CN112616206A

CN112616206A - On-line heater

Info

Publication number: CN112616206A
Application number: CN202011615735.7A
Authority: CN
Inventors: 钱诚; 周志勇; 李文亭
Original assignee: Jiangsu Asia Electronics Technology Co Ltd
Current assignee: Jiangsu Asia Electronics Technology Co Ltd
Priority date: 2020-12-30
Filing date: 2020-12-30
Publication date: 2021-04-06
Anticipated expiration: 2040-12-30
Also published as: CN116686075A; KR20230127232A; WO2022143223A1; CN112616206B; CN116686075B

Abstract

The application relates to an online heater, cut apart a cavity with the barrel, every cavity communicates in proper order, and fluid will advance a cavity in proper order, and every cavity homoenergetic heats, can carry out the heating of longer time to the fluid in limited space. The first chamber is used as a main heating chamber, and the chamber is large and can contain more fluid, and is also the chamber with the most violent fluid movement. Meanwhile, the second chamber and the third chamber can moderate the movement of the fluid, so that the fluid flowing out is gentle.

Description

On-line heater

Technical Field

The application belongs to the technical field of wafer cleaning equipment, and particularly relates to an online heater.

Background

During the wafer cleaning process, various cleaning solutions, such as acid cleaning, alkali cleaning, or water cleaning, are used, and in order to improve the cleaning effect, the cleaning solution is usually required to reach a certain temperature, such as 50-60 ℃, and therefore, the cleaning solution needs to be heated.

In the prior art, a heater required by wafer cleaning needs a large space and long heating time, and is not beneficial to the online continuous operation of equipment.

Disclosure of Invention

The technical problem to be solved by the invention is as follows: in order to solve the defects in the prior art, the online heater is provided.

The technical scheme adopted by the invention for solving the technical problems is as follows:

an in-line heater comprising:

the device comprises a cylinder, wherein the top end and the bottom end of the cylinder are respectively provided with an inlet pipeline and an outlet pipeline, a partition plate is arranged in the cylinder to divide the cylinder into a plurality of chambers along the axial direction, the chambers comprise a first chamber, a second chamber and a third chamber, the bottom of the first chamber is provided with the inlet pipeline, the top of the first chamber is communicated with the second chamber, the bottom of the second chamber is communicated with the third chamber, and the bottom of the third chamber is communicated with the outlet pipeline; the cylinder body is also provided with an installation cavity corresponding to each cavity, and the installation cavities are provided with openings at the top and the bottom of the cylinder body;

a heater inserted into the installation chamber for heating the fluid in the corresponding chamber;

the shell is arranged on the outer side of the cylinder body.

Preferably, in the in-line heater of the present invention, the cross section of the first chamber is 1.40 to 1.60 times the cross section area of the second chamber or the third chamber, and the cross section area of the second chamber is the same as that of the third chamber.

Preferably, in the online heater of the present invention, the first chamber is defined by a first partition plate of the parabolic cylinder and the cylinder wall, and the second chamber and the third chamber are defined by the first partition plate, the second partition plate and the cylinder wall respectively.

Preferably, the in-line heater of the present invention,

the inlet pipeline and the installation cavity are located on one side of the middle line of the first cavity, the inlet pipeline is farther away from the middle line of the first cavity than the installation cavity, the opening of the inlet pipeline located in the first cavity is aligned with the first partition plate, and the angle of the normal line of the intersection point of the central axis of the opening of the inlet pipeline and the first partition plate is 30-45 degrees, so that fluid flowing out of the inlet pipeline flows through one side of the installation cavity and flows back for a circle around the installation cavity through reflection of the first partition plate.

Preferably, in the in-line heater of the present invention, the heating power of the heater of the first chamber is 2 times of the heating power of the heater of the second chamber or the third chamber.

Preferably, in the in-line heater of the present invention, the cylinder is made of an acid and alkali corrosion resistant stainless steel material.

