WO2022245087A1

WO2022245087A1 - Strap and manufacturing method therefor

Info

Publication number: WO2022245087A1
Application number: PCT/KR2022/006997
Authority: WO
Inventors: 최현석; 한상효; 한병희
Original assignee: 주식회사 에스엠티
Priority date: 2021-05-18
Filing date: 2022-05-16
Publication date: 2022-11-24

Abstract

A strap according to one embodiment of the present disclosure comprises: a first member including a first base having a lower surface, and a first core part engraved in the lower surface; and a second member including a second base having an upper surface, and a second core part engraved in the upper surface, wherein at least a portion of the lower surface and the upper surface is surface-treated, the first member is bonded to the second member so that the first core part faces the second core part, and thus a junction surface is formed between the upper surface and the lower surface, and the first base and the second base correspond to stainless steel.

Description

Strap and its manufacturing method

The present disclosure relates to a strap and a manufacturing method thereof, and more particularly, to a strap including a core portion and a manufacturing method thereof.

[Assignment identification number] 2121008

[Assignment number] E2121008

[Name of department] Gyeonggi-do

[Task management (professional) organization name] Gyeonggi Province Economic Science Promotion Agency

[Research project name] 2021 small-manufacturing company development support project

[Research project title] Development of RF strap for electromagnetic wave countermeasures for semiconductor plasma process equipment

[Contribution rate] 1/1

[Name of project performing organization] SMT Co., Ltd.

[Research period] 2021.05.01 ~ 2021.12.31

In general, a plasma processing apparatus is used to deposit a thin film on a substrate used for a semiconductor, a solar panel, or a liquid crystal display (LCD). Plasma processing devices are devices that process substrates using techniques including etching, physical vapor deposition (PVD), chemical vapor deposition (CVD), ion implantation, and resist removal. A plasma processing apparatus includes a reaction chamber including an upper electrode and a lower electrode. A substrate is positioned between the upper electrode and the lower electrode, and plasma is generated in a space between the electrodes to excite the processing gas into a plasma state, thereby processing the substrate in the reaction chamber.

In the course of processing the substrate, RF power is applied to one of both electrodes and the other electrode is grounded. In a conventional PE (Plasma Enhanced) type plasma processing apparatus, RF power is applied to an upper electrode, and a bracket installed on a lower surface of a lower electrode is fixed through an RF strap to be grounded by a grounding means at the bottom of the chamber. In this case, the lower electrode, which also serves to load the substrate, continuously moves up and down according to supply of the substrate, plasma treatment, and transport of the substrate to the outside. Accordingly, the RF strap, which is a grounding means for electrically connecting the bracket attached to the lower surface of the lower electrode and the bottom of the chamber, is repeatedly bent and unfolded according to the repetitive lifting operation of the lower electrode.

Embodiments disclosed herein provide a strap in which a plurality of members including a core portion are joined, and a manufacturing method thereof.

According to the embodiments disclosed herein, the RF grounding characteristics due to the low electrical conductivity due to the use of stainless steel based materials and the life shortening problem due to plasma etching, which is a problem in the RF strap exposed to the plasma environment The degradation problem can be solved at the same time.

A strap according to an embodiment of the present disclosure includes a first member including a first base having a lower surface and a first core portion engraved on the lower surface, and a second base having an upper surface and a second core portion engraved on the upper surface. It includes a second member, and at least some of the lower surface and the upper surface are surface-treated, and the first and second members are bonded so that the first core portion and the second core portion face each other to form a joint surface between the upper and lower surfaces, The first base and the second base are made of stainless steel, Elgiloy, Hasteloy, Astroloy, Inconel, Rene, Udimet, Corresponds to Waspaloy, Nimonie, Incoloy, Pyromet, or Discaloy.

According to one embodiment, the first member and the second member have structures corresponding to each other.

According to one embodiment, surface roughness is increased by surface treatment.

According to one embodiment, the first core portion corresponds to Cu or BeCu, the thickness of the strap is 300 μm or less, and the width is 100 mm or less.

