WO2022099929A1 - 一种线光谱共焦传感器 - Google Patents

一种线光谱共焦传感器 Download PDF

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Publication number
WO2022099929A1
WO2022099929A1 PCT/CN2021/072982 CN2021072982W WO2022099929A1 WO 2022099929 A1 WO2022099929 A1 WO 2022099929A1 CN 2021072982 W CN2021072982 W CN 2021072982W WO 2022099929 A1 WO2022099929 A1 WO 2022099929A1
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Prior art keywords
line
slit
focusing
dispersion
light source
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PCT/CN2021/072982
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English (en)
French (fr)
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王前程
王国安
黄凯
谢国栋
周飞
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海伯森技术（深圳）有限公司
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Priority to KR1020237016057A priority Critical patent/KR20230086751A/ko
Priority to DE112021004684.5T priority patent/DE112021004684T5/de
Publication of WO2022099929A1 publication Critical patent/WO2022099929A1/zh
Priority to US18/313,505 priority patent/US20230314125A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/024—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution

Definitions

  • the utility model relates to a spectral confocal measuring device, in particular to a line spectral confocal sensor.
  • Spectral confocal technology is a measurement method derived from confocal microscopy.
  • the main principle is to focus different wavelengths of the light source on different heights to achieve height and wavelength correspondence, and to achieve height measurement by detecting confocal wavelengths. It has the characteristics of high precision, high speed and high stability, and is often used in the field of industrial inspection technology, especially for the measurement of transparent objects.
  • the main purpose of the utility model is to overcome the shortcomings of the prior art, and to provide a method that can realize confocal wavelength measurement on a line, measure the height and position information of a line at a time, with fast measurement speed, high precision, high stability, and simple and convenient operation.
  • Line Spectral Confocal Sensor is to realize confocal wavelength measurement on a line, measure the height and position information of a line at a time, with fast measurement speed, high precision, high stability, and simple and convenient operation.
  • a line spectral confocal sensor comprising:
  • Line light source used to output continuous and uniform linear wide-spectrum beam
  • the dispersion component includes a first collimating element, a first dispersion element and a first focusing element which are successively arranged to disperse the light emitted by the line light source and focus light of different wavelengths at different heights;
  • the receiving assembly includes a second focusing element, a second dispersive element and a second collimating element which are successively arranged and arranged symmetrically with the dispersive assembly, for receiving the light reflected from the surface of the object to be measured and focusing it to different positions;
  • Slit to undertake the setting of the receiving component, to filter out the reflected light of the unfocused wavelength on the surface of the object to be measured
  • a processing component including a third collimating element, a third dispersion element, a third focusing element and an image sensor arranged in sequence, for receiving light of different wavelengths passing through the slit and focusing it on different positions on the image sensor.
  • the line spectral confocal sensor further includes a processor for calculating and obtaining the surface height information of the object to be measured by detecting the position of the centroid on the image sensor.
  • the processing assembly further includes a first reflecting mirror and a second reflecting mirror, the first reflecting mirror is arranged between the slit and the third collimating element, and is used for deflecting the light passing through the slit to the third
  • the collimating element, the second reflecting mirror is arranged between the third collimating element and the third dispersing element, and is used for deflecting the light emitted by the third collimator to the third dispersing element.
  • the first reflecting mirror is inclined at an angle of 45° relative to the slit and is arranged along the length direction of the slit.
  • the line light source is composed of a plurality of white light LED lamps that are closely arranged in a line shape.
  • a diaphragm for controlling the divergence angle of the line light source is provided in front of the line light source.
  • the slit includes two black plates, the length of the slit is the same as that of the line light source, and the width of the slit is adjustable.
  • first collimating element, the second collimating element and the third collimating element each include at least one collimating lens.
  • prisms and/or gratings are used for the first dispersion element, the second dispersion element, and the third dispersion element.
  • each of the first focusing element, the second focusing element and the third focusing element includes at least one focusing lens.
