测，通常都是对电解电容的等效串联电阻值和电解电容容值的监测。通常采用观察电解电容在放电状态时的电压值，并通过电压值来估算等效串联电阻值与电容值，并与设定的值进行比较，最终判断是否达到寿命年限；或者通过电解电容的功率输出、环境温度、实验时间等相关参数，测量电容变化值来计算电容寿命。In order to realize the monitoring of the life state of the electrolytic capacitor, the equivalent series resistance value and the capacitance value of the electrolytic capacitor are usually monitored. It is usually used to observe the voltage value of the electrolytic capacitor in the discharge state, and estimate the equivalent series resistance value and capacitance value through the voltage value, and compare it with the set value, and finally judge whether the life span is reached; or through the power of the electrolytic capacitor Output, ambient temperature, experiment time and other related parameters, measure the capacitance change value to calculate the capacitor life.
目前对电解电容寿命状态监测的方法主要是通过输入电流、输出电压纹波和功率输出来计算出电解电容的C和ESR值，这也是目前主流的监测电解电容寿命状态的方法。但是如专利CN110031705A所述，通过多级电压回路来测量输出电压纹波，从而来计算C和ESR的值，电路设计十分复杂；还有专利CN106126876A和专利CN106126876B，学者通过二重傅里叶级数来求解不同频率下的电解电容电流纹波，十分复杂，不具有推广性。The current method of monitoring the life status of electrolytic capacitors is mainly to calculate the C and ESR values of electrolytic capacitors through input current, output voltage ripple and power output. This is also the current mainstream method for monitoring the life status of electrolytic capacitors. However, as described in patent CN110031705A, the output voltage ripple is measured through a multi-level voltage circuit to calculate the value of C and ESR, and the circuit design is very complicated; there are also patents CN106126876A and patent CN106126876B, scholars use double Fourier series To solve the electrolytic capacitor current ripple at different frequencies is very complicated and not generalizable.
综合现有技术方案以及应用场景，设计复杂，成本高昂，电源体积庞大，功率密度低。同时应用于低温等离子体放电领域高频高压脉冲交流电源内部的电解电容额定工况为输出高脉冲电流式功率形式，电解电容寿命损耗更快，进而使得高频脉冲交流电源的寿命损耗更快。Based on the existing technical solutions and application scenarios, the design is complicated, the cost is high, the power supply is bulky, and the power density is low. At the same time, the rated working condition of the electrolytic capacitor inside the high-frequency and high-voltage pulsed AC power supply used in the field of low-temperature plasma discharge is in the form of outputting high pulse current power, and the life loss of the electrolytic capacitor is faster, which in turn makes the life loss of the high-frequency pulsed AC power faster.
发明内容Contents of the invention
本发明的目的是提供一种高功率密度-长寿命高频脉冲交流电源，以实现高频脉冲交流电源的高功率密度和长寿命。The purpose of the present invention is to provide a high power density-long life high-frequency pulsed AC power supply to achieve high power density and long life of the high-frequency pulsed AC power supply.
为实现上述目的，本发明提供了如下方案：To achieve the above object, the present invention provides the following scheme:
一种高功率密度-长寿命高频脉冲交流电源，所述电源包括：高频脉冲交流电源本体、可替换插拔底座、配电开关和寿命检测单元；A high-power-density-long-life high-frequency pulse AC power supply, the power supply includes: a high-frequency pulse AC power supply body, a replaceable plug-in base, a power distribution switch, and a life detection unit;
所述高频脉冲交流电源本体中的电解电容阵单元设置在可替换插拔底座中；所述配电开关设置在高频脉冲交流电源本体中的电解电容阵单元和逆变电路单元之间，所述配电开关的输出端和控制端均与寿命检测单元连接；The electrolytic capacitor array unit in the high-frequency pulse AC power supply body is arranged in a replaceable plug-in base; the power distribution switch is arranged between the electrolytic capacitor array unit and the inverter circuit unit in the high-frequency pulse AC power supply body, Both the output end and the control end of the power distribution switch are connected to the life detection unit;
所述寿命检测单元用于检测配电开关输出的直流母线电压，并将所述直流母线电压与寿命下限阈值进行比较，当所述直流母线电压小于寿命下限阈值时，输出开关关断指令；所述配电开关用于根据开关关断指令关断开关。The life detection unit is used to detect the DC bus voltage output by the power distribution switch, and compare the DC bus voltage with the lower limit threshold of life, and when the DC bus voltage is less than the lower limit threshold of life, output a switch off command; The power distribution switch is used to turn off the switch according to the switch off command.
可选地，所述寿命检测单元包括：直流母线电压检测单元和滞环比较动作单元；Optionally, the life detection unit includes: a DC bus voltage detection unit and a hysteresis comparison action unit;
所述直流母线电压检测单元的输入端与配电开关的输出端连接，所述直流母线电压检测单元的输出端与滞环比较动作单元的输入端连接；所述直流母线电压检测单元用于检测配电开关输出的直流母线电压，并将所述直流母线电压传输至滞环比较动作单元；The input end of the DC bus voltage detection unit is connected to the output end of the power distribution switch, and the output end of the DC bus voltage detection unit is connected to the input end of the hysteresis comparison action unit; the DC bus voltage detection unit is used to detect Distributing the DC bus voltage output by the power switch, and transmitting the DC bus voltage to the hysteresis comparison action unit;
所述滞环比较动作单元的输出端与配电开关的控制端连接，所述滞环比较动作单元用于将所述直流母线电压与寿命下限阈值进行比较，当所述直流母线电压小于寿命下限阈值时，输出开关关断指令；The output end of the hysteresis comparison action unit is connected to the control end of the power distribution switch, and the hysteresis comparison action unit is used to compare the DC bus voltage with the lower limit threshold of life, when the DC bus voltage is less than the lower limit of life When the threshold is reached, the output switch turns off the command;
所述寿命检测单元还用于将所述直流母线电压与滞环环宽上限阈值进行比较，当所述直流母线电压大于滞环环宽上限阈值时，输出开关打开指令，根据开关打开指令控制配电开关打开。The life detection unit is also used to compare the DC bus voltage with the upper limit threshold of the hysteresis loop width, and when the DC bus voltage is greater than the upper limit threshold of the hysteresis loop width, output a switch opening instruction, and control the configuration according to the switch opening instruction. Electric switch is on.
可选地，所述寿命检测单元还包括：电容老化替换指示单元；Optionally, the life detection unit further includes: a capacitance aging replacement indication unit;
所述电容老化替换指示单元的控制端与滞环比较动作单元的输出端连接，所述滞环比较动作单元用于根据开关关断指令控制电容老化替换指示单元进行点亮。The control terminal of the capacitor aging replacement indicator unit is connected to the output terminal of the hysteresis comparison action unit, and the hysteresis comparison action unit is used to control the capacitor aging replacement indicator unit to light up according to the switch off instruction.