A strap according to another embodiment of the present disclosure includes a first member including a first base having a lower surface and a first core portion formed intaglio on the lower surface, and a second member including a second base having an upper surface, and And at least a part of the upper surface is surface-treated, the first member and the second member are bonded so that the first core portion and the upper surface face each other to form a joint surface between the upper surface and the lower surface, and the first base and the second base are made of stainless steel. corresponds to

A strap manufacturing method according to another embodiment of the present disclosure includes forming a first member on the lower surface of a first base with a first core portion engraved thereon, forming a second member on an upper surface of a second base with a second core portion engraved thereon. and bonding the first member and the second member so that the first core part and the second core part face each other, and the first base and the second base correspond to stainless steel.

According to one embodiment, prior to the joining step, surface treatment of at least a portion of the lower surface of the first member and the upper surface of the second member is further included.

A strap manufacturing method according to another embodiment of the present disclosure includes forming a first member having a first core portion engraved on a lower surface of a first base, forming a second member including a second base having an upper surface, and bonding the first member and the second member so that the first core portion and the upper surface thereof face each other, wherein the first base and the second base correspond to stainless steel.

According to various embodiments of the present disclosure, since the width, thickness, or length of the strap can be adjusted by bonding the first member and the second member when manufacturing the strap, it is possible to manufacture a strap suitable for use or use environment.

In addition, according to various embodiments of the present disclosure, it is possible to manufacture a strap whose elasticity is maintained for a long time.

In addition, according to various embodiments of the present disclosure, the base made of a material with high durability covers the core part made of a material having excellent conductivity, so that the high conductivity of the strap is maintained and the corrosion resistance and plasma resistance can be improved. have.

Effects of the present disclosure are not limited to the effects mentioned above, and other effects not mentioned will be clearly understood by those skilled in the art from the description of the claims.

1 is a perspective view of a strap according to an embodiment of the present disclosure.

Figure 2 is a perspective view of a first member and a second member formed intaglio according to an embodiment of the present disclosure.

3 is a perspective view of a member according to various embodiments of the present disclosure.

4 is a perspective view of a first member and a second member subjected to surface treatment according to an embodiment of the present disclosure.

5 shows a state in which a first member and a second member are bonded according to an embodiment of the present disclosure.

6 is a perspective view of a strap according to another embodiment of the present disclosure.

7 is a flowchart illustrating an example of a method of manufacturing a strap according to an embodiment of the present disclosure.

8 is a flowchart illustrating an example of a method of manufacturing a strap according to another embodiment of the present disclosure.

Hereinafter, specific details for the implementation of the present disclosure will be described in detail with reference to the accompanying drawings. However, in the following description, if there is a risk of unnecessarily obscuring the gist of the present disclosure, detailed descriptions of well-known functions or configurations will be omitted.

In the accompanying drawings, identical or corresponding elements are given the same reference numerals. In addition, in the description of the following embodiments, overlapping descriptions of the same or corresponding components may be omitted. However, omission of a description of a component does not intend that such a component is not included in an embodiment.

Terms used in this disclosure will be briefly described, and the disclosed embodiments will be described in detail. The terms used in this specification have been selected from general terms that are currently widely used as much as possible while considering the functions in the present disclosure, but they may vary according to the intention of a person skilled in the related field, a precedent, or the emergence of new technologies. In addition, in a specific case, there is also a term arbitrarily selected by the applicant, and in this case, the meaning will be described in detail in the description of the invention. Therefore, the terms used in the present disclosure should be defined based on the meaning of the terms and the general content of the present disclosure, not simply the names of the terms.

In this disclosure, expressions in the singular number include plural expressions unless the context clearly dictates that they are singular. Also, plural expressions include singular expressions unless the context clearly specifies that they are plural.

In the present disclosure, when a part includes a certain component, this means that it may further include other components without excluding other components unless otherwise stated.

