WO2022198516A1

WO2022198516A1 - Clamp and diffusion apparatus

Info

Publication number: WO2022198516A1
Application number: PCT/CN2021/082799
Authority: WO
Inventors: 任国威; 范宜灏; 王斌
Original assignee: 台湾积体电路制造股份有限公司; 台积电(中国)有限公司
Priority date: 2021-03-23
Filing date: 2021-03-24
Publication date: 2022-09-29
Also published as: CN213212125U

Abstract

A clamp and a diffusion apparatus, wherein the clamp is used for assembling an injection tube and a diffusion furnace, and the clamp comprises a mounting base (1) and a positioning component (2) arranged on the mounting base (1), the positioning component (2) comprising positioning members (21) and a connecting member (22) connected to one another, the positioning members (21) being arranged as a pair on two sides of the connecting member (22), the connecting member (22) and the positioning members (21) on both sides defining a guiding groove (23), and the guiding groove (23) guiding and positioning an injection tube. The present clamp can increase the effective operating time of the apparatus, and can prevent the phenomenon of particles being produced by collision during the diffusion process, reducing the probability of the silicon wafers being scrapped.

Description

Fixtures and Diffusion Devices

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims the priority of Chinese Patent Application No. 202120586247.1, filed on March 23, 2021, entitled "Clamp and Diffusion Device", the entire contents of which are incorporated herein by reference.

technical field

The present application relates to the technical field of semiconductor manufacturing, and in particular, to a jig and a diffusion device.

Background technique

Diffusion device is an important device in the semiconductor production process. It is mainly used for element doping of semiconductors. That is, the silicon wafer is placed in a diffusion furnace. The gas containing the diffusion source is diffused into the diffusion furnace from the injection pipe, and the diffusion source and the silicon wafer occur. The chemical reaction that enables the diffusion process and formation changes the type, concentration and distribution of impurities within the wafer. For example, through a diffusion process, a P-type silicon wafer is doped with pentavalent elements such as phosphorus, and phosphorus replaces the position of silicon atoms in the lattice to form an N-type semiconductor, thereby forming a PN junction.

During the assembly process of the diffusion device or the diffusion process, the device may not be installed firmly, which may cause damage to the diffusion device, and may cause damage to the silicon wafer, resulting in waste of the silicon wafer.

SUMMARY OF THE INVENTION

The present application provides a fixture and a diffusion device, which can improve the effective operation time of the device, and can prevent the phenomenon of particles being generated by collision during the diffusion process, and reduce the scrapping probability of silicon wafers.

In a first aspect, the present application proposes a fixture for assembling a spray tube and a diffusion furnace, the fixture includes a mounting seat; and a positioning component, which is arranged on the mounting seat, the positioning component includes a positioning member and a connecting member that are connected to each other, the positioning The pieces are arranged on both sides of the connecting piece in pairs, the connecting piece and the positioning pieces on both sides define guide grooves, and the guide grooves guide and position the injection pipe.

According to the embodiment of the first aspect of the present application, the clamp further includes a fastening member disposed on the mounting seat, the position of the fastening member relative to the mounting seat is adjustable, and the fastening member is connected with the positioning member.

According to any of the foregoing embodiments of the first aspect of the present application, the fastening component includes a fastening portion, the fastening portion is a fastening groove or a fastening hole, and the mounting seat is provided with a groove or a hole matching the fastening portion.

According to any of the foregoing embodiments of the first aspect of the present application, the shape of the guide groove is adapted to the outer contour of the injection pipe.

According to any of the foregoing embodiments of the first aspect of the present application, the number of positioning components is multiple, the multiple positioning components are arranged at intervals along the extending direction of the mounting seat, at least two guide grooves have different shapes, and guide grooves of different shapes They are used for positioning and guiding different sizes of spray pipes.

According to any of the foregoing embodiments of the first aspect of the present application, the mounting seat is an arc-shaped sheet-like structure, at least part of the positioning member protrudes from the mounting seat, and the cross-sectional area of the guide groove gradually decreases in the direction away from the mounting seat .