根据本发明提供的具体实施例，本发明公开了以下技术效果：According to the specific embodiments provided by the invention, the invention discloses the following technical effects:
本发明提供了一种高功率密度-长寿命高频脉冲交流电源，将电解电容阵单元设计成可插拔替换式模块单元，无需为了保证高压脉冲电源的一定的工作寿命，而成倍扩展电解电容阵单元的容量裕度，减小了电解电容阵单元的配置裕量，提高了驱动电源的功率密度；并通过寿命检测单元检测配电开关输出的直流母线电压，将直流母线电压与寿命下限阈值进行比较，当直流母线电压小于寿命下限阈值时，控制配电开关关断，提醒用户进行电解电容阵单元替换，从而实现整个电源使用寿命的延长。The present invention provides a high-power-density-long-life high-frequency pulsed AC power supply. The electrolytic capacitor array unit is designed as a pluggable and replaceable modular unit, and there is no need to expand the electrolytic power supply twice in order to ensure a certain working life of the high-voltage pulsed power supply. The capacity margin of the capacitor array unit reduces the configuration margin of the electrolytic capacitor array unit and improves the power density of the drive power supply; and the DC bus voltage output by the power distribution switch is detected by the life detection unit, and the DC bus voltage and the lower limit of the life Thresholds are compared, when the DC bus voltage is less than the lower limit threshold of life, the power distribution switch is controlled to be turned off, and the user is reminded to replace the electrolytic capacitor array unit, thereby prolonging the service life of the entire power supply.
说明书附图Instructions attached
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the accompanying drawings required in the embodiments. Obviously, the accompanying drawings in the following description are only some of the present invention. Embodiments, for those of ordinary skill in the art, other drawings can also be obtained based on these drawings without any creative effort.
图1为本发明提供的一种高功率密度-长寿命高频脉冲交流电源的结构图；Fig. 1 is a structural diagram of a high power density-long life high-frequency pulse AC power supply provided by the present invention;
图2为本发明提供的一种高功率密度-长寿命高频脉冲交流电源的基本电 路图；Fig. 2 is the basic circuit diagram of a kind of high power density-long life high-frequency pulse AC power supply provided by the present invention;
图3为本发明提供的电容负载为50pF时高频脉冲交流电源中的波形图；图3(a)为PWM驱动信号波形图，图3(b)为输出脉冲电压波形图，图3(c)为输出脉冲电流波形图，图3(d)为高压变压器原边的电流波形图；Fig. 3 is the waveform diagram in the high-frequency pulse AC power supply when the capacitive load provided by the present invention is 50pF; Fig. 3 (a) is the PWM drive signal waveform diagram, Fig. 3 (b) is the output pulse voltage waveform diagram, Fig. 3 (c ) is the output pulse current waveform diagram, and Fig. 3(d) is the current waveform diagram of the primary side of the high-voltage transformer;
图4为本发明提供的电容负载为50pF时高频脉冲交流电源中的整体趋势波形图；图4(a)为直流母线侧滤波电解电容的电压波形趋势图，图4(b)为直流母线侧滤波电解电容的电流波形趋势图，图4(c)为高频脉冲交流电源输出的脉冲电流波形趋势图；Fig. 4 is the overall trend waveform in the high-frequency pulse AC power supply when the capacitive load provided by the present invention is 50pF; Fig. 4 (a) is the voltage waveform trend diagram of the DC bus side filter electrolytic capacitor, and Fig. 4 (b) is the DC bus The current waveform trend diagram of the side filter electrolytic capacitor, Fig. 4 (c) is the pulse current waveform trend diagram output by the high-frequency pulse AC power supply;
图5为本发明提供的电容负载为50pF时高频脉冲交流电源中稳态放大后的波形图；图5(a)为直流母线侧滤波电解电容稳态放大后的电压波形图，图5(b)为直流母线侧滤波电解电容稳态放大后的电流波形图，图5(c)为高频脉冲交流电源输出的稳态放大后的脉冲电流波形图；Fig. 5 is the oscillogram after the steady state amplification in the high-frequency pulse AC power supply when the capacitive load provided by the present invention is 50pF; Fig. 5 (a) is the voltage waveform diagram after the amplified steady state of the DC bus side filter electrolytic capacitor, and Fig. 5 ( b) is the amplified current waveform diagram of the filter electrolytic capacitor on the DC bus side, and Fig. 5 (c) is the amplified pulse current waveform diagram of the high-frequency pulsed AC power output in a steady state;
图6为本发明提供的直流母线滤波电解电容阵单元老化热耗问题仿真波形图；图6(a)为直流母线电压仿真波形图，图6(b)为电容阵ESR的损耗功率曲线图，图6(c)为电容阵电流仿真波形图；Fig. 6 is the simulation waveform diagram of the aging heat consumption problem of the DC bus filter electrolytic capacitor array unit provided by the present invention; Fig. 6 (a) is the simulation waveform diagram of the DC bus voltage, and Fig. 6 (b) is the power loss curve diagram of the capacitor array ESR, Figure 6(c) is a simulation waveform diagram of the capacitor array current;
图7为本发明提供的直流母线滤波电解电容阵单元老化热耗问题稳态细节波形图；图7(a)为直流母线电压稳态细节波形图，图7(b)为寄生电阻ESR为1毫欧时电容阵ESR的损耗功率曲线图，图7(c)为寄生电阻ESR为10毫欧时电容阵ESR的损耗功率曲线图，图7(d)为寄生电阻ESR为100毫欧时电容阵ESR的损耗功率曲线图，图7(e)为电容阵电流稳态细节波形图；Fig. 7 is a steady-state detailed waveform diagram of the DC bus filter electrolytic capacitor array unit aging heat consumption problem provided by the present invention; Fig. 7 (a) is a detailed waveform diagram of the DC bus voltage steady state, and Fig. 7 (b) is a parasitic resistance ESR of 1 Figure 7(c) is the power loss curve of the capacitor array ESR when the parasitic resistance ESR is 10 milliohms, and Figure 7(d) is the capacitance when the parasitic resistance ESR is 100 milliohms The power loss curve of the array ESR, Fig. 7 (e) is the detailed waveform diagram of the current steady state of the capacitor array;
图8为传统直流母线滤波电容阵并联结构图；Fig. 8 is a parallel structure diagram of a traditional DC bus filter capacitor array;
图9为传统电容阵并联方案的热耗仿真整体趋势波形图；图9(a)为直流母线电压热耗仿真整体趋势波形图，图9(b)为电容阵ESR的损耗功率热耗仿真整体趋势曲线图，图9(c)为电容阵电流热耗仿真整体趋势波形图；Figure 9 is the overall trend waveform of the heat consumption simulation of the traditional capacitor array parallel scheme; Figure 9(a) is the overall trend waveform of the DC bus voltage heat consumption simulation, and Figure 9(b) is the overall simulation of the power loss and heat consumption of the capacitor array ESR The trend graph, Fig. 9 (c) is the overall trend waveform of the capacitor array current heat consumption simulation;
图10为传统电容阵并联方案的热耗仿真稳态细节波形图；图10(a)为直流母线电压热耗仿真稳态细节波形图，图10(b)为1path电容支路的电容阵ESR的损耗功率热耗仿真稳态细节曲线图，图10(c)为2path电容支路的电容阵ESR的损耗功率热耗仿真稳态细节曲线图，图10(d)为3path电容支路的电容阵ESR的损耗功率热耗仿真稳态细节曲线图，图10(e)为电容阵电流热耗仿真稳态 细节波形图；Figure 10 is the steady-state detailed waveform diagram of the thermal consumption simulation of the traditional capacitor array parallel scheme; Figure 10(a) is the steady-state detailed waveform diagram of the DC bus voltage heat consumption simulation; Figure 10(b) is the capacitor array ESR of the 1path capacitor branch Figure 10(c) is the steady-state detail curve of the power loss and heat consumption simulation of the capacitor array ESR of the 2path capacitor branch, and Figure 10(d) is the capacitance of the 3path capacitor branch The steady-state detailed curve diagram of the power loss heat consumption simulation of the array ESR, and Fig. 10 (e) is the steady-state detailed waveform diagram of the capacitor array current heat consumption simulation;
图11为本发明提供的直流母线滤波电解电容老化电阻时变模拟电路图；Fig. 11 is the time-varying analog circuit diagram of aging resistance of DC bus filter electrolytic capacitor provided by the present invention;
图12为本发明提供的可变电阻模型PWR模型图；Fig. 12 is the variable resistor model PWR model diagram provided by the present invention;
图13为本发明提供的saber仿真环境中母线电压波形图。Fig. 13 is a bus voltage waveform diagram in the saber simulation environment provided by the present invention.
