WO2022199192A1 - Coa type array substrate and measurement method therefor, and liquid crystal display panel - Google Patents

Coa type array substrate and measurement method therefor, and liquid crystal display panel Download PDF

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Publication number
WO2022199192A1
WO2022199192A1 PCT/CN2021/143429 CN2021143429W WO2022199192A1 WO 2022199192 A1 WO2022199192 A1 WO 2022199192A1 CN 2021143429 W CN2021143429 W CN 2021143429W WO 2022199192 A1 WO2022199192 A1 WO 2022199192A1
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WO
WIPO (PCT)
Prior art keywords
auxiliary measurement
measurement pattern
array substrate
pattern layer
type array
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Application number
PCT/CN2021/143429
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French (fr)
Chinese (zh)
Inventor
彭备
余思慧
Original Assignee
滁州惠科光电科技有限公司
惠科股份有限公司
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Publication of WO2022199192A1 publication Critical patent/WO2022199192A1/en

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306Details
    • G02F1/1309Repairing; Testing

Definitions

  • the present application belongs to the field of display technology, and in particular relates to a COA type array substrate, a measurement method thereof, and a liquid crystal display panel.
  • liquid crystal display devices which include a liquid crystal display panel and a backlight module.
  • the liquid crystal display panel is usually composed of an array substrate (thin film transistor, TFT), a color filter substrate (CF), a liquid crystal (LC) disposed between the array substrate and the color filter substrate, and a sealant (sealant). )composition.
  • COA color filter on array
  • the display area In order to meet the requirements of customers, it is necessary to monitor the display area in the COA type array substrate.
  • the display area is completely imitated, and the same thin film transistor layer and color filter layer are prepared in the peripheral area surrounding the display area.
  • the data of the color filter layer cannot be accurately obtained due to the interference of various structures of the thin film transistor layer. Therefore, a new solution that can improve the accuracy is urgently needed.
  • the embodiments of the present application provide a COA-type array substrate, a measurement method thereof, and a liquid crystal display panel.
  • a measurement method thereof for removing the thin film transistor layer, only an auxiliary measurement pattern layer with auxiliary measurement through holes in the middle is provided as the measurement
  • the reference for the color resist unit which can improve measurement accuracy by reducing interference.
  • a COA-type array substrate comprising: a base substrate, the COA-type array substrate further comprising: a display area and a peripheral area surrounding the display area, the peripheral area including a plurality of measurement areas; On the base substrate, each measurement area includes a plurality of auxiliary measurement pattern layers arranged in an array, and an auxiliary measurement through hole is opened in the middle of each auxiliary measurement pattern layer; along the thickness direction of the base substrate, at A side of the auxiliary measurement pattern layer away from the base substrate, and a plurality of color resistance units are also arranged in the measurement area; wherein, on the plane where the base substrate is located, the projection center of the color resistance units It is coincident with the projection center of the corresponding auxiliary measurement pattern layer and the projection center of the auxiliary measurement through hole in the auxiliary measurement pattern layer, and the projection size of the color resistance unit is larger than the auxiliary measurement through hole. Projection size.
  • an auxiliary measurement pattern layer with auxiliary measurement through holes in the middle is only provided between the color resistance unit and the base substrate, as the measurement
  • the reference object of the physical characteristics of the color resistance unit so that the interference of the thin film transistor layer to the color resistance unit can be reduced, and the measurement accuracy of the color resistance unit can be improved.
  • the color resistance unit is provided on the side of the auxiliary measurement pattern layer located in the odd-numbered or even-numbered columns away from the base substrate;
  • the color resistance unit is disposed on the side of the auxiliary measurement pattern layer in the row or even row that is far away from the base substrate;
  • One side of the base substrate is provided with the color resistance unit; or, on the side of the auxiliary measurement pattern layer located in odd rows and even columns and even rows and odd columns away from the base substrate, a color resistance unit is provided. Describe the color resistance unit.
  • the density between the color resist units is reduced, the mutual interference between the color resist units is reduced, and the accuracy of detecting the opposite sides of the auxiliary measurement pattern layer extending along the column direction is improved.
  • the auxiliary measurement pattern layer includes a first auxiliary measurement pattern layer and a second auxiliary measurement pattern layer; the first auxiliary measurement pattern layer is located away from the base substrate.
  • the auxiliary measurement pattern layer of the color resistance unit is provided on one side of the base plate, and the second auxiliary measurement pattern layer is the auxiliary measurement pattern layer without the color resistance unit on the side away from the base substrate; along the row direction , the length of the first auxiliary measurement pattern layer is greater than or equal to the length of the second auxiliary measurement pattern layer, and the length of the first auxiliary measurement pattern layer is greater than or equal to the length of the color resistance unit; along the column direction, The length of the first auxiliary measurement pattern layer is greater than or equal to the length of the color resist unit.
  • the size of the measurement area along the row direction is reduced, and the area occupied by the measurement area is saved.
  • the length of the first auxiliary measurement pattern layer is made to be greater than or equal to the length of the color resistance unit, the color resistance units laid on the two first auxiliary measurement pattern layers arranged in the row direction can be prevented from overlapping each other.
  • the length of the first auxiliary measurement pattern layer is made greater than or equal to the length of the color resistance unit, it is possible to avoid the color resistance laid on the two first auxiliary measurement pattern layers arranged along the column direction. Units overlap each other.
  • each color resistance unit is also provided with two alignment through holes with the same structure; the two alignment through holes are located between the color resistance unit and the corresponding The overlapping area of the auxiliary measurement pattern layer is measured, and the two alignment through holes are respectively arranged on opposite sides of the color resist unit.
  • the two alignment through holes not only play the role of air outlet and buffer, but also play the role of alignment.
  • the center lines corresponding to the two alignment through holes respectively coincide with the center lines of the color resistance unit.
  • the offset of the color resistance unit can be estimated according to the offset of the bit via.
  • the display area includes a plurality of sub-pixel areas arranged in an array; on the plane where the base substrate is located, the projected size of the auxiliary measurement through hole is smaller than or is equal to the projected size of the sub-pixel area.
  • the projected size of the auxiliary measurement through hole is smaller than or equal to the projected size of the sub-pixel area.
  • the multiple auxiliary measurement pattern layers are integrally formed by the first metal layer.
  • the color resistance unit is one of a red color resistance unit, a green color resistance unit, and a blue color resistance unit.
  • the projected size of the auxiliary measurement pattern layer on the plane where the base substrate is located is larger than the projected size of the auxiliary measurement through hole on the plane where the base substrate is located. Projection size.
  • a plurality of the auxiliary measurement pattern layers are integrally formed by the first metal layer.
  • the material of the first metal layer includes copper.
  • the color resistance unit is one of a red color resistance unit, a green color resistance unit, and a blue color resistance unit.
  • the projected shape of the alignment through hole on the plane where the base substrate is located is any one of a rectangle, a square, and a circle.
  • the length of the second auxiliary measurement pattern layer is greater than or equal to the length of the color resistance unit.
  • a second aspect provides a method for measuring a COA-type array substrate, which is applied to a measuring device, the method comprising: a measurement area of the COA-type array substrate according to any one of the first aspect and the implementation manner of the first aspect , determine the position of the auxiliary measurement through hole; according to the position of the auxiliary measurement through hole, for each edge of the auxiliary measurement through hole, determine the target edge parallel to the edge and the closest The edge is used as the edge of the corresponding color resist unit; according to the edge of the color resist unit, the length along the row direction and the length along the column direction of the color resist unit are determined.
  • the thin film transistor layer is removed in the measurement area of the COA type array substrate, only an auxiliary measurement channel is provided in the middle between the color resistance unit and the base substrate.
  • the auxiliary measurement pattern layer of the hole is used as a reference for measuring the physical properties of the color resistance unit, which eliminates the interference of the thin film transistor layer on the measurement of the color resistance unit, thereby improving the measurement accuracy of the color resistance unit.
  • the method further includes:
  • the size along the row direction and the size along the column direction of the alignment through hole on the color resist unit is determined.
  • a measurement device comprising: a processor;
  • the processor executes the computer program stored in the memory to implement the method for measuring the COA type array substrate according to any one of the second aspect and the implementation manner of the second aspect.
  • a computer-readable storage medium comprising: the computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, any one of the second aspect and the second aspect is implemented.
  • the measuring method of the COA type array substrate is provided, comprising: the computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, any one of the second aspect and the second aspect is implemented. The measuring method of the COA type array substrate.
  • a fifth aspect provides a liquid crystal display panel, comprising the COA-type array substrate and the opposite substrate as described in any one of the first aspect and the implementation manner of the first aspect, and the COA-type array substrate and the the liquid crystal layer between the opposing substrates.
  • a sixth aspect provides a liquid crystal display device, the liquid crystal display panel according to any one of the first aspect and the implementation manner of the first aspect, and a driving device for driving the liquid crystal display panel.
  • the liquid crystal display panel and the liquid crystal display device provided by the embodiments of the present application, in the measurement area, by removing the thin film transistor layer, an auxiliary opening is only provided in the middle between the color resistance unit and the base substrate.
  • the auxiliary measurement pattern layer of the through hole is measured as a reference for measuring the physical properties of the color resistance unit, thereby reducing the interference of the thin film transistor layer on the color resistance unit and improving the measurement accuracy of the color resistance unit.
  • FIG. 1 is a schematic structural diagram of a liquid crystal display device provided in the prior art
  • FIG. 2 is a schematic structural diagram of another liquid crystal display device provided in the prior art
  • FIG. 3 is a schematic cross-sectional view of the COA-type array substrate in FIG. 2;
  • FIG. 4 is a schematic top view of the COA type array substrate in FIG. 2;
  • Fig. 5 is the structural representation of a measurement area in the peripheral area
  • Fig. 6 is the structural representation in the area P in Fig. 5;
  • Figure 7 is a schematic cross-sectional view along the AA' direction in Figure 6;
  • Figure 8 is a schematic cross-sectional view along the BB' direction in Figure 7;
  • FIG. 9 is a schematic structural diagram of a measurement area provided by an embodiment of the present application.
  • FIG. 10 is a schematic structural diagram of another measurement area provided by an embodiment of the present application.
  • FIG. 11 is a schematic structural diagram of another measurement area provided by an embodiment of the present application.
  • FIG. 12 is a schematic structural diagram of another measurement area provided by an embodiment of the present application.
  • Figure 13 is a schematic cross-sectional view along the CC' direction in Figure 12;
  • FIG. 15 is a schematic flowchart of a method for measuring a COA array substrate provided in an embodiment of the present application.
  • the embodiments of the present application provide a liquid crystal display device, and the liquid crystal display device can be various electronic devices or the liquid crystal display device can be applied to various electronic devices.
  • the electronic device may be a variety of different types of electronic devices, such as a smart phone, a tablet computer, an electronic reader, a car computer, a navigator, a digital camera, a smart TV, and a smart wearable device.
  • the liquid crystal display device provided by the embodiments of the present application has a very wide application prospect.
  • FIG. 1 shows a schematic structural diagram of a backlight type liquid crystal display device.
  • the main structure of the liquid crystal display device includes a frame 1 , a cover plate 2 , a liquid crystal display module 3 , a backlight module 4 , a circuit board 5 and other electronic accessories including a camera.
  • the liquid crystal display module 3 includes a liquid crystal display panel 30 , an upper polarizing layer 34 disposed on the side of the liquid crystal display panel 30 close to the cover plate 2 , and a lower polarizing layer 35 disposed on the side of the liquid crystal display panel close to the backlight module 4 .
  • the liquid crystal display panel 30 includes an array substrate 31, an opposite substrate 32, a liquid crystal layer 33 disposed between the array substrate 31 and the opposite substrate 32, and the array substrate 31 and the opposite substrate 32 are assembled together by a sealant , so that the liquid crystal layer 33 is limited in the area surrounded by the frame sealant.
  • the color filter layer 330 is usually disposed on the opposite substrate 32, and the opposite substrate 32 is referred to as a color filter substrate.
  • the color filter layer 330 is used to filter the white light emitted from the array substrate 31 into light of different colors.
  • the color filter layer 330 generally includes three primary color resist units arranged in an array, for example, the three primary color resist units include a red color resist unit, a green color resist unit and a blue color resist unit.
  • the red color resist unit can filter the white light emitted from the array substrate 31 into red light
  • the green color resist unit can filter the white light emitted from the array substrate 31 into green light
  • the blue color resist unit can filter the white light emitted from the array substrate 31 into green light. Blu-ray.
  • the color filter layer 330 may also include other color resist units, and the embodiment of the present application uses three primary color resist units as an example for description.
  • the liquid crystal display module 3 , the backlight module 4 , the circuit board 5 and other electronic accessories including cameras are arranged in the frame 1 , and the backlight module 4 Below the liquid crystal display module 3 , the circuit board 5 is located between the backlight module 4 and the frame 1 , and the cover plate 2 is located on the side of the liquid crystal display module 3 away from the backlight module 4 .
  • the cover plate 2 may be, for example, transparent glass.
  • the display principle of the liquid crystal display device in FIG. 1 is as follows: the backlight module 4 emits white light, passes through the lower polarizing layer 35 to form white polarized light with a specific polarization direction, enters the array substrate 31 , and is adjusted by the liquid crystal layer 33 .
  • the polarized light of red, green and blue is formed by filtering through the color filter layer 330 on the color filter substrate.
  • the polarization direction of the three-primary color polarized light is perpendicular to the polarization direction of the upper polarizing layer 34, the three-primary color polarized light cannot pass through the upper polarizing layer 34, and no light exits at this time;
  • the polarization directions of the layers 34 are parallel, the polarized light of the three primary colors can pass through the upper polarizing layer 34, and the light intensity of the outgoing light is the strongest at this time.
  • the specific arrangement direction of the liquid crystal molecules can change the polarization direction of the polarized light passing through the liquid crystal layer.
  • the propagation sequence of the optical path is as follows: the backlight module 4 emits light and passes through the lower polarizing layer 35 , the array substrate 31 , the liquid crystal layer 33 , the color filter substrate, and the upper polarizing layer in sequence. 34.
  • the cover plate 2 is ejected.
  • FIG. 2 shows a schematic structural diagram of another liquid crystal display device.
  • the liquid crystal display panel 30 prepares the color filter layer 330 on the array substrate 31 .
  • the array substrate 31 can be called a COA-type array substrate, because there is no alignment problem when the COA-type array substrate 31 and the opposite substrate 32 are assembled, so it is possible to reduce the time required for the assembly process during the preparation of the liquid crystal display panel 30. Difficulty, to avoid errors when aligning boxes.
  • the other structures are the same as those of the liquid crystal display device shown in FIG. 1 , and are not repeated here.
  • the display principle of the liquid crystal display device in FIG. 2 is as follows: the backlight module 4 emits white light, passes through the lower polarizing layer to form white polarized light in a specific direction, enters the COA-type array substrate 31, and passes through the color on the COA-type array substrate.
  • the filter layer 330 filters the polarized light of three primary colors of red, green and blue, and then is adjusted by the liquid crystal layer 33 to regularly transmit or not transmit through the upper polarizing layer 34 to finally form a color image.
  • the propagation sequence of the optical path is as follows: the backlight module 4 emits light, and passes through the lower polarizing layer 34 , the COA array substrate 31 , the liquid crystal layer 33 , and the opposite substrate in sequence. 32.
  • the structure and display principle of the liquid crystal display device including the COA type array substrate 31 are described in detail above.
  • the structure of the COA-type array substrate 31 will be described in detail below with reference to FIGS. 3 to 8 .
  • FIG. 3 shows a schematic cross-sectional view of the COA-type array substrate 31 in FIG. 2 .
  • FIG. 4 shows a schematic top view of the COA-type array substrate 31 in FIG. 2 .
  • the COA type array substrate 31 includes a base substrate 310 , a thin film transistor (TFT) layer 320 , a color filter layer 330 and a transparent conductive layer 340 which are stacked in sequence.
  • TFT thin film transistor
  • the COA-type array substrate 31 includes the display area 10 and the peripheral area 20 .
  • FIG. 4 takes the peripheral area 20 surrounding the display area 10 as an example for illustration.
  • the base substrate 310 is provided on the lower polarizing layer 35
  • the thin film transistor layer 320 is provided on the base substrate 310
  • the color filter layer 330 is provided on the thin film transistor layer 320
  • the transparent conductive layer is provided on the color filter layer 330 layer 340
  • the liquid crystal layer 33 is formed on the transparent conductive layer 340 .
  • the transparent conductive layer 340 generally includes a pixel electrode and a common electrode for driving the liquid crystal in the liquid crystal layer 33 to rotate.
  • the color filter layer 330 located under the transparent conductive layer 340 is the same as the description of the color filter layer 330 in FIG. 1 , and will not be repeated here.
  • the thin film transistor layer 320 is generally provided with a plurality of scan lines 328 extending in the row direction (the x direction shown in FIG. 4 ) and a plurality of scanning lines 328 extending in the column direction (as shown in FIG. 4) extending data line 327.
  • the x-direction and the y-direction are perpendicular to each other, and both the x-direction and the y-direction are parallel to the plane where the base substrate 310 is located.
