WO2022080276A1 - フルオロ－２－ブテンの保管方法 - Google Patents

フルオロ－２－ブテンの保管方法 Download PDF

Info

Publication number
WO2022080276A1
WO2022080276A1 PCT/JP2021/037430 JP2021037430W WO2022080276A1 WO 2022080276 A1 WO2022080276 A1 WO 2022080276A1 JP 2021037430 W JP2021037430 W JP 2021037430W WO 2022080276 A1 WO2022080276 A1 WO 2022080276A1
Authority
WO
WIPO (PCT)
Prior art keywords
butene
fluoro
hydrogen chloride
gas
chf
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2021/037430
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
淳 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to CN202180069509.XA priority Critical patent/CN116472258A/zh
Priority to KR1020237012263A priority patent/KR102900581B1/ko
Priority to US18/031,425 priority patent/US20230373888A1/en
Priority to IL302119A priority patent/IL302119A/en
Priority to EP21880015.9A priority patent/EP4230610A4/en
Priority to CN202511401056.2A priority patent/CN121270346A/zh
Priority to JP2022556934A priority patent/JPWO2022080276A1/ja
Publication of WO2022080276A1 publication Critical patent/WO2022080276A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C17/00—Preparation of halogenated hydrocarbons
    • C07C17/38—Separation; Purification; Stabilisation; Use of additives
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C21/00—Acyclic unsaturated compounds containing halogen atoms
    • C07C21/02—Acyclic unsaturated compounds containing halogen atoms containing carbon-to-carbon double bonds
    • C07C21/18—Acyclic unsaturated compounds containing halogen atoms containing carbon-to-carbon double bonds containing fluorine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C5/00—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures
    • F17C5/02—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures for filling with liquefied gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/70—Containers, packaging elements or packages, specially adapted for particular articles or materials for materials not otherwise provided for
    • B65D85/84—Containers, packaging elements or packages, specially adapted for particular articles or materials for materials not otherwise provided for for corrosive chemicals
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2203/00—Vessel construction, in particular walls or details thereof
    • F17C2203/06—Materials for walls or layers thereof; Properties or structures of walls or their materials
    • F17C2203/0634—Materials for walls or layers thereof
    • F17C2203/0636—Metals
    • F17C2203/0648—Alloys or compositions of metals
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/03—Mixtures
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/32—Hydrogen storage

