WO2022234803A1 - Procédé de dispersion de corps granulaires et dispositif d'adsorption électrostatique - Google Patents

Procédé de dispersion de corps granulaires et dispositif d'adsorption électrostatique Download PDF

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Publication number
WO2022234803A1
WO2022234803A1 PCT/JP2022/019083 JP2022019083W WO2022234803A1 WO 2022234803 A1 WO2022234803 A1 WO 2022234803A1 JP 2022019083 W JP2022019083 W JP 2022019083W WO 2022234803 A1 WO2022234803 A1 WO 2022234803A1
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Prior art keywords
particles
electrode
adsorption
opening
conductive
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PCT/JP2022/019083
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English (en)
Japanese (ja)
Inventor
俊之 杉本
将平 山崎
勝 田中
弘行 伊澤
Original Assignee
昭和電工マテリアルズ株式会社
俊之 杉本
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Priority to JP2023518675A priority Critical patent/JPWO2022234803A1/ja
Publication of WO2022234803A1 publication Critical patent/WO2022234803A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/025—Discharge apparatus, e.g. electrostatic spray guns

Definitions

  • the present invention relates to a powder dispersion method and an electrostatic adsorption device.
  • the above method utilizes the self-aggregation phenomenon of particles, and is a suitable technique when arranging particles in a close-packed arrangement or when forming a particle film.
  • an object of the present invention is to provide a method for dispersing granular material and an electrostatic adsorption device that can dispose the granular material at a predetermined position on a base material.
  • a first electrode having a static dissipative or conductive placement portion, and an insulating adsorption having an opening pattern facing the placement portion and opening toward the placement portion is provided.
  • a second electrode having a portion; It is characterized in that the compounded particles to which conductive powder particles having a smaller particle diameter than the particles are attached are brought into contact with the adsorption part, and the conductive powder particles are accommodated in the opening of the adsorption part.
  • a method for dispersing granular material is provided.
  • the adsorption portion in which the conductive powder is accommodated in the opening is used as the base material, or the conductive powder in the opening is transferred to a predetermined base material.
  • the conductive powder particles can be arranged at predetermined positions on the substrate (for example, the conductive powder particles can be spaced apart from each other and arranged two-dimensionally).
  • the above method can fill the opening with the granular material without using a squeegee or the like, damage to the granular material can be reduced.
  • the method according to the present invention is characterized in that it is easy to cause the compounded particles to fly up to the adsorption portion until the conductive granular material is accommodated in the opening having a predetermined opening pattern, and It has the advantage of being able to resupply or recycle the mixed particles to the placement section by gravity or an appropriate conveying means, and is more efficient than the method using a solvent, etc. It can be said that this is a method capable of arranging the granules.
  • the particle size of the medium particles may be 10 to 100 times the particle size of the conductive powder. In this case, the efficiency of accommodating the conductive granular material in the opening of the adsorption portion is further improved.
  • the particle size of the conductive powder may be 2 to 20 ⁇ m.
  • the method for dispersing powder or granular material may further include a step for removing powder or granular material other than the conductive powder or granular material housed in the opening, which adheres to the adsorption portion. good.
  • Another aspect of the present invention is a first electrode having a static dissipative or conductive arrangement portion for arranging particles, and an opening pattern facing the arrangement portion and opening toward the arrangement portion. and a second electrode having an insulating adsorption portion.
  • Such an electrostatic adsorption device can be used as a device for dispersing powder particles by using mixed particles in which conductive powder particles having a smaller particle size than the medium particles are adhered to the medium particles. .
  • the present invention it is possible to provide a method for dispersing granular material and an electrostatic adsorption device that can dispose granular material at a predetermined position on a substrate.
  • FIG. 1 is a diagram showing a schematic configuration of an electrostatic adsorption device used in a method for dispersing powder particles according to an embodiment of the present invention
  • FIG. 3 is a schematic diagram showing compounded particles.
  • FIG. 3(a) is a plan view schematically showing an example of the adsorption portion
  • FIG. 3(b) is a sectional view taken along line Ib--Ib of FIG. 3(a).
  • FIG. 4 is a cross-sectional view schematically showing a state in which conductive powder particles are accommodated in the opening of the adsorption section;
  • FIG. 3 is a schematic diagram showing a schematic configuration of an electrostatic adsorption device used in a method for dispersing powder particles according to an embodiment of the present invention
  • FIG. 3 is a schematic diagram showing compounded particles.