具体实施方式detailed description
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
本发明的目的是提供一种高功率密度-长寿命高频脉冲交流电源，以实现高频脉冲交流电源的高功率密度和长寿命。The purpose of the present invention is to provide a high power density-long life high-frequency pulsed AC power supply to achieve high power density and long life of the high-frequency pulsed AC power supply.
为使本发明的上述目的、特征和优点能够更加明显易懂，下面结合附图和具体实施方式对本发明作进一步详细的说明。In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
一种高功率密度-长寿命高频脉冲交流电源，如图1所示，电源包括：高频脉冲交流电源本体、可替换插拔底座、配电开关和寿命检测单元。A high-power-density-long-life high-frequency pulsed AC power supply, as shown in Figure 1, the power supply includes: a high-frequency pulsed AC power supply body, a replaceable plug-in base, a power distribution switch and a life detection unit.
高频脉冲交流电源本体中的电解电容阵单元设置在可替换插拔底座中。The electrolytic capacitor array unit in the high-frequency pulse AC power supply body is arranged in a replaceable plug-in base.
配电开关设置在高频脉冲交流电源本体中的电解电容阵单元和逆变电路单元之间，配电开关的输出端和控制端均与寿命检测单元连接。The power distribution switch is arranged between the electrolytic capacitor array unit and the inverter circuit unit in the high-frequency pulse AC power supply body, and the output terminal and the control terminal of the power distribution switch are connected to the life detection unit.
寿命检测单元用于检测配电开关输出的直流母线电压，并将直流母线电压与寿命下限阈值进行比较，当直流母线电压小于寿命下限阈值时，输出开关关断指令。配电开关用于根据开关关断指令关断开关。The life detection unit is used to detect the DC bus voltage output by the power distribution switch, and compare the DC bus voltage with the lower life threshold. When the DC bus voltage is less than the lower life threshold, output the switch off command. The power distribution switch is used to turn off the switch according to the switch off command.
电解电容阵单元和可替换插拔底座构成可替换插拔式电解电容阵单元，该单元是将前级整流后脉动的直流电压滤波为平稳的直流母线电压，为了保证直流母线电压的脉动纹波峰峰值尽可能小，一般该单元的电容阵容值较大。同时该单元的第二个功能是为后级高频脉冲电压提供瞬时脉冲电流即脉冲功率。由于大容值和体积的限制，该单元是由大容值的电解电容构成。The electrolytic capacitor array unit and the replaceable plug-in base form a replaceable plug-in electrolytic capacitor array unit. This unit filters the pulsating DC voltage after the rectification of the previous stage into a stable DC bus voltage. In order to ensure the pulsating ripple peak of the DC bus voltage The peak value should be as small as possible, and generally the capacitor lineup value of the unit is relatively large. At the same time, the second function of the unit is to provide instantaneous pulse current, that is, pulse power, for the subsequent high-frequency pulse voltage. Due to the limitation of large capacitance and volume, the unit is composed of large-capacity electrolytic capacitors.
寿命检测单元包括：直流母线电压检测单元和滞环比较动作单元。The life detection unit includes: a DC bus voltage detection unit and a hysteresis comparison action unit.
直流母线电压检测单元的输入端与配电开关的输出端连接，直流母线电压检测单元的输出端与滞环比较动作单元的输入端连接。直流母线电压检测单元 用于检测配电开关输出的直流母线电压，并将直流母线电压传输至滞环比较动作单元。The input end of the DC bus voltage detection unit is connected to the output end of the power distribution switch, and the output end of the DC bus voltage detection unit is connected to the input end of the hysteresis comparison action unit. The DC bus voltage detection unit is used to detect the DC bus voltage output by the power distribution switch, and transmit the DC bus voltage to the hysteresis comparison action unit.
滞环比较动作单元的输出端与配电开关的控制端连接，滞环比较动作单元用于将直流母线电压与寿命下限阈值进行比较，当直流母线电压小于寿命下限阈值时，输出开关关断指令。The output end of the hysteresis comparison action unit is connected to the control end of the power distribution switch. The hysteresis comparison action unit is used to compare the DC bus voltage with the lower limit threshold of life. When the DC bus voltage is less than the lower limit threshold of life, the output switch turns off .
寿命检测单元还用于将直流母线电压与滞环环宽上限阈值进行比较，当直流母线电压大于滞环环宽上限阈值时，输出开关打开指令，根据开关打开指令控制配电开关打开。The life detection unit is also used to compare the DC bus voltage with the upper limit threshold of the hysteresis loop width, and when the DC bus voltage is greater than the upper limit threshold of the hysteresis loop width, output a switch opening instruction, and control the power distribution switch to open according to the switch opening instruction.
寿命检测单元还包括：电容老化替换指示单元。电容老化替换指示单元的控制端与滞环比较动作单元的输出端连接，滞环比较动作单元用于根据开关关断指令控制电容老化替换指示单元进行点亮。The life detection unit also includes: a capacitance aging replacement indication unit. The control terminal of the capacitor aging replacement indicator unit is connected to the output terminal of the hysteresis comparison action unit, and the hysteresis comparison action unit is used to control the capacitor aging replacement indicator unit to light up according to the switch off instruction.
电容老化替换指示单元包括：LED指示灯电路。接收到逻辑信号，小灯点亮，用于提示用户当前脉冲电源的电解电容单元使用寿命已到限，请更替电解电容阵单元配件。Capacitor aging replacement indication unit includes: LED indicator circuit. After receiving the logic signal, the small light is on, which is used to remind the user that the service life of the electrolytic capacitor unit of the current pulse power supply has expired, please replace the electrolytic capacitor array unit accessories.
配电开关为功率开关晶体管或可控继电器。该单元为整机保护开关单元，主要功能是当电源出现故障异常或检测到设定的切断逻辑功能条件时，该配电开关由导通状态变为截止状态，切断直流输入功率，从而切断后级脉冲功率输出。The power distribution switch is a power switching transistor or a controllable relay. This unit is the protection switch unit of the whole machine. Its main function is that when the power supply fails abnormally or detects the set cut-off logic function condition, the power distribution switch will change from the on state to the cut-off state, and cut off the DC input power, so that after cut-off Level pulse power output.
优选地，直流母线电压检测单元为电阻分压网络或电压互感器。Preferably, the DC bus voltage detection unit is a resistor divider network or a voltage transformer.
滞环比较动作单元的输出端与LED指示灯电路的控制端连接，LED指示灯电路用于根据开关关断指令进行点亮。The output terminal of the hysteresis comparison action unit is connected with the control terminal of the LED indicator circuit, and the LED indicator circuit is used for lighting according to the switch off instruction.
其中，高频脉冲交流电源本体包括：整流单元、电解电容阵单元、逆变电路单元、高压变压器单元和驱动电路单元。Among them, the high-frequency pulse AC power supply body includes: a rectification unit, an electrolytic capacitor array unit, an inverter circuit unit, a high-voltage transformer unit and a drive circuit unit.
