WO2022174904A1 - Système de transport pour transporter au moins deux substrats, appareil d'impression pour impression sur deux substrats ou plus, et procédés pour les mettre en oeuvre - Google Patents

Système de transport pour transporter au moins deux substrats, appareil d'impression pour impression sur deux substrats ou plus, et procédés pour les mettre en oeuvre Download PDF

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Publication number
WO2022174904A1
WO2022174904A1 PCT/EP2021/054020 EP2021054020W WO2022174904A1 WO 2022174904 A1 WO2022174904 A1 WO 2022174904A1 EP 2021054020 W EP2021054020 W EP 2021054020W WO 2022174904 A1 WO2022174904 A1 WO 2022174904A1
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WO
WIPO (PCT)
Prior art keywords
platform
substrate
solar cell
support
deposition
Prior art date
Application number
PCT/EP2021/054020
Other languages
English (en)
Inventor
Daniele Gislon
Original Assignee
Applied Materials Italia S.R.L.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Italia S.R.L. filed Critical Applied Materials Italia S.R.L.
Priority to PCT/EP2021/054020 priority Critical patent/WO2022174904A1/fr
Priority to EP21706916.0A priority patent/EP4295416A1/fr
Publication of WO2022174904A1 publication Critical patent/WO2022174904A1/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F15/00—Screen printers
    • B41F15/08—Machines
    • B41F15/0881—Machines for printing on polyhedral articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F15/00—Screen printers
    • B41F15/14—Details
    • B41F15/16—Printing tables
    • B41F15/18—Supports for workpieces
    • B41F15/26—Supports for workpieces for articles with flat surfaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68771—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting more than one semiconductor substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof

Definitions

  • TRANSPORTATION SYSTEM FOR TRANSPORTING TWO OR MORE SUBSTRATES, PRINTING APPARATUS FOR PRINTING ON TWO OR MORE SUBSTRATES, AND METHODS FOR PERFORMING SAME FIELD
  • Embodiments of the present disclosure relate to systems for transporting multiple substrates, such as solar cells or solar cell pieces.
  • Embodiments also relate to apparatuses for printing patterns on substrates, such as solar cells or solar cell pieces. More specifically, embodiments described herein relate to screen printing apparatuses for screen printing patterns on substrates.
  • a substrate may be processed by a processing line including multiple processing stations. At each of the respective processing stations, the substrate is processed according to different operations.
  • a substrate can be a solar cell or a solar cell piece.
  • Solar cells are photovoltaic devices that convert sunlight directly into electrical power.
  • a manufacturing process for a solar cell can involve a process which starts from a raw solar cell, i.e. a photovoltaic material, and proceeds by printing a pattern of fingers and busbars on the solar cell.
  • a substrate such as a solar cell, which is processed by multiple processing stations of a processing line, is transported from one processing station to the next.
  • a gripper system can be used for transporting solar cells between consecutive processing stations.
  • a gripper can be a mechanical arm with suction cups to lift and move a solar cell or other type of substrate.
  • the substrates are positioned with high accuracy in a target position before they are processed by a respective processing station.
  • a pattern is printed on a solar cell
  • the pattern e.g. a pattern of fingers and busbars
  • substrates can be transported and processed as fast as possible.
  • the present disclosure particularly aims at improving a manufacturing process of photovoltaic devices involving the transportation of solar cell substrates and the printing of a pattern thereon.
  • a transportation system for transporting two or more substrates used for the manufacture of photovoltaic devices includes a multiple substrate support including a first platform to support a first substrate and a second platform to support a second substrate.
  • the first substrate is a first solar cell or a first solar cell piece.
  • the second substrate is a second solar cell or a second solar cell piece.
  • the second platform is movable relative to the first platform.
  • the multiple substrate support is movable over a first distance from a first position to a second position to provide a joint transportation of the first platform and the second platform.
  • a deposition apparatus for deposition on two or more substrates used for the manufacture of photovoltaic devices.
  • the deposition apparatus includes a deposition head arrangement including a first deposition head.
  • the deposition apparatus includes a multiple substrate support comprising a first platform to support a first substrate and a second platform to support a second substrate.
  • the first substrate is a first solar cell or a first solar cell piece.
  • the second substrate is a second solar cell or a second solar cell piece.
  • the multiple substrate support is arranged in or movable to a deposition position. In the deposition position, the deposition head arrangement faces both the first platform and the second platform.
  • the second platform is movable relative to the first platform.
  • a printing apparatus for printing on substrates used for the manufacture of photovoltaic devices.
  • the printing apparatus includes a printing head arrangement including a first printing head.
  • the first printing head may include a screen device for screen printing.
  • the printing apparatus includes a transportation system.
  • the transportation system includes a movable body.
  • the transportation system includes a first platform mounted to or included in the movable body.
  • the transportation system includes a second platform mounted to or included in the movable body.
  • the transportation system includes a first actuator system connected to the movable body to transport the movable body over a first distance from a first position to a printing position. In the printing position, the first printing head faces both the first platform and the second platform.
  • the transportation system includes a second actuator system connected to the second platform to move the second platform relative to the first platform during the movement of the movable body from the first position to the printing position.
  • a method for transporting two or more substrates used for the manufacture of photovoltaic devices includes supporting a first substrate by a first platform.
  • the first substrate is a first solar cell or a first solar cell piece.
  • the method includes supporting a second substrate by a second platform.
  • the second substrate is a second solar cell or a second solar cell piece.
  • the method includes jointly transporting the first platform supporting the first substrate and the second platform supporting the second substrate.
  • the method includes moving the second platform supporting the second substrate relative to the first platform supporting the first substrate.
  • a method for deposition on two or more substrates used for the manufacture of photovoltaic devices includes supporting a first substrate by a first platform.
  • the first substrate is a first solar cell or a first solar cell piece.
  • the method includes supporting a second substrate by a second platform.
  • the second substrate is a second solar cell or a second solar cell piece.
  • the method includes moving the second platform supporting the second substrate relative to the first platform supporting the first substrate.
  • the method includes depositing at least one first feature on the first substrate supported by the first platform and, in parallel, depositing at least one second feature on the second substrate supported by the second platform.
  • a processing apparatus for processing two or more substrates used for the manufacture of photovoltaic devices.
  • the processing apparatus includes a processing device.
  • the processing apparatus includes a multiple substrate support.
  • the multiple substrate support includes a first platform to support a first substrate and a second platform to support a second substrate.
  • the first substrate is a first solar cell or a first solar cell piece.
  • the second substrate is a second solar cell or a second solar cell piece.
