WO2022095129A1 - Micro light-emitting diode and display panel - Google Patents

Micro light-emitting diode and display panel Download PDF

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Publication number
WO2022095129A1
WO2022095129A1 PCT/CN2020/130040 CN2020130040W WO2022095129A1 WO 2022095129 A1 WO2022095129 A1 WO 2022095129A1 CN 2020130040 W CN2020130040 W CN 2020130040W WO 2022095129 A1 WO2022095129 A1 WO 2022095129A1
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WO
WIPO (PCT)
Prior art keywords
light
layer
disposed
emitting
electrode
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Application number
PCT/CN2020/130040
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French (fr)
Chinese (zh)
Inventor
樊勇
Original Assignee
深圳市华星光电半导体显示技术有限公司
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Publication of WO2022095129A1 publication Critical patent/WO2022095129A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/50Wavelength conversion elements
    • H01L33/505Wavelength conversion elements characterised by the shape, e.g. plate or foil
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/15Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
    • H01L27/153Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars
    • H01L27/156Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars two-dimensional arrays
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/44Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/50Wavelength conversion elements
    • H01L33/507Wavelength conversion elements the elements being in intimate contact with parts other than the semiconductor body or integrated with parts other than the semiconductor body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0008Processes
    • H01L2933/0025Processes relating to coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0008Processes
    • H01L2933/0033Processes relating to semiconductor body packages
    • H01L2933/0041Processes relating to semiconductor body packages relating to wavelength conversion elements

Definitions

  • the present application relates to the field of display technology, and in particular, to a miniature light emitting diode and a display panel.
  • Micro LED (Micro Light Emitting Diode) displays have the advantages of high reliability, high color gamut, high brightness, high transparency, and high pixel density.
  • the LED display has low packaging requirements, and it is very easy to realize flexible and seamless splicing display. It is a display with great development potential in the future.
  • the solution of blue light + photoconversion layer is usually used to realize full-color display. Specifically, by transferring the blue light chips at the positions of the red pixels, green pixels and blue pixels of the driving substrate respectively, and then printing the red quantum dots and the green quantum dots on the color filter substrate respectively, and by the alignment and bonding of the upper and lower substrates. Color conversion to achieve full color display. Since this solution needs to prevent cross-color between red pixels, green pixels and blue pixels, it is usually necessary to separately set a black light-shielding structure between the quantum dots corresponding to adjacent pixels.
  • the thickness of the black light-shielding structure between adjacent quantum dots is relatively large, so that part of the light emitted by the blue chip is absorbed by the black light-shielding structure. And the loss, thereby greatly reducing the light energy utilization rate of the blue light chip, and increasing the energy consumption of the product.
  • the present application provides a miniature light emitting diode and a display panel to solve the technical problem that the utilization rate of light energy of a blue light chip is reduced.
  • the application provides a miniature light-emitting diode, which includes:
  • the light emitted by the light-emitting chip body is blue light
  • the light conversion structure is disposed on the light-emitting side of the light-emitting chip body, and is used for converting the light emitted by the light-emitting chip body into white light;
  • the light conversion structure includes a buffer layer and a light conversion unit, the buffer layer is provided with a plurality of grooves, and each of the grooves accommodates the light conversion unit.
  • the distance between the adjacent grooves increases.
  • the material of the light conversion unit includes red quantum dots and green quantum dots.
  • the light-emitting chip body includes:
  • a second electrode the second electrode and the first electrode are disposed adjacent to each other;
  • the current spreading layer is disposed on the second electrode
  • the first semiconductor layer is disposed on the current diffusion layer
  • the second semiconductor layer is disposed on the light emitting layer and covers the first electrode, and the light conversion structure is located on the second semiconductor layer.
  • the miniature light-emitting diode further includes a blocking structure layer, and the blocking structure layer is disposed on the light conversion structure;
  • the blocking structure layer includes a first inorganic layer, an organic layer and a second inorganic layer sequentially disposed on the light conversion structure.
  • the application also provides a miniature light-emitting diode, which includes:
  • the light conversion structure is disposed on the light-emitting side of the light-emitting chip body, and is used for converting the light emitted by the light-emitting chip body into white light;
  • the light conversion structure includes a buffer layer and a light conversion unit, the buffer layer is provided with at least one groove, and the light conversion unit is accommodated in the groove.
  • the number of the grooves is multiple, and each of the grooves accommodates the light conversion unit.
  • the distance between the adjacent grooves increases in the direction from both sides of the buffer layer to the center of the buffer layer.
  • the light emitted by the light-emitting chip body is blue light
  • the material of the light conversion unit includes red quantum dots and green quantum dots.
  • the light-emitting chip body includes:
  • a second electrode the second electrode and the first electrode are disposed adjacent to each other;
  • the current spreading layer is disposed on the second electrode
  • the first semiconductor layer is disposed on the current diffusion layer
  • the second semiconductor layer is disposed on the light emitting layer and covers the first electrode, and the light conversion structure is located on the second semiconductor layer.
  • the miniature light-emitting diode further includes a blocking structure layer, and the blocking structure layer is disposed on the light conversion structure;
  • the blocking structure layer includes a first inorganic layer, an organic layer and a second inorganic layer sequentially disposed on the light conversion structure.
  • the present application also provides a display panel, which includes:
  • a plurality of miniature light-emitting diodes which are arranged on the driving substrate and are electrically connected to the driving substrate;
  • the miniature light-emitting diodes include:
  • the light conversion structure is disposed on the light-emitting side of the light-emitting chip body, and is used for converting the light emitted by the light-emitting chip body into white light;
  • the light conversion structure includes a buffer layer and a light conversion unit, the buffer layer is provided with at least one groove, and the light conversion unit is accommodated in the groove.
  • the number of the grooves is plural, and each of the grooves accommodates the light conversion unit.
  • the display panel further includes a shading unit, and the shading unit is disposed between the adjacent micro light-emitting diodes.
  • the light emitted by the light-emitting chip body is blue light
  • the material of the light conversion unit includes red quantum dots and green quantum dots.
  • the light-emitting chip body includes:
  • a second electrode the second electrode and the first electrode are disposed adjacent to each other;
  • the current spreading layer is disposed on the second electrode
  • the first semiconductor layer is disposed on the current diffusion layer
  • the second semiconductor layer is disposed on the light emitting layer and covers the first electrode, and the light conversion structure is located on the second semiconductor layer.
  • the miniature light-emitting diode further includes a blocking structure layer, and the blocking structure layer is disposed on the light conversion structure;
  • the blocking structure layer includes a first inorganic layer, an organic layer and a second inorganic layer sequentially disposed on the light conversion structure.
  • the miniature light-emitting diodes Compared with the miniature light-emitting diodes in the prior art, the miniature light-emitting diodes provided by the present application integrate the light conversion unit on the light-emitting chip body. It is accommodated in the groove, thereby shortening the distance between the light-emitting chip body and the light conversion unit, so that the light emitted by the light-emitting chip body can be effectively absorbed by the light conversion unit, thereby improving the light energy utilization rate of the light-emitting chip body. The loss of light energy is reduced, thereby reducing the energy consumption of the product.
  • FIG. 1 is a schematic structural diagram of a miniature light-emitting diode provided by an embodiment of the present application
  • FIG. 2 is a schematic structural diagram of a display panel provided by an embodiment of the present application.
  • FIG. 3 is a schematic structural diagram of a miniature light emitting diode in a display panel provided by an embodiment of the present application.
  • first and second are only used for descriptive purposes, and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, features defined as “first”, “second” may expressly or implicitly include one or more of said features. In the description of the present application, “plurality” means two or more, unless otherwise expressly and specifically defined.
  • the terms “installed”, “connected” and “connected” should be understood in a broad sense, for example, it may be a fixed connection or a detachable connection Connection, or integral connection; it can be mechanical connection, electrical connection or can communicate with each other; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal communication of two elements or the interaction of two elements relation.
  • installed should be understood in a broad sense, for example, it may be a fixed connection or a detachable connection Connection, or integral connection; it can be mechanical connection, electrical connection or can communicate with each other; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal communication of two elements or the interaction of two elements relation.
  • a first feature "on” or “under” a second feature may include direct contact between the first and second features, or may include the first and second features Not directly but through additional features between them.
  • the first feature being “above”, “over” and “above” the second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is level higher than the second feature.
  • the first feature is “below”, “below” and “below” the second feature includes the first feature being directly below and diagonally below the second feature, or simply means that the first feature has a lower level than the second feature.
  • FIG. 1 is a schematic structural diagram of a miniature light emitting diode according to an embodiment of the present application.
  • the embodiment of the present application provides a miniature light emitting diode 100 , which includes a light emitting chip body 10 , a light conversion structure 11 , a blocking structure layer 12 and a protective layer 13 .
  • the light conversion structure 11 is disposed on the light emitting side of the light emitting chip body 10 and is used for converting the light emitted by the light emitting chip body 10 into white light.
  • the blocking structure layer 12 is disposed on the light conversion structure 11 .
  • the protective layer 13 is disposed on the peripheral side of the light-emitting chip body 10 .
  • the light conversion structure 11 includes a buffer layer 111 and a light conversion unit 112 . At least one groove 111A is formed on the buffer layer 111 .
  • the light conversion unit 112 is accommodated in the groove 111A.
  • the micro light-emitting diode 100 integrateds the light conversion unit 112 on the light-emitting chip body 10 .
  • at least one groove 111A is provided on the buffer layer 111 and the light conversion unit 112 is accommodated It is placed in the groove 111A, thereby shortening the distance between the light-emitting chip body 10 and the light conversion unit 112, so that the light emitted by the light-emitting chip body 10 can be effectively absorbed by the light conversion unit 112, thereby improving the light-emitting chip body 10.
  • the utilization rate of light energy reduces the loss of light energy.
  • the light emitted by the light-emitting chip body 10 is blue light.
  • the material of the light conversion unit 112 includes red quantum dots and green quantum dots.
  • the light conversion unit 112 is formed by mixing red quantum dots and green quantum dots in a certain ratio, and the specific ratio of red quantum dots and green quantum dots can be set according to the actual situation, which is not limited in this application.
  • the material of the light conversion unit 112 may also be yellow quantum dots or other light conversion materials capable of converting blue light into white light.
  • the light emitted by the light-emitting chip body 10 is violet light.
  • the material of the light conversion unit 112 may be a mixture of red quantum dots, green quantum dots and blue quantum dots, or may also be other light conversion materials that convert violet light into white light, which will not be repeated here.
  • the light-emitting chip body 10 includes:
  • a second electrode 102, the second electrode 102 and the first electrode 101 are disposed adjacent to each other;
  • the first semiconductor layer 104 is disposed on the current diffusion layer 103;
  • a second semiconductor layer 106 is disposed on the light emitting layer 105 and covers the first electrode 101 , and the light conversion structure 11 is located on the second semiconductor layer 106 .
  • the structure of the light-emitting chip body 10 in the present application is only for illustration and is used to facilitate the description of the embodiments of the present application, but should not be construed as a limitation of the present application.
  • the first electrode 101 is an N-type electrode.
  • the second electrode 102 is a P-type electrode.
  • the materials of the first electrode 101 and the second electrode 102 can be one or more of metals or alloys such as indium, tin, zinc, nickel, silver, aluminum, gold, platinum, palladium, magnesium, tungsten, etc.
  • the materials of the electrode 101 and the second electrode 102 may be the same or different, which are not limited in this application.
  • the current spreading layer 103 is used to increase the light emitting area of the light emitting chip body 10 .
