WO2022190443A1 - 脱脂炉 - Google Patents

脱脂炉 Download PDF

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Publication number
WO2022190443A1
WO2022190443A1 PCT/JP2021/037382 JP2021037382W WO2022190443A1 WO 2022190443 A1 WO2022190443 A1 WO 2022190443A1 JP 2021037382 W JP2021037382 W JP 2021037382W WO 2022190443 A1 WO2022190443 A1 WO 2022190443A1
Authority
WO
WIPO (PCT)
Prior art keywords
gas
degreasing
combustor
monitor
furnace
Prior art date
Application number
PCT/JP2021/037382
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
優 田中
Original Assignee
株式会社島津製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社島津製作所 filed Critical 株式会社島津製作所
Priority to KR1020237013885A priority Critical patent/KR102814929B1/ko
Priority to CN202180063130.8A priority patent/CN116157642A/zh
Priority to JP2023505091A priority patent/JP7405301B2/ja
Publication of WO2022190443A1 publication Critical patent/WO2022190443A1/ja

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any of groups F27B1/00 - F27B15/00
    • F27B17/0016—Chamber type furnaces
    • F27B17/0083—Chamber type furnaces with means for circulating the atmosphere
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any of groups F27B1/00 - F27B15/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D17/00—Arrangements for using waste heat; Arrangements for using, or disposing of, waste gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D17/00—Arrangements for using waste heat; Arrangements for using, or disposing of, waste gases
    • F27D17/10—Arrangements for using waste heat
    • F27D17/102—Arrangements for using waste heat including pyrolising the waste gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D19/00—Arrangements of controlling devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D21/00—Arrangement of monitoring devices; Arrangement of safety devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D19/00—Arrangements of controlling devices
    • F27D2019/0006—Monitoring the characteristics (composition, quantities, temperature, pressure) of at least one of the gases of the kiln atmosphere and using it as a controlling value

