WO2022244309A1 - 膜厚測定装置及び膜厚測定方法 - Google Patents

膜厚測定装置及び膜厚測定方法 Download PDF

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Publication number
WO2022244309A1
WO2022244309A1 PCT/JP2022/002675 JP2022002675W WO2022244309A1 WO 2022244309 A1 WO2022244309 A1 WO 2022244309A1 JP 2022002675 W JP2022002675 W JP 2022002675W WO 2022244309 A1 WO2022244309 A1 WO 2022244309A1
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Prior art keywords
film thickness
light
wavelength
measured
luminance
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PCT/JP2022/002675
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English (en)
French (fr)
Japanese (ja)
Inventor
邦彦 土屋
諭 荒野
賢一 大塚
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Hamamatsu Photonics KK
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Hamamatsu Photonics KK
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Priority to KR1020237039201A priority Critical patent/KR20240011694A/ko
Priority to JP2022530802A priority patent/JP7121222B1/ja
Priority to EP22804232.1A priority patent/EP4343274A4/en
Priority to CN202280036313.5A priority patent/CN117355724A/zh
Priority to US18/561,390 priority patent/US20240240933A1/en
Priority to JP2022124611A priority patent/JP7788358B2/ja
Publication of WO2022244309A1 publication Critical patent/WO2022244309A1/ja
Anticipated expiration legal-status Critical
Priority to JP2025241756A priority patent/JP2026053393A/ja
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G01N21/274—Calibration, base line adjustment, drift correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method

Definitions

  • One aspect of the present invention relates to a film thickness measuring device and a film thickness measuring method.
  • One aspect of the present invention has been made in view of the above circumstances, and an object of the present invention is to derive the film thickness of an object to be measured with high accuracy.
  • a film thickness measuring apparatus includes a light irradiation unit that irradiates light onto an object to be measured, and a first photodetector that is an area sensor or a line sensor that detects light from the object to be measured. a photodetector that outputs a signal corresponding to luminance information of detected light; and a spectrometer that spectroscopically detects light from an object to be measured and outputs a signal corresponding to wavelength information including the spectrum of the light. and an analysis unit that estimates the film thickness of the object to be measured based on luminance information specified from the signal output from the photodetector and wavelength information specified from the signal output from the spectroscope. Prepare.
  • the light from the object to be measured is detected by the photodetector and spectrally detected by the spectroscope, and luminance information specified from the signal output from the photodetector. , and wavelength information specified from the signal output from the spectroscope, the film thickness of the object to be measured is estimated.
  • the luminance information (reflectance of light) of light detected by the photodetector is a value corresponding to the film thickness of the object to be measured.
  • only the luminance information specifies only the relative distribution of the film thickness and does not specify the absolute value.
  • the film thickness measuring apparatus further considers the wavelength information including the spectrum of the light spectroscopically detected.
  • the absolute value of the film thickness in each area of the object to be measured is appropriately derived based on the relative film thickness distribution specified from the luminance information and the absolute value of the film thickness at the spectroscopically detected points. be able to.
  • the film thickness of the object to be measured can be derived with high accuracy.
  • the film thickness measuring apparatus further comprises a light splitting element that splits light from the object to be measured, the light detection unit further has a second photodetector that is an area sensor or a line sensor, and the light splitting element , the light from the object to be measured may be split and guided to the first photodetector and the second photodetector. In this way, the light from the object to be measured is split, and the split light is detected by the two photodetectors. can be estimated. This makes it possible to derive the film thickness of the object to be measured with higher accuracy.
  • the light splitting element may have a tilted dichroic mirror that changes the transmittance and reflectance according to the wavelength in a predetermined wavelength range and splits the light from the object by transmitting and reflecting it. With such a configuration, it is possible to appropriately split the light for each wavelength band.
  • the light splitting element may have a dichroic mirror or half mirror and a bandpass filter. With such a configuration, it is possible to appropriately split the light for each wavelength band.
  • the photodetector may output a signal corresponding to luminance information including a ratio between the luminance value of light detected by the first photodetector and the luminance value of light detected by the second photodetector.
  • luminance information including a ratio between the luminance value of light detected by the first photodetector and the luminance value of light detected by the second photodetector.
  • the analysis unit may determine whether or not to estimate the film thickness of the measurement object using the luminance information and the wavelength information.
  • the state of the measurement object for example, thickness
  • the method that can estimate the film thickness with high accuracy differs.
