WO2022107686A1 - Appareil d'alimentation électrique, système, appareil d'exposition et procédé de production d'article - Google Patents

Appareil d'alimentation électrique, système, appareil d'exposition et procédé de production d'article Download PDF

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Publication number
WO2022107686A1
WO2022107686A1 PCT/JP2021/041653 JP2021041653W WO2022107686A1 WO 2022107686 A1 WO2022107686 A1 WO 2022107686A1 JP 2021041653 W JP2021041653 W JP 2021041653W WO 2022107686 A1 WO2022107686 A1 WO 2022107686A1
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WIPO (PCT)
Prior art keywords
power
power supply
unit
units
control information
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PCT/JP2021/041653
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English (en)
Japanese (ja)
Inventor
泰弘 茂木
Original Assignee
キヤノン株式会社
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Application filed by キヤノン株式会社 filed Critical キヤノン株式会社
Priority to KR1020237018910A priority Critical patent/KR20230104238A/ko
Priority to CN202180076980.1A priority patent/CN116547879A/zh
Publication of WO2022107686A1 publication Critical patent/WO2022107686A1/fr

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
    • H02J1/00—Circuit arrangements for dc mains or dc distribution networks
    • H02J1/10—Parallel operation of dc sources
    • H02J1/102—Parallel operation of dc sources being switching converters
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70991—Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
    • H02J1/00—Circuit arrangements for dc mains or dc distribution networks
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
    • H02J1/00—Circuit arrangements for dc mains or dc distribution networks
    • H02J1/10—Parallel operation of dc sources