  • the material of the current diffusion layer 103 can be graphene, indium tin oxide, zinc oxide, nickel, silver, aluminum, gold, platinum, palladium, magnesium, tungsten and other materials with good electrical conductivity and reflectivity, and the material of the current diffusion layer 103 It can also be selected according to the actual situation, which is not limited in this application.
  • the first semiconductor layer 104 is a P-type gallium nitride layer. Specifically, the first semiconductor layer 104 is a magnesium-doped gallium nitride layer.
  • the second semiconductor layer 106 is an N-type gallium nitride layer. Specifically, the second semiconductor layer 106 is a silicon-doped gallium nitride layer.
  • the light-emitting layer 105 is a gallium nitride quantum well layer. Specifically, the light emitting layer 105 may be an indium gallium nitride/gallium nitride layer that is sequentially and repeatedly arranged.
  • the materials of the first semiconductor layer 104 , the light emitting layer 105 and the second semiconductor layer 106 in this embodiment can be specifically selected according to the type of the light emitting chip body 10 , and this embodiment should not be construed as a limitation of this application.
  • the protective layer 13 plays a role of blocking water and oxygen, which is used to reduce the decay rate of the performance of each film layer in the micro light emitting diode 100 , thereby increasing the service life of the micro light emitting diode 100 .
  • the material of the protective layer 13 may be a material with good thermal conductivity such as silicon oxide, silicon nitride, silicon oxynitride or aluminum nitride, and the present application does not specifically limit the material of the protective layer 13 .
  • the material of the buffer layer 111 is gallium nitride.
  • the thickness of the buffer layer 111 is between 1 micrometer and 6 micrometers, and the specific thickness of the buffer layer 111 can be set according to the actual situation, which is not repeated here.
  • the number of grooves 111A is multiple.
  • the light conversion unit 112 is accommodated in each groove 111A.
  • the sizes of the multiple grooves 111A in the present application may be the same or different, and the embodiment of the present application only takes the same size of the multiple grooves 111A as an example for description, but is not limited thereto.
  • the cross-sectional shape of the groove 111A in the present application may be a square or a trapezoid, and the present embodiment only takes the trapezoidal cross-sectional shape of the groove 111A as an example for description, which should not be construed as a limitation of the present application.
  • the specific number of the grooves 111A can be set according to the actual situation, which is not limited in this application.
  • the depth of the groove 111A can be set according to the thickness of the buffer layer, which is not repeated here.
  • the red quantum dots and the green quantum dots in the light conversion unit 112 are excited by the blue light to emit red light and green light, respectively.
  • the green light and the blue light are mixed to form white light, thereby obtaining the micro light emitting diode 100 capable of emitting white light.
  • a plurality of grooves 111A are provided on the buffer layer 111, thereby providing a light mixing space for the adjacent light conversion units 112, so that the The light conversion units 112 can be uniformly distributed, which is beneficial to improve the uniformity of the light emitted by the micro light emitting diodes.
  • the greater the number of grooves 111A the smaller the distance between adjacent grooves 111A, and the better the light mixing effect between adjacent light conversion units 112, so that the uniformity of the light emitted by the micro LEDs is better. it is good.
  • the arrangement of the plurality of grooves 111A in this embodiment can not only disperse the quantum dots in a single micro light emitting diode 100, but also Due to the existence of the groove walls in the grooves 111A, the arrangement of the plurality of grooves 111A increases the contact area between the quantum dots and the groove walls, thereby effectively reducing the risk of poor heat dissipation due to excessive concentration of the quantum dots, improving the The heat dissipation effect of the miniature light-emitting diode is improved, thereby helping to improve the service life of the miniature light-emitting diode.
  • the distance between adjacent grooves 111A increases.
  • the above arrangement makes the distance between the adjacent grooves 111A in the center of the buffer layer 111 larger than the distance between the adjacent grooves 111A on both sides, so that the buffer layer 111
  • the occupied area of the light conversion unit 112 in the center is reduced compared to the two sides, that is, at this time, the brightness of the light emitted from the edge of the buffer layer 111 is increased relative to the brightness of the light emitted from the center of the buffer layer 111, thereby reducing the buffer layer 111.
  • the uniformity of the light emitted by the micro light-emitting diode is improved, which is beneficial to improve the light-emitting performance of the micro light-emitting diode.
  • the light converting structure 11 includes a first region and a second region. The first area and the second area are alternately arranged.
  • the groove 111A includes a first groove and a second groove. The first groove is provided in the first area. The second groove is provided in the second area. A second groove is provided between adjacent first grooves.
  • the materials of the light conversion unit 112 in the first groove are red quantum dots and green quantum dots. The material of the light conversion unit 112 in the second groove is yellow quantum dots.
  • the above setting is made by making yellow quantum dots and red and green quantum dots intersect, and the adjacent red and green quantum dots are set as yellow quantum dots, and further.
  • the brightness of the light in the middle region of the buffer layer 111 can be reduced, thereby improving the uniformity of the light emitted by the micro light emitting diode.
  • the barrier structure layer 12 includes a first inorganic layer 121 , an organic layer 122 and a second inorganic layer 123 sequentially disposed on the light conversion structure 11 .
  • the organic material has the function of releasing stress
  • this embodiment by disposing an organic layer 122 in the barrier structure layer 12 , the cracking of the film layer of the micro light emitting diode due to the influence of heat or mechanical stress can be avoided, thereby facilitating the improvement of the micro light emitting diode.
  • the performance of the light-emitting diode further increases the service life of the miniature light-emitting diode.
  • the materials of the first inorganic layer 121 and the second inorganic layer 123 can be inorganic materials such as silicon oxide, silicon nitride, silicon oxynitride, etc., which have a good function of blocking water and oxygen.
  • the material of the organic layer 122 may be an organic material such as polyimide.
  • the material of the first inorganic layer 121 and the material of the second inorganic layer 123 may be the same or different, which is not limited in this application.
  • the preparation method of the miniature light-emitting diode 100 provided in the embodiment of the present application specifically includes the following steps:
  • S101 Provide a base substrate.
  • the above-mentioned base substrate may be a sapphire substrate, a silicon substrate or a silicon carbide substrate.
  • the base substrate is a sapphire substrate.
  • step S102 includes the following steps:
  • the material of the mask layer may be silicon oxide or silicon nitride. In the embodiments of the present application, the material of the mask layer is silicon oxide.
  • the patterned mask layer is a strip-shaped mask layer, that is, a plurality of strip-shaped grooves are formed on the mask layer, and the strip-shaped grooves expose the base substrate.
  • the light-emitting wavelength of the light-emitting chip body will undergo a blue-shift phenomenon.
  • the above arrangement is conducive to the formation of semi-polarity by making the gallium nitride crystal grow laterally along the extending direction of the strip groove.
  • the gallium nitride crystal can improve the blue-shift phenomenon of the light-emitting wavelength, and can maintain the consistency of the light-emitting wavelength under the variable current drive of the micro light-emitting diode, which is beneficial to improve the light-emitting performance of the micro light-emitting diode.
  • the patterned mask layer may also have other shapes, which may be selected according to actual application requirements, which are not limited in this application.
  • a metal organic compound chemical vapor deposition technology is used to grow gallium nitride crystals in the strip grooves, so that the gallium nitride crystals grow along the extending direction of the strip grooves.
  • the gallium nitride crystal is grown to the same thickness as the mask layer, the gallium nitride crystal is continued to grow so that the thickness of the gallium nitride crystal exceeds the thickness of the mask layer, thereby forming the buffer layer 111 .
  • the thickness of the buffer layer 111 is between 1 micrometer and 6 micrometers, and the specific thickness of the buffer layer 111 can be set according to the actual situation, which is not limited in this application.
  • the second semiconductor layer 106 , the light emitting layer 105 and the first semiconductor layer 104 are sequentially formed on the buffer layer 111 using a metal organic compound chemical vapor deposition technique. Wherein, the side of the second semiconductor layer 106 facing the light emitting layer 105 has an exposed portion.
  • a current diffusion layer 103 is formed on the first semiconductor layer 104 by using techniques such as magnetron sputtering or thermal evaporation.
  • the first electrode 101 is formed on the exposed portion of the second semiconductor layer 106
  • the second electrode 102 is formed on the current diffusion layer 103 .
  • the second semiconductor layer 106 , the light emitting layer 105 , the first semiconductor layer 104 , the current spreading layer 103 , the first electrode 101 and the second electrode 102 constitute the light emitting chip body 10 .
  • step S105 includes the following steps:
  • Step S1051 peel off the base substrate
  • Step S1052 Provide a temporary substrate, and place the micro-LED 100 to be formed on the temporary substrate.
  • the material of the above temporary substrate can be selected according to the actual situation, which is not limited in this application.
  • Step S1053 obtaining a plurality of grooves 111A on the buffer layer 111;
  • the strip-shaped mask layer is etched by an etching process to remove the strip-shaped mask layer, so that a strip-shaped groove 111A is formed at the position of the strip-shaped mask layer. Further, a plurality of grooves 111A are obtained on the buffer layer 111 .
  • Step S1054 forming the light conversion structure 11 .
  • a mixture of red quantum dots and green quantum dots is formed in the groove 111A to form the light conversion unit 112 .
  • the buffer layer 111 and the light conversion unit 112 after the stripe-shaped mask layer is removed form the light conversion structure 11 .
  • the formation method of the light conversion unit 112 may be an atomization spray method, a blade coating method, or the like, and the present application does not specifically limit the formation method of the light conversion unit 112 .
  • the second inorganic layer 123 , the organic layer 122 and the first inorganic layer 121 are sequentially formed on the light conversion structure 11 .
  • the formation methods of the second inorganic layer 123 , the organic layer 122 and the first inorganic layer 121 may refer to the formation methods of the inorganic film layer and the organic film layer in the prior art, which will not be repeated here.
  • the miniature light-emitting diode 100 integrates the light conversion unit 112 on the light-emitting chip body 10 .
  • a plurality of grooves 111A are provided on the buffer layer 111 , and the light conversion unit 112 is accommodated in the recess.
  • the distance between the light-emitting chip body 10 and the light conversion unit 112 is shortened, so that the light emitted by the light-emitting chip body 10 can be effectively absorbed by the light conversion unit 112, thereby improving the light energy utilization of the light-emitting chip body 10. rate, reducing the loss of light energy.
  • the arrangement of the plurality of grooves 111A in this embodiment is beneficial to improve the uniformity of the light emitted by the micro light emitting diode, thereby helping to improve the light emitting performance of the micro light emitting diode.
  • FIG. 2 is a schematic structural diagram of a display panel provided by an embodiment of the application
  • FIG. 3 is a structural schematic diagram of a micro light-emitting diode in a display panel provided by an embodiment of the application.
  • An embodiment of the present application provides a display panel 200 , which includes a driving substrate 20 , a plurality of miniature light-emitting diodes 100 and a color filter substrate 21 .
  • a plurality of micro light-emitting diodes 100 are disposed on the driving substrate 20 and are electrically connected to the driving substrate 20 .
  • the color filter substrate 21 is disposed on the side of the micro light emitting diode 100 away from the driving substrate 20 .
  • the miniature light-emitting diode 100 includes a light-emitting chip body 10 and a light conversion structure 11 .
  • the light conversion structure 11 is disposed on the light emitting side of the light emitting chip body 10 and is used for converting the light emitted by the light emitting chip body 10 into white light.
  • the light conversion structure 11 includes a buffer layer 111 and a light conversion unit 112 . At least one groove 111A is formed on the buffer layer 111 .
  • the light conversion unit 112 is accommodated in the groove 111A.
