WO2022222494A1 - 直写光刻数据处理系统和方法 - Google Patents

直写光刻数据处理系统和方法 Download PDF

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Publication number
WO2022222494A1
WO2022222494A1 PCT/CN2021/137696 CN2021137696W WO2022222494A1 WO 2022222494 A1 WO2022222494 A1 WO 2022222494A1 CN 2021137696 W CN2021137696 W CN 2021137696W WO 2022222494 A1 WO2022222494 A1 WO 2022222494A1
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data
processed
processing
processing unit
main control
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PCT/CN2021/137696
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English (en)
French (fr)
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朱鹏飞
朱鸣
浦东林
陈林森
张瑾
邵仁锦
吕帅
徐顺达
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苏州苏大维格科技集团股份有限公司
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Publication of WO2022222494A1 publication Critical patent/WO2022222494A1/zh

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F9/00—Arrangements for program control, e.g. control units
    • G06F9/06—Arrangements for program control, e.g. control units using stored programs, i.e. using an internal store of processing equipment to receive or retain programs
    • G06F9/46—Multiprogramming arrangements
    • G06F9/50—Allocation of resources, e.g. of the central processing unit [CPU]
    • G06F9/5005—Allocation of resources, e.g. of the central processing unit [CPU] to service a request
    • G06F9/5027—Allocation of resources, e.g. of the central processing unit [CPU] to service a request the resource being a machine, e.g. CPUs, Servers, Terminals
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F9/00—Arrangements for program control, e.g. control units
    • G06F9/06—Arrangements for program control, e.g. control units using stored programs, i.e. using an internal store of processing equipment to receive or retain programs
    • G06F9/46—Multiprogramming arrangements
    • G06F9/50—Allocation of resources, e.g. of the central processing unit [CPU]

Definitions

  • the present application relates to a direct writing lithography data processing system and method, belonging to the technical field of direct writing lithography data processing.
  • Direct-write lithography is a technology that realizes the preparation of computer design data on a specific substrate to form a pattern layout of high-precision micro-nano structures.
  • Direct-write lithography has the advantages of high flexibility and low cost compared with reticle exposure lithography because it can directly make patterns on the substrate coated with photoresist without a mask. In recent years, it has developed rapidly and is widely used in MEMS. (Micro-Electro-Mechanical System, Micro-Electro-Mechanical System) device production, two-dimensional material production, mask plate production, PCB (Printed Circuit Board, printed circuit board) plate making and other fields.
  • MEMS Micro-Electro-Mechanical System, Micro-Electro-Mechanical System
  • the common writing methods of direct writing lithography include the use of spatial light modulation device DMD (digital-micromirror-device, digital micromirror device) light field splicing exposure method, acousto-optic deflector AOD (Acousto Optical Deflectors) and modulator AOM ( Acousto-optical Modulators) high-speed scanning method, laser beam direct focusing single spot scanning filling method and so on.
  • Common data file formats are GDSII, Gerber, DXF, BMP, etc. No matter what method is used, it involves a large number of data processing and conversion processes from data file format to device writing format.
  • 3D grayscale lithography technology has also become a hot spot in current direct write lithography.
  • 3D grayscale lithography data is even more multiplied.
  • the writing format of direct writing lithography is also developing towards a larger format.
  • the first method needs to pre-process the data, which will take a long time, reduce the output efficiency of the device, and need to solve the problem of mass data storage, as well as the stability requirements of the storage device for repeated reading and writing.
  • the present application provides a direct-write lithography data processing system and method, which can solve the problems of low data processing efficiency and poor reliability of existing data processing methods.
  • This application provides the following technical solutions:
  • a direct-write lithography data processing system including:
  • the main control unit is used to obtain the graphic file to be processed; perform data segmentation according to the graphic file to obtain a plurality of data to be processed; assigning the plurality of data to be processed to the processing unit by the working state;
  • the processing unit is configured to process the to-be-processed data when acquiring the to-be-processed data to obtain processed data;
  • the processed data is data that can be directly used by the lithography apparatus;
  • a writing device configured to read the processed data in the processing unit, and write the processed data into the lithography apparatus, so that the lithography apparatus performs photolithography according to the processed data engraved processing.
  • performing data segmentation according to the graphic file to obtain a plurality of data to be processed including:
  • the graphic data in the graphic file is divided according to the user parameter to obtain the plurality of data to be processed.
  • the user parameter includes at least one of the following: a division direction and a division distance.
  • the main control unit is further configured to send a query instruction to the multiple processing units before allocating the multiple data to be processed to the processing unit according to the working state, and the query instruction uses for querying the working status of the plurality of processing units;
  • the processing unit is further configured to feed back the current working state to the main control unit when receiving the query instruction;
  • the main control unit is further configured to acquire the working state fed back by the processing unit.
  • allocating the plurality of data to be processed to the processing unit according to the working state includes:
  • each group of to-be-processed data to be allocated determine from the plurality of processing units a target processing unit whose working state is an idle state; each group of to-be-processed data includes at least one to-be-processed data;
  • the current set of data to be processed is allocated to the target processing unit.
  • the working state of the processing unit is initialized to be idle, and the processing unit is further configured to:
  • the working state is set to idle, and a processing completion notification is sent to the main control unit, so that the main control unit records the processing state of the data to be processed.
  • the writing device is connected in communication with the main control unit and the processing unit respectively;
  • the main control unit is further configured to send a writing instruction to the writing device when receiving the processing completion notification sent by the processing unit, where the writing instruction carries the unit identifier of the processing unit;
  • the writing device is configured to receive the write instruction; read the processed data from the corresponding processing unit based on the unit identifier in the write instruction, and write the processed data into the lithography device.
  • the writing device is further configured to send a read completion notification to the processing unit corresponding to the unit identifier after reading the processed data from the corresponding processing unit based on the unit identifier;
  • the unit identifies the corresponding processing unit, and is further configured to delete the stored processed data when the read completion notification is received.
  • the system further includes a standby processing unit,
  • the processing unit is further configured to feed back the working state to the main control unit when the working state is abnormal, where the working state is used to indicate the working abnormality;
  • the main control unit is further configured to determine whether to control the backup processing unit to start when the working state fed back by the processing unit indicates that the operation is abnormal; when it is determined to control the backup processing unit to start, start the backup processing
  • the single takes over the work of the processing unit whose working state is abnormal.
  • the determining whether to control the standby processing unit to start up includes:
  • the system establishes a communication connection through a high-speed communication bus.
  • a second aspect provides a direct-write lithography data processing method for the main control unit in the direct-write lithography data processing system provided in the first aspect, the method comprising:
  • the plurality of data to be processed are allocated to the processing unit according to the working state.
  • a third aspect provides a direct-write lithography data processing method for a processing unit in the direct-write lithography data processing system provided in the first aspect, the method comprising:
  • the data to be processed is processed to obtain processed data; the processed data is data that can be directly used by the lithography apparatus.
  • a fourth aspect provides a direct-write lithography data processing method for use in the writing device in the direct-write lithography data processing system provided in the first aspect, the method comprising:
  • the processed data is written into the lithography apparatus, so that the lithography apparatus performs lithography processing according to the processed data.
  • the beneficial effects of the present application at least include: acquiring a graphic file to be processed through the main control unit; dividing data according to the graphic file to obtain a plurality of data to be processed; acquiring the working status of a plurality of processing units that are communicatively connected to the main control unit; and Allocate a plurality of data to be processed to the processing unit according to the working state; when the processing unit acquires the data to be processed, it processes the data to be processed to obtain the processed data; the processed data is the data that can be directly used by the lithography apparatus; write The device reads the processed data in the processing unit, and writes the processed data into the lithography device, so that the lithography device performs lithography processing according to the processed data; it can solve the data processing of the existing data processing methods The problem of low efficiency and poor reliability; multiple processing units can process the same graphic file at the same time, improving the efficiency and reliability of data processing.
  • the real-time performance of data processing can be ensured in the event of equipment failure.
  • FIG. 1 is a schematic structural diagram of a direct-write lithography data processing system provided by an embodiment of the present application
  • FIG. 2 is a schematic diagram of data segmentation provided by an embodiment of the present application.
  • FIG. 3 is a schematic diagram of a data processing process provided by an embodiment of the present application.