  • the second platform is movable relative to the first platform.
  • the multiple substrate support is arranged in or movable to a processing position.
  • the first platform and the second platform are within a processing range of the processing device, so that the processing device can process the first substrate supported by the first platform and the second substrate supported by the second platform when the multiple substrate support is in the processing position.
  • a method for processing two or more substrates used for the manufacture of photovoltaic devices includes supporting a first substrate by a first platform.
  • the first substrate is a first solar cell or a first solar cell piece.
  • the method includes supporting a second substrate by a second platform.
  • the second substrate is a second solar cell or a second solar cell piece.
  • the method includes moving the second platform supporting the second substrate relative to the first platform supporting the first substrate.
  • the method includes processing the first substrate supported by the first platform and, in parallel, processing the second substrate supported by the second platform.
  • Embodiments are also directed at apparatuses for carrying out the disclosed methods and include apparatus parts for performing each described method aspect. These method aspects may be performed by way of hardware components, a computer programmed by appropriate software, by any combination of the two or in any other manner. Furthermore, embodiments according to the disclosure are also directed at methods for operating the described apparatus. The methods for operating the described apparatus include method aspects for carrying out every function of the apparatus.
  • FIGs. 1-3 show a transportation system for transporting two or more substrates according to embodiments described herein;
  • FIG. 4 shows a top view of a transportation system according to embodiments described herein;
  • FIG. 5 shows a side view of a transportation system according to embodiments described herein, the transportation system including a first actuator system and a second actuator system;
  • FIG. 6 shows a top view of a transportation system according to embodiments described herein, the transportation system including a first platform, a second platform and a third platform;
  • FIG. 7 shows a top view of a transportation system according to embodiments described herein, the transportation system including a first platform, a second platform and a third platform;
  • FIG. 8 shows a printing apparatus for printing a pattern on two or more substrates according to embodiments described herein.
  • FIGs. 9-11 show a printing apparatus according to embodiments described herein during a movement of a multiple substrate support from a first position to a printing position.
  • Embodiments described herein involve a multiple substrate support wherein substrates, such as for example solar cell pieces, are supported by respective platforms of the multiple substrate support.
  • a platform for supporting a substrate is distinguished from a gripper system for holding a substrate.
  • a platform is configured for supporting a substrate on top of the platform.
  • the substrate may be disposed on top of a substantially flat receiving surface of the platform.
  • a substrate supported by a platform can be processed by a processing device.
  • a substrate supported by a platform can be subject to a deposition process e.g. a printing process.
  • a gripper can be understood as a movable member which is configured for moving above a surface, e.g.
  • a gripper may be configured for picking up, i.e. lifting, a substrate from the surface, transporting the lifted substrate over a distance and lowering the substrate to put the substrate down on a further surface (or a different position on the same surface).
  • a substrate held by a gripper is attached to a bottom surface of the gripper.
  • the bottom surface of the gripper can include one or more suction cups configured to exert an upward suction force to attach a substrate to the bottom surface of the gripper.
  • a gripper system is distinguished from a platform system like the multiple substrate support described herein.
  • Figs. 1-3 show a top view of a transportation system 10 according to embodiments described herein.
  • the transportation system 10 includes a multiple substrate support 100.
  • a multiple substrate support can be understood as a substrate support adapted for supporting two or more substrates, such as two, three or four substrates, jointly.
  • the multiple substrate support 100 shown in Figs. 1-3 includes a first platform 110 to support a first substrate 115 and a second platform 120 to support a second substrate 125.
  • a multiple substrate support 100 can include further platforms to support further substrates, such as a third platform to support a third substrate, a fourth platform to support a fourth substrate, and so on.
  • the first platform 110 and the second platform 120, and potential further platforms of the multiple substrate support 100 may be separate plate-like members that may have a gap in between.
  • the gap may be a gap of a few millimeters or a few centimeters.
  • the first platform 110 and the second platform 120 (and any further possible platforms) may be arranged next to each other such that the gap between adjacent platforms may have an elongated shape.
  • the gap may have a length extending in a direction which is substantially perpendicular to a transport direction of the multiple substrate support 100, as shown in Figs. 1-3.
  • the platforms may be oriented such that the length of the gap may be substantially parallel to the transport direction.
  • the first platform 110 and the second platform 120 may be substantially parallel to each other, i.e. the receiving surfaces for receiving the substrates on the respective platforms may be parallel to each other.
  • the term “substantially parallel” may include a deviation of, for example, up to 15 degrees, with respect to exactly parallel platforms.
  • the first platform 110 and the second platform 120 may be substantially co-planar platforms. A small vertical offset between the first platform 110 and the second platform may be present, e.g. an offset of a few millimeters.
  • the first substrate 115 is disposed on top of the first platform 110 so that the first substrate 115 rests upon the first platform 110.
  • the second substrate 125 is disposed on top of the second platform 120.
  • the first substrate 115 is supported by the first platform 110 while the second substrate 125 is supported by the second platform 120.
  • a substrate as described herein can be a flat piece of material, e.g. a thin plate-like wafer.
  • a substrate can be a photovoltaic substrate.
  • a substrate can be a solar cell or a solar cell piece.
  • a solar cell piece can be understood as a segment of a solar cell obtained by separating, or cleaving, the solar cell into two or more solar cell pieces.
  • a solar cell may be cleaved in N strip-like solar cell pieces of substantially equal width, where N is 2 or 3 or more.
  • a solar cell piece can be used in the manufacturing of shingled solar cell arrangements.
  • a shingled solar cell arrangement is a photovoltaic device including a plurality of solar cell pieces such that adjacent solar cell pieces are connected to each other (e.g. by means of an electrically conductive adhesive) in an overlapping manner.
  • a solar cell can be understood as a full solar cell, i.e. a non-cleaved solar cell.
  • other types of substrates can be used.
  • a substrate as described herein can be a glass substrate, a ceramic substrate, a semiconductor substrate or any substrate used in electronics printing applications.
  • the first position 160 may be spaced apart from the second position 170 at least in a horizontal direction.
  • the first substrate 115 on the first platform 110 and the second substrate 125 on the second platform 120 are transported together by the multiple substrate support 100 from the first position 160 to the second position 170.
  • a first processing station may be located.
  • the first position 160 may be a loading position where a loading station is arranged for loading the first substrate 115 and the second substrate 125 (and possible further substrates) onto the multiple substrate support 100.
  • an incoming conveyor may be arranged adjacent to the first position (e.g. the incoming conveyor may be arranged to the left of the first position 160 in Figs. 1-3).
