WO2022143223A1

WO2022143223A1 - In-line heater

Info

Publication number: WO2022143223A1
Application number: PCT/CN2021/139135
Authority: WO
Inventors: 钱诚; 周志勇; 李文亭
Original assignee: 江苏亚电科技有限公司
Priority date: 2020-12-30
Filing date: 2021-12-17
Publication date: 2022-07-07
Also published as: CN116686075A; KR20230127232A; CN112616206B; CN116686075B; CN112616206A

Abstract

An in-line heater. A cylinder (3) is divided into three chambers; each chamber is communicated with each other in sequence; a fluid needs to pass through the three chambers in sequence; and each chamber can heat, such that the fluid can be heated for a long time in a limited space. A first chamber (41) is used as a main heating chamber, which is large and can accommodate more fluids, and is also the chamber where the fluid movement is most drastic. In addition, a second chamber (42) and a third chamber (43) can moderate the fluid movement, such that the outflowing fluid is gentle.

Description

an in-line heater

technical field

The present application belongs to the technical field of wafer cleaning equipment, and in particular relates to an in-line heater.

Background technique

In the wafer cleaning process, various cleaning solutions are used, such as acid cleaning, alkali cleaning or water cleaning. At the same time, in order to improve the cleaning effect, the cleaning solution usually requires a certain temperature, such as 50-60 °C. Therefore, it is necessary to The cleaning solution is heated.

In the prior art, the heater required for wafer cleaning requires a large space and takes a long heating time, which is not conducive to the continuous online operation of the equipment.

SUMMARY OF THE INVENTION

The technical problem to be solved by the present invention is to provide an in-line heater in order to solve the deficiencies in the prior art.

The technical scheme adopted by the present invention to solve its technical problems is:

An in-line heater comprising:

The cylinder has an inlet pipe and an outlet pipe at the top and bottom of the cylinder respectively, and a partition plate is arranged in the cylinder to divide the cylinder into several chambers in the axial direction. The chambers include a first chamber and a second chamber. A chamber and a third chamber, the bottom of the first chamber has an inlet pipe, the top of the first chamber is communicated with the second chamber, the bottom of the second chamber is communicated with the third chamber, and the third chamber is The bottom is communicated with the outlet pipe; the cylinder body is also provided with an installation cavity corresponding to each chamber, and the installation cavity has openings at the top and bottom of the cylinder body;

a heater, inserted into the installation cavity, for heating the fluid in the corresponding cavity;

The shell is arranged on the outside of the cylinder.

Preferably, in the online heater of the present invention, the cross section of the first chamber is 1.40-1.60 times the cross-sectional area of the second chamber or the third chamber, and the cross-sectional area of the second chamber and the third chamber is 1.40-1.60 times. same.

Preferably, in the in-line heater of the present invention, the first chamber is surrounded by a parabolic first partition plate and the cylindrical wall of the cylinder, and the second chamber and the third chamber are respectively formed by the first partition plate, the third chamber The two partitions are enclosed by the cylinder wall.

Preferably, the in-line heater of the present invention,

The inlet duct and the installation cavity are located on one side of the first chamber midline, the inlet duct is further away from the midline of the first chamber than the installation cavity, and the inlet duct is located in the first chamber The opening of the inlet pipe is aligned with the first baffle plate, and the angle of the normal line at the intersection of the central axis of the inlet pipe opening and the first baffle plate is 30-45°, so that the fluid flowing out of the inlet pipe flows through the side of the installation cavity, Reflections passing through the first baffle recirculate around the mounting cavity once.

Preferably, in the online heater of the present invention, the heating power of the heater in the first chamber is twice the heating power of the heater in the second chamber or the third chamber.

Preferably, in the online heater of the present invention, the barrel is made of stainless steel material that is resistant to acid and alkali corrosion.

Preferably, in the in-line heater of the present invention, a thermal insulation material can be arranged in the casing.