According to any of the foregoing embodiments of the first aspect of the present application, the positioning member further includes a guide member, the guide member is connected to a side of the positioning member away from the direction of the connecting member, and is used to guide the injection pipe to move to the guide groove.

According to any of the foregoing embodiments of the first aspect of the present application, the guide piece and the positioning piece are connected in a smooth transition.

According to any of the foregoing embodiments of the first aspect of the present application, an included angle between the mounting seat and the guide groove is 80°˜90°.

In a second aspect, the present application proposes a diffusion device, which includes a diffusion furnace; and a fixture according to any embodiment of the first aspect, wherein a mounting seat of the fixture is mounted on the diffusion furnace, and a positioning component of the fixture is located in the diffusion furnace, and the fixture is positioned in the diffusion furnace. The guide grooves of the components extend toward the inside of the diffusion furnace.

According to the embodiment of the present application, when the auxiliary injection pipe is installed in the diffusion furnace, the mounting seat is installed on the diffusion furnace, the positioning part has a guide groove for accommodating the injection pipe, the guide groove guides and positions the injection pipe, and the injection pipe can be Accurate positioning, which can ensure a safe distance between the injection pipe and the inner wall of the diffusion furnace, and avoid the collision between the injection pipe and the inner wall of the diffusion furnace during the installation process; during the diffusion process, the guide groove can clamp the injection pipe to prevent the injection pipe from vibrating This leads to positional deviation and stable structure, thereby reducing the possibility of collision between the injection tube and the diffusion furnace during the diffusion process; improving the effective operation time of the equipment; and preventing the collision of particles and other phenomena, reducing the scrapping probability of silicon wafers.

Description of drawings

The features, advantages and technical effects of the exemplary embodiments of the present application will be described below with reference to the accompanying drawings.

1 is one of the perspective views of a clamp provided according to an embodiment of the present application;

2 is a second perspective view of a clamp provided according to an embodiment of the present application;

In the drawings, the drawings are not necessarily drawn to actual scale.

Among them, each reference mark in the figure is:

1 - Mounting seat;

11-the first installation hole; 12-the second installation hole;

2-positioning member, 21-positioning piece; 22-connecting piece; 23-guide groove; 24-guide piece; 241-first guide plate; 242-second guide plate.

3- Fastening part, 31- Fastening part.

Detailed ways

The embodiments of the present application will be described in further detail below with reference to the accompanying drawings and examples. The following detailed description of the embodiments and the accompanying drawings are used to illustrate the principles of the present application by way of example, but should not be used to limit the scope of the present application, that is, the present application is not limited to the described embodiments.

In the description of this application, it should be noted that, unless otherwise specified, the meaning of "plurality" is two or more; the terms "upper", "lower", "left", "right", "inner", " The orientation or positional relationship indicated by "outside" is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the indicated device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a reference to the present application. Application restrictions. Furthermore, the terms "first," "second," etc. are used for descriptive purposes only and should not be construed to indicate or imply relative importance. "Vertical" is not strictly vertical, but within the allowable range of errors. "Parallel" is not strictly parallel, but within the allowable range of errors.

In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it may be a fixed connection or a connectable connection. Detachable connection, or integral connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

It will be understood that, in describing the structure of a component, when a layer or region is referred to as being "on" or "over" another layer or region, it can be directly on the other layer or region, or Other layers or regions are also included between it and another layer, another region. And, if the part is turned over, that layer, one area, will be "below" or "beneath" another layer, another area.

For better understanding of the present application, the embodiments of the present application are described below with reference to FIGS. 1 to 2 .

In a first aspect, an embodiment of the present application provides a clamp. 1 and 2 are schematic structural diagrams of a clamp provided according to an embodiment of the present application. The jig can be used to assemble the injection tube and the diffusion furnace, as shown in Figs.

The mounting base 1 , as a base for installation and support, can be used to mount other components on the mounting base 1 . Install the mounting base 1 on the diffusion furnace to realize the assembly of the fixture and the diffusion furnace. It can be understood that a second mounting hole 12 may be formed on the mounting seat 1 , and a corresponding hole or groove may be formed on the diffusion furnace to facilitate accurate installation of the diffusion furnace and the mounting seat 1 .

