KR102584206B1 - Strap and manufacturing method thereof - Google Patents

Abstract

A strap according to an embodiment of the present disclosure includes a first member including a first base having a lower surface and a first core portion engraved on the lower surface, and a second base having an upper surface and a second core portion engraved on the upper surface. It includes a second member, at least a portion of the lower and upper surfaces are surface treated, and the first and second members are joined so that the first core portion and the second core portion face each other to form a bonding surface between the upper and lower surfaces, The first base and the second base correspond to stainless steel.

Description

Strap and its manufacturing method {STRAP AND MANUFACTURING METHOD THEREOF}

The present disclosure relates to a strap and a method of manufacturing the same, and more specifically, to a strap including a core portion and a method of manufacturing the same.

[Assignment number] 2121008
[Assignment number] E2121008
[Ministry name] Gyeonggi-do
[Project management (professional) organization name] Gyeonggi Province Economic and Science Promotion Agency
[Research Project Name] 2021 Small and Medium Business Development Support Project
[Research project name] Development of RF strap for electromagnetic wave countermeasures in semiconductor plasma processing equipment
[Contribution rate] 1/1
[Name of project carrying out organization] SMT Co., Ltd.
[Research period] 2021.05.01 ~ 2021.12.31
Plasma processing equipment is generally used to deposit thin films on substrates used in semiconductors, solar panels, or liquid crystal displays (LCDs). A plasma processing device is a device that processes substrates using techniques including etching, physical vapor deposition (PVD), chemical vapor deposition (CVD), ion implantation, and resist removal. The plasma processing apparatus includes a reaction chamber including an upper electrode and a lower electrode. A substrate is placed between the upper electrode and the lower electrode, and plasma is generated in the space between the two electrodes to excite the processing gas into a plasma state to process the substrate in the reaction chamber.

In the process of processing the substrate, RF power is applied to one of the two electrodes and the other electrode is grounded. In a conventional PE (Plasma Enhanced) type plasma processing device, RF power is applied to the upper electrode, and a bracket installed on the lower surface of the lower electrode is fixed through an RF strap and is grounded by a grounding means on the bottom of the chamber. In this case, the lower electrode, which also plays the role of loading the substrate, continuously moves up and down according to the supply of the substrate, plasma processing, and carrying the substrate out. Accordingly, the RF strap, which is a grounding means that electrically connects the bracket attached to the lower surface of the lower electrode and the bottom of the chamber, is repeatedly bent and unfolded according to the repeated lifting and lowering motion of the lower electrode.

Embodiments disclosed herein provide a strap in which a plurality of members including a core portion are joined and a method of manufacturing the same.

According to the embodiments disclosed herein, there is a problem of shortening the lifespan due to plasma etching, which is a problem in RF straps exposed to a plasma environment, and RF grounding characteristics due to low electrical conductivity due to the use of stainless steel-based materials. Degradation problems can be solved simultaneously

A strap according to an embodiment of the present disclosure includes a first member including a first base having a lower surface and a first core portion engraved on the lower surface, and a second base having an upper surface and a second core portion engraved on the upper surface. It includes a second member, at least a portion of the lower and upper surfaces are surface treated, and the first and second members are joined so that the first core portion and the second core portion face each other to form a bonding surface between the upper and lower surfaces, The first and second bases are stainless steel, Elgiloy, Hasteloy, Aastroloy, Inconel, Rene, Udimet, It corresponds to one of Waspaloy, Nimonie, Incoloy, Pyromet, and Discaloy.

According to one embodiment, the first member and the second member have structures corresponding to each other.

According to one embodiment, surface roughness increases through surface treatment.

According to one embodiment, the first core part corresponds to Cu or BeCu, the thickness of the strap is 300 μm or less, and the width is 100 mm or less.