  • FIG. 3(a) is a plan view schematically showing an example of the adsorption portion
  • FIG. 3(b) is a sectional view taken along line Ib-
  • FIG. 11 is a plan view schematically showing an example of another opening pattern of the adsorption section; It is a schematic diagram for demonstrating the dispersion
  • 1 is an enlarged photograph of an adsorption electrode obtained in Example 1.
  • the upper limit value or lower limit value of the numerical range at one stage may be replaced with the upper limit value or lower limit value of the numerical range at another stage.
  • the upper and lower limits of the numerical ranges may be replaced with the values shown in the examples.
  • an aggregate of a plurality of granular materials is also referred to as a "granular material". The same is true for mediator particles and blended particles.
  • a first electrode having an arrangement portion having static electricity dissipative properties or conductivity, and an opening pattern facing the arrangement portion and opening toward the arrangement portion are provided.
  • a second electrode having an insulating adsorption portion; Blended particles obtained by adhering electrically conductive powder having a particle size smaller than that of the intermediate particles to the media particles are brought into contact with the adsorption section, and the conductive powder is accommodated in the opening of the adsorption section.
  • FIG. 1 is a diagram showing a schematic configuration of an electrostatic adsorption device used in the method for dispersing powder or granular material according to the present embodiment.
  • the electrostatic adsorption device 1 includes a lower electrode (first electrode) 4 having an arrangement portion 2 and an upper electrode having an adsorption portion 5 arranged above the arrangement portion 2 in the gravitational direction and facing the arrangement portion 2. (second electrode) 7; Blended particles are arranged in the arrangement portion 2 .
  • the lower electrode 4 is composed of the electrode main body 3 and the placement portion 2
  • the upper electrode 7 is composed of the electrode main body 6 and the adsorption portion 5 .
  • the electrode main body and the arrangement portion may be integrated.
  • the material of the electrode main body 3 constituting the lower electrode 4 a material having static electricity dissipative property or conductivity can be used.
  • a material having a surface resistivity of 10 13 ⁇ or less can be used, and specific examples include metals and glass.
  • the shape of the electrode main body 3 is not particularly limited, but may be, for example, a flat plate shape, a roll shape, or the like.
  • a material having static electricity dissipative property or conductivity can be used as a material for the arrangement portion 2.
  • a material having a surface resistivity of 10 13 ⁇ or less can be used, and specific examples include metal, glass, and conductive resin such as conductive polytetrafluoroethylene (PTFE).
  • PTFE conductive polytetrafluoroethylene
  • the shape of the placement portion 2 is not particularly limited as long as the compounded particles can be placed thereon. , and a side surface, and may be open in the direction of the suction portion. The placement shown in FIG. 1 can accommodate more compounded particles.
  • the lower electrode in which the electrode main body and the arrangement portion are integrated for example, one made of a material having a surface resistivity of 10 13 ⁇ or less such as metal or glass can be used.
  • the static electricity dissipative placement portion may have a surface resistivity of 10 13 ⁇ or less, or 10 6 ⁇ or more.
  • the conductive placement portion may have a surface resistivity of 10 6 ⁇ or less, or 10 ⁇ 3 ⁇ or more.
  • the blended particles to be arranged in the arrangement portion are obtained by adhering electrically conductive powder particles having a smaller particle size than the medium particles to the medium particles.
  • FIG. 2 is a schematic diagram showing blended particles. As shown in FIG. 2, the blended particles P are composed of mediator particles 10 and conductive powder particles 12 adhered to the surfaces of the mediator particles.
  • the mediator particles 10 may be particles having static electricity dissipative properties or conductivity, and particles containing a material having a surface resistivity of 10 13 ⁇ or less can be used.
  • a material having a surface resistivity of 10 13 ⁇ or less can be used.
  • carbon particles, metal particles such as solder, glass particles, and inorganic particles having static electricity diffusion properties can be used. These can be used individually by 1 type or in combination of 2 or more types.
  • the mediator particles 10 may be spherical or substantially spherical, and may be provided with concave portions, convex portions, or concave portions and convex portions on the surface.
  • the particle size of the mediator particles 10 may be 30 to 500 ⁇ m, 40 to 400 ⁇ m, or 50 to 300 ⁇ m from the viewpoint of suppressing aggregation of the blended particles and facilitating movement of the blended particles. good too.