Definitions

  • the present invention relates to a storage method for fluoro-2-butene.
  • the unsaturated fluorocarbon disclosed in Patent Documents 1 and 2, etc. may be used as an etching gas for dry etching.
  • fluoro-2-butene is attracting attention as an etching gas that can be used in the most advanced dry etching process.
  • An object of the present invention is to provide a method for storing fluoro-2-butene in which the isomerization reaction does not easily proceed during storage.
  • one aspect of the present invention is as follows [1] to [3].
  • [1] A method for storing fluoro-2-butene represented by the general formula C 4 H x F y , in which x is 0 or more and 7 or less, y is 1 or more and 8 or less, and x + y is 8.
  • the fluoro-2-butene contains or does not contain hydrogen chloride as an impurity, and the concentration of hydrogen chloride in the gas phase portion in the case of containing hydrogen chloride is 100% by volume or less, and the fluoro-2-butene is stored in a container. How to store fluoro-2-butene.
  • the fluoro-2-butene is (Z) -1,1,1,4,4,4-hexafluoro-2-butene, (E) -1,1,1,4,4,4-hexa. Fluoro-2-butene, (Z) -1,1,1,2,4,4,4-heptafluoro-2-butene, (E) -1,1,1,2,4,4,4-hepta Fluoro-2-butene, (Z) -1,1,1,2,3,4,4,4-octafluoro-2-butene, and (E) -1,1,1,2,3,4
  • the isomerization reaction of fluoro-2-butene does not easily proceed during storage.
  • the method for storing fluoro-2-butene according to the present embodiment is represented by the general formula C 4 H x F y , and x in the general formula is 0 or more and 7 or less, y is 1 or more and 8 or less, and x + y is 8.
  • a method for storing fluoro-2-butene, in which fluoro-2-butene contains or does not contain hydrogen chloride (HCl) as an impurity, and the concentration of hydrogen chloride in the gas phase portion when the above is contained is 100 volumes. It is a method of storing fluoro-2-butene in a container with a concentration of ppm or less.
  • fluoro-2-butene contains hydrogen chloride as an impurity
  • the isomerization reaction of fluoro-2-butene is promoted by the catalytic action of hydrogen chloride. Therefore, fluoro-2-butene containing hydrogen chloride may undergo an isomerization reaction during storage and its purity may decrease.
  • the fluoro-2-butene stored by the method for storing fluoro-2-butene according to the present embodiment does not contain hydrogen chloride, or even if it contains hydrogen chloride, its content is small, so that it can be stored for a long period of time. However, the isomerization reaction is unlikely to proceed, and the purity is unlikely to decrease. Therefore, fluoro-2-butene can be stably stored for a long period of time.
  • fluoro-2-butene The fluoro-2-butene according to the present embodiment is represented by the general formula C 4 H x F y , and x in the general formula is 0 or more and 7 or less, y is 1 or more and 8 or less, and x + y is. It satisfies the three conditions of 8.
  • the type of fluoro-2-butene is not particularly limited as long as it meets the above requirements.
  • fluoro-2-butenes may be used alone or in combination of two or more.
  • E / Z geometric isomer exists in the above-mentioned fluoro-2-butene as described above, any of the above-mentioned geometric isomers, fluoro-2-butene, is the fluoro-2-butene according to the present embodiment. It can be used as a storage method for butene.
  • a gas consisting only of fluoro-2-butene may be stored in the container, or a mixed gas containing fluoro-2-butene and a diluting gas may be stored in the container.
  • the diluting gas at least one selected from nitrogen gas (N 2 ), helium (He), neon (Ne), argon (Ar), krypton (Kr), and xenon (Xe) can be used.
  • the content of the diluted gas is preferably 90% by volume or less, more preferably 50% by volume or less, based on the total amount of gas stored in the container.
  • the shape, size, material, and the like of the container for storing fluoro-2-butene are not particularly limited as long as they can contain and seal fluoro-2-butene.
  • the material of the container metal, ceramic, resin or the like can be adopted. Examples of the metal include manganese steel, chrome molybdenum steel, stainless steel, Hastelloy (registered trademark), Inconel (registered trademark) and the like.
