CN114935211B - Cleaning fluid heating cylinder - Google Patents
Cleaning fluid heating cylinder Download PDFInfo
- Publication number
- CN114935211B CN114935211B CN202210161361.9A CN202210161361A CN114935211B CN 114935211 B CN114935211 B CN 114935211B CN 202210161361 A CN202210161361 A CN 202210161361A CN 114935211 B CN114935211 B CN 114935211B
- Authority
- CN
- China
- Prior art keywords
- heating
- cleaning
- cleaning solution
- cylinder
- cleaning fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 108
- 238000004140 cleaning Methods 0.000 title claims abstract description 106
- 239000012530 fluid Substances 0.000 title claims description 30
- 239000007788 liquid Substances 0.000 claims abstract description 31
- 230000002093 peripheral effect Effects 0.000 claims description 11
- 238000005192 partition Methods 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
- F24H1/12—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium
- F24H1/14—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form
- F24H1/142—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form using electric energy supply
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H9/00—Details
- F24H9/0005—Details for water heaters
- F24H9/001—Guiding means
- F24H9/0015—Guiding means in water channels
- F24H9/0021—Sleeves surrounding heating elements or heating pipes, e.g. pipes filled with heat transfer fluid, for guiding heated liquid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H9/00—Details
- F24H9/18—Arrangement or mounting of grates or heating means
- F24H9/1809—Arrangement or mounting of grates or heating means for water heaters
- F24H9/1818—Arrangement or mounting of electric heating means
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
- Incineration Of Waste (AREA)
Abstract
The application relates to a cleaning solution heating cylinder, a guide plate divides a cleaning solution inlet into two parts, so that the cleaning solution flowing in and out of the cleaning solution inlet is divided into two parts, the guide plate divides the cleaning solution flowing in from the cleaning solution inlet, the entering cleaning solution is prevented from directly striking a heating rod, the flowing resistance is reduced, and the inflow speed of the cleaning solution is improved. Meanwhile, the two parts of cleaning liquid can well perform full heat exchange with the two parts of heating rods.
Description
Technical Field
The application belongs to the technical field of auxiliary equipment for cleaning wafers, and particularly relates to a cleaning solution heating cylinder.
Background
During wafer cleaning, the cleaning solution needs to be heated, for example, to a specific temperature of 60-80 ℃. A common cleaning solution heating cylinder is a cylinder body with inlets and outlets at two ends, and when the cleaning solution passes through the cylinder body, the cleaning solution is heated by a heating rod in the cylinder body. However, when the cleaning liquid just flows into the heating cylinder, the cleaning liquid is faster, and impacts the heating rod in the heating cylinder, so that the flow speed of the fluid is delayed by the heating rod and the flow is not smooth, meanwhile, the flow channel is usually arranged at will, the flow process of the cleaning liquid in the heating cylinder is more random, and the heat from the heating cylinder can not be well received.
Disclosure of Invention
The invention aims to solve the technical problems that: in order to solve the defects in the prior art, the cleaning solution heating cylinder capable of guiding the flow of the cleaning solution to enable the flow to be smoother is provided.
The technical scheme adopted for solving the technical problems is as follows:
a cleaning solution heating cartridge comprising:
The cleaning device comprises a cylinder body, a cleaning fluid inlet and a cleaning fluid outlet, wherein the cylinder body is internally provided with a cavity, the cavity is internally provided with a plurality of clapboards so as to divide the cavity into a plurality of chambers along the longitudinal direction, and the clapboards are provided with passage openings so as to be communicated with adjacent chambers;
the heating rod is inserted into the cleaning liquid heating cylinder and comprises a middle heating rod arranged in the center of the heating cylinder and four heating rods arranged around the middle heating rod;
The cleaning fluid inlet injects cleaning fluid into the cavity of the cylinder along the tangential direction of the outer edge of the cylinder, a guide plate is arranged in the cavity where the cleaning fluid inlet is positioned, the guide plate is positioned on one side, close to the cleaning fluid inlet, of the heating rod opposite to the cleaning fluid inlet, and the guide plate can divide the cleaning fluid flowing into the cleaning fluid inlet into two parts.
