WO2022190482A1 - 不純物検出支援装置および不純物検出支援方法 - Google Patents
不純物検出支援装置および不純物検出支援方法 Download PDFInfo
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/06—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a liquid
- G01N27/07—Construction of measuring vessels; Electrodes therefor
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/06—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a liquid
- G01N27/08—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a liquid which is flowing continuously
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- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
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- G—PHYSICS
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- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/22—Measuring resistance of fluids
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- H—ELECTRICITY
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- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G11/00—Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
- H01G11/14—Arrangements or processes for adjusting or protecting hybrid or EDL capacitors
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- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/06—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a liquid
- G01N27/08—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a liquid which is flowing continuously
- G01N27/10—Investigation or analysis specially adapted for controlling or monitoring operations or for signalling
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- the second electrode 116 is provided at least on the outer wall (peripheral surface) of the rod-shaped body 118 .
- the second electrode 116 may be provided on the entire outer wall of the rod-shaped body 118, or may be provided on a part thereof.
- the second electrode 116 may be a part of the area in the flow direction of the test liquid, or a part of the area in the circumferential direction of the rod-shaped body 118 .
- the entire rod-shaped body 118 may be made of an insoluble metal or the like, and the entire rod-shaped body 118 may constitute the second electrode 116 . That is, the second electrode 116 may be provided only on the surface of the outer wall of the rod-shaped body 118, or may be provided inside the outer wall.
- the first electrode 114 and the second electrode 116 are inspected in a space extending between an arbitrary first position 102a of the pipe 102 and a second position 102b shifted in the extending direction of the pipe 102 from the first position 102a. It is arranged so that an alternating voltage can be applied to the liquid, or an alternating current can be superimposed.
- First electrode 114 and second electrode 116 of the present embodiment are elongated and extend in the extending direction of pipe 102 . Therefore, the pair of electrodes extend parallel to the axis of the pipe 102 with a gap in the radial direction of the pipe 102 .
- the pair of electrodes are arranged such that the distance between the pair of electrodes is equal at any position in the extending direction of the pipe 102 .
- the calculation unit 110 uses the measurement result of the measurement unit 108 to calculate the resistance of the test liquid.
- the calculator 110 calculates the resistance of the test liquid by an AC impedance method.
- step S104 the determination of whether or not the difference between one resistance value and the reference value exceeds the threshold value is the determination of whether or not the liquid to be inspected contains conductive impurities.
- the present invention is not limited to this, and for a plurality of resistance values obtained by changing the frequency of the AC voltage or AC current, it is determined whether or not the difference from the reference value exceeds the threshold value, and the plurality of determination results are integrated. may be used to determine whether conductive impurities are contained.
- the pipe 102 is provided in the coating device 1 including the coating die 2 for applying the liquid to be inspected to the object to be coated 16 and the tank 6 for storing the liquid to be inspected.
- the pipe 102 is provided in a circulating device or a conveying device for the liquid to be inspected.
- the impurity detection process can be performed in the process of conveying the test liquid from the tank 6 to the coating die 2 .
- impurity detection support device 100 in the feed pipe 10 and the die supply pipe 14 of the coating apparatus 1, impurity detection processing can be performed on the liquid to be inspected until just before the liquid to be inspected is applied to the object to be coated 16. be able to. As a result, it is possible to further reduce the possibility of contamination of the electronic device with foreign matter, and to further improve the performance of the electronic device.
- the first electrode 114 extends in a direction intersecting with the extending direction of the pipe 102 at the first position 102a.
- the second electrode 116 extends in a direction intersecting with the extending direction of the pipe 102 at the second position 102b. That is, each of the pair of electrodes is filter-shaped and extends in the radial direction of the pipe 102 .
- the area in which the conductive impurities are energized can be expanded in the direction intersecting the flow direction of the liquid to be inspected, so that the detection efficiency of the conductive impurities can be enhanced.
- An impurity detection support method according to item 12.