  • the substrates may be transferred from the incoming conveyor to the multiple substrate support in the first position 160.
  • a vacuum system of the multiple substrate support 100 may be activated for holding, i.e. suctioning, the substrates in a fixed position on the respective platforms of the multiple substrate support 100.
  • the second platform 120 While the multiple substrate support 100 is transported from the first position 160 to the second position 170, the second platform 120 may be moved, e.g. translated or rotated or a combination thereof, relative to the first platform 110, to adjust the relative position of the second substrate 125 with respect to the first substrate 115.
  • the position of the second platform 120 in a moving coordinate system defined by the moving multiple substrate support 100 may be changed by translating and/or rotating the second platform 120 in the moving coordinate system.
  • an alignment of the second substrate 125 e.g. a solar cell or solar cell piece
  • an alignment of the first substrate 115 can be performed during said movement.
  • Embodiments described herein allow for an “on- the-fly” alignment of the substrates supported by the multiple substrate support 100.
  • Fig. 1 shows the multiple substrate support 100 in the first position 160.
  • the multiple substrate support 100 will move to the second position 170 indicated in Fig. 1 by the dashed lines.
  • Fig. 2 shows the multiple substrate support 100 in an intermediate position during the movement from the first position 160 to the second position 170.
  • Fig. 3 shows the multiple substrate support 100 in the second position 170.
  • the first substrate 115 and the second substrate 125 may not be well- aligned.
  • the second substrate 125 is oriented at an angle with respect to the first substrate 115, which may constitute a misalignment.
  • the second platform 120 may be moved relative to the first platform to bring the orientation of the second substrate 125 in alignment with the orientation of the first substrate 115.
  • the second platform 120 is moved over an angle, i.e.
  • the second platform 120 may be translated with respect to the first platform 110 for aligning the second substrate 125 during the movement of the multiple substrate support 100 from the first position 160 to the second position 170, or a combined rotation and translation of the second platform 120 may be performed.
  • the second substrate 125 has been aligned, as illustrated in Fig. 3, and is ready for processing, e.g. by a second processing station.
  • the second substrate 125 is parallel to the first substrate 115 i.e. the longitudinal edges of both substrates are parallel to each other, which may constitute a target alignment.
  • a second processing station may be located.
  • the second position 170 may be a printing position where a printing head arrangement is located for printing respective patterns on the substrates supported by the multiple substrate support 100.
  • the printing head arrangement may be configured for printing a respective pattern of fingers and/or bus bars on the first substrate 115 and the second substrate 125.
  • the printing head arrangement may be configured for printing a respective adhesive on the first substrate 115 and the second substrate 125.
  • the printing head arrangement may be configured for printing the respective patterns in parallel on the first substrate and the second substrate which may have been aligned during the movement of the multiple substrate support from the first position 160 to the second position 170.
  • the substrates may have been aligned during the movement from the first position 160 to the second position 170.
  • the printing operation can start right away when the multiple substrate support 100 arrives at the second position 170. Further, the printing on the respective substrates can be carried out in parallel.
  • the respective patterns can be printed on the aligned substrates simultaneously while the substrates are supported jointly by the multiple substrate support 100.
  • the second processing station at the second position 170 may be a different kind of processing station.
  • the second processing station can be any deposition station for depositing a material on the substrates, not limited to the example of printing.
  • the second processing station can be a laser processing station including a laser device for subjecting the substrates to a laser treatment, e.g. laser etching.
  • the second processing station may be any processing station which is configured for jointly processing the multiple substrates supported by the multiple substrate support 100 and which benefits from a starting configuration where the substrates are well aligned.
  • the exemplary transportation system shown in Figs. 1-3 involves an on-the-fly alignment of the substrates, i.e. an alignment which is performed during the movement of the multiple substrate support from the first position to the second position.
  • an on-the-fly alignment has the advantage that the substrates are well aligned when the multiple substrate support arrives in the second position, so that the substrates can be processed immediately after arrival of the multiple substrate support in the second position. An improved cycle time can be obtained since the system does not have to wait for the alignment to be performed.
  • the alignment of the substrates may not be an on- the-fly alignment.
  • the alignment may be an alignment which is performed after the multiple substrate support has arrived in the second position.
  • the alignment may be a stationary alignment performed while the multiple substrate support is stationary in the second position. In some implementations, a stationary alignment can be performed without increasing the cycle time, or at least keeping an increase of the cycle time at a minimum.
  • the transportation system can include a rotary table which may be configured to rotate in a horizontal plane.
  • the rotary table can have a receiving surface including several areas which are spaced apart from each other. Each respective area may be configured to receive a multiple substrate support as described herein.
  • the rotary table can include a first area for receiving a first multiple substrate support, a second area for receiving a second multiple substrate support, and possibly further areas for receiving further multiple substrate supports.
  • the multiple substrate supports can be supported simultaneously by the rotary table.
  • a processing head e.g. a printing head, may be arranged at a fixed position over the rotary table.
  • the multiple substrate supports supported by the rotary table can be moved one after the other into a position below the processing head.
  • the rotary table may be kept stationary so that the substrates on the multiple substrate support in question can be jointly processed by the processing head. For example, respective patterns can be printed simultaneously on the substrates supported by the multiple substrate support by the processing head.
  • a first multiple substrate support can be transported from the first position to the second position.
  • the first position may be a position external to the rotary table.
  • the second position may be a position on the rotary table.
  • the first multiple substrate support may be transported by a belt conveyor from a first position, which may be located on the left of the rotary table, to the rotary table.
  • the first multiple substrate support may arrive in the second position, which may be an area on the “west” side of the rotary table
  • the rotary table supporting the first multiple substrate support is kept stationary. While the rotary table is kept stationary, the substrates (e.g.
  • a second multiple substrate support may be supported by the rotary table in an area below the processing head and may be being processed by the processing head.
  • the alignment of the substrates supported by the first multiple substrate support and the processing of the substrates supported by the second multiple substrate support may both be performed in parallel while the rotary table is stationary.
  • the alignment operation for the first multiple substrate support therefore does not lead to an increased cycle time (or at best a minimal increase) since the period during which the second multiple substrate support is processed by the processing head is being used for performing the alignment operation.
  • a transportation system for transporting two or more substrates used for the manufacture of photovoltaic devices includes a multiple substrate support including a first platform to support a first substrate and a second platform to support a second substrate.
  • the first substrate is a first solar cell or a first solar cell piece.
  • the second substrate is a second solar cell or a second solar cell piece.
  • the multiple substrate support is movable over a first distance from a first position to a second position to provide a joint transportation of the first platform and the second platform.
