WO2022176802A1 - 生体情報測定装置 - Google Patents
生体情報測定装置 Download PDFInfo
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- WO2022176802A1 WO2022176802A1 PCT/JP2022/005644 JP2022005644W WO2022176802A1 WO 2022176802 A1 WO2022176802 A1 WO 2022176802A1 JP 2022005644 W JP2022005644 W JP 2022005644W WO 2022176802 A1 WO2022176802 A1 WO 2022176802A1
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- light
- biological information
- location
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- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/145—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue
- A61B5/14532—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue for measuring glucose, e.g. by tissue impedance measurement
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- A61B5/1455—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue using optical sensors, e.g. spectral photometrical oximeters
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- A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
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- A61B2562/02—Details of sensors specially adapted for in-vivo measurements
- A61B2562/0233—Special features of optical sensors or probes classified in A61B5/00
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- A61B5/103—Detecting, measuring or recording devices for testing the shape, pattern, colour, size or movement of the body or parts thereof, for diagnostic purposes
- A61B5/11—Measuring movement of the entire body or parts thereof, e.g. head or hand tremor, mobility of a limb
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- A—HUMAN NECESSITIES
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
Definitions
- the present invention relates to a biological information measuring device capable of non-invasively measuring in vivo information (biological information).
- a blood vessel position is detected based on an image received by a light receiving unit by causing a plurality of light emitting elements to emit light.
- a biological information measuring device capable of selecting a light receiving position for measurement and a light receiving position for reference in a light receiving element. The biological information measuring device selects such that the blood vessel site is located between the irradiation position and the light receiving position for measurement, and selects so that there is no blood vessel between the irradiation position and the light receiving position for reference, The transmitted light transmitted through the vascular site to be measured and the reference transmitted light transmitted through the non-vascular region are obtained, and the relative transmittance of the transmitted light transmitted through the vascular site to be measured to the reference transmitted light is calculated. It is what you ask for.
- Non-Patent Documents 1 and 2 a near-infrared high-sensitivity CMOS (Complementary Metal Oxide Semiconductor: Complementary Metal Oxide Semiconductor) is disclosed as means for detecting the blood component concentration of a living body with high accuracy.
- CMOS Complementary Metal Oxide Semiconductor: Complementary Metal Oxide Semiconductor
- a non-invasive blood glucose measurement using an image sensor is described.
- images of glucose solution dripping, convection, and diffusion in physiological saline in a cell were captured by irradiating light with a wavelength of 1050 nm, which is one of the absorption peaks of glucose. Experiments are described and suggested using this image to determine glucose concentration.
- Non-Patent Document 1 and Non-Patent Document 2 describe a specific measurement method and a measuring device for actually non-invasively measuring the blood glucose level in the living body, although the glucose solution in the cell is imaged.
- the present invention has been made in view of the above problems, and provides both information and a highly accurate reference for obtaining biological information of a measurement target by a single light emission and light reception without requiring light emission and light reception in multiple stages.
- An object of the present invention is to provide a biological information measuring device capable of acquiring and measuring biological information.
- the present inventors have found that by using a sensor with a specific number or more of saturated charges, it is possible to achieve high accuracy by single light emission and light reception without the need for multiple times of light emission and light reception. I found that I could get a reference.
- the present inventors have found that by using a sensor with a saturated charge amount of 1 million or more, it is possible to appropriately image both the measurement target location and the reference location by one-time light emission and light reception. As a result, we found that both the information for obtaining the biological information of the measurement target and the highly accurate reference can be obtained at once.
- a biological information measurement apparatus includes a light source that emits light, receives light that is transmitted, reflected, or scattered within a living body from the light emitted from the light source, and outputs information according to the amount of light received.
- an image sensor having a plurality of pixels arranged in an array in a two-dimensional plane and having a saturated charge number of one million or more; and measurement of biometric information based on the information obtained by the image sensor.
- a specific point selection unit that selects a target measurement point and a reference point different from the measurement point, and uses information obtained by the image sensor at the reference point as a reference to determine the measurement point and a biometric information acquisition unit that acquires the biometric information from the information obtained by the image sensor.
- the SN ratio of the image sensor may be 60 dB or more.
- the light source may be a surface emitting light emitting diode.
- the light source irradiates uniform and even light on a plane perpendicular to the light irradiation direction, and the reference accuracy can be improved.
- the in-plane variation of the surface-emitting type light-emitting diode may be 10% or less.
- the light source can more reliably irradiate uniform and even light on a plane perpendicular to the light irradiation direction.
- an optical element having a transverse mode conversion function may be arranged between the light source and the image sensor.
- the light emitted from the light source can be converted into uniform and even light on the plane perpendicular to the light irradiation direction.
- the optical element may be an aspherical lens.
- the light emitted from the light source can be reliably converted into uniform and even light on the plane perpendicular to the light irradiation direction.