Definitions

  • the present invention relates to a power supply device, a system, an exposure device, and an article manufacturing method.
  • Some industrial equipment is equipped with a standard unit group that meets the basic specifications and an optional unit group that provides functional expansion that can be selected by the customer.
  • some industrial equipment is equipped with units developed according to the individual needs of the customer.
  • the installation environment ambient temperature, humidity, altitude
  • equipment cooling water temperature
  • the power consumption used for environmental control may change depending on the floor strength of the place where the industrial equipment is installed.
  • each unit may differ in the process from loading the workpiece in the exposure sequence to alignment measurement, repeating scan exposure, and loading the workpiece. Therefore, the timing of the peak of the consumed power may differ depending on the exposure sequence.
  • a measurement system such as an alignment scope and an off-axis scope consumes a large amount of power during measurement but hardly consumes during exposure.
  • the original plate drive mechanism that drives the original plate
  • the substrate drive mechanism that drives the substrate, which consumes almost no power during measurement but consumes a large amount of power during exposure. It is desirable to be able to supply power so that the load becomes uniform after understanding the characteristics of each unit.
  • the unit has only a standard configuration, prepare a power supply suitable for it based on the design data considering the power consumption specifications of each unit and the sequence control executed by the software that controls the industrial equipment. It is possible. However, if a power supply system for industrial equipment is constructed on the premise that all options are used, the surplus power of the power supply is large in the case of industrial equipment without an option configuration. A configuration with a large surplus power is not desirable from the viewpoint of energy saving because the power efficiency is lowered. Moreover, since the operation of the standard unit differs depending on whether the option configuration is present or not, the power consumption of the standard unit itself may fluctuate.
  • Patent Document 1 describes a power distribution control circuit and a server distribution control circuit.
  • the power distribution control circuit obtains the estimated power value from the server device, it sends a switching instruction to externally output the built-in power supply to the server device with low power consumption, and sends a switching instruction to the server device with high power consumption. Send a switching instruction to receive the built-in power output output externally.
  • the server distribution control circuit generates distribution information indicating how much surplus power is allocated to which server, and sends it to the server power distribution circuit.
  • the server device cannot send the predicted power value to the power distribution control circuit unless the power is supplied and the server device is operating as the server device.
  • the present invention provides an advantageous technique for facilitating the reconstruction of a power supply device that supplies power to a plurality of units.
  • the power supply device having a plurality of power supply terminals for supplying power to a plurality of units, and each unit is supplied with power from any of the plurality of power supply terminals.
  • the power supply device includes a power receiving unit that receives power and a device that provides control information including information on the power consumption of the unit to the power supply device without receiving power supply to the power receiving unit.
  • the control information is acquired from the device of each of the plurality of units in a state where power is not supplied to the plurality of units through the plurality of power sources and the plurality of power supply terminals, and the plurality of units are obtained based on the control information.
  • the unit includes a control unit that selects a power source for supplying power to at least one of the units through any of the plurality of power supply terminals from the plurality of power sources.
  • an advantageous technique for facilitating the reconstruction of a power supply device that supplies power to a plurality of units.
  • the figure which illustrates the structure of the electric power supply device in the industrial equipment The figure which illustrates the unit power information stored in the non-volatile memory of an IoT device.
  • the figure which illustrates the operation of allocating the built-in power supply to the added unit The figure which exemplifies the composition of the unit incorporated in the industrial equipment.
  • FIG. 1 shows the configuration of the power supply device 1 in the industrial equipment IE of one embodiment.
  • the industrial equipment IE is an example of a system including the power supply device 1.
  • the industrial equipment IE may include a plurality of units 200, 201, 202, 203.
  • the plurality of units 200, 201, 202, 203 may include power receiving units 230, 231, 232, and 233, respectively.
  • the plurality of units 200, 201, 202, 203 may include IoT devices 210, 211, 212, 213, respectively.
  • the power supply device 1 has a plurality of power supply terminals 110, 111, 112, 113, 114 for supplying power to the power receiving units 230, 231, 232, and 233 of the plurality of units 200, 201, 202, and 203. I can prepare. Further, the power supply device 1 may include a plurality of built-in power sources (power sources) 100, 101, 102, 103.
  • Power PWR can be supplied from an external power source to the plurality of built-in power sources 100, 101, 102, 103.
  • the built-in power supply 103 among the plurality of built-in power supplies 100, 101, 102, 103 is a spare built-in power supply
  • the power supply terminal 114 among the plurality of power supply terminals 110 to 114 is a spare power supply terminal. It is possible.
  • the power supply device 1 may include a power supply control unit 130.
  • the power supply control unit 130 has a built-in power supply for supplying power to at least one of the plurality of units 200 to 203 through any of the plurality of power supply terminals 110 to 114 among the plurality of built-in power supplies 100 to 103. Can be configured to choose from.
  • the power supply device 1 may include a PoE hub 131.
  • the PoE hub 131 is an example of a communication interface having a function of supplying power to an IoT device of a unit connected to a plurality of power supply terminals 110 to 114 among a plurality of units 200 to 203.
  • the power supply device 1 may further include a switch circuit 132 that determines the connection between at least one of the plurality of built-in power supplies 100 to 103 and at least one of the plurality of power supply terminals 110 to 114.
  • the switch circuit 132 is arranged so as to determine the connection between at least one of the plurality of built-in power supplies 100 to 103 and at least one of the power supply terminals 113 and 114. Determining a connection involves making and disconnecting the connection.
  • a plurality of IC memories (memory elements) 120, 121, 122, 123, 124 are assigned to the plurality of power supply terminals 110, 111, 112, 113, 114, respectively.
  • Each of the plurality of IC memories 120, 121, 122, 123, 124 stores location information (identification information) of the corresponding power supply terminal among the plurality of power supply terminals 110, 111, 112, 113, 114. ..
  • the power supply control unit 130 may have a function of managing a plurality of built-in power supplies 100 to 103, a function of controlling a switch circuit 132, and a function of communicating with the industrial equipment control unit 150 via the PoE hub 131.
  • the power supply control unit 130 may turn the plurality of built-in power supplies 100 to 103 into an operating state (ON) or a stopped state (OFF) by sending a control signal to each of the plurality of built-in power supplies 100 to 103. can. Further, the power supply control unit 130 arbitrarily or predetermined information such as specifications (for example, rated output power, output voltage) and / or state (for example, error state) of the plurality of built-in power supplies 100 to 103. It can be obtained at the timing of. The power supply control unit 130 may be supplied with a power PWR from an external power source.
