WO2022151577A1

WO2022151577A1 - Detection device and detection method

Info

Publication number: WO2022151577A1
Application number: PCT/CN2021/080548
Authority: WO
Inventors: 朱继田; 叶坤; 商秋锋; 朱涛
Original assignee: 苏州精濑光电有限公司; 武汉精测电子集团股份有限公司
Priority date: 2021-01-13
Filing date: 2021-03-12
Publication date: 2022-07-21
Also published as: CN112881405B; CN112881405A

Abstract

A detection device and a detection method. The detection device comprises: a base (1); a detection assembly (2), which is arranged on the base (1) and is configured to detect a test piece; and a first position adjustment mechanism (3), which is arranged on the machine base (1) and is configured to bear the test piece, wherein the first position adjustment mechanism (3) is in communication connection with the detection assembly (2), the detection assembly (2) being configured to detect a reference point of the test piece, and the first position adjustment mechanism (3) is configured to adjust the position of the test piece according to the position of the reference point.

Description

Detection device and detection method

This disclosure claims the priority of a Chinese patent application with application number 202110042198.X filed with the China Patent Office on January 13, 2021, the entire contents of which are incorporated into this disclosure by reference.

technical field

The present application relates to the field of detection technology, for example, to a detection device and a detection method.

Background technique

The display industry is currently developing towards high-definition, high-resolution, flexible and foldable. Therefore, the surface inspection requirements for display components are getting higher and higher. The surface inspection of display components includes microscopic surface inspection such as crack inspection of three-dimensional curved surfaces, appearance inspection of wafers, and appearance inspection of sub-millimeter light-emitting diodes.

In the detection device in the related art, the display component to be detected needs to be placed in a preset position of the detection device to ensure comprehensive detection of the display component. In order to ensure that the display assembly is placed at a preset position, the detection device includes a positioning jig, so as to realize the positioning of the display assembly through the positioning jig. However, the setting of the positioning jig increases the cost of the detection device, and increases the time required for the display assembly to be placed in the detection device, resulting in low detection efficiency.

SUMMARY OF THE INVENTION

The present application provides a detection device to reduce detection cost and improve detection efficiency.

This application adopts the following technical solutions:

A detection device, comprising:

Machine base;

a detection component, arranged on the base, and configured to detect the object to be detected;

a first position adjustment mechanism, disposed on the base and configured to carry the to-be-detected piece, the first position adjustment mechanism is connected in communication with the detection assembly, and the detection assembly is configured to detect the A reference point of the object to be inspected, the first position adjustment mechanism is configured to adjust the position of the object to be inspected according to the position of the reference point.

The present application also provides a detection method, so as to improve the detection efficiency and reduce the detection cost.

The application also adopts the following technical solutions:

A detection method, using the detection device as described above, the detection method comprises the following steps:

the first position adjustment mechanism transports the to-be-detected piece to the detection area;

the detection component grabs the reference point of the to-be-detected piece;

The first position adjusting mechanism adjusts the position of the to-be-detected piece to a first preset position according to the position of the reference point;

The first position adjustment mechanism adjusts the position of the to-be-detected object according to a preset path, so that the detection assembly detects the entire to-be-detected object in a second preset position according to preset optical parameters.

Description of drawings

1 is a schematic structural diagram of a detection device provided by an embodiment of the present application;

FIG. 2 is a partial structural schematic diagram of a detection device provided by an embodiment of the present application.

In the picture:

1. Machine base;

2. Detection components;

3. The first position adjustment mechanism; 31, the first driving member; 32, the second driving member; 33, the first rotating member; 34, the bearing platform;

4. The second position adjustment mechanism; 41, the fine adjustment assembly; 42, the coarse adjustment assembly; 43, the second rotating part; 44, the third rotating part.

Detailed ways

The technical solutions of the present application will be described below with reference to the accompanying drawings and through specific embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present application. In addition, it should be noted that, for the convenience of description, the drawings only show a part related to the present application, but not the whole.

This application defines some orientation words, and unless otherwise stated, the orientation words used are such as "up", "down", "left", "right", "inner", "outer". is used for ease of understanding.

In this application, unless otherwise expressly specified and defined, a first feature "on" or "under" a second feature may include direct contact between the first and second features, or may include the first and second features Not directly but through additional features between them. Also, the first feature being "above", "over" and "above" the second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is level higher than the second feature. The first feature is "below", "below" and "below" the second feature includes the first feature being directly below and diagonally below the second feature, or simply means that the first feature has a lower level than the second feature.

