WO2022070439A1 - Tilt measurement device and tilt measurement method - Google Patents

Abstract

This tilt measurement device measures the tilt of a movable body that can swing. A measurement jig can swing together with the movable body. A flat surface of the measurement jig in a stationary state is perpendicular to a first axis which extends in a first direction and passes through the swing center of the measurement jig. A base part disposed on the flat surface has a slope extending in a first slope direction and a second slope direction. The first slope direction is perpendicular to the first direction and intersects a radial direction with respect to the first axis. The second slope direction is perpendicular to the first slope direction and diagonally intersects the first direction. A first displacement meter projects a laser beam toward the slope of the measurement jig and measures the displacement, in the first direction, of a first irradiation position of the laser beam on the slope.

Description

Tilt measuring device and tilt measuring method

The present invention relates to a tilt measuring device and a tilt measuring method.

The conventional multi-point angle measuring device includes a rotation support for measuring the rotation angle of the reference plane, an XY table attached to the rotation support and having a movable part, an X-ray source having a fixed radiation direction, and a receiving tube. Then, two laser focus displacement meters each having a light source are installed above the crystal plate. An angle calculator is connected to the laser focus displacement meter. The laser focus displacement meter measures the displacement in the direction perpendicular to the main surface at two points on the crystal plate. Then, the angle calculator calculates the slope between the two points by a trigonometric function from the preset distance between the light sources and the displacement difference between the two points. (See, for example, Japanese Patent Application Laid-Open No. 11-63956)

The above-mentioned multipoint angle measuring device can calculate the inclination in the rotation direction about the axis parallel to the main surface of the crystal plate.

Japanese Unexamined Patent Publication No. 11-63956

However, in the above-mentioned multipoint angle measuring device, it is necessary to add two laser focus displacement meters in order to calculate the inclination in the rotation direction about the axis perpendicular to the main surface of the crystal plate.

An object of the present invention is to suppress an increase in the displacement meter and measure the inclination of a movable body with a simpler configuration.

The exemplary tilt measuring device of the present invention measures the tilt of a swingable movable body. The inclination measuring device includes a measuring jig that is held by the movable body and can swing together with the movable body, and a displacement meter that irradiates the measuring jig with a laser beam to measure the displacement of the measuring jig. To prepare for. The measuring jig is held by the movable body and can swing together with the movable body. The displacement meter irradiates the measuring jig with a laser beam to measure the displacement of the measuring jig. The measuring jig has a flat surface and a base portion arranged on the flat surface. The plane in a stationary state of the measuring jig is perpendicular to the first axis extending in the first direction through the swing center of the measuring jig. The pedestal has a slope extending in the first slope direction and the second slope direction. The first slope direction is perpendicular to the first direction and intersects the radial direction with respect to the first axis. The second slope direction is perpendicular to the first slope direction and diagonally intersects with the first slope direction. The displacement meter has a first displacement meter that irradiates the laser beam toward the slope. The first displacement meter measures the displacement of the first irradiation position of the laser beam on the slope in the first direction.

The exemplary tilt measuring method of the present invention measures the tilt of a swingable movable body. The inclination measuring method includes a step of measuring the displacement of the measuring jig with a displacement meter that irradiates a measuring jig held by the movable body and swingable together with the movable body with a laser beam. The measuring jig has a flat surface and a base portion arranged on the flat surface. The plane in a stationary state of the measuring jig is perpendicular to the first axis extending in the first direction through the swing center of the measuring jig. The pedestal has a slope extending in the first slope direction and the second slope direction. The first slope direction is perpendicular to the first direction and intersects the radial direction with respect to the first axis. The second slope direction is perpendicular to the first slope direction and diagonally intersects with the first slope direction. The measurement step is a first displacement meter that irradiates the laser beam toward the slope, and includes a step of measuring the displacement of the laser beam in the first direction of the first irradiation position on the slope.

According to the exemplary tilt measuring device and tilt measuring method of the present invention, it is possible to suppress the increase of the displacement meter and measure the tilt of the movable body with a simpler configuration.

FIG. 1 is a perspective view showing an outline of a tilt measuring device. FIG. 2 is a block diagram showing a configuration example of the tilt measuring device. FIG. 3 is a perspective view showing a configuration example of the base portion. FIG. 4A is a perspective view showing a first modification of the base portion. FIG. 4B is a perspective view showing a second modification of the base portion. FIG. 4C is a perspective view showing a third modification of the base portion. FIG. 4D is a perspective view showing a fourth modified example of the base portion. FIG. 4E is a perspective view showing a fifth modified example of the base portion. FIG. 5 is a top view of the vicinity of the slope of the measuring jig rotated in the first rotation direction. FIG. 6 is a conceptual diagram showing the positional relationship of the first irradiation position after rotation. FIG. 7 is a side view of the measuring jig rotated in the second rotation direction as viewed from the second direction. FIG. 8 is a side view of the measuring jig rotated in the third rotation direction as viewed from the third direction. FIG. 9 is a flowchart for explaining a method of measuring the inclination of the measuring jig.

An exemplary embodiment will be described below with reference to the drawings.

In this specification, the state in which the swingable measuring jig 1 to be described later is stopped and the normal direction of the plane 11 of the measuring jig 1 is parallel to the laser beam 20 of the displacement meter 2 is defined as “measuring jig”. It is called "a state in which 1 is stationary".

The normal direction of the plane 11 when the measuring jig 1 is stationary is called "first direction D1". Of the first direction D1, the direction from the displacement meter 2 to the measuring jig 1 is called "first direction one D1a", and the direction from the measuring jig 1 to the displacement meter 2 is called "first direction other D1b". .. In each component, the end in one D1a in the first direction is referred to as the "one end in the first direction" and the end in the other D1b in the first direction is referred to as the "other end in the first direction". In each component, the surface facing one D1a in the first direction is referred to as "one end surface in the first direction", and the surface facing the other D1b in the first direction is referred to as "the other end surface in the first direction".

The direction perpendicular to the first direction D1 is called "second direction D2". One of the second directions D2 is referred to as "second direction one D2a", and the other of the second directions D2 is referred to as "second direction other D2b". In each component, the end in the second direction one D2a is referred to as the "second direction one end" and the end in the second direction other D2b is referred to as the "second direction other end". In each component, the surface facing one D2a in the second direction is referred to as "one end surface in the second direction", and the surface facing the other D2b in the second direction is referred to as "the other end surface in the second direction".

The direction perpendicular to both the first direction D1 and the second direction D2 is called "third direction D3". One of the third directions D3 is referred to as "third direction one D3a", and the other of the third directions D3 is referred to as "third direction other D3b". In each component, the end in one D3a in the third direction is referred to as the "one end in the third direction" and the end in the other D3b in the third direction is referred to as the "other end in the third direction". In each component, the surface facing one D3a in the third direction is referred to as "one end surface in the third direction", and the surface facing the other D3b in the third direction is referred to as "the other end surface in the third direction".