Preferably, the cleaning solution heating cylinder has 5 peripheral heating rods and is uniformly distributed around the middle heating rod by taking the center of the middle heating rod as the center of a circle.
Preferably, in the cleaning solution heating cylinder of the present invention, the flow guide plate is capable of dividing the cleaning solution flowing in from the cleaning solution inlet into two parts, and the ratio of the cross sections of the two parts of the flow guide plate is 1:1.5-2.5.
Preferably, in the cleaning solution heating cylinder of the present invention, the guide plate is an arc surface.
Preferably, in the cleaning solution heating cylinder, the passage openings formed in the partition plates of the adjacent chambers are respectively positioned at two sides of the cylinder body.
Preferably, in the cleaning solution heating cylinder, a heating rod is arranged in the middle of the channel opening, and more than half of the heating rod is positioned at the hollowed-out part of the channel opening.
Preferably, the cleaning liquid heating cylinder is provided with a plurality of variable frequency heating rods and fixed frequency heating rods.
Preferably, the cleaning solution heating cylinder of the invention has the advantages that the middle heating rod and the peripheral heating rods which are not arranged at the passage opening are fixed-frequency heating rods, and the peripheral heating rods arranged at the passage opening are variable-frequency heating rods.
The beneficial effects of the invention are as follows:
According to the cleaning solution heating cylinder, the guide plate divides the cleaning solution inlet into two parts, so that the cleaning solution flowing in and out of the cleaning solution inlet is divided into two parts, the guide plate divides the cleaning solution flowing in from the cleaning solution inlet, the entering cleaning solution is prevented from directly striking the heating rod, the flowing resistance is reduced, and the inflow speed of the cleaning solution is improved. Meanwhile, the two parts of cleaning liquid can well perform full heat exchange with the two parts of heating rods.
Drawings
The technical scheme of the application is further described below with reference to the accompanying drawings and examples.
FIG. 1 is a schematic view of a cleaning solution heating cartridge according to an embodiment of the present application;
FIG. 2 is a longitudinal cross-sectional view of a cleaning solution heating cartridge according to an embodiment of the present application;
FIG. 3 is a cross-sectional view of a cleaning solution heating cartridge in accordance with an embodiment of the present application.
The reference numerals in the figures are:
1. a cylinder;
2. a heating rod;
11. A cleaning liquid inlet;
12. a cleaning liquid outlet;
13. A partition plate;
14. a passage opening;
15. A deflector;
21. An intermediate heating rod;
22. the surrounding is heated.
Detailed Description
It should be noted that, without conflict, the embodiments of the present application and features of the embodiments may be combined with each other.
In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the drawings, are merely for convenience in describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the scope of the present application. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the application, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art in a specific case.
The technical scheme of the present application will be described in detail below with reference to the accompanying drawings in combination with embodiments.
