WO2022254804A1 - Dispositif de vibration elliptique, procédé de vibration, dispositif de division de pièce à travailler, dispositif de transfert de vibration, dispositif de vibration de pièce à travailler et dispositif de sérigraphie - Google Patents

Dispositif de vibration elliptique, procédé de vibration, dispositif de division de pièce à travailler, dispositif de transfert de vibration, dispositif de vibration de pièce à travailler et dispositif de sérigraphie Download PDF

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Publication number
WO2022254804A1
WO2022254804A1 PCT/JP2022/005459 JP2022005459W WO2022254804A1 WO 2022254804 A1 WO2022254804 A1 WO 2022254804A1 JP 2022005459 W JP2022005459 W JP 2022005459W WO 2022254804 A1 WO2022254804 A1 WO 2022254804A1
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WIPO (PCT)
Prior art keywords
plate
vibration
vibrators
work
vibrator
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PCT/JP2022/005459
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English (en)
Japanese (ja)
Inventor
義高 伊藤
茂 原田
順一 小倉
征士 岡本
茂 飯田
実 小川
充志 丸山
邦貴 長谷川
祥世 渡邊
昌人 古畑
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マイクロ・テック株式会社
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Priority to TW111113759A priority Critical patent/TW202300428A/zh
Publication of WO2022254804A1 publication Critical patent/WO2022254804A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/10—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of mechanical energy
    • B06B1/12—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of mechanical energy operating with systems involving reciprocating masses
    • B06B1/14—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of mechanical energy operating with systems involving reciprocating masses the masses being elastically coupled
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H3/00—Separating articles from piles
    • B65H3/46—Supplementary devices or measures to assist separation or prevent double feed
    • B65H3/60—Loosening articles in piles
    • B65H3/62—Loosening articles in piles by swinging, agitating, or knocking the pile

Definitions

  • the present invention relates to an elliptical vibrating device, a vibration method, a work separating device, a vibrating transfer device, a work vibrating device, and a screen printing device.
  • the present invention provides a vibrating device with uniform vibration.
  • the elliptical vibration device of the present invention is a plate; a plurality of vibrators; a plurality of distributors for transmitting the vibrations of the plurality of vibrators to the plate, with the vibrating directions of the plurality of vibrators oblique to the plate, the plurality of vibrators being fixed outside the side of the plate, and transmitting the vibrations of the plurality of vibrators to the plate; and a controller for controlling vibrations of the plurality of vibrators.
  • the vibration of the plate becomes uniform by obliquely vibrating the plate with a plurality of vibrators to generate elliptical vibration in the plate.
  • FIG. 1 is a perspective view of an elliptical vibration device 100 according to Embodiment 1.
  • FIG. 1 is a front view of the elliptical vibration device 100 of Embodiment 1.
  • FIG. 1 is a side view of elliptical vibration device 100 of Embodiment 1.
  • FIG. It is an explanatory view of standing wave vibration.
  • 4A and 4B are explanatory diagrams of elliptical vibration, standing wave vibration, and deflection in Embodiment 1.
  • FIG. FIG. 3 is an explanatory diagram of elliptical vibration according to Embodiment 1;
  • FIG. 3 is an explanatory diagram of elliptical vibration according to Embodiment 1;
  • FIG. 4 is a diagram showing a modification of the distributor 47 of the first embodiment;
  • FIG. 4 is a diagram showing a modification of the distributor 47 of the first embodiment;
  • FIG. FIG. 4 is a diagram showing a modification of the elliptical vibration device 100 of Embodiment 1;
  • FIG. 4 is a diagram showing a modification of the elliptical vibration device 100 of Embodiment 1;
  • 4A and 4B are diagrams showing a modification of the plate 20 of the first embodiment;
  • FIG. 4A and 4B are diagrams showing a modification of the plate 20 of the first embodiment;
  • FIG. FIG. 11 is a perspective view of a work separating device 200 according to Embodiment 2;
  • FIG. 11 is a front view of the workpiece separation device 200 of Embodiment 2;
  • FIG. 11 is a side view of the workpiece separation device 200 of Embodiment 2;
  • FIG. 10 is a diagram of a suction surface 19 according to Embodiment 2; It is a figure which shows the work separation method of Embodiment 2.
  • FIG. It is a figure which shows the work separation method of Embodiment 2.
  • FIG. It is a figure which shows the work separation method of Embodiment 2.
  • FIG. It is a figure which shows the work separation method of Embodiment 2.
  • FIG. It is a figure which shows the work separation method of Embodiment 2.
  • FIG. 10 is a figure which shows the work separation method of Embodiment 2.
  • FIG. 10 is an explanatory diagram of standing wave vibration of Embodiment 2;
  • FIG. 10 is an explanatory diagram of elliptical vibration according to Embodiment 2;
  • FIG. 10 is a diagram showing a modification of the workpiece separation device 200 of Embodiment 2;
  • FIG. 10 is a diagram showing a modification of the workpiece separation device 200 of Embodiment 2;
  • FIG. 10 is a
  • FIG. 10 is a diagram showing a modification of the workpiece separation device 200 of Embodiment 2;
  • FIG. 10 is a diagram showing a modification of the workpiece separation device 200 of Embodiment 2;
  • FIG. 10 is a diagram showing a modification of the workpiece separation device 200 of Embodiment 2;
  • FIG. 10 is a diagram showing a modification of the plate 20 of the second embodiment;
  • FIG. 10 is a diagram showing a modification of the workpiece separation device 200 of Embodiment 2;
  • FIG. 11 is a perspective view of a vibration transfer device 300 of Embodiment 3;
  • FIG. 11 is a perspective view of a modification of the vibration transfer device 300 of Embodiment 3;
  • FIG. 11 is a perspective view of a modification of the vibration transfer device 300 of Embodiment 3;
  • FIG. 11 is a perspective view of a modification of the vibration transfer device 300 of Embodiment 3;
  • FIG. 10 is a perspective view of a modification of the vibration transfer device 300 of
  • FIG. 11 is a perspective view of a modification of the vibration transfer device 300 of Embodiment 3;
  • FIG. 11 is a perspective view of a modification of the vibration transfer device 300 of Embodiment 3;
  • FIG. 11 is a perspective view of a vertical vibration device 400 and a workpiece vibration device 500 according to Embodiment 4;
  • FIG. 11 is a perspective view of a work vibrating device 500 according to Embodiment 4;
  • FIG. 11 is a front view of a vertical vibration device 400 and a workpiece vibration device 500 according to Embodiment 4;
  • FIG. 11 is a side view of a vertical vibration device 400 and a work vibration device 500 according to Embodiment 4;
  • FIG. 11 is a perspective view of a modification of the vibration transfer device 300 of Embodiment 3;
  • FIG. 11 is a perspective view of a modification of the vibration transfer device 300 of Embodiment 3;
  • FIG. 11 is a perspective view of a vertical vibration device 400 and a workpiece vibration device
  • FIG. 10 is a diagram showing a workpiece 900 according to Embodiment 4; It is a figure which shows the vertical vibration method and work vibration method of Embodiment 4.
  • FIG. It is a figure which shows the vertical vibration method and work vibration method of Embodiment 4.
  • FIG. It is a figure which shows the vertical vibration method and work vibration method of Embodiment 4.
  • FIG. It is a figure which shows the vertical vibration method and work vibration method of Embodiment 4.
  • FIG. 10 is a diagram showing a workpiece 900 and a component 901 according to Embodiment 4;
  • FIG. 11 is a front view of a screen printing apparatus 700 of Embodiment 5;
  • FIG. 11 is a perspective view of a table unit 710 of a screen printing apparatus 700 according to Embodiment 5;
  • FIG. 11 is a perspective view of a screen plate unit 720 of a screen printing apparatus 700 according to Embodiment 5;
  • FIG. 11 is a perspective view of a squeegee unit 730 of a screen printing apparatus 700 according to Embodiment 5;
  • Embodiment 1 an elliptical vibration device 100 will be described.
  • a workpiece separation device 200 will be described.
  • a vibration transfer device 300 will be described.
  • a vertical vibration device 400 and a workpiece vibration device 500 will be described.
  • a screen printing apparatus 700 will be described.
  • FIG. 1 is a perspective view of an elliptical vibration device 100 according to Embodiment 1.
  • FIG. 2 is a front view of the elliptical vibration device 100 of Embodiment 1.
  • FIG. 3 is a side view of the elliptical vibration device 100 of Embodiment 1.
  • X indicates the left-right direction.
  • Y indicates the front-rear direction.
  • Z indicates the vertical direction.
  • the elliptical vibration device 100 has a base 10 , a plate 20 , a vibration unit 40 and a controller 80 .
  • the elliptical vibration device 100 causes the plate 20 to elliptically vibrate in the YZ plane, and vertically vibrates the plate 20 in the XZ plane.
  • the base 10 has a rectangular plate shape.
  • the plate 20 has a rectangular plate shape.
  • the plate 20 is desirably made of a material that easily transmits sound waves, and metal is preferable.
  • the material of the plate 20 is desirably aluminum, titanium, or stainless steel.
  • the material of the plate 20 is preferably aluminum or titanium, with aluminum being the best.
  • Plate 20 is desirably rectangular, preferably square.
  • the plate 20 has a surface 21 on the top, a back surface 22 on the bottom and four sides 23 on the sides.
  • the front surface 21 and the back surface 22 are parallel rectangular planes of the same shape.
  • Side 23 is the surface between front surface 21 and rear surface 22 of plate 20 .
  • Side 23 is a plane perpendicular to front surface 21 and rear surface 22 of plate 20 .
  • Plate 20 has a plurality of screw holes for securing screws 25 around surface 21 .
  • a total of four screw holes are provided in the center of the left and right sides of the plate 20 .
  • the positions of the screw holes are hereinafter referred to
  • the elliptical vibration device 100 has four vibration absorbers 11 . At four corners of the upper surface of the base 10, the lower portions of four vibration absorbing portions 11 are fixed. Upper parts of four vibration absorbing parts 11 are fixed to four corners of the back surface 22 of the plate 20 .
  • the base 10 has four fixed shafts 12 on its upper surface.
  • Plate 20 has four fixed shafts 13 on back surface 22 .
  • the vibration absorbing portion 11 fixes the fixed shaft 12 and the fixed shaft 13 .
  • a specific example of the vibration absorber 11 is a coupling member or joint member that connects the plate 20 and the base 10 .
  • the vibration absorbing portion 11 absorbs the vibration of the plate 20 and prevents the vibration of the plate 20 from being transmitted to the base 10 .
  • the vibration absorbing portion 11 ensures free vibration of the plate 20 with respect to the base 10 .
  • the vibration absorbing portion 11 is configured to place the plate 20 on the base 10 so as to be able to vibrate.
  • An ideal vibration absorber 11 does not generate any resistance to the vibration of the plate 20 .
  • the position in the left-right direction of the vertical axis passing through the centers of the vibration absorbing portion 11, the fixed shaft 12, and the fixed shaft 13 is the same as the position of the screw 25 (fixed portion 24).