  • the thin film transistor layer 320 further includes a sub-pixel area 110 defined by a plurality of scan lines 328 and a plurality of data lines 327 intersecting each other, and each sub-pixel area 110 is distributed with one TFT.
  • each TFT includes a gate electrode, a gate insulating layer, an active layer, a source electrode and a drain electrode.
  • FIG. 4 takes a plurality of rectangular sub-pixel regions 110 arranged in an array as an example for illustration.
  • the sub-pixel regions 110 arranged in a row along the row direction are called a row of sub-pixel regions 110, and the sub-pixel regions 110 arranged in a row along the column direction are referred to as a row of sub-pixel regions 110.
  • the region 110 is referred to as a column of sub-pixel regions 110 .
  • each scan line 328 is connected to the gate electrodes 321 of a plurality of TFTs in a row of sub-pixel regions 110, and each data line 327 is connected to the source electrodes of a plurality of TFTs in a column of sub-pixel regions 110, And the drain of each TFT is connected to the corresponding pixel electrode through the via holes distributed in the color filter layer as an example, then the scan line 328 can transmit to the gates of the multiple TFTs in the sub-pixel region 110 of a corresponding row.
  • the scan signal controls to turn on or off a plurality of TFTs in the corresponding row, and the data line 327 can transmit data signals to the source electrodes of the TFTs in the sub-pixel area 110 of a corresponding column when the TFTs are turned on, for providing the corresponding pixel electrodes different drive voltages.
  • the thin film transistor layer 320 generally includes a first metal layer 3201, a gate insulating layer 322, an active layer 323, a second metal layer 3201, a gate insulating layer 322, an active layer 323, a second metal layer 320, and a second metal layer 320.
  • Metal layer 3202 and passivation layer 326 are disposed on the side close to the base substrate 310 , and the passivation layer 326 is disposed on the side close to the color filter layer 330 .
  • the first metal layer 3201 includes a plurality of scan lines 327 and gate electrodes 321 for forming TFTs; the second metal layer 3202 includes a plurality of data lines 328 and source electrodes 324 and drain electrodes 325 for forming TFTs.
  • FIG. 3 is only used to illustrate the upper and lower positional relationship between each layer, and the laying shape of each layer is set as required.
  • the peripheral area 20 is used for wiring, and a scan driving circuit for providing scan signals for the scan lines 327 can also be arranged in the peripheral area 20 .
  • a scan driving circuit for providing scan signals for the scan lines 327 can also be arranged in the peripheral area 20 .
  • the optical characteristics of the COA type array substrate 31 for example, the output The color, brightness, etc. of the incident light
  • physical characteristics such as the corresponding sizes of the three primary color resist units in the color filter layer 330, the spacing between adjacent ones, etc.
  • a plurality of measurement areas 21 are prepared in the peripheral area 20 completely imitating the design in the display area 10 . That is, in each measurement area 21, the same scan lines 327, data lines 328, TFTs, color filter layers 330, and the like as in the display area 10 are prepared.
  • FIG. 5 shows a schematic structural diagram of a measurement area 21 in the peripheral area 20 .
  • a plurality of scan lines 327 extending along the row direction x are arranged in the thin film transistor layer 320, and a plurality of scanning lines 327 extending along the column direction y are arranged in the thin film transistor layer 320.
  • the data lines 328 , the plurality of scan lines 327 and the plurality of data lines 328 intersect each other to define two rows and six columns of sub-pixel regions 110 , and one TFT (not shown in FIG. 5 ) is distributed in each sub-pixel region 110 .
  • a corresponding color resistance unit 3300 is provided on the side of the TFT in each sub-pixel region 110 away from the base substrate 310 , and the color resistance unit 3300 may be a red color resistance unit 331 , a green color resistance unit 332 or a blue color resistance unit 333 .
  • the three primary color resist units 3300 are repeatedly arranged, and along the column direction, the color resist units 3300 in the same column have the same color.
  • the projection of the color resist unit 3300 overlaps with the projection of the corresponding sub-pixel area.
  • the color resist units 3300 laid on the thin film transistor layer 320 are designed such that: taking the color resist unit 3300 as a rectangle as an example, the size of each color resist unit 3300 is larger than the corresponding sub-pixel The size of the area 110 is determined, and the projection center of the color resist unit 3300 and the sub-pixel area 110 are coincident, so that the color-resist unit 3300 intersects with the scan line 327, the data line 328, and the sub-pixel area 110 that define the corresponding sub-pixel area 110.
  • the middle TFT structures will all overlap.
  • the existing equipment when measuring the physical properties in the measurement area 21, for example, when measuring the length and width of a color resistance unit 3300, the existing equipment will not only be affected by the adjacent color resistance units 3300 around the color resistance unit 3300.
  • edge interference for example, abnormal situations such as skew, overlap, etc.
  • the measurement results are usually not real data, so it is impossible to accurately determine whether the color filter layer is normal or not, which affects the production yield.
  • FIG. 6 is a schematic view of the structure in the region P in FIG. 5
  • FIG. 7 is a schematic cross-sectional view along the AA' direction in FIG. 6
  • FIG. 8 is a schematic cross-sectional view along the BB' direction in FIG. 6 .
  • the color resist unit 3300 is the first green color resist unit G1 as an example for illustration. Compared with the first green color resist unit G1 , there are distributed on the left side of the first green color resist unit G1 . In the first red color resistance unit R1, a first blue color resistance unit B1 is distributed on the right side of the first green color resistance unit G1, a second green color resistance unit G2 is distributed in the same column in the upper row, and a second green color resistance unit G2 is distributed in the same column in the next row.
  • the device when measuring the length of the first green color resistance unit G1 along the row direction x, the device needs to collect the edge g1 extending along the column direction of the first green color resistance unit G1 and the position of the edge g1', and then determine the distance between the edge g1 and the edge g1', that is, the length of the first green color resistance unit G1 along the x direction.
  • the device may collect the edge of the first red color resistance unit R1 on the left side of g1, or the two edges of the data line 327 on the left side of the corresponding sub-pixel area 110, or Corresponding to the edge of the gate of the TFT in the sub-pixel region 110 . As shown in FIG.
  • a through hole PAS is also provided in the area where each color resist unit does not overlap with the corresponding sub-pixel area 110 (for example, the area overlapped with the scan line), and the through hole PAS starts from To the role of gas, buffer (buffer).
  • buffer buffer
  • the interference of the edge g1′′ and the edge of the third green color resistance unit G3 may even be limited by the interference of the active layer of the TFT, the source and drain edges, etc., so that the pass-through on the first green color resistance unit G1 cannot be obtained.
  • the length of the hole PAS along the y-direction since the actual shape of the through hole PAS is usually irregular, not a perfect circle or a square, so even if the length of the through hole PAS on the first green color resist unit G1 along the y direction is obtained, it cannot reflect the length of the through hole PAS. reality.
  • the present application provides a COA-type array substrate.
  • an auxiliary measurement channel is only provided in the middle between the color resistance unit and the base substrate.
  • the auxiliary measurement pattern layer of the hole is used as a reference for measuring the physical properties of the color resist unit, which can reduce the interference of the thin film transistor layer on the color resist unit, improve the measurement accuracy of the color resist unit, and then improve the physical properties of the color filter layer. measurement accuracy.
  • FIGS. 9 to 14 are schematic structural diagrams of the measurement area 21 in the COA type array substrate provided by the embodiments of the present application.
  • FIG. 13 is a schematic cross-sectional view of the measurement area 21 shown in FIG. 12 along the CC' direction.
  • the COA-type array substrate provided in this embodiment of the present application includes a base substrate 310 .
  • the COA type array substrate further includes a display area 10 and a peripheral area 20 surrounding the display area 10 , and the peripheral area 20 includes a plurality of measurement areas 21 .
  • the measurement areas 21 may be distributed on at least one of the left side, the right side, the upper side or the lower side of the display area 10 . There may be a plurality of measurement areas 21 distributed on each side, and the number of measurement areas 21 distributed on each side may be different, and the size and shape of each measurement area 21 may also be different. For example, the shape of the measurement area 21 may be is square.
  • each measurement area 21 further includes a plurality of auxiliary measurement pattern layers 400 arranged in an array, and an auxiliary measurement through hole 410 is opened in the middle of each auxiliary measurement pattern layer 400 .
  • the plurality of auxiliary measurement pattern layers 400 arranged in an array are arranged in multiple rows and columns on the base substrate 310 .
  • the size and shape of the auxiliary measurement pattern layer 400 can be set and changed as required, which is not limited in this embodiment of the present application.
  • the size and shape of the auxiliary measurement through hole 410 can also be set and changed as required, which is not limited in this embodiment of the present application.
  • the projected size of the auxiliary measurement pattern layer 400 is larger than that of the auxiliary measurement through hole 410 projection size.
  • the plurality of auxiliary measurement pattern layers 400 are integrally formed by the first metal layer.
  • the plurality of auxiliary measurement pattern layers 400 may be prepared by using the first metal layer used for preparing the scan lines and the gate of the TFT in the display area 10 , wherein the material of the first metal layer may be copper.
  • the material of the first metal layer may also include other materials, which are not limited in this embodiment of the present application.
  • the measurement area 21 is further provided with a plurality of color resistance units 3300 .
  • an auxiliary measurement pattern layer 400 is laid on the base substrate 310 , and a color resistance unit 3300 is laid on the auxiliary measurement pattern layer 400 .
  • the color resistance unit is one of a red color resistance unit, a green color resistance unit, and a blue color resistance unit.
  • a red color resistance unit, a green color resistance unit, and a blue color resistance unit are laid on the side of the auxiliary measurement pattern layer 400 away from the base substrate substrate 310 as required.
  • the size of the primary color resist unit is exactly the same.
  • the projection center of the color resist unit 3300 coincides with the projection center of the corresponding auxiliary measurement pattern layer 400 and the projection center of the auxiliary measurement through hole in the auxiliary measurement pattern layer 400, and the color The projected size of the resistance unit 3300 is larger than the projected size of the auxiliary measurement through hole.
  • the auxiliary measurement pattern layer 400 taking the shape of the color resistance unit 3300 , the auxiliary measurement pattern layer 400 , and the auxiliary measurement through hole 410 all rectangular as an example, on the basis that the auxiliary measurement pattern layer 400 has the auxiliary measurement through hole 410 .
  • the auxiliary measurement pattern layer 400 coincides with the projection center of the auxiliary measurement through hole 410 , it means that the auxiliary measurement through hole 410 is located at the center of the auxiliary measurement pattern layer 400 .
  • the color resistance unit 3300 is in the auxiliary measurement through hole 410.
  • the four peripheries of the hole 410 and the auxiliary measurement pattern layer 400 all form overlapping areas, and the overlapping areas formed with the auxiliary measurement pattern layer 400 on the opposite sides of the auxiliary measurement through hole 410 should have the same size.
  • the measuring device when measuring the size of the color resist unit 3300 , the measuring device can first determine the positions of the four closed sides of the auxiliary measurement through hole 410 , and then move from the center of the auxiliary measurement through hole 410 to the surroundings to determine the distance from the auxiliary measurement through hole 410 respectively.
  • the nearest edge of the edge can be used as the four edges of the color resistance unit 3300 .
  • the thin film transistor layer 320 laid between the color resistance unit 3300 and the base substrate 310 is eliminated, a lot of interference is reduced, and the auxiliary measurement is performed only by setting the auxiliary measurement through hole 410, so that the measurement color resistance can be improved. Accuracy at cell size.
  • the interference of the thin film transistor layer on the color resist unit can be reduced, and the measurement accuracy of the color resist unit can be improved.
  • a color resistance unit 3300 is provided on the side of the auxiliary measurement pattern layer 400 located in the odd-numbered or even-numbered columns away from the base substrate 310 .
  • a color resistance unit 3300 is provided on the side of the auxiliary measurement pattern layer located in the odd-numbered or even-numbered rows away from the base substrate 310 .
  • the color resistance unit 3300 is provided, which can correspondingly improve the detection color resistance.
  • the accuracy of the physical characteristics of the unit 3300 is provided, which can correspondingly improve the detection color resistance.
  • a color resistance unit is provided on the side of the auxiliary measurement pattern layer 400 located in odd rows and odd columns and even rows and even columns away from the base substrate 310 .
  • a color resistance unit is provided on the side of the auxiliary measurement pattern layer 400 located in odd rows and even columns and even rows and odd columns away from the base substrate 310 .
  • the color resist unit 3300 when the color resist unit 3300 is disposed on the side of the auxiliary measurement pattern layer 400 in odd rows and even columns and even rows and odd columns away from the base substrate 310, due to the odd rows and odd columns and even rows
  • the color resistance unit 3300 is not provided on the side of the auxiliary measurement pattern layer 400 of the even-numbered columns away from the base substrate 310, so for an auxiliary measurement pattern layer 400 provided with the color resistance unit 3300, the auxiliary measurement pattern layer 400 at the adjacent positions of the upper, lower, left, and right edges
  • the color resistance unit 3300 is not provided on the side of the measurement pattern layer 400 away from the base substrate 310, and a certain gap is formed. Therefore, the density of the color resistance unit 3300 is reduced in both the row direction and the column direction. In the prior art, the mutual interference between the color resist units 3300 is reduced, and the accuracy of detecting the physical characteristics of the color resist units 3300 can be improved.
  • the auxiliary measurement pattern layer 400 includes a first auxiliary measurement pattern layer 401 and a second auxiliary measurement pattern layer 402 .
  • the first auxiliary measurement pattern layer 401 is an auxiliary measurement pattern layer provided with the color resistance unit 3300 on the side away from the base substrate 310
  • the second auxiliary measurement pattern layer 402 is a side away from the base substrate 310 without the color resistance unit 3300 provided.
  • Auxiliary measurement pattern layer is an auxiliary measurement pattern layer provided with the color resistance unit 3300 on the side away from the base substrate 310
  • the second auxiliary measurement pattern layer 402 is a side away from the base substrate 310 without the color resistance unit 3300 provided.
  • the length of the first auxiliary measurement pattern layer 401 is greater than or equal to the length of the second auxiliary measurement pattern layer 402 , and the length of the first auxiliary measurement pattern layer 401 is greater than or equal to the length of the color resist unit 3300 .
  • the second auxiliary measurement pattern layer 402 is arranged along the line
  • the length of the direction may be greater than, equal to or less than the length of the color resist unit 3300 , which may be specifically set as required, which is not limited in this embodiment of the present application.
  • the size of the second auxiliary measurement pattern layer 402 in the row direction can be reduced, thereby reducing the size of the measurement area 21 in the row direction and saving the area occupied by the measurement area 21 .
  • the color resist units 3300 laid on the side away from the base substrate 310 overlap each other, thus, in the row direction, the first auxiliary measurement pattern layer
  • the length of 401 may be greater than or equal to the length of the color resist unit 3300 .
  • the length of the first auxiliary measurement pattern layer 401 is greater than or equal to the length of the color resistance unit 3300 .
  • the color resistance units 3300 laid on the side away from the base substrate 310 overlap each other, and thus, in the column direction, the first auxiliary measurement pattern layer
  • the length of 401 may be greater than or equal to the length of the color resist unit 3300 .
  • the length of the second auxiliary measurement pattern layer 402 is greater than or equal to the length of the color resist unit 3300, and in order to facilitate the use of the first metal layer to form an integral body, the length of the first auxiliary measurement pattern layer 401 and the second auxiliary measurement The lengths of the pattern layers 402 may be equal.
  • each color resist unit 3300 is further provided with two alignment through holes 420 with the same structure.
  • the two alignment through holes 420 not only play the role of air outlet and buffer, but also play the role of alignment.
  • the two alignment vias 420 are located in the overlapping area of the color resist unit 3300 and the corresponding auxiliary measurement pattern layer 400 , and the two alignment vias 420 are respectively disposed on opposite sides of the color resist unit 3300 .
  • the projected shape of the alignment through hole 420 can be a rectangle, a square, a circle, etc., or other special-shaped structures, which can be set as required.
  • the size of the alignment through hole 420 can also be set as required.
  • the overlapping area formed by the color resistance unit 3300 and the corresponding auxiliary measurement pattern layer 400 is: the outer edge is the same as the color resistance unit 3300 edge, and the inner A box-shaped area with the same edge as the edge of the auxiliary measurement via 410 .
  • the two alignment vias 420 may be located on opposite sides of the color resist unit 3300 . Taking the color resist unit 3300 as a rectangle as an example, the two alignment vias 420 may be located on the short sides of the color resist unit 3300 . The opposite sides (as shown in FIG. 12 ) can also be arranged on opposite sides of the long side of the color resistance unit 3300 .
  • the two alignment through holes 420 are respectively disposed in the area outside the short side of the color resistance unit 3300 that overlaps with the auxiliary measurement pattern layer 400, or the two alignment through holes are respectively disposed in the area of the auxiliary measurement pattern layer 400. In the area outside the long side of the color resist unit 3300 that overlaps with the auxiliary measurement pattern layer 400 .
  • the measurement device can measure the length of the alignment through holes 420 along the row direction x and the length along the column direction y The length, compared with the prior art, can improve the measurement accuracy of the alignment through hole 420 .
