WO2022099797A1

WO2022099797A1 - Displacement device

Info

Publication number: WO2022099797A1
Application number: PCT/CN2020/131732
Authority: WO
Inventors: 丁晨阳; 龚威; 吴立伟; 杨晓峰
Original assignee: 复旦大学
Priority date: 2020-11-12
Filing date: 2020-11-26
Publication date: 2022-05-19
Also published as: CN112436711A; CN112436711B

Abstract

Disclosed is a displacement device, comprising at least one first frame portion and at least one second frame portion. Each first frame portion and the corresponding second frame portion can move relative to each other; the first frame portion comprises a first frame and a plurality of coil arrays, the plurality of coil arrays are arranged on a plurality of planes of the first frame, each coil array comprises a plurality of coils, and the plurality of coils are arranged adjacent to each other along a first direction; the second frame portion comprises a second frame and a plurality of magnet arrays, the plurality of magnet arrays are arranged on a plurality of planes of the second frame, each magnet array comprises a plurality of magnets, at least two magnets in the plurality of magnets have mutually different magnetization directions, and the magnets are arranged alternately along the first direction. This displacement device allows for relative motion between frames, displacements of different distances can be achieved according to different requirements, there is no direct mechanical contact between the frames, it is also convenient for equipment and maintenance operation, and for large-scale use, the manufacturing and use cost can be effectively reduced.

Description

Displacement device

Cross-reference to related applications

This patent application claims the priority of the Chinese patent application filed on November 12, 2020, with the application number of 202011261343.5 and the invention titled "displacement device", the full text of which is incorporated herein by reference.

technical field

The invention relates to the field of automation equipment, in particular to a displacement device.

Background technique

Microelectronics is a new technology developed with integrated circuits, especially VLSI. Microelectronics technology is the core technology of high-tech and information industry, which has penetrated into all fields of modern technology and social life. The rapid development of microelectronics technology has increased the demand for automation equipment, and put forward higher requirements for the performance and production capacity of automation equipment.

In the field of automated equipment manufacturing, displacement devices, especially large-stroke displacement device technology, are the core technologies of automated equipment manufacturing systems, and have always been highly valued by the industry. The performance and production capacity of automation equipment also put forward higher requirements for the performance of displacement devices such as speed acceleration and positioning accuracy. The traditional large-stroke displacement device usually adopts the technical method of linear motor combined with mechanical guide rail, or the technical method of linear motor combined with air floating guide rail. The technical way of combining the linear motor with the mechanical guide rail introduces mechanical friction, which limits the improvement of performance. The technical method of combining the linear motor with the air-floating guide rail reduces the influence of mechanical friction, but the large-size air-floating support has very high requirements for flatness, which increases the difficulty of processing and manufacturing and increases the production cost; As the position increases, the stroke of the bearing table increases accordingly, which requires the length of the base table to cover the movement stroke to be larger. The increase of the stroke and the requirements of productivity have raised the requirements for the speed, acceleration and motion accuracy of the displacement device, and at the same time require the convenience of the maintenance of the displacement device, as well as the controllable difficulty and cost of processing and manufacturing. This series of requirements all bring huge challenges and tests to traditional technical methods.

SUMMARY OF THE INVENTION

The purpose of the present invention is to provide a displacement device, which solves the problem that the displacement device is applied to different stroke requirements to achieve different displacements.

In order to achieve the above object, the present invention provides a displacement device, comprising at least one first frame part and at least one second frame part, each first frame part and the corresponding second frame part can produce relative movement, each A frame portion includes a first frame and a plurality of coil arrays including:

a first coil array, disposed on a first plane of the first frame portion parallel to the first direction, the first coil array including a plurality of first coils, the plurality of first coils being arranged along the first The directions are arranged adjacent to each other;

A second coil array is disposed on a second plane of the first frame portion parallel to the first direction, the second coil array includes a plurality of second coils, the plurality of second coils are arranged along the The first directions are arranged adjacently in pairs; wherein, the first plane and the second plane are not parallel to each other;

The second frame portion includes a second frame and a plurality of magnet arrays including:

The first magnet array is arranged on a third plane of the second frame portion parallel to the first plane, and the projections of the first magnet array and the first coil array respectively on the first plane intersect; A magnet array includes a plurality of first N magnets and a plurality of first S magnets, and the first N magnets and the first S magnets are alternately arranged along the first direction, and the first N magnets and the first S magnets are alternately arranged along the first direction. The magnetization directions of the first S magnets are different from each other;

The second magnet array is arranged on the fourth plane of the second frame part parallel to the second plane, and the projections of the second magnet array and the second coil array on the second plane intersect; the first The two-magnet array includes a plurality of second N magnets and a plurality of second S magnets, and the second N magnets and the second S magnets are alternately arranged along the first direction, and the second N magnets and the second S magnets are alternately arranged along the first direction. The magnetization directions of the second S magnets are different from each other;

Wherein, the third plane is disposed opposite and parallel to the first plane, and the fourth plane is disposed opposite and parallel to the second plane.