- the optical element may be a diffractive optical element.
- the light emitted from the light source can be reliably converted into uniform and even light on the plane perpendicular to the light irradiation direction.
- the optical element may be a quartz parallel plate.
- the light emitted from the light source can be reliably converted into uniform and even light on the plane perpendicular to the light irradiation direction.
- the specific portion selection unit selects a portion including the biological information to be measured from the two-dimensional image information formed from the information obtained by the image sensor. It may be selected as a location, and a location that does not include the measurement target of the biometric information may be selected as the reference location.
- the measurement target location may be a location that includes a blood vessel in the living body
- the reference location may be a location that does not include the blood vessel in the living body
- extravascular information can be used as a reference when acquiring biological information contained in intravascular blood.
- the biological information may be a blood sugar level in blood in a living body.
- FIG. 1 is a schematic pixel cross-sectional view of a CMOS image sensor that can be preferably used in an embodiment of the present invention, and is a schematic cross-sectional view showing a cross section of a pixel array;
- FIG. 4 is a cross-sectional view taken along line AA of FIG. 3, and is a schematic pixel cross-sectional enlarged view of a photodiode and its periphery.
- FIG. 10 is a diagram showing a finger joint selected as a blood vessel imaging target in relation to the biological information measuring apparatus according to the present invention; 7 is a captured image of the finger joint shown in FIG. 6.
- FIG. 10 is a diagram showing a finger joint selected as a blood vessel imaging target in relation to the biological information measuring apparatus according to the present invention.
- 7 is a captured image of the finger joint shown in FIG. 6.
- a biological information measuring device according to an embodiment of the present invention will be described below with reference to the drawings.
- a biological information measuring apparatus includes a light source that emits light, receives light emitted from the light source that is transmitted, reflected, or scattered within a living body, and outputs information corresponding to the amount of received light.
- a light source that emits light, receives light emitted from the light source that is transmitted, reflected, or scattered within a living body, and outputs information corresponding to the amount of received light.
- an image sensor having a plurality of pixels arranged in an array in a two-dimensional plane and having a saturated charge number of 1 million or more; and a reference point different from the measurement target point, and the information obtained from the image sensor at the reference point is used as a reference, and the information obtained from the image sensor at the measurement target point is used as a reference.
- a biometric information acquisition unit that acquires biometric information from the information obtained.
- FIG. 1 is a block diagram showing an example of the configuration of a biological information measuring device according to this embodiment.
- the light source 11 is a device that emits light that is used to measure biological information (for example, the blood sugar level of blood in the living body).
- biometric information is acquired from information acquired at a measurement target location using a reference signal acquired at a reference location.
- the sensor 13 can receive the light from the light source 11 under the same conditions at any location (any pixel portion) on the light receiving surface.
- the light source 11 is preferably capable of irradiating uniform and even light on a plane perpendicular to the light irradiation direction, and is preferably a surface-emitting light-emitting diode, for example.
- the surface emitting diode referred to here also includes a laser diode having reflecting mirrors formed on both end faces or one end face.
- a surface emitting diode is preferable for this application because it is relatively easy to form a wide and uniform light distribution with one diode chip.
- the light distribution emitted from each chip of the edge-emitting type light emitting diode is limited to a narrow range, it is necessary to arrange the chips in an array in order to form a wide light distribution.
- the light source 11 in the present embodiment is preferably capable of irradiating light with a large amount of light (high illuminance), and for example, a surface-emitting light-emitting diode with a maximum output of about 1 W may be used. Also, the light source 11 may be configured to switch between a plurality of light wavelengths.
- an optical element 11a having a lateral mode conversion function may be provided in order to further improve the accuracy of surface emission.
- the optical element 11a has a function of converting the in-plane light distribution (lateral mode) of the surface light emitted by the surface light emitting diode to a more uniform and even distribution.
- the optical element 11a is not particularly limited, for example, an aspherical lens, a diffractive optical element, a quartz parallel plate, or the like can be used.
- the irradiation direction of the light emitted by the light source 11 (if the optical element 11a is provided, the direction of the light whose transverse mode is converted by the optical element 11a)
- a subject S which is a living body, is placed in the irradiation direction).
- the light applied to the subject S is transmitted, reflected, or scattered within the subject S.
- the sensor 13 is arranged at a position capable of receiving light transmitted, reflected, or scattered within the subject S.
- the sensor 13 has a function of outputting an electrical signal corresponding to the received light.
- a CMOS image sensor capable of outputting an electrical signal that can be finally processed as image information from the received light is used. can be used.
- a CMOS image sensor applicable to the present invention preferably satisfies specific conditions, the details of which will be described later.
- a filter 12 that transmits only light of a specific wavelength may be provided in front of the light receiving portion of the sensor 13 .