  • the center lines corresponding to the two alignment through holes 420 respectively coincide with the center lines of the color resistance unit.
  • the centerline of the two alignment vias 420 extending in the column direction and the color resist unit respectively The centerlines of the 3300 extending in the column direction are all coincident.
  • the centerlines of the two alignment vias 420 extending in the row direction and the color resist unit 3300 along the row are coincident.
  • the color resistance unit 3300 is abnormal by referring to the position of the alignment through hole 420 .
  • the two alignment holes 420 are found not in the preset positions during the detection process (assuming the preset positions are: on opposite sides of the short side of the color resistance unit 3300 and the center of the alignment holes 420 is in the color resistance unit 3300 ) (the center line along the column direction), the positions of the two alignment through holes 420 are shifted from the preset positions. Therefore, it can be determined that the color resist unit 3300 provided with the alignment holes 420 is abnormal.
  • the offset of the color resistance unit 3300 can be estimated according to the offset of the alignment via 420 .
  • the display area 10 includes a plurality of sub-pixel areas 110 arranged in an array.
  • the projected size of the auxiliary measurement through hole 410 is smaller than or equal to the sub-pixel area. The projected size of zone 110.
  • the auxiliary measurement through hole 410 is only used as a reference for measuring the color resistance unit 3300 and the alignment through hole 420 on the color resistance unit 3300.
  • the projected size of the auxiliary measurement through hole 410 should be smaller than or equal to the projected size of the sub-pixel area 110 .
  • FIG. 15 is a schematic flowchart of a method for measuring a COA array substrate according to an embodiment of the present application.
  • the measurement method 100 includes the following S110 to S130.
  • the measuring device determines the position of the auxiliary measuring through hole in the measuring area of the COA-type array substrate provided in the embodiment of the present application.
  • the measuring device determines, according to the position of the auxiliary measuring through hole, for each edge of the auxiliary measuring through hole, a target edge that is parallel to and closest to the edge, and uses the target edge as the edge of the corresponding color resistance unit.
  • the center position of the auxiliary measurement through hole can be determined first, and the center position of the auxiliary measurement through hole can be diffused around, and then the target edge corresponding to each edge of the auxiliary measurement through hole can be searched separately.
  • the measuring device determines the length of the color resist unit along the row direction and the length along the column direction according to the edge of the color resist unit.
  • the thin film transistor layer is removed in the measurement area of the COA type array substrate, only an auxiliary measurement channel is provided in the middle between the color resistance unit and the base substrate.
  • the auxiliary measurement pattern layer of the hole is used as a reference for measuring the physical properties of the color resistance unit, which eliminates the interference of the thin film transistor layer on the measurement of the color resistance unit, thereby improving the measurement accuracy of the color resistance unit.
  • the method further includes:
  • the measuring device determines the size along the row direction and the size along the column direction of the alignment through hole on the color resist unit according to the position of the auxiliary measuring through hole.
  • Embodiments of the present application further provide a measurement device, including: a processor;
  • the processor executes the computer program stored in the memory to implement the method for measuring the COA type array substrate as described in the embodiments of the present application.
  • Embodiments of the present application further provide a computer-readable storage medium, where a computer program is stored in the computer-readable storage medium, and when the computer is executed by a processor, the method for measuring a COA-type array substrate provided by the embodiments of the present application is implemented.
  • the computer-readable storage medium provided by the embodiment of the present application has the same beneficial effects as the above-mentioned method for measuring a COA-type array substrate, and details are not described herein again.
  • Embodiments of the present application further provide a liquid crystal display panel, comprising: the COA-type array substrate and the opposite substrate as described in the embodiments of the present application, and a liquid crystal layer disposed between the COA-type array substrate and the opposite substrate.
  • the liquid crystal display panel provided by the embodiments of the present application may further include other structures, and for details, reference may be made to the partial description of FIG. 2 above.
  • Embodiments of the present application further provide a liquid crystal display device, including: the liquid crystal display panel described in the embodiments of the present application and a driving device for driving the liquid crystal display panel.
  • the liquid crystal display device provided in the embodiments of the present application may further include other structures, and for details, reference may be made to the above description of FIG. 2 .

Abstract

A COA type array substrate (31) and a measurement method therefor, and a liquid crystal display panel. The COA type array substrate (31) comprises a base substrate (310). The COA type array substrate (31) further comprises: a display area (10) and a peripheral area (20) surrounding the display area (10); the peripheral area (20) comprises multiple measurement areas (21); on the base substrate (310), each measurement area (21) comprises multiple auxiliary measurement pattern layers (400) arranged in an array; an auxiliary measurement through hole (410) is formed at the middle portion of each of the auxiliary measurement pattern layers (400); in the measurement areas (21), multiple color resist units (3300) are also provided on the side of the auxiliary measurement pattern layers (400) away from the base substrate (310) in the thickness direction of the base substrate (310); and a thin film transistor layer (320) is removed from the COA type array substrate (31), and only the auxiliary measurement pattern layers (400) of which middle portions are provided with the auxiliary measurement through holes (410) are provided as references for measuring the color resist units (3300), such that measurement accuracy can be improved by reducing interference.

Description

COA型阵列基板及其测量方法、液晶显示面板COA type array substrate and its measurement method, liquid crystal display panel
本申请要求于2021年03月23日在中华人民共和国国家知识产权局专利局提交的、申请号为202110306326.7、申请名称为“COA型阵列基板及其测量方法、液晶显示面板”的中国专利申请的优先权,其全部内容通过引用结合在本申请中。This application requires a Chinese patent application with the application number of 202110306326.7 and the application name of "COA-type array substrate and its measurement method, liquid crystal display panel", which was submitted to the Patent Office of the State Intellectual Property Office of the People's Republic of China on March 23, 2021. Priority, the entire contents of which are incorporated herein by reference.
技术领域technical field
本申请属于显示技术领域,尤其涉及一种COA型阵列基板及其测量方法、液晶显示面板。The present application belongs to the field of display technology, and in particular relates to a COA type array substrate, a measurement method thereof, and a liquid crystal display panel.
背景技术Background technique
现有市场上的液晶显示装置大部分为背光型液晶显示装置,其包括液晶显示面板和背光模组(backlight module)。液晶显示面板又通常由阵列基板(thin film transistor,TFT)、彩膜基板(color filter,CF),设置于阵列基板和彩膜基板之间的液晶(liquid crystal,LC)以及封框胶(sealant)组成。Most of the liquid crystal display devices on the existing market are backlight type liquid crystal display devices, which include a liquid crystal display panel and a backlight module. The liquid crystal display panel is usually composed of an array substrate (thin film transistor, TFT), a color filter substrate (CF), a liquid crystal (LC) disposed between the array substrate and the color filter substrate, and a sealant (sealant). )composition.
由于这种结构经常会出现彩膜基板与阵列基板对位不良的问题,因此,现有技术中提出将彩膜基板中的彩色滤光层设置到阵列基板上来,形成的阵列基板称为COA(color filter on array)型阵列基板。Since this kind of structure often causes the problem of poor alignment between the color filter substrate and the array substrate, it is proposed in the prior art to set the color filter layer in the color filter substrate on the array substrate, and the formed array substrate is called COA (COA). color filter on array) type array substrate.
为了满足客户的需求标准,需要对COA型阵列基板中的显示区进行监控,现有技术中就完全仿照显示区,在环绕显示区的周边区中制备一模一样的薄膜晶体管层和彩色滤光层,但是在测量时,受薄膜晶体管层各种结构的干扰,导致无法准确获取到彩色滤光层的数据,因此,亟待一种能提高准确度的新方案。In order to meet the requirements of customers, it is necessary to monitor the display area in the COA type array substrate. In the prior art, the display area is completely imitated, and the same thin film transistor layer and color filter layer are prepared in the peripheral area surrounding the display area. However, during the measurement, the data of the color filter layer cannot be accurately obtained due to the interference of various structures of the thin film transistor layer. Therefore, a new solution that can improve the accuracy is urgently needed.
技术问题technical problem
本申请实施例提供了一种COA型阵列基板及其测量方法、液晶显示面板,在测量区中,通过去除薄膜晶体管层,仅设置中部开设有辅助测量通孔的辅助测量图案层,来作为测量色阻单元的参考物,从而可以通过减少干扰来提高测量准确度。The embodiments of the present application provide a COA-type array substrate, a measurement method thereof, and a liquid crystal display panel. In the measurement area, by removing the thin film transistor layer, only an auxiliary measurement pattern layer with auxiliary measurement through holes in the middle is provided as the measurement The reference for the color resist unit, which can improve measurement accuracy by reducing interference.
技术解决方案technical solutions
第一方面,提供了一种COA型阵列基板,包括:衬底基板,所述COA型阵列基板还包括:显示区和环绕所述显示区的周边区,所述周边区包括多个测量区;在所述衬底基板上,每个测量区包括阵列排布的多个辅助测量图案层,每个辅助测量图案层的中部开设有辅助测量通孔;沿所述衬底基板的厚度方向,在所述辅助测量图案层远离所述衬底基板的一侧,所述测量区还设置有多个色阻单元;其中,在所述衬底基板所在的平面上,所述色阻单元的投影中心与对应的所述辅助测量图案层的投影中心、所述辅助测量图案层中的所述辅助测量通孔的投影中心均重合,且所述色阻单元的投影尺寸大于所述辅助测量通孔的投影尺寸。In a first aspect, a COA-type array substrate is provided, comprising: a base substrate, the COA-type array substrate further comprising: a display area and a peripheral area surrounding the display area, the peripheral area including a plurality of measurement areas; On the base substrate, each measurement area includes a plurality of auxiliary measurement pattern layers arranged in an array, and an auxiliary measurement through hole is opened in the middle of each auxiliary measurement pattern layer; along the thickness direction of the base substrate, at A side of the auxiliary measurement pattern layer away from the base substrate, and a plurality of color resistance units are also arranged in the measurement area; wherein, on the plane where the base substrate is located, the projection center of the color resistance units It is coincident with the projection center of the corresponding auxiliary measurement pattern layer and the projection center of the auxiliary measurement through hole in the auxiliary measurement pattern layer, and the projection size of the color resistance unit is larger than the auxiliary measurement through hole. Projection size.
本申请实施例提供的COA型阵列基板,在测量区中,通过去除薄膜晶体管层,仅在色阻单元和衬底基板之间设置中部开设有辅助测量通孔的辅助测量图案层,来作为测量色阻单元物理特性的参考物,从而可以减少薄膜晶体管层对色阻单元的干扰,提高色阻单元的测量准确度。In the COA type array substrate provided by the embodiment of the present application, in the measurement area, by removing the thin film transistor layer, an auxiliary measurement pattern layer with auxiliary measurement through holes in the middle is only provided between the color resistance unit and the base substrate, as the measurement The reference object of the physical characteristics of the color resistance unit, so that the interference of the thin film transistor layer to the color resistance unit can be reduced, and the measurement accuracy of the color resistance unit can be improved.
结合第一方面,作为一种可能的实现方式,在位于奇数列或偶数列的所述辅助测量图案层远离所述衬底基板的一侧,设置有所述色阻单元;或者,在位于奇数行或偶数行的所述辅助测量图案层远离所述衬底基板的一侧,设置有所述色阻单元;或者,在位于奇数行奇数列和偶数行偶数列的所述辅助测量图案层远离所述衬底基板的一侧,设置有所述色阻单元;或者,在位于奇数行偶数列和偶数行奇数列的所述辅助测量图案层远离所述衬底基板的一侧,设置有所述色阻单元。在该实现方式中,由于降低了色阻单元之间的密度,减少了色阻单元之间的互相干扰,提高了检测辅助测量图案层沿列方向延伸的对边的准确度。With reference to the first aspect, as a possible implementation manner, the color resistance unit is provided on the side of the auxiliary measurement pattern layer located in the odd-numbered or even-numbered columns away from the base substrate; The color resistance unit is disposed on the side of the auxiliary measurement pattern layer in the row or even row that is far away from the base substrate; One side of the base substrate is provided with the color resistance unit; or, on the side of the auxiliary measurement pattern layer located in odd rows and even columns and even rows and odd columns away from the base substrate, a color resistance unit is provided. Describe the color resistance unit. In this implementation manner, since the density between the color resist units is reduced, the mutual interference between the color resist units is reduced, and the accuracy of detecting the opposite sides of the auxiliary measurement pattern layer extending along the column direction is improved.
结合第一方面,作为一种可能的实现方式,所述辅助测量图案层包括第一辅助测量图案层和第二辅助测量图案层;所述第一辅助测量图案层为在远离所述衬底基板的一侧设置有色阻单元的所述辅助测量图案层,所述第二辅助测量图案层为在远离所述衬底基板的一侧未设置色阻单元的所述辅助测量图案层;沿行方向,所述第一辅助测量图案层的长度大于或者等于所述第二辅助测量图案层的长度,所述第一辅助测量图案层的长度大于或者等于所述色阻单元的长度;沿列方向,所述第一辅助测量图案层的长度大于或者等于所述色阻单元的长度。在该实现方式中,通过减小第二辅助测量图案层沿行方向的尺寸,从而缩小测量区沿行方向的尺寸,节约测量区所占用的面积。此外,沿行方向,通过使第一辅助测量图案层的长度可以大于或者等于色阻单元的长度,可以避免沿行方向排布的两个第一辅助测量图案层上铺设的色阻单元互相重叠。在该实现方式中,沿列方向,通过使第一辅助测量图案层的长度大于或者等于色阻单元的长度,可以避免沿列方向排布的两个第一辅助测量图案层上铺设的色阻单元互相重叠。With reference to the first aspect, as a possible implementation manner, the auxiliary measurement pattern layer includes a first auxiliary measurement pattern layer and a second auxiliary measurement pattern layer; the first auxiliary measurement pattern layer is located away from the base substrate. The auxiliary measurement pattern layer of the color resistance unit is provided on one side of the base plate, and the second auxiliary measurement pattern layer is the auxiliary measurement pattern layer without the color resistance unit on the side away from the base substrate; along the row direction , the length of the first auxiliary measurement pattern layer is greater than or equal to the length of the second auxiliary measurement pattern layer, and the length of the first auxiliary measurement pattern layer is greater than or equal to the length of the color resistance unit; along the column direction, The length of the first auxiliary measurement pattern layer is greater than or equal to the length of the color resist unit. In this implementation manner, by reducing the size of the second auxiliary measurement pattern layer along the row direction, the size of the measurement area along the row direction is reduced, and the area occupied by the measurement area is saved. In addition, along the row direction, by making the length of the first auxiliary measurement pattern layer to be greater than or equal to the length of the color resistance unit, the color resistance units laid on the two first auxiliary measurement pattern layers arranged in the row direction can be prevented from overlapping each other. . In this implementation manner, along the column direction, by making the length of the first auxiliary measurement pattern layer greater than or equal to the length of the color resistance unit, it is possible to avoid the color resistance laid on the two first auxiliary measurement pattern layers arranged along the column direction. Units overlap each other.
结合第一方面,作为一种可能的实现方式,每个色阻单元上还设置有结构相同的两个对位通孔;所述两个对位通孔位于所述色阻单元与对应的所述辅助测量图案层的重叠区域,且所述两个对位通孔分设于所述色阻单元的相对两侧。在该实现方式中,该两个对位通孔除了起到出气、缓冲的作用之外,还起到对位作用。In combination with the first aspect, as a possible implementation manner, each color resistance unit is also provided with two alignment through holes with the same structure; the two alignment through holes are located between the color resistance unit and the corresponding The overlapping area of the auxiliary measurement pattern layer is measured, and the two alignment through holes are respectively arranged on opposite sides of the color resist unit. In this implementation manner, the two alignment through holes not only play the role of air outlet and buffer, but also play the role of alignment.
结合第一方面,作为一种可能的实现方式,所述两个对位通孔分别对应的中线与所述色阻单元的中线均重合。在该实现方式中,根据对位通孔的偏移量可以估算出色阻单元的偏移量。With reference to the first aspect, as a possible implementation manner, the center lines corresponding to the two alignment through holes respectively coincide with the center lines of the color resistance unit. In this implementation, the offset of the color resistance unit can be estimated according to the offset of the bit via.
结合第一方面,作为一种可能的实现方式,所述显示区包括多个阵列排布的子像素区;在所述衬底基板所在的平面上,所述辅助测量通孔的投影尺寸小于或者等于所述子像素区的投影尺寸。在该实现方式中,为了避免漏光,辅助测量通孔的投影尺寸小于或者等于所述子像素区的投影尺寸。With reference to the first aspect, as a possible implementation manner, the display area includes a plurality of sub-pixel areas arranged in an array; on the plane where the base substrate is located, the projected size of the auxiliary measurement through hole is smaller than or is equal to the projected size of the sub-pixel area. In this implementation manner, in order to avoid light leakage, the projected size of the auxiliary measurement through hole is smaller than or equal to the projected size of the sub-pixel area.
结合第一方面,作为一种可能的实现方式,所述多个辅助测量图案层由第一金属层一体构成。With reference to the first aspect, as a possible implementation manner, the multiple auxiliary measurement pattern layers are integrally formed by the first metal layer.