  • FIG. 4 is a flowchart of a method for processing direct-write lithography data by a main control unit provided by an embodiment of the present application
  • FIG. 5 is a flowchart of a method for processing direct-write lithography data by a processing unit provided by an embodiment of the present application
  • FIG. 6 is a schematic diagram of an abnormal data unit provided by an embodiment of the present application.
  • FIG. 7 is a flowchart of a method for processing direct-write lithography data by a main control unit provided by another embodiment of the present application.
  • FIG. 8 is a flowchart of a method for processing direct-write lithography data by a processing unit provided by another embodiment of the present application.
  • FIG. 9 is a flowchart of a method for processing direct-write lithography data by a writing device provided by an embodiment of the present application.
  • FIG. 10 is a block diagram of a direct-write lithography data processing apparatus provided by an embodiment of the present application.
  • FIG. 1 is a schematic structural diagram of a direct-write lithography data processing system provided by an embodiment of the present application. As shown in FIG. 1 , the system includes a main control unit 110 , a plurality of processing units 120 and a writing device 130 .
  • the main control unit 110 may be a PC computer, a desktop computer, or a board card with a task management and scheduling function, and the implementation manner of the main control unit 110 is not limited in this embodiment.
  • the main control unit 110 realizes the overall control of the direct-write lithography data processing system, such as job scheduling, status detection, and fault response processing of the processing unit 120 .
  • the main control unit 110 is used to obtain a graphic file to be processed; perform data segmentation according to the graphic file to obtain a plurality of data to be processed; acquire the working states of a plurality of processing units 120 that are communicatively connected to the main control unit; and A plurality of data to be processed is allocated to the processing unit according to the working state.
  • the graphic file may be input by the user.
  • the main control unit 110 has a human-computer interaction interface for the user to input the graphic file.
  • graphics files can also be sent from other devices.
  • the graphic file may also be pre-stored in the storage medium of the main control unit 110, and this embodiment does not limit the manner in which the main control unit 110 acquires the graphic file.
  • the main control unit 110 performs data division according to the graphic file to obtain a plurality of data to be processed, including: obtaining user parameters; dividing the graphic data in the graphic file according to the user parameters to obtain a plurality of data to be processed N1. ..Nn.
  • the data to be processed may also be referred to as write field unit sequence information, write field data, etc., and the name of the data to be processed is not limited in this embodiment.
  • the user parameter is used to indicate the division method of the graphics data.
  • User parameters can be flexibly set according to segmentation requirements, that is, user parameters may not be fixed.
  • the user parameters may be input by the user or sent by other devices, and the method for obtaining the user parameters is not limited in this embodiment.
  • the user parameter includes at least one of the following: a division direction and a division distance.
  • the division direction is at least one, such as: horizontal division and/or vertical division; the division distances between different data to be processed are the same or different.
  • the division direction is horizontal division and the division distances between different data to be processed are the same.
  • the direct writing lithography data processing system is a maskless laser direct writing lithography system
  • the system uses DMD (1920x1080) as a pattern generator to write graphic data
  • the system data resolution is 100nm
  • the user input file size is 100mmx100mm.
  • the DMD direct writing lithography system uses the scanning method to write the graphics field by field. Before writing, the user input graphic needs to be rasterized and converted into a data file corresponding to the pixel.
  • the pixel width of a single write field cannot exceed the DMD pixel width size of 1920 pixel.
  • the user parameters include that the segmentation direction is horizontal segmentation, that is, segmentation is from left to right, and the segmentation spacing is the same as 1920 pixels. That is, the input file is divided equally at a distance of 192 um along the stepping direction in FIG. 2 , and a total of 521 (100 mm/192 um) writing field strips are obtained.
  • the main control unit 110 can also perform data division in a fixed manner.
  • different writing devices 130 correspond to different division methods, or the division methods are fixed. This embodiment does not make any changes to the data division methods. limited.
  • the main control unit 110 acquires the working states of the multiple processing units 120, including: the main control unit 110 sends a query instruction to the multiple processing units, and the query instruction is used to query the working states of the multiple processing units; When receiving the query instruction, the current working state is fed back to the main control unit; the main control unit 110 is further configured to acquire the working state fed back by the processing unit.
  • the query instruction may be sent by the main control unit 110 at regular intervals, or before sending the data to be processed each time; in addition, the query instruction may be sent to multiple processing units 120 at the same time, or sent to the processing units 120 one by one , when the previous processing unit 120 is in a busy state, send a query command to the next processing unit 120; when the previous processing unit 120 is in an idle state, stop sending the query command, and this embodiment does not limit the sending timing of the query command .
  • the main control unit 110 acquires the working states of the multiple processing units 120 , including: the main control unit 110 receives the working states fed back by the processing units 120 . At this time, the processing unit 120 may feed back the working status periodically, or feed back the working status when the working status is updated. This embodiment does not limit the timing at which the processing unit 120 feeds back the working status.
  • the main control unit 110 may further determine the working state of the corresponding processing unit 120 according to the processing state of the data to be processed, and the working state of each processing unit 120 is initialized to be idle. At this time, after the data to be processed is sent to a certain processing unit 120, the working state of the recording processing unit 120 is busy, the main control unit 110 records the corresponding relationship between the data to be processed, the unit identifier of the processing unit 120 and the working state; After the processing unit 120 finishes processing the data, the main control unit 110 updates the working state of the processing unit 120 in the corresponding relationship to idle according to the processing completion notification fed back by the processing unit 120 .
  • the main control unit 110 may determine the processing state of the data to be processed.
  • the main control unit 110 may also acquire the working status of the processing unit 120 based on other methods, and this embodiment does not limit the manner in which the main control unit 110 acquires the working status of the processing unit 120 .
  • the main control unit 110 allocates a plurality of data to be processed to the processing unit according to the working state, including: for each group of data to be processed to be allocated, determining a target processing unit whose working state is an idle state from the plurality of processing units; When the processing resources of the target processing unit satisfy the data volume of the current set of data to be processed, the current set of data to be processed is allocated to the target processing unit.
  • each group of data to be processed includes at least one piece of data to be processed.
  • the main control unit 110 may divide the data to be processed into N groups, each group corresponds to a processing unit 120, wherein the data of each group may be continuous, or random, or selected according to a certain rule , for example, according to the law of p+Nq, where p is a positive integer from 1 to N in sequence, and q is a positive integer starting from 0 in sequence.
  • N is 3, and they are divided into three groups, the first group is 1, 4, 7, 10, ...; the second group is 2, 5, 8, 11, ..., the third group is 3, 6, 9, 12, ....
  • This embodiment does not limit the manner in which the main control unit 110 divides the data groups to be processed.
  • the value of N is less than or equal to the number of processing units 120 .
  • the number of data to be processed in different groups of data to be processed is the same or different.
  • the main control unit 110 may not divide the data to be processed into groups, but send the data to be processed one by one.
  • the main control unit 110 may obtain the working state of each processing unit again after a period of time, until it is determined that the working state is the target processing unit in the idle state, Allocate the data to be processed.
  • the processing resources satisfying the data volume of the current set of data to be processed includes that the storage capacity of the target processing unit is greater than or equal to the data volume of the current set of data to be processed.
  • the main control unit 110 inquires about the working status of each processing unit 120, and confirms that each processing unit 120 is in an idle state and the remaining storage capacity is greater than or equal to 1171875K bytes. After that, referring to FIG. 3 , the first set of data to be processed (ie write field stripe 1, write field stripe 4, write field stripe 7, write field stripe 10, write field stripe 13) is sent to processing unit 1 , and send a start processing command. Send the second group of data to be processed (ie write field strip 2, write field strip 5, write field strip 8, write field strip 11, write field strip 14) to processing unit 2, and send a start processing instruction . Send the third group of data to be processed (ie, write field stripe 3, write field stripe 6, write field stripe 9, write field stripe 12, write field stripe 15) to processing unit 3, and send a start processing instruction .
  • the first set of data to be processed ie write field stripe 1, write field stripe 4, write field stripe 7, write field stripe 10, write field stripe 13
  • the processing unit 120 may be a PC computer, a desktop computer, or a device with data processing and storage capabilities, such as an FGPA board, and the implementation manner of the processing unit 120 is not limited in this embodiment.