  • the utility model uses the line light source as the sensor illumination light source, realizes the confocal wavelength measurement of one line, can measure the height position information of one line at a time, effectively solves the problem of low measurement efficiency of the single-point spectral confocal sensor, and has high measurement speed and high precision.
  • FIG. 1 is a schematic diagram of the overall structure of the line spectrum confocal sensor according to Embodiment 1 of the present invention.
  • Fig. 2 is the structural schematic diagram of the dispersion component of Embodiment 1 of the present invention.
  • FIG. 3 is a schematic structural diagram of a receiving assembly according to Embodiment 1 of the present invention.
  • FIG. 4 is a schematic structural diagram of the processing assembly in Embodiment 1 of the present invention.
  • a line spectrum confocal sensor of the present invention includes a line light source 1 , a dispersion component 2 , a receiving component 3 , a slit 4 , a processing component 5 and a processor.
  • the line light source 1 is used to output a continuous and uniform linear wide-spectrum light beam, which is composed of a plurality of high-power white LED lamps arranged in a linear shape, and has a continuous and uniform spectral distribution at a wavelength of 400-700 nm. Each LED lamp has a strong luminous power to ensure the sampling speed of the system, and the spectrum of each LED lamp is continuous and uniform in the visible light range.
  • a diaphragm (not shown in the figure) for controlling the divergence angle of the line light source is provided in front of the line light source 1 .
  • a, b, and c are the optical paths of 400 nm, 500 nm, and 700 nm wavelengths, respectively.
  • the dispersion component 2 includes a first collimating element 21 , a first dispersion element 22 and a first focusing element 23 which are successively arranged to disperse the light emitted by the line light source 1 and focus light of different wavelengths at different heights.
  • the first collimating element 21 adopts a collimating lens, which is used for collimating the light emitted by the line light source 1 into parallel light.
  • the first dispersing element 22 adopts a prism to disperse the collimated light into light with different wavelengths, and the light with different wavelengths has different exit angles.
  • the first focusing element 23 adopts a focusing lens, which is used to focus the light of different wavelengths dispersed by the dispersion element at different heights on the surface of the object to be measured to form a dispersion plane, which is perpendicular to the surface of the object to be measured.
  • the correspondence between the height information of the point and the wavelength information In Figure 2, the three wavelengths of light, 400 nm, 500 nm, and 700 nm, are focused at different heights, and the planes scattered by all points on the line are perpendicular to the surface of the object to be measured.
  • the receiving assembly 3 includes a second focusing element 31, a second dispersive element 32 and a second collimating element 33 which are successively arranged and arranged symmetrically with the dispersive assembly 2, and is used to receive the light reflected from the surface of the object to be measured and focus it to different positions .
  • the second focusing element 31 adopts a focusing lens
  • the second dispersing element 32 adopts a prism
  • the second collimating element 33 adopts a collimating lens.
  • the light reflected from the surface of the measured object is received by the receiving component 3. After passing through the receiving component 3, the light reflected by the focused wavelength will be re-focused to the position of the slit 4 by the receiving component 3, and the light reflected by the non-focused wavelength will be blocked by the slit 4.
  • the receiving component 3 is arranged in a parallel position with the line light source, the receiving component 3 focuses the light reflected from the surface of the measured object at different positions on the bottom surface of the slit 4, and the unfocused wavelength on the surface of the measured object can be filtered out by using the slit 4 Reflected light, only the reflected light focused on the surface of the object to be measured is allowed to pass through.
  • the slit 4 includes two black-painted metal plates, the length of the slit 4 is the same as that of the line light source 1, and the width of the slit 4 is adjustable. The width of the slit 4 is related to the system resolution and sampling speed, and can be selected according to the actual situation.
  • the narrower the width of the slit 4 the less the wavelength range that enters the processing component 5, and the higher the resolution of the line spectrum confocal sensor system; of course, the narrower the width of the slit 4, the weaker the system energy and the system measurement speed. reduce.