A strap according to another embodiment of the present disclosure includes a first member including a first base having a lower surface and a first core portion engraved on the lower surface, and a second member including a second base having an upper surface. and at least a portion of the upper surface is surface treated, the first member and the second member are joined so that the first core portion and the upper surface face each other to form a joint surface between the upper surface and the lower surface, and the first base and the second base are stainless steel. corresponds to

A method of manufacturing a strap according to another embodiment of the present disclosure includes forming a first member having a first core portion engraved on a lower surface of a first base, forming a second member having a second core portion engraved on an upper surface of a second base. A step of joining the first member and the second member so that the first core portion and the second core portion face each other, and the first base and the second base correspond to stainless steel.

According to one embodiment, before the joining step, the method further includes surface treating at least a portion of the lower surface of the first member and the upper surface of the second member.

According to one embodiment, surface roughness increases through surface treatment.

According to one embodiment, the first member and the second member have structures corresponding to each other.

A strap manufacturing method according to another embodiment of the present disclosure includes forming a first member having a first core portion engraved on a lower surface of a first base, forming a second member including a second base having an upper surface, and joining the first member and the second member so that the first core portion and the upper surface face each other, and the first base and the second base correspond to stainless steel.

According to various embodiments of the present disclosure, when manufacturing a strap, the width, thickness, or length of the strap can be adjusted by joining the first member and the second member, so it is possible to manufacture a strap suitable for the purpose or usage environment.

Additionally, according to various embodiments of the present disclosure, it is possible to manufacture a strap that maintains elasticity for a long time.

In addition, according to various embodiments of the present disclosure, by covering the core part made of a material with excellent conductivity with a base made of a highly durable material, the high conductivity of the strap can be maintained while the corrosion resistance and plasma resistance can be improved. there is.

The effects of the present disclosure are not limited to the effects mentioned above, and other effects not mentioned will be clearly understood by those skilled in the art from the description of the claims.

1 is a perspective view of a strap according to an embodiment of the present disclosure.
Figure 2 is a perspective view of a first member and a second member engraved according to an embodiment of the present disclosure.
3 is a perspective perspective view of a member according to various embodiments of the present disclosure.
Figure 4 is a perspective view of a first member and a second member surface treated according to an embodiment of the present disclosure.
Figure 5 shows a first member and a second member being joined according to an embodiment of the present disclosure.
Figure 6 is a perspective view of a strap according to another embodiment of the present disclosure.
Figure 7 is a flowchart showing an example of a strap manufacturing method according to an embodiment of the present disclosure.
Figure 8 is a flowchart showing an example of a strap manufacturing method according to another embodiment of the present disclosure.

Hereinafter, specific details for implementing the present disclosure will be described in detail with reference to the attached drawings. However, in the following description, detailed descriptions of well-known functions or configurations will be omitted if there is a risk of unnecessarily obscuring the gist of the present disclosure.

In the accompanying drawings, identical or corresponding components are given the same reference numerals. Additionally, in the description of the following embodiments, overlapping descriptions of identical or corresponding components may be omitted. However, even if descriptions of components are omitted, it is not intended that such components are not included in any embodiment.

Terms used in the present disclosure will be briefly described, and the disclosed embodiments will be described in detail. The terms used in this specification are general terms that are currently widely used as much as possible while considering the function in the present disclosure, but this may vary depending on the intention or precedent of a technician working in the related field, the emergence of new technology, etc. In addition, in certain cases, there are terms arbitrarily selected by the applicant, and in this case, the meaning will be described in detail in the description of the relevant invention. Accordingly, the terms used in this disclosure should be defined based on the meaning of the term and the overall content of the present disclosure, rather than simply the name of the term.

In this disclosure, singular expressions include plural expressions, unless the context clearly specifies the singular. Additionally, plural expressions include singular expressions, unless the context clearly specifies plural expressions.

In the present disclosure, when a part includes a certain component, this means that other components may be further included rather than excluding other components unless specifically stated to the contrary.

In the present disclosure, the upper part of the drawing may be referred to as the “top” or “upper side” of the configuration shown in the drawing, and the lower part may be referred to as the “lower” or “lower side”. Additionally, in the drawings, the remaining portion between the upper and lower parts of the structure shown or excluding the upper and lower parts may be referred to as a “side” or “side.” Relative terms such as “top”, “upper side”, etc. may be used to describe relationships between components shown in the drawings, and the present disclosure is not limited by such terms.