The axis extending in the first direction D1 is called "first axis A1", the axis extending in the second direction D2 is called "second axis A2", and the axis extending in the third direction D3 is called "third axis A3". .. The first axis A1, the second axis A2, and the third axis A3 each pass through the swing center CP of the measuring jig 1 and are orthogonal to each other.

The circumferential direction centered on the first axis A1 is called "first rotation direction DR1", the circumferential direction centered on the second axis A2 is called "second rotation direction DR2", and the third axis A3 is the center. The circumferential direction is called "third rotation direction DR3". The first rotation direction DR1 is the so-called rolling direction. One of the second rotation direction DR2 and the third rotation direction DR3 is the so-called pitching direction. The other of the second rotation direction DR2 and the third rotation direction DR3 is the so-called yawing direction.

The direction orthogonal to a predetermined axis is called the "diameter direction" with respect to this axis. The predetermined axes are, for example, the first axis A1, the second axis A2, and the third axis A3. Of the radial directions, the direction closer to the predetermined axis is called "diametrically inward", and the direction away from the predetermined axis is called "diametrically outward". In each component, the inner end in the radial direction is referred to as the "inner end portion in the radial direction", and the end portion in the outer direction in the radial direction is referred to as the "outer end portion in the radial direction". In each component, the side surface facing inward in the radial direction is referred to as "diameter inner surface", and the side surface facing outward in the radial direction is referred to as "diameter outer surface".

In the positional relationship between any one of the directions, lines, and planes and any of the other, "parallel" includes not only a state in which they do not intersect at all no matter how long they extend, but also a state in which they are substantially parallel. Further, "vertical" includes not only a state in which the minimum angle formed by the two is 90 degrees, but also a state in which the two are substantially vertical. "Orthogonal" includes not only a state in which the two intersect perpendicularly to each other, but also a state in which they are substantially orthogonal to each other. That is, "parallel", "vertical", and "orthogonal" each include a state in which the positional relationship between the two has an angular deviation to the extent that the gist of the present invention is not deviated.

Note that these are names used only for explanation, and there is no intention to limit the actual positional relationship, direction, name, etc.

<1. Embodiment>
The configuration of the tilt measuring device 100 will be described with reference to FIGS. 1 and 2. FIG. 1 is a perspective view showing an outline of the inclination measuring device 100. FIG. 2 is a block diagram showing a configuration example of the tilt measuring device 100. In FIG. 1, the measuring jig 1 and the movable body 201 are stationary.

<1-1. Tilt measuring device>
The tilt measuring device 100 measures the tilt of the measuring jig 1 that swings together with the movable body 201 to be measured in the first rotation direction DR1, the second rotation direction DR2, and the third rotation direction DR3. The measurement target in the present embodiment is an optical unit 200 having a shake correction function for correcting the runout of an optical module such as a camera unit.

The optical unit 200 includes a movable body 201 that holds the optical module, a fixed body (not shown) that holds the movable body 201 swingably, and a drive mechanism 202 that rotationally drives the movable body 201 with respect to the fixed body. Has. The optical unit 200 is mounted on a smartphone with a camera, an image pickup device such as a photo camera and a video camera, an action camera mounted on a moving body such as a drone, and the like. The runout correction function of the optical unit 200 is movable based on the detection results such as acceleration, angular velocity, and runout amount in the three-dimensional direction detected by a sensor such as a gyroscope (not shown) when the movable body 201 is tilted with respect to the fixed body. The inclination of the body 201 is corrected, and the deviation of the optical axis of the optical module of the movable body 201 is corrected.

In the present embodiment, the optical unit 200 is equipped with the measuring jig 1 instead of the optical module. The movable body 201 has a cylindrical holder 203 that houses and holds the measuring jig 1. The holder 203 is arranged radially outside the measuring jig 1 and surrounds the measuring jig 1 in the circumferential direction. The tilt measuring device 100 measures the tilt of the swingable movable body 201. That is, the inclination measuring device 100 measures the inclination of the measuring jig 1 as described above as the inclination of the movable body 201 in the first rotation direction DR1, the second rotation direction DR2, and the third rotation direction DR3.

The tilt measuring device 100 includes a measuring jig 1, a displacement meter 2, a storage unit 3, and a control unit 4.

The measuring jig 1 can swing around the swing center CP. In addition, "swing" means to rotate within a predetermined rotation angle range in the first rotation direction DR1, the second rotation direction DR2, and the third rotation direction DR3. Specifically, the measuring jig 1 can rotate in at least one of the first rotation direction DR1, the second rotation direction DR2, and the third rotation direction DR3 by receiving an action from the outside of the measurement jig 1. .. In the present embodiment, as described above, the inclination measuring device 100 includes the measuring jig 1. The measuring jig 1 is held by the movable body 201 and can swing together with the movable body 201.

The measuring jig 1 is made of a metal such as Al in this embodiment. However, the present invention is not limited to this example, and the measuring jig 1 may be, for example, a resin. The material of the measuring jig 1 can be selected in consideration of the weight of the optical module to be mounted on the optical unit 200. For example, the weight of the measuring jig 1 is preferably close to the weight of the optical module, and more preferably the same as the weight of the optical module.

The measuring jig 1 has a flat surface 11 and a base portion 12 arranged on the flat surface 11.

The plane 11 is a mirror surface arranged on the other end surface in the first direction of the measuring jig 1 and reflects light. The plane 11 in the stationary state of the measuring jig 1 is perpendicular to the first axis A1 extending in the first direction D1 through the swing center CP of the measuring jig 1. For example, the flat surface 11 may be a mirror-finished metal surface. Alternatively, the flat surface 11 may be realized by arranging a member such as a film having a mirror surface on the other end surface of the measuring jig 1 in the first direction.

The plane 11 includes a first region 111, a second region 112, a third region 113, and a fourth region 114. The first region 111 is a region on the D2a side in the second direction and on the D3a side in the third direction. The second region 112 is a region on one side of D2a in the second direction and on the other side of D3b in the third direction. The third region 113 is a region on the other D2b side in the second direction and on the other D3b side in the third direction. The fourth region 114 is a region on the D2b side of the other in the second direction and the D3a side of the other in the third direction.

The base portion 12 is arranged in the first region 111. The base 12 has a slope 120. The slope 120 extends in the first slope direction Ds1 and the second slope direction Ds2 (see FIG. 3 described later). The first slope direction Ds1 is perpendicular to the first direction D1 and intersects the radial direction with respect to the first axis A1. The second slope direction Ds2 is perpendicular to the first slope direction Ds1 and diagonally intersects the first slope direction D1. Further configurations of the base 12 will be described later.

Next, the displacement meter 2 irradiates the measuring jig 1 with the laser beam 20 to measure the displacement of the measuring jig 1. As described above, the tilt measuring device 100 includes the displacement meter 2. The displacement meter 2 can measure the displacement of the measuring jig 1 by receiving the laser beam 20 reflected by the measuring jig 1. The displacement meter 2 includes a first displacement meter 21, a second displacement meter 22, a third displacement meter 23, and a fourth displacement meter 24.