Example 1
The present embodiment provides a cleaning solution heating cylinder, as shown in fig. 1, including:
The cleaning device comprises a cylinder body 1, wherein a cavity is formed in the cylinder body 1, a cleaning fluid inlet 11 and a cleaning fluid outlet 12 are formed in the cylinder body 1, a plurality of partition plates 13 are arranged in the cavity to divide the cavity into a plurality of chambers along the longitudinal direction, and channel openings 14 are formed in the partition plates 13 to be communicated with adjacent chambers;
The heating rod 2 is inserted into the cleaning liquid heating cylinder and comprises a middle heating rod 21 arranged in the center of the heating cylinder and 5 peripheral heating rods 22 arranged around the middle heating rod 21 as shown in fig. 1;
The cleaning fluid inlet 11 injects cleaning fluid into the cavity of the cylinder 1 along the tangential direction of the outer edge of the cylinder 1, a guide plate 15 is arranged in the cavity where the cleaning fluid inlet 11 is located, the guide plate 15 is located on one side, close to the cleaning fluid inlet 11, of the heating rod 2 opposite to the cleaning fluid inlet 11, the guide plate 15 can divide the cleaning fluid flowing into the cleaning fluid inlet 11 into two parts, and the ratio of the cross sections of the two parts of the guide plate 15 is 1:1.5-2.5; namely, in the figure, S1: s2 is 1:1.5-2.5, as shown in FIG. 3, so that a part of the cleaning liquid runs downwards and a part runs upwards, and the flow guide plate 15 is divided into the upper part and the lower part according to the area ratio of the 'river basin'. The connecting line of the centers of the two heating rods 2 is taken as a boundary, S1 is the area of the lower half part, and S2 is the area of the upper half part.
In this embodiment, the flow guide plate 15 divides the cleaning liquid inlet 11 into two parts, so that the cleaning liquid flowing in and out of the cleaning liquid inlet 11 is divided into two parts, the flow guide plate 15 divides the cleaning liquid flowing in from the cleaning liquid inlet 11, prevents the entering cleaning liquid from directly striking the heating rod 2, reduces the flow resistance, and improves the cleaning liquid inflow speed. At the same time, the two parts of cleaning liquid can well perform sufficient heat exchange with the two parts of heating rod 2.
Further, the passage openings 14 formed in the partition 13 of the adjacent chamber are respectively located at two sides of the cylinder, for example, in fig. 3, the passage opening 14 of the chamber where the cleaning liquid inlet 11 is located at the upper right, and then the passage opening 14 of the next chamber adjacent to the chamber is located at the lower left. The passage openings 14 on both sides allow the cleaning liquid to flow through the entire chamber, so that the cleaning liquid is heated more sufficiently.
Further, the heating rod 2 is arranged in the middle of the channel opening 14, and more than half of the heating rod 2 is positioned at the hollow part of the channel opening 14. By this arrangement, the cleaning liquid flowing through the passage port 14 can be heated by the heating rod 2, and the heating efficiency of the peripheral heating rod 22 can be improved.
Further, the heating rod 2 is provided with a plurality of variable frequency heating rods and fixed frequency heating rods. The middle heating rod 21 and the peripheral heating rods 22 which are not arranged at the passage opening 14 are fixed-frequency heating rods, and the peripheral heating rods 22 arranged at the passage opening 14 are variable-frequency heating rods. The variable-frequency heating rod can adjust heating power, the heater carries out fixed frequency to a set temperature, and then final temperature control is carried out through the variable-frequency heater. The fixed frequency heater is low in price, high in power and high in heating speed, but final temperature control is inaccurate, and the variable frequency heater can change heating power at any time, so that temperature control is more accurate, the variable frequency heater is suitable for controlling final temperature, and meanwhile, the variable frequency heater is arranged at the passage opening 14, and when cleaning liquid flows through the passage opening 14, heat exchange can be better generated with the variable frequency heater, so that final temperature control is more sensitive.
Example 2
A cleaning liquid heating apparatus is composed of two or more cleaning liquid heating cylinders of embodiment 1 in parallel.
With the above-described preferred embodiments according to the present application as a teaching, the worker skilled in the art could make various changes and modifications without departing from the scope of the technical idea of the present application. The technical scope of the present application is not limited to the contents of the specification, and must be determined according to the scope of claims.