结合第一方面,作为一种可能的实现方式,所述色阻单元为红色色阻单元、绿色色阻单元、蓝色色阻单元中的一种。With reference to the first aspect, as a possible implementation manner, the color resistance unit is one of a red color resistance unit, a green color resistance unit, and a blue color resistance unit.
结合第一方面,作为一种可能的实现方式,所述辅助测量图案层在所述衬底基板所在的平面上的投影尺寸大于所述辅助测量通孔在所述衬底基板所在的平面上的投影尺寸。With reference to the first aspect, as a possible implementation manner, the projected size of the auxiliary measurement pattern layer on the plane where the base substrate is located is larger than the projected size of the auxiliary measurement through hole on the plane where the base substrate is located. Projection size.
结合第一方面,作为一种可能的实现方式,多个所述辅助测量图案层由第一金属层一体构成。With reference to the first aspect, as a possible implementation manner, a plurality of the auxiliary measurement pattern layers are integrally formed by the first metal layer.
结合第一方面,作为一种可能的实现方式,所述第一金属层的材料包括铜。With reference to the first aspect, as a possible implementation manner, the material of the first metal layer includes copper.
结合第一方面,作为一种可能的实现方式,所述色阻单元为红色色阻单元、绿色色阻单元、蓝色色阻单元中的一种。With reference to the first aspect, as a possible implementation manner, the color resistance unit is one of a red color resistance unit, a green color resistance unit, and a blue color resistance unit.
结合第一方面,作为一种可能的实现方式,所述对位通孔在所述衬底基板所在的平面上的投影形状为矩形、正方形、圆形中的任意一种。With reference to the first aspect, as a possible implementation manner, the projected shape of the alignment through hole on the plane where the base substrate is located is any one of a rectangle, a square, and a circle.
结合第一方面,作为一种可能的实现方式,沿所述列方向,所述第二辅助测量图案层的长度大于或等于所述色阻单元的长度。With reference to the first aspect, as a possible implementation manner, along the column direction, the length of the second auxiliary measurement pattern layer is greater than or equal to the length of the color resistance unit.
第二方面,提供一种COA型阵列基板的测量方法,应用于测量设备,该方法包括:在如第一方面及第一方面中的任意一种实现方式所述的COA型阵列基板的测量区中,确定辅助测量通孔的位置;根据所述辅助测量通孔的位置,针对所述辅助测量通孔的每条边沿,确定与所述边沿平行且距离最近的目标边沿,并将所述目标边沿作为对应的色阻单元的边沿;根据所述色阻单元的边沿,确定所述色阻单元沿行方向的长度和沿列方向的长度。A second aspect provides a method for measuring a COA-type array substrate, which is applied to a measuring device, the method comprising: a measurement area of the COA-type array substrate according to any one of the first aspect and the implementation manner of the first aspect , determine the position of the auxiliary measurement through hole; according to the position of the auxiliary measurement through hole, for each edge of the auxiliary measurement through hole, determine the target edge parallel to the edge and the closest The edge is used as the edge of the corresponding color resist unit; according to the edge of the color resist unit, the length along the row direction and the length along the column direction of the color resist unit are determined.
本申请实施例提供的COA型阵列基板的测量方法,由于在该COA型阵列基板的测量区中,去除了薄膜晶体管层,仅在色阻单元和衬底基板之间设置中部开设有辅助测量通孔的辅助测量图案层,来作为测量色阻单元物理特性的参考物,消除了薄膜晶体管层对色阻单元测量的干扰,从而可以提高色阻单元的测量准确度。In the measurement method of the COA type array substrate provided by the embodiment of the present application, since the thin film transistor layer is removed in the measurement area of the COA type array substrate, only an auxiliary measurement channel is provided in the middle between the color resistance unit and the base substrate. The auxiliary measurement pattern layer of the hole is used as a reference for measuring the physical properties of the color resistance unit, which eliminates the interference of the thin film transistor layer on the measurement of the color resistance unit, thereby improving the measurement accuracy of the color resistance unit.
结合第二方面,作为一种可能的实现方式,所述方法还包括:With reference to the second aspect, as a possible implementation manner, the method further includes:
根据所述辅助测量通孔的位置,确定所述色阻单元上的对位通孔沿行方向的尺寸和沿列方向的尺寸。According to the position of the auxiliary measurement through hole, the size along the row direction and the size along the column direction of the alignment through hole on the color resist unit is determined.
第三方面,提供一种测量设备,包括:处理器;In a third aspect, a measurement device is provided, comprising: a processor;
所述处理器执行存储在存储器中的计算机程序,以实现如第二方面及第二方面中的任意一种实现方式所述的COA型阵列基板的测量方法。The processor executes the computer program stored in the memory to implement the method for measuring the COA type array substrate according to any one of the second aspect and the implementation manner of the second aspect.
第四方面,提供一种计算机可读存储介质,包括:计算机可读存储介质存储有计算机程序,所述计算机程序被处理器执行时实现如第二方面及第二方面中的任意一种实现方式所述的COA型阵列基板的测量方法。In a fourth aspect, a computer-readable storage medium is provided, comprising: the computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, any one of the second aspect and the second aspect is implemented. The measuring method of the COA type array substrate.
第五方面,提供一种液晶显示面板,包括如第一方面及第一方面中的任意一种实现方式所述的COA型阵列基板和对置基板、以及设置于所述COA型阵列基板和所述对置基板之间的液晶层。A fifth aspect provides a liquid crystal display panel, comprising the COA-type array substrate and the opposite substrate as described in any one of the first aspect and the implementation manner of the first aspect, and the COA-type array substrate and the the liquid crystal layer between the opposing substrates.
第六方面,提供一种液晶显示装置,如第一方面及第一方面中的任意一种实现方式所述的液晶显示面板和用于驱动所述液晶显示面板的驱动装置。A sixth aspect provides a liquid crystal display device, the liquid crystal display panel according to any one of the first aspect and the implementation manner of the first aspect, and a driving device for driving the liquid crystal display panel.
有益效果beneficial effect
本申请实施例提供的COA型阵列基板及其测量方法、液晶显示面板和液晶显示装置,在测量区中,通过去除薄膜晶体管层,仅在色阻单元和衬底基板之间设置中部开设有辅助测量通孔的辅助测量图案层,来作为测量色阻单元物理特性的参考物,从而可以减少薄膜晶体管层对色阻单元的干扰,提高色阻单元的测量准确度。In the COA-type array substrate and its measurement method, the liquid crystal display panel and the liquid crystal display device provided by the embodiments of the present application, in the measurement area, by removing the thin film transistor layer, an auxiliary opening is only provided in the middle between the color resistance unit and the base substrate. The auxiliary measurement pattern layer of the through hole is measured as a reference for measuring the physical properties of the color resistance unit, thereby reducing the interference of the thin film transistor layer on the color resistance unit and improving the measurement accuracy of the color resistance unit.
附图说明Description of drawings
为了更清楚地说明本申请实施例技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图是本申请的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to explain the technical solutions of the embodiments of the present application more clearly, the following briefly introduces the accompanying drawings used in the description of the embodiments. For those of ordinary skill, other drawings can also be obtained from these drawings without any creative effort.
图1是现有技术中提供的一种液晶显示装置的结构示意图;1 is a schematic structural diagram of a liquid crystal display device provided in the prior art;
图2是现有技术中提供的另一种液晶显示装置的结构示意图;2 is a schematic structural diagram of another liquid crystal display device provided in the prior art;
图3是图2中的COA型阵列基板的截面示意图;3 is a schematic cross-sectional view of the COA-type array substrate in FIG. 2;
图4是图2中的COA型阵列基板的俯视示意图;FIG. 4 is a schematic top view of the COA type array substrate in FIG. 2;
图5是周边区中的一个测量区的结构示意图;Fig. 5 is the structural representation of a measurement area in the peripheral area;
图6是图5中的区域P中的结构示意图;Fig. 6 is the structural representation in the area P in Fig. 5;
图7是图6中沿AA'方向的截面示意图;Figure 7 is a schematic cross-sectional view along the AA' direction in Figure 6;
图8是图7中沿BB'方向的截面示意图;Figure 8 is a schematic cross-sectional view along the BB' direction in Figure 7;
图9是本申请实施例提供的一种测量区的结构示意图;9 is a schematic structural diagram of a measurement area provided by an embodiment of the present application;
图10是本申请实施例提供的另一种测量区的结构示意图;10 is a schematic structural diagram of another measurement area provided by an embodiment of the present application;
图11是本申请实施例提供的又一种测量区的结构示意图;11 is a schematic structural diagram of another measurement area provided by an embodiment of the present application;
图12是本申请实施例提供的又一种测量区的结构示意图;12 is a schematic structural diagram of another measurement area provided by an embodiment of the present application;
图13是图12中沿CC'方向的截面示意图;Figure 13 is a schematic cross-sectional view along the CC' direction in Figure 12;
图14是本申请实施例提供的又一种测量区的结构示意图;14 is a schematic structural diagram of another measurement area provided by an embodiment of the present application;
图15是本申请实施例提供的COA型阵列基板的测量方法的流程示意图。FIG. 15 is a schematic flowchart of a method for measuring a COA array substrate provided in an embodiment of the present application.
附图标记:Reference number:
1-框架;2-盖板;3-液晶显示模组;4-背光模组;5-电路板;10-显示区;110-子像素区;20-周边区;21-测量区;30-液晶显示面板;31-阵列基板;32-对置基板;33-液晶层;34-上偏光层;35-下偏光层;310-衬底基板;320-薄膜晶体管层;321-栅极;322-栅极绝缘层;323-有源层;324-源极;325-漏极;326-钝化层;327-数据线;328-扫描线;3201-第一金属层;3202-第二金属层;330-彩色滤光层;3300-色阻单元;331-红色色阻单元;332-绿色色阻单元;333-蓝色色阻单元;340-透明导电层;400-辅助测量图案层;401-第一辅助测量图案层;402-第二辅助层图案层;410-辅助测量通孔;420-对位通孔。1-frame; 2-cover; 3-liquid crystal display module; 4-backlight module; 5-circuit board; 10-display area; 110-sub-pixel area; 20-peripheral area; 21-measurement area; 30- 31-array substrate; 32-opposing substrate; 33-liquid crystal layer; 34-upper polarizing layer; 35-lower polarizing layer; 310-substrate substrate; 320-thin film transistor layer; 321-gate electrode; 322 - gate insulating layer; 323 - active layer; 324 - source electrode; 325 - drain electrode; 326 - passivation layer; 327 - data line; 328 - scan line; 3201 - first metal layer; 3202 - second metal layer; 330-color filter layer; 3300-color resist unit; 331-red color resist unit; 332-green color resist unit; 333-blue color resist unit; 340-transparent conductive layer; 400- auxiliary measurement pattern layer; 401 - the first auxiliary measurement pattern layer; 402 - the second auxiliary layer pattern layer; 410 - auxiliary measurement through holes; 420 - alignment through holes.
本申请目的的实现、功能特点及优点将结合实施例,参照附图做进一步说明。The realization, functional characteristics and advantages of the purpose of the present application will be further described with reference to the accompanying drawings in conjunction with the embodiments.
本发明的实施方式Embodiments of the present invention
应当理解,此处所描述的具体实施例仅仅用以解释本申请,并不用于限定本申请。It should be understood that the specific embodiments described herein are only used to explain the present application, but not to limit the present application.
本申请实施例提供一种液晶显示装置,该液晶显示装置可以为各种电子设备或者该液晶显示装置可以应用于各种电子设备中。The embodiments of the present application provide a liquid crystal display device, and the liquid crystal display device can be various electronic devices or the liquid crystal display device can be applied to various electronic devices.
例如,该电子设备可以为智能手机、平板电脑、电子阅读器、车载电脑、导航仪、数码相机、智能电视机以及智能可穿戴设备等多种不同类型的电子设备。本申请实施例提供的液晶显示装置具有非常广泛的应用前景。For example, the electronic device may be a variety of different types of electronic devices, such as a smart phone, a tablet computer, an electronic reader, a car computer, a navigator, a digital camera, a smart TV, and a smart wearable device. The liquid crystal display device provided by the embodiments of the present application has a very wide application prospect.
在现有技术中,液晶显示装置大部分为背光型液晶显示装置,图1示出了一种背光型液晶显示装置的结构示意图。如图1所示,该液晶显示装置的主要结构包括框架1、盖板2、液晶显示模组3、背光模组4、电路板5以及包括摄像头等的其他电子配件。液晶显示模组3包括液晶显示面板30、设置在液晶显示面板30靠近盖板2一侧的上偏光层34以及设置在液晶显示面板靠近背光模组4一侧的下偏光层35。液晶显示面板30包括阵列基板31、对置基板32、设置于阵列基板31和对置基板32之间的液晶层33,阵列基板31和对置基板32通过封框胶(sealant)对合在一起,从而将液晶层33限定在封框胶围成的区域内。其中,通常彩色滤光层330设置于对置基板32上,并将此对置基板32称为彩膜基板。In the prior art, most of the liquid crystal display devices are backlight type liquid crystal display devices, and FIG. 1 shows a schematic structural diagram of a backlight type liquid crystal display device. As shown in FIG. 1 , the main structure of the liquid crystal display device includes a frame 1 , a cover plate 2 , a liquid crystal display module 3 , a backlight module 4 , a circuit board 5 and other electronic accessories including a camera. The liquid crystal display module 3 includes a liquid crystal display panel 30 , an upper polarizing layer 34 disposed on the side of the liquid crystal display panel 30 close to the cover plate 2 , and a lower polarizing layer 35 disposed on the side of the liquid crystal display panel close to the backlight module 4 . The liquid crystal display panel 30 includes an array substrate 31, an opposite substrate 32, a liquid crystal layer 33 disposed between the array substrate 31 and the opposite substrate 32, and the array substrate 31 and the opposite substrate 32 are assembled together by a sealant , so that the liquid crystal layer 33 is limited in the area surrounded by the frame sealant. Wherein, the color filter layer 330 is usually disposed on the opposite substrate 32, and the opposite substrate 32 is referred to as a color filter substrate.
应理解,彩色滤光层330用于将阵列基板31出射的白光过滤成不同颜色的光。彩色滤光层330通常包括阵列排布的三基色色阻单元,例如,该三基色色阻单元包括红色色阻单元、绿色色阻单元和蓝色色阻单元。其中,红色色阻单元可以将阵列基板31出射的白光过滤成红光,绿色色阻单元可以将阵列基板31出射的白光过滤成绿光,蓝色色阻单元可以将阵列基板31出射的白光过滤成蓝光。当然,彩色滤光层330还可以包括其他颜色色阻单元,本申请实施例以三基色色阻单元为例进行说明。It should be understood that the color filter layer 330 is used to filter the white light emitted from the array substrate 31 into light of different colors. The color filter layer 330 generally includes three primary color resist units arranged in an array, for example, the three primary color resist units include a red color resist unit, a green color resist unit and a blue color resist unit. The red color resist unit can filter the white light emitted from the array substrate 31 into red light, the green color resist unit can filter the white light emitted from the array substrate 31 into green light, and the blue color resist unit can filter the white light emitted from the array substrate 31 into green light. Blu-ray. Of course, the color filter layer 330 may also include other color resist units, and the embodiment of the present application uses three primary color resist units as an example for description.
如图1所示,以框架1的纵截面呈U型为例,液晶显示模组3、背光模组4、电路板5以及包括摄像头等的其他电子配件设置于框架1内,背光模组4位于液晶显示模组3的下方,电路板5位于背光模组4和框架1之间,盖板2位于液晶显示模组3远离背光模组4的一侧。盖板2,例如可以是透明玻璃。As shown in FIG. 1 , taking the U-shaped longitudinal section of the frame 1 as an example, the liquid crystal display module 3 , the backlight module 4 , the circuit board 5 and other electronic accessories including cameras are arranged in the frame 1 , and the backlight module 4 Below the liquid crystal display module 3 , the circuit board 5 is located between the backlight module 4 and the frame 1 , and the cover plate 2 is located on the side of the liquid crystal display module 3 away from the backlight module 4 . The cover plate 2 may be, for example, transparent glass.