  • the light splitting element has a tilted dichroic mirror that changes the transmittance and reflectance according to the wavelength in a predetermined wavelength range and splits the light from the measurement object by transmitting and reflecting the light. If the film thickness of the object to be measured is less than the predetermined value, the film thickness of the object to be measured is estimated based on the luminance information and the wavelength information, and the film thickness of the object to be measured is less than the predetermined value. is also large, the wavelength centroid may be specified based on the signal output from the photodetector, and the film thickness of the object to be measured may be estimated based on the wavelength centroid.
  • the method of estimating the film thickness of the object to be measured based on the wavelength centroid it is possible to more easily and accurately estimate the film thickness.
  • the film thickness is small, it is difficult to accurately estimate the film thickness based on the wavelength centroid.
  • the film thickness is estimated based on the luminance information and the wavelength information described above. , the film thickness can be estimated with high accuracy even when the film thickness is small.
  • the film thickness estimation is performed based on the wavelength centroid, so that the film thickness estimation can be performed quickly and with high accuracy by a simpler method.
  • the analysis unit specifies a film thickness measurement range, which is a range of film thicknesses that can be measured, based on the wavelength information, and determines one or more film thicknesses specified based on the luminance information and the relational expression between the luminance and the film thickness.
  • the film thickness included in the film thickness measurement range may be estimated as the film thickness of the object to be measured. Since the relational expression holds for the luminance of the light from the object to be measured and the film thickness, the relational expression between the luminance and the film thickness can be defined in advance.
  • the relationship between the luminance and the film thickness is represented by a waveform showing periodic changes, even if the luminance is specified based on the luminance information, there will be a plurality of film thickness candidates corresponding to the luminance.
  • film thickness measurement range since the range of film thickness that can be measured (film thickness measurement range) is specified by using wavelength information including the spectrum, it is possible to specify one film thickness from a plurality of film thickness candidates. It becomes possible. By estimating the film thickness specified in this way as the film thickness of the object, highly accurate film thickness estimation can be realized.
  • the analysis unit may estimate the film thickness of the object to be measured based on corrected luminance information obtained by correcting the luminance value indicated by the luminance information by the amount of change from the initial value of the spectrum of the wavelength information. It is conceivable that the light detected by the photodetector is affected by, for example, fluctuations in the light source and background light. In this case, there is a possibility that the film thickness cannot be estimated with high accuracy based on the luminance information. In this regard, by correcting the luminance value indicated by the luminance information according to the amount of change from the initial value of the spectrum, the luminance information that cancels the influence of the fluctuation of the light source and the background light that was originally included can be used to achieve high accuracy. can estimate the film thickness.
  • a film thickness measuring method includes a light irradiation step of irradiating light onto an object to be measured, detecting light from the object to be measured, and outputting a signal corresponding to luminance information of the detected light.
  • a film thickness estimation step of estimating the film thickness of the object to be measured based on the wavelength information specified from the signal output in the spectroscopic step.
  • the luminance information may be obtained by dividing the light from the measurement object and detecting each divided light.
  • a signal corresponding to luminance information including the ratio of the luminance values of the divided lights may be output.
  • the film thickness estimation step it may be determined based on the information of the object to be measured whether to estimate the film thickness of the object to be measured using the luminance information and the wavelength information.
  • the light from the object to be measured is detected by an inclined dichroic mirror that divides the light from the object to be measured by transmitting and reflecting the light, the transmittance and reflectance of which change according to the wavelength in a predetermined wavelength range.
  • the dividing and estimating film thickness step if the film thickness of the object to be measured is smaller than a predetermined value, the film thickness of the object to be measured is estimated based on the luminance information and the wavelength information. is larger than a predetermined value, the wavelength centroid may be specified based on the signal output in the light detection step, and the thickness of the object to be measured may be estimated based on the wavelength centroid. .
  • a film thickness measurement range which is a range of film thickness that can be measured, is specified based on the wavelength information, and one or more film thicknesses are specified based on the luminance information and the relational expression between the luminance and the film thickness.
  • the film thickness included in the film thickness measurement range may be estimated as the film thickness of the object to be measured.
  • the film thickness of the object to be measured may be estimated based on corrected luminance information obtained by correcting the luminance value indicated by the luminance information by the amount of change from the initial value of the spectrum of the wavelength information.
  • the film thickness of the object to be measured can be derived with high accuracy.