In the description of this application, unless otherwise expressly specified and limited, the terms "connected", "connected" and "fixed" should be understood in a broad sense, for example, it may be a fixed connection, a detachable connection, or an integrated ; It can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between the two elements. For those of ordinary skill in the art, the meanings of the above terms in the present application can be understood according to the situation.

This embodiment provides a detection device for detecting a display component waiting for detection, so as to reduce the detection cost and improve the detection efficiency.

As shown in FIGS. 1 and 2 , the detection device provided in this embodiment includes a machine base 1 , a detection assembly 2 and a first position adjustment mechanism 3 , wherein the detection assembly 2 of the detection device and the first position adjustment mechanism 3 and other components It is arranged on the base 1, and the base 1 plays a supporting role. The first position adjusting mechanism 3 is used to carry the to-be-tested piece, and the detection assembly 2 is used to detect the to-be-tested piece. Optionally, in this embodiment, the detection component 2 is located on the upper side of the first position adjustment mechanism 3 , and the detection component 2 is a CCD camera. The first position adjustment mechanism 3 is connected in communication with the detection assembly 2 , the detection assembly 2 detects the reference point of the object to be detected, and the first position adjustment mechanism 3 adjusts the position of the object to be detected to a first preset position according to the position of the reference point.

When it is necessary to detect the to-be-detected part, place the to-be-detected part on the first position adjustment mechanism 3, the detection assembly 2 detects the reference point on the to-be-detected part, and the first position adjustment mechanism 3 takes the reference point as a reference point, The position of the device is adjusted to the first preset position, so as to realize the automatic positioning of the object to be detected. The detection assembly 2 provided in this embodiment does not need to be provided with a positioning jig, thus reducing the cost of the detection device, thereby reducing the detection cost. When placing the to-be-detected part on the first position adjusting mechanism 3, there is no need to position the to-be-detected part, therefore, the time required for placing the to-be-detected part is reduced, and the detection efficiency is improved.

In one embodiment, the reference point may be an edge or a corner of the object to be inspected, or a combination of the edge and the corner, or a cross mark set on the object to be inspected.

Optionally, when detecting the to-be-detected part for the first time, select several process points on the to-be-detected part, set multiple motion positions of the to-be-detected part according to the process points, save a plurality of motion positions, and form a preset according to the position change of the to-be-detected part. A path is set, and the preset path is stored in the detection device at the same time. After the object to be detected moves along the preset path, the detection component 2 can detect the entire object to be detected. The position and optical parameters of the detection component 2 during the first detection are the second preset position and the preset optical parameters, respectively. After the object to be inspected is located at the first preset position, the detection assembly 2 is in the second preset position to detect the object to be inspected with preset optical parameters, and the first position adjustment mechanism 3 is used to adjust the object to be inspected along the preset path. position, so that the detection assembly 2 detects the entire to-be-detected object. By storing the preset path, the second preset position and the preset optical parameters, the detection device has a traceability function. After completing a test cycle setting, subsequent repeated products will be Set the path and preset optical parameters, start to take pictures and focus automatically, and realize the traceable function in this way. Compared with the related art, the detection device provided in this embodiment is flexible and convenient, reduces positioning fixtures, saves adjustment time, and improves detection efficiency.

In one embodiment, the first detection may be the detection performed when the preset path, the second preset position and the preset optical parameters have not been acquired, and the first detection may be performed before the detection device leaves the factory, or after the user purchases the detection device. , by the user according to the user's different detection needs. In one embodiment, through the first detection, the detection device can obtain a preset path, a second preset position and preset optical parameters that are suitable for the object to be detected. If the detection requirements change, for example, different types of The first detection can be performed again to obtain a preset path, a second preset position and preset optical parameters that are adapted to the detection requirements.

As shown in FIG. 2 , optionally, the first position adjusting mechanism 3 includes a first driving member 31 , a second driving member 32 , a first rotating member 33 and a bearing platform 34 . The carrying table 34 is used to carry the object to be tested, the first driving member 31 is used to drive the carrying table 34 to move in the first direction, the second driving member 32 is used to drive the carrying table 34 to move in the second direction, and the first rotating member 33 is used to drive the carrying table 34 to move in the second direction. The driving platform 34 rotates around the vertical position.