  • the second platform is movable relative to the first platform.
  • An advantage of embodiments described herein is that the precision for aligning the substrates as provided by the platform system described herein, i.e. the multiple substrate support 100, can be very high, e.g. a precision of ⁇ 10 pm or less, such as a precision of ⁇ 5 pm. It is believed that such precision cannot be achieved with, for example, a current day gripper system.
  • a further advantage of embodiments described herein is that the substrates supported by the platforms of the multiple substrate support 100 can be processed directly on the platforms in question. For example, a printing operation or other processing operation can be performed on the substrates while the substrates are supported by the multiple substrate support 100. When the multiple substrate support 100 arrives in the second position 170, the substrates can be processed directly on the platforms of the multiple substrate support 100. [0036] A further advantage of embodiments described herein is that the multiple substrate support 100 can move from the first position 160 to the second position 170 in a substantially linear movement.
  • a gripper In comparison, where a gripper is used for transporting the substrates, a more complicated movement is involved since the gripper is lowered to grab the substrates, lifted to pick the substrates up, moved over a horizontal distance to transport the substrates, and then lowered again to put the substrates down. In other words, a gripper makes a complex movement wherein the total distance travelled by the gripper is higher than the distance travelled by the multiple substrate support 100.
  • Embodiments described herein provide or a faster and simpler system for transporting and aligning the substrates.
  • the second platform may be movable relative to the first platform during the movement of the multiple substrate support from the first position to the second position.
  • embodiments described herein can provide the advantage that time can be saved since the alignment of the substrates can be performed on-the-fly during the movement from the first position 160 to the second position 170, so that the substrates are suitably oriented and ready for being processed when the substrates arrive at the second position 170.
  • a platform of the multiple substrate support such as the first platform or the second platform, may be a horizontal platform.
  • a platform of the multiple substrate support may remain in a horizontal orientation while the multiple substrate support moves from the first position to the second position.
  • a platform may have a receiving surface for receiving a substrate on the receiving surface.
  • a substrate supported by a platform may be disposed on top of the platform.
  • a platform such as the first platform 110 or the second platform 120, may include one or more holding elements for holding a substrate supported by the platform in a fixed position on the platform.
  • a holding element may, e.g., be a suction element for suctioning the substrate to the platform.
  • the first platform and the second platform may be separate platforms of the multiple substrate support.
  • a gap may be provided between the first platform and the second platform, particularly a gap in a substantially horizontal direction.
  • the second platform may be movable relative to the first platform to perform an alignment of the second substrate. The alignment may be performed during the movement of the multiple substrate support from the first position to the second position.
  • the notion of performing an alignment of the second substrate 125 may include, for example, performing an alignment of the second substrate 125 with respect to the first substrate 115 (or with respect to another substrate supported by the multiple substrate support 100), e.g. aligning the second substrate 125 to bring an edge of the second substrate 125 in an orientation parallel to an edge of the first substrate 115, as shown in Figs. 1-3.
  • the second substrate 125 may be aligned with respect to a reference direction, a reference location or a reference orientation, e.g. a reference orientation determined by an orientation of a processing device (e.g. a printing head) which will process the substrates once the multiple substrate support 100 has arrived at the second position 170.
  • the second substrate 125 can be aligned with respect to one or more alignment marks, e.g. one or more alignment marks disposed on the second platform 120 or one or more alignment marks on the first substrate 115 (e.g. a portion of a pattern previously printed on the first substrate 115).
  • one or more alignment marks e.g. one or more alignment marks disposed on the second platform 120 or one or more alignment marks on the first substrate 115 (e.g. a portion of a pattern previously printed on the first substrate 115).
  • FIG. 4 shows a top view of a transportation system 10 according to embodiments described herein.
  • the second platform 120 can be movable in a plane, e.g. a plane substantially parallel to a substrate receiving surface of the second platform 120.
  • the second platform 120 can be movable in a first direction (indicated by arrow 401) which may be substantially parallel to the second platform 120 and/or in a second direction (indicated by arrow 402) which may be substantially parallel to the second platform 120.
  • first direction indicated by arrow 401
  • second direction indicated by arrow 402
  • Substantially parallel directions, orientations, planes and the like can include a deviation of up to 15 degrees from an exactly parallel configuration.
  • the movement of the second platform 120 in the first direction and/or in the second direction can be a translational movement of, for example, a few millimeters or less with an accuracy of, for example, up to ⁇ 5 pm, for aligning the second substrate 125 disposed on the second platform 120.
  • the first direction can be substantially perpendicular to the second direction.
  • Substantially perpendicular directions, orientations, planes and the like can include a deviation of up to 15 degrees from an exactly perpendicular configuration.
  • the second platform 120 can be movable over an angle about a rotation axis 410.
  • the rotation axis 410 can be substantially perpendicular to the second platform 120.
  • a rotation of the second platform 120 with respect to the rotation axis 410 can be a rotation over a small angle for aligning the second substrate 125.
  • the movement of the second platform 120 in the first direction and/or second direction and/or the rotation of the second platform 120 about the rotation axis 410 can be performed while the multiple substrate support 100 is transported from the first position 160 to the second position 170.
  • the second platform may be movable relative to the first platform in a first direction.
  • the second platform may be movable relative to the first platform in the first direction during the movement of the multiple substrate support from the first position to the second position.
  • the second platform may be movable relative to the first platform in a second direction.
  • the second platform may be movable relative to the first platform in the second direction during the movement of the multiple substrate support from the first position to the second position.
  • the second platform may be movable relative to the first platform over an angle.
  • the second platform may be movable relative to the first platform over an angle during the movement of the multiple substrate support from the first position to the second position.
  • the multiple substrate support 100 may include a movable body 420.
  • the movable body 420 can perform a translation movement, as indicated by the arrow 422, for moving the multiple substrate support 100 from the first position 160 to the second position 170.
  • the transportation system 10 can include a guiding member 430 extending in a horizontal direction.
  • the movable body 420 can be movable along a length of the guiding member 430.
  • the second platform 120 can be movably mounted to the movable body 420 to allow for a relative movement (e.g.
  • the first platform 110 can be mounted or movably mounted to the movable body 420.
  • the movement of the multiple substrate support from the first position to the second position can include a movement over an angle, i.e. a rotation, such as a movement over an angle in a horizontal plane.
  • the movable body can be mounted to a rotatable support, e.g. a rotatable table, or the movable body can include or be a rotatable body.
  • the rotatable support or the rotatable body can be configured to move, i.e. in this example rotate, the multiple substrate from the first position to the second position, e.g. by rotating the multiple substrate support in a horizontal plane.