  • the light conversion unit 112 is integrated on the light-emitting chip body 10 , specifically, at least one groove 111A is provided on the buffer layer 111 to accommodate the light conversion unit 112 in the groove 111A, thereby shortening the distance between the light-emitting chip body 10 and the light conversion unit 112 , so that the light emitted by the light-emitting chip body 10 can be effectively absorbed by the light conversion unit 112 , thereby improving the light emission of the light-emitting chip body 10
  • the energy utilization rate is reduced, and the energy consumption of the display panel is reduced.
  • the inkjet printing process can be omitted, which is beneficial to save the process cost and reduce the dependence on equipment.
  • the black light-shielding structure between the quantum dots corresponding to adjacent pixels on the original color filter substrate 21 is omitted, thereby further reducing the process cost.
  • micro light emitting diode 100 for the specific structure of the micro light emitting diode 100 and the materials of each film layer in the embodiment of the present application, reference may be made to the description of the micro light emitting diode 100 in the foregoing embodiments, which will not be repeated here.
  • the display panel 200 further includes a light shielding unit 22 .
  • the light-shielding unit 22 is disposed between adjacent miniature light-emitting diodes 100 . Specifically, the side of the light shielding unit 22 away from the driving substrate 20 is flush with the side of the light conversion structure 11 away from the substrate. Therefore, in this embodiment, a light shielding unit 22 is shared between the light conversion structures 11 corresponding to the adjacent miniature light emitting diodes 100 and the light emitting chip body 10 , thereby saving the process cost.
  • the side of the light shielding unit 22 away from the driving substrate 20 is flush with the side of the blocking structure layer 12 away from the substrate.
  • This arrangement can prevent the occurrence of cross-color between adjacent micro light-emitting diodes 100 to the greatest extent, can avoid the loss of light energy of the light-emitting chip body 10, and further improve the light energy utilization rate of the light-emitting chip body 10, thereby improving the light conversion unit 112. luminous efficiency.
  • the color filter substrate 21 includes a base 21A and a color filter layer 21B disposed on the base 21A.
  • the color filter layer 21B is located on the side of the base 21A close to the driving substrate 20 .
  • the color filter layer 21B includes a red color filter block 211 , a green color filter block 212 and a blue color filter block 213 which are arranged adjacently.
  • the color filter substrate 21 further includes a black matrix 214 disposed between the red filter block 211 , the green filter block 212 and the blue filter block 213 .
  • the display panel 200 provided by the embodiment of the present application integrates the light conversion unit 112 on the light-emitting chip body 10 , specifically, at least one groove 111A is provided on the buffer layer 111 , and the light conversion unit 112 is accommodated in the groove 111A, thereby shortening the distance between the light-emitting chip body 10 and the light conversion unit 112, so that the light emitted by the light-emitting chip body 10 can be effectively absorbed by the light conversion unit 112, thereby improving the light energy utilization rate of the light-emitting chip body 10. , reducing the power consumption of the display panel.
  • the present embodiment omits the ink jet printing technology, thereby simplifying the process and saving the process cost.
  • the miniature light-emitting diodes Compared with the miniature light-emitting diodes in the prior art, the miniature light-emitting diodes provided by the present application integrate the light conversion unit on the light-emitting chip body. It is accommodated in the groove, thereby shortening the distance between the light-emitting chip body and the light conversion unit, so that the light emitted by the light-emitting chip body can be effectively absorbed by the light conversion unit, thereby improving the light energy utilization rate of the light-emitting chip body. The loss of light energy is reduced, thereby reducing the energy consumption of the product.

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Abstract

A micro light-emitting diode (100) and a display panel (200). The micro light-emitting diode (100) comprises a light-emitting chip body (10) and a light conversion structure (11); the light conversion structure (11) is provided at the light-emitting side of the light-emitting chip body (10), and is used for converting light emitted by the light-emitting chip body (10) into white light; the light conversion structure (11) comprises a buffer layer (111) and a light conversion unit (112); at least one groove (111A) is formed on the buffer layer (111); and the light conversion unit (112) is accommodated in the groove (111A).

Description

微型发光二极管及显示面板Micro LEDs and Display Panels 技术领域technical field
本申请涉及显示技术领域,具体涉及一种微型发光二极管及显示面板。The present application relates to the field of display technology, and in particular, to a miniature light emitting diode and a display panel.
背景技术Background technique
Micro LED(Micro Light Emitting Diode,微型发光二极管)显示器具有可靠性高、色域高、亮度高、透明度高、像素密度高等优点,且Micro LED显示器的封装要求低,非常容易实现柔性及无缝拼接显示,是未来极具有发展潜力的显示器。Micro LED (Micro Light Emitting Diode) displays have the advantages of high reliability, high color gamut, high brightness, high transparency, and high pixel density. The LED display has low packaging requirements, and it is very easy to realize flexible and seamless splicing display. It is a display with great development potential in the future.
目前,在Micro LED显示器的全彩化显示技术中,通常采用蓝光+光致转换层的方案来实现全彩化显示。具体的,通过在驱动基板的红像素、绿像素和蓝像素位置处分别转移蓝光芯片,然后在彩膜基板上分别打印红色量子点和绿色量子点,并通过上下基板的对位贴合来实现颜色的转换,以实现全彩化显示。由于该方案需要防止红像素、绿像素和蓝像素之间的串色,因而通常需要在相邻像素对应的量子点之间单独设置黑色遮光结构。At present, in the full-color display technology of Micro LED displays, the solution of blue light + photoconversion layer is usually used to realize full-color display. Specifically, by transferring the blue light chips at the positions of the red pixels, green pixels and blue pixels of the driving substrate respectively, and then printing the red quantum dots and the green quantum dots on the color filter substrate respectively, and by the alignment and bonding of the upper and lower substrates. Color conversion to achieve full color display. Since this solution needs to prevent cross-color between red pixels, green pixels and blue pixels, it is usually necessary to separately set a black light-shielding structure between the quantum dots corresponding to adjacent pixels.
技术问题technical problem
由于采用喷墨打印的方式在彩膜基板上形成红绿量子点来实现颜色转换时,相邻量子点之间黑色遮光结构的厚度较大,使得蓝光芯片发出的部分光因被黑色遮光结构吸收而损失掉,进而大大降低了蓝光芯片的光能利用率,增加了产品的能耗。Since the red and green quantum dots are formed on the color filter substrate by inkjet printing to realize color conversion, the thickness of the black light-shielding structure between adjacent quantum dots is relatively large, so that part of the light emitted by the blue chip is absorbed by the black light-shielding structure. And the loss, thereby greatly reducing the light energy utilization rate of the blue light chip, and increasing the energy consumption of the product.
技术解决方案technical solutions
本申请提供一种微型发光二极管及显示面板,以解决蓝光芯片光能利用率降低的技术问题。The present application provides a miniature light emitting diode and a display panel to solve the technical problem that the utilization rate of light energy of a blue light chip is reduced.
本申请提供一种微型发光二极管,其包括:The application provides a miniature light-emitting diode, which includes:
一发光芯片本体,所述发光芯片本体发出的光为蓝光;以及a light-emitting chip body, the light emitted by the light-emitting chip body is blue light; and
一光转换结构,所述光转换结构设置于所述发光芯片本体的发光侧,并用于将所述发光芯片本体发出的光转换成白光;a light conversion structure, the light conversion structure is disposed on the light-emitting side of the light-emitting chip body, and is used for converting the light emitted by the light-emitting chip body into white light;
所述光转换结构包括缓冲层和光转换单元,所述缓冲层上设置有多个凹槽,每一所述凹槽内均容置有所述光转换单元。The light conversion structure includes a buffer layer and a light conversion unit, the buffer layer is provided with a plurality of grooves, and each of the grooves accommodates the light conversion unit.
在本申请的微型发光二极管中,自所述缓冲层的两侧向所述缓冲层的中心的方向上,相邻所述凹槽之间的距离递增。In the miniature light emitting diode of the present application, in the direction from both sides of the buffer layer to the center of the buffer layer, the distance between the adjacent grooves increases.
在本申请的微型发光二极管中,所述光转换单元的材料包括红色量子点和绿色量子点。In the miniature light-emitting diode of the present application, the material of the light conversion unit includes red quantum dots and green quantum dots.
在本申请的微型发光二极管中,所述发光芯片本体包括:In the miniature light-emitting diode of the present application, the light-emitting chip body includes:
一第一电极;a first electrode;
一第二电极,所述第二电极和所述第一电极相邻设置;a second electrode, the second electrode and the first electrode are disposed adjacent to each other;
一电流扩散层,所述电流扩散层设置于所述第二电极上;a current spreading layer, the current spreading layer is disposed on the second electrode;
一第一半导体层,所述第一半导体层设置于所述电流扩散层上;a first semiconductor layer, the first semiconductor layer is disposed on the current diffusion layer;
一发光层,所述发光层设置于所述第一半导体层上;以及a light-emitting layer disposed on the first semiconductor layer; and
一第二半导体层,所述第二半导体层设置于所述发光层上,并覆盖所述第一电极,所述光转换结构位于所述第二半导体层上。a second semiconductor layer, the second semiconductor layer is disposed on the light emitting layer and covers the first electrode, and the light conversion structure is located on the second semiconductor layer.
在本申请的微型发光二极管中,所述微型发光二极管还包括一阻隔结构层,所述阻隔结构层设置于所述光转换结构上;In the miniature light-emitting diode of the present application, the miniature light-emitting diode further includes a blocking structure layer, and the blocking structure layer is disposed on the light conversion structure;
所述阻隔结构层包括依次设置于所述光转换结构上的第一无机层、有机层和第二无机层。The blocking structure layer includes a first inorganic layer, an organic layer and a second inorganic layer sequentially disposed on the light conversion structure.
本申请还提供一种微型发光二极管,其包括:The application also provides a miniature light-emitting diode, which includes:
一发光芯片本体;以及a light-emitting chip body; and
一光转换结构,所述光转换结构设置于所述发光芯片本体的发光侧,并用于将所述发光芯片本体发出的光转换成白光;a light conversion structure, the light conversion structure is disposed on the light-emitting side of the light-emitting chip body, and is used for converting the light emitted by the light-emitting chip body into white light;
所述光转换结构包括缓冲层和光转换单元,所述缓冲层上设置有至少一凹槽,所述光转换单元容置于所述凹槽内。The light conversion structure includes a buffer layer and a light conversion unit, the buffer layer is provided with at least one groove, and the light conversion unit is accommodated in the groove.
在本申请的微型发光二极管中,所述凹槽的数量为多个,每一所述凹槽内均容置有所述光转换单元。In the miniature light emitting diode of the present application, the number of the grooves is multiple, and each of the grooves accommodates the light conversion unit.
在本申请的微型发光二极管中,自所述缓冲层的两侧向所述缓冲层的中心的方向上,相邻所述凹槽之间的距离递增。In the micro light emitting diode of the present application, the distance between the adjacent grooves increases in the direction from both sides of the buffer layer to the center of the buffer layer.
在本申请的微型发光二极管中,所述发光芯片本体发出的光为蓝光;In the miniature light-emitting diode of the present application, the light emitted by the light-emitting chip body is blue light;
所述光转换单元的材料包括红色量子点和绿色量子点。The material of the light conversion unit includes red quantum dots and green quantum dots.