Claims (7)
1. A cleaning solution heating cartridge comprising:
the cleaning device comprises a cylinder body (1), wherein a cavity is formed in the cylinder body (1), a cleaning fluid inlet (11) and a cleaning fluid outlet (12) are formed in the cylinder body (1), a plurality of partition plates (13) are arranged in the cavity to divide the cavity into a plurality of chambers along the longitudinal direction, and channel ports (14) are formed in the partition plates (13) to be communicated with adjacent chambers;
the heating rod (2) is inserted into the cleaning liquid heating cylinder and comprises an intermediate heating rod (21) arranged in the center of the heating cylinder and four-side heating rods (22) arranged around the intermediate heating rod (21);
the cleaning fluid inlet (11) injects cleaning fluid into the cavity of the cylinder (1) along the tangential direction of the outer edge of the cylinder (1), a guide plate (15) is arranged in the cavity where the cleaning fluid inlet (11) is positioned, the guide plate (15) is positioned on one side, close to the cleaning fluid inlet (11), of the heating rod (2) opposite to the cleaning fluid inlet (11), and the guide plate (15) can divide the cleaning fluid flowing into the cleaning fluid inlet (11) into two parts;
The middle of the channel opening (14) is provided with a heating rod (2), and more than half of the heating rod (2) is positioned at the hollow part of the channel opening (14).
2. The cleaning solution heating cylinder according to claim 1, wherein the number of the peripheral heating rods (22) is 5, and the peripheral heating rods are uniformly distributed around the central heating rod (21) by taking the center of the central heating rod (21) as the center of a circle.
3. A cleaning liquid heating cartridge according to claim 2, characterized in that the deflector (15) is capable of dividing the cleaning liquid flowing in from the cleaning liquid inlet (11) into two parts, the ratio of the cross sections of the two parts of the deflector (15) being 1:1.5-2.5.
4. A cleaning solution heating cartridge according to claim 3, characterized in that the deflector (15) is an arcuate surface.
5. A cleaning solution heating cartridge according to claim 1, characterized in that the passage openings (14) provided in the partition plates (13) of adjacent chambers are located on both sides of the cartridge body, respectively.
6. The cleaning solution heating cartridge according to claim 1, characterized in that the heating rod (2) has several variable frequency heating rods and fixed frequency heating rods.
7. The cleaning liquid heating cylinder according to claim 1, characterized in that the intermediate heating rod (21) and the peripheral heating rods (22) not arranged at the passage opening (14) are constant-frequency heating rods, and the peripheral heating rods (22) arranged at the passage opening (14) are variable-frequency heating rods.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210161361.9A CN114935211B (en) | 2022-02-22 | 2022-02-22 | Cleaning fluid heating cylinder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210161361.9A CN114935211B (en) | 2022-02-22 | 2022-02-22 | Cleaning fluid heating cylinder |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114935211A CN114935211A (en) | 2022-08-23 |
| CN114935211B true CN114935211B (en) | 2024-04-30 |
Family
ID=82862026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210161361.9A Active CN114935211B (en) | 2022-02-22 | 2022-02-22 | Cleaning fluid heating cylinder |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114935211B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN209523265U (en) * | 2018-11-28 | 2019-10-22 | 上海肇民新材料科技股份有限公司 | A kind of heater and the toilet seat equipped with the heater |
| CN112616206A (en) * | 2020-12-30 | 2021-04-06 | 江苏亚电科技有限公司 | On-line heater |
-
2022
- 2022-02-22 CN CN202210161361.9A patent/CN114935211B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN209523265U (en) * | 2018-11-28 | 2019-10-22 | 上海肇民新材料科技股份有限公司 | A kind of heater and the toilet seat equipped with the heater |
| CN112616206A (en) * | 2020-12-30 | 2021-04-06 | 江苏亚电科技有限公司 | On-line heater |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114935211A (en) | 2022-08-23 |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information |
Address after: 225500 No. 151, Keji Avenue, Sanshui street, Jiangyan District, Taizhou City, Jiangsu Province Applicant after: Jiangsu Yadian Technology Co.,Ltd. Address before: 225500 No. 151, Keji Avenue, Sanshui street, Jiangyan District, Taizhou City, Jiangsu Province Applicant before: Jiangsu Yadian Technology Co.,Ltd. |
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| CB02 | Change of applicant information | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |