CN112616206B

CN112616206B - Online heater

Info

Publication number: CN112616206B
Application number: CN202011615735.7A
Authority: CN
Inventors: 钱诚; 周志勇; 李文亭
Original assignee: Jiangsu Asia Electronics Technology Co Ltd
Current assignee: Jiangsu Asia Electronics Technology Co Ltd
Priority date: 2020-12-30
Filing date: 2020-12-30
Publication date: 2023-04-21
Anticipated expiration: 2040-12-30
Also published as: CN116686075A; WO2022143223A1; KR20230127232A; CN116686075B; CN112616206A

Abstract

The application relates to an online heater, with barrel segmentation cavity, every cavity communicates in proper order, and fluid is to advance a cavity in proper order, and every cavity homoenergetic heats, can carry out longer heating to the fluid in limited space. The first chamber serves as a main heating chamber, is large, can contain more fluid and is the chamber with the most intense fluid movement. Meanwhile, the second chamber and the third chamber can alleviate the movement of the fluid, so that the flowing-out fluid is gentle.

Description

Online heater

Technical Field

The application belongs to the technical field of wafer cleaning equipment, and particularly relates to an online heater.

Background

In the wafer cleaning process, various cleaning fluids such as acid washing, alkali washing or cleaning water are used, and in order to improve the cleaning effect, the cleaning fluid is usually required to reach a certain temperature, such as 50-60 ℃, so that the cleaning fluid needs to be heated.

In the prior art, the heater for cleaning the wafer has large space and long heating time, and is unfavorable for the on-line continuous operation of the equipment.

Disclosure of Invention

The invention aims to solve the technical problems that: in order to solve the defects in the prior art, the online heater is provided.

The technical scheme adopted for solving the technical problems is as follows:

an in-line heater, comprising:

the cylinder body is internally provided with a baffle plate to divide the cylinder body into a plurality of chambers along the axial direction, the chambers comprise a first chamber, a second chamber and a third chamber, the bottom of the first chamber is provided with an inlet pipeline, the top of the first chamber is communicated with the second chamber, the bottom of the second chamber is communicated with the third chamber, and the bottom of the third chamber is communicated with the outlet pipeline; the cylinder body is also provided with a mounting cavity corresponding to each cavity, and the mounting cavity is provided with openings at the top and the bottom of the cylinder body;

a heater inserted into the installation cavity for heating fluid in the corresponding cavity;

and the shell is arranged outside the cylinder body.

Preferably, the cross section of the first chamber is 1.40-1.60 times of the cross section area of the second chamber or the third chamber, and the cross section area of the second chamber is the same as that of the third chamber.

Preferably, in the on-line heater of the present invention, the first chamber is defined by a first partition plate of a parabolic cylinder and a cylinder wall, and the second chamber and the third chamber are defined by the first partition plate, the second partition plate and the cylinder wall, respectively.

Preferably, the in-line heater of the present invention,

the inlet pipeline and the installation cavity are positioned on one side of the middle line of the first cavity, the inlet pipeline is farther away from the middle line of the first cavity than the installation cavity, the opening of the inlet pipeline in the first cavity is aligned with the first partition board, the angle of the normal line at the intersection point of the central axis of the opening of the inlet pipeline and the first partition board is 30-45 degrees, so that fluid flowing out of the inlet pipeline flows through one side of the installation cavity, and flows back around the installation cavity through the reflection of the first partition board for one circle.

Preferably, the heating power of the heater of the first chamber is 2 times of the heating power of the heater of the second chamber or the third chamber.

Preferably, the in-line heater of the present invention, the cylinder is made of stainless steel material resistant to acid and alkali corrosion.

Preferably, in the in-line heater of the present invention, a thermal insulation material may be disposed within the housing.

The beneficial effects of the invention are as follows:

according to the online heater, the cylinder body is divided into the chambers, each chamber is sequentially communicated, fluid sequentially enters the chambers, each chamber can be heated, and the fluid can be heated for a long time in a limited space. The first chamber serves as a main heating chamber, is large, can contain more fluid and is the chamber with the most intense fluid movement. Meanwhile, the second chamber and the third chamber can alleviate the movement of the fluid, so that the flowing-out fluid is gentle.

Drawings

The technical scheme of the application is further described below with reference to the accompanying drawings and examples.

FIG. 1 is a schematic diagram of an in-line heater according to an embodiment of the present application;

FIG. 2 is a schematic illustration of the structure of FIG. 1 with the housing removed;

FIG. 3 is a schematic structural view of a cartridge according to an embodiment of the present application;

fig. 4 is a transverse cross-sectional view of fig. 3.

The reference numerals in the figures are:

1. a housing;

2. a heater;

3. a cylinder;

5. a thermocouple installation cavity;

31. an inlet duct;

32. an outlet conduit;

33. a mounting cavity;

35. a first separator;

36. a second separator;

41. a first chamber;

42. a second chamber;

43. and a third chamber.

Detailed Description

It should be noted that, in the case of no conflict, the embodiments and features in the embodiments may be combined with each other.

In the description of the present application, it should be understood that the terms "center," "longitudinal," "transverse," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, merely to facilitate description of the present application and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the scope of protection of the present application. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the invention, unless otherwise indicated, the meaning of "a plurality" is two or more.

In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the terms in this application can be understood by those of ordinary skill in the art in a specific context.

The technical solutions of the present application will be described in detail below with reference to the accompanying drawings in combination with embodiments.

Example 1

The present embodiment provides an in-line heater, as shown in fig. 1, including:

the cylinder body 3, the top end and the bottom end of the cylinder body 3 are respectively provided with an inlet pipeline 31 and an outlet pipeline 32, a partition plate is arranged in the cylinder body 3 to divide the cylinder body 3 into a plurality of chambers along the axial direction, each chamber comprises a first chamber 41, a second chamber 42 and a third chamber 43, the bottom of the first chamber 41 is provided with the inlet pipeline 31, the top of the first chamber 41 is communicated with the second chamber 42, the bottom of the second chamber 42 is communicated with the third chamber 43 (communicated in a mode of opening on the partition plate), and the bottom of the third chamber 43 is communicated with the outlet pipeline 32; a mounting cavity 33 is further arranged in each cavity of the cylinder body 3, and the mounting cavity 33 is provided with openings at the top and the bottom of the cylinder body 3;

a heater 2 inserted into the mounting chamber 33 for heating a fluid (wafer cleaning liquid) in the corresponding chamber;

and a shell 1 arranged outside the cylinder 3.

The first chamber 41 is also provided with a thermocouple installation cavity 5 for installing a thermocouple, and the temperature in the first chamber 41 can be known in time after the thermocouple is installed.

Fluid to be heated (various cleaning fluids) enters the first chamber 41 from the inlet conduit 31, flows through the second chamber 42 and the third chamber 43, and exits from the outlet conduit 32.

The cross section of the first chamber 41 is 1.40-1.60 times of the cross section area of the second chamber 42 or the third chamber 43, and the cross section area of the second chamber 42 is the same as that of the third chamber 43.

The first chamber 41 is defined by the first partition 35 of the parabolic cylinder and the wall of the cylinder 3, and the second chamber 42 and the third chamber 43 are defined by the first partition 35, the second partition 36 and the wall of the cylinder 3 respectively.

As shown in fig. 4, the inlet duct 31 and the installation cavity 33 are located at the side of the middle line (L in the drawing) of the first chamber 41, the inlet duct 31 is further away from the middle line of the first chamber 41, and the inlet duct 31 opening is aligned with (the central axis of the inlet duct 31) the first partition 35, and the angle (90- α) of the normal line at the intersection of the central axis of the inlet duct 31 opening and the first partition 35 is 30-45 °, so that the fluid flowing out of the inlet duct 31 flows through the installation cavity 33 side (upper in fig. 4), and flows back around the installation cavity 33 by one round (as marked by the dotted line in fig. 4) through the reflection of the first partition 35, thereby improving the heat exchange efficiency.