在本申请的微型发光二极管中,所述发光芯片本体包括:In the miniature light-emitting diode of the present application, the light-emitting chip body includes:
一第一电极;a first electrode;
一第二电极,所述第二电极和所述第一电极相邻设置;a second electrode, the second electrode and the first electrode are disposed adjacent to each other;
一电流扩散层,所述电流扩散层设置于所述第二电极上;a current spreading layer, the current spreading layer is disposed on the second electrode;
一第一半导体层,所述第一半导体层设置于所述电流扩散层上;a first semiconductor layer, the first semiconductor layer is disposed on the current diffusion layer;
一发光层,所述发光层设置于所述第一半导体层上;以及a light-emitting layer disposed on the first semiconductor layer; and
一第二半导体层,所述第二半导体层设置于所述发光层上,并覆盖所述第一电极,所述光转换结构位于所述第二半导体层上。a second semiconductor layer, the second semiconductor layer is disposed on the light emitting layer and covers the first electrode, and the light conversion structure is located on the second semiconductor layer.
在本申请的微型发光二极管中,所述微型发光二极管还包括一阻隔结构层,所述阻隔结构层设置于所述光转换结构上;In the miniature light-emitting diode of the present application, the miniature light-emitting diode further includes a blocking structure layer, and the blocking structure layer is disposed on the light conversion structure;
所述阻隔结构层包括依次设置于所述光转换结构上的第一无机层、有机层和第二无机层。The blocking structure layer includes a first inorganic layer, an organic layer and a second inorganic layer sequentially disposed on the light conversion structure.
本申请还提供一种显示面板,其包括:The present application also provides a display panel, which includes:
驱动基板;以及a drive substrate; and
多个微型发光二极管,多个所述微型发光二极管设置于所述驱动基板上,并电性连接于所述驱动基板;a plurality of miniature light-emitting diodes, which are arranged on the driving substrate and are electrically connected to the driving substrate;
所述微型发光二极管包括:The miniature light-emitting diodes include:
一发光芯片本体;以及a light-emitting chip body; and
一光转换结构,所述光转换结构设置于所述发光芯片本体的发光侧,并用于将所述发光芯片本体发出的光转换成白光;a light conversion structure, the light conversion structure is disposed on the light-emitting side of the light-emitting chip body, and is used for converting the light emitted by the light-emitting chip body into white light;
所述光转换结构包括缓冲层和光转换单元,所述缓冲层上设置有至少一凹槽,所述光转换单元容置于所述凹槽内。The light conversion structure includes a buffer layer and a light conversion unit, the buffer layer is provided with at least one groove, and the light conversion unit is accommodated in the groove.
在本申请的显示面板中,所述凹槽的数量为多个,每一所述凹槽内均容置有所述光转换单元。In the display panel of the present application, the number of the grooves is plural, and each of the grooves accommodates the light conversion unit.
在本申请的显示面板中,自所述缓冲层的两侧向所述缓冲层的中心的方向上,相邻所述凹槽之间的距离递增。In the display panel of the present application, in the direction from both sides of the buffer layer to the center of the buffer layer, the distance between the adjacent grooves increases.
在本申请的显示面板中,所述显示面板还包括一遮光单元,所述遮光单元设置于相邻的所述微型发光二极管之间。In the display panel of the present application, the display panel further includes a shading unit, and the shading unit is disposed between the adjacent micro light-emitting diodes.
在本申请的显示面板中,所述发光芯片本体发出的光为蓝光;In the display panel of the present application, the light emitted by the light-emitting chip body is blue light;
所述光转换单元的材料包括红色量子点和绿色量子点。The material of the light conversion unit includes red quantum dots and green quantum dots.
在本申请的显示面板中,所述发光芯片本体包括:In the display panel of the present application, the light-emitting chip body includes:
一第一电极;a first electrode;
一第二电极,所述第二电极和所述第一电极相邻设置;a second electrode, the second electrode and the first electrode are disposed adjacent to each other;
一电流扩散层,所述电流扩散层设置于所述第二电极上;a current spreading layer, the current spreading layer is disposed on the second electrode;
一第一半导体层,所述第一半导体层设置于所述电流扩散层上;a first semiconductor layer, the first semiconductor layer is disposed on the current diffusion layer;
一发光层,所述发光层设置于所述第一半导体层上;以及a light-emitting layer disposed on the first semiconductor layer; and
一第二半导体层,所述第二半导体层设置于所述发光层上,并覆盖所述第一电极,所述光转换结构位于所述第二半导体层上。a second semiconductor layer, the second semiconductor layer is disposed on the light emitting layer and covers the first electrode, and the light conversion structure is located on the second semiconductor layer.
在本申请的显示面板中,所述微型发光二极管还包括一阻隔结构层,所述阻隔结构层设置于所述光转换结构上;In the display panel of the present application, the miniature light-emitting diode further includes a blocking structure layer, and the blocking structure layer is disposed on the light conversion structure;
所述阻隔结构层包括依次设置于所述光转换结构上的第一无机层、有机层和第二无机层。The blocking structure layer includes a first inorganic layer, an organic layer and a second inorganic layer sequentially disposed on the light conversion structure.
有益效果beneficial effect
相较于现有技术中的微型发光二极管,本申请提供的微型发光二极管通过将光转换单元集成在发光芯片本体上,具体的,通过在缓冲层上设置至少一凹槽,并将光转换单元容置于凹槽内,进而缩短了发光芯片本体与光转换单元之间的距离,使得发光芯片本体发出的光能够有效地被光转换单元吸收,从而提高了发光芯片本体的光能利用率,降低了光能的损耗,进而降低了产品的能耗。Compared with the miniature light-emitting diodes in the prior art, the miniature light-emitting diodes provided by the present application integrate the light conversion unit on the light-emitting chip body. It is accommodated in the groove, thereby shortening the distance between the light-emitting chip body and the light conversion unit, so that the light emitted by the light-emitting chip body can be effectively absorbed by the light conversion unit, thereby improving the light energy utilization rate of the light-emitting chip body. The loss of light energy is reduced, thereby reducing the energy consumption of the product.
附图说明Description of drawings
为了更清楚地说明本申请实施例中的技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本申请的一些实施例,对于本领域技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to illustrate the technical solutions in the embodiments of the present application more clearly, the following briefly introduces the drawings that are used in the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present application. For those skilled in the art, other drawings can also be obtained from these drawings without creative effort.
图1是本申请实施例提供的微型发光二极管的结构示意图;1 is a schematic structural diagram of a miniature light-emitting diode provided by an embodiment of the present application;
图2是本申请实施例提供的显示面板的结构示意图;FIG. 2 is a schematic structural diagram of a display panel provided by an embodiment of the present application;
图3是本申请实施例提供的显示面板中微型发光二极管的结构示意图。FIG. 3 is a schematic structural diagram of a miniature light emitting diode in a display panel provided by an embodiment of the present application.
本发明的实施方式Embodiments of the present invention
下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本申请一部分实施例,而不是全部的实施例。基于本申请中的实施例,本领域技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本申请保护的范围。The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, but not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.
在本申请的描述中,需要理解的是,术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”、“顺时针”、“逆时针”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本申请和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本申请的限制。此外,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个所述特征。在本申请的描述中,“多个”的含义是两个或两个以上,除非另有明确具体的限定。In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", " rear, left, right, vertical, horizontal, top, bottom, inside, outside, clockwise, counterclockwise, etc., or The positional relationship is based on the orientation or positional relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, Therefore, it should not be construed as a limitation on this application. In addition, the terms "first" and "second" are only used for descriptive purposes, and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, features defined as "first", "second" may expressly or implicitly include one or more of said features. In the description of the present application, "plurality" means two or more, unless otherwise expressly and specifically defined.
在本申请的描述中,需要说明的是,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接或可以相互通讯;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通或两个元件的相互作用关系。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本申请中的具体含义。In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it may be a fixed connection or a detachable connection Connection, or integral connection; it can be mechanical connection, electrical connection or can communicate with each other; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal communication of two elements or the interaction of two elements relation. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific situations.
在本申请中,除非另有明确的规定和限定,第一特征在第二特征之“上”或之“下”可以包括第一和第二特征直接接触,也可以包括第一和第二特征不是直接接触而是通过它们之间的另外的特征接触。而且,第一特征在第二特征“之上”、“上方”和“上面”包括第一特征在第二特征正上方和斜上方,或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”包括第一特征在第二特征正下方和斜下方,或仅仅表示第一特征水平高度小于第二特征。In this application, unless otherwise expressly specified and defined, a first feature "on" or "under" a second feature may include direct contact between the first and second features, or may include the first and second features Not directly but through additional features between them. Also, the first feature being "above", "over" and "above" the second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is level higher than the second feature. The first feature is "below", "below" and "below" the second feature includes the first feature being directly below and diagonally below the second feature, or simply means that the first feature has a lower level than the second feature.
下文的公开提供了许多不同的实施方式或例子用来实现本申请的不同结构。为了简化本申请的公开,下文中对特定例子的部件和设置进行描述。当然,它们仅仅为示例,并且目的不在于限制本申请。此外,本申请可以在不同例子中重复参考数字和/或参考字母,这种重复是为了简化和清楚的目的,其本身不指示所讨论各种实施方式和/或设置之间的关系。此外,本申请提供了的各种特定的工艺和材料的例子,但是本领域普通技术人员可以意识到其他工艺的应用和/或其他材料的使用。The following disclosure provides many different embodiments or examples for implementing different structures of the present application. To simplify the disclosure of the present application, the components and arrangements of specific examples are described below. Of course, they are only examples and are not intended to limit the application. Furthermore, this application may repeat reference numerals and/or reference letters in different instances for the purpose of simplicity and clarity, and does not in itself indicate a relationship between the various embodiments and/or arrangements discussed. In addition, this application provides examples of various specific processes and materials, but one of ordinary skill in the art will recognize the application of other processes and/or the use of other materials.
请参阅图1,图1为本申请实施例提供的微型发光二极管的结构示意图。Please refer to FIG. 1 , which is a schematic structural diagram of a miniature light emitting diode according to an embodiment of the present application.
本申请实施例提供一种微型发光二极管100,其包括一发光芯片本体10、一光转换结构11、一阻隔结构层12和一保护层13。光转换结构11设置于发光芯片本体10的发光侧,并用于将发光芯片本体10发出的光转换成白光。阻隔结构层12设置于光转换结构11上。保护层13设置于发光芯片本体10的周侧。其中,光转换结构11包括缓冲层111和光转换单元112。缓冲层111上设置有至少一凹槽111A。光转换单元112容置于凹槽111A内。The embodiment of the present application provides a miniature light emitting diode 100 , which includes a light emitting chip body 10 , a light conversion structure 11 , a blocking structure layer 12 and a protective layer 13 . The light conversion structure 11 is disposed on the light emitting side of the light emitting chip body 10 and is used for converting the light emitted by the light emitting chip body 10 into white light. The blocking structure layer 12 is disposed on the light conversion structure 11 . The protective layer 13 is disposed on the peripheral side of the light-emitting chip body 10 . The light conversion structure 11 includes a buffer layer 111 and a light conversion unit 112 . At least one groove 111A is formed on the buffer layer 111 . The light conversion unit 112 is accommodated in the groove 111A.
由此,本申请实施例提供的微型发光二极管100通过将光转换单元112集成在发光芯片本体10上,具体的,通过在缓冲层111上设置至少一凹槽111A,并将光转换单元112容置于凹槽111A内,进而缩短了发光芯片本体10与光转换单元112之间的距离,使得发光芯片本体10发出的光能够有效地被光转换单元112吸收,从而提高了发光芯片本体10的光能利用率,降低了光能的损耗。Therefore, the micro light-emitting diode 100 provided by the embodiment of the present application integrates the light conversion unit 112 on the light-emitting chip body 10 . Specifically, at least one groove 111A is provided on the buffer layer 111 and the light conversion unit 112 is accommodated It is placed in the groove 111A, thereby shortening the distance between the light-emitting chip body 10 and the light conversion unit 112, so that the light emitted by the light-emitting chip body 10 can be effectively absorbed by the light conversion unit 112, thereby improving the light-emitting chip body 10. The utilization rate of light energy reduces the loss of light energy.