The first displacement meter 21 irradiates the laser beam 20 toward the slope 120. As described above, the displacement meter 2 has a first displacement meter 21. The first displacement meter 21 receives the laser beam 20 reflected at the first irradiation position P1 on the slope 120 of the measuring jig 1. From the light receiving result, the first displacement meter 21 measures the displacement of the laser beam 20 on the slope 120 in the first direction D1 of the first irradiation position P1. When the measuring jig 1 swings together with the movable body 201 and rotates in the first rotation direction DR1, the first irradiation position P1 of the laser beam 20 emitted from the first displacement meter 21 is displaced in the first direction D1. .. Therefore, the rotation angle of the measuring jig 1 in the first rotation direction DR1 can be calculated as the first rotation angle of the movable body 201 based on the result of the first displacement meter 21 measuring the displacement of the first irradiation position P1. That is, the measurement for obtaining the rotation angle of the measuring jig 1 in the first rotation direction DR1 can be performed by one first displacement meter 21. Therefore, the increase of the displacement meter 2 is suppressed and the configuration is simpler than the normal configuration in which the first rotation angle of the measuring jig 1 in the first rotation direction DR1 is measured from the measurement results of a plurality of displacement meters. The inclination of the movable body 201 can be measured.

The second displacement meter 22 irradiates the laser beam 20 toward the plane 11. As described above, the displacement meter 2 has a second displacement meter 22. The second displacement meter 22 receives the laser beam 20 reflected at the second irradiation position P2 on the plane 11 of the measuring jig 1. From the light receiving result, the second displacement meter 22 measures the displacement of the laser beam 20 on the plane 11 in the first direction D1 of the second irradiation position P2.

The third displacement meter 23 irradiates the laser beam 20 toward the plane 11. As described above, the displacement meter 2 has a third displacement meter 23. The third displacement meter 23 receives the laser beam 20 reflected at the third irradiation position P3 on the plane 11 of the measuring jig 1. From the light receiving result, the third displacement meter 23 measures the displacement of the laser beam 20 on the plane 11 in the first direction D1 of the third irradiation position P3.

The fourth displacement meter 24 irradiates the laser beam 20 toward the plane 11. As described above, the displacement meter 2 has a fourth displacement meter 24. The fourth displacement meter 24 receives the laser beam 20 reflected at the fourth irradiation position P4 on the plane 11 of the measuring jig 1. From the light receiving result, the fourth displacement meter 24 measures the displacement of the laser beam 20 on the plane 11 in the first direction D1 of the fourth irradiation position P4.

On the plane 11, the second irradiation position P2 and the third irradiation position P3 are arranged in the second direction D2, and the third irradiation position P3 and the fourth irradiation position P4 are arranged in the third direction D3. The second direction D2 is perpendicular to the first direction D1. The third direction D3 is perpendicular to the first direction D1 and intersects the second direction D2. The third direction D3 is perpendicular to the second direction D2 in the present embodiment, but is not limited to this example and may intersect diagonally. According to the arrangement as described above, from the measurement results of the second displacement meter 22 and the third displacement meter 23, the second measurement jig 1 in the second rotation direction DR2 centered on the second axis A2 extending in the second direction D2. The rotation angle can be measured. Further, from the measurement results of the third displacement meter 23 and the fourth displacement meter 24, the third rotation angle of the measuring jig 1 in the third rotation direction DR3 centered on the third axis A3 extending in the third direction D3 can be measured. .. For example, the inclination of the measuring jig 1 and the movable body 201 in the pitching direction and the yawing direction can be measured.

The laser beam 20 of the first displacement meter 21 irradiates the slope 120 of the base 12 on the first region 111. The laser beam 20 of the second displacement meter 22 irradiates the second region 112. The laser beam 20 of the third displacement meter 23 irradiates the third region 113. The laser beam 20 of the fourth displacement meter 24 irradiates the fourth region 114. By doing so, the base portion 12 having the slope 120 and the second irradiation position P2, the third irradiation position P3, and the fourth irradiation position P4 can be arranged in different regions on the plane 11. Therefore, when viewed from the first direction D1, between one of the first irradiation position P1, the second irradiation position P2, the third irradiation position P3, and the fourth irradiation position P4 on the slope 120 and the other one. It can be sufficiently spaced to prevent mutual interference.

The first displacement meter 21, the second displacement meter 22, the third displacement meter 23, and the fourth displacement meter 24 all irradiate the laser beam 20 along the first direction D1. Since the first displacement meter 21, the second displacement meter 22, the third displacement meter 23, and the fourth displacement meter 24 irradiate the laser beam 20 in the same direction, their placement positions are in the second direction D2 and / or the third. Does not disperse in direction D3. For example, these can be collectively arranged in a space above the plane 11 of the measuring jig 1. Therefore, the tilt measuring device 100 can be made more compact.

Next, the storage unit 3 is a non-transient storage medium that can maintain storage even without power supply. The storage unit 3 stores, for example, a program and information used by the control unit 4.

The control unit 4 controls the tilt measuring device 100. For example, the control unit 4 controls each component by using the program and the information stored in the storage unit 3. As shown in FIG. 2, the control unit 4 includes a calculation unit 41. The calculation unit 41 calculates the inclination of the measuring jig 1 based on the measurement result of the displacement meter 2.

Specifically, the calculation unit 41 determines the first measurement result of the first displacement meter 21 at a predetermined first time point and the second measurement result of the first displacement meter 21 at the second time point after the first time point. Based on this, the displacement amount of the first irradiation position P1 in the first direction D1 is calculated. Further, the calculation unit 41 calculates the rotation angle of the measuring jig 1 in the first rotation direction DR1 from the calculated displacement amount. In this way, the inclination measuring device 100 can calculate the rotation angle of the measuring jig 1 in the first rotation direction DR1 as the first rotation angle of the movable body 201 from the measurement result of the first displacement meter 21. The method of calculating the first rotation angle of the measuring jig 1 will be described later.

In addition, the calculation unit 41 includes the third measurement results of the second displacement meter 22 and the third displacement meter 23 at a predetermined third time point, and the second displacement meter 22 and the third displacement meter 22 at the fourth time point after the third time point. Based on the third measurement result of the displacement meter 23, the displacement amounts of the second irradiation position P2 and the third irradiation position P3 in the first direction D1 are calculated respectively. Further, the calculation unit 41 calculates the rotation angle of the measuring jig 1 in the second rotation direction DR2 from the above-mentioned displacement amount. Then, the inclination measuring device 100 calculates the rotation angle of the measuring jig 1 in the second rotation direction DR2 as the second rotation angle of the movable body 201 from the measurement results of the second displacement meter 22 and the third displacement meter 23. can. The method of calculating the second rotation angle of the measuring jig 1 will be described later.

In addition, the calculation unit 41 includes the fifth measurement results of the third displacement meter 23 and the fourth displacement meter 24 at a predetermined fifth time point, and the third displacement meter 23 and the fourth at the sixth time point after the fifth time point. Based on the sixth measurement result of the displacement meter 24, the displacement amounts of the third irradiation position P3 and the fourth irradiation position P4 in the first direction D1 are calculated respectively. Further, the calculation unit 41 calculates the rotation angle of the measuring jig 1 in the third rotation direction DR3 from the above-mentioned displacement amount. Then, the inclination measuring device 100 calculates the rotation angle of the measuring jig 1 in the third rotation direction DR3 as the third rotation angle of the movable body 201 from the measurement results of the third displacement meter 23 and the fourth displacement meter 24. can. The method of calculating the third rotation angle of the measuring jig 1 will be described later.

The above-mentioned first and second time points may be the same as the above-mentioned third and fourth time points, respectively. And / or the above-mentioned first and second time points may be the same as the above-mentioned fifth and sixth time points, respectively. And / or the above-mentioned third and fourth time points may be the same as the above-mentioned fifth and sixth time points, respectively. Alternatively, the first and second time points described above may be different from the third and fourth time points described above and the third and fourth time points described above, respectively.

That is, the inclination measuring device 100 can simultaneously measure the rotation angle of the measuring jig 1 in at least two of the first rotation direction DR1, the second rotation direction DR2, and the third rotation direction DR3. Further, the tilt measuring device 100 can individually measure the rotation angles of the measuring jig 1 in the first rotation direction DR1, the second rotation direction DR2, and the third rotation direction DR3.

<1-2. Base of measuring jig>
Next, a detailed configuration of the measuring jig 1 will be described with reference to FIGS. 3 and 4A to 4E. FIG. 3 is a perspective view showing a configuration example of the base portion 12. FIG. 4A is a perspective view showing a first modification of the base portion 12a. FIG. 4B is a perspective view showing a second modification of the base portion 12b. FIG. 4C is a perspective view showing a third modification example of the base portion 12c. FIG. 4D is a perspective view showing a fourth modified example of the base portion 12d. FIG. 4E is a perspective view showing a fifth modification of the base portion 12e. It should be noted that FIGS. 3 and 4A to 4E correspond to, for example, an enlarged view of the vicinity of the base portion 12 in the perspective view of FIG. In FIGS. 3 and 4A to 4E, the measuring jig 1 is in a stationary state.

As shown in FIG. 3, the base portion 12 of the present embodiment has a frustum shape. By doing so, the size of the pedestal portion 12 in the first direction D1 can be reduced as compared with the case where the pedestal portion 12a has a cone shape as shown in FIG. 4A, for example. Therefore, when the measuring jig 1 rotates about a predetermined rotation axis, the centrifugal force acting on the base 12 can be made smaller, so that the measuring jig 1 moves outward in the radial direction with respect to the rotation axis. It becomes difficult to shift. Further, when the measuring jig 1 is greatly rotated, it is possible to suppress or prevent the tip portion of the base portion 12 in the first direction D1 from blocking at least a part of the laser beam 20 of the displacement meter 2 other than the first displacement meter 21. .. However, this example does not exclude the configuration in which the base portion 12a has a cone shape, as shown in FIG. 4A, for example.

Further, the base portion 12 is separated from the first axis A1 in the radial direction with respect to the first axis A1. That is, the radial inner end portion of the base portion 12 is separated from the first axis A1. By doing so, the volume of the base portion 12 can be reduced as compared with the configuration in which the radial inner end portion of the base portion 12b is in contact with the first axis A1 as shown in FIG. 4B, for example. Therefore, when the measuring jig 1 rotates about a predetermined rotation axis, the centrifugal force acting on the base 12 can be made smaller, so that the measuring jig 1 moves outward in the radial direction with respect to the rotation axis. It becomes difficult to shift.

However, the present invention is not limited to this example, and the radial inner end portion of the base portion 12b may be in contact with the first axis A1 as shown in FIG. 4B, for example. In this way, the base portion 12b can be arranged with the first axis A1 as a reference. Therefore, since the base portion 12b can be easily arranged on the flat surface 11, the measuring jig 1 can be easily manufactured.

Alternatively, a part of the base portion 12 may be arranged on at least a part of the second region 112 to the fourth region 114, and the first axis A1 may pass through the base portion 12.

Preferably, the base 12 is hollow. For example, as shown in FIG. 4C, the base portion 12c may have a plate member 121 having a slope 120c and a pillar portion 122 supporting the plate member 121. By doing so, the weight of the base portion 12c can be reduced. Therefore, when the measuring jig 1 rotates about a predetermined rotation axis, the centrifugal force acting on the base portion 12c can be made smaller, so that the measuring jig 1 moves outward in the radial direction with respect to the rotation axis. It becomes difficult to shift. Therefore, the inclination measuring device 100 can measure the inclination of the movable body 201 more accurately.

Next, the slope 120 faces outward in the radial direction with respect to the first axis A1. By doing so, the arrangement position of the base portion 12 can be brought closer to the first axis A1 passing through the swing center CP, so that when the measuring jig 1 rotates in the first rotation direction DR1, the centrifugal force is applied to the base portion 12. Even if it acts, the measuring jig 1 is less likely to shift outward in the radial direction with respect to the first axis A1. Therefore, the accuracy of measuring the inclination of the measuring jig 1 can be improved.

However, the slope 120 does not have to face outward in the radial direction without being limited to the above example. For example, as shown in FIG. 4D, the slope 120d may face inward in the radial direction with respect to the first axis A1. In the radial direction with respect to the first axis A1, the one end portion in the first direction of the slope 120d may be radially inward from the other end portion in the first direction of the slope 120d. In FIG. 4D, the radial outer end portion of the base portion 12d with respect to the first axis A1 may be arranged on the outer peripheral edge portion of the measuring jig 1 when viewed from the first direction D1. Further, when viewed from the first direction D1, one end in the second direction and / or one end in the third direction with respect to the first axis A1 of the base portion 12d are arranged on the outer peripheral edge of the measuring jig 1. You may. By doing so, the base portion 12d can be arranged with the outer peripheral edge portion of the measuring jig 1 as a reference. Therefore, the base portion 12d can be easily arranged.

Further, in the radial direction with respect to the first axis A1, the one end portion in the first direction of the slope 120 is radially outer than the other end portion in the first direction of the slope 120. When viewed from the first direction, the first irradiation position P1 of the laser beam 20 of the first displacement meter 21 is between one end of the slope 120 in the first direction and the other end of the first direction. For example, in FIGS. 3 and 4A to 4C, the first irradiation position P1 is a radial inward position or the same radial position from the end portion in the first direction of the slopes 120, 120a, 120b, 120c, while D1a. Further, the first irradiation position P1 is radially outward from the end portion of the slope 120, 120a, 120b, 120c in the first direction and the other D1b, or at the same radial position. Further, in FIG. 4D, the first irradiation position P1 is radially outward from the end portion in the first direction of the slope 120d, while D1a, or is the same radial position. Further, the first irradiation position P1 is radially inward from the end portion of the slope 120d in the first direction and the other D1b, or at the same radial position. By doing so, it is possible to prevent the first irradiation position P1 from deviating from the slope 120 when the measuring jig 1 rotates in the first rotation direction DR1.

Preferably, the slope 120 extends from the plane 11. For example, one end of the slope 120 in the first direction is connected to the plane 11. Seen from the first direction D1, the first irradiation position P1 in a state where the measuring jig 1 is stationary overlaps with the connecting portion 123 between one end of the slope 120 in the first direction and the plane 11. The one end of the slope 120 in the first direction is the end of the slope 120 on the plane 11 side in the first direction D1. In this way, the first irradiation position P1 when the measuring jig 1 is stationary can be used as a reference for the displacement measured by the first displacement meter 21. Therefore, it becomes easy to calculate the rotation angle of the measuring jig 1 in the first rotation direction DR1. It should be noted that the above example does not exclude the configuration in which the slope 120 does not extend from the plane 11. For example, one end of the slope 120 in particular in the first direction may be separated from the plane 11 by the other D1b in the first direction.

Preferably, the first slope direction Ds1 of the slope 120 is perpendicular to the fourth direction D4. The fourth direction D4 is one of the radial directions with respect to the first axis A1 and is parallel to the plane 11. The fourth direction D4 is perpendicular to the first axis A1. Further, the fourth direction D4 goes from the first axis A1 to the first irradiation position P1 in a state where the measuring jig 1 is stationary. This makes it easier to calculate the rotation angle of the measuring jig 1 in the first rotation direction DR1. For example, when the slopes 120, 120a, 120b, 120c face radially outward as shown in FIGS. 3 and 4A to 4C, no matter which side of the first rotation direction DR1 the measuring jig 1 rotates, the first 1 The irradiation position P1 is displaced in the first direction D1 to the other D1b in the first direction away from the plane 11. Alternatively, when the slope 120d faces inward in the radial direction as shown in FIG. 4D (see FIG. 5 described later), the first irradiation position regardless of which side of the first rotation direction DR1 the measuring jig 1 rotates. P1 is displaced in the first direction D1 toward D1a in the first direction approaching the plane 11. Therefore, regardless of which side of the first rotation direction DR1 the measuring jig 1 is rotated, the first irradiation position P1 is displaced to the same side of the first direction D1. The rotation angle in one rotation direction DR1 can be calculated.

In addition, as shown in FIG. 4E, for example, the slope 120e may face the first rotation direction DR1 with respect to the first axis A1. In FIG. 4E, the first slope direction Ds1 is perpendicular to the first direction D1 and diagonally intersects the radial direction with respect to the first axis A1. Further, the first slope direction Ds1 may be parallel to the third direction D3 as shown in FIG. 4E. The second slope direction Ds2 is perpendicular to the first slope direction Ds1 and diagonally intersects the first slope direction D1. By doing so, it is possible to detect in which direction the measuring jig 1 is rotated in the first rotation direction DR1 from the direction of the displacement of the first irradiation position P1 in the first direction D1. For example, in FIG. 4E, when the measuring jig 1 rotates in the direction from the first region 111 to the second region 112 in the first rotation direction DR1, the first irradiation position P1 is displaced to one D1a in the first direction. .. Further, when the measuring jig 1 rotates in the direction from the first region 111 to the third region 113 in the first rotation direction DR1, the first irradiation position P1 is displaced to the other D1b in the first direction. Therefore, the direction of rotation of the measuring jig 1 in the first rotation direction DR1 can be detected from the measurement result of the first displacement meter 21.

In FIG. 4E, the region of the slope 120e on the D3a side in the third direction is arranged on the D1a in the first direction rather than the plane 11, that is, is arranged on the inner surface of the recess 13 recessed in the D1a in the first direction. .. The measuring jig 1 has a recess 13. The recess 13 is arranged in the first region 111 of the plane 11. Further, the region of the slope 120e on the other D3b side in the third direction is arranged on the other D1b in the first direction rather than the plane 11, that is, arranged on the base portion 12 protruding from the plane 11 to the other D1b in the first direction in the first region 111. Will be done.

<1-3. Rotation angle of measuring jig>
Next, an example of calculating the rotation angle of the measuring jig will be described.

<1-3-1. First rotation angle in the first rotation direction>
First, a calculation example of the first rotation angle of the measuring jig 1 will be described with reference to FIGS. 5 and 6. FIG. 5 is a top view of the vicinity of the slope 120 of the measuring jig 1 rotated in the first rotation direction DR1. FIG. 6 is a conceptual diagram showing the positional relationship of the first irradiation position P1 after rotation. In addition, in FIGS. 5 and 6, "measurement jig 1A", "plane 11A", "base 12A", and "slope 120A" are the measurement jig 1, plane 11, base 12, and before rotation, respectively. The slope 120, and the “measurement jig 1B”, the “plane 11B”, the “base 12B”, and the “slope 120B” are the measurement jig 1, the plane 11, the base 12, and the slope 120 after rotation, respectively. .. Further, in the following, the first irradiation position P1 before rotation may be referred to as “first irradiation position P1a”, and the first irradiation position P1 after rotation may be referred to as “first irradiation position P1b”.

In FIGS. 5 and 6, the point O is the intersection of the first axis A1 and the plane 11. The two virtual lines extending from the point O are called Lx and Ly. The virtual lines Lx and Ly are included in the virtual plane including the plane 11. The virtual line Lx before rotation extends to D2a in the second direction, and the virtual line Ly before rotation extends to D3a in the third direction. Further, when viewed from the first direction D1, the minimum angle formed by the rotated virtual line Lx with the second direction D2 and the minimum angle formed by the rotated virtual line Ly with the third direction D3 are described later. One rotation angle θ1. Further, the virtual plane including the first axis A1 and the virtual line Lx is called PL. The intersection of the virtual plane including the slope 120A and the first axis A1 is called a point A, and the intersection of the virtual plane including the rotated slope 120A and the rotated virtual line Lx is called a point B.

In FIGS. 5 and 6, the measuring jig 1 rotates in the direction from the first irradiation position P1 in the first rotation direction DR1 to the virtual line Lx. The first rotation angle of the measuring jig 1 in the first rotation direction DR1 is θ1. Further, when viewed from the first direction D1, the distance between the first irradiation position P1a before rotation and the virtual line Lx before rotation, and the first irradiation position P1a before rotation and the virtual line Ly before rotation. The intervals between them are both a. The minimum angle formed by the plane 11 and the slope 120 is 45 °. Further, before the rotation, the first irradiation position P1 is in the fourth direction D4 from the first axis A1. That is, before rotation, the minimum angle formed by the line passing through the first irradiation position P1 and the point O and the virtual plane PL is 45 °.

When the measuring jig 1 rotates in the first rotation direction DR1 as described above, the first irradiation position P1 is displaced in the first direction D1. Since the position of the laser beam 20 of the first displacement meter 21 does not change, the first irradiation position P1 does not displace in the second direction D2 and the third direction D3.