The technical solution provided by the present invention does not require the use of the air-floating support surface in the existing air-floating guide rail technology, and does not have the difficulty of processing and manufacturing large-sized air-floating support surfaces, as well as the difficulty of assembly and maintenance. The interaction force with the magnet realizes the relative movement of the frame, which can realize different displacements according to various needs, and there is no direct mechanical contact between the frames, which is also convenient for equipment and maintenance operations. For large-scale use, it can effectively reduce Manufacturing and operating costs.

In one embodiment, each coil array is a multi-dimensional array;

wherein the first coil array further includes a row configuration along the fourth direction; and/or

The second coil array also includes a row configuration along a fifth direction.

In one embodiment, the plurality of coil arrays further comprise:

A third coil array is disposed on a fifth plane of the first frame portion parallel to the first direction, the third coil array includes a plurality of third coils, and the plurality of third coils are arranged along the The first direction is adjacently arranged in pairs;

Wherein, at least two of the first plane, the second plane and the fifth plane are not parallel to each other;

The plurality of magnet arrays also include:

The third magnet array is arranged on the sixth plane of the second frame part that is parallel to the fifth plane, and the projections of the third magnet array and the third coil array on the fifth plane respectively intersect; The third magnet array includes a plurality of third N magnets and a plurality of third S magnets, and the third N magnets and the third S magnets are alternately arranged along the first direction, and the third N magnets and the third S magnets are alternately arranged along the first direction. The magnetization directions of the third S magnets are different from each other.

In one embodiment, the plurality of coil arrays further comprise:

a fourth coil array, disposed on a seventh plane of the first frame portion parallel to the first direction, the fourth coil array including a plurality of fourth coils, the plurality of fourth coils extending along the The first direction is adjacently arranged in pairs;

At least two of the first plane, the second plane, the fifth plane and the seventh plane are not parallel to each other;

The plurality of magnet arrays also include:

a fourth magnet array is arranged on an eighth plane of the second frame portion parallel to the seventh plane, and the projections of the fourth magnet array and the fourth coil array on the seventh plane intersect; The fourth magnet array at least includes a plurality of fourth N magnets and a plurality of fourth S magnets, and the fourth N magnets and the fourth S magnets are alternately arranged along the first direction, and the fourth N magnets are arranged alternately along the first direction. The magnetization directions of the fourth S magnet are different from each other.

In one embodiment, the first plane is coplanar with the fifth plane, the first plane is orthogonal to the second plane, and the fifth plane is orthogonal to the seventh plane.

In one embodiment, each coil array is a multi-dimensional array;

Wherein, the fourth coil array further includes a row configuration along the seventh direction; and/or

The third coil array also includes a row configuration along a sixth direction.

In one embodiment, the first magnet array further includes a first H magnet, the plurality of first H magnets are disposed between the first N magnet and the first S magnet, and the first The N magnets and the first S magnets are alternately arranged along the first direction, and the magnetization direction of the first H magnet is directed from the adjacent first S magnet to the first N magnet, and is parallel to the first direction ;

and / or

The second magnet array further includes a second H magnet, the plurality of second H magnets are disposed between the second N magnet and the second S magnet, and the second N magnet and the second magnet The two S magnets are alternately arranged along the first direction, and the magnetization direction of the second H magnet is directed from the adjacent second secondary S magnet to the second N magnet, and is parallel to the first direction.

In one embodiment, the displacement device further includes a first position sensor;

One of the dimensions of the first magnet array and the first coil array in the second direction, respectively, has a dimensional difference portion less than the other, the dimensional difference portion forming a first difference space, and the first position sensor is located in the first difference space for measuring the movement displacement generated along the first direction;

and / or

The displacement device further includes a second position sensor;

One of the dimensions of the second magnet array and the second coil array respectively along the third direction has a dimensional difference portion less than the other, the dimensional difference portion forming a second difference space, the second A position sensor is located in the second differential space for measuring the movement displacement along the first direction.

In one embodiment, the displacement device further includes a third position sensor;

Either one of the dimensions of the third magnet array and the third coil array in the second direction has a dimensional difference portion less than the other, and the dimensional difference portion forms a third difference space, and the third a position sensor is located in the third difference space for measuring the movement displacement along the first direction;

and / or

The displacement device further includes a fourth position sensor;

One of the dimensions of the fourth magnet array and the fourth coil array respectively along the third direction has a dimensional difference portion less than the other, the dimensional difference portion forming a fourth difference space, the fourth A position sensor is located in the fourth differential space for measuring the movement displacement along the first direction.

In one embodiment, the displacement device further includes a power amplifier for driving the plurality of coil arrays to generate a first magnetic field, respectively interacting with the second magnetic field generated by the plurality of magnet arrays to generate a magnetic field along the first magnetic field. relative motion in the direction.

In one embodiment, the displacement device includes at least two first frame parts; the at least two first frame parts are respectively controlled by independent drives; and/or

The displacement device includes at least one second frame portion, and the at least one second frame portion is linearly extended along the first direction by mechanical splicing.