In the present disclosure, an upper portion of a figure may be referred to as a “top” or “upper side” of a configuration shown in the figure, and a lower portion thereof may be referred to as a “lower” or “lower side”. In addition, the portion between the upper and lower portions or the upper and lower portions of the illustrated configuration in the drawings may be referred to as “side” or “side”. Relative terms such as “upper” and “upper” may be used to describe relationships between components shown in the drawings, and the present disclosure is not limited by such terms.

In the present disclosure, a direction toward an internal space of a structure may be referred to as “inside” and a direction protruding into an open external space may be referred to as “outside.” Relative terms such as “inner” and “outer” may be used to describe relationships between components shown in the drawings, and the present disclosure is not limited by such terms.

Reference to "A and/or B" herein means A, or B, or A and B.

In the present specification, when a part is said to be connected to another part, this includes not only the case where it is directly connected, but also the case where it is connected with another component in between.

Advantages and features of the disclosed embodiments, and methods of achieving them, will become apparent with reference to the following embodiments in conjunction with the accompanying drawings. However, the present disclosure is not limited to the embodiments disclosed below and may be implemented in various different forms, but only the present embodiments make the present disclosure complete, and the present disclosure does not extend the scope of the invention to those skilled in the art. It is provided only for complete information.

1 is a perspective view of a strap 100 according to one embodiment of the present disclosure. In one embodiment, strap 100 may be formed in a flat plate shape. For example, as shown in FIG. 1 , the strap 100 may correspond to a rectangular parallelepiped plate having a pair of opposite surfaces having a large area. In one embodiment, the strap 100 may be formed of one or more materials selected to be suitable for its use or use environment. For example, the strap 100 may be formed in a width (y-axis direction), thickness (z-axis direction), and length (x-axis direction) suitable for a purpose or use environment.

As shown in FIG. 1 , the strap 100 may include a first member 110 and a second member 120 . In this case, the first member 110 may include a first base 112 and a first core part 114, and the second member 120 may include a second base 122 and a second core part 124. ) may be included. In one embodiment, the first member 110 and the second member 120 may have structures corresponding to each other.

In the first member 110 , the first base 112 may form a basic outer shape of the first member 110 . For example, when the first base 112 is formed in a flat plate shape, the first member 110 may also be formed in a flat plate shape. In one embodiment, the first base 112 may be configured to have a lower surface. In this case, the first core part 114 may be formed on the lower surface of the first base 112 . As shown in FIG. 1 , the first core part 114 may be engraved on the lower surface of the first base 112 . In this case, one surface of the first core part 114 may be located on the same plane as the lower surface of the first base 112, and the rest except for one surface of the first core part 114 is the first base. (112).

In the second member 120 , the second base 122 may form a basic outline of the second member 120 . For example, when the second base 122 is formed in a flat plate shape, the second member 120 may also be formed in a flat plate shape. In one embodiment, the second base 122 may be configured to have a top surface. In this case, the second core part 124 may be formed on the upper surface of the second base 122 . As shown in FIG. 1 , the second core part 124 may be engraved on the lower surface of the second base 122 . In this case, one surface of the second core part 124 may be located on the same plane as the upper surface of the second base 122, and the rest except for one surface of the second core part 124 is the second base. (122).

Materials of the first base 112 , the first core portion 114 , the second base 122 , and the second core portion 124 may vary depending on the purpose and use environment of the strap 100 . In one embodiment, when the strap 100 is an RF strap used in a plasma process equipment, the first base 112 and the second base 122 may be made of a material that maintains durability in a plasma environment. For example, the first base 112 and the second base 122 may be made of stainless steel, Elgiloy, Hasteloy, Astroloy, Inconel, René (Rene), Udimet, Waspaloy, Nimonie, Incoloy, Pyromet, Discaloy, and the like. Specifically, the first base 112 and the second base 122 may correspond to STS304. The first base 112 and the second base 122 may correspond to different materials among the above materials.

In one embodiment, for use as an RF strap, the first core portion 114 and/or the second core portion 124 may be made of at least one of Cu, BeCu, CuFe, CuNi, CuCr, and CuW. In this case, the strap 100 may have a thickness of 300 μm or less in the z-axis direction and a width of 100 mm or less in the y-axis direction. In the case of designing such a thickness, elasticity and durability of the strap can be maintained together while maintaining high conductivity of the core portion.

