WO2022172129A1 - 発光装置および電子機器 - Google Patents

発光装置および電子機器 Download PDF

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Publication number
WO2022172129A1
WO2022172129A1 PCT/IB2022/050880 IB2022050880W WO2022172129A1 WO 2022172129 A1 WO2022172129 A1 WO 2022172129A1 IB 2022050880 W IB2022050880 W IB 2022050880W WO 2022172129 A1 WO2022172129 A1 WO 2022172129A1
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Prior art keywords
layer
light
electron
emitting device
heteroaromatic
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English (en)
French (fr)
Japanese (ja)
Inventor
吉安唯
橋本直明
高橋辰義
川上祥子
瀬尾哲史
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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Priority to CN202280014543.1A priority Critical patent/CN116889120A/zh
Priority to US18/275,759 priority patent/US20240147745A1/en
Priority to KR1020237030151A priority patent/KR20230142580A/ko
Priority to JP2022581034A priority patent/JPWO2022172129A1/ja
Publication of WO2022172129A1 publication Critical patent/WO2022172129A1/ja
Anticipated expiration legal-status Critical
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/805—Electrodes
    • H10K59/8051—Anodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/12—Light sources with substantially two-dimensional [2D] radiating surfaces
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
    • H10K50/125—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers specially adapted for multicolour light emission, e.g. for emitting white light
    • H10K50/13—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers specially adapted for multicolour light emission, e.g. for emitting white light comprising stacked EL layers within one EL unit
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/14—Carrier transporting layers
    • H10K50/16—Electron transporting layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/17—Carrier injection layers
    • H10K50/171—Electron injection layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/805—Electrodes
    • H10K59/8052—Cathodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/87—Passivation; Containers; Encapsulations
    • H10K59/871—Self-supporting sealing arrangements
    • H10K59/8722—Peripheral sealing arrangements, e.g. adhesives, sealants
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/87—Passivation; Containers; Encapsulations
    • H10K59/873—Encapsulations
    • H10K59/8731—Encapsulations multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/90—Assemblies of multiple devices comprising at least one organic light-emitting element
    • H10K59/95—Assemblies of multiple devices comprising at least one organic light-emitting element wherein all light-emitting elements are organic, e.g. assembled OLED displays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
    • H10K71/231—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers
    • H10K71/233—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers by photolithographic etching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10—Organic polymers or oligomers
    • H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60—Organic compounds having low molecular weight
    • H10K85/631—Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine
    • H10K85/636—Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine comprising heteroaromatic hydrocarbons as substituents on the nitrogen atom
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60—Organic compounds having low molecular weight
    • H10K85/649—Aromatic compounds comprising a hetero atom
    • H10K85/657—Polycyclic condensed heteroaromatic hydrocarbons
    • H10K85/6572—Polycyclic condensed heteroaromatic hydrocarbons comprising only nitrogen in the heteroaromatic polycondensed ring system, e.g. phenanthroline or carbazole

Definitions

  • One embodiment of the present invention relates to an organic compound, a light-emitting element, a light-emitting device, a display module, a lighting module, a display device, a light-emitting device, an electronic device, a lighting device, and an electronic device.
  • a technical field of one embodiment of the invention disclosed in this specification and the like relates to a product, a method, or a manufacturing method.
  • one aspect of the invention relates to a process, machine, manufacture, or composition of matter.
  • the technical field of one embodiment of the present invention disclosed in this specification more specifically includes semiconductor devices, display devices, liquid crystal display devices, light-emitting devices, lighting devices, power storage devices, storage devices, imaging devices, and the like. Driving methods or their manufacturing methods can be mentioned as an example.
  • Light-emitting devices (organic EL devices) utilizing electroluminescence (EL) using organic compounds have been put to practical use.
  • the basic structure of these light-emitting devices is to sandwich an organic compound layer (EL layer) containing a light-emitting material between a pair of electrodes.
  • EL layer organic compound layer
  • Such a light-emitting device is self-luminous, when it is used as a pixel of a display, it has advantages such as high visibility and no need for a backlight, compared to liquid crystal, and is particularly suitable for a flat panel display.
  • Another great advantage of a display using such a light-emitting device is that it can be made thin and light. Another feature is its extremely fast response speed.
  • Light-emitting devices using such light-emitting devices are suitable for various electronic devices, and research and development are being pursued to find light-emitting devices with better characteristics.
  • an object of one embodiment of the present invention is to provide a light-emitting device manufactured by a photolithography method with higher definition and favorable characteristics.
  • one aspect of the present invention provides a light-emitting device formed using a photolithography method, in which an electron-transporting layer of the light-emitting device is composed of at least two organic compounds.
  • one aspect of the present invention has a first light emitting device and a second light emitting device adjacent to each other on an insulating plane, the first light emitting device having a first anode and a first cathode. and a first EL layer sandwiched between the first anode and the first cathode, the second light emitting device comprising a second anode, a second cathode, and the second EL layer.
  • the first EL layer having at least a first light-emitting layer and a first electron-transporting layer;
  • the first electron-transporting layer is located between the first light-emitting layer and the first cathode, and the second EL layer comprises at least a second light-emitting layer and a second electron-transporting layer.
  • the second electron-transporting layer is located between the second light-emitting layer and the second cathode
  • the first electron-transporting layer comprises at least a first heteroaromatic ring and a first organic compound different from the first heteroaromatic compound
  • the second electron-transporting layer has at least a second heteroaromatic ring and a second organic compound different from the second heteroaromatic compound
  • the edge of the first light-emitting layer and the edge of the first electron-transporting layer are When viewed from a direction perpendicular to the insulating plane, the first end substantially coincides, and the end of the second light-emitting layer and the end of the second electron-transporting layer are aligned with the insulating plane.
  • the second ends are substantially aligned when viewed in a vertical direction, and the distance between the first end and the second end facing each other is 2 ⁇ m to 5 ⁇ m.
  • the first electron-transporting layer includes a first heteroaromatic compound having a first heteroaromatic ring, and the first heteroaromatic compound. is composed of a different first organic compound, and the second electron-transporting layer comprises a second heteroaromatic compound having a second heteroaromatic ring and a second heteroaromatic compound different from the second heteroaromatic compound 2 organic compounds.
  • another aspect of the present invention has a first light-emitting device and a second light-emitting device adjacent to each other on an insulating plane, wherein the first light-emitting device includes a first anode and a first anode.
  • the second light emitting device comprising a second anode, a second cathode, and the a second EL layer sandwiched between a second anode and the second cathode
  • the first EL layer comprising at least a light-emitting layer 1a, a first charge It has a generation layer, a light-emitting layer 1b and an electron-transporting layer 1b in this order, the electron-transporting layer 1b being located between the light-emitting layer 1b and the first cathode
  • the second EL layer comprising: It has at least a light emitting layer 2a, a second charge generating layer, a light emitting layer 2b and an electron transporting layer 2b in this order from the second anode side, and the electron transporting layer 2b comprises the light emitting layer 2b and the second and the electron-transporting layer 1b comprises a first heteroaromatic compound having at least a first
  • the ends of the electron-transporting layer 2b are substantially coincident with the second ends when viewed in a direction perpendicular to the insulating plane, and the distance between the first and second ends facing each other is is a light-emitting device with a thickness of 2 ⁇ m to 5 ⁇ m.
  • the electron-transporting layer 1b includes a first heteroaromatic compound having a first heteroaromatic ring and a heteroaromatic compound different from the first heteroaromatic compound.
  • the electron-transporting layer 2b is composed of a first organic compound, a second heteroaromatic compound having a second heteroaromatic ring, and a second organic compound different from the second heteroaromatic compound. and a light-emitting device.
  • another embodiment of the present invention is a light-emitting device having the above structure, in which the first heteroaromatic ring and the second heteroaromatic ring are the same.
  • another embodiment of the present invention is a light-emitting device having the above structure, in which the first heteroaromatic compound and the second heteroaromatic compound are the same.
  • another embodiment of the present invention is a light-emitting device having the above structure, in which the first organic compound and the second organic compound are the same.
  • another embodiment of the present invention is a light-emitting device having the above structure, in which the first organic compound is an organic compound containing a heteroaromatic ring.
  • another embodiment of the present invention is a light-emitting device having the above structure, in which the first organic compound is an organic compound containing the same heteroaromatic ring as the first heteroaromatic ring.
  • another embodiment of the present invention is a light-emitting device having the above structure, in which the second organic compound is an organic compound containing a heteroaromatic ring.
  • another embodiment of the present invention is a light-emitting device having the above structure, in which the second organic compound is an organic compound containing the same heteroaromatic ring as the second heteroaromatic ring.
  • the first electron-transporting layer contains 10% or more by weight of the first heteroaromatic compound and the first organic compound.
  • both the second heteroaromatic compound and the second organic compound are contained in the second electron-transporting layer in an amount of 10% or more by weight.
  • both the first heteroaromatic compound and the first organic compound are contained in the electron-transporting layer 1b at a weight percentage of 10% or more
  • the second heteroaromatic compound and the second organic compound are both contained in the electron transport layer 2b in an amount of 10% or more by weight.
  • another embodiment of the present invention is a light-emitting device having the above structure, wherein the first organic compound and/or the second organic compound is a heteroaromatic compound containing two or more nitrogen atoms.
  • another embodiment of the present invention is a light-emitting device having the above structure, in which the first organic compound and/or the second organic compound each include a heteroaromatic ring containing two or more nitrogen atoms.
  • another embodiment of the present invention is a light-emitting device having the above structure, in which the first heteroaromatic compound and/or the second heteroaromatic compound contain two or more nitrogen atoms.
  • the first electron-transporting layer and the second electron-transporting layer or the electron-transporting layer 1b and the electron-transporting layer 2b do not contain a metal complex. It is a device.
  • the first electron-transporting layer and the second electron-transporting layer or the electron-transporting layer 1b and the electron-transporting layer 2b include an alkali metal complex or alkaline earth This is a light emitting device that does not contain a metal group complex.
  • the first electron-transporting layer and the second electron-transporting layer do not contain an alkali metal quinolinolate or an alkaline earth metal quinolinolate.
  • another embodiment of the present invention is a light-emitting device having the above structure, in which the first heteroaromatic ring and/or the second heteroaromatic ring contain two or more nitrogen atoms.
  • the electron-transporting layer 1b and the electron-transporting layer 2b do not contain lithium.
  • another embodiment of the present invention is a light-emitting device having the above structure, wherein the first heteroaromatic ring and/or the second heteroaromatic ring is a ⁇ -electron deficient heteroaromatic ring.
  • another embodiment of the present invention is a light-emitting device having the above structure, wherein the first heteroaromatic ring and/or the second heteroaromatic ring are condensed heteroaromatic rings.
  • the first heteroaromatic compound and/or the second heteroaromatic compound is an organic compound having a ⁇ -electron deficient heteroaromatic ring. It is a device.
  • the first heteroaromatic ring and/or the second heteroaromatic ring are a heteroaromatic ring having a polyazole skeleton, a heteroaromatic ring having a pyridine skeleton,
  • the light-emitting device includes either a heteroaromatic ring having a diazine skeleton or a heteroaromatic ring having a triazine skeleton.
  • the first EL layer has an electron-transporting layer 1a between the light-emitting layer 1a and the first intermediate layer
  • the second The EL layer has an electron-transporting layer 2a between the light-emitting layer 2a and the second intermediate layer
  • the first electron-transporting layer and the second electron-transporting layer are each connected to the electron-transporting layer 1b.
  • a light-emitting device having a structure different from that of the electron-transporting layer 2b.
  • the first EL layer has a first electron-transporting layer between the light-emitting layer la and the first intermediate layer; 2 EL layers have a 2a electron-transporting layer between the light-emitting layer 2a and the second intermediate layer, wherein the 1a electron-transporting layer and the 2a electron-transporting layer each comprise the
  • the light emitting device has the same structure as the electron transport layer 1b and the electron transport layer 2b.
  • another aspect of the present invention is a light-emitting device having the above structure, in which the electron-transporting layer 1a and/or the electron-transporting layer 2a are composed of one type of organic compound.
  • another embodiment of the present invention is a light-emitting device having the above structure, in which the first intermediate layer and the second intermediate layer are charge generation layers.
  • the first EL layer is between the first electron-transporting layer and the first cathode and is in contact with the first cathode.
  • the second EL layer has a second electron injection layer in contact with the second cathode between the second electron transport layer and the second cathode , wherein the first electron injection layer and the second electron injection layer are continuous in the first light emitting device and the second light emitting device.
  • another aspect of the present invention is the light-emitting device having the above structure, wherein the first cathode and the second cathode are continuous in the first light-emitting device and the second light-emitting device.
  • another embodiment of the present invention is an electronic device including any one of the above light-emitting devices, a sensor, an operation button, and a speaker or a microphone.
  • the light-emitting device in this specification includes an image display device using a light-emitting device.
  • a module in which a connector such as an anisotropic conductive film or TCP (Tape Carrier Package) is attached to the light emitting device a module in which a printed wiring board is provided at the end of the TCP, or a COG (Chip On Glass) method for the light emitting device
  • the light-emitting device may also include a module in which an IC (integrated circuit) is directly mounted. Additionally, lighting fixtures and the like may have light emitting devices.
  • a light-emitting device manufactured by a photolithography method with higher definition and favorable characteristics can be provided.
  • 1A-1D are diagrams representing light emitting devices.
  • 2A to 2H are diagrams illustrating a method for fabricating a light emitting device.
  • 3A to 3G are diagrams illustrating a method for fabricating a light emitting device.
  • 4A to 4H are diagrams illustrating a method for fabricating a light emitting device.
  • 5A to 5D are diagrams showing configuration examples of the display device.
  • 6A to 6F are diagrams illustrating an example of a method for manufacturing a display device.
  • 7A to 7F are diagrams illustrating an example of a method for manufacturing a display device.
  • FIG. 8 is a perspective view showing an example of a display device.
  • 9A and 9B are cross-sectional views showing an example of a display device.
  • FIG. 10A is a cross-sectional view showing an example of a display device.
  • FIG. 10B is a cross-sectional view showing an example of a transistor; 11A and 11B are perspective views showing an example of a display module.
  • FIG. 12 is a cross-sectional view showing an example of a display device.
  • FIG. 13 is a cross-sectional view showing an example of a display device.
  • FIG. 14 is a cross-sectional view showing an example of a display device.
  • 15A and 15B are diagrams illustrating configuration examples of display devices.
  • 16A and 16B are diagrams illustrating examples of electronic devices.
  • 17A to 17D are diagrams illustrating examples of electronic devices.
  • 18A to 18F are diagrams illustrating examples of electronic devices.
  • 19A to 19F are diagrams illustrating examples of electronic devices.
  • FIG. 20 is a photograph according to an example.
  • FIG. 21 is a photograph according to an example.
  • FIG. 22 is a diagram illustrating the configuration of a light-emitting device according to an example.
  • FIG. 23 shows luminance-current density characteristics of light-emitting device 1 and comparative light-emitting device 1.
  • FIG. 24 shows the current efficiency-luminance characteristics of light-emitting device 1 and comparative light-emitting device 1.
  • FIG. FIG. 25 shows luminance-voltage characteristics of light-emitting device 1 and comparative light-emitting device 1.
  • FIG. FIG. 26 shows the current-voltage characteristics of light-emitting device 1 and comparative light-emitting device 1.
  • FIG. 23 shows luminance-current density characteristics of light-emitting device 1 and comparative light-emitting device 1.
  • FIG. 24 shows the current efficiency-luminance characteristics of light-emitting device 1 and comparative light-emitting device 1.
  • FIG. 25 shows luminance-voltage characteristics of light-
  • FIG. 27 shows the external quantum efficiency-luminance characteristics of light-emitting device 1 and comparative light-emitting device 1.
  • FIG. 28 shows emission spectra of light-emitting device 1 and comparative light-emitting device 1.
  • FIG. 29 is a diagram showing the reliability of light-emitting device 1 and comparative light-emitting device 1.
  • FIG. 30A to 30D are diagrams representing light emitting devices.
  • 31A to 31H are diagrams showing a method of manufacturing a light emitting device.
  • 32A to 32G are diagrams showing a method of manufacturing a light emitting device.
  • 33A to 33H are diagrams showing a method for fabricating a light emitting device.
  • 34A and 34B are diagrams representing light emitting devices.
  • a device manufactured using a metal mask or FMM fine metal mask, high-definition metal mask
  • a device with an MM (metal mask) structure is sometimes referred to as a device with an MML (metal maskless) structure.
  • FIG. 1A to 1D show diagrams of the first light-emitting device in the light-emitting device of one embodiment of the present invention.
  • the light-emitting device is provided on a substrate 100 via an insulating layer 120 having an insulating plane, and in FIG. 112), a first light-emitting layer 113, a first electron-transporting layer 114, a first electron-injecting layer 115), and a cathode 102).
  • layers other than the first light-emitting layer 113 and the first electron-transporting layer 114 may or may not be provided, and a layer having multiple functions may be formed instead. good. Layers other than these include a carrier block layer, an excited block layer, and the like.
  • a transistor, a capacitor, wiring, and the like for driving the light emitting device may be provided between the insulating layer 120 and the substrate 100.
  • FIG. 1A the ends of anode 101 are covered by insulating layer 121 .
  • the first light-emitting device is fabricated through patterning and etching of the organic layer by photolithography. Since patterning and etching are performed after forming the first electron-transporting layer 114 and before forming the electron-injecting layer 115, the first hole-injecting layer 111, the first hole-transporting layer 112, the second The end portions of the light-emitting layer 113 and the first electron-transporting layer 114 are approximately aligned. This means that the edges of the substrate or the insulating layer 120 formed thereon substantially coincide when viewed from a direction perpendicular to the insulating plane.
  • the electron-injection layer 115 and the cathode 102 are formed later, they are the first hole-injection layer 111, the first hole-transport layer 112, the first light-emitting layer 113, and the first electron-transport layer. 114 is covered.
  • FIG. 1B shows a configuration in which the insulating layer 120 formed in FIG. 1A is not formed. Since the insulating layer 120 does not exist, a light-emitting device with higher definition and a higher aperture ratio can be manufactured.
  • FIG. 1C shows a configuration in which patterning and etching are performed even after manufacturing the cathode 102, and the cathode 102 and the electron injection layer 115 are also separated for each light emitting device. In this configuration, since the light emitting devices are separated from each other, it is easy to suppress the occurrence of problems such as short circuits and crosstalk.
  • FIG. 1D shows a configuration in which an insulating layer 125 and an insulating layer 126 are provided on the side surface of the organic layer. In this configuration, the presence of the insulating layers 125 and 126 makes it easy to suppress the occurrence of problems such as short circuits and crosstalk, and deterioration of the organic layers.
  • the first electron-transporting layer 114 is composed of a first heteroaromatic compound having at least a first heteroaromatic ring and a first organic compound different from the first heteroaromatic compound. This structure improves the heat resistance of the first electron transport layer 114 . Therefore, even if patterning by photolithography is performed at an appropriate temperature, progress of crystallization can be suppressed, and a high-definition light-emitting device with excellent characteristics can be obtained.
  • the first electron-transporting layer 114 preferably contains the first heteroaromatic compound having the first heteroaromatic ring because the electron-transporting property is improved. Further, it is preferable that the first organic compound also has a heteroaromatic ring, because the electron-transporting property is further improved. In addition, in the electron transport layer, the heteroaromatic ring is often responsible for electron transport. Therefore, the heteroaromatic ring of the first organic compound is preferably the same as the first heteroaromatic ring so that the first organic compound does not interfere with electron transport in the electron-transporting layer. Note that the first electron-transporting layer 114 is preferably composed of the first heteroaromatic compound and the first organic compound because a light-emitting device can be easily manufactured.
  • the first heteroaromatic compound and the first organic compound are both contained in the first electron transport layer 114 by 10% or more, preferably 20% or more, and more preferably 30% or more. It is preferable because the effect of improving the properties appears remarkably.
  • the first heteroaromatic ring of the first heteroaromatic compound is a condensed heteroaromatic ring
  • the thermophysical properties such as the glass transition temperature (Tg) are improved, but the In a single film, the interaction between molecules is strong and it becomes difficult to form a complete glassy state, so there is a problem that crystallization tends to occur over time even at temperatures below Tg.
  • the first heteroaromatic ring is preferably a condensed heteroaromatic ring.
  • the first heteroaromatic ring is preferably a ⁇ -electron-deficient heteroaromatic ring
  • the first heteroaromatic compound is, for example, an organic compound containing a heteroaromatic ring having a polyazole skeleton, or a diazine skeleton. It is preferably one or more of an organic compound containing a heteroaromatic ring and an organic compound containing a heteroaromatic ring having a triazine skeleton.
  • the distance between adjacent light-emitting devices can be narrowed.
  • the distance is 5 ⁇ m or less. , 3 ⁇ m or less, 2 ⁇ m or less, or even 1 ⁇ m or less.
  • the gap can be narrowed to 500 nm or less, 200 nm or less, 100 nm or less, or even 50 nm or less. This can significantly reduce the area of non-light-emitting regions that may exist between two adjacent light-emitting devices.
  • the aperture ratio can be 50% or more, 60% or more, 70% or more, 80% or more, or even 90% or more.
  • a second light emitting device adjacent to the first light emitting device also has a similar or similar configuration as the first light emitting device.
  • the second light-emitting device is also manufactured by patterning and etching the organic layers by photolithography, the ends of the hole injection layer, the hole transport layer, the light emitting layer, and the electron transport layer are substantially aligned. It has a shape.
  • the electron-transporting layer in the second light-emitting device is also composed of a second heteroaromatic compound having a second heteroaromatic ring and a second organic compound different from the second heteroaromatic compound.
  • the heat resistance of the electron-transporting layer is improved by adding the Therefore, even if patterning by photolithography is performed at an appropriate temperature, progress of crystallization can be suppressed, and a high-definition light-emitting device with excellent characteristics can be obtained.
  • the second electron-transporting layer has good electron-transporting properties by containing the second heteroaromatic compound having the second heteroaromatic ring.
  • the second organic compound also has a heteroaromatic ring, because the electron-transporting property is further improved.
  • the heteroaromatic ring is often responsible for electron transport. Therefore, the heteroaromatic ring of the second organic compound is preferably the same as the heteroaromatic ring of the second organic compound so that the second organic compound does not interfere with electron transport in the electron-transporting layer.
  • the second electron-transporting layer is preferably composed of the second heteroaromatic compound and the second organic compound because the light-emitting device can be easily produced.
  • the second heteroaromatic compound and the second organic compound both contain 10% or more, preferably 20% or more, and more preferably 30% or more in the second electron-transporting layer. It is preferable because the improvement effect of is remarkably exhibited.
  • the second heteroaromatic ring of the second heteroaromatic compound is a condensed heteroaromatic ring
  • thermophysical properties such as the glass transition temperature (Tg) are improved, but the second heteroaromatic compound
  • Tg glass transition temperature
  • the second heteroaromatic compound In a single film, the interaction between molecules is strong and it becomes difficult to form a complete glassy state, so there is a problem that crystallization tends to occur over time even at temperatures below Tg.
  • the second heteroaromatic ring is a condensed heteroaromatic ring, its crystallization can be suppressed under the influence of the second organic compound. That is, it is possible to prevent the film from crystallizing below Tg while improving the glass transition temperature. Therefore, the second heteroaromatic ring is preferably a condensed heteroaromatic ring.
  • the second heteroaromatic ring is preferably a ⁇ -electron-deficient heteroaromatic ring
  • the second heteroaromatic compound is, for example, an organic compound containing a heteroaromatic ring having a polyazole skeleton, or a diazine skeleton. It is preferably one or more of an organic compound containing a heteroaromatic ring and an organic compound containing a heteroaromatic ring having a triazine skeleton.
  • the first heteroaromatic ring and the second heteroaromatic ring are preferably the same. Further, if a common material can be used for the first light-emitting device and the second light-emitting device, the cost of the material can be reduced due to the effect of mass production. Therefore, it is preferred that the first heteroaromatic compound and the second heteroaromatic compound are the same. Also, the first organic compound and the second organic compound are preferably the same.
  • the first heteroaromatic compound and the first organic compound may be the same, and the second heteroaromatic compound and the second organic compound may be the same, and only the mixing ratio may be different.
  • the electron-transport layer preferably does not contain a metal complex.