In one embodiment, the displacement device includes at least one first frame portion;

The at least one first frame portion is linearly extended along the first direction by mechanical splicing; and/or

The displacement device includes at least two second frame parts; the at least two second frame parts are controlled by independent drives, respectively.

Description of drawings

1 is a perspective view of a displacement device according to a first embodiment of the present invention;

2 is an X-Y view of the first magnet array of the first embodiment of the present invention;

3 is an X-Z view of the first magnet array and the first coil array of the first embodiment of the present invention;

4 is a schematic diagram of the Lorentz force and torque of the displacement device according to the first embodiment of the present invention;

5 is a schematic diagram of the self-stabilizing rotation adjustment mechanism of the first embodiment of the present invention;

6 is a schematic diagram of a position sensor configuration according to the first embodiment of the present invention;

7 is a perspective view of a displacement device according to a second embodiment of the present invention;

8 is a schematic diagram of the Lorentz force and torque of the displacement device of the second embodiment of the present invention;

9 is a perspective view of a displacement device according to a third embodiment of the present invention;

10 is a perspective view of a coil array corresponding to a magnet array according to some embodiments of the present invention;

Fig. 11 is a perspective view of a displacement device of a multi-stage according to some embodiments of the present invention;

FIG. 12 is a perspective view of another multi-stage displacement device according to some embodiments of the present invention.

specific embodiment

The embodiments of the present invention will be described in detail below with reference to the accompanying drawings, so as to more clearly understand the objects, features and advantages of the present invention. It should be understood that the embodiments shown in the accompanying drawings are not intended to limit the scope of the present invention, but are only intended to illustrate the essential spirit of the technical solutions of the present invention.

In the following description, for the purpose of illustrating various disclosed embodiments, certain specific details are set forth in order to provide a thorough understanding of the various disclosed embodiments. One skilled in the relevant art will recognize, however, that embodiments may be practiced without one or more of these specific details. In other instances, well-known devices, structures and techniques associated with this application may not be shown or described in detail to avoid unnecessarily obscuring the description of the embodiments.

Unless the context requires otherwise, throughout the specification and claims, the word "comprising" and variations thereof, such as "comprising" and "having", should be construed in an open, inclusive sense, i.e., should be interpreted as "including, but not limited to".

Reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment. Thus, the appearances of "in one embodiment" or "in an embodiment" in various places throughout the specification are not necessarily all referring to the same embodiment. Additionally, the particular features, structures or characteristics may be combined in any manner in one or more embodiments.

As used in this specification and the appended claims, the singular forms "a" and "the" include plural referents unless the context clearly dictates otherwise. It should be noted that the term "or" is generally employed in its sense including "and/or" unless the content clearly dictates otherwise.

In the following description, in order to clearly show the structure and working mode of the present invention, many directional words will be used for description, but "front", "rear", "left", "right", "outer", "inner" should be "," "outward", "inward", "up", "down" and other words are to be understood as convenient terms, and should not be understood as limiting words.

The first embodiment of the present invention is described below with reference to the accompanying drawings. As shown in FIG. 1 , the exercise device 10 includes a first frame portion 11 and a second frame portion 12 disposed opposite to the first frame portion 11 , and the second frame portion 12 is located at the bottom and the outer side relative to the first frame portion 11 . It is a semi-enclosed structure; the first frame part 11 can produce displacement movement relative to the second frame part 12 . The first frame portion 11 includes a first frame and a plurality of coil arrays. In the embodiment of the present invention, the plurality of coil arrays, namely the first coil array 111 and the second coil array 112, are respectively fixed and arranged on two planes of the first frame, That is, the first plane 21 and the second plane 22 . The two planes are both parallel to the first direction (X direction), and the first plane 21 and the second plane 22 are not parallel to each other. Preferably, the first plane 21 is orthogonal to the second plane 22 , the first plane 21 is orthogonal to the third direction (Z direction), and the second plane 22 is orthogonal to the second direction (Y direction). It can be understood that the first plane 21 and the second plane 23 may not be orthogonal, and the two planes may form a certain angle, which is not specifically limited here. It should be noted that, the first frame portion 11 and the second frame portion 12 can also be placed vertically or placed in any direction in other spaces, which are not specifically limited here. In addition, in the embodiment of the present invention, the X direction is the first direction, the Y direction is the second direction, and the Z direction is the third direction for description. However, those skilled in the art can understand that the present invention is not limited to this. Instead, any direction in the three-dimensional rectangular coordinate system may be used as the first direction, and the other two directions may be used as the second direction and the third direction to implement the various embodiments of the present invention, which will not be repeated hereinafter.

As shown in FIG. 1 , the first coil array 111 includes a plurality of first coils 115 , and the second coil array 112 includes a plurality of second coils 116 , wherein the plurality of first coils 115 and the plurality of second coils 116 are respectively along the They are arranged adjacent to each other in the X direction. The second frame portion 12 includes a second frame and a plurality of magnet arrays. In the embodiment of the present invention, the plurality of coil arrays, namely the first magnet array 121 and the second magnet array 122, are fixedly arranged on two planes of the second frame, respectively. That is, the third plane 23 and the fourth plane 24 , wherein the third plane 23 is disposed opposite and parallel to the first plane 21 , and the fourth plane 24 is disposed opposite and parallel to the second plane 22 .