  • a transportation system as described herein may include a movable body.
  • the first platform may be mounted to the movable body.
  • the second platform may be mounted to the movable body.
  • the movable body may be movable in a horizontal direction or a vertical direction or an inclined direction or any combination thereof.
  • the first actuator system as described herein may be connected to the movable body to transport the movable body from the first position to the second position.
  • the first platform and the second platform may be configured to be transported jointly from the first position to the second position by a movement of the movable body.
  • FIG. 5 shows a side view of a transportation system 10 according to embodiments described herein.
  • a first actuator system 510 including one or more actuators may be connected to the movable body 420 for moving the movable body 420 from the first position 160 to the second position 170.
  • the first actuator system 510 can include a motor, such as a linear motor or a servo motor.
  • a second actuator system 520 including one or more actuators is connected to the second platform 120 for moving the second platform 120 relative to the movable body 420.
  • the second actuator system can include a motor, such as a linear motor, a stepper motor or a servo motor.
  • the second actuator system 520 may be part of the multiple substrate support 100 such that the second actuator system 520 is transported together with the multiple substrate support 100 from the first position 160 to the second position 170.
  • the second actuator system 520 can be configured for translating the second platform 120 in the first direction, for translating the second platform 120 in the second direction, and/or for rotating the second platform.
  • the second actuator system 520 can include, for example, three actuators (e.g. three linear motors) for moving the second platform 120, including an actuator for performing a translation of the second platform 120 in the first direction (e.g. an X- direction), another actuator for performing a translation of the second platform 120 in the second direction (e.g. a Y-direction perpendicular to the X-direction) and another actuator for performing a rotation of the second platform 120 (e.g. a rotation in a plane formed by the X-direction and the Y-direction) .
  • three actuators e.g. three linear motors
  • a transportation system may include a first actuator system connected to the multiple substrate support to move the multiple substrate support from the first position to the second position.
  • the transportation system may include a second actuator system connected to the second platform to move the second platform relative to the first platform.
  • the second actuator system may be configured to move the second platform relative to the first platform during the movement of the multiple substrate support from the first position to the second position.
  • the second actuator system can be an alignment actuator system for aligning the second platform.
  • FIGs. 6-7 show top views of two examples of a transportation system 10 according to embodiments described herein.
  • the multiple substrate support 100 may include a first platform 110, a second platform 120 and/or a third platform 610 which may be mounted to the movable body 420.
  • the third platform 610 may be configured to support a third substrate (not shown).
  • the first platform 110, the second platform 120 and the third platform 610 project from the movable body 420 in a horizontal direction.
  • the second platform 120 and/or the third platform 610 may be movable with respect to the movable body 420.
  • the second platform 120 and/or the third platform 610 may be movable with respect to the movable body 420 during a movement of the movable body 420 from the first position 160 to the second position 170.
  • the second platform 120 and the third platform 610 can each be translatable relative to the movable body 420 in a first direction and/or a second direction for aligning the second substrate and the third substrate, respectively, as indicated by the arrows.
  • the second platform 120 and the third platform 610 can each be rotatable relative to the movable body 420 about respective rotation axes 410 and 615 for aligning the second substrate and the third substrate, respectively.
  • the multiple substrate support 100 may include respective actuators for translating and/or rotating the second platform 120 and respective actuators for translating and/or rotating the third platform 610 relative to the movable body 420.
  • a multiple substrate support as described herein may include a third platform to support a third substrate.
  • the third platform may be mounted to the movable body.
  • the multiple substrate support including the first platform, the second platform and the third platform may be movable from the first position to the second position.
  • the third platform may be movable relative to the first platform.
  • the third platform may be movable relative to the first platform during the movement of the multiple substrate support from the first position to the second position.
  • the third platform may be movable relative to the first platform to perform an alignment of the third substrate, for example during the movement of the multiple substrate support from the first position to the second position.
  • the transportation system may include a third actuator system connected to the third platform to move the third platform relative to the first platform.
  • the third actuator system may be configured to move the third platform relative to the first platform during the movement of the multiple substrate support from the first position to the second position.
  • the third platform may be movable relative to the first platform in a first direction.
  • the third platform may be movable relative to the first platform in a first direction during the movement of the multiple substrate support from the first position to the second position.
  • the third platform may be movable relative to the first platform in a second direction.
  • the third platform may be movable relative to the first platform in a second direction during the movement of the multiple substrate support from the first position to the second position.
  • the third platform may be movable relative to the first platform over an angle.
  • the third platform may be movable relative to the first platform over an angle during the movement of the multiple substrate support from the first position to the second position.
  • a multiple substrate support as described herein may include a plurality of platforms to support a plurality of substrates.
  • the multiple substrate support may include 2, 3, 4, 5, 6 or more platforms.
  • Each platform may be configured for supporting a respective substrate.
  • the first platform 110 may be a fixed platform.
  • the first substrate 115 on the first platform 110 may remain in a same position relative to the movable body during the movement of the movable body from the first position 160 to the second position 170.
  • the second substrate 125 and the third substrate can be aligned relative to the first substrate 115 by adjusting the positions of the second platform 120 and the third platform 610 relative to the movable body 420.
  • a common orientation of the three substrates may be provided by suitably moving the second platform 120 and the third platform relative to the first platform 110 while the position of the first platform 110 relative to the movable body 420 stays fixed.
  • an orientation of a processing device configured for processing the substrates at the second position 170 can be adjustable based on the common orientation of the three substrates.
  • the aspect that the first platform 110 is not movable for aligning the first substrate 115 can be compensated by having a processing device having an adjustable position (e.g. a printing head which can be translated and rotated in a horizontal plane to align the orientation of the printing head with the common orientation of the three substrates).
  • a fixed first platform 110 can be cheaper and easier to design and construct than a first platform 110 which is movable like the second platform 120.
  • the transportation system is equally effective as, and at the same time cheaper and less complex than, a system where all three platforms are movable.
  • the first platform 110 can be movable relative to the movable body 420, like the second platform 120, as shown in Fig. 7.
  • the first platform 110 may be translatable in a first direction and/or a second direction as shown by the arrows, and/or be rotatable with respect to a rotation axis 710.
  • An actuator system similar to the second actuator system can provide the movement of the first platform 110.
  • a transportation system may include an inspection system arranged to inspect at least one of the first substrate supported by the first platform and the second substrate supported by the second platform.
  • the inspection system may be arranged to inspect at least one of the first substrate supported by the first platform and the second substrate supported by the second platform before the multiple substrate support reaches the second position.