  • metal complexes mention may be made of alkaline earth metal complexes and alkali metal complexes, in particular alkali metal quinolinolates or alkaline earth metal quinolinolates.
  • the light emitting device represented in FIG. 1A can be made as in FIGS. 2A-2H.
  • an insulating layer 120 having an insulating plane and a conductive film 101f to be an anode 101 are formed on a substrate 100 (FIGS. 2A and 2B).
  • the conductive film 101f is patterned and etched to form the anode 101 (FIG. 2C).
  • An insulating film 121f to be the insulating layer 121 is formed to cover the anode 101 (FIG. 2D).
  • An insulating layer 121 is formed by opening the insulating film 121f (FIG. 2E).
  • organic layers 111f, 112f, 113f, and 114f which will be the hole injection layer 111, the hole transport layer 112, the light emitting layer 113, and the electron transport layer 114, are formed by vapor deposition (FIG. 2F).
  • the organic layer 114f is a layer containing a first heteroaromatic compound having at least a first heteroaromatic ring and a first organic compound different from the first heteroaromatic compound, as described above.
  • the organic layers 111f, 112f, 113f, and 114f are patterned and etched by photolithography to form a hole injection layer 111, a hole transport layer 112, a light emitting layer 113, and an electron transport layer 114 (FIG. 2G).
  • heating is performed to cure the photoresist mask, and the electron transport layer 114 is composed of the first heteroaromatic compound having at least the first heteroaromatic ring and the first heteroaromatic compound as described above. Since the layer contains the first organic compound different from the compound, it has good heat resistance and can be heated at a temperature at which the photomask can be reliably cured. A light emitting device can be obtained. In addition, a highly reliable light-emitting device can be manufactured.
  • a protective layer or a sacrificial layer may be formed on the organic layer 114f to reduce damage caused by a solvent or the like. This reduces damage to the electron transport layer 114 and facilitates obtaining a light-emitting device with better characteristics.
  • an electron injection layer 115 and a cathode 102 can be formed to produce the light emitting device shown in FIG. 1A (FIG. 2H).
  • FIG. 1B a method for manufacturing the light-emitting device shown in FIG. 1B will be described with reference to FIGS. 3A to 3F.
  • formation is performed in the same manner as in FIGS. 2A to 2C until the anode 101 is formed (FIGS. 3A to 3C).
  • organic layers 111f, 112f, 113f, and 114f which will be the hole injection layer 111, the hole transport layer 112, the light emitting layer 113, and the electron transport layer 114, are formed by vapor deposition (FIG. 3D).
  • the organic layer 114f is a layer containing a first heteroaromatic compound having at least a first heteroaromatic ring and a first organic compound different from the first heteroaromatic compound, as described above.
  • the organic layers 111f, 112f, 113f, and 114f are patterned and etched by photolithography to form a hole injection layer 111, a hole transport layer 112, a light emitting layer 113, and an electron transport layer 114 (FIG. 3E).
  • heating is performed to cure the photoresist mask, and the electron transport layer 114 is composed of the first heteroaromatic compound having at least the first heteroaromatic ring and the first heteroaromatic compound as described above. Since the layer contains the first organic compound different from the compound, it has good heat resistance and can be heated at a temperature at which the photomask can be reliably cured. A light emitting device can be obtained. In addition, a highly reliable light-emitting device can be manufactured.
  • a protective layer or a sacrificial layer may be formed on the organic layer 114f to reduce damage caused by a solvent or the like. This reduces damage to the electron transport layer 114 and facilitates obtaining a light-emitting device with better characteristics.
  • an electron injection layer 115 and a cathode 102 can be formed to produce the light emitting device shown in FIG. 1B (FIG. 3F).
  • patterning and etching by photolithography can be performed to fabricate a light-emitting device having a shape as shown in FIG. 3G (FIG. 1C).
  • an insulating layer 120 having an insulating plane on a substrate 100, a conductive film 101f to be an anode 101, a hole injection layer 111, a hole transport layer 112, an organic layer 111f and 112f to be a light emitting layer 113 and an electron transport layer 114, Form 113f, 114f and sacrificial layer 127 (FIG. 4A).
  • the organic layer 114f is a layer containing a first heteroaromatic compound having at least a first heteroaromatic ring and a first organic compound different from the first heteroaromatic compound, as described above.
  • the organic layers 111f, 112f, 113f, 114f and the sacrificial layer 127 are patterned and etched by photolithography to form the hole injection layer 111, the hole transport layer 112, the light emitting layer 113 and the electron transport layer 114.
  • heating is performed to cure the photoresist mask, and the electron transport layer 114 is composed of the first heteroaromatic compound having at least the first heteroaromatic ring and the first heteroaromatic compound as described above. Since the layer contains the first organic compound different from the compound, it has good heat resistance and can be heated at a temperature at which the photomask can be reliably cured. A light emitting device can be obtained. In addition, a highly reliable light-emitting device can be manufactured.
  • the conductive film 101f is patterned and etched by photolithography or the like to form the anode 101 (FIG. 4C).
  • the mask for etching the anode 101 may be a mask prepared for etching the organic layer.
  • an insulating film 125f and an insulating film 126f to be the insulating layers 125 and 126 are formed.
  • the insulating film 125f and the insulating film 126f are preferably inorganic insulating films.
  • anisotropic etching is performed to remove the insulating film 126f, leaving only the insulating film 126f present on the side surfaces of the organic layer, thereby forming the insulating layer 126 (FIG. 4E).
  • the exposed insulating film 125f is removed to form the insulating layer 125 (FIG. 4F), and the exposed sacrificial layer 127 is removed to expose the electron transport layer 114 (FIG. 4G).
  • an electron injection layer 115 and a cathode 102 can be formed to produce the light emitting device shown in FIG. 1D (FIG. 4H).
  • FIGS. 30A to 30D show diagrams of a tandem light-emitting device, which is another structure of the first light-emitting device in the light-emitting device of one embodiment of the present invention. It should be noted that the description of the same configuration as the light emitting device shown in FIGS. 1A to 1D may be omitted.
  • the light-emitting device is provided on a substrate 100 via an insulating layer 120 having an insulating plane. 102 and has a tandem structure.
  • the light-emitting unit A 151a has at least a light-emitting layer A 113a
  • the light-emitting unit B 151b has at least a light-emitting layer B 113b and an electron transport layer B 114b.
  • a transistor, a capacitor, wiring, and the like for driving the light emitting device may be provided between the insulating layer 120 and the substrate 100.
  • FIG. 30A the ends of anode 101 are covered with insulating layer 121 .
  • the light-emitting device is fabricated through patterning and etching of organic layers by photolithography. After forming the electron transport layer B 114b in the light emitting unit B 151b, patterning and etching are performed before forming the electron injection layer B 115b.
  • the end of 151b has a shape that roughly matches.
  • the edges of the multiple organic layers included in the light-emitting unit A 151a and the edges of the multiple organic layers included in the light-emitting unit B 151b are also approximately aligned, and the light-emitting layer A 113a of the light-emitting unit A 151a and the light-emitting unit
  • the edges of the electron-transporting layer B 114b included in B 151b are also substantially aligned.
  • edges of the substrate or the insulating layer 120 formed thereon substantially coincide when viewed from a direction perpendicular to the insulating plane. Since the electron injection layer B 115b and the cathode 102 of the light emitting unit B are formed later, they cover the end portions of the light emitting unit A 151a, the intermediate layer 150 and the light emitting unit B 151b.
  • FIG. 30B shows a configuration in which the insulating layer 120 formed in FIG. 30A is not formed. Since the insulating layer 120 does not exist, a light-emitting device with higher definition and a higher aperture ratio can be manufactured.
  • FIG. 30C shows a configuration in which patterning and etching are performed even after manufacturing the cathode 102, and the cathode 102 and the electron transport layer 115 are also separated for each light emitting device. In this configuration, since the light emitting devices are separated from each other, it is easy to suppress the occurrence of problems such as short circuits and crosstalk.
  • FIG. 30D shows a configuration in which insulating layers 125 and 126 are provided on the side surfaces of the organic layer. In this configuration, the presence of the insulating layers 125 and 126 makes it easy to suppress the occurrence of problems such as short circuits and crosstalk, and deterioration of the organic layers.
  • the first light-emitting device in the light-emitting device of one embodiment of the present invention patterning and etching are performed after the formation of the first electron-transporting layer B 114b, so the heat resistance of the first electron-transporting layer B 114b is important.
  • the first electron-transporting layer B 114b comprises a first heteroaromatic compound having at least a first heteroaromatic ring and a first organic compound different from the first heteroaromatic compound , the light-emitting device has improved heat resistance of the first electron-transporting layer B 114b. Therefore, even if patterning by photolithography is performed at an appropriate temperature, progress of crystallization can be suppressed, and a high-definition light-emitting device with excellent characteristics can be obtained.
  • the first electron-transporting layer B 114b preferably contains the first heteroaromatic compound having the first heteroaromatic ring to improve the electron-transporting property. Further, it is preferable that the first organic compound also has a heteroaromatic ring, because the electron-transporting property is further improved. In addition, in the electron transport layer, the heteroaromatic ring is often responsible for electron transport. Therefore, the heteroaromatic ring of the first organic compound is preferably the same as the first heteroaromatic ring so that the first organic compound does not interfere with electron transport in the electron-transporting layer.
  • the first electron-transporting layer B 114b is preferably composed of the first heteroaromatic compound and the first organic compound because a light-emitting device can be easily manufactured.
  • the first heteroaromatic compound and the first organic compound are both contained in the first electron-transporting layer B 114b by 10% or more, preferably 20% or more, and more preferably 30% or more. It is preferable because the effect of improving the heat resistance appears remarkably.
  • the first heteroaromatic ring of the first heteroaromatic compound is a condensed heteroaromatic ring
  • the thermophysical properties such as the glass transition temperature (Tg) are improved, but the In a single film, the interaction between molecules is strong and it becomes difficult to form a complete glassy state, so there is a problem that crystallization tends to occur over time even at temperatures below Tg.
  • the first heteroaromatic ring is preferably a condensed heteroaromatic ring.
  • the first heteroaromatic ring is preferably a ⁇ -electron-deficient heteroaromatic ring
  • the first heteroaromatic compound is, for example, an organic compound containing a heteroaromatic ring having a polyazole skeleton, or a diazine skeleton. It is preferably one or more of an organic compound containing a heteroaromatic ring and an organic compound containing a heteroaromatic ring having a triazine skeleton.
  • the distance between adjacent light-emitting devices can be narrowed.
  • the distance is 5 ⁇ m or less. , 3 ⁇ m or less, 2 ⁇ m or less, or even 1 ⁇ m or less.
  • the gap can be narrowed to 500 nm or less, 200 nm or less, 100 nm or less, or even 50 nm or less. This can significantly reduce the area of non-light-emitting regions that may exist between two adjacent light-emitting devices.
  • the aperture ratio can be 50% or more, 60% or more, 70% or more, 80% or more, or even 90% or more.
  • a second light emitting device adjacent to the first light emitting device also has a similar or similar configuration as the first light emitting device.
  • the first light-emitting device has a configuration in which at least a second anode, a second EL layer (second light-emitting unit A, second intermediate layer, second light-emitting unit B) and cathode 102 are stacked in this order.
  • a light-emitting device having a tandem structure The second light-emitting unit A has at least the second light-emitting layer A, and the second light-emitting unit B has at least the second light-emitting layer B and the second electron-transporting layer B.
  • a second electron-transporting layer B is located between the second light-emitting layer B and the cathode.
  • the second light-emitting device is also manufactured by patterning and etching the organic layers by photolithography, the edges of the second light-emitting unit A, the second intermediate layer, and the second light-emitting unit B are roughly It has a matching shape.
  • the second electron-transporting layer B in the second light-emitting device also includes a second heteroaromatic compound having a second heteroaromatic ring and a second organic compound different from the second heteroaromatic compound. is intended to improve the heat resistance of the electron transport layer. Therefore, even if patterning by photolithography is performed at an appropriate temperature, progress of crystallization can be suppressed, and a high-definition light-emitting device with excellent characteristics can be obtained.
  • the second electron-transporting layer B has good electron-transporting properties by containing the second heteroaromatic compound having the second heteroaromatic ring.
  • the second organic compound also has a heteroaromatic ring, because the electron-transporting property is further improved.
  • the heteroaromatic ring is often responsible for electron transport. Therefore, the heteroaromatic ring of the second organic compound is preferably the same as the heteroaromatic ring of the second organic compound so that the second organic compound does not interfere with electron transport in the electron-transporting layer.
  • the second electron-transporting layer B is preferably composed of the second heteroaromatic compound and the second organic compound because the light-emitting device can be easily produced.
  • the second heteroaromatic compound and the second organic compound are both contained in the second electron-transporting layer B by 10% or more, preferably 20% or more, and more preferably 30% or more. It is preferable because the effect of improving the properties appears remarkably.
  • the second heteroaromatic ring of the second heteroaromatic compound is a condensed heteroaromatic ring
  • thermophysical properties such as the glass transition temperature (Tg) are improved, but the second heteroaromatic compound
  • Tg glass transition temperature
  • the second heteroaromatic compound In a single film, the interaction between molecules is strong and it becomes difficult to form a complete glassy state, so there is a problem that crystallization tends to occur over time even at temperatures below Tg.
  • the second heteroaromatic ring is a condensed heteroaromatic ring, its crystallization can be suppressed under the influence of the second organic compound. That is, it is possible to prevent the film from crystallizing below Tg while improving the glass transition temperature. Therefore, the second heteroaromatic ring is preferably a condensed heteroaromatic ring.
  • the second heteroaromatic ring is preferably a ⁇ -electron-deficient heteroaromatic ring
  • the second heteroaromatic compound is, for example, an organic compound containing a heteroaromatic ring having a polyazole skeleton, or a diazine skeleton. It is preferably one or more of an organic compound containing a heteroaromatic ring and an organic compound containing a heteroaromatic ring having a triazine skeleton.
  • the first heteroaromatic ring and the second heteroaromatic ring are preferably the same. Further, if a common material can be used for the first light-emitting device and the second light-emitting device, the cost of the material can be reduced due to the effect of mass production. Therefore, it is preferred that the first heteroaromatic compound and the second heteroaromatic compound are the same. Also, the first organic compound and the second organic compound are preferably the same.
  • first heteroaromatic compound and the first organic compound may be the same, and the second heteroaromatic compound and the second organic compound may be the same, and only the mixing ratio may be different.
  • first electron-transporting layer B and the second electron-transporting layer B the first light-emitting layer A and the second light-emitting layer A, the first light-emitting layer B and the second light-emitting layer B, and the other first light-emitting layer B
  • the configuration of the light emitting device and the configuration of the second light emitting device may be the same or different.
  • the electron-transport layer preferably does not contain a metal complex.
  • metal complexes mention may be made of alkaline earth metal complexes and alkali metal complexes, in particular alkali metal quinolinolates or alkaline earth metal quinolinolates.
  • the light emitting device represented in FIG. 30A can be made as in FIGS. 31A-31H.
  • the first electron-transporting layer B 114b comprises a first heteroaromatic compound having at least a first heteroaromatic ring and a first organic compound different from the first heteroaromatic compound
  • the heat resistance of the first electron-transporting layer B 114b is improved. Therefore, even if patterning by photolithography is performed at an appropriate temperature, progress of crystallization can be suppressed, and a high-definition light-emitting device with excellent characteristics can be obtained.
  • the first electron-transporting layer B 114b preferably contains the first heteroaromatic compound having the first heteroaromatic ring to improve the electron-transporting property. Further, it is preferable that the first organic compound also has a heteroaromatic ring, because the electron-transporting property is further improved. In addition, in the electron transport layer, the heteroaromatic ring is often responsible for electron transport. Therefore, the heteroaromatic ring of the first organic compound is preferably the same as the first heteroaromatic ring so that the first organic compound does not interfere with electron transport in the electron-transporting layer.
  • the first electron-transporting layer B 114b is preferably composed of the first heteroaromatic compound and the first organic compound because a light-emitting device can be easily manufactured.
  • the first heteroaromatic compound and the first organic compound are both contained in the first electron-transporting layer B 114b by 10% or more, preferably 20% or more, and more preferably 30% or more. It is preferable because the effect of improving the heat resistance appears remarkably.
  • the first heteroaromatic ring of the first heteroaromatic compound is a condensed heteroaromatic ring
  • the thermophysical properties such as the glass transition temperature (Tg) are improved, but the In a single film, the interaction between molecules is strong and it becomes difficult to form a complete glassy state, so there is a problem that crystallization tends to occur over time even at temperatures below Tg.
  • the first heteroaromatic ring is preferably a condensed heteroaromatic ring.
  • the first heteroaromatic ring is preferably a ⁇ -electron-deficient heteroaromatic ring
  • the first heteroaromatic compound is, for example, an organic compound containing a heteroaromatic ring having a polyazole skeleton, or a diazine skeleton. It is preferably one or more of an organic compound containing a heteroaromatic ring and an organic compound containing a heteroaromatic ring having a triazine skeleton.
  • the distance between adjacent light-emitting devices can be narrowed.
  • the distance is 5 ⁇ m or less. , 3 ⁇ m or less, 2 ⁇ m or less, or even 1 ⁇ m or less.
  • the gap can be narrowed to 500 nm or less, 200 nm or less, 100 nm or less, or even 50 nm or less. This can significantly reduce the area of non-light-emitting regions that may exist between two adjacent light-emitting devices.
  • the aperture ratio can be 50% or more, 60% or more, 70% or more, 80% or more, or even 90% or more.
  • a second light emitting device adjacent to the first light emitting device also has a similar or similar configuration as the first light emitting device.
  • the first light-emitting device has a configuration in which at least a second anode, a second EL layer (second light-emitting unit A, second intermediate layer, second light-emitting unit B) and cathode 102 are stacked in this order.
  • a light-emitting device having a tandem structure The second light-emitting unit A has at least the second light-emitting layer A, and the second light-emitting unit B has at least the second light-emitting layer B and the second electron-transporting layer B.
  • a second electron-transporting layer 2 is located between the second light-emitting layer B and the cathode.
  • the second light-emitting device is also manufactured by patterning and etching the organic layers by photolithography, the edges of the second light-emitting unit A, the second intermediate layer, and the second light-emitting unit B are roughly It has a matching shape.
  • the second electron-transporting layer B in the second light-emitting device also includes a second heteroaromatic compound having a second heteroaromatic ring and a second organic compound different from the second heteroaromatic compound. is intended to improve the heat resistance of the electron transport layer. Therefore, even if patterning by photolithography is performed at an appropriate temperature, progress of crystallization can be suppressed, and a high-definition light-emitting device with excellent characteristics can be obtained.
  • the second electron-transporting layer B has good electron-transporting properties by containing the second heteroaromatic compound having the second heteroaromatic ring.
  • the second organic compound also has a heteroaromatic ring, because the electron-transporting property is further improved.
  • the heteroaromatic ring is often responsible for electron transport. Therefore, the heteroaromatic ring of the second organic compound is preferably the same as the heteroaromatic ring of the second organic compound so that the second organic compound does not interfere with electron transport in the electron-transporting layer.
  • the second electron-transporting layer B is preferably composed of the second heteroaromatic compound and the second organic compound because the light-emitting device can be easily produced.
  • the second heteroaromatic compound and the second organic compound are both contained in the second electron-transporting layer B by 10% or more, preferably 20% or more, and more preferably 30% or more. It is preferable because the effect of improving the properties appears remarkably.
  • the second heteroaromatic ring of the second heteroaromatic compound is a condensed heteroaromatic ring
  • thermophysical properties such as the glass transition temperature (Tg) are improved, but the second heteroaromatic compound
  • Tg glass transition temperature
  • the second heteroaromatic compound In a single film, the interaction between molecules is strong and it becomes difficult to form a complete glassy state, so there is a problem that crystallization tends to occur over time even at temperatures below Tg.
  • the second heteroaromatic ring is a condensed heteroaromatic ring, its crystallization can be suppressed under the influence of the second organic compound. That is, it is possible to prevent the film from crystallizing below Tg while improving the glass transition temperature. Therefore, the second heteroaromatic ring is preferably a condensed heteroaromatic ring.
  • the second heteroaromatic ring is preferably a ⁇ -electron-deficient heteroaromatic ring
  • the second heteroaromatic compound is, for example, an organic compound containing a heteroaromatic ring having a polyazole skeleton, or a diazine skeleton. It is preferably one or more of an organic compound containing a heteroaromatic ring and an organic compound containing a heteroaromatic ring having a triazine skeleton.
  • the first heteroaromatic ring and the second heteroaromatic ring are preferably the same. Further, if a common material can be used for the first light-emitting device and the second light-emitting device, the cost of the material can be reduced due to the effect of mass production. Therefore, it is preferred that the first heteroaromatic compound and the second heteroaromatic compound are the same. Also, the first organic compound and the second organic compound are preferably the same.
  • first heteroaromatic compound and the first organic compound may be the same, and the second heteroaromatic compound and the second organic compound may be the same, and only the mixing ratio may be different.
  • first electron-transporting layer B and the second electron-transporting layer B the first light-emitting layer A and the second light-emitting layer A, the first light-emitting layer B and the second light-emitting layer B, and the other first light-emitting layer B
  • the configuration of the light emitting device and the configuration of the second light emitting device may be the same or different.
  • the electron-transport layer preferably does not contain a metal complex.
  • metal complexes mention may be made of alkaline earth metal complexes and alkali metal complexes, in particular alkali metal quinolinolates or alkaline earth metal quinolinolates.
  • the light emitting device represented in FIG. 30A can be made as in FIGS. 31A-31H.
  • an insulating layer 120 having an insulating plane and a conductive film 101f to be an anode 101 are formed on a substrate 100 (FIGS. 31A and 31B).
  • the conductive film 101f is patterned and etched to form the anode 101 (FIG. 31C).
  • An insulating film 121f to be the insulating layer 121 is formed to cover the anode 101 (FIG. 31D).
  • the insulating layer 121 is formed by opening the insulating film 121f (FIG. 31E).
  • the organic layers 151af, 150f, and 151bf are formed by vapor deposition (FIG. 31F).
  • the organic layer 114bf is a layer containing a first heteroaromatic compound having at least a first heteroaromatic ring and a first organic compound different from the first heteroaromatic compound, as described above.
  • the organic layers 151af, 150f, and 151bf are patterned and etched by photolithography to form the light-emitting unit A 151a, the intermediate layer 150, and the light-emitting unit B 151b (the electron transport layer B 114b). ) is created (FIG. 31G).
  • the photoresist mask is heated for hardening. Since it is a layer containing the first organic compound different from the group compound, it has good heat resistance and can be heated at a temperature at which the photomask can be reliably cured. A light-emitting device can be obtained. In addition, a highly reliable light-emitting device can be manufactured.
  • a protective layer or a sacrificial layer may be formed on the organic layer 114bf to reduce damage caused by a solvent or the like. This reduces damage to the electron-transporting layer B 114b, making it easier to obtain a light-emitting device with better characteristics.
  • an electron injection layer B 115b and a cathode 102 can be formed to fabricate the light emitting device shown in FIG. 30A (FIG. 31H).
  • FIG. 30B Next, a method for manufacturing the light-emitting device shown in FIG. 30B will be described with reference to FIGS. 32A to 32F.
  • 31A to 31C are formed until the anode 101 is formed (FIGS. 32A to 32C).
  • organic layers 151af, 150f, and 151bf (including 144bf) to be the light emitting unit A 151a, the intermediate layer 150, and the light emitting unit B 151b (including the electron transport layer B 114b) are formed by vapor deposition (FIG. 32D).
  • the organic layer 114bf is a layer containing a first heteroaromatic compound having at least a first heteroaromatic ring and a first organic compound different from the first heteroaromatic compound, as described above.
  • the organic layers 151af, 150f, and 151bf are patterned and etched by photolithography to form light emitting unit A 151a, intermediate layer 150, and light emitting unit B 151b (including electron transport layer B 114b).
  • the photoresist mask is heated for hardening. Since it is a layer containing the first organic compound different from the group compound, it has good heat resistance and can be heated at a temperature at which the photomask can be reliably cured. A light-emitting device can be obtained. In addition, a highly reliable light-emitting device can be manufactured.
  • a protective layer or a sacrificial layer may be formed on the organic layer 114bf to reduce damage caused by a solvent or the like. This reduces damage to the electron-transporting layer B 114b, making it easier to obtain a light-emitting device with better characteristics.