  • the processing unit 120 is responsible for receiving the instructions of the main control unit 110 to complete the generation, storage and collection of the direct-write lithography data, and has the function of feedback of its own working status.
  • the processing unit 120 is configured to process the data to be processed when acquiring the data to be processed to obtain processed data; the processed data is data that can be directly used by the lithography apparatus.
  • the processing unit 120 is further configured to set the working state to busy when acquiring the data to be processed; perform rasterization processing on the data to be processed to obtain the processed data; and set the working state after the processing of the data to be processed is completed. is idle, and sends a processing completion notification to the main control unit for the main control unit to record the processing status of the data to be processed.
  • the processing unit After the processing unit receives the information and instructions, it sets its own working state to busy, parses the strip information, and enters the rasterization process.
  • the main control unit waits for the data processing unit to process the completion notification information. After the processing unit completes data processing and notifies the main control unit, it sets its working state to idle.
  • the main control unit receives the processing completion notification, and records the processing status of the data to be processed as the completed status.
  • the writing device 130 is responsible for reading the data generated by each processing unit 120 and writing it into the lithography apparatus.
  • the writing device 130 is communicatively connected to the main control unit 110 and the processing unit 120, respectively.
  • the main control unit 110 is further configured to send a writing instruction to the writing device 130 when receiving the processing completion notification sent by the processing unit 120, where the writing instruction carries the unit identifier of the processing unit.
  • the unit identifier may be a label of a processing unit or a device number, and this embodiment does not limit the implementation of the unit identifier.
  • the writing device 130 is configured to receive a writing instruction; read the processed data from the corresponding processing unit 120 based on the unit identifier in the writing instruction, and write the processed data into the lithography apparatus. For example, referring to FIG. 3 , the writing device 130 reads the processed data from each processing unit 120 to obtain the processed data (ie, write field data 1, 2, 3, 4, 5).
  • the writing device 130 is further configured to send a read completion notification to the processing unit corresponding to the unit identifier after reading the processed data from the corresponding processing unit based on the unit identifier.
  • processing unit 120 corresponding to the unit identifier is further configured to delete the stored processed data when the read completion notification is received.
  • the main control unit inquires that the data of the write field stripe 1 in FIG. 2 has been processed, and notifies the writing device to read the data from the corresponding processing unit. After the writing device reads the data of the processing unit, it notifies the processing unit to delete the data. The write device writes data to the write-through device. The main control unit repeatedly queries whether each pending process has been processed, and sequentially writes the write field data stripes (ie, the processed data) until all strips are written.
  • the writing device 130 may also periodically read the processed data from each processing unit; or, after the processing unit 120 finishes processing the data, it notifies the writing device 130 to read the processed data. In this embodiment The manner in which the writing device 130 reads the processed data is not limited.
  • the data processing process of the main control unit 110 at least includes steps 41-410:
  • Step 41 obtain user parameters and graphic files
  • Step 42 performing data segmentation on the image file according to user parameters to obtain a plurality of data to be processed
  • Step 43 query the working status of the processing unit in turn
  • Step 44 determine whether the working state of the processing unit is idle; if so, execute step 45, if not, execute step 43 again;
  • Step 45 determine whether the storage capacity of the processing unit is greater than or equal to the data volume of the current group of data to be processed; if so, execute step 46; if not, execute step 43 again;
  • Step 46 sending the current group of data to be processed to the processing unit
  • Step 47 waiting for the processing completion notification returned by the processing unit
  • the waiting period is preset in the main control unit 110 .
  • Step 48 determine whether the processing of the current group of data to be processed is completed; if so, execute step 49; if not, execute step 47 again;
  • Step 49 notify the writing device to read the processed data from the processing unit
  • step 410 it is determined whether all the processed data have been read; if so, the process ends; if not, step 47 is performed again.
  • the data processing process of the main control unit at least includes steps 51-55:
  • Step 51 receive the data to be processed, and set the working status to busy
  • Step 52 processing the data to be processed
  • Step 53 after the data processing is completed, send a processing completion notification to the main control unit;
  • Step 54 when receiving the read completion notice sent by the writing device, the processed data of the storage is deleted;
  • Step 55 set the working state to idle, and the process ends.
  • the main control unit 110 also has a function of dynamic allocation of computing power, which can dynamically allocate the number of processing units according to the data consumption of the processing units 120 .
  • the data processing system further includes a backup processing unit 140, and the processing unit 120 is further configured to feed back the working status to the main control unit 110 when the working status is abnormal, and the working status is used to indicate the working abnormality; the main control unit Step 110 is further configured to determine whether to control the backup processing unit to start when the working state fed back by the processing unit indicates abnormal operation; when it is determined to control the backup processing unit to start, start the backup processing unit to take over the work of the processing unit whose working state is abnormal.
  • determining whether to control the standby processing unit to start includes: determining whether the remaining processing units meet the real-time requirement of data processing; when the remaining processing units do not meet the real-time requirement of data processing, determining to control the standby processing unit to start; When the processing unit of the second processing unit meets the real-time requirement of data processing, it is determined not to control the startup of the standby processing unit.
  • the real-time requirement is used to indicate that the consumption rate of the data to be processed is greater than or equal to a rate threshold.
  • the data to be processed in the main control unit is processed at least at the speed of the speed threshold.
  • the speed threshold may be set by the user, or set by default in the main control unit 110, and this embodiment does not limit the setting method of the speed threshold.
  • the main control unit 110 may decide whether to join the standby processing unit 4 according to the data processing load. If the remaining processing unit 1 and processing unit 3 can meet the real-time requirements at this time, the equipped processing unit 4 will not be called to join. If it is found at this time that the consumption of the generated data cache cannot keep up with the consumption speed of the data writing device, the standby processing unit 4 is automatically transferred to take over the work of the processing unit 2 .
  • Fig. 1 it is described by using a writing device (or writing optical head), deploying one main control unit PC computer, three processing unit PC computers, and one standby processing unit as an example.
  • the numbers of the writing device, the main control unit, the processing unit, and the standby processing unit may also be other numbers, and this embodiment does not limit the number of each device.
  • the data processing system establishes a communication connection through a high-speed communication bus, such as establishing an Ethernet or optical fiber network.
  • a high-speed communication bus such as establishing an Ethernet or optical fiber network.
  • All units in the data processing system are connected by a high-speed Gigabit network to form a local area network.
  • the graphic file to be processed is acquired through the main control unit; the data is divided according to the graphic file to obtain a plurality of data to be processed; the acquisition is connected to the main control unit through communication The working state of multiple processing units; and assign multiple data to be processed to the processing unit according to the working state; when the processing unit obtains the data to be processed, it processes the data to be processed to obtain the processed data; the processed data is Data that can be directly used by the lithography device; the writing device reads the processed data in the processing unit, and writes the processed data into the lithography device, so that the lithography device performs lithography processing according to the processed data; The problem of low data processing efficiency and poor reliability of the existing data processing method is solved; multiple processing units can simultaneously process the same graphic file, and the data processing efficiency and reliability are improved.
  • the real-time performance of data processing can be ensured in the event of equipment failure.
  • FIG. 7 is a flowchart of a direct-write lithography data processing method provided by an embodiment of the present application. This embodiment is described by taking the method used in the main control unit 110 in the direct-write lithography data processing system shown in FIG. 1 as an example, and the method at least includes the following steps:
  • Step 701 acquiring the graphic file to be processed.
  • Step 702 Perform data segmentation according to the graphic file to obtain a plurality of data to be processed.
  • Step 703 Acquire the working states of multiple processing units that are communicatively connected to the main control unit.
  • Step 704 Allocate a plurality of data to be processed to the processing unit according to the working state.
  • the graphic file to be processed is acquired through the main control unit; the data is divided according to the graphic file to obtain a plurality of data to be processed; the acquisition is connected to the main control unit by communication
  • the problem of low data processing efficiency and poor reliability of the existing data processing method is solved; multiple processing units can simultaneously process the same graphic file, and the data processing efficiency and reliability are improved.