As shown in FIG. 1 and FIG. 2 , the first magnet array 121 includes a plurality of first magnets 125, and the first magnets 125 include at least two kinds of magnets with different magnetization directions, that is, a first N magnet 125A and a first S magnet 125B, The first N magnets 125A and the first S magnets 125B are alternately arranged in the X direction. In addition, the second magnet array 122 shown in FIG. 1 includes a plurality of second magnets 126, and the second magnets 126 include at least two kinds of magnets with different magnetization directions, ie, a second N magnet and a second S magnet, the second magnet 126 is similar to the first magnet 125 and will not be repeated here. Among them, the N magnet and S magnet mentioned above are named according to the functional surface used. Specifically, the magnet usually includes an N-pole surface and an S-pole surface. When the magnetic field of the N-pole surface of the magnet needs to be used, the magnet is called For the N magnet, when the magnetic field of the S pole face of the magnet needs to be used, the magnet is called the S magnet.

In some embodiments, the first magnet 125 may include three types of magnets, ie, a first N magnet 125A, a first S magnet 125B, and a first H magnet 125C, as shown in FIGS. 2 and 3 . The first H magnets 125C are disposed between the first N magnets 125A and the first S magnets 125B, and the first N magnets 125A and the first S magnets 125B are alternately arranged in the X direction. The magnetization directions of the first H magnets 125C are phase-dependent. The adjacent first S magnet 125B points to the first N magnet 125A and is parallel to the X direction. This configuration enables the magnetic field in which the first coil 115 is located to be strengthened, thereby enhancing the interaction force between the first magnet 125 and the first coil 115 . Among them, the H magnet is named according to the functional surface it uses. Specifically, the H magnet is located between the N magnet and the S magnet. When the magnetic field of the magnet needs to be directed from the adjacent S magnet to the N magnet, the magnet is called H magnet. The names of the H magnets mentioned below are the same, and are not repeated for the sake of brevity.

Specifically, as shown in FIG. 3 , the magnetization directions of each of the first N magnets 125A and the first S magnets 125B of the first magnet array 121 are orthogonal to the third plane 23 , and the magnetization directions of the first N magnets 125A point to For the first coil 115 , the magnetization direction of the first S magnet 125B is away from the first coil 115 of the first coil array 111 . The magnetization direction of the first H magnet 125C is parallel to the X direction, and is directed from the adjacent first S magnet 125B to the adjacent first N magnet 125A, thereby providing a magnetic field space. In addition, similar to the first magnet 125 , the second magnet 126 in FIG. 1 may also include three types of magnets arranged in the same arrangement to strengthen the magnetic field where the second coil 116 is located, which will not be repeated here.

4 is a schematic diagram corresponding to the Lorentz force and torque of the displacement device of the first embodiment. As shown in the figure, after the first coil array 111 is supplied with a driving current, the first coil array 111 and the first magnet array 121 generate The interaction can drive the first frame portion 11 to translate relative to the second frame portion 12 along the X and Z directions in FIG. 1 , and the first frame portion 11 to rotate relative to the second frame portion 12 along the Y direction. After the second coil array 112 is supplied with the driving current, the second coil array 112 interacts with the second magnet array 122, which can drive the first frame portion 11 to move relative to the second frame portion 12 along the X direction and the Y direction. And the first frame part 11 rotates along the Z direction relative to the second frame part 12 .

The technical solution provided by the present invention does not require the use of the air-floating support surface in the existing air-floating guide rail technology, and does not have the difficulty of processing and manufacturing large-scale air-floating support surfaces, as well as the difficulty of assembly and maintenance. The interaction force between the frames realizes the relative movement of the frames, which can realize different displacements according to various needs, and there is no direct mechanical contact between the frames, which is also convenient for equipment and maintenance operations. For large-scale use, it can effectively reduce manufacturing costs. and cost of use.

In addition, using the structure of the interaction between the energized coils and the magnets between the frames in the embodiment of the present invention, there is a self-stable rotation adjustment mechanism between the first frame portion 11 and the second frame portion 12. As shown in FIG. 5, when the first frame portion 11 and the second frame portion 12 are used. A frame portion 11 is deflected in the X direction relative to the second frame portion 12, causing the gap between the first coil array 111 and the first magnet array 121 or the gap between the second coil array 112 and the second magnet array 122 to be larger or smaller, The self-stable rotation adjustment mechanism adjusts the reverse rotation of the first frame portion 11 relative to the second frame portion 12 in the X direction, so as to keep the gap between the first frame portion 11 and the second frame portion 12 uniform.

Specifically, the self-stabilizing rotation adjustment mechanism between the first frame portion and the second frame portion in the embodiment of the present invention is based on the balance of force and torque between the coil array and the magnet array. When the gap changes, the corresponding force and torque also change, resulting in a displacement that tends to the equilibrium point, thereby maintaining the stability of the gap between the coil array and the magnet array.