In the present disclosure, the direction toward the internal space of a structure may be referred to as “inside,” and the direction protruding into the open external space may be referred to as “outside.” Relative terms such as “inside”, “outside”, etc. may be used to describe relationships between components shown in the drawings, and the present disclosure is not limited by such terms.

The description of “A and/or B” herein means A, or B, or A and B.

In the specification of the present application, when a part is said to be connected to another part, this includes not only the case where it is directly connected, but also the case where it is connected with another component in between.

Advantages and features of the disclosed embodiments and methods for achieving them will become clear by referring to the embodiments described below in conjunction with the accompanying drawings. However, the present disclosure is not limited to the embodiments disclosed below and may be implemented in various different forms. The present embodiments are merely provided to ensure that the present disclosure is complete and that the present disclosure does not convey the scope of the invention to those skilled in the art. It is provided only for complete information.

Figure 1 is a perspective view of a strap 100 according to an embodiment of the present disclosure. In one embodiment, the strap 100 may be formed in a flat shape. For example, as shown in FIG. 1, the strap 100 may correspond to a rectangular parallelepiped-shaped plate in which a pair of opposing surfaces are formed to have a large area. In one embodiment, the strap 100 may be formed of one or more materials selected to suit its purpose or usage environment. For example, the strap 100 may be formed to have a width (y-axis direction), thickness (z-axis direction), and length (x-axis direction) suitable for the purpose or usage environment.

As shown in FIG. 1, the strap 100 may include a first member 110 and a second member 120. In this case, the first member 110 may include a first base 112 and a first core portion 114, and the second member 120 may include a second base 122 and a second core portion 124. ) may include. In one embodiment, the first member 110 and the second member 120 may have structures corresponding to each other.

In the first member 110 , the first base 112 may form a basic outline of the first member 110 . For example, when the first base 112 is formed in a flat shape, the first member 110 may also be formed in a flat shape. In one embodiment, the first base 112 may be configured to have a lower surface. In this case, the first core portion 114 may be formed on the lower surface of the first base 112. As shown in FIG. 1, the first core portion 114 may be engraved on the lower surface of the first base 112. In this case, one side of the first core portion 114 may be located on the same plane as the lower surface of the first base 112, and the remaining portion excluding one side of the first core portion 114 may be located on the same plane as the lower surface of the first base 112. It can be surrounded by (112).

In the second member 120 , the second base 122 may form a basic outline of the second member 120 . For example, when the second base 122 is formed in a flat shape, the second member 120 may also be formed in a flat shape. In one embodiment, the second base 122 may be configured to have an upper surface. In this case, the second core portion 124 may be formed on the upper surface of the second base 122. As shown in FIG. 1, the second core portion 124 may be engraved on the lower surface of the second base 122. In this case, one side of the second core portion 124 may be located on the same plane as the upper surface of the second base 122, and the remaining portion excluding one side of the second core portion 124 may be located on the same plane as the upper surface of the second base 122. It can be surrounded by (122).

The materials of the first base 112, the first core portion 114, the second base 122, and the second core portion 124 may vary depending on the purpose and use environment of the strap 100. In one embodiment, when the strap 100 is an RF strap used in plasma processing equipment, the first base 112 and the second base 122 may be made of a material that maintains durability in a plasma environment. For example, the first base 112 and the second base 122 are made of stainless steel, Elgiloy, Hasteloy, Astroloy, Inconel, Rene. It may correspond to (Rene), Udimet, Waspaloy, Nimonie, Incoloy, Pyromet, Discaloy, etc. Specifically, the first base 112 and the second base 122 may correspond to STS304. The first base 112 and the second base 122 may correspond to different materials among the materials described above.