  • FIG. 8 is a flowchart of a method for processing direct-write lithography data provided by an embodiment of the present application. This embodiment is described by taking the method used in the processing unit 120 in the direct-write lithography data processing system shown in FIG. 1 as an example, and the method at least includes the following steps:
  • Step 801 Acquire data to be processed.
  • Step 802 Process the data to be processed to obtain processed data; the processed data is data that can be directly used by the lithography apparatus.
  • the graphic file to be processed is acquired through the main control unit; the data is divided according to the graphic file to obtain a plurality of data to be processed; the acquisition is connected to the main control unit by communication
  • the problem of low data processing efficiency and poor reliability of the existing data processing method is solved; multiple processing units can simultaneously process the same graphic file, and the data processing efficiency and reliability are improved.
  • FIG. 9 is a flowchart of a direct-write lithography data processing method provided by an embodiment of the present application. This embodiment is described by taking the method used in the writing device 130 in the direct-write lithography data processing system shown in FIG. 1 as an example, and the method at least includes the following steps:
  • Step 901 read the processed data in the processing unit.
  • Step 902 Write the processed data into the lithography apparatus, so that the lithography apparatus performs lithography processing according to the processed data.
  • the graphic file to be processed is acquired through the main control unit; the data is divided according to the graphic file to obtain a plurality of data to be processed; the acquisition is connected to the main control unit by communication
  • the problem of low data processing efficiency and poor reliability of the existing data processing method is solved; multiple processing units can simultaneously process the same graphic file, and the data processing efficiency and reliability are improved.
  • FIG. 10 is a block diagram of a direct-write lithography data processing apparatus provided by an embodiment of the present application.
  • the device may be the main control unit 110 , or the processing unit 120 , or the writing device 130 in the direct-write lithography data processing system shown in FIG. 1 .
  • the processor 1001 may include one or more processing cores, such as a 4-core processor, an 8-core processor, and the like.
  • the processor 1001 can use at least one hardware form among DSP (Digital Signal Processing, digital signal processing), FPGA (Field-Programmable Gate Array, field programmable gate array), PLA (Programmable Logic Array, programmable logic array) accomplish.
  • the processor 1001 may also include a main processor and a co-processor.
  • the main processor is a processor used to process data in the wake-up state, also called CPU (Central Processing Unit, central processing unit); the co-processor is A low-power processor for processing data in a standby state.
  • the processor 1001 may be integrated with a GPU (Graphics Processing Unit, image processor), and the GPU is used for rendering and drawing the content that needs to be displayed on the display screen.
  • the processor 1001 may further include an AI (Artificial Intelligence, artificial intelligence) processor, where the AI processor is used to process computing operations related to machine learning.
  • AI Artificial Intelligence, artificial intelligence
  • Memory 1002 may include one or more computer-readable storage media, which may be non-transitory. Memory 1002 may also include high-speed random access memory, as well as non-volatile memory, such as one or more disk storage devices, flash storage devices. In some embodiments, the non-transitory computer-readable storage medium in the memory 1002 is used to store at least one instruction, and the at least one instruction is used to be executed by the processor 1001 to implement the write-through provided by the method embodiments in this application. Lithographic data processing methods.
