WO2022160866A1 - 一种显微装置及显微装置的调焦方法 - Google Patents

一种显微装置及显微装置的调焦方法 Download PDF

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Publication number
WO2022160866A1
WO2022160866A1 PCT/CN2021/130342 CN2021130342W WO2022160866A1 WO 2022160866 A1 WO2022160866 A1 WO 2022160866A1 CN 2021130342 W CN2021130342 W CN 2021130342W WO 2022160866 A1 WO2022160866 A1 WO 2022160866A1
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WIPO (PCT)
Prior art keywords
distance
microscope objective
transparent carrier
objective lens
stage
Prior art date
Application number
PCT/CN2021/130342
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English (en)
French (fr)
Inventor
张晓佳
罗浦文
Original Assignee
上海睿钰生物科技有限公司
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Application filed by 上海睿钰生物科技有限公司 filed Critical 上海睿钰生物科技有限公司
Publication of WO2022160866A1 publication Critical patent/WO2022160866A1/zh
Priority to US18/361,809 priority Critical patent/US20230367112A1/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/34—Microscope slides, e.g. mounting specimens on microscope slides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/18—Arrangements with more than one light path, e.g. for comparing two specimens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/241—Devices for focusing
    • G02B21/245—Devices for focusing using auxiliary sources, detectors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/26—Stages; Adjusting means therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/361—Optical details, e.g. image relay to the camera or image sensor

Definitions

  • the embodiments of the present application relate to the field of microscope technology, for example, to a microscope device and a focusing method of the microscope device.
  • a microscope is an optical instrument composed of a lens or a combination of several lenses.
  • the microscope is mainly set up to magnify tiny objects so that the human eye can see them.
  • the microscope is more and more widely used in scientific research, industry and other fields.
  • traditional microscopes cannot automatically, quickly and accurately determine the focal plane. After positioning, manually adjust the focus slowly, and there is a problem of low operation efficiency.
  • the embodiments of the present application provide a microscope device and a focus adjustment method for the microscope device, which can quickly and accurately determine the focal plane of a microscope objective lens, thereby improving the efficiency of observation operations.
  • the embodiments of the present application provide a microscope device, including:
  • the stage is configured to carry a transparent carrier, the transparent carrier includes at least two bearing positions, and the stage is further configured to drive the transparent carrier to translate in at least one direction;
  • a microscope objective lens located on one side of the stage
  • a ranging module is located on the same side of the stage as the microscope objective, the ranging module and the microscope objective are located at the same height relative to the stage, and the ranging module is set to measure The distance between the surface of each of the bearing positions and the microscope objective lens;
  • a focusing module, the ranging module and the microscope objective lens are both connected to the focusing module, and the focusing module is set to adjust the display along a first direction according to the distance measured by the ranging module the position of the micro-objective;
  • the first direction is perpendicular to the bearing surface of the stage.
  • an embodiment of the present application provides a focusing method of a microscopic device, which is performed by the above-mentioned microscopic device, the transparent carrier includes at least two bearing positions, and the focusing method of the microscopic device includes:
  • the stage drives the transparent carrier to translate, and the ranging module sequentially measures the distance between the surface of each bearing position of the transparent carrier and the microscope objective lens;
  • the focusing module adjusts the position of the microscope objective lens along the first direction according to the distance measured by the ranging module;
  • the first direction is perpendicular to the bearing surface of the stage.
  • FIG. 1 is a schematic structural diagram of a microscopic device provided in an embodiment of the present application.
  • FIG. 2 is a schematic structural diagram of a transparent carrier provided in an embodiment of the present application.
  • FIG. 3 is a schematic structural diagram of another microscopic device provided in an embodiment of the present application.
  • FIG. 4 is a schematic diagram of the ranging principle of the microscopic device provided in FIG. 1;
  • Fig. 5 is the data diagram of the vertical distance of the first surface of the transparent carrier provided in Fig. 2 and the microscope objective lens with a plurality of bearing positions;
  • Fig. 6 is the result diagram of the vertical distance data of the first surface of the transparent carrier provided in Fig. 5 and the microscope objective lens with a plurality of bearing positions;
  • FIG. 7 is a flowchart of a focusing method of a microscope device provided by an embodiment of the present application.
  • FIG. 8 is a schematic diagram illustrating the relationship between at least two distance values and time provided by an embodiment of the present application.
  • FIG. 1 is a schematic structural diagram of a microscope device provided in an embodiment of the present application.
  • the microscope device includes: a stage 100 , the stage 100 is configured to carry a transparent carrier 20 , and the transparent carrier 20 includes at least two bearing positions (three different positions are exemplarily shown in FIG.
  • the stage 100 is also set to drive the transparent carrier 20 to translate in at least one direction;
  • the microscope objective lens 200 is located on one side of the stage 100;
  • the ranging module 300 is connected with the microscope objective lens 200 Located on the same side of the stage 100, the ranging module 300 and the microscope objective lens 200 are located at the same height relative to the stage 100, and the ranging module 300 is set to measure the distance between the surface of each bearing position and the microscope objective lens 200;
  • the focusing module 400, the ranging module 300 and the microscope objective lens 200 are all connected to the focusing module 400, and the focusing module 400 is set to adjust the position of the microscope objective lens 200 along the first direction according to the distance measured by the ranging module 300; wherein , the first direction ZZ′ is perpendicular to the bearing surface of the stage 100 .
  • the “distance” mentioned in this application refers to the “vertical distance” unless it is clearly indicated as “horizontal distance”.
  • the surface of each bearing position measured by the distance measuring module 300 is The distance of the microscope objective lens 200 is the vertical distance between the surface of each bearing position and the microscope objective lens 200 .
  • the transparent carrier 20 can be any solid transparent material that can carry the object to be measured and allow light to pass through, such as transparent glass.
  • the height of the bearing position may be different due to the manufacturing process and other reasons, and there may be many The heights of the bearing bits are different.
  • FIG. 1 when carrying out microscopic observation on the object to be measured placed on the bearing positions (A1, A2 and A3) of different heights of the transparent carrier 20, it is necessary to manually adjust the position of the microscope objective lens 200 every time, so that the microscope objective lens The focal plane of 200 coincides with the upper surface of the bearing position being observed, so that a clear image of the object to be measured can be observed. Therefore, the position of the microscope objective 200 cannot be quickly and accurately determined, and the operation efficiency is low.
  • a ranging module 300 and a focusing module 400 are arranged on the side of the stage 100 away from the transparent carrier 20 and on the same side as the microscope objective lens 200 .
  • the ranging module 300 and the microscope objective 200 are at the same height relative to the stage 100 ; the focusing module 400 is electrically connected to the ranging module 300 , and the focusing module 400 is also connected to the microscope objective 200 .
  • the stage 100 is configured to carry the transparent carrier 20, and drives the transparent carrier 20 to move in different directions on the bearing surface of the stage 100, so that the different bearing positions (A1, A2 and A3) of the transparent carrier 20 are sequentially moved to the measurement position.
  • the measurement position is located on the stage 100 and the central axis of the measurement position coincides with the optical axis of the distance measuring module 300; vertical distance; then move the multiple bearing positions of the transparent carrier 20 to the observation position in turn, the observation position is located on the stage 100 and the central axis of the observation position coincides with the optical axis of the microscope objective lens 200; the focusing module 400 is based on the distance measurement
  • the different vertical distances between the different bearing positions (A1, A2 and A3) measured by the module 300 and the microscope objective lens 200 adjust the position of the microscope objective lens 200 along the first direction ZZ' perpendicular to the bearing surface, so that the microscope objective lens 200
  • the focal plane coincides with the upper surface of the bearing position being observed, so that a clear microscopic image of the object to be tested can be observed.
  • the working process of the microscope device is as follows: the stage 100 first moves the bearing position A1 of the transparent carrier 20 to the measurement position, and the measurement position is located on the stage 100 and The central axis of the measurement position coincides with the optical axis of the distance measuring module 300, and the distance measuring module 300 measures the vertical distance L1 between the bearing position A1 and the microscope objective lens 200, and records and saves it; A2 moves to the measurement position, the ranging module 300 measures the vertical distance L2 between the bearing position A2 and the microscope objective lens 200, and records and saves it; similarly, the ranging module 300 records and saves the vertical distance L3 between the bearing position A3 and the microscope objective lens 200; Record the three data of L1, L2 and L3 into a table.
  • the bearing position A1 of the transparent carrier 20 is moved to the observation position, the observation position is located on the stage 100 and the central axis of the observation position is in line with the microscopic
  • the optical axes of the objective lens 200 are coincident, and the microscope objective lens 200 is adjusted to the best position, so as to observe a clear image of the object to be measured on the bearing position A1; in the process of moving the bearing position A2 to the observation position, the focusing module 400 According to the distance difference between L1 and L2, the microscope objective lens 200 is controlled to move to the best position along ZZ'.