  • the power supply control unit 130 receives a start signal such as a start command by supplying a power PWR from an external power source to the power supply control unit 130, or by operating a switch (not shown). By doing so, it can be activated.
  • the plurality of built-in power supplies 100 to 103 may be activated by a control signal or an activation signal from the power supply control unit 130. When the plurality of built-in power supplies 100 to 103 are activated, they can output a voltage according to their respective specifications based on the power PWR.
  • the power supply control unit 130 includes specifications of the plurality of built-in power supplies 100 to 103 (for example, rated output power, output voltage), specifications of the plurality of units 200 to 203 (for example, power consumption, input voltage), and a connection destination.
  • the switch circuit 132 can be controlled based on (power supply terminal). This means that the built-in power supply that supplies power to each of the plurality of units 200 to 203 is selected from the plurality of built-in power supplies 100 to 103.
  • the power supply control unit 130 relates to specifications (for example, power consumption, input voltage) and connection destinations (power supply terminals) of the plurality of units 200 to 203 from the IoT devices 210 to 213 provided in the plurality of units 200 to 203, respectively. Information can be obtained.
  • the power supply control unit 130 may include an output unit that outputs information indicating the specifications and states of the plurality of built-in power supplies 100 to 103 and at least one of the power consumption of the plurality of units 200 to 203.
  • the output unit may include, for example, at least one of a display unit and a communication unit.
  • FIGS. 2A and 2B schematically show an example of unit power information stored in the non-volatile memory (flash ROM 306 described later) of the IoT device provided in the unit.
  • the unit 200 is a standard unit (a unit that is incorporated into the industrial equipment IE as standard), and the unit 203 is an optional unit (a unit that is incorporated into the industrial equipment IE as standard by the user's choice).
  • FIG. 2A schematically shows an example of unit power information stored in the IoT device 210 of the unit 200, which is a standard unit.
  • FIG. 2B schematically shows an example of unit power information stored in the IoT device 213 of the unit 203, which is an optional unit.
  • the first line contains information on the unit name, connected power supply terminal, connected internal power supply, and input voltage. If the unit is a standard unit, all the information may exist from the beginning of the installation because it is a load for which the connection plan is fixed. On the other hand, when the unit is a unit such as an option unit whose connection is undecided, there is no information about the connected power supply terminal and the connected built-in power supply at the beginning of installation.
  • the power supply terminal whose connection destination is undetermined is indicated by X
  • the built-in power supply whose connection destination is undetermined is indicated by Y.
  • Reference numeral X is acquired from the IC memory including the location information of the power supply terminal, which will be described with reference to FIG. Y is determined by the power supply control unit 130 executing an allocation sequence for dynamically allocating power resources (built-in power sources 100 to 103), which will be described with reference to FIG. ..
  • the industrial equipment IE is an example of an exposure apparatus such as a semiconductor exposure apparatus or an FPD exposure apparatus.
  • the exposure apparatus the fluctuation of the power consumption of each unit remarkably appears at the time of initialization, idle, measurement, and exposure. Therefore, in the examples of FIGS. 2A and 2B, these four examples are shown.
  • the type of operating state is defined according to the characteristics of the industrial equipment IE, and the number can be increased or decreased. If the operating state is classified in more detail, the power supply control unit 130 can estimate the overall load (power consumption) more accurately.
  • the initialization sequence can include a plurality of operations managed and systematically executed by the industrial equipment control unit 150, and power consumption information is acquired for each of the plurality of operations and is used as a part of the unit power information. It may be stored in the IoT device.
  • the power supply control unit 130 of the power supply device 1 can acquire the unit power information stored in the non-volatile memory of the IoT hub of the unit via the PoE hub 131.
  • FIG. 3 illustrates some details of the industrial equipment IE shown in FIG.
  • the IoT device 210 may include, for example, a LAN communication unit 300, a power receiving interface 301, a power transmission interface 302, a communication device 303, a processor 304, a memory 305, a flash ROM 306, an interface 307, and a bus 308.
  • the unit 200 may include a plurality of components (not shown) in addition to the unit control unit 220, and the plurality of components may be controlled by the unit control unit 220.
  • the unit control unit 220 can communicate with the IoT device 210 via the interface 307.
  • the IC memory 120 assigned to the power supply terminal 110 to which the unit 200 is connected may include a power receiving circuit 310, a flash ROM 311 and a communication device 312. Other IC memories 121 to 124 may include similar configurations.
  • the unit 200 includes a power receiving unit 231 that receives power from any of the plurality of power supply terminals 110 to 114 of the power supply device 1, and operates using the power received by the power receiving unit 231.
  • the power received by the power receiving unit 231 from any of the plurality of power supply terminals 110 to 114 of the power supply device 1 is supplied to the unit control unit 220 and a plurality of components (not shown) described above.
  • the IoT device 210 can operate by receiving power supply from the PoE hub 131 of the power supply device 1.
  • the IoT device 210 supplies power from the PoE hub 131 of the power supply device 1 in a state where the power receiving unit 231 of the unit 200 is not supplied with power from any of the plurality of power supply terminals 110 to 114 of the power supply device 1. Can work in response to.
  • the power receiving interface 301 supplies power to the power transmission interface 302 based on the power supplied from the PoE hub 131.
  • the voltage supplied by the power receiving interface 301 to the power transmission interface 302 may be the same as or different from the voltage supplied from the PoE hub 131 to the power receiving interface 301.
  • the power transmission interface 302 supplies power to the power receiving circuit 310 of the IC memory 120 assigned to the power supply terminal 110 to which the unit 200 is connected.
  • the power receiving circuit 310 supplies power to the flash ROM 311 and the communication device 312 based on the power.
  • the flash ROM 311 stores the location information (identification information) of the power supply terminal 110 to which the IC memory 120 is assigned, and the location information is transmitted to the communication device 303 of the IoT device 210 via the communication device 312. ..
  • the location information is stored or recorded in the flash ROM 306 as part of the unit power information.
  • the power supply control unit 130 of the power supply device 1 can acquire the unit power information stored in the flash memory 306 via the PoE hub 131 and the LAN communication unit 300.
  • the configuration of supplying power from the PoE hub 131 to the IoT device 210 makes it possible to supply power to the IoT device 210 before power is supplied to the unit 200 from the power supply terminals 110 (or 111 to 114). ..
  • the configuration in which power is supplied from the PoE hub 131 to the IoT device 210 supplies power to the IoT device 210 in a state where power is not supplied to the unit 200 from the power supply terminals 110 (or 111 to 114). make it possible.