The beneficial effects of the present invention are:

In the online heater of the present invention, the cylinder is divided into chambers, each chamber is connected in sequence, the fluid must enter the chambers in sequence, each chamber can be heated, and the fluid can be heated in a limited space. Heating for a longer period of time. The first chamber is used as the main heating chamber. The chamber is large and can accommodate more fluids, and is also the chamber with the most violent fluid movement. Meanwhile, the second chamber and the third chamber can moderate the movement of the fluid, so that the outflowing fluid is gentle.

Description of drawings

The technical solutions of the present application will be further described below with reference to the accompanying drawings and embodiments.

1 is a schematic structural diagram of an in-line heater according to an embodiment of the present application;

Fig. 2 is the structural representation that Fig. 1 removes shell;

Fig. 3 is the structural representation of the cylinder of the embodiment of the present application;

FIG. 4 is a transverse cross-sectional view of FIG. 3 .

The reference numbers in the figure are:

1 shell;

2 heaters;

3 cylinders;

5 Thermocouple installation cavity;

31 inlet pipe;

32 outlet pipes;

33 installation cavity;

35 first separator;

36 second partition;

41 first chamber;

42 second chamber;

43 third chamber.

Detailed ways

It should be noted that the embodiments in the present application and the features of the embodiments may be combined with each other in the case of no conflict.

In the description of this application, it should be understood that the terms "center", "portrait", "horizontal", "top", "bottom", "front", "rear", "left", "right", " The orientations or positional relationships indicated by vertical, horizontal, top, bottom, inner, and outer are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and The description is simplified rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be construed as limiting the scope of protection of the present application. In addition, the terms "first", "second", etc. are used for descriptive purposes only, and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, a feature defined as "first", "second", etc., may expressly or implicitly include one or more of that feature. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it may be a fixed connection or a detachable connection Connection, or integral connection; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be internal communication between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood through specific situations.

The technical solutions of the present application will be described in detail below with reference to the accompanying drawings and in conjunction with the embodiments.

Example 1

This embodiment provides an in-line heater, as shown in FIG. 1 , including:

The cylinder body 3, the top and bottom ends of the cylinder body 3 respectively have an inlet pipe 31 and an outlet pipe 32, a partition plate is arranged in the cylinder body 3 to divide the cylinder body 3 into several chambers in the axial direction, and the chambers include The first chamber 41, the second chamber 42 and the third chamber 43, the bottom of the first chamber 41 has the inlet pipe 31, the top of the first chamber 41 communicates with the second chamber 42, the second chamber 42 The bottom of the third chamber 43 is communicated with the third chamber 43 (by means of opening on the partition), and the bottom of the third chamber 43 is communicated with the outlet pipe 32; the cylinder 3 is also provided with a mounting cavity corresponding to each chamber. 33, the installation cavity 33 has openings at the top and bottom of the cylinder body 3;

The heater 2, inserted into the mounting cavity 33, is used to heat the fluid (cleaning liquid for wafer cleaning) in the corresponding chamber;

The outer casing 1 is arranged outside the cylindrical body 3 .

The first chamber 41 is further provided with a thermocouple installation chamber 5 for installing a thermocouple, and the temperature in the first chamber 41 can be known in time after the thermocouple is installed.

The fluid to be heated (various cleaning liquids) enters the first chamber 41 from the inlet pipe 31 , flows through the second chamber 42 and the third chamber 43 and flows out from the outlet pipe 32 .

The cross-section of the first chamber 41 is 1.40-1.60 times the cross-sectional area of the second chamber 42 or the third chamber 43 , and the second chamber 42 and the third chamber 43 have the same cross-sectional area.

The first chamber 41 is surrounded by the parabolic first partition 35 and the wall of the cylinder 3 , and the second chamber 42 and the third chamber 43 are respectively formed by the first partition 35 and the second partition 36 It is enclosed with the cylinder body 3 cylinder wall.

As shown in FIG. 4 , the inlet pipe 31 and the installation cavity 33 are located on the side of the middle line (L in the figure) of the first chamber 41 , and the inlet pipe 31 is further away from the middle line of the first chamber 41 , and the opening of the inlet pipe 31 is aligned with (the central axis of the inlet pipe 31 ) the first partition 35 , the angle (90-α) of the normal at the intersection of the central axis of the opening of the inlet pipe 31 and the first partition 35 is 30 -45°, so that the fluid flowing out of the inlet pipe 31 flows from the side of the installation cavity 33 (the upper part in FIG. 4 ), and the reflection through the first partition 35 flows back around the installation cavity 33 for one round (marked by the dotted line in FIG. 4 ). for the fluid flow direction), thereby improving the heat exchange efficiency.