  • Fluoro-2-butene according to the present embodiment contains or does not contain hydrogen chloride as an impurity, but is stored in a container with a concentration of hydrogen chloride in the gas phase portion of 100% by volume ppm or less when the above-mentioned hydrogen chloride is contained. Therefore, as described above, the isomerization reaction of fluoro-2-butene is difficult to be promoted, and as a result, the isomerization reaction of fluoro-2-butene is difficult to proceed during storage. If the concentration of hydrogen chloride in the gas phase portion is equal to or lower than the above concentration, the concentration of hydrogen chloride in the liquid phase portion is also sufficiently low.
  • Hydrogen chloride may be produced in the process of producing fluoro-2-butene. Further, the concentration of hydrogen chloride in fluoro-2-butene can be quantified by an infrared spectrophotometer, but the absence thereof means a case where it cannot be quantified by an infrared spectrophotometer.
  • the concentration of hydrogen chloride in the gas phase part needs to be 100% by volume ppm or less, but it may be 50% by volume or less. It is preferably 10 volume ppm or less, and more preferably 10 volume ppm or less.
  • the concentration of hydrogen chloride in the gas phase portion may be 0.1 volume ppm or more.
  • the method for producing fluoro-2-butene having a low hydrogen chloride concentration is not particularly limited, and examples thereof include a method for removing hydrogen chloride from fluoro-2-butene having a high hydrogen chloride concentration.
  • the method for removing hydrogen chloride from fluoro-2-butene is not particularly limited, and a known method can be adopted.
  • a method of contacting with an adsorbent to adsorb hydrogen chloride to the adsorbent, a method of contacting with a reactant to react hydrogen chloride with the reactant, and a method of separating by distillation can be mentioned.
  • Specific examples of the adsorbent include molecular sieves and activated carbon.
  • the pressure condition at the time of storage in the method for storing fluoro-2-butene according to the present embodiment is not particularly limited as long as the fluoro-2-butene can be stored in a container in a sealed manner, but is not particularly limited, but is 0.05 MPa or more. It is preferably 5 MPa or less, and more preferably 0.1 MPa or more and 3 MPa or less.
  • fluoro-2-butene can be circulated without heating when the container is connected to the dry etching apparatus.
  • the temperature conditions during storage in the method for storing fluoro-2-butene according to the present embodiment are not particularly limited, but are preferably ⁇ 20 ° C. or higher and 50 ° C. or lower, and 0 ° C. or higher and 40 ° C. or lower. Is more preferable. If the storage temperature is ⁇ 20 ° C. or higher, the container is unlikely to be deformed, so that the airtightness of the container is lost and oxygen, water, etc. are unlikely to be mixed into the container. If oxygen, water or the like is mixed in, the polymerization reaction and decomposition reaction of fluoro-2-butene may be promoted. On the other hand, when the storage temperature is 50 ° C. or lower, the polymerization reaction and decomposition reaction of fluoro-2-butene are suppressed.
  • the fluoro-2-butene according to this embodiment can be used as an etching gas.
  • the etching gas containing fluoro-2-butene according to the present embodiment is used in the etching process for manufacturing a semiconductor having a film containing silicon (Si), a protective film is formed on the mask and the side wall. Therefore, the selectivity of etching is improved. Further, the etching gas containing fluoro-2-butene according to the present embodiment can be used for both plasma etching using plasma and plasmaless etching using no plasma.
  • plasma etching examples include reactive ion etching (RIE), inductively coupled plasma (ICP) etching, capacitively coupled plasma (CCP: Capacitive Coupled Plasma) etching, and electron etching.
  • RIE reactive ion etching
  • ICP inductively coupled plasma
  • CCP capacitively coupled plasma
  • electron etching examples include electron Cyclotron Resonance Plasma etching, microwave plasma etching can be mentioned. Further, in plasma etching, plasma may be generated in a chamber in which a member to be etched is installed, or a plasma generation chamber and a chamber in which the member to be etched may be installed may be separated (that is, remote plasma is used). May be).
  • Fluoro-2-butene containing hydrogen chloride at various concentrations was prepared. Examples of preparation of fluoro-2-butene are described below.