- the impurity detection support method 13
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Abstract
Description
図1は、実施の形態1に係る不純物検出支援装置100が設けられた塗工装置1の模式図である。図1では、各装置の構成要素の一部を機能ブロックとして描いている。これらの機能ブロックは、ハードウェア構成としてはコンピュータのCPUやメモリをはじめとする素子や回路で実現され、ソフトウェア構成としてはコンピュータプログラム等によって実現される。これらの機能ブロックがハードウェア、ソフトウェアの組合せによっていろいろなかたちで実現できることは、当業者には理解されるところである。
実施の形態2は、第1電極114および第2電極116の形状および配置を除き、実施の形態1と共通の構成を有する。以下、本実施の形態について実施の形態1と異なる構成を中心に説明し、共通する構成については簡単に説明するか、あるいは説明を省略する。
[項目1]
被検査液が流れる配管(102)と、
配管(102)内に配置される第1電極(114)および第2電極(116)であって、配管(102)の第1位置(102a)と、第1位置(102a)から配管(102)の延在方向にずれた第2位置(102b)との間に広がる空間内の被検査液に交流電圧を印加可能に、または交流電流を重畳可能に配置される第1電極(114)および第2電極(116)と、
第1電極(114)および第2電極(116)の間に交流電圧を印加するか交流電流を重畳する電源部(106)と、
交流電圧の印加により第1電極(114)および第2電極(116)の間に発生する電流を測定するか、交流電流の重畳により第1電極(114)および第2電極(116)の間に発生する電圧を測定する測定部(108)と、
測定部(108)の測定結果を用いて、被検査液に導電性不純物が含まれるか否かの判定の指標となる被検査液の抵抗を算出する算出部(110)と、を備える、
不純物検出支援装置(100)。
[項目2]
算出部(110)が算出した抵抗に応じて、被検査液に導電性不純物が含まれるか否かを判定する判定部(112)を備える、
項目1に記載の不純物検出支援装置(100)。
[項目3]
電源部(106)は、印加する電圧あるいは重畳する電流の周波数を連続的あるいは段階的に変化させ、
測定部(108)は、異なる周波数における電流あるいは電圧を測定し、
算出部(110)は、各周波数における電流あるいは電圧から複数の抵抗を算出し、
判定部(112)は、複数の抵抗に応じて導電性不純物が含まれるか否かを判定する、
項目2に記載の不純物検出支援装置。
[項目4]
第1電極(114)および第2電極(116)は、延在方向に延びる長尺状である、
項目1乃至3のいずれかに記載の不純物検出支援装置(100)。
[項目5]
第1電極(114)は、配管(102)に設けられ、
第2電極(116)は、配管(102)内に挿通され且つ配管(102)と間隔をあけて配置される棒状体(118)に設けられる、
項目4に記載の不純物検出支援装置(100)。
[項目6]
棒状体(118)は、配管(102)の軸心に対し平行に延在する、
項目5に記載の不純物検出支援装置。
[項目7]
棒状体(118)は、中空体、中実体または筒状メッシュである、
項目5または6に記載の不純物検出支援装置(100)。
[項目8]
第1電極(114)は、第1位置(102a)において延在方向と交わる方向に広がり、
第2電極(116)は、第2位置(102b)において延在方向と交わる方向に広がる、
項目1乃至3のいずれかに記載の不純物検出支援装置(100)。
[項目9]
第1電極(114)および第2電極(116)は、メッシュシート、スリットシートまたは多孔質シートである、
項目8に記載の不純物検出支援装置(100)。
[項目10]
被検査液は、溶媒と、電極活物質および導電助剤の少なくとも一方とを含有する電極用スラリーである、
項目1乃至9のいずれかに記載の不純物検出支援装置(100)。
[項目11]
配管(102)は、被塗工体(16)に被検査液を塗布する塗工装置(1)、被検査液の循環装置、および被検査液の搬送装置の少なくとも1つに設けられる、
項目1乃至10のいずれかに記載の不純物検出支援装置(100)。
[項目12]
被検査液を配管(102)に流し、
配管(102)の第1位置(102a)と、第1位置(102a)から配管(102)の延在方向にずれた第2位置(102b)との間に広がる空間内の被検査液に交流電圧を印加するか交流電流を重畳し、
交流電圧の印加により発生する電流を測定するか、交流電流の重畳により発生する電圧を測定し、
測定の結果を用いて、被検査液に導電性不純物が含まれるか否かの判定の指標となる被検査液の抵抗を算出することを含む、
不純物検出支援方法。
[項目13]
算出した抵抗に応じて、被検査液に導電性不純物が含まれるか否かを判定することを含む、
項目12に記載の不純物検出支援方法。
[項目14]
交流電圧の印加あるいは交流電流の重畳において、交流電圧あるいは交流電流の周波数を連続的あるいは段階的に変化させ、
測定において、異なる周波数における電流あるいは電圧を測定し、
算出において、各周波数における電流あるいは電圧から複数の抵抗を算出し、