The positioning member 2 is installed on the mounting base 1, and the positioning member 2 is used for positioning and guiding the injection pipe, so as to prevent the injection pipe from being displaced during installation or diffusion. Specifically, the positioning member 2 may include a positioning member 21 and a connecting member 22, the positioning member 21 and the connecting member 22 are connected, and there are two positioning members 21, and the two positioning members 21 are respectively disposed on both sides of the connecting member 22. The connecting member 22 and the positioning pieces 21 on both sides of the connecting piece 22 define a guide groove 23, the guide groove 23 can accommodate the injection pipe, and in the axial direction of the injection pipe, the guide groove 23 can guide the injection pipe; in the radial direction of the injection pipe , the two positioning members 21 can play the role of positioning the injection pipe, preventing the injection pipe from being offset in the radial direction.

According to the embodiment of the present application, when the auxiliary injection pipe is installed in the diffusion furnace, the mounting base 1 is installed on the diffusion furnace, the positioning member 2 has a guide groove 23 for accommodating the injection pipe, and the guide groove 23 guides and positions the injection pipe, The injection pipe can be accurately positioned, thereby ensuring a safe distance between the injection pipe and the inner wall of the diffusion furnace, avoiding the collision between the injection pipe and the inner wall of the diffusion furnace during the installation process; during the diffusion process, the guide groove 23 can be in the diameter of the injection pipe. To clamp the injection pipe, prevent the injection pipe from vibrating and cause position deviation, and the structure is stable, thereby reducing the possibility of collision between the injection pipe and the diffusion furnace during the diffusion process, thereby improving the effective operation time of the equipment; and can prevent collisions. Particles and other phenomena, reducing the scrap probability of silicon wafers.

According to the embodiment of the present application, the shape of the guide groove 23 is adapted to the outer contour of the injection pipe, which is convenient for the positioning member 2 to accurately position the injection pipe. It can be understood that there may be a gap between the positioning member 2 and the injection pipe. The positioning part 2 and the injection pipe can be made of different materials. For example, the positioning part 2 is made of metal, and the injection pipe is made of quartz. The thermal expansion coefficients of the two are different. During the diffusion process, due to the need for heating and the high heating temperature, positioning The part 2 and the injection pipe have different degrees of deformation, and the gap can prevent the damage caused by extrusion between the positioning part 2 and the injection pipe.

In some embodiments, the number of positioning members 2 may be set to multiple, the multiple positioning members 2 are arranged at intervals along the extending direction of the mounting base 1, and the multiple positioning members 2 may be respectively used for positioning and guiding the same or different specifications. jet tube. For example, there are two positioning members 2, and the two positioning members 2 are used for positioning and guiding the injection pipes of the same specification. For another example, there are three positioning members 2, one positioning member 2 is used for positioning and guiding the injection pipe with a length of 1050 mm, another positioning member 2 is used for positioning and guiding the injection pipe with a length of 800 mm, and another positioning member 2 is used for positioning and guiding the injection pipe with a length of 800 mm. For positioning and guiding spray pipes with a length of 300mm. The injection pipes of different lengths are positioned and guided, and the diffusion source gases in different injection pipes are diffused at different positions of the diffusion furnace respectively, which facilitates the uniform diffusion of the gas and improves the uniformity of the diffusion. In order to be compatible with injection pipes of different specifications, a plurality of positioning members 2 can also be set to different specifications, and the shape of the guide grooves 23 of the positioning member 2 is adapted to the outer contour of the injection pipe, that is, the guide grooves 23 of the positioning member 2 The size of the cross-sectional area is different, and of course the length of the guide groove 23 can also be different.

In some embodiments, the mounting base 1 may be configured as an arc-shaped sheet-like structure, and at least part of the positioning member 2 protrudes from the mounting base 1 . It can be understood that the arc-shaped sheet-like structure can be an arc-shaped plate matched with the furnace mouth of the diffusion furnace.