  • a suitable example of the vibration absorbing portion 11 is a coupling (shaft joint) manufactured by Miki Pulley Co., Ltd.
  • the vertical vibration device 400 does not use the transmission function of a coupling (shaft joint).
  • the vertical vibration device 400 uses the mounting error tolerance function and vibration absorption function of the coupling (shaft coupling).
  • a coupling that allows greater end play (axial displacement) than eccentricity (parallel displacement) and declination (angular displacement) among the mounting error tolerance functions.
  • Couplings include an ultra-high-rigidity rigid coupling that absorbs only the end play (axial displacement) without absorbing the misalignment between the fixed shafts 12 and 13, and the fixed shaft 12 and the fixed shaft.
  • the vibration absorbing section 11 has the following functions. 1. Absorption of Vertical Vibration (1) When all vertical vibrations of the plate 20 are absorbed, free vibration is provided. "vertical absorption width of vibration absorbing portion 11>maximum vibration width of plate 20 ⁇ free vibration" (2) When the vertical vibration of the plate 20 is not completely absorbed, the vibration width at four points of the plate 20 is restricted to the vertical absorption width of the vibration absorbing portion 11 . Therefore, there is no variation in the vibration width at the four locations, and the vibration width becomes uniform. “vertical absorption width of vibration absorbing portion 11 ⁇ maximum vibration width of plate 20 ⁇ regulated vibration" 2. It absorbs the difference in axial center between the fixed shaft 12 and the fixed shaft 13 (absorbs dimensional errors and assembly errors). 3. When the plate 20 vibrates without deformation, the plate 20 vibrates up and down at least by the absorption width of the vibration absorbing portion 11 .
  • the vibration unit 40 is fixed facing the center of the left and right sides of the plate 20 .
  • Vibration unit 40 has vibrator 41 and distributor 47 .
  • the vibration unit 40 obliquely vibrates the opposing sides of the plate 20 .
  • the vibration unit 40 obliquely vibrates the fixing point 24 where the fixing point 24 is located.
  • the plurality of vibrators vibrate the plate 20 at a plurality of locations on the outer periphery thereof, obliquely vibrating the plate 20 with respect to the surface 21 (horizontal plane).
  • the vibrators vibrate the sides 23 of the plate 20 at the same frequency.
  • the plurality of vibrators simultaneously generate traveling waves 60 having the same frequency, wavelength, and amplitude at a plurality of locations on the outer periphery of the plate 20 to vibrate the plate 20 with standing waves and elliptical vibrations.
  • Elliptical vibration device 100 has two vibrators, vibrator 41 and vibrator 42 .
  • the two vibrators, vibrator 41 and vibrator 42 have the same specifications.
  • Two vibrators, vibrator 41 and vibrator 42 are vibrators driven by air pressure.
  • the two vibrators, vibrator 41 and vibrator 42 are a pair of vibrators fixed at opposing positions on the plate 20. As shown in FIG.
  • the vibrators of (1), (2) and (3) are less noisy and can operate at high speed.
  • a turbine vibrator with stable operation is most suitable.
  • the piston vibrator has the problem that it makes a lot of noise and operates slowly.
  • the vibration unit 40 has a distributor 47 .
  • the distributor 47 is a vibration propagation plate that transmits the vibration of the vibrator to the plate 20 .
  • a distributor 47 fixes each vibrator of the plurality of vibrators to the plate 20 .
  • the distributor 47 transmits the vibration of the vibrator to the plate 20 from the outside of the plate 20.
  • - ⁇ Distributor 47 is fixed to base 10 by screws 25 inserted into screw holes in plate 20 .
  • the distributor 47 is fixed to the plate 20 at fixing points 24 provided around the periphery of the plate 20 .
  • Distributor 47 transmits the vibration of vibrator 41 and vibrator 42 to side 23 of plate 20 .
  • Distributor 47 secures vibrator 41 and vibrator 42 to side 23 of plate 20 .
  • the distributor 47 is an L-shaped metal fitting.
  • Distributor 47 has a horizontal portion 48 and a vertical portion 49 .
  • the horizontal portion 48 and the vertical portion 49 have the same width in the front-rear direction.
  • Horizontal portion 48 is a plate mounted parallel to surface 21 .
  • Horizontal portion 48 is fixed to plate 20 .
  • Horizontal portion 48 transmits the vibration of vertical portion 49 to plate 20 .
  • the horizontal portion 48 is fixed to the fixing portion 24 (screw hole) of the plate 20 with screws 25 .
  • the horizontal portion 48 projects outside the plate 20 a length Q away from the side 23 at the outer periphery of the plate 20 .
  • the plate 20 has fixing points 24 (screw holes) to which the distributor 47 is fixed.
  • the vertical portion 49 is a plate perpendicular to the surface 21 (horizontal plane).
  • the vertical portion 49 obliquely fixes the vibrator.
  • the vertical portion 49 is located on the outside of the plate 20 away from it.
  • the vertical portion 49 fixes the bottom surface of the vibrator 41 or 42 .
  • the vertical portion 49 fixes the vibrator 41 and the vibrator 42 so that the rotation of the vibrator 41 and the vibrator 42 are reversed to each other. In the figure, the vibrator 41 rotates clockwise and the vibrator 42 rotates counterclockwise in plan view.
  • the width of the horizontal portion 48 and the vertical portion 49 in the front-rear direction may not be the same.
  • the width of the horizontal portion 48 in the front-rear direction is preferably more than two times and less than ten times the width of the vertical portion 49 in the front-rear direction, preferably five times.
  • the width of the horizontal portion 48 in the front-rear direction is less than 1/2 and greater than 1/8 the width of the plate 20 in the front-rear direction, preferably 1/5.
  • a plurality of left and right side distributors 47 locate the plurality of vibrators 41 , 42 at outer positions away from the opposite left and right sides 23 of the plate 20 .
  • the plurality of distributors 47 on both the left and right sides fix the plurality of vibrators 41 and 42 by making the vibrating directions of the plurality of vibrators 41 and 42 oblique to the surface 21 of the plate 20 .
  • the vibrator is fixed obliquely to the horizontal at the vertical portion 49 .
  • the vibrator has a vibrating surface having a rotation center axis J, and vibrates in 360-degree directions on the vibrating surface.
  • the vibrating plane of the vibrator is a plane perpendicular to the rotation center axis J, inclined at an angle of W degrees, and parallel to the V direction.
  • the intersection of the XYZ axes is the intersection with the rotation center axis J and the center of the fixed position of the vibrator.
  • ⁇ is the rotation angle between the Z-axis and the vibrating plane of the vibrator in the clockwise direction from the Z-axis.
  • the vibrating surfaces of the vibrator 41 and the vibrator 42 are attached to the distributor 47 at an inclination angle of W degrees (0 ⁇ W ⁇ 90) with respect to the front surface 21 (back surface 22).
  • Vibration of the vibrator 42 occurs in the V direction having an inclination angle of W degrees with respect to the horizontal direction.
  • Controller 80 controls the vibration of vibrators 41 and 42 .
  • the controller 80 vibrates the vibrator at a frequency of 10 Hz or more and 800 Hz or less.
  • the controller 80 simultaneously vibrates a plurality of vibrators with the same frequency, same wavelength and same amplitude.
  • the controller 80 has an air compressor 81 , an air pipe 82 , a regulator 83 and a processor 84 .
  • the air compressor 81 generates compressed air.
  • the air pipe 82 is connected to the air compressor 81 and flows compressed air.
  • the air pipe 82 is branched in a Y shape and connected to the vibrator 41 and the vibrator 42 .
  • the regulator 83 is a control device that controls the pressure of compressed air. Regulator 83 determines the vibration frequency of vibrator 41 and vibrator 42 by controlling the pressure of the compressed air.
  • Processor 84 has a central processing unit and a program. Processor 84 may be implemented with an integrated circuit, circuit board, or the like. Processor 84 controls the operation of elliptical oscillator 100 via signal line 88 . A processor 84 is connected to the air compressor 81 and controls the on/off operation and operating time of the air compressor 81 .
  • the operator turns on the power switch of the elliptical vibration device 100 .
  • the operator has a correspondence table between the pressure of the compressed air and the vibration frequencies of the vibrators 41 and 42 .
  • the operator refers to the correspondence table and uses the regulator 83 to set the pressure of the compressed air corresponding to the vibration frequencies of the vibrators 41 and 42 .
  • the worker sets the pressure corresponding to any audible frequency between 10 Hz and 800 Hz.
  • the vibration frequencies of the vibrators 41 and 42 are preferably audible frequencies.
  • the vibrator 41 and the vibrator 42 are fixed to the left and right sides 23 of the plate 20 and give the left and right sides 23 of the plate 20 a sinusoidal traveling wave 60 . Vibrators 41 and 42 simultaneously generate traveling waves 60 with the same amplitude, the same wavelength, and the same frequency.
  • ⁇ Vibration step> When the traveling waves 60 are simultaneously generated with the same amplitude, the same wavelength, and the same frequency in opposite directions, the traveling waves 60 from the left and right are superimposed on the plate 20 to generate a standing wave.
  • a standing wave is a wave whose position does not change over time.
  • the plate 20 vibrates up and down with the same vibration frequency as the vibrators 41 and 42 due to standing waves.
  • the plate 20 vibrates up and down with the same vibration frequency as the vibrators 41 and 42 due to standing waves. Further, as will be described later, the plate 20 oscillates in an elliptical manner.
  • FIG. 4 is a schematic diagram of vertical vibration when the plate 20 is viewed from the front.
  • FIG. 4 in order to explain the standing wave vibration in an easy-to-understand manner, it is assumed that the vertical position of the fulcrum 26 is fixed and the fulcrum 26 does not vibrate vertically.
  • the plate 20 vibrates with a fixing point 24 (screw hole) as a fulcrum 26 .
  • the fulcrum 26 is the center of the plate 20 in the vertical direction and the center of the fixing point 24 .
  • ⁇ Flapping phenomenon> By repeating the operations of (a) to (f) with (a) to (f) as one cycle, the plate 20 vibrates up and down at the same frequency as the vibration frequencies of the vibrators 41 and 42 . Since the plate 20 vibrates between the fulcrums 26 as if it is flapping its wings, this phenomenon is hereinafter referred to as the flapping phenomenon. This vibration is called standing wave vibration.
  • the flapping phenomenon is a phenomenon in which the plate 20 vibrates up and down around the fulcrum 26 by supplying air to vibrators fixed to the left and right sides of the plate 20 .
  • the center of the fixing positions of the vibrators 41 and 42 (the center of the rotation center axis J) and the positions of the two fixing points 24 are on a straight line.
  • the center of the fixing positions of the plurality of vibrators (the center of the rotation center axis J) be on the extension of the line connecting the fixing points 24 on the opposite sides of the plate 20 .
  • Point E is the highest point of ellipse O.
  • Point C is the lowest point of ellipse O.
  • Points F and D are intermediate points between the highest point E of the ellipse O and the lowest point C of the ellipse O.