在本申请实施例中,发光芯片本体10发出的光为蓝光。光转换单元112的材料包括红色量子点和绿色量子点。其中,光转换单元112由一定配比的红色量子点和绿色量子点混合而成,红色量子点和绿色量子点的具体配比可以根据实际情况进行设定,本申请对此不作限定。In the embodiment of the present application, the light emitted by the light-emitting chip body 10 is blue light. The material of the light conversion unit 112 includes red quantum dots and green quantum dots. The light conversion unit 112 is formed by mixing red quantum dots and green quantum dots in a certain ratio, and the specific ratio of red quantum dots and green quantum dots can be set according to the actual situation, which is not limited in this application.
在一些实施例中,光转换单元112的材料还可以为黄色量子点或者其他能够将蓝光转换成白光的光转换材料。In some embodiments, the material of the light conversion unit 112 may also be yellow quantum dots or other light conversion materials capable of converting blue light into white light.
另外,在一些实施例中,发光芯片本体10发出的光为紫光。此时,光转换单元112的材料可以为红色量子点、绿色量子点和蓝色量子点的混合,或者,还可以为其他将紫光转换成白光的光转换材料,在此不再赘述。In addition, in some embodiments, the light emitted by the light-emitting chip body 10 is violet light. At this time, the material of the light conversion unit 112 may be a mixture of red quantum dots, green quantum dots and blue quantum dots, or may also be other light conversion materials that convert violet light into white light, which will not be repeated here.
进一步的,在本申请实施例中,发光芯片本体10包括:Further, in the embodiment of the present application, the light-emitting chip body 10 includes:
一第一电极101;a first electrode 101;
一第二电极102,第二电极102和第一电极101相邻设置;a second electrode 102, the second electrode 102 and the first electrode 101 are disposed adjacent to each other;
一电流扩散层103,电流扩散层103设置于第二电极102上;a current spreading layer 103 disposed on the second electrode 102;
一第一半导体层104,第一半导体层104设置于电流扩散层103上;a first semiconductor layer 104, the first semiconductor layer 104 is disposed on the current diffusion layer 103;
一发光层105,发光层105设置于第一半导体层104上;以及a light-emitting layer 105 disposed on the first semiconductor layer 104; and
一第二半导体层106,第二半导体层106设置于发光层105上,并覆盖第一电极101,光转换结构11位于第二半导体层106上。A second semiconductor layer 106 is disposed on the light emitting layer 105 and covers the first electrode 101 , and the light conversion structure 11 is located on the second semiconductor layer 106 .
需要说明的是,本申请中发光芯片本体10的结构仅为示意,用以方便描述本申请实施例,但并不能理解为对本申请的限制。It should be noted that the structure of the light-emitting chip body 10 in the present application is only for illustration and is used to facilitate the description of the embodiments of the present application, but should not be construed as a limitation of the present application.
其中,第一电极101为N型电极。第二电极102为P型电极。第一电极101和第二电极102的材料均可以为铟、锡、锌、镍、银、铝、金、铂、钯、镁、钨等金属或合金中的一种或几种,且第一电极101和第二电极102的材料可以相同,也可以不同,本申请对此不作限定。The first electrode 101 is an N-type electrode. The second electrode 102 is a P-type electrode. The materials of the first electrode 101 and the second electrode 102 can be one or more of metals or alloys such as indium, tin, zinc, nickel, silver, aluminum, gold, platinum, palladium, magnesium, tungsten, etc. The materials of the electrode 101 and the second electrode 102 may be the same or different, which are not limited in this application.
电流扩散层103用于增加发光芯片本体10的发光面积。电流扩散层103的材料可以为石墨烯、氧化铟锡、氧化锌、镍、银、铝、金、铂、钯、镁、钨等导电性能及反射性能较好的材料,电流扩散层103的材料还可以根据实际情况进行选择,本申请对此不作限定。The current spreading layer 103 is used to increase the light emitting area of the light emitting chip body 10 . The material of the current diffusion layer 103 can be graphene, indium tin oxide, zinc oxide, nickel, silver, aluminum, gold, platinum, palladium, magnesium, tungsten and other materials with good electrical conductivity and reflectivity, and the material of the current diffusion layer 103 It can also be selected according to the actual situation, which is not limited in this application.
第一半导体层104为P型氮化镓层。具体的,第一半导体层104为掺杂镁的氮化镓层。The first semiconductor layer 104 is a P-type gallium nitride layer. Specifically, the first semiconductor layer 104 is a magnesium-doped gallium nitride layer.
第二半导体层106为N型氮化镓层。具体的,第二半导体层106为掺杂硅的氮化镓层。The second semiconductor layer 106 is an N-type gallium nitride layer. Specifically, the second semiconductor layer 106 is a silicon-doped gallium nitride layer.
发光层105为氮化镓量子阱层。具体的,发光层105可以为依次重复排列的氮化铟镓/氮化镓层。The light-emitting layer 105 is a gallium nitride quantum well layer. Specifically, the light emitting layer 105 may be an indium gallium nitride/gallium nitride layer that is sequentially and repeatedly arranged.
需要说明的是,本实施例中第一半导体层104、发光层105及第二半导体层106的材料具体可以根据发光芯片本体10的种类进行选择,本实施例不能理解为对本申请的限制。It should be noted that the materials of the first semiconductor layer 104 , the light emitting layer 105 and the second semiconductor layer 106 in this embodiment can be specifically selected according to the type of the light emitting chip body 10 , and this embodiment should not be construed as a limitation of this application.
另外,在本申请实施例中,保护层13起到阻隔水氧的作用,其用于降低微型发光二极管100中各膜层性能的衰减速率,进而提升微型发光二极管100的使用寿命。其中,保护层13的材料可以为氧化硅、氮化硅、氮氧化硅或氮化铝等导热性能良好的材料,本申请对保护层13的材料不作具体限定。In addition, in the embodiment of the present application, the protective layer 13 plays a role of blocking water and oxygen, which is used to reduce the decay rate of the performance of each film layer in the micro light emitting diode 100 , thereby increasing the service life of the micro light emitting diode 100 . The material of the protective layer 13 may be a material with good thermal conductivity such as silicon oxide, silicon nitride, silicon oxynitride or aluminum nitride, and the present application does not specifically limit the material of the protective layer 13 .
在本申请实施例中,缓冲层111的材料为氮化镓。缓冲层111的厚度介于1微米至6微米之间,缓冲层111的具体厚度可以根据实际情况进行设定,在此不再赘述。In the embodiment of the present application, the material of the buffer layer 111 is gallium nitride. The thickness of the buffer layer 111 is between 1 micrometer and 6 micrometers, and the specific thickness of the buffer layer 111 can be set according to the actual situation, which is not repeated here.
在本申请实施例中,凹槽111A的数量为多个。每一凹槽111A内均容置有光转换单元112。In the embodiment of the present application, the number of grooves 111A is multiple. The light conversion unit 112 is accommodated in each groove 111A.
需要说明的是,本申请中多个凹槽111A的尺寸可以相同,也可以不同,本申请实施例仅以多个凹槽111A的尺寸相同为例进行说明,但并不限于此。另外,本申请中凹槽111A的截面形状可以为方形或梯形等,本实施例仅以凹槽111A的截面形状为梯形为例进行说明,但并不能理解为对本申请的限制。It should be noted that the sizes of the multiple grooves 111A in the present application may be the same or different, and the embodiment of the present application only takes the same size of the multiple grooves 111A as an example for description, but is not limited thereto. In addition, the cross-sectional shape of the groove 111A in the present application may be a square or a trapezoid, and the present embodiment only takes the trapezoidal cross-sectional shape of the groove 111A as an example for description, which should not be construed as a limitation of the present application.
进一步的,凹槽111A的具体个数可以根据实际情况进行设定,本申请对此不作限定。凹槽111A的深度可以根据缓冲层的厚度进行设定,在此不再赘述。Further, the specific number of the grooves 111A can be set according to the actual situation, which is not limited in this application. The depth of the groove 111A can be set according to the thickness of the buffer layer, which is not repeated here.
可以理解的是,当发光芯片本体10发出的蓝光射向光转换单元112时,光转换单元112中的红色量子点和绿色量子点受到蓝光的激发而分别发出红光和绿光,红光、绿光和蓝光混合而形成白光,进而得到能够发出白光的微型发光二极管100。It can be understood that when the blue light emitted by the light-emitting chip body 10 is directed to the light conversion unit 112, the red quantum dots and the green quantum dots in the light conversion unit 112 are excited by the blue light to emit red light and green light, respectively. The green light and the blue light are mixed to form white light, thereby obtaining the micro light emitting diode 100 capable of emitting white light.
在本实施例中,当缓冲层111的厚度一定时,通过在缓冲层111上设置多个凹槽111A,进而为相邻的光转换单元112提供了混光空间,使得单个微型发光二极管中的光转换单元112能够均匀分布,从而有利于提高微型发光二极管出射光线的均一性。进一步的,凹槽111A的数量越多,相邻凹槽111A之间的距离越小,相邻的光转换单元112之间的混光效果越好,从而使得微型发光二极管出射光线的均一性越好。In this embodiment, when the thickness of the buffer layer 111 is constant, a plurality of grooves 111A are provided on the buffer layer 111, thereby providing a light mixing space for the adjacent light conversion units 112, so that the The light conversion units 112 can be uniformly distributed, which is beneficial to improve the uniformity of the light emitted by the micro light emitting diodes. Further, the greater the number of grooves 111A, the smaller the distance between adjacent grooves 111A, and the better the light mixing effect between adjacent light conversion units 112, so that the uniformity of the light emitted by the micro LEDs is better. it is good.
进一步的,由于光转换单元112中的红绿量子点所在区域的散热性能较差,本实施例中多个凹槽111A的设置不仅能够将单个微型发光二极管100中的量子点分散开来,而且由于凹槽111A内槽壁的存在,多个凹槽111A的设置增大了量子点和槽壁之间的接触面积,进而有效降低了因量子点过于集中而出现散热性较差的风险,提高了微型发光二极管的散热效果,从而有利于提高微型发光二极管的使用寿命。Further, due to the poor heat dissipation performance of the area where the red and green quantum dots in the light conversion unit 112 are located, the arrangement of the plurality of grooves 111A in this embodiment can not only disperse the quantum dots in a single micro light emitting diode 100, but also Due to the existence of the groove walls in the grooves 111A, the arrangement of the plurality of grooves 111A increases the contact area between the quantum dots and the groove walls, thereby effectively reducing the risk of poor heat dissipation due to excessive concentration of the quantum dots, improving the The heat dissipation effect of the miniature light-emitting diode is improved, thereby helping to improve the service life of the miniature light-emitting diode.
进一步的,在一些实施例中,自缓冲层111的两侧向缓冲层111的中心的方向上,相邻凹槽111A之间的距离递增。Further, in some embodiments, in the direction from both sides of the buffer layer 111 to the center of the buffer layer 111 , the distance between adjacent grooves 111A increases.