For example, in the process of bonding the two members using a rolling process after forming the core part intaglio on the base part, the core part is broken or the thickness of the core part is not sufficiently secured, so that sufficient conductivity for use in the RF strap is not secured. problems may arise. In addition, when the thickness of the RF strap is too thick, a phenomenon in which elasticity of the RF strap for use in a plasma process equipment is not secured also occurs.

The first base 112 and the second base 122 are made of stainless steel, for example, STS304, and the first core part 114 and the second core part 124 are made of copper or a copper alloy. In this case, the thickness of the strap 100 in the z-axis direction is 300 μm or less, and the width of the strap 100 in the y-axis direction is 100 mm or less, thereby solving the above problems. These figures indicate that the first core part 114 and the second core part 124 are made of copper or a copper alloy, and the first base 112 and the second base 122 are made of Elgiloy or Hastelloy. Hasteloy, Aastroloy, Inconel, Rene, Udimet, Waspaloy, Nimonie, Incoloy, Pyromet ), it can also be applied when it corresponds to Discaloy, etc.

In one embodiment, at least a portion of the lower surface of the first base 112 and the upper surface of the second base 122 may be surface-treated. For example, as shown in FIG. 1 , the lower surface 116 of the first base 112 may be surface-treated, and the upper surface 126 of the second base 122 may be surface-treated. Surface roughness of the

surfaces

116 and 126 of the first base 112 and/or the second base 122 subjected to surface treatment may increase. In one embodiment, methods such as physical polishing, heat treatment or cooling treatment, and solution treatment may be used to treat the surface of the first base 112 and/or the second base 122 .

In one embodiment, surface roughness of the first base 112 and/or the second base 122 may be increased by using at least one of a chemical etching method and a physical scratching method for surface treatment. Specifically, the chemical etching method may use at least one of an organic solvent cleaning method, a basic solution cleaning method, and an acid solution cleaning method, and a physical scratching method may include a shot blasting method and a wire brushing method. , at least one of wire abrasion, sand blasting, and machining may be used.

For example, when an RF strap formed by bonding two members is used in a plasma environment, durability may be a problem, such as separation of the members during repeated folding and unfolding of the RF strap. Accordingly, the durability of the RF strap can be remarkably improved by surface treatment and then rolling treatment on the surface of the base.

In one embodiment, the strap 100 may have a form in which the first member 110 and the second member 120 are joined. Specifically, as shown in FIG. 1, the strap 100 has a first core portion 114 and a second core portion 124 facing each other so that the first member 110 and the second member 120 are bonded. can be in the form In this case, the strap 100 may be formed with a bonding surface 130 where the lower surface of the first base 112 and the upper surface of the second base 122 come into contact.

In the above-described strap 100, the first member 110 includes the first base 112 and the first core portion 114, and the second member 120 includes the second base 122 and the second core portion ( 124), but is not limited thereto. For example, the second member 120 of the strap 100 may include only the second base 122 without the second core portion 124 . In another example, only one of the two members of the strap 100 may include a core portion (see FIG. 6 ).

Figure 2 is a perspective view of the first member 210 and the second member 220 formed intaglio according to an embodiment of the present disclosure. The first member 210 shown in FIG. 2 (a) and the second member 220 shown in FIG. 2 (b) are the first member 110 and the second member 120 shown in FIG. 1, respectively. can be matched. As shown in FIG. 2 , the first member 210 includes a first base 230 and a first core part 240, and the second member 220 includes a second base 250 and a second core. A portion 260 may be included. The first base 230, the first core part 240, the second base 250 and the second core part 260 shown in FIG. 2 are the first base 112 shown in FIG. 1, the first The core portion 114, the second base 122, and the second core portion 124 may correspond to each other.