整流单元的输入端与市电连接，整流单元的输出端与电解电容阵单元的输入端连接，整流单元用于将220v市电整流为脉动的直流母线电压，并将脉动的直流母线电压传输至电解电容阵单元。The input end of the rectification unit is connected to the mains, and the output end of the rectification unit is connected to the input end of the electrolytic capacitor array unit. The rectification unit is used to rectify the 220v mains into a pulsating DC bus voltage, and transmit the pulsating DC bus voltage to Electrolytic capacitor array unit.
电解电容阵单元的输出端通过配电开关与逆变电路单元的输入端连接，电解电容阵单元用于将脉动的直流母线电压滤波为平稳的直流母线电压，并将平稳的直流母线电压通过配电开关传输至逆变电路单元。The output end of the electrolytic capacitor array unit is connected to the input end of the inverter circuit unit through the power distribution switch. The electrolytic capacitor array unit is used to filter the pulsating DC bus voltage into a stable DC bus voltage, and pass the stable DC bus voltage through the distribution switch. The electric switch is transmitted to the inverter circuit unit.
逆变电路单元的输出端与高压变压器单元的输入端连接，逆变电路单元用于将平稳的直流母线电压逆变为交流方波电压，并将交流方波电压传输至高压变压器单元。The output end of the inverter circuit unit is connected to the input end of the high voltage transformer unit, and the inverter circuit unit is used to invert the stable DC bus voltage into an AC square wave voltage, and transmit the AC square wave voltage to the high voltage transformer unit.
高压变压器单元的输出端与等离子体电极负载连接，高压变压器单元用于交流方波电压转换成脉冲电压，并利用脉冲电压为等离子体电极负载供电。The output end of the high-voltage transformer unit is connected to the plasma electrode load, and the high-voltage transformer unit is used to convert the AC square wave voltage into a pulse voltage, and uses the pulse voltage to supply power to the plasma electrode load.
驱动电路单元与逆变电路单元连接，驱动电路单元用于产生方波驱动信号，并根据方波驱动信号驱动逆变电路单元的开断。The drive circuit unit is connected with the inverter circuit unit, and the drive circuit unit is used to generate a square wave drive signal, and drive the inverter circuit unit to be switched off according to the square wave drive signal.
整流单元包括4个整流二极管，或包括4个同步开关MOS晶体管。The rectification unit includes 4 rectification diodes, or 4 synchronous switching MOS transistors.
逆变电路单元包括：4个开关MOS晶体管和4个稳压管。The inverter circuit unit includes: 4 switch MOS transistors and 4 regulator tubes.
每个开关MOS晶体管的栅极和源极之间设置一个稳压管。A voltage regulator tube is arranged between the gate and the source of each switch MOS transistor.
驱动电路单元为逆变桥式电路控制芯片或数字控制器。The drive circuit unit is an inverter bridge circuit control chip or a digital controller.
本发明通过减小滤波电容的配置裕量，无需为了保证高压脉冲电源的一定的工作寿命，而成倍扩展直流母线滤波电容阵(电解电容)的容量裕度，而造成高压脉冲电源整机体积庞大，本发明提出的解决方案则很好地解决了高压脉冲电源工作时间寿命问题，可去除额外配置的电解电容裕量，极大减小驱动电源体积，提高驱动电源的功率密度，实现低温等离子体源的集成化和小型化需求。同时，对于降低电容配置裕度所带来的电解电容老化寿命问题，将直流母线滤波电解电容设计成可插拔替换式模块单元，根据电解电容老化ESR增加，容值C减小的原理，仅通过检测直流母线电压信号，并通过滞环比较单元判断直流母线电压是否超过设定的寿命保护滞环环宽，当电解电容寿命参数达到设定阈值之后，滞环比较动作单元关断直流功率输入端的配电开关，并显示电容老化替换指示信号，告知用户进行电解电容阵模块单元替换，从而实现整个电源使用寿命延长的功能。The present invention reduces the configuration margin of the filter capacitor, and does not need to double the capacity margin of the DC bus filter capacitor array (electrolytic capacitor) in order to ensure a certain working life of the high-voltage pulse power supply, resulting in the overall volume of the high-voltage pulse power supply The solution proposed by the present invention solves the problem of the working time and life of the high-voltage pulse power supply, which can remove the extra electrolytic capacitor margin, greatly reduce the volume of the driving power supply, increase the power density of the driving power supply, and realize low-temperature plasma The integration and miniaturization requirements of body sources. At the same time, for the aging life of electrolytic capacitors caused by reducing the capacitor configuration margin, the DC bus filter electrolytic capacitors are designed as pluggable and replaceable modular units. According to the principle that the aging ESR of electrolytic capacitors increases and the capacitance C decreases, only By detecting the DC bus voltage signal and judging whether the DC bus voltage exceeds the set life protection hysteresis loop width through the hysteresis comparison unit, when the life parameter of the electrolytic capacitor reaches the set threshold, the hysteresis comparison action unit shuts off the DC power input The power distribution switch at the end, and display the capacitor aging replacement indication signal, informing the user to replace the electrolytic capacitor array module unit, so as to realize the function of extending the service life of the entire power supply.
一种高功率密度-长寿命高频脉冲交流电源对应的功率变换的基本仿真电路结构示意图如图2所示，对应的详细解释说明如下：A schematic diagram of the basic simulation circuit structure of power conversion corresponding to a high-power-density-long-life high-frequency pulsed AC power supply is shown in Figure 2, and the corresponding detailed explanation is as follows:
(1)交流整流仿真电路由交流源v_sin来模拟50Hz交流市电电压，送入桥式二极管整流电流，仿真电路中的二极管采用功率理想二极管构成；amplitude表示振幅，frequency表示频率。(1) The AC rectification simulation circuit uses the AC source v_sin to simulate the 50Hz AC mains voltage, and sends it to the bridge diode to rectify the current. The diode in the simulation circuit is composed of a power ideal diode; amplitude indicates the amplitude, and frequency indicates the frequency.
(2)电解电容阵单元电路，是由单个电容和串联电阻模型来等效实际电 解电容阵单元，电容老化的过程主要体现在电容容值的减小和等效电阻值的增加，仿真电路中通过改变这两个参数值来模拟电容老化的过程。其中
Figure PCTCN2022074169-appb-000001
模型符号为saber仿真环境中测试支路电流的电流探头，两个电流探头对应的输出信号Iin为功率输入的总电流，Icap为电容阵支路的总电流，电容符号即为电解电容阵，其对应的容值仿真环境设置为4.7毫法拉(4.7m)；电感符号的电感值为0.1微亨(0.1μH)；
Figure PCTCN2022074169-appb-000002
符号表示saber仿真环境中测试支路电压的电压探头。 (2) The electrolytic capacitor array unit circuit is equivalent to the actual electrolytic capacitor array unit by a single capacitor and a series resistance model. The aging process of the capacitor is mainly reflected in the decrease of the capacitance value and the increase of the equivalent resistance value. In the simulation circuit The process of capacitor aging is simulated by changing the values of these two parameters. in
Figure PCTCN2022074169-appb-000001
The model symbol is the current probe of the test branch current in the saber simulation environment. The output signal Iin corresponding to the two current probes is the total current of the power input, and Icap is the total current of the capacitor array branch. The capacitor symbol is the electrolytic capacitor array. The corresponding capacitance simulation environment is set to 4.7 millifarads (4.7m); the inductance value of the inductance symbol is 0.1 microhenry (0.1μH);
Figure PCTCN2022074169-appb-000002
The symbol represents the voltage probe of the test branch voltage in the saber simulation environment.