  • a configuration may be adopted in which power is supplied directly from the power supply device 1 to the IoT device 210 (that is, without going through the power supply terminals 110 to 114).
  • a configuration may be adopted in which power is supplied to the IoT device 210 from a battery (inside the IoT device 210 or in the unit 200).
  • the PoE hub 131 is unnecessary, and a hub having no power supply function may be used.
  • the power supply device 1 and the units 200 to 204 may be close to each other and wireless communication may be possible.
  • the IoT devices 210 to 214 may be used as wireless type IC tags, and an RFID reader / writer may be used instead of the PoE HUB 131 as the communication means between the power supply control unit 130 and the IC tag.
  • the communication device 312 and the communication device 303 may be configured to perform serial communication with the communication device 312 as a slave node and the communication device 303 as a master node.
  • the information of X described with reference to FIGS. 2A and 2B is determined.
  • the IoT device 210 may turn off the power transmission interface 302 when it is confirmed that the location information is stored in the flash ROM 306. Then, the IoT device 210 may be configured not to communicate with the IC memory 120 until the next power is supplied from the PoE hub 131 to the power receiving interface 301.
  • a plurality of power consumption information (for example, power consumption information at initialization, idle, measurement, and exposure) according to the operating state of the industrial equipment is obtained from the unit control unit 220 via the interface 307 of the IoT device 210. It can be stored in the flash ROM 306.
  • the initial value of the power consumption information for example, the one measured under a predetermined sequence condition in the inspection at the time of shipment of the unit 200 or the like can be used.
  • each unit provides control information (unit control information) including information on the power consumption of the unit to the power supply device 1 without receiving power supply to the power receiving unit 231 (IoT).
  • Device can be included.
  • the power supply device 1 has control information (units) from each device (IoT device) of the plurality of units 200 to 204 in a state where power is not supplied to the plurality of units 200 to 204 through the plurality of power supply terminals 110 to 114. Control information) can be acquired.
  • the power supply device 1 has a plurality of built-in power supplies for supplying power to at least one of the plurality of units 200 to 204 through any of the plurality of power supply terminals 110 to 114 based on the control information. You can select from 100 to 103.
  • FIG. 4 illustrates an allocation sequence in which the power supply control unit 130 of the power supply device 1 dynamically allocates power resources (built-in power supplies 100 to 103) in the industrial equipment IE to the unit.
  • the unit 203 is an optional unit and Y exists in the control information stored in the IoT device 213 of the unit 203.
  • the built-in power supply 103 is assumed to be a spare built-in power supply.
  • the power supply control unit (hereinafter, control unit) 130 confirms whether all of the plurality of built-in power supplies 100 to 103 are OFF, and if all of the plurality of built-in power supplies 100 to 103 are OFF.
  • step S402 the control unit 130 prohibits turning on the built-in power supplies 100 to 103 by operating the power switch or starting command.
  • step S403 the control unit 130 acquires control information (unit control information) of the IoT devices 210 to 214 of the units 200 to 204 by LAN communication via the PoE hub 131.
  • step S404 the control unit 130 bases the built-in power supplies 100 to 103 based on the output voltage and output power upper limit of the built-in power supplies 100 to 103 and the connection destination information and the power consumption information among the control information acquired in step S403. Calculate the surplus power of each.
  • the control unit 130 has previously acquired information indicating the output voltage and the upper limit of the output power of the built-in power supplies 100 to 103.
  • FIG. 5 schematically shows the surplus power of the built-in power sources 100 to 103.
  • "INIT.” Indicates the power consumption at the time of initialization
  • IDOL indicates the power consumption at the time of idling
  • measurement indicates the power consumption at the time of measurement
  • exposure indicates the power consumption at the time of exposure.
  • the portion with cross-hatching indicates the power consumption of the unit to which the built-in power supply is already assigned.
  • the built-in power supply 100 is already assigned to the knit 200
  • the built-in power supply 101 is already assigned to the unit 201
  • the built-in power supply 102 is already assigned to the unit 202.
  • the difference between the upper end of the cross-hatched portion and the upper limit of the output power is the surplus power.
  • the control unit 130 is an IoT device (in other words, a unit corresponding to the IoT device) in which the built-in power supply of the connection destination is not determined based on the connection destination information among the control information acquired in step S403. Determine if is present.
  • the IoT device here, IoT device 213) in which the built-in power supply to be connected is not determined is an IoT device in which Y described with reference to FIGS. 2A and 2B exists in the control information. If there is an IoT device for which the built-in power supply to be connected has not been determined, the control unit 130 proceeds to step S406, and if such an IoT device does not exist, the control unit 130 proceeds to step S410.
  • step S410 the control unit 130 permits the control unit 130 to turn on the built-in power supplies 100 to 103 by operating the power switch or starting command, whereby the allocation sequence ends.
  • the control unit 130 compares the power consumption of the unit 203 obtained from the control information stored in the IoT device 213 with the surplus power of the built-in power supplies 100 to 103 calculated in step S404.
  • the built-in power supply 100 has surplus power for supplying power to the unit 203
  • the built-in power supply 101 does not have surplus power for supplying power to the unit 203, and has a spare built-in power supply.
  • the power supply 103 has surplus power for supplying power to the unit 203.
  • the built-in power supply 102 is not suitable for the unit 203 whose output voltage is 48V and whose input voltage is 24V.
  • step S407 whether the control unit 130 has a plurality of built-in power supplies 100 to 103 whose output voltage is compatible with the unit 203 and has surplus power for supplying power to the unit 203. To judge. Then, when such a built-in power supply does not exist, the control unit 130 gives an error notification in step S411. In that case, it is necessary to remove the cause of the error. For example, it is necessary to take measures such as rewriting the power consumption information to the IoT devices 200a to 202a on the unit side after reducing the power consumption of the units 200 to 202 by reviewing the operation plan of the industrial equipment control unit 150.
  • the power consumption information of the IoT devices 210 to 212 of the units 200 to 202 may be rewritten after the power consumption of the units 200 to 202 is reduced by reviewing the operation plan of the industrial equipment control unit 150. Measures can be taken.
  • the control unit 130 uses the control unit 130. Determine the built-in power supply to be assigned to the unit 203.
  • the control unit 130 can make the built-in power supply already assigned to any unit, that is, the built-in power supply 100, an allocation candidate having a higher priority than the spare built-in power supply 103.
  • the control unit 130 may allocate the spare internal power source 103 to the unit 203.
  • the control unit 130 allocates the built-in power supply 100 to the unit 203 by controlling the switch circuit 132. In other words, it can be said that the control unit 130 determines the built-in power supply 100 to be allocated to the unit 203 by controlling the switch circuit 132.
  • step S409 the control unit 130 stores the connection destination information indicating that the connected built-in power supply is the built-in power supply 100 in the IoT device 213 of the unit 203.