In one embodiment, the first driving member 31 is disposed on the base 1, the output end of the first driving member 31 can reciprocate along the first direction, and the second driving member 32 is connected to the output end of the first driving member 31, So that the second driving member 32 can reciprocate along the first direction. The output end of the second driving member 32 can reciprocate in the second direction, and the first rotating member 33 is connected to the output end of the second driving member 32 so that the first rotating member 33 can reciprocate in the second direction. The output end of the first rotating member 33 can rotate around the vertical direction, and the bearing platform 34 is connected with the output end of the first rotating member 33 so that the bearing platform 34 can rotate around the vertical direction. Wherein, the vertical direction, the first direction and the second direction are perpendicular to each other.

As shown in FIG. 2 , the detection device further includes a second position adjustment mechanism 4 , and the second position adjustment mechanism 4 is used to adjust the position of the detection assembly 2 to realize the focusing of the detection assembly 2 . In one embodiment, the second position adjustment mechanism 4 is disposed on the machine base 1 , and the second position adjustment mechanism 4 is connected with the detection assembly 2 . The setting of the second position adjusting mechanism 4 can enable the detection device to adapt to the detection of the to-be-detected pieces of different thicknesses.

In order to realize the fast focusing of the detection assembly 2 and the fine positioning and focusing of the detection assembly 2 at the same time, the second position adjustment mechanism 4 includes a fine adjustment assembly 41 and a coarse adjustment assembly 42 . The coarse adjustment assembly 42 is used to quickly and roughly adjust the position of the detection assembly 2 along the vertical direction, that is, when the detection assembly 2 is replaced or a different to-be-detected piece is replaced, the coarse adjustment assembly 42 works to be in the vertical direction The positions of the coarse adjustment detection assembly 2 and the fine adjustment assembly 41 are adjusted. The fine adjustment assembly 41 is used to finely adjust the position of the object to be inspected along the vertical direction, so as to ensure the inspection accuracy of the inspection assembly 2 . In one embodiment, the coarse adjustment assembly 42 is disposed on the base 1 , the output end of the coarse adjustment assembly 42 is connected to the fine adjustment assembly 41 , and the output end of the fine adjustment assembly 41 is connected to the detection assembly 2 .

Optionally, the fine adjustment component 41 is a piezoelectric ceramic, and the piezoelectric ceramic can realize ultra-fast positioning within 7ms within a stroke of 100um, and achieve 10nm fine positioning and focusing, and can detect the position of the component 2 in the vertical direction. The repeatability is controlled within 0.6um. The structure and working principle of piezoelectric ceramics are related technologies, and will not be repeated here.

Optionally, the coarse adjustment assembly 42 may be a motor-driven lead screw nut mechanism. Since the motor-driven lead screw nut mechanism is a related art, it will not be repeated here.

In this embodiment, when the detection component 2 automatically focuses, it can adopt any one of the following two modes to focus. The first method is optical focusing: the detection component 2 is moved within a certain range, and images are taken multiple times, the clarity of the multiple images is analyzed, and the optimal focal length is determined, thereby adjusting the position of the detection component 2 to the second preset position; The second method is to use external hardware to trigger focusing, use sensors such as infrared distance sensors to determine the vertical distance between the object to be detected and the detection component 2, quickly trigger the fine adjustment component 41 or the coarse adjustment component 42, and adjust the position of the detection component 2 to the second position. Preset position.

The detection device also includes a counterweight drive. The counterweight driver is used to provide an upward force for the detection assembly 2 after the detection assembly 2 is adjusted in place. The upward force of the counterweight driver can support the detection assembly 2, so that the self-weight of the detection assembly 2 and the effect of the counterweight driver The force reaches a dynamic balance, which reduces the load of the coarse adjustment component 42 and ensures that the detection component 2 is always in the adjusted position, thereby ensuring the detection accuracy of the detection component 2 and ensuring that the pixel jitter of the detection component 2 does not exceed 1um. In one embodiment, the counterweight driver is disposed on the machine base 1 , and the output end of the counterweight driver is connected to the detection component 2 . In one embodiment, the counterweight driving member is an air cylinder.

In order to keep the detection assembly 2 parallel to the object to be detected, the second position adjustment mechanism 4 further includes a rotation assembly, and the rotation assembly is used to adjust the levelness of the detection assembly 2 . In one embodiment, the fine adjustment assembly 41 and the coarse adjustment assembly 42 are connected by a rotating assembly.

In one embodiment, the rotating assembly includes a second rotating member 43 and a third rotating member 44. The second rotating member 43 is used to drive the detection assembly 2 to rotate around the first direction, and the third rotating member 44 is used to drive the detection assembly 2 to rotate around the first direction. Rotation in the second direction. In one embodiment, the second rotary driving member is connected to the base 1 , the output end of the second rotary driving member is connected to the third rotary driving member, and the output end of the third rotary driving member is connected to the fine adjustment assembly 41 . The first rotating member 33 , the second rotating member 43 and the third rotating member 44 may be a rotary cylinder or a worm gear mechanism driven by a stepping motor or the like.

Optionally, the optical system of the detection assembly provided in this embodiment can be equipped with four lighting environments, including coaxial light, dark field, polarized light, and interference imaging, to meet the detection of different types of product defects.

In one embodiment, in order to avoid image shake, the table top of the machine base 1 for supporting the first position adjustment mechanism 3 and the second position adjustment mechanism 4 is made of marble.

As shown in FIG. 1 and FIG. 2, in one embodiment, the detection device includes:

base 1;

The detection assembly 2 is arranged on the base 1 and is used to detect the to-be-detected part;

The first position adjustment mechanism 3 is arranged on the base 1 and is used to carry the to-be-detected part, and the first position adjustment mechanism 3 is connected in communication with the detection component 2, and the detection component 2 detects the the reference point of the object to be detected, the first position adjusting mechanism 3 adjusts the position of the object to be detected to a first preset position according to the position of the reference point;

When the detection device detects the to-be-detected part for the first time, the position of the to-be-detected part changes to form a preset path, and the position and optical parameters of the detection component 2 during detection are the second preset position and the preset optical parameter, respectively. parameters; after the to-be-detected part is located at the first preset position, the detection component 2 detects the to-be-detected part at the second preset position with the preset optical parameters, and the first A position adjustment mechanism 3 is used to adjust the position of the to-be-detected object along the preset path, so that the detection assembly 2 can detect the entire to-be-inspected object.

This embodiment also provides a detection method, which can be used by the above-mentioned detection device, and the detection method includes the following steps:

Step S1, the first position adjustment mechanism 3 transports the to-be-detected part to the detection area, so that the detection assembly 2 can capture the image of the to-be-detected part;

Step S2, the detection component 2 grabs the reference point of the to-be-detected part, thereby obtaining the reference point required for positioning;

Step S3, the first position adjusting mechanism 3 adjusts the position of the to-be-detected piece to the first preset position according to the position of the reference point.

In the detection method provided by this embodiment, the detection component 2 detects the reference point on the object to be detected, and the first position adjustment mechanism 3 uses the reference point as the reference point to adjust the position of the object to be detected to the first preset position, so as to realize the detection of the object to be detected. The automatic positioning of the detection piece improves the detection efficiency.

In order for the detection assembly 2 to detect the entire to-be-detected piece, after step S3, it also includes a step S4, and the step S4 includes: the first position adjusting mechanism 3 adjusts the position of the to-be-detected piece according to a preset path, so that the detection assembly 2 detects the entire to-be-detected piece. and the detection component 2 detects the to-be-detected component at the second preset position according to the preset optical parameters, so that the detection component 2 captures the clearest image.

Optionally, the step of forming the preset path is: when the object to be detected is detected for the first time, select several process points, set multiple motion positions of the object to be detected according to the process points, save the multiple motion positions, and form the preset path. In one embodiment, the process points can be two opposite corners or two sides of the object to be inspected, and the detection component 2 can know the size of the object to be inspected by grasping the position of the process point, and then according to each image The size of the collected area of the to-be-detected part can be used to know the next movement position of the to-be-detected part. Multiple movement positions form the above-mentioned preset path. When the type of the to-be-detected part is detected later, the first position adjustment mechanism 3 The position of the object to be inspected is adjusted according to the above preset path, thereby greatly improving the inspection efficiency.

The steps of forming the optical parameters are: when the object to be inspected is inspected for the first time, set and save the vertical distance between the inspection component 2 and the object to be inspected, set and save the optical parameters of the inspection component 2 during detection, and later detect the object to be inspected of the model , the detection components 2 are moved to the second preset position, and the optical parameters are maintained, thereby greatly improving the detection efficiency. In one embodiment, the optical parameter may be the grayscale corresponding to the picked-up process point and the feature point, the brightness of the light source of the detection component 2, and the like.

The detection method provided by this embodiment saves the preset path, the second preset position and the optical parameters when detecting the object to be detected for the first time, and then automatically takes pictures and automatically focuses on the subsequent object to be detected according to the reference point and the saved settings. In this way, the traceable function is realized, thereby saving detection time and improving detection efficiency.

In the present application, when the to-be-detected part needs to be detected, the to-be-detected part is placed on the first position adjustment mechanism, the detection component detects the reference point on the to-be-detected part, and the first position adjustment mechanism takes the reference point as a reference point, The position of the piece is adjusted to the first preset position, so as to realize the automatic positioning of the piece to be detected. After completing a test cycle setting, the subsequent repeating products will start to take pictures and auto-focus automatically according to the first preset position, the second preset position, the preset path and the preset optical parameters, and in this way, the traceable function will be realized. The detection efficiency is greatly improved. The detection assembly provided by the present application does not need to be provided with a positioning jig, thus reducing the cost of the detection device, thereby reducing the detection cost. When placing the to-be-detected part on the first position adjusting mechanism, it is not necessary to position the to-be-detected part, therefore, the time required for placing the to-be-detected part is reduced, and the detection efficiency is improved.

Claims

A detection device, comprising:

base (1);

a detection assembly (2), arranged on the machine base (1), and configured to detect the object to be detected;

A first position adjustment mechanism (3), provided on the machine base (1) and configured to carry the to-be-detected piece, the first position adjustment mechanism (3) communicates with the detection assembly (2) connected, the detection assembly (2) is configured to detect the reference point of the object to be detected, and the first position adjustment mechanism (3) is configured to adjust the position of the object to be detected according to the position of the reference point .
The detection device according to claim 1, wherein the detection device further comprises:

A second position adjustment mechanism (4) is provided on the machine base (1), the second position adjustment mechanism (4) is connected with the detection assembly (2), and the second position adjustment mechanism (4) is configured to adjust the position of the detection assembly (2).
The detection device according to claim 2, wherein the second position adjustment mechanism (4) comprises:

A fine adjustment assembly (41), the output end of the fine adjustment assembly (41) is connected with the detection assembly (2), the fine adjustment assembly (41) is configured to finely adjust the detection assembly ( 2) location;

A coarse adjustment assembly (42) is provided on the machine base (1), an output end of the coarse adjustment assembly (42) is connected to the fine adjustment assembly (41), and the coarse adjustment assembly (42) is configured For coarse adjustment of the position of the fine adjustment assembly (41) in the vertical direction.
The detection device according to claim 3, wherein the second position adjustment mechanism (4) further comprises:

A rotating assembly, the fine adjustment assembly (41) and the coarse adjustment assembly (42) are connected through the rotating assembly, and the rotating assembly is configured to adjust the levelness of the detection assembly (2).
The detection device according to any one of claims 1-4, wherein the detection device further comprises:

A counterweight driving member is arranged on the machine base (1), the output end of the counterweight driving member is connected with the detection component (2), and is configured to provide an upward action for the detection component (2) force.
The detection device according to claim 3, wherein the fine adjustment component (41) is a piezoelectric ceramic.
The detection device according to claim 1, wherein the first position adjustment mechanism (3) comprises:

a first driving member (31), disposed on the machine base (1), and the output end of the first driving member (31) can reciprocate along a first direction;

A second driving member (32) is connected to the output end of the first driving member (31), and the output end of the second driving member (32) can reciprocate along the second direction;

The first rotating member (33) is connected to the output end of the second driving member (32), and the output end of the first rotating member (33) can rotate around a vertical direction, and the vertical direction, all the The first direction is perpendicular to the second direction;

A bearing table (34) is connected to the output end of the first rotating member (33) and is configured to carry the to-be-detected member.
A detection method, using the detection device according to any one of claims 1-7, the detection method comprising the steps of:

The first position adjustment mechanism (3) transports the to-be-detected piece to the detection area;

The detection component (2) grabs the reference point of the to-be-detected piece;

The first position adjusting mechanism (3) adjusts the position of the to-be-detected piece to a first preset position according to the position of the reference point;

The first position adjustment mechanism (3) adjusts the position of the to-be-detected part according to a preset path, so that the detection assembly (2) detects the entire to-be-detected part in a second preset position according to preset optical parameters .
The detection method according to claim 8, wherein the detection method further comprises:

When detecting the to-be-detected part for the first time, select a plurality of process points, set a plurality of movement positions of the to-be-detected part according to the plurality of process points, save a plurality of the movement positions, and form the preset path.
The detection method according to claim 8, wherein the detection method further comprises:

When the object to be detected is detected for the first time, the vertical distance between the detection component (2) and the object to be detected is set and saved, and the optical parameters of the detection component (2) during detection are set and saved.