判定において、複数の抵抗に応じて導電性不純物が含まれるか否かを判定する、
項目13に記載の不純物検出支援方法。
Claims (14)
- 被検査液が流れる配管と、
前記配管内に配置される第1電極および第2電極であって、前記配管の第1位置と、前記第1位置から前記配管の延在方向にずれた第2位置との間に広がる空間内の前記被検査液に交流電圧を印加可能に、または交流電流を重畳可能に配置される前記第1電極および前記第2電極と、
前記第1電極および前記第2電極の間に交流電圧を印加するか交流電流を重畳する電源部と、
前記交流電圧の印加により前記第1電極および前記第2電極の間に発生する電流を測定するか、前記交流電流の重畳により前記第1電極および前記第2電極の間に発生する電圧を測定する測定部と、
前記測定部の測定結果を用いて、前記被検査液に導電性不純物が含まれるか否かの判定の指標となる前記被検査液の抵抗を算出する算出部と、を備える、
不純物検出支援装置。 - 前記算出部が算出した抵抗に応じて、前記被検査液に前記導電性不純物が含まれるか否かを判定する判定部を備える、
請求項1に記載の不純物検出支援装置。 - 前記電源部は、印加する交流電圧あるいは重畳する交流電流の周波数を連続的あるいは段階的に変化させ、
前記測定部は、異なる周波数における電流あるいは電圧を測定し、
前記算出部は、各周波数における電流あるいは電圧から複数の抵抗を算出し、
前記判定部は、前記複数の抵抗に応じて前記導電性不純物が含まれるか否かを判定する、
請求項2に記載の不純物検出支援装置。 - 前記第1電極および前記第2電極は、前記延在方向に延びる長尺状である、
請求項1乃至3のいずれか1項に記載の不純物検出支援装置。 - 前記第1電極は、前記配管に設けられ、
前記第2電極は、前記配管内に挿通され且つ前記配管と間隔をあけて配置される棒状体に設けられる、
請求項4に記載の不純物検出支援装置。 - 前記棒状体は、前記配管の軸心に対し平行に延在する、
請求項5に記載の不純物検出支援装置。 - 前記棒状体は、中空体、中実体または筒状メッシュである、
請求項5または6に記載の不純物検出支援装置。 - 前記第1電極は、前記第1位置において前記延在方向と交わる方向に広がり、
前記第2電極は、前記第2位置において前記延在方向と交わる方向に広がる、
請求項1乃至3のいずれか1項に記載の不純物検出支援装置。 - 前記第1電極および前記第2電極は、メッシュシート、スリットシートまたは多孔質シートである、
請求項8に記載の不純物検出支援装置。 - 前記被検査液は、溶媒と、電極活物質および導電助剤の少なくとも一方とを含有する電極用スラリーである、
請求項1乃至9のいずれか1項に記載の不純物検出支援装置。 - 前記配管は、被塗工体に前記被検査液を塗布する塗工装置、前記被検査液の循環装置、および前記被検査液の搬送装置の少なくとも1つに設けられる、
請求項1乃至10のいずれか1項に記載の不純物検出支援装置。 - 被検査液を配管に流し、
前記配管の第1位置と、前記第1位置から前記配管の延在方向にずれた第2位置との間に広がる空間内の前記被検査液に交流電圧を印加するか交流電流を重畳し、
前記交流電圧の印加により発生する電流を測定するか、前記交流電流の重畳により発生する電圧を測定し、
前記測定の結果を用いて、前記被検査液に導電性不純物が含まれるか否かの判定の指標となる前記被検査液の抵抗を算出することを含む、
不純物検出支援方法。 - 算出した前記抵抗に応じて、前記被検査液に前記導電性不純物が含まれるか否かを判定することを含む、
請求項12に記載の不純物検出支援方法。 - 前記交流電圧の印加あるいは前記交流電流の重畳において、前記交流電圧あるいは前記交流電流の周波数を連続的あるいは段階的に変化させ、
前記測定において、異なる周波数における電流あるいは電圧を測定し、
前記算出において、各周波数における電流あるいは電圧から複数の抵抗を算出し、
前記判定において、前記複数の抵抗に応じて前記導電性不純物が含まれるか否かを判定する、
請求項13に記載の不純物検出支援方法。
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US20110025306A1 (en) * | 2009-08-03 | 2011-02-03 | Microfier, Inc. | Method and Apparatus for the Purification and Analytical Evaluation of Highly Purified Liquids |
WO2015019634A1 (ja) * | 2013-08-07 | 2015-02-12 | 三菱電機株式会社 | 防食性能劣化検知センサー、給湯暖房システムおよび設備機器 |
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US20110025306A1 (en) * | 2009-08-03 | 2011-02-03 | Microfier, Inc. | Method and Apparatus for the Purification and Analytical Evaluation of Highly Purified Liquids |
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