According to one embodiment, when the first base 230 of the first member 210 has a central portion, the first core portion 240 may be formed intaglio. The second core part 260 may be formed intaglio at the central part of the upper surface of the second base 250 of the second member 220 . The intaglio formation may correspond to inlay cladding.

The first member 210 includes the first base 230 and the first core part 240, and the second member 220 includes the second base 250 and the second core part 260, but is limited thereto. It doesn't work. For example, the second member 220 of the strap may include only the second base 250 without the second core part 260 . In another example, the first member 210 of the strap may include only the first base 230 without the first core portion 240 . In this case, the strap may have the structure of the strap shown in FIG. 6 .

3 is a perspective view of a member according to various embodiments of the present disclosure. The member 310 shown in FIG. 3(a) or the member 320 shown in FIG. 3(b) is the first member 210 shown in FIG. 2(a) and/or shown in FIG. 2(b) may correspond to the second member 220.

In one embodiment, the core portion may be divided into two or more. For example, the core part of the member 310 may be composed of two

core parts

312 and 314 divided along the x-axis direction of the strap. In addition, the core portion of the member 320 may be composed of two core portions 322 and 324 divided along the y-axis direction of the strap.

In one embodiment, the divided core parts may be spaced apart from each other as shown in FIG. 3(c).

The above-described core portion is shown as being divided into two, respectively, but is not limited thereto. For example, the core portion may include core portions of different materials divided into an arbitrary number suitable for the use and/or use environment of the strap.

4 is a perspective view of the first member 210 and the second member 220 subjected to surface treatment according to an embodiment of the present disclosure.

Members obtained by surface treatment of the members disclosed in FIGS. 2(a) and 2(b) may correspond to the members shown in FIGS. 4(a) and 4(b), respectively.

In one embodiment, the lower surface of the first member 210 and the upper surface of the second member 220 are treated so that the lower surface of the first member 210 and the upper surface of the second member 220 can be easily bonded. . For example, when the lower surface of the first member 210 and the upper surface of the second member 220 are made of a material that is not easily bonded (eg, stainless steel), the first member 210 and the second member 220 ) may be difficult to connect. Accordingly, the lower surface of the first member 210 and/or the upper surface of the second member 220 may be surface treated to facilitate bonding. For example, when pressing or rolling the first member 210 and the second member 220, the lower surface of the first member 210 and the upper surface of the second member 220 are bonded to each other through surface treatment. The roughness of the lower surface of the first member 210 and the upper surface of the second member 220 may be increased. Alternatively, a buffer layer may be inserted between the first member 210 and the second member 220 to increase adhesion between the members.

Although it is described that the surface treatment of the member is performed after forming the intaglio of the core part, the present disclosure is not limited thereto. For example, after the surface treatment of the member is made, the core portion may be engraved on the member.

The surface treatment of the member brings about an effect of improving the bonding force during bonding between the members described in FIG. 5 . The following data is data when both members are made of stainless steel, and it can be confirmed that the surface roughness of at least the members must be 10 μm or more.

No.No.	제1 부재 재질 거칠기 (Ra, ㎛)First member material roughness (Ra, ㎛)	제2 부재 재질 거칠기 (Ra, ㎛)2nd member material roughness (Ra, μm)	플라즈마 환경 내구성 테스트 통과 여부Plasma environment durability whether the test passed
1번number 1	1One	1One	FailFail
2번No.2	55	55	FailFail
3번number 3	1010	1010	PassPass
4번4 times	5050	5050	PassPass
5번number 5	100100	100100	PassPass

The plasma environment durability test was conducted by installing the strap on a plasma device, repeating the bending and unfolding motion 300 times (based on 10 years of use of the device), and then checking the durability of the strap.

5 shows a state in which the first member 210 and the second member 220 are bonded according to an embodiment of the present disclosure.

In one embodiment, a method such as rolling or pressure welding may be used to press the first member 210 and the second member 220 . For example, in a state in which the first member and the second member are overlapped so that the first core portion and the second core portion face each other, the first member and the second member may be passed between rotating rolls and pressed. In another example, after surface treatment of at least a portion of the lower surface of the first member and the upper surface of the second member, in a state in which the first and second members are overlapped so that the first core portion and the second core portion face each other, the first member and The second member can be simply pressed in the vertical direction.