  • (Preparation Example 1) One cylinder made of manganese steel with a capacity of 10 L and four cylinders made of manganese steel with a capacity of 1 L were prepared. These cylinders are referred to as cylinder A, cylinder B, cylinder C, and cylinder D in order. The cylinder was filled with 5000 g of (Z) -1,1,1,4,4,4-hexafluoro-2-butene (boiling point: 33 ° C.) and liquefied by cooling to 0 ° C.
  • the liquid phase part and the gas phase part were formed in.
  • the cylinders A, B, C, and D were cooled to ⁇ 78 ° C. after depressurizing the inside to 1 kPa or less with a vacuum pump.
  • a SUS tube having a diameter of 1 inch and a length of 30 cm was filled with 100 mL of Molecular Sieve 5A manufactured by Union Showa Co., Ltd. Then, this SUS tube was connected to the cylinder. 500 g of gas of (Z) -1,1,1,4,4,4-hexafluoro-2-butene was extracted from the upper outlet in which the gas phase portion of the cylinder was present, and supplied to a SUS tube. Then, the gas of (Z) -1,1,1,4,4,4-hexafluoro-2-butene that passed through the SUS tube was collected in the cylinder A under reduced pressure.
  • the flow rate of the gas when passing through the SUS tube was controlled to 500 mL / min by a mass flow controller.
  • the amount of gas of (Z) -1,1,1,4,4,4-hexafluoro-2-butene collected in the cylinder A was 495 g.
  • the (Z) -1,1,1,4,4,4-hexafluoro-2-butene collected in the cylinder A is used as a sample 1-1.
  • the gas of (Z) -1,1,1,4,4,4-hexafluoro-2-butene collected in the cylinder A was extracted from the upper outlet, and the concentration of hydrogen chloride was measured with an infrared spectrophotometer. The results are shown in Table 1.
  • the measurement conditions of the infrared spectrophotometer are as follows.
  • Infrared spectrophotometer Nicolet iS10 FT-IR spectroscope manufactured by Thermo Fisher Scientific Co., Ltd. Number of integrations: 128 times Mirror speed: 0.6329 Optical path length: 3m
  • Gas cell material SUS316 Gas cell temperature: 100 ° C Measurement wavelength range: 800-5000 cm -1 Measurement wavelength of hydrogen chloride: 2945 cm -1
  • the temperature of the cylinder A is raised to about 0 ° C. to form a liquid phase portion and a gas phase portion, and (Z) -1,1,1, from the upper outlet where the gas phase portion of the cylinder A is present.
  • 100 g of gas of 4,4,4-hexafluoro-2-butene was extracted and transferred to the cylinder B under reduced pressure.
  • 10 g of gas of (Z) -1,1,1,4,4,4-hexafluoro-2-butene was extracted from the cylinder and transferred to the cylinder B under reduced pressure. Then, the cylinder B was heated to room temperature and allowed to stand for 24 hours.
  • the (Z) -1,1,1,4,4,4-hexafluoro-2-butene after standing still is used as sample 1-2.
  • the gas of (Z) -1,1,1,4,4,4-hexafluoro-2-butene is extracted from the upper outlet where the gas phase portion of the cylinder B after standing still exists, and an infrared spectrophotometer is used.
  • the concentration of hydrogen chloride was measured in. The results are shown in Table 1.
  • Example 1 After allowing the cylinder A to stand at 20 ° C. for 30 days, the gas of (Z) -1,1,1,4,4,4-hexafluoro-2-butene was extracted from the gas phase portion of the cylinder A, and gas chromatography was performed. The concentration of (E) -1,1,1,4,4,4-hexafluoro-2-butene in Sample 1-1 was quantified. As a result, it is a product of the isomerization reaction of (Z) -1,1,1,4,4,4-hexafluoro-2-butene (E) -1,1,1,4,4-4. Hexafluoro-2-butene was not detected.
  • Examples 2 to 18 and Comparative Examples 1 to 6 The analysis targets and analysis results in Examples 2 to 18 and Comparative Examples 1 to 6 are shown in Table 7 in comparison with Example 1. That is, the analysis was performed by the same operation as in Example 1 except for the items shown in Table 7.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
PCT/JP2021/037430 2020-10-15 2021-10-08 フルオロ－２－ブテンの保管方法 Ceased WO2022080276A1 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
CN202180069509.XA CN116472258A (zh) 2020-10-15 2021-10-08 氟-2-丁烯的保存方法
KR1020237012263A KR102900581B1 (ko) 2020-10-15 2021-10-08 플루오로-2-부텐의 보관 방법
US18/031,425 US20230373888A1 (en) 2020-10-15 2021-10-08 Method for storing fluoro-2-butene
IL302119A IL302119A (en) 2020-10-15 2021-10-08 STORAGE METHOD FOR FLUORO-2-BUTENE
EP21880015.9A EP4230610A4 (en) 2020-10-15 2021-10-08 STORAGE PROCEDURE FOR FLUOR-2-BUTENE
CN202511401056.2A CN121270346A (zh) 2020-10-15 2021-10-08 氟-2-丁烯的保存方法
JP2022556934A JPWO2022080276A1 (https=) 2020-10-15 2021-10-08