  • FIG. 1 is a diagram schematically showing a film thickness measuring device according to an embodiment of the present invention.
  • FIG. 2 is a diagram showing the relationship between wavelength and reflection intensity for each film thickness.
  • FIG. 3 is a diagram for explaining film thickness value estimation.
  • FIG. 4 is a flow chart showing the film thickness measurement flow according to the embodiment of the present invention.
  • FIG. 1 is a diagram schematically showing a film thickness measuring device 1 according to this embodiment.
  • the film thickness measuring apparatus 1 irradiates a sample 100 (object to be measured) with light, for example, in a plane, and measures the thickness of the film formed on the sample 100 based on the reflected light from the sample 100. It is a device.
  • the sample 100 may be, for example, a light-emitting device such as an LED, a mini-LED, a ⁇ LED, an SLD device, a laser device, a vertical laser device (VCSEL), or an OLED. It may be a light emitting element.
  • the sample 100 may be a semiconductor material such as a wafer on which a thin film is formed.
  • the film thickness measurement apparatus 1 includes a light source 10 (light irradiation section), a camera system 20, and a control device 30 (analysis section).
  • the light source 10 irradiates the sample 100 with light, for example, in a planar manner.
  • the light source 10 for example, planarly irradiates substantially the entire surface of the sample 100 with light.
  • the light source 10 is, for example, a light source capable of uniformly irradiating the surface of the sample 100 and irradiates the sample 100 with diffused light.
  • the light source 10 may be a so-called flat dome light source or a dome light source.
  • a flat dome light source can suppress reflection while ensuring a sufficient field of view (for example, a field of view of about 300 mm).
  • the light source 10 may be a surface lighting unit using a white LED, a halogen lamp, a Xe lamp, or the like.
  • the light source 10 irradiates the sample 100 with light having a wavelength included in a predetermined wavelength range of an inclined dichroic mirror 22 (details will be described later) of the camera system 20 .
  • the inclined dichroic mirror 22 is an optical element that splits the light from the sample 100 by transmitting and reflecting the light according to wavelength.
  • the tilting dichroic mirror 22 changes its transmittance and reflectance according to the wavelength in the predetermined wavelength range described above.
  • the camera system 20 includes a lens 21, an inclined dichroic mirror 22 (light splitting element), area sensors 23 and 24 (light detection units), bandpass filters 25 and 26, a half mirror 29, a spectroscope 50, is composed of
  • the lens 21 is a lens that collects the incident light from the sample 100 .
  • the lens 21 may be arranged in the front stage (upstream) of the inclined dichroic mirror 22 or may be arranged in a region between the inclined dichroic mirror 22 and the area sensors 23 and 24 .
  • Lens 21 may be a finite focus lens or an afocal lens. When the lens 21 is a finite focus lens, the distance from the lens 21 to the area sensors 23 and 24 is set to a predetermined value. When the lens 21 is an afocal lens, the lens 21 is a collimator lens that converts the light from the sample 100 into parallel light, and is aberration-corrected so as to obtain parallel light. Light output from the lens 21 is incident on the inclined dichroic mirror 22 .
  • the tilted dichroic mirror 22 is a mirror made using a special optical material, and is a light splitting element that splits the light from the sample 100 by transmitting and reflecting it depending on the wavelength.
  • the tilting dichroic mirror 22 splits the light from the sample 100 and guides it to the area sensors 23 and 24 .
  • the tilting dichroic mirror 22 is configured such that the light transmittance and reflectance change according to the wavelength in a predetermined wavelength range. That is, in the inclined dichroic mirror 22, the transmittance (and reflectance) of light changes gradually in accordance with the change in wavelength in a predetermined wavelength range, and in the wavelength range other than the predetermined wavelength range, regardless of the change in wavelength, The transmittance (and reflectance) of light is assumed to be constant.
  • the transmittance of light monotonously increases (the reflectance monotonously decreases) in accordance with the change in wavelength. Since there is a negative correlation between transmittance and reflectance, when one of them increases, the other decreases. It may be described as "transmittance”. It should be noted that "light transmittance is constant regardless of wavelength change” is not limited to cases where the transmittance is completely constant, but also cases where the change in transmittance with respect to a change in wavelength of 1 nm is 0.1% or less. is also included.
  • the area sensors 23 and 24 image (detect) the light from the sample 100 (more specifically, the light split by the tilted dichroic mirror 22).