应理解,图1中的液晶显示装置的显示原理为:背光模组4发出白光,经过下偏光层35形成特定偏振方向的白色偏振光,射入阵列基板31,经过液晶层33调整后,再通过彩膜基板上的彩色滤光层330过滤形成红绿蓝三基色偏振光。当该三基色偏振光的偏振方向与上偏光层34的偏振方向垂直时,三基色偏振光不能穿过上偏光层34,此时无光线出射;当该三基色偏振光的偏振方向与上偏光层34的偏振方向平行时,该三基色偏振光可以通过上偏光层34,此时出射光的光强最强。应理解,由于液晶分子对偏振光有旋光特性,特定的液晶分子排布方向可以使得通过液晶层的偏振光的偏振方向发生改变,那么当液晶分子的排布方向受像素电极和公共电极施加的电场的控制发生旋转时,三基色偏振光就会有规律的透过或者不透过上偏光层34,最终形成彩色图像。It should be understood that the display principle of the liquid crystal display device in FIG. 1 is as follows: the backlight module 4 emits white light, passes through the lower polarizing layer 35 to form white polarized light with a specific polarization direction, enters the array substrate 31 , and is adjusted by the liquid crystal layer 33 . The polarized light of red, green and blue is formed by filtering through the color filter layer 330 on the color filter substrate. When the polarization direction of the three-primary color polarized light is perpendicular to the polarization direction of the upper polarizing layer 34, the three-primary color polarized light cannot pass through the upper polarizing layer 34, and no light exits at this time; When the polarization directions of the layers 34 are parallel, the polarized light of the three primary colors can pass through the upper polarizing layer 34, and the light intensity of the outgoing light is the strongest at this time. It should be understood that since the liquid crystal molecules have optical rotatory properties to polarized light, the specific arrangement direction of the liquid crystal molecules can change the polarization direction of the polarized light passing through the liquid crystal layer. When the control of the electric field rotates, the polarized light of the three primary colors will pass through or not pass through the upper polarizing layer 34 regularly, and finally form a color image.
基于图1所示的液晶显示装置,在图1中,光路的传播顺序为:背光模组4射出,依次透过下偏光层35、阵列基板31、液晶层33、彩膜基板、上偏光层34、射出盖板2。Based on the liquid crystal display device shown in FIG. 1 , in FIG. 1 , the propagation sequence of the optical path is as follows: the backlight module 4 emits light and passes through the lower polarizing layer 35 , the array substrate 31 , the liquid crystal layer 33 , the color filter substrate, and the upper polarizing layer in sequence. 34. The cover plate 2 is ejected.
上述对现有的液晶显示装置的结构和显示原理进行详细描述,然而,制备这种结构的液晶显示装置中的液晶显示面板30时,需要先将彩膜基板和阵列基板31分别制备好,然后再对盒起来,由此,经常会出现彩膜基板与阵列基板31对位不良的问题,进而造成像素漏光或开口率低等问题。The structure and display principle of the existing liquid crystal display device are described in detail above. However, when preparing the liquid crystal display panel 30 in the liquid crystal display device with this structure, the color filter substrate and the array substrate 31 need to be prepared separately, and then When the boxes are assembled again, the problem of poor alignment between the color filter substrate and the array substrate 31 often occurs, thereby causing problems such as pixel light leakage or low aperture ratio.
为解决上述问题,现有技术中,提出了另一种液晶显示装置。In order to solve the above problems, another liquid crystal display device is proposed in the prior art.
图2示出了另一种液晶显示装置的结构示意图。如图2所示,在该液晶显示装置中,液晶显示面板30将彩色滤光层330制备在阵列基板31上。此时,该阵列基板31可以称为COA型阵列基板,因为COA型阵列基板31和对置基板32对盒时,不存在对位问题,所以可以降低液晶显示面板30制备过程中对盒制程的难度,避免了对盒时的误差。其他结构与图1所述的液晶显示装置的结构相同,在此不再赘述。FIG. 2 shows a schematic structural diagram of another liquid crystal display device. As shown in FIG. 2 , in the liquid crystal display device, the liquid crystal display panel 30 prepares the color filter layer 330 on the array substrate 31 . At this time, the array substrate 31 can be called a COA-type array substrate, because there is no alignment problem when the COA-type array substrate 31 and the opposite substrate 32 are assembled, so it is possible to reduce the time required for the assembly process during the preparation of the liquid crystal display panel 30. Difficulty, to avoid errors when aligning boxes. The other structures are the same as those of the liquid crystal display device shown in FIG. 1 , and are not repeated here.
应理解,图2中的液晶显示装置的显示原理为:背光模组4发出白光,经过下偏光层形成特定方向的白色偏振光,射入COA型阵列基板31,通过COA型阵列基板上的彩色滤光层330过滤形成红绿蓝三基色偏振光,然后再经过液晶层33调整,有规律的透过或不透过上偏光层34,最终形成彩色图像。It should be understood that the display principle of the liquid crystal display device in FIG. 2 is as follows: the backlight module 4 emits white light, passes through the lower polarizing layer to form white polarized light in a specific direction, enters the COA-type array substrate 31, and passes through the color on the COA-type array substrate. The filter layer 330 filters the polarized light of three primary colors of red, green and blue, and then is adjusted by the liquid crystal layer 33 to regularly transmit or not transmit through the upper polarizing layer 34 to finally form a color image.
基于图2所示的液晶显示装置的结构,在图2中,光路的传播顺序为:背光模组4射出,依次透过下偏光层34、COA型阵列基板31、液晶层33、对置基板32、上偏光层34、射出盖板2。Based on the structure of the liquid crystal display device shown in FIG. 2 , in FIG. 2 , the propagation sequence of the optical path is as follows: the backlight module 4 emits light, and passes through the lower polarizing layer 34 , the COA array substrate 31 , the liquid crystal layer 33 , and the opposite substrate in sequence. 32. The upper polarizing layer 34, the exit cover plate 2.
上述对包括有COA型阵列基板31的液晶显示装置的结构和显示原理进行详细描述。下面结合图3~图8对该COA型阵列基板31的结构进行详细说明。The structure and display principle of the liquid crystal display device including the COA type array substrate 31 are described in detail above. The structure of the COA-type array substrate 31 will be described in detail below with reference to FIGS. 3 to 8 .
图3示出了图2中的COA型阵列基板31的截面示意图。图4示出了图2中的COA型阵列基板31的俯视示意图。FIG. 3 shows a schematic cross-sectional view of the COA-type array substrate 31 in FIG. 2 . FIG. 4 shows a schematic top view of the COA-type array substrate 31 in FIG. 2 .
如图3所示,该COA型阵列基板31包括依次层叠设置的衬底基板310、薄膜晶体管(thin film transistor,TFT)层320、彩色滤光层330和透明导电层340。如图4所示,在俯视示意图中,COA型阵列基板31包括显示区10和周边区20,图4以周边区20环绕显示区10为例进行示意。As shown in FIG. 3 , the COA type array substrate 31 includes a base substrate 310 , a thin film transistor (TFT) layer 320 , a color filter layer 330 and a transparent conductive layer 340 which are stacked in sequence. As shown in FIG. 4 , in the schematic top view, the COA-type array substrate 31 includes the display area 10 and the peripheral area 20 . FIG. 4 takes the peripheral area 20 surrounding the display area 10 as an example for illustration.
其中,当图3所示的COA型阵列基板31设置在图2中的液晶显示装置中时,衬底基板310靠近下偏光层35一侧,透明导电层340靠近液晶层33一侧。也就是说,在下偏光层35上设置衬底基板310,在衬底基板310上设置薄膜晶体管层320,在薄膜晶体管层320上设置彩色滤光层330,在彩色滤光层330上设置透明导电层340,然后再在透明导电层340上形成液晶层33。When the COA array substrate 31 shown in FIG. 3 is arranged in the liquid crystal display device shown in FIG. That is to say, the base substrate 310 is provided on the lower polarizing layer 35 , the thin film transistor layer 320 is provided on the base substrate 310 , the color filter layer 330 is provided on the thin film transistor layer 320 , and the transparent conductive layer is provided on the color filter layer 330 layer 340 , and then the liquid crystal layer 33 is formed on the transparent conductive layer 340 .
应理解,在显示区10中,透明导电层340通常包括用于驱动液晶层33中的液晶进行旋转的像素电极和公共电极。位于透明导电层340下方的彩色滤光层330和图1中对彩色滤光层330的描述相同,在此不再赘述。It should be understood that in the display area 10, the transparent conductive layer 340 generally includes a pixel electrode and a common electrode for driving the liquid crystal in the liquid crystal layer 33 to rotate. The color filter layer 330 located under the transparent conductive layer 340 is the same as the description of the color filter layer 330 in FIG. 1 , and will not be repeated here.
而位于彩色滤光层330下方的薄膜晶体管层320为了进行显示,在显示区10中需要控制并调整不同位置处液晶所对应的像素电极上的驱动电压,以形成不同的显示亮度。由此,如图4所示,薄膜晶体管层320在显示区10中通常设置有多条沿行方向(如图4所示的x方向)延伸的扫描线328和多条沿列方向(如图4所示的y方向)延伸的数据线327。其中,x方向和y方向相互垂直,并且,x方向、y方向均平行于衬底基板310所在的平面。In order to display the thin film transistor layer 320 under the color filter layer 330 , it is necessary to control and adjust the driving voltages on the pixel electrodes corresponding to the liquid crystals at different positions in the display area 10 to form different display brightness. Therefore, as shown in FIG. 4 , the thin film transistor layer 320 is generally provided with a plurality of scan lines 328 extending in the row direction (the x direction shown in FIG. 4 ) and a plurality of scanning lines 328 extending in the column direction (as shown in FIG. 4) extending data line 327. The x-direction and the y-direction are perpendicular to each other, and both the x-direction and the y-direction are parallel to the plane where the base substrate 310 is located.
此外,在显示区10中,薄膜晶体管层320还包括多条扫描线328和多条数据线327相互交叉限定出的子像素区110,每个子像素区110分布有一个TFT。沿衬底基板310的厚度方向,每个TFT包括栅极、栅极绝缘层、有源层、源极和漏极。图4以阵列排布的多个矩形子像素区110为例进行示意,此时,沿行方向排列成一排的子像素区110称为一行子像素区110,沿列方向排列成一排的子像素区110称为一列子像素区110。In addition, in the display area 10, the thin film transistor layer 320 further includes a sub-pixel area 110 defined by a plurality of scan lines 328 and a plurality of data lines 327 intersecting each other, and each sub-pixel area 110 is distributed with one TFT. Along the thickness direction of the base substrate 310, each TFT includes a gate electrode, a gate insulating layer, an active layer, a source electrode and a drain electrode. FIG. 4 takes a plurality of rectangular sub-pixel regions 110 arranged in an array as an example for illustration. At this time, the sub-pixel regions 110 arranged in a row along the row direction are called a row of sub-pixel regions 110, and the sub-pixel regions 110 arranged in a row along the column direction are referred to as a row of sub-pixel regions 110. The region 110 is referred to as a column of sub-pixel regions 110 .
基于此,若以每一条扫描线328与一行子像素区110中的多个TFT的栅极321相连接,每一条数据线327与一列子像素区110中的多个TFT的源极相连接,并且每个TFT的漏极通过分布在彩色滤光层中的过孔与对应的像素电极相连接为例,则扫描线328可以向对应的一行子像素区110中的多个TFT的栅极传输扫描信号,控制开启或者关闭对应行的多个TFT,而数据线327可以在TFT开启时,向对应的一列子像素区110中的TFT的源极传输数据信号,用于提供给对应的像素电极不同的驱动电压。Based on this, if each scan line 328 is connected to the gate electrodes 321 of a plurality of TFTs in a row of sub-pixel regions 110, and each data line 327 is connected to the source electrodes of a plurality of TFTs in a column of sub-pixel regions 110, And the drain of each TFT is connected to the corresponding pixel electrode through the via holes distributed in the color filter layer as an example, then the scan line 328 can transmit to the gates of the multiple TFTs in the sub-pixel region 110 of a corresponding row. The scan signal controls to turn on or off a plurality of TFTs in the corresponding row, and the data line 327 can transmit data signals to the source electrodes of the TFTs in the sub-pixel area 110 of a corresponding column when the TFTs are turned on, for providing the corresponding pixel electrodes different drive voltages.
结合图3和图4所示,应理解,上述薄膜晶体管的结构在制程过程中,薄膜晶体管层320通常包括依次层叠的第一金属层3201、栅极绝缘层322、有源层323、第二金属层3202以及钝化层326。第一金属层3201设置于靠近衬底基板310的一侧,钝化层326设置于靠近彩色滤光层330的一侧。其中,第一金属层3201包括多条扫描线327以及用于形成TFT的栅极321;第二金属层3202包括多条数据线328以及用于形成TFT的源极324和漏极325。此处,图3仅用于示意各个层级之间的上下位置关系,每层的铺设形状根据需要进行设置。With reference to FIGS. 3 and 4 , it should be understood that during the manufacturing process of the structure of the above-mentioned thin film transistor, the thin film transistor layer 320 generally includes a first metal layer 3201, a gate insulating layer 322, an active layer 323, a second metal layer 3201, a gate insulating layer 322, an active layer 323, a second metal layer 320, and a second metal layer 320. Metal layer 3202 and passivation layer 326 . The first metal layer 3201 is disposed on the side close to the base substrate 310 , and the passivation layer 326 is disposed on the side close to the color filter layer 330 . The first metal layer 3201 includes a plurality of scan lines 327 and gate electrodes 321 for forming TFTs; the second metal layer 3202 includes a plurality of data lines 328 and source electrodes 324 and drain electrodes 325 for forming TFTs. Here, FIG. 3 is only used to illustrate the upper and lower positional relationship between each layer, and the laying shape of each layer is set as required.
如图4所示,周边区20用于布线,还可将用于为扫描线327提供扫描信号的扫描驱动电路设置于周边区20内。此外,为了制备的COA型阵列基板31能达到客户使用的需求标准,在制备彩色滤光层330之后,而在制备透明导电层340之前,还需要对COA型阵列基板31的光学特性(例如出射光的颜色、亮度等)和物理特性(例如彩色滤光层330中三基色色阻单元分别对应的尺寸、相邻之间的间距等)进行有效的监控,以防止出现异常。As shown in FIG. 4 , the peripheral area 20 is used for wiring, and a scan driving circuit for providing scan signals for the scan lines 327 can also be arranged in the peripheral area 20 . In addition, in order to prepare the COA type array substrate 31 to meet the requirements of customers, after the preparation of the color filter layer 330 and before the preparation of the transparent conductive layer 340, the optical characteristics of the COA type array substrate 31 (for example, the output The color, brightness, etc. of the incident light) and physical characteristics (such as the corresponding sizes of the three primary color resist units in the color filter layer 330, the spacing between adjacent ones, etc.) are effectively monitored to prevent abnormalities.
在现有技术中,为了对COA型阵列基板31中的显示区10进行监控,在制备过程中,会完全仿照显示区10内的设计,在周边区20中制备多个测量区21。即,在每个测量区21中,制备与显示区10中一模一样的扫描线327、数据线328、TFT和彩色滤光层330等。In the prior art, in order to monitor the display area 10 in the COA type array substrate 31 , in the manufacturing process, a plurality of measurement areas 21 are prepared in the peripheral area 20 completely imitating the design in the display area 10 . That is, in each measurement area 21, the same scan lines 327, data lines 328, TFTs, color filter layers 330, and the like as in the display area 10 are prepared.
图5示出了周边区20中的一个测量区21的结构示意图。FIG. 5 shows a schematic structural diagram of a measurement area 21 in the peripheral area 20 .
如图5所示,在该测量区21中,示例性的,仿照显示区10设计,薄膜晶体管层320中设置了多条沿行方向x延伸的扫描线327,多条沿列方向y延伸的数据线328,该多条扫描线327和多条数据线328相互交叉限定出了两行六列子像素区110,在每个子像素区110中分布有一个TFT(图5中未示出)。As shown in FIG. 5 , in the measurement area 21, exemplarily, in the design of the display area 10, a plurality of scan lines 327 extending along the row direction x are arranged in the thin film transistor layer 320, and a plurality of scanning lines 327 extending along the column direction y are arranged in the thin film transistor layer 320. The data lines 328 , the plurality of scan lines 327 and the plurality of data lines 328 intersect each other to define two rows and six columns of sub-pixel regions 110 , and one TFT (not shown in FIG. 5 ) is distributed in each sub-pixel region 110 .
在每个子像素区110中的TFT远离衬底基板310的一侧设置有对应的色阻单元3300,该色阻单元3300可以为红色色阻单元331、绿色色阻单元332或者蓝色色阻单元333。其中,沿行方向,三基色色阻单元3300重复排布,沿列方向,同一列的色阻单元3300颜色相同。沿阵列基板31的厚度方向,色阻单元3300的投影与对应的子像素区的投影重叠。A corresponding color resistance unit 3300 is provided on the side of the TFT in each sub-pixel region 110 away from the base substrate 310 , and the color resistance unit 3300 may be a red color resistance unit 331 , a green color resistance unit 332 or a blue color resistance unit 333 . Wherein, along the row direction, the three primary color resist units 3300 are repeatedly arranged, and along the column direction, the color resist units 3300 in the same column have the same color. Along the thickness direction of the array substrate 31 , the projection of the color resist unit 3300 overlaps with the projection of the corresponding sub-pixel area.
在此基础上,通常为了防止漏光,将铺设在薄膜晶体管层320上方的色阻单元3300设计为:以色阻单元3300为矩形为例,每个色阻单元3300的尺寸均大于对应的子像素区110的尺寸,并且使得色阻单元3300与子像素区110的投影中心重合,由此,色阻单元3300与交叉限定出对应子像素区110的扫描线327、数据线328、子像素区110中TFT结构将均有重叠。On this basis, usually in order to prevent light leakage, the color resist units 3300 laid on the thin film transistor layer 320 are designed such that: taking the color resist unit 3300 as a rectangle as an example, the size of each color resist unit 3300 is larger than the corresponding sub-pixel The size of the area 110 is determined, and the projection center of the color resist unit 3300 and the sub-pixel area 110 are coincident, so that the color-resist unit 3300 intersects with the scan line 327, the data line 328, and the sub-pixel area 110 that define the corresponding sub-pixel area 110. The middle TFT structures will all overlap.