  • Point G is the leftmost point of ellipse O.
  • Point I is the rightmost point of ellipse O.
  • Uy Position of point G ⁇ Position of point I
  • FIG. 5A Vertical vibration of the elliptical vibration device 100 will be described with reference to FIG. 5A.
  • (A) of FIG. 5 is a diagram of the flapping vibration of the front-rear center of the plate 20 .
  • FIG. 5(A) is a vibration diagram seen from LL in FIG. 5(B).
  • the plate 20 is in a flat state and is at the position H when no vertical force is applied to the vibrator 41 and the vibrator 42 .
  • the fulcrum 26 vibrates vertically by the length Uz.
  • the plate 20 vibrates vertically in its entirety on the XZ plane, and makes a standing wave vibration in which the center of the left and right curves vertically on the XZ plane.
  • the vibrators 41 and 42 vertically vibrate the plate 20 so that the vertical vibration distance Mz of the center of the plate 20 (the center of the plate 20) in the center of the plate 20 takes a positive value.
  • the vibrators 41 and 42 vertically vibrate the plate 20 so that the vertical vibration distance Mz of the center of the plate 20 takes a positive value.
  • FIG. 5B is a diagram of vibration seen from the left side of the plate 20.
  • FIG. FIG. 5B is a vibration diagram seen from KK in FIG. 5A.
  • the plate 20 is in a flat state and is at the position H when no vertical force is applied to the vibrator 41 and the vibrator 42 .
  • the fulcrum 26 Since the position of the fulcrum 26 is not fixed and the plate 20 vibrates freely, the fulcrum 26 vibrates vertically by the length U.
  • the plate 20 as a whole vibrates elliptically in the YZ plane, and both front and rear ends bend up and down in the YZ plane, causing a bending phenomenon in which the plate 20 bends.
  • the elliptical vibration of the elliptical vibration device 100 will be described with reference to FIG.
  • the plate 20 vibrates in the Y and Z directions.
  • the vibrations in the Y direction and the Z direction are generated from the oblique vibrations in the V direction, and therefore have the same wavelength and frequency. Further, the vibrations in the Y direction and the Z direction have the same phase of the vibrations of the vibrator 41 and the vibrator 42 due to a synchronization phenomenon.
  • FIG. 6 is a schematic diagram showing the result of measuring the vibration of the plate in the YZ plane with the prototype device when the tilt angles of the vibrator 41 and the vibrator 42 are changed.
  • the vibration of the plate 20 is almost straight up and down vibration.
  • the vibration of the plate 20 is an elliptical vibration elongated vertically.
  • the vibration of plate 20 is an elliptical vibration.
  • the vibration of the plate 20 is an elliptical vibration elongated in the left-right direction.
  • the vibration of the plate 20 is forward and backward rectilinear vibration.
  • the shape was similar to an ellipse with a large minor axis.
  • the elliptical shape was the same as the shape from 0 degrees to 180 degrees.
  • the elliptical vibration with the rotation angle ⁇ from 0 to 180 degrees rotates clockwise, but the elliptical vibration with the rotation angle ⁇ from 180 degrees to 360 degrees rotates counterclockwise.
  • the plate 20 vibrates elliptically in the YZ plane.
  • the vibrator 41 and the vibrator 42 vibrate synchronously, it can be considered that the vibrator 41 and the vibrator 42 have the same phase of vibration in the V direction. Therefore, it is considered that the phases of the Y-direction and Z-direction vibrations applied to the plate 20 are also synchronized. However, as a result of the measurement, it was found that the plate 20 was elliptically vibrating, and that there was a phase difference between the phases of the vibrations applied to the plate 20 in the Y and Z directions. Although the reason why the phases of the vibrations in the Y direction and the Z direction are out of phase is not clear, the following causes are conceivable.
  • Cause 1 Due to the difference in the shape of the distributor 47 in the Y and Z directions, there is a phase shift between the vibrations in the Y and Z directions.
  • Cause 2 Due to the difference in the absorption characteristics of the vibrations in the Y and Z directions of the vibration absorbing portion 11, the phases of the vibrations in the Y and Z directions are out of phase.
  • the coupling member was used as the vibration absorbing portion 11 of the prototype device, it is considered that the vibration absorbing characteristics of the coupling member differ between the vertical direction and the longitudinal direction.
  • Cause 3 A difference in the length, rigidity, or inertia in the Y direction of the plate 20 and the height, rigidity, or inertia in the Z direction causes a phase shift between vibrations in the Y and Z directions.
  • Cause 4 A combination of causes 1, 2, and 3 causes a phase shift between vibrations in the Y and Z directions.
  • a specific example of the standing wave vibration will be described below.
  • a square aluminum plate with a side of about 0.5 m is used as the plate 20 .
  • Let the sound velocity V of aluminum be 6320 [m/s]. However, assuming that the temperature of aluminum is constant, the change in sound velocity due to temperature is not considered.
  • As the vibrator 41 and the vibrator 42 an air vibrator manufactured by Exen Co., Ltd. having the following specifications is used.
  • An air vibrator having a vibration frequency f of 119 Hz to 414 Hz when the air pressure is 0.2 to 0.6 MPa is desirable.
  • an air vibrator having a vibration frequency f of 110 Hz or more and 290 Hz or less when the air pressure is 0.3 or more and 0.6 MPa or less is desirable.
  • Wavelength ⁇ [m] Velocity of sound V [m/s]/Vibration frequency f [Hz] Calculation of the wavelength of the traveling wave 60 is as follows.
  • a traveling wave 60 generated by the vibrators 41 and 42 can be expressed by the following equation.
  • R (x, t) Ax sin2 ⁇ ((t/T)-(x/ ⁇ ))
  • L(x, t) Ax sin2 ⁇ ((t/T)+(x/ ⁇ )) x [m]: location of the plate in the X direction t [s]: time
  • a standing wave 70 generated by superimposing the traveling wave 60 generated from the vibrator 41 and the vibrator 42 can be expressed by the following equation representing a sinusoidal standing wave.
  • Ax Amplitude [m] of traveling wave 60 T: period [s] of traveling wave 60 ⁇ : wavelength of traveling wave 60 [m]
  • cos(2 ⁇ (x/ ⁇ )) indicates the amplitude of the standing wave 70 .
  • a location x where the amplitude of the standing wave 70 is 0, that is, a location x where cos(2 ⁇ (x/ ⁇ )) is 0 is called a “node”.
  • the place where the amplitude of the standing wave 70 is maximum, that is, the place x where the absolute value of cos(2 ⁇ (x/ ⁇ )) is 1 is called the “antinode”.
  • the node of the standing wave In order to vibrate the plate 20 up and down, it is sufficient to prevent the node of the standing wave from being generated at any location x in the horizontal direction between the fulcrums 26 . Since a node of the standing wave occurs every half wavelength, if the distance between the fulcrums 26 is set to less than half the wavelength of the standing wave, no node of the standing wave should exist at any position x in the left-right direction of the plate 20. can be done. If the position of the "node" of the standing wave 70 is set as the fixed point 24 and the fixed point 24 is held (screwed), the "node” becomes the fulcrum of flapping.
  • the distance of the fixing point 24 in the left-right direction of the plate 20 must be less than the following length.
  • Half wavelength when air pressure is 0.5 MPa: wavelength ⁇ [m] / 2 14.56 m
  • Half wavelength when air pressure is 0.4 MPa: wavelength ⁇ [m] / 2 15.29 m
  • Half wavelength when air pressure is 0.3 MPa: wavelength ⁇ [m] / 2 17.82 m
  • the air pressure of the vibrator 41 and the vibrator 42 determines the frequency and wavelength of the standing wave, and determines the maximum length of the plate 20 .
  • the plurality of vibrators 41 and 42 generate traveling waves whose half length of the wavelength is longer than the left and right sizes of the plate, and vibrate the plate 20 with standing waves that do not generate "nodes".
  • Elliptical vibration occurs when simple vibrations in two perpendicular directions (Z direction and Y direction) are combined.
  • the state of vibration changes depending on the frequency ratio, amplitude ratio, and phase difference of simple vibrations in the Z and Y directions.
  • the frequencies of the simple vibrations in the Z direction and the Y direction are the same because they are generated from the oblique vibration with a tilt angle of W degrees.
  • the amplitudes of the simple vibrations in the Z and Y directions change with the tilt angle W degrees. If only the phase difference between simple harmonic motions in the Z and Y directions changes, the minor axis of the ellipse changes.
  • the Z-direction displacement z and Y-direction y of the elliptical vibration are given by the following equations as a function of time t.
  • z Az*cos( ⁇ z*t)
  • y Ay*cos( ⁇ y*t+ ⁇ )
  • Az amplitude of vibration in Z direction
  • ⁇ z the angular frequency of vibration in the Z direction
  • Ay amplitude of vibration in Y direction
  • ⁇ y angular frequency of vibration in the Y direction
  • ⁇ Phase difference between vibrations in the Z and Y directions.
  • the elliptical vibration has a reverse oblique major axis of 45 degrees (minor axis>0).
  • the amplitude ratio is 1
  • the phase difference is ⁇
  • the rectilinear vibration is 45 degrees reverse oblique (the minor axis is 0).
  • the oblique 45 degrees is no longer 45 degrees, and the angle of the major axis with respect to the horizontal changes to more than 0 degrees and less than 90 degrees.
  • FIG. 7 is an explanatory diagram of elliptical vibration.
  • Vp Vibration power of vibrator 41 and vibrator 42 at tilt angle W degrees.
  • Vy Horizontal vibration power of vibration power
  • Vp Vertical vibration power of vibration power
  • Uy Width of ellipse O
  • Uz Height of ellipse O
  • the width Uy of the ellipse O depends on the vibration power Vy in the horizontal direction.
  • the height Uz of the ellipse O depends on the vibration power Vz in the horizontal direction.
  • Uy ⁇ Vy Vp ⁇ cos W
  • Uz ⁇ Vz Vp ⁇ sinW
  • the width Uy of the ellipse O is a value determined by Vp and W.
  • the height Uz of the ellipse O is a value determined by Vp and W. Therefore, by changing the vibration power of the vibrator 41 and the vibrator 42 and the inclination angle of the vibrator 41 and the vibrator 42, the shape of the ellipse O can be changed.
  • the value of the phase difference ⁇ is also required.
  • the minor axis of the ellipse changes due to the phase difference ⁇ , but as shown in FIG. Therefore, it is considered that there is a correlation between the tilt angle W degrees and the phase difference ⁇ , and if the tilt angle W degrees is determined, the phase difference ⁇ is also determined.
  • the operator can determine the vibration power of the vibrator 41 and the vibrator 42 and the tilt angle W degrees of the vibrator 41 and the vibrator 42 to generate elliptical vibration. For example, if 36 types of vibrators can be attached by changing the tilt angle W degrees every 10 degrees, the shape of the ellipse is determined every 10 degrees, and the operator selects the desired ellipse from among the 36 types of ellipses. can do.