Rolling process conditions according to an embodiment are as follows.

Rolling temperature: 80℃~600℃

Rolling pressure: 100,000 kgf/m ² ~ 1,000,000 kgf/m ²

In one embodiment, a first member having a first core part engraved on the lower surface of the first base is formed (S710). A second member having a second core part engraved on the upper surface of the second base is formed (S720). The first base and the second base may correspond to stainless steel.

At least a part of the lower surface of the first member and the upper surface of the second member is subjected to surface treatment (S730). Surface roughness can be increased by surface treatment.

The first member and the second member are bonded so that the first core portion and the second core portion face each other (S740). The first member and the second member may be joined by applying pressure to the first member and the second member in the direction of the arrow shown in FIG. 5 while the first member and the second member face each other.

In one embodiment, a first member having a first core part engraved on the lower surface of the first base is formed (S810). A second member including a second base having an upper surface is formed (S820). The first base and the second base correspond to stainless steel. At least a part of the lower surface of the first member and the upper surface of the second member is subjected to surface treatment (S830). Surface roughness can be increased by surface treatment. The first member and the second member are joined so that the first core portion and the upper surface face each other (S840).

The preferred embodiments of the present invention described above have been disclosed for illustrative purposes, and those skilled in the art with ordinary knowledge of the present invention will be able to make various modifications, changes and additions within the spirit and scope of the present invention, and such modifications, changes and additions should be regarded as falling within the scope of the claims.

Those skilled in the art to which the present invention pertains can make various substitutions, modifications, and changes without departing from the technical spirit of the present invention. is not limited by

Claims

As a strap,

A first member including a first base having a lower surface, and a first core portion formed intaglio on the lower surface; and

A second member including a second base having an upper surface and a second core part engraved on the upper surface

including,

At least a part of the lower surface and the upper surface is surface-treated,

The first core portion and the second core portion are bonded to each other so that the first member and the second member are bonded to form a joint surface between the upper surface and the lower surface,

The first base and the second base are made of stainless steel, Elgiloy, Hasteloy, Astroloy, Inconel, Rene, Udimet ), Waspaloy, Nimonie, Incoloy, Pyromet, or Discaloy.
According to claim 1,

The first member and the second member have structures corresponding to each other, the strap.
According to claim 2,

A strap in which surface roughness is increased by the surface treatment.
According to claim 1,

The first core portion corresponds to Cu or BeCu,

wherein the strap has a thickness of 300 μm or less and a width of 100 mm or less.
As a strap,

A first member including a first base having a lower surface, and a first core portion formed intaglio on the lower surface; and

A second member including a second base having a top surface

including,

At least a part of the lower surface and the upper surface is surface-treated,

The first core portion and the upper surface are bonded to each other so that the first member and the second member are bonded to form a bonding surface between the upper surface and the lower surface,

The first base and the second base correspond to stainless steel, the strap.
As a strap manufacturing method,

Forming a first member in which a first core part is engraved on the lower surface of the first base;

Forming a second member in which a second core part is engraved on the upper surface of the second base; and

Bonding the first member and the second member so that the first core part and the second core part face each other.

including,

Wherein the first base and the second base correspond to stainless steel, strap manufacturing method.
According to claim 6,

Prior to the bonding step, further comprising the step of surface-treating at least a portion of the lower surface of the first member and the upper surface of the second member, the strap manufacturing method.
According to claim 7,

Strap manufacturing method in which the roughness of the surface is increased by the surface treatment.
According to claim 6,

The first member and the second member have a structure corresponding to each other, the strap manufacturing method.
As a strap manufacturing method,

Forming a first member in which a first core part is engraved on the lower surface of the first base;

forming a second member including a second base having an upper surface; and

Bonding the first member and the second member so that the first core portion and the upper surface face each other

including,

Wherein the first base and the second base correspond to stainless steel, strap manufacturing method.