  • the control unit 130 can manage the added unit 203 as a fixed load, so that the time required for the next execution of the allocation sequence is shortened. Will be done.
  • processing returns to step S404.
  • the plurality of units are powered by at least one first unit in which it has already been determined from which of the plurality of internal power sources the power is supplied, and by which of the plurality of internal power sources the power is supplied. Includes at least one second unit that has not yet been determined.
  • the control unit 130 supplies power to the second unit among the plurality of built-in power supplies based on the surplus power of the power supply that supplies power to the first unit among the plurality of built-in power supplies and the control information of the second unit.
  • the built-in power supply for supply can be selected from the plurality of power sources.
  • the current consumption value stored in the IoT devices 210 to 213 that manage the units 200 to 203 is not the initial value set at the time of shipment or the like, but is updated at any time. For example, it is preferable to measure the current consumption of the units 200 to 203 periodically or at an arbitrary timing after the installation of the industrial equipment IE and update the current consumption value stored in the IoT devices 210 to 213.
  • FIG. 6 shows a configuration example of the unit 200 connected to the power supply device 1 in the industrial equipment IE.
  • the unit 200 may include an IoT device 210 for storing electric power information, a unit control unit 220, and a power receiving unit 230 for receiving electric power supplied from the electric power supply device 1.
  • the unit 200 may include a current sensor 261 for measuring the current supplied from the power supply device 1, a memory 260, a power receiving circuit 262, a power supply circuit 263, a measuring unit 264, and a driving unit 265.
  • the power receiving circuit 262 and the power supply circuit 263 receive the power supplied from the power supply device 1 via the power receiving unit 230 and the current sensor 261 to the unit control unit 220, the measurement unit 264, and the drive unit 265, respectively. Generates and supplies the required voltage.
  • the unit control unit 220 detects the current consumption of the unit 200 based on the output of the current sensor 261.
  • the unit control unit 220 controls the measurement unit 264 and the drive unit 265 in response to a command from the industrial equipment control unit 150 that manages the control of initialization, idle, measurement, and exposure. At this time, the unit control unit 220 periodically collects the current consumption value of the unit 200 from the current sensor 261 for each sequence of initialization, idle, measurement, and exposure, and stores it in the memory 260. After a predetermined number of current consumption values are accumulated in the memory 260, the unit control unit 220 can determine the actual power consumption of the unit 200 based on the current consumption values and overwrite the power consumption information of the IoT device 210. By managing the power consumption and updating the power consumption information even after the unit is installed in this way, the power supply control unit 130 can always accurately grasp the surplus power of each built-in power source.
  • the unit control unit 220 may be equipped with a CPU having a high processing capacity that can handle big data. In such a case, the unit control unit 220 does not determine the actual power consumption only by the information of the measured current value from the current sensor 261 but associates data such as the states of the measurement unit 264 and the drive unit 265 as dependent variables. The power consumption may be determined by the predicted value by machine learning.
  • the power supply control unit 130 can grasp the surplus power of each built-in power supply in real time by using the predicted value that dynamically captures the power consumption fluctuation due to the change in the environment or the timekeeping change of the unit. As a result, the power supply control unit 130 can dynamically and appropriately allocate the built-in power supply to each unit.
  • the power supply control unit 130 may have a function of outputting (or transmitting) power information to the industrial equipment control unit 150.
  • the purpose of this function is roughly two, one is that the industrial equipment control unit 150 grasps the timing change of the power consumption of each unit, and the other is that the industrial equipment control unit 150 consumes the power consumption of each built-in power supply. It is to grasp the details of and the surplus power.
  • the former that is, the information indicating the timed change of the power consumption of the unit, can be used by the industrial equipment control unit 150 as the data of the state management for predictive maintenance, abnormality detection, etc. of the unit.
  • it can be used not only for failure prediction but also as data for maintaining performance. For example, in high-precision industrial equipment such as exposure equipment, even a small temperature change directly adversely affects the performance, but by predicting the change in heat quantity from the change in power consumption and changing the control parameter of the temperature control of the unit. , The influence of deterioration of temperature control performance in the exposure apparatus can be minimized.
  • the industrial equipment control unit 150 improves the performance and saves energy in the operation plan at the time of initialization, idle, measurement, and exposure. It can be reviewed flexibly from the viewpoint of.
  • the details of power consumption of each built-in power supply and information on surplus power can be used to provide hardware and software that upgrade to the basic specifications even after the industrial equipment is delivered to the customer. Such information may be provided online to industrial equipment.
  • FIG. 7 is a block diagram of an online system for centrally managing the power supply device of industrial equipment.
  • a plurality of industrial devices 601 are installed in the customer factory 600.
  • the plurality of industrial devices 601 can periodically output data to the server 603 via the Ethernet switch 602.
  • the data of the server 603 is shared by the server 611 of the industrial equipment manufacturer's office via the network cloud protected by the firewall, and the administrator can view the data on the terminal 613 by storing the data in the data server 612. ..
  • the surplus power information of each built-in power source described with reference to FIGS. 1 to 5 in this data, the surplus power of the power source in each industrial device 601 installed in the customer factory 600 can be accurately grasped.
  • the present embodiment it is possible to grasp accurate power even after installation in industrial equipment, without limiting the operation of the connected load, and flexibly respond to the addition of units. become.
  • the present invention can be applied to systems other than industrial equipment.
  • the article manufacturing method will be described as an application example when the above industrial equipment is configured as an exposure apparatus.
  • the article manufacturing method includes an exposure step of exposing a substrate using the exposure apparatus, a developing step of developing the substrate through the exposure step, and a processing step of processing the substrate through the developing step to obtain an article. And can be included.
  • a photosensitive material photoresist
  • the processing step may include, for example, the step of patterning the underlying layer using a device pattern.
  • the processing step may also include a step of dicing the substrate.
  • the present invention supplies a program that realizes one or more functions of the above-described embodiment to a system or device via a network or storage medium, and one or more processors in the computer of the system or device reads and executes the program. It can also be realized by the processing to be performed. It can also be realized by a circuit (for example, ASIC) that realizes one or more functions.
  • Power supply device 200 to 203: Unit, 111 to 114: Power supply terminal, 210 to 213: IoT device, 100 to 103: Built-in power supply (power supply), 130: Power supply control unit (control unit)