  • the area sensor 23 is a first photodetector that captures light transmitted through the tilted dichroic mirror 22 .
  • Area sensor 24 is a second photodetector that captures the light reflected by tilted dichroic mirror 22 .
  • the range of wavelengths to which the area sensors 23 and 24 are sensitive corresponds to a predetermined wavelength range in which the light transmittance (and reflectance) of the tilted dichroic mirror 22 changes as the wavelength changes.
  • Area sensors 23 and 24 are, for example, monochrome sensors or color sensors. The area sensors 23 and 24 output signals according to the luminance information of the detected light.
  • the area sensors 23 and 24 control signals corresponding to luminance information including the ratio between the luminance value of light detected by the area sensor 23 and the luminance value of light detected by the area sensor 24. It may be output to device 30 .
  • the signals output from the area sensors 23 and 24 are, for example, imaging results (images).
  • the tilting dichroic mirror 22 described above may be replaced with another light splitting element.
  • a light splitting element may be composed of, for example, a normal dichroic mirror (a dichroic mirror with small changes in light transmittance and reflectance according to wavelength) or a half mirror and a bandpass filter.
  • the area sensors 23 and 24 described above may be replaced with other photodetectors.
  • such a photodetector may be, for example, a line sensor.
  • the bandpass filter 25 is arranged between the tilted dichroic mirror 22 and the area sensor 23 .
  • a bandpass filter 26 is arranged between the tilting dichroic mirror 22 and the area sensor 24 .
  • the band-pass filters 25 and 26 are filters for removing light in a wavelength range other than the above-described predetermined wavelength range (the wavelength range in which the transmittance and reflectance of light in the tilted dichroic mirror 22 change according to the wavelength), for example. There may be.
  • the half mirror 29 is provided, for example, in the optical path between the lens 21 and the inclined dichroic mirror 22, and reflects light from one point on the sample 100 (for example, one point near the center of the sample 100) toward the spectroscope 50.
  • the spectroscope 50 spectroscopically detects the light from the sample 100, specifically the light from one point of the sample 100 reflected by the half mirror 29, and acquires the spectrum of the light.
  • the spectrum here is a spectral spectrum indicating the intensity of light for each wavelength.
  • the control device 30 can specify the absolute value of the thickness of one point of the sample 100 described above.
  • the spectroscope 50 outputs a signal corresponding to wavelength information including the spectroscopic spectrum to the control device 30 .
  • the spectroscope 50 may be provided outside the camera system 20 to spectroscopically detect the light from the sample 100 before entering the lens 21 .
  • the control device 30 is a computer, and physically includes a memory such as RAM and ROM, a processor (arithmetic circuit) such as CPU, a communication interface, and a storage unit such as a hard disk.
  • the control device 30 functions by causing the CPU of the computer system to execute a program stored in memory.
  • the control device 30 may be composed of a microcomputer or FPGA.
  • the control device 30 is an analysis unit that estimates the film thickness of the sample 100 .
  • the controller 30 performs preprocessing, selection processing, and film thickness estimation processing. Each process will be described below.
  • the control device 30 acquires captured images (signals corresponding to luminance information) from the area sensors 23 and 24 and performs preprocessing on the captured images.
  • the preprocessing here is correction processing for estimating the film thickness of the sample 100 with high accuracy based on the captured image, and includes, for example, background correction and reference correction (shading correction).
  • Background correction is a process for appropriately obtaining the luminance value of the light from the sample 100 according to the irradiated light by subtracting the light from the atmosphere (background light) included in the captured image.
  • the background correction for example, the luminance value of the image data of the sample 100 in the non-reflective state is subtracted from the luminance value of the captured image.
  • the signal amount in the non-reflection state may be used to derive x according to the luminance information of the captured image by the following equation (1).
  • IT is the amount of transmitted light
  • IR is the amount of reflected light
  • ITr is the amount of transmitted light in the reference
  • IRr is the amount of reflected light in the reference
  • ITb is the amount of transmitted light in the non-reflection state
  • IRb is the amount of reflected light in the non-reflection state.
  • Reference correction is a process that corrects individual differences such as uneven brightness and aberrations caused by the optical system by acquiring the difference data between the captured image and the shading image of the area corresponding to the captured image. is.
  • the captured image is divided by the image data of the reference sample.
  • the control device 30 performs selection processing following the preprocessing.