(3)高频逆变仿真电路采用4个理想的开关晶体管idealmos来实现，每一个MOS开关晶体管的栅极和源极之间的添加了一个15V的稳压管，用来保护MOSFET的栅源电压不至于超限而烧毁。图1中的架构框图中的“配电开关”单元中的功率开关晶体管，体现在图2的接线位置，在电解电容阵单元的功率输出正线和高频逆变单元的功率输入正线之间，控制高频逆变单元的功率输入通断。(3) The high-frequency inverter simulation circuit is realized by four ideal switching transistors idealmos, and a 15V regulator tube is added between the gate and source of each MOS switching transistor to protect the gate-source of the MOSFET The voltage will not exceed the limit and burn out. The power switching transistor in the "power distribution switch" unit in the architecture block diagram in Figure 1 is reflected in the wiring position in Figure 2, between the power output positive line of the electrolytic capacitor array unit and the power input positive line of the high-frequency inverter unit During the interval, the power input of the high-frequency inverter unit is controlled on and off.
(4)高压变压器单元采用DC-DC理想变压器构成，仿真电路中设定原边与副边的变比为10:500，输出脉冲电压Upluse，变压器副边高压侧直接与容性负载相接，这里将等离子体电极负载等效为电容模型。(4) The high-voltage transformer unit is composed of a DC-DC ideal transformer. In the simulation circuit, the transformation ratio of the primary side and the secondary side is set to 10:500, and the output pulse voltage is Upluse. The high-voltage side of the secondary side of the transformer is directly connected to the capacitive load. Here, the plasma electrode load is equivalent to a capacitance model.
(5)驱动信号单元仿真电路采用理想的模型器件实现2路互补的PWM信号波形，其中PWM_A和PWM_D信号相同，产生50kHz，10us脉宽的方波驱动信号，PWM_B和PWM_C信号相同，产生与PWM_A互补的信号，分别送入具有隔离功能的vcvs模型，驱动高频逆变电路的桥式开关晶体管的开通关断。其中，在图2原理性仿真电路模型中，驱动信号单元电路中
Figure PCTCN2022074169-appb-000003
符号为基本与非门，处理逻辑信号功能，vp和vm分别为压控电压源vcvs模型的正线输入端和负线输入端，对应的k为vcvs将输入电压缩放的倍率，如k:1表示将输入电压乘以1，进行输出，k:3表示输将输入电压乘以3，放大3倍后输出。 (5) The driving signal unit simulation circuit uses an ideal model device to realize 2 complementary PWM signal waveforms, in which the PWM_A and PWM_D signals are the same, generating a 50kHz, 10us pulse width square wave driving signal, and the PWM_B and PWM_C signals are the same, generating the same signal as PWM_A Complementary signals are respectively sent to the vcvs model with isolation function to drive the on-off of the bridge switching transistor of the high-frequency inverter circuit. Among them, in the schematic simulation circuit model in Figure 2, in the driving signal unit circuit
Figure PCTCN2022074169-appb-000003
The symbol is the basic NAND gate, which processes logic signal functions. vp and vm are the positive line input terminal and negative line input terminal of the voltage-controlled voltage source vcvs model, and the corresponding k is the scaling factor of the input voltage by vcvs, such as k:1 Indicates that the input voltage is multiplied by 1 for output, and k:3 indicates that the input voltage is multiplied by 3, amplified by 3 times and then output.
相比于传统高频脉冲交流电源，本发明将直流母线滤波电解电容阵单元设计为可插拔替换式，并添加了直流母线电压检测单元，滞环比较动作单元，配电开关单元以及电容老化替换指示单元。直流母线电压检测单元检测直流母线电压信号，当母线电压信号超过滞环比较动作单元设定的寿命设定阈值，滞环 比较动作单元给出两类控制信号，其一控制配电开关关断，切断功率输入；其二控制信号送入电容老化替换指示单元，用于提醒用户母线滤波电解电容阵单元已达到寿命极限，需要进行电容配件替换。Compared with the traditional high-frequency pulse AC power supply, the present invention designs the DC bus filter electrolytic capacitor array unit as a pluggable and replaceable type, and adds a DC bus voltage detection unit, hysteresis comparison action unit, power distribution switch unit and capacitor aging Replace indicating unit. The DC bus voltage detection unit detects the DC bus voltage signal. When the bus voltage signal exceeds the life setting threshold set by the hysteresis comparison action unit, the hysteresis comparison action unit gives two types of control signals, one of which controls the power distribution switch to turn off, Cut off the power input; the second control signal is sent to the capacitor aging replacement indicator unit, which is used to remind the user that the bus filter electrolytic capacitor array unit has reached the life limit, and capacitor accessories need to be replaced.
本发明提出的方案可以极大减小母线滤波电容的数目裕量，且不会影响最终的脉冲功率输出，在保证电源寿命的前提下，很好地解决了低温等离子体源装置的集成化问题，有助于实现了低温等离子体源的小型化功能需求。同时只需简单检测直流母线电压，替换电容阵配件单元，便可实现整个驱动电源的长寿命功能，从而保障低温等离子体源的寿命和可靠性。The solution proposed by the invention can greatly reduce the number margin of the bus filter capacitor, and will not affect the final pulse power output. On the premise of ensuring the life of the power supply, it can well solve the problem of integration of the low-temperature plasma source device , which helps to realize the miniaturization functional requirements of the low-temperature plasma source. At the same time, it only needs to simply detect the DC bus voltage and replace the capacitor array accessory unit to realize the long-life function of the entire driving power supply, thereby ensuring the life and reliability of the low-temperature plasma source.
本发明的原理说明及实验验证：Principle description and experimental verification of the present invention:
1.1高频脉冲交流电源直流母线滤波电解电容单元寿命问题1.1 The life of the electrolytic capacitor unit for the DC bus filter of the high-frequency pulse AC power supply
相比于普通工业级开关电源而言，应用于低温等离子体电极放电领域的高频脉冲交流电源中所存在的直流母线滤波电解电容的使用寿命问题会更加严重。其中该寿命问题的仿真分析波形如图3-5所示，图3为高频脉冲交流电源带50pF的电容负载，输出+/-10kV脉冲电压波形U pluse，I pluse为输出脉冲电流波形，I pri为高压变压器原边的电流波形；图4为直流母线侧滤波电解电容的电压U cap和电流I cap波形；图5为图4稳态放大后的波形。图3-5的横坐标均为时间t，单位为秒(s)。 Compared with ordinary industrial-grade switching power supplies, the service life of DC bus filter electrolytic capacitors in high-frequency pulsed AC power supplies used in the field of low-temperature plasma electrode discharge will be more serious. The simulation analysis waveform of the life problem is shown in Figure 3-5. Figure 3 shows the high-frequency pulse AC power supply with a 50pF capacitive load, and the output +/-10kV pulse voltage waveform U pluse , I pluse is the output pulse current waveform, I pluse pri is the current waveform of the primary side of the high-voltage transformer; Figure 4 is the voltage U cap and current I cap waveforms of the filter electrolytic capacitor on the DC bus side; Figure 5 is the amplified steady-state waveform of Figure 4. The abscissa in Fig. 3-5 is time t, and the unit is second (s).