In this embodiment, 3 cavities are cut into with barrel 3, and every cavity communicates in proper order, and fluid is to advance 3 cavities in proper order, and every cavity homoenergetic heats, can carry out longer heating to the fluid in limited space. The first chamber 41 acts as the primary heating chamber and is large enough to hold more fluid, also the chamber with the most intense fluid movement. At the same time, the second chamber 42 and the third chamber 43 can alleviate the movement of the fluid, and make the outflow of the fluid gentle.

The heating power of the heater 2 of the first chamber 41 is 2 times that of the heater 2 of the second chamber 42 or the third chamber 43.

The whole barrel 3 is made of acid and alkali corrosion resistant stainless steel materials, and a heat insulation material can be arranged in the shell 1 to prevent excessive heat dissipation in the barrel 3.

With the above-described preferred embodiments according to the present application as a teaching, the related workers can make various changes and modifications without departing from the scope of the technical idea of the present application. The technical scope of the present application is not limited to the contents of the specification, and must be determined according to the scope of claims.

Claims

1. An in-line heater, comprising:

the device comprises a barrel body (3), wherein an inlet pipeline (31) is arranged at the bottom end of the barrel body (3), an outlet pipeline (32) is arranged at the top end of the barrel body (3), a partition plate is arranged in the barrel body (3) to divide the barrel body (3) into a plurality of chambers along the axial direction along the cross section of the barrel body, each chamber comprises a first chamber (41), a second chamber (42) and a third chamber (43), the inlet pipeline (31) is arranged at the bottom of the first chamber (41), the top of the first chamber (41) is communicated with the second chamber (42), the bottom of the second chamber (42) is communicated with the third chamber (43), and the top of the third chamber (43) is communicated with the outlet pipeline (32); the cylinder body (3) is provided with a mounting cavity (33) corresponding to each cavity, the mounting cavity (33) is provided with openings at the top and the bottom of the cylinder body (3), fluid to be heated enters the first cavity (41) from the inlet pipeline (31), then sequentially flows through the second cavity (42) and the third cavity (43), and finally flows out from the outlet pipeline (32);

a heater (2) inserted into the installation cavity (33) for heating the fluid in the corresponding cavity;

the shell (1) is arranged outside the cylinder body (3);

the cross-sectional area of the first chamber (41) is 1.40-1.60 times of that of the second chamber (42) or the third chamber (43), and the cross-sectional area of the second chamber (42) is the same as that of the third chamber (43);

the first chamber (41) is formed by encircling a first baffle plate (35) of the parabolic cylinder with the wall of the cylinder body (3), and the second chamber (42) and the third chamber (43) are respectively formed by encircling the first baffle plate (35), a second baffle plate (36) and the wall of the cylinder body (3);

the inlet pipeline (31) and the mounting cavity (33) are positioned on the same side relative to the middle line of the first cavity (41), the inlet pipeline (31) is far away from the middle line of the first cavity (41) compared with the mounting cavity (33), an opening of the inlet pipeline (31) in the first cavity (41) is aligned with the first partition plate (35), the normal line of the first partition plate (35) at the intersection point of the central axis of the opening of the inlet pipeline (31) and the first partition plate (35) forms an included angle of 30-45 degrees with the central axis, so that fluid flowing out of the inlet pipeline (31) flows from the side of the mounting cavity (33) and flows back around the mounting cavity (33) through reflection of the first partition plate (35) for one circle.

2. The in-line heater according to claim 1, characterized in that the heating power of the heater (2) of the first chamber (41) is 2 times the heating power of the heater (2) of the second chamber (42) or the third chamber (43).

3. An in-line heater according to claim 1, characterized in that the cylinder (3) is made of stainless steel material resistant to acid and alkali corrosion.

4. An in-line heater according to claim 1, characterized in that a thermal insulation material is provided in the housing (1).