  • the controller 30 selects a film thickness estimation method based on the information of the sample 100 (more specifically, the film thickness of the sample 100).
  • the film thickness of the sample 100 may be preset in the control device 30 or may be input by the user.
  • the controller 30 selects one of the wavelength shift method and the reflected light amount thickness conversion method (details will be described later) as the film thickness estimation method.
  • the control device 30 selects the reflected light amount thickness conversion method when the film thickness of the sample 100 is smaller than a predetermined value (for example, 100 nm), and when the film thickness of the sample 100 is greater than the predetermined value. select the wavelength shift method.
  • the control device 30 estimates the film thickness of the sample 100 by the film thickness estimation method selected in the selection process. That is, the control device 30 estimates the film thickness of the sample 100 by the wavelength shift method or the reflected light amount thickness conversion method.
  • the control device 30 identifies the wavelength centroid based on the signals (captured images) output from the area sensors 23 and 24, and estimates the film thickness of the sample 100 based on the wavelength centroid.
  • the control device 30 controls the amount of transmitted light specified based on the image captured by the area sensor 23, the amount of reflected light specified based on the image captured by the area sensor 24, the center wavelength of the inclined dichroic mirror 22, and the width of the inclined dichroic mirror 22. , and the wavelength centroid of light for each pixel is derived, and the film thickness corresponding to each pixel is estimated based on the wavelength centroid.
  • the width of the inclined dichroic mirror 22 is, for example, the wavelength width from the wavelength at which the transmittance of the inclined dichroic mirror 22 is 0% to the wavelength at which the transmittance is 100%.
  • the control device 30 derives the wavelength centroid of each pixel based on the following equation (3).
  • ⁇ is the wavelength centroid
  • ⁇ 0 is the center wavelength of the tilted dichroic mirror
  • W is the width of the tilted dichroic mirror
  • R is the amount of reflected light
  • T is the amount of transmitted light.
  • ⁇ wavelength centroid
  • ⁇ wavelength centroid
  • IT indicates the amount of transmitted light
  • IR indicates the amount of reflected light. If the spectral shape of the object to be measured and the line formation of the tilted dichroic mirror 22 are ideal, the parameters a and b in equation (4) can be determined by the optical characteristics of the tilted dichroic mirror 22 .
  • ⁇ ax+b (4)
  • x IT-IR/2(IT+IR) (5)
  • the wavelength center of gravity ( ⁇ ) is approximated by a polynomial expression such as the following equation (6). good too.
  • the film thickness can be estimated by specifying the wavelength centroid.
  • the relationship between wavelength and film thickness can be explained by the following equation (7).
  • n is the refractive index of the film
  • d is the film thickness
  • m is a positive integer (1, 2, 3, . . . )
  • ⁇ is the wavelength centroid.
  • 2nd indicates the optical path difference (the optical path difference caused by the arrangement of the film).
  • the control device 30 estimates the film thickness corresponding to each pixel from the wavelength centroid of each pixel based on the following equation (7).
  • FIG. 2 is a diagram showing the relationship between wavelength and reflection intensity (reflectance of light detected by area sensors 23 and 24) for each film thickness.
  • the horizontal axis indicates wavelength
  • the vertical axis indicates reflection intensity (reflectance).
  • the thinner the film the smaller the change in wavelength even if the reflectance (light amount) changes. If the wavelength is not sufficiently shifted according to the amount of light, it becomes difficult to estimate the film thickness by the wavelength shift method described above.
  • the control device 30 estimates the film thickness of the sample 100 by the reflected light amount thickness conversion method.
  • the control device 30 converts brightness information specified from the signals (captured images) output from the area sensors 23 and 24 and wavelength information specified from the signal output from the spectroscope 50. Based on this, the film thickness of the sample 100 is estimated.
  • the light detected by the area sensors 23 and 24 is affected by, for example, the fluctuation of the light source 10, background light, and the like (the amount of light fluctuates).
  • the ratio value such as IT/IR, it is possible to correct the above-described variation in the amount of light.
  • Such light amount fluctuation correction is effective when the light amount fluctuation amount is extremely small compared to the detected light amount.
  • the control device 30 corrects the values of IT (IT is the amount of transmitted light) and IR (IR is the amount of reflected light) related to the above-described derivation of x based on the wavelength information specified from the signal output from the spectroscope 50. Accordingly, the above-described light amount fluctuation correction may be performed.