  • the elliptical vibration device 100 of the present embodiment simultaneously generates traveling waves 60 from the left and right sides of the plate 20 with the same amplitude, the same wavelength, and the same frequency by the vibrators 41 and 42, which are audible frequency vibration sources. As a result, on the plate 20, a standing wave is generated by superimposing the traveling waves in opposite directions.
  • the elliptical vibration device 100 of the present embodiment applies oblique vibration to the plate 20 from an audible frequency vibration source to generate elliptical vibration.
  • traveling waves 60 are simultaneously generated in the plate 20 from the left and right from the audible frequency vibration source to the plate 20 at the same frequency.
  • the plate 20 vibrates due to the standing wave, and vibrates vertically due to the vibrating action of the standing wave.
  • the traveling wave 60 is generated from the vibration of the vertical component of the vibration, and an audible frequency vibration source that vibrates up and down to generate the traveling wave 60 is unnecessary.
  • the traveling wave 60 is also generated from the vibration of the front-back component of the vibration, but since the front-back length of the plate 20 is large, the plate 20 does not generate the standing-wave vibration in the front-back direction.
  • the elliptical vibration device 100 can change the audible range frequency by the controller 80 during excitation.
  • the audible frequency range is from 10 Hz to 20000 Hz, and the audible frequency range used in this embodiment is set to the range from 10 Hz to 800 Hz.
  • the vibration unit 40 may have a voice coil motor vibration source, an electromagnetic vibration source, or a piezoelectric vibration source as a vibration source.
  • the vibration unit 40 can use a vibration source such as the vibrator 41 or the vibrator 42 as appropriate, or another sound wave vibration source such as a voice coil motor type vibration source, an electromagnetic type vibration source, or a piezoelectric type vibration source. It can be replaced with a vibration source or the like.
  • Controller 80 may have an arbitrary waveform generator or a bipolar power supply as a control component. Since the controller 80 vibrates the vibration source at an arbitrary frequency, the control component corresponding to the sound wave vibration source can be replaced with an arbitrary waveform generator, a bipolar power supply, or the like.
  • the vibration unit 40 obliquely vibrates the plate 20 with a pair of vibrators attached to the outside of the center of two sides of the plate 20 facing each other.
  • the vibration unit 40 simultaneously generates traveling waves with the same amplitude, the same wavelength, and the same frequency by a pair of vibrators attached to the center outer sides of the two facing sides of the plate 20, vibrating the plate 20 with standing waves, and , causes the plate 20 to elliptically oscillate.
  • the vibrator 41 and the vibrator 42 are fixed outside the plate 20 with a length Q therebetween.
  • the vibrator 41 and the vibrator 42 may not overlap the plate 20 in plan view.
  • the elliptical vibration device 100 of the present embodiment does not uniformly vibrate the entire plate 20 up and down.
  • the front, rear, right, and left sides of the plate 20 are free ends that allow free vibration.
  • the amplitude is the smallest at the left-right central portion of the plate 20, and the amplitude increases from the left-right central portion of the plate 20 toward the periphery in the left-right direction.
  • the reason why the amplitude increases toward the periphery in the left-right direction is that the left and right ends of the plate 20 are not fixed, and that the plate 20 is caused to generate a standing wave.
  • the amplitude is the smallest at the front-rear central portion of the plate 20, and the amplitude increases from the front-rear central portion of the plate 20 toward the periphery in the front-rear direction.
  • the reason why the amplitude increases toward the periphery in the front-rear direction is that the front and rear ends of the plate 20 are not fixed.
  • the vibrator 41, the vibrator 42, and the two fixing points 24 are arranged on a straight line.
  • the fixing positions of the vibrator 41 and the vibrator 42 are outside the two fixing points 24 .
  • the fixing positions of the vibrator 41 and the vibrator 42 are not inside the two fixing points 24 .
  • the plate 20 vibrates vertically and horizontally due to the flapping phenomenon centered between the two fixing points 24 (fulcrums 26).
  • the plate 20 vibrates up and down in the front and rear due to the bending phenomenon centered on the two fixing points 24 (fulcrums 26).
  • ⁇ Comparative example 3 ⁇ Combination of vertical vibrator and horizontal vibrator>
  • a vertical vibrator and a horizontal vibrator are attached to the left and right sides 23 respectively, elliptical vibration is generated.
  • two vibrating mechanisms, a vertical vibrator and a horizontal vibrator are required, and the phase difference between the vertical vibrator and the horizontal vibrator must be controlled, which complicates the device.
  • This embodiment can generate an elliptical vibration with a single-system vibrating mechanism consisting of only an oblique vibrator and without phase difference control.
  • ⁇ Comparative example 7 ⁇ Ultrasonic transducer>
  • the plate 20 When the plate 20 is vibrated by a plurality of ultrasonic vibrators, the plate 20 generates vertical vibration with nodes, and the plate 20 cannot be uniformly vibrated vertically. According to this embodiment, since the plate 20 vibrates vertically without nodes due to the standing wave, the plate 20 can vibrate vertically uniformly.
  • the distance between the fixing points 24 in the horizontal direction of the plate 20 may be within 10 m to 25 m, and a sufficiently large plate 20 can be used.
  • the distance between the fixing points 24 in the horizontal direction of the plate 20 must be less than 0.158 m or less than 0.063 m. If the length is 0.158 m or more or 0.063 m or more, a node occurs in the plate 20, and the plate 20 cannot be uniformly vibrated up and down.
  • the size of the plate 20 cannot be increased.
  • the plate 20 becomes small.
  • the size of the plate 20 can only be about 10 x 10 cm.
  • Knot control is not possible.
  • a node occurs in the plate 20, and the entire plate 20 does not vibrate in the same manner.
  • the parts 901 on the plate 20 do not vibrate evenly. Vibration of the component 901 is blocked at the node.
  • price becomes expensive.
  • the standing wave vibrating plate 20 by the vibration unit 40 solves the above items 1, 2, 3 and 4.
  • the pair of vibrators 42 are separated from the plate 20 and obliquely installed outside the plate 20 so as to face each other, so that the plate 20 can be caused to vibrate elliptically.
  • the traveling waves 60 are simultaneously generated at the same frequency, thereby generating standing waves and vibrating the plate 20 in the vertical direction.
  • a bending phenomenon occurs around the fixing point 24, and the end portion of the plate 20 bends and vibrates in the vertical direction.
  • the distributor 47 of FIG. 8( a ) has a vertical portion 49 , a horizontal portion 48 and a fixed portion 46 .
  • the vertical portion 49, the horizontal portion 48, and the fixed portion 46 are each flat plates.
  • Vertical portion 49 is perpendicular to the surface of plate 20 .
  • the vertical portion 49 is located outside the plate 20 away from the plate 20 and secures the vibrator obliquely to the surface 21 of the plate 20 .
  • Horizontal portion 48 is parallel to the surface of plate 20 .
  • the horizontal portion 48 is perpendicular to the vertical portion 49 and transmits the vibration of the vertical portion 49 to the plate 20 .
  • a fixed portion 46 is perpendicular to the horizontal portion 48 and is fixed to the side 23 of the plate 20 .
  • the fixed part 46 has a fixed point 24 fixed to the plate 20 . Since the fixing portion 46 is fixed to the side 23 of the plate 20, the traveling wave 60 can enter from the left and right end surfaces of the plate 20, and the plate 20 as a whole undergoes standing wave vibration and elliptical vibration.
  • the elliptical vibration device 100 has a vibrator 41 and a vibrator 42 fixed to the side 23 of the plate 20 . Vibrator 41 and vibrator 42 are not fixed to front surface 21 and back surface 22 of plate 20 . Therefore, the traveling wave 60 is generated from both ends of the plate 20 in the left-right direction, and the entire area of the plate 20 in the left-right direction vibrates up and down.
  • FIGS. 8(b), (c), and (d) of FIG. 8 show the case where a plurality of vibrators are attached to one distributor 47 on the right side 23.
  • FIG. By attaching a plurality of vibrators to the distributor 47 on the left side 23 as well, a plurality of pairs of vibrators are obtained.
  • the multiple pairs of vibrators include at least the following two pairs of vibrators.
  • (1) As shown in FIG. 8B, a pair of vibrators inclined at an inclination angle of W degrees with respect to the plate and a pair of vibrators inclined at the same inclination angle of W degrees with respect to the plate, or (2)
  • FIG. 8B a pair of vibrators inclined at an inclination angle of W degrees with respect to the plate and a pair of vibrators inclined at the same inclination angle of W degrees with respect to the plate
  • (2) As shown in FIG. 8(c), a pair of vibrators inclined at an inclination angle W degrees with
  • a pair of vibrators whose rotating direction is clockwise (inclined at an angle of inclination W with respect to the plate) and a pair of vibrators whose rotating direction is counterclockwise (with respect to the plate) a pair of vibrators inclined at an angle of inclination W degrees + 180 degrees; is included.
  • the controller operates the plurality of pairs of vibrators simultaneously or switches between the plurality of pairs of vibrators.
  • the distributor 47 fixes the vibrator 42 and the vibrator 44 on both sides of the vertical portion 49. As shown in FIG. The tilt angles of the vibrator 42 and the vibrator 44 are the same in (b), different in (c), and in (d) the vibrator 42 is tilted and the vibrator 44 is vertical.
  • the controller 80 when the controller 80 operates the vibrator 42 and the vibrator 44 at the same time, the combined vibration of the vibrator 42 and the vibrator 44 is transmitted to the plate 20 .
  • the controller 80 may cause the vibrator 42 and the vibrator 44 to rotate in the same direction or in the opposite direction.
  • the controller 80 may switch between the vibrator 42 and the vibrator 44 and operate only one of them.
  • the distributor 47 of FIG. 9(a) has an extended horizontal portion 48 and two vertical portions 49 formed upward.
  • the distributor 47 of FIG. 9(b) has an extended horizontal portion 48 and two vertical portions 49 formed upwardly and downwardly.
  • the vibrator is attached to either of the two vertical portions 49 .
  • the distributor 47 can change the length Q from the side 23 on the outer periphery of the plate 20 to attach the vibrator. Vibrators may be attached to both of the two vertical portions 49 .
  • the distributor 47 of FIG. 9(c) has four arcuate screw holes 14 in the vertical portion 49. As shown in FIG. Since the screw holes 14 do not exist on the top, bottom, left, and right, the vibrator cannot be mounted vertically or horizontally.
  • the distributor 47 can mount the vibrator at any angle except vertical and horizontal.
  • a vibrator can be attached to any position of the arcuate screw hole 14 with a screw 25, and the tilt angle W degrees of the vibrator can be freely changed.
  • the distributor 47 of FIG. 9(d) has a plurality of round screw holes 14 in the vertical portion 49. As shown in FIG. The screw holes 14 are evenly distributed on the circumference. If there are 12 screw holes 14, they are arranged at intervals of 30 degrees. Since the screw holes 14 are pre-formed at a predetermined angle, the distributor 47 can mount the vibrator at a precise angle of inclination W degrees.