The guide groove 23 is used for positioning and guiding the injection pipe, and the diameter of the injection pipe is gradually reduced near the outlet end of the injection pipe. level decreased.

As an example, the thickness of the connecting piece 22 is gradually increased in the direction away from the mounting base 1 . By adjusting the thickness of the connecting piece 22 , the shape of the guide groove 23 is set to match the outer contour of the injection pipe.

As another example, the positioning pieces 21 arranged in pairs are gradually approached in the direction away from the mounting base 1 , and the shape of the guide groove 23 is set to match the outer contour of the injection pipe by adjusting the distance between the two positioning pieces 21 . adaptation. For example, the two positioning members 21 may be of the same thickness, and the two positioning members 21 are gradually approached in a direction away from the mounting base 1 . For another example, the two positioning members 21 may be of different thicknesses, and the thickness of the positioning members 21 increases step by step along the direction away from the mounting base 1 , so that the positioning members 21 are gradually approached in the direction away from the mounting base 1 .

According to the embodiment of the present application, the side of the positioning member 21 away from the direction of the connecting member 22 can be set as a smooth transition to prevent the positioning member 21 from scratching the injection pipe.

According to the embodiment of the present application, a guide member 24 may also be provided, the guide member 24 is connected to the side of the positioning member 21 away from the direction of the connecting member 22 , and the guide member 24 is used to guide the injection pipe to move to the guide groove 23 .

The guide 24 may be provided as one, or as two. When one guide piece 24 is provided, the spray pipe can slide down to the guide groove 23 along the guide piece 24 . When there are two guide members 24, each guide member 24 is connected to the positioning member 21 respectively, and both guide members 24 can play a guiding role.

As an example, the guide member 24 may include a first guide plate 241 and a second guide plate 242 , the first guide plate 241 and the second guide plate 242 are connected, and the first guide plate 241 and the second guide plate 242 are directed toward the connecting member 22 . One side is connected with the side of the positioning member 21 away from the direction of the connecting member 22 . The thickness of the first guide plate 241 gradually decreases in the direction away from the connecting member 22 , that is, the first guide plate 241 is an inclined structure, which can provide a guiding effect for the injection pipe.

In some embodiments, the guide member 24 and the positioning member 21 may be connected with a smooth transition to prevent the connection position from scratching the injection pipe.

In some embodiments, the guide member 24 and the positioning member 21 can be integrally provided, which is convenient for preparation and installation.

According to the embodiment of the present application, a fastening member 3 may also be installed on the mounting base 1 , and the position of the fastening member 3 relative to the mounting base 1 can be adjusted. The fastening part 3 is connected with the positioning part 2, and the connection mode can be fixed connection. When the fixture is installed in the diffusion furnace, the installation position of the installation seat 1 and the diffusion furnace is fixed, and the installation position of the fastening member 3 is adjusted relative to the installation seat 1, and the installation position of the positioning member 2 is adjusted together. It is convenient to flexibly adjust the installation position of the positioning component 2 according to the actual production situation. It can be understood that the fastening part 3 can be arranged at the bottom of the mounting seat 1. During installation, the fastening part 3 is located outside the furnace mouth of the diffusion furnace, so that the positioning part 2 and the installation seat can be fastened by adjusting the position of the fastening part 3. 1.

In some embodiments, the fastening member 3 includes a fastening portion 31, and the fastening portion 31 may be a fastening groove or a fastening hole. The mounting base 1 is provided with a slot or a hole matching with the fastening portion 31 .

As an example, when the fastening portion 31 is provided as a fastening groove, a corresponding groove may be provided on the mounting base 1 . During installation, the groove and the fastening groove of the mounting seat 1 can be fastened with fasteners such as screws, and the relative position of the fastening part 3 and the mounting seat 1 can be adjusted. Adjust the installation position of the fastening member 3.

As another example, when the fastening portion 31 is configured as a fastening groove, the mounting seat 1 may be provided with a corresponding hole. For example, the hole of the mounting seat 1 is the first mounting hole 11, and the holes may be provided in multiples. Multiple holes provide multiple mounting locations. By adjusting the relative positions of the fastening part 3 and the mounting seat 1 , the fastening part 3 can be accurately positioned and installed through the mutual cooperation between the fastening groove and the hole of the mounting seat 1 .