  • mediator particles having an average particle diameter within the above range may be used.
  • the average particle diameter of particles or granules is obtained by measuring the particle diameter of 100 particles or granules by observation using a scanning electron microscope (SEM), and calculating the average value thereof. obtained by taking When the particles or granular materials are not spherical such as having protrusions, the particle size of the particles or granular materials is the diameter of a circle circumscribing the particles or granular materials in the SEM image.
  • the mediator particles 10 are placed in the arrangement portion of the electrostatic adsorption device, and when an electric field is applied under predetermined conditions described later, the mediator particles 10 move from the lower electrode (first electrode) to the upper electrode (second electrode). It may be selected by a method of confirming that it moves toward (jumps up) and comes into contact with the adsorption portion.
  • the conductive powder 12 for example, metal particles such as gold, silver, nickel, copper, solder, etc.; conductive coated particles and the like. Metals that coat the non-conductive particles include gold, silver, nickel, copper, solder, and the like, and may have a multilayer structure.
  • the electrically conductive powder may have an insulating coating (for example, insulating fine particles) on at least a part of the outer surface of the powder.
  • the conductive powder may contain a conductive material and function as a conductive material.
  • the electrically conductive powder also includes an insulating powder having conductivity imparted by moisture adsorption or moisture absorption. Examples of insulating powder include glass, ceramics, plastics, silicon rubber, and rubber such as butyl rubber.
  • the conductive powders can be used singly or in combination of two or more.
  • the conductive powder particles 12 may be spherical or substantially spherical, and include conductive powder particles and a plurality of insulating fine particles provided on at least part of the outer surface of the powder particles. It may be a composite particle comprising
  • the particle size of the conductive powder 12 may be 1 to 40 ⁇ m, 1.5 to 30 ⁇ m, or 2 to 20 ⁇ m.
  • conductive particles having an average particle size within the above range may be used.
  • the particle diameter of the mediating particles that constitute the compounded particles P may be 5 to 200 times the particle diameter of the conductive powder particles from the viewpoint of efficiently adsorbing the conductive powder particles to the adsorption part. It may be 10 to 150 times, or 10 to 100 times.
  • the blended particles P can be prepared by mixing medium particles and conductive powder.
  • the mixing method is not particularly limited, for example, a known mixing means such as a stirrer may be used, or a container containing medium particles and conductive powder may be shaken. Mixing is preferably carried out within a range that does not damage the medium particles and the granular material.
  • the mixing ratio of the mediator particles and the conductive powder can be appropriately set so that the conductive powder and grains are sufficiently adhered to the surface of the mediator particles. If the blending amount of the conductive powder is too large, aggregation of the conductive powder tends to occur. is preferred.
  • the electrode body 6 constituting the upper electrode 7 one having static electricity dissipative properties or conductivity can be used.
  • a material having a surface resistivity of 10 13 ⁇ or less can be used, and specific examples include metals and glass.
  • the shape of the electrode main body 6 is not particularly limited, but may be, for example, a flat plate shape, a roll shape, or the like.
  • the adsorption portion 5 is provided with an opening pattern (a plurality of openings 72) that opens toward the placement portion.
  • An insulating material can be used as the material of the adsorption portion 5 .
  • materials with surface resistivities greater than 10 13 ⁇ can be used.
  • the shape of the adsorption portion 5 is not particularly limited as long as it has the opening pattern described above, and may be a film or a film formed on the surface of the electrode body 6 , which is separated from the electrode body 6 . It may be a film that can be used.
  • FIG. 3 is a plan view schematically showing an example of a suction portion
  • (b) of FIG. 3 is a cross-sectional view taken along line Ib-Ib of (a) of FIG.
  • the suction unit 5 shown in FIG. 3A is provided with a plurality of openings (recesses) 72 having a predetermined pattern (opening pattern).
  • the predetermined pattern (opening pattern) may be a regular arrangement.
  • the opening 72 of the suction portion 5 is preferably tapered such that the opening area increases from the bottom portion 72a side of the opening portion 72 toward the surface 5a side of the suction portion 5 . That is, as shown in FIGS. 3A and 3B, the width of the bottom portion 72a of the opening 72 (the width a in FIGS. 3A and 3B) is the surface 5a of the opening 72. is preferably narrower than the width of the opening in (width b in FIGS. 3(a) and 3(b)).