Further, in some embodiments, the displacement device further includes a first position sensor, and one of the dimensions of the first magnet array and the first coil array along the second direction has a dimensional difference portion less than the other, the dimensional difference portion A first difference space is formed, and the first position sensor is located in the first difference space to measure the movement displacement along the first direction.

Specifically, in some embodiments, as shown in FIG. 6 , the size of the first magnet array 121 along the Y direction is different from the size of the first coil array 111 along the Y direction. For example, when the size of the first magnet array 121 along the Y direction is larger than When the size of the first coil array 111 along the Y direction, the first magnet array 121 has a portion protruding from the first coil array 111 along the Y direction, and the first coil array 111 forms a first magnet array 121 along the Y direction corresponding to the first magnet array 121. A difference space, the first difference space can be used to configure the first position sensor 16a. Of course, it can be understood that when the size of the first magnet array 121 along the Y direction is smaller than the size of the first coil array 111 along the Y direction, the A coil array 111 has a portion protruding from the first magnet array 121 along the Y direction, and the first magnet array 121 also forms a first differential space corresponding to the first coil array 111 along the Y direction, which can be used to configure the first position sensor 16a, the first position sensor 16a is used to measure the long-distance displacement generated in the X direction. The first position sensor 16a may be a Hall sensor, or other sensors, which are not specifically limited.

In addition, the second magnet array 122 and the second coil array 112 are also similar to the first magnet array 121 and the first coil array 111 described above, that is, the second magnet array 122 and the second coil array 112 form a second difference space. To configure the second position sensor 16b, the second position sensor 16b may be of the same type as the first position sensor 16a, or may be of a different type, which will not be repeated here.

It should be noted that both of the two position sensors can be used to measure the displacement in the X direction, so the two sensors can not work at the same time, and when one of them is in a working state, the other can be in a standby state. When the two sensors are working at the same time, the two sensors can be set for mutual calibration. Specifically, a first difference can be set, wherein the first difference is the measured value of the first position sensor somewhere and the second position. The difference between the measured values of the sensors, the system can determine that when the first difference exceeds a preset threshold, at least one position sensor is not working properly, so as to better control the risk of position sensor errors.

A second embodiment of the present invention relates to a displacement device. The second embodiment is based on the extension of the first embodiment, and the main difference is that, as shown in FIG. 7 , the first frame part 11 of the displacement device 10 of the second embodiment further includes a third coil array 113 . The third coil array 113 is fixedly arranged on the fifth plane 25 of the first frame, and the fifth plane 25 is parallel to the X direction. Wherein, at least two of the fifth plane 25 , the first plane 21 and the second plane 22 are not parallel to each other. That is to say, the fifth plane 25 may be coplanar with or parallel to the first plane 21 , or may be orthogonal to the first plane 21 . Preferably, the fifth plane 25 is coplanar with the first plane 21 , the fifth plane 25 is orthogonal to the second plane 22 , and the fifth plane 25 is orthogonal to the Z direction.

In addition, the second frame portion 12 in FIG. 7 further includes a third magnet array 123, and the third magnet array 123 is fixedly arranged on the sixth plane 26 of the second frame, wherein the sixth plane 26 is parallel and opposite to the fifth plane 25. Preferably, the sixth plane 26 is coplanar with the third plane 23 .

The specific arrangement of the third coil array 113 is similar to that of the first coil array 111 , and the specific arrangement of the third magnet array 123 is similar to that of the first magnet array 121 , which will not be repeated here.

8 is a schematic diagram of the Lorentz force and torque of the displacement device according to the second embodiment of the present invention. As shown in the figure, after the third coil array 113 is supplied with a driving current, the third coil array 113 and the third magnet array 123 The interaction causes the first frame portion 11 to translate relative to the second frame portion 12 in the X and Z directions in FIG. 7 , and the first frame portion 11 to rotate relative to the second frame portion 12 in the Y direction.

In this embodiment, the interaction between the third coil array 113 and the third magnet array 123 and the interaction between the first coil array 111 and the first magnet array 121 generate a torque along the X direction, causing the first frame portion 11 to face each other. The second frame portion 12 is rotated in the X direction.

Compared with the first embodiment, in the displacement device 10 of the second embodiment, by adding a set of coil arrays 113 and magnet arrays 123, the torque along the X direction is strengthened, and the motion state in the X direction is stabilized.

Further, in some embodiments, the third magnet array 123 and the second coil array 113 are also similar to the first magnet array 121 and the first coil array 111 described above, and the third magnet array 123 and its corresponding third coil array 113 are formed A third difference space is used to configure the third position sensor, which will not be repeated here.