  • An exemplary inspection system is discussed below in relation to Figs. 9-11.
  • the transportation system may include a controller connected to the inspection system and to the second actuator system. The controller may be configured to control, based on inspection data provided by the inspection system, an alignment of the second substrate performed by the second actuator system.
  • Fig. 8 shows a deposition apparatus 800 for deposition (e.g.
  • the deposition apparatus 800 may be a printing apparatus.
  • the deposition apparatus 800 includes a deposition head arrangement including a first deposition head 810, e.g. a first printing head. Further deposition heads may be included in the deposition head arrangement.
  • the deposition apparatus 800 can be a screen printing apparatus including a screen device.
  • the deposition apparatus 800 may be configured for printing a material on a substrate by pressing the material, such as a printing paste, through the screen device.
  • the first deposition head 810 may be a first printing head including a squeegee for pressing the material through the screen device.
  • the deposition apparatus can be configured for inkjet printing and/or laser printing.
  • a pattern which is deposited on a substrate may include one or more features, such as lines, dots, and other shapes.
  • a pattern may include a plurality of lines, such as fingers and/or busbars, which may be printed on a substrate such as a solar cell.
  • a pattern may in some cases include a single line, e.g. a single straight line, such as an electrically conductive adhesive (ECA) printed on a solar cell piece to allow the solar cell piece to be electrically and mechanically connected to a further solar cell piece.
  • ECA electrically conductive adhesive
  • Various other shapes, including simple and complex shapes, are possible for the patterns deposited by a deposition apparatus according to embodiments described herein.
  • the deposition apparatus 800 includes a multiple substrate support 100 as described herein.
  • the multiple substrate support 100 can be a printing nest.
  • Fig. 8 shows the multiple substrate support 100 in a deposition position.
  • the multiple substrate support 100 may be a movable substrate support which is movable into and out of the deposition position.
  • the multiple substrate support 100 may be movable from a first position 160 to a second position 170, as described herein, wherein the second position 170 is the deposition position.
  • the multiple substrate support 100 may be movable from the deposition position back to the first position 160 or to a third position.
  • the first substrate 115 e.g. a first solar cell or solar cell piece
  • the second substrate 125 e.g. a second solar cell or solar cell piece
  • the dashed line 815 schematically represents a first pattern being deposited on the first substrate 115 by the first deposition head 810.
  • the dashed line 825 schematically represents a second pattern being deposited on the second substrate 125 by the first deposition head 810.
  • the first deposition head 810 may be a common deposition head configured for depositing the first pattern on the first substrate and, in parallel thereto, e.g. simultaneously, depositing the second pattern on the second substrate 125.
  • the first deposition head 810 may be a printing head including a squeegee which is configured to move in a substantially horizontal direction in order to simultaneously print the first pattern and the second pattern in one stroke of the squeegee.
  • a faster deposition process is provided as compared to a deposition process wherein the patterns are deposited on the substrates one after the other.
  • the substrates on the multiple substrate support 100 may be aligned.
  • the substrates are aligned by the multiple substrate support 100 as described above, and the same multiple substrate support 100 is subsequently used for supporting the substrates during deposition.
  • the substrates are not transferred to a different support for performing the deposition, but can be kept on the same support.
  • the second platform 120 can be moved relative to the first platform 110 for aligning the second substrate 125.
  • the second platform 120 can be moved relative to the first platform 110 for aligning the second substrate 125 during a movement of the multiple substrate support 100 from the first position 160 to the deposition position e.g. the second position 170.
  • the substrates may be well-aligned by the time the multiple substrate support 100 arrives at the deposition position, so that the first pattern and the second pattern can be deposited directly after the arrival of the multiple substrate support 100 in the deposition position. In light thereof, a faster process is provided, since the deposition apparatus 800 does not have to wait for an alignment operation to be performed after arrival of the multiple substrate support 100 in the deposition position.
  • FIG. 8 The upper and lower portions of Fig. 8 show the multiple substrate support 100 in a side view and a top view, respectively.
  • the substrates shown in Fig. 8 have been aligned with respect to each other.
  • the second platform 120 has been rotated over an angle in order to align the second substrate 125 with respect to the first substrate 115, similar to the situation described with respect to Figs. 1-3.
  • a translational alignment is also possible, as described herein.
  • the platforms of the multiple substrate support may be aligned with respect to each other after the multiple substrate support has arrived in the deposition position (second position), e.g. while the multiple substrate support is stationary in the deposition position.
  • second position e.g. while the multiple substrate support is stationary in the deposition position.
  • an alignment after arrival in the deposition position may be performed in embodiments where the platforms are supported by a rotatable table as described herein.
  • a deposition apparatus e.g. a printing apparatus for deposition on two or more substrates used for the manufacture of photovoltaic devices.
  • the deposition apparatus includes a deposition head arrangement including a first deposition head, e.g. a first printing head.
  • the deposition apparatus includes a multiple substrate support comprising a first platform to support a first substrate and a second platform to support a second substrate.
  • the first substrate may be a first solar cell or a first solar cell piece.
  • the second substrate may be a second solar cell or a second solar cell piece.
  • the multiple substrate support is arranged in or movable to a deposition position. In the deposition position, the deposition head arrangement, particularly a first deposition head of the deposition head arrangement, faces both the first platform and the second platform.
  • the second platform is movable relative to the first platform.
  • the first substrate as described herein may be a first solar cell or a first solar cell piece.
  • the second substrate may be a second solar cell or a second solar cell piece.
  • the second platform may be movable relative to the first platform to perform an alignment of the second substrate.
  • the multiple substrate support may be movable over a first distance from a first position to the deposition position.
  • the second platform may be movable relative to the first platform during the movement of the multiple substrate support from the first position to the deposition position.
  • the deposition position can be understood as the second position 170 as described herein.
  • the first deposition head may be a first printing head.
  • the first deposition head may include a screen device for screen printing.
  • a deposition apparatus may include the transportation system according to embodiments described herein.
  • the deposition apparatus may include a first actuator system connected to the multiple substrate support to move the multiple substrate support from the first position to the deposition position, as described herein.
  • the deposition apparatus may include a second actuator system connected to the second platform to move the second platform relative to the first platform, as descried herein.
  • the second actuator system may be configured to move the second platform relative to the first platform during the movement of the multiple substrate support from the first position to the printing position.
  • Figs. 9-11 show a side view of a deposition apparatus 800, e.g. a printing apparatus according to embodiments described herein.
  • Fig. 9 shows the multiple substrate support 100 in a first position.
  • Fig. 11 shows the multiple substrate support 100 in a deposition position.
  • Fig. 10 shows the multiple substrate support 100 in an intermediate position during a movement from the first position to the deposition position.
  • the position of the second platform 120 relative to the first platform 110 may be adjusted in order to perform an alignment of the second substrate 125 (on-the-fly alignment).
  • the position of the second platform 120 relative to the first platform 110 may be adjusted while the multiple substrate is in the second position (stationary alignment).
  • the second platform 120 is translated relative to the first platform 110.
  • the first substrate 115 and the second substrate are spaced apart by a distance 902.
  • the second platform 120 is translated to the left in order to decrease the distance between the two substrates.
  • the first substrate 115 and the second substrate 125 are spaced apart by a distance 904 which is smaller than the distance 902.
  • the first substrate 115 and the second substrate 125 shown in Fig. 11 are well-aligned and ready for receiving a first and second pattern, respectively, from the first deposition head 810.
  • the second platform 120 may be translated to the right in order to increase the distance between the two substrates, or the second platform 120 may be translated in a different direction or rotated, or a combination thereof, depending on the position of the substrates.
  • a deposition apparatus 800 may include an inspection system 910.
  • the inspection system 910 collects data regarding the position of the first substrate 115 disposed on the first platform 110 and/or the second substrate 125 disposed on the second platform 120 (and/or any further substrate supported by the multiple substrate support 100).
  • the inspection system 910 may include an optical camera which may be configured for generating an image of the substrates.
  • the inspection system 910 may be arranged for inspecting the substrates while the multiple substrate support 100 is in or near the first position, particularly before the multiple substrate support 100 arrives in the second position.
  • the data gathered by the inspection system 910 may be transmitted to a controller (not shown).
  • the controller may control the actuator(s) of the multiple substrate support 100, for example, for moving the second platform 120 relative to the first platform 110 for aligning the second substrate 125.
  • the inspection system 910 and/or the controller may be included in the transportation system as such, e.g. the transportation system described in connection with Figs. 1-7.
  • a deposition apparatus may include an inspection system arranged to inspect at least one of the first substrate supported by the first platform and the second substrate supported by the second platform.
  • the inspection system may be arranged to inspect at least one of the first substrate supported by the first platform and the second substrate supported by the second platform before the multiple substrate support reaches the deposition position.
  • the deposition apparatus may include a controller connected to the inspection system and to the second actuator system. The controller may be configured to control, based on inspection data provided by the inspection system, an alignment of the second substrate performed by the second actuator system.
  • a multiple substrate support of a deposition apparatus as described herein may include a first platform, a second platform and a third platform.
  • the multiple substrate support may be arranged in or movable to the deposition position, wherein in the deposition position the deposition head arrangement faces the first platform, the second platform and the third platform.
  • An inspection system as described herein may be arranged to inspect at least one of the first substrate supported by the first platform, the second substrate supported by the second platform and the third substrate supported by the third platform.
  • a controller as described herein may be connected to the third actuator system. The controller may be configured to control, based on inspection data provided by the inspection system, an alignment of the third substrate performed by the third actuator system.
  • a deposition apparatus may be part of a solar cell production apparatus.
  • the first substrate may be a first solar cell or first solar cell piece.
  • the second substrate may be a second solar cell or second solar cell piece.
  • the deposition head arrangement may be a printing head arrangement which may be configured for printing at least one of a first adhesive (e.g. an electrically conductive adhesive, a deposition paste, such as a paste including Ag or Al), one or more first busbars and one or more first fingers on the first substrate.
  • the printing head arrangement may be configured for printing at least one of a second adhesive (e.g. an electrically conductive adhesive), a deposition paste, such as a paste including Ag or Al), one or more second busbars and one or more second fingers on the second substrate.
  • a printing apparatus for printing on two or more substrates used for the manufacture of photovoltaic devices.
  • the printing apparatus includes a printing head arrangement including a first printing head.
  • the first printing head may include a screen device for screen printing.
  • the printing apparatus includes a transportation system.
  • the transportation system includes a movable body.
  • the transportation system includes a first platform mounted to or included in the movable body.
  • the transportation system includes a second platform mounted to or included in the movable body.
  • the transportation system includes a first actuator system connected to the movable body to transport the movable body over a first distance from a first position to a printing position. In the printing position, the first printing head faces both the first platform and the second platform.
  • the transportation system includes a second actuator system connected to the second platform to move the second platform relative to the first platform during the movement of the movable body from the first position to the printing position.
  • the printing position, or deposition position may be the second position as described herein.
  • a method for transporting two or more substrates used for the manufacture of photovoltaic devices includes supporting a first substrate by a first platform.
  • the first substrate is a first solar cell or a first solar cell piece.
  • the method includes supporting a second substrate by a second platform.
  • the second substrate is a second solar cell or second solar cell piece.
  • the method includes jointly transporting the first platform supporting the first substrate and the second platform supporting the second substrate.
  • the method includes moving the second platform supporting the second substrate relative to the first platform supporting the first substrate.
  • the second platform may be moved relative the first platform during the joint transportation of the first platform and the second platform.
  • the method can be carried out using a transportation system according to embodiments described herein.
  • the second platform supporting the second substrate may be moved in a first direction relative to the first platform supporting the first substrate.
  • the second platform supporting the second substrate may be moved in a second direction relative to the first platform supporting the first substrate the second platform supporting the second substrate may be moved over an angle relative to the first platform supporting the first substrate.
  • the second platform supporting the second substrate may be moved relative to the first platform supporting the first substrate to perform an alignment of the second substrate, for example to perform an alignment during the joint transportation of the first platform and the second platform.
  • a method for deposition on two or more substrates used for the manufacture of photovoltaic devices includes supporting a first substrate by a first platform.
  • the first substrate may be a first solar cell or a first solar cell piece.
  • the method includes supporting a second substrate by a second platform.
  • the second substrate may be a second solar cell or a second solar cell piece.
  • the method includes moving the second platform supporting the second substrate relative to the first platform supporting the first substrate.
  • the method includes depositing, e.g. printing, at least one first feature on the first substrate supported by the first platform and, in parallel, depositing, e.g. printing, at least one second feature on the second substrate supported by the second platform.
  • the at least one first feature can be a first pattern.
  • the at least one second feature can be a second pattern.
  • the method may be performed using a deposition or printing apparatus according to embodiments described herein. [0085] The method may include jointly transporting the first platform supporting the first substrate and the second platform supporting the second substrate. The second platform may be moved relative to the first platform during the joint transportation of the first platform and the second platform.