  • the direct-write lithography data processing apparatus may optionally further include: a peripheral device interface and at least one peripheral device.
  • the processor 1001, the memory 1002 and the peripheral device interface can be connected through a bus or a signal line.
  • Each peripheral device can be connected to the peripheral device interface through bus, signal line or circuit board.
  • peripheral devices include, but are not limited to, radio frequency circuits, touch display screens, audio circuits, and power supplies.
  • the direct-write lithography data processing apparatus may further include fewer or more components, which is not limited in this embodiment.
  • the present application further provides a computer-readable storage medium, where a program is stored in the computer-readable storage medium, and the program is loaded and executed by a processor to implement the direct-write lithography data processing in the above method embodiment. method.
  • the present application further provides a computer product, the computer product includes a computer-readable storage medium, and a program is stored in the computer-readable storage medium, and the program is loaded and executed by a processor to implement the above method embodiments
  • the direct write lithography data processing method is a computer product, the computer product includes a computer-readable storage medium, and a program is stored in the computer-readable storage medium, and the program is loaded and executed by a processor to implement the above method embodiments The direct write lithography data processing method.

Abstract

一种直写光刻数据处理系统和方法，属于直写光刻数据处理技术领域，该方法包括：主控单元（110）获取图形文件；根据图形文件进行数据分割，得到多个待处理数据；获取与主控单元（110）通讯相连的多个处理单元（120）的工作状态；并按照工作状态向处理单元（120）分配多个待处理数据；处理单元（120）在获取到待处理数据时，对待处理数据进行处理，得到处理后的数据；处理后的数据是光刻装置能够直接使用的数据；写入装置（130）读取处理单元（120）中的处理后的数据，将处理后的数据写入光刻装置，以使光刻装置按照处理后的数据进行光刻处理。该方法可以解决现有数据处理方式的数据处理效率较低、可靠性较差的问题；可以实现多个处理单元（120）同时处理同一图形文件，提高数据处理效率和可靠性。

Description

直写光刻数据处理系统和方法
本申请要求了申请日为2021年04月19日，申请号为202110417075.X的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请涉及一种直写光刻数据处理系统和方法，属于直写光刻数据处理技术领域。
背景技术
直写光刻(Pattern Generator)是实现将计算机设计数据制备到特定基板上，形成高精度微纳结构的图形布局的技术。直写光刻由于无需掩模版能直接在涂有光阻剂的基片上制作图形，与通过掩模版曝光光刻相比有着较高的灵活性、低成本等优势近年来发展迅速，被广泛应用在MEMS(Micro-Electro-Mechanical System，微机电系统)器件制作，二维材料制作，掩膜板制作，PCB(Printed Circuit Board，印制电路板)制版等领域。
直写光刻常见的写入方式有采用空间光调制器件DMD(digital-micromirror-device，数字微镜器件)逐光场拼接曝光法、声光偏转器AOD(Acousto Optical Deflectors)与调制器AOM(Acousto-optical Modulators)高速扫描法、激光束直接聚焦单光点扫描填充法等几种方法。常见的数据文件格式为GDSII、Gerber、DXF、BMP等，无论采用何种方法均涉及数据文件格式到设备写入格式的大量数据处理与转换过程。
随着近年来光电子器件结构从传统2D表面向3D转变，3D灰度光刻技术也成为当下直写光刻的热点，相比2D表面直写光刻而言3D灰度光刻数据更是成倍增加。根据国内外的公开报道直写光刻的写入幅面也朝着更大幅面的方向发展。随着直写光刻的应用场景不断延伸扩展，直写光刻产生的数据量将不断攀升，进而对直写光刻系统数据的处理能力与处理效率也将提出更高的要求。
目前直写光刻领域通常采用两种方式实现数据的处理与写入。一种是 通过预先对数据进行处理，在得到完整的任务数据之后通过计算机依次读取并写入数据到设备。另一种是有一台专用数据处理计算机实时处理数据并由另外一台计算机控制数据写入。面对大幅面(米级)，高分辨率下(100nm)，灰阶下产生的海量数据(几百TB)，以及高写入效率要求下，以上两种方法都存在不足。
第一种方法需要预先处理数据，这将耗费很长时间降低了设备的产出效率并且需要解决海量数据存储问题，以及反复读写对存储设备的稳定性要求。
第二种方法面对高分辨高写入速度应用场景下，单计算机数据处理无法满足直写光刻数据处理的实时性要求，导致数据处理成为系统的写入瓶颈，并且依靠单一计算机处理数据系统可靠性低。
发明内容
本申请提供了一种直写光刻数据处理系统和方法，可以解决现有的数据处理方式的数据处理效率较低、可靠性较差的问题。本申请提供如下技术方案：
第一方面，提供一种直写光刻数据处理系统，包括：
主控单元，用于获取待处理的图形文件；根据所述图形文件进行数据分割，得到多个待处理数据；获取与所述主控单元通讯相连的多个处理单元的工作状态；并按照所述工作状态向所述处理单元分配所述多个待处理数据；
所述处理单元，用于在获取到所述待处理数据时，对所述待处理数据进行处理，得到处理后的数据；所述处理后的数据是光刻装置能够直接使用的数据；
写入装置，用于读取所述处理单元中的处理后的数据，将所述处理后的数据写入所述光刻装置，以使所述光刻装置按照所述处理后的数据进行光刻处理。
可选地，所述根据所述图形文件进行数据分割，得到多个待处理数据，包括：
获取用户参数，所述用户参数用于指示所述图形数据的分割方式；
按照所述用户参数对所述图形文件中的图形数据进行分割，得到所述多个待处理数据。
可选地，所述用户参数包括以下几种中的至少一种：分割方向和分割间距。
可选地，所述主控单元，还用于在按照所述工作状态向所述处理单元分配所述多个待处理数据之前，向所述多个处理单元发送查询指令，所述查询指令用于查询所述多个处理单元的工作状态；
所述处理单元，还用于在接收到查询指令时，向所述主控单元反馈当前的工作状态；
所述主控单元，还用于获取所述处理单元反馈的所述工作状态。
可选地，所述按照所述工作状态向所述处理单元分配所述多个待处理数据，包括：
对于待分配的每组待处理数据，从所述多个处理单元中确定工作状态为空闲状态的目标处理单元；每组待处理数据包括至少一个待处理数据；
在目标处理单元的处理资源满足当前一组待处理数据的数据量时，将所述当前一组待处理数据分配至所述目标处理单元。
可选地，所述处理单元的工作状态初始化为空闲，所述处理单元还用于：
在获取到所述待处理数据时，将所述工作状态设置为繁忙；
在对所述待处理数据处理完成后，将所述工作状态设置为空闲，并向所述主控单元发送处理完成通知，以供所述主控单元记录所述待处理数据的处理状态。
可选地，所述写入装置分别与所述主控单元和所述处理单元通讯相连；
所述主控单元，还用于在接收到所述处理单元发送的处理完成通知时，向所述写入装置发送写入指令，所述写入指令携带有所述处理单元的单元标识；
所述写入装置，用于接收所述写入指令；基于所述写入指令中的所述单元标识从对应的处理单元中读取处理后的数据，并将所述处理后的数据写入所述光刻装置。
可选地，所述写入装置，还用于在基于所述单元标识从对应的处理单元中读取处理后的数据之后，向所述单元标识对应的处理单元发送读取完成通知；