- the wavelength of light transmitted by the filter 12 can be appropriately determined according to the characteristics of the biological information to be measured. For example, when the light source 11 is configured to emit light of a single wavelength, by providing a filter 12 that transmits only the light of the same wavelength as the light emitted by the light source 11, the sensor 13 in the subsequent stage can detect the light source. Only light of the same wavelength as the light emitted by 11 may reach. Further, in order to further narrow down the light wavelength, the transmission characteristics of the filter 12 may be adjusted so that only the light of a part of the wavelength band included in the light emitted from the light source 11 reaches.
- the signal processing unit 14 is configured to process information output from the sensor 13 .
- the signal processing unit 14 has a function of performing image processing based on information output from the sensor 13 and a function of outputting image information to the display unit 15 and the data storage unit 16 .
- the signal processing unit 14 has a specific part selection unit 14a and a biological information acquisition unit 14b.
- the specific portion selection unit 14a has a function of selecting a measurement target portion as a measurement target of the biological information of the subject S and a reference portion different from the measurement target portion based on the information obtained by the sensor 13. is doing. More specifically, the specific portion selection unit 14a selects an image region containing biological information to be measured as a measurement target portion in the image information formed based on the information output by the sensor 13, and It has a function of selecting an image region that does not contain certain biometric information as a reference location. As an example, when the biological information to be measured is the blood sugar level in the blood in the living body, the specific part selection unit 14a selects an image region including blood vessel parts in the living body from the image information as the measurement target part. However, it is possible to select an image region that does not include a blood vessel site in the living body as a reference location.
- the method of selecting the measurement target location and the reference location by the specific location selection unit 14a is not particularly limited.
- the user may refer to the image information displayed on the display unit 15 and use the operation unit 17 to select an image area including biometric information and an image area not including biometric information.
- the specific location selection unit 14a can select the measurement target location and the reference location from one piece of image information. You can choose a reference point. For example, the specific location selection unit 14a may provisionally select measurement target locations and reference locations from each of a plurality of pieces of image information, and determine the selected frequently selected locations as measurement target locations and reference locations. good. Further, the specific location selection unit 14a may select a plurality of measurement target locations and a plurality of reference locations in one piece of image information.
- the biological information acquisition unit 14b has a function of acquiring biological information from the information obtained by the sensor 13 at the measurement target location, using the information obtained by the sensor 13 at the reference location as a reference.
- the biological information acquiring unit 14b uses, as a reference, the amount of light received by the sensor 13 included in the reference location in the image information formed based on the information output by the sensor 13, and the amount of light received by the sensor 13 included in the measurement target location. Processing for correcting the amount of received light using the reference is performed, and biometric information can be obtained from the amount of received light at the measurement target location that has been corrected using the reference.
- the method of correcting the amount of light received by the sensor 13 included in the measurement target location by reference is not particularly limited. By correcting the amount using the reference transmittance, the reference point that does not include the measurement target of biometric information is considered to be the influence of the background. The correct amount of light that is being used may be calculated.
- the method of acquiring biological information from the amount of light received at the measurement target site after correction obtained by correction using the reference is not particularly limited.
- a calibration curve representing the relationship may be obtained in advance, and the biological information may be specified from the amount of light received at the measurement target site after correction by referring to the calibration curve.
- the biological information acquiring unit 14b can acquire biological information such as the blood glucose level of the subject S from one piece of image information.
- the blood sugar level of the subject S may be acquired.
- the biometric information acquiring unit 14b may acquire biometric information such as a blood sugar level from each of a plurality of pieces of image information, and calculate an average value or a median value thereof.
- the signal processing unit 14 has a function of outputting the biometric information acquired by the biometric information acquisition unit 14b to the display unit 15 and the data storage unit 16 in the same manner as outputting image information.
- the signal processing unit 14 can be realized by a processor that performs digital signal processing.
- An AFE (Analog Front End) board may be provided between the sensor 13 and the signal processing unit 14 to adjust the analog signal output from the sensor 13, convert it to a digital signal, and output it.
- the sensor 13 may be provided with an analog-digital conversion circuit to output a digital signal from the sensor 13 .
- the display unit 15 is, for example, a monitor such as a liquid crystal display or an organic EL display, and has a function of displaying image information processed by the signal processing unit 14 and biological information calculated by the signal processing unit 14 as visual information. ing.
- the data storage unit 16 is an auxiliary storage device such as an HDD (hard disk) or SSD (solid state disk), and has a function of storing image information and biometric information.
- Various data stored in the data storage unit 16 can be read out afterward, displayed on the display unit 15 at a desired timing, or transferred to another device via a data transfer unit (not shown). can do.
- Communication means for data transfer may be wired or wireless.
- the operation unit 17 has a function of accepting operation instructions from the user for the biological information measuring device 10 .
- the operation unit 17 is an operation input device, such as a mouse or a keyboard, used by the user to input operation instructions.
- the control unit 18 has a function of controlling the operation of the biological information measuring device 10.