可以理解的是,由于位于缓冲层111两侧的光的亮度低于位于缓冲层111中心的光的亮度,由此导致微型发光二极管发出的光出现不均匀的问题。在多个凹槽111A的尺寸均相同的情况下,上述设置通过使缓冲层111中心的相邻凹槽111A之间的距离大于两侧的相邻凹槽111A之间的距离,使得缓冲层111中心的光转换单元112的占用面积相较于两侧而降低,也即,此时缓冲层111边缘出射光线的亮度相对于缓冲层111中心出射光线的亮度是增大的,进而缓解了缓冲层111边缘区域的亮度相较于中心区域较暗的现象,从而提高了微型发光二极管出射光线的均匀性,有利于提升微型发光二极管的发光性能。It can be understood that, since the brightness of the light located on both sides of the buffer layer 111 is lower than the brightness of the light located in the center of the buffer layer 111 , the problem of unevenness of the light emitted by the micro light emitting diode occurs. In the case where the sizes of the plurality of grooves 111A are all the same, the above arrangement makes the distance between the adjacent grooves 111A in the center of the buffer layer 111 larger than the distance between the adjacent grooves 111A on both sides, so that the buffer layer 111 The occupied area of the light conversion unit 112 in the center is reduced compared to the two sides, that is, at this time, the brightness of the light emitted from the edge of the buffer layer 111 is increased relative to the brightness of the light emitted from the center of the buffer layer 111, thereby reducing the buffer layer 111. Compared with the phenomenon that the brightness of the edge area of 111 is darker than that of the central area, the uniformity of the light emitted by the micro light-emitting diode is improved, which is beneficial to improve the light-emitting performance of the micro light-emitting diode.
在一些实施例中,光转换结构11包括第一区域和第二区域。第一区域和第二区域交替设置。凹槽111A包括第一凹槽和第二凹槽。第一凹槽设置在第一区域。第二凹槽设置在第二区域。相邻的第一凹槽之间设置有第二凹槽。第一凹槽内光转换单元112的材料为红色量子点和绿色量子点。第二凹槽内光转换单元112的材料为黄色量子点。In some embodiments, the light converting structure 11 includes a first region and a second region. The first area and the second area are alternately arranged. The groove 111A includes a first groove and a second groove. The first groove is provided in the first area. The second groove is provided in the second area. A second groove is provided between adjacent first grooves. The materials of the light conversion unit 112 in the first groove are red quantum dots and green quantum dots. The material of the light conversion unit 112 in the second groove is yellow quantum dots.
可以理解的是,由于黄色量子点的发光效率低于红绿量子点,上述设置通过使黄色量子点和红绿量子点交叉设置,且相邻红绿量子点之间设置为黄色量子点,进而可以降低缓冲层111中间区域的发光亮度,从而提高微型发光二极管出射光线的均匀性。It can be understood that, since the luminous efficiency of yellow quantum dots is lower than that of red and green quantum dots, the above setting is made by making yellow quantum dots and red and green quantum dots intersect, and the adjacent red and green quantum dots are set as yellow quantum dots, and further. The brightness of the light in the middle region of the buffer layer 111 can be reduced, thereby improving the uniformity of the light emitted by the micro light emitting diode.
在本申请实施例中,阻隔结构层12包括依次设置于光转换结构11上的第一无机层121、有机层122和第二无机层123。In the embodiment of the present application, the barrier structure layer 12 includes a first inorganic layer 121 , an organic layer 122 and a second inorganic layer 123 sequentially disposed on the light conversion structure 11 .
由于有机材料具有释放应力的作用,本实施例通过在阻隔结构层12中设置一有机层122,能够避免微型发光二极管因受热影响或机械应力的影响而出现膜层的开裂,从而有利于提升微型发光二极管的性能,进一步增加了微型发光二极管的使用寿命。Since the organic material has the function of releasing stress, in this embodiment, by disposing an organic layer 122 in the barrier structure layer 12 , the cracking of the film layer of the micro light emitting diode due to the influence of heat or mechanical stress can be avoided, thereby facilitating the improvement of the micro light emitting diode. The performance of the light-emitting diode further increases the service life of the miniature light-emitting diode.
其中,第一无机层121及第二无机层123的材料均可以为氧化硅、氮化硅、氮氧化硅等具有良好阻隔水氧作用的无机材料。有机层122的材料可以为聚酰亚胺等有机材料。另外,第一无机层121的材料和第二无机层123的材料可以相同,也可以不同,本申请对此不作限定。Wherein, the materials of the first inorganic layer 121 and the second inorganic layer 123 can be inorganic materials such as silicon oxide, silicon nitride, silicon oxynitride, etc., which have a good function of blocking water and oxygen. The material of the organic layer 122 may be an organic material such as polyimide. In addition, the material of the first inorganic layer 121 and the material of the second inorganic layer 123 may be the same or different, which is not limited in this application.
进一步的,本申请实施例提供的微型发光二极管100的制备方法具体包括以下步骤:Further, the preparation method of the miniature light-emitting diode 100 provided in the embodiment of the present application specifically includes the following steps:
S101:提供一衬底基板。S101: Provide a base substrate.
可选的,上述衬底基板可以为蓝宝石衬底、硅衬底或碳化硅衬底。在本申请实施例中,衬底基板为蓝宝石衬底。Optionally, the above-mentioned base substrate may be a sapphire substrate, a silicon substrate or a silicon carbide substrate. In the embodiments of the present application, the base substrate is a sapphire substrate.
S102:在衬底基板上形成图案化的掩膜层;S102: forming a patterned mask layer on the base substrate;
具体的,步骤S102包括以下步骤:Specifically, step S102 includes the following steps:
S1021:在衬底基板上形成一层掩膜层。S1021: Form a mask layer on the base substrate.
其中,掩膜层的材料可以为氧化硅或氮化硅。在本申请实施例中,掩膜层的材料为氧化硅。The material of the mask layer may be silicon oxide or silicon nitride. In the embodiments of the present application, the material of the mask layer is silicon oxide.
S1022:形成图案化的掩膜层;S1022: forming a patterned mask layer;
具体的,采用刻蚀工艺对掩膜层进行刻蚀,以形成图案化的掩膜层。具体的,在本申请实施例中,图案化的掩膜层为条状掩膜层,即,在掩膜层上形成多个条形槽,该条形槽裸露出衬底基板。Specifically, an etching process is used to etch the mask layer to form a patterned mask layer. Specifically, in the embodiment of the present application, the patterned mask layer is a strip-shaped mask layer, that is, a plurality of strip-shaped grooves are formed on the mask layer, and the strip-shaped grooves expose the base substrate.
由于电场的极性作用,当电流密度增加时,发光芯片本体的发光波长会发生蓝移现象,上述设置通过使氮化镓晶体沿着条形槽的延伸方向横向生长,有利于生成半极性的氮化镓晶体,进而改善了发光波长的蓝移现象,在微型发光二极管的变电流驱动下,能够保持发光波长的一致性,从而有利于提高微型发光二极管的发光性能。Due to the polarity of the electric field, when the current density increases, the light-emitting wavelength of the light-emitting chip body will undergo a blue-shift phenomenon. The above arrangement is conducive to the formation of semi-polarity by making the gallium nitride crystal grow laterally along the extending direction of the strip groove. The gallium nitride crystal can improve the blue-shift phenomenon of the light-emitting wavelength, and can maintain the consistency of the light-emitting wavelength under the variable current drive of the micro light-emitting diode, which is beneficial to improve the light-emitting performance of the micro light-emitting diode.
在一些实施例中,图案化的掩膜层也可以为其他形状,具体可以根据实际应用需求进行选择,本申请对此不作限定。In some embodiments, the patterned mask layer may also have other shapes, which may be selected according to actual application requirements, which are not limited in this application.
S1023:在图案化的掩膜层上形成缓冲层111。S1023: Form a buffer layer 111 on the patterned mask layer.
首先,采用金属有机化合物化学气相沉积技术,在条形槽内生长氮化镓晶体,使得氮化镓晶体沿着条形槽的延伸方向生长。First, a metal organic compound chemical vapor deposition technology is used to grow gallium nitride crystals in the strip grooves, so that the gallium nitride crystals grow along the extending direction of the strip grooves.
接着,当氮化镓晶体生长至与掩膜层的厚度相同时,继续生长氮化镓晶体,以使氮化镓晶体的厚度超过掩膜层的厚度,进而形成缓冲层111。Next, when the gallium nitride crystal is grown to the same thickness as the mask layer, the gallium nitride crystal is continued to grow so that the thickness of the gallium nitride crystal exceeds the thickness of the mask layer, thereby forming the buffer layer 111 .
具体的,缓冲层111的厚度介于1微米至6微米之间,缓冲层111的具体厚度可以根据实际情况进行设定,本申请对此不作限定。Specifically, the thickness of the buffer layer 111 is between 1 micrometer and 6 micrometers, and the specific thickness of the buffer layer 111 can be set according to the actual situation, which is not limited in this application.
S103:在缓冲层111上形成发光芯片本体10。S103 : forming the light-emitting chip body 10 on the buffer layer 111 .
首先,采用金属有机化合物化学气相沉积技术在缓冲层111上依次形成第二半导体层106、发光层105和第一半导体层104。其中,第二半导体层106朝向发光层105的一侧具有裸露部分。First, the second semiconductor layer 106 , the light emitting layer 105 and the first semiconductor layer 104 are sequentially formed on the buffer layer 111 using a metal organic compound chemical vapor deposition technique. Wherein, the side of the second semiconductor layer 106 facing the light emitting layer 105 has an exposed portion.
接着,采用磁控溅射或热蒸发等技术,在第一半导体层104上形成一层电流扩散层103。Next, a current diffusion layer 103 is formed on the first semiconductor layer 104 by using techniques such as magnetron sputtering or thermal evaporation.
然后,在第二半导体层106的裸露部分上形成第一电极101,在电流扩散层103上形成第二电极102。其中,第二半导体层106、发光层105、第一半导体层104、电流扩散层103、第一电极101以及第二电极102构成发光芯片本体10。Then, the first electrode 101 is formed on the exposed portion of the second semiconductor layer 106 , and the second electrode 102 is formed on the current diffusion layer 103 . The second semiconductor layer 106 , the light emitting layer 105 , the first semiconductor layer 104 , the current spreading layer 103 , the first electrode 101 and the second electrode 102 constitute the light emitting chip body 10 .
S104:在发光芯片本体10以及缓冲层111的外侧形成一层保护层13,以得到待形成的微型发光二极管100。S104 : forming a protective layer 13 on the outside of the light-emitting chip body 10 and the buffer layer 111 to obtain the miniature light-emitting diode 100 to be formed.
S105:在发光芯片本体10上形成光转换结构11。S105 : forming the light conversion structure 11 on the light emitting chip body 10 .
具体的,步骤S105包括以下步骤:Specifically, step S105 includes the following steps:
步骤S1051:剥离衬底基板;Step S1051: peel off the base substrate;
步骤S1052:提供一临时基板,并将待形成的微型发光二极管100置于临时基板上。Step S1052: Provide a temporary substrate, and place the micro-LED 100 to be formed on the temporary substrate.
其中,上述临时基板的材料可以根据实际情况进行选择,本申请对此不作限定。Wherein, the material of the above temporary substrate can be selected according to the actual situation, which is not limited in this application.
步骤S1053:在缓冲层111上得到多个凹槽111A;Step S1053: obtaining a plurality of grooves 111A on the buffer layer 111;
具体的,采用刻蚀工艺对条状掩膜层进行刻蚀,以除去条状掩膜层,从而使得条状掩膜层所在位置形成条状凹槽111A。进而,在缓冲层111上得到多个凹槽111A。Specifically, the strip-shaped mask layer is etched by an etching process to remove the strip-shaped mask layer, so that a strip-shaped groove 111A is formed at the position of the strip-shaped mask layer. Further, a plurality of grooves 111A are obtained on the buffer layer 111 .
步骤S1054:形成光转换结构11。Step S1054 : forming the light conversion structure 11 .