The first rotation angle θ1 can be calculated from the displacement Δd1 in the first direction D1 of the first irradiation position P1 detected by the first displacement meter 21. The calculation method will be described below.

First, a perpendicular line is extended from the first irradiation position P1b after rotation to the virtual plane PL after rotation, and the intersection of this perpendicular line and the virtual plane PL after rotation is called a point C. Further, a perpendicular line is extended from the point C to the first axis A1, and the intersection of this perpendicular line and the first axis A1 is referred to as a point D. A figure having three points P1b, C, and D as vertices is a right triangle. The minimum angle formed by the line segment connecting the first irradiation position P1b and the point C after rotation and the line segment connecting the first irradiation position P1b and the point D after rotation is (45 ° -θ). .. Here, the distance between the first irradiation position P1b after rotation and the first axis A1 is (√2 × a), which is the same as the distance between the first irradiation position P1a and the first axis A1 before rotation. Therefore, the length of the line segment CD connecting the points C and D is {(√2 × a) sin (45 ° −θ1)}. Further, since the figure having the three points A, C, and D as vertices is an isosceles right triangle, the length of the line segment AD connecting the points A and D is {(√2 ×), which is the same as the line segment CD. a) sin (45 ° -θ1)}.

On the other hand, the length of the line segment DO connecting the point D and the point O is the same as the displacement Δd1 of the first irradiation position P1 in the first direction D1. Therefore, the displacement Δd1 of the first irradiation position P1 in the first direction D1 is the difference from the length of the line segment AO connecting the points A and O to the length of the line segment AD, and can be expressed by the following mathematical formula 1. can.
Δd1 = {a- (√2 × a) sin (45 ° -θ1)} (Equation 1)

By modifying the formula 1, the following formula 2 is obtained.
θ1 = [45 ° -sin ^-1 {(Δd1-a) / (√2 × a)}] (Equation 2)

The displacement Δd1 of the first irradiation position P1 in the first direction D1 can be detected from the difference between the first direction position of the first irradiation position P1a before rotation and the first direction position of the first irradiation position P1b after rotation. Therefore, the first rotation angle θ1 can be calculated from the above-mentioned mathematical formula 2.

<1-3-2. Second rotation angle in the second rotation direction>
Next, an example of calculating the second rotation angle of the measuring jig 1 will be described with reference to FIG. 7. FIG. 7 is a side view of the measuring jig 1 rotated in the second rotation direction DR2 as viewed from the second direction D2. In FIG. 7, the alternate long and short dash line indicates the plane 11 of the measuring jig 1 after rotation. In FIG. 7, the second rotation angle of the measuring jig 1 in the second rotation direction DR2 is θ2. Further, in the third direction D3, the distance between the second irradiation position P2 and the third irradiation position P3 is L2.

Further, in FIG. 7, the plane 11 before rotation is referred to as "plane 11a", and the plane 11 after rotation is referred to as "plane 11b". Further, the second irradiation position P2 before rotation may be referred to as "second irradiation position P2a", and the second irradiation position P2 after rotation may be referred to as "second irradiation position P2b". Further, the third irradiation position P3 before rotation may be referred to as "third irradiation position P3a", and the third irradiation position P3 after rotation may be referred to as "third irradiation position P3b".

When the measuring jig 1 is tilted in the second rotation direction DR2, the second irradiation position is determined by the difference between the first direction position of the second irradiation position P2a before rotation and the first direction position of the second irradiation position P2b after rotation. It can be detected that P2 is displaced by Δd2a to D1a in one of the first directions, for example. Further, the third irradiation position P3 is displaced by Δd3b to, for example, the other D1b in the first direction due to the difference between the first direction position of the third irradiation position P3a before rotation and the first direction position of the third irradiation position P3b after rotation. Can be detected. Since the positions of the laser beam 20 of the second displacement meter 22 and the third displacement meter 23 do not change, the second irradiation position P2 and the third irradiation position P3 do not displace in the second direction D2 and the third direction D3. ..

Therefore, the second rotation angle θ2 can be calculated from the following mathematical formula 3.
θ2 = tan ^-1 {(Δd2a + Δd2b) / L2} (number 3)

<1-3-3. Third rotation angle in the third rotation direction>
Next, an example of calculating the third rotation angle of the measuring jig 1 will be described with reference to FIG. FIG. 8 is a side view of the measuring jig 1 rotated in the third rotation direction DR3 as viewed from the third direction D3. In FIG. 8, the alternate long and short dash line indicates the plane 11 of the measuring jig 1 after rotation. In FIG. 8, the third rotation angle of the measuring jig 1 in the third rotation direction DR3 is θ3. Further, the distance between the third irradiation position P3 and the fourth irradiation position P4 in the second direction D2 is L3.

Further, in FIG. 8, the plane 11 before rotation is referred to as "plane 11a", and the plane 11 after rotation is referred to as "plane 11b". Further, the third irradiation position P3 before rotation may be referred to as "third irradiation position P3a", and the third irradiation position P3 after rotation may be referred to as "third irradiation position P3b". Further, the fourth irradiation position P4 before rotation may be referred to as "fourth irradiation position P4a", and the fourth irradiation position P4 after rotation may be referred to as "fourth irradiation position P4b".

When the measuring jig 1 is tilted in the third rotation direction DR3, the third irradiation position is obtained from the difference between the first direction position of the third irradiation position P3a before rotation and the first direction position of the third irradiation position P3b after rotation. It can be detected that P3 is displaced by Δd3a to D1a in one of the first directions, for example. Further, the fourth irradiation position P4 is displaced by Δd3b to, for example, the other D1b in the first direction due to the difference between the first direction position of the fourth irradiation position P4a before rotation and the first direction position of the fourth irradiation position P4b after rotation. Can be detected. Since the positions of the laser beam 20 of the third displacement meter 23 and the fourth displacement meter 24 do not change, the third irradiation position P3 and the fourth irradiation position P4 do not displace in the second direction D2 and the third direction D3. ..

Therefore, the third rotation angle θ3 can be calculated from the following mathematical formula 4.
θ3 = tan ^-1 {(Δd3a + Δd3b) / L3} (number 4)

<1-4. Inclination measurement method>
Next, with reference to FIG. 9, a tilt measuring method for measuring the tilt of the swingable movable body 201 will be described. FIG. 9 is a flowchart for explaining a method of measuring the inclination of the measuring jig 1. The inclination measuring method described below is carried out by using the inclination measuring device 100. For example, the measuring jig 1 is held by the movable body 201 and can swing together with the movable body 201. In the inclination measuring method, the displacement of the measuring jig 1 is measured by the displacement meter 2 that irradiates the measuring jig 1 with the laser beam 20. Then, the inclination of the movable body 201 is calculated based on the measurement result of the displacement.