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Public Health (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Sources (AREA)
  • Direct Current Feeding And Distribution (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

Un appareil d'alimentation électrique selon la présente invention comprend une pluralité de bornes d'alimentation électrique pour alimenter une pluralité d'unités. Les unités comprennent chacune : une unité de réception d'énergie qui reçoit une alimentation électrique de l'une quelconque de la pluralité de bornes d'alimentation électrique ; un dispositif qui, sans recevoir l'alimentation électrique de l'unité de réception d'énergie, fournit, à l'appareil d'alimentation électrique, des informations de commande comprenant des informations relatives à la consommation d'électricité de l'unité respective. L'appareil d'alimentation électrique comprend : une pluralité de sources d'alimentation ; et une unité de commande qui, dans un état dans lequel de l'énergie n'est pas fournie à la pluralité d'unités par l'intermédiaire de la pluralité de bornes d'alimentation électrique, acquiert les informations de commande à partir des dispositifs respectifs de la pluralité d'unités, et qui, sur la base des informations de commande, sélectionne, parmi la pluralité de sources d'énergie, une source d'alimentation pour fournir de l'énergie à au moins l'une des unités de la pluralité d'unités par l'intermédiaire de l'une quelconque de la pluralité de bornes d'alimentation électrique.
PCT/JP2021/041653 2020-11-20 2021-11-12 Appareil d'alimentation électrique, système, appareil d'exposition et procédé de production d'article WO2022107686A1 (fr)