- the control unit 18 is connected to the light source 11, the sensor 13, the signal processing unit 14, the display unit 15, the data storage unit 16, and the operation unit 17, for example.
- the control unit 18 has a function of realizing appropriate operations in the biological information measuring device 10 by controlling processing in each component.
- the control unit 18 can be realized by a processor having a function of performing digital signal processing like the signal processing unit 14.
- the signal processing unit 14 and the control unit 18 may be implemented by different processors or may be implemented by the same processor.
- the operation control in the biological information measuring device 10 may be realized by, for example, preparing a program written so as to perform a desired operation and appropriately executing the program in the signal processing unit 14 and the control unit 18. good.
- part of the biological information measuring device 10 may be configured by a computer such as a personal computer.
- the signal processing unit 14 and the control unit 18 can be implemented by a CPU that executes a program written to perform desired operations.
- the display unit 15, the data storage unit 16, and the operation unit 17 can each be realized by a monitor connected to a computer, an auxiliary storage device such as an HDD, a mouse, a keyboard, and the like.
- the light source 11 , subject S, and sensor 13 are not particularly limited.
- the sensor 13 may be arranged in the irradiation direction of the light emitted by the light source 11 so that the sensor 13 directly receives the light transmitted through the subject S.
- the sensor 13 may be arranged at a position where the sensor 13 does not directly receive light that has passed through the subject S, and the sensor 13 may be configured to mainly receive reflected light or scattered light from the subject S.
- the subject S may be a part of the subject's living body, and for example, the subject's fingers, wrist, arm, etc. can be used as the measurement site.
- the biological information to be measured by the biological information measuring apparatus 10 is not particularly limited, and is configured so that the biological information can be analyzed from the image information obtained by capturing an image of an arbitrary location in the living body. It is In addition, the biological information measuring device 10 may be a wearable terminal that can be worn by the subject.
- the biological information measurable by the biological information measuring apparatus 10 in this embodiment is not particularly limited, but for example, blood sugar level, oxygen saturation, hemoglobin concentration, hematocrit value, pulse rate, blood flow, etc. Velocity, cholesterol concentration, etc. can be measured.
- Non-Patent Document 1 and Non-Patent Document 2 can be preferably used as the sensor 13 in this embodiment.
- the disclosures of Non-Patent Document 1 and Non-Patent Document 2 are incorporated herein by reference.
- Non-Patent Documents 1 and 2 each pixel on a low-impurity-concentration p-type Si substrate whose impurity concentration is lowered to about 10 12 cm ⁇ 3 is mounted with a lateral overflow storage trench capacitor, and 10 million pieces are mounted.
- a CMOS image sensor that achieves both a high saturation electron number exceeding the above and a high quantum efficiency in the near-infrared region is described.
- This CMOS image sensor has a linear response to light from low to high illumination, 24.3 million saturated charges, a signal-to-noise ratio (SNR) of 71.3 dB, and high quantum efficiency in a wide light wavelength band from 200 to 1100 nm. is achieved.
- SNR signal-to-noise ratio
- Non-Patent Document 1 The outline and features of the CMOS image sensor described in Non-Patent Document 1 and Non-Patent Document 2 will be described below with reference to FIGS.
- FIG. 2 is a diagram showing an example of an optical sensor section of a CMOS image sensor that can be preferably used in this embodiment.
- FIG. 2 schematically shows an equivalent circuit diagram including a pixel circuit and a readout circuit for one column as part of the photosensor section of the CMOS image sensor.
- the optical sensor section of the CMOS image sensor shown in FIG. 2 is composed of a pixel array section 101 and a reading section 102 including sample-and-hold analog memories M1 and M2. Pixels 105 included in the pixel array section 101 and the readout section 102 are electrically connected via pixel column output signal lines 103 .
- a current source 104 composed of, for example, a MOS transistor is connected to the pixel column output signal line 103 .
- the pixel 105 includes an embedded fully depleted photodiode PD that generates photocharges according to the intensity of light, a transfer gate T that transfers photocharges from the photodiode PD, and a floating diffusion that transfers photocharges through the transfer gate T.
- a capacitor FD a capacitor FD
- a lateral overflow storage trench capacitor LOFITreC that stores photocharges overflowing from the photodiode PD during photocharge storage operation
- a connection switch S that electrically couples or divides the floating diffusion capacitor FD and the lateral overflow storage trench capacitor LOFITreC, It is directly connected to the lateral overflow storage trench capacitor LOFITreC and is also connected to the floating diffusion capacitor FD via the connection switch S, for discharging photocharges in the lateral overflow storage trench capacitor LOFITreC and the floating diffusion capacitor FD.
- a reset gate R for amplifying and converting photoelectric charges in the lateral overflow storage trench capacitor LOFITreC and the floating diffusion capacitor FD into a voltage signal, and a pixel selection pixel formed to be connected to the source follower amplifier SF. It is composed of a selection switch X.
- a plurality of pixels 105 having the above configuration are arranged in an array in a two-dimensional plane in the optical sensor section of the CMOS image sensor.
- Selection switches SS are provided at both ends of the pixel array section 101 in which the pixels 105 are arranged in an array in order to control the voltage of the drive line connected to the gate electrode of the reset gate R.
- FIG. Either the PD reset voltage VR1 or the reference voltage VR2 can be selected by switching the selection switch SS with the selection pulse ⁇ VR.
- Sample-and-hold analog memories M1 and M2 are connected to the pixel column output signal line 103 .
- the sample-and-hold analog memory M1 is a column circuit section that outputs a voltage signal obtained by converting the photocharge transferred into the floating diffusion capacitor FD.
- the sample-and-hold analog memory M1 outputs a reference signal containing thermal noise captured when the floating diffusion capacitor FD is reset to a predetermined voltage and a voltage signal in which a voltage signal based on the amount of photocharge is superimposed on the thermal noise,
- An operational amplifier outside the pixel chip eliminates fixed pattern noise and thermal noise caused by variations in the characteristics of the source follower amplifier SF, and is configured to obtain a high-sensitivity signal S1 that captures light emission under low illuminance.
- the sample-and-hold analog memory M2 is a column circuit section that outputs a voltage signal obtained by converting photoelectric charges transferred to the horizontal overflow storage trench capacitor LOFITreC and the floating diffusion capacitor FD.
- the sample-and-hold analog memory M2 outputs a voltage signal based on the amount of photocharge and a reset level signal. It is configured to obtain a highly saturated signal S2 that captures light emission under illuminance.
- the sample-and-hold analog memory M2 changes the signal voltage level after the accumulation period and the reference voltage.
- a high saturation signal S2 that indicates the difference from the voltage VR2 and amplifying the signal using a gain amplifier or the like in the signal readout circuit in the subsequent stage, it is possible to accurately capture minute changes in the amount of light under high illuminance. It is configured to output a high saturation signal S2 that can be obtained.
- the optical sensor part of the CMOS image sensor shown in FIG. 2 has two operation modes (LOFIC operation mode) that supports a wide dynamic range and an operation mode (Dual VR operation mode) that can capture changes in the amount of light in a high illuminance area. It can operate in two modes of operation.
- the photosensor part of the CMOS image sensor In the LOFIC operation mode, the photosensor part of the CMOS image sensor can output the high sensitivity signal S1 and the high saturation signal S2 described above, can achieve a wide dynamic range in a single exposure, and can detect a minute image under low illumination. It can also be applied to luminescence imaging that captures luminescence and imaging objects with a large difference in brightness.
- the optical sensor part of the CMOS image sensor is specialized for, for example, absorption imaging under high illuminance, making it possible to clearly capture minute changes in light intensity even under high illuminance. ing.
- FIG. 3 is a schematic pixel cross-sectional view of a CMOS image sensor that can be suitably used in this embodiment, and is a schematic cross-sectional view showing a cross section of a pixel array.
- 4 is a cross-sectional view taken along line AA of FIG. 3, which is a schematic enlarged cross-sectional view of a pixel in a photodiode and its surroundings.
- CMOS image sensors shown in FIGS. 3 and 4 use low impurity concentration p-type Si substrates (high resistance substrates) made of wafers with low impurity concentration and extremely low oxygen concentration manufactured by the Cz (Czochralski) method. It is A CMOS image sensor is manufactured by, for example, processes of forming STI (Shallow Trench Isolation), which is an element isolation region, forming a lateral overflow storage trench capacitor LOFITreC, forming a transistor portion and a photodiode, and forming metal wiring.
- STI Shallow Trench Isolation
- This CMOS image sensor achieves high quantum efficiency in a wide optical wavelength band from 200 to 1100 nm.
- This CMOS image sensor employs a surface-illuminated structure so that near-infrared light with long wavelengths does not affect the operation of the transistors in the pixels. Furthermore, as shown in FIG. 4, a p + layer having a steep concentration profile is formed on the surface of the photodiode PD.
- a pixel array is formed by arranging photodiodes PD and transistor portions on the surface of the Si substrate.
- the size of the pixel array is 2.1 mm in the horizontal direction ⁇ 2.1 mm in the vertical direction
- the number of pixels is 128 in the horizontal direction ⁇ 128 in the vertical direction
- the pixel size is 16 ⁇ m in the horizontal direction ⁇ 16 ⁇ m in the vertical direction
- the aperture ratio is 52.8%.
- a lateral overflow storage trench capacitor LOFITreC is provided in each pixel.
- the lateral overflow storage trench capacitor LOFITreC is a capacitor including a three-dimensional structure, and includes a trench (shallow trench) formed in a pixel of a Si substrate, an oxide film formed along the trench, and an oxide film embedded in the trench. doped poly-Si electrode nodes.