  • FIG. 10 An elliptical vibration device 100 shown in FIG. 10 is obtained by changing the attachment of the vibration unit 40 from the configuration of FIG. (a) shows the vibrator 41 and the vibrator 42 attached to the outside of the distributor 47 . (b) shows the vibration unit 40 of (a) mounted upside down. (c) is obtained by changing the shape of the distributor 47 and attaching the vibration unit 40 .
  • the distributor 47 is a hollow pipe with a rectangular cross section. One surface of the distributor 47 is fixed to the side 23 and the other surface fixes the vibrator 41 or the vibrator 42 .
  • Elliptical vibration device 100 may have an even number of vibrators greater than two.
  • Vibrators 41, 42, 43 and 44 may be attached to the plate 20 as shown in FIG.
  • vibrator 41 and vibrator 42 face each other, and vibrator 43 and vibrator 44 face each other.
  • Vibrator 41 and vibrator 43 are fixed to the same side 23 and vibrator 42 and vibrator 44 are fixed to another side 23 .
  • Standing waves are generated in parallel. The bending phenomenon is less likely to occur.
  • vibrator 41 and vibrator 42 face each other, and vibrator 43 and vibrator 44 face each other.
  • Vibrator 41 , vibrator 42 , vibrator 43 , and vibrator 44 are fixed to respective sides 23 . If the controller 80 operates four vibrators simultaneously, standing waves are generated orthogonally and elliptical vibrations are also generated orthogonally.
  • the controller 80 may switch and operate two vibrators facing each other. In (c), vibrator 41 and vibrator 42 face each other, and vibrator 43 and vibrator 44 face each other.
  • the plate 20 has a through hole 27 penetrating vertically in the center thereof.
  • a vibrator 41, a vibrator 42, a vibrator 43, and a vibrator 44 are fixed to each corner of the plate 20, respectively. If the controller 80 operates four vibrators simultaneously, standing waves are generated orthogonally and elliptical vibrations are also generated orthogonally.
  • the controller 80 may switch and operate two vibrators facing each other.
  • (d) further forms a through hole 27 in the center of the plate 20 in the configuration of (a).
  • a portion inside the through hole 27 is a space.
  • the shape of the through hole 27 may be a round hole, a square hole, a hexagonal hole, or other polygonal holes.
  • the number of through holes 27 should be at least one.
  • the existence of the through holes 27 eliminates the vibration of the central portion of the plate 20 and reduces the bending of the central portion of the plate 20 in the vertical direction.
  • the vibration state of the plate 20 can be adjusted by the size of the through hole 27 .
  • (e) attaches a plurality of vibration propagating parts 17 to the surface 21 of the plate 20 .
  • the vibration transmitting portion 17 is a vibration transmitting portion that transmits only part of the vibration of the plate 20 .
  • the vibration propagating portion 17 is a hexahedral long metal rod.
  • the vibration propagating portion 17 is fixed to the edge of the plate 20 .
  • the vibration propagating portion 17 is shorter than one side of the plate 20 .
  • the outer surface of the vibration propagating portion 17 is in the same plane as the side 23 of the plate 20 .
  • a lower surface of the vibration propagating portion 17 is in close contact with the surface 21 of the plate 20 .
  • the upper surface of the vibration propagating portion 17 is a surface on which an object to be vibrated is brought into close contact.
  • An object to be vibrated is placed on the upper surfaces of the four vibration propagating portions 17, and vibration is transmitted to the object only from the upper surfaces of the four vibration propagating portions 17.
  • the inner portion of the four vibration propagating portions 17 is a space and does not transmit the vibration of the central portion of the plate 20 to the object. Vibration transmission of the plate 20 can be adjusted by the area of the upper surface of the vibration propagating portion 17 .
  • the number of vibration propagating portions 17 may be other than four, or may be only two facing each other.
  • the plurality of vibration propagating portions 17 may have different sizes or shapes.
  • the vibration propagating portion 17 may be L-shaped or arc-shaped.
  • the vibration propagating portion 17 may have a square shape with an open center, an annular shape, a donut shape, or a grid shape.
  • the planar shape of the plate 20 is not limited to a quadrangle.
  • the shape of the plate 20 may be a regular polygon, a circle, an ellipse, or any other shape in plan view.
  • FIG. 12 is a diagram showing the planar shape of the plate 20. As shown in FIG. (a) shows a case where the planar shape of the plate 20 is a cross. (b) shows a case where the planar shape of the plate 20 is circular. (c) shows a case where the planar shape of the plate 20 is an elongated rectangle with rounded corners. (d) shows a case where the planar shape of the plate 20 is elliptical. Although not shown, the planar shape of the plate 20 may be trapezoidal, cloud-shaped, chevron-shaped, irregular, or any other shape.
  • FIG. 13 is a diagram showing a cross-sectional shape of the plate 20 in the Z direction.
  • the cross-sectional shape of the plate 20 is not limited to a rectangle.
  • (a), (c) and (e) show the case where the central lower portion of the plate 20 is recessed upward.
  • (a) shows the case of being depressed in a concave shape.
  • (b) shows a case where it is recessed into a V shape.
  • (c) shows a case where the recess is arcuate.
  • (b), (d) and (f) show the case where the central upper portion of the plate 20 swells downward.
  • (b) shows the case of swelling into a convex shape.
  • (d) shows the case of swelling in a V shape.
  • (f) shows the case of arcuate bulging.
  • (g) shows the case where the central portion of the plate 20 is recessed upward and downward.
  • (h) shows the case where the central portion of the plate 20 has a convex shape bulging upward and downward.
  • the cross-sectional shape of the plate 20 may be uneven, corrugated, or any other shape.
  • the plate 20 does not have to be plate-like.
  • (i) shows the case where the plate 20 is a quadrangular prism.
  • Plate 20 may be a prismatic pipe.
  • (j) shows the case where the plate 20 is a cylinder.
  • Plate 20 may be a cylindrical pipe.
  • the plate 20 has a small length in the front-rear direction, such as a square column or a cylinder, the plate 20 vibrates in an elliptical manner, vibrates up and down in vertical standing waves due to vertical vibration, and moves back and forth due to the vibration in the front-rear direction. It oscillates back and forth with a directional standing wave.
  • plate 20 may be box-shaped, dish-shaped, dome-shaped, frame-shaped, or otherwise shaped.
  • Embodiment 2 In the second embodiment, points different from the first embodiment will be described.
  • FIG. 14 is a perspective view of the work separating device 200 of Embodiment 1.
  • FIG. 15 is a front view of the work separating device 200 of Embodiment 1.
  • FIG. 16 is a side view of the work separating device 200 of Embodiment 1.
  • the work separating device 200 has the elliptical vibration device 100 of the first embodiment.
  • the work separating device 200 uses the elliptical vibration device 100 of the first embodiment upside down and with a smaller base 10 .
  • the workpiece separation device 200 has a base 10, a plate 20, a cylinder 30, a vibration unit 40 and a controller 80.
  • the works 91, 92 are rectangular plates that are rigid but elastic or flexible.
  • the works 91 and 92 are metal plates such as copper plates, iron plates, and aluminum plates, ceramic plates, substrates, resin plates, glass plates, or the like.
  • the works 91 and 92 are stacked.
  • the work separating device 200 is a device for separating the work 91 from the work 92 by separating the work 91 from the work 92 .
  • the base 10 has a rectangular plate shape.
  • Two rods 31 are fixed to the upper surface of the base 10 .
  • the base 10 and the members below the base 10 move up and down as the two rods 31 move up and down.
  • the cylinder 30 is fixed to a housing of a work transfer device (not shown).
  • the cylinder 30 places the base 10 on the plate 20 and moves the base 10 vertically.
  • the cylinder 30 moves the rod 31 up and down to move the base 10 up and down.
  • the cylinder 30 arranges the plate 20 of the elliptical vibration device 100 under the base 10 and moves the plate 20 vertically.
  • the work conveying device moves the cylinder 30 and conveys the work 91 .
  • the plate 20 has a surface 21 on the top, a back surface 22 on the bottom and four sides 23 on the sides.
  • the back surface 22 is a suction surface 19 that suctions the workpiece 91 .
  • the controller 80 has an aspirator 85 .
  • the suction device 85 sucks the air in the suction grooves formed on the suction surface 19 through the air pipe 86 .
  • FIG. 17 is a diagram of the suction surface 19 on the back surface 22 of the plate 20.
  • the adsorption surface 19 has a rectangular shape.
  • the adsorption surface 19 has the same size as the workpiece 91 .
  • the adsorption surface 19 adsorbs the entire upper surface of the workpiece 91 .
  • the suction surface 19 has suction grooves 28 .
  • the suction grooves 28 are formed on the entire surface of the suction surface 19 .
  • the outer peripheral groove of the suction groove 28 is formed parallel to the four sides of the suction surface 19 along the four sides.
  • the outer peripheral groove of the attraction surface 19 is formed continuously with the outer edge of the attraction surface 19 .
  • the suction groove 28 is connected to a suction port 29 formed in the side 23 . Air in the suction groove 28 is sucked from the suction port 29 through the air pipe 86 . The adsorption surface 19 continues to adsorb the entire surface of the workpiece 91 even when the plate 20 vibrates.
  • the suction surface 19 has a plurality of types of independent suction grooves 28 matched to the shape of the workpiece and a plurality of suction ports 29 corresponding to the suction grooves 28 .
  • the suction surface 19 has the following three types of individual suction grooves 28, which are used corresponding to the three types of workpieces 91 in size.
  • Outer groove outer rectangular frame-shaped suction groove 28
  • Inner groove Inner rectangular frame-shaped suction groove 28
  • Middle groove Suction groove 28 in the shape of a grid in the center
  • the plate 20 and the workpiece 91 When the plate 20 and the workpiece 91 have the same size, they are sucked by the outer groove, the inner groove and the middle groove. If the size of the workpiece 91 is smaller than the outer circumference of the outer groove, the suction is performed by the inner groove and the middle groove. If the size of the workpiece 91 is smaller than the outer periphery of the inner groove, the suction is performed only by the middle groove.
  • the controller 80 sucks the entire surface of the work 91 by using all the suction grooves 28 inside the work 91 regardless of the size of the work 91 .
  • the work separation device 200 is positioned above the work 91 by a work transfer device (not shown).
  • the controller 80 starts vibrating the vibrator 41 and the vibrator 42 and starts suctioning by the suction device 85 .
  • ⁇ Lifting step> As shown in FIG. 20, the cylinder 30 lifts the rod 31 and the plate 20 lifts the workpiece 91 . Since a vacuum state is generated between the work 91 and the work 92, the work 92 rises together with the work 91.
  • FIG. 22 is a front view of the vibration of Embodiment 1.
  • Vibrators 41 and 42 release the downward force on both the left and right sides of plate 20, and plate 20 returns to position H;
  • the center of the plate 20 and the center of the workpiece 91 return to the plane. Therefore, the air between the work 91 and the work 92 is discharged from the front, rear, left and right. The pressure generated in this air separates the workpieces 91 and 92 .