Definitions

  • the present invention relates to a degreasing furnace.
  • the degreasing furnace disclosed in Patent Literature 1 below includes a furnace main body for storing an object to be degreased and heating means for heating the object to be degreased.
  • the gas generated by degreasing is heated, decomposed and converted into gas such as carbon dioxide.
  • an object of the present invention is to provide a degreasing furnace capable of suppressing solidification and adhesion of the gas generated by degreasing when measuring the gas generated from the object to be degreased during degreasing.
  • the degreasing furnace according to the present invention has the following configuration.
  • the degreasing furnace of the present invention comprises a furnace body for accommodating a material to be degreased, a combustor for burning while exhausting gas from the furnace body, a gas monitor for detecting the gas in the combustor, the combustor and the gas.
  • a pipe connecting with a monitor and a heater for heating at least one of the gas monitor and the pipe are included.
  • the present invention by heating at least one of the gas monitor and the heater of the piping, it is possible to prevent the gas from solidifying and adhering, and preventing the gas from being undetectable by the gas monitor.
  • FIG. 1 is a diagram showing the configuration of a degreasing furnace of the present invention
  • FIG. 4 is a graph showing detection results by FTIR when ethyl methacrylate is contained in gas.
  • a degreasing furnace 10 of the present application shown in FIG. 1 includes a furnace body 14 in which an object 12 to be degreased is stored, a saturated steam generator 18 for generating saturated steam, and a superheater 20 for generating superheated steam.
  • Object 12 to be degreased includes a ceramic compact. Ceramics include nitride ceramics (aluminum nitride, silicon nitride, etc.), carbide ceramics (silicon carbide, boron carbide, etc.), and oxide ceramics (alumina, zirconium, etc.).
  • the material to be degreased 12 contains a binder. The binder is mixed with the ceramics when the object 12 to be degreased is molded. As the object 12 to be degreased is heated, the binder is released as a gas from the object 12 to be degreased. Polybutyl methacrylate, polyvinyl alcohol, methyl cellulose, vinyl acetate, polyethylene glycol and the like are used as resins for the binder, and other lubricants, plasticizers and dispersants are used.
  • the furnace body 14 is made of a heat-resistant material such as SUS310S or SUS316L.
  • the furnace main body 14 has a container shape, and the object 12 to be degreased is accommodated in the inner space 22 thereof.
  • a door is provided at an arbitrary position of the furnace body 14, and the door is opened and closed when the object 12 to be degreased is taken in and out.
  • the interior space 22 of the furnace body 14 may be provided with a shelf 24 for arranging the object 12 to be degreased.
  • the furnace body 14 is formed with a supply port 26 and an exhaust port 28 . Superheated steam is supplied to the internal space 22 of the furnace body 14 from the supply port 26 .
  • the gas in the furnace body 14 is exhausted from the exhaust port 28, and the gas contains components generated when the object 12 to be degreased is degreased.
  • a saturated steam generator 18 is provided to supply saturated steam to the superheater 20 .
  • the saturated steam generator 18 includes a boiler that boils liquid such as pure water to generate saturated steam.
  • the liquid to be boiled can be stored in any container such as a tank, and the liquid can be used. can be used.
  • a superheater 20 is a device for generating superheated steam from saturated steam.
  • the superheater 20 include a contact superheater, a radiant superheater, a suspended superheater, a plate-type superheater, and a horizontal superheater.
  • the superheater 20 comprises a long tube through which saturated steam flows. Saturated steam flowing through the long pipe is heated to become superheated steam.
  • the generated superheated steam is supplied to the furnace body 14 .
  • the superheated steam at this time is a gas composed of colorless and transparent water (H 2 O) obtained by heating the saturated steam of 100° C. at normal pressure to a higher temperature.
  • the temperature of the superheated steam is 200°C or higher, preferably 500°C or higher, more preferably 600-1200°C.
  • the furnace body 14 and the superheater 20, and the saturated steam generator 18 and the superheater 20 are connected by pipes 30 and 32. Since high-temperature superheated steam flows through the pipe 30, the pipe 30 is preferably made of a heat-resistant material.
  • a valve may be attached to each of the pipes 30 and 32 to control the flow rate of saturated steam and superheated steam by opening and closing the valve.
  • thermometer 36 for measuring the ambient temperature of the interior space 22 of the furnace body 14 .
  • Thermometer 36 utilizes a thermocouple thermometer. It is determined by design which position of the furnace body 14 the temperature is to be measured, and the number of thermometers 36 is determined accordingly. The measured temperature controls the supply of superheated steam to the furnace body 14 . Therefore, the present application includes a controller 38 for controlling the superheater 20 and the saturated steam generator 18 .
  • the temperature of the thermometer 36 is input, and a control device 38 is provided to control the amount of superheated steam supplied to the furnace body 14 and the temperature of the superheated steam.
  • the control device 38 includes an arithmetic circuit such as a CPU (Central Processing Unit) or a PLC (Programmable Logic Controller).
  • the controller 38 controls the saturated steam generator 18 and the superheater 20, and controls the valves of the pipes 30 and 32.
  • the degreasing furnace 10 of the present application has a gas passage in the furnace body 14 and includes a combustor 40 for burning the gas.
  • a combustor 40 is connected to the exhaust port 28 of the furnace body 14 .
  • the combustor 40 includes passages 44 formed by insulation 42 and heating devices (not shown).
  • the heating device may be an electric heater, gas burner or heavy oil burner. Gas released from the object 12 to be degreased enters the passage 44 from the furnace body 14 and passes through the passage 44 .
  • a heating device heats the gas and decomposes or converts it to a gas such as carbon dioxide.
  • the gas that has passed through the passage 44 is exhausted from the exhaust port 48 .
  • a gas monitor 50 is provided to detect gases in the passage 44 of the combustor 40 .
  • the gas monitor 50 is FTIR (Fourier transform infrared spectrometer), GC (gas chromatograph), FID (flame ionization detector), TOC meter (total organic carbon meter), or the like.
  • the progress of degreasing can be obtained by detecting the presence or absence of a predetermined gas with the gas monitor 50 . When the predetermined gas is detected, the degreasing is completed, and when the gas is no longer detected after that, the degreasing is completed.
  • the combustor 40 and the gas monitor 50 are connected by pipes 52 and 54 .
  • the piping includes a first piping 52 and a second piping 54 .
  • the first pipe 52 is a passage for flowing gas from the passage 44 of the combustor 40 to the gas monitor 50
  • the second pipe 54 is a passage for flowing gas from the gas monitor 50 to the passage 44 of the combustor 40 .