所述单元标识对应的处理单元，还用于在接收到所述读取完成通知时，将存储的处理后的数据删除。
可选地，所述系统还包括备用处理单元，
所述处理单元，还用于在工作状态出现异常的情况下，向所述主控单元反馈工作状态，所述工作状态用于指示工作异常；
所述主控单元，还用于在所述处理单元反馈的工作状态指示工作异常时，确定是否控制所述备用处理单元启动；在确定出控制所述备用处理单元启动时，启动所述备用处理单接替工作状态异常的处理单元工作。
可选地，所述确定是否控制所述备用处理单元启动，包括：
确定剩余的处理单元是否满足数据处理的实时性要求；
在所述剩余的处理单元不满足数据处理的实时性要求时，确定控制所述备用处理单元启动；
在所述剩余的处理单元满足数据处理的实时性要求时，确定不控制所述备用处理单元启动。
可选地，所述系统通过高速通信总线建立通讯连接。
第二方面，提供一种直写光刻数据处理方法，用于第一方面提供的直写光刻数据处理系统中的主控单元，所述方法包括：
获取待处理图形文件；
根据所述图形文件进行数据分割，得到多个待处理数据；
获取与所述主控单元通讯相连的多个处理单元的工作状态；
按照所述工作状态向所述处理单元分配所述多个待处理数据。
第三方面，提供一种直写光刻数据处理方法，用于第一方面提供的直写光刻数据处理系统中的处理单元，所述方法包括：
获取待处理数据；
对所述待处理数据进行处理，得到处理后的数据；所述处理后的数据是光刻装置能够直接使用的数据。
第四方面，提供一种直写光刻数据处理方法，用于第一方面提供的直写光刻数据处理系统中的写入装置，所述方法包括：
读取所述处理单元中的处理后的数据；
将所述处理后的数据写入所述光刻装置，以使所述光刻装置按照所述处理后的数据进行光刻处理。
本申请的有益效果至少包括：通过主控单元获取待处理的图形文件；根据图形文件进行数据分割，得到多个待处理数据；获取与主控单元通讯相连的多个处理单元的工作状态；并按照工作状态向处理单元分配多个待处理数据；处理单元在获取到待处理数据时，对待处理数据进行处理，得到处理后的数据；处理后的数据是光刻装置能够直接使用的数据；写入装置读取处理单元中的处理后的数据，将处理后的数据写入光刻装置，以使光刻装置按照处理后的数据进行光刻处理；可以解决现有的数据处理方式的数据处理效率较低、可靠性较差的问题；可以实现多个处理单元同时处理同一图形文件，提高数据处理效率和可靠性。
另外，通过根据用户参数进行数据分割，可以提高数据分割的灵活性。
另外，通过使用空闲、且处理资源满足当前一组待处理数据的数据量的目标处理单元进行数据处理，可以保证当前一组待处理数据能够被一次性处理，提高数据处理效率和可靠性。
另外，通过在处理单元出现异常时，确定是否调用备用处理单元；可以保证设备故障出现情况下，数据处理的实时性。
上述说明仅是本申请技术方案的概述，为了能够更清楚了解本申请的技术手段，并可依照说明书的内容予以实施，以下以本申请的较佳实施例并配合附图详细说明如后。
附图说明
图1是本申请一个实施例提供的直写光刻数据处理系统的结构示意图；
图2是本申请一个实施例提供的数据分割的示意图；
图3是本申请一个实施例提供的数据处理过程的示意图；
图4是本申请一个实施例提供的主控单元进行直写光刻数据处理方法的流程图；
图5是本申请一个实施例提供的处理单元进行直写光刻数据处理方法的流程图；
图6是本申请一个实施例提供的数据单元异常时的示意图；
图7是本申请另一个实施例提供的主控单元进行直写光刻数据处理方法的流程图；
图8是本申请另一个实施例提供的处理单元进行直写光刻数据处理方法的流程图；
图9是本申请一个实施例提供的写入装置进行直写光刻数据处理方法的流程图；
图10是本申请一个实施例提供的直写光刻数据处理装置的框图。
具体实施方式
下面结合附图和实施例，对本申请的具体实施方式作进一步详细描述。以下实施例用于说明本申请，但不用来限制本申请的范围。
图1是本申请一个实施例提供的直写光刻数据处理系统的结构示意图。如图1所示，该系统包括主控单元110、多个处理单元120和写入装置130。
主控单元110可以是PC计算机、台式机、或者也可以是具有任务管理调度功能的板卡，本实施例不对主控单元110的实现方式作限定。主控单元110实现对直写光刻数据处理系统的整体控制，如处理单元120的作业调度、状态检测、故障响应处理等。
本实施例中，主控单元110用于获取待处理的图形文件；根据图形文件进行数据分割，得到多个待处理数据；获取与主控单元通讯相连的多个处理单元120的工作状态；并按照工作状态向处理单元分配多个待处理数据。
可选地，图形文件可以是用户输入的，此时，主控单元110具有人机交互界面，以供用户输入图形文件。或者，图形文件也可以其它设备发送的。或者，图形文件还可以预先存储在主控单元110的存储介质中，本实施例不对主控单元110获取图形文件的方式作限定。
在一个示例中，主控单元110根据图形文件进行数据分割，得到多个待处理数据，包括：获取用户参数；按照用户参数对图形文件中的图形数据进行分割，得到多个待处理数据N1...Nn。
可选地，待处理数据也可以称为写场单元序列信息、写场数据等，本实施例不对待处理数据的名称作限定。
其中，用户参数用于指示图形数据的分割方式。用户参数可以根据分割需求灵活设置，即，用户参数可以不固定。可选地，用户参数可以是用户输入的，或者是其它设备发送的，本实施例不对用户参数的获取方式作限定。
可选地，用户参数包括以下几种中的至少一种：分割方向和分割间距。分割方向为至少一个，比如：横向分割和/或纵向分割；不同待处理数据之间的分割间距相同或不同。
下面以分割方向为横向分割、不同待处理数据之间的分割间距相同为例进行说明。假设直写光刻数据处理系统为无掩模激光直写光刻系统，该系统采用DMD(1920x1080)作为图形发生器写入图形数据，系统数据分辨率100nm，用户输入文件幅面100mmx100mm。DMD直写光刻系统采用扫描方式逐场写入图形，在写入之前需将用户输入图形进行光栅化，转换成对应像素的数据文件，单次写场的像素宽度不能超出DMD像素宽度大小1920像素。基于上述分割需求，参考图2，用户参数包括分割方向为横向分割，即从左至右分割，分割间距相同均为1920像素。即，将输入文件沿图2中的步进方向按192um距离进行等间距分割，共得到写场条带数量521(100mm/192um)条。
在其它实施方式中，主控单元110也可以按照固定的方式进行数据分割，此时，不同的写入装置130对应不同的分割方式，或者分割方式固定不变，本实施例不对数据分割方式作限定。
可选地，主控单元110获取多个处理单元120的工作状态，包括：主控单元110向多个处理单元发送查询指令，查询指令用于查询多个处理单元的工作状态；处理单元120在接收到查询指令时，向主控单元反馈当前的工作状态；主控单元110，还用于获取处理单元反馈的工作状态。
其中，查询指令可以是主控单元110每隔一定时长发送的，或者，在每次发送待处理数据之前发送；另外，查询指令可以同时向多个处理单元120发送，或者逐个向处理单元120发送，在当前一个处理单元120处于繁忙状 态时，再向下一个处理单元120发送查询指令；在当前一个处理单元120处于空闲状态时，停止发送查询指令，本实施例不对查询指令的发送时机作限定。
或者，主控单元110获取多个处理单元120的工作状态，包括：主控单元110接收处理单元120反馈的工作状态。此时，处理单元120可以定时反馈工作状态，或者在工作状态更新时反馈工作状态，本实施例不对处理单元120反馈工作的时机作限定。
在其他实施例中，主控单元110还可以根据待处理数据的处理状态确定对应处理单元120的工作状态，各个处理单元120的工作状态初始化为空闲。此时，在待处理数据发送至某个处理单元120后，记录处理单元120的工作状态为繁忙、主控单元110记录待处理数据、处理单元120的单元标识和工作状态之间的对应关系；在处理单元120处理数据完成后，主控单元110根据处理单元120反馈的处理完成通知，将对应关系中处理单元120的工作状态更新为空闲。基于此，在待处理数据处于正在处理状态时，对应的处理单元120的工作状态为繁忙，在待处理数据处于已处理完成状态时，对应的处理单元120的工作状态为空闲，主控单元110可以根据待处理数据的处理状态确定对应处理单元120的工作状态。当然，主控单元110还可以基于其它方式获取处理单元120的工作状态，本实施例不对主控单元110获取处理单元120的工作状态的方式作限定。
可选地，主控单元110按照工作状态向处理单元分配多个待处理数据，包括：对于待分配的每组待处理数据，从多个处理单元中确定工作状态为空闲状态的目标处理单元；在目标处理单元的处理资源满足当前一组待处理数据的数据量时，将当前一组待处理数据分配至目标处理单元。
其中，每组待处理数据包括至少一个待处理数据。
可选地，主控单元110可以将待处理数据分成N组，每一组对应一个处理单元120，其中，每一组的数据可以是连续的，或者是随机的，或者是按照一定规律选取的，例如，按照p+Nq规律选取，其中p依次取1至N的正整数，q依次取从0开始的正整数。假设有3个处理单元120，则N为3，分为三组，第一组为1、4、7、10、…；第二组为2、5、8、11、…，第三组为3、 6、9、12、…。本实施例不对主控单元110划分待处理数据组的方式作限定。其中，N的值小于或等于处理单元120的个数。可选地，不同组的待处理数据中待处理数据的个数相同或不同。
在其他实施例中，主控单元110也可以不对待处理数据进行组的划分，而是逐个发送待处理数据。
可选地，在未确定出工作状态为空闲状态的处理单元时，主控单元110可以间隔一段时长后再次获取各个处理单元的工作状态，直至确定出工作状态为空闲状态的目标处理单元时，进行待处理数据的分配。
其中，处理资源满足当前一组待处理数据的数据量包括目标处理单元的存储容量大于或等于当前一组待处理数据的数据量。