  • the optional width of the slit 4 is 20-200um.
  • the processing assembly 5 includes a first reflecting mirror 51, a third collimating element 52, a second reflecting mirror 53, a third dispersive element 54, a third focusing element 55 and an image sensor 56, which are successively arranged and are used for receiving through the slit 4 different wavelengths of light and focus it at different locations on the image sensor 56.
  • the third collimating element 52 adopts a collimating lens
  • the third dispersing element 54 adopts a prism
  • the third focusing element 55 adopts a focusing lens.
  • the first reflecting mirror 51 is disposed between the slit 4 and the third collimating element 52, and is inclined at an angle of 45° relative to the slit 4 and is disposed along the length of the slit 4, so as to deflect the light passing through the slit 4 to a The third collimating element 52 .
  • the second reflecting mirror 53 is disposed between the third collimating element 52 and the third dispersing element 54, and is disposed at an angle of 45° relative to the third collimating element 52, and is used for deflecting the light emitted by the third collimator 52 to The third dispersive element 54 .
  • the light passing through the slit 4 is reflected by the first reflecting mirror 51 , and then enters the third collimating element 52 .
  • the third dispersive element 54 disperses light of different wavelengths into the third focusing element 55 at different angles, and is focused at different positions on the image sensor 56 by the third focusing element 55 .
  • the inclination angle of the second reflecting mirror 53 is not limited to 45°, and can be adjusted according to actual needs.
  • the processor determines the wavelength information of the light focused on the surface of the measured object by detecting the position of the centroid on the image sensor 56, and then uses the wavelength and the height calibration information of the measured object to calculate the height information of the measured object surface.