  • the gas in the passage 44 of the combustor 40 flows through the first pipe 52, the gas monitor 50 and the second pipe 54 in order and returns to the passage 44 of the combustor 40 again.
  • the temperature change in the internal space 22 of the furnace body 14 is large, and there is a risk of damaging the gas monitor 50 .
  • the passage 44 of the combustor 40 is preheated to burn the gas at a constant temperature, and the temperature of the gas entering the gas monitor 50 can be easily controlled.
  • the gas monitor 50 can easily detect gas accurately.
  • Heaters 56 and 58 are provided to heat the first pipe 52 and the second pipe 54 .
  • the heaters 56 and 58 are heating wires or the like arranged outside the first pipe 52 and the second pipe 58 .
  • Heaters 56 and 58 heat the first pipe 52 and the second pipe 54 so that the gas passing through the first pipe 52 and the second pipe 54 does not drop below a certain temperature. The gas can be prevented from adhering to the inner surfaces of the first pipe 52 and the second pipe 54 and solidifying.
  • the gas monitor 50 is also equipped with a heater 60.
  • a heater 60 is attached to a pipe through which gas flows and a portion 62 for measuring gas in the gas monitor 50 . By heating them with the heater 60 , the gas can be prevented from adhering and solidifying in the gas monitor 50 .
  • the heaters 56, 58, and 60 control the temperature of the gas to a predetermined value or higher.
  • a control unit (not shown) for controlling the heaters 56, 58, 60 is provided, and the temperatures of the heaters 56, 58, 60 are stored in association with the type of gas so that the gas does not solidify,
  • the controller may change the temperatures of the heaters 56 , 58 , 60 according to the type of gas released from the object 12 to be degreased.
  • the temperature of the pipes 52, 54 and the portion 62 where the gas is measured should be about 300°C.
  • the object 12 to be degreased is accommodated in the internal space 22 of the furnace body 14 .
  • the object 12 to be degreased is a molding made of nitride ceramics.
  • the saturated steam generator 18 heats the liquid to generate saturated steam and supplies the saturated steam to the superheater 20 .
  • the superheater 20 generates superheated steam from saturated steam.
  • Superheated steam is supplied to the furnace body 14 .
  • the object 12 to be degreased is degreased by the superheated steam.
  • Part of the gas flows from the first pipe 52 to the gas monitor 50 during (3) above.
  • the gas is returned to the combustor 40 through the second pipe 54 .
  • the first pipe 52 , the gas passage of the gas monitor 50 , the detecting portion 62 and the second pipe 58 are heated by heaters 56 , 58 , 60 . Therefore, the temperature of the gas is lowered, and the components contained in the gas can be prevented from adhering to the first pipe 52, the gas passage of the gas monitor 50, the detecting portion 62 and the second pipe 54 and solidifying.
  • the gas returned from the gas monitor 50 to the combustor 40 through the second pipe 54 is burned and changed into carbon dioxide and the like.
  • the gas data detected by the gas monitor 50 is sent to the controller 38 .
  • the controller 38 may control the superheater 20 from that data to adjust the temperature of the interior space 22 of the furnace body 14 .
  • the degreasing of the object 12 to be degreased may be controlled.
  • FIG. 2 shows detection results when the gas monitor 50 is a Fourier transform infrared spectrometer (FTIR) and the gas contains ethyl methacrylate. Since the wavenumber is determined by the functional groups contained in the gas, it can be seen that whether or not the gas is generated is detected based on the intensity of the set wavenumber. When the degreasing is finished, the gas is no longer detected. The end of degreasing can be determined by detection of gas by the gas monitor 50 .
  • FTIR Fourier transform infrared spectrometer
  • the components contained in the gas can be prevented from adhering to the pipes 52, 54 and the gas monitor 50, and the gas can be detected by the gas monitor 50 more accurately. Since the gas can be accurately detected by the gas monitor 50, degreasing can be controlled more accurately.
  • Either one of the pipes 52, 54 and the gas monitor 50, or any combination of the two may be heated by the heater.
  • the gas flow path in the gas monitor 50 is short and the temperature of the gas is difficult to drop, the gas may not be heated by the gas monitor 50 .
  • the degreasing furnace uses superheated steam
  • the degreasing furnace 10 of the present application is not limited to a configuration that uses superheated steam.
  • an inert gas may be introduced into the furnace main body 14 to allow preheating. Therefore, a gas source of inert gas may be provided and the temperature of the inert gas may be raised in the superheater 20 . After raising the temperature of the object 12 to be degreased with inert gas, superheated steam is introduced into the furnace body 14 .
  • the temperature of the object 12 to be degreased is low at the beginning of degreasing, when superheated steam is supplied first, condensation may form on the surface of the object 12 to be degreased, deteriorating the object 12 to be degreased.
  • the surface of the object 12 to be degreased will not be dewed when the superheated steam is introduced. can be degreased.
  • thermometer 36 The temperature of the thermometer 36 input to the control device 38, the control status data of the superheater 20 and the like performed by the control device 38, and the like may be transmitted to a predetermined computer via a network. The status of degreasing can be confirmed remotely. Also, the data transmitted from the control device 38 may be recorded in the server.
  • a degreasing furnace comprises a furnace body that stores an object to be degreased, a combustor that burns while exhausting gas from the furnace body, and a gas monitor that detects the gas in the combustor. , a pipe connecting the combustor and a gas monitor, and a heater for heating at least one of the gas monitor and the pipe.
  • the piping includes a first piping that supplies gas from the combustor to the gas monitor, and a second piping that returns gas from the gas monitor to the combustor, and the heater has a heater for heating the first pipe.
  • the heater further has a heater that heats the second pipe.
  • the heater further includes a heater that heats at least one of a pipe provided inside the gas monitor through which the gas passes and a measurement unit that measures the gas.
  • (Section 5) Further includes a heater control unit that controls the temperature of the heater according to the type of gas in the combustor.
  • the temperature of the heater can be set to a temperature that does not solidify according to the type of gas, so it is possible to more reliably suppress solidification and adhesion of gas.
  • the present invention it is possible to provide a degreasing furnace capable of suppressing solidification and adhesion of the gas generated by degreasing when measuring the gas generated from the object to be degreased during degreasing.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
PCT/JP2021/037382 2021-03-10 2021-10-08 脱脂炉 WO2022190443A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020237013885A KR102814929B1 (ko) 2021-03-10 2021-10-08 탈지로
CN202180063130.8A CN116157642A (zh) 2021-03-10 2021-10-08 脱脂炉
JP2023505091A JP7405301B2 (ja) 2021-03-10 2021-10-08 脱脂炉