此时,在测量区21中进行物理特性测量时,例如,现有设备在测量一个色阻单元3300的长和宽时,不但会受到该色阻单元3300四周相邻的多个色阻单元3300边沿的干扰(例如出现歪斜、重叠等异常情况),而且还会受到下方交叉限定出对应子像素区110的扫描线327、数据线328的干扰,甚至还会受到TFT结构的干扰,导致设备确定的测量结果通常不是真实的数据,进而无法准确的确定彩色滤光层是否正常,影响生产良率。At this time, when measuring the physical properties in the measurement area 21, for example, when measuring the length and width of a color resistance unit 3300, the existing equipment will not only be affected by the adjacent color resistance units 3300 around the color resistance unit 3300. edge interference (for example, abnormal situations such as skew, overlap, etc.), and will also be interfered by the scan lines 327 and data lines 328 that cross and define the corresponding sub-pixel area 110 below, and even by the interference of the TFT structure, resulting in the device determining The measurement results are usually not real data, so it is impossible to accurately determine whether the color filter layer is normal or not, which affects the production yield.
图6是图5中的区域P中的结构示意图,图7是图6中沿AA'方向的截面示意图,图8是图6中沿BB'方向的截面示意图。FIG. 6 is a schematic view of the structure in the region P in FIG. 5 , FIG. 7 is a schematic cross-sectional view along the AA' direction in FIG. 6 , and FIG. 8 is a schematic cross-sectional view along the BB' direction in FIG. 6 .
如图5和图6所示,以色阻单元3300为第一绿色色阻单元G1为例进行说明,相对于第一绿色色阻单元G1,在第一绿色色阻单元G1的左侧分布有第一红色色阻单元R1,在第一绿色色阻单元G1的右侧分布有第一蓝色色阻单元B1,在上一行同一列分布有第二绿色色阻单元G2,在下一行同一列分布有第三绿色色阻单元G3。As shown in FIG. 5 and FIG. 6 , the color resist unit 3300 is the first green color resist unit G1 as an example for illustration. Compared with the first green color resist unit G1 , there are distributed on the left side of the first green color resist unit G1 . In the first red color resistance unit R1, a first blue color resistance unit B1 is distributed on the right side of the first green color resistance unit G1, a second green color resistance unit G2 is distributed in the same column in the upper row, and a second green color resistance unit G2 is distributed in the same column in the next row. The third green color resist unit G3.
结合图5、图6、图7和图8所示,例如设备在测量第一绿色色阻单元G1沿行方向x的长度时,需要采集第一绿色色阻单元G1沿列方向延伸的边沿g1和边沿g1'的位置,然后再确定边沿g1和边沿g1'之间的距离,即作为第一绿色色阻单元G1沿x方向的长度。但是,在采集边沿g1的时候,设备有可能采集到的是g1左侧第一红色色阻单元R1的边沿,或者是对应子像素区110的左侧的数据线327的两条边沿,或者是对应子像素区110中TFT的栅极的边沿。如图7所示,甚至有可能采集到钝化层326的边沿。同理,采集边沿g1'时,也可能受到多个边沿的干扰,从而无法采集到真实的第一绿色色阻单元G1的边沿,进而无法准确确定出第一绿色色阻单元G1沿行方向x的长度。同理,第一绿色色阻单元G1沿列方向y的长度也无法准确测量。5, 6, 7 and 8, for example, when measuring the length of the first green color resistance unit G1 along the row direction x, the device needs to collect the edge g1 extending along the column direction of the first green color resistance unit G1 and the position of the edge g1', and then determine the distance between the edge g1 and the edge g1', that is, the length of the first green color resistance unit G1 along the x direction. However, when collecting the edge g1, the device may collect the edge of the first red color resistance unit R1 on the left side of g1, or the two edges of the data line 327 on the left side of the corresponding sub-pixel area 110, or Corresponding to the edge of the gate of the TFT in the sub-pixel region 110 . As shown in FIG. 7, it is even possible to capture the edges of the passivation layer 326. Similarly, when collecting the edge g1', it may also be interfered by multiple edges, so that the real edge of the first green color resistance unit G1 cannot be collected, and thus it is impossible to accurately determine the row direction x of the first green color resistance unit G1. length. Similarly, the length of the first green color resistance unit G1 along the column direction y cannot be accurately measured.
此外,如图5和图6所示,在每个色阻单元与对应的子像素区110未重叠的区域(例如与扫描线重叠的区域)还设置有一个通孔PAS,该通孔PAS起到出气、缓冲(buffer)的作用。现有技术中,测量设备在测量第一绿色色阻单元上G1的通孔PAS沿y方向的长度时,受设备精度限制,以及受下方扫描线328的边沿、第一绿色色阻单元G1的边沿g1''、第三绿色色阻单元G3的边沿的干扰,甚至有可能受到TFT的有源层、源漏极边沿的干扰等限制,从而无法获取到第一绿色色阻单元G1上的通孔PAS沿y方向的长度。此外,由于通孔PAS的实际形状通常不规则,不是正圆形或者是正方形,这样,即使获取到第一绿色色阻单元G1上的通孔PAS沿y方向的长度也不能反应通孔PAS的真实情况。In addition, as shown in FIG. 5 and FIG. 6 , a through hole PAS is also provided in the area where each color resist unit does not overlap with the corresponding sub-pixel area 110 (for example, the area overlapped with the scan line), and the through hole PAS starts from To the role of gas, buffer (buffer). In the prior art, when the measuring device measures the length of the through hole PAS of the first green color resistance unit G1 along the y direction, it is limited by the accuracy of the device, and by the edge of the lower scan line 328 and the length of the first green color resistance unit G1. The interference of the edge g1″ and the edge of the third green color resistance unit G3 may even be limited by the interference of the active layer of the TFT, the source and drain edges, etc., so that the pass-through on the first green color resistance unit G1 cannot be obtained. The length of the hole PAS along the y-direction. In addition, since the actual shape of the through hole PAS is usually irregular, not a perfect circle or a square, so even if the length of the through hole PAS on the first green color resist unit G1 along the y direction is obtained, it cannot reflect the length of the through hole PAS. reality.
由此,在测量区中,需要一种新的结构设计方案来解决测量不准确的问题,提高彩色滤光层的测量准确度。Therefore, in the measurement area, a new structural design solution is required to solve the problem of inaccurate measurement and improve the measurement accuracy of the color filter layer.
有鉴于此,本申请提供了一种COA型阵列基板,在该COA型阵列基板的测量区中,通过去除薄膜晶体管层,仅在色阻单元和衬底基板之间设置中部开设有辅助测量通孔的辅助测量图案层,来作为测量色阻单元物理特性的参考物,从而可以减少薄膜晶体管层对色阻单元的干扰,提高色阻单元的测量准确度,进而提高彩色滤光层的物理特性的测量准确度。In view of this, the present application provides a COA-type array substrate. In the measurement area of the COA-type array substrate, by removing the thin film transistor layer, an auxiliary measurement channel is only provided in the middle between the color resistance unit and the base substrate. The auxiliary measurement pattern layer of the hole is used as a reference for measuring the physical properties of the color resist unit, which can reduce the interference of the thin film transistor layer on the color resist unit, improve the measurement accuracy of the color resist unit, and then improve the physical properties of the color filter layer. measurement accuracy.
下面结合图9~图14对本申请实施例中提供的COA型阵列基板的结构进行详细说明。图9~图12、图14为本申请实施例提供的COA型阵列基板中的测量区21的结构示意图。图13为图12所示的测量区21沿CC'方向的截面示意图。The structure of the COA-type array substrate provided in the embodiments of the present application will be described in detail below with reference to FIGS. 9 to 14 . 9 to 12 and FIG. 14 are schematic structural diagrams of the measurement area 21 in the COA type array substrate provided by the embodiments of the present application. FIG. 13 is a schematic cross-sectional view of the measurement area 21 shown in FIG. 12 along the CC' direction.
本申请实施例提供的COA型阵列基板包括衬底基板310。The COA-type array substrate provided in this embodiment of the present application includes a base substrate 310 .
以图4所示的结构为例,该COA型阵列基板还包括显示区10和环绕显示区10的周边区20,周边区20包括多个测量区21。Taking the structure shown in FIG. 4 as an example, the COA type array substrate further includes a display area 10 and a peripheral area 20 surrounding the display area 10 , and the peripheral area 20 includes a plurality of measurement areas 21 .
以显示区10为矩形为例,结合图4,相对于显示区10,测量区21可以分布在显示区10的左侧、右侧、上侧或者下侧中至少一侧。每一侧可以分布有多个测量区21且每一侧分布的测量区21的数量可以不同,而且,每个测量区21的大小和形状也可以不同,示例性的,测量区21的形状可以为正方形。Taking the display area 10 as a rectangle as an example, with reference to FIG. 4 , relative to the display area 10 , the measurement areas 21 may be distributed on at least one of the left side, the right side, the upper side or the lower side of the display area 10 . There may be a plurality of measurement areas 21 distributed on each side, and the number of measurement areas 21 distributed on each side may be different, and the size and shape of each measurement area 21 may also be different. For example, the shape of the measurement area 21 may be is square.
在衬底基板310上,每个测量区21还包括阵列排布的多个辅助测量图案层400,每个辅助测量图案层400的中部开设有辅助测量通孔410。On the base substrate 310 , each measurement area 21 further includes a plurality of auxiliary measurement pattern layers 400 arranged in an array, and an auxiliary measurement through hole 410 is opened in the middle of each auxiliary measurement pattern layer 400 .
应理解,阵列排布的多个辅助量测图案层400在衬底基板310上排成了多行多列。辅助测量图案层400的尺寸和形状可以根据需要进行设置和改变,本申请实施例对此没有任何限制。辅助测量通孔410的尺寸和形状也可以根据需要进行设置和改变,本申请实施例对此没有任何限制。It should be understood that the plurality of auxiliary measurement pattern layers 400 arranged in an array are arranged in multiple rows and columns on the base substrate 310 . The size and shape of the auxiliary measurement pattern layer 400 can be set and changed as required, which is not limited in this embodiment of the present application. The size and shape of the auxiliary measurement through hole 410 can also be set and changed as required, which is not limited in this embodiment of the present application.
此外,由于在每个辅助量测图案层400的中部需要开设辅助测量通孔410,那么,在衬底基板310所在的平面上,辅助测量图案层400的投影尺寸是大于辅助测量通孔410的投影尺寸的。In addition, since an auxiliary measurement through hole 410 needs to be opened in the middle of each auxiliary measurement pattern layer 400 , on the plane where the base substrate 310 is located, the projected size of the auxiliary measurement pattern layer 400 is larger than that of the auxiliary measurement through hole 410 projection size.
可选地,作为一种可能的实现方式,多个辅助测量图案层400由第一金属层一体构成。Optionally, as a possible implementation manner, the plurality of auxiliary measurement pattern layers 400 are integrally formed by the first metal layer.
应理解,多个辅助测量图案层400可以利用显示区10制备扫描线、TFT的栅极所用的第一金属层来进行制备,其中,该第一金属层的材料可以为铜。当然,第一金属层的材料还可以包括其他材料,本申请实施例对此不进行任何限制。It should be understood that the plurality of auxiliary measurement pattern layers 400 may be prepared by using the first metal layer used for preparing the scan lines and the gate of the TFT in the display area 10 , wherein the material of the first metal layer may be copper. Certainly, the material of the first metal layer may also include other materials, which are not limited in this embodiment of the present application.
沿衬底基板310的厚度方向,在辅助测量图案层400远离衬底基板310的一侧,测量区21还设置有多个色阻单元3300。Along the thickness direction of the base substrate 310 , on the side of the auxiliary measurement pattern layer 400 away from the base substrate 310 , the measurement area 21 is further provided with a plurality of color resistance units 3300 .
如图13所示,沿衬底基板310的厚度方向,在衬底基板310上铺设辅助测量图案层400,在辅助测量图案层400上铺设有色阻单元3300。As shown in FIG. 13 , along the thickness direction of the base substrate 310 , an auxiliary measurement pattern layer 400 is laid on the base substrate 310 , and a color resistance unit 3300 is laid on the auxiliary measurement pattern layer 400 .
可选地,色阻单元为红色色阻单元、绿色色阻单元、蓝色色阻单元中的一种。Optionally, the color resistance unit is one of a red color resistance unit, a green color resistance unit, and a blue color resistance unit.
应理解,根据需要在辅助测量图案层400远离衬底基板基板310的一侧铺设红色色阻单元、绿色色阻单元、蓝色色阻单元,该三基色色阻单元与显示区10中形成的三基色色阻单元的尺寸完全一致。It should be understood that a red color resistance unit, a green color resistance unit, and a blue color resistance unit are laid on the side of the auxiliary measurement pattern layer 400 away from the base substrate substrate 310 as required. The size of the primary color resist unit is exactly the same.
其中,在衬底基板310所在的平面上,色阻单元3300的投影中心与对应的辅助测量图案层400的投影中心、辅助测量图案层400中的辅助测量通孔的投影中心均重合,且色阻单元3300的投影尺寸大于辅助测量通孔的投影尺寸。Wherein, on the plane where the base substrate 310 is located, the projection center of the color resist unit 3300 coincides with the projection center of the corresponding auxiliary measurement pattern layer 400 and the projection center of the auxiliary measurement through hole in the auxiliary measurement pattern layer 400, and the color The projected size of the resistance unit 3300 is larger than the projected size of the auxiliary measurement through hole.
结合图9~图13所示,以色阻单元3300、辅助测量图案层400、辅助测量通孔410的形状均为矩形为例,在辅助测量图案层400具有辅助测量通孔410的基础上,当辅助测量图案层400与辅助测量通孔410的投影中心重合时,说明辅助测量通孔410位于辅助测量图案层400的正中心。With reference to FIGS. 9 to 13 , taking the shape of the color resistance unit 3300 , the auxiliary measurement pattern layer 400 , and the auxiliary measurement through hole 410 all rectangular as an example, on the basis that the auxiliary measurement pattern layer 400 has the auxiliary measurement through hole 410 , When the auxiliary measurement pattern layer 400 coincides with the projection center of the auxiliary measurement through hole 410 , it means that the auxiliary measurement through hole 410 is located at the center of the auxiliary measurement pattern layer 400 .
在此基础上,色阻单元3300的投影中心与辅助测量通孔410的投影中心重合,且色阻单元3300的投影尺寸大于辅助测量通孔410的投影尺寸时,色阻单元3300在辅助测量通孔410的四个周边与辅助测量图案层400均形成了重叠区域,并且在辅助测量通孔410对边的两侧与辅助测量图案层400形成的重叠区域应是尺寸相同的。On this basis, when the projection center of the color resistance unit 3300 coincides with the projection center of the auxiliary measurement through hole 410, and the projected size of the color resistance unit 3300 is larger than the projection size of the auxiliary measurement through hole 410, the color resistance unit 3300 is in the auxiliary measurement through hole 410. The four peripheries of the hole 410 and the auxiliary measurement pattern layer 400 all form overlapping areas, and the overlapping areas formed with the auxiliary measurement pattern layer 400 on the opposite sides of the auxiliary measurement through hole 410 should have the same size.
这样,在测量色阻单元3300的尺寸时,测量设备可以先确定出辅助测量通孔410闭合的四条边位置,然后由辅助测量通孔410的中心向四周移动,分别确定距离辅助测量通孔410的边沿最近的边,即可作为色阻单元3300的四条边。相对于现有技术,由于取消了色阻单元3300与衬底基板310之间铺设的薄膜晶体管层320,减少了很多干扰,仅通过设置辅助测量通孔410进行辅助测量,从而可以提高测量色阻单元尺寸时的准确率。In this way, when measuring the size of the color resist unit 3300 , the measuring device can first determine the positions of the four closed sides of the auxiliary measurement through hole 410 , and then move from the center of the auxiliary measurement through hole 410 to the surroundings to determine the distance from the auxiliary measurement through hole 410 respectively. The nearest edge of the edge can be used as the four edges of the color resistance unit 3300 . Compared with the prior art, since the thin film transistor layer 320 laid between the color resistance unit 3300 and the base substrate 310 is eliminated, a lot of interference is reduced, and the auxiliary measurement is performed only by setting the auxiliary measurement through hole 410, so that the measurement color resistance can be improved. Accuracy at cell size.
本申请实施例提供的一种COA型阵列基板,在测量区中,通过去除薄膜晶体管层,仅在色阻单元和衬底基板之间设置中部开设有辅助测量通孔的辅助测量图案层,来作为测量色阻单元物理特性的参考物,从而可以减少薄膜晶体管层对色阻单元的干扰,提高色阻单元的测量准确度。In the COA type array substrate provided by the embodiment of the present application, in the measurement area, by removing the thin film transistor layer, and only providing an auxiliary measurement pattern layer with auxiliary measurement through holes in the middle between the color resistance unit and the base substrate, As a reference for measuring the physical properties of the color resist unit, the interference of the thin film transistor layer on the color resist unit can be reduced, and the measurement accuracy of the color resist unit can be improved.