As yet another example, when the fastening portion 31 is provided as a fastening hole, the number of fastening holes may be one, two or three, etc., and a corresponding groove may be provided on the mounting seat 1 . The relative positions of the fastening member 3 and the mounting seat 1 are adjusted, and the mounting fastening portion 31 is flexibly adjusted through the mutual cooperation between the fastening hole and the groove of the mounting seat 1 .

As another example, when the fastening portion 31 is provided as a fastening hole, the number of fastening holes may be one, two, or three, etc., and the mounting base 1 may be provided with a plurality of corresponding holes, through the fastening holes and The holes of the mounting seat 1 cooperate with each other to accurately locate and install the fastening component 3 .

According to the embodiment of the present application, the included angle between the mounting seat 1 and the guide groove 23 may be 80°˜90°. Within this range, the maximum stress that the injection pipe can bear is relatively high, and the positioning and Under the guidance, there is a safe distance between the injection pipe and the furnace wall of the diffusion furnace, and the injection pipe does not touch the wafer. In particular, when the angle between the mounting seat 1 and the guide groove 23 is 89°, corresponding to the angle between the mounting seat 1 and the guide groove 23, the corner of the injection pipe is correspondingly set to 89°, which can reduce the size of the injection pipe. rigidity.

In a second aspect, an embodiment of the present application provides a diffusion device, where the diffusion device includes a diffusion furnace and the fixture of the above-mentioned embodiment of the first aspect. The mounting seat 1 of the fixture is mounted on the diffusion furnace, the positioning member 2 of the fixture is located in the diffusion furnace, and the guide groove 23 of the positioning member 2 extends toward the inside of the diffusion furnace.

As a comparative example, only the injection pipe and the diffusion furnace are fastened and installed, but its positioning and installation are difficult, and the gap between the top of the injection pipe and the inner wall of the diffusion furnace cannot be guaranteed.

According to the diffusion device provided by the embodiment of the present application, the injection pipe can be guided and positioned, the collision between the injection pipe and the furnace wall of the diffusion furnace can be avoided, the generation of particles can be prevented, the structure of the diffusion device is stable, and the effective operation time of the diffusion device can be improved; and The maximum stress that the jet tube can withstand is higher. At the same time, it also avoids the problems of low installation efficiency and unstable installation caused by manual installation, which can improve installation efficiency and reduce equipment maintenance costs.

In some embodiments, the diffusion device may further include a retaining ring, and the retaining ring may connect the injection tube and the diffusion furnace. The retaining ring can further improve the stability of the injection pipe and increase its maximum ultimate stress.

On the basis of establishing the force analysis model, the inventor analyzes the force situation of the injection pipe through finite element analysis. Specifically: the injection pipe is made of quartz material, the fixture is made of metal material, the digital 3D model of the injection pipe is imported into the finite element analysis software ANSYS, the gravity of the vertical injection pipe and the gravity of the fixture are loaded, the reverse thrust of the fixing ring is loaded, and the inner surface of the injection pipe is loaded. The force of the gas on the injection pipe; obtain and mark the most concentrated area of stress in the digital 3D model of the injection pipe, and obtain the ultimate stress of the injection pipe.

The process of finite element analysis is as follows:

Load the vertical injection pipe gravity and the gas in the injection pipe to carry out stress analysis on the injection pipe; continue to load the gravity of the fixture for stress analysis; continue to load the force of the fixing ring to carry out stress analysis.

The gravity of the injection pipe loaded at 80° and the force of the gas in the injection pipe on the injection pipe are analyzed for stress; the gravity of the fixture is continued to be loaded for stress analysis;

The finite element analysis results are shown in Table 1. On the basis of being clamped by the fixture of the first aspect of the injection pipe, the vertical maximum ultimate stress is 1.07× ^{10 6} Pa, and the 80° maximum ultimate stress is 1.57× ^{10 6} Pa. In practical applications, the structural design of the fixture is reasonable and maintenance is convenient.