  • the first platform supporting the first substrate and the second platform supporting the second substrate may be jointly transported to a deposition position, e.g. a second position 170 as described herein.
  • the at least one first feature and the at least one second feature may be deposited while the first platform and the second platform are in the deposition position.
  • the method may include inspecting, e.g. by an inspection system as described herein, at least one of the first substrate supported by the first platform and the second substrate supported by the second platform.
  • the second platform supporting the second substrate may be moved relative to the first platform supporting the first substrate to perform an alignment of the second substrate in response to inspecting at least the second substrate supported by the second platform.
  • Depositing the at least one first feature or the at least one second feature may include printing, such as screen printing, the at least one first feature or the at least one second feature.
  • a method according to embodiments described herein can be part of method for manufacturing one or more photovoltaic devices.
  • a processing apparatus for processing two or more substrates used for the manufacture of photovoltaic devices includes a processing device.
  • the processing apparatus includes a multiple substrate support as described herein.
  • the multiple substrate support includes a first platform to support a first substrate and a second platform to support a second substrate, as described herein.
  • the first substrate may be a first solar cell or a first solar cell piece.
  • the second substrate may be a second solar cell or a second solar cell piece.
  • the second platform is movable relative to the first platform, for example to perform an alignment, as described herein.
  • the second platform may be movable relative to the first platform by a second actuator system as descried herein.
  • the multiple substrate support is arranged in or movable to a processing position, e.g. by a first actuator system as described herein.
  • the first platform and the second platform are within a processing range of the processing device, so that the processing device can process the first substrate supported by the first platform and the second substrate supported by the second platform when the multiple substrate support is in the processing position.
  • the processing apparatus can be a deposition apparatus, such as a printing apparatus, as described herein.
  • the processing device can be a deposition head arrangement as described herein.
  • the processing device can, for example, be a laser device which may be configured for laser processing the substrates supported by the multiple substrate support.
  • That the platforms (first platform, second platform, and possible further platforms) of the multiple substrate support are within a processing range of the processing device when the multiple substrate support is in the processing position may be understood in the following sense.
  • the multiple platforms of the multiple substrate support are each in a position or area which is suitable for being processed by the processing device.
  • a parallel processing of two or more platforms may be possible.
  • the processing position may be a position below the printing head arrangement such that the platforms each face the printing head arrangement.
  • respective patterns may be deposited in parallel on the substrates on the platforms.
  • the processing position may be the second position, deposition position, or printing position as described herein.
  • the processing position may be a position below the laser device such that the platforms of the multiple substrate support are in a position adapted for receiving a laser beam of the laser device.
  • the multiple substrates on the platforms may be processed in parallel by respective laser beams emitted by the laser device.
  • the processing device may be configured to process the first platform and the second platform (and possible further platforms) of the multiple substrate support in parallel when the multiple substrate support is in the processing position.
  • the multiple substrate support can be a multiple substrate support of a transportation system according to embodiments described herein.
  • the processing position can be the second position 170 as described herein.
  • a method for processing two or more substrates used for the manufacture of photovoltaic devices includes supporting a first substrate by a first platform, as described herein.
  • the first substrate may be a first solar cell or a first solar cell piece.
  • the method includes supporting a second substrate by a second platform, as described herein.
  • the second substrate may be a second solar cell or a second solar cell piece.
  • the method includes moving the second platform supporting the second substrate relative to the first platform supporting the first substrate, as described herein.
  • the method includes processing the first substrate supported by the first platform and, in parallel, processing the second substrate supported by the second platform.
  • the substrates may be processed by a processing device as described herein.
  • the method may be performed by a processing apparatus as described herein.

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Abstract

L'invention concerne un système de transport (10) pour transporter au moins deux substrats utilisés pour la fabrication de dispositifs photovoltaïques. Le système de transport comprend un support de substrat multiple (100) comprenant une première plateforme (110) pour supporter un premier substrat (115) et une seconde plateforme (120) pour supporter un second substrat (125). Le premier substrat est une première cellule solaire ou une première pièce de cellule solaire. Le second substrat est une seconde cellule solaire ou une seconde pièce de cellule solaire. La seconde plateforme est mobile par rapport à la première plateforme. Le support de substrat multiple (100) est mobile sur une première distance d'une première position (160) à une seconde position (170) pour fournir un transport commun de la première plateforme (110) et de la seconde plateforme (120).
PCT/EP2021/054020 2021-02-18 2021-02-18 Système de transport pour transporter au moins deux substrats, appareil d'impression pour impression sur deux substrats ou plus, et procédés pour les mettre en oeuvre WO2022174904A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/EP2021/054020 WO2022174904A1 (fr) 2021-02-18 2021-02-18 Système de transport pour transporter au moins deux substrats, appareil d'impression pour impression sur deux substrats ou plus, et procédés pour les mettre en oeuvre
EP21706916.0A EP4295416A1 (fr) 2021-02-18 2021-02-18 Système de transport pour transporter au moins deux substrats, appareil d'impression pour impression sur deux substrats ou plus, et procédés pour les mettre en oeuvre

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2021/054020 WO2022174904A1 (fr) 2021-02-18 2021-02-18 Système de transport pour transporter au moins deux substrats, appareil d'impression pour impression sur deux substrats ou plus, et procédés pour les mettre en oeuvre

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WO2022174904A1 true WO2022174904A1 (fr) 2022-08-25

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EP (1) EP4295416A1 (fr)
WO (1) WO2022174904A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2353759A (en) * 1999-08-30 2001-03-07 Minami Co Ltd A screen printing apparatus with a camera for checking and inspection
JP2007196521A (ja) * 2006-01-26 2007-08-09 Tomoo Matsushita パターン形成装置
US20090314201A1 (en) * 2008-06-19 2009-12-24 Baccini Andrea Accurate conveyance system useful for screen printing
EP2711183A1 (fr) * 2012-09-25 2014-03-26 Ekra Automatisierungssysteme GmbH Dispositif d'impression, système d'impression, procédé

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2353759A (en) * 1999-08-30 2001-03-07 Minami Co Ltd A screen printing apparatus with a camera for checking and inspection
JP2007196521A (ja) * 2006-01-26 2007-08-09 Tomoo Matsushita パターン形成装置
US20090314201A1 (en) * 2008-06-19 2009-12-24 Baccini Andrea Accurate conveyance system useful for screen printing
EP2711183A1 (fr) * 2012-09-25 2014-03-26 Ekra Automatisierungssysteme GmbH Dispositif d'impression, système d'impression, procédé

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