  • the algorithm in which the processor calculates the height information of the measured object surface by detecting the position of the centroid on the image sensor 56 is in the prior art.
  • the processor adopts an ARM processor, and the processor adopts any microprocessor in the prior art, which does not affect the implementation of the present invention.
  • the difference between this embodiment and Embodiment 1 is that the second reflecting mirror 54 is not provided in this embodiment.
  • the third dispersive element 54 accepts the parallel light path arrangement of the third collimating element 52
  • the third focusing element 55 accepts the light path arrangement of the third dispersive element 54
  • the image sensor 56 accepts the light path arrangement of the third focusing element 55 .
  • first dispersion element 22 the second dispersion element 32 , and the third dispersion element 54 use gratings.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

一种线光谱共焦传感器，包括线光源（1）、色散组件（2）、接收组件（3）、狭缝（4）及处理组件（5），线光源（1）用于输出连续、均匀的线型宽光谱光束；色散组件（2）包括第一准直元件（21）、第一色散元件（22）及第一聚焦元件（23）；接收组件（3）包括第二聚焦元件（31）、第二色散元件（32）及第二准直元件（33），与色散组件（2）对称设置；狭缝（4），用于滤除被测物体表面非聚焦波长反射光线；处理组件（5），包括第三准直元件（52）、第三色散元件（54）、第三聚焦元件（55）及图像传感器（56）。以线光源作为传感器照明光源，实现了一条线上共焦波长测量，可一次测量一条线的高度位置信息，测量速度快，精度高，稳定性高，操作简单方便；同时，通过增设反射镜（51、53），传感器结构更紧凑，在同等测量性能的前提下，可有效减小传感器体积。

Description

一种线光谱共焦传感器 技术领域
本实用新型涉及一种光谱共焦测量装置，特别是一种线光谱共焦传感器。
 背景技术
光谱共焦技术是一种基于共焦显微技术衍生的一种测量方法，主要原理是将光源不同波长聚焦到不同高度面上，实现高度和波长对应，通过检测共焦波长来实现高度测量。具有高精度，高速度、高稳定性特点，常用于工业检测技术领域，尤其对于透明物体的测量更具优势。
目前，现有技术中常规光谱共焦技术大部分是单点测量，对于一条线或者一个平面高度信息的测量需要通过移动被测物体或者光谱共焦传感器探头来实现，一方面会影响测量效率，另一方面多次移动也会引入一些其它测量误差，降低了系统测量的稳定性及精度。
 技术问题
本实用新型的主要目的是克服现有技术的缺点，提供一种可实现一条线上共焦波长测量，一次测量一条线的高度位置信息，测量速度快，精度高，稳定性高, 操作简单方便的线光谱共焦传感器。
 技术解决方案
本实用新型采用如下技术方案：
一种线光谱共焦传感器，包括有：
线光源，用于输出连续、均匀的线型宽光谱光束；
色散组件，包括依次承接设置的第一准直元件、第一色散元件及第一聚焦元件，用于对线光源发出的光进行色散并使不同波长光聚焦在不同高度处；
接收组件，包括依次承接设置的第二聚焦元件、第二色散元件及第二准直元件，与色散组件对称设置，用于接收被测物体表面反射的光线并聚焦到不同位置；
狭缝，承接接收组件设置，用于滤除被测物体表面非聚焦波长反射光线；