由图3-5可以看出，高频脉冲交流电源输出端驱动等离子体容性负载50pF条件下，输出脉冲电流I pluse幅值可达到2.25A级别，对应的高压变压器原边电流I pri为112.5A。并同时观测图4和图5的电解电容阵波形，在ReginA阶段为电解电容储能阶段，ReginB阶段为电解电容放电阶段，母线电压波动峰峰值为10V，电解电容阵放电峰值电流可达131A，充电峰值电流可达-140A。该仿真结果设置电解电容的寄生电阻ESR为1毫欧，反映电解电容的寿命初期，主要可以观察到高频脉冲交流电源内部的母线滤波电解电容阵单元的额定工况，是以极高的脉冲尖峰电流功率形式，更容易加速电解电容阵的老化。 It can be seen from Figure 3-5 that under the condition that the output terminal of the high-frequency pulse AC power supply drives a plasma capacitive load of 50pF, the amplitude of the output pulse current I pluse can reach 2.25A, and the corresponding high-voltage transformer primary current I pri is 112.5 a. And observe the electrolytic capacitor array waveforms in Figure 4 and Figure 5 at the same time. In the ReginA stage, the electrolytic capacitor energy storage stage, and in the ReginB stage, the electrolytic capacitor discharge stage. The bus voltage fluctuation peak-to-peak value is 10V, and the electrolytic capacitor array discharge peak current can reach 131A. The charging peak current can reach -140A. The simulation results set the parasitic resistance ESR of the electrolytic capacitor to 1 milliohm, which reflects the initial life of the electrolytic capacitor. It can be mainly observed that the rated working condition of the bus filter electrolytic capacitor array unit inside the high-frequency pulse AC power supply is based on a very high pulse The peak current power form is more likely to accelerate the aging of the electrolytic capacitor array.
随着电解电容的老化，其内部对应的ESR值会逐渐增加，容值C会逐渐减小，由于容值C的减小直接造成母线电压波动峰峰值的增加，与本发明的方案利用的原理相同，故本发明方案更关注寄生电阻ESR的变化，所带来的老化问题分析。图6-7给出在电解电容阵容值不变，ESR变大分别为1毫欧， 10毫欧，100毫欧的仿真波形，其中U cap为直流母线电压，P cap为电容阵ESR的损耗功率，I cap为电容阵电流。 As the electrolytic capacitor ages, its internal corresponding ESR value will gradually increase, and the capacitance C will gradually decrease. Due to the reduction of the capacitance C, the peak-to-peak value of the bus voltage fluctuation will directly increase, which is consistent with the principle of the scheme of the present invention. Similarly, the solution of the present invention pays more attention to the change of the parasitic resistance ESR and the analysis of the aging problem caused by it. Figure 6-7 shows the simulation waveforms when the value of the electrolytic capacitor lineup remains unchanged and the ESR increases to 1 milliohm, 10 milliohm, and 100 milliohm respectively, where U cap is the DC bus voltage, and P cap is the loss of the ESR of the capacitor array Power, I cap is the capacitor array current.
由图6-7的电解电容ESR寄生电阻R cap变化所对应的功率和电气波形可以看出，随着R cap的增加，直流母线电压波动峰峰值逐渐增加，分别为9.8V，9.5V，23V；电容电流峰值逐渐减小，分别为131A，129A，112A；电容阵热耗峰值功率P cap显著增加，分别为17W，167W，1265W。所以，随着高频脉冲交流电源内的直流母线滤波电解电容阵老化ESR的增加，电容内部的耗散功率呈指数倍率增加，从而导致电解电容单元发热严重，长时间运行可能会导致电容阵爆炸，引发安全事故问题。 From the power and electrical waveforms corresponding to the change of the ESR parasitic resistance R cap of the electrolytic capacitor in Figure 6-7, it can be seen that with the increase of R cap , the peak-to-peak value of the DC bus voltage fluctuation gradually increases, respectively 9.8V, 9.5V, and 23V ; The peak value of the capacitor current decreases gradually, which are 131A, 129A, and 112A respectively; the peak power P cap of the heat consumption of the capacitor array increases significantly, which are 17W, 167W, and 1265W respectively. Therefore, as the aging ESR of the DC bus filter electrolytic capacitor array in the high-frequency pulse AC power supply increases, the dissipated power inside the capacitor increases exponentially, resulting in serious heating of the electrolytic capacitor unit, and long-term operation may cause the capacitor array to explode. , leading to safety accidents.
1.2传统直流母线滤波电容单元结构1.2 Traditional DC bus filter capacitor unit structure
传统工业级开关电源为了解决电解电容老化ESR变大的问题，通常采用多个电容阵支路并联的形式来成倍减小电容单元整体的寄生电阻大小，其结构方案示意图如图8所示，保持总电容容值和单条电容支路的ESR不变的条件下，对1path电容支路，2path电容支路和3path电容支路，进行热耗叠加仿真，即P cap＝P cap1+P cap2+P cap3，仿真结果如图9-10所示。 In order to solve the problem of increasing ESR due to the aging of electrolytic capacitors, traditional industrial-grade switching power supplies usually use multiple capacitor array branches in parallel to reduce the overall parasitic resistance of the capacitor unit by multiples. The schematic diagram of its structural scheme is shown in Figure 8. Under the condition of keeping the total capacitor value and the ESR of a single capacitor branch unchanged, conduct heat consumption superposition simulation for 1path capacitor branch, 2path capacitor branch and 3path capacitor branch, that is, P cap = P cap1 + P cap2 + P cap3 , the simulation results are shown in Figure 9-10.
由图9-10可以看出，随着电容阵并联支路的增加，其直流母线电压波动幅值逐渐减小，即为23V，18V，14V；电容阵峰值电流变化不大，分别为112A，120A，124A；电容阵总的耗散功率峰值逐渐减小，分别为1257W，720W，514W。综合分析可知，添加电容阵支路的方式确实可以一定的解决电容阵单元的峰值耗散功率，但是其电容体积也是成倍增加，而对耗散峰值功率的减小并非成倍减小，故这种以牺牲电源体积为代价，热耗问题也并未获得显著解决，在高频脉冲交流电源领域并不适用，同样无法解决常态运行的问题。It can be seen from Figure 9-10 that with the increase of parallel branches of the capacitor array, the DC bus voltage fluctuation amplitude gradually decreases, namely 23V, 18V, and 14V; the peak current of the capacitor array does not change much, respectively 112A, 120A, 124A; the total peak power dissipation of the capacitor array gradually decreases to 1257W, 720W, 514W respectively. A comprehensive analysis shows that adding capacitor array branches can indeed solve the peak power dissipation of the capacitor array unit, but its capacitor volume is also doubled, and the reduction of the peak power dissipation is not doubled, so At the cost of sacrificing the size of the power supply, the problem of heat consumption has not been significantly solved, and it is not applicable to the field of high-frequency pulsed AC power supply, nor can it solve the problem of normal operation.
1.3直流母线滤波电解电容寿命检测方法原理1.3 Principle of life detection method of DC bus filter electrolytic capacitor
由已知理论研究结论，电解电容老化带来的参数变化为容值逐渐减小，寄生电阻逐渐增加，且已知电容容值的减小会导致直流母线电压波动的峰峰值增加。本发明提出的电解电容检测方法是基于ESR的增加，对直流母线电压波动峰峰值的影响程度。其原理仿真示意图如图11所示，在线逐渐变化等效寄生电阻R cap_esr为0.001欧，0.01欧，0.05欧，0.1欧，saber仿真环境中用可变电阻模型PWR模型，如图12所示，对应的母线电压波形如图13所示，设定 的电容寿命阈值寄生电阻为0.05欧。 According to the known theoretical research conclusions, the parameter changes caused by the aging of electrolytic capacitors are the gradual decrease in capacitance and the gradual increase in parasitic resistance, and it is known that the decrease in capacitance will lead to an increase in the peak-to-peak value of DC bus voltage fluctuations. The electrolytic capacitor detection method proposed by the present invention is based on the influence degree of the increase of ESR on the peak-to-peak value of the DC bus voltage fluctuation. The principle simulation schematic diagram is shown in Figure 11. The equivalent parasitic resistance R cap_esr gradually changes online to 0.001 ohms, 0.01 ohms, 0.05 ohms, and 0.1 ohms. The variable resistance model PWR model is used in the saber simulation environment, as shown in Figure 12. The corresponding bus voltage waveform is shown in Figure 13, and the parasitic resistance of the capacitor life threshold is set to 0.05 ohms.
