WO2022165937A1 - 一种电信号直接读出的光学传感装置及其制备方法 - Google Patents
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- electrochemical sensors have the advantages of fast detection speed, high sensitivity, strong selectivity and electrical signal readout, due to the need to modify the sensing elements (such as enzymes) with specific recognition properties on the electrodes, in vivo and real-time detection of biomolecules , label-free detection of biological/chemical substances, etc. face great challenges.
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Abstract
Description
Claims (10)
- 一种电信号直接读出的光学传感装置,其特征在于包括:激发光源、传感芯片、流通池、对电极;传感芯片设置于流通池中,其中传感芯片包括:金属基底层,以及依次设置于金属基底层上的半导体薄膜层、周期性金属纳米结构阵列层;流通池用于盛放待测物,流通池上设置有待测物输入管道、待测物排出管道、透明窗口;所述金属基底层上设置传感芯片引线端;所述对电极设置于透明窗口与传感芯片之间,且对电极上设置有对电极引线端;传感芯片引线端和对电极引线端之间接入数字源表或电流表;激发光源发出的光入射至透明窗口。
- 根据权利要求1所述的一种电信号直接读出的光学传感装置,其特征在于:周期性金属纳米结构阵列层与半导体薄膜层形成肖特基接触,对应的势垒高度小于等离子体共振波长对应光子能量。
- 根据权利要求1所述的一种电信号直接读出的光学传感装置,其特征在于:周期性金属纳米结构阵列层的周期为300~2000nm、宽度为周期的20%~90%。
- 根据权利要求1所述的一种电信号直接读出的光学传感装置,其特征在于:周期性金属纳米结构阵列层材质为金、银、钯、过渡金属氮化物的一种。
- 根据权利要求1所述的一种电信号直接读出的光学传感装置,其特征在于:半导体薄膜层为n型半导体,材质为氧化钛、氧化锌、氧化锡、氧化镁、氟化锂中的一种。
- 根据权利要求1所述的一种电信号直接读出的光学传感装置,其特征在于:半导体薄膜层为p型半导体,材质为氧化镍、氧化钼、氧化钒中的一种。
- 根据权利要求1所述的一种电信号直接读出的光学传感装置,其特征在于:金属基底层包括:抛光的金属基片,沉积的金属薄膜。
- 根据权利要求1所述的一种电信号直接读出的光学传感装置,其特征在于,金属基底层的材质的选择依据为:金属基底层与半导体薄膜层形成的接触势垒最小。
- 根据权利要求1所述的一种电信号直接读出的光学传感装置,其特征在于,对电极为铂丝电极。
- 一种电信号直接读出的光学传感装置的制备方法,其特征在于:1)在金属基底层上沉积半导体薄膜层;2)在半导体薄膜层通过光刻工艺得到周期性纳米结构图案化的光刻胶;3)在图案化光刻胶上沉积金属薄膜,通过剥离工艺得到光刻胶图案的反结构,即周期性金属纳米结构阵列层;4)在金属基底层上焊接传感芯片引线端,得到由周期性金属纳米结构阵列层、半导体 薄膜层和金属基底层组成的传感芯片;5)制作流通池,并在其正面中央设置一个透明窗口,使得窗口面积大于所采用激发光源光斑面积;6)将传感芯片置入流通池,并使得周期性金属纳米结构阵列层处于透明窗口的正下方;7)在流通池内部、传感芯片的上方放置一个对电极,并在对电极上设置对电极引线端;8)在流通池透明窗口的边缘,设置两个对立的圆孔,分别焊接上细管,用作待测物质输入管道与待测物排出管道;9)在传感芯片引线端和对电极引线端之间接入数字源表或电流表;10)设置激发光源,将光斑耦合或直接照射至流通池的透明窗口。
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CN104020207A (zh) * | 2014-06-24 | 2014-09-03 | 上海大学 | 薄膜芯片气体传感器及其制备方法 |
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