以及处理组件，包括依次承接设置的第三准直元件、第三色散元件、第三聚焦元件及图像传感器，用于接收通过狭缝的不同波长光线并将其聚焦在图像传感器上不同位置处。
进一步地，所述线光谱共焦传感器还包括有处理器，用于通过检测图像传感器上质心位置来计算得出被测量物体表面高度信息。
进一步地，所述处理组件还包括有第一反射镜和第二反射镜，第一反射镜设置于狭缝与第三准直元件之间，用于将通过狭缝的光线偏折至第三准直元件，第二反射镜设置于第三准直元件与第三色散元件之间，用于将第三准直器射出的光线偏折至第三色散元件。
进一步地，所述第一反射镜相对于狭缝倾斜45°角并沿狭缝长度方向设置。
进一步地，所述线光源由多个白光LED灯呈线型紧密排列构成。
进一步地，所述线光源前设置有用于管控线光源发散角度的光阑。
进一步地，所述狭缝包括两黑色板，狭缝长度与线光源长度相同，狭缝宽度可调节。
进一步地，所述第一准直元件、第二准直元件、第三准直元件均包括至少一个准直镜片。
进一步地，所述第一色散元件、第二色散元件、第三色散元件采用棱镜和/或光栅。
进一步地，所述第一聚焦元件、第二聚焦元件、第三聚焦元件均包括至少一个聚焦镜片。
 有益效果
由上述对本实用新型的描述可知，与现有技术相比，本实用新型的有益效果是：
本实用新型以线光源作为传感器照明光源，实现了一条线上共焦波长测量，可一次测量一条线的高度位置信息，有效解决单点光谱共焦传感器测量效率低的问题，测量速度快，精度高，稳定性高, 操作简单方便；同时,处理组件通过增设反射镜，可使传感器结构更紧凑，在同等测量性能的前提下，可有效减小传感器体积。
 附图说明
图1是本实用新型实施例1的线光谱共焦传感器的整体结构示意图；
图2是本实用新型实施例1的色散组件的结构示意图；
图3是本实用新型实施例1的接收组件的结构示意图；
图4是本实用新型实施例1的处理组件的结构示意图。
图中：1.线光源，2.色散组件，21.第一准直元件，22.第一色散元件，23.第一聚焦元件，3.接收组件，31.第二聚焦元件，32.第二色散元件，33.第二准直元件，4.狭缝，5.处理组件，51.第一反射镜，52.第三准直元件，53.第二反射镜，54.第三色散元件，55.第三聚焦元件，56.图像传感器。
 本发明的实施方式
具体实施方式
以下通过具体实施方式对本实用新型作进一步的描述。
实施例1
参照图1至图4，本实用新型的一种线光谱共焦传感器，包括有线光源1、色散组件2、接收组件3、狭缝4、处理组件5以及处理器。
线光源1，用于输出连续、均匀的线型宽光谱光束，由多个高功率白光LED灯呈线型紧密排列构成，在波长400-700nm有连续、均匀光谱分布。每个LED灯都有较强的发光功率来保证系统采样速度，且每个LED灯在可见光范围内光谱是连续、均匀的。线光源1前设置有用于管控线光源发散角度的光阑（图中未示出）。图1-3中，a、b、c分别为400nm、500nm、700nm波长的光路。
色散组件2，包括依次承接设置的第一准直元件21、第一色散元件22及第一聚焦元件23，用于对线光源1发出的光进行色散并使不同波长光聚焦在不同高度处。第一准直元件21采用准直镜片，用于将线光源1发出的光准直为平行光。第一色散元件22采用棱镜，用于将准直后的光线色散成不同波长的光线，且不同波长的光线具有不同的出射角度。第一聚焦元件23采用聚焦镜片，用于将色散元件色散的不同波长的光聚焦在被测物体表面不同高度处，形成一个色散平面，该色散平面与被测物体表面垂直，实现了一条线上点的高度信息和波长信息的对应。图2中，400nm、500nm、700nm这三种波长的光聚焦在了不同高度处，且线上所有点色散出来的平面和被测物体表面垂直。
接收组件3，包括依次承接设置的第二聚焦元件31、第二色散元件32及第二准直元件33，与色散组件2对称设置，用于接收被测物体表面反射的光线并聚焦到不同位置。第二聚焦元件31采用聚焦镜片，第二色散元件32采用棱镜，第二准直元件33采用准直镜片。被测物体表面反射的光线被接收组件3接收，经过接收组件3后，聚焦波长反射的光线会被接收组件3再次聚焦到狭缝4位置，非聚焦波长反射的光线则会被狭缝4阻挡，不能进入处理组件5。图3中，波长500nm的光线聚焦在被测物体表面，波长400nm和700nm的光线在被测物体表面是离焦状态。被测物体表面反射的光线经过接收组件3后，仅有500nm波长的光线聚焦在狭缝4位置，并可以通过狭缝4进入到处理组件5，400nm和700nm波长的光线被狭缝4阻拦，无法进入到处理组件5。