由图13可以看出随着电解电容老化寄生电阻的增加，其母线电压波动峰峰值显著增加，且电压波动增加的幅度要大于老化电容值减小带来波动幅度，即电解电容老化过程中，不管是容值的减小还是寄生电阻值的增加，母线电压波形峰峰值都会随之正相关增加，可按照该逻辑设计电解电容阵寿命阈值判断的标准。It can be seen from Figure 13 that with the increase of the aging parasitic resistance of the electrolytic capacitor, the peak-to-peak value of the bus voltage fluctuation increases significantly, and the amplitude of the voltage fluctuation increase is greater than the fluctuation amplitude caused by the decrease of the aging capacitance value, that is, during the aging process of the electrolytic capacitor, Regardless of the decrease in capacitance or the increase in parasitic resistance, the peak-to-peak value of the bus voltage waveform will increase in positive correlation. The criteria for judging the life threshold of the electrolytic capacitor array can be designed according to this logic.
本发明提出可简单的采样直流母线电压，按照设定的老化寄生电阻阻值R cap_esr(0.05欧)所对应的滞环电压门限值U th_H和U th_L(220V和203V)，来作为判断电解电容阵寿命阈值到达的标准，是具备理论依据，可以进行工程实际应用。 The present invention proposes that the DC bus voltage can be simply sampled, and the hysteresis voltage thresholds U th_H and U th_L (220V and 203V) corresponding to the set aging parasitic resistance resistance R cap_esr (0.05 ohms) can be used as judgment electrolytic The standard for reaching the life threshold of the capacitor array has a theoretical basis and can be applied in engineering practice.
本发明的优点：Advantages of the present invention:
1)本发明相比于传统高频脉冲交流电源，体积更小，功率密度更高，可实现低温等离子体源装置的集成化和小型化；1) Compared with the traditional high-frequency pulsed AC power supply, the present invention has smaller volume and higher power density, and can realize the integration and miniaturization of the low-temperature plasma source device;
2)本发明相比于传统高频脉冲交流电源，寿命薄弱环节的直流母线滤波电解电容阵设计成插拔可替换式，整机总体使用寿命增加，可靠性更高；2) Compared with the traditional high-frequency pulsed AC power supply, the DC bus filter electrolytic capacitor array, which is the weak link in the life of the present invention, is designed to be pluggable and replaceable, so the overall service life of the whole machine is increased and the reliability is higher;
3)本发明相比于传统高频脉冲交流电源，在电路结构上添加简单时时监测直流母线电压环节，设计滞环比较动作单元，实现电容寿命的时时监测和指示功能；3) Compared with the traditional high-frequency pulse AC power supply, the present invention adds a simple link to constantly monitor the DC bus voltage in the circuit structure, and designs a hysteresis loop comparison action unit to realize the constant monitoring and indication function of the capacitor life;
4)本发明相比于传统工业级开关电源，其电解电容寿命监测方法更简单，通过研究直流母线滤波电容老化特性规律，即电容容值减小，老化电阻增加的特点，直接带来母线电压波动峰峰值的显著变化，提出直接通过设定母线电压波动滞环环宽值，来间接反映老化寿命阈值参数，实现寿命时时监测功能，更有利于应用实际工程应用。4) Compared with the traditional industrial-grade switching power supply, the present invention has a simpler electrolytic capacitor life monitoring method. By studying the aging characteristics of DC bus filter capacitors, that is, the characteristics of capacitor capacitance reduction and aging resistance increase directly bring bus voltage Significant changes in the peak-to-peak value of fluctuations, it is proposed to directly reflect the aging life threshold parameters by directly setting the bus voltage fluctuation hysteresis loop width value, and realize the real-time monitoring function of life, which is more conducive to the application of practical engineering applications.
本说明书中各个实施例采用递进的方式描述，每个实施例重点说明的都是与其他实施例的不同之处，各个实施例之间相同相似部分互相参见即可。Each embodiment in this specification is described in a progressive manner, each embodiment focuses on the difference from other embodiments, and the same and similar parts of each embodiment can be referred to each other.
本文中应用了具体个例对本发明的原理及实施方式进行了阐述，以上实施例的说明只是用于帮助理解本发明的方法及其核心思想；同时，对于本领域的一般技术人员，依据本发明的思想，在具体实施方式及应用范围上均会有改变之处。综上所述，本说明书内容不应理解为对本发明的限制。In this paper, specific examples have been used to illustrate the principle and implementation of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea; meanwhile, for those of ordinary skill in the art, according to the present invention Thoughts, there will be changes in specific implementation methods and application ranges. In summary, the contents of this specification should not be construed as limiting the present invention.

Claims (10)

  1. 一种高功率密度-长寿命高频脉冲交流电源，其特征在于，所述电源包括：高频脉冲交流电源本体、可替换插拔底座、配电开关和寿命检测单元；A high-power-density-long-life high-frequency pulsed AC power supply, characterized in that the power supply includes: a high-frequency pulsed AC power supply body, a replaceable plug-in base, a power distribution switch, and a life detection unit;
    所述高频脉冲交流电源本体中的电解电容阵单元设置在可替换插拔底座中；所述配电开关设置在高频脉冲交流电源本体中的电解电容阵单元和逆变电路单元之间，所述配电开关的输出端和控制端均与寿命检测单元连接；The electrolytic capacitor array unit in the high-frequency pulse AC power supply body is arranged in a replaceable plug-in base; the power distribution switch is arranged between the electrolytic capacitor array unit and the inverter circuit unit in the high-frequency pulse AC power supply body, Both the output end and the control end of the power distribution switch are connected to the life detection unit;
    所述寿命检测单元用于检测配电开关输出的直流母线电压，并将所述直流母线电压与寿命下限阈值进行比较，当所述直流母线电压小于寿命下限阈值时，输出开关关断指令；所述配电开关用于根据开关关断指令关断开关。The life detection unit is used to detect the DC bus voltage output by the power distribution switch, and compare the DC bus voltage with the lower limit threshold of life, and when the DC bus voltage is less than the lower limit threshold of life, output a switch off command; The power distribution switch is used to turn off the switch according to the switch off command.