  • an electron injection layer B 115b and a cathode 102 can be formed to fabricate the light emitting device shown in FIG. 1B (FIG. 32F). After that, patterning and etching by photolithography can be performed to fabricate a light-emitting device having a shape as shown in FIG. 32G (FIG. 30C).
  • an insulating layer 120 having an insulating plane on a substrate 100, a conductive film 101f to be an anode 101, a light emitting unit A 151a, an intermediate layer 150, an organic layer 151af to be a light emitting unit B 151b (including an electron transport layer B 114b), Form 150f, 151bf (including 144bf) and sacrificial layer 127 (FIG. 33A).
  • the organic layer 114bf is a layer containing a first heteroaromatic compound having at least a first heteroaromatic ring and a first organic compound different from the first heteroaromatic compound, as described above.
  • the organic layers 151af, 150f, and 151bf (including 144bf) and the sacrificial layer 127 are patterned and etched by photolithography, whereby the light emitting unit A 151a, the intermediate layer 150, the light emitting unit B 151b (the electron transport layer B 114b) and sacrificial layer 127 (FIG. 33B).
  • the photoresist mask is heated for hardening. Since it is a layer containing the first organic compound different from the group compound, it has good heat resistance and can be heated at a temperature at which the photomask can be reliably cured. A light-emitting device can be obtained. In addition, a highly reliable light-emitting device can be manufactured.
  • the conductive film 101f is patterned and etched by photolithography or the like to form the anode 101 (FIG. 33C).
  • the mask for etching the anode 101 may be a mask prepared for etching the organic layer.
  • Insulating film 125f and an insulating film 126f to be the insulating layers 125 and 126 are formed.
  • Insulating film 125b and insulating film 126b are preferably inorganic insulating films.
  • anisotropic etching is performed to remove the insulating film 126f, leaving only the insulating film 126f present on the side portions of the organic layer, to form the insulating layer 126 (FIG. 33E).
  • the exposed insulating film 125f is removed to form the insulating layer 125 (FIG. 33F), and the exposed sacrificial layer 127 is removed to expose the electron transport layer B 114b (FIG. 33G).
  • an electron injection layer B 115b and a cathode 102 can be formed to fabricate the light emitting device shown in FIG. 30D (FIG. 33H).
  • the light-emitting device has the EL layer 103 (light-emitting unit A 151a, intermediate layer 150, light-emitting unit B 151b and electron injection layer B 115b) between the anode 101 and the cathode 102 as described above.
  • the light-emitting unit A 151a has, in order from the anode 101 side, a hole injection layer A 111a, a hole transport layer A 112a, a light-emitting layer A 113a and an electron transport layer A 114a. It has a layer B 112b, a light emitting layer B 113b, and an electron transport layer B 114b.
  • the electron-transporting layer B 114b is formed, followed by patterning and etching by photolithography to process the light-emitting unit A, the intermediate layer, and the light-emitting unit B into desired shapes.
  • the electron-transporting layer B 114b has a first heteroaromatic compound having a first heteroaromatic ring and a first organic compound different from the first heteroaromatic compound, thereby improving heat resistance.
  • the temperature that can withstand the heat treatment at the time of forming the resist mask rises, more precise patterning becomes possible.
  • the reliability of the light-emitting device is also improved.
  • the configurations of the electron transport layer B 114b and the electron transport layer A 114a may be the same or different.
  • the electron-transporting layer A 114a and the electron-transporting layer B 114b have the same structure, a light-emitting device with better heat resistance can be obtained.
  • the electron transport layer A 114a is composed of one type of organic compound, it is advantageous in terms of manufacturing cost.
  • FIG. 34B is a diagram schematically showing a first light emitting device 110_1 and a second light emitting device 110_2, which are adjacent light emitting devices.
  • the first light emitting device 110_1 includes a first light emitting unit A 151a1, a first intermediate layer 150_1, a first light emitting unit B 151b1 and an electron injection layer between the first anode 101_1 and the cathode 102 (common layer). B 115b (common layer).
  • the first light emitting unit A 151a1 consists of a first hole injection layer A 111a1, a first hole transport layer A 112a1, a first light emitting layer 113a1 and a first electron transport layer in this order from the first anode 101_1 side.
  • a first light-emitting unit B 151b1 has a first hole-transporting layer B 112b1, a first light-emitting layer B 113b1, and a first electron-transporting layer B 114b1.
  • patterning and etching by photolithography are performed after forming the first electron-transporting layer B 114b1 to form the first light-emitting unit A 151a1 and the first intermediate layer 150_1.
  • the first light emitting unit B 151b1 is processed into a desired shape. Therefore, the end portions of the first light emitting unit A 151a1, the first intermediate layer 150_1, and the first light emitting unit B 151b1 are shaped to approximately match each other.
  • the end portions of the plurality of organic layers included in the first light emitting unit A 151a1 and the end portions of the plurality of organic layers included in the first light emitting unit B 151b1 are also approximately matched.
  • the ends of the first light-emitting layer A 113a1 of the A 151a1 and the first electron-transporting layer B 114b1 included in the first light-emitting unit B 151b1 are also substantially aligned. This means that the edges of the substrate or the insulating layer 120 formed thereon substantially coincide when viewed from a direction perpendicular to the insulating plane.
  • the first electron-transporting layer B 114b has 1, a first heteroaromatic compound having a first heteroaromatic ring, and a first organic compound different from the first heteroaromatic compound, whereby the heat resistance is reduced. Since the resistance is improved and the temperature that can withstand the heat treatment at the time of forming the resist mask is increased, more precise patterning becomes possible. Moreover, the reliability of the light-emitting device is also improved. Both the first aromatic compound and the first organic compound should be contained in the first electron-transporting layer B 114b1 at a weight percentage of 10% or more, preferably 20% or more, and more preferably 30% or more. is preferred.
  • the second light emitting unit A 151a2 consists of a second hole injection layer A 111a2, a second hole transport layer A 112a2, a second light emitting layer 113a2 and a second electron transport layer in order from the second anode 101_2 side.
  • the second light-emitting unit B 151b2 has a second hole-transporting layer B 112b2, a second light-emitting layer B 113b2, and a second electron-transporting layer B 114b2.
  • the light-emitting device of one aspect of the present invention after forming the second electron-transporting layer B 114b1, patterning and etching by photolithography are performed to form the second light-emitting unit A 151a2, the second intermediate layer 150_2 and the second electron-transporting layer B 150_2.
  • Light emitting unit B 151b2 is processed into a desired shape. Therefore, the end portions of the second light emitting unit A 151a2, the second intermediate layer 150_2, and the second light emitting unit B 151b2 have substantially the same shape.
  • edges of the plurality of organic layers included in the second light-emitting unit A 151a2 and the edges of the plurality of organic layers included in the second light-emitting unit B 151b2 are also approximately matched, and the second light-emitting unit
  • the ends of the second light-emitting layer A 113a2 of the A 151a2 and the second electron-transporting layer B 114b2 included in the second light-emitting unit B 151b2 are also substantially aligned. This means that the edges of the substrate or the insulating layer 120 formed thereon substantially coincide when viewed from a direction perpendicular to the insulating plane.
  • the second electron-transporting layer B 114b has a second heteroaromatic compound having a second heteroaromatic ring and a second organic compound different from the second heteroaromatic compound. is improved, and the temperature that can withstand the heat treatment at the time of forming the resist mask rises, so that higher-definition patterning becomes possible. Moreover, the reliability of the light-emitting device is also improved. Both the second aromatic compound and the second organic compound should be contained in the second electron-transporting layer B 114b2 at a weight percentage of 10% or more, preferably 20% or more, and more preferably 30% or more. is preferred.
  • the first heteroaromatic ring of the first heteroaromatic compound contained in the first electron-transporting layer B 114b1 and the second heteroaromatic compound contained in the second electron-transporting layer B 114b2 It is preferable that the second heteroaromatic rings possessed by the compounds are the same, and more preferably the first heteroaromatic compound and the second heteroaromatic compound are the same.
  • the first organic compound contained in the first electron transport layer B 114b1 and the second organic compound contained in the second electron transport layer B 114b2 are preferably the same.
  • Light emitting device An example of a light-emitting device of one embodiment of the present invention using the above-described light-emitting device is described below.
  • FIG. 5A shows a schematic top view of a display device 400 of one embodiment of the present invention.
  • the display device 400 includes a plurality of light emitting devices 110R exhibiting red, light emitting devices 110G exhibiting green, and light emitting devices 110B exhibiting blue.
  • the light emitting region of each light emitting device is labeled with R, G, and B. As shown in FIG.
  • the light emitting devices 110R, 110G, and 110B are arranged in a matrix.
  • FIG. 5A shows a so-called stripe arrangement in which light emitting devices of the same color are arranged in one direction. Note that the arrangement method of the light emitting devices is not limited to this, and an arrangement method such as a delta arrangement or a zigzag arrangement may be applied, or a pentile arrangement may be used.
  • the light emitting device 110R, the light emitting device 110G, and the light emitting device 110B are arranged in the X direction.
  • light emitting devices of the same color are arranged in the Y direction that intersects with the X direction.
  • the light emitting device 110R, the light emitting device 110G, and the light emitting device 110B are light emitting devices having the above configurations.
  • FIG. 5B is a schematic cross-sectional view corresponding to the dashed-dotted line A1-A2 in FIG. 5A
  • FIG. 5C is a schematic cross-sectional view corresponding to the dashed-dotted line B1-B2.
  • FIG. 5B shows cross sections of light emitting device 110R, light emitting device 110G, and light emitting device 110B.
  • the light emitting device 110R has an anode 101R, an EL layer 103R, an EL layer (corresponding to an electron injection layer or electron injection layer B) 115, and a cathode .
  • the light emitting device 110G has an anode 101G, an EL layer 103G, an EL layer (corresponding to an electron injection layer or electron injection layer B) 115, and a cathode .
  • the light emitting device 110B has an anode 101B, an EL layer 103B, an EL layer (corresponding to an electron injection layer or electron injection layer B) 115, and a cathode .
  • the EL layer 415 and the cathode 102 are commonly provided for the light emitting device 110R, the light emitting device 110G, and the light emitting device 110B.
  • the EL layer 415 can also be called a common layer.
  • the EL layer 103R included in the light-emitting device 110R includes a light-emitting organic compound that emits light having an intensity in at least the red wavelength range.
  • the EL layer 103G included in the light-emitting device 110G contains a light-emitting organic compound that emits light having an intensity in at least the green wavelength range.
  • the EL layer 103B included in the light-emitting device 110B contains a light-emitting organic compound that emits light having an intensity in at least a blue wavelength range.
  • adjacent first light emitting device and second light emitting device correspond to, for example, the light emitting device 110R and the light emitting device 110G, the light emitting device 110G and the light emitting device 110B, etc. in FIG. 5B.
  • the vertically aligned light emitting devices of the same color in FIG. 5A can also be said to be adjacent light emitting devices.
  • Each of the EL layer 103R, the EL layer 103G, and the EL layer 103B includes a layer containing a light-emitting organic compound (light-emitting layer), an electron injection layer, an electron transport layer, a hole injection layer, a hole transport layer, and a carrier layer. It may have one or more of a blocking layer, an exciton blocking layer, and the like.
  • the EL layer 415 can have a structure without a light-emitting layer. In the light-emitting device of one embodiment of the present invention, the EL layer 415 is preferably an electron-injection layer. Note that the EL layer 415 may not be provided when the electron-transporting layer also serves as an electron-injecting layer.
  • the EL layer 103R, the EL layer 103G, and the EL layer 103B have the light-emitting unit A, the intermediate layer, and the light-emitting unit B, respectively.
  • Light-emitting unit A includes at least light-emitting layer A
  • light-emitting unit B has at least light-emitting layer B and electron-transporting layer B.
  • one or more of an electron injection layer, an electron transport layer, a hole injection layer, a hole transport layer, a carrier block layer, an exciton block layer, and the like may be included.
  • the EL layer 415 can have a structure without a light-emitting layer. In the light-emitting device of one embodiment of the present invention, the EL layer 415 is preferably an electron-injection layer. Note that the EL layer 415 may not be provided when the electron-transporting layer B also serves as an electron-injecting layer.
  • the anode 101R, anode 101G, and anode 101B are provided for each light emitting device.
  • the cathode 102 and the EL layer 415 are provided as a continuous layer common to each light emitting device.
  • a conductive film having a property of transmitting visible light is used for one of each pixel electrode and the cathode 102, and a conductive film having a reflective property is used for the other.
  • An insulating layer 131 is provided to cover the ends of the anode 101R, the anode 101G, and the anode 101B.
  • the ends of the insulating layer 131 are preferably tapered. Note that the insulating layer 131 may be omitted if unnecessary.
  • Each of the EL layer 103R, the EL layer 103G, and the EL layer 103B has a region in contact with the top surface of the pixel electrode and a region in contact with the surface of the insulating layer 131 . Further, end portions of the EL layer 103R, the EL layer 103G, and the EL layer 103B are located over the insulating layer 131 .
  • a gap is provided between two EL layers between light emitting devices of different colors.
  • the EL layer 103R, the EL layer 103G, and the EL layer 103G are preferably provided so as not to be in contact with each other. This can suitably prevent current from flowing through two adjacent EL layers and causing unintended light emission. Therefore, the contrast can be increased, and a display device with high display quality can be realized.
  • FIG. 5C shows an example in which the EL layers 103R are formed in strips so that the EL layers 103R are continuous in the Y direction.
  • the EL layer 103R and the like are formed in strips so that the EL layers 103R are continuous in the Y direction.
  • FIG. 5C shows the cross section of the light emitting device 110R as an example, but the light emitting device 110G and the light emitting device 110B can also have the same shape.
  • the EL layer may be separated for each light emitting device in the Y direction.
  • An insulating layer 121 is provided on the cathode 102, covering the light emitting device 110R, the light emitting device 110G, and the light emitting device 110B.
  • the insulating layer 121 has a function of preventing impurities such as water from diffusing into each light emitting device from above.
  • the insulating layer 121 can have, for example, a single layer structure or a laminated structure including at least an inorganic insulating film.
  • inorganic insulating films include oxide films and nitride films such as silicon oxide films, silicon oxynitride films, silicon nitride oxide films, silicon nitride films, aluminum oxide films, aluminum oxynitride films, and hafnium oxide films.
  • a semiconductor material such as indium gallium oxide or indium gallium zinc oxide may be used for the insulating layer 121 .
  • the insulating layer 121 a laminated film of an inorganic insulating film and an organic insulating film can be used.
  • a structure in which an organic insulating film is sandwiched between a pair of inorganic insulating films is preferable.
  • the organic insulating film functions as a planarizing film. As a result, the upper surface of the organic insulating film can be flattened, so that the coverage of the inorganic insulating film thereon can be improved, and the barrier property can be enhanced.
  • the upper surface of the insulating layer 121 is flat, when a structure (for example, a color filter, an electrode of a touch sensor, or a lens array) is provided above the insulating layer 121, unevenness due to the underlying structure may occur. This is preferable because it can reduce the impact.
  • a structure for example, a color filter, an electrode of a touch sensor, or a lens array
  • FIG. 5A also shows a connection electrode 101C electrically connected to the cathode 102.
  • FIG. 101 C of connection electrodes are given the electric potential (for example, anode electric potential or cathode electric potential) for supplying to the cathode 102.
  • FIG. The connection electrode 101C is provided outside the display area where the light emitting devices 110R and the like are arranged.
  • FIG. 5A also shows the cathode 102 with a dashed line.
  • connection electrodes 101C can be provided along the periphery of the display area. For example, it may be provided along one side of the periphery of the display area, or may be provided over two or more sides of the periphery of the display area. That is, when the top surface shape of the display area is rectangular, the top surface shape of the connection electrode 101C can be strip-shaped, L-shaped, U-shaped (square bracket-shaped), square, or the like.
  • FIG. 5D is a schematic cross-sectional view corresponding to the dashed-dotted line C1-C2 in FIG. 5A.
  • FIG. 5D shows a connecting portion 130 where the connecting electrode 101C and the cathode 102 are electrically connected.
  • the cathode 102 is provided on the connection electrode 101 ⁇ /b>C in contact with the cathode 102
  • the insulating layer 121 is provided to cover the cathode 102 .
  • An insulating layer 131 is provided to cover the end of the connection electrode 101C.
  • the thin films (insulating film, semiconductor film, conductive film, etc.) that make up the display device can be formed by sputtering, chemical vapor deposition (CVD), vacuum deposition, pulsed laser deposition (PLD). ) method, Atomic Layer Deposition (ALD) method, or the like.
  • the CVD method includes a plasma enhanced CVD (PECVD) method, a thermal CVD method, and the like. Also, one of the thermal CVD methods is the metal organic CVD (MOCVD) method.
  • thin films that make up the display device can be applied by spin coating, dipping, spray coating, inkjet, dispensing, screen printing, offset printing, doctor knife method, slit coating, roll coating, curtain coating, etc. It can be formed by a method such as coating or knife coating.
  • the thin film when processing the thin film that constitutes the display device, a photolithography method or the like can be used.
  • the thin film may be processed by a nanoimprint method, a sandblast method, a lift-off method, or the like.
  • an island-shaped thin film may be directly formed by a film formation method using a shielding mask such as a metal mask.
  • a photolithography method there are typically the following two methods.
  • One is a method of forming a resist mask on a thin film to be processed, processing the thin film by etching or the like, and removing the resist mask.
  • the other is a method of forming a photosensitive thin film, then performing exposure and development to process the thin film into a desired shape.
  • the light used for exposure can be, for example, i-line (wavelength 365 nm), g-line (wavelength 436 nm), h-line (wavelength 405 nm), or a mixture of these.
  • ultraviolet rays, KrF laser light, ArF laser light, or the like can also be used.
  • extreme ultraviolet (EUV) light, X-rays, or the like may be used.
  • An electron beam can also be used instead of the light used for exposure.
  • the use of extreme ultraviolet light, X-rays, or electron beams is preferable because extremely fine processing is possible.
  • a photomask is not necessary when exposure is performed by scanning a beam such as an electron beam.
  • a dry etching method, a wet etching method, a sandblasting method, or the like can be used to etch the thin film.
  • a substrate having heat resistance enough to withstand at least later heat treatment can be used.
  • a substrate having heat resistance enough to withstand at least later heat treatment can be used as the substrate 100.
  • a glass substrate, a quartz substrate, a sapphire substrate, a ceramic substrate, an organic resin substrate, or the like can be used.
  • a semiconductor substrate such as a single crystal semiconductor substrate made of silicon, silicon carbide, or the like, a polycrystalline semiconductor substrate, a compound semiconductor substrate such as silicon germanium, or an SOI substrate can be used.
  • the substrate 100 it is preferable to use a substrate in which a semiconductor circuit including a semiconductor element such as a transistor is formed over the above semiconductor substrate or insulating substrate.
  • the semiconductor circuit preferably constitutes, for example, a pixel circuit, a gate line driver circuit (gate driver), a source line driver circuit (source driver), and the like.
  • gate driver gate line driver
  • source driver source driver
  • an arithmetic circuit, a memory circuit, and the like may be configured.
  • an anode 101R, an anode 101G, an anode 101B, and a connection electrode 101C are formed on the substrate 100.
  • a conductive film to be an anode (pixel electrode) is formed, a resist mask is formed by photolithography, and unnecessary portions of the conductive film are removed by etching. After that, by removing the resist mask, the anode 101R, the anode 101G, and the anode 101B can be formed.
  • a conductive film that reflects visible light it is preferable to use a material (for example, silver or aluminum) that has as high a reflectance as possible over the entire wavelength range of visible light. Thereby, not only can the light extraction efficiency of the light emitting device be improved, but also the color reproducibility can be improved.
  • a conductive film reflecting visible light is used as each pixel electrode, a so-called top-emission light-emitting device that emits light in the direction opposite to the substrate can be obtained.
  • a so-transmitting conductive film is used as each pixel electrode, a so-called bottom-emission light-emitting device in which light is emitted in the direction of the substrate can be obtained.
  • an insulating layer 121 is formed covering the ends of the anode 101R, the anode 101G, and the anode 101B (FIG. 6A).
  • an organic insulating film or an inorganic insulating film can be used as the insulating layer 121.
  • the insulating layer 121 preferably has a tapered end in order to improve the step coverage of the subsequent EL layer.
  • the EL layer 103Rf has a film containing at least a luminescent compound.
  • films functioning as an electron injection layer, an electron transport layer, a charge generation layer, a hole transport layer, or a hole injection layer may be stacked.
  • the EL layer 103Rf has at least light-emitting unit A, an intermediate layer, and light-emitting unit B in this order from the anode side.
  • Light-emitting unit A includes at least light-emitting layer A
  • light-emitting unit B includes at least light-emitting layer B and electron-transporting layer B
  • electron-transporting layer B is positioned farthest from anode 101 in EL layer 103Rf.
  • an electron injection layer In addition to the light-emitting layers of light-emitting unit A and light-emitting unit B, one or more of an electron injection layer, an electron transport layer, a hole injection layer, a hole transport layer, a carrier block layer, an exciton block layer, and the like are included. good too. Since the intermediate layer can serve as an electron injection layer and a hole injection layer, the electron injection layer of light emitting unit A and the hole injection layer of light emitting unit B may not be provided.
  • the EL layer 103Rf can be formed by, for example, a vapor deposition method, a sputtering method, an inkjet method, or the like. Note that the method is not limited to this, and the film forming method described above can be used as appropriate.
  • the EL layer 103Rf is preferably a laminated film in which a hole injection layer, a hole transport layer, a light emitting layer, and an electron transport layer are laminated in this order.
  • a film including the electron-injection layer 115 can be used as the EL layer to be formed later.
  • the electron-transporting layer is provided to cover the light-emitting layer, whereby the light-emitting layer can be prevented from being damaged in a later photolithography step or the like, and the light-emitting device has high reliability. can be made.
  • the electron transport layer as a layer containing at least a first heteroaromatic compound having a first heteroaromatic ring and a first organic compound different from the first heteroaromatic compound, the heat-resistant Since the property is improved and the temperature that can withstand the heat treatment at the time of forming the resist mask to be formed later is increased, more precise patterning becomes possible. Moreover, the reliability of the light-emitting device is also improved.
  • the EL layer 103Rf is preferably formed so as not to be provided on the connection electrode 101C.
  • a shielding mask is used to prevent the EL layer 103Rf from being formed on the connection electrode 101C, or an unnecessary portion on the connection electrode 101C is removed. It is preferably removed in a later etching step.
  • sacrificial film 144a is formed to cover the EL layer 103Rf. Also, the sacrificial film 144a is provided in contact with the upper surface of the connection electrode 101C.
  • the sacrificial film 144a a film having high resistance to the etching process of each EL layer such as the EL layer 103Rf, that is, a film having a high etching selectivity can be used. Also, the sacrificial film 144a can be formed using a film having a high etching selectivity with respect to a protective film such as a protective film 146a which will be described later. Furthermore, the sacrificial film 144a can be a film that can be removed by a wet etching method that causes little damage to each EL layer.
  • the sacrificial film 144a for example, an inorganic film such as a metal film, an alloy film, a metal oxide film, a semiconductor film, or an inorganic insulating film can be used.
  • the sacrificial film 144a can be formed by various film formation methods such as a sputtering method, a vapor deposition method, a CVD method, and an ALD method.
  • the sacrificial film 144a for example, metal materials such as gold, silver, platinum, magnesium, nickel, tungsten, chromium, molybdenum, iron, cobalt, copper, palladium, titanium, aluminum, yttrium, zirconium, and tantalum, or the metal materials can be used.
  • metal materials such as gold, silver, platinum, magnesium, nickel, tungsten, chromium, molybdenum, iron, cobalt, copper, palladium, titanium, aluminum, yttrium, zirconium, and tantalum, or the metal materials can be used.
  • a low melting point material such as aluminum or silver.
  • a metal oxide such as indium gallium zinc oxide (In--Ga--Zn oxide, also referred to as IGZO) can be used.
  • indium oxide, indium zinc oxide (In—Zn oxide), indium tin oxide (In—Sn oxide), indium titanium oxide (In—Ti oxide), indium tin zinc oxide (In—Sn -Zn oxide), indium titanium zinc oxide (In-Ti-Zn oxide), indium gallium tin zinc oxide (In-Ga-Sn-Zn oxide), and the like can be used.
  • indium tin oxide containing silicon or the like can be used.
  • element M is aluminum, silicon, boron, yttrium, copper, vanadium, beryllium, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten , or one or more selected from magnesium).
  • M is preferably one or more selected from gallium, aluminum, and yttrium.
  • Inorganic insulating materials such as aluminum oxide, hafnium oxide, and silicon oxide can be used as the sacrificial film 144a.
  • the sacrificial film 144a it is preferable to use a material that can be dissolved in a chemically stable solvent at least for the film positioned at the top of the EL layer 103Rf.
  • a material that dissolves in water or alcohol can be suitably used for the sacrificial film 144a.
  • a solvent such as water or alcohol
  • the solvent can be removed at a low temperature in a short time by performing heat treatment in a reduced pressure atmosphere, so that thermal damage to the EL layer 103Rf can be reduced, which is preferable.
  • wet film formation methods that can be used to form the sacrificial film 144a include spin coating, dipping, spray coating, inkjet, dispensing, screen printing, offset printing, doctor knife method, slit coating, roll coating, curtain coating, and knife coating. There are coats.
  • an organic material such as polyvinyl alcohol (PVA), polyvinyl butyral, polyvinylpyrrolidone, polyethylene glycol, polyglycerin, pullulan, water-soluble cellulose, or alcohol-soluble polyamide resin can be used.
  • PVA polyvinyl alcohol
  • polyvinyl butyral polyvinylpyrrolidone
  • polyethylene glycol polyglycerin
  • pullulan polyethylene glycol
  • pullulan polyglycerin
  • pullulan water-soluble cellulose
  • alcohol-soluble polyamide resin water-soluble polyamide resin
  • the protective film 146a is a film used as a hard mask when etching the sacrificial film 144a later. Further, the sacrificial film 144a is exposed when the protective film 146a is processed later. Therefore, the sacrificial film 144a and the protective film 146a are selected from a combination of films having a high etching selectivity. Therefore, a film that can be used for the protective film 146a can be selected according to the etching conditions for the sacrificial film 144a and the etching conditions for the protective film 146a.
  • a gas containing fluorine also referred to as a fluorine-based gas
  • An alloy containing molybdenum and niobium, an alloy containing molybdenum and tungsten, or the like can be used for the protective film 146a.
  • a film capable of obtaining a high etching selectivity that is, capable of slowing the etching rate
  • metal oxide films such as IGZO and ITO.
  • the protective film 146a is not limited to this, and can be selected from various materials according to the etching conditions for the sacrificial film 144a and the etching conditions for the protective film 146a. For example, it can be selected from films that can be used for the sacrificial film 144a.
  • a nitride film for example, can be used as the protective film 146a.
  • nitrides such as silicon nitride, aluminum nitride, hafnium nitride, titanium nitride, tantalum nitride, tungsten nitride, gallium nitride, and germanium nitride can also be used.
  • an oxide film can be used as the protective film 146a.
  • an oxide film or an oxynitride film such as silicon oxide, silicon oxynitride, aluminum oxide, aluminum oxynitride, hafnium oxide, or hafnium oxynitride can be used.
  • an organic film that can be used for the EL layer 103Rf or the like may be used as the protective film 146a.
  • the same organic film as the EL layer 103Rf, EL layer 103Gf, or EL layer 103Bf can be used for the protective film 146a.
  • the EL layer 103Rf and the like can be used in common with a deposition apparatus, which is preferable.
  • a resist mask 143a is formed on the protective film 146a at a position overlapping with the anode 101R and a position overlapping with the connection electrode 101C (FIG. 6C).
  • the resist mask 143a can use a resist material containing a photosensitive resin, such as a positive resist material or a negative resist material.
  • the resist mask 143a is formed over the sacrificial film 144a without the protective film 146a, if a defect such as a pinhole exists in the sacrificial film 144a, the solvent of the resist material dissolves the EL layer 103Rf. There is a risk of Such a problem can be prevented by using the protective film 146a.
  • the resist mask 143a may be formed directly on the sacrificial film 144a without using the protective film 146a.
  • etching the protective film 146a it is preferable to use etching conditions with a high selectivity so that the sacrificial film 144a is not removed by the etching.
  • Etching of the protective film 146a can be performed by wet etching or dry etching. By using dry etching, reduction of the pattern of the protective film 146a can be suppressed.
  • the removal of the resist mask 143a can be performed by wet etching or dry etching.
  • the resist mask 143a is preferably removed by dry etching (also referred to as plasma ashing) using an oxygen gas as an etching gas.
  • the resist mask 143a is removed while the EL layer 103Rf is covered with the sacrificial film 144a, the effect on the EL layer 103Rf is suppressed.
  • the electrical characteristics may be adversely affected, so this is suitable for etching using oxygen gas such as plasma ashing.
  • Etching of the sacrificial film 144a can be performed by wet etching or dry etching, but it is preferable to use a dry etching method because pattern shrinkage can be suppressed.
  • Etching the EL layer 103Rf and the protective layer 147a by the same treatment is preferable because the process can be simplified and the manufacturing cost of the display device can be reduced.
  • the EL layer 103Rf is preferably etched by dry etching using an etching gas that does not contain oxygen as its main component.
  • Etching gases containing no oxygen as a main component include, for example, noble gases such as CF 4 , C 4 F 8 , SF 6 , CHF 3 , Cl 2 , H 2 O, BCl 3 , H 2 and He.
  • a mixed gas of the above gas and a diluent gas that does not contain oxygen can be used as an etching gas.
  • the etching of the EL layer 103Rf and the etching of the protective layer 147a may be performed separately. At this time, the EL layer 103Rf may be etched first, or the protective layer 147a may be etched first.
  • the EL layer 103R and the connection electrode 101C are covered with the sacrificial layer 145a.
  • an EL layer 103Gf that will later become the EL layer 103G is formed on the sacrificial layer 145a, the insulating layer 121, the anode 101G, and the anode 101B. At this time, similarly to the EL layer 103Rf, it is preferable not to provide the EL layer 103Gf on the connection electrode 101C.
  • the above description of the EL layer 103Rf can be used.
  • a sacrificial film 144b is formed on the EL layer 103Gf.
  • the sacrificial film 144b can be formed by a method similar to that of the sacrificial film 144a.
  • the sacrificial film 144b preferably uses the same material as the sacrificial film 144a.
  • a sacrificial film 144a is formed on the connection electrode 101C to cover the sacrificial layer 145a.
  • a protective film 146b is formed on the sacrificial film 144b.
  • the protective film 146b can be formed by the same method as the protective film 146a. In particular, it is preferable to use the same material as the protective film 146a for the protective film 146b.
  • a resist mask 143b is formed on the protective film 146b in a region overlapping with the anode 101G and a region overlapping with the connection electrode 101C (FIG. 7A).
  • the resist mask 143b can be formed by a method similar to that of the resist mask 143a.
  • the description of the protective film 146a can be used.
  • the above description of the sacrificial film 144a can be used.
  • the description of the EL layer 103Rf and the protective layer 147a can be used.
  • the EL layer 103R is protected by the sacrificial layer 145a, it can be prevented from being damaged during the etching process of the EL layer 103Gf.
  • the strip-shaped EL layer 103R and the strip-shaped EL layer 103G can be separately manufactured with high positional accuracy.
  • the EL layer 103G After forming the EL layer 103G, the EL layer 103Bf, the sacrificial film 144c, the protective film 146c, and the resist mask 143c (all not shown) are formed in this order. Subsequently, after etching the protective film 146c to form a protective layer 147c (not shown), the resist mask 143c is removed. Subsequently, the sacrificial layer 144c is etched to form a sacrificial layer 145c. After that, the protective layer 147c and the EL layer 103Bf are etched to form the strip-shaped EL layer 103B.
  • a sacrificial layer 145c is also formed on the connection electrode 101C at the same time.
  • a sacrificial layer 145a, a sacrificial layer 145b, and a sacrificial layer 145c are stacked on the connection electrode 101C.
  • the sacrificial layer 145a, the sacrificial layer 145b, and the sacrificial layer 145c can be removed by wet etching or dry etching. At this time, it is preferable to use a method that damages the EL layer 103R, the EL layer 103G, and the EL layer 103B as little as possible. In particular, it is preferable to use a wet etching method. For example, it is preferable to use wet etching using a tetramethylammonium hydroxide aqueous solution (TMAH), dilute hydrofluoric acid, oxalic acid, phosphoric acid, acetic acid, nitric acid, or a mixed liquid thereof.
  • TMAH tetramethylammonium hydroxide aqueous solution
  • the sacrificial layer 145a, the sacrificial layer 145b, and the sacrificial layer 145c are preferably removed by dissolving them in a solvent such as water or alcohol.
  • a solvent such as water or alcohol.
  • various alcohols such as ethyl alcohol, methyl alcohol, isopropyl alcohol (IPA), or glycerin can be used as the alcohol capable of dissolving the sacrificial layers 145a, 145b, and 145c.
  • drying treatment is performed in order to remove water contained inside the EL layers 103R, 103G, and 103B and water adsorbed to the surfaces thereof. preferably.
  • heat treatment is preferably performed in an inert gas atmosphere or a reduced pressure atmosphere.
  • the heat treatment can be performed at a substrate temperature of 50° C. to 200° C., preferably 60° C. to 150° C., more preferably 70° C. to 120° C.
  • a reduced-pressure atmosphere is preferable because drying can be performed at a lower temperature.
  • the EL layer 103R, the EL layer 103G, and the EL layer 103B can be produced separately.
  • the configurations of the electron transport layers included in the EL layer 103R, the EL layer 103G, and the EL layer 103B may be the same or different.
  • the heteroaromatic rings contained in the heteroaromatic compounds contained in each electron-transporting layer are preferably the same, and the heteroaromatic compounds contained in each electron-transporting layer are preferably the same.
  • the organic compound contained in each electron transport layer is the same.
  • the electron injection layer 115 or the electron injection layer B 115b is formed to cover the EL layer 103R, the EL layer 103G, and the EL layer 103B.
  • the electron injection layer 115 or the electron transport layer B 115b can be formed by the same method as the EL layer 103Rf.
  • the cathode 102 is formed covering the electron injection layer 115 or the electron transport layer B 115b and the connection electrode 101C (FIG. 7F).
  • the cathode 102 can be formed by a film forming method such as vapor deposition or sputtering. Alternatively, a film formed by an evaporation method and a film formed by a sputtering method may be stacked. At this time, it is preferable to form the cathode 102 so as to include the region where the electron injection layer 115 or the electron transport layer B 115b is formed. That is, the end portion of the electron injection layer 115 or the electron transport layer B 115b may overlap with the cathode 102 .
  • Cathode 102 is preferably formed using a shielding mask. The cathode 102 is electrically connected to the connection electrode 101C outside the display area.
  • a protective layer is formed on the cathode 102 .
  • a sputtering method, a PECVD method, or an ALD method is preferably used for forming the inorganic insulating film used for the protective layer.
  • the ALD method is preferable because it has excellent step coverage and hardly causes defects such as pinholes.
  • the light-emitting device of one embodiment of the present invention can be manufactured.
  • the cathode 102 and the electron injection layer 115 or the electron transport layer B 115b are formed to have different upper surface shapes, they may be formed in the same region.
  • the light-emitting device in the light-emitting device of one embodiment of the present invention as shown in FIG.
  • the EL layer 103 has a light-emitting layer 113 containing a light-emitting material and an electron-transporting layer 114 having the structure described above.
  • the EL layer 103 may have a hole-injection layer, a hole-transport layer, a light-emitting layer, an electron-transport layer, an electron-injection layer, a carrier-blocking layer, an exciton-blocking layer, and the like. Other than that, the configuration can be freely selected and used according to the required performance.
  • the light-emitting unit A 151a has at least a light-emitting layer A 113a
  • the light-emitting unit B 151b has at least a light-emitting layer B 113b and an electron transport layer B 114b.
  • Each light-emitting unit may have a hole-injection layer, a hole-transport layer, a light-emitting layer, an electron-transport layer, an electron-injection layer, a carrier-blocking layer, an exciton-blocking layer, and the like.
  • the configuration can be freely selected and used according to the required performance.
  • the intermediate layer also functions as the electron injection layer of the light-emitting unit A, the hole injection layer of the light-emitting unit B, and the like.
  • Anode 101 is preferably formed using a metal, an alloy, a conductive compound, a mixture thereof, or the like having a large work function (specifically, 4.0 eV or more).
  • a metal an alloy, a conductive compound, a mixture thereof, or the like having a large work function (specifically, 4.0 eV or more).
  • ITO indium oxide-tin oxide
  • IWZO indium oxide-zinc oxide
  • IWZO indium oxide containing tungsten oxide and zinc oxide
  • These conductive metal oxide films are usually formed by a sputtering method, but may be produced by applying a sol-gel method or the like.
  • indium oxide-zinc oxide is formed by a sputtering method using a target in which 1 to 20 wt % of zinc oxide is added to indium oxide.
  • Indium oxide (IWZO) containing tungsten oxide and zinc oxide is formed by a sputtering method using a target containing 0.5 to 5 wt% of tungsten oxide and 0.1 to 1 wt% of zinc oxide relative to indium oxide.
  • materials used for the anode 101 include, for example, gold (Au), platinum (Pt), nickel (Ni), tungsten (W), chromium (Cr), molybdenum (Mo), iron (Fe), cobalt (Co), copper (Cu), palladium (Pd), nitrides of metal materials (eg, titanium nitride), and the like.
  • graphene can also be used as the material used for the anode 101 .
  • the laminated structure is not particularly limited, and includes a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, an electron injection layer, and a carrier block layer.
  • Various layer structures such as (hole blocking layer, electron blocking layer), exciton blocking layer, intermediate layer (charge generation layer), etc. can be applied. Note that any layer may not be provided.
  • the structure having the hole-injecting layer 111 and the hole-transporting layer 112 is described below. Be specific.
  • the hole-injection layer 111 is a layer containing a substance having acceptor properties. Either an organic compound or an inorganic compound can be used as the substance having acceptor properties.
  • a compound having an electron-withdrawing group (a halogen group or a cyano group) can be used as the substance having acceptor properties.
  • F4-TCNQ chloranil, 2,3,6,7,10,11 -hexacyano-1,4,5,8,9,12-hexaazatriphenylene (abbreviation: HAT-CN), 1, 3,4,5,7,8-hexafluorotetracyano-naphthoquinodimethane (abbreviation: F6-TCNNQ), 2-(7-dicyanomethylene-1,3,4,5,6,8,9,10 -octafluoro-7H-pyrene-2-ylidene)malononitrile and the like.
  • a compound in which an electron-withdrawing group is bound to a condensed aromatic ring having a plurality of heteroatoms such as HAT-CN
  • a condensed aromatic ring having a plurality of heteroatoms such as HAT-CN
  • [3] radialene derivatives having an electron-withdrawing group are preferable because they have very high electron-accepting properties.
  • molybdenum oxide, vanadium oxide, ruthenium oxide, tungsten oxide, manganese oxide, and the like can be used as the substance having acceptor properties.
  • phthalocyanine-based complex compounds such as phthalocyanine (abbreviation: H 2 Pc) and copper phthalocyanine (CuPc), 4,4′-bis[N-(4-diphenylaminophenyl)-N-phenylamino]biphenyl (abbreviation: : DPAB), N,N'-bis ⁇ 4-[bis(3-methylphenyl)amino]phenyl ⁇ -N,N'-diphenyl-(1,1'-biphenyl)-4,4'-diamine (abbreviation : DNTPD), or a polymer such as poly(3,4-ethylenedioxythiophene)/poly(styrenesulfonic acid) (PEDOT/PSS).
  • PEDOT/PSS poly(3,4-ethylened
  • a composite material in which a hole-transporting material contains the above acceptor substance can also be used.
  • a material for forming an electrode can be selected regardless of the work function. In other words, not only a material with a large work function but also a material with a small work function can be used as the anode 101 .
  • Various organic compounds such as aromatic amine compounds, carbazole derivatives, aromatic hydrocarbons, and polymer compounds (oligomers, dendrimers, polymers, etc.) can be used as the hole-transporting material used for the composite material.
  • a material having a hole-transport property used for the composite material is preferably a substance having a hole mobility of 1 ⁇ 10 ⁇ 6 cm 2 /Vs or more.
  • Organic compounds that can be used as a material having a hole-transport property in the composite material are specifically listed below.
  • DTDPPA 4,4'-bis[ N-(4-diphenylaminophenyl)-N-phenylamino
  • carbazole derivatives include 3-[N-(9-phenylcarbazol-3-yl)-N-phenylamino]-9-phenylcarbazole (abbreviation: PCzPCA1), 3,6-bis[N- (9-phenylcarbazol-3-yl)-N-phenylamino]-9-phenylcarbazole (abbreviation: PCzPCA2), 3-[N-(1-naphthyl)-N-(9-phenylcarbazol-3-yl) amino]-9-phenylcarbazole (abbreviation: PCzPCN1), 4,4′-di(N-carbazolyl)biphenyl (abbreviation: CBP), 1,3,5-tris[4-(N-carbazolyl)phenyl]benzene ( Abbreviation: TCPB), 9-[4-(10-phenylanthracen-9-yl)phenyl]-9H
  • aromatic hydrocarbons examples include 2-tert-butyl-9,10-di(2-naphthyl)anthracene (abbreviation: t-BuDNA), 2-tert-butyl-9,10-di(1-naphthyl) anthracene, 9,10-bis(3,5-diphenylphenyl)anthracene (abbreviation: DPPA), 2-tert-butyl-9,10-bis(4-phenylphenyl)anthracene (abbreviation: t-BuDBA), 9, 10-di(2-naphthyl)anthracene (abbreviation: DNA), 9,10-diphenylanthracene (abbreviation: DPAnth), 2-tert-butylanthracene (abbreviation: t-BuAnth), 9,10-bis(4-methyl) -1-naphthyl)anthracene (abbreviation: DM
  • pentacene, coronene, etc. can also be used. It may also have a vinyl skeleton.
  • aromatic hydrocarbons having a vinyl group include 4,4′-bis(2,2-diphenylvinyl)biphenyl (abbreviation: DPVBi), 9,10-bis[4-(2,2- diphenylvinyl)phenyl]anthracene (abbreviation: DPVPA) and the like.
  • DPVBi 4,4′-bis(2,2-diphenylvinyl)biphenyl
  • DPVPA 9,10-bis[4-(2,2- diphenylvinyl)phenyl]anthracene
  • an organic compound of one embodiment of the present invention can also be used.
  • poly(N-vinylcarbazole) (abbreviation: PVK)
  • poly(4-vinyltriphenylamine) (abbreviation: PVTPA)
  • PVTPA poly(4-vinyltriphenylamine)
  • PTPDMA poly[N-(4- ⁇ N'-[4-(4-diphenylamino) phenyl]phenyl-N′-phenylamino ⁇ phenyl)methacrylamide]
  • PTPDMA poly[N,N′-bis(4-butylphenyl)-N,N′-bis(phenyl)benzidine]
  • Polymer compounds such as Poly-TPD
  • a material having a hole-transporting property that is used for the composite material preferably has any one of a carbazole skeleton, a dibenzofuran skeleton, a dibenzothiophene skeleton, and an anthracene skeleton.
  • aromatic amines having a substituent containing a dibenzofuran ring or a dibenzothiophene ring aromatic monoamines having a naphthalene ring, or aromatic monoamines having a 9-fluorenyl group bonded to the amine nitrogen via an arylene group. good.
  • a substance having an N,N-bis(4-biphenyl)amino group is preferably used as the second organic compound because a light-emitting device with a long life can be manufactured.
  • the second organic compound as described above include N-(4-biphenyl)-6,N-diphenylbenzo[b]naphtho[1,2-d]furan-8-amine (abbreviation: BnfABP), N,N-bis(4-biphenyl)-6-phenylbenzo[b]naphtho[1,2-d]furan-8-amine (abbreviation: BBABnf), 4,4′-bis(6-phenyl Benzo[b]naphtho[1,2-d]furan-8-yl)-4′′-phenyltriphenylamine (abbreviation: BnfBB1BP), N,N-bis(4-biphenyl)benzo[b]naphtho[1 ,
  • the material having a hole-transport property used for the composite material is more preferably a substance having a relatively deep HOMO level of ⁇ 5.7 eV to ⁇ 5.4 eV.
  • the material having a hole-transporting property used for the composite material is a substance having a relatively deep HOMO level, the induction of holes can be moderately suppressed, and a light-emitting device having a long life can be obtained. .
  • the refractive index of the layer can be lowered by further mixing an alkali metal or alkaline earth metal fluoride into the composite material (preferably, the atomic ratio of fluorine atoms in the layer is 20% or more). can. Also by this, a layer with a low refractive index can be formed inside the EL layer 103, and the external quantum efficiency of the light-emitting device can be improved.
  • the hole injection layer 111 By forming the hole injection layer 111, the hole injection property is improved, and a light-emitting device with a low driving voltage can be obtained.
  • organic compounds having acceptor properties are easy to use because they are easily vapor-deposited and easily formed into a film.
  • the hole-transport layer 112 is formed containing a material having hole-transport properties.
  • a material having a hole-transport property preferably has a hole mobility of 1 ⁇ 10 ⁇ 6 cm 2 /Vs or more.
  • Examples of the hole-transporting material include 4,4′-bis[N-(1-naphthyl)-N-phenylamino]biphenyl (abbreviation: NPB) and N,N′-bis(3-methylphenyl).
  • TPD 4,4'-bis[N-(spiro-9,9'-bifluorene-2- yl)-N-phenylamino]biphenyl
  • BSPB 4,4'-bis[N-(spiro-9,9'-bifluorene-2- yl)-N-phenylamino]biphenyl
  • BPAFLP 4-phenyl-4′-(9-phenylfluoren-9-yl)triphenylamine
  • mBPAFLP 4-phenyl-3′-(9 -phenylfluoren-9-yl)triphenylamine
  • PCBA1BP 4,4' -diphenyl-4′′-(9-phenyl-9H-carbazol-3-yl)triphenylamine
  • PCBBi1BP 4,4' -diphenyl-4′′-(9-phenyl-9H-carbazol-3-yl)triphenylamine
  • compounds having an aromatic amine skeleton and compounds having a carbazole skeleton are preferable because they have good reliability, have high hole-transport properties, and contribute to driving voltage reduction.
  • the substances exemplified as the materials having a hole-transport property that are used for the composite material of the hole-injection layer 111 can also be suitably used as the material for the hole-transport layer 112 .
  • the light-emitting layer 113 has a light-emitting substance and a host material. Note that the light-emitting layer 113 may contain other materials at the same time. Alternatively, a laminate of two layers having different compositions may be used.
  • the luminescent substance may be a fluorescent luminescent substance, a phosphorescent luminescent substance, a substance exhibiting thermally activated delayed fluorescence (TADF), or any other luminescent substance.
  • TADF thermally activated delayed fluorescence
  • one embodiment of the present invention can be preferably applied to the case where the light-emitting layer 113 is a layer that emits fluorescence, particularly a layer that emits blue fluorescence.
  • fluorescent light-emitting substance examples include the following. Fluorescent substances other than these can also be used.
  • condensed aromatic diamine compounds typified by pyrenediamine compounds such as 1,6FLPAPrn, 1,6mMemFLPAPrn, and 1,6BnfAPrn-03 are preferable because they have high hole-trapping properties and are excellent in luminous efficiency and reliability.
  • a phosphorescent light-emitting substance is used as the light-emitting substance in the light-emitting layer 113
  • examples of materials that can be used include the following.
  • tris(4-methyl-6-phenylpyrimidinato)iridium (III) (abbreviation: [Ir(mpm) 3 ]), tris(4-t-butyl-6-phenylpyrimidinato)iridium (III) (abbreviation: [Ir(tBuppm) 3 ]), (acetylacetonato)bis(6-methyl-4-phenylpyrimidinato)iridium (III) (abbreviation: [Ir(mppm) 2 (acac)]), ( acetylacetonato)bis(6-tert-butyl-4-phenylpyrimidinato)iridium(III) (abbreviation: [Ir(tBuppm) 2 (acac)]), (acetylacetonato)bis[6-(2- norbornyl)-4-phenylpyrimidinato]iridium(III) (abbreviation: [Ir(nbppm
  • an organometallic iridium complex having a pyrimidine skeleton is particularly preferable because it is remarkably excellent in reliability and luminous efficiency.
  • an organometallic iridium complex having a pyrazine skeleton can provide red light emission with good chromaticity.
  • known phosphorescent compounds may be selected and used.
  • Fullerene and its derivatives, acridine and its derivatives, eosin derivatives and the like can be used as the TADF material.
  • metal-containing porphyrins containing magnesium (Mg), zinc (Zn), cadmium (Cd), tin (Sn), platinum (Pt), indium (In), palladium (Pd), and the like are included.
  • the metal-containing porphyrin include protoporphyrin-tin fluoride complex (SnF 2 (Proto IX)), mesoporphyrin-tin fluoride complex (SnF 2 (Meso IX)), and hematoporphyrin represented by the following structural formulas.
  • the heterocyclic compound has a ⁇ -electron-rich heteroaromatic ring and a ⁇ -electron-deficient heteroaromatic ring
  • the heterocyclic compound has both high electron-transporting properties and high hole-transporting properties, which is preferable.
  • a pyridine skeleton, a diazine skeleton (pyrimidine skeleton, pyrazine skeleton, pyridazine skeleton), and a triazine skeleton are preferred because they are stable and reliable.
  • a benzofuropyrimidine skeleton, a benzothienopyrimidine skeleton, a benzofuropyrazine skeleton, and a benzothienopyrazine skeleton are preferred because they have high acceptor properties and good reliability.
  • an acridine skeleton, a phenoxazine skeleton, a phenothiazine skeleton, a furan skeleton, a thiophene skeleton, and a pyrrole skeleton are stable and reliable.
  • a dibenzofuran skeleton is preferable as the furan skeleton, and a dibenzothiophene skeleton is preferable as the thiophene skeleton.
  • a dibenzothiophene skeleton is preferable as the thiophene skeleton.
  • the pyrrole skeleton an indole skeleton, a carbazole skeleton, an indolocarbazole skeleton, a bicarbazole skeleton, and a 3-(9-phenyl-9H-carbazol-3-yl)-9H-carbazole skeleton are particularly preferred.
  • a substance in which a ⁇ -electron-rich heteroaromatic ring and a ⁇ -electron-deficient heteroaromatic ring are directly bonded has both the electron-donating property of the ⁇ -electron-rich heteroaromatic ring and the electron-accepting property of the ⁇ -electron-deficient heteroaromatic ring. It is particularly preferable because it becomes stronger and the energy difference between the S1 level and the T1 level becomes smaller, so that thermally activated delayed fluorescence can be efficiently obtained.
  • An aromatic ring to which an electron-withdrawing group such as a cyano group is bonded may be used instead of the ⁇ -electron-deficient heteroaromatic ring.
  • an aromatic amine skeleton, a phenazine skeleton, or the like can be used as the ⁇ -electron-rich skeleton.
  • the ⁇ -electron-deficient skeleton includes a xanthene skeleton, a thioxanthene dioxide skeleton, an oxadiazole skeleton, a triazole skeleton, an imidazole skeleton, an anthraquinone skeleton, a boron-containing skeleton such as phenylborane and borantrene, and a nitrile such as benzonitrile or cyanobenzene.
  • An aromatic ring or heteroaromatic ring having a group or a cyano group, a carbonyl skeleton such as benzophenone, a phosphine oxide skeleton, a sulfone skeleton, or the like can be used.
  • a ⁇ -electron-deficient skeleton and a ⁇ -electron-rich skeleton can be used in place of at least one of the ⁇ -electron-deficient heteroaromatic ring and the ⁇ -electron-rich heteroaromatic ring.
  • the TADF material is a material having a small difference between the S1 level and the T1 level and having a function of converting energy from triplet excitation energy to singlet excitation energy by reverse intersystem crossing. Therefore, triplet excitation energy can be up-converted (reverse intersystem crossing) to singlet excitation energy with a small amount of thermal energy, and a singlet excited state can be efficiently generated. Also, triplet excitation energy can be converted into luminescence.
  • an exciplex also called exciplex, exciplex, or Exciplex
  • an exciplex in which two kinds of substances form an excited state has an extremely small difference between the S1 level and the T1 level, and the triplet excitation energy is replaced by the singlet excitation energy. It functions as a TADF material that can be converted into
  • a phosphorescence spectrum observed at a low temperature may be used as an index of the T1 level.
  • a tangent line is drawn at the tail of the fluorescence spectrum on the short wavelength side
  • the energy of the wavelength of the extrapolated line is the S1 level
  • a tangent line is drawn at the tail of the phosphorescence spectrum on the short wavelength side
  • the extrapolation When the energy of the wavelength of the line is the T1 level, the difference between S1 and T1 is preferably 0.3 eV or less, more preferably 0.2 eV or less.
  • the S1 level of the host material is preferably higher than the S1 level of the TADF material.
  • the T1 level of the host material is preferably higher than the T1 level of the TADF material.
  • various carrier-transporting materials such as an electron-transporting material, a hole-transporting material, and the above TADF material can be used.
  • an organic compound having an amine skeleton or a ⁇ -electron rich heteroaromatic ring is preferable.
  • NPB 4,4′-bis[N-(1-naphthyl)-N-phenylamino]biphenyl
  • TPD N,N′-bis(3-methylphenyl)-N,N′-diphenyl-[ 1,1′-biphenyl]-4,4′-diamine
  • TPD 1,1′-biphenyl]-4,4′-diamine
  • BSPB 4,4′-bis[N-(spiro-9,9′-bifluoren-2-yl)-N-phenylamino]biphenyl
  • BPAFLP 4-phenyl-4′-(9-phenylfluoren-9-yl)triphenylamine
  • BPAFLP 4-phenyl-3′-(9-phenylfluoren-9-yl)tri Phenyl
  • compounds having an aromatic amine skeleton and compounds having a carbazole skeleton are preferable because they have good reliability, have high hole-transport properties, and contribute to driving voltage reduction.
  • the organic compound given as an example of the material having a hole-transport property in the hole-transport layer 112 can also be used.
  • Materials having an electron transport property include, for example, bis(10-hydroxybenzo[h]quinolinato)beryllium(II) (abbreviation: BeBq 2 ), bis(2-methyl-8-quinolinolato)(4-phenylphenolato).
  • organic compounds having a ⁇ -electron-deficient heteroaromatic ring examples include 2-(4-biphenylyl)-5-(4-tert-butylphenyl)-1,3,4-oxadiazole (abbreviation: PBD), 3-(4-biphenylyl)-4-phenyl-5-(4-tert-butylphenyl)-1,2,4-triazole (abbreviation: TAZ), 1,3-bis[5-(p-tert-butyl Phenyl)-1,3,4-oxadiazol-2-yl]benzene (abbreviation: OXD-7), 9-[4-(5-phenyl-1,3,4-oxadiazol-2-yl) Phenyl]-9H-carbazole (abbreviation: CO11), 2,2′,2′′-(1,3,5-benzenetriyl)tris(1-phenyl-1H-benzimidazole) (abbreviation: TP
  • an organic compound containing a heteroaromatic ring having a diazine skeleton, an organic compound containing a heteroaromatic ring having a pyridine skeleton, and an organic compound containing a heteroaromatic ring having a triazine skeleton are preferable because of their high reliability.
  • an organic compound containing a heteroaromatic ring having a diazine (pyrimidine or pyrazine) skeleton and an organic compound containing a heteroaromatic ring having a triazine skeleton have high electron-transport properties and contribute to driving voltage reduction.
  • the materials previously mentioned as the TADF material can be similarly used.
  • the triplet excitation energy generated in the TADF material is converted to singlet excitation energy by reverse intersystem crossing, and the energy is transferred to the light-emitting substance, thereby increasing the luminous efficiency of the light-emitting device. be able to.
  • the TADF material functions as an energy donor, and the light-emitting substance functions as an energy acceptor.
  • the S1 level of the TADF material is preferably higher than the S1 level of the fluorescent material.
  • the T1 level of the TADF material is preferably higher than the S1 level of the fluorescent material. Therefore, the T1 level of the TADF material is preferably higher than the T1 level of the fluorescent emitter.
  • a TADF material that emits light that overlaps the wavelength of the absorption band on the lowest energy side of the fluorescent light-emitting substance.
  • the fluorescent light-emitting substance has a protective group around the luminophore (skeleton that causes light emission) of the fluorescent light-emitting substance.
  • the protecting group is preferably a substituent having no ⁇ bond, preferably a saturated hydrocarbon.
  • an alkyl group having 3 to 10 carbon atoms, a substituted or unsubstituted cyclo Examples include an alkyl group and a trialkylsilyl group having 3 to 10 carbon atoms, and it is more preferable to have a plurality of protecting groups.
  • Substituents that do not have a ⁇ bond have a poor function of transporting carriers, so that the distance between the TADF material and the luminophore of the fluorescent light-emitting substance can be increased with little effect on carrier transport and carrier recombination.
  • the luminophore refers to an atomic group (skeleton) that causes luminescence in a fluorescent light-emitting substance.
  • the luminophore preferably has a skeleton having a ⁇ bond, preferably contains an aromatic ring, and preferably has a condensed aromatic ring or a condensed heteroaromatic ring.
  • the condensed aromatic ring or condensed heteroaromatic ring includes a phenanthrene skeleton, a stilbene skeleton, an acridone skeleton, a phenoxazine skeleton, a phenothiazine skeleton, and the like.
  • a naphthalene skeleton, anthracene skeleton, fluorene skeleton, chrysene skeleton, triphenylene skeleton, tetracene skeleton, pyrene skeleton, perylene skeleton, coumarin skeleton, quinacridone skeleton, and naphthobisbenzofuran skeleton are particularly preferred because of their high fluorescence quantum yield.
  • a material having an anthracene skeleton is suitable as the host material.
  • a substance having an anthracene skeleton is used as a host material for a fluorescent light-emitting substance, it is possible to realize a light-emitting layer with good luminous efficiency and durability.
  • a substance having an anthracene skeleton to be used as a host material a substance having a diphenylanthracene skeleton, particularly a 9,10-diphenylanthracene skeleton is preferable because it is chemically stable.
  • the host material has a carbazole skeleton
  • the host material contains a benzocarbazole skeleton in which a benzene ring is further condensed to carbazole
  • the HOMO becomes shallower than that of carbazole by about 0.1 eV.
  • the host material contains a dibenzocarbazole skeleton
  • the HOMO becomes shallower than that of carbazole by about 0.1 eV, making it easier for holes to enter, excellent in hole transportability, and high in heat resistance, which is preferable. .
  • more preferable host materials are substances having both a 9,10-diphenylanthracene skeleton and a carbazole skeleton (or a benzocarbazole skeleton or a dibenzocarbazole skeleton).
  • a benzofluorene skeleton or a dibenzofluorene skeleton may be used instead of the carbazole skeleton.
  • Such substances include 9-phenyl-3-[4-(10-phenyl-9-anthryl)phenyl]-9H-carbazole (abbreviation: PCzPA), 3-[4-(1-naphthyl)- Phenyl]-9-phenyl-9H-carbazole (abbreviation: PCPN), 9-[4-(10-phenyl-9-anthracenyl)phenyl]-9H-carbazole (abbreviation: CzPA), 7-[4-(10- Phenyl-9-anthryl)phenyl]-7H-dibenzo[c,g]carbazole (abbreviation: cgDBCzPA), 6-[3-(9,10-diphenyl-2-anthryl)phenyl]-benzo[b]naphtho[1 ,2-d]furan (abbreviation: 2mBnfPPA), 9-phenyl-10- ⁇ 4-(9-pheny
  • the host material may be a material in which a plurality of substances are mixed, and when a mixed host material is used, it is preferable to mix a material having an electron-transporting property and a material having a hole-transporting property. .
  • a material having an electron-transporting property and a material having a hole-transporting property By mixing a material having an electron-transporting property and a material having a hole-transporting property, the transportability of the light-emitting layer 113 can be easily adjusted, and the recombination region can be easily controlled.
  • the weight ratio of the content of the material having a hole-transporting property and the content of the material having an electron-transporting property may be from 1:19 to 19:1.
  • a phosphorescent material can be used as part of the mixed material.
  • a phosphorescent light-emitting substance can be used as an energy donor that provides excitation energy to a fluorescent light-emitting substance when a fluorescent light-emitting substance is used as the light-emitting substance.
  • these mixed materials may form an exciplex.
  • energy transfer becomes smooth and light emission can be efficiently obtained.
  • the use of the structure is preferable because the driving voltage is also lowered.
  • At least one of the materials forming the exciplex may be a phosphorescent substance. By doing so, triplet excitation energy can be efficiently converted into singlet excitation energy by reverse intersystem crossing.
  • the HOMO level of the material having a hole-transporting property is higher than or equal to the HOMO level of the material having an electron-transporting property.
  • the LUMO level of the material having a hole-transporting property is preferably higher than or equal to the LUMO level of the material having an electron-transporting property.
  • the LUMO level and HOMO level of the material can be derived from the electrochemical properties (reduction potential and oxidation potential) of the material measured by cyclic voltammetry (CV) measurement.
  • an exciplex is performed by comparing, for example, the emission spectrum of a material having a hole-transporting property, the emission spectrum of a material having an electron-transporting property, and the emission spectrum of a mixed film in which these materials are mixed. can be confirmed by observing the phenomenon that the emission spectrum of each material shifts to a longer wavelength (or has a new peak on the longer wavelength side).
  • the transient photoluminescence (PL) of a material having a hole-transporting property, the transient PL of a material having an electron-transporting property, and the transient PL of a mixed film in which these materials are mixed are compared, and the transient PL lifetime of the mixed film is This can be confirmed by observing the difference in transient response, such as having a component with a longer lifetime than the transient PL lifetime of each material, or having a larger proportion of a delayed component.
  • the transient PL described above may be read as transient electroluminescence (EL).
  • the formation of an exciplex can also be confirmed. can be confirmed.
  • the electron transport layer is formed by containing at least a heteroaromatic compound having a heteroaromatic ring and an organic compound different from the heteroaromatic compound, as described above.
  • At least one of the two materials is an organic compound having an electron transport property, and has an electron mobility of 1 ⁇ 10 ⁇ 6 cm 2 /Vs or more at a square root of the electric field strength [V/cm] of 600. Substances with are preferred. Note that any substance other than these substances can be used as long as it has a higher electron-transport property than hole-transport property.
  • the organic compound an organic compound having a ⁇ -electron-deficient heteroaromatic ring is preferable.
  • Examples of the organic compound having a ⁇ -electron-deficient heteroaromatic ring include an organic compound containing a heteroaromatic ring having a polyazole skeleton, an organic compound containing a heteroaromatic ring having a pyridine skeleton, and an organic compound containing a heteroaromatic ring having a diazine skeleton. and an organic compound containing a heteroaromatic ring having a triazine skeleton, or a plurality thereof.
  • an organic compound containing a heteroaromatic ring having a diazine skeleton, an organic compound containing a heteroaromatic ring having a pyridine skeleton, and an organic compound containing a heteroaromatic ring having a triazine skeleton are preferable because of their high reliability.
  • an organic compound containing a heteroaromatic ring having a diazine (pyrimidine or pyrazine) skeleton and an organic compound containing a heteroaromatic ring having a triazine skeleton have high electron-transport properties and contribute to driving voltage reduction.
  • the organic compounds that can be used in the electron-transporting layer described above include heteroaromatic compounds having a heteroaromatic ring contained in the electron-transporting layer or the electron-transporting layer B, and organic compounds different from the heteroaromatic compounds. Any of the compounds can be used.
  • an organic compound other than the above can be used, but it is preferable to use the organic compound described as the organic compound that can be used in the electron-transporting layer.
  • the electron-transporting layer 114 having this structure may also serve as the electron-injecting layer 115 .
  • Lithium fluoride LiF
  • cesium fluoride CsF
  • calcium fluoride CaF 2
  • 8-hydroxyquinolinato-lithium It is preferable to provide a layer containing an alkali metal or alkaline earth metal such as Liq oxidation, or a compound or complex thereof.
  • a material containing a metal group or a compound thereof, or an electride may be used, for example, a mixed oxide of calcium and aluminum to which electrons are added at a high concentration.
  • the intermediate layer used in the tandem light emitting device is preferably a charge generation layer.
  • the charge-generating layer has a function of injecting electrons into one light-emitting unit and holes into the other light-emitting unit when a voltage is applied to the anode and the cathode.
  • the charge generation layer should inject electrons into the light-emitting unit A and holes into the light-emitting unit B.
  • the charge generation layer includes at least a P-type layer.
  • the p-type layer is preferably formed using the composite material mentioned above as the material capable of forming the hole injection layer.
  • the P-type layer may be configured by laminating a film containing the acceptor material and a film containing the hole transport material, which are materials constituting the composite material. By applying a potential to the P-type layer, electrons are injected into the electron-transporting layer A of light-emitting unit A and holes are injected into the hole-transporting layer B of light-emitting unit B to operate the light-emitting device.
  • the charge generation layer preferably includes either or both of an electron relay layer and an electron injection buffer layer.
  • the electron relay layer contains at least an electron-transporting substance, and has a function of smoothly transferring electrons by preventing interaction between the electron injection buffer layer and the P-type layer.
  • the LUMO level of the substance having an electron transport property contained in the electron relay layer is the LUMO level of the acceptor substance in the P-type layer and the LUMO level of the substance contained in the layer in contact with the charge generation layer in the electron transport layer. is preferably between
  • a specific energy level of the LUMO level in the substance having an electron-transporting property used for the electron relay layer is -5.0 eV or more, preferably -5.0 eV or more and -3.0 eV or less. It is preferable to use a phthalocyanine-based material or a metal complex having a metal-oxygen bond and an aromatic ligand as an electron-transporting substance used for the electron-relay layer.
  • Alkali metals, alkaline earth metals, rare earth metals, and compounds thereof are used in the electron injection buffer layer.
  • alkaline earth metal compounds including oxides, halides, and carbonates
  • rare earth metal compounds including oxides, halides, and carbonates.
  • the donor substance may be an alkali metal, an alkaline earth metal, a rare earth metal, or a compound thereof (alkali Metal compounds (including oxides such as lithium oxide, halides, lithium carbonate, and carbonates such as cesium carbonate), alkaline earth metal compounds (including oxides, halides, and carbonates), or rare earth metal compounds ( oxides, halides, and carbonates)), organic compounds such as tetrathianaphthacene (abbreviation: TTN), nickelocene, and decamethylnickelocene can also be used.
  • TTN tetrathianaphthacene
  • nickelocene nickelocene
  • decamethylnickelocene decamethylnickelocene
  • an organic EL device having two light-emitting units has been described in FIG. 34, it is also possible to apply the same to an organic EL device in which three or more light-emitting units are stacked.
  • the light-emitting device according to this embodiment by arranging a plurality of light-emitting units partitioned by a charge generation layer between a pair of electrodes, it is possible to emit light with high brightness while keeping the current density low, and to achieve a longer life. A device with a long life can be realized.
  • a light-emitting device that can be driven at low voltage and consumes low power can be realized.
  • the emission colors of the respective light emitting units different, it is possible to obtain emission of a desired color from the organic EL device as a whole.
  • the light-emitting unit A emits red and green light
  • the light-emitting unit B emits blue light, thereby obtaining an organic EL device emitting white light as a whole. is also possible.
  • by obtaining light of the same color from the light-emitting unit A and the light-emitting unit B it is possible to emit light with high luminance while keeping the current density low, and a long-life element can be realized.
  • a metal, an alloy, an electrically conductive compound, a mixture thereof, or the like having a small work function (specifically, 3.8 eV or less) can be used as a substance forming the cathode 102.
  • cathode materials include alkali metals such as lithium (Li) and cesium (Cs), and group 1 or Elements belonging to Group 2, alloys containing these (MgAg, AlLi), rare earth metals such as europium (Eu) and ytterbium (Yb), and alloys containing these.
  • an electron injection layer between the cathode 102 and the electron transport layer various materials such as Al, Ag, ITO, silicon or silicon oxide-containing indium oxide-tin oxide can be used regardless of the magnitude of the work function.
  • a conductive material can be used as the cathode 102 .
  • Films of these conductive materials can be formed by a dry method such as a vacuum deposition method or a sputtering method, an inkjet method, a spin coating method, or the like. Moreover, it may be formed by a wet method using a sol-gel method, or may be formed by a wet method using a paste of a metal material.
  • a method for forming the EL layer 103 various methods can be used regardless of whether it is a dry method or a wet method.
  • a vacuum vapor deposition method, gravure printing method, offset printing method, screen printing method, inkjet method, spin coating method, or the like may be used.
  • each electrode or each layer described above may be formed using a different film formation method.
  • the structure of the layers provided between the anode 101 and the cathode 102 is not limited to the above. However, in order to suppress the quenching caused by the proximity of the light-emitting region to the metal used for the electrode or carrier injection layer, the light-emitting region in which holes and electrons recombine at sites distant from the anode 101 and the cathode 102. is preferably provided.
  • the band gap is preferably composed of a material having a bandgap larger than that of the light-emitting material constituting the light-emitting layer or the light-emitting material contained in the light-emitting layer.
  • the display device of this embodiment can be a high-resolution display device or a large-sized display device. Therefore, the display device of the present embodiment includes a relatively large screen such as a television device, a desktop or notebook personal computer, a computer monitor, a digital signage, a large game machine such as a pachinko machine, or the like. In addition to electronic devices, it can be used for display parts of digital cameras, digital video cameras, digital photo frames, mobile phones, portable game machines, smartphones, wristwatch terminals, tablet terminals, personal digital assistants, and sound reproducing devices.
  • FIG. 8 shows a perspective view of the display device 400A
  • FIG. 9A shows a cross-sectional view of the display device 400A.
  • the display device 400A has a configuration in which a substrate 452 and a substrate 451 are bonded together.
  • the substrate 452 is clearly indicated by dashed lines.
  • the display device 400A has a display section 462, a circuit 464, wiring 465, and the like.
  • FIG. 9 shows an example in which an IC 473 and an FPC 472 are mounted on the display device 400A. Therefore, the configuration shown in FIG. 9 can also be called a display module including the display device 400A, an IC (integrated circuit), and an FPC.
  • a scanning line driving circuit for example, can be used as the circuit 464 .
  • the wiring 465 has a function of supplying signals and power to the display section 462 and the circuit 464 .
  • the signal and power are input to the wiring 465 from the outside through the FPC 472 or input to the wiring 465 from the IC 473 .
  • FIG. 9 shows an example in which an IC 473 is provided on a substrate 451 by a COG (Chip On Glass) method, a COF (Chip on Film) method, or the like.
  • a COG Chip On Glass
  • COF Chip on Film
  • the IC 473 for example, an IC having a scanning line driver circuit, a signal line driver circuit, or the like can be applied.
  • the display device 400A and the display module may be configured without an IC.
  • the IC may be mounted on the FPC by the COF method or the like.
  • FIG. 9A shows an example of a cross-section of the display device 400A when part of the region including the FPC 472, part of the circuit 464, part of the display section 462, and part of the region including the end are cut. show.
  • the display device 400A illustrated in FIG. 9A includes a transistor 201 and a transistor 205, a light emitting device 430a emitting red light, a light emitting device 430b emitting green light, and a light emitting device 430b emitting blue light, which are arranged between a substrate 451 and a substrate 452. It has a device 430c and the like.
  • the light emitting device exemplified in Embodiment 1 can be applied to the light emitting device 430a, the light emitting device 430b, and the light emitting device 430c.
  • the three sub-pixels are R, G, and B sub-pixels, and yellow (Y). , cyan (C), and magenta (M).
  • the four sub-pixels include R, G, B, and white (W) sub-pixels, and R, G, B, and Y four-color sub-pixels. be done.
  • the protective layer 416 and the substrate 452 are adhered via the adhesive layer 442 .
  • a solid sealing structure, a hollow sealing structure, or the like can be applied to sealing the light-emitting device.
  • the space 443 surrounded by the substrate 452, the adhesion layer 442, and the substrate 451 is filled with an inert gas (such as nitrogen or argon) to apply a hollow sealing structure.
  • the adhesive layer 442 may be provided overlying the light emitting device.
  • a space 443 surrounded by the substrate 452 , the adhesive layer 442 , and the substrate 451 may be filled with a resin different from that of the adhesive layer 442 .
  • the light-emitting devices 430a, 430b, and 430c have an optical adjustment layer between the pixel electrode and the EL layer.
  • Light-emitting device 430a has an optical tuning layer 426a
  • light-emitting device 430b has an optical tuning layer 426b
  • light-emitting device 430c has an optical tuning layer 426c.
  • Embodiment 1 can be referred to for details of the light-emitting device.
  • the pixel electrodes 411a, 411b, and 411c are connected to the conductive layer 222b of the transistor 205 through openings provided in the insulating layer 214, respectively.
  • the edges of the pixel electrodes and the optical adjustment layer are covered with an insulating layer 421 .
  • the pixel electrode contains a material that reflects visible light
  • the counter electrode contains a material that transmits visible light.
  • the light emitted by the light emitting device is emitted to the substrate 452 side.
  • a material having high visible light transmittance is preferably used for the substrate 452 .
  • Both the transistor 201 and the transistor 205 are formed over the substrate 451 . These transistors can be made with the same material and the same process.
  • An insulating layer 211, an insulating layer 213, an insulating layer 215, and an insulating layer 214 are provided on the substrate 451 in this order.
  • Part of the insulating layer 211 functions as a gate insulating layer of each transistor.
  • Part of the insulating layer 213 functions as a gate insulating layer of each transistor.
  • An insulating layer 215 is provided over the transistor.
  • An insulating layer 214 is provided over the transistor and functions as a planarization layer. Note that the number of gate insulating layers and the number of insulating layers covering a transistor are not limited, and each may have a single layer or two or more layers.
  • a material in which impurities such as water and hydrogen are difficult to diffuse for at least one insulating layer covering the transistor.
  • Inorganic insulating films are preferably used for the insulating layer 211, the insulating layer 213, and the insulating layer 215, respectively.
  • As the inorganic insulating film for example, a silicon nitride film, a silicon oxynitride film, a silicon oxide film, a silicon oxynitride film, an aluminum oxide film, an aluminum nitride film, or the like can be used.
  • a hafnium oxide film, an yttrium oxide film, a zirconium oxide film, a gallium oxide film, a tantalum oxide film, a magnesium oxide film, a lanthanum oxide film, a cerium oxide film, a neodymium oxide film, or the like may be used.
  • two or more of the insulating films described above may be laminated and used.
  • the organic insulating film preferably has openings near the ends of the display device 400A. As a result, it is possible to prevent impurities from entering through the organic insulating film from the end portion of the display device 400A.
  • the organic insulating film may be formed so that the edges of the organic insulating film are located inside the edges of the display device 400A so that the organic insulating film is not exposed at the edges of the display device 400A.
  • An organic insulating film is suitable for the insulating layer 214 that functions as a planarization layer.
  • materials that can be used for the organic insulating film include acrylic resins, polyimide resins, epoxy resins, polyamide resins, polyimideamide resins, siloxane resins, benzocyclobutene-based resins, phenolic resins, precursors of these resins, and the like.
  • An opening is formed in the insulating layer 214 in a region 228 shown in FIG. 9A.
  • the transistors 201 and 205 include a conductive layer 221 functioning as a gate, an insulating layer 211 functioning as a gate insulating layer, conductive layers 222a and 222b functioning as sources and drains, a semiconductor layer 231, and an insulating layer functioning as a gate insulating layer. It has a layer 213 and a conductive layer 223 that functions as a gate. Here, the same hatching pattern is applied to a plurality of layers obtained by processing the same conductive film.
  • the insulating layer 211 is located between the conductive layer 221 and the semiconductor layer 231 .
  • the insulating layer 213 is located between the conductive layer 223 and the semiconductor layer 231 .
  • the structure of the transistor included in the display device of this embodiment there is no particular limitation on the structure of the transistor included in the display device of this embodiment.
  • a planar transistor, a staggered transistor, an inverted staggered transistor, or the like can be used.
  • the transistor structure may be either a top-gate type or a bottom-gate type.
  • gates may be provided above and below a semiconductor layer in which a channel is formed.
  • a structure in which a semiconductor layer in which a channel is formed is sandwiched between two gates is applied to the transistors 201 and 205 .
  • a transistor may be driven by connecting two gates and applying the same signal to them.
  • the threshold voltage of the transistor may be controlled by applying a potential for controlling the threshold voltage to one of the two gates and applying a potential for driving to the other.
  • the crystallinity of the semiconductor material used for the transistor is not particularly limited, either. (semiconductors having A single crystal semiconductor or a crystalline semiconductor is preferably used because deterioration in transistor characteristics can be suppressed.
  • a semiconductor layer of a transistor preferably includes a metal oxide (also referred to as an oxide semiconductor).
  • the display device of this embodiment preferably uses a transistor including a metal oxide for a channel formation region (hereinafter referred to as an OS transistor).
  • the semiconductor layer of the transistor may comprise silicon. Examples of silicon include amorphous silicon and crystalline silicon (low-temperature polysilicon, monocrystalline silicon, etc.).
  • the semiconductor layer includes, for example, indium and M (M is gallium, aluminum, silicon, boron, yttrium, tin, copper, vanadium, beryllium, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, one or more selected from hafnium, tantalum, tungsten, and magnesium) and zinc.
  • M is preferably one or more selected from aluminum, gallium, yttrium, and tin.
  • an oxide also referred to as IGZO
  • IGZO oxide containing indium (In), gallium (Ga), and zinc (Zn) as the semiconductor layer.
  • the atomic ratio of In in the In-M-Zn oxide is preferably equal to or higher than the atomic ratio of M.
  • the transistor included in the circuit 464 and the transistor included in the display portion 462 may have the same structure or different structures.
  • the plurality of transistors included in the circuit 464 may all have the same structure, or may have two or more types.
  • the plurality of transistors included in the display portion 462 may all have the same structure, or may have two or more types.
  • a connecting portion 204 is provided in a region of the substrate 451 where the substrate 452 does not overlap.
  • the wiring 465 is electrically connected to the FPC 472 through the conductive layer 466 and the connection layer 242 .
  • the conductive layer 466 shows an example of a laminated structure of a conductive film obtained by processing the same conductive film as the pixel electrode and a conductive film obtained by processing the same conductive film as the optical adjustment layer. .
  • the conductive layer 466 is exposed on the upper surface of the connecting portion 204 . Thereby, the connecting portion 204 and the FPC 472 can be electrically connected via the connecting layer 242 .
  • a light shielding layer 417 is preferably provided on the surface of the substrate 452 on the substrate 451 side.
  • various optical members can be arranged outside the substrate 452 .
  • optical members include polarizing plates, retardation plates, light diffusion layers (diffusion films, etc.), antireflection layers, light collecting films, and the like.
  • an antistatic film that suppresses adhesion of dust, a water-repellent film that prevents adhesion of dirt, a hard coat film that suppresses the occurrence of scratches due to use, a shock absorption layer, etc. are arranged on the outside of the substrate 452.
  • an antistatic film that suppresses adhesion of dust, a water-repellent film that prevents adhesion of dirt, a hard coat film that suppresses the occurrence of scratches due to use, a shock absorption layer, etc. are arranged.
  • the protective layer 416 that covers the light-emitting device By providing the protective layer 416 that covers the light-emitting device, it is possible to prevent impurities such as water from entering the light-emitting device and improve the reliability of the light-emitting device.
  • the insulating layer 215 and the protective layer 416 are in contact with each other through the opening of the insulating layer 214 in the region 228 near the edge of the display device 400A.
  • the inorganic insulating film included in the insulating layer 215 and the inorganic insulating film included in the protective layer 416 are in contact with each other. This can prevent impurities from entering the display section 462 from the outside through the organic insulating film. Therefore, the reliability of the display device 400A can be improved.
  • FIG. 9B shows an example in which the protective layer 416 has a three-layer structure.
  • the protective layer 416 has an inorganic insulating layer 416a over the light emitting device 430c, an organic insulating layer 416b over the inorganic insulating layer 416a, and an inorganic insulating layer 416c over the organic insulating layer 416b.
  • the end of the inorganic insulating layer 416a and the end of the inorganic insulating layer 416c extend outside the end of the organic insulating layer 416b and are in contact with each other.
  • the inorganic insulating layer 416a is in contact with the insulating layer 215 (inorganic insulating layer) through the opening of the insulating layer 214 (organic insulating layer).
  • the light emitting device can be surrounded by the insulating layer 215 and the protective layer 416, so that the reliability of the light emitting device can be improved.
  • the protective layer 416 may have a laminated structure of an organic insulating film and an inorganic insulating film. At this time, it is preferable that the end portion of the inorganic insulating film extends further outward than the end portion of the organic insulating film.
  • the substrates 451 and 452 glass, quartz, ceramics, sapphire, resins, metals, alloys, semiconductors, etc. can be used, respectively.
  • a material that transmits the light is used for the substrate on the side from which the light from the light-emitting device is extracted.
  • the flexibility of the display device can be increased.
  • a polarizing plate may be used as the substrate 451 or the substrate 452 .
  • polyester resins such as polyethylene terephthalate (PET) and polyethylene naphthalate (PEN), polyacrylonitrile resins, acrylic resins, polyimide resins, polymethylmethacrylate resins, polycarbonate (PC) resins, and polyether resins are used.
  • PET polyethylene terephthalate
  • PEN polyethylene naphthalate
  • acrylic resins acrylic resins
  • polyimide resins polymethylmethacrylate resins
  • PC polycarbonate
  • polyether resins polyether resins
  • PES resin Sulfone (PES) resin, polyamide resin (nylon, aramid, etc.), polysiloxane resin, cycloolefin resin, polystyrene resin, polyamideimide resin, polyurethane resin, polyvinyl chloride resin, polyvinylidene chloride resin, polypropylene resin, polytetrafluoroethylene (PTFE) resin, ABS resin, cellulose nanofiber, or the like can be used.
  • PES polytetyrene resin
  • polyamideimide resin polyurethane resin
  • polyvinyl chloride resin polyvinylidene chloride resin
  • polypropylene resin polytetrafluoroethylene (PTFE) resin
  • PTFE resin polytetrafluoroethylene
  • ABS resin cellulose nanofiber, or the like
  • One or both of the substrates 451 and 452 may be made of glass having a thickness sufficient to be flexible.
  • a substrate having high optical isotropy has small birefringence (it can be said that the amount of birefringence is small).
  • the absolute value of the retardation (retardation) value of the substrate with high optical isotropy is preferably 30 nm or less, more preferably 20 nm or less, and even more preferably 10 nm or less.
  • Films with high optical isotropy include triacetylcellulose (TAC, also called cellulose triacetate) films, cycloolefin polymer (COP) films, cycloolefin copolymer (COC) films, and acrylic films.
  • TAC triacetylcellulose
  • COP cycloolefin polymer
  • COC cycloolefin copolymer
  • a film having a low water absorption rate as the substrate.
  • various curable adhesives such as photocurable adhesives such as ultraviolet curable adhesives, reaction curable adhesives, thermosetting adhesives, and anaerobic adhesives can be used.
  • These adhesives include epoxy resins, acrylic resins, silicone resins, phenol resins, polyimide resins, imide resins, PVC (polyvinyl chloride) resins, PVB (polyvinyl butyral) resins, EVA (ethylene vinyl acetate) resins, and the like.
  • a material with low moisture permeability such as epoxy resin is preferable.
  • a two-liquid mixed type resin may be used.
  • an adhesive sheet or the like may be used.
  • connection layer 242 an anisotropic conductive film (ACF: Anisotropic Conductive Film), an anisotropic conductive paste (ACP: Anisotropic Conductive Paste), or the like can be used.
  • ACF Anisotropic Conductive Film
  • ACP Anisotropic Conductive Paste
  • materials that can be used for conductive layers such as various wirings and electrodes constituting display devices include aluminum, titanium, chromium, nickel, copper, yttrium, zirconium, molybdenum, silver, Examples include metals such as tantalum and tungsten, and alloys containing these metals as main components. A film containing these materials can be used as a single layer or as a laminated structure.
  • conductive oxides such as indium oxide, indium tin oxide, indium zinc oxide, zinc oxide, zinc oxide containing gallium, or graphene can be used.
  • metal materials such as gold, silver, platinum, magnesium, nickel, tungsten, chromium, molybdenum, iron, cobalt, copper, palladium, and titanium, or alloy materials containing such metal materials can be used.
  • a nitride of the metal material eg, titanium nitride
  • it is preferably thin enough to have translucency.
  • a stacked film of any of the above materials can be used as the conductive layer.
  • a laminated film of a silver-magnesium alloy and indium tin oxide because the conductivity can be increased.
  • conductive layers such as various wirings and electrodes that constitute a display device, and conductive layers (conductive layers functioning as pixel electrodes or common electrodes) of light-emitting devices.
  • Examples of insulating materials that can be used for each insulating layer include resins such as acrylic resins and epoxy resins, and inorganic insulating materials such as silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, and aluminum oxide.
  • FIG. 10A shows a cross-sectional view of the display device 400B.
  • a perspective view of the display device 400B is the same as that of the display device 400A (FIG. 8).
  • FIG. 10A shows an example of a cross section of the display device 400B when part of the region including the FPC 472, part of the circuit 464, and part of the display portion 462 are cut.
  • FIG. 10A shows an example of a cross section of the display section 462, in particular, a region including the light emitting device 430b that emits green light and the light emitting device 430c that emits blue light. Note that the description of the same parts as those of the display device 400A may be omitted.
  • a display device 400B illustrated in FIG. 10A includes the transistor 202, the transistor 210, the light-emitting device 430b, the light-emitting device 430c, and the like between the substrate 453 and the substrate 454.
  • the substrate 454 and the protective layer 416 are adhered via the adhesive layer 442 .
  • the adhesive layer 442 is overlapped with each of the light emitting devices 430b and 430c, and a solid sealing structure is applied to the display device 400B.
  • the substrate 453 and the insulating layer 212 are bonded together by an adhesive layer 455 .
  • a manufacturing substrate provided with the insulating layer 212, each transistor, each light-emitting device, etc., and the substrate 454 provided with the light shielding layer 417 are bonded together by the adhesive layer 442. Then, the formation substrate is peeled off and a substrate 453 is attached to the exposed surface, so that each component formed over the formation substrate is transferred to the substrate 453 .
  • Each of the substrates 453 and 454 preferably has flexibility. This can enhance the flexibility of the display device 400B.
  • Inorganic insulating films that can be used for the insulating layers 211, 213, and 215 can be used for the insulating layer 212, respectively.
  • the pixel electrode is connected to the conductive layer 222b of the transistor 210 through an opening provided in the insulating layer 214.
  • the conductive layer 222 b is connected to the low-resistance region 231 n through openings provided in the insulating layers 215 and 225 .
  • the transistor 210 has the function of controlling driving of the light emitting device.
  • the edge of the pixel electrode is covered with an insulating layer 421 .
  • the light emitted by the light emitting devices 430b and 430c is emitted to the substrate 454 side.
  • a material having high visible light transmittance is preferably used for the substrate 454 .
  • a connecting portion 204 is provided in a region of the substrate 453 where the substrate 454 does not overlap.
  • the wiring 465 is electrically connected to the FPC 472 through the conductive layer 466 and the connection layer 242 .
  • the conductive layer 466 can be obtained by processing the same conductive film as the pixel electrode. Thereby, the connecting portion 204 and the FPC 472 can be electrically connected via the connecting layer 242 .
  • the transistors 202 and 210 each include a conductive layer 221 functioning as a gate, an insulating layer 211 functioning as a gate insulating layer, a semiconductor layer having a channel formation region 231i and a pair of low-resistance regions 231n, and one of the pair of low-resistance regions 231n.
  • a connecting conductive layer 222a, a conductive layer 222b connecting to the other of the pair of low-resistance regions 231n, an insulating layer 225 functioning as a gate insulating layer, a conductive layer 223 functioning as a gate, and an insulating layer 215 covering the conductive layer 223 are provided.
  • the insulating layer 211 is located between the conductive layer 221 and the channel formation region 231i.
  • the insulating layer 225 is located between the conductive layer 223 and the channel formation region 231i.
  • the conductive layers 222a and 222b are each connected to the low resistance region 231n through openings provided in the insulating layer 215.
  • One of the conductive layers 222a and 222b functions as a source and the other functions as a drain.
  • FIG. 10A shows an example in which the insulating layer 225 covers the upper and side surfaces of the semiconductor layer.
  • the conductive layers 222a and 222b are connected to the low-resistance region 231n through openings provided in the insulating layers 225 and 215, respectively.
  • the insulating layer 225 overlaps the channel formation region 231i of the semiconductor layer 231 and does not overlap the low resistance region 231n.
  • the structure shown in FIG. 10B can be manufactured by processing the insulating layer 225 using the conductive layer 223 as a mask.
  • the insulating layer 215 is provided to cover the insulating layer 225 and the conductive layer 223, and the conductive layers 222a and 222b are connected to the low resistance region 231n through openings in the insulating layer 215, respectively.
  • an insulating layer 218 may be provided to cover the transistor.
  • This embodiment can be implemented by appropriately combining at least part of it with other embodiments described herein.
  • the display device of this embodiment can be a high-definition display device. Therefore, the display device of the present embodiment includes, for example, information terminals (wearable devices) such as a wristwatch type and a bracelet type, devices for VR such as a head-mounted display, devices for AR such as glasses, and the like. It can be used for the display part of wearable equipment.
  • information terminals wearable devices
  • VR such as a head-mounted display
  • AR such as glasses
  • Display module A perspective view of the display module 280 is shown in FIG. 11A.
  • the display module 280 has a display device 400C and an FPC 290 .
  • the display device included in the display module 280 is not limited to the display device 400C, and may be a display device 400D or a display device 400E, which will be described later.
  • the display module 280 has substrates 291 and 292 .
  • the display module 280 has a display section 281 .
  • the display unit 281 is an area for displaying an image in the display module 280, and is an area where light from each pixel provided in the pixel unit 284, which will be described later, can be visually recognized.
  • FIG. 11B shows a perspective view schematically showing the configuration on the substrate 291 side.
  • a circuit section 282 , a pixel circuit section 283 on the circuit section 282 , and a pixel section 284 on the pixel circuit section 283 are stacked on the substrate 291 .
  • a terminal portion 285 for connecting to the FPC 290 is provided on a portion of the substrate 291 that does not overlap with the pixel portion 284 .
  • the terminal portion 285 and the circuit portion 282 are electrically connected by a wiring portion 286 composed of a plurality of wirings.
  • the pixel section 284 has a plurality of periodically arranged pixels 284a. An enlarged view of one pixel 284a is shown on the right side of FIG. 11B. Pixel 284a has light-emitting devices 430a, 430b, and 430c that emit light of different colors. A plurality of light emitting devices may be arranged in a stripe arrangement as shown in FIG. 11B. Since the stripe arrangement can arrange pixel circuits at high density, it is possible to provide a high-definition display device. Also, various arrangement methods such as delta arrangement and pentile arrangement can be applied.
  • the pixel circuit section 283 has a plurality of periodically arranged pixel circuits 283a.
  • One pixel circuit 283a is a circuit that controls light emission of three light emitting devices included in one pixel 284a.
  • One pixel circuit 283a may have a structure in which three circuits for controlling light emission of one light emitting device are provided.
  • the pixel circuit 283a can have at least one selection transistor, one current control transistor (driving transistor), and a capacitive element for each light emitting device. At this time, a gate signal is input to the gate of the selection transistor, and a source signal is input to either the source or the drain of the selection transistor. This realizes an active matrix display device.
  • the circuit section 282 has a circuit that drives each pixel circuit 283 a of the pixel circuit section 283 .
  • a circuit that drives each pixel circuit 283 a of the pixel circuit section 283 For example, it is preferable to have one or both of a gate line driver circuit and a source line driver circuit.
  • at least one of an arithmetic circuit, a memory circuit, a power supply circuit, and the like may be provided.
  • the FPC 290 functions as wiring for supplying a video signal, power supply potential, or the like to the circuit section 282 from the outside. Also, an IC may be mounted on the FPC 290 .
  • the aperture ratio (effective display area ratio) of the display portion 281 is extremely high. can be higher.
  • the aperture ratio of the display section 281 can be 40% or more and less than 100%, preferably 50% or more and 95% or less, more preferably 60% or more and 95% or less.
  • the pixels 284a can be arranged at an extremely high density, and the definition of the display portion 281 can be extremely high.
  • pixels 284a may be arranged with a resolution of 2000 ppi or more, preferably 3000 ppi or more, more preferably 5000 ppi or more, and still more preferably 6000 ppi or more, and 20000 ppi or less, or 30000 ppi or less. preferable.
  • a display module 280 Since such a display module 280 has extremely high definition, it can be suitably used for devices for VR such as head-mounted displays, or glasses-type devices for AR. For example, even in the case of a configuration in which the display portion of the display module 280 is viewed through a lens, the display module 280 has an extremely high-definition display portion 281, so pixels cannot be viewed even if the display portion is enlarged with the lens. , a highly immersive display can be performed. Moreover, the display module 280 is not limited to this, and can be suitably used for electronic equipment having a relatively small display unit. For example, it can be suitably used for a display part of a wearable electronic device such as a wristwatch.
  • Display device 400C A display device 400C illustrated in FIG.
  • the substrate 301 corresponds to the substrate 291 in FIGS. 11A and 11B.
  • a laminated structure from the substrate 301 to the insulating layer 255 corresponds to the substrate 100 and the insulating layer 120 in the first embodiment.
  • a transistor 310 is a transistor having a channel formation region in the substrate 301 .
  • the substrate 301 for example, a semiconductor substrate such as a single crystal silicon substrate can be used.
  • Transistor 310 includes a portion of substrate 301 , conductive layer 311 , low resistance region 312 , insulating layer 313 and insulating layer 314 .
  • the conductive layer 311 functions as a gate electrode.
  • An insulating layer 313 is located between the substrate 301 and the conductive layer 311 and functions as a gate insulating layer.
  • the low-resistance region 312 is a region in which the substrate 301 is doped with impurities and functions as either a source or a drain.
  • the insulating layer 314 is provided to cover the side surface of the conductive layer 311 and functions as an insulating layer.
  • a device isolation layer 315 is provided between two adjacent transistors 310 so as to be embedded in the substrate 301 .
  • An insulating layer 261 is provided to cover the transistor 310 , and a capacitor 240 is provided over the insulating layer 261 .
  • the capacitor 240 has a conductive layer 241, a conductive layer 245, and an insulating layer 243 positioned therebetween.
  • the conductive layer 241 functions as one electrode of the capacitor 240
  • the conductive layer 245 functions as the other electrode of the capacitor 240
  • the insulating layer 243 functions as the dielectric of the capacitor 240 .
  • the conductive layer 241 is provided on the insulating layer 261 and embedded in the insulating layer 254 .
  • Conductive layer 241 is electrically connected to one of the source or drain of transistor 310 by plug 271 embedded in insulating layer 261 .
  • An insulating layer 243 is provided over the conductive layer 241 .
  • the conductive layer 245 is provided in a region overlapping with the conductive layer 241 with the insulating layer 243 provided therebetween.
  • An insulating layer 255 is provided to cover the capacitor 240, and light emitting devices 430a, 430b, 430c, etc. are provided on the insulating layer 255.
  • a protective layer 416 is provided on the light emitting devices 430 a , 430 b , 430 c , and a substrate 420 is attached to the top surface of the protective layer 416 with a resin layer 419 .
  • the pixel electrode of the light emitting device is electrically connected to one of the source or drain of transistor 310 by plug 256 embedded in insulating layer 255 , conductive layer 241 embedded in insulating layer 254 , and plug 271 embedded in insulating layer 261 . properly connected.
  • Display device 400D A display device 400D shown in FIG. 13 is mainly different from the display device 400C in that the transistor configuration is different. Note that the description of the same parts as the display device 400C may be omitted.
  • the transistor 320 is a transistor in which a metal oxide (also referred to as an oxide semiconductor) is applied to a semiconductor layer in which a channel is formed.
  • a metal oxide also referred to as an oxide semiconductor
  • the transistor 320 has a semiconductor layer 321 , an insulating layer 323 , a conductive layer 324 , a pair of conductive layers 325 , an insulating layer 326 , and a conductive layer 327 .
  • the substrate 331 corresponds to the substrate 291 in FIGS. 11A and 11B.
  • a stacked structure 401 from the substrate 331 to the insulating layer 255 corresponds to the layer including the transistor in Embodiment 1.
  • An insulating layer 332 is provided on the substrate 331 .
  • the insulating layer 332 functions as a barrier layer that prevents impurities such as water or hydrogen from diffusing from the substrate 331 into the transistor 320 and oxygen from the semiconductor layer 321 toward the insulating layer 332 side.
  • a film into which hydrogen or oxygen is less likely to diffuse than a silicon oxide film such as an aluminum oxide film, a hafnium oxide film, or a silicon nitride film, can be used.
  • a conductive layer 327 is provided over the insulating layer 332 , and an insulating layer 326 is provided to cover the conductive layer 327 .
  • the conductive layer 327 functions as a first gate electrode of the transistor 320, and part of the insulating layer 326 functions as a first gate insulating layer.
  • An oxide insulating film such as a silicon oxide film is preferably used for at least a portion of the insulating layer 326 that is in contact with the semiconductor layer 321 .
  • the upper surface of the insulating layer 326 is preferably planarized.
  • the semiconductor layer 321 is provided on the insulating layer 326 .
  • the semiconductor layer 321 preferably includes a metal oxide (also referred to as an oxide semiconductor) film having semiconductor characteristics. Details of materials that can be suitably used for the semiconductor layer 321 will be described later.
  • a pair of conductive layers 325 are provided on and in contact with the semiconductor layer 321 and function as a source electrode and a drain electrode.
  • An insulating layer 328 is provided to cover the top and side surfaces of the pair of conductive layers 325, the side surface of the semiconductor layer 321, and the like, and the insulating layer 264 is provided over the insulating layer 328.
  • the insulating layer 328 functions as a barrier layer that prevents impurities such as water or hydrogen from diffusing into the semiconductor layer 321 from the insulating layer 264 or the like and oxygen from leaving the semiconductor layer 321 .
  • an insulating film similar to the insulating layer 332 can be used as the insulating layer 328.
  • An opening reaching the semiconductor layer 321 is provided in the insulating layer 328 and the insulating layer 264 .
  • the insulating layer 323 and the conductive layer 324 are buried in contact with the side surfaces of the insulating layer 264 , the insulating layer 328 , and the conductive layer 325 and the top surface of the semiconductor layer 321 .
  • the conductive layer 324 functions as a second gate electrode, and the insulating layer 323 functions as a second gate insulating layer.
  • the top surface of the conductive layer 324, the top surface of the insulating layer 323, and the top surface of the insulating layer 264 are planarized so that their heights are approximately the same, and the insulating layers 329 and 265 are provided to cover them. .
  • the insulating layers 264 and 265 function as interlayer insulating layers.
  • the insulating layer 329 functions as a barrier layer that prevents impurities such as water or hydrogen from diffusing into the transistor 320 from the insulating layer 265 or the like.
  • an insulating film similar to the insulating layers 328 and 332 can be used.
  • a plug 274 electrically connected to one of the pair of conductive layers 325 is provided so as to be embedded in the insulating layers 265 , 329 and 264 .
  • the plug 274 includes a conductive layer 274a that covers the side surfaces of the openings of the insulating layers 265, the insulating layers 329, the insulating layers 264, and the insulating layer 328 and part of the top surface of the conductive layer 325, and the conductive layer 274a. It is preferable to have a conductive layer 274b in contact with the top surface. At this time, a conductive material into which hydrogen and oxygen are difficult to diffuse is preferably used for the conductive layer 274a.
  • the configuration from the insulating layer 254 to the substrate 420 in the display device 400D is similar to that of the display device 400C.
  • a display device 400E illustrated in FIG. 14 has a structure in which a transistor 310 in which a channel is formed over a substrate 301 and a transistor 320 including a metal oxide in a semiconductor layer in which the channel is formed are stacked. Note that descriptions of portions similar to those of the display devices 400C and 400D may be omitted.
  • An insulating layer 261 is provided to cover the transistor 310 , and a conductive layer 251 is provided over the insulating layer 261 .
  • An insulating layer 262 is provided to cover the conductive layer 251 , and the conductive layer 252 is provided over the insulating layer 262 .
  • the conductive layers 251 and 252 each function as wirings.
  • An insulating layer 263 and an insulating layer 332 are provided to cover the conductive layer 252 , and the transistor 320 is provided over the insulating layer 332 .
  • An insulating layer 265 is provided to cover the transistor 320 and a capacitor 240 is provided over the insulating layer 265 . Capacitor 240 and transistor 320 are electrically connected by plug 274 .
  • the transistor 320 can be used as a transistor forming a pixel circuit. Further, the transistor 310 can be used as a transistor forming a pixel circuit or a transistor forming a driver circuit (a gate line driver circuit or a source line driver circuit) for driving the pixel circuit. Further, the transistors 310 and 320 can be used as transistors included in various circuits such as an arithmetic circuit and a memory circuit.
  • This embodiment can be implemented by appropriately combining at least part of it with other embodiments described herein.
  • FIG. 15A An example of a circuit diagram of the pixel unit 70 is shown in FIG. 15A.
  • the pixel unit 70 is composed of two pixels (pixel 70a and pixel 70b). Wiring 51a, wiring 51b, wiring 52a, wiring 52b, wiring 52c, wiring 52d, wiring 53a, wiring 53b, wiring 53c, and the like are connected to the pixel unit .
  • the pixel 70a has a sub-pixel 71a, a sub-pixel 72a, and a sub-pixel 73a.
  • Pixel 70b has sub-pixel 71b, sub-pixel 72b, and sub-pixel 73b.
  • the sub-pixel 71a, the sub-pixel 72a, and the sub-pixel 73a respectively have a pixel circuit 41a, a pixel circuit 42a, and a pixel circuit 43a.
  • the sub-pixel 71b, the sub-pixel 72b, and the sub-pixel 73b respectively have a pixel circuit 41b, a pixel circuit 42b, and a pixel circuit 43b.
  • Each subpixel has a pixel circuit and a display element 60 .
  • the sub-pixel 71a has a pixel circuit 41a and a display element 60.
  • FIG. Here, a case where a light-emitting device such as an organic EL element is used as the display element 60 is shown.
  • the wiring 51a and the wiring 51b each have a function as a gate line.
  • Each of the wirings 52a, 52b, 52c, and 52d functions as a signal line (also referred to as a data line).
  • the wirings 53 a , 53 b , and 53 c have a function of supplying a potential to the display element 60 .
  • the pixel circuit 41a is electrically connected to the wiring 51a, the wiring 52a, and the wiring 53a.
  • the pixel circuit 42a is electrically connected to the wiring 51b, the wiring 52d, and the wiring 53a.
  • the pixel circuit 43a is electrically connected to the wirings 51a, 52b, and 53b.
  • the pixel circuit 41b is electrically connected to the wiring 51b, the wiring 52a, and the wiring 53b.
  • the pixel circuit 42b is electrically connected to the wiring 51a, the wiring 52c, and the wiring 53c.
  • the pixel circuit 43b is electrically connected to the wirings 51b, 52b, and 53c.
  • the number of source lines can be halved compared to the stripe arrangement.
  • the number of terminals of the IC used as the source driver circuit can be reduced by half, and the number of parts can be reduced.
  • pixel circuits corresponding to the same color it is preferable to connect pixel circuits corresponding to the same color to one wiring functioning as a signal line.
  • the correction value may differ greatly for each color. Therefore, by making all the pixel circuits connected to one signal line correspond to the same color, correction can be facilitated.
  • Each pixel circuit also has a transistor 61 , a transistor 62 and a capacitive element 63 .
  • the transistor 61 has a gate electrically connected to the wiring 51a, one of the source and drain electrically connected to the wiring 52a, and the other of the source and drain being the gate of the transistor 62 and the capacitor. It is electrically connected to one electrode of 63 .
  • One of the source and the drain of the transistor 62 is electrically connected to one electrode of the display element 60, and the other of the source and the drain is electrically connected to the other electrode of the capacitor 63 and the wiring 53a.
  • the other electrode of the display element 60 is electrically connected to the wiring to which the potential V1 is applied.
  • a wiring to which the gate of the transistor 61 is connected a wiring to which one of the source and the drain of the transistor 61 is connected, and a wiring to which the other electrode of the capacitor 63 is connected. It has the same configuration as the pixel circuit 41a except that it is different.
  • the transistor 61 functions as a selection transistor.
  • the transistor 62 is connected in series with the display element 60 and has a function of controlling current flowing through the display element 60 .
  • the capacitor 63 has a function of holding the potential of the node to which the gate of the transistor 62 is connected. Note that the capacitor 63 does not need to be intentionally provided in the case where leakage current in the off state of the transistor 61, leakage current through the gate of the transistor 62, or the like is extremely small.
  • the transistor 62 preferably has a first gate and a second gate that are electrically connected to each other. With such a structure having two gates, the current that can flow through the transistor 62 can be increased. In particular, it is preferable for a high-definition display device because the current can be increased without increasing the size of the transistor 62, particularly the channel width.
  • the transistor 62 may have one gate. With such a structure, the step of forming the second gate is not required, so the steps can be simplified as compared with the above.
  • the transistor 61 may have two gates. With such a structure, the size of each transistor can be reduced. Further, a structure in which the first gate and the second gate of each transistor are electrically connected to each other can be employed. Alternatively, one gate may be electrically connected to a different wiring. In that case, the threshold voltage of the transistor can be controlled by applying different potentials to the wiring.
  • the electrode electrically connected to the transistor 62 corresponds to the pixel electrode.
  • FIG. 5 shows a configuration in which the electrode electrically connected to the transistor 62 of the display element 60 is the cathode, and the electrode on the opposite side is the anode.
  • transistor 62 is an n-channel transistor.
  • the potential applied from the wiring 53a is the source potential, so that the current flowing through the transistor 62 can be constant regardless of variations or fluctuations in the resistance of the display element 60.
  • a p-channel transistor may be used as a transistor included in the pixel circuit.
  • the metal oxide preferably contains at least indium or zinc. In particular, it preferably contains indium and zinc. In addition to these, aluminum, gallium, yttrium, tin and the like are preferably contained. In addition, one or more selected from boron, silicon, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, magnesium, cobalt, etc. may be contained. .
  • the metal oxide is formed by sputtering, chemical vapor deposition (CVD) such as metal organic chemical vapor deposition (MOCVD), or atomic layer deposition (ALD). It can be formed by a layer deposition method or the like.
  • CVD chemical vapor deposition
  • MOCVD metal organic chemical vapor deposition
  • ALD atomic layer deposition
  • Crystal structures of oxide semiconductors include amorphous (including completely amorphous), CAAC (c-axis-aligned crystalline), nc (nanocrystalline), CAC (cloud-aligned composite), single crystal, and polycrystal. (poly crystal) and the like.
  • the crystal structure of the film or substrate can be evaluated using an X-ray diffraction (XRD) spectrum.
  • XRD X-ray diffraction
  • it can be evaluated using an XRD spectrum obtained by GIXD (Grazing-Incidence XRD) measurement.
  • GIXD Gram-Incidence XRD
  • the GIXD method is also called a thin film method or a Seemann-Bohlin method.
  • the shape of the peak of the XRD spectrum is almost bilaterally symmetrical.
  • the peak shape of the XRD spectrum is left-right asymmetric.
  • the asymmetric shape of the peaks in the XRD spectra demonstrates the presence of crystals in the film or substrate. In other words, the film or substrate cannot be said to be in an amorphous state unless the shape of the peaks in the XRD spectrum is symmetrical.
  • the crystal structure of the film or substrate can be evaluated by a diffraction pattern (also referred to as a nano beam electron diffraction pattern) observed by nano beam electron diffraction (NBED).
  • a diffraction pattern also referred to as a nano beam electron diffraction pattern
  • NBED nano beam electron diffraction
  • a halo is observed in the diffraction pattern of a quartz glass substrate, and it can be confirmed that the quartz glass is in an amorphous state.
  • a spot-like pattern is observed instead of a halo. Therefore, it is presumed that the IGZO film deposited at room temperature is neither crystalline nor amorphous, but in an intermediate state and cannot be concluded to be in an amorphous state.
  • oxide semiconductors may be classified differently from the above when their structures are focused. For example, oxide semiconductors are classified into single-crystal oxide semiconductors and non-single-crystal oxide semiconductors. Examples of non-single-crystal oxide semiconductors include the above CAAC-OS and nc-OS. Non-single-crystal oxide semiconductors include polycrystalline oxide semiconductors, amorphous-like oxide semiconductors (a-like OS), amorphous oxide semiconductors, and the like.
  • CAAC-OS is an oxide semiconductor that includes a plurality of crystal regions, and the c-axes of the plurality of crystal regions are oriented in a specific direction. Note that the specific direction is the thickness direction of the CAAC-OS film, the normal direction to the formation surface of the CAAC-OS film, or the normal direction to the surface of the CAAC-OS film.
  • a crystalline region is a region having periodicity in atomic arrangement. If the atomic arrangement is regarded as a lattice arrangement, the crystalline region is also a region with a uniform lattice arrangement.
  • CAAC-OS has a region where a plurality of crystal regions are connected in the a-b plane direction, and the region may have strain.
  • the strain refers to a portion where the orientation of the lattice arrangement changes between a region with a uniform lattice arrangement and another region with a uniform lattice arrangement in a region where a plurality of crystal regions are connected. That is, CAAC-OS is an oxide semiconductor that is c-axis oriented and has no obvious orientation in the ab plane direction.
  • each of the plurality of crystal regions is composed of one or more microcrystals (crystals having a maximum diameter of less than 10 nm).
  • the maximum diameter of the crystalline region is less than 10 nm.
  • the size of the crystal region may be about several tens of nanometers.
  • CAAC-OS contains indium (In) and oxygen.
  • a tendency to have a layered crystal structure also referred to as a layered structure in which a layer (hereinafter referred to as an In layer) and a layer containing the element M, zinc (Zn), and oxygen (hereinafter referred to as a (M, Zn) layer) are stacked.
  • the (M, Zn) layer may contain indium.
  • the In layer contains the element M.
  • the In layer may contain Zn.
  • the layered structure is observed as a lattice image in, for example, a high-resolution TEM (Transmission Electron Microscope) image.
  • a plurality of bright points are observed in the electron beam diffraction pattern of the CAAC-OS film.
  • a certain spot and another spot are observed at point-symmetrical positions with respect to the spot of the incident electron beam that has passed through the sample (also referred to as a direct spot) as the center of symmetry.
  • the lattice arrangement in the crystal region is basically a hexagonal lattice, but the unit cell is not always a regular hexagon and may be a non-regular hexagon. Moreover, the distortion may have a lattice arrangement such as a pentagon or a heptagon.
  • the distortion of the lattice arrangement suppresses the formation of grain boundaries. This is because the CAAC-OS can tolerate strain due to the fact that the arrangement of oxygen atoms is not dense in the ab plane direction, the bond distance between atoms changes due to the substitution of metal atoms, and the like. It is considered to be for
  • a crystal structure in which clear grain boundaries are confirmed is called a polycrystal.
  • a grain boundary becomes a recombination center, traps carriers, and is highly likely to cause a decrease in on-current of a transistor, a decrease in field-effect mobility, and the like. Therefore, a CAAC-OS in which no clear grain boundaries are observed is one of crystalline oxides having a crystal structure suitable for a semiconductor layer of a transistor.
  • a structure containing Zn is preferable for forming a CAAC-OS.
  • In--Zn oxide and In--Ga--Zn oxide are preferable because they can suppress the generation of grain boundaries more than In oxide.
  • CAAC-OS is an oxide semiconductor with high crystallinity and no clear crystal grain boundaries. Therefore, it can be said that the decrease in electron mobility due to grain boundaries is less likely to occur in CAAC-OS.
  • a CAAC-OS can be said to be an oxide semiconductor with few impurities and defects (such as oxygen vacancies). Therefore, an oxide semiconductor including CAAC-OS has stable physical properties. Therefore, an oxide semiconductor including CAAC-OS is resistant to heat and has high reliability.
  • CAAC-OS is also stable against high temperatures (so-called thermal budget) in the manufacturing process. Therefore, the use of the CAAC-OS for the OS transistor makes it possible to increase the degree of freedom in the manufacturing process.
  • nc-OS has periodic atomic arrangement in a minute region (eg, a region of 1 nm to 10 nm, particularly a region of 1 nm to 3 nm).
  • the nc-OS has minute crystals.
  • the size of the minute crystal is, for example, 1 nm or more and 10 nm or less, particularly 1 nm or more and 3 nm or less, the minute crystal is also called a nanocrystal.
  • nc-OS does not show regularity in crystal orientation between different nanocrystals. Therefore, no orientation is observed in the entire film.
  • an nc-OS may be indistinguishable from an a-like OS or an amorphous oxide semiconductor depending on the analysis method.
  • an nc-OS film is subjected to structural analysis using an XRD apparatus, out-of-plane XRD measurement using ⁇ /2 ⁇ scanning does not detect a peak indicating crystallinity.
  • an nc-OS film is subjected to electron beam diffraction (also referred to as selected area electron beam diffraction) using an electron beam with a probe diameter larger than that of nanocrystals (for example, 50 nm or more), a diffraction pattern such as a halo pattern is obtained. is observed.
  • an nc-OS film is subjected to electron diffraction (also referred to as nanobeam electron diffraction) using an electron beam with a probe diameter close to or smaller than the size of a nanocrystal (for example, 1 nm or more and 30 nm or less)
  • an electron beam diffraction pattern is obtained in which a plurality of spots are observed within a ring-shaped area centered on the direct spot.
  • An a-like OS is an oxide semiconductor having a structure between an nc-OS and an amorphous oxide semiconductor.
  • An a-like OS has void or low density regions. That is, the a-like OS has lower crystallinity than the nc-OS and CAAC-OS. In addition, the a-like OS has a higher hydrogen concentration in the film than the nc-OS and the CAAC-OS.
  • CAC-OS relates to material composition.
  • CAC-OS is, for example, one structure of a material in which elements constituting a metal oxide are unevenly distributed with a size of 0.5 nm or more and 10 nm or less, preferably 1 nm or more and 3 nm or less, or in the vicinity thereof.
  • the metal oxide one or more metal elements are unevenly distributed, and the region having the metal element has a size of 0.5 nm or more and 10 nm or less, preferably 1 nm or more and 3 nm or less, or a size in the vicinity thereof.
  • the mixed state is also called mosaic or patch.
  • CAC-OS is a structure in which the material is separated into a first region and a second region to form a mosaic shape, and the first region is distributed in the film (hereinafter, also referred to as a cloud shape). ). That is, CAC-OS is a composite metal oxide in which the first region and the second region are mixed.
  • the atomic ratios of In, Ga, and Zn to the metal elements constituting the CAC-OS in the In--Ga--Zn oxide are denoted by [In], [Ga], and [Zn], respectively.
  • the first region is a region where [In] is larger than [In] in the composition of the CAC-OS film.
  • the second region is a region where [Ga] is greater than [Ga] in the composition of the CAC-OS film.
  • the first region is a region in which [In] is larger than [In] in the second region and [Ga] is smaller than [Ga] in the second region.
  • the second region is a region in which [Ga] is larger than [Ga] in the first region and [In] is smaller than [In] in the first region.
  • the first region is a region whose main component is indium oxide, indium zinc oxide, or the like.
  • the second region is a region containing gallium oxide, gallium zinc oxide, or the like as a main component. That is, the first region can be rephrased as a region containing In as a main component. Also, the second region can be rephrased as a region containing Ga as a main component.
  • a clear boundary between the first region and the second region may not be observed.
  • the CAC-OS in the In—Ga—Zn oxide means a region containing Ga as a main component and a region containing In as a main component in a material structure containing In, Ga, Zn, and O. Each region is a mosaic, and refers to a configuration in which these regions exist randomly. Therefore, CAC-OS is presumed to have a structure in which metal elements are unevenly distributed.
  • the CAC-OS can be formed, for example, by sputtering under the condition that the substrate is not heated.
  • a sputtering method one or more selected from an inert gas (typically argon), an oxygen gas, and a nitrogen gas may be used as a deposition gas. good.
  • an inert gas typically argon
  • oxygen gas typically argon
  • a nitrogen gas may be used as a deposition gas. good.
  • the lower the flow rate ratio of the oxygen gas to the total flow rate of the film formation gas during film formation, the better. is preferably 0% or more and 10% or less.
  • a region containing In as a main component is obtained by EDX mapping obtained using energy dispersive X-ray spectroscopy (EDX). It can be confirmed that the (first region) and the region (second region) containing Ga as the main component are unevenly distributed and have a mixed structure.
  • EDX energy dispersive X-ray spectroscopy
  • the first region is a region with higher conductivity than the second region. That is, when carriers flow through the first region, conductivity as a metal oxide is developed. Therefore, by distributing the first region in the form of a cloud in the metal oxide, a high field effect mobility ( ⁇ ) can be realized.
  • the second region is a region with higher insulation than the first region.
  • the leakage current can be suppressed by distributing the second region in the metal oxide.
  • CAC-OS when used for a transistor, the conductivity caused by the first region and the insulation caused by the second region act in a complementary manner to provide a switching function (turning ON/OFF). functions) can be given to the CAC-OS.
  • a part of the material has a conductive function
  • a part of the material has an insulating function
  • the whole material has a semiconductor function.
  • CAC-OS is most suitable for various semiconductor devices including display devices.
  • Oxide semiconductors have a variety of structures, each with different characteristics.
  • An oxide semiconductor of one embodiment of the present invention includes two or more of an amorphous oxide semiconductor, a polycrystalline oxide semiconductor, an a-like OS, a CAC-OS, an nc-OS, and a CAAC-OS. may
  • an oxide semiconductor with low carrier concentration is preferably used for a transistor.
  • the carrier concentration of the oxide semiconductor is 1 ⁇ 10 17 cm ⁇ 3 or less, preferably 1 ⁇ 10 15 cm ⁇ 3 or less, more preferably 1 ⁇ 10 13 cm ⁇ 3 or less, more preferably 1 ⁇ 10 11 cm ⁇ 3 or less. 3 or less, more preferably less than 1 ⁇ 10 10 cm ⁇ 3 and 1 ⁇ 10 ⁇ 9 cm ⁇ 3 or more.
  • the impurity concentration in the oxide semiconductor film may be lowered to lower the defect level density.
  • a low impurity concentration and a low defect level density are referred to as high-purity intrinsic or substantially high-purity intrinsic.
  • an oxide semiconductor with a low carrier concentration is sometimes referred to as a highly purified intrinsic or substantially highly purified intrinsic oxide semiconductor.
  • the trap level density may also be low.
  • the charge trapped in the trap level of the oxide semiconductor takes a long time to disappear, and may behave as if it were a fixed charge. Therefore, a transistor whose channel formation region is formed in an oxide semiconductor with a high trap level density might have unstable electrical characteristics.
  • Impurities include hydrogen, nitrogen, alkali metals, alkaline earth metals, iron, nickel, silicon, and the like.
  • the concentration of silicon or carbon in the oxide semiconductor and the concentration of silicon or carbon in the vicinity of the interface with the oxide semiconductor are 2. ⁇ 10 18 atoms/cm 3 or less, preferably 2 ⁇ 10 17 atoms/cm 3 or less.
  • the concentration of alkali metal or alkaline earth metal in the oxide semiconductor obtained by SIMS is set to 1 ⁇ 10 18 atoms/cm 3 or less, preferably 2 ⁇ 10 16 atoms/cm 3 or less.
  • the nitrogen concentration in the oxide semiconductor obtained by SIMS is less than 5 ⁇ 10 19 atoms/cm 3 , preferably 5 ⁇ 10 18 atoms/cm 3 or less, more preferably 1 ⁇ 10 18 atoms/cm 3 or less. , more preferably 5 ⁇ 10 17 atoms/cm 3 or less.
  • the oxide semiconductor reacts with oxygen that bonds to a metal atom to form water, which may cause oxygen vacancies.
  • oxygen vacancies When hydrogen enters the oxygen vacancies, electrons, which are carriers, may be generated.
  • part of hydrogen may bond with oxygen that bonds with a metal atom to generate an electron, which is a carrier. Therefore, a transistor including an oxide semiconductor containing hydrogen is likely to have normally-on characteristics. Therefore, hydrogen in the oxide semiconductor is preferably reduced as much as possible.
  • the hydrogen concentration obtained by SIMS is less than 1 ⁇ 10 20 atoms/cm 3 , preferably less than 1 ⁇ 10 19 atoms/cm 3 , more preferably less than 5 ⁇ 10 18 atoms/cm. Less than 3 , more preferably less than 1 ⁇ 10 18 atoms/cm 3 .
  • This embodiment can be implemented by appropriately combining at least part of it with other embodiments described herein.