狭缝4，承接接收组件3设置于和线光源平行位置，接收组件3将被测物体表面反射的光线聚焦在狭缝4底面不同位置，利用狭缝4可滤除被测物体表面非聚焦波长反射光线，仅允许聚焦在被测物体表面的反射光线通过。狭缝4包括两涂黑金属板，狭缝4长度与线光源1长度相同，狭缝4宽度可调节。狭缝4宽度与系统分辨率及采样速度有关，可根据实际情况进行选择。狭缝4宽度越窄，进入到处理组件5波长范围也越少，线光谱共焦传感器系统分辨率也越高；当然，狭缝4宽度越窄，系统能量也越弱，系统测量速度也会降低。本实施例可选狭缝4宽度为20-200um。
处理组件5，包括依次承接设置的第一反射镜51、第三准直元件52、第二反射镜53、第三色散元件54、第三聚焦元件55及图像传感器56，用于接收通过狭缝4的不同波长光线并将其聚焦在图像传感器56上不同位置处。第三准直元件52采用准直镜片，第三色散元件54采用棱镜，第三聚焦元件55采用聚焦镜片。第一反射镜51设置于狭缝4与第三准直元件52之间，相对于狭缝4倾斜45°角并沿狭缝4长度方向设置，用于将通过狭缝4的光线偏折至第三准直元件52。第二反射镜53设置于第三准直元件52与第三色散元件54之间，相对第三准直元件52倾斜45°角设置，用于将第三准直器52射出的光线偏折至第三色散元件54。透过狭缝4的光线被第一反射镜51反射后，进入到第三准直元件52，光线经第三准直元件52准直后被第二反射镜53反射，进入第三色散元件54，第三色散元件54将不同波长光线色散开以不同角度进入到第三聚焦元件55，经第三聚焦元件55聚焦在图像传感器56上不同位置处。第二反射镜53的倾斜角度不局限45°，可根据实际需要进行调整。
处理器，通过检测图像传感器56上质心位置来确定在被测物体表面聚焦的光线波长信息，进而利用波长和被测物体高度标定信息来计算得出被测物体表面高度信息。处理器通过检测图像传感器56上质心位置来计算被测物体表面高度信息的算法为现有技术。处理器采用ARM处理器，且处理器采用现有技术中任意微处理器均不影响本实用新型的实施。
实施例2
本实施例与实施例1的区别在于：本实施例中不设置第二反光镜54。第三色散元件54承接第三准直元件52射出的平行光路布置，第三聚焦元件55承接第三色散元件54射出的光路布置，图像传感器56承接第三聚焦元件55射出的光路布置。
实施例3
本实施例与实施例1的区别在于：第一色散元件22、第二色散元件32、第三色散元件54采用光栅。
上述仅为本实用新型的三个具体实施方式，但本实用新型的设计构思并不局限于此，凡利用此构思对本实用新型进行非实质性的改动，均应属于侵犯本实用新型保护范围的行为。

Claims (10)

  1. 一种线光谱共焦传感器，其特征在于：包括有：
    线光源，用于输出连续、均匀的线型宽光谱光束；
    色散组件，包括依次承接设置的第一准直元件、第一色散元件及第一聚焦元件，用于对线光源发出的光进行色散并使不同波长光聚焦在不同高度处；
    接收组件，包括依次承接设置的第二聚焦元件、第二色散元件及第二准直元件，与色散组件对称设置，用于接收被测物体表面反射的光线并聚焦到不同位置；
    狭缝，承接接收组件设置，用于滤除被测物体表面非聚焦波长反射光线；
    以及处理组件，包括依次承接设置的第三准直元件、第三色散元件、第三聚焦元件及图像传感器，用于接收通过狭缝的不同波长光线并将其聚焦在图像传感器上不同位置处。
  2. 如权利要求1所述的一种线光谱共焦传感器，其特征在于：还包括有处理器，用于通过检测图像传感器上质心位置来计算得出被测量物体表面高度信息。
  3. 如权利要求1所述的一种线光谱共焦传感器，其特征在于：所述处理组件还包括有第一反射镜和第二反射镜，第一反射镜设置于狭缝与第三准直元件之间，用于将通过狭缝的光线偏折至第三准直元件，第二反射镜设置于第三准直元件与第三色散元件之间，用于将第三准直器射出的光线偏折至第三色散元件。
  4. 如权利要求3所述的一种线光谱共焦传感器，其特征在于：所述第一反射镜相对于狭缝倾斜45°角并沿狭缝长度方向设置。
  5. 如权利要求1所述的一种线光谱共焦传感器，其特征在于：所述线光源由多个白光LED灯呈线型紧密排列构成。
  6. 如权利要求1或5所述的一种线光谱共焦传感器，其特征在于：所述线光源前设置有用于管控线光源发散角度的光阑。
  7. 如权利要求1所述的一种线光谱共焦传感器，其特征在于：所述狭缝包括两黑色板，狭缝长度与线光源长度相同，狭缝宽度可调节。
  8. 如权利要求1所述的一种线光谱共焦传感器，其特征在于：所述第一准直元件、第二准直元件、第三准直元件均包括至少一个准直镜片。
  9. 如权利要求1所述的一种线光谱共焦传感器，其特征在于：所述第一色散元件、第二色散元件、第三色散元件采用棱镜和/或光栅。
  10. 如权利要求1所述的一种线光谱共焦传感器，其特征在于：所述第一聚焦元件、第二聚焦元件、第三聚焦元件均包括至少一个聚焦镜片。
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