  • the control device 30 may perform IT and IR light amount variation correction using the following equation (8).
  • IT′ is the amount of transmitted light after correction
  • IR′ is the amount of reflected light after correction
  • T( ⁇ ) is the transmittance of the tilted dichroic mirror 22
  • R( ⁇ ) is the reflection of the tilted dichroic mirror 22.
  • the index I( ⁇ ) is the spectrum (spectrum measured by the spectroscope 50 ) included in the wavelength information, and Iini( ⁇ ) is the initial value of the spectrum measured by the spectroscope 50 .
  • R( ⁇ ) 1 ⁇ T( ⁇ ).
  • IT′ IT ⁇ ( ⁇ (Iini( ⁇ )T( ⁇ ))/ ⁇ (I( ⁇ )T( ⁇ ))
  • IR′ IR ⁇ ( ⁇ (Iini( ⁇ )R( ⁇ ))/ ⁇ (I( ⁇ )R( ⁇ )) (8)
  • the control device 30 corrects IT (or IR) corresponding to the luminance value indicated by the luminance information by the amount of change from the initial value of the spectrum measured by the spectroscope 50.
  • IT' and IR' which are luminance information after correction, are derived.
  • the luminance value based on the amount of change from the initial value of the spectrum, it is possible to cancel the effects of fluctuations of the light source 10 and background light that were originally included.
  • the value of x is a ratio value such as IT/IR
  • the light amount fluctuation correction is performed by using the ratio value. May not be implemented.
  • the control device 30 estimates the film thickness of the sample 100 based on corrected luminance information obtained by correcting the luminance value indicated by the luminance information by the amount of change from the initial value of the spectrum of the wavelength information.
  • the control device 30 Based on the wavelength information specified from the signal output from the spectroscope 50, the control device 30 specifies the film thickness measurement range, which is the range of the film thickness that can be measured, and the relational expression between the brightness and the film thickness and the brightness information.
  • a film thickness included in the film thickness measurement range is estimated as the film thickness of the sample 100 among the one or more film thicknesses specified based on .
  • FIG. 3 is a diagram for explaining the film thickness value estimation described above.
  • the relationship between the luminance value (reflection intensity) of light indicated by the luminance information and the film thickness is expressed, for example, by the following equation (9).
  • I is the brightness value (reflection intensity)
  • n is the refractive index of the film
  • d is the film thickness.
  • FIG. 3(a) is a diagram showing the relationship between the luminance value (reflection intensity) and film thickness determined by the above equation (9).
  • the horizontal axis is the film thickness
  • the vertical axis is the luminance value (reflection intensity).
  • the relationship between the luminance and the film thickness is indicated by waveforms showing periodic changes (see FIG. 3(a)). Therefore, even if the luminance value is specified based on the luminance information, there are multiple candidates for the film thickness d corresponding to the luminance value. That is, when the luminance value (reflection intensity) indicated by the dashed line in FIG. 3A is specified, there are a plurality of candidates for the film thickness d that differ for each phase.
  • the control device 30 determines which film thickness range is the measurable film thickness range (film thickness measurement range). That is, (m + 4) ⁇ ⁇ (m + 5) ⁇ reflection intensity and wavelength relational expression (see FIG. 3 (b)), (m + 2) ⁇ ⁇ (m + 3) ⁇ reflection intensity and wavelength relational expression (Fig.
  • the control device 30 determines the reflection intensity of (m+2) ⁇ to (m+3) ⁇ And since the relational expression of the wavelength (see FIG. 3(c)) and the wavelength information (see FIG. 3(e)) match, the range of the film thickness from (m+2) ⁇ to (m+3) ⁇ is measured. specific to the range.
  • the controller 30 approximates the film thickness d by a polynomial such as the following equation (10) in order to comprehensively perform various corrections for film characteristics, irradiation spectrum, nonlinearity of the tilted dichroic mirror 22, and the like.
  • a polynomial such as the following equation (10)
  • FIG. 4 is a flow chart showing a film thickness measurement flow according to this embodiment.
  • step S1 light is first irradiated from the light source 10 to the sample 100 (light irradiation step), the light from the sample 100 is detected by the area sensors 23 and 24, and the luminance of the detected light is measured.
  • a captured image is acquired by outputting a signal corresponding to the information (step S1, light detection step).
  • step S2 Background correction is performed on the acquired image by the control device 30 (step S2), and further reference correction is performed (step S3).