具体的,在凹槽111A内形成红色量子点和绿色量子点的混合物,以形成光转换单元112。其中,去除条状掩膜层后的缓冲层111和光转换单元112形成光转换结构11。Specifically, a mixture of red quantum dots and green quantum dots is formed in the groove 111A to form the light conversion unit 112 . The buffer layer 111 and the light conversion unit 112 after the stripe-shaped mask layer is removed form the light conversion structure 11 .
其中,光转换单元112的形成方法可以为雾化喷涂法、刮涂法等,本申请对光转换单元112的形成方法不作具体限定。Wherein, the formation method of the light conversion unit 112 may be an atomization spray method, a blade coating method, or the like, and the present application does not specifically limit the formation method of the light conversion unit 112 .
S106:在光转换结构11上形成阻隔结构层12。S106 : forming the blocking structure layer 12 on the light conversion structure 11 .
具体的,在光转换结构11上依次形成第二无机层123、有机层122和第一无机层121。其中,第二无机层123、有机层122和第一无机层121的形成方法可以参照现有技术中无机膜层和有机膜层的形成方法,在此不再赘述。Specifically, the second inorganic layer 123 , the organic layer 122 and the first inorganic layer 121 are sequentially formed on the light conversion structure 11 . The formation methods of the second inorganic layer 123 , the organic layer 122 and the first inorganic layer 121 may refer to the formation methods of the inorganic film layer and the organic film layer in the prior art, which will not be repeated here.
由此便完成了本申请实施例中微型发光二极管100的制备方法。Thus, the manufacturing method of the micro light emitting diode 100 in the embodiment of the present application is completed.
本申请实施例提供的微型发光二极管100通过将光转换单元112集成在发光芯片本体10上,具体的,通过在缓冲层111上设置多个凹槽111A,并将光转换单元112容置于凹槽111A内,进而缩短了发光芯片本体10与光转换单元112之间的距离,使得发光芯片本体10发出的光能够有效地被光转换单元112吸收,从而提高了发光芯片本体10的光能利用率,降低了光能的损耗。另外,本实施例中多个凹槽111A的设置有利于提高微型发光二极管出射光线的均一性,从而有利于提升微型发光二极管的发光性能。The miniature light-emitting diode 100 provided by the embodiment of the present application integrates the light conversion unit 112 on the light-emitting chip body 10 . Specifically, a plurality of grooves 111A are provided on the buffer layer 111 , and the light conversion unit 112 is accommodated in the recess. In the groove 111A, the distance between the light-emitting chip body 10 and the light conversion unit 112 is shortened, so that the light emitted by the light-emitting chip body 10 can be effectively absorbed by the light conversion unit 112, thereby improving the light energy utilization of the light-emitting chip body 10. rate, reducing the loss of light energy. In addition, the arrangement of the plurality of grooves 111A in this embodiment is beneficial to improve the uniformity of the light emitted by the micro light emitting diode, thereby helping to improve the light emitting performance of the micro light emitting diode.
请参阅图2和图3,其中,图2为本申请实施例提供的显示面板的结构示意图;图3为本申请实施例提供的显示面板中微型发光二极管的结构示意图。Please refer to FIG. 2 and FIG. 3 , wherein FIG. 2 is a schematic structural diagram of a display panel provided by an embodiment of the application; FIG. 3 is a structural schematic diagram of a micro light-emitting diode in a display panel provided by an embodiment of the application.
本申请实施例提供一种显示面板200,其包括驱动基板20、多个微型发光二极管100和彩膜基板21。多个微型发光二极管100设置于驱动基板20上,并电性连接于驱动基板20。彩膜基板21设置于微型发光二极管100远离驱动基板20的一侧。其中,微型发光二极管100包括一发光芯片本体10和一光转换结构11。光转换结构11设置于发光芯片本体10的发光侧,并用于将发光芯片本体10发出的光转换成白光。光转换结构11包括缓冲层111和光转换单元112。缓冲层111上设置有至少一凹槽111A。光转换单元112容置于凹槽111A内。An embodiment of the present application provides a display panel 200 , which includes a driving substrate 20 , a plurality of miniature light-emitting diodes 100 and a color filter substrate 21 . A plurality of micro light-emitting diodes 100 are disposed on the driving substrate 20 and are electrically connected to the driving substrate 20 . The color filter substrate 21 is disposed on the side of the micro light emitting diode 100 away from the driving substrate 20 . The miniature light-emitting diode 100 includes a light-emitting chip body 10 and a light conversion structure 11 . The light conversion structure 11 is disposed on the light emitting side of the light emitting chip body 10 and is used for converting the light emitted by the light emitting chip body 10 into white light. The light conversion structure 11 includes a buffer layer 111 and a light conversion unit 112 . At least one groove 111A is formed on the buffer layer 111 . The light conversion unit 112 is accommodated in the groove 111A.
由此,本申请实施例提供的显示面板200通过将光转换单元112集成在发光芯片本体10上,具体的,通过在缓冲层111上设置至少一凹槽111A,并将光转换单元112容置于凹槽111A内,进而缩短了发光芯片本体10与光转换单元112之间的距离,使得发光芯片本体10发出的光能够有效地被光转换单元112吸收,从而提高了发光芯片本体10的光能利用率,降低了显示面板的能耗。Therefore, in the display panel 200 provided by the embodiment of the present application, the light conversion unit 112 is integrated on the light-emitting chip body 10 , specifically, at least one groove 111A is provided on the buffer layer 111 to accommodate the light conversion unit 112 in the groove 111A, thereby shortening the distance between the light-emitting chip body 10 and the light conversion unit 112 , so that the light emitted by the light-emitting chip body 10 can be effectively absorbed by the light conversion unit 112 , thereby improving the light emission of the light-emitting chip body 10 The energy utilization rate is reduced, and the energy consumption of the display panel is reduced.
在现有技术中,当采用喷墨打印方式在彩膜基板上分别形成红色量子点和绿色量子点以实现颜色转换时,为了避免像素之间的串色,通常在相邻像素对应的量子点之间设置黑色遮光结构。然而,在上述设置中,采用喷墨打印技术形成量子点的成本较高,且工艺复杂。In the prior art, when red quantum dots and green quantum dots are respectively formed on a color filter substrate by inkjet printing to realize color conversion, in order to avoid cross-color between pixels, the quantum dots corresponding to adjacent pixels are usually A black shading structure is set in between. However, in the above setup, the cost of forming quantum dots using inkjet printing technology is high and the process is complicated.
本实施例通过将光转换单元112集成在发光芯片本体10上,进而能够省去喷墨打印工艺,从而有利于节省工艺成本,并且降低了对设备的依赖性。另外,通过将光转换单元112集成的方式,省去了原有彩膜基板21上相邻像素对应的量子点之间的黑色遮光结构,从而进一步降低了工艺成本。In this embodiment, by integrating the light conversion unit 112 on the light emitting chip body 10 , the inkjet printing process can be omitted, which is beneficial to save the process cost and reduce the dependence on equipment. In addition, by integrating the light conversion unit 112, the black light-shielding structure between the quantum dots corresponding to adjacent pixels on the original color filter substrate 21 is omitted, thereby further reducing the process cost.
需要说明的是,本申请实施例中微型发光二极管100的具体结构及各膜层材料可以参照前述实施例中微型发光二极管100的阐述,在此不再赘述。It should be noted that, for the specific structure of the micro light emitting diode 100 and the materials of each film layer in the embodiment of the present application, reference may be made to the description of the micro light emitting diode 100 in the foregoing embodiments, which will not be repeated here.
在本申请实施例中,显示面板200还包括一遮光单元22。遮光单元22设置于相邻的微型发光二极管100之间。具体的,遮光单元22远离驱动基板20的一侧与光转换结构11远离基板的一侧齐平。由此,本实施例使得相邻微型发光二极管100对应的光转换结构11之间与发光芯片本体10之间共用一遮光单元22,进而节约了工艺成本。In the embodiment of the present application, the display panel 200 further includes a light shielding unit 22 . The light-shielding unit 22 is disposed between adjacent miniature light-emitting diodes 100 . Specifically, the side of the light shielding unit 22 away from the driving substrate 20 is flush with the side of the light conversion structure 11 away from the substrate. Therefore, in this embodiment, a light shielding unit 22 is shared between the light conversion structures 11 corresponding to the adjacent miniature light emitting diodes 100 and the light emitting chip body 10 , thereby saving the process cost.
在一些实施例中,遮光单元22远离驱动基板20的一侧与阻隔结构层12远离基板的一侧齐平。该设置可以最大程度防止相邻微型发光二极管100之间发生串色,能够避免发光芯片本体10光能的损耗,进而进一步提高了发光芯片本体10的光能利用率,从而提高了光转换单元112的发光效率。In some embodiments, the side of the light shielding unit 22 away from the driving substrate 20 is flush with the side of the blocking structure layer 12 away from the substrate. This arrangement can prevent the occurrence of cross-color between adjacent micro light-emitting diodes 100 to the greatest extent, can avoid the loss of light energy of the light-emitting chip body 10, and further improve the light energy utilization rate of the light-emitting chip body 10, thereby improving the light conversion unit 112. luminous efficiency.
在本申请实施例中,彩膜基板21包括基底21A和设置在基底21A上的彩色滤光层21B。彩色滤光层21B位于基底21A靠近驱动基板20的一侧上。彩色滤光层21B包括相邻设置的红色滤光块211、绿色滤光块212以及蓝色滤光块213。此外,彩膜基板21还包括设置在红色滤光块211、绿色滤光块212以及蓝色滤光块213之间的黑色矩阵214。In the embodiment of the present application, the color filter substrate 21 includes a base 21A and a color filter layer 21B disposed on the base 21A. The color filter layer 21B is located on the side of the base 21A close to the driving substrate 20 . The color filter layer 21B includes a red color filter block 211 , a green color filter block 212 and a blue color filter block 213 which are arranged adjacently. In addition, the color filter substrate 21 further includes a black matrix 214 disposed between the red filter block 211 , the green filter block 212 and the blue filter block 213 .
需要说明的是,本申请实施例中彩膜基板21及驱动基板20的结构仅为示意,用以方便描述本申请实施例,但并不能理解为对本申请的限制。It should be noted that the structures of the color filter substrate 21 and the driving substrate 20 in the embodiments of the present application are only for illustration and are used to facilitate the description of the embodiments of the present application, but should not be construed as limitations of the present application.
另外,本申请实施例中驱动基板20的具体结构可以参照现有技术,在此不再赘述。In addition, the specific structure of the driving substrate 20 in the embodiment of the present application may refer to the prior art, which will not be repeated here.
本申请实施例提供的显示面板200通过将光转换单元112集成在发光芯片本体10上,具体的,通过在缓冲层111上设置至少一凹槽111A,并将光转换单元112容置于凹槽111A内,进而缩短了发光芯片本体10与光转换单元112之间的距离,使得发光芯片本体10发出的光能够有效地被光转换单元112吸收,从而提高了发光芯片本体10的光能利用率,降低了显示面板的能耗。此外,本实施例省去了喷墨打印技术,进而简化了工艺,节约了工艺成本。The display panel 200 provided by the embodiment of the present application integrates the light conversion unit 112 on the light-emitting chip body 10 , specifically, at least one groove 111A is provided on the buffer layer 111 , and the light conversion unit 112 is accommodated in the groove 111A, thereby shortening the distance between the light-emitting chip body 10 and the light conversion unit 112, so that the light emitted by the light-emitting chip body 10 can be effectively absorbed by the light conversion unit 112, thereby improving the light energy utilization rate of the light-emitting chip body 10. , reducing the power consumption of the display panel. In addition, the present embodiment omits the ink jet printing technology, thereby simplifying the process and saving the process cost.