- a leakage current may occur between the embedded n-type layer of the photodiode PD and the inversion layer induced in the lateral overflow storage trench capacitance LOFITreC.
- a deep p-well DPW
- the concentration of DPW is optimized to obtain uniform capacitance in the signal voltage range (eg, 0.5 to 3.0 V) of the lateral overflow storage trench capacitor LOFITreC.
- the charges overflowing from the photodiode PD and the floating diffusion capacitor FD are stored in the electrode node in the lateral overflow storage trench capacitor LOFITreC.
- near-infrared light has a large penetration depth from the surface of the photodiode PD, and in order to detect near-infrared light, it is necessary to accumulate and detect photocharges photoelectrically converted deep in the photodiode PD.
- a potential gradient is formed between the p-well and DPW under the region of the transistor section in order to drift the photocharge generated by the near-infrared light generated in the deep part of the photodiode PD to the photodiode PD.
- the inversion layer and n + layer induced at the Si substrate side interface of the lateral overflow storage trench capacitance LOFITreC are connected to the ground (GND).
- a negative potential for example, a potential of about 3.0 V at maximum
- a negative potential may be applied to the back side of the Si substrate (lower side in FIGS. 3 and 4) to form an electric field in the depth direction of the Si substrate.
- the thickness of the Si substrate may be reduced.
- the CMOS image sensor described above with reference to FIGS. 2 to 4 describes the CMOS image sensor described in Non-Patent Document 1 and Non-Patent Document 2.
- the CMOS image sensors described in Non-Patent Document 1 and Non-Patent Document 2 can be preferably used.
- the present invention is not limited to the use of the CMOS image sensor described in Non-Patent Document 1 and Non-Patent Document 2.
- sensors satisfying the following specific conditions may be applied to the present invention. can be done.
- the sensor 13 applicable to the present invention is a sensor with a saturated charge number of 1 million or more, preferably a saturated charge number of 3.2 million or more, and particularly preferably a saturated charge number of 10 million or more. Further, the sensor 13 applicable to the present invention has an SN ratio of 60 dB or more (equivalent to about 1 million or more saturated charges), preferably 65 dB or more (equivalent to about 3.2 million or more saturated charges), especially Preferably, it is a sensor with 70 dB or more (corresponding to a saturated charge number of about 10 million or more).
- a sensor whose saturated charge number or S/N ratio satisfies the above conditions has high S/N ratio performance and is suitable because it can capture minute differences in the amount of light under high illuminance.
- the sensor 13 according to the present invention is preferably capable of clearly imaging a fluid (eg, blood cells in blood) moving in a living body at a high frame rate.
- a sensor that satisfies the above conditions for the number of saturated charges or the SN ratio can increase the amount of signal per frame. It is preferable because it outputs a clear image that captures a minute light amount difference and, as a result, enables accurate measurement of biological information.
- a high output that can emit a high amount of light corresponding to this sensor is preferably used.
- CMOS image sensor that has a capacitor with a three-dimensional structure in the pixel and is capable of accumulating photocharges.
- the saturated charge number can be increased by using a capacitor with a three-dimensional structure in the pixel.
- a capacitor having a three-dimensional structure can employ, for example, a silicon trench structure, and furthermore, by adopting a structure in which photocharges are accumulated in trench-embedded electrode nodes, leakage current can be reduced.
- the capacitor including the three-dimensional structure is not limited to the silicon trench structure, and a metal-insulating film-metal type capacitor having a three-dimensional structure formed in the wiring layer may be used.
- CMOS image sensor provided with a deep p-well (DPW) so as to cover the region of the capacitor including the three-dimensional structure.
- DPF deep p-well
- a CMOS image sensor having a capacitor with a uniform capacitance in a specific signal voltage range is preferably applied as the sensor 13 according to the present invention.
- the specific signal voltage range is preferably 0.5 to 3.0 V, for example, and it is preferred that a linear response to the amount of received light is obtained within the specific signal voltage range.
- CMOS image sensor having a photodiode quantum efficiency of 50% or more for near-infrared light used in the present invention.
- CMOS image sensor whose photodiode quantum efficiency satisfies the above conditions, received near-infrared light is efficiently converted into charges, and high sensitivity to near-infrared light is realized.
- a high-resistance substrate to extend the depletion layer, that is, to extend the effective sensitivity region in the depth direction.
- CMOS image sensor capable of forming an electric field in the depth direction of the substrate by applying a potential to the substrate.
- a wide dynamic range CMOS image sensor is preferably applied as the sensor 13 according to the present invention.
- a measurement target location for biometric information measurement and a reference location different from the measurement target location are selected.
- the biological information to be measured is the blood sugar level in the blood
- a vascular site is selected as the measurement target site
- a non-vascular site is selected as the reference site.