Based on the co-fixing of the clamp and the fixing ring of the first aspect of the injection pipe, the vertical maximum ultimate stress is 1.10× ^{10 6} Pa, and the 80° maximum ultimate stress is 1.60× ^{10 6} Pa. It can be seen that the retaining ring helps to increase the maximum ultimate stress of the injection pipe.

Table 1

In addition, the inventors further analyzed the force of the injection pipe through multi-factor analysis experiments. On the basis of considering the above-mentioned static forces, the inventor also considered the thermodynamic and kinetic forces, and analyzed the temperature and the ventilation rate as variables respectively. When the temperature changes, the thermal expansion coefficient of the quartz injection tube and the metal fixture Differently, the thermal stress to which the quartz jet tube is subjected changes. When the ventilation rate of the gas changes, the gas force on the quartz injection tube changes. Through experiments, the inventor found that the three types of injection pipes in Table 2 are relatively balanced in force and have a higher maximum ultimate stress, which meets the production requirements.

Please refer to Table 2, when the temperature is 400℃, the ventilation rate is 4000slm, and the length of the injection pipe is 300mm or less, or when the temperature is 620℃, the ventilation rate is 6000slm, the length of the injection pipe is 800mm, or the temperature is 700℃, the ventilation rate is 800mm. When the amount is 8000slm and the length of the injection pipe is 1080mm, the force is relatively balanced and the maximum ultimate stress is high.

Table 2

It can be seen from the analysis of Tables 1 and 2 that the clamp according to the embodiment of the present application has a high stress tolerance, simple structure and easy installation; and the specification of the clamp and the specification of the injection pipe can be flexibly selected according to the actual production situation.

While the application has been described with reference to preferred embodiments, various modifications may be made and equivalents may be substituted for parts thereof without departing from the scope of the application, particularly, provided that there is no structural conflict , each technical feature mentioned in each embodiment can be combined in any manner. The present application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

A jig for assembling a spray tube and a diffusion furnace, the jig comprising:

the mount; and

The positioning member is arranged on the mounting seat, the positioning member includes a positioning member and a connecting member that are connected to each other, the positioning members are arranged on both sides of the connecting member in pairs, and the connecting member and the connecting member located on both sides are arranged in pairs. The positioning member defines a guide groove, and the guide groove guides and positions the injection pipe.
The clamp according to claim 1, wherein the clamp further comprises a fastening member provided on the mounting seat, the position of the fastening member is adjustable relative to the mounting seat, and the fastening member is connected with the mounting seat. Locate component connections.
The clamp according to claim 2, wherein the fastening part comprises a fastening part, the fastening part is a fastening groove or a fastening hole, and the mounting seat is provided with a matching part for the fastening part slot or hole.
The jig of claim 1, wherein the shape of the guide groove is adapted to the outer contour of the injection pipe.
The clamp according to claim 4, wherein the number of the positioning parts is multiple, the multiple positioning parts are arranged at intervals along the extending direction of the mounting seat, and at least two of the guide grooves have different shapes, The guide grooves of different shapes are respectively used for positioning and guiding the injection pipes of different specifications.
The clamp according to claim 4, wherein the mounting seat is an arc-shaped sheet-like structure, at least a part of the positioning member protrudes from the mounting seat, and the cross-sectional area of the guide groove is away from the mounting seat. The direction of the seat decreases step by step.
The jig according to claim 1, wherein the positioning part further comprises a guide piece, the guide piece is connected with a side of the positioning piece away from the direction of the connecting piece, and is used for guiding the injection pipe to move to the desired position. the guide groove.
The clamp according to claim 7, wherein the guide member and the positioning member are connected in a smooth transition.
The clamp according to claim 1, wherein an included angle between the mounting seat and the guide groove is 80°˜90°.
A diffusing device comprising:

a diffusion furnace; and

The fixture according to any one of claims 1 to 9, wherein the mounting seat of the fixture is mounted on the diffusion furnace, the positioning member of the fixture is located in the diffusion furnace, and the guide groove of the positioning member faces the diffusion furnace. extend inside the diffusion furnace.