Preferably, in the in-line heater of the present invention, a thermal insulation material may be disposed in the housing.

The invention has the beneficial effects that:

according to the on-line heater, the cylinder is divided into the chambers, each chamber is communicated in sequence, fluid needs to enter the chambers in sequence, each chamber can be heated, and the fluid can be heated for a long time in a limited space. The first chamber is used as a main heating chamber, and the chamber is large and can contain more fluid, and is also the chamber with the most violent fluid movement. Meanwhile, the second chamber and the third chamber can moderate the movement of the fluid, so that the fluid flowing out is gentle.

Drawings

The technical solution of the present application is further explained below with reference to the drawings and the embodiments.

FIG. 1 is a schematic diagram of an in-line heater according to an embodiment of the present application;

FIG. 2 is a schematic view of the housing of FIG. 1 with the housing removed;

FIG. 3 is a schematic structural view of a cartridge according to an embodiment of the present application;

fig. 4 is a transverse cross-sectional view of fig. 3.

The reference numbers in the figures are:

1, a shell;

2, a heater;

3, a cylinder body;

5, a thermocouple installation cavity;

31 an inlet conduit;

32 an outlet conduit;

33 mounting a cavity;

35 a first partition plate;

36 a second separator plate;

41 a first chamber;

42 a second chamber;

43 a third chamber.

Detailed Description

It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.

In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientation or positional relationship indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be considered limiting of the scope of the present application. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the invention, the meaning of "a plurality" is two or more unless otherwise specified.

In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art through specific situations.

The technical solutions of the present application will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.

Example 1

The present embodiment provides an in-line heater, as shown in fig. 1, including:

the cylinder 3 is provided with an inlet pipeline 31 and an outlet pipeline 32 at the top end and the bottom end of the cylinder 3 respectively, a partition plate is arranged in the cylinder 3 to divide the cylinder 3 into a plurality of chambers along the axial direction, the chambers comprise a first chamber 41, a second chamber 42 and a third chamber 43, the inlet pipeline 31 is arranged at the bottom of the first chamber 41, the top of the first chamber 41 is communicated with the second chamber 42, the bottom of the second chamber 42 is communicated with the third chamber 43 (communicated in an opening mode on the partition plate), and the bottom of the third chamber 43 is communicated with the outlet pipeline 32; the cylinder 3 is also provided with an installation cavity 33 corresponding to each cavity, and the installation cavity 33 is provided with openings at the top and the bottom of the cylinder 3;

a heater 2 inserted into the mounting chamber 33 for heating a fluid (wafer cleaning solution) in the corresponding chamber;

and the shell 1 is arranged outside the cylinder 3.

The first chamber 41 is further provided with a thermocouple installation cavity 5 for installing a thermocouple, and the temperature in the first chamber 41 can be known in time after the thermocouple is installed.

The fluid to be heated (various types of cleaning fluid) enters the first chamber 41 from the inlet conduit 31, flows through the second chamber 42 and the third chamber 43, and exits from the outlet conduit 32.

The cross section of the first chamber 41 is 1.40-1.60 times of the cross section of the second chamber 42 or the third chamber 43, and the cross section of the second chamber 42 is the same as that of the third chamber 43.

The first chamber 41 is defined by the first partition 35 of the parabolic cylinder and the cylinder wall of the cylinder 3, and the second chamber 42 and the third chamber 43 are defined by the first partition 35, the second partition 36 and the cylinder wall of the cylinder 3, respectively.

As shown in fig. 4, the inlet pipe 31 and the installation cavity 33 are located on one side of a middle line (L in the figure) of the first chamber 41, the inlet pipe 31 is farther away from the middle line of the first chamber 41, the inlet pipe 31 is opened to align with the first partition plate 35 (a middle axis of the inlet pipe 31), and an angle (90- α) of a normal line at an intersection point of the middle axis of the inlet pipe 31 and the first partition plate 35 is 30-45 °, so that the fluid flowing out of the inlet pipe 31 flows through one side (upper side in fig. 4) of the installation cavity 33 and flows back around the installation cavity 33 by reflection of the first partition plate 35 (the dotted line in fig. 4 marks as a fluid flow direction), thereby improving heat exchange efficiency.