  • the focusing module 400 completes the focusing adjustment, and it is possible to directly observe the light on the bearing position A2.
  • a clear image of the object to be measured similarly, in the process of moving the bearing position A3 to the observation position, the focusing module 400 controls the microscope objective lens 200 to move to the best position along ZZ' according to the distance difference between L2 and L3, that is, in the When the stage 100 moves the bearing position of the transparent carrier 20, the focusing process can be automatically completed. It can be understood that, when the heights of two adjacent bearing positions are the same, the focusing module 400 does not need to adjust the position of the microscope objective lens 200 .
  • the technical solutions provided in the embodiments of the present application can quickly and accurately determine the focal plane of the microscope objective lens for transparent carriers of different thicknesses, thereby improving the operation efficiency.
  • the distance between the surface of the bearing position and the microscope objective lens (such as L1, L2 and L3) can be driven by the stage to translate the transparent carrier so that each bearing position of the transparent carrier moves to the measurement position in turn and stops, so that the Make the distance measuring module measure the distance between the surface of each bearing position and the microscope objective lens in turn.
  • the transparent carrier it is also possible to drive the transparent carrier to translate through the stage, so that each bearing position of the transparent carrier passes through the measurement position in turn; for each bearing position, the ranging module sequentially measures at least two positions on the surface of the bearing position to the microscopic position. The distance value of the objective lens is obtained, at least two distance values are obtained, and the distance from the surface of the bearing position to the microscope objective lens is determined based on the at least two distance values.
  • the optical axis of the ranging module 300 and the optical axis of the display objective lens 200 are parallel to each other.
  • the optical axis of the ranging module 300 and the light of the display objective lens 200 The axes are coincident, the transparent carrier 20 is on the bearing surface of the stage 100, and the deviation for all bearing positions at the same collinear point is the same. By calculating the deviation between multiple bearing positions, the microscope device can be installed. and other errors are directly ignored.
  • FIG. 2 is a schematic structural diagram of a transparent carrier provided by an embodiment of the present application.
  • the transparent carrier 20 may include a plurality of bearing positions (A1, A2, A3... B1, B2, B3...) arranged in an array; the stage 100 is configured to drive the transparent carrier 20 Translate along the second direction XX' or the third direction YY'; the second direction XX' is parallel to the row direction of the array and the third direction YY' is parallel to the column direction of the array.
  • the transparent carrier 20 can be a transparent object with a plurality of bearing positions arranged in an array, and the plurality of bearing positions can have different heights.
  • the stage 100 can drive the transparent carrier 20 on the bearing surface along the second direction XX′ or the third direction. YY′ moves, so that the distance measuring module 300 can measure the vertical distances from the upper surfaces of all the bearing positions to the microscope objective lens 200 .
  • the stage 100 drives the transparent carrier 20 to move sequentially in an arcuate shape according to the rows formed by the bearing positions, so that the centers of the bearing positions coincide with the centers of the measurement positions in turn, so that the distance measuring module 300 measures the distance of the transparent carrier in sequence. The distance between the upper surface of each bearing position and the microscope objective lens 200 .
  • the transparent carrier 20 may include 96 bearing positions, and the bearing positions are arranged in 8 rows (A, B, C, D, E, F, G, H) and 12 columns (1, 2, 3 , 4, 5, 6, 7, 8, 9, 10, 11, 12) array arrangement.
  • the microscope device provided in the embodiment of the present application can be applied to the situation where the microscope objective lens, the ranging module and the focusing module are on the side of the stage away from the transparent carrier, and can also be applied to the microscope objective lens, the measuring module and the focusing module.
  • the microscope objective lens may be above or below the transparent carrier.
  • the transparent carrier 20 may include a first surface 201 and a second surface 202 , the object to be measured (not shown in FIG. 1 ) is in contact with the first surface 201 , and the stage 100 is in contact with the second surface 202 contact; the microscope objective 200 , the ranging module 300 and the focusing module 400 are located on the side of the stage 100 away from the transparent carrier 20 , that is, the microscope objective 200 , the ranging module 300 and the focusing module 400 are located below the transparent carrier 20 .
  • the ranging module 300 When the ranging module 300 is located below the transparent carrier 20, the ranging module 300 illuminates the transparent carrier 20 from below the transparent carrier 20, the light intensity reaching the first surface 201 of the transparent carrier is weaker, and the light intensity reaching the second surface 202 is relatively high Therefore, the first distance between the second surface 202 and the microscope objective lens 200 can be measured first, and then the first distance and the thickness of the bearing position can be superimposed to obtain the vertical distance between the first surface 201 and the microscope objective lens 200 . Of course, if the light intensity reaching the first surface 201 of the transparent carrier is strong, the vertical distance between the first surface 201 and the microscope objective lens 200 can also be directly measured.
  • the thickness of each bearing position of the transparent carrier 20 can be obtained first, that is, the distance difference between the first surface 201 and the second surface 202 of each bearing position, and the thickness of each bearing position of the transparent carrier 20 can be
  • the parameter data of the transparent carrier 20 can be obtained from the manufacturer, and can also be measured by using the microscope device provided in the embodiment of the present application.
  • the working process of the microscope is as follows: the stage 100 first moves the bearing position A1 of the transparent carrier 20 to the measurement position, and the ranging module 300 measures the bearing position A1. The first distance between the second surface 202 and the microscope objective lens 200, and obtain the vertical distance L1 between the first surface 201 of the bearing position A1 and the microscope objective lens 200 according to this first distance and the thickness of the bearing position, and record and save; The stage 100 then moves the bearing position A2 of the transparent carrier 20 to the measurement position, and the distance measuring module 300 measures another first distance between the second surface 202 of the bearing position A2 and the microscope objective lens 200 and calculates the distance according to the first distance and the The thickness of the bearing position obtains the vertical distance L2 between the first surface 201 of the bearing position A2 and the microscope objective lens 200, and records and saves it; similarly, the distance measuring module 300 records and saves the distance between the first surface 201 of the bearing position A3 and the microscope objective lens 200.
  • the focusing module 400 completes the focus adjustment, and a clear image of the object to be measured on the bearing position A2 can be directly observed.
  • the bearing position A3 moves to the observation position
  • the bearing position A2 can be used as the reference bearing position
  • the focusing module 400 can control the microscope objective lens 200 to move to the best position along ZZ' according to the distance difference between L2 and L3, or the bearing position A1 can be used as the reference bearing position.
  • focusing is performed according to the distance difference between L1 and L3, that is, the focusing process can be automatically completed during the process of moving the stage 100 to the bearing position of the transparent carrier 20 . It can be understood that, when the heights of two adjacent bearing positions are the same, the focusing module 400 does not need to adjust the position of the microscope objective lens 200 .
  • FIG. 3 is a schematic structural diagram of another microscopic device provided in an embodiment of the present application.
  • the transparent carrier 20 includes a first surface 201 and a second surface 202 , the object to be measured (not shown in FIG. 3 ) is in contact with the first surface 201 , and the stage 100 is in contact with the second surface 202 Contact; the microscope objective 200 , the ranging module 300 and the focusing module 400 are located on the side of the transparent carrier 20 away from the stage 100 , that is, the microscope objective 200 , the ranging module 300 and the focusing module 400 are located above the transparent carrier 20 .
  • the ranging module 300 When the ranging module 300 is located above the transparent carrier 20, the ranging module 300 illuminates the transparent carrier 20 from above the transparent carrier 20, and the light intensity reaching the first surface 201 of the transparent carrier is relatively strong, and the first surface 201 and the first surface 201 can be directly measured. For the vertical distance of the microscope objective lens 200, it is not necessary to obtain the thickness values of the more than 20 bearing positions of the transparent carrier in advance.
  • the working process of the microscope is as follows: the stage 100 first moves the bearing position A1 of the transparent carrier 20 to the measurement position, and the ranging module 300 measures the bearing position A1. The vertical distance L1 between the first surface 201 and the microscope objective lens 200 is recorded and saved; the stage 100 then moves the bearing position A2 of the transparent carrier 20 to the measurement position, and the distance measuring module 300 measures the first surface of the bearing position A2 201 and the vertical distance L2 of the microscope objective lens 200, and record and save; similarly, the ranging module 300 records and saves the vertical distance L3 between the first surface 201 of the bearing position A3 and the microscope objective lens 200; the three data L1, L2 and L3 record in a table.
  • the bearing position A1 of the transparent carrier 20 is moved to the observation position, and the microscope objective lens 200 is adjusted to the optimum position, so that the bearing position A1 can be observed.
  • the clear image of the object to be measured on the camera in the process of moving the bearing position A2 to the observation position, with the bearing position A1 as the reference bearing position, the focusing module 400 controls the microscope objective lens 200 along the distance according to the distance difference between L1 and L2. ZZ' moves to the best position.
  • the focusing module 400 completes the focus adjustment, and a clear image of the object to be measured on the bearing position A2 can be directly observed.
  • the bearing position A3 moves to the observation position In the process of observing the position, the bearing position A2 can be used as the reference bearing position, and the focusing module 400 can control the microscope objective lens 200 to move to the best position along ZZ' according to the distance difference between L2 and L3, or the bearing position A1 can be used as the reference bearing position.
  • focusing is performed according to the distance difference between L1 and L3, that is, the focusing process can be automatically completed during the process of moving the stage 100 to the bearing position of the transparent carrier 20 . It can be understood that, when the heights of two adjacent bearing positions are the same, the focusing module 400 does not need to adjust the position of the microscope objective lens 200 .
  • FIG. 4 is a schematic diagram of the ranging principle of the microscopic device provided in FIG. 1 .
  • the distance measuring module 300 measures the distance between the surface of each bearing position and the microscope objective lens 200 by using the principle of laser triangulation.
  • the bearing position and the distance measuring module 300 share the same optical axis.
  • the ranging principle of the microscopic device provided in the embodiment of the present application is the triangulation ranging principle, and a direct laser triangulation ranging method or an oblique laser triangulation ranging method can be adopted.
  • the oblique laser triangulation method is exemplarily described in detail.
  • the bearing position to be measured of the transparent carrier 20 is moved to the measurement position, that is, the central axis of the bearing position to be measured coincides with the central axis of the ranging module 300 (ie the optical axis of the ranging module 300 ).
  • the ranging module 300 may be a laser ranging sensor including a laser transmitter 310, a laser receiver 320 and a microprocessor (not shown in FIG. 4).
  • the central axis of the ranging module 300 is the laser transmitter 310 and the laser receiver.
  • the laser transmitter 310 emits a laser beam to the upper surface of the bearing position of the transparent carrier 20 for the distance to be measured
  • the second surface 202 of the bearing position reflects the laser beam
  • the laser receiver 320 receives the reflection from the second surface 202 of the bearing position
  • the microprocessor can be a single-chip microcomputer with functions of calculation, processing and storage.
  • the microprocessor is further configured to calculate the vertical distance L between the first surface 201 of the bearing position and the microscope objective lens according to the first distance S and the thickness D of the bearing position.
  • the transparent carrier 20 is imaged in the laser receiver 320, the focal length of the formed image is f, the vertical distance between the formed image and the laser receiver 320 is x, and the distance between the laser receiver 320 and the ranging module 300 is x.
  • the horizontal distance of the line is F. It can be known from the triangle similarity principle that the triangle OPQ is similar to the triangle O'P'Q'. Therefore, the second surface 202 and the microscope objective lens 200 of the bearing position of the transparent carrier 20 can be obtained by calculating according to the following formula 1.
  • FIG. 5 is a data diagram of the vertical distances between the first surfaces of a plurality of bearing positions of the transparent carrier provided in FIG. 2 and the microscope objective lens.
  • the object stage 100 drives the transparent carrier at a speed of 9 mm/s.
  • the carrier 20 moves sequentially in a bow shape according to the rows formed by the bearing positions, and the ranging module 300 collects distance data every 250ms; the burr peak in FIG.
  • the filter deviation and standard range delete the erroneous data exceeding the standard range, and then by calculating the average value of the measured data within each 1s, remove the switching time interval (ie the time of the line break) measurement value, you can Obtain the vertical distance of the upper surface (i.e.
  • Fig. 6 is the result figure of the vertical distance data of the first surface of the transparent carrier provided in Fig. 5 and the microscope objective lens
  • Table 1 is a data table of the vertical distances between the first surfaces of the plurality of bearing positions of the transparent carrier provided in FIG. 6 and the microscope objective lens.
  • the ranging module controls the focusing module 400 to move the microscope objective lens 200 to the best position according to the distance difference between L1 and L2 (2.62934-2.67148).
  • the focusing module 400 completes the focus adjustment, and a clear image of the object to be measured on the bearing position A2 can be directly observed; similarly, the microscopic observation of the object to be measured on all the bearing positions can be quickly completed.
  • the distance value of the next bearing position is greater than the distance value of the previous bearing position, it means that the height of the next bearing position is higher than the height of the previous bearing position.
  • One direction ZZ' moves the distance difference in the direction close to the stage 100 (that is, the difference between the vertical distance between the upper surface of the next bearing position and the microscope objective lens and the vertical distance between the upper surface of the previous bearing position and the microscope objective lens) ); If the distance value of the next bearing position is less than the distance value of the previous bearing position, it is explained that the height of the next bearing position is lower than the height of the last bearing position, therefore, the position of the microscope objective lens 200 needs to be moved along the first direction ZZ ' Move the distance difference in the direction away from the stage 100 .
  • the microscope apparatus may further include: a microscope light source 500 located on the side of the stage 100 away from the microscope objective lens 200 .
  • the microscopic light source 500 may be a natural light source or an artificial light source, a natural light source such as sunlight in the environment, an artificial light source such as a light-emitting diode (Light-Emitting Diode, LED) lamp, a fluorescent lamp, and the like.
  • the microscopic light source 500 is configured to provide appropriate brightness when microscopically observing the object to be tested on the plurality of bearing positions of the transparent carrier 20 .
  • the microscope apparatus may further include: an imaging camera 600 located on a side of the microscope objective lens 200 away from the stage 100 .
  • the imaging camera 600 can be an optical instrument that is combined with a microscope to obtain a microscope imaging image.
  • the imaging camera 600 is configured to directly record a clear image of the object to be measured when microscopically observing the object to be measured on multiple bearing positions of the transparent carrier 20 . to shoot.
  • the imaging camera 600 may include a charge coupled device CCD or a complementary metal oxide semiconductor CMOS.
  • Charge-coupled device CCD Charge-coupled Device
  • CCD image sensor is a semiconductor device that can convert optical images into digital signals.
  • Complementary Metal Oxide Semiconductor (CMOS) is a sensor with a sensitivity that is usually 10 times lower than that of a CCD image sensor. Semiconductors with N (negatively charged) and P (positively charged) electrodes coexist, and the currents generated by these two complementary effects can be recorded and interpreted as images by the processing chip.
  • the microscope apparatus may further include a tube lens 700 , and the tube lens 700 is located between the microscope objective lens 200 and the imaging camera 600 .
  • the tube lens 700 may be a lens group composed of a plurality of lens components, the tube lens 700 is located between the microscope objective lens 200 and the imaging camera 600, and the tube lens 700 is set to carry out the clear image of the object to be measured observed by the microscope objective lens 200.
  • the collimation and focus processing facilitates imaging and shooting on the imaging camera 600 .
  • the microscope device configured to perform microscopic observation on an object on a transparent carrier
  • the transparent carrier includes at least two bearing positions
  • the ranging module and the microscope objective lens are arranged on the same side of the stage, and are opposite to each other.
  • the focusing module is connected with the ranging module and the microscope objective
  • the transparent carrier is carried by the stage and drives the transparent carrier to move in at least one direction
  • the ranging module measures the surface and the surface of each bearing position of the transparent carrier.
  • the focusing module adjusts the position of the microscope objective lens along the first direction perpendicular to the bearing surface of the stage according to the distance measured by the ranging module, which can quickly and accurately determine the focal plane of the microscope objective lens. Improve operational efficiency.
  • FIG. 7 is a schematic diagram of the method for focusing a microscope device provided by the embodiment of the present application. flow chart. As shown in Figure 7, the focusing method of the microscope device includes:
  • the stage drives the transparent carrier to translate, and the ranging module sequentially measures the distance between the surface of each bearing position of the transparent carrier and the microscope objective lens.
  • the transparent carrier includes at least two bearing positions, the transparent carrier is carried on the stage, and the transparent carrier is driven to move in different directions on the bearing surface of the stage, so that the different bearing positions of the transparent carrier are sequentially moved to the measurement position, the measurement position.
  • the central axis of the measuring position is located on the stage and coincides with the optical axis of the distance measuring module; the distance measuring module obtains the vertical distance between the upper surface of each bearing position and the microscope objective lens through measurement and calculation.
  • the stage drives the transparent carrier to translate, and the distance measuring module sequentially measures the distance between the surface of each bearing position of the transparent carrier and the microscope objective lens, which can be implemented in two ways, that is, S110 can include two methods: S1101 and S1102:
  • the stage drives the transparent carrier to translate so that each bearing position of the transparent carrier moves to the measurement position and then stops, so that the distance measuring module sequentially measures the distance between the surface of each bearing position of the transparent carrier and the microscope objective lens.