  • Vibrators 41 and 42 release the upward force on both the left and right sides of plate 20, and plate 20 returns to position H;
  • the center of the plate 20 and the center of the workpiece 91 return to the plane. Therefore, the air between the work 91 and the work 92 is sucked from the front, rear, left and right.
  • the plate 20 and the work 91 are bent up and down by the standing wave vibration, and air is repeatedly sucked and discharged between the work 91 and the work 92. Therefore, the vacuum between the work 91 and the work 92 is maintained. The state is resolved in a short time, and the workpiece 92 drops early. Furthermore, in the operations from (c) to (d), the air between the work 91 and the work 92 is discharged while the plate 20 and the work 91 are rising. and the discharge of the air between the work 92, the work 92 drops early.
  • the plate 20 and the work 91 shift the work 92 forward due to the elliptical vibration, so that the contact area between the work 91 and the work 92 decreases, and the work 92 drops early. Furthermore, in the operations from (c) to (d), the plate 20 and the workpiece 91 move backward while rising. to fall.
  • both the front and rear ends of the work 91 are bent upward due to the bending phenomenon, so that the degree of vacuum and the friction at the front and rear ends of the work 91 and the work 92 The force is reduced, and the workpiece 92 becomes easier to separate from the workpiece 91 .
  • the work separation device 200 of the second embodiment is a plate 20 for sucking a workpiece on its suction surface; a plurality of vibrators 41 and 42 fixed apart from the plate 20 and vibrating a plurality of locations on the outer circumference of the plate 20 to obliquely vibrate the plate 20 with respect to the horizontal plane; and a controller 80 for controlling vibrations of the plurality of vibrators 41 and 42 .
  • the plurality of vibrators 41 and 42 simultaneously generate traveling waves of the same frequency, the same wavelength, and the same amplitude at a plurality of locations on the outer circumference of the plate 20, vibrate the plate 20 with standing waves, and make the plate 20 elliptical. vibrate.
  • the distributor 47 fixes each vibrator of the plurality of vibrators 41 and 42 to the plate 20 and transmits the vibration of the vibrator to the plate 20 from the outside of the plate 20 .
  • the workpiece 92 is dropped early due to the sliding of the workpiece 92 due to the elliptical vibration and the knocking down of the workpiece 92 due to the standing wave vibration and bending vibration.
  • ⁇ Base 10> Four vibration absorbers 11 are located at the corners of the plate 20 .
  • the vibration absorbing portion 11 and the screw 25 (fulcrum 26) are present on a straight line. According to such a configuration, even if the vibration absorbing portion 11 generates a resistance against the vibration of the plate 20, the effect of the force can be reduced.
  • the front-rear size of the base 10 may be smaller than the front-rear size of the plate 20 .
  • the shape of the base 10 may be a triangular prism, a polygonal prism, a cylinder, or other shapes.
  • the workpiece separating device 200 shown in FIG. 24(b) uses both the base 10 and the cylinder 30, and also uses the vibration absorbing portion 11 and the rod 31.
  • a work separating device 200 shown in FIG. 25 has an air nozzle 89 .
  • An air nozzle 89 is fixed to the end of the extension of the base 10 .
  • the air nozzle 89 is supplied with compressed air from the air pipe 82 .
  • Air nozzles 89 eject air toward side 23 of plate 20 .
  • the air nozzle 89 is desirably arranged above the position where the workpiece 92 slides.
  • a plurality of air nozzles 89 may be provided on one side of the plate 20 .
  • the air nozzles 89 may be provided on each of the four sides of the plate 20 .
  • a workpiece separating apparatus 200 shown in FIG. 26 is obtained by changing the mounting positions and inclination angles of the vibrators 41 and 42 from the configuration of FIG.
  • the vibrator 41 and the vibrator 42 are attached like a two-bladed windmill, and the workpiece separating device 200 shown in FIG. 26 is a two-bladed windmill type workpiece separating device 200 .
  • the vibrator 41 and the vibrator 42 are fixed to the front and rear of the left and right sides of the plate 20 .
  • the vibrator 41 is attached at an angle of inclination of W degrees so as to open wide forward.
  • the vibrator 42 is attached at an inclination angle of 180-W degrees so as to open wide rearward.
  • the vibrator 41 and the vibrator 42 By arranging the vibrator 41 and the vibrator 42 in the vicinity of the diagonal line, a standing wave is generated along the diagonal line. Moreover, the work 92 slides so as to rotate in the horizontal direction with respect to the work 91 due to the standing wave vibration and the elliptical vibration caused by the vibrators 41 and 42 .
  • the work separating apparatus 200 shown in FIG. 26 rotates the work 92 by standing wave rotary vibration due to standing wave vibration and elliptical vibration.
  • the vibration units 40 may be attached at four diagonal positions on each side.
  • the vibrators 41, 42, 43, and 44 are attached like a four-bladed windmill, and the work separating device 200 shown in FIG. 27(a) is a four-bladed windmill type work separating device 200.
  • a through hole 27 penetrating vertically is formed in the center of the plate 20 .
  • the through hole 27 is formed in the center inside the four vibration absorbing portions 11 . Due to the existence of the through hole 27, the central portion of the workpiece 91 is not attracted, and the bending of the central portion of the workpiece 91 in the vertical direction is reduced.
  • the contact area and contact time between the workpieces 91 and 92 are increased compared to the case where the through hole 27 is not present, and the rotation of the workpiece 92 in the horizontal direction can be promoted.
  • it is not necessary to suck the central portion of the plate 20 and it is desirable to form a through hole 27 in the center of the plate 20 .
  • a plurality of suction ports 29 may be directly attached to the plate 20 as shown in FIG. 27(b).
  • the plate 20 shown in FIG. 27B has no suction grooves on the suction surface 19 .
  • Four suction ports 29 are fixed outside the through hole 27 .
  • Four suction ports 29 may be attached to the corners of plate 20 .
  • the number of vibration absorbing portions 11 may be four or more.
  • the number of vibration absorbing portions 11 may be three. As shown in FIG. 24, the number of vibration absorbing portions 11 may be two on the left and right. As shown in FIG. 28, one vibration absorbing portion 11 may be provided in the center. As the number of vibration absorbing portions 11 decreases, the resistance against vibration decreases, and the plate 20 vibrates freely.
  • a coil spring, an elastic body, or other vibration absorbing material may be used instead of the vibration absorbing portion 11 .
  • a plurality of suction holes 18 may be formed in the plate 20 without forming suction grooves in the suction surface 19 of the plate 20 .
  • the suction hole 18 is a through hole that vertically penetrates the plate 20 .
  • the suction hole 18 is a through hole that is sucked by the suction device 85 .
  • the plate 20 shown in FIG. 29A has suction holes 18 arranged all over the plate 20, and the work 91 is sucked over the entire surface of the plate 20. As shown in FIG. 29A
  • the plate 20 shown in FIG. 29(b) has the suction holes 18 arranged only at the outer edge of the plate 20, and the workpiece 91 is sucked only at the outer edge of the plate 20. As shown in FIG. 29(b)
  • a plate 20 shown in FIG. 29(c) is formed with a recess 16 having a bottom in the center of the plate 20 shown in FIG. 29(b).
  • the concave portion 16 is a portion recessed from the back surface 22 toward the front surface 21 . Air in the recess 16 is not sucked by the sucker 85 . Since there is a recess 16 in the center of the plate 20 and the center of the plate 20 does not come into contact with the workpiece 91, the vibration of the center of the workpiece 91 is reduced.
  • An opening penetrating vertically may be used instead of the concave portion 16 .
  • ⁇ Vibration propagation unit 17> As shown in FIG. 30, instead of forming suction grooves on the suction surface 19 of the plate 20, a plurality of vibration propagating sections 17 may be attached below the plate 20.
  • FIG. The vibration propagating portion 17 is an elongated hexahedral metal rod or metal plate.
  • the vibration propagating portion 17 is fixed to the edge of the back surface 22 of the plate 20 .
  • the vibration propagating portion 17 is shorter than one side of the plate 20 .
  • the vibration propagating portion 17 has an outer surface in the same plane as the side 23 of the plate 20 .
  • the vibration propagating portion 17 does not have a suction hole.
  • the outer peripheral shape of the four vibration propagating portions 17 is the same as the outer peripheral shape of the plate 20 except for the four corners.
  • Suction ports 29 are attached to both ends of the vibration propagating portion 17 .
  • a suction pad 15 is attached to the lower portion of the suction port 29 .
  • Four suction ports 29 are attached to the corners of the plate 20 .
  • the four suction ports 29 suck four corners of the workpiece 91 .
  • the vibration propagating portion 17 comes into close contact with the outer edge of the work 91 .
  • the vibration propagating portion 17 transmits the vibration of the plate 20 to the outer edge of the workpiece 91 .
  • adsorption type A type in which the product in (a) of Fig. 29 can be adsorbed on the entire surface (whole surface adsorption type) Vibration propagation methods that are considered to be suitable for the full-surface suction type are considered to be compatible with any type, such as a four-vibrator type, a two-vibrator type, and a windmill type.
  • a horizontal movement peeling type When the workpiece 92 is peeled off by vibrating with two vibrators, a horizontal movement peeling type in which the work 92 is slid in the horizontal direction is possible.
  • a vibration propagation method that is considered to be most suitable for a type that only adheres to the outer edge is considered to be a windmill method that uses a rotational separation method that does not require central vibration.
  • the type that can only adsorb the outer edge does not transmit the vibration of the center to the product (work), so it is suitable for the product that can only be adsorbed at the edge.
  • a type that only picks up multiple positions with the suction pad shown in Fig. 30 multiple position suction type
  • the vibration propagation method for which the multi-position adsorption type is considered to be most suitable is the windmill method using the rotary separation method that does not require central vibration.
  • the multi-position suction type is suitable for a windmill type that does not require central vibration because the vibration propagating portion 17 fixed to the edge of the plate 20 is brought into contact with the product to vibrate the product and separate the product.
  • the multi-position pick-up type is suitable for products that can only be picked up at a plurality of positions.
  • Embodiment 3 In Embodiment 3, points different from Embodiments 1 and 2 will be described.
  • the vibration transfer device 300 has the elliptical vibration device 100 of the first embodiment.
  • a vibration transfer device 300 is obtained by adding a transfer plate 94 to the elliptical vibration device 100 of the first embodiment.
  • FIG. 31 is a perspective view of a vibration transfer device 300 according to Embodiment 3.
  • the vibration transfer device 300 is a device that inserts a plurality of parts into a plurality of recesses of the transfer plate 94 by vibration.
  • the transfer plate 94 is a square flat plate.
  • the transfer plate 94 is a resin plate or a metal plate.
  • a plurality of depressions 95 are formed in the transfer plate 94 .
  • a plurality of parts 99 are thrown into the transfer plate 94 at random.
  • the vibration transfer device 300 arranges the transfer plate 94 on the surface 21 of the plate 20 .