In the following, the "reference state" of the movable body 201 means a state in which the movable body 201 is not rotated in the first rotation direction DR1, the second rotation direction DR2, and the third rotation direction DR3. That is, the rotation angles of the movable body 201 in the reference state in the first rotation direction DR1, the second rotation direction DR2, and the third rotation direction DR3 are all 0 °.

The measuring jig 1 is attached to the movable body 201 of the optical unit 200 (step S101), and the optical unit 200 is attached to the tilt measuring device 100 (step 102). At this time, when the movable body 201 is stationary, the normal direction of the plane 11 of the measuring jig 1 is parallel to the optical axis of the optical module to be mounted on the movable body 201. The swing center CP of the movable body 201 on which the measuring jig 1 is mounted is set to the same position as the swing center of the movable body 201 when the optical module is mounted. The term "same position" as used herein includes a state in which the positional relationship between the two is deviated to the extent that the gist of the present invention is not deviated.

Next, the first displacement meter 21 detects the position of the first irradiation position P1 before rotation in the first direction D1 (step S111). The drive mechanism 202 rotates the movable body 201 in the first rotation direction DR1 together with the measuring jig 1, and then stops the movable body 201 (step S112). The first displacement meter 21 detects the position of the first irradiation position P1 after rotation in the first direction D1 (step S113).

The calculation unit 41 calculates the inclination of the movable body 201 in the first rotation direction DR1 based on the measurement results of the first displacement meter 21 before and after rotation (step S114). Specifically, the calculation unit 41 displaces the first irradiation position P1 in the first direction D1 based on the measurement result of the first displacement meter 21 in step S111 and the measurement result of the first displacement meter 21 in step S113. Calculate the amount. Further, the calculation unit 41 calculates the first rotation angle θ1 of the measuring jig 1 in the first rotation direction DR1 from the calculated displacement amount. The calculated first rotation angle θ1 is the inclination of the movable body 201 in the first rotation direction DR1.

After that, the drive mechanism 202 releases the tilt of the movable body 201 in the first rotation direction DR1 and returns the movable body 201 from the state tilted in the first rotation direction DR1 to the reference state (step S115).

Next, the second displacement meter 22 and the third displacement meter 23 detect the positions of the second irradiation position P2 and the third irradiation position P3 before rotation in the first direction D1 (step S121), respectively. The drive mechanism 202 rotates the movable body 201 in the second rotation direction DR2 together with the measuring jig 1, and then stops the movable body 201 (step S122). The second displacement meter 22 and the third displacement meter 23 detect the positions of the second irradiation position P2 and the third irradiation position P3 after rotation in the first direction D1, respectively (step S123).

The calculation unit 41 calculates the inclination of the movable body 201 in the second rotation direction DR2 based on the measurement results of the second displacement meter 22 and the third displacement meter 23 before and after rotation (step S124). Specifically, the calculation unit 41 is based on the measurement results of the second displacement meter 22 and the third displacement meter 23 in step S121 and the measurement results of the second displacement meter 22 and the third displacement meter 23 in step S123. The displacement amount of the second irradiation position P2 in the first direction D1 and the displacement amount of the third irradiation position P3 in the first direction D1 are calculated. Further, the calculation unit 41 calculates the second rotation angle θ2 of the measuring jig 1 in the second rotation direction DR2 from the calculated displacement amount. The calculated second rotation angle θ2 is the inclination of the movable body 201 in the second rotation direction DR2.

After that, the drive mechanism 202 releases the tilt of the movable body 201 in the second rotation direction DR2, and returns the movable body 201 from the state tilted in the second rotation direction DR2 to the reference state (step S125).

Next, the third displacement meter 23 and the fourth displacement meter 24 detect the positions of the third irradiation position P3 and the fourth irradiation position P4 before rotation in the first direction D1 (step S131), respectively. The drive mechanism 202 rotates the movable body 201 in the third rotation direction DR3 together with the measuring jig 1 and then stops the movable body 201 (step S132). The third displacement meter 23 and the fourth displacement meter 24 detect the positions of the third irradiation position P3 and the fourth irradiation position P4 after rotation in the first direction D1 (step S133), respectively.

The calculation unit 41 calculates the inclination of the movable body 201 in the third rotation direction DR3 based on the measurement results of the third displacement meter 23 and the fourth displacement meter 24 before and after rotation (step S134). Specifically, the calculation unit 41 is based on the measurement results of the third displacement meter 23 and the fourth displacement meter 24 in step S131 and the measurement results of the third displacement meter 23 and the fourth displacement meter 24 in step S133. The displacement amount of the third irradiation position P3 in the first direction D1 and the displacement amount of the fourth irradiation position P4 in the first direction D1 are calculated. Further, the calculation unit 41 calculates the third rotation angle θ3 of the measuring jig 1 in the third rotation direction DR3 from the calculated displacement amount. The calculated third rotation angle θ3 is the inclination of the movable body 201 in the third rotation direction DR3.

After that, the drive mechanism 202 releases the tilt of the movable body 201 in the third rotation direction DR3, and returns the movable body 201 from the state tilted in the third rotation direction DR3 to the reference state (step S135).

Next, the optical unit 200 is removed from the tilt measuring device 100 (step S141), and the measuring jig 1 is removed from the movable body 201 of the optical unit 200 (step S142). Then, the inclination measurement method ends.

In the inclination measuring method of FIG. 9, the order of steps S111 to S115, steps S121 to S125, and steps S131 to S135 may be interchanged with each other.

Further, in the inclination measuring method of FIG. 9, the inclination of the movable body 201 in the first rotation direction DR1, the second rotation direction DR2, and the third rotation direction DR3 was independently measured. However, the present invention is not limited to this example, and the inclination of the movable body 201 rotated in at least two of the first rotation direction DR1, the second rotation direction DR2, and the third rotation direction DR3 may be measured at one time.

According to the above-mentioned inclination measuring method, the step of measuring the displacement of the measuring jig 1 with the displacement meter 2 is the first displacement meter 21 that irradiates the laser beam 20 toward the slope 120 on the slope 120 of the laser beam 20. It has a step of measuring the displacement of the first irradiation position P1 in the first direction D1 in the above. When the measuring jig 1 swings together with the movable body 201 to rotate in the first rotation direction DR1, the first irradiation position P1 of the laser beam 20 emitted from the first displacement meter 21 is displaced in the first direction D1. .. Therefore, the rotation angle of the measuring jig 1 in the first rotation direction DR1 can be calculated as the first rotation angle θ1 of the movable body 201 based on the result of the first displacement meter 21 measuring the displacement of the first irradiation position P1. That is, the measurement for obtaining the first rotation angle θ1 of the measurement jig 1 in the first rotation direction DR1 can be performed by one first displacement meter 21. Therefore, as compared with the normal configuration in which the first rotation angle θ1 of the measuring jig 1 in the first rotation direction DR1 is measured from the measurement results of the plurality of displacement meters, the increase of the displacement meter 2 is suppressed and the configuration is simpler. The inclination of the movable body 201 can be measured with.