In one embodiment, for use as an RF strap, the first core portion 114 and/or the second core portion 124 may be manufactured from at least one of Cu, BeCu, CuFe, CuNi, CuCr, and CuW. In this case, the thickness of the strap 100 in the z-axis direction may be 300 μm or less, and the width in the y-axis direction may be 100 mm or less. When designed with this thickness, the elasticity and durability of the strap can be maintained while maintaining the high conductivity of the core part.

For example, in the process of joining two members using a rolling process after engraving the core part on the base, the core part is broken or the thickness of the core part is not sufficiently secured, so sufficient conductivity of the core part for use in an RF strap is not secured. Problems may arise. Additionally, if the thickness of the RF strap is too thick, a phenomenon occurs in which the elasticity of the RF strap for use in plasma processing equipment is not secured.

The first base 112 and the second base 122 are made of stainless steel, for example, STS304, and the first core portion 114 and the second core portion 124 are made of copper or copper alloy. In this case, the above-mentioned problems can be solved by manufacturing the strap 100 in a z-axis direction thickness of 300 μm or less and a y-axis width of the strap 100 in a y-axis direction of 100 mm or less. These values indicate that the first core portion 114 and the second core portion 124 are made of copper or a copper alloy, and the first base 112 and the second base 122 are made of Elgiloy or Hastelloy. (Hasteloy), Aastroloy, Inconel, Rene, Udimet, Waspaloy, Nimonie, Incoloy, Pyromet ), it can also be applied when it corresponds to Discaloy, etc.

In one embodiment, at least a portion of the lower surface of the first base 112 and the upper surface of the second base 122 may be surface treated. For example, as shown in FIG. 1, the lower surface 116 of the first base 112 may be surface treated, and the upper surface 126 of the second base 122 may be surface treated. The surface roughness of one surface 116 or 126 of the first base 112 and/or the second base 122 that is surface treated may increase. In one embodiment, methods such as physical polishing, heat treatment or cooling treatment, and solution treatment may be used to treat the surface of the first base 112 and/or the second base 122.

In one embodiment, the surface roughness of the first base 112 and/or the second base 122 may be increased using at least one of a chemical etching method and a physical scratching method. Specifically, the chemical etching method may use at least one of an organic solvent cleaning method, a basic solution cleaning method, and an acidic solution cleaning method, and the physical scratching method may include a shot blasting method or a wire brushing method. , at least one of wire abrasion, sand blasting, and machining may be used.

For example, when an RF strap formed by joining two members is used in a plasma environment, durability may be problematic, such as the members being separated in the process of repeatedly folding and unfolding the RF strap. Accordingly, the durability of the RF strap can be significantly improved by surface treating the surface of the base and then rolling it.

In one embodiment, the strap 100 may be formed by joining the first member 110 and the second member 120. Specifically, as shown in FIG. 1, the strap 100 is a structure in which the first member 110 and the second member 120 are joined so that the first core portion 114 and the second core portion 124 face each other. It may be in the form. In this case, a bonding surface 130 may be formed on the strap 100 where the lower surface of the first base 112 and the upper surface of the second base 122 contact each other.

The strap 100 described above has the first member 110 supporting the first base 112 and the first core portion 114, and the second member 120 comprising the second base 122 and the second core portion ( 124), but is not limited to this. For example, the second member 120 of the strap 100 may include only the second base 122 without the second core portion 124. In another example, only one of the two members of strap 100 may include a core portion (see Figure 6).

Figure 2 is a perspective view of the first member 210 and the second member 220 engraved according to an embodiment of the present disclosure. The first member 210 shown in FIG. 2(a) and the second member 220 shown in FIG. 2(b) are respectively the first member 110 and the second member 120 shown in FIG. 1. can be responded to. As shown in FIG. 2, the first member 210 includes a first base 230 and a first core portion 240, and the second member 220 includes a second base 250 and a second core. It may include unit 260. The first base 230, the first core portion 240, the second base 250, and the second core portion 260 shown in FIG. 2 are the first base 112 shown in FIG. It may correspond to the core portion 114, the second base 122, and the second core portion 124, respectively.