It should be noted that, all three position sensors in this implementation can be used to measure the displacement in the X direction, so the three position sensors can not work at the same time, and when one of them is in a working state, the other two can be in a standby state. Of course, three sensors can also be used to calibrate each other. For example, three position sensors can be set by setting a first threshold. If the difference between the measurement value of the first position sensor and the measurement value of the second position sensor does not exceed the first threshold value , and the difference between the measurement value of the second position sensor and the measurement value of the third position sensor exceeds the first threshold value, it can be preliminarily determined that there is a problem with the third position sensor or the error exceeds the allowable range, and the third position sensor can be checked. Check or replace, etc.

Since this embodiment is an extension of the first embodiment, the relevant technical details mentioned in the first embodiment are still valid in this embodiment, and the technical effects that can be achieved in the first embodiment are in this embodiment The same can also be achieved, and in order to reduce repetition, details are not described here.

A third embodiment of the present invention relates to a displacement device. The third embodiment is an extension based on the second embodiment, and the main difference is that, as shown in FIG. 9 , in the displacement device 10 of the third embodiment, the first frame part 11 further includes a fourth coil array 114 , and the fourth The coil array 114 is fixedly arranged on the seventh plane 27 of the first frame, the seventh plane 27 is spaced apart from the second plane 22 of the first frame portion 11 , the seventh plane 27 is parallel to the X direction, and the second frame portion 12 is opposite to the second plane 22 of the first frame portion 11 . A frame part 11 is located at the bottom and the outer part forms a semi-enclosed structure. Among them, at least two of the seventh plane 27 , the first plane 21 , the second plane 22 and the fifth plane 25 are not parallel to each other. Preferably, the seventh plane 27 is parallel to the second plane 22, and the seventh plane 27 is orthogonal to the Y direction.

In addition, in FIG. 9 , the second frame portion 12 further includes a fourth magnet array 124 , and the fourth magnet array 124 is arranged on the eighth plane 28 of the second frame, wherein the eighth plane 28 is parallel and opposite to the seventh plane 27 . .

The specific arrangement of the fourth coil array 114 is similar to that of the second coil array 112 , and the specific arrangement of the fourth magnet array 124 is similar to that of the second magnet array 122 , which will not be repeated here.

After the fourth coil array 114 is supplied with the driving current, the fourth coil array 114 interacts with the fourth magnet array 124, causing the first frame portion 11 to translate relative to the second frame portion 12 along the X and Y directions, and the first The frame portion 11 rotates in the Z direction relative to the second frame portion 12 .

In this embodiment, the interaction between the fourth coil array 114 and the fourth magnet array 124 and the interaction between the second coil array 112 and the second magnet array 122 strengthen the Y direction of the first frame portion 11 relative to the second frame portion 12 The translation in the direction, and the rotation in the Z direction.

Compared with the second embodiment, the displacement device 10 of the third embodiment has an additional set of coil arrays 114 and magnet arrays 124 . Viewed from the X direction, the four sets of coil arrays are in a U-shaped symmetrical layout, that is, the first coil array 111 is symmetrical with the third coil array 113 , and the second coil array 112 is symmetrical with the fourth coil array 114 . The U-shaped symmetrical layout enhances the Lorentz force and torque in all directions. With the addition of the fourth coil array 114 and the fourth magnet array 124, the mechanical resonance generated by the flexible mode is suppressed through redundant control.

Since this embodiment is based on the extension of the first embodiment and the second embodiment, the related technical details mentioned in the first embodiment and the second embodiment are still valid in this embodiment. The technical effects that can be achieved in the second embodiment can also be achieved in this embodiment. In order to reduce repetition, details are not repeated here.

Further, in some embodiments, each coil array is a multi-dimensional array; wherein, the first coil array further includes a row configuration along the fourth direction; the second coil array further includes a row configuration along the fifth direction; the third coil array The array also includes a row configuration in a sixth direction; the second coil array further includes a row configuration in a seventh direction.

Specifically, each coil array on the first frame portion 11 can be a multi-dimensional array, that is, it includes a column configuration along the X direction, a row configuration along the Y direction, and a vertical configuration along the Z direction. Increase the degree of freedom of the interaction force between the magnet and the coil.

Preferably, each coil array on the first frame portion 11 is a two-dimensional array, including not only a column configuration along the X direction, but also a row configuration along the Y direction. For example, the first coil array 111 also includes a fourth direction array. For row configuration, preferably, the fourth direction is the same as the Y direction. Of course, the fourth direction can also be other directions at any angle with the Y direction.

Taking the first coil array and the first magnet array as an example, as shown in FIG. 10 , the first coils 115 of the first coil array 111 not only are arranged adjacently in pairs along the X direction, but also include a row arrangement along the Y direction, The first coil array 111 is configured with two adjacent first coils 115 as a row along the Y direction, and the first magnet array 121 extends linearly along the Y direction, wherein the projection of the first coil array 111 on the first plane is the same as the first coil array 111 . The projections of a magnet array 121 on the first plane intersect.

The first coil array 111 includes a row configuration in a fourth direction (preferably the Y direction) in addition to the column configuration in the first direction (X direction). With this arrangement, when the first coil array 111 is supplied with current, the interaction between the first coil array 111 and the first magnet array 121 adds a torque along the first direction (X direction), which can cause the first One frame part 11 rotates relative to the second frame part 12 in the first direction (X direction). The use of this array configuration and implementation improves the adjustment ability and stability of the first coil array 111 itself.