<2. Others>
The embodiment of the present invention has been described above. The scope of the present invention is not limited to the above-described embodiment. The present invention can be implemented by making various modifications to the above-described embodiments without departing from the gist of the invention. In addition, the matters described in the above-described embodiments can be arbitrarily combined as long as they do not cause a contradiction.

For example, the configurations shown in FIGS. 3 and 4A to 4E can be arbitrarily combined as long as there is no particular contradiction.

The present invention is useful for a device and a method for measuring the rotation angle of a measurement target.

100 ... tilt measuring device, 200 ... optical unit, 201 ... movable body, 202 ... drive mechanism, 203 ... holder, 1 ... measuring jig, 11, 11a, 11b ... Plane, 111 ... 1st region, 112 ... 2nd region, 113 ... 3rd region, 114 ... 4th region, 12, 12a, 12b, 12c, 12d ... base, 120, 120a, 120b, 120c, 120d ... slope, 121 ... plate member, 122 ... pillar part, 123 ... connection part, 13 ..., recess, 2 ... displacement meter, 20 ... laser beam, 21 ... 1st displacement meter, 22 ... 2nd displacement meter, 23 ... 3rd displacement meter, 24 ... 4th displacement meter, 3 ... storage unit, 4 ... Control unit, 41 ... Calculation unit, CP ... Swing center, P1, P1a, P1b ... First irradiation position, P2, P2a, P2b ... Second irradiation position, P3, P3a , P3b ... 3rd irradiation position, P4, P4a, P4b ... 4th irradiation position, A1 ... 1st axis, A2 ... 2nd axis, A3 ... 3rd axis, D1 ... 1st direction, D1a ... 1st direction one, D1b ... 1st direction other, D2 ... 2nd direction, D2a ... 2nd direction one, D1b ... 2nd direction other, D3 ... 3rd direction, D1a ... 3rd direction one, D1b ... 3rd direction the other, D4 ... 4th direction, DR1 ... 1st rotation direction, DR2 ... 2nd rotation direction , DR3 ... 3rd rotation direction, Ds1 ... 1st slope direction, Ds2 ... 2nd slope direction

Claims (12)

1. It is a tilt measuring device that measures the tilt of a movable body that can swing.
   A measuring jig that is held by the movable body and can swing together with the movable body,
   The measuring jig is provided with a displacement meter that irradiates the measuring jig with a laser beam to measure the displacement of the measuring jig.
   The measuring jig has a flat surface and a base portion arranged on the flat surface.
   The plane in a stationary state of the measuring jig is perpendicular to the first axis extending in the first direction through the swing center of the measuring jig.
   The pedestal has a slope extending in the first slope direction and the second slope direction.
   The first slope direction is perpendicular to the first direction and intersects the radial direction with respect to the first axis.
   The second slope direction is perpendicular to the first slope direction and diagonally intersects with the first slope direction.
   The displacement meter has a first displacement meter that irradiates the laser beam toward the slope.
   The first displacement meter is a tilt measuring device that measures the displacement of the first irradiation position of the laser beam on the slope in the first direction.
2. A calculation unit for calculating the inclination of the measuring jig based on the measurement result of the displacement meter is provided.
   The calculation unit
   The first irradiation position is based on the first measurement result of the first displacement meter at a predetermined first time point and the second measurement result of the first displacement meter at the second time point after the first time point. While calculating the amount of displacement in the first direction of
   The inclination measuring device according to claim 1, wherein the rotation angle of the measuring jig in the first rotation direction is calculated from the displacement amount.
3. The inclination measuring device according to claim 1 or 2, wherein the slope faces outward in the radial direction with respect to the first axis.
4. The end of the slope on the plane side in the first direction is connected to the plane.
   The first irradiation position when the measuring jig is stationary when viewed from the first direction overlaps with the end portion of the slope on the plane side in the first direction and the connection portion between the planes. 3. The tilt measuring device according to 3.
5. The first slope direction is perpendicular to the fourth direction, and is
   One of claims 1 to 4, wherein the fourth direction is perpendicular to the first axis and is directed from the first axis toward the first irradiation position in a state where the measuring jig is stationary. The tilt measuring device described in.
6. The end of the slope in one of the first directions is radially outward of the end of the slope in the other of the first direction.
   When viewed from the first direction, the first irradiation position is
   It is inward in the radial direction from the end of the slope in one of the first directions, or at the same radial position.
   The inclination measuring device according to any one of claims 1 to 5, which is radially outward from the other end of the slope in the first direction or at the same radial position.
7. The inclination measuring device according to any one of claims 1 to 6, wherein the base portion has a frustum shape.
8. The inclination measuring device according to any one of claims 1 to 7, wherein the base portion is hollow.
9. The displacement meter is
   A second displacement meter that irradiates the laser beam toward the plane and measures the displacement of the second irradiation position of the laser beam on the plane in the first direction.
   A third displacement meter that irradiates the laser beam toward the plane and measures the displacement of the third irradiation position of the laser beam on the plane in the first direction.
   A fourth displacement meter that irradiates the laser beam toward the plane and measures the displacement of the fourth irradiation position of the laser beam on the plane in the first direction.
   Have more
   In the plane
   The second irradiation position and the third irradiation position are arranged in a second direction perpendicular to the first direction.
   The inclination according to any one of claims 1 to 8, wherein the third irradiation position and the fourth irradiation position are arranged in a third direction perpendicular to the first direction and intersecting the second direction. Measuring device.
10. The plane is
    The first region on one side in the second direction and one side in the third direction,
    The second region on one side in the second direction and the other side in the third direction,
    The third region on the other side of the second direction and the other side of the third direction,
    The fourth region on the other side of the second direction and on the other side of the third direction,
    Including
    The pedestal is arranged in the first region.
    The laser beam of the second displacement meter is applied to the second region.
    The laser beam of the third displacement meter is applied to the third region.
    The tilt measuring device according to claim 9, wherein the laser beam of the fourth displacement meter irradiates the fourth region.
11. The first displacement meter, the second displacement meter, the third displacement meter, and the fourth displacement meter are all included.
    The inclination measuring device according to claim 9 or 10, wherein the laser beam is irradiated along the first direction.
12. It is a tilt measurement method that measures the tilt of a movable body that can swing.
    A displacement meter that irradiates a measuring jig that is held by the movable body and swings together with the movable body with a laser beam is provided with a step of measuring the displacement of the measuring jig.
    The measuring jig has a flat surface and a base portion arranged on the flat surface.
    The plane in a stationary state of the measuring jig is perpendicular to the first axis extending in the first direction through the swing center of the measuring jig.
    The pedestal has a slope extending in the first slope direction and the second slope direction.
    The first slope direction is perpendicular to the first direction and intersects the radial direction with respect to the first axis.
    The second slope direction is perpendicular to the first slope direction and diagonally intersects with the first slope direction.
    The measurement step is a first displacement meter that irradiates the laser beam toward the slope.
    A tilt measuring method comprising a step of measuring the displacement of the first irradiation position on the slope of the laser beam in the first direction.

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