相较于现有技术中的微型发光二极管,本申请提供的微型发光二极管通过将光转换单元集成在发光芯片本体上,具体的,通过在缓冲层上设置至少一凹槽,并将光转换单元容置于凹槽内,进而缩短了发光芯片本体与光转换单元之间的距离,使得发光芯片本体发出的光能够有效地被光转换单元吸收,从而提高了发光芯片本体的光能利用率,降低了光能的损耗,进而降低了产品的能耗。Compared with the miniature light-emitting diodes in the prior art, the miniature light-emitting diodes provided by the present application integrate the light conversion unit on the light-emitting chip body. It is accommodated in the groove, thereby shortening the distance between the light-emitting chip body and the light conversion unit, so that the light emitted by the light-emitting chip body can be effectively absorbed by the light conversion unit, thereby improving the light energy utilization rate of the light-emitting chip body. The loss of light energy is reduced, thereby reducing the energy consumption of the product.
以上对本申请实施例进行了详细介绍,本文中应用了具体个例对本申请的原理及实施方式进行了阐述,以上实施例的说明只是用于帮助理解本申请的方法及其核心思想;同时,对于本领域的一般技术人员,依据本申请的思想,在具体实施方式及应用范围上均会有改变之处,综上所述,本说明书内容不应理解为对本申请的限制。The embodiments of the present application have been introduced in detail above, and the principles and implementations of the present application are described in this paper by using specific examples. The descriptions of the above embodiments are only used to help understand the methods and core ideas of the present application; at the same time, for Persons of ordinary skill in the art, based on the idea of the present application, will have changes in the specific implementation manner and application scope. In summary, the contents of this specification should not be construed as limitations on the present application.

Claims (18)

  1. 一种微型发光二极管,其包括:A miniature light-emitting diode, comprising:
    一发光芯片本体,所述发光芯片本体发出的光为蓝光;以及a light-emitting chip body, the light emitted by the light-emitting chip body is blue light; and
    一光转换结构,所述光转换结构设置于所述发光芯片本体的发光侧,并用于将所述发光芯片本体发出的光转换成白光;a light conversion structure, the light conversion structure is disposed on the light-emitting side of the light-emitting chip body, and is used for converting the light emitted by the light-emitting chip body into white light;
    所述光转换结构包括缓冲层和光转换单元,所述缓冲层上设置有多个凹槽,每一所述凹槽内均容置有所述光转换单元。The light conversion structure includes a buffer layer and a light conversion unit, the buffer layer is provided with a plurality of grooves, and each of the grooves accommodates the light conversion unit.
  2. 根据权利要求1所述的微型发光二极管,其中,自所述缓冲层的两侧向所述缓冲层的中心的方向上,相邻所述凹槽之间的距离递增。The miniature light emitting diode according to claim 1, wherein a distance between adjacent grooves increases in a direction from both sides of the buffer layer to the center of the buffer layer.
  3. 根据权利要求1所述的微型发光二极管,其中,所述光转换单元的材料包括红色量子点和绿色量子点。The miniature light emitting diode according to claim 1, wherein the material of the light conversion unit comprises red quantum dots and green quantum dots.
  4. 根据权利要求1所述的微型发光二极管,其中,所述发光芯片本体包括:The miniature light-emitting diode according to claim 1, wherein the light-emitting chip body comprises:
    一第一电极;a first electrode;
    一第二电极,所述第二电极和所述第一电极相邻设置;a second electrode, the second electrode and the first electrode are disposed adjacent to each other;
    一电流扩散层,所述电流扩散层设置于所述第二电极上;a current spreading layer, the current spreading layer is disposed on the second electrode;
    一第一半导体层,所述第一半导体层设置于所述电流扩散层上;a first semiconductor layer, the first semiconductor layer is disposed on the current diffusion layer;
    一发光层,所述发光层设置于所述第一半导体层上;以及a light-emitting layer disposed on the first semiconductor layer; and
    一第二半导体层,所述第二半导体层设置于所述发光层上,并覆盖所述第一电极,所述光转换结构位于所述第二半导体层上。a second semiconductor layer, the second semiconductor layer is disposed on the light emitting layer and covers the first electrode, and the light conversion structure is located on the second semiconductor layer.
  5. 根据权利要求1所述的微型发光二极管,其中,所述微型发光二极管还包括一阻隔结构层,所述阻隔结构层设置于所述光转换结构上;The micro light emitting diode according to claim 1, wherein the micro light emitting diode further comprises a blocking structure layer, the blocking structure layer is disposed on the light conversion structure;
    所述阻隔结构层包括依次设置于所述光转换结构上的第一无机层、有机层和第二无机层。The blocking structure layer includes a first inorganic layer, an organic layer and a second inorganic layer sequentially disposed on the light conversion structure.
  6. 一种微型发光二极管,其包括:A miniature light-emitting diode, comprising:
    一发光芯片本体;以及a light-emitting chip body; and
    一光转换结构,所述光转换结构设置于所述发光芯片本体的发光侧,并用于将所述发光芯片本体发出的光转换成白光;a light conversion structure, the light conversion structure is disposed on the light-emitting side of the light-emitting chip body, and is used for converting the light emitted by the light-emitting chip body into white light;
    所述光转换结构包括缓冲层和光转换单元,所述缓冲层上设置有至少一凹槽,所述光转换单元容置于所述凹槽内。The light conversion structure includes a buffer layer and a light conversion unit, the buffer layer is provided with at least one groove, and the light conversion unit is accommodated in the groove.
  7. 根据权利要求6所述的微型发光二极管,其中,所述凹槽的数量为多个,每一所述凹槽内均容置有所述光转换单元。The miniature light-emitting diode according to claim 6, wherein the number of the grooves is plural, and each of the grooves accommodates the light conversion unit.
  8. 根据权利要求7所述的微型发光二极管,其中,自所述缓冲层的两侧向所述缓冲层的中心的方向上,相邻所述凹槽之间的距离递增。The miniature light emitting diode according to claim 7, wherein, in a direction from both sides of the buffer layer to the center of the buffer layer, the distance between adjacent grooves increases.
  9. 根据权利要求6所述的微型发光二极管,其中,所述发光芯片本体发出的光为蓝光;The miniature light-emitting diode according to claim 6, wherein the light emitted by the light-emitting chip body is blue light;
    所述光转换单元的材料包括红色量子点和绿色量子点。The material of the light conversion unit includes red quantum dots and green quantum dots.
  10. 根据权利要求6所述的微型发光二极管,其中,所述发光芯片本体包括:The miniature light-emitting diode according to claim 6, wherein the light-emitting chip body comprises:
    一第一电极;a first electrode;
    一第二电极,所述第二电极和所述第一电极相邻设置;a second electrode, the second electrode and the first electrode are disposed adjacent to each other;
    一电流扩散层,所述电流扩散层设置于所述第二电极上;a current spreading layer, the current spreading layer is disposed on the second electrode;
    一第一半导体层,所述第一半导体层设置于所述电流扩散层上;a first semiconductor layer, the first semiconductor layer is disposed on the current diffusion layer;
    一发光层,所述发光层设置于所述第一半导体层上;以及a light-emitting layer disposed on the first semiconductor layer; and
    一第二半导体层,所述第二半导体层设置于所述发光层上,并覆盖所述第一电极,所述光转换结构位于所述第二半导体层上。a second semiconductor layer, the second semiconductor layer is disposed on the light emitting layer and covers the first electrode, and the light conversion structure is located on the second semiconductor layer.
  11. 根据权利要求6所述的微型发光二极管,其中,所述微型发光二极管还包括一阻隔结构层,所述阻隔结构层设置于所述光转换结构上;The micro light emitting diode according to claim 6, wherein the micro light emitting diode further comprises a blocking structure layer, the blocking structure layer is disposed on the light conversion structure;
    所述阻隔结构层包括依次设置于所述光转换结构上的第一无机层、有机层和第二无机层。The blocking structure layer includes a first inorganic layer, an organic layer and a second inorganic layer sequentially disposed on the light conversion structure.
  12. 一种显示面板,其包括:A display panel comprising:
    驱动基板;以及a drive substrate; and
    多个微型发光二极管,多个所述微型发光二极管设置于所述驱动基板上,并电性连接于所述驱动基板;a plurality of miniature light-emitting diodes, which are arranged on the driving substrate and are electrically connected to the driving substrate;
    所述微型发光二极管包括:The miniature light-emitting diodes include:
    一发光芯片本体;以及a light-emitting chip body; and
    一光转换结构,所述光转换结构设置于所述发光芯片本体的发光侧,并用于将所述发光芯片本体发出的光转换成白光;a light conversion structure, the light conversion structure is disposed on the light-emitting side of the light-emitting chip body, and is used for converting the light emitted by the light-emitting chip body into white light;
    所述光转换结构包括缓冲层和光转换单元,所述缓冲层上设置有至少一凹槽,所述光转换单元容置于所述凹槽内。The light conversion structure includes a buffer layer and a light conversion unit, the buffer layer is provided with at least one groove, and the light conversion unit is accommodated in the groove.
  13. 根据权利要求12所述的显示面板,其中,所述凹槽的数量为多个,每一所述凹槽内均容置有所述光转换单元。The display panel of claim 12, wherein the number of the grooves is plural, and each of the grooves accommodates the light conversion unit.
  14. 根据权利要求13所述的显示面板,其中,自所述缓冲层的两侧向所述缓冲层的中心的方向上,相邻所述凹槽之间的距离递增。The display panel of claim 13 , wherein, in a direction from both sides of the buffer layer to a center of the buffer layer, a distance between adjacent grooves increases.
  15. 根据权利要求12所述的显示面板,其中,所述显示面板还包括一遮光单元,所述遮光单元设置于相邻的所述微型发光二极管之间。The display panel according to claim 12, wherein the display panel further comprises a light-shielding unit, and the light-shielding unit is disposed between the adjacent miniature light-emitting diodes.
  16. 根据权利要求12所述的显示面板,其中,所述发光芯片本体发出的光为蓝光;The display panel according to claim 12, wherein the light emitted by the light-emitting chip body is blue light;
    所述光转换单元的材料包括红色量子点和绿色量子点。The material of the light conversion unit includes red quantum dots and green quantum dots.
  17. 根据权利要求12所述的显示面板,其中,所述发光芯片本体包括:The display panel of claim 12, wherein the light-emitting chip body comprises:
    一第一电极;a first electrode;
    一第二电极,所述第二电极和所述第一电极相邻设置;a second electrode, the second electrode and the first electrode are disposed adjacent to each other;
    一电流扩散层,所述电流扩散层设置于所述第二电极上;a current spreading layer, the current spreading layer is disposed on the second electrode;
    一第一半导体层,所述第一半导体层设置于所述电流扩散层上;a first semiconductor layer, the first semiconductor layer is disposed on the current diffusion layer;
    一发光层,所述发光层设置于所述第一半导体层上;以及a light-emitting layer disposed on the first semiconductor layer; and
    一第二半导体层,所述第二半导体层设置于所述发光层上,并覆盖所述第一电极,所述光转换结构位于所述第二半导体层上。a second semiconductor layer, the second semiconductor layer is disposed on the light emitting layer and covers the first electrode, and the light conversion structure is located on the second semiconductor layer.
  18. 根据权利要求12所述的显示面板,其中,所述微型发光二极管还包括一阻隔结构层,所述阻隔结构层设置于所述光转换结构上;The display panel according to claim 12, wherein the micro light emitting diode further comprises a blocking structure layer, the blocking structure layer is disposed on the light conversion structure;
    所述阻隔结构层包括依次设置于所述光转换结构上的第一无机层、有机层和第二无机层。The blocking structure layer includes a first inorganic layer, an organic layer and a second inorganic layer sequentially disposed on the light conversion structure.
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