可选地,作为一种可能的实现方式,在位于奇数列或偶数列的辅助测量图案层400远离衬底基板310的一侧,设置有色阻单元3300。Optionally, as a possible implementation manner, a color resistance unit 3300 is provided on the side of the auxiliary measurement pattern layer 400 located in the odd-numbered or even-numbered columns away from the base substrate 310 .
或者,作为另一种可能的实现方式,在位于奇数行或偶数行的辅助测量图案层远离衬底基板310的一侧,设置有色阻单元3300。Alternatively, as another possible implementation manner, a color resistance unit 3300 is provided on the side of the auxiliary measurement pattern layer located in the odd-numbered or even-numbered rows away from the base substrate 310 .
如图9和图10所示,当仅在奇数列的辅助测量图案层400远离衬底基板310的一侧,设置有色阻单元3300时,由于偶数列的辅助测量图案层400远离衬底基板310的一侧未设置色阻单元3300,所以每两列的辅助测量图案层400之间形成了间隙,由此,降低了行方向上的色阻单元3300的密度,那么,相对于现有技术,减少了色阻单元3300之间的相互干扰,提高了检测辅助测量图案层400沿列方向延伸的对边的准确度。As shown in FIG. 9 and FIG. 10 , when the color resistance unit 3300 is provided only on the side of the auxiliary measurement pattern layers 400 in odd columns that are far away from the base substrate 310 , since the auxiliary measurement pattern layers 400 in the even columns are far away from the base substrate 310 The color resist unit 3300 is not provided on one side of the , so a gap is formed between the auxiliary measurement pattern layers 400 in every two columns, thereby reducing the density of the color resist unit 3300 in the row direction. The mutual interference between the color resist units 3300 is avoided, and the accuracy of detecting the opposite sides of the auxiliary measurement pattern layer 400 extending along the column direction is improved.
同理,仅在奇数列,或者,仅在奇数行,或者,仅在偶数行的辅助测量图案层400远离衬底基板310的一侧,设置有色阻单元3300,都可相应的提高检测色阻单元3300的物理特性的准确度。Similarly, only in odd columns, or only in odd rows, or only in even rows, on the side of the auxiliary measurement pattern layer 400 away from the base substrate 310, the color resistance unit 3300 is provided, which can correspondingly improve the detection color resistance. The accuracy of the physical characteristics of the unit 3300.
可选地,作为一种可能的实现方式,在位于奇数行奇数列和偶数行偶数列的辅助测量图案层400远离衬底基板310的一侧,设置有色阻单元。Optionally, as a possible implementation manner, a color resistance unit is provided on the side of the auxiliary measurement pattern layer 400 located in odd rows and odd columns and even rows and even columns away from the base substrate 310 .
可选地,作为另一种可能的实现方式,在位于奇数行偶数列和偶数行奇数列的辅助测量图案层400远离衬底基板310的一侧,设置有色阻单元。Optionally, as another possible implementation manner, a color resistance unit is provided on the side of the auxiliary measurement pattern layer 400 located in odd rows and even columns and even rows and odd columns away from the base substrate 310 .
如图11和图12所示,当在奇数行偶数列和偶数行奇数列的辅助测量图案层400远离衬底基板310的一侧,设置色阻单元3300时,由于奇数行奇数列和偶数行偶数列的辅助测量图案层400远离衬底基板310的一侧未设置色阻单元3300,所以针对一个设置有色阻单元3300的辅助测量图案层400,其上下左右四个边沿相邻位置处的辅助测量图案层400远离衬底基板310的一侧都未设置色阻单元3300,均形成了一定间隙,由此,在行方向上和列方向上均降低了色阻单元3300的密度,那么,相对于现有技术,降低了色阻单元3300之间的相互干扰,可以提高了检测色阻单元3300的物理特性的准确度。As shown in FIG. 11 and FIG. 12 , when the color resist unit 3300 is disposed on the side of the auxiliary measurement pattern layer 400 in odd rows and even columns and even rows and odd columns away from the base substrate 310, due to the odd rows and odd columns and even rows The color resistance unit 3300 is not provided on the side of the auxiliary measurement pattern layer 400 of the even-numbered columns away from the base substrate 310, so for an auxiliary measurement pattern layer 400 provided with the color resistance unit 3300, the auxiliary measurement pattern layer 400 at the adjacent positions of the upper, lower, left, and right edges The color resistance unit 3300 is not provided on the side of the measurement pattern layer 400 away from the base substrate 310, and a certain gap is formed. Therefore, the density of the color resistance unit 3300 is reduced in both the row direction and the column direction. In the prior art, the mutual interference between the color resist units 3300 is reduced, and the accuracy of detecting the physical characteristics of the color resist units 3300 can be improved.
可选地,作为一种可能的实现方式,辅助测量图案层400包括第一辅助测量图案层401和第二辅助测量图案层402。Optionally, as a possible implementation manner, the auxiliary measurement pattern layer 400 includes a first auxiliary measurement pattern layer 401 and a second auxiliary measurement pattern layer 402 .
第一辅助测量图案层401为远离衬底基板310的一侧设置有色阻单元3300的辅助测量图案层,第二辅助测量图案层402为远离衬底基板310的一侧未设置有色阻单元3300的辅助测量图案层。The first auxiliary measurement pattern layer 401 is an auxiliary measurement pattern layer provided with the color resistance unit 3300 on the side away from the base substrate 310 , and the second auxiliary measurement pattern layer 402 is a side away from the base substrate 310 without the color resistance unit 3300 provided. Auxiliary measurement pattern layer.
沿行方向,第一辅助测量图案层401的长度大于或者等于第二辅助测量图案层402的长度,第一辅助测量图案层401的长度大于或者等于色阻单元3300的长度。Along the row direction, the length of the first auxiliary measurement pattern layer 401 is greater than or equal to the length of the second auxiliary measurement pattern layer 402 , and the length of the first auxiliary measurement pattern layer 401 is greater than or equal to the length of the color resist unit 3300 .
应理解,由于第二辅助测量图案层402在远离衬底基板310的一侧未设置色阻单元3300,其面积大小不影响色阻单元3300的铺设,因此,第二辅助测量图案层402沿行方向的长度可以大于、等于或者小于色阻单元3300的长度,具体可以根据需要进行设置,本申请实施例对此不进行限制。It should be understood that since the color resistance unit 3300 is not disposed on the side of the second auxiliary measurement pattern layer 402 away from the base substrate 310, the area size of the color resistance unit 3300 does not affect the laying of the color resistance unit 3300. Therefore, the second auxiliary measurement pattern layer 402 is arranged along the line The length of the direction may be greater than, equal to or less than the length of the color resist unit 3300 , which may be specifically set as required, which is not limited in this embodiment of the present application.
基于此,相对于现有技术,可以减小第二辅助测量图案层402沿行方向的尺寸,从而缩小测量区21沿行方向的尺寸,节约测量区21所占用的面积。Based on this, compared with the prior art, the size of the second auxiliary measurement pattern layer 402 in the row direction can be reduced, thereby reducing the size of the measurement area 21 in the row direction and saving the area occupied by the measurement area 21 .
应理解,为了避免沿行方向排布的两个第一辅助测量图案层401在远离衬底基板310一侧铺设的色阻单元3300互相重叠,由此,沿行方向,第一辅助测量图案层401的长度可以大于或者等于色阻单元3300的长度。It should be understood that, in order to avoid the two first auxiliary measurement pattern layers 401 arranged in the row direction, the color resist units 3300 laid on the side away from the base substrate 310 overlap each other, thus, in the row direction, the first auxiliary measurement pattern layer The length of 401 may be greater than or equal to the length of the color resist unit 3300 .
可选地,如图14所示,沿列方向,第一辅助测量图案层401的长度大于或者等于色阻单元3300的长度。Optionally, as shown in FIG. 14 , along the column direction, the length of the first auxiliary measurement pattern layer 401 is greater than or equal to the length of the color resistance unit 3300 .
应理解,为了避免沿列方向排布的两个第一辅助测量图案层401在远离衬底基板310一侧铺设的色阻单元3300互相重叠,由此,沿列方向,第一辅助测量图案层401的长度可以大于或者等于色阻单元3300的长度。It should be understood that, in order to avoid the two first auxiliary measurement pattern layers 401 arranged in the column direction, the color resistance units 3300 laid on the side away from the base substrate 310 overlap each other, and thus, in the column direction, the first auxiliary measurement pattern layer The length of 401 may be greater than or equal to the length of the color resist unit 3300 .
此外,沿列方向,第二辅助测量图案层402的长度大于或者等于色阻单元3300的长度,而为了便于利用第一金属层一体构成,第一辅助测量图案层401的长度和第二辅助测量图案层402的长度可以相等。In addition, along the column direction, the length of the second auxiliary measurement pattern layer 402 is greater than or equal to the length of the color resist unit 3300, and in order to facilitate the use of the first metal layer to form an integral body, the length of the first auxiliary measurement pattern layer 401 and the second auxiliary measurement The lengths of the pattern layers 402 may be equal.
可选地,作为一种可能的实现方式,每个色阻单元3300上还设置有结构相同的两个对位通孔420。该两个对位通孔420除了起到出气、缓冲的作用之外,还起到对位作用。Optionally, as a possible implementation manner, each color resist unit 3300 is further provided with two alignment through holes 420 with the same structure. The two alignment through holes 420 not only play the role of air outlet and buffer, but also play the role of alignment.
两个对位通孔420位于色阻单元3300与对应的辅助测量图案层400的重叠区域,且两个对位通孔420分设于色阻单元3300的相对两侧。The two alignment vias 420 are located in the overlapping area of the color resist unit 3300 and the corresponding auxiliary measurement pattern layer 400 , and the two alignment vias 420 are respectively disposed on opposite sides of the color resist unit 3300 .
其中,在衬底基板310所在的平面上,对位通孔420的投影形状可以为矩形、正方形、圆形等,还可以为其他异形结构,具体可以根据需要进行设置。对位通孔420的尺寸也可以根据需要进行设置。Wherein, on the plane where the base substrate 310 is located, the projected shape of the alignment through hole 420 can be a rectangle, a square, a circle, etc., or other special-shaped structures, which can be set as required. The size of the alignment through hole 420 can also be set as required.
应理解,由于辅助测量图案层400的中部设置有辅助测量通孔410,因此,色阻单元3300与对应的辅助测量图案层400形成的重叠区域为:外边沿与色阻单元3300边沿相同,内边沿与辅助测量通孔410边沿相同的方框形区域。It should be understood that since the auxiliary measurement through hole 410 is provided in the middle of the auxiliary measurement pattern layer 400, the overlapping area formed by the color resistance unit 3300 and the corresponding auxiliary measurement pattern layer 400 is: the outer edge is the same as the color resistance unit 3300 edge, and the inner A box-shaped area with the same edge as the edge of the auxiliary measurement via 410 .
示例性的,两个对位通孔420可以分设于色阻单元3300的相对两侧,以色阻单元3300为矩形为例,两个对位通孔420可以分设于色阻单元3300短边的相对两侧(如图12所示),也可以分设于色阻单元3300长边的相对两侧。Exemplarily, the two alignment vias 420 may be located on opposite sides of the color resist unit 3300 . Taking the color resist unit 3300 as a rectangle as an example, the two alignment vias 420 may be located on the short sides of the color resist unit 3300 . The opposite sides (as shown in FIG. 12 ) can also be arranged on opposite sides of the long side of the color resistance unit 3300 .
基于此,相对于辅助测量通孔410,两个对位通孔420分别设置于色阻单元3300短边外与辅助测量图案层400重叠的区域中,或者,两个对位通孔分别设置于色阻单元3300长边外与辅助测量图案层400重叠的区域中。Based on this, relative to the auxiliary measurement through holes 410, the two alignment through holes 420 are respectively disposed in the area outside the short side of the color resistance unit 3300 that overlaps with the auxiliary measurement pattern layer 400, or the two alignment through holes are respectively disposed in the area of the auxiliary measurement pattern layer 400. In the area outside the long side of the color resist unit 3300 that overlaps with the auxiliary measurement pattern layer 400 .
应理解,由于色阻单元3300分布密度降低,并且,设置有辅助测量通孔410作为测量的参考物,因此,测量设备可以测量对位通孔420沿行方向x的长度以及沿列方向y的长度,相对于现有技术,可以提高对位通孔420的测量准确度。It should be understood that, since the distribution density of the color resistance unit 3300 is reduced, and the auxiliary measurement through holes 410 are provided as reference objects for measurement, the measurement device can measure the length of the alignment through holes 420 along the row direction x and the length along the column direction y The length, compared with the prior art, can improve the measurement accuracy of the alignment through hole 420 .
可选地,作为一种可能的实现方式,两个对位通孔420分别对应的中线与色阻单元的中线均重合。Optionally, as a possible implementation manner, the center lines corresponding to the two alignment through holes 420 respectively coincide with the center lines of the color resistance unit.
应理解,当两个对位通孔420可以分设于色阻单元3300短边(沿行方向延伸)的相对两侧时,两个对位通孔420分别沿列方向延伸的中线与色阻单元3300沿列方向延伸的中线均重合。It should be understood that when the two alignment vias 420 can be located on opposite sides of the short side (extending in the row direction) of the color resist unit 3300, the centerline of the two alignment vias 420 extending in the column direction and the color resist unit respectively The centerlines of the 3300 extending in the column direction are all coincident.
当两个对位通孔420可以分设于色阻单元3300长边(沿列方向延伸)的相对两侧时,两个对位通孔420分别沿行方向延伸的中线与色阻单元3300沿行方向延伸的中线均重合。When the two alignment vias 420 can be located on opposite sides of the long side of the color resist unit 3300 (extending along the column direction), the centerlines of the two alignment vias 420 extending in the row direction and the color resist unit 3300 along the row The midlines extending in the direction are coincident.
应理解,基于设置的对位通孔420的位置,可以通过参考对位通孔420的位置来确定色阻单元3300是否发生异常。例如,若在检测过程中发现两个对位通孔420不在预设位置(假设预设位置为:在色阻单元3300短边的相对两侧且对位通孔420的中心在色阻单元3300沿列方向的中线上),两个对位通孔420的位置相对于预设位置发生了偏移,由此,可以判断设置有对位通孔420的色阻单元3300出现异常,此时,根据对位通孔420的偏移量可以估算出色阻单元3300的偏移量。It should be understood that, based on the position of the alignment through hole 420 , it can be determined whether the color resistance unit 3300 is abnormal by referring to the position of the alignment through hole 420 . For example, if the two alignment holes 420 are found not in the preset positions during the detection process (assuming the preset positions are: on opposite sides of the short side of the color resistance unit 3300 and the center of the alignment holes 420 is in the color resistance unit 3300 ) (the center line along the column direction), the positions of the two alignment through holes 420 are shifted from the preset positions. Therefore, it can be determined that the color resist unit 3300 provided with the alignment holes 420 is abnormal. The offset of the color resistance unit 3300 can be estimated according to the offset of the alignment via 420 .
可选地,作为一种可能的实现方式,显示区10包括多个阵列排布的子像素区110,在衬底基板310所在的平面上,辅助测量通孔410的投影尺寸小于或者等于子像素区110的投影尺寸。Optionally, as a possible implementation manner, the display area 10 includes a plurality of sub-pixel areas 110 arranged in an array. On the plane where the base substrate 310 is located, the projected size of the auxiliary measurement through hole 410 is smaller than or equal to the sub-pixel area. The projected size of zone 110.
应理解,辅助测量通孔410仅用于作为测量色阻单元3300以及测量色阻单元3300上的对位通孔420的参考物,除此之外,为了减少对色阻单元3300和对位通孔420的影响,同时为了避免漏光,辅助测量通孔410的投影尺寸应小于或者等于子像素区110的投影尺寸。It should be understood that the auxiliary measurement through hole 410 is only used as a reference for measuring the color resistance unit 3300 and the alignment through hole 420 on the color resistance unit 3300. In addition, in order to avoid light leakage, the projected size of the auxiliary measurement through hole 410 should be smaller than or equal to the projected size of the sub-pixel area 110 .
上述对本申请实施例提供的COA型阵列基板的结构进行了说明,下面基于COA型阵列基板,对该COA型阵列基板的测量方法进行说明。图15为本申请实施例提供的COA型阵列基板的测量方法的流程示意图。The structure of the COA-type array substrate provided by the embodiments of the present application has been described above, and the following describes the measurement method of the COA-type array substrate based on the COA-type array substrate. FIG. 15 is a schematic flowchart of a method for measuring a COA array substrate according to an embodiment of the present application.
如图15所示,该测量方法100包括以下S110~S130。As shown in FIG. 15 , the measurement method 100 includes the following S110 to S130.
S110、测量设备在如本申请实施例提供的COA型阵列基板的测量区,确定辅助测量通孔的位置。S110. The measuring device determines the position of the auxiliary measuring through hole in the measuring area of the COA-type array substrate provided in the embodiment of the present application.