比如：按照图2所示的方式进行数据分割后，假设设定每个处理单元120单次处理待处理数据的条数相同，均为5条(在实际实现时也可不同)。计算出单次生成数据容量为(100mm/100nm)×(192um/100nm)/8×5＝1171875K字节。
主控单元110查询各处理单元120的工作状态，确认各个处理单元120处于空闲状态，并且剩余存储容量大于等于1171875K字节。之后，参考图3，将第一组待处理数据(即写场条带1，写场条带4，写场条带7，写场条带10，写场条带13)发送给处理单元1，并发送启动处理指令。将第二组待处理数据(即写场条带2、写场条带5、写场条带8，写场条带11，写场条带14)发送给处理单元2，并发送启动处理指令。将第三组待处理数据(即写场条带3、写场条带6、写场条带9，写场条带12，写场条带15)发送给处理单元3，并发送启动处理指令。
处理单元120可以是PC计算机，台式机、或者可以是FGPA板卡等具有数据处理与存储能力的装置，本实施例不对处理单元120的实现方式作限定。处理单元120负责接收主控单元110的指令，完成直写光刻数据的生成、存储、归集，并具有自身工作状态反馈功能。
本实施例中，处理单元120用于在获取到待处理数据时，对待处理数据进行处理，得到处理后的数据；处理后的数据是光刻装置能够直接使用的数据。
具体地，处理单元120还用于在获取到待处理数据时，将工作状态设置为繁忙；对待处理数据进行光栅化处理，得到处理后的数据；在对待处理数据处理完成后，将工作状态设置为空闲，并向主控单元发送处理完成通知，以供主控单元记录待处理数据的处理状态。
比如：基于图2所述的示例，处理单元接收信息与指令后，将自身工作状态置为繁忙，解析条带信息并进入光栅化处理过程。主控单元等待数据处理单元处理完成通知信息。处理单元完成数据处理并通知主控单元后将自身工作状态置为空闲。主控单元接收到处理完成通知，记录待处理数据的处理状态为完成状态。
写入装置130负责读取各处理单元120生成的数据，并写入到光刻装置。
在一个示例中，写入装置130分别与主控单元110和处理单元120通讯相连。主控单元110还用于在接收到处理单元120发送的处理完成通知时，向写入装置130发送写入指令，写入指令携带有处理单元的单元标识。
其中，单元标识可以为处理单元的标号、或者设备编号，本实施例不对单元标识的实现方式作限定。
相应地，写入装置130用于接收写入指令；基于写入指令中的单元标识从对应的处理单元120中读取处理后的数据，并将处理后的数据写入光刻装置。比如：参考图3，写入装置130从各个处理单元120读取处理后的数据，得到处理后的数据(即写场数据1、2、3、4、5…)。
写入装置130还用于在基于单元标识从对应的处理单元中读取处理后的数据之后，向单元标识对应的处理单元发送读取完成通知。
相应地，单元标识对应的处理单元120，还用于在接收到读取完成通知时，将存储的处理后的数据删除。
比如：主控单元查询到图2中的写场条带1数据已经处理完成，通知写入装置到对应处理单元读取数据。写入装置读取完处理单元数据之后，通知处理单元删除该数据。写入装置将数据写入到直写装置。主控单元重复查询各个待处理处理是否已经处理完成，依次写入写场数据条带(即处理后的数据)直至完成所有条带写入。
在其它实施方式中，写入装置130也可以定时从各个处理单元中读取处 理后的数据；或者，处理单元120处理数据完成后，通知写入装置130读取处理后的数据，本实施例不对写入装置130读取处理后的数据的方式作限定。
为了更清楚地理解本申请中主控单元110的数据处理过程，下面对主控单元110的数据处理过程举例进行说明。参考图4，主控单元的数据处理过程至少包括步骤41-410：
步骤41，获取用户参数和图形文件；
步骤42，按照用户参数对图像文件进行数据分割，得到多个待处理数据；
步骤43，依次查询处理单元的工作状态；
步骤44，确定处理单元的工作状态是否为空闲；若是，则执行步骤45，若不是，则再次执行步骤43；
步骤45，确定处理单元的存储容量是否大于或等于当前一组待处理数据的数据量；若是，则执行步骤46；若不是，则再次执行步骤43；
步骤46，将当前一组待处理数据发送至处理单元；
步骤47，等待处理单元返回的处理完成通知；
可选地，等待时长预设在主控单元110中。
步骤48，确定当前一组待处理数据是否处理完成；若是，则执行步骤49；若不是，则再次执行步骤47；
步骤49，通知写入装置从处理单元中读取处理后的数据；
步骤410，确定是否所有处理后的数据已读取完毕；若是，则流程结束；若不是，则再次执行步骤47。
为了更清楚地理解本申请中处理单元120的数据处理过程，下面对处理单元120的数据处理过程举例进行说明。参考图5，主控单元的数据处理过程至少包括步骤51-55：
步骤51，接收待处理数据，并将工作状态设置为繁忙；
步骤52，对待处理数据进行处理；
步骤53，在数据处理完成后，向主控单元发送处理完成通知；
步骤54，在接收到写入装置发送的读取完成通知时，将存储的处理后 的数据删除；
步骤55，设置工作状态为空闲，流程结束。
本申请中，主控单元110还具有算力动态调配功能，能根据处理单元120的数据消耗情况动态调配处理单元的数量。可选地，数据处理系统还包括备用处理单元140，处理单元120，还用于在工作状态出现异常的情况下，向主控单元110反馈工作状态，工作状态用于指示工作异常；主控单元110，还用于在处理单元反馈的工作状态指示工作异常时，确定是否控制备用处理单元启动；在确定出控制备用处理单元启动时，启动备用处理单接替工作状态异常的处理单元工作。
其中，确定是否控制备用处理单元启动，包括：确定剩余的处理单元是否满足数据处理的实时性要求；在剩余的处理单元不满足数据处理的实时性要求时，确定控制备用处理单元启动；在剩余的处理单元满足数据处理的实时性要求时，确定不控制备用处理单元启动。
在一个示例中，实时性要求用于指示待处理数据的消耗速度大于或等于速度阈值。换句话说，主控单元中的待处理数据至少按照速度阈值的速度被处理。其中，速度阈值可以是用户设置的，或者是主控单元110中默认设置的，本实施例不对速度阈值的设置方式作限定。
参考图6，假设处理单元2在工作过程中发生异常情况，主控单元110此时可根据数据处理负载情况决定是否需要加入备用处理单元4。如果此时剩余处理单元1与处理单元3能满足实时性要求，则不调配备用处理单元4加入。如果此时发现生成的数据缓存消耗跟不上数据写入装置的消耗速度，则自动调入备用处理单元4，接替处理单元2的工作。
图1中以含有1个写入装置(或称写入光学头)，部署1台主控单元PC计算机，3台处理单元PC计算机，一台备用处理单元为例进行说明，在实际实现时，写入装置、主控单元、处理单元和备用处理单元的数量也可以为其它数量，本实施例不对各个装置的数量作限定。
可选地，数据处理系统通过高速通信总线建立通讯连接，比如建立以太网或者光纤网络。又比如：数据处理系统中所有单元采用高速千兆网络连接，形成局域网络。
综上所述，本实施例提供的直写光刻数据处理系统，通过主控单元获取待处理的图形文件；根据图形文件进行数据分割，得到多个待处理数据；获取与主控单元通讯相连的多个处理单元的工作状态；并按照工作状态向处理单元分配多个待处理数据；处理单元在获取到待处理数据时，对待处理数据进行处理，得到处理后的数据；处理后的数据是光刻装置能够直接使用的数据；写入装置读取处理单元中的处理后的数据，将处理后的数据写入光刻装置，以使光刻装置按照处理后的数据进行光刻处理；可以解决现有的数据处理方式的数据处理效率较低、可靠性较差的问题；可以实现多个处理单元同时处理同一图形文件，提高数据处理效率和可靠性。
另外，通过根据用户参数进行数据分割，可以提高数据分割的灵活性。
另外，通过使用空闲、且处理资源满足当前一组待处理数据的数据量的目标处理单元进行数据处理，可以保证当前一组待处理数据能够被一次性处理，提高数据处理效率和可靠性。
另外，通过在处理单元出现异常时，确定是否调用备用处理单元；可以保证设备故障出现情况下，数据处理的实时性。
下面对本申请提供的直写光刻数据处理方法进行介绍。
图7是本申请一个实施例提供的直写光刻数据处理方法的流程图。本实施例以该方法用于图1所示的直写光刻数据处理系统中的主控单元110中为例进行说明，该方法至少包括以下几个步骤：
步骤701，获取待处理图形文件。
步骤702，根据图形文件进行数据分割，得到多个待处理数据。
步骤703，获取与主控单元通讯相连的多个处理单元的工作状态。
步骤704，按照工作状态向处理单元分配多个待处理数据。
本实施例的相关描述详见上述系统实施例，本实施例在此不再赘述。
综上所述，本实施例提供的直写光刻数据处理方法，通过主控单元获取待处理的图形文件；根据图形文件进行数据分割，得到多个待处理数据；获取与主控单元通讯相连的多个处理单元的工作状态；并按照工作状态向处理单元分配多个待处理数据；处理单元在获取到待处理数据时，对待处 理数据进行处理，得到处理后的数据；处理后的数据是光刻装置能够直接使用的数据；写入装置读取处理单元中的处理后的数据，将处理后的数据写入光刻装置，以使光刻装置按照处理后的数据进行光刻处理；可以解决现有的数据处理方式的数据处理效率较低、可靠性较差的问题；可以实现多个处理单元同时处理同一图形文件，提高数据处理效率和可靠性。
图8是本申请一个实施例提供的直写光刻数据处理方法的流程图。本实施例以该方法用于图1所示的直写光刻数据处理系统中的处理单元120中为例进行说明，该方法至少包括以下几个步骤：
步骤801，获取待处理数据。
步骤802，对待处理数据进行处理，得到处理后的数据；处理后的数据是光刻装置能够直接使用的数据。
本实施例的相关描述详见上述系统实施例，本实施例在此不再赘述。