  • the size (width a, width b, volume, taper angle, depth, etc.) of the opening 72 may be set according to the size of the electrically conductive granular material to be accommodated.
  • the width b of the opening can be 1.0 to 1.5 times, or 1.05 to 1.45 times, the particle size of the conductive powder.
  • the particle size of the mediator particles can be 2.0 to 110 times, and can be 2.5 to 100 times, the width b of the opening.
  • the shape of the opening 72 may be a shape other than the shape shown in FIGS. 3(a) and 3(b).
  • the shape of the opening on the surface 5a may be oval, triangular, quadrangular, polygonal, etc., other than circular as shown in FIG. 3(a).
  • the bottom portion 72a may also have a shape other than a flat surface, such as a mountain shape, a valley shape, or an aggregate of fine projections.
  • FIG. 4 is a cross-sectional view schematically showing a state in which conductive powder particles are accommodated in the opening of the adsorption part. Removing particles (surplus particles) other than the conductive particles accommodated in the opening, and transferring the accommodated conductive particles to an adhesive substrate or the like From the viewpoint of facilitating the
  • the shape of the opening 72 can be set so as to be -20 to 80%, preferably -15 to 60%, of the particle size d.
  • X is a positive value
  • it means a state in which the conductive granules protrude from the surface 5a of the adsorption portion as shown in FIG. 4
  • X is a negative value means a state in which the conductive granules do not protrude from the surface 5a of the adsorption portion, in other words, are buried.
  • the adsorption portion 5 As materials for forming the adsorption portion 5, for example, inorganic materials such as silicon, various ceramics, glass, metals such as stainless steel, and organic materials such as various resins can be used.
  • the opening 72 of the adsorption section can be formed by a known method such as photolithography, nanoimprinting, or the like.
  • the adsorption portion 5 may be a single layer, or may be composed of a plurality of layers such as a laminate of a base layer and an opening layer provided with an opening.
  • the adsorption part 5 is a laminate, for example, it is a film comprising a base layer such as PET and an opening layer formed using a photocurable resin composition by a method such as photolithography or nanoimprinting.
  • the opening pattern can be set as appropriate so that the particles can be dispersed in the desired arrangement.
  • the openings of round holes are provided in series in a grid pattern, but they can be staggered by 60°, for example, as shown in FIG.
  • the opening pattern may be formed by aligning the openings, or by randomly providing the openings.
  • the lower electrode 4 and the upper electrode 7 are arranged with a predetermined distance therebetween, and the distance between the electrodes can be 0.5 to 100 mm, and even 1 to 20 mm. Well, it may be from 2 to 15 mm.
  • the lower electrode 4 may be movable in the electrostatic adsorption device 1, and in this case, it becomes easy to continuously supply the compounded particles.
  • the bottom electrode can be provided on the surface of a belt or cylindrical roller.
  • the upper electrode 7 may be movable, and in this case, it becomes easy to continuously supply adsorption portions for adsorbing conductive powder particles.
  • the upper electrode can be provided on the surface of a belt or cylindrical roller.
  • the power supply 8 may be anything that can form an electric field between the lower electrode and the upper electrode, and for example, a known high voltage power supply can be used.
  • the high voltage power supply may be a DC power supply or an AC power supply.
  • the control unit 9 can have functions such as adjustment of applied voltage and application time, for example.
  • an electric field is formed between the first electrode and the second electrode, and the medium particles arranged in the arrangement section have a smaller particle size than the medium particles.
  • the blended particles to which the conductive powder particles are adhered are brought into contact with the adsorption part, and the conductive powder particles are accommodated in the opening of the adsorption part.
  • FIG. 6A and 6B are schematic diagrams for explaining the method for dispersing the granular material according to the present embodiment.
  • FIG. 6A shows a lower electrode (first electrode) and an upper electrode (second electrode).
  • Figure 2 shows the motion of compounded particles when an electric field is applied between The compounded particles, which are charged to the opposite polarity to the upper electrode in the placement portion, rise due to electrostatic attraction. The compounded particles that have risen come into contact with the adsorption section.
  • the conductive powder particles 12 having small particle size and adhering to the surface of the medium particles 10 having a large particle size may directly enter the opening 72 of the adsorption section, but in many cases this is not the case.