  • step S3 a film thickness estimation method is selected based on the information of the sample 100 (step S4).
  • the controller 30 determines whether or not to estimate the film thickness of the sample 100 using the luminance information and the wavelength information. If the film thickness is, for example, less than 100 nm, the control device 30 determines to estimate the film thickness of the sample 100 using the luminance information and the wavelength information (reflected light amount thickness conversion method). The process of step S10 is performed.
  • the control device 30 When the film thickness is, for example, 100 nm or more, the control device 30 performs the wavelength shift method without performing the film thickness estimation (reflected light amount thickness conversion method) of the sample 100 using the luminance information and the wavelength information. is determined, and the processing of steps S13 to S15 is performed.
  • step S6 it is determined whether or not film thickness absolute value correction is to be performed.
  • the film thickness absolute value correction is a process of calculating the film thickness value using the measurement result of the film thickness absolute value by the spectroscope 50 . If the film thickness absolute value correction is not performed, the process of step S10, which will be described later, is performed following the process of step S6.
  • the control device 30 specifies a film thickness measurement range, which is a range of film thickness that can be measured (step S8).
  • control device 30 performs light intensity fluctuation correction (step S9). Specifically, the control device 30 performs light amount fluctuation correction by correcting the values of IT (IT is the amount of transmitted light) and IR (IR is the amount of reflected light) based on the wavelength information according to the above equation (8). .
  • control device 30 estimates the film thickness d by the polynomial expressed by the above-described equation (10) (step S10, film thickness estimation step).
  • the parameters (correction coefficients) a, b, c, d, and e in equation (10) may be set for each film thickness and film type.
  • a correction image is acquired in advance for each film thickness and film type (step S11), and correction coefficients a to e are determined (step S12).
  • x for deriving the wavelength center of gravity is derived by the above equation (5) by the control device 30 (step S13).
  • the control device 30 derives the wavelength centroid ⁇ from the polynomial expressed by the above-described equation (6) (step S14).
  • the control device 30 estimates the film thickness from the wavelength center of gravity according to the above equation (7) (step S15).
  • the parameters (correction coefficients) a, b, c, d, and e in equation (6) may be determined in advance by obtaining a correction image (step S16) (step S17).
  • the film thickness measuring apparatus 1 includes a light source 10 for irradiating a sample 100 with light, an area sensor 23 for detecting light from the sample 100 and outputting a signal corresponding to luminance information of the detected light, light, and outputs a signal corresponding to wavelength information including the spectrum of the light; luminance information specified from the signal output from the area sensor 23; and a control device 30 for estimating the film thickness of the sample 100 based on the wavelength information specified from the signal.
  • the light from the sample 100 is detected by the area sensor 23 and spectrally detected by the spectroscope 50, and luminance information specified from the signal output from the area sensor 23;
  • the film thickness of the sample 100 is estimated based on the wavelength information specified from the signal output from the spectroscope 50 .
  • the light luminance information (light reflectance) detected by the area sensor 23 is a value corresponding to the film thickness of the sample 100 .
  • only the luminance information specifies only the relative distribution of the film thickness and does not specify the absolute value.
  • the film thickness measuring apparatus 1 according to the present embodiment further considers wavelength information including the spectrum of the light spectroscopically detected. can.
  • the absolute value of the film thickness in each area of the object to be measured is appropriately derived based on the relative film thickness distribution specified from the luminance information and the absolute value of the film thickness at the spectroscopically detected points. be able to.
  • the film thickness of the sample 100 can be derived with high accuracy.
  • the film thickness measuring apparatus 1 further includes an inclined dichroic mirror 22 (or a dichroic mirror or half mirror and a bandpass filter) that is a light splitting element that splits the light from the sample 100, and further includes an area sensor 24,
  • the tilting dichroic mirror 22 may split the light from the sample 100 and guide the light to the area sensor 23 and the area sensor 24 .
  • the light from the sample 100 is divided, and the divided light is detected by the two area sensors 23 and 24, so that the light is divided into, for example, each wavelength band, and the film is obtained from the luminance information in the desired wavelength band. Thickness can be estimated. Thereby, the film thickness of the sample 100 can be derived with higher accuracy.
  • the tilted dichroic mirror 22 (or a dichroic mirror or a half mirror and a bandpass filter) as a light splitting element, light can be split appropriately for each wavelength band.