S120、测量设备根据辅助测量通孔的位置,针对辅助测量通孔的每条边沿,确定与该边沿平行且距离最近的目标边沿,并将目标边沿作为对应的色阻单元的边沿。S120. The measuring device determines, according to the position of the auxiliary measuring through hole, for each edge of the auxiliary measuring through hole, a target edge that is parallel to and closest to the edge, and uses the target edge as the edge of the corresponding color resistance unit.
其中,可以先确定辅助测量通孔的中心位置,以辅助测量通孔的中心位置向四周扩散,然后分别查找与辅助测量通孔的每条边沿相对应的目标边沿。Wherein, the center position of the auxiliary measurement through hole can be determined first, and the center position of the auxiliary measurement through hole can be diffused around, and then the target edge corresponding to each edge of the auxiliary measurement through hole can be searched separately.
S130、测量设备根据色阻单元的边沿,确定色阻单元沿行方向的长度和沿列方向的长度。S130. The measuring device determines the length of the color resist unit along the row direction and the length along the column direction according to the edge of the color resist unit.
本申请实施例提供的COA型阵列基板的测量方法,由于在该COA型阵列基板的测量区中,去除了薄膜晶体管层,仅在色阻单元和衬底基板之间设置中部开设有辅助测量通孔的辅助测量图案层,来作为测量色阻单元物理特性的参考物,消除了薄膜晶体管层对色阻单元测量的干扰,从而可以提高色阻单元的测量准确度。In the measurement method of the COA type array substrate provided by the embodiment of the present application, since the thin film transistor layer is removed in the measurement area of the COA type array substrate, only an auxiliary measurement channel is provided in the middle between the color resistance unit and the base substrate. The auxiliary measurement pattern layer of the hole is used as a reference for measuring the physical properties of the color resistance unit, which eliminates the interference of the thin film transistor layer on the measurement of the color resistance unit, thereby improving the measurement accuracy of the color resistance unit.
可选地,作为一种可能的实现方式,该方法还包括:Optionally, as a possible implementation manner, the method further includes:
测量设备根据辅助测量通孔的位置,确定色阻单元上的对位通孔沿行方向的尺寸和沿列方向的尺寸。The measuring device determines the size along the row direction and the size along the column direction of the alignment through hole on the color resist unit according to the position of the auxiliary measuring through hole.
应理解,由于消除了薄膜晶体管层对色阻单元测量的干扰,从而可以提高色阻单元上对位通孔的测量准确度。It should be understood that, since the interference of the thin film transistor layer on the measurement of the color resistance unit is eliminated, the measurement accuracy of the position via holes on the color resistance unit can be improved.
本申请实施例还提供一种测量设备,包括:处理器;Embodiments of the present application further provide a measurement device, including: a processor;
处理器执行存储在存储器中的计算机程序,以实现如本申请实施例所述的COA型阵列基板的测量方法。The processor executes the computer program stored in the memory to implement the method for measuring the COA type array substrate as described in the embodiments of the present application.
本申请实施例提供的测量设备的有益效果,与上述COA型阵列基板的测量方法有益效果相同,在此不再赘述。The beneficial effects of the measuring device provided by the embodiments of the present application are the same as those of the above-mentioned measuring method for the COA type array substrate, which will not be repeated here.
本申请实施例还提供一种计算机可读存储介质,计算机可读存储介质存储有计算机程序,计算机程度被处理器执行时实现如本申请实施例提供的COA型阵列基板的测量方法。Embodiments of the present application further provide a computer-readable storage medium, where a computer program is stored in the computer-readable storage medium, and when the computer is executed by a processor, the method for measuring a COA-type array substrate provided by the embodiments of the present application is implemented.
本申请实施例提供的计算机可读存储介质,与上述COA型阵列基板的测量方法有益效果相同,在此不再赘述。The computer-readable storage medium provided by the embodiment of the present application has the same beneficial effects as the above-mentioned method for measuring a COA-type array substrate, and details are not described herein again.
本申请实施例还提供一种液晶显示面板,包括:如本申请实施例中所述的COA型阵列基板和对置基板、以及设置于COA型阵列基板和对置基板之间的液晶层。Embodiments of the present application further provide a liquid crystal display panel, comprising: the COA-type array substrate and the opposite substrate as described in the embodiments of the present application, and a liquid crystal layer disposed between the COA-type array substrate and the opposite substrate.
本申请实施例提供的液晶显示面板还可以包括其他结构,具体可以参考上述对图2的部分描述。The liquid crystal display panel provided by the embodiments of the present application may further include other structures, and for details, reference may be made to the partial description of FIG. 2 above.
本申请实施例提供的液晶显示面板的有益效果,与上述COA型阵列基板的有益效果相同,在此不再赘述。The beneficial effects of the liquid crystal display panel provided by the embodiments of the present application are the same as the beneficial effects of the above-mentioned COA type array substrate, and are not repeated here.
本申请实施例还提供一种液晶显示装置,包括:如本申请实施例中所述的液晶显示面板和用于驱动液晶显示面板的驱动装置。Embodiments of the present application further provide a liquid crystal display device, including: the liquid crystal display panel described in the embodiments of the present application and a driving device for driving the liquid crystal display panel.
本申请实施例提供的液晶显示装置还可以包括其他结构,具体可以参考上述对图2的描述。The liquid crystal display device provided in the embodiments of the present application may further include other structures, and for details, reference may be made to the above description of FIG. 2 .
本申请实施例提供的液晶显示装置的有益效果,与上述COA型阵列基板的有益效果相同,在此不再赘述。The beneficial effects of the liquid crystal display device provided by the embodiments of the present application are the same as the beneficial effects of the above-mentioned COA type array substrate, which will not be repeated here.
以上所述,仅为本申请的具体实施方式,但本申请的保护范围并不局限榆次,任何熟悉本技术领域的技术人员在本申请揭露的技术范围内,可轻易想到变化或替换,都应涵盖在本申请的保护范围之内。因此,本申请的保护范围应以所述权利要求的保护范围为准。The above are only specific embodiments of the present application, but the protection scope of the present application is not limited to Yuci. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed in the present application. should be covered within the scope of protection of this application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims (15)

  1. 一种COA型阵列基板(31),其中,包括衬底基板(310),所述COA型阵列基板(31)还包括:显示区(10)和环绕所述显示区(10)的周边区(20),所述周边区(20)包括多个测量区(21);A COA type array substrate (31), comprising a base substrate (310), the COA type array substrate (31) further comprising: a display area (10) and a peripheral area ( 20), the peripheral area (20) includes a plurality of measurement areas (21);
    在所述衬底基板(310)上,每个测量区(21)包括阵列排布的多个辅助测量图案层(400),每个辅助测量图案层(400)的中部开设有辅助测量通孔(410);On the base substrate (310), each measurement area (21) includes a plurality of auxiliary measurement pattern layers (400) arranged in an array, and an auxiliary measurement through hole is opened in the middle of each auxiliary measurement pattern layer (400). (410);
    沿所述衬底基板(310)的厚度方向,在所述辅助测量图案层(400)远离所述衬底基板(310)的一侧,所述测量区(21)还设置有多个色阻单元(3300);Along the thickness direction of the base substrate (310), on the side of the auxiliary measurement pattern layer (400) away from the base substrate (310), the measurement area (21) is further provided with a plurality of color resistors unit(3300);
    其中,在所述衬底基板(310)所在的平面上,所述色阻单元(3300)的投影中心与对应的所述辅助测量图案层(400)的投影中心、所述辅助测量图案层(400)中的所述辅助测量通孔(410)的投影中心均重合,且所述色阻单元(3300)的投影尺寸大于所述辅助测量通孔(410)的投影尺寸。Wherein, on the plane where the base substrate (310) is located, the projection center of the color resist unit (3300) and the corresponding projection center of the auxiliary measurement pattern layer (400), the auxiliary measurement pattern layer ( The projection centers of the auxiliary measuring through holes (410) in 400) are all coincident, and the projected size of the color resistance unit (3300) is larger than the projected size of the auxiliary measuring through holes (410).
  2. 根据权利要求1所述的COA型阵列基板(31),其中,The COA type array substrate (31) according to claim 1, wherein,
    在位于奇数列或偶数列的所述辅助测量图案层(400)远离所述衬底基板(310)的一侧,设置有所述色阻单元(3300);或者,The color resistance unit (3300) is provided on the side of the auxiliary measurement pattern layer (400) located in the odd-numbered or even-numbered columns away from the base substrate (310); or,
    在位于奇数行或偶数行的所述辅助测量图案层(400)远离所述衬底基板(310)的一侧,设置有所述色阻单元(3300);或者,The color resistance unit (3300) is disposed on the side of the auxiliary measurement pattern layer (400) located in the odd-numbered or even-numbered rows away from the base substrate (310); or,
    在位于奇数行奇数列和偶数行偶数列的所述辅助测量图案层(400)远离所述衬底基板(310)的一侧,设置有所述色阻单元(3300);或者,The color resist unit (3300) is disposed on the side of the auxiliary measurement pattern layer (400) located in odd rows and odd columns and even rows and even columns away from the base substrate (310); or,
    在位于奇数行偶数列和偶数行奇数列的所述辅助测量图案层(400)远离所述衬底基板(310)的一侧,设置有所述色阻单元(3300)。The color resist unit (3300) is disposed on the side of the auxiliary measurement pattern layer (400) located in odd rows and even columns and even rows and odd columns away from the base substrate (310).
  3. 根据权利要求2所述的COA型阵列基板(31),其中,所述辅助测量图案层(400)包括第一辅助测量图案层(401)和第二辅助测量图案层(402);The COA type array substrate (31) according to claim 2, wherein the auxiliary measurement pattern layer (400) comprises a first auxiliary measurement pattern layer (401) and a second auxiliary measurement pattern layer (402);
    所述第一辅助测量图案层(401)为在远离所述衬底基板(310)的一侧设置有色阻单元(3300)的所述辅助测量图案层(400),所述第二辅助测量图案层(402)为在远离所述衬底基板(310)的一侧未设置色阻单元(3300)的所述辅助测量图案层(400);The first auxiliary measurement pattern layer (401) is the auxiliary measurement pattern layer (400) provided with a color resistance unit (3300) on a side away from the base substrate (310), and the second auxiliary measurement pattern The layer (402) is the auxiliary measurement pattern layer (400) on which the color resistance unit (3300) is not disposed on the side away from the base substrate (310);
    沿行方向,所述第一辅助测量图案层(401)的长度大于或者等于所述第二辅助测量图案层(402)的长度,所述第一辅助测量图案层(401)的长度大于或者等于所述色阻单元(3300)的长度;沿列方向,所述第一辅助测量图案层(401)的长度大于或者等于所述色阻单元(3300)的长度。Along the row direction, the length of the first auxiliary measurement pattern layer (401) is greater than or equal to the length of the second auxiliary measurement pattern layer (402), and the length of the first auxiliary measurement pattern layer (401) is greater than or equal to The length of the color resistance unit (3300); along the column direction, the length of the first auxiliary measurement pattern layer (401) is greater than or equal to the length of the color resistance unit (3300).
  4. 根据权利要求1或2所述的COA型阵列基板(31),其中,每个色阻单元(3300)上还设置有结构相同的两个对位通孔(420);The COA type array substrate (31) according to claim 1 or 2, wherein each color resist unit (3300) is further provided with two alignment through holes (420) with the same structure;
    所述两个对位通孔(420)位于所述色阻单元(3300)与对应的所述辅助测量图案层(400)的重叠区域,且所述两个对位通孔(420)分设于所述色阻单元(3300)的相对两侧。The two alignment through holes (420) are located in the overlapping area of the color resist unit (3300) and the corresponding auxiliary measurement pattern layer (400), and the two alignment through holes (420) are respectively arranged in Opposite sides of the color resist unit (3300).
  5. 根据权利要求4所述的COA型阵列基板(31),其中,所述两个对位通孔(420)分别对应的中线与所述色阻单元(3300)的中线均重合。The COA-type array substrate (31) according to claim 4, wherein the center lines corresponding to the two alignment through holes (420) respectively coincide with the center lines of the color resistance unit (3300).
  6. 根据权利要求1所述的COA型阵列基板(31),其中,所述显示区(10)包括多个阵列排布的子像素区(110);The COA-type array substrate (31) according to claim 1, wherein the display area (10) comprises a plurality of sub-pixel areas (110) arranged in an array;
    在所述衬底基板(310)所在的平面上,所述辅助测量通孔(410)的投影尺寸小于或者等于所述子像素区(110)的投影尺寸。On the plane where the base substrate (310) is located, the projected size of the auxiliary measurement through hole (410) is smaller than or equal to the projected size of the sub-pixel region (110).
  7. 根据权利要求1所述的COA型阵列基板(31),其中,所述辅助测量图案层(400)在所述衬底基板(310)所在的平面上的投影尺寸大于所述辅助测量通孔(410)在所述衬底基板(310)所在的平面上的投影尺寸。The COA type array substrate (31) according to claim 1, wherein the projected size of the auxiliary measurement pattern layer (400) on the plane where the base substrate (310) is located is larger than the auxiliary measurement through hole ( 410) the projected dimension on the plane where the base substrate (310) is located.
  8. 根据权利要求1所述的COA型阵列基板(31),其中,多个所述辅助测量图案层(400)由第一金属层(3201)一体构成。The COA type array substrate (31) according to claim 1, wherein a plurality of the auxiliary measurement pattern layers (400) are integrally formed by a first metal layer (3201).
  9. 根据权利要求8所述的COA型阵列基板(31),其中,所述第一金属层(3201)的材料包括铜。The COA type array substrate (31) according to claim 8, wherein the material of the first metal layer (3201) comprises copper.
  10. 根据权利要求1所述的COA型阵列基板(31),其中,所述色阻单元(3300)为红色色阻单元(331)、绿色色阻单元(332)、蓝色色阻单元(333)中的一种。The COA type array substrate (31) according to claim 1, wherein the color resist unit (3300) is one of a red color resist unit (331), a green color resist unit (332), and a blue color resist unit (333). a kind of.
  11. 根据权利要求4所述的COA型阵列基板(31),其中,所述对位通孔(420)在所述衬底基板(310)所在的平面上的投影形状为矩形、正方形、圆形中的任意一种。The COA type array substrate (31) according to claim 4, wherein the projected shape of the alignment through hole (420) on the plane where the base substrate (310) is located is a rectangle, a square or a circle any of the .
  12. 根据权利要求3所述的COA型阵列基板(31),其中,沿所述列方向,所述第二辅助测量图案层(402)的长度大于或等于所述色阻单元(3300)的长度。The COA type array substrate (31) according to claim 3, wherein, along the column direction, the length of the second auxiliary measurement pattern layer (402) is greater than or equal to the length of the color resist unit (3300).
  13. 一种COA型阵列基板(31)的测量方法,其中,应用于测量设备,所述方法包括:A method for measuring a COA-type array substrate (31), which is applied to a measuring device, the method comprising:
    在如权利要求1-12任一项所述的COA型阵列基板(31)的测量区(21)中,确定辅助测量通孔(410)的位置;In the measurement area (21) of the COA-type array substrate (31) according to any one of claims 1-12, the position of the auxiliary measurement through hole (410) is determined;
    根据所述辅助测量通孔(410)的位置,针对所述辅助测量通孔(410)的每条边沿,确定与所述边沿平行且距离最近的目标边沿,并将所述目标边沿作为对应的色阻单元(3300)的边沿;According to the position of the auxiliary measurement through hole (410), for each edge of the auxiliary measurement through hole (410), determine the target edge that is parallel to the edge and has the closest distance, and uses the target edge as the corresponding The edge of the color resistance unit (3300);
    根据所述色阻单元(3300)的边沿,确定所述色阻单元(3300)沿行方向的长度和沿列方向的长度。According to the edge of the color resist unit (3300), the length of the color resist unit (3300) along the row direction and the length along the column direction are determined.
  14. 根据权利要求13所述的测量方法,其中,所述方法还包括:The measurement method according to claim 13, wherein the method further comprises:
    根据所述辅助测量通孔(410)的位置,确定所述色阻单元(3300)上的对位通孔(420)沿行方向的尺寸和沿列方向的尺寸。According to the position of the auxiliary measurement through hole (410), the dimension along the row direction and the dimension along the column direction of the alignment through hole (420) on the color resist unit (3300) are determined.
  15. 一种液晶显示面板(30),其中,包括如权利要求1-12任一项所述的COA型阵列基板(31)和对置基板(32)、以及设置于所述COA型阵列基板(31)和所述对置基板(32)之间的液晶层(33)。A liquid crystal display panel (30), comprising the COA-type array substrate (31) and the opposite substrate (32) according to any one of claims 1-12, and the COA-type array substrate (31) disposed on the COA-type array substrate (31) ) and the liquid crystal layer (33) between the opposite substrate (32).
PCT/CN2021/143429 2021-03-23 2021-12-30 Coa type array substrate and measurement method therefor, and liquid crystal display panel WO2022199192A1 (en)

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