  • An electronic device of this embodiment includes a display device of one embodiment of the present invention.
  • the display device of one embodiment of the present invention can easily have high definition, high resolution, and large size. Therefore, the display device of one embodiment of the present invention can be used for display portions of various electronic devices.
  • the display device of one embodiment of the present invention can be manufactured at low cost, the manufacturing cost of the electronic device can be reduced.
  • Examples of electronic devices include televisions, desktop or notebook personal computers, computer monitors, digital signage, large game machines such as pachinko machines, and other electronic devices with relatively large screens. Examples include cameras, digital video cameras, digital photo frames, mobile phones, mobile game machines, mobile information terminals, and sound reproducing devices.
  • the display device of one embodiment of the present invention can have high definition, it can be suitably used for an electronic device having a relatively small display portion.
  • electronic devices include wristwatch-type and bracelet-type information terminals (wearable devices), VR devices such as head-mounted displays, and glasses-type AR devices that can be worn on the head. equipment and the like.
  • Wearable devices also include devices for SR and devices for MR.
  • a display device of one embodiment of the present invention includes HD (1280 ⁇ 720 pixels), FHD (1920 ⁇ 1080 pixels), WQHD (2560 ⁇ 1440 pixels), WQXGA (2560 ⁇ 1600 pixels), 4K2K (2560 ⁇ 1600 pixels), 3840 ⁇ 2160) and 8K4K (7680 ⁇ 4320 pixels).
  • the resolution it is preferable to set the resolution to 4K2K, 8K4K, or higher.
  • the pixel density (definition) of the display device of one embodiment of the present invention is preferably 300 ppi or more, more preferably 500 ppi or more, 1000 ppi or more, more preferably 2000 ppi or more, more preferably 3000 ppi or more, and 5000 ppi or more.
  • the electronic device of this embodiment can be incorporated along the inner or outer wall of a house or building, or along the curved surface of the interior or exterior of an automobile.
  • the electronic device of this embodiment may have an antenna.
  • An image, information, or the like can be displayed on the display portion by receiving a signal with the antenna.
  • the antenna may be used for contactless power transmission.
  • the electronic device of this embodiment includes sensors (force, displacement, position, velocity, acceleration, angular velocity, number of revolutions, distance, light, liquid, magnetism, temperature, chemical substance, sound, time, hardness, electric field, current, voltage , power, radiation, flow, humidity, gradient, vibration, odor or infrared sensing, detection or measurement).
  • the electronic device of this embodiment can have various functions. For example, functions to display various information (still images, moving images, text images, etc.) on the display unit, touch panel functions, calendars, functions to display the date or time, functions to execute various software (programs), wireless communication function, a function of reading a program or data recorded on a recording medium, and the like.
  • An electronic device 6500 shown in FIG. 16A is a mobile information terminal that can be used as a smartphone.
  • the electronic device 6500 has a housing 6501, a display unit 6502, a power button 6503, a button 6504, a speaker 6505, a microphone 6506, a camera 6507, a light source 6508, and the like.
  • a display portion 6502 has a touch panel function.
  • the display device of one embodiment of the present invention can be applied to the display portion 6502 .
  • FIG. 16B is a schematic cross-sectional view including the end of the housing 6501 on the microphone 6506 side.
  • a light-transmitting protective member 6510 is provided on the display surface side of the housing 6501, and a display panel 6511, an optical member 6512, a touch sensor panel 6513, and a printer are placed in a space surrounded by the housing 6501 and the protective member 6510.
  • a substrate 6517, a battery 6518, and the like are arranged.
  • a display panel 6511, an optical member 6512, and a touch sensor panel 6513 are fixed to the protective member 6510 with an adhesive layer (not shown).
  • a portion of the display panel 6511 is folded back in a region outside the display portion 6502, and the FPC 6515 is connected to the folded portion.
  • An IC6516 is mounted on the FPC6515.
  • the FPC 6515 is connected to terminals provided on the printed circuit board 6517 .
  • a flexible display (flexible display device) of one embodiment of the present invention can be applied to the display panel 6511 . Therefore, an extremely lightweight electronic device can be realized. In addition, since the display panel 6511 is extremely thin, the thickness of the electronic device can be reduced and the large-capacity battery 6518 can be mounted. In addition, by folding back part of the display panel 6511 and arranging a connection portion with the FPC 6515 on the back side of the pixel portion, an electronic device with a narrow frame can be realized.
  • FIG. 17A An example of a television device is shown in FIG. 17A.
  • a television set 7100 has a display portion 7000 incorporated in a housing 7101 .
  • a configuration in which a housing 7101 is supported by a stand 7103 is shown.
  • the display device of one embodiment of the present invention can be applied to the display portion 7000 .
  • the operation of the television apparatus 7100 shown in FIG. 17A can be performed using operation switches provided on the housing 7101 and a separate remote control operation device 7111 .
  • the display portion 7000 may be provided with a touch sensor, and the television device 7100 may be operated by touching the display portion 7000 with a finger or the like.
  • the remote controller 7111 may have a display section for displaying information output from the remote controller 7111 .
  • a channel and a volume can be operated with operation keys or a touch panel provided in the remote controller 7111 , and an image displayed on the display portion 7000 can be operated.
  • the television device 7100 is configured to include a receiver, a modem, and the like.
  • the receiver can receive general television broadcasts. Also, by connecting to a wired or wireless communication network via a modem, one-way (from the sender to the receiver) or two-way (between the sender and the receiver, or between the receivers, etc.) information communication is performed. is also possible.
  • FIG. 17B shows an example of a notebook personal computer.
  • a notebook personal computer 7200 has a housing 7211, a keyboard 7212, a pointing device 7213, an external connection port 7214, and the like.
  • the display portion 7000 is incorporated in the housing 7211 .
  • the display device of one embodiment of the present invention can be applied to the display portion 7000 .
  • FIGS. 17C and 17D An example of digital signage is shown in FIGS. 17C and 17D.
  • a digital signage 7300 shown in FIG. 17C includes a housing 7301, a display unit 7000, speakers 7303, and the like. Furthermore, it can have an LED lamp, an operation key (including a power switch or an operation switch), connection terminals, various sensors, a microphone, and the like.
  • FIG. 17D shows a digital signage 7400 attached to a cylindrical post 7401.
  • a digital signage 7400 has a display section 7000 provided along the curved surface of a pillar 7401 .
  • the display device of one embodiment of the present invention can be applied to the display portion 7000 in FIGS. 17C and 17D.
  • the wider the display unit 7000 the more information can be provided at once.
  • the wider the display unit 7000 the more conspicuous it is, and the more effective the advertisement can be, for example.
  • a touch panel By applying a touch panel to the display unit 7000, not only can images or moving images be displayed on the display unit 7000, but also the user can intuitively operate the display unit 7000, which is preferable. Further, when used for providing information such as route information or traffic information, usability can be enhanced by intuitive operation.
  • the digital signage 7300 or digital signage 7400 is preferably capable of cooperating with the information terminal 7311 or information terminal 7411 such as a smartphone possessed by the user through wireless communication.
  • advertisement information displayed on the display unit 7000 can be displayed on the screen of the information terminal 7311 or the information terminal 7411 .
  • display on the display portion 7000 can be switched.
  • the digital signage 7300 or the digital signage 7400 can execute a game using the screen of the information terminal 7311 or 7411 as an operation means (controller). This allows an unspecified number of users to simultaneously participate in and enjoy the game.
  • FIG. 18A is a diagram showing the appearance of the camera 8000 with the finder 8100 attached.
  • a camera 8000 has a housing 8001, a display unit 8002, an operation button 8003, a shutter button 8004, and the like.
  • a detachable lens 8006 is attached to the camera 8000 . Note that the camera 8000 may be integrated with the lens 8006 and the housing.
  • the camera 8000 can capture an image by pressing the shutter button 8004 or by touching the display unit 8002 that functions as a touch panel.
  • the housing 8001 has a mount with electrodes, and can be connected to the viewfinder 8100 as well as a strobe device or the like.
  • the viewfinder 8100 has a housing 8101, a display section 8102, buttons 8103, and the like.
  • the housing 8101 is attached to the camera 8000 by mounts that engage the mounts of the camera 8000 .
  • a viewfinder 8100 can display an image or the like received from the camera 8000 on a display portion 8102 .
  • the button 8103 has a function as a power button or the like.
  • the display device of one embodiment of the present invention can be applied to the display portion 8002 of the camera 8000 and the display portion 8102 of the viewfinder 8100 .
  • the camera 8000 having a built-in finder may also be used.
  • FIG. 18B is a diagram showing the appearance of the head mounted display 8200.
  • FIG. 18B is a diagram showing the appearance of the head mounted display 8200.
  • a head-mounted display 8200 has a mounting section 8201, a lens 8202, a main body 8203, a display section 8204, a cable 8205, and the like.
  • a battery 8206 is built in the mounting portion 8201 .
  • a cable 8205 supplies power from a battery 8206 to the main body 8203 .
  • a main body 8203 includes a wireless receiver or the like, and can display received video information on a display portion 8204 .
  • the main body 8203 is equipped with a camera, and information on the movement of the user's eyeballs or eyelids can be used as input means.
  • the mounting section 8201 may be provided with a plurality of electrodes capable of detecting a current flowing along with the movement of the user's eyeballs at a position where it touches the user, and may have a function of recognizing the line of sight. Moreover, it may have a function of monitoring the user's pulse based on the current flowing through the electrode.
  • the mounting unit 8201 may have various sensors such as a temperature sensor, a pressure sensor, an acceleration sensor, etc., and has a function of displaying biological information of the user on the display unit 8204, In addition, a function of changing an image displayed on the display portion 8204 may be provided.
  • the display device of one embodiment of the present invention can be applied to the display portion 8204 .
  • FIG. 18C to 18E are diagrams showing the appearance of the head mounted display 8300.
  • FIG. A head mounted display 8300 includes a housing 8301 , a display portion 8302 , a band-shaped fixture 8304 , and a pair of lenses 8305 .
  • the user can visually recognize the display on the display unit 8302 through the lens 8305 .
  • the display portion 8302 it is preferable to arrange the display portion 8302 in a curved manner because the user can feel a high presence.
  • three-dimensional display or the like using parallax can be performed.
  • the configuration is not limited to the configuration in which one display portion 8302 is provided, and two display portions 8302 may be provided and one display portion may be arranged for one eye of the user.
  • the display device of one embodiment of the present invention can be applied to the display portion 8302 .
  • the display device of one embodiment of the present invention can also achieve extremely high definition. For example, even when the display is magnified using the lens 8305 as shown in FIG. 18E and visually recognized, the pixels are difficult for the user to visually recognize. In other words, the display portion 8302 can be used to allow the user to view highly realistic images.
  • FIG. 18F is a diagram showing the appearance of a goggle-type head-mounted display 8400.
  • the head mounted display 8400 has a pair of housings 8401, a mounting section 8402, and a cushioning member 8403.
  • a display portion 8404 and a lens 8405 are provided in the pair of housings 8401, respectively.
  • the user can visually recognize the display unit 8404 through the lens 8405.
  • the lens 8405 has a focus adjustment mechanism, and its position can be adjusted according to the user's visual acuity.
  • the display portion 8404 is preferably square or horizontally long rectangular. This makes it possible to enhance the sense of reality.
  • the mounting part 8402 preferably has plasticity and elasticity so that it can be adjusted according to the size of the user's face and does not slip off.
  • a part of the mounting portion 8402 preferably has a vibration mechanism that functions as a bone conduction earphone. As a result, you can enjoy video and audio without the need for separate audio equipment such as earphones and speakers.
  • the housing 8401 may have a function of outputting audio data by wireless communication.
  • the mounting part 8402 and the cushioning member 8403 are parts that come into contact with the user's face (forehead, cheeks, etc.). Since the cushioning member 8403 is in close contact with the user's face, it is possible to prevent light leakage and enhance the sense of immersion. It is preferable to use a soft material for the cushioning member 8403 so that the cushioning member 8403 is in close contact with the user's face when the head mounted display 8400 is worn by the user. For example, materials such as rubber, silicone rubber, urethane, and sponge can be used.
  • a member that touches the user's skin is preferably detachable for easy cleaning or replacement.
  • the electronic device shown in FIGS. 19A to 19F includes a housing 9000, a display unit 9001, a speaker 9003, operation keys 9005 (including a power switch or an operation switch), connection terminals 9006, sensors 9007 (force, displacement, position, speed). , acceleration, angular velocity, number of rotations, distance, light, liquid, magnetism, temperature, chemical substances, sound, time, hardness, electric field, current, voltage, power, radiation, flow rate, humidity, gradient, vibration, smell, or infrared rays , detection or measurement), a microphone 9008, and the like.
  • the electronic devices shown in FIGS. 19A to 19F have various functions. For example, a function to display various information (still images, moving images, text images, etc.) on the display unit, a touch panel function, a calendar, a function to display the date or time, a function to control processing by various software (programs), It can have a wireless communication function, a function of reading and processing programs or data recorded on a recording medium, and the like. Note that the functions of the electronic device are not limited to these, and can have various functions.
  • the electronic device may have a plurality of display units.
  • the electronic device is equipped with a camera, etc., and has the function of capturing still images or moving images and storing them in a recording medium (external or built into the camera), or the function of displaying the captured image on the display unit, etc. good.
  • the display device of one embodiment of the present invention can be applied to the display portion 9001 .
  • FIGS. 19A to 19F Details of the electronic devices shown in FIGS. 19A to 19F will be described below.
  • FIG. 19A is a perspective view showing a mobile information terminal 9101.
  • the mobile information terminal 9101 can be used as a smart phone, for example.
  • the portable information terminal 9101 may be provided with a speaker 9003, a connection terminal 9006, a sensor 9007, and the like.
  • the mobile information terminal 9101 can display text and image information on its multiple surfaces.
  • FIG. 19A shows an example in which three icons 9050 are displayed.
  • Information 9051 indicated by a dashed rectangle can also be displayed on another surface of the display portion 9001 . Examples of the information 9051 include notification of incoming e-mail, SNS, telephone, etc., title of e-mail, SNS, etc., sender name, date and time, remaining battery power, strength of antenna reception, and the like.
  • an icon 9050 or the like may be displayed at the position where the information 9051 is displayed.
  • FIG. 19B is a perspective view showing the mobile information terminal 9102.
  • the portable information terminal 9102 has a function of displaying information on three or more sides of the display portion 9001 .
  • information 9052, information 9053, and information 9054 are displayed on different surfaces.
  • the user can confirm the information 9053 displayed at a position where the mobile information terminal 9102 can be viewed from above the mobile information terminal 9102 while the mobile information terminal 9102 is stored in the chest pocket of the clothes.
  • the user can check the display without taking out the portable information terminal 9102 from the pocket, and can determine, for example, whether to receive a call.
  • FIG. 19C is a perspective view showing a wristwatch-type mobile information terminal 9200.
  • the mobile information terminal 9200 can be used as a smart watch (registered trademark), for example.
  • the display portion 9001 has a curved display surface, and display can be performed along the curved display surface.
  • Hands-free communication is also possible by allowing the mobile information terminal 9200 to communicate with, for example, a headset capable of wireless communication.
  • the portable information terminal 9200 can transmit data to and from another information terminal through the connection terminal 9006, and can be charged. Note that the charging operation may be performed by wireless power supply.
  • FIG. 19D to 19F are perspective views showing a foldable personal digital assistant 9201.
  • FIG. 19D is a state in which the mobile information terminal 9201 is unfolded
  • FIG. 19F is a state in which it is folded
  • FIG. 19E is a perspective view in the middle of changing from one of FIGS. 19D and 19F to the other.
  • the portable information terminal 9201 has excellent portability in the folded state, and has excellent display visibility due to a seamless wide display area in the unfolded state.
  • a display portion 9001 included in the portable information terminal 9201 is supported by three housings 9000 connected by hinges 9055 .
  • the display portion 9001 can be bent with a curvature radius of 0.1 mm or more and 150 mm or less.
  • This embodiment can be implemented by appropriately combining at least part of it with other embodiments described herein.
  • films with different materials and structures were formed on a glass substrate, and the results of a heat resistance test performed on the obtained samples (films) are shown.
  • Nine types of samples were prepared by changing the combination of multiple heteroaromatic compounds and changing the film structure. The structure of each sample is shown in Table 1 below together with the results. Chemical formulas of materials used in this example are shown below.
  • a sample layer was formed on a glass substrate using a vacuum deposition apparatus, and cut into strips of 1 cm ⁇ 3 cm.
  • the substrate was introduced into a bell jar type heater (Bell jar type vacuum oven BV-001 manufactured by Shibata Kagaku Co., Ltd.), the pressure was reduced to about 10 hPa, and the substrate was baked at a set temperature in the range of 80° C. to 150° C. for 1 hour. .
  • Sample 1 is a single-layer film using one type of heteroaromatic compound, and 2,9-di(2-naphthyl)-4,7-diphenyl-1,10-phenanthroline (abbreviation: NBPhen) was deposited on a glass substrate. ) was vapor-deposited to a film thickness of 10 nm.
  • NBPhen 2,9-di(2-naphthyl)-4,7-diphenyl-1,10-phenanthroline
  • Sample 2 is a single layer film using one type of heteroaromatic compound, and 2-[4'-(9-phenyl-9H-carbazol-3-yl)-3,1'-biphenyl -1-yl]dibenzo[f,h]quinoxaline (abbreviation: 2mpPCBPDBq) was evaporated to a thickness of 10 nm.
  • Sample 3 is a mixed film using a plurality of heteroaromatic compounds.
  • 9H-carbazol-3-yl)phenyl]-9,9-dimethyl-9H-fluoren-2-amine abbreviation: PCBBiF
  • PCBBiF 9H-carbazol-3-yl)phenyl]-9,9-dimethyl-9H-fluoren-2-amine
  • Ir(tBuppm) 3 tris(4-t-butyl-6-phenylpyrimidinato)iridium
  • Sample 4 is a laminated film using a plurality of heteroaromatic compounds, and was formed by vapor-depositing 2mp PCBPDBq to 10 nm on a glass substrate and then vapor-depositing NBPhen to 10 nm.
  • Sample 6 is a single-layer film using one type of heteroaromatic compound, and was formed by vapor-depositing PCBBiF on a glass substrate so as to have a film thickness of 40 nm.
  • FIGS. 20 and 21 Photographs of the sample produced in this example (observed at 100-fold magnification) are shown in FIGS. 20 and 21.
  • FIG. As a comparative example, no bake (ref) of each sample is also shown.
  • Table 1 shows the structure of the samples produced in this example and the observation results thereof.
  • circles indicate that crystals were not formed, and crosses indicate that crystals were formed.
  • triangular marks were given to those that could not be determined clearly.
  • Sample 4 and Sample 7 although the same heteroaromatic compound was used, Sample 4, which is a laminated film, crystallized at 100°C, while Sample 7, which is a mixed film, crystallized up to 150°C. did not happen. From this, it was found that a mixed film using a plurality of ⁇ -electron-deficient heteroaromatic compounds is particularly effective in improving heat resistance.
  • Example 1 From the results of Example 1, the heteroaromatic compound and the organic compound used in the electron-transporting layer of the light-emitting device which is one embodiment of the present invention were formed into a mixed film, and these single-layer films were laminated. Since it was found that the heat resistance is improved compared to the laminated film, the light-emitting device 1 using the mixed film of the heteroaromatic compound and the organic compound as the electron transport layer and the laminated film of the heteroaromatic compound and the organic compound were used. Comparative light-emitting devices 1 used were fabricated, and the characteristics of each device were compared. The element structure and its characteristics are described below. Table 1 shows specific configurations of the light-emitting device 1 and the comparative light-emitting device 1 used in this example. Chemical formulas of materials used in this example are shown below.
  • a hole-injection layer 911, a hole-transport layer 912, a light-emitting layer 913, and an electron-transport layer 914 are formed on a first electrode 901 formed on a substrate 900 as shown in FIG. and an electron-injection layer 915 are sequentially stacked, and a second electrode 903 is stacked over the electron-injection layer 915 .
  • a first electrode 901 was formed over a substrate 900 .
  • the electrode area was 4 mm 2 (2 mm ⁇ 2 mm).
  • a glass substrate was used as the substrate 900 .
  • the first electrode 901 was formed by sputtering indium tin oxide containing silicon oxide (ITSO) to a thickness of 70 nm.
  • ITSO indium tin oxide containing silicon oxide
  • the surface of the substrate was washed with water, baked at 200° C. for 1 hour, and then subjected to UV ozone treatment for 370 seconds. After that, the substrate was introduced into a vacuum deposition apparatus whose interior was evacuated to about 10 ⁇ 4 Pa, vacuum baked at 170° C. for 60 minutes in a heating chamber in the vacuum deposition apparatus, and then exposed to heat for about 30 minutes. chilled.
  • a hole-injection layer 911 was formed over the first electrode 901 .
  • PCBBiF N-(1,1′-biphenyl-4-yl)-N-[4 -(9-Phenyl-9H-carbazol-3-yl)phenyl]-9,9-dimethyl-9H-fluoren-2
  • a hole-transport layer 912 was formed over the hole-injection layer 911 .
  • the hole transport layer 912 was formed by vapor deposition of 50 nm using PCBBiF.
  • a light-emitting layer 913 was formed over the hole-transport layer 912 .
  • the electron-transporting layer 914 was formed over the light-emitting layer 913 .
  • the electron injection layer 915 was formed over the electron transport layer 914 .
  • the electron injection layer 915 was formed by vapor deposition using lithium fluoride (LiF) to a thickness of 1 nm.
  • a second electrode 903 was formed over the electron injection layer 915 .
  • the second electrode 903 was formed by vapor deposition of aluminum so as to have a thickness of 200 nm. Note that the second electrode 903 functions as a cathode in this embodiment.
  • the light-emitting device 1 having the EL layer sandwiched between the pair of electrodes was formed on the substrate 900 .
  • the hole-injection layer 911, the hole-transport layer 912, the light-emitting layer 913, the electron-transport layer 914, and the electron-injection layer 915 described in the above steps are functional layers forming the EL layer in one embodiment of the present invention.
  • a vapor deposition method using a resistance heating method was used in all cases.
  • the fabricated light-emitting device 1 was sealed in a glove box in a nitrogen atmosphere so as not to be exposed to the atmosphere (a sealant was applied around the device, and UV treatment and heat treatment at 80° C. for 1 hour were performed at the time of sealing).
  • Comparative light-emitting device 1 is fabricated in the same manner as light-emitting device 1 by vapor-depositing 2mpPCBPDBq to a thickness of 10 nm and then evaporating NBPhen to a thickness of 20 nm instead of co-evaporating 2mpPCBPDBq and NBPhen as the electron transport layer 914 . did.
  • the luminance-current density characteristics of the light-emitting device 1 and the comparative light-emitting device 1 are shown in FIG. 23, the current efficiency-luminance characteristics are shown in FIG. 24, the luminance-voltage characteristics are shown in FIG. 25, and the current-voltage characteristics are shown in FIG. - Luminance characteristics are shown in FIG. 27, and emission spectra are shown in FIG. 28, respectively.
  • Table 3 shows the main characteristics of light-emitting device 1 and comparative light-emitting device 1 near 1000 cd/m 2 .
  • a spectroradiometer (SR-UL1R, manufactured by Topcon Corporation) was used to measure luminance, CIE chromaticity, and emission spectrum at room temperature.
  • FIG. 29 shows the results of the reliability test of Light-Emitting Device 1 and Comparative Light-Emitting Device 1.
  • FIG. 29 shows the results of the reliability test of Light-Emitting Device 1 and Comparative Light-Emitting Device 1.
  • the vertical axis indicates the normalized luminance (%) when the initial luminance is 100%, and the horizontal axis indicates the drive time (h) of the device.
  • each light-emitting device was subjected to a driving test at a constant current density of 50 mA/cm 2 .
  • FIG. 29 The results shown in FIG. 29 indicate that light-emitting device 1, which is one embodiment of the present invention, has high reliability equivalent to that of comparative light-emitting device 1.
  • the obtained solid was purified by sublimation by the train sublimation method. Sublimation purification was performed by heating 1.3 g of the obtained solid at 340° C. for 15 hours. The pressure during sublimation purification was 3.9 Pa, and the argon flow rate was 15 sccm. After purification by sublimation, 1.5 g of the desired solid was obtained with a recovery rate of 85%.

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