- the vascular part is imaged darker than the non-vascular part, so if the light intensity is increased to image the vascular part brightly, the non-vascular part becomes even brighter, and the non-vascular part is too bright and becomes white.
- the phenomenon (overexposed) may occur. Therefore, a CMOS image sensor that can cover bright areas to even brighter areas, especially under high illuminance conditions, can capture bright images of vascular areas and even brighter non-vascular areas without overexposure. is preferably applied.
- a CMOS image sensor with 4000 or more pixels is preferably used as the sensor 13 according to the present invention.
- a CMOS image sensor whose number of pixels satisfies the above conditions, a high-resolution image can be obtained. can be easily and reliably identified.
- the biological information measuring apparatus 10 can select a measurement target location and a reference location, uses information obtained from the reference location as a reference, and uses the information obtained from the measurement target location as a biological information. It is characterized by acquiring information.
- the light is emitted from the entire light emitting unit to capture an image of the entire measurement target, and based on the obtained image, the respective positions of the blood vessel site and the non-blood vessel site are specified, and the position of the blood vessel site is determined.
- a blood vessel pattern acquisition step of determining the light emitting position, the light receiving position for measurement, and the light receiving position for reference is executed.
- the light emitting position of the light emitting unit is controlled to emit light only from the light emitting position for measurement, and from the amount of light received at the light receiving position for measurement and the light receiving position for reference, the measured value at the vascular site and the measured value at the non-vascular site (reference) Perform a measurement step to obtain and
- a blood vessel pattern acquisition step and a measurement step are provided, and light emission and light reception are performed in each step.
- the entire light emitting section emits light
- the measuring stage light emission occurs only at the measuring light emitting position. For this reason, there is a problem that it takes a long time until the measurement result is obtained, and a problem that reference accuracy and measurement accuracy are impaired due to displacement of the vascular part and the non-vascular part due to movement of the subject.
- the biological information measuring device 10 does not provide a plurality of stages of the blood vessel pattern acquisition stage and the measurement stage, and emits light and receives light once. Image information can be obtained that allows both localization of the site and acquisition of measurements for each of the vascular and non-vascular sites. That is, the biological information measuring apparatus 10 according to the present invention can obtain measurement results in a short time and is less affected by positional deviation due to movement of the subject, as compared with the technology disclosed in Patent Document 1.
- light emission and light reception once means that the light emission state of the light source and the light reception state of the sensor are fixed to a predetermined state, and the light emission position of the light source and the light reception position of the sensor are not changed, for example. .
- light is emitted from the entire light emitting unit in the stage of acquiring a blood vessel pattern, and light is emitted only from the light emitting position for measurement in the stage of measurement, and light emission and light reception are not performed once.
- Patent Document 1 if it were attempted to specify the positions of the vascular site and the non-vascular site and to acquire the measurement values of each of the vascular site and the non-vascular site by performing light emission and light reception once without providing multiple steps. In this case, since light is absorbed by the blood in the blood vessel site, the amount of transmitted light received by the sensor is reduced, resulting in a dark image. If the amount of light transmitted through the vascular site is too small, that is, too dark, the amount of light that can be received by the sensor may fall below the lower limit. As a result, it is expected that the position of the blood vessel site and the light transmittance at the blood vessel site cannot be detected correctly.
- the vascular site As a measure to prevent the vascular site from becoming too dark, it is conceivable to increase the light intensity of the light emitted from the light source to compensate for the decrease in the amount of light received due to absorption in the vascular site. , the amount of transmitted light increases, resulting in a brighter image. If the amount of light transmitted through the non-vascular site is excessively large, that is, if it is too bright, the amount of light that can be received by the sensor may exceed the upper limit. As a result, it is expected that the light transmittance at the non-vascular site cannot be detected correctly.
- the biological information measuring device 10 is characterized by having a sensor with a saturated charge number of 1 million or more.
- the biological information measuring apparatus 10 according to the present invention captures high-illuminance light using a sensor having a saturated charge number of 1,000,000 or more, thereby capturing a bright and clear image of a measurement target site (for example, a blood vessel site).
- a reference point for example, a non-blood vessel part
- biometric information can be acquired by one-time light emission and light reception without providing multiple steps for changing the light emission position in the light emitting unit and the light receiving position in the light receiving unit.
- FIG. 5 is a diagram schematically showing an example of image information obtained by the biological information measuring device 10 according to the present invention.
- FIG. 5 shows a picked-up image of a blood vessel BV used when measuring a blood sugar level as biological information.
- a blood vessel BV is captured.
- the blood vessel BV is imaged darker than a portion where the blood vessel BV does not exist.
- the biological information measuring apparatus 10 has a sensor with a saturated charge number of 1,000,000 or more, captures a bright and clear image of the blood vessel BV, and detects a location where the blood vessel BV does not exist. It is possible to take an image without overexposure.