In this embodiment, divide 3 cavities with barrel 3, every cavity communicates in proper order, and 3 cavities are advanced in proper order to the fluid, and every cavity homoenergetic heats, can carry out the heating of longer time to the fluid in limited space. The first chamber 41 acts as the main heating chamber, which is large and can hold more fluid, and is the chamber in which the fluid moves most vigorously. At the same time, the second chamber 42 and the third chamber 43 can moderate the movement of the fluid, making the fluid flow out gentle.

The heating power of the heater 2 of the first chamber 41 is 2 times of the heating power of the heater 2 of the second chamber 42 or the third chamber 43.

The whole barrel 3 is made of acid and alkali corrosion resistant stainless steel materials, and heat insulation materials can be arranged in the shell 1 to prevent heat in the barrel 3 from excessively dissipating.

In light of the foregoing description of the preferred embodiments according to the present application, it is to be understood that various changes and modifications may be made without departing from the spirit and scope of the invention. The technical scope of the present application is not limited to the contents of the specification, and must be determined according to the scope of the claims.

Claims

1. An in-line heater, comprising:

the device comprises a cylinder body (3), wherein the top end and the bottom end of the cylinder body (3) are respectively provided with an inlet pipeline (31) and an outlet pipeline (32), a partition plate is arranged in the cylinder body (3) to divide the cylinder body (3) into a plurality of chambers along the axial direction, each chamber comprises a first chamber (41), a second chamber (42) and a third chamber (43), the inlet pipeline (31) is arranged at the bottom of the first chamber (41), the top of the first chamber (41) is communicated with the second chamber (42), the bottom of the second chamber (42) is communicated with the third chamber (43), and the bottom of the third chamber (43) is communicated with the outlet pipeline (32); the cylinder (3) is also provided with an installation cavity (33) corresponding to each cavity, and the installation cavity (33) is provided with openings at the top and the bottom of the cylinder (3);

a heater (2) inserted into the mounting chamber (33) for heating the fluid in the corresponding chamber;

the shell (1) is arranged on the outer side of the cylinder body (3).

2. The in-line heater according to claim 1, wherein the cross-section of the first chamber (41) is 1.40-1.60 times the cross-section of the second chamber (42) or the third chamber (43), the cross-section of the second chamber (42) being the same as the cross-section of the third chamber (43).

3. The in-line heater according to claim 2, characterized in that the first chamber (41) is enclosed by a first partition (35) of parabolic cylinder and the cylinder wall of the cylinder (3), and the second chamber (42) and the third chamber (43) are enclosed by a first partition (35), a second partition (36) and the cylinder wall of the cylinder (3), respectively.

4. The in-line heater of claim 3,

the inlet pipeline (31) and the installation cavity (33) are located on one side of a middle line of the first cavity (41), the inlet pipeline (31) is farther away from the middle line of the first cavity (41) than the installation cavity (33), an opening of the inlet pipeline (31) in the first cavity (41) is aligned with the first partition plate (35), an angle of a normal line at an intersection point of a central axis of the opening of the inlet pipeline (31) and the first partition plate (35) is 30-45 degrees, so that fluid flowing out of the inlet pipeline (31) flows through one side of the installation cavity (33), and flows back around the installation cavity (33) for one circle through reflection of the first partition plate (35).

5. The in-line heater according to any of claims 1 to 4, wherein the heating power of the heater (2) of the first chamber (41) is 2 times the heating power of the heater (2) of the second chamber (42) or the third chamber (43).

6. The in-line heater according to any of claims 1 to 5, wherein the cylinder (3) is made of an acid and alkali corrosion resistant stainless steel material.

7. The in-line heater according to any of claims 1 to 6, wherein a thermal insulation material is arranged in the housing (1).