  • the transparent carrier may include a plurality of bearing positions arranged in an array; the stage drives the transparent carrier to move in sequence in an arcuate shape according to the rows of the array formed by the bearing positions, so that the bearing positions correspond to the ranging modules in turn, so that the measuring The distance module sequentially measures the distance from the surface of each bearing position of the transparent carrier to the microscope objective lens.
  • the stage drives the transparent carrier to translate so that each bearing position of the transparent carrier passes through the measuring position in turn; for each bearing position, the ranging module sequentially measures the distance values from at least two positions on the surface of the bearing position to the microscope objective lens, At least two of the distance values are obtained, and the distance from the surface of the bearing bit to the microscope objective is determined based on the at least two distance values.
  • the distance measuring module can obtain the distance values between at least two positions on the surface of a bearing position and the microscope objective lens, and the microprocessor in the distance measuring module can then obtain the distances between the at least two surface positions and the microscope objective lens according to the obtained distances.
  • the value calculation determines the distance from the surface of the bearing bit to the microscope objective. The distance between the upper surface of the bearing position and the microscope objective lens obtained by this method is more precise.
  • the distance from the surface of the bearing position to the microscope objective is determined based on at least two distance values, including:
  • Method 1 Take the average value of the at least two distance values as the distance from the surface of the bearing position to the microscope objective lens.
  • the stage drives the transparent carrier to move in sequence in a bow shape according to the rows of the array formed by the bearing positions at a speed of 9mm/s, and the ranging module collects distance data every 250ms; in Figure 5
  • the burr peak is the vertical distance between the part passing between the bearing bits and the microscope objective during the test.
  • Method 2 The distance from the surface of the bearing position to the microscope objective can be calculated according to the following formula 2:
  • c represents the calculated value of the distance from the surface of the bearing position to the microscope objective lens
  • c 1 represents the measured value of the distance from the surface of the bearing position to the microscope objective lens at time t 1
  • c 2 represents the surface of the bearing position to the microscope objective lens at time t 2
  • the distance measurement value of , t represents the corresponding moment when c is calculated, and t 1 ⁇ t ⁇ t 2 .
  • FIG. 8 is a schematic diagram illustrating the relationship between at least two distance values and time provided by an embodiment of the present application.
  • the measured value of the distance from the surface of the bearing position to the microscope objective at time t 1 is c 1
  • the measured value of the distance from the surface of the bearing position to the microscope objective lens at time t 2 is c 2
  • the distance from the surface of the bit to the microscope objective is calculated as c, where t 1 ⁇ t ⁇ t 2 . It should be noted that the embodiment of the present application does not limit the selected distance value, and FIG.
  • the position of the selected distance value is not limited. , that is, the selection of the moments t 1 and t 2 can be freely and flexibly selected, and the selection of the moments t 1 and t 2 can also be infinitely close to the time t.
  • the focusing method of the microscope device provided in the embodiment of the present application can be applied to the situation where the microscope objective lens, the ranging module and the focusing module are on the side of the stage away from the transparent carrier, and can also be applied to the display
  • the micro-objective lens In the case where the micro-objective lens, the distance measuring module and the focusing module are on the side of the transparent carrier away from the stage, that is, the micro-objective lens can be above the transparent carrier or below the transparent carrier.
  • the transparent carrier may include a first surface and a second surface, the object to be measured is in contact with the first surface, and the stage is in contact with the second surface; the microscope objective lens, the ranging module and the focusing module are located away from the stage.
  • the distance measuring module measures the first distance between the second surface and the microscope objective lens, and obtains the distance between the first surface and the microscope objective lens according to the first distance and the thickness of the transparent carrier.
  • the ranging module When the ranging module is located under the transparent carrier, the ranging module irradiates the transparent carrier from below the transparent carrier, the light intensity reaching the first surface of the transparent carrier is weaker, and the light intensity reaching the second surface is stronger, so it is possible to measure the first The first distance between the two surfaces and the microscope objective lens, and then superimposing the first distance and the thickness of the bearing position to obtain the vertical distance between the first surface and the microscope objective lens.
  • the light intensity reaching the first surface of the transparent carrier is strong, the vertical distance between the first surface and the microscope objective lens can also be directly measured.
  • the thickness of each bearing position of the transparent carrier can be obtained first, that is, the distance between the first surface and the second surface of each bearing position is different, and the thickness of each bearing position of the transparent carrier can be the same as that of the transparent carrier.
  • the parameter data, obtained from the manufacturer, can also be measured by using the microscope device provided in the examples of the present application.
  • the transparent carrier may include a first surface and a second surface, the object to be measured is in contact with the first surface, and the stage is in contact with the second surface; the microscope objective lens, the ranging module and the focusing module are located on the transparent carrier away from the carrier. One side of the objective stage; the ranging module measures the distance between the first surface and the microscope objective.
  • the ranging module When the ranging module is located above the transparent carrier, the ranging module irradiates the transparent carrier from above the transparent carrier, and the light intensity reaching the first surface of the transparent carrier is relatively strong, and the vertical distance between the first surface and the microscope objective can be directly measured, It is not necessary to obtain the thickness values of multiple bearing positions of the transparent carrier in advance.
  • the focusing module adjusts the position of the microscope objective lens along the first direction according to the distance measured by the ranging module, wherein the first direction is perpendicular to the bearing surface of the stage.
  • the observation position is located on the stage and the central axis of the observation position coincides with the optical axis of the microscope objective;
  • For different vertical distances of the micro-objective lens adjust the position of the micro-objective lens along the first direction perpendicular to the bearing surface, so that the focal plane of the micro-objective lens coincides with the upper surface of the bearing position being observed, so that a clear target can be observed. object image.
  • the focusing module adjusts the position of the microscope objective lens along the first direction according to the distance measured by the ranging module, that is, S120 may include:
  • the distance measuring module determine the distance difference between the distance between the surface of the bearing position and the microscope objective lens except the reference bearing position and the distance between the surface of the reference bearing position and the microscope objective lens, and according to the distance The difference adjusts the position of the microscope objective along the first direction.
  • the distance measuring module determines the distance between the surface of the bearing position to be measured and the microscope objective and the distance of the reference bearing position.
  • the distance difference between the surface and the microscope objective lens automatically controls the position of the focusing module to move the microscope objective lens.
  • the focusing module just completes the focusing process of the microscope objective lens, and you can directly see the A clear image of the test bearing position.
  • the first bearer bit may be used as the reference bearer bit, or the previous bearer bit before the current bearer bit may be used as the reference bearer bit, which may be selected according to the actual situation during the specific implementation.
  • the flatness of the transparent carrier is checked based on the distance measurement module measuring the distance between the surface of the bearing position of the transparent carrier and the microscope objective lens.
  • the transparent carrier is driven to translate by the stage, and the distance measuring module sequentially measures the distance between the surface of each bearing position of the transparent carrier and the microscope objective lens; The distance measured by the module adjusts the position of the microscope objective along the first direction perpendicular to the bearing surface of the stage. While quickly and accurately determining the focal plane of the microscope objective, the flatness of the transparent carrier can also be checked. It can greatly improve the operation efficiency.

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Abstract

一种显微装置及显微装置的调焦方法，显微装置包括：载物台（100），设置为承载透明载体（20）并带动透明载体（20）沿至少一个方向平移，透明载体（20）包括至少两个承载位（A1，A2，A3）；显微物镜（200），位于载物台（100）一侧；测距模块（300），与显微物镜（200）位于载物台（100）的同一侧且相对于载物台（100）位于同一高度，测距模块（300）设置为测量每一个承载位（A1-A3）的表面与显微物镜（200）的距离；调焦模块（400），测距模块（300）和显微物镜（200）均与调焦模块（400）连接，调焦模块（400）设置为根据测距模块（300）测得的距离，沿第一方向（ZZ'）调节显微物镜（200）的位置；其中，第一方向（ZZ'）垂直于载物台（100）的承载面。

Description

一种显微装置及显微装置的调焦方法
本申请要求在2021年1月29日提交中国专利局、申请号为202110129832.3的中国专利申请的优先权，该申请的全部内容通过引用结合在本申请中。
技术领域
本申请实施例涉及显微镜技术领域，例如涉及一种显微装置及显微装置的调焦方法。
背景技术
显微镜是由一个透镜或几个透镜的组合构成的一种光学仪器，显微镜主要设置为放大微小物体使人的肉眼能看到。显微镜作为一种微观观察装置，在科研、工业等领域的应用越来越广泛。传统的显微镜在对厚度有一定偏差的透明载体上的物体进行观察时，由于无法自动、快速、准确地确定焦平面，在对不同厚度的位置上的物体进行微观观察时，需要在每次移动位置后手动进行缓慢地调焦，存在操作效率低的问题。
发明内容
本申请实施例提供了一种显微装置及显微装置的调焦方法，可快速、准确地确定显微物镜的焦平面，进而提高观察操作的效率。
第一方面，本申请实施例提供了一种显微装置，包括：
载物台，所述载物台设置为承载透明载体，所述透明载体包括至少两个承载位，所述载物台还设置为带动所述透明载体沿至少一个方向平移；
显微物镜，位于所述载物台一侧；
测距模块，与所述显微物镜位于所述载物台的同一侧，所述测距模块和所述显微物镜相对于所述载物台位于同一高度，所述测距模块设置为测量每一个所述承载位的表面与所述显微物镜的距离；
调焦模块，所述测距模块和所述显微物镜均与所述调焦模块连接，所述调焦模块设置为根据所述测距模块测得的距离，沿第一方向调节所述显微物镜的位置；
其中，所述第一方向垂直于所述载物台的承载面。
第二方面，本申请实施例提供了一种显微装置的调焦方法，通过上述显微装置执行，透明载体包括至少两个承载位，所述显微装置的调焦方法包括：
载物台带动透明载体平移，测距模块依次测量所述透明载体的每一个承载位的表面与显微物镜的距离；
调焦模块根据所述测距模块测得的距离，沿第一方向调节所述显微物镜的位置；
其中，所述第一方向垂直于所述载物台的承载面。
附图说明
图1是本申请实施例提供的一种显微装置的结构示意图；
图2是本申请实施例提供的一种透明载体的结构示意图；
图3是本申请实施例提供的另一种显微装置的结构示意图；
图4是图1提供的显微装置的测距原理示意图；
图5是图2中提供的透明载体多个承载位第一表面与显微物镜的垂直距离的数据图；
图6是图5中提供的透明载体多个承载位第一表面与显微物镜的垂直距离数据的结果图；
图7是本申请实施例提供的一种显微装置的调焦方法的流程图；
图8是本申请实施例提供的至少两个距离值与时间的关系示意图。
具体实施方式
下面结合附图和实施例对本申请作详细说明。
图1是本申请实施例提供的一种显微装置的结构示意图。如图1所示，该显微装置包括：载物台100，载物台100设置为承载透明载体20，透明载体20包括至少两个承载位(图1中示例性的表示出三个不同位置的承载位A1、A2和A3)，载物台100还设置为带动透明载体20沿至少一个方向平移；显微物镜200，位于载物台100一侧；测距模块300，与显微物镜200位于载物台100的同一侧，测距模块300和显微物镜200相对于载物台100位于同一高度，测距模块300设置为测量每一个承载位的表面与显微物镜200的距离；调焦模块400，测距模块300和显微物镜200均与调焦模块400连接，调焦模块400设置为根据测距模块300测得的距离，沿第一方向调节显微物镜200的位置；其中，第一方向ZZ’垂直于载物台100的承载面。需要说明的是，本申请中所提到的“距离”，除明确被指明为“水平距离”外，其余均指“垂直距离”，例如，测距模块300测量的每一个承载位的表面与显微物镜200的距离即为每一个承载位的表面与显微物镜200的垂直距离。
透明载体20可以是任何能够承载待测物体且能够使得光线透过的透明材质固体，如透明玻璃，透明载体20在制作工程中，由于制造工艺等原因承载位的高度可能会不同，可能存在多个承载位的高度不同的情况。参考图1，当对透明载体20的不同高度的承载位(A1、A2和A3)上放置的待测物体进行微观观察时，每次都需要手动调节显微物镜200的位置，使得显微物镜200的焦平面与正在被观察的承载位的上表面重合，从而可以观察到清晰的待测物体图像，因此，存在无法快速、准确地确定显微物镜200的位置，操作效率较低的问题。
本申请实施例针对上述技术问题，在载物台100远离透明载体20的一侧，且与显微物镜200的同侧设置了测距模块300和调焦模块400。测距模块300与显微物镜200相对于载物台100处于同一高度；调焦模块400与测距模块300电连接，调焦模块400还与显微物镜200连接。载物台100设置为承载透明载体20，并带动透明载体20在载物台100的承载面上沿不同方向移动，以使透明载体20的不同承载位(A1、A2和A3)依次移动至测量位，测量位位于载物台 100上且测量位的中心轴与测距模块300的光轴重合；测距模块300设置为测量每个承载位(A1、A2和A3)与显微物镜200的垂直距离；然后将透明载体20的多个承载位依次移动至观测位，观测位位于载物台100上且观测位的中心轴与显微物镜200的光轴重合；调焦模块400根据测距模块300测得的不同承载位(A1、A2和A3)与显微物镜200的不同垂直距离，沿垂直于承载面的第一方向ZZ’调节显微物镜200的位置，以使显微物镜200的焦平面与正在被观察的承载位的上表面重合，从而可以观察到清晰的待测物体显微成像。
示例性的，参考图1所示，本实施例提供的显微装置的工作过程为：载物台100首先将透明载体20的承载位A1移动至测量位，测量位位于载物台100上且测量位的中心轴与测距模块300的光轴重合，测距模块300测得承载位A1与显微物镜200的垂直距离L1，并记录保存；载物台100再将透明载体20的承载位A2移动至测量位，测距模块300测得承载位A2与显微物镜200的垂直距离L2，并记录保存；同理测距模块300记录保存承载位A3与显微物镜200的垂直距离L3；将L1、L2和L3三个数据记录成表。当透明载体20的承载位A1、A2和A3上放置了待测物体时，将透明载体20的承载位A1移动至观测位，观测位位于载物台100上且观测位的中心轴与显微物镜200的光轴重合，调节显微物镜200至最佳位置，以使观察到承载位A1上的待测物体的清晰图像；在将承载位A2移动至观测位的过程中，调焦模块400根据L1与L2的距离差值，控制显微物镜200沿ZZ’移动至最佳位置，在承载位A2移动至观测位时，调焦模块400完成调焦，直接可以观察到承载位A2上的待测物体的清晰图像；同理在承载位A3移动至观测位的过程中，调焦模块400根据L2与L3的距离差值，控制显微物镜200沿ZZ’移动至最佳位置，即在载物台100移动透明载体20的承载位的过程中，就可自动完成调焦过程。可以理解的是，当相邻两个承载位高度相同时，调焦模块400无需调整显微物镜200的位置。本申请实施例提供的技术方案，可实现针对不同厚度的透明载体都能快速、准确地确定显微物镜的焦平面，提高操作效率。
需要说明的是，承载位的表面与显微物镜的距离(如L1、L2和L3)，可以通过载物台带动透明载体平移使得透明载体的每一个承载位依次移动至测量位后停止，以使测距模块依次测量每一个承载位的表面与显微物镜的距离。可选的，还可以通过载物台带动透明载体平移使得透明载体的每一个承载位依次经过测量位；对于每一个承载位，测距模块依次测量该承载位表面的至少两个位置至显微物镜的距离值，得到至少两个距离值，并基于至少两个距离值确定承载位的表面至显微物镜的距离。具体的确定方法参见图8及相关描述。
需要说明的是，参考图1所示，测距模块300的光轴和显示物镜200的光轴相互平行，从图1的左侧观察时，测距模块300的光轴和显示物镜200的光轴重合，透明载体20处于载物台100的承载面上，在同一共线点上对于所有承载位的偏差都是相同的，通过计算多个承载位之间的偏差，可以将显微装置安装等误差直接忽略。
图2是本申请实施例提供的一种透明载体的结构示意图。可选的，如图2所示，透明载体20可以包括阵列排布的多个承载位(A1、A2、A3……B1、B2、B3……)；载物台100设置为带动透明载体20沿第二方向XX’或第三方向YY’平移；第二方向XX’平行于阵列的行方向，第三方向YY’平行于阵列的列方向。透明载体20可以是具有阵列排布的多个承载位的透明物体，多个承载位可以具有不同高度，载物台100可以带动透明载体20在承载面上沿第二方向XX’或第三方向YY’移动，以使测距模块300能够测得所有承载位的上表面距离显微物镜200的垂直距离。示例性的，载物台100带动透明载体20按照承载位所成阵列的行呈弓字形依次运动，使承载位的中心依次与测量位的中心重合，以使测距模块300依次测量透明载体的每一个承载位的上表面距离显微物镜200的距离。
可选的，参考图2所示，透明载体20可以包括96个承载位，承载位呈8行(A、B、C、D、E、F、G、H)12列(1、2、3、4、5、6、7、8、9、10、11、12)的阵列排布。
需要说明的是，本申请实施例提供的显微装置，可以适用于显微物镜、测距模块以及调焦模块在载物台远离透明载体一侧的情况，也可以适用于显微物镜、测距模块以及调焦模块在透明载体远离载物台一侧的情况，即显微物镜可以在透明载体的上方，也可以在透明载体的下方。接下来，对两种情况进行详细说明。
可选的，参考图1所示，透明载体20可以包括第一表面201和第二表面202，待测物体(图1未示出)与第一表面201接触，载物台100与第二表面202接触；显微物镜200、测距模块300以及调焦模块400位于载物台100远离透明载体20的一侧，即显微物镜200、测距模块300以及调焦模块400位于透明载体20下方。
当测距模块300位于透明载体20的下方时，测距模块300从透明载体20的下方照射透明载体20，到达透明载体第一表面201的光强较弱，到达第二表面202的光强较强，因此可以首先测量第二表面202与显微物镜200的第一距离，再将该第一距离与该承载位的厚度叠加，即可得到第一表面201与显微物镜200的垂直距离。当然，若到达透明载体第一表面201的光强较强，也可以直接测量第一表面201与显微物镜200的垂直距离。可以理解的是，可以先获取透明载体20的每个承载位的厚度，即每个承载位的第一表面201与第二表面202的距离差，透明载体20的每个承载位的厚度可以是透明载体20的参数数据，从厂家获得，也可以利用本申请实施例提供的显微装置测得。
示例性的，参考图1所示，本实施例提供的显微装置的工作过程为：载物台100首先将透明载体20的承载位A1移动至测量位，测距模块300测得承载位A1的第二表面202与显微物镜200的第一距离，并根据此第一距离和该承载位的厚度获得承载位A1的第一表面201与显微物镜200的垂直距离L1，并记录保存；载物台100再将透明载体20的承载位A2移动至测量位，测距模块300测得承载位A2的第二表面202与显微物镜200的另一第一距离并根据此第一距离和该承载位的厚度获得承载位A2的第一表面201与显微物镜200的垂直距离 L2，并记录保存；同理测距模块300记录保存承载位A3的第一表面201与显微物镜200的垂直距离L3；将L1、L2和L3三个数据记录成表。当透明载体20的承载位A1、A2和A3上放置了待测物体时，将透明载体20的承载位A1移动至观测位，调节显微物镜200至最佳位置，以使观察到承载位A1上的待测物体的清晰图像；再将承载位A2移动至观测位的过程中，以承载位A1为参考承载位，调焦模块400根据L1与L2的距离差值，控制显微物镜200沿ZZ’移动至最佳位置，在承载位A2移动至观测位时，调焦模块400完成调焦，直接可以观察到承载位A2上的待测物体的清晰图像；同理在承载位A3移动至观测位的过程中，可以以承载位A2为参考承载位，调焦模块400根据L2与L3的距离差值，控制显微物镜200沿ZZ’移动至最佳位置，也可以以承载位A1为参考承载位，根据L1和L3的距离差值进行调焦，即在载物台100移动透明载体20的承载位的过程中，就可自动完成调焦过程。可以理解的是，当相邻两个承载位高度相同时，调焦模块400无需调整显微物镜200的位置。
图3是本申请实施例提供的另一种显微装置的结构示意图。可选的，参考图3所示，透明载体20包括第一表面201和第二表面202，待测物体(图3未示出)与第一表面201接触，载物台100与第二表面202接触；显微物镜200、测距模块300以及调焦模块400位于透明载体20远离载物台100的一侧，即显微物镜200、测距模块300以及调焦模块400位于透明载体20上方。
当测距模块300位于透明载体20的上方时，测距模块300从透明载体20的上方照射透明载体20，到达透明载体第一表面201的光强就比较强，可以直接测量第一表面201与显微物镜200的垂直距离，无需预先获取透明载体20多个承载位的厚度值。
示例性的，参考图3所示，本实施例提供的显微装置的工作过程为：载物台100首先将透明载体20的承载位A1移动至测量位，测距模块300测得承载位A1的第一表面201与显微物镜200的垂直距离L1，并记录保存；载物台100再将透明载体20的承载位A2移动至测量位，测距模块300测得承载位A2的 第一表面201与显微物镜200的垂直距离L2，并记录保存；同理测距模块300记录保存承载位A3的第一表面201与显微物镜200的垂直距离L3；将L1、L2和L3三个数据记录成表。当透明载体20的承载位A1、A2和A3上放置了待测物体时，将透明载体20的承载位A1移动至观测位，调节显微物镜200至最佳位置，以使观察到承载位A1上的待测物体的清晰图像；再将承载位A2移动至观测位的过程中，以承载位A1为参考承载位，调焦模块400根据L1与L2的距离差值，控制显微物镜200沿ZZ’移动至最佳位置，在承载位A2移动至观测位时，调焦模块400完成调焦，直接可以观察到承载位A2上的待测物体的清晰图像；同理在承载位A3移动至观测位的过程中，可以以承载位A2为参考承载位，调焦模块400根据L2与L3的距离差值，控制显微物镜200沿ZZ’移动至最佳位置，也可以以承载位A1为参考承载位，根据L1和L3的距离差值进行调焦，即在载物台100移动透明载体20的承载位的过程中，就可自动完成调焦过程。可以理解的是，当相邻两个承载位高度相同时，调焦模块400无需调整显微物镜200的位置。
图4是图1提供的显微装置的测距原理示意图。可选的，参考图4所示，测距模块300利用激光三角测距原理测量每一个承载位的表面与显微物镜200的距离。
可选的，测距模块300测量承载位的表面与显微物镜200的距离时，承载位与测距模块300共光轴。
本申请实施例提供的显微装置的测距原理是三角测距原理，可以采用直射式激光三角测距法，也可以采用斜射式激光三角测距法。接下来，示例性的采用斜射式激光三角测距法进行详细说明。如图4所示，将透明载体20的待测承载位移动至测量位，即待测承载位的中心轴与测距模块300的中心轴(即测距模块300的光轴)重合。测距模块300可以是包括激光发射器310、激光接收器320和微处理器(图4中未示出)的激光测距传感器，测距模块300的中心轴即为激光发射器310和激光接收器320的连线的中心法线。激光发射器310向透 明载体20的待测距离的承载位的上表面发出激光发射光束，承载位的第二表面202将该激光光束进行反射，激光接收器320接收承载位的第二表面202反射回来的激光反射光束，微处理器可以是具有计算、处理和保存功能的单片机，微处理器设置为根据激光三角测距原理计算透明载体20的承载位的第二表面202与显微物镜200的第一距离S，微处理器还设置为根据此第一距离S与该承载位的厚度D计算获得该承载位的第一表面201与显微物镜的垂直距离L。示例性的，透明载体20在激光接收器320里成像，所成的像的焦距为f，所成的像与激光接收器320的垂直距离为x，激光接收器320与测距模块300的法线的水平距离为F，由三角形相似原理可知，三角形OPQ相似于三角形O’P’Q’，因此，可用根据如下公式一计算获得透明载体20的承载位的第二表面202与显微物镜200的第一距离S：
Figure PCTCN2021130342-appb-000001
示例性的，图5是图2中提供的透明载体多个承载位第一表面与显微物镜的垂直距离的数据图，如图5所示，载物台100以9mm/s的速度带动透明载体20按照承载位所成阵列的行呈弓字形依次运动，测距模块300每隔250ms采集一次距离数据；图5中的毛刺尖峰为测试过程中经过承载位之间的部分距离显微物镜200的垂直距离，通过设置滤波偏差和标准范围，将超过标准范围的错误数据删除，再通过计算每1s内的测量数据的平均值，去除切换的时间间隔(即换行的时间)测量值，即可获得多个承载位上表面(即第一表面)距离显微物镜200的垂直距离；图6是图5中提供的透明载体多个承载位第一表面与显微物镜的垂直距离数据的结果图，表1是图6提供的透明载体的多个承载位第一表面与显微物镜的垂直距离的数据表。当透明载体20的所有承载位上放置了待测物体时，将透明载体20的承载位A1移动至观测位，调节显微物镜200至最佳位置，以使观察到承载位A1上的待测物体的清晰图像；在将承载位A2移动至观测位过程中，测距模块根据L1与L2的距离差值(2.62934-2.67148)，控制调焦模块400移动显微物镜200至最佳位置，在承载位A2移动至观测位时，调 焦模块400完成调焦，直接可以观察到承载位A2上的待测物体的清晰图像；同理，可以快速完成对所有承载位上待测物体的微观观察。需要说明的是，若下一承载位的距离值大于上一承载位的距离值，说明下一承载位的高度高于上一承载位的高度，因此，需将显微物镜200的位置沿第一方向ZZ’向靠近载物台100的方向移动距离差值(即下一个承载位的上表面和显微物镜的垂直距离和上一个承载位的上表面和显微物镜的垂直距离的差值)；若下一承载位的距离值小于上一承载位的距离值，说明下一承载位的高度低于上一承载位的高度，因此，需将显微物镜200的位置沿第一方向ZZ’向远离载物台100的方向移动距离差值。
表1图6提供的透明载体多个承载位第一表面与显微物镜的垂直距离
  1 2 3 4 5 6
A 2.62934 2.67148 2.75543 2.82174 2.84494 2.82289
B 2.63587 2.70921 2.77144 2.84837 2.85474 2.87826
C 2.63097 2.71166 2.7979 2.84886 2.89492 2.59308
D 2.87826 2.814887 2.75086 2.668867 2.672133 2.674093
E 2.9155 2.92432 2.90913 2.85425 2.812927 2.7244
F 2.614313 2.613333 2.64061 2.653513 2.73175 2.78516
G 2.680627 2.81799 2.84886 2.85131 2.891 2.902107
H 2.71068 2.73224 2.78614 2.8273 2.85964 2.86258
  7 8 9 10 11 12
A 2.81113 2.75772 2.83803 2.75821 2.70022 2.66005
B 2.85376 2.84788 2.85964 2.80672 2.74792 2.66854
C 2.83612 2.77242 2.69892 2.68275 2.697287 2.70872
D 2.72293 2.82436 2.87532 2.92138 2.84788 2.7685
E 2.74302 2.74302 2.74988 2.68177 2.68422 2.681607
F 2.8763 2.91942 2.90472 2.92432 2.84886 2.85278
G 2.888387 2.862907 2.82289 2.74106 2.704147 2.68618
H 2.85474 2.8273 2.79202 2.74694 2.67981 2.650573
可选的，参考图1和图3所示，该显微装置还可以包括：显微光源500，位于载物台100远离显微物镜200的一侧。显微光源500可以是天然光源或人工光源，天然光源如环境中的太阳光，人工光源如发光二极管(Light-Emitting Diode，LED)灯、日光灯等。显微光源500设置为在对透明载体20的多个承载位上的待测物体进行微观观察时，提供合适的亮度。
可选的，参考图1和图3所示，该显微装置还可以包括：成像相机600，位于显微物镜200远离载物台100的一侧。成像相机600可以是和显微镜结合来获取显微镜成像图像的光学仪器，成像相机600设置为在对透明载体20的多个承载位上的待测物体进行微观观察时，直接将对待测物体的清晰图像进行拍摄。
可选的，成像相机600可以包括电荷耦合器件CCD或互补金属氧化物半导体CMOS。电荷耦合器件CCD(Charge-coupled Device)，也可以称为CCD图像传感器，一种半导体器件，能够把光学影像转化为数字信号。互补金属氧化物半导体(Complementary Metal Oxide Semiconductor，CMOS)是一种通常比CCD图像传感器低10倍感光度的传感器，主要是利用硅和锗这两种元素所做成的半导体，使其在CMOS上共存着带N(带负电)和P(带正电)极的半导体，这两个互补效应所产生的电流即可被处理芯片记录和解读成影像。
可选的，参考图1和图3所示，该显微装置还可以包括管镜700，管镜700位于显微物镜200和成像相机600之间。管镜700可以是由多个透镜组件组成的透镜组，管镜700位于显微物镜200和成像相机600之间，管镜700设置为将显微物镜200观察到的待测物体的清晰图像进行准直、聚焦处理，便于在成像相机600上成像拍摄。
本申请实施例提供的显微装置，设置为对透明载体上的物体进行微观观察， 该透明载体包括至少两个承载位；测距模块与显微物镜设置于载物台的同一侧，且相对于载物台位于同一高度，调焦模块与测距模块和显微物镜连接；通过载物台承载并带动透明载体沿至少一个方向移动，测距模块测量透明载体的每一个承载位的表面与显微物镜的距离，调焦模块根据测距模块测得的距离，沿垂直于载物台承载面的第一方向调节显微物镜的位置，可快速、准确地确定显微物镜的焦平面，提高操作效率。
本申请实施例还提供了一种显微装置的调焦方法，通过上述任一实施例所述的显微装置执行，图7是本申请实施例提供的一种显微装置的调焦方法的流程图。如图7所示，该显微装置的调焦方法包括：
S110、载物台带动透明载体平移，测距模块依次测量透明载体的每一个承载位的表面与显微物镜的距离。
透明载体包括至少两个承载位，载物台上承载透明载体，并带动透明载体在载物台的承载面上沿不同方向移动，以使透明载体的不同承载位依次移动至测量位，测量位位于载物台上且测量位的中心轴与测距模块的光轴重合；测距模块通过测量计算获得每个承载位的上表面距离显微物镜的垂直距离。
可选的，载物台带动透明载体平移，测距模块依次测量透明载体的每一个承载位的表面与显微物镜的距离可以采用两种方法实现，即S110可以包括S1101和S1102两种方法：
S1101、载物台带动透明载体平移使得透明载体的每一个承载位依次移动至测量位后停止，以使测距模块依次测量透明载体的每一个承载位的表面与显微物镜的距离。
可选的，透明载体可以包括阵列排布的多个承载位；载物台带动透明载体按照承载位所成阵列的行呈弓字形依次运动，使承载位依次与测距模块对应，以使测距模块依次测量透明载体的每一个承载位的表面距离显微物镜的距离。
S1102、载物台带动透明载体平移使得透明载体的每一个承载位依次经过测量位；对于每一个承载位，测距模块依次测量该承载位表面的至少两个位置至 显微物镜的距离值，得到至少两个所述距离值，并基于至少两个距离值确定承载位的表面至显微物镜的距离。
对于一个承载位，测距模块可以获得一个承载位表面的至少两个位置与显微物镜的距离值，测距模块中的微处理器再根据获得的至少两个表面位置与显微物镜的距离值计算确定该承载位的表面与显微物镜的距离。采用该方法获得的承载位上表面与显微物镜的距离更加精确。
可选的，基于至少两个距离值确定承载位的表面至显微物镜的距离，包括：
方法一：以所述至少两个距离值的平均值作为承载位的表面至显微物镜的距离。示例性的，如图5所示，载物台以9mm/s的速度带动透明载体按照承载位所成阵列的行呈弓字形依次运动，测距模块每隔250ms采集一次距离数据；图5中的毛刺尖峰为测试过程中经过承载位之间的部分与显微物镜的垂直距离，通过设置滤波偏差和标准范围，将超过标准范围的错误数据删除，再通过计算每1s内的测量数据的平均值，去除切换的时间间隔测量值，即可获得多个承载位上表面与显微物镜200的垂直距离。
方法二：可以根据如下公式二计算承载位的表面至显微物镜的距离：
Figure PCTCN2021130342-appb-000002
其中，c表示承载位的表面至显微物镜的距离计算值，c 1表示t 1时刻承载位的表面至显微物镜的距离测量值，c 2表示t 2时刻承载位的表面至显微物镜的距离测量值，t表示计算c时对应的时刻，且t 1<t<t 2。
采用方法二的方法，可以首先获得承载位待测上表面的多个位置与显微物镜的距离值，可以获得一时间距离图像。图8是本申请实施例提供的至少两个距离值与时间的关系示意图。如图8所示，在t 1时刻承载位的表面至显微物镜的距离测量值为c 1，在t 2时刻承载位的表面至显微物镜的距离测量值为c 2，在t时刻承载位的表面至显微物镜的距离计算值为c，其中，t 1<t<t 2。需要说明的是，本申请实施例对选取的距离值不做限定，图8示例性的选取两个距离值确定承载位表面与显微物镜的距离，而且，选取的距离值的位置不做限定，即t 1和t 2 的时刻的选取可以自由灵活选择，t 1和t 2的时刻的选取还可以无限接近于时刻t。
需要说明的是，本申请实施例提供的显微装置的调焦方法，可以适用于显微物镜、测距模块以及调焦模块在载物台远离透明载体一侧的情况，也可以适用于显微物镜、测距模块以及调焦模块在透明载体远离载物台一侧的情况，即显微物镜可以在透明载体的上方，也可以在透明载体的下方。接下来，对两种情况进行详细说明。
可选的，透明载体可以包括第一表面和第二表面，待测物体与第一表面接触，载物台与第二表面接触；显微物镜、测距模块以及调焦模块位于载物台远离透明载体的一侧；测距模块测量第二表面与显微物镜的第一距离，根据第一距离和透明载体的厚度获得第一表面与显微物镜的距离。
当测距模块位于透明载体的下方时，测距模块从透明载体的下方照射透明载体，到达透明载体第一表面的光强较弱，到达第二表面的光强较强，因此可以首先测量第二表面与显微物镜的第一距离，再将该第一距离与该承载位的厚度叠加，即可得到第一表面与显微物镜的垂直距离。当然，若到达透明载体第一表面的光强较强，也可以直接测量第一表面与显微物镜的垂直距离。可以理解的是，可以先获取透明载体的每个承载位的的厚度，即每个承载位的第一表面与第二表面的距离差，透明载体的每个承载位的厚度可以是透明载体的参数数据，从厂家获得，也可以利用本申请实施例提供的显微装置测得。
可选的，透明载体可以包括第一表面和第二表面，待测物体与第一表面接触，载物台与第二表面接触；显微物镜、测距模块以及调焦模块位于透明载体远离载物台的一侧；测距模块测量第一表面与显微物镜的距离。
当测距模块位于透明载体的上方时，测距模块从透明载体的上方照射透明载体，到达透明载体第一表面的光强就比较强，可以直接测量第一表面与显微物镜的垂直距离，无需预先获取透明载体多个承载位的厚度值。
S120、调焦模块根据测距模块测得的距离，沿第一方向调节显微物镜的位置；其中，第一方向垂直于载物台的承载面。
将透明载体的多个承载位移动至观测位，观测位位于载物台上且观测位的中心轴与显微物镜的光轴重合；调焦模块根据测距模块测得的不同承载位距离显微物镜的不同垂直距离，沿垂直于承载面的第一方向调节显微物镜的位置，以使显微物镜的焦平面与正在被观察的承载位的上表面重合，从而可以观察到清晰的待测物体图像。
可选的，调焦模块根据测距模块测得的距离，沿第一方向调节显微物镜的位置，即S120可以包括：
S1201、确定参考承载位，将参考承载位移动至观测位并沿第一方向调节显微物镜的位置。
首先可以选取一个参考承载位，将参考承载位移动至观测位，调节显微物镜的位置，使得可以看到参考承载位的清晰图像。
S1202、根据测距模块测得的距离，确定除所述参考承载位之外的承载位的表面与显微物镜的距离和参考承载位的表面与显微物镜的距离的距离差，并根据距离差沿第一方向调节显微物镜的位置。
获得参考承载位的清晰图像后，将透明载体的下一个待测的承载位移动至观测位处的过程中，测距模块根据待测承载位的表面与显微物镜的距离和参考承载位的表面与显微物镜的距离的距离差自动控制调焦模块移动显微物镜的位置，在待测承载位到达观测位时，调焦模块刚好完成显微物镜的调焦过程，可以直接看到待测承载位的清晰图像。具体实施时，可以将第一个承载位作为参考承载位，也可以将当前承载位前一个承载位作为参考承载位，具体实施时可以根据实际情况选择。
可选的，基于测距模块测量透明载体的承载位的表面与显微物镜的距离检验透明载体的平整度。
本申请实施例提供的显微装置的调焦方法，通过载物台带动透明载体平移，测距模块依次测量透明载体的每一个承载位的表面与显微物镜的距离；调焦模块根据测距模块测得的距离，沿垂直于载物台的承载面的第一方向调节显微物 镜的位置，在快速、准确地确定显微物镜的焦平面的同时，还可检验透明载体的平整度，可极大提高操作效率。

Claims (17)

  1. 一种显微装置，包括：
    载物台，所述载物台设置为承载透明载体，所述透明载体包括至少两个承载位，所述载物台还设置为带动所述透明载体沿至少一个方向平移；
    显微物镜，位于所述载物台一侧；
    测距模块，与所述显微物镜位于所述载物台的同一侧，所述测距模块和所述显微物镜相对于所述载物台位于同一高度，所述测距模块设置为测量每一个所述承载位的表面与所述显微物镜的距离；
    调焦模块，所述测距模块和所述显微物镜均与所述调焦模块连接，所述调焦模块设置为根据所述测距模块测得的距离，沿第一方向调节所述显微物镜的位置；
    其中，所述第一方向垂直于所述载物台的承载面。
  2. 根据权利要求1所述的显微装置，其中，所述透明载体包括阵列排布的多个承载位；
    所述载物台设置为带动所述透明载体沿第二方向或第三方向平移；
    所述第二方向平行于阵列的行方向，所述第三方向平行于阵列的列方向。
  3. 根据权利要求2所述的显微装置，其中，所述透明载体包括96个承载位，所述承载位呈8行12列的阵列排布。
  4. 根据权利要求1～3任一所述的显微装置，其中，所述透明载体包括第一表面和第二表面，待测物体与所述第一表面接触，所述载物台与所述第二表面接触；
    所述显微物镜、所述测距模块以及所述调焦模块位于所述载物台远离所述透明载体的一侧。
  5. 根据权利要求1～3任一所述的显微装置，其中，所述透明载体包括第一表面和第二表面，待测物体与所述第一表面接触，所述载物台与所述第二表面接触；
    所述显微物镜、所述测距模块以及所述调焦模块位于所述透明载体远离所 述载物台的一侧。
  6. 根据权利要求1所述显微装置，其中，所述测距模块利用激光三角测距原理测量每一个所述承载位的表面与所述显微物镜的距离。
  7. 根据权利要求6所述的显微装置，其中，所述测距模块测量所述承载位的表面与所述显微物镜的距离时，所述承载位与所述测距模块共光轴。
  8. 根据权利要求1所述的显微装置，还包括：
    显微光源，位于所述载物台远离所述显微物镜的一侧；
    成像相机，位于所述显微物镜远离所述载物台的一侧；
    管镜，所述管镜位于所述显微物镜和所述成像相机之间。
  9. 一种显微装置的调焦方法，通过权利要求1～8任一所述的显微装置执行，透明载体包括至少两个承载位，所述显微装置的调焦方法包括：
    载物台带动透明载体平移，测距模块依次测量所述透明载体的每一个承载位的表面与显微物镜的距离；
    调焦模块根据所述测距模块测得的距离，沿第一方向调节所述显微物镜的位置；
    其中，所述第一方向垂直于所述载物台的承载面。
  10. 根据权利要求9所述的显微装置的调焦方法，其中，所述载物台带动透明载体平移，测距模块依次测量所述透明载体的每一个承载位的表面与显微物镜的距离，包括：
    载物台带动透明载体平移使得所述透明载体的每一个承载位依次移动至测量位后停止，以使测距模块依次测量所述透明载体的每一个承载位的表面与显微物镜的距离。
  11. 根据权利要求9所述的显微装置的调焦方法，其中，所述载物台带动透明载体平移，测距模块依次测量所述透明载体的每一个承载位的表面与显微物镜的距离，包括：
    载物台带动透明载体平移使得所述透明载体的每一个承载位依次经过测量 位；
    对于每一个所述承载位，测距模块依次测量所述承载位的表面的至少两个位置至显微物镜的距离值，得到至少两个所述距离值，并基于至少两个所述距离值确定所述承载位的表面至所述显微物镜的距离。
  12. 根据权利要求11所述的显微装置的调焦方法，其中，所述基于至少两个所述距离值确定所述承载位的表面至所述显微物镜的距离，包括：
    根据下式计算所述承载位的表面至所述显微物镜的距离：
    Figure PCTCN2021130342-appb-100001
    其中，c表示所述承载位的表面至所述显微物镜的距离计算值，c 1表示t 1时刻所述承载位的表面至所述显微物镜的距离测量值，c 2表示t 2时刻所述承载位的表面至所述显微物镜的距离测量值，t表示计算c时对应的时刻，且t 1<t<t 2。
  13. 根据权利要求9所述的显微装置的调焦方法，其中，所述透明载体包括阵列排布的多个承载位；
    所述载物台带动所述透明载体按照所述承载位所成阵列的行呈弓字形依次运动。
  14. 根据权利要求9所述的显微装置的调焦方法，其中，所述调焦模块根据所述测距模块测得的距离，沿第一方向调节所述显微物镜的位置，包括：
    确定参考承载位，将所述参考承载位移动至观测位并沿所述第一方向调节所述显微物镜的位置；
    根据所述测距模块测得的距离，确定除所述参考承载位之外的承载位的表面与显微物镜的距离和所述参考承载位的表面与显微物镜的距离的距离差，并根据所述距离差沿所述第一方向调节所述显微物镜的位置。
  15. 根据权利要求9所述的显微装置的调焦方法，其中，所述透明载体包括第一表面和第二表面，待测物体与所述第一表面接触，所述载物台与所述第二表面接触；
    所述显微物镜、所述测距模块以及所述调焦模块位于所述载物台远离所述 透明载体的一侧；
    所述测距模块测量所述第二表面与所述显微物镜的第一距离，根据所述第一距离和所述透明载体的厚度获得所述第一表面与所述显微物镜的距离。
  16. 根据权利要求9所述的显微装置的调焦方法，其中，所述透明载体包括第一表面和第二表面，待测物体与所述第一表面接触，所述载物台与所述第二表面接触；
    所述显微物镜、所述测距模块以及所述调焦模块位于所述透明载体远离所述载物台的一侧；
    所述测距模块测量所述第一表面与所述显微物镜的距离。
  17. 根据权利要求9所述的显微装置的调焦方法，其中，基于所述测距模块测量所述透明载体的承载位的表面与显微物镜的距离检验所述透明载体的平整度。
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