综上所述，本实施例提供的直写光刻数据处理方法，通过主控单元获取待处理的图形文件；根据图形文件进行数据分割，得到多个待处理数据；获取与主控单元通讯相连的多个处理单元的工作状态；并按照工作状态向处理单元分配多个待处理数据；处理单元在获取到待处理数据时，对待处理数据进行处理，得到处理后的数据；处理后的数据是光刻装置能够直接使用的数据；写入装置读取处理单元中的处理后的数据，将处理后的数据写入光刻装置，以使光刻装置按照处理后的数据进行光刻处理；可以解决现有的数据处理方式的数据处理效率较低、可靠性较差的问题；可以实现多个处理单元同时处理同一图形文件，提高数据处理效率和可靠性。
图9是本申请一个实施例提供的直写光刻数据处理方法的流程图。本实施例以该方法用于图1所示的直写光刻数据处理系统中的写入装置130中为例进行说明，该方法至少包括以下几个步骤：
步骤901，读取处理单元中的处理后的数据。
步骤902，将处理后的数据写入光刻装置，以使光刻装置按照处理后的数据进行光刻处理。
本实施例的相关描述详见上述系统实施例，本实施例在此不再赘述。
综上所述，本实施例提供的直写光刻数据处理方法，通过主控单元获取待处理的图形文件；根据图形文件进行数据分割，得到多个待处理数据；获取与主控单元通讯相连的多个处理单元的工作状态；并按照工作状态向处理单元分配多个待处理数据；处理单元在获取到待处理数据时，对待处理数据进行处理，得到处理后的数据；处理后的数据是光刻装置能够直接使用的数据；写入装置读取处理单元中的处理后的数据，将处理后的数据写入光刻装置，以使光刻装置按照处理后的数据进行光刻处理；可以解决现有的数据处理方式的数据处理效率较低、可靠性较差的问题；可以实现多个处理单元同时处理同一图形文件，提高数据处理效率和可靠性。
图10是本申请一个实施例提供的直写光刻数据处理装置的框图。该装置可以为图1所示的直写光刻数据处理系统中的主控单元110、或者处理单元120、或者写入装置130。
处理器1001可以包括一个或多个处理核心，比如：4核心处理器、8核心处理器等。处理器1001可以采用DSP(Digital Signal Processing，数字信号处理)、FPGA(Field-Programmable Gate Array，现场可编程门阵列)、PLA(Programmable Logic Array，可编程逻辑阵列)中的至少一种硬件形式来实现。处理器1001也可以包括主处理器和协处理器，主处理器是用于对在唤醒状态下的数据进行处理的处理器，也称CPU(Central Processing Unit，中央处理器)；协处理器是用于对在待机状态下的数据进行处理的低功耗处理器。在一些实施例中，处理器1001可以在集成有GPU(Graphics Processing Unit，图像处理器)，GPU用于负责显示屏所需要显示的内容的渲染和绘制。一些实施例中，处理器1001还可以包括AI(Artificial Intelligence，人工智能)处理器，该AI处理器用于处理有关机器学习的计算操作。
存储器1002可以包括一个或多个计算机可读存储介质，该计算机可读存储介质可以是非暂态的。存储器1002还可包括高速随机存取存储器，以及非易失性存储器，比如一个或多个磁盘存储设备、闪存存储设备。在一 些实施例中，存储器1002中的非暂态的计算机可读存储介质用于存储至少一个指令，该至少一个指令用于被处理器1001所执行以实现本申请中方法实施例提供的直写光刻数据处理方法。
在一些实施例中，直写光刻数据处理装置还可选包括有：外围设备接口和至少一个外围设备。处理器1001、存储器1002和外围设备接口之间可以通过总线或信号线相连。各个外围设备可以通过总线、信号线或电路板与外围设备接口相连。示意性地，外围设备包括但不限于：射频电路、触摸显示屏、音频电路、和电源等。
当然，直写光刻数据处理装置还可以包括更少或更多的组件，本实施例对此不作限定。
可选地，本申请还提供有一种计算机可读存储介质，所述计算机可读存储介质中存储有程序，所述程序由处理器加载并执行以实现上述方法实施例的直写光刻数据处理方法。
可选地，本申请还提供有一种计算机产品，该计算机产品包括计算机可读存储介质，所述计算机可读存储介质中存储有程序，所述程序由处理器加载并执行以实现上述方法实施例的直写光刻数据处理方法。
以上所述实施例的各技术特征可以进行任意的组合，为使描述简洁，未对上述实施例中的各个技术特征所有可能的组合都进行描述，然而，只要这些技术特征的组合不存在矛盾，都应当认为是本说明书记载的范围。
以上所述实施例仅表达了本申请的几种实施方式，其描述较为具体和详细，但并不能因此而理解为对发明专利范围的限制。应当指出的是，对于本领域的普通技术人员来说，在不脱离本申请构思的前提下，还可以做出若干变形和改进，这些都属于本申请的保护范围。因此，本申请专利的保护范围应以所附权利要求为准。

Claims (14)

  1. 一种直写光刻数据处理系统，其特征在于，包括：
    主控单元，用于获取待处理的图形文件；根据所述图形文件进行数据分割，得到多个待处理数据；获取与所述主控单元通讯相连的多个处理单元的工作状态；并按照所述工作状态向所述处理单元分配所述多个待处理数据；
    所述处理单元，用于在获取到所述待处理数据时，对所述待处理数据进行处理，得到处理后的数据；所述处理后的数据是光刻装置能够直接使用的数据；
    写入装置，用于读取所述处理单元中的处理后的数据，将所述处理后的数据写入所述光刻装置，以使所述光刻装置按照所述处理后的数据进行光刻处理。
  2. 根据权利要求1所述的系统，其特征在于，所述根据所述图形文件进行数据分割，得到多个待处理数据，包括：
    获取用户参数，所述用户参数用于指示所述图形数据的分割方式；
    按照所述用户参数对所述图形文件中的图形数据进行分割，得到所述多个待处理数据。
  3. 根据权利要求2所述的系统，其特征在于，所述用户参数包括以下几种中的至少一种：分割方向和分割间距。
  4. 根据权利要求1所述的系统，其特征在于，
    所述主控单元，还用于在按照所述工作状态向所述处理单元分配所述多个待处理数据之前，向所述多个处理单元发送查询指令，所述查询指令用于查询所述多个处理单元的工作状态；
    所述处理单元，还用于在接收到查询指令时，向所述主控单元反馈当前的工作状态；
    所述主控单元，还用于获取所述处理单元反馈的所述工作状态。
  5. 根据权利要求1所述的系统，其特征在于，所述按照所述工作状态向所述处理单元分配所述多个待处理数据，包括：
    对于待分配的每组待处理数据，从所述多个处理单元中确定工作状态为空闲状态的目标处理单元；每组待处理数据包括至少一个待处理数据；
    在目标处理单元的处理资源满足当前一组待处理数据的数据量时，将所述当前一组待处理数据分配至所述目标处理单元。
  6. 根据权利要求1所述的系统，其特征在于，所述处理单元的工作状态初始化为空闲，所述处理单元还用于：
    在获取到所述待处理数据时，将所述工作状态设置为繁忙；
    在对所述待处理数据处理完成后，将所述工作状态设置为空闲，并向所述主控单元发送处理完成通知，以供所述主控单元记录所述待处理数据的处理状态。
  7. 根据权利要求1所述的系统，其特征在于，所述写入装置分别与所述主控单元和所述处理单元通讯相连；
    所述主控单元，还用于在接收到所述处理单元发送的处理完成通知时，向所述写入装置发送写入指令，所述写入指令携带有所述处理单元的单元标识；
    所述写入装置，用于接收所述写入指令；基于所述写入指令中的所述单元标识从对应的处理单元中读取处理后的数据，并将所述处理后的数据写入所述光刻装置。
  8. 根据权利要求7所述的系统，其特征在于，
    所述写入装置，还用于在基于所述单元标识从对应的处理单元中读取处理后的数据之后，向所述单元标识对应的处理单元发送读取完成通知；
    所述单元标识对应的处理单元，还用于在接收到所述读取完成通知时， 将存储的处理后的数据删除。
  9. 根据权利要求1所述的系统，其特征在于，所述系统还包括备用处理单元，
    所述处理单元，还用于在工作状态出现异常的情况下，向所述主控单元反馈工作状态，所述工作状态用于指示工作异常；
    所述主控单元，还用于在所述处理单元反馈的工作状态指示工作异常时，确定是否控制所述备用处理单元启动；在确定出控制所述备用处理单元启动时，启动所述备用处理单接替工作状态异常的处理单元工作。
  10. 根据权利要求9所述的系统，其特征在于，所述确定是否控制所述备用处理单元启动，包括：
    确定剩余的处理单元是否满足数据处理的实时性要求；
    在所述剩余的处理单元不满足数据处理的实时性要求时，确定控制所述备用处理单元启动；
    在所述剩余的处理单元满足数据处理的实时性要求时，确定不控制所述备用处理单元启动。
  11. 根据权利要求1至10任一所述的系统，其特征在于，所述系统通过高速通信总线建立通讯连接。
  12. 一种直写光刻数据处理方法，其特征在于，用于权利要求1至11任一所述的直写光刻数据处理系统中的主控单元，所述方法包括：
    获取待处理图形文件；
    根据所述图形文件进行数据分割，得到多个待处理数据；
    获取与所述主控单元通讯相连的多个处理单元的工作状态；
    按照所述工作状态向所述处理单元分配所述多个待处理数据。
  13. 一种直写光刻数据处理方法，其特征在于，用于权利要求1至11任 一所述的直写光刻数据处理系统中的处理单元，所述方法包括：
    获取待处理数据；
    对所述待处理数据进行处理，得到处理后的数据；所述处理后的数据是光刻装置能够直接使用的数据。
  14. 一种直写光刻数据处理方法，其特征在于，用于权利要求1至11任一所述的直写光刻数据处理系统中的写入装置，所述方法包括：
    读取所述处理单元中的处理后的数据；
    将所述处理后的数据写入所述光刻装置，以使所述光刻装置按照所述处理后的数据进行光刻处理。
PCT/CN2021/137696 2021-04-19 2021-12-14 直写光刻数据处理系统和方法 WO2022222494A1 (zh)

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