  • the compounded particles that come into contact with the adsorption part may drop due to the recoil of collision or gravity, but in most cases, they remain attached due to electrostatic attraction, like the compounded particles P1 shown in FIG. is. Only one layer of the compounded particles P1 is attached so as to cover the adsorption portion. Since the compounded particles P1 are charged with a polarity opposite to the voltage of the upper electrode, the electrostatic field formed between the upper electrode and the lower electrode is reduced.
  • the compounded particles P2 charged to the opposite polarity to the upper electrode rise from the arrangement portion due to electrostatic attraction and collide with the compounded particles P1 adhering to the upper electrode. be able to.
  • the blended particles P2 that have collided give an electric charge to the blended particles P1, and the charged blended particles P2 lose their electric charge and fall naturally, and the electric charge of the blended particles P1 increases.
  • the mixed particles P2 reciprocate between the upper electrode and the lower electrode.
  • the electrostatic repulsive force between the mediator particles and the conductive granules increases.
  • the electrically conductive granular material is discharged toward the opening, and the electrically conductive granular material enters the opening.
  • the mixed particles can be brought into contact with the adsorption portion until the conductive powdery grains 12 are accommodated in the openings 72 having a predetermined opening pattern.
  • an electrode in which the conductive powder particles 12 are housed in the opening 72 of the adsorption unit 5, that is, the electrode 20 with conductive powder particles is obtained.
  • the electric field intensity to be applied may be 0.1 to 30 kV/cm, may be 0.5 to 30 kV/cm, or may be 1 to 20 kV/cm.
  • the application of the electric field may be continuous or intermittent.
  • the application time of the electric field can be appropriately set according to the amount of the conductive powder or granular material to be accommodated in the openings 72 having a predetermined opening pattern.
  • a predetermined amount of conductive powder particles are adsorbed to the opening of the adsorption part due to the action of reducing the electric field caused by the adsorption of the conductive powder particles to the insulating adsorption part 5 . It is also possible to stop the electrostatic adsorption of the electrically conductive powder at this point. That is, since the strength of the electric field between the lower electrode 4 and the electrode 20 with conductive powder particles becomes smaller as the conductive powder particles adhere to the adsorption part 5, the mixed particles in the placement part disappear. In addition to this, by sufficiently reducing the electric field between the electrodes, it is also possible to stop the jumping of the blended particles.
  • the electric field can be sufficiently weakened until the electric field becomes sufficiently weak. It is possible to cause the adsorbing part to adsorb powder or granular material having properties.
  • the conductive powder-coated electrode 20 may be used as a base material in which the adsorption portion 5 is separated from the electrode main body 6 and conductive powder particles are spaced apart and two-dimensionally arranged. It may also be used to transfer conductive granules onto a conductive substrate.
  • the method for dispersing powder or granular material of the present embodiment includes a step for removing powder or granular material (excess particles) other than the conductive powder or granular material accommodated in the opening, adhering to the adsorption unit ( hereinafter, may be also referred to as excess particle removal step).
  • the surplus particle removal step can be performed before transferring the electrically conductive granular material contained in the opening onto a predetermined adhesive base material.
  • the particles removed from the adsorption unit may be recovered and recycled, and it is preferable to recover and recycle at least the powder particles having conductivity among the surplus particles.
  • Methods for removing excess particles include physical removal means such as air blow, brush, and squeegee, and electrostatic removal means such as ionizers.
  • the first electrode and the second electrode are arranged on the lower side and the upper side with respect to the direction of gravity, respectively. may be horizontal or may be inclined with respect to the direction of gravity. Also in these cases, the first electrode and the second electrode can be configured in the same manner as described above.
  • the granular material can be arranged at a predetermined position on the substrate while reducing the damage to the granular material.
  • the electrostatic adsorption device of the present embodiment includes a first electrode having a dissipative or conductive arrangement portion, and an insulating electrode having an opening pattern facing the arrangement portion and opening toward the arrangement portion. and a second electrode having an adsorption part having
  • the electrostatic chucking device of the present embodiment can have a configuration similar to that of the electrostatic chucking device used in the method for dispersing powder particles described above.
  • the present invention also provides the following inventions [1] to [5].
  • a first electrode having a static dissipative or conductive placement portion, and an insulating adsorption portion provided with an opening pattern facing the placement portion and opening toward the placement portion. and a second electrode, by forming an electric field between the first electrode and the second electrode of the electrostatic adsorption device, the mediator particles arranged in the placement section are more likely to be particles than the mediator particles.