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020-173923 2020-10-15
JP2020173923 2020-10-15

Publications (1)

Publication Number Publication Date
WO2022080276A1 true WO2022080276A1 (ja) 2022-04-21

Family

ID=81208119

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2021/037430 Ceased WO2022080276A1 (ja) 2020-10-15 2021-10-08 フルオロ－２－ブテンの保管方法

Country Status (8)

Country Link
US (1) US20230373888A1 (https=)
EP (1) EP4230610A4 (https=)
JP (1) JPWO2022080276A1 (https=)
KR (1) KR102900581B1 (https=)
CN (2) CN116472258A (https=)
IL (1) IL302119A (https=)
TW (1) TWI798876B (https=)
WO (1) WO2022080276A1 (https=)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997002226A1 (en) * 1995-06-30 1997-01-23 E.I. Du Pont De Nemours And Company Process for the preparation of fluoroolefins
JP2016069371A (ja) * 2014-09-26 2016-05-09 ダイキン工業株式会社 ハロオレフィン類組成物及びその使用
JP2016519053A (ja) * 2013-03-13 2016-06-30 アーケマ・インコーポレイテッド ヒドロフルオロオレフィンおよびヒドロクロロフルオロオレフィンを精製し、安定化させるための方法
JP2017125023A (ja) * 2010-03-26 2017-07-20 ハネウェル・インターナショナル・インコーポレーテッド ヘキサフルオロ−２−ブテンの製造方法
JP2018522908A (ja) * 2015-08-07 2018-08-16 ザ ケマーズ カンパニー エフシー リミテッド ライアビリティ カンパニー Ｚ−１，１，１，４，４，４−ヘキサフルオロ−２−ブテンのｅ−１，１，１，４，４，４−ヘキサフルオロ−２−ブテンへの接触異性化

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60146916U (ja) 1984-03-09 1985-09-30 シャープ株式会社 磁気ヘツドの取付装置
US5700823A (en) * 1994-01-07 1997-12-23 Sugen, Inc. Treatment of platelet derived growth factor related disorders such as cancers
SE0103650D0 (sv) 2001-11-01 2001-11-01 Astrazeneca Ab Therapeutic heterocyclic compounds
US7074805B2 (en) 2002-02-20 2006-07-11 Abbott Laboratories Fused azabicyclic compounds that inhibit vanilloid receptor subtype 1 (VR1) receptor
US7615668B2 (en) 2004-10-18 2009-11-10 Central Glass Co., Ltd. Method for producing 4,4,4-trifluorobutane-2-one
JP2008081477A (ja) * 2006-09-29 2008-04-10 Nippon Zeon Co Ltd 含酸素フッ素化合物の容器充填物、含酸素フッ素化合物の保存方法、およびプラズマエッチング方法
WO2009041560A1 (ja) * 2007-09-28 2009-04-02 Zeon Corporation プラズマエッチング方法
JP5266902B2 (ja) * 2008-06-20 2013-08-21 日本ゼオン株式会社 含フッ素オレフィン化合物の製造方法
JP5607354B2 (ja) * 2009-12-28 2014-10-15 ユニオン昭和株式会社 高純度含フッ素化合物の製造方法及びその方法で得られた高純度含フッ素化合物
JP2012131731A (ja) * 2010-12-21 2012-07-12 Nippon Zeon Co Ltd フッ素化アルケンの製造法
EP2842928A4 (en) 2012-04-27 2017-11-08 Asahi Glass Company, Limited Method for preservation of tetrafluoropropene and container for preservation of tetrafluoropropene
CN104885203B (zh) * 2012-10-30 2017-08-01 乔治洛德方法研究和开发液化空气有限公司 用于高纵横比氧化物蚀刻的氟碳分子
CA2902979A1 (en) * 2013-03-06 2014-09-12 Honeywell International Inc. Storage stable foamable compositions containing 1,1,1,4,4,4-hexafluoro-2-butene
TWI658509B (zh) * 2014-06-18 2019-05-01 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude 用於ｔｓｖ／ｍｅｍｓ／功率元件蝕刻的化學物質
WO2016010839A1 (en) * 2014-07-14 2016-01-21 Chemtura Corporation Working fluids comprising fluorinated olefins/fluorinated saturated hydrocarbon blends and polyol esters
JP5915808B1 (ja) * 2014-12-24 2016-05-11 ダイキン工業株式会社 反応に用いた触媒の取り出し方法
CN108911947B (zh) * 2018-06-15 2021-11-02 中国民航大学 一种1,1,1,2,4,4,4-七氟-2-丁烯的制备方法
JP6827246B2 (ja) * 2019-02-21 2021-02-10 ダイキン工業株式会社 ハロゲン化ブテン化合物の製造方法
JPWO2022080275A1 (https=) * 2020-10-15 2022-04-21