According to one embodiment, the first core portion 240 may be engraved on the central portion of the lower surface of the first base 230 of the first member 210. The second core portion 260 may be engraved in the central portion of the upper surface of the second base 250 of the second member 220. The intaglio formation may correspond to inlay cladding.

The first member 210 includes a first base 230 and a first core portion 240, and the second member 220 includes a second base 250 and a second core portion 260, but is limited thereto. It doesn't work. For example, the second member 220 of the strap may include only the second base 250 without the second core portion 260. In another example, the first member 210 of the strap may include only the first base 230 without the first core portion 240. In this case, the strap may have the strap structure shown in FIG. 6.

3 is a perspective perspective view of a member according to various embodiments of the present disclosure. The member 310 shown in FIG. 3(a) or the member 320 shown in FIG. 3(b) is the first member 210 shown in FIG. 2(a) and/or shown in FIG. 2(b). It may correspond to the second member 220.

In one embodiment, the core portion may be divided into two or more parts. For example, the core portion of the member 310 may be composed of two core portions 312 and 314 divided along the x-axis direction of the strap. Additionally, the core portion of the member 320 may be composed of two core portions 322 and 324 divided along the y-axis direction of the strap.

In one embodiment, the divided core portions may be spaced apart from each other as shown in FIG. 3(c).

Although the above-described core portion is shown as being divided into two parts, the present invention is not limited thereto. For example, the core portion may include core portions made of different materials divided into arbitrary numbers to suit the purpose and/or usage environment of the strap.

Figure 4 is a perspective view of the first member 210 and the second member 220 surface treated according to an embodiment of the present disclosure.

A surface-treated member of the member shown in FIGS. 2(a) and 2(b) may correspond to the member shown in FIGS. 4(a) and 4(b), respectively.

In one embodiment, the lower surface of the first member 210 and the upper surface of the second member 220 are surface treated, so that the lower surface of the first member 210 and the upper surface of the second member 220 can be easily joined. . For example, when the lower surface of the first member 210 and the upper surface of the second member 220 are made of a material that is not easy to join (for example, stainless steel), the first member 210 and the second member 220 ) may be difficult to join. Accordingly, the lower surface of the first member 210 and/or the upper surface of the second member 220 may be surface treated to facilitate joining. For example, when pressing or rolling the first member 210 and the second member 220, surface treatment is performed so that the lower surface of the first member 210 and the upper surface of the second member 220 are bonded to each other. The roughness of the lower surface of the first member 210 and the upper surface of the second member 220 can be increased. Alternatively, a buffer layer may be inserted between the first member 210 and the second member 220 to increase adhesion between the members.

Although the surface treatment of the member is described as being performed after forming the engraving of the core portion, the present disclosure is not limited thereto. For example, after surface treatment of the member is performed, the core portion may be engraved on the member.

Surface treatment of members has the effect of improving bonding strength when joining members as described in FIG. 5. The data below is data when both members are stainless steel, and it can be confirmed that the surface roughness of at least the members must be 10 ㎛ or more.

No. First member material roughness (Ra, ㎛) Second member material roughness (Ra, ㎛) Whether the plasma environment durability test has been passed or not no. 1 One One Fail No.2 5 5 Fail number 3 10 10 Pass Number 4 50 50 Pass Number 5 100 100 Pass

The plasma environmental durability test was conducted by installing the strap in a plasma equipment, repeatedly bending and straightening the strap 300 times (based on 10 years of use of the equipment), and then checking the durability of the strap.

Figure 5 shows the first member 210 and the second member 220 being joined according to an embodiment of the present disclosure.

In one embodiment, methods such as rolling or pressure welding may be used to press the first member 210 and the second member 220. For example, with the first member and the second member stacked so that the first core portion and the second core portion face each other, the first member and the second member may be passed between rotating rolls and pressed. In another example, after surface treatment of at least a portion of the lower surface of the first member and the upper surface of the second member, the first member and the second member are stacked so that the first core portion and the second core portion face each other. The second member can be simply pressed in the vertical direction.