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021038005 2021-03-10
JP2021-038005 2021-03-10

Publications (1)

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WO2022190443A1 true WO2022190443A1 (ja) 2022-09-15

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PCT/JP2021/037382 WO2022190443A1 (ja) 2021-03-10 2021-10-08 脱脂炉

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JP (1) JP7405301B2 (enrdf_load_stackoverflow)
KR (1) KR102814929B1 (enrdf_load_stackoverflow)
CN (1) CN116157642A (enrdf_load_stackoverflow)
WO (1) WO2022190443A1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025033063A1 (ja) * 2023-08-08 2025-02-13 株式会社島津製作所 脱脂炉、脱脂炉の温度制御方法および脱脂炉の温度制御プログラム

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6448597U (enrdf_load_stackoverflow) * 1987-09-21 1989-03-24
JP2004123524A (ja) * 2002-09-11 2004-04-22 Murata Mfg Co Ltd 熱処理装置、雰囲気ガス中の炭素成分検出方法、およびセラミック電子部品の製造方法
JP2004231463A (ja) * 2003-01-30 2004-08-19 Ngk Insulators Ltd 焼成炉および非酸化物セラミックス焼結体の製造方法
WO2015037356A1 (ja) * 2013-09-11 2015-03-19 株式会社 村田製作所 熱処理方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10153560A (ja) * 1996-11-25 1998-06-09 Rigaku Corp 金属粉末成形方法のための脱脂条件決定方法
US20070054229A1 (en) 2003-11-17 2007-03-08 Ngk Insulators, Ltd. Furnace and degreasing method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6448597U (enrdf_load_stackoverflow) * 1987-09-21 1989-03-24
JP2004123524A (ja) * 2002-09-11 2004-04-22 Murata Mfg Co Ltd 熱処理装置、雰囲気ガス中の炭素成分検出方法、およびセラミック電子部品の製造方法
JP2004231463A (ja) * 2003-01-30 2004-08-19 Ngk Insulators Ltd 焼成炉および非酸化物セラミックス焼結体の製造方法
WO2015037356A1 (ja) * 2013-09-11 2015-03-19 株式会社 村田製作所 熱処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025033063A1 (ja) * 2023-08-08 2025-02-13 株式会社島津製作所 脱脂炉、脱脂炉の温度制御方法および脱脂炉の温度制御プログラム

Also Published As

Publication number Publication date
KR20230071788A (ko) 2023-05-23
JPWO2022190443A1 (enrdf_load_stackoverflow) 2022-09-15
KR102814929B1 (ko) 2025-05-29
CN116157642A (zh) 2023-05-23
JP7405301B2 (ja) 2023-12-26

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