The second coil array 112 , the third coil array 113 and the fourth coil array 114 in FIG. 9 can also be configured with column and row configurations of multi-dimensional arrays.

Further, the displacement device in some embodiments includes at least two first frame parts and at least one second frame part; in the first direction, the length of the first frame part is smaller than the length of the second frame part, and at least two The first frame parts are spaced apart from each other along the first direction on at least one second frame part, the at least two first frame parts are respectively controlled by independent drives, and the at least one second frame part passes along the first direction The mechanical splicing linearly extends to form a whole. Specifically, as shown in FIG. 11 , the displacement device 10 includes two first frame parts 11 and two second frame parts 12 , and the two first frame parts 11 can be driven and controlled independently of each other, so as to serve as the first frame parts 11 respectively. A workbench and a second workbench. The two second frame parts 12 are formed as a base by linearly extending along the X direction. Specifically, the connection can be realized by mechanical splicing. It can be spliced on the tooling stand or spliced with its own buckle. There are no restrictions. The two first frame parts are spaced apart from each other and arranged on the two second frame parts spliced into one body. At least two first frame parts 11 and at least one second frame part 12 form a multi-stage displacement device system. The embodiment of the present invention greatly increases the freedom of operation of the worktable by independently driving the first worktable and the second worktable, thereby improving the work efficiency, and by adopting a modular design to meet the expansion requirements of the motion system, Extending the motion system does not require redesigning a new structure, making maintenance more convenient, and can effectively reduce manufacturing and use costs.

Further, the displacement device in some embodiments includes at least one first frame part and at least two second frame parts, the length of the first frame part is greater than the length of the second frame part in the first direction, and at least two The at least one second frame portion is spaced apart from each other along the first direction on the at least one first frame portion, the at least one first frame portion is linearly extended along the first direction through mechanical splicing to form an integral body, and the at least two second frame portions are respectively Controlled by independent drives. Specifically, as shown in FIG. 12 , the displacement device 10 includes two first frame parts 11 and two second frame parts 12 . As a base, the first frame portion 11 can extend linearly or substantially linearly along the X direction to form an integral body. Specifically, the connection can be realized by mechanical splicing, splicing on the tooling platform, or using its own buckle. Splicing is not limited here. The two second frame parts 12 can also be independently driven and controlled to serve as the first workbench and the second workbench respectively. The two second frame parts are spaced apart from each other on the two first frame parts which are spliced into one body as a base. The at least one first frame portion 11 and the at least two second frame portions 12 form a multi-stage displacement device system. The embodiment of the present invention greatly increases the freedom of operation of the worktable by independently driving the first worktable and the second worktable, thereby improving the work efficiency, and can meet the expansion requirements of the motion system by adopting a modular design , to extend the motion system, no need to redesign a new structure, maintenance is more convenient, and production and use costs can be effectively reduced.

It should be noted that the multi-table displacement device provided by the present invention can be applied to the motion table system of automatic equipment, and the motion table system of the above-mentioned automatic equipment can adjust the first frame according to the actual motion stroke and the requirements of control strategy planning. The relative position of the part and the second frame part, and the number of configurations of the two.

The preferred embodiments of the present invention have been described in detail above, but it is to be understood that aspects of the embodiments can be modified, if desired, to employ aspects, features and concepts of various patents, applications and publications to provide additional embodiments.

These and other changes can be made to the embodiments in light of the above detailed description. In general, in the claims, the terms used should not be construed as limiting to the specific embodiments disclosed in the specification and the claims, but should be construed to include all possible embodiments, along with all equivalents to which these claims are entitled scope.

Claims

A displacement device, comprising at least one first frame part and at least one second frame part, each first frame part and the corresponding second frame part can produce relative movement, characterized in that:

Each first frame portion includes a first frame and a plurality of coil arrays including:

a first coil array, disposed on a first plane of the first frame parallel to a first direction, the first coil array including a plurality of first coils, the plurality of first coils being along the first direction Two adjacent configuration;

A second coil array is disposed on a second plane of the first frame parallel to the first direction, the second coil array includes a plurality of second coils, the plurality of second coils are arranged along the first Arranged adjacently in one direction two by two; wherein, the first plane and the second plane are not parallel to each other;

The second frame portion includes a second frame and a plurality of magnet arrays including:

The first magnet array is arranged on a third plane of the second frame parallel to the first plane, and the projections of the first magnet array and the first coil array on the first plane intersect respectively; the first The magnet array includes a plurality of first N magnets and a plurality of first S magnets, and the first N magnets and the first S magnets are alternately arranged along the first direction, and the first N magnets and the first S magnets are arranged alternately along the first direction. The magnetization directions of the S magnets are different from each other;