  • the area sensors 23 and 24 may output signals according to luminance information including the ratio between the luminance value of light detected by the area sensor 23 and the luminance value of light detected by the area sensor 24 .
  • Light detected by the area sensors 23 and 24 may be affected by, for example, fluctuations in the light source and background light. In this case, there is a possibility that the film thickness cannot be estimated with high accuracy based on the luminance information.
  • by deriving the ratio of the luminance values of light in two wavelength bands divided according to the wavelength it is possible to derive luminance information that is not affected by background light or the like. By estimating the film thickness based on such luminance information, highly accurate film thickness estimation can be realized.
  • the control device 30 may determine whether or not to estimate the film thickness of the sample 100 using the luminance information and the wavelength information. Depending on the state of the sample 100 (for example, thickness), the method for estimating the film thickness with high accuracy differs. By determining whether or not to perform the film thickness estimation, it is possible to perform film thickness estimation suitable for the state of the sample 100 . This makes it possible to achieve highly accurate film thickness estimation.
  • the controller 30 estimates the film thickness of the sample 100 based on the luminance information and the wavelength information, and determines that the film thickness of the sample 100 is If it is larger than the predetermined value, the wavelength centroid may be specified based on the signals output from the area sensors 23 and 24, and the film thickness of the sample 100 may be estimated based on the wavelength centroid. According to the method of estimating the film thickness of the sample 100 based on the wavelength centroid, it is possible to more easily and accurately estimate the film thickness. However, as described above, when the film thickness is small, it is difficult to accurately estimate the film thickness based on the wavelength centroid.
  • the film thickness of the sample 100 is acquired and the thickness of the film thickness is smaller than a predetermined value, the film thickness is estimated based on the luminance information and the wavelength information described above. Even if the film thickness is small, the film thickness can be estimated with high accuracy. Then, when the film thickness is sufficiently large, the film thickness estimation is performed based on the wavelength centroid, so that the film thickness estimation can be performed quickly and with high accuracy by a simpler method.
  • the control device 30 specifies a film thickness measurement range, which is a range of film thickness that can be measured, based on the wavelength information, and determines one or more film thicknesses specified based on the luminance information and the relational expression between the luminance and the film thickness.
  • the film thickness included in the film thickness measurement range may be estimated as the film thickness of the sample 100 . Since the relational expression holds for the luminance of the light from the sample 100 and the film thickness, it is possible to predefine the relational expression between the luminance and the film thickness.
  • the relationship between the luminance and the film thickness is represented by a waveform showing periodic changes, even if the luminance is specified based on the luminance information, there will be a plurality of film thickness candidates corresponding to the luminance.
  • film thickness measurement range since the range of film thickness that can be measured (film thickness measurement range) is specified by using wavelength information including the spectrum, it is possible to specify one film thickness from a plurality of film thickness candidates. It becomes possible. By estimating the film thickness specified in this manner as the film thickness of the sample 100, highly accurate film thickness estimation can be realized.
  • the control device 30 may estimate the film thickness of the sample 100 based on corrected luminance information obtained by correcting the luminance value indicated by the luminance information by the amount of change from the initial value of the spectrum of the wavelength information. It is conceivable that the light detected by the photodetector is affected by, for example, fluctuations in the light source and background light. In this case, there is a possibility that the film thickness cannot be estimated with high accuracy based on the luminance information. In this regard, by correcting the luminance value indicated by the luminance information according to the amount of change from the initial value of the spectrum, the luminance information that cancels the influence of the fluctuation of the light source and the background light that was originally included can be used to achieve high accuracy. can estimate the film thickness.

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JP2022530802A JP7121222B1 (ja) 2021-05-21 2022-01-25 膜厚測定装置及び膜厚測定方法
EP22804232.1A EP4343274A4 (en) 2021-05-21 2022-01-25 FILM THICKNESS MEASURING DEVICE AND FILM THICKNESS MEASURING METHOD
CN202280036313.5A CN117355724A (zh) 2021-05-21 2022-01-25 膜厚测定装置及膜厚测定方法
US18/561,390 US20240240933A1 (en) 2021-05-21 2022-01-25 Film thickness measurement device and film thickness measurement method
JP2022124611A JP7788358B2 (ja) 2021-05-21 2022-08-04 膜厚測定装置及び膜厚測定方法
JP2025241756A JP2026053393A (ja) 2021-05-21 2025-12-08 膜厚測定装置及び膜厚測定方法

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