  2. 根据权利要求1所述的高功率密度-长寿命高频脉冲交流电源，其特征在于，所述寿命检测单元包括：直流母线电压检测单元和滞环比较动作单元；The high-power-density-long-life high-frequency pulse AC power supply according to claim 1, wherein the life detection unit includes: a DC bus voltage detection unit and a hysteresis comparison action unit;
    所述直流母线电压检测单元的输入端与配电开关的输出端连接，所述直流母线电压检测单元的输出端与滞环比较动作单元的输入端连接；所述直流母线电压检测单元用于检测配电开关输出的直流母线电压，并将所述直流母线电压传输至滞环比较动作单元；The input end of the DC bus voltage detection unit is connected to the output end of the power distribution switch, and the output end of the DC bus voltage detection unit is connected to the input end of the hysteresis comparison action unit; the DC bus voltage detection unit is used to detect Distributing the DC bus voltage output by the power switch, and transmitting the DC bus voltage to the hysteresis comparison action unit;
    所述滞环比较动作单元的输出端与配电开关的控制端连接，所述滞环比较动作单元用于将所述直流母线电压与寿命下限阈值进行比较，当所述直流母线电压小于寿命下限阈值时，输出开关关断指令；The output end of the hysteresis comparison action unit is connected to the control end of the power distribution switch, and the hysteresis comparison action unit is used to compare the DC bus voltage with the lower limit threshold of life, when the DC bus voltage is less than the lower limit of life When the threshold is reached, the output switch turns off the command;
    所述寿命检测单元还用于将所述直流母线电压与滞环环宽上限阈值进行比较，当所述直流母线电压大于滞环环宽上限阈值时，输出开关打开指令，根据开关打开指令控制配电开关打开。The life detection unit is also used to compare the DC bus voltage with the upper limit threshold of the hysteresis loop width, and when the DC bus voltage is greater than the upper limit threshold of the hysteresis loop width, output a switch opening instruction, and control the configuration according to the switch opening instruction. Electric switch is on.
  3. 根据权利要求1所述的高功率密度-长寿命高频脉冲交流电源，其特征在于，所述寿命检测单元还包括：电容老化替换指示单元；The high-power-density-long-life high-frequency pulse AC power supply according to claim 1, wherein the life detection unit further comprises: a capacitance aging replacement indication unit;
    所述电容老化替换指示单元的控制端与滞环比较动作单元的输出端连接，所述滞环比较动作单元用于根据开关关断指令控制电容老化替换指示单元进行点亮。The control terminal of the capacitor aging replacement indicator unit is connected to the output terminal of the hysteresis comparison action unit, and the hysteresis comparison action unit is used to control the capacitor aging replacement indicator unit to light up according to the switch off command.
  4. 根据权利要求1所述的高功率密度-长寿命高频脉冲交流电源，其特征在于，所述配电开关为功率开关晶体管或可控继电器。The high-power-density-long-life high-frequency pulse AC power supply according to claim 1, wherein the power distribution switch is a power switching transistor or a controllable relay.
  5. 根据权利要求2所述的高功率密度-长寿命高频脉冲交流电源，其特征在于，所述直流母线电压检测单元为电阻分压网络或电压互感器；所述滞环比 较动作单元包括滞环比较器。The high-power-density-long-life high-frequency pulsed AC power supply according to claim 2, wherein the DC bus voltage detection unit is a resistor divider network or a voltage transformer; the hysteresis comparison action unit includes a hysteresis Comparators.
  6. 根据权利要求3所述的高功率密度-长寿命高频脉冲交流电源，其特征在于，所述电容老化替换指示单元包括：LED指示灯电路；The high-power-density-long-life high-frequency pulse AC power supply according to claim 3, characterized in that, the capacitor aging replacement indicator unit comprises: an LED indicator circuit;
    滞环比较动作单元的输出端与LED指示灯电路的控制端连接，所述LED指示灯电路用于根据开关关断指令进行点亮。The output terminal of the hysteresis comparison action unit is connected to the control terminal of the LED indicator circuit, and the LED indicator circuit is used for lighting according to the switch off command.
  7. 根据权利要求1所述的高功率密度-长寿命高频脉冲交流电源，其特征在于，所述高频脉冲交流电源本体包括：整流单元、电解电容阵单元、逆变电路单元、高压变压器单元和驱动电路单元；The high-power-density-long-life high-frequency pulsed AC power supply according to claim 1, wherein the high-frequency pulsed AC power supply body includes: a rectifier unit, an electrolytic capacitor array unit, an inverter circuit unit, a high-voltage transformer unit and drive circuit unit;
    整流单元的输入端与市电连接，整流单元的输出端与电解电容阵单元的输入端连接，整流单元用于将220v市电整流为脉动的直流母线电压，并将脉动的直流母线电压传输至电解电容阵单元；The input end of the rectification unit is connected to the mains, and the output end of the rectification unit is connected to the input end of the electrolytic capacitor array unit. The rectification unit is used to rectify the 220v mains into a pulsating DC bus voltage, and transmit the pulsating DC bus voltage to Electrolytic capacitor array unit;
    电解电容阵单元的输出端通过配电开关与逆变电路单元的输入端连接，所述电解电容阵单元用于将脉动的直流母线电压滤波为平稳的直流母线电压，并将平稳的直流母线电压通过配电开关传输至逆变电路单元；The output end of the electrolytic capacitor array unit is connected to the input end of the inverter circuit unit through a power distribution switch, and the electrolytic capacitor array unit is used to filter the pulsating DC bus voltage into a stable DC bus voltage, and convert the stable DC bus voltage It is transmitted to the inverter circuit unit through the power distribution switch;
    逆变电路单元的输出端与高压变压器单元的输入端连接，所述逆变电路单元用于将平稳的直流母线电压逆变为交流方波电压，并将交流方波电压传输至高压变压器单元；The output end of the inverter circuit unit is connected to the input end of the high voltage transformer unit, and the inverter circuit unit is used to invert the stable DC bus voltage into an AC square wave voltage, and transmit the AC square wave voltage to the high voltage transformer unit;
    高压变压器单元的输出端与等离子体电极负载连接，所述高压变压器单元用于交流方波电压转换成脉冲电压，并利用所述脉冲电压为等离子体电极负载供电；The output end of the high-voltage transformer unit is connected to the plasma electrode load, and the high-voltage transformer unit is used to convert the AC square wave voltage into a pulse voltage, and uses the pulse voltage to supply power to the plasma electrode load;
    驱动电路单元与逆变电路单元连接，所述驱动电路单元用于产生方波驱动信号，并根据方波驱动信号驱动逆变电路单元的开断。The drive circuit unit is connected with the inverter circuit unit, and the drive circuit unit is used to generate a square wave drive signal, and drive the inverter circuit unit to switch on and off according to the square wave drive signal.
  8. 根据权利要求7所述的高功率密度-长寿命高频脉冲交流电源，其特征在于，所述整流单元包括4个整流二极管，或包括4个同步开关MOS晶体管。The high power density-long life high-frequency pulse AC power supply according to claim 7, wherein the rectification unit includes 4 rectification diodes, or 4 synchronous switching MOS transistors.
  9. 根据权利要求7所述的高功率密度-长寿命高频脉冲交流电源，其特征在于，所述逆变电路单元包括：4个开关MOS晶体管和4个稳压管；The high-power-density-long-life high-frequency pulse AC power supply according to claim 7, wherein the inverter circuit unit includes: 4 switching MOS transistors and 4 voltage regulator tubes;
    每个开关MOS晶体管的栅极和源极之间设置一个稳压管。A voltage regulator tube is arranged between the gate and the source of each switch MOS transistor.
  10. 根据权利要求7所述的高功率密度-长寿命高频脉冲交流电源，其特征在于，所述驱动电路单元为逆变桥式电路控制芯片或数字控制器。The high-power-density-long-life high-frequency pulse AC power supply according to claim 7, wherein the drive circuit unit is an inverter bridge circuit control chip or a digital controller.
PCT/CN2022/074169 2021-06-25 2022-01-27 High-power density, long-life and high-frequency pulse ac power supply WO2022267473A1 (en)

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