The second magnet array is arranged on the fourth plane of the second frame parallel to the second plane, and the projections of the second magnet array and the second coil array on the second plane intersect; the second The magnet array includes a plurality of second N magnets and a plurality of second S magnets, and the second N magnets and the second S magnets are alternately arranged along the first direction, and the second N magnets and the second S magnets are alternately arranged along the first direction. The magnetization directions of the two S magnets are different from each other;

Wherein, the third plane is disposed opposite and parallel to the first plane, and the fourth plane is disposed opposite and parallel to the second plane.
The displacement device according to claim 1, wherein each coil array is a multi-dimensional array;

wherein the first coil array further includes a row configuration along the fourth direction; and/or

The second coil array also includes a row configuration along a fifth direction.
The displacement device according to claim 1, wherein the plurality of coil arrays further comprises:

A third coil array is disposed on a fifth plane of the first frame parallel to the first direction, the third coil array includes a plurality of third coils, and the plurality of third coils are arranged along the first Two adjacent arrangement in one direction;

Wherein, at least two of the first plane, the second plane and the fifth plane are not parallel to each other;

The plurality of magnet arrays also include:

The third magnet array is arranged on the sixth plane of the second frame parallel to the fifth plane, and the projections of the third magnet array and the third coil array on the fifth plane intersect respectively; the The third magnet array includes a plurality of third N magnets and a plurality of third S magnets, and the third N magnets and the third S magnets are alternately arranged along the first direction, and the third N magnets and the third S magnets are alternately arranged along the first direction. The magnetization directions of the third S magnets are different from each other.
The displacement device according to claim 3, wherein,

The plurality of coil arrays also include:

A fourth coil array is arranged on a seventh plane of the first frame parallel to the first direction, the fourth coil array includes a plurality of fourth coils, the plurality of fourth coils are arranged along the first Two adjacent arrangement in one direction;

At least two of the first plane, the second plane, the fifth plane and the seventh plane are not parallel to each other;

The plurality of magnet arrays also include:

The fourth magnet array is arranged on the eighth plane of the second frame parallel to the seventh plane, and the projections of the fourth magnet array and the fourth coil array on the seventh plane intersect; the The fourth magnet array includes at least a plurality of fourth N magnets and a plurality of fourth S magnets, and the fourth N magnets and the fourth S magnets are alternately arranged along the first direction, and the fourth N magnets and the fourth S magnets are alternately arranged along the first direction. The magnetization directions of the fourth S magnets are different from each other.
The displacement device according to claim 4, wherein each coil array is a multi-dimensional array;

Wherein, the third coil array further includes a row configuration along the sixth direction;

and / or

The fourth coil array also includes a row configuration along the seventh direction.
The displacement device according to claim 1, wherein the first magnet array further comprises a first H magnet, and the plurality of first H magnets are arranged between the first N magnet and the first S magnet and the first N magnets and the first S magnets are alternately arranged along the first direction, and the magnetization direction of the first H magnets is directed from the adjacent first S magnets to the first N magnets, and parallel to the first direction;

and / or

The second magnet array further includes a second H magnet, the plurality of second H magnets are disposed between the second N magnet and the second S magnet, and the second N magnet and the second magnet The two S magnets are alternately arranged along the first direction, and the magnetization direction of the second H magnet is directed from the adjacent second secondary S magnet to the second N magnet, and is parallel to the first direction.
The displacement device according to claim 1, wherein,

The displacement device further includes a first position sensor;

One of the dimensions of the first magnet array and the first coil array in the second direction has a dimensional difference portion less than the other, the dimensional difference portion forming a first difference space, and the first position sensor is located at in the first difference space, to measure the movement displacement along the first direction;

and / or

The displacement device further includes a second position sensor;

One of the dimensions of the second magnet array and the second coil array in the third direction has a dimensional difference portion less than the other, the dimensional difference portion forming a second difference space, and the second position sensor is located at In the second difference space, the movement displacement along the first direction is measured.
The displacement device according to claim 4, wherein,

The displacement device further includes a third position sensor;

One of the dimensions of the third magnet array and the third coil array in the second direction has a dimensional difference portion less than the other, the dimensional difference portion forming a third difference space, and the third position sensor is located at in the third difference space, to measure the movement displacement along the first direction;

and / or

The displacement device further includes a fourth position sensor;

One of the dimensions of the fourth magnet array and the fourth coil array in the third direction has a dimensional difference portion less than the other, the dimensional difference portion forming a fourth difference space, and the fourth position sensor is located at In the fourth difference space, the movement displacement along the first direction is measured.
The displacement device according to any one of claims 1 to 8, characterized in that:

the displacement device includes at least two first frame portions;

the at least two first frame parts are respectively controlled by independent drives;

and / or

The displacement device includes at least one second frame portion, and the at least one second frame portion is linearly extended along the first direction by mechanical splicing.
The displacement device according to any one of claims 1 to 8, characterized in that:

the displacement device includes at least one first frame portion;

The at least one first frame portion is linearly extended along the first direction by mechanical splicing;

and / or

The displacement device includes at least two second frame parts; the at least two second frame parts are controlled by independent drives, respectively.