Priority Applications (2)

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KR1020237018910A KR20230104238A (ko) 2020-11-20 2021-11-12 전력 공급 장치, 시스템, 노광 장치 및 물품 제조 방법
CN202180076980.1A CN116547879A (zh) 2020-11-20 2021-11-12 电力供给装置、系统、曝光装置以及物品制造方法

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JP2020193758A JP2022082285A (ja) 2020-11-20 2020-11-20 電力供給装置、システム、露光装置および物品製造方法
JP2020-193758 2020-11-20

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CN (1) CN116547879A (fr)
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004104018A (ja) * 2002-09-12 2004-04-02 Canon Inc 製造システム
US20190319545A1 (en) * 2018-04-13 2019-10-17 Wistron Corporation Hub device and power supply method thereof

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5304265B2 (ja) 2009-01-23 2013-10-02 日本電気株式会社 電源制御システム、電源制御方法、電源振分制御回路、および、電源制御プログラム

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004104018A (ja) * 2002-09-12 2004-04-02 Canon Inc 製造システム
US20190319545A1 (en) * 2018-04-13 2019-10-17 Wistron Corporation Hub device and power supply method thereof

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TW202241007A (zh) 2022-10-16
CN116547879A (zh) 2023-08-04
KR20230104238A (ko) 2023-07-07

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