In this embodiment, the cylinder body 3 is divided into 3 chambers, each chamber is connected in turn, the fluid must enter the 3 chambers in sequence, and each chamber can be heated, and can be heated in a limited space. The fluid is heated for a longer period of time. The first chamber 41 is used as the main heating chamber. The chamber is large and can accommodate more fluids, and is also the chamber where the fluid moves most violently. At the same time, the second chamber 42 and the third chamber 43 can moderate the movement of the fluid, so that the outflowing fluid is gentle.

The heating power of the heater 2 in the first chamber 41 is twice the heating power of the heater 2 in the second chamber 42 or the third chamber 43 .

The entire cylinder body 3 is made of stainless steel material that is resistant to acid and alkali corrosion, and a thermal insulation material can be provided in the outer casing 1 to prevent excessive heat dissipation in the cylinder body 3 .

Taking the above ideal embodiments according to the present application as inspiration, and through the above descriptions, relevant personnel can make various changes and modifications without departing from the technical idea of the present application. The technical scope of the present application is not limited to the content in the description, and the technical scope must be determined according to the scope of the claims.

Claims

An in-line heater, characterized in that, comprising:

A cylindrical body (3), the top and bottom ends of the cylindrical body (3) are respectively provided with an inlet pipe (31) and an outlet pipe (32), and a partition plate is arranged in the cylindrical body (3) to separate the cylindrical body (3) It is divided into several chambers in the axial direction, the chamber includes a first chamber (41), a second chamber (42) and a third chamber (43), and the bottom of the first chamber (41) has an inlet pipe (31) ), the top of the first chamber (41) is communicated with the second chamber (42), the bottom of the second chamber (42) is communicated with the third chamber (43), and the bottom of the third chamber (43) communicated with the outlet pipe (32); the cylindrical body (3) is also provided with a mounting cavity (33) corresponding to each chamber, and the mounting cavity (33) has openings at the top and bottom of the cylindrical body (3);

The heater (2) is inserted into the installation cavity (33) for heating the fluid in the corresponding cavity; the casing (1) is arranged outside the cylinder body (3).
The in-line heater according to claim 1, wherein the cross section of the first chamber (41) is 1.40-1.60 of the cross-sectional area of the second chamber (42) or the third chamber (43) times, the second chamber (42) and the third chamber (43) have the same cross-sectional area.
The in-line heater according to claim 2, wherein the first chamber (41) is surrounded by a parabolic first partition (35) and a cylindrical wall of the cylinder (3), and the second chamber (41) is The chamber (42) and the third chamber (43) are respectively surrounded by the first partition plate (35), the second partition plate (36) and the cylinder wall of the cylinder body (3).
The in-line heater according to claim 3, characterized in that, the inlet pipe (31) and the installation cavity (33) are located on one side of the middle line of the first chamber (41), and the inlet pipe (31) The middle line of the first chamber (41) is further away from the mounting chamber (33), and the opening of the inlet duct (31) in the first chamber (41) is aligned with the first partition (35) ), the angle of the normal at the intersection of the central axis of the opening of the inlet pipe (31) and the first partition plate (35) is 30-45°, so that the fluid flowing out of the inlet pipe (31) flows from the installation cavity (33) One side flows through, and the reflection passing through the first partition plate (35) flows back around the mounting cavity (33).
The in-line heater according to claim 1, characterized in that, the heating power of the heater (2) in the first chamber (41) is that of the second chamber (42) or the third chamber (43). 2 times the heating power of the heater (2).
The in-line heater according to claim 1, characterized in that, the cylinder body (3) is made of stainless steel material that is resistant to acid and alkali corrosion.
The in-line heater according to claim 1, characterized in that, a thermal insulation material can be arranged in the casing (1).