  • a suction groove 28 for sucking the transfer plate 94 is formed on the surface 21 of the plate 20 .
  • the outer circumference of the transfer plate 94 and the outer circumference of the suction groove 28 have the same size.
  • the transfer plate 94 is in close contact with the surface 21 of the plate 20 and vibrates vertically and elliptically together with the plate 20 .
  • the processor 84 causes the plate 20 to vibrate vertically and elliptically with traveling waves of the same amplitude, wavelength and frequency.
  • the processor 84 can rotate the part 99 on the plate 20, move it left and right, back and forth, and jump it.
  • the part 99 moves from one surface of the plate 20 to the other by elliptical oscillation and gets stuck in the depression 95 .
  • FIG. 5 due to the flapping phenomenon and bending phenomenon of the plate 20, the vibration at the edges of the transfer plate 94 is more intense than the vibration at the center of the transfer plate 94.
  • the parts 99 on the edge of the transfer plate 94 move more violently than the parts 99 on the center of the transfer plate 94 and tend to gather at the center of the transfer plate 94 .
  • the vibration at the center of the transfer plate 94 is small, there is little possibility that the part stuck in the depression 95 will pop out of the depression 95 .
  • the vibration angle of the vibrator may be inclined with respect to the surface 21 at an angle of more than 0 degrees and less than 90 degrees (0 degrees ⁇ W degrees ⁇ 90 degrees). It is desirable to vibrate upwards from 20 degrees to 70 degrees or from 290 degrees to 340 degrees in FIG. preferable.
  • a vibration transfer device 300 of Embodiment 3 has an elliptical vibration device 100 and a transfer plate 94 for transferring a component 99 onto the surface 21 of the plate 20 .
  • the transfer plate 94 is attracted to the surface 21 of the plate 20 .
  • the plate 20 causes the swing plate 94 to vibrate in a standing wave and an elliptical vibration.
  • the vibration transfer device 300 causes the transfer plate 94 to generate vibration without knots, thereby promoting the transfer of the component 99 to the transfer plate 94 .
  • the processor 84 performs a transfer operation with the tilted vibrators 41, 42 for a certain period of time. After that, the processor 84 stops operating the vibrators 41 and 42 and starts operating the vibrators 43 and 44 . Since the plate 20 vibrates only up and down, it fits halfway into the recess 95 , and the part obliquely fitted into the recess 95 fits completely into the recess 95 .
  • the vibration transfer device 300 has a pair of vibrators 41 and 42 that generate elliptical vibrations and a pair of vibrators 43 and 44 that generate only vertical vibrations.
  • the controller 80 operates by switching between a pair of vibrators 41 and 42 that generate elliptical vibration and a pair of vibrators 43 and 44 that generate only vertical vibration.
  • ⁇ Change example 2. ⁇ Addition of vibrators 43 and 44 with irregular elliptical vibration> 33 is obtained by adding vibrators 43 and 44 to the left and right sides 23 of the vibration transfer device 300 of FIG. Vibrator 41 and vibrator 43 are fixed to the same side 23 of plate 20 . Vibrators 42 and 44 are fixed to the same side 23 of plate 20 . Vibrators 43 and 44 are attached to plate 20 at an angle of inclination opposite to that of vibrators 41 and 42 . The vibrators 41 and 42 are attached at an angle of W degrees so as to open rearward. The vibrators 43 and 44 are attached at an inclination angle of 180-W degrees so as to open forward. The vibrators 43 and 44 generate an elliptical vibration with a shape different from that of the vibrators 41 and 42 with respect to the plate 20 .
  • the processor 84 performs a transfer operation with the tilted vibrators 41, 42 for a certain period of time.
  • the elliptical vibration causes the part 99 to move in the back-to-front direction.
  • the processor 84 stops operating the vibrators 41 and 42 and starts operating the vibrators 43 and 44 .
  • Different forms of elliptical vibration cause the part 99 to move in the back-to-front direction.
  • Processor 84 may alternate between vibrators 41, 42 and vibrators 43, 44 to generate different elliptical vibrations while moving component 99 forward.
  • a vibration transfer device 300 of FIG. 34 is obtained by adding vibrators 43 and 44 to the left and right sides 23 of the vibration transfer device 300 of FIG.
  • Vibrator 41 and vibrator 43 are fixed to the same side 23 of plate 20 .
  • Vibrators 42 and 44 are fixed to the same side 23 of plate 20 .
  • the vibrators 43 and 44 are attached to the plate 20 at the same angle of inclination as the vibrators 41 and 42, but the direction of rotation is opposite.
  • the vibrators 41 and 42 are attached at an angle of W degrees so as to open rearward.
  • the vibrators 43 and 44 are attached at an inclination angle of 180+W degrees so as to open rearward.
  • the vibrators 43 and 44 generate elliptical vibrations with opposite rotational directions to the plate 20 .
  • the processor 84 performs a transfer operation with the tilted vibrators 41, 42 for a certain period of time.
  • the clockwise elliptical oscillation causes the part 99 to move in the back-to-front direction.
  • the processor 84 stops operating the vibrators 41 and 42 and starts operating the vibrators 43 and 44 .
  • the counterclockwise elliptical oscillation causes the part 99 to move in the front to back direction.
  • Processor 84 may alternately switch between vibrators 41, 42 and vibrators 43, 44 to move component 99 back and forth.
  • Vibration transfer device 300 has a pair of vibrators 41 and 42 that generate clockwise elliptical vibration and a pair of vibrators 43 and 44 that generate counterclockwise elliptical vibration.
  • the controller 80 operates by switching between a pair of vibrators 41 and 42 that generate clockwise elliptical vibration and a pair of vibrators 43 and 44 that generate counterclockwise elliptical vibration.
  • ⁇ Change example 4 ⁇ Diagonal arrangement vibrator> 35, vibrators 41, 42, 43, and 44 are attached to the corners of the side 23 at inclination angles that open outward, as shown in FIG. By arranging four vibrators near the diagonal, a standing wave is generated along the diagonal. The component 99 rotates on the surface of the transfer plate 94 due to the elliptical vibration by the four vibrators.
  • the vibration units 40 may be attached at two diagonal positions on the left and right sides.
  • Embodiment 4 In Embodiment 4, points different from Embodiments 1, 2, and 3 will be described.
  • FIG. 36 is a perspective view of a vertical vibration device 400 and a workpiece vibration device 500 according to the fourth embodiment.
  • FIG. 37 is a perspective view of a work vibration device 500 according to Embodiment 4.
  • FIG. 38 is a front view of a vertical vibration device 400 and a workpiece vibration device 500 according to Embodiment 4.
  • FIG. 39 is a side view of a vertical vibration device 400 and a workpiece vibration device 500 according to Embodiment 4.
  • X indicates the left-right direction.
  • Y indicates the front-rear direction.
  • Z indicates the vertical direction.
  • the component supply device 600 has a vertical vibration device 400 that jumps the component 901 and a work vibration device 500 that holds the work 900 .
  • the component supply device 600 is a device that jumps the component 901 and supplies the component 901 to the workpiece 900 .
  • the vertical vibration device 400 has a base 10 , a plate 20 , a vibration absorbing portion 11 , a frame 990 , a vibration unit 40 , a plurality of distributors 47 and a controller 80 .
  • the vertical vibration device 400 vertically vibrates the plate 20 on the YZ plane, and vertically vibrates the plate 20 on the XZ plane with a standing wave.
  • the vertical vibration device 400 has a plate 20 and a plurality of vibrators 41 and 42 that vibrate a plurality of locations on the outer circumference of the plate 20 from positions outside the plate 20 .
  • the vertical vibrating device 400 sets the vibration directions of the plurality of vibrators 41 and 42 vertically with respect to the plate 20, fixes the plurality of vibrators 41 and 42 at positions outside the side 23 of the plate 20, and It has a plurality of distributors 47 that transmit the vibrations of 41 and 42 to the plate 20 .
  • the plurality of vibrators 41 and 42 of the vertical vibration device 400 generate a traveling wave 60 whose half length of the wavelength is larger than the size of the plate 20 of the vertical vibration device 400, and no node is generated in the plate 20 of the vertical vibration device 400.
  • a standing wave 70 is used for standing wave oscillation.
  • the plate 20 of the vertical vibration device 400 has a fixing point 24 to which the distributor 47 is fixed, and vibrates in a standing wave with the fixing point 24 as a fulcrum 26 .
  • the vertical vibration device 400 causes the component 901 to jump.
  • the vertical vibration device 400 has a frame 990 fixed on the plate 20 .
  • the frame 990 forms a parts reservoir 991 in which the parts 901 are accumulated.
  • the size of the component reservoir 991 in plan view is smaller than the size of the plate 20 .
  • Concavities and convexities are formed on the bottom surface 995 of the component reservoir 991 .
  • the vibration absorber 11 is attached between the base 10 and the plate 20 to absorb vibration.
  • a plurality of vibrators 41 and 42 vibrate a plurality of locations on the outer circumference of the plate 20 from positions outside the plate 20 .
  • the plurality of vibrators 41 and 42 simultaneously generate traveling waves 60 having the same frequency, wavelength, and amplitude at a plurality of locations on the outer periphery of the plate 20 to vibrate the plate 20 up and down.
  • the plurality of distributors 47 set the vibrating directions of the plurality of vibrators 41 and 42 up and down with respect to the plate 20, fix the plurality of vibrators 41 and 42 at positions outside the side 23 of the plate 20, and distribute the plurality of vibrators.
  • the vibrations of 41 and 42 are transmitted to the plate 20.
  • the vertical vibration device 400 causes the part 901 to jump and hit the adhesive 902 to adhere the part 901 to the lower surface of the workpiece 900 .
  • the work vibration device 500 has the work separation device 200 of the second embodiment.
  • the work vibrating device 500 uses the elliptical vibrating device 100 of the first embodiment upside down and with a smaller base 10 .
  • a work vibration device 500 has a base 10 , a plate 20 , a cylinder 30 , a vibration unit 40 and a controller 80 .
  • the plurality of vibrators 41 and 42 vibrate a plurality of locations on the outer periphery of the plate 20 of the work vibrating device 500 from positions outside the plate 20 of the work vibrating device 500 .
  • the plurality of distributors 47 fix the vibration directions of the plurality of vibrators 41 and 42 of the work vibrating device 500 obliquely to the plate 20 of the work vibrating device 500 .
  • a plurality of distributors 47 fix the plurality of vibrators 41 , 42 of the work vibrating device 500 at positions outside of the side 23 of the plate 20 of the work vibrating device 500 .
  • the plurality of distributors 47 transmit the vibrations of the plurality of vibrators 41 and 42 of the work vibrating device 500 to the plate 20 of the work vibrating device 500 .
  • the plurality of vibrators 41 and 42 of the work vibrating device 500 simultaneously generate traveling waves 60 having the same frequency, the same wavelength, and the same amplitude at a plurality of locations on the outer periphery of the plate 20 of the work vibrating device 500.
  • 500 plates 20 are elliptically vibrated.