  • Blended particles to which conductive powder particles having a small diameter are attached are brought into contact with the adsorption part, and the conductive powder particles are accommodated in the opening part of the adsorption part. distribution method.
  • [2] The method for dispersing powder particles according to the above [1], wherein the particle size of the medium particles is 10 to 100 times the particle size of the conductive powder particles.
  • [3] The method for dispersing powder particles according to the above [1] or [2], wherein the particle size of the powder particles having conductivity is 2 to 20 ⁇ m.
  • a first electrode having a static dissipative or conductive placement portion, and an insulating suction portion provided with an opening pattern facing the placement portion and opening toward the placement portion. and a second electrode.
  • Example 1 A device having the same configuration as the electrostatic adsorption device 1 according to the above-described embodiment was prepared, a brass plate was used as the lower electrode 4, and one main surface was coated with the imprint film of Production Example 1 as the upper electrode 7. A brass plate was used and the distance between the electrodes was set to 8.0 mm.
  • FIG. 7 shows an enlarged photograph of the adsorbing portion (imprint film) obtained in this way, in which the conductive coated particles, which are particles having conductivity, are housed in the openings.
  • FIG. 7 is a photograph of the surface of the imprint film at a microscope magnification of 600 times.
  • Electrostatic adsorption apparatus 2... Arrangement part, 3... Electrode main body, 4... Lower electrode (first electrode), 5... Adsorption part, 6... Electrode main body, 7... Upper electrode (second electrode), 8 Power supply 9 Control unit 10 Mediating particles 12 Conductive granular material 20 Electrode with conductive granular material 72 Opening P Mixed particles.

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Abstract

Ce procédé de dispersion de corps granulaires est caractérisé en ce qu'il est utilisé dans un dispositif d'attraction électrostatique 1 pourvu : d'une première électrode 4 équipée d'une partie d'agencement 2 qui a une diffusivité ou une conductivité électrostatique ; et une seconde électrode 7 équipée d'une partie d'attraction 5 qui fait face à la partie d'agencement 2, qui a des propriétés d'isolation, et qui est pourvue d'un motif d'ouverture qui s'ouvre vers le côté de partie d'agencement. Le procédé est en outre caractérisé en ce que, en formant un champ électrique entre la première électrode 4 et la seconde électrode 7, des particules mélangées P, qui sont disposées sur la partie d'agencement 2 et qui sont obtenues par fixation à des particules intermédiaires 10 des corps granulaires conducteurs 12 ayant un diamètre de particule plus petit que celui des particules intermédiaires, sont amenées en contact avec la partie d'attraction 5, amenant ainsi les corps granulaires conducteurs 12 à être reçus dans des ouvertures 72 de la partie d'attraction.
PCT/JP2022/019083 2021-05-07 2022-04-27 Procédé de dispersion de corps granulaires et dispositif d'adsorption électrostatique WO2022234803A1 (fr)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008137122A (ja) * 2006-12-04 2008-06-19 Tatsuo Shiyouji 微粒子のコーティング方法
JP2012521306A (ja) * 2009-07-10 2012-09-13 コリア・ユニバーシティ・リサーチ・アンド・ビジネス・ファウンデーション ナノ粒子を用いた構造製造
JP2012523311A (ja) * 2009-04-09 2012-10-04 インダストリー−ユニバーシティ コオペレーション ファウンデーション ソギャン ユニバーシティ 物理的圧力によって微粒子を基材上に配置させる方法
WO2021095726A1 (fr) * 2019-11-12 2021-05-20 昭和電工マテリアルズ株式会社 Procédé de dispersion de particules conductrices et dispositif d'adsorption électrostatique

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008137122A (ja) * 2006-12-04 2008-06-19 Tatsuo Shiyouji 微粒子のコーティング方法
JP2012523311A (ja) * 2009-04-09 2012-10-04 インダストリー−ユニバーシティ コオペレーション ファウンデーション ソギャン ユニバーシティ 物理的圧力によって微粒子を基材上に配置させる方法
JP2012521306A (ja) * 2009-07-10 2012-09-13 コリア・ユニバーシティ・リサーチ・アンド・ビジネス・ファウンデーション ナノ粒子を用いた構造製造
WO2021095726A1 (fr) * 2019-11-12 2021-05-20 昭和電工マテリアルズ株式会社 Procédé de dispersion de particules conductrices et dispositif d'adsorption électrostatique

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