- the specific point selection unit 14a selects the point where the blood vessel BV exists as the measurement target point TS, and selects the point where the blood vessel BV does not exist as the reference point RS.
- a sensor with a saturated charge number of 1,000,000 or more can accurately detect the amount of light received at the measurement target point TS and the amount of light received at the reference point RS.
- the light received at the measurement target point TS is affected not only by light absorption by the blood in the blood vessel BV, but also by light absorption by cells, body fluids, etc. existing around the blood vessel BV. .
- the light received at the reference point RS reflects only the influence of light absorption by cells, body fluids, etc. existing around the blood vessel BV. Therefore, by correcting the amount of light received at the measurement target point TS using the amount of light received at the reference point RS, it is possible to remove the effects of light absorption by cells, body fluids, etc. superimposed on the amount of light received at the measurement target point TS. can. As a result, it is possible to extract only the influence of the absorption of light by the blood in the blood vessel BV, and to accurately measure the blood sugar level in the blood.
- the present inventors used a sensor with a saturated charge number of 1 million or more, selected a finger joint, and imaged a blood vessel with transmitted light.
- the imaged finger joint is the first joint on the pad side of the index finger shown in FIG. FIG. 7 shows the captured image.
- the present invention irradiates a living body with light, transmits, reflects or scatters the light in the living body, has a plurality of pixels arranged in an array in a two-dimensional plane, Light is received by image sensors whose number is one million or more, and based on the amount of light received, a measurement target location to be a measurement target of biological information and a reference location different from the measurement target location are selected, and information at the reference location is selected. can be used as a reference to obtain biological information from the information at the measurement target site, and can be applied to techniques for noninvasively measuring biological information in a living body using light.
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Abstract
Description
11 光源
11a 光学素子
12 フィルタ
13 センサ
14 信号処理部
14a 特定箇所選択部
14b 生体情報取得部
15 表示部
16 データ格納部
17 操作部
18 制御部
101 画素アレイ部
102 読出部
103 画素列出力信号線
104 電流源
105 画素
BV 血管
RS リファレンス箇所
S 被検体
TS 測定対象箇所
Claims (11)
- 光を照射する光源と、
前記光源から照射される光が生体内で透過、反射または散乱した光を受光し、受光した光の光量に応じた情報を出力する、2次元面内にアレイ状に配置された複数の画素を有し、飽和電荷数が100万個以上であるイメージセンサと、
前記イメージセンサで得られた情報に基づいて、生体情報の測定対象とする測定対象箇所と、前記測定対象箇所とは異なるリファレンス箇所とを選択する特定箇所選択部と、
前記リファレンス箇所における前記イメージセンサで得られた情報をリファレンスとして使用して、前記測定対象箇所における前記イメージセンサで得られた情報から前記生体情報を取得する生体情報取得部と、
を備えることを特徴とする生体情報測定装置。 - 前記イメージセンサのSN比が60dB以上であることを特徴とする請求項1に記載の生体情報測定装置。
- 前記光源が、面発光型の発光ダイオードからなることを特徴とする請求項1または2に記載の生体情報測定装置。
- 前記面発光型の発光ダイオードの面内ばらつきが10%以下であることを特徴とする請求項3に記載の生体情報測定装置。
- 前記光源と前記イメージセンサとの間に横モード変換機能を有する光学素子が配置されていることを特徴とする請求項1~4のいずれか1項に記載の生体情報測定装置。
- 前記光学素子が非球面レンズであることを特徴とする請求項5に記載の生体情報測定装置。
- 前記光学素子が回折光学素子であることを特徴とする請求項5に記載の生体情報測定装置。
- 前記光学素子が石英の平行平板であることを特徴とする請求項5に記載の生体情報測定装置。
- 前記特定箇所選択部が、前記イメージセンサで得られた情報から形成される2次元の画像情報内で、前記生体情報の測定対象を含む箇所を前記測定対象箇所として選択し、前記生体情報の測定対象を含まない箇所を前記リファレンス箇所として選択することを特徴とする請求項1~8のいずれか1項に記載の生体情報測定装置。
- 前記測定対象箇所が生体内の血管を含む箇所であり、前記リファレンス箇所が前記生体内の血管を含まない箇所であることを特徴とする請求項1~9のいずれか1項に記載の生体情報測定装置。
- 前記生体情報が、生体内の血液中の血糖値であることを特徴とする請求項1~10のいずれか1項に記載の生体情報測定装置。
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US18/546,372 US20240172969A1 (en) | 2021-02-19 | 2022-02-14 | Biological information measurement device |
EP22756120.6A EP4297094A1 (en) | 2021-02-19 | 2022-02-14 | Biometric information measuring device |
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- 2022-02-14 WO PCT/JP2022/005644 patent/WO2022176802A1/ja active Application Filing
- 2022-02-14 EP EP22756120.6A patent/EP4297094A1/en active Pending
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