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997002226A1 (en) * 1995-06-30 1997-01-23 E.I. Du Pont De Nemours And Company Process for the preparation of fluoroolefins
JP2017125023A (ja) * 2010-03-26 2017-07-20 ハネウェル・インターナショナル・インコーポレーテッド ヘキサフルオロ−２−ブテンの製造方法
JP2016519053A (ja) * 2013-03-13 2016-06-30 アーケマ・インコーポレイテッド ヒドロフルオロオレフィンおよびヒドロクロロフルオロオレフィンを精製し、安定化させるための方法
JP2016069371A (ja) * 2014-09-26 2016-05-09 ダイキン工業株式会社 ハロオレフィン類組成物及びその使用
JP2018522908A (ja) * 2015-08-07 2018-08-16 ザ ケマーズ カンパニー エフシー リミテッド ライアビリティ カンパニー Ｚ−１，１，１，４，４，４−ヘキサフルオロ−２−ブテンのｅ−１，１，１，４，４，４−ヘキサフルオロ−２−ブテンへの接触異性化

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP4230610A4 *

Also Published As

Publication number Publication date
KR20230066432A (ko) 2023-05-15
IL302119A (en) 2023-06-01
EP4230610A4 (en) 2024-12-04
US20230373888A1 (en) 2023-11-23
TW202233550A (zh) 2022-09-01
JPWO2022080276A1 (https=) 2022-04-21
CN116472258A (zh) 2023-07-21
TWI798876B (zh) 2023-04-11
EP4230610A1 (en) 2023-08-23
KR102900581B1 (ko) 2025-12-16
CN121270346A (zh) 2026-01-06

Similar Documents

Publication Publication Date Title
JP2026063341A (ja) フルオロ－２－ブテンの保管方法
WO2022080276A1 (ja) フルオロ－２－ブテンの保管方法
TWI798871B (zh) 氟丁烯之保管方法
TWI817211B (zh) 氟丁烯之保管方法
CN118891242A (zh) 氟代烯烃的储存方法
WO2023176434A1 (ja) フルオロアルケンの保管方法
TWI798873B (zh) 氟－２－丁烯之保管方法
EP4231334A1 (en) Etching gas, method for producing same, etching method, and method for producing semiconductor element
EP4231333A1 (en) Etching gas, method for producing same, etching method, and method for producing semiconductor element
WO2024247729A1 (ja) フッ化リンの保管方法及びガス充填済み容器
KR20250007503A (ko) 불소 함유 질소 화합물의 보관 방법
KR20250007504A (ko) 불소 함유 질소 화합물의 보관 방법

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 21880015

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2022556934

Country of ref document: JP

Kind code of ref document: A

ENP Entry into the national phase

Ref document number: 20237012263

Country of ref document: KR

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 202180069509.X

Country of ref document: CN

NENP Non-entry into the national phase

Ref country code: DE

ENP Entry into the national phase

Ref document number: 2021880015

Country of ref document: EP

Effective date: 20230515