  • the plurality of vibrators 41 and 42 of the workpiece vibration device 500 generate a traveling wave 60 whose half wavelength length is larger than the size of the plate 20 of the workpiece vibration device 500, and no node is generated on the plate 20 of the workpiece vibration device 500.
  • a standing wave 70 is used for standing wave oscillation.
  • the plate 20 of the work vibrating device 500 has a fixing point 24 to which the distributor 47 is fixed, and vibrates in a standing wave with the fixing point 24 as a fulcrum 26 .
  • the plate 20 of the work vibrating device 500 has a suction surface 19 for sucking the work 900 on its lower surface.
  • the plate 20 of the workpiece vibrating device 500 causes the workpiece 900 adsorbed on the adsorption surface 19 to vibrate in a standing wave and elliptically.
  • the work vibration device 500 is a device that holds the work 900 .
  • the work vibration device 500 holds the work 900 with the side of the work 900 having the adhesive 902 facing downward.
  • the work vibration device 500 sucks and holds the work 900 from above.
  • the work vibration device 500 has a cylinder 30 for moving the work 900 up and down.
  • the cylinder 30 vertically moves the rod 31 to move the plate 20 vertically.
  • a work vibration device 500 holds a work 900 having an adhesive 902 applied to the bottom surface thereof.
  • the work vibration device 500 positions the work 900 at a height lower than the jump height of the part 901 .
  • the work vibrator 500 vibrates the work 900 after attaching the part 901 to the adhesive 902 .
  • the work vibrating device 500 uses a plurality of vibrators 41 and 42 fixed with their vibration directions oblique to the surface 21 of the plate 20 to simultaneously vibrate the same frequency, same wavelength, and same vibration at a plurality of locations on the outer periphery of the plate 20 .
  • a traveling wave 60 having an amplitude is generated to vibrate the work 900 in an elliptical manner and to vibrate the work 900 in a standing wave.
  • the workpiece 900 is a rectangular plate.
  • a workpiece 900 is a flat circuit board on which an electric circuit is formed.
  • a plurality of electrodes 903 are arranged and formed on the surface of the workpiece 900 .
  • the surface of the workpiece 900 is a flat plane without unevenness.
  • a conductive adhesive 902 is printed on the electrode 903 of the workpiece 900 by a screen printer.
  • the workpiece 900 is a metal plate such as a copper plate, an iron plate, an aluminum plate, a ceramic plate, a substrate, a resin plate, a glass plate, or the like.
  • a suitable example of the workpiece 900 is a printed wiring board or a semiconductor wafer on which electric circuits are already formed.
  • Suitable examples of the conductive adhesive 902 are soldering flux, solder paste, or conductive adhesive.
  • the workpiece 900 holds the component 901 on the lower surface of the workpiece 900 only by the adhesive force of the adhesive 902 .
  • the work vibrating device 500 vibrates the plurality of vibrators 41 and 42 by a plurality of distributors 47 fixed to positions outside the plate 20 away from the side 23 of the plate 20 so that the vibrators 41 and 42 vibrate vertically with respect to the plate 20 . is transmitted to the plate 20 to vibrate the plate 20.
  • the work vibration device 500 holds the work 900 with the surface coated with the adhesive 902 facing downward.
  • the work vibration device 500 lowers the work 900 toward the parts reservoir 991 .
  • the vertical vibrating device 400 uses a plurality of vibrators 41 and 42 that are fixed with their vibrating directions up and down with respect to the surface 21 of the plate 20 to simultaneously vibrate at a plurality of locations on the outer circumference of the plate 20 with the same frequency, same wavelength, and same vibration.
  • a traveling wave 60 of amplitude is generated to vibrate the plate 20 up and down.
  • the work vibrating device 500 holds the work 900 having an adhesive 902 applied to the lower surface above the plate 20 for a certain period of time.
  • the vertical vibration device 400 causes the part 901 to jump on the plate 20 to hit the adhesive 902 and adhere the part 901 to the lower surface of the workpiece 900 .
  • the part 901 adheres only by the adhesive strength of the adhesive 902 .
  • the work vibrator 500 does not attract the part 901 to the work 900 by magnetic force.
  • the work vibration device 500 does not cause the part 901 to be attracted to the work 900 by the suction force.
  • Work vibration device 500 does not pick up part 901 through a mask.
  • the work vibration device 500 vibrates the work 900 after raising the work 900 . Due to this vibration, the part 901 shakes or rolls on the lower surface of the work 900, and the part 901 that is not sufficiently adhered to the adhesive 902 is shaken off. Furthermore, the component 901 sandwiched between the components 901 and the component 901 or the component 901 attached by static electricity is shaken off. As shown in FIG. 44, the workpiece 900 holds the part 901 on the lower surface of the workpiece 900 only by the adhesive force of the adhesive 902 .
  • the parts 901 are supplied by a repair device (not shown) to the adhesive 902 to which the parts 901 have not adhered, such as the adhesive 902x in FIG.
  • the component supply device 600 simultaneously vibrates the plate 20 at a plurality of locations on the outer periphery of the plate 20 with the same frequency, the same wavelength, and the same vibration by using a plurality of vibrators 41 and 42 fixed with their vibration directions up and down with respect to the surface 21 of the plate 20 .
  • a vertical vibration device 400 that generates a traveling wave 60 of amplitude to vibrate a workpiece 900 up and down, and a workpiece vibration device 500 that holds a workpiece 900 with an adhesive 902 applied to the lower surface thereof, are used to vibrate the component on the plate 20 .
  • the part 901 is brought into contact with the adhesive 902 to adhere the part 901 to the lower surface of the workpiece 900 .
  • the work vibrating device 500 has an elliptical vibrating device 100 .
  • the work vibrating device 500 has a cylinder 30 that disposes the plate 20 of the elliptical vibrating device 100 below and moves the plate 20 in the vertical direction.
  • the plate 20 holds a workpiece 900 with a component 901 adhered to its lower surface.
  • the elliptical vibration device 100 vibrates the plate 20 while holding the workpiece 900 to which the component 901 is adhered.
  • Embodiment 5 In Embodiment 5, points different from Embodiments 1, 2, 3, and 4 will be described.
  • FIG. 46 is a diagram showing a screen printing apparatus 700 according to Embodiment 5.
  • the screen printing apparatus 700 has a table unit 710 , a screen plate unit 720 and a squeegee unit 730 .
  • the table unit 710 , the screen plate unit 720 and the squeegee unit 730 have the vibration unit 40 .
  • the base 10 is the housing of the screen printing device 700 .
  • FIG. 47 is a perspective view of the table unit 710 of the screen printer 700.
  • the table unit 710 uses the elliptical vibration device 100 described in the first embodiment.
  • the table unit 710 has a print table 711 on which the work 900 is mounted.
  • the print table 711 corresponds to the plate 20 of the elliptical vibration device 100 .
  • the printing table 711 has a suction surface 19 shown in FIG.
  • the workpiece 900 vibrates due to the vibration of the printing table 711 .
  • FIG. 48 is a perspective view of the screen printing unit 720 of the screen printing apparatus 700.
  • the screen plate unit 720 has a plate frame 721 and a screen 722 .
  • the screen frame 721 corresponds to the plate 20 of the elliptical vibration device 100 .
  • Vibration units 40 are fixed on the left and right sides of the frame 721 .
  • the screen 722 vibrates as the screen frame 721 vibrates.
  • the vibration absorbing portions 11 are fixed to four corners of the upper surface of the frame 721 .
  • the two bases 10 are fixed portions of the screen plate, and the upper portions of the four vibration absorbing portions 11 are fixed at four points on the bottom surface.
  • the printing frame 721 has four fixed shafts 13 on the upper surface at four corners.
  • Four fixed shafts 12 are provided at four locations on the bottom surface of two bases 10 .
  • the vibration absorbing portion 11 is a coupling member or joint member that connects the frame 721 and the base 10 .
  • the vibration absorbing portion 11 absorbs the vibration of the screen plate and prevents the vibration of the screen frame 721 from being transmitted to the base 10 .
  • the vibration absorbing portion 11 ensures free vibration of the frame 721 with respect to the base 10 .
  • FIG. 49 is a perspective view of the squeegee unit 730 of the screen printing apparatus 700.
  • the squeegee unit 730 has a squeegee 731 and a holder 732 .
  • a holder 732 corresponds to the plate 20 .
  • Vibration units 40 are fixed to the left and right upper surfaces of the holder 732 . As the holder 732 vibrates vertically, the squeegee 731 vibrates only vertically.
  • the vibration absorbing portion 11 is a coupling member or joint member that connects the rod 31 and the holder 732 .
  • the vibration absorbing portion 11 absorbs the vibration of the holder 732 and prevents the vibration of the holder 732 from being transmitted to the base 10 and the cylinder 30 .
  • the vibration absorbing portion 11 ensures free vibration of the holder 732 with respect to the base 10 and the cylinder 30 .
  • the screen printing apparatus 700 may have at least one of the table unit 710, the screen plate unit 720, and the squeegee unit 730 described above.
  • Screen printing apparatus 700 is characterized in that at least one of table unit 710 , screen printing unit 720 and squeegee unit 730 uses elliptic vibration apparatus 100 of Embodiment 1.
  • FIG. 1

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Abstract

Un dispositif de vibration elliptique (100) comprend : une plaque (20) ; une pluralité de vibreurs (41, 42) ; une pluralité de distributeurs (47) qui fixent la pluralité de vibreurs (41, 42) dans des positions sur les côtés extérieurs de la plaque (20) de manière à ce qu'ils soient séparés des côtés de la plaque (20) et inclinés dans la direction de vibration de la pluralité de vibreurs (41, 42) par rapport à la plaque (20), et qui transfèrent une vibration de la pluralité de vibreurs (41, 42) à la plaque (20) ; et un dispositif de commande (80) qui commande la vibration de la pluralité de vibreurs.
PCT/JP2022/005459 2021-06-01 2022-02-10 Dispositif de vibration elliptique, procédé de vibration, dispositif de division de pièce à travailler, dispositif de transfert de vibration, dispositif de vibration de pièce à travailler et dispositif de sérigraphie WO2022254804A1 (fr)

Priority Applications (1)

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TW111113759A TW202300428A (zh) 2021-06-01 2022-04-12 橢圓振動裝置、振動方法、工件分離裝置、振動壓送裝置、工件振動裝置及網版印刷裝置

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009066762A (ja) * 2007-09-10 2009-04-02 Sharp Corp スクリーン印刷方法及び装置
WO2020090404A1 (fr) * 2018-10-31 2020-05-07 マイクロ・テック株式会社 Dispositif de vibration, procédé de vibration et dispositif de sérigraphie

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009066762A (ja) * 2007-09-10 2009-04-02 Sharp Corp スクリーン印刷方法及び装置
WO2020090404A1 (fr) * 2018-10-31 2020-05-07 マイクロ・テック株式会社 Dispositif de vibration, procédé de vibration et dispositif de sérigraphie

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