The rolling process conditions according to one embodiment are as follows.

Rolling temperature: 80℃~600℃

Rolling pressure: 100,000 kgf/m ² ~ 1,000,000 kgf/m ²

Figure 7 is a flowchart showing an example of a strap manufacturing method according to an embodiment of the present disclosure.

In one embodiment, a first member in which a first core portion is engraved is formed on the lower surface of the first base (S710). A second member in which a second core portion is engraved is formed on the upper surface of the second base (S720). The first base and the second base may correspond to stainless steel.

At least a portion of the lower surface of the first member and the upper surface of the second member are surface treated (S730). Surface roughness can increase through surface treatment.

The first member and the second member are joined so that the first core portion and the second core portion face each other (S740). The first member and the second member can be joined by applying pressure to the first member and the second member in the direction of the arrow shown in FIG. 5 while the first member and the second member face each other.

Figure 8 is a flowchart showing an example of a strap manufacturing method according to another embodiment of the present disclosure.

In one embodiment, a first member in which a first core portion is engraved is formed on the lower surface of the first base (S810). A second member including a second base having an upper surface is formed (S820). The first base and the second base correspond to stainless steel. At least a portion of the lower surface of the first member and the upper surface of the second member are surface treated (S830). Surface roughness can increase through surface treatment. The first member and the second member are joined so that the first core portion and the upper surface face each other (S840).

The preferred embodiments of the present invention described above have been disclosed for illustrative purposes, and those skilled in the art will be able to make various modifications, changes, and additions within the spirit and scope of the present invention, and such modifications, changes, and additions will be possible. should be regarded as falling within the scope of the patent claims.

Those of ordinary skill in the technical field to which the present invention pertains can make various substitutions, modifications and changes without departing from the technical spirit of the present invention. Therefore, the present invention is limited to the above-described embodiments and the accompanying drawings. It is not limited by

100: Strap
110: first member
112: 1st base
114: first core portion
120: second member
122: 2nd base
124: second core portion
130: joint surface

Claims (10)

As a strap,
A first member including a first base having a lower surface, and a first core portion engraved on the lower surface; and
A second member including a second base having an upper surface, and a second core portion engraved on the upper surface.
Including,
The lower surface and the upper surface are surface treated,
The surface roughness of the lower surface and the upper surface is each 10 ㎛ or more,
The first member and the second member are joined so that the first core portion and the second core portion face each other to form a joint surface between the upper surface and the lower surface,
The first base and the second base are made of stainless steel, Elgiloy, Hasteloy, Aastroloy, Inconel, Rene, and Udimet. ), a strap corresponding to one of Waspaloy, Nimonie, Incoloy, Pyromet, and Discaloy.
According to paragraph 1,
The first member and the second member have structures corresponding to each other.
delete According to paragraph 1,
The first core portion corresponds to Cu or BeCu,
A strap having a thickness of 300 μm or less and a width of 100 mm or less.
As a strap,
A first member including a first base having a lower surface, and a first core portion engraved on the lower surface; and
a second member comprising a second base having an upper surface;
Including,
The lower surface and the upper surface are surface treated,
The surface roughness of the lower surface and the upper surface is each 10 ㎛ or more,
The first member and the second member are joined so that the first core portion and the upper surface face each other to form a bonding surface between the upper surface and the lower surface,
The first base and the second base are stainless steel.
As a method of manufacturing a strap,
Forming a first member having a first core portion engraved on the lower surface of the first base;
Forming a second member having a second core portion engraved on the upper surface of the second base; and
Bonding the first member and the second member so that the first core portion and the second core portion face each other.
Including,
The first base and the second base correspond to stainless steel,
Before the joining step, it further includes the step of surface treating the lower surface of the first member and the upper surface of the second member,
A method of manufacturing a strap, wherein the surface roughness of the lower surface and the upper surface is each 10 ㎛ or more.
delete delete According to clause 6,